Physical quantity sensor and inertial measurement unit

Abstract

To provide a physical quantity sensor that can further improve detection accuracy by suppressing cross-axis sensitivity.SOLUTION: The embodiment relates to a physical quantity sensor 1 that detects physical quantities in a first direction DR1 and a second direction DR2 which are in-plane directions and perpendicular to each other. The physical quantity sensor 1 includes: a substrate 10; a first fixed electrode supporting portion 113; a first fixed electrode portion 110; a first movable electrode portion 210; a second fixed electrode supporting portion 123; a second movable electrode portion 220; and a first movable electrode supporting portion 313. The first movable electrode supporting portion 313 is fixed to the substrate 10 at a movable electrode fixing portion 301, extends in a first intersecting direction DR11 intersecting the first direction DR1 and the second direction DR2, and supports the first movable electrode portion 210 and the second movable electrode portion 220 via a first spring 317.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a physical quantity sensor, an inertial measurement unit, and the like. [Background technology]

[0002] There is known a physical quantity sensor that changes the gap between a movable electrode portion and a fixed electrode portion included in a movable body and detects a physical quantity such as acceleration based on the amount of change in capacitance. Patent Document 1 discloses a method for detecting physical quantities along two axes corresponding to the surface of a substrate by swinging the movable body in a direction parallel to the surface of the substrate to which the movable body is connected. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-125842 Summary of the Invention [Problem to be solved by the invention]

[0004] In a physical quantity sensor that detects physical quantities on two axes, a phenomenon may occur in which the detection unit that detects the physical quantity on one axis detects the physical quantity on the other axis (called cross-axis sensitivity), resulting in a deterioration in detection accuracy. Therefore, it is desirable to develop a physical quantity sensor that can further improve detection accuracy. [Means for solving the problem]

[0005] One aspect of the present disclosure provides a physical quantity sensor for detecting physical quantities in a first direction and a second direction, which are in-plane directions and perpendicular to each other, comprising: a substrate; a first fixed electrode support part fixed to the substrate at a first fixed electrode fixing part and extending in the first direction; a first fixed electrode part having a first fixed electrode extending from the first fixed electrode support part in the second direction and in a fourth direction that is an opposite direction to the second direction; a first movable electrode part having a first movable electrode extending in the second direction and the fourth direction and facing the first fixed electrode; The present invention relates to a physical quantity sensor including: a second fixed electrode support portion extending in two directions; a second fixed electrode portion having a second fixed electrode extending from the second fixed electrode support portion in the first direction and a third direction that is the opposite direction to the first direction; a second movable electrode portion having a second movable electrode extending in the first direction and the third direction and facing the second fixed electrode; and a first movable electrode support portion fixed to the substrate at the movable electrode fixing portion, extending in a first intersecting direction that intersects the first direction and the second direction, and supporting the first movable electrode portion and the second movable electrode portion via a first spring.

[0006] Another aspect of the present disclosure relates to an inertial measurement unit including the above-described physical quantity sensor and a control unit that performs control based on a detection signal output from the physical quantity sensor. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a plan view illustrating an example of a physical quantity sensor. [Figure 2] 3A and 3B are diagrams illustrating examples of operation modes of a physical quantity sensor. [Figure 3] 3A and 3B are diagrams illustrating examples of first and second fixed electrode portions and first and second movable electrode portions. [Figure 4] FIG. 3 is a diagram illustrating a first movable electrode support portion and the like. [Figure 5] 5A and 5B are diagrams illustrating examples of the length of a first fixed electrode provided in a first fixed electrode portion. [Figure 6] 6A to 6C are diagrams illustrating examples of third and fourth fixed electrode portions and third and fourth movable electrode portions. [Figure 7] 5A to 5C are diagrams illustrating examples of second and third movable electrode supporting portions. [Figure 8] 10A and 10B are diagrams illustrating an example of a fourth movable electrode support portion. [Figure 9] 10A and 10B are diagrams illustrating another example of the first fixed electrode portion and the first movable electrode portion. [Figure 10] 10A and 10B are diagrams illustrating another example of the first fixed electrode portion and the first movable electrode portion. [Figure 11] 10A and 10B are diagrams illustrating another example of the first fixed electrode portion and the first movable electrode portion. [Figure 12] 10A and 10B are diagrams illustrating another example of the first fixed electrode portion and the first movable electrode portion. [Figure 13] 10A and 10B are diagrams illustrating another example of the third fixed electrode portion and the third movable electrode portion. [Figure 14] FIG. 10 is a plan view illustrating another example of a physical quantity sensor. [Figure 15] FIG. 10 is a plan view illustrating another example of a physical quantity sensor. [Figure 16] FIG. 10 is a plan view illustrating another example of a physical quantity sensor. [Figure 17] FIG. 10 is a plan view illustrating another example of a physical quantity sensor. [Figure 18] FIG. 18 is a diagram illustrating the E-E cross section of FIG. [Figure 19] FIG. 10 is a plan view illustrating another example of a physical quantity sensor. [Figure 20] FIG. 1 is an exploded perspective view showing a schematic configuration of an inertial measurement unit including a physical quantity sensor. [Figure 21] FIG. 1 is a perspective view of a circuit board of a physical quantity sensor. DETAILED DESCRIPTION OF THE INVENTION

[0008] Preferred embodiments of the present disclosure will be described in detail below. Note that the embodiments described below do not unduly limit the scope of the claims, and not all of the configurations described in the embodiments are necessarily essential components.

[0009] An example of the configuration of a physical quantity sensor 1 according to this embodiment will be described. FIG. 1 is a schematic plan view of an example of the physical quantity sensor 1 according to this embodiment, as viewed in a direction perpendicular to the substrate 10. For ease of explanation, FIG. 1 illustrates two mutually perpendicular axes, the X-axis and the Y-axis. The Z-axis, which is perpendicular to the X-axis and the Y-axis, is not shown. The mutually perpendicular directions are defined as a first direction DR1 and a second direction DR2, and the first direction DR1 and the second direction DR2 correspond to, for example, the +X-axis direction and the +Y-axis direction, respectively. In this embodiment, the direction opposite the first direction DR1 is defined as a third direction DR3, and the direction opposite the second direction DR2 is defined as a fourth direction DR4. That is, in FIG. 1, the third direction DR3 is, for example, the −X-axis direction, and the fourth direction DR4 is, for example, the −Y-axis direction. Note that the term “perpendicular” includes not only a case where the directions intersect at 90°, but also a case where the directions intersect at an angle slightly inclined from 90°. Furthermore, in the following, when there is no need to strictly distinguish between the + direction and the - direction, the "direction along the X axis" may be representatively referred to as the "direction along the first direction DR1," and the "direction along the Y axis" may be representatively referred to as the "direction along the second direction DR2." Note that the above-described correspondence between the first direction DR1 and the second direction DR2 and the X and Y axes is merely an example and is not limited to the above. The following description does not preclude the application of the method of this embodiment, for example, with the first direction DR1 as the Y axis.

[0010] In the physical quantity sensor 1 of FIG. 1, a frame-shaped movable body MB is connected to a substrate 10. Note that, although the movable body MB is illustrated as forming a single closed loop in the plan view of FIG. 1, in this embodiment, even if it has a partial opening, it can still be treated as a frame, as will be described in detail later with reference to FIG. 11 and other figures. Other configurations connected to the substrate 10 or the movable body MB will be described later with reference to FIGS. 3, 4, 6, 7, and 8. More specifically, the configuration shown in the dotted frame A1 of FIG. 1 corresponds to the configuration shown in the dotted frame A11 of FIG. 3 (described later), the configuration shown in the dotted frame A2 of FIG. 1 corresponds to the configuration shown in the dotted frame A12 of FIG. 3 (described later), and the configuration shown in the dotted frame B1 of FIG. 1 corresponds to the configuration shown in the dotted frame A11 of FIG. 4 (described later). The configuration shown in the dotted frame A3 of FIG. 1 corresponds to the configuration shown in the dotted frame A13 of FIG. 6 (described later), and the configuration shown in the dotted frame A4 of FIG. 1 corresponds to the configuration shown in the dotted frame A14 of FIG. 6 (described later). In addition, the configuration shown in the dotted frame B2 in Figure 1 corresponds to the configuration shown in B12 in Figure 7, which will be described later, the configuration shown in the dotted frame B3 in Figure 1 corresponds to the configuration shown in B13 in Figure 7, which will be described later, and the configuration shown in the dotted frame B4 in Figure 1 corresponds to the configuration shown in B14 in Figure 8, which will be described later.

[0011] Furthermore, to realize the method of this embodiment, all of the components shown in Fig. 1 are not essential, and some may be omitted. Specifically, for example, the components shown in A3, A4, B2, B3, and B4 in Fig. 1 may be omitted or modified as appropriate.

[0012] The substrate 10 may be, for example, a silicon substrate made of semiconductor silicon or a glass substrate made of a glass material such as borosilicate glass. However, the material of the substrate 10 is not particularly limited, and a quartz substrate or an SOI (Silicon On Insulator) substrate may also be used. In FIG. 1, a cavity may be formed in an area other than the predetermined area AR of the substrate 10, and a specific example will be described later in FIG. 18. The predetermined area AR is an area where the fixed electrode fixing portion, the movable electrode fixing portion 301, etc. are concentrated and connected to the substrate 10, as will be described later, and may also be called a fixing portion connection area. In FIG. 2 and subsequent figures, the predetermined area AR is omitted as appropriate (except in FIG. 18).

[0013] The physical quantity sensor 1 of this embodiment is, for example, an inertial sensor as a MEMS (Micro Electro Mechanical Systems) device, and detects physical quantities in a first direction DR1 and a second direction DR2. That is, the operation mode indicated by M10 in FIG. 2 is an operation mode in which the movable body MB and each component included in the movable body MB operate along the direction indicated by M11 or the direction indicated by M12. The direction indicated by M11 coincides with the direction along the first direction DR1, and the direction indicated by M12 coincides with the direction along the second direction DR2. This allows physical quantities in the first direction DR1 and the second direction DR2 to be detected by a method described below. Strictly speaking, the physical quantity sensor 1 may also operate in an operation mode indicated by M20 in FIG. 2, for example. The operation mode indicated by M20 corresponds to the operation of the movable body MB rotating around the axis indicated by M21 relative to a plane including the substrate 10, and can also be referred to as an in-plane rotation mode. However, the physical quantity sensor 1 of this embodiment is configured, by a method described below, so that the operation based on the operation mode indicated by M20 is negligibly small compared to the operation in the operation mode indicated by M10.

[0014] Note that, hereinafter, a case where the physical quantity detected by the physical quantity sensor 1 is acceleration will be mainly described as an example, but the physical quantity is not limited to acceleration and may be other physical quantities such as velocity, pressure, displacement, attitude, angular velocity, or gravity, and the physical quantity sensor 1 may be used as a pressure sensor or a MEMS switch, etc. Furthermore, in all of the drawings of this embodiment, the dimensions of each component, the spacing between components, etc. are shown schematically for the convenience of explanation and do not represent actual dimensions, spacing, etc. Furthermore, the physical quantity sensor 1 of this embodiment is illustrated with some components, such as electrodes and wiring, appropriately omitted.

[0015] 3, the physical quantity sensor 1 of this embodiment includes a first fixed electrode portion 110, a first movable electrode portion 210, and a first connecting portion 410. The first connecting portion 410 is configured as a part of the movable body MB, extends along the second direction DR2, and has the first movable electrode portion 210.

[0016] The first fixed electrode section 110 includes a first fixed electrode fixing section 111 fixed to the substrate 10 and a first fixed electrode support section 113 extending from the first fixed electrode fixing section 111 in the first direction DR1. The first fixed electrode 115 extends from the first fixed electrode support section 113 in the second direction DR2 and the fourth direction DR4. In other words, the first fixed electrode section 110 includes the first fixed electrode 115 extending from the first fixed electrode support section 113 in the second direction DR2 and the fourth direction DR4. The length of the first fixed electrode 115 extending in the second direction DR2 is the same as the length of the first fixed electrode 115 extending in the fourth direction DR4. Note that "having the same length" here includes not only cases where the lengths are actually the same, but also cases where the lengths can be considered to be the same taking manufacturing errors into consideration. In this embodiment, "having approximately the same length" may also be defined as such, as will be described in detail later. That is, the first fixed electrode portion 110 is line-symmetric with respect to the line segment LS113 in Fig. 3. The line segment LS113 is a line segment that passes through the first fixed electrode fixing portion 111 and extends along the first direction DR1. Note that the first fixed electrode portion 110, which will be described later with reference to Figs. 9 and 10, is similarly configured to be line-symmetric with respect to the line segment that passes through the first fixed electrode fixing portion 111 and extends along the first direction DR1.

[0017] Such a first fixed electrode section 110 is fixed to the substrate 10 via a first fixed electrode fixing section 111, and serves as a probe electrode. Note that the first fixed electrode section 110 may be configured so that a plurality of first fixed electrodes 115 extend from the first fixed electrode support section 113. This allows the first fixed electrode section 110 to form a so-called comb-tooth structure.

[0018] 3 merely conceptually shows that the first fixed electrode fixing portion 111 is a portion where the first fixed electrode support portion 113 is fixed to the substrate 10, and does not specify the specific structure of the first fixed electrode fixing portion 111. The same applies to the second fixed electrode fixing portion 121, the third fixed electrode fixing portion 131, the fourth fixed electrode fixing portion 141, the first movable electrode fixing portion 311, the second movable electrode fixing portion 321, the third movable electrode fixing portion 331, and the fourth movable electrode fixing portion 341, which will be described later.

[0019] The first movable electrode portion 210 has a first movable electrode 215. The first movable electrode 215 extends in the second direction DR2 or the fourth direction DR4 and faces the first fixed electrode 115. The first movable electrode portion 210 may have a comb-like structure by having a plurality of first movable electrodes 215. In this case, as shown in A11 of FIG. 3 , the first movable electrode portion 210 is configured so that the first movable electrode 215 on the second direction DR2 side of the first fixed electrode support portion 113 and the first movable electrode 215 on the fourth direction DR4 side of the first fixed electrode support portion 113 are symmetrical with respect to the line segment LS113. In other words, although not strictly illustrated, by providing movable electrodes on the side surfaces of the comb teeth formed by the first movable electrodes 215 and providing fixed electrodes on the side surfaces of the comb teeth formed by the first fixed electrode 115, the first movable electrode portion 210 can function as a probe electrode. In other words, the first movable electrode portion 210 serves as a probe electrode that can move integrally with the movable body MB. Similarly, the first movable electrode 215, which will be described later in Figures 9 and 10, has a first movable electrode section 210 configured to be symmetrical with respect to a line segment passing through the first fixed electrode fixing section 111 and along the first direction DR1.

[0020] A combination of such first fixed electrode portion 110 and first movable electrode portion 210 can be considered to constitute a set of physical quantity detection units. Hereinafter, the physical quantity detection unit will be simply referred to as a detection unit. That is, FIG. 1 can be considered to include a detection unit shown in the dotted frame A1, a detection unit shown in the dotted frame A2, a detection unit shown in the dotted frame A3, and a detection unit shown in the dotted frame A4. The numbers of first fixed electrodes 115 and first movable electrodes 215 are not limited to those shown in FIGS. 1 and 3, but the first fixed electrodes 115 are arranged on both sides of the first movable electrode 215 in a plan view of the substrate 10. This arrangement stabilizes the operation of the movable body MB.

[0021] The relationship between the first fixed electrode 115 and the first movable electrode 215 described above also applies to the relationship between the second fixed electrode 125 and the second movable electrode 225, the relationship between the third fixed electrode 135 and the third movable electrode 235, and the relationship between the fourth fixed electrode 145 and the fourth movable electrode 245, which will be described in detail later as appropriate.

[0022] An example of the operation of a detection unit formed by a combination of the first fixed electrode portion 110 and the first movable electrode portion 210 shown in A11 of Fig. 3 will be described. For example, when acceleration occurs in a direction along the X-axis direction, the first movable electrode 215 moves along the X-axis, and the distance between the first movable electrode 215 and the first fixed electrode 115 in the direction along the X-axis changes, resulting in a change in capacitance. In other words, the detection unit formed by a combination of the first fixed electrode portion 110 and the first movable electrode portion 210 shown in A11 of Fig. 3 is a detection unit that can detect acceleration in the direction along the X-axis direction.

[0023] On the other hand, for example, when acceleration occurs in a direction along the second direction DR2, the facing area between the first fixed electrode 115 and the first movable electrode 215 extending from the first fixed electrode support portion 113 in the second direction DR2 increases, but the facing area between the first fixed electrode 115 and the first movable electrode 215 extending from the first fixed electrode support portion 113 in the fourth direction DR4 decreases. Similarly, when acceleration occurs in a direction along the fourth direction DR4, the facing area between the first fixed electrode 115 and the first movable electrode 215 extending from the first fixed electrode support portion 113 in the second direction DR2 decreases, but the facing area between the first fixed electrode 115 and the first movable electrode 215 extending from the first fixed electrode support portion 113 in the fourth direction DR4 increases. In other words, whether acceleration occurs in the direction along the second direction DR2 or the direction along the fourth direction DR4, the facing area between the first fixed electrode 115 and the first movable electrode 215 remains generally unchanged. In other words, the detection unit consisting of the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 shown in A11 of Figure 3 is a detection unit configured so as not to detect acceleration in the direction along the Y-axis.

[0024] In this way, by extending the first fixed electrode 115 from the first fixed electrode support portion 113 in the second direction DR2 and the fourth direction DR4, a detection unit is constructed that detects acceleration in the X-axis direction but does not detect acceleration in the Y-axis direction. In other words, it can be said that the detection unit formed by the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 shown in A11 of Fig. 3 has suppressed other-axis sensitivity. In other words, a physical quantity sensor including a configuration in which fixed electrodes extend from the fixed electrode support portion in only one direction may not be able to suppress other-axis sensitivity.

[0025] Note that "the first fixed electrode 115 extends from the first fixed electrode support section 113 in the second direction DR2 and the fourth direction DR4" is not limited to the configuration in which the first fixed electrode 115 extends from one first fixed electrode support section 113 in the second direction DR2 and the fourth direction DR4 as shown in A11 of Fig. 3, and modifications are possible within the scope of the purpose of being able to suppress other-axis sensitivity. For example, the method of this embodiment may be applied by expanding the first fixed electrode section 110 to include a first fixed electrode 115 extending in the second direction DR2 and a first fixed electrode 115 of the same length as the first fixed electrode 115 extending in the fourth direction DR4, with the first fixed electrode support section 113 sandwiched between them. More specifically, for example, as described later in Figure 10, within one detection unit, a combination of one first fixed electrode 115 extending from a first first fixed electrode support portion 113-1B in the second direction DR2 and one first fixed electrode 115 extending from a second first fixed electrode support portion 113-2B in the fourth direction DR4 may be treated as a configuration included in the method of this embodiment.

[0026] 3, the physical quantity sensor 1 of this embodiment includes a second fixed electrode portion 120, a second movable electrode portion 220, and a second connecting portion 420. The second connecting portion 420 is configured as a part of the movable body MB, extends along the first direction DR1, and has the second movable electrode portion 220.

[0027] The second fixed electrode section 120 includes a second fixed electrode fixing section 121 fixed to the substrate 10, and a second fixed electrode support section 123 extending in the second direction DR2 from the second fixed electrode fixing section 121. In addition, a second fixed electrode 125 extends from the second fixed electrode support section 123 in the first direction DR1 and the third direction DR3. In other words, the second fixed electrode section 120 is fixed to the substrate 10 via the second fixed electrode fixing section 121, and serves as a probe electrode.

[0028] The second movable electrode portion 220 has a second movable electrode 225. The second movable electrode 225 extends in the first direction DR1 and faces the second fixed electrode 125. In other words, the second movable electrode portion 220 serves as a probe electrode that can move integrally with the movable body MB.

[0029] As is clear from FIG. 3 , the detection unit formed by the combination of the second fixed electrode portion 120 and the second movable electrode portion 220 shown in A12 of FIG. 3 can be considered to be the same as the detection unit formed by the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 shown in A11 rotated 90° counterclockwise. Therefore, although some detailed description will be omitted, the detection unit formed by the combination of the second fixed electrode portion 120 and the second movable electrode portion 220 shown in A12 of FIG. 3 is a detection unit capable of detecting acceleration in the Y-axis direction, and other-axis sensitivity is suppressed. More specifically, the length of the second fixed electrode 125 extending in the first direction DR1 is the same as the length of the second fixed electrode 125 extending in the third direction DR3, so the second fixed electrode portion 120 is line-symmetrical with respect to the line segment LS123 in FIG. 3 . The line segment LS123 is a line segment that passes through the second fixed electrode fixing portion 121 and the second fixed electrode supporting portion 123 and runs along the second direction DR2. 3, the second movable electrode 225 on the first direction DR1 side of the second fixed electrode support portion 123 and the second movable electrode 225 on the third direction DR3 side of the second fixed electrode support portion 123 are configured to be symmetrical with respect to the line segment LS123.

[0030] 4, the physical quantity sensor 1 of this embodiment further includes a first movable electrode fixing portion 311, a first movable electrode supporting portion 313, and a first spring 317. The first movable electrode fixing portion 311 is fixed to the substrate 10.

[0031] 1 further includes a second movable electrode fixing portion 321, a third movable electrode fixing portion 331, and a fourth movable electrode fixing portion 341, which will be described later, in addition to the first movable electrode fixing portion 311, and these can be collectively referred to as the movable electrode fixing portion 301. Therefore, B11 in FIG. 4 can be appropriately interpreted as meaning that the physical quantity sensor 1 of this embodiment further includes the movable electrode fixing portion 301, the first movable electrode support portion 313, and the first spring 317. Also, as will be described later, in the example shown in FIG. 1, the physical quantity sensor 1 includes four movable electrode fixing portions 301, but the number of movable electrode fixing portions 301 is not limited to four, and various modifications are possible, the details of which will be described later with reference to FIG. 19.

[0032] The first spring 317 has a thin wire shape when viewed from above the substrate 10, and one end thereof is connected to the first movable electrode support member 313. The location of the other end of the first spring 317 is not particularly limited as long as it can support the first connecting member 410 and the second connecting member 420, but it may be connected to a corner of the movable body MB shown in B111 in FIG. 4, for example. The corner shown in B111 can also be considered to be the intersection of the first connecting member 410 and the second connecting member 420. The thin wire is folded in an accordion-like shape, so that the first spring 317 has the properties of a folded spring and can be distorted and deformed within the XY plane.

[0033] The first movable electrode support portion 313 extends from the movable electrode fixing portion 301 (first movable electrode fixing portion 311) in a first intersecting direction DR11 and is connected to one side of the first spring 317. As shown in FIG. 4, the first intersecting direction DR11 is a direction intersecting the first direction DR1 and the second direction DR2. In other words, the first intersecting direction DR11 is not parallel to the X-axis (first direction DR1, third direction DR3) and is not parallel to the Y-axis (second direction DR2, fourth direction DR4). Alternatively, the first intersecting direction DR11 can be said to be inclined with respect to the X-axis and to be inclined with respect to the Y-axis. The same applies to a second intersecting direction DR12, a third intersecting direction DR13, and a fourth intersecting direction DR14, which will be described later.

[0034] In this manner, the movable electrode fixing portion 301 (first movable electrode fixing portion 311), the first movable electrode supporting portion 313, the first spring 317, the corner portion of the movable body MB shown in B111, the first connecting portion 410, and the first movable electrode portion 210 are connected in this order. Similarly, the movable electrode fixing portion 301 (first movable electrode fixing portion 311), the first movable electrode supporting portion 313, the first spring 317, the corner portion of the movable body MB shown in B111, the second connecting portion 420, and the second movable electrode portion 220 are connected in this order.

[0035] Although the first spring 317 is highlighted in FIG. 4 for ease of understanding, the first spring 317 may be smaller. More specifically, for example, the length L313 of the first movable electrode support member 313 may be longer than the length of the first spring 317. The length of the first spring 317 is the length based on the longest point of the intersection between the area occupied by the first spring 317 in the XY plane and a line parallel to the first intersecting direction DR11. This allows the first spring 317 to be positioned further outward. This allows the length L313 of the first movable electrode support member 313 to be maximized. This reduces the moment of inertia based on the first movable electrode support member 313, thereby suppressing operation of the movable body MB in the in-plane rotation mode (operation mode M20 in FIG. 2).

[0036] Furthermore, for example, a certain relationship may be established between the length L313 of the first movable electrode support portion 313, the length L113 of the first fixed electrode support portion 113, and the length L123 of the second fixed electrode support portion 123. Specifically, for example, the first fixed electrode support portion 113, the second fixed electrode support portion 123, and the first movable electrode support portion 313 may be configured so that the relationships "length L313 > length L113 and length L313 > length L123" are satisfied. This allows the physical quantity sensor 1 to be constructed in which the standard for the length of the first movable electrode support portion 313 necessary to suppress operation in the in-plane rotation mode is clearly defined. This makes it possible to suppress operation in the in-plane rotation mode when deformation of the first spring 317 occurs. Similarly, the second movable electrode support portion 323, described below, may be configured so that the length L323 is longer than the length L123 of the second fixed electrode support portion 123 and the length L133 of the third fixed electrode support portion 133. Similarly, the third movable electrode support portion 333 described below may be configured so that a length L333 of the third fixed electrode support portion 133 is longer than the length L133 of the third fixed electrode support portion 133 and the length L143 of the fourth fixed electrode support portion 143. Similarly, the fourth movable electrode support portion 343 described below may be configured so that a length L343 of the fourth movable electrode support portion 343 is longer than the length L143 of the fourth fixed electrode support portion 143 and the length L113 of the first fixed electrode support portion 113.

[0037] 4, by making the first intersecting direction DR11 coincident with the direction from the movable electrode fixing portion 301 (first movable electrode fixing portion 311) toward the corner portion indicated by B111, a relationship can be established in which the first springs 317 are disposed further outward. This makes it possible to maximize the length L313 of the first movable electrode support portion 313. This reduces the moment of inertia based on the first movable electrode support portion 313, thereby suppressing operation of the movable body MB in the in-plane rotation mode (operation mode M20 in FIG. 2). Note that if the first movable electrode portion 210 and the first connecting portion 410 are identified, and the second movable electrode portion 220 and the second connecting portion 420 are identified, it can also be said that "the first movable electrode support portion 313 extends in the first intersecting direction DR11 and supports the first movable electrode portion 210 and the second movable electrode portion 220 via the first springs 317."

[0038] Furthermore, first fixed electrodes 115 of different lengths may extend from the first fixed electrode support portion 113 in the direction along the first direction DR1. More specifically, for example, in the first fixed electrode portion 110 shown in C10 of FIG. 5, the first fixed electrode 115 shown in C11 is referred to as the "first first fixed electrode," and the first fixed electrode 115 shown in C12 is referred to as the "second first fixed electrode." Note that, as described above in FIG. 3, the first fixed electrode portion 110 has a structure that is line-symmetrical with respect to the line segment LS113, and therefore, the first fixed electrode portion 110 shown in C10 of FIG. 5 does not include the first fixed electrode 115 extending in the fourth direction DR4. The same applies to the first fixed electrode portion 110 shown in C20 of FIG. 5.

[0039] 5, the "second first fixed electrode" is located closer to the first direction DR1 than the "first first fixed electrode." The "first first fixed electrode" and the "second first fixed electrode" extend from the first fixed electrode support portion 113 along the second direction DR2 so that the length L12 of the "second first fixed electrode" is longer than the length L11 of the "first first fixed electrode."

[0040] In the present embodiment, the length of the first fixed electrode 115 in the first fixed electrode unit 110 is not particularly limited, and the first fixed electrode unit 110 as shown in C20 in FIG. 5 is not excluded. In the first fixed electrode unit 110 shown in C20, the first fixed electrode 115 shown in C21 corresponds to the "first first fixed electrode," and the first fixed electrode 115 shown in C22 corresponds to the "second first fixed electrode." Similarly, in the first fixed electrode unit 110 shown in C20, the "second first fixed electrode" is positioned closer to the first direction DR1 than the "first first fixed electrode." In the first fixed electrode unit 110 shown in C20, the length L22 of the "second first fixed electrode" is the same as the length L21 of the "first first fixed electrode." Note that "having the same length" here is as described above.

[0041] In this embodiment, whether to adopt the structure of the first fixed electrode unit 110 shown in C10 of FIG. 5 or the structure of the first fixed electrode unit 110 shown in C20 of FIG. 5 can be determined appropriately by the user in consideration of certain circumstances. The certain circumstances may be, for example, circumstances related to the positional relationship of the first movable electrode support unit 313, but may also be other circumstances. Specifically, for example, as described above, because the first movable electrode support unit 313 is inclined with respect to the X-axis, the boundary with the first movable electrode support unit 313 can be indicated as shown by the dashed line in C13 of FIG. 5. The same applies to the dashed line in C23 of FIG. 5. In this case, for example, if the structure of the first fixed electrode unit 110 shown in C20 of FIG. 5 is adopted, an empty space shown in C24 will be generated. Therefore, when there is a boundary with the first movable electrode support unit 313 as shown by the dashed line in C13 of FIG. 5, adopting the structure of the first fixed electrode unit 110 shown in C10 of FIG. 5 can improve the design efficiency of the physical quantity sensor 1. Furthermore, by adjusting the lengths L11 and L12, for example, the length L113 of the first fixed electrode support section 113 can be adjusted. Similarly, because the length L123 of the second fixed electrode support section 123 can be adjusted, for example, the length L113 of the first fixed electrode support section 113 and the length L123 of the second fixed electrode support section 123 can be designed to be approximately the same. Although not shown, the first fixed electrode section 110 shown in C10 of FIG. 5 is illustrated such that all of the first fixed electrodes 115 have different lengths, this is not limitative, and the first fixed electrode section 110 may be configured such that some of the first fixed electrodes 115 have the same length. More specifically, for example, in the first fixed electrode section 110 shown in C10 of FIG. 5, the first fixed electrode section 110 may be configured such that the lengths of the multiple first fixed electrodes 115 are the same, excluding the first fixed electrodes 115 shown in C11 and C12. In this case as well, the first fixed electrode portion 110 is configured to be line-symmetrical with respect to the line segment LS113.

[0042] As described above, this embodiment relates to a physical quantity sensor 1 that detects physical quantities in the first direction DR1 and the second direction DR2, which are in-plane directions and perpendicular to each other. The physical quantity sensor 1 includes a substrate 10, a first fixed electrode support portion 113, a first fixed electrode portion 110, a first movable electrode portion 210, a second fixed electrode support portion 123, a second movable electrode portion 220, and a first movable electrode support portion 313. The first fixed electrode support portion 113 is fixed to the substrate 10 at the first fixed electrode fixing portion 111 and extends in the first direction DR1. The first fixed electrode portion 110 has a first fixed electrode 115 that extends from the first fixed electrode support portion 113 in the second direction DR2 and in a fourth direction DR4 that is the opposite direction to the second direction DR2. The first movable electrode portion 210 has a first movable electrode 215 that extends in the second direction DR2 and the fourth direction DR4 and faces the first fixed electrode 115. The second fixed electrode support portion 123 is fixed to the substrate 10 at a second fixed electrode fixing portion 121 and extends in the second direction DR2. The second fixed electrode portion 120 has a second fixed electrode 125 that extends from the second fixed electrode support portion 123 in the first direction DR1 and a third direction DR3 that is the opposite direction to the first direction DR1. The second movable electrode portion 220 has a second movable electrode 225 that extends in the first direction DR1 and the third direction DR3 and faces the second fixed electrode 125. The first movable electrode support portion 313 is fixed to the substrate 10 at the movable electrode fixing portion 301 (first movable electrode fixing portion 311), extends in a first intersecting direction DR11 that intersects the first direction DR1 and the second direction DR2, and supports the first movable electrode portion 210 and the second movable electrode portion 220 via a first spring 317.

[0043] As described above, the physical quantity sensor 1 of this embodiment includes the substrate 10, the first fixed electrode support portion 113, the first fixed electrode portion 110, and the first movable electrode portion 210, and therefore a detection unit can be constructed in which the first fixed electrode 115 and the first movable electrode 215 face each other. Furthermore, the physical quantity sensor 1 of this embodiment includes the substrate 10, the second fixed electrode support portion 123, the second fixed electrode portion 120, and the second movable electrode portion 220, and therefore a detection unit can be constructed in which the second fixed electrode 125 and the second movable electrode 225 face each other. This makes it possible to construct a physical quantity sensor 1 that detects physical quantities in the first direction DR1 and the second direction DR2 that are orthogonal to each other. Furthermore, the physical quantity sensor 1 further includes the first movable electrode support portion 313, and therefore can support the first movable electrode portion 210 and the second movable electrode portion 220.

[0044] Furthermore, Patent Document 1 discloses a technique in which a fixed comb electrode extends from one side of a fixed electrode support portion. However, as described above, this technique may not be able to suppress other-axis sensitivity. In contrast, in the physical quantity sensor 1 of this embodiment, the first fixed electrode support portion 113 has a first fixed electrode 115 extending in the second direction DR2 and the opposite direction, a fourth direction DR4. This allows the physical quantity sensor 1 to detect a physical quantity in a direction along the first direction DR1 and suppress other-axis sensitivity. Similarly, the second fixed electrode support portion 123 has a second fixed electrode 125 extending in the first direction DR1 and the opposite direction, a third direction DR3. This allows the physical quantity sensor 1 to detect a physical quantity in a direction along the second direction DR2 and suppress other-axis sensitivity. This improves the detection accuracy of the physical quantity sensor 1. Furthermore, by extending the first movable electrode support portion 313 from the movable electrode fixing portion 301 along the first intersecting direction DR11 that intersects the first direction DR1 and the second direction DR2, a basic structure of the physical quantity sensor 1 can be constructed that minimizes the influence of warping of the substrate 10 while suppressing other-axis sensitivity.

[0045] The movable body MB may also include a movable body MB supported by the first movable electrode support portion 313 via the first spring 317. The movable body MB may also include a first connecting portion 410 extending in the second direction DR2 and having the first movable electrode portion 210, and a second connecting portion 420 extending in the first direction DR1 and having the second movable electrode portion 220. This allows for a relationship in which the first movable electrode support portion 313 extending along the first intersecting direction DR11 is connected to one side of the first spring 317, and the movable body MB including the first connecting portion 410 extending in the second direction DR2 and the second connecting portion 420 extending in the first direction DR1 is connected to the other side. This allows for the movable body MB to have a rectangular shape and the first spring 317 to be disposed further outward. This allows for the first movable electrode support portion 313 to be configured longer, thereby enabling the construction of a physical quantity sensor 1 that suppresses operation in the in-plane rotation mode.

[0046] Furthermore, the first spring 317 may be provided at a corner (B111) of the movable body MB where the first connecting portion 410 and the second connecting portion 420 intersect. Furthermore, the first movable electrode support portion 313 may extend in a first intersecting direction DR11 from the movable electrode fixing portion 301 (first movable electrode fixing portion 311) toward the corner (B111). By doing so, the first spring 317 can be disposed at the corner farthest from the movable electrode fixing portion 301 (first movable electrode fixing portion 311). As a result, the first movable electrode support portion 313 is configured to be longer, and therefore it is possible to construct a physical quantity sensor 1 that suppresses operation in the in-plane rotation mode.

[0047] Furthermore, the length L313 of the first movable electrode support portion 313 may be longer than the length of the first spring 317 in the first intersecting direction DR11. In this way, the first spring 317 can be disposed further outward, and the length L313 of the first movable electrode support portion 313 can be increased. This makes it possible to suppress operation of the physical quantity sensor 1 in the in-plane rotation mode.

[0048] Furthermore, the length L313 of the first movable electrode support portion 313 may be longer than the length L113 of the first fixed electrode support portion 113 and the length L123 of the second fixed electrode support portion 123. In this way, it is possible to construct a physical quantity sensor 1 in which the standard for the length of the first movable electrode support portion 313 necessary to suppress operation in the in-plane rotation mode is clearly defined.

[0049] Furthermore, the first fixed electrode unit 110 may have a first first fixed electrode and a second first fixed electrode provided in the first direction DR1 from the first first fixed electrode. Furthermore, in the second direction DR2, the length (L12) of the second first fixed electrode may be longer than the length (L11) of the first first fixed electrode. In this way, the design efficiency of the physical quantity sensor 1 can be improved while taking into consideration the positional relationship of the first movable electrode support unit 313 tilted with respect to the X-axis or Y-axis.

[0050] The method of the present embodiment may also be realized by a physical quantity sensor 1 that further includes the configurations shown in A3, A4, B2, B3, and B4 of Fig. 1. More specifically, as shown in A13 of Fig. 6, for example, the physical quantity sensor 1 of the present embodiment includes a third fixed electrode portion 130, a third movable electrode portion 230, and a third connecting portion 430. The third connecting portion 430 is configured as a part of the movable body MB, extends along the second direction DR2, and has the third movable electrode portion 230.

[0051] The third fixed electrode section 130 includes a third fixed electrode fixing section 131 fixed to the substrate 10, and a third fixed electrode support section 133 extending from the third fixed electrode fixing section 131 in the third direction DR3 and having a length L133. In addition, a third fixed electrode 135 extends from the third fixed electrode support section 133 in the second direction DR2 and the fourth direction DR4. In other words, the third fixed electrode section 130 is fixed to the substrate 10 via the third fixed electrode fixing section 131, and serves as a probe electrode.

[0052] The third movable electrode portion 230 has a third movable electrode 235. The third movable electrode 235 extends in the second direction DR2 or the fourth direction DR4 and faces the third fixed electrode 135. In other words, the third movable electrode portion 230 serves as a probe electrode that can move integrally with the movable body MB.

[0053] The detection unit formed by the combination of the third fixed electrode portion 130 and the third movable electrode portion 230 shown in A13 of FIG. 6 is symmetrical with respect to the Y-axis in a plan view of the substrate 10 compared to the detection unit formed by the combination of the first fixed electrode portion 110 and the first movable electrode portion 210 shown in A11 of FIG. 3. Therefore, although detailed description is omitted, the detection unit formed by the combination of the third fixed electrode portion 130 and the third movable electrode portion 230 shown in A13 of FIG. 6 is capable of detecting acceleration in the X-axis direction and is configured to suppress sensitivity to other axes. Furthermore, by making the length of the third fixed electrode 135 extending in the second direction DR2 and the length of the third fixed electrode 135 extending in the fourth direction DR4 the same, the third fixed electrode portion 130 is configured to be line-symmetrical with respect to the line segment LS133 in FIG. 6. The line segment LS133 is a line segment that passes through the third fixed electrode fixing portion 131 and the third fixed electrode support portion 133 and runs along the first direction DR1. 6, the third movable electrode portion 230 is configured so that the third movable electrode 235 on the second direction DR2 side of the third fixed electrode support portion 133 and the third movable electrode 235 on the fourth direction DR4 side of the third fixed electrode support portion 133 are symmetrical with respect to the line segment LS133.

[0054] 6, for example, the physical quantity sensor 1 of this embodiment includes a fourth fixed electrode portion 140, a fourth movable electrode portion 240, and a fourth connecting portion 440. The fourth connecting portion 440 is configured as a part of the movable body MB, extends along the first direction DR1, and has the fourth movable electrode portion 240.

[0055] The fourth fixed electrode section 140 includes a fourth fixed electrode fixing section 141 fixed to the substrate 10, and a fourth fixed electrode support section 143 extending from the fourth fixed electrode fixing section 141 in the fourth direction DR4 and having a length L143. Furthermore, a fourth fixed electrode 145 extends from the fourth fixed electrode support section 143 in the first direction DR1 and the third direction DR3. In other words, the fourth fixed electrode section 140 is fixed to the substrate 10 via the fourth fixed electrode fixing section 141, and serves as a probe electrode.

[0056] The fourth movable electrode portion 240 has a fourth movable electrode 245. The fourth movable electrode 245 extends in the first direction DR1 or the third direction DR3 and faces the fourth fixed electrode 145. In other words, the fourth movable electrode portion 240 serves as a probe electrode that can move integrally with the movable body MB.

[0057] The detection unit formed by the combination of the fourth fixed electrode portion 140 and the fourth movable electrode portion 240 shown in A14 of FIG. 6 is symmetrical with respect to the X-axis in a plan view of the substrate 10 compared to the detection unit formed by the combination of the second fixed electrode portion 120 and the second movable electrode portion 220 shown in A12 of FIG. 3. Therefore, although detailed description is omitted, the detection unit formed by the combination of the fourth fixed electrode portion 140 and the fourth movable electrode portion 240 shown in A14 of FIG. 6 is capable of detecting acceleration in the Y-axis direction and is configured to suppress other-axis sensitivity. Furthermore, by making the length of the fourth fixed electrode 145 extending in the first direction DR1 and the length of the fourth fixed electrode 145 extending in the third direction DR3 the same, the fourth fixed electrode portion 140 is configured to be symmetrical with respect to the line segment LS143 in FIG. 6. The line segment LS143 is a line segment that passes through the fourth fixed electrode fixing portion 141 and the fourth fixed electrode support portion 143 and runs along the second direction DR2. 6, the fourth movable electrode portion 240 is configured so that the fourth movable electrode 245 on the first direction DR1 side of the fourth fixed electrode support portion 143 and the fourth movable electrode 245 on the third direction DR3 side of the fourth fixed electrode support portion 143 are symmetrical with respect to the line segment LS143.

[0058] 7, the physical quantity sensor 1 of this embodiment further includes a second movable electrode fixing portion 321, a second movable electrode supporting portion 323, and a second spring 327. The second movable electrode fixing portion 321 is fixed to the substrate 10.

[0059] The second spring 327 functions as a folded spring like the first spring 317, and has one end connected to the second movable electrode support part 323. The other end of the second spring 327 is connected to a corner of the movable body MB shown in B112. The corner shown in B112 is the part where the second connecting part 420 and the third connecting part 430 intersect.

[0060] The second movable electrode supporting portion 323 extends from the movable electrode fixing portion 301 (second movable electrode fixing portion 321) in the second intersecting direction DR12 and is connected to one side of the second spring 327. As shown in Fig. 7, the second intersecting direction DR12 is a direction intersecting the second direction DR2 and the third direction DR3, and is a direction from the movable electrode fixing portion 301 (second movable electrode fixing portion 321) toward the corner indicated by B112.

[0061] That is, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (second movable electrode fixing portion 321), the second movable electrode supporting portion 323, the second spring 327, the corner portion of the movable body MB shown in B112, the second connecting portion 420, and the second movable electrode portion 220 are connected in this order. Similarly, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (second movable electrode fixing portion 321), the second movable electrode supporting portion 323, the second spring 327, the corner portion of the movable body MB shown in B112, the third connecting portion 430, and the third movable electrode portion 230 are connected in this order.

[0062] 7, the physical quantity sensor 1 of this embodiment further includes a third movable electrode fixing portion 331, a third movable electrode supporting portion 333, and a third spring 337. The third movable electrode fixing portion 331 is fixed to the substrate 10.

[0063] The third spring 337 functions as a folded spring similar to the first spring 317, and has one end connected to the third movable electrode support part 333. The other end of the third spring 337 is connected to a corner of the movable body MB indicated by B113. The corner indicated by B113 is the part where the third connecting part 430 and the fourth connecting part 440 intersect.

[0064] The third movable electrode support portion 333 extends from the movable electrode fixing portion 301 (third movable electrode fixing portion 331) in a third intersecting direction DR13 and is connected to one side of the third spring 337. As shown in Fig. 7, the third intersecting direction DR13 is a direction intersecting the third direction DR3 and the fourth direction DR4, and is a direction from the movable electrode fixing portion 301 (third movable electrode fixing portion 331) toward the corner indicated by B113.

[0065] That is, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (third movable electrode fixing portion 331), the third movable electrode supporting portion 333, the third spring 337, the corner portion of the movable body MB shown in B113, the third connecting portion 430, and the third movable electrode portion 230 are connected in this order. Similarly, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (third movable electrode fixing portion 331), the third movable electrode supporting portion 333, the third spring 337, the corner portion of the movable body MB shown in B113, the fourth connecting portion 440, and the fourth movable electrode portion 240 are connected in this order.

[0066] 8, the physical quantity sensor 1 of this embodiment further includes a fourth movable electrode fixing portion 341, a fourth movable electrode supporting portion 343, and a fourth spring 347. The fourth movable electrode fixing portion 341 is fixed to the substrate 10.

[0067] The fourth spring 347 functions as a folded spring similar to the first spring 317, and has one end connected to the fourth movable electrode support part 343. The other end of the fourth spring 347 is connected to a corner of the movable body MB shown in B114. The corner shown in B114 is the part where the fourth connecting part 440 and the first connecting part 410 intersect.

[0068] The fourth movable electrode support portion 343 extends from the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341) in a fourth intersecting direction DR14 and is connected to one side of the fourth spring 347. As shown in FIG. 8, the fourth intersecting direction DR14 is a direction intersecting the fourth direction DR4 and the first direction DR1, and is a direction from the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341) toward the corner indicated by B114.

[0069] That is, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341), the fourth movable electrode supporting portion 343, the fourth spring 347, the corner portion of the movable body MB shown in B114, the fourth connecting portion 440, and the fourth movable electrode portion 240 are connected in this order. Similarly, in the physical quantity sensor 1 of this embodiment, the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341), the fourth movable electrode supporting portion 343, the fourth spring 347, the corner portion of the movable body MB shown in B114, the first connecting portion 410, and the first movable electrode portion 210 are connected in this order.

[0070] 1, the movable electrode fixing portion 301 includes the first movable electrode fixing portion 311 shown in B11 of FIG. 4, the second movable electrode fixing portion 321 shown in B12 of FIG. 7, the third movable electrode fixing portion 331 shown in B13 of FIG. 7, and the fourth movable electrode fixing portion 341 shown in B14 of FIG. 8. The first movable electrode fixing portion 311, the second movable electrode fixing portion 321, the third movable electrode fixing portion 331, and the fourth movable electrode fixing portion 341 are located within a predetermined region AR in FIG. 1 when viewed from above on the substrate 10. The first fixed electrode fixing portion 111, the second fixed electrode fixing portion 121, the third fixed electrode fixing portion 131, and the fourth fixed electrode fixing portion 141 are located within a predetermined region AR in FIG. 1 when viewed from above on the substrate 10. That is, the fixing portions fixed to the substrate 10 are concentrated in a predetermined region AR that is a region near the center of the substrate 10. This minimizes the effects of warping of substrate 10 caused by external stress or temperature changes, thereby suppressing fluctuations in the electrical signal output from, for example, a probe electrode including first fixed electrode portion 110. The same applies to the probe electrode including second fixed electrode portion 120, the probe electrode including third fixed electrode portion 130, and the probe electrode including fourth fixed electrode portion 140.

[0071] Note that, hereinafter, the first fixed electrode fixing portion 111, the second fixed electrode fixing portion 121, the third fixed electrode fixing portion 131, and the fourth fixed electrode fixing portion 141 may be collectively referred to simply as "fixed electrode fixing portions." The same applies to the case where the first fixed electrode fixing portion 111 is divided into a first fixed electrode fixing portion 111-C and a first fixed electrode fixing portion 111-D, as will be described later with reference to FIG.

[0072] As described above, the physical quantity sensor 1 of this embodiment includes a third fixed electrode support portion 133, a third fixed electrode portion 130, a third movable electrode portion 230, a fourth fixed electrode support portion 143, a fourth fixed electrode portion 140, a fourth movable electrode portion 240, a second movable electrode support portion 323, a third movable electrode support portion 333, and a fourth movable electrode support portion 343. The third fixed electrode support portion 133 is fixed to the substrate 10 at the third fixed electrode fixing portion 131 and extends in a third direction DR3. The third fixed electrode portion 130 has a third fixed electrode 135 extending from the third fixed electrode support portion 133 in the second direction DR2 and the fourth direction DR4. The third movable electrode portion 230 has a third movable electrode 235 extending in the second direction DR2 and the fourth direction DR4 and facing the third fixed electrode 135. The fourth fixed electrode support portion 143 is fixed to the substrate 10 at a fourth fixed electrode fixing portion 141 and extends in a fourth direction DR4. The fourth fixed electrode portion 140 has a fourth fixed electrode 145 extending from the fourth fixed electrode support portion 143 in the first direction DR1 and the third direction DR3. The fourth movable electrode portion 240 has a fourth movable electrode 245 extending in the first direction DR1 and the third direction DR3 and facing the fourth fixed electrode 145. The second movable electrode support portion 323 is fixed to the substrate 10 at a movable electrode fixing portion 301 (second movable electrode fixing portion 321), extends in a second intersecting direction DR12 intersecting the second direction DR2 and the third direction DR3, and supports the second movable electrode portion 220 and the third movable electrode portion 230 via second springs 327. The third movable electrode support portion 333 is fixed to the substrate 10 at the movable electrode fixing portion 301 (third movable electrode fixing portion 331), extends in a third intersecting direction DR13 intersecting the third direction DR3 and the fourth direction DR4, and supports the third movable electrode portion 230 and the fourth movable electrode portion 240 via third springs 337. The fourth movable electrode support portion 343 is fixed to the substrate 10 at the movable electrode fixing portion 301 (fourth movable electrode fixing portion 341), extends in a fourth intersecting direction DR14 intersecting the fourth direction DR4 and the first direction DR1, and supports the fourth movable electrode portion 240 and the first movable electrode portion 210 via fourth springs 347.By doing this, a physical quantity sensor 1 can be constructed that further includes the third fixed electrode support portion 133, the third fixed electrode portion 130, the third movable electrode portion 230, the fourth fixed electrode support portion 143, the fourth fixed electrode portion 140, the fourth movable electrode portion 240, the second movable electrode support portion 323, the third movable electrode support portion 333, and the fourth movable electrode support portion 343.

[0073] Furthermore, the physical quantity sensor 1 of this embodiment may include a movable body MB supported by first to fourth movable electrode support portions (313, 323, 333, 343) via first to fourth springs (317, 327, 337, 347). Furthermore, the movable body MB may include a first coupling portion 410 extending in the second direction DR2 and having the first movable electrode portion 210, a second coupling portion 420 extending in the first direction DR1 and having the second movable electrode portion 220, a third coupling portion 430 extending in the second direction DR2 and having the third movable electrode portion 230, and a fourth coupling portion 440 extending in the first direction DR1 and having the fourth movable electrode portion 240. In this way, the second connecting portion 420 and the fourth connecting portion 440 extend along the first direction DR1, and the first connecting portion 410 and the third connecting portion 430 extend along the second direction DR2, making it possible to construct a physical quantity sensor 1 made up of a rectangular movable body MB. This allows the physical quantity sensor 1 to have a more appropriate shape.

[0074] Moreover, the movable electrode fixing portion 301 includes first to fourth movable electrode fixing portions (311, 321, 331, 341) that fix the first to fourth movable electrode supporting portions (313, 323, 333, 343) to the substrate 10. In this way, it is possible to construct a physical quantity sensor 1 in which a plurality of movable electrode supporting portions are fixed to the substrate 10 using the respective movable electrode fixing portions 301. This allows for an improvement in the degree of freedom in designing the physical quantity sensor 1.

[0075] The method of this embodiment is not limited to the above, and various modifications are possible. For example, the physical quantity sensor 1 may be configured so that a predetermined relationship exists between the length L113 of the first fixed electrode support portion 113 and the length L123 of the second fixed electrode support portion 123. In this embodiment, having a predetermined relationship in length means, for example, making the lengths approximately the same. In this embodiment, "having approximately the same length" includes not only the lengths being exactly the same, but also lengths that can be considered to be the same considering manufacturing errors, as well as lengths that were originally intended to be the same but were subsequently adjusted as required. More specifically, for example, a length that has been adjusted as required means a length that includes a variation range of approximately ±30% from the design value.

[0076] As described above, in the physical quantity sensor 1 of this embodiment, the length L113 of the first fixed electrode support portion 113 and the length L123 of the second fixed electrode support portion 123 are substantially the same. This configuration allows for the construction of a physical quantity sensor 1 that minimizes the effects of warping of the substrate 10. For example, warping may occur in the substrate 10 due to external stress or temperature changes. Therefore, if warping occurs near the center of the detection unit, the effects of the warping become more pronounced, such as the opposing area of ​​the comb-tooth electrodes changing significantly the further away from the center. Therefore, it is not desirable to configure the detection unit so that one of the X-direction length of the detection unit and the Y-direction length of the detection unit is longer than the other. In this regard, by applying the method of this embodiment, the X-direction length and the Y-direction length of the detection unit can be made substantially the same. This allows for the construction of a physical quantity sensor 1 that minimizes the effects of warping of the substrate 10.

[0077] Furthermore, for example, although not shown, the physical quantity sensor 1 may be configured so that the outer shape of the movable body MB is approximately square. More specifically, for example, if the shape of the movable body MB is a frame-like rectangle as shown in FIG. 1, the physical quantity sensor 1 may be configured so that the length of the first connecting portion 410 and the length of the second connecting portion 420 are approximately the same. Because the shape of the physical quantity sensor 1 shown in FIG. 1 is highly symmetrical, if the outer shape of the movable body MB can be determined to be approximately square, the shape of the detection unit will also naturally be determined to be approximately square. In other words, in the physical quantity sensor 1 of this embodiment, the length of the first connecting portion 410 and the length of the second connecting portion 420 are approximately the same. This allows for establishing a standard for configuring a detection unit whose length in the X direction and the length in the Y direction are approximately the same. This allows for the construction of a physical quantity sensor 1 that minimizes the effects of warping of the substrate 10.

[0078] Alternatively, the physical quantity sensor 1 may be configured so that a predetermined relationship holds between the angle R1 formed between the first direction DR1 and the first intersecting direction DR11 and the angle R2 formed between the second direction DR2 and the first intersecting direction DR11. More specifically, for example, the physical quantity sensor 1 may be constructed so that the angles R1 and R2 are substantially equal. Note that the above can be rephrased as saying that the physical quantity sensor 1 may be configured so that the angles R3 and R4 are substantially equal, where R3 is the angle formed between the third direction DR3 and the first intersecting direction DR11 and R4 is the angle formed between the fourth direction DR4 and the first intersecting direction DR11. This is because, as shown in FIG. 4 , angle R3 is equal to angle R1, and angle R2 is equal to angle R4. In this embodiment, "the angles are substantially the same" includes not only the angles being completely the same, but also the angles being considered to be the same considering manufacturing errors, the lengths being originally intended to be the same but subsequently adjusted, and so forth. More specifically, for example, the angle after a predetermined adjustment is an angle that includes a fluctuation range of about ±10° from the design value. As described above, in the physical quantity sensor 1 of this embodiment, the angle R1 formed between the first direction DR1 and the first intersecting direction DR11 and the angle R2 formed between the second direction DR2 and the first intersecting direction DR11 are substantially the same. By doing so, a standard can be established for configuring detection units whose lengths in the X direction and the Y direction are substantially the same, based on the angle R1 formed between the first direction DR1 and the first intersecting direction DR11 and the angle R2 formed between the second direction DR2 and the first intersecting direction DR11. This allows the construction of a physical quantity sensor 1 that minimizes the influence of warping of the substrate 10.

[0079] Furthermore, the detection unit shown in the dotted frame A1 in Fig. 1 has been described above as including one first fixed electrode support member 113 extending in the first direction DR1, as shown in A11 in Fig. 3, but the method of this embodiment is not limited to this. For example, the detection unit shown in the dotted frame A1 in Fig. 1 may be configured so that multiple first fixed electrode support members 113 extending in the first direction DR1 are arranged side by side.

[0080] Specifically, for example, the detection unit shown in the dotted line frame A1 in Fig. 1 may be modified to resemble the detection unit shown in A21 in Fig. 9. In the detection unit in Fig. 9, a first first fixed electrode support portion 113-1A extends in a first direction DR1 from the first fixed electrode fixation portion 111. A fixed electrode support portion extends from the first first fixed electrode support portion 113-1A in a second direction DR2, and a second first fixed electrode support portion 113-2A ​​extends from the fixed electrode support portion in the first direction DR1. Meanwhile, a fixed electrode support portion extends from the first first fixed electrode support portion 113-1A in a fourth direction DR4, and a third first fixed electrode support portion 113-3A extends from the fixed electrode support portion in the first direction DR1. 9, the first fixed electrode support portion 113-1A, the second fixed electrode support portion 113-2A, and the third fixed electrode support portion 113-3A are parallel to one another, and the first fixed electrode portion 110 is configured so that the three first fixed electrode support portions 113 are arranged side by side. The first fixed electrode 115 extends from the first fixed electrode support portion 113-1A in the second direction DR2 and the fourth direction DR4. The first movable electrode 215 is disposed so as to face the first fixed electrode 115. Similarly, the first fixed electrode 115 extends from the second fixed electrode support portion 113-2A ​​in the second direction DR2 and the fourth direction DR4, and also extends from the third fixed electrode support portion 113-3A in the second direction DR2 and the fourth direction DR4. 9, the reference numeral 115 is given to only one representative first fixed electrode, and the others are omitted. Also, the reference numeral 215 is given to only one representative first movable electrode, and the others are omitted. The same applies to FIGS. 10, 11, and 12, which will be described later.

[0081] 9 is referred to as the "first first fixed electrode portion," and the first fixed electrode portion 110 associated with the dotted line frame A121 is referred to as the "second first fixed electrode portion." In this case, the position of the "second first fixed electrode portion" is located closer to the first direction DR1 than the position of the "first first fixed electrode portion." Furthermore, in the "first first fixed electrode portion," there is only one fixed electrode support portion, the first first fixed electrode support portion 113-1A, and therefore there are two first fixed electrodes 115 aligned in the second direction DR2. On the other hand, the "second first fixed electrode portion" includes three fixed electrode support portions, namely, the first first fixed electrode support portion 113-1A, the second first fixed electrode support portion 113-2A, and the third first fixed electrode support portion 113-3A. Therefore, in the "second first fixed electrode portion," the number of first fixed electrodes 115 aligned in the second direction DR2 is a maximum of six. In this way, in the physical quantity sensor 1 of this embodiment, the first fixed electrode portion 110 has a first first fixed electrode portion (A121 in FIG. 9) and a second first fixed electrode portion (A122 in FIG. 9) provided in the first direction DR1 from the first first fixed electrode portion. The number of first fixed electrodes 115 aligned in the second direction DR2 in the first first fixed electrode portion is less than the number of first fixed electrodes 115 aligned in the second direction DR2 in the second first fixed electrode portion. In this way, it is possible to configure a comb-tooth electrode taking into consideration the shape of the detection unit, and it is possible to design the first fixed electrodes 115 to be short in length, thereby increasing the rigidity of the first fixed electrodes 115 and the first movable electrode 215.

[0082] Furthermore, for example, the detection unit shown in the dotted line frame at A1 in Fig. 1 may be modified into the detection unit shown at A31 in Fig. 10. In the detection unit in Fig. 10, a fixed electrode support portion extends from a first fixed electrode fixing portion 111 along a first direction DR1, and a fixed electrode support portion extends from the fixed electrode support portion in a second direction DR2. A first first fixed electrode support portion 113-1B extends along the first direction DR1 from the fixed electrode support portion extending in the second direction DR2. A fixed electrode support portion extends from the first fixed electrode fixing portion 111 along the first direction DR1, and a fixed electrode support portion extends from the fixed electrode support portion in a fourth direction DR4. A second first fixed electrode support portion 113-2B extends along the first direction DR1 from the fixed electrode support portion extending in the fourth direction DR4. 10 , the first fixed electrode support portion 113-1B and the second first fixed electrode support portion 113-2B are parallel to each other, and the first fixed electrode portion 110 is configured so that the two first fixed electrode support portions 113 are juxtaposed. The first fixed electrode 115 extends from the first first fixed electrode support portion 113-1B in the second direction DR2 and the fourth direction DR4, and the first movable electrode 215 is arranged so as to face the first fixed electrode 115. Similarly, the first fixed electrode 115 extends from the second first fixed electrode support portion 113-2B in the second direction DR2 and the fourth direction DR4, and the first movable electrode 215 is arranged so as to face the first fixed electrode 115. In addition, examples of the first fixed electrode portion 110 in which multiple first fixed electrode support portions 113 are arranged side by side are not limited to those shown in Figures 9 and 10, and for example, the number of first fixed electrode support portions 113 arranged side by side may be four or more.

[0083] 9 and 10 show an example in which a fixed electrode support portion extends from a single first fixed electrode fixing portion 111 in one detection unit, but this is not limiting, and fixed electrode support portions may extend from a plurality of first fixed electrode fixing portions 111 in one detection unit. Specifically, for example, the detection unit shown in the dotted frame A1 in Fig. 1 may be modified to resemble the detection unit shown in A41 in Fig. 11. In Fig. 11, one detection unit is made up of a detection unit shown in the dotted frame A411 and a detection unit shown in the dotted frame A412.

[0084] The detection unit shown in A411 includes a first fixed electrode portion 110-C and a first movable electrode portion 210-C included in the first connecting portion 410. The first fixed electrode portion 110-C includes a first fixed electrode fixing portion 111-C, a first first fixed electrode support portion 113-1C, and a second first fixed electrode support portion 113-2C. The first first fixed electrode support portion 113-1C extends from the first fixed electrode fixing portion 111-C in the first direction DR1. Furthermore, a fixed electrode support portion extends from the first first fixed electrode support portion 113-1C in the second direction DR2, and a second first fixed electrode support portion 113-2C extends from the fixed electrode support portion along the first direction DR1.

[0085] The detection unit shown in A412 includes a first fixed electrode portion 110-D and a first movable electrode portion 210-D included in the first connecting portion 410. The first fixed electrode portion 110-D includes a first fixed electrode fixing portion 111-D, a first first fixed electrode support portion 113-1D, and a second first fixed electrode support portion 113-2D. The first first fixed electrode support portion 113-1D extends from the first fixed electrode fixing portion 111-D in the first direction DR1. Furthermore, a fixed electrode support portion extends from the first first fixed electrode support portion 113-1D in the fourth direction DR4, and a second first fixed electrode support portion 113-2D extends from the fixed electrode support portion along the first direction DR1.

[0086] 11A and 11B are configured to detect physical quantities in the X-axis direction and suppress other-axis sensitivity, similar to the detection unit shown in A11 in Fig. 3. For example, a first fixed electrode 115 extending from a first first fixed electrode support portion 113-1C in the second direction DR2 and a first fixed electrode 115 extending from a first first fixed electrode support portion 113-1D in the fourth direction DR4 can be regarded as a first fixed electrode 115 extending from one fixed electrode support portion in the second direction DR2 and the fourth direction DR4. Furthermore, the first fixed electrode portion 110-C in the dotted-line frame of A411 and the first fixed electrode portion 110-D in the dotted-line frame of A412 are symmetrical with respect to a line segment (not shown) that passes between the first fixed electrode fixation portion 111-C and the first fixed electrode fixation portion 111-D and that is along the first direction DR. The same applies to the first movable electrode 215 in the dotted frame of A411 and the first movable electrode 215 in the dotted frame of A412.

[0087] Furthermore, when employing the detection unit shown in A41 of FIG. 11, an opening may be provided in the first connecting portion 410, as shown in A413 of FIG. 11. This allows wiring to be routed from the fixed electrode support portion, as will be described later in FIG. 17. However, FIG. 11 does not necessarily indicate that an opening must be provided, and the detection unit shown in the dotted line frame in A1 of FIG. 1 may be modified, for example, to the detection unit shown in A51 of FIG. 12. The detection unit shown in A51 of FIG. 12 differs from FIG. 11 in that the first connecting portion 410 does not have an opening, but is otherwise similar to the detection unit shown in A41 of FIG. 11.

[0088] Specifically, the detection unit shown in A51 in Fig. 12 includes a detection unit shown in a dotted frame in A511 and a detection unit shown in a dotted frame in A512. The detection unit shown in A511 includes a first fixed electrode portion 110-E and a first movable electrode portion 210-E of the first connecting portion 410. The first fixed electrode portion 110-E includes a first fixed electrode fixing portion 111-E, a first first fixed electrode support portion 113-1E, and a second first fixed electrode support portion 113-2E. Note that the first fixed electrode fixing portion 111-E in Fig. 12 is the same as the first fixed electrode fixing portion 111-C in Fig. 11. 11, and the second first fixed electrode support portion 113-2E in Fig. 12 is similar to the second first fixed electrode support portion 113-2C in Fig. 11, and therefore their descriptions will be omitted. Also, the first fixed electrode 115 extending from the first fixed electrode portion 110-E in Fig. 12 is similar to the first fixed electrode 115 extending from the first fixed electrode portion 110-C in Fig. 11, and the first movable electrode 215 extending from the first movable electrode portion 210-E in Fig. 12 is similar to the first movable electrode 215 extending from the first movable electrode portion 210-C in Fig. 11, and therefore their descriptions will be omitted.

[0089] The detection unit shown in A512 includes a first fixed electrode portion 110-F and a first movable electrode portion 210-F included in the first connecting portion 410. The first fixed electrode portion 110-F includes a first fixed electrode fixing portion 111-F, a first first fixed electrode support portion 113-1F, and a second first fixed electrode support portion 113-2F. Note that the first fixed electrode fixing portion 111-F in FIG. 12 is similar to the first fixed electrode fixing portion 111-D in FIG. 11. Furthermore, the first first fixed electrode supporting portion 113-1F in FIG. 12 is similar to the first first fixed electrode supporting portion 113-1D in FIG. 11, and the second first fixed electrode supporting portion 113-2F in FIG. 12 is similar to the second first fixed electrode supporting portion 113-2D in FIG. 11, so description thereof will be omitted. 11. The first fixed electrode 115 extending from the first fixed electrode portion 110-F in Fig. 12 is similar to the first fixed electrode 115 extending from the first fixed electrode portion 110-D in Fig. 11, and the first movable electrode 215 extending from the first movable electrode portion 210-F in Fig. 12 is similar to the first movable electrode 215 extending from the first movable electrode portion 210-D in Fig. 11, so a description of these will be omitted. The first fixed electrode portion 110-E in the dotted-line frame of A511 and the first fixed electrode portion 110-F in the dotted-line frame of A512 are symmetrical with respect to a line segment (not shown) that passes between the first fixed electrode fixing portion 111-E and the first fixed electrode fixing portion 111-F and that runs along the first direction DR. The same is true for the first movable electrode 215 in the dotted-line frame of A511 and the first movable electrode 215 in the dotted-line frame of A512.

[0090] From the above, in the physical quantity sensor 1 of this embodiment, the first fixed electrode support portion 113 includes first first fixed electrode support portions (113-1A, 113-1B, 113-1C, 113-1D, 113-1E, 113-1F) and second first fixed electrode support portions (113-2A, 113-2B, 113-2C, 113-2D, 113-2E, 113-2F) extending parallel to each other in the first direction DR1. In this way, the length of the first fixed electrode 115 can be designed to be short, and therefore the rigidity of the first fixed electrode 115 and the first movable electrode 215 can be increased.

[0091] Furthermore, the first fixed electrode support portion 113 may include a third first fixed electrode support portion (113-3A) extending parallel to the first first fixed electrode support portion (113-1A) and the second first fixed electrode support portion (113-2A) in the first direction DR1. This allows the length of the first fixed electrode 115 to be designed to be shorter, thereby further increasing the rigidity of the first fixed electrode 115 and the first movable electrode 215.

[0092] 9 to 12 show an example in which the method of this embodiment is modified and applied to the detection unit shown in A1 of Fig. 1, but the method of this embodiment can also be modified and applied to the detection units shown in A2, A3, and A4 of Fig. 1. Although not all combinations are shown, for example, applying the method shown in Fig. 12 to the detection unit shown in A3 of Fig. 1 results in a detection unit like that shown in A53 of Fig. 13. In Fig. 13, one detection unit is made up of the detection unit shown in the dotted line frame A531 and the detection unit shown in the dotted line frame A532.

[0093] The detection unit shown in A531 includes a third fixed electrode portion 130-E and a third movable electrode portion 230-E included in the third connection portion 430. The third fixed electrode portion 130-E includes a third fixed electrode fixing portion 131-E, a first third fixed electrode support portion 133-1E, and a second third fixed electrode support portion 133-2E. The first third fixed electrode support portion 133-1E extends from the third fixed electrode fixing portion 131-E in the third direction DR3. A fixed electrode support portion extends from the first third fixed electrode support portion 133-1E in the second direction DR2, and a second third fixed electrode support portion 133-2E extends from the fixed electrode support portion along the first direction DR1. The third fixed electrode 135 extends from the second third fixed electrode support portion 133-2E in the second direction DR2 and the fourth direction DR4. A third movable electrode 235 is disposed opposite the third fixed electrode 135. In FIG. 13, the reference numeral 135 is assigned to only one third fixed electrode, and the others are omitted. The reference numeral 235 is assigned to only one third movable electrode, and the others are omitted. Although the third fixed electrode 135 extends only in the second direction DR2 from the first third fixed electrode support portion 133-1E, the detection unit shown in A531 is configured to suppress other-axis sensitivity. This is because the third fixed electrode 135 extends only in the fourth direction DR4 from the first third fixed electrode support portion 133-1F (described later), and therefore the third fixed electrode 135 can be regarded as extending from one fixed electrode support portion in both the second direction DR2 and the fourth direction DR4.

[0094] The detection unit shown in A532 includes a third fixed electrode portion 130-F and a third movable electrode portion 230-F included in the third connection portion 430. The third fixed electrode portion 130-F includes a third fixed electrode fixing portion 131-F, a first third fixed electrode support portion 133-1F, and a second third fixed electrode support portion 133-2F. The first third fixed electrode support portion 133-1F extends from the third fixed electrode fixing portion 131-F in the third direction DR3. A fixed electrode support portion extends from the first third fixed electrode support portion 133-1F in the fourth direction DR4, and a second third fixed electrode support portion 133-2F extends from the fixed electrode support portion along the first direction DR1. The third fixed electrode 135 extends from the second third fixed electrode support portion 133-2F in the second direction DR2 and the fourth direction DR4. The role of the third fixed electrode 135 extending only in the second direction DR2 from the first third fixed electrode support portion 133-1F is as described above. Also, the third fixed electrode portion 130-E in the dotted-line frame of A531 and the third fixed electrode portion 130-F in the dotted-line frame of A532 are symmetrical with respect to a line segment (not shown) that passes between the third fixed electrode fixing portion 131-E and the third fixed electrode fixing portion 131-F and that runs along the first direction DR. The same is true for the third movable electrode 235 in the dotted-line frame of A531 and the third movable electrode 235 in the dotted-line frame of A532.

[0095] Next, a more specific configuration of the physical quantity sensor 1 when the method of this embodiment is modified and implemented will be described using FIGS. 14, 15, and 16. In FIG. 14, for convenience of explanation and illustration, only the dotted frame is shown for the area related to the detection unit, and details will be described by appropriately citing the above-mentioned figures. More specifically, the dotted frame D10 in FIG. 14 indicates a modified version of the detection unit shown in A1 in FIG. 1. Similarly, the dotted frame D20 in FIG. 14 indicates a modified version of the detection unit shown in A2 in FIG. 1, the dotted frame D30 indicates a modified version of the detection unit shown in A3 in FIG. 1, and the dotted frame D40 indicates a modified version of the detection unit shown in A4 in FIG. 1. Furthermore, the first movable electrode fixing portion 311, the first movable electrode supporting portion 313, and the first spring 317, which are already described, are only shown in the drawings and will not be described again. The same is true for the second movable electrode fixing portion 321, the second movable electrode support portion 323, the second spring 327, the third movable electrode fixing portion 331, the third movable electrode support portion 333, the third spring 337, the fourth movable electrode fixing portion 341, the fourth movable electrode support portion 343, and the fourth spring 347.

[0096] For example, the modified example of the detection unit shown in D10 of FIG. 14 is preferably common to the modified example of the detection unit shown in D30 of FIG. 14. More specifically, when the modified example of the detection unit shown in D10 of FIG. 14 is converted into the detection unit shown in A21 of FIG. 9, the modified example of the detection unit shown in D30 of FIG. 14 is preferably converted into the detection unit shown in A3 of FIG. 1 by applying the technique shown in FIG. 9 to the detection unit shown in A3 of FIG. 1. The same applies to when the modified example of the detection unit shown in D10 of FIG. 14 is converted into the detection unit shown in A31 of FIG. 10 or the detection unit shown in A51 of FIG. 12. By doing so, it is possible to improve line symmetry with respect to the line segment LS1Y for the portion including the first fixed electrode portion 110 shown in the dotted line frame in D10 and the third fixed electrode portion 130 and movable body MB shown in the dotted line frame in D30. The line segment LS1Y is a line segment that passes through the first fixed electrode fixing portion 111 and the third fixed electrode fixing portion 131 (not shown in FIG. 14) and runs along the first direction DR1. As a result, by combining the behavior of the capacitance fluctuation between the comb-tooth electrodes in the detection unit shown in D10 and the behavior of the capacitance fluctuation between the comb-tooth electrodes in the detection unit shown in D30, the detection sensitivity in the direction to be detected (X-axis direction) can be improved, and the physical quantity sensor 1 can be configured so that noise generated in each detection unit is canceled out. This can further improve the characteristics of the physical quantity sensor 1. Similarly, it is desirable to use the modified detection unit shown in D20 of FIG. 14 in common with the modified detection unit shown in D40 of FIG. 14. This can improve line symmetry with respect to the line segment LS1X for the portion including the second fixed electrode portion 120 shown in the dotted line frame in D20 and the fourth fixed electrode portion 140 and the movable body MB shown in the dotted line frame in D40. The line segment LS1X is a line segment that passes through the second fixed electrode fixing portion 121 and the fourth fixed electrode fixing portion 141 (not shown in FIG. 14) and runs along the second direction DR2. This can be expected to have the same effect as above.

[0097] 14, when the modified example of the detection unit shown in D10 is common to the modified example of the detection unit shown in D30, the modified example of the detection unit shown in D20 and the modified example of the detection unit shown in D40 may also be common to them. By doing so, it is possible to improve the line symmetry with respect to line segment LS1X and the line symmetry with respect to line segment LS1Y for the portion including first fixed electrode unit 110 related to the dotted line frame in D10, second fixed electrode unit 120 related to the dotted line frame in D20, third fixed electrode unit 130 related to the dotted line frame in D30, fourth fixed electrode unit 140 related to the dotted line frame in D40, and movable body MB.

[0098] FIG. 15 shows a configuration example of the physical quantity sensor 1 when the method shown in FIG. 11 is applied to the detection unit shown in A1 of FIG. 1. In FIG. 15, the dotted frame shown in D111 indicates the detection unit corresponding to the dotted frame shown in A411 of FIG. 11. Similarly, the dotted frame shown in D112 indicates the detection unit corresponding to the dotted frame shown in A412 of FIG. 11. In FIG. 15, the dotted frame shown in D120 indicates the detection unit shown in A2 of FIG. 1 or a modified example thereof, the dotted frame shown in D130 indicates the detection unit shown in A3 of FIG. 1 or a modified example thereof, and the dotted frame shown in D140 indicates the detection unit shown in A4 of FIG. 1 or a modified example thereof. Note that when the method shown in FIG. 11 is applied to the detection unit shown in A1 of FIG. 1, it is desirable not to apply the method shown in FIG. 11 to other detection units. This is because the presence of multiple openings may prevent the movable electrode from functioning as a probe electrode.

[0099] 14, the modified example of the detection unit shown in D120 of FIG. 15 may be the same as the modified example of the detection unit shown in D140 of FIG. 15. By doing so, it is possible to improve line symmetry with respect to line segment LS11X for a portion including first fixed electrode unit 110 associated with the dotted-line frames of D111 and D112, second fixed electrode unit 120 associated with the dotted-line frame of D120, third fixed electrode unit 130 associated with the dotted-line frame of D130, fourth fixed electrode unit 140 associated with the dotted-line frame of D140, and movable body MB. Line segment LS11X is a line segment that passes through a midpoint between first fixed electrode unit 110-C and first fixed electrode unit 110-D and third fixed electrode fixing unit 131, and that runs along first direction DR1.

[0100] As a more specific example, the physical quantity sensor 1 in the case where the technique shown in Fig. 11 is applied to the detection unit shown in A1 in Fig. 1 may have the configuration example shown in Fig. 16. In Fig. 16, the dotted frame shown in D231 indicates that the detection unit according to A531 in Fig. 13 is applied, and the dotted frame shown in D232 indicates that the detection unit according to A532 in Fig. 13 is applied. Note that the dotted frame shown in D211 in Fig. 16 corresponds to the dotted frame shown in D111 in Fig. 15, the dotted frame shown in D212 in Fig. 16 corresponds to the dotted frame shown in D112 in Fig. 15, the dotted frame shown in D220 in Fig. 16 corresponds to the dotted frame shown in D120 in Fig. 15, and the dotted frame shown in D240 in Fig. 16 corresponds to the dotted frame shown in D140 in Fig. 15. That is, FIG. 16 is an example in which FIG. 15 is conceptualized in a lower level so that the detection unit related to D130 in FIG. 15 is limited to the detection unit described above in FIG.

[0101] 13, the third fixed electrode unit 130-E in FIG. 13 is the inverse of the first fixed electrode unit 110-E in FIG. 12 with respect to the Y axis, and the third fixed electrode unit 130-F in FIG. 13 is the inverse of the first fixed electrode unit 110-F in FIG. 12 with respect to the Y axis. Therefore, by configuring the physical quantity sensor 1 in FIG. 16, it is possible to improve symmetry with respect to the line segment LS21X for the first fixed electrode unit 110 in the detection unit represented by the dotted-line frame D211 in FIG. 16 and for the portion including the third fixed electrode unit 130 and the movable body MB in the detection unit represented by the dotted-line frame D231. The line segment LS21X is a line segment that passes through a midpoint between the first fixed electrode unit 110-C and the first fixed electrode unit 110-D and a midpoint between the third fixed electrode unit 130-E and the third fixed electrode unit 130-F, and that runs along the first direction DR1. 16, the modified example of the detection unit shown in D220 and the modified example of the detection unit shown in D240 may be common to each other. By doing so, it is possible to improve line symmetry with respect to the line segment LS21X for the portion including the first fixed electrode unit 110 related to the dotted line frame in D210, the second fixed electrode unit 120 related to the dotted line frame in D220, the third fixed electrode unit 130 related to the dotted line frame in D230, the fourth fixed electrode unit 140 related to the dotted line frame in D240, and the movable body MB.

[0102] Next, an example of a technique for routing wiring from the fixed electrode fixing portion to the substrate 10 in the physical quantity sensor 1 having an opening provided in the first connecting portion 410 as described above with reference to FIGS. 12, 15, etc. will be described. As an example, an example of routing wiring from the fixed electrode fixing portion to the physical quantity sensor 1 shown in FIG. 15 will be described. That is, the dotted line frame shown in D311 of FIG. 17 corresponds to the dotted line frame shown in D111 of FIG. 15, the dotted line frame shown in D312 of FIG. 17 corresponds to the dotted line frame shown in D112 of FIG. 15, the dotted line frame shown in D320 of FIG. 17 corresponds to the dotted line frame shown in D120 of FIG. 15, the dotted line frame shown in D330 of FIG. 17 corresponds to the dotted line frame shown in D130 of FIG. 15, and the dotted line frame shown in D340 of FIG. 17 corresponds to the dotted line frame shown in D140 of FIG. 15. For ease of explanation, only the first fixed electrode fixing portion 111-C, which is the fixed electrode fixing portion for the corresponding detection unit, is shown within the dotted line frame shown in D311 of Fig. 17, and other components are not shown. Similarly, only the first fixed electrode fixing portion 111-D is shown within the dotted line frame shown in D312 of Fig. 17, only the second fixed electrode fixing portion 121 is shown within the dotted line frame shown in D320, only the third fixed electrode fixing portion 131 is shown within the dotted line frame shown in D330, and only the fourth fixed electrode fixing portion 141 is shown within the dotted line frame shown in D340.

[0103] 17, when the movable body MB is formed by processing it from a silicon substrate or the like, a predetermined member 500 can be formed at the same time to form a path for passing wiring from the fixed electrode fixing part. More specifically, for example, the predetermined member 500 is formed in a frame shape that surrounds the movable body MB, and is formed so as to pass through the opening of the first connecting part 410 and be connected to the movable electrode fixing part 301.

[0104] 17 is formed on the predetermined member 500. Then, the wiring 151-C connected to the first fixed electrode fixing portion 111-C passes from the first fixed electrode fixing portion 111-C through the opening and is drawn out to the outside of the movable body MB. Similarly, the wiring 151-D connected to the first fixed electrode fixing portion 111-D passes from the first fixed electrode fixing portion 111-D through the opening and is drawn out to the outside of the movable body MB. Similarly, the wiring 152 connected to the second fixed electrode fixing portion 121 passes from the second fixed electrode fixing portion 121 through the opening and is drawn out to the outside of the movable body MB. Similarly, the wiring 153 connected to the third fixed electrode fixing portion 131 passes from the third fixed electrode fixing portion 131 through the opening and is drawn out to the outside of the movable body MB. Similarly, the wiring 154 connected to the fourth fixed electrode fixing portion 141 passes from the fourth fixed electrode fixing portion 141 through the opening and is drawn out to the outside of the movable body MB.

[0105] FIG. 18 is an E-E cross-sectional view of FIG. 17. Because FIG. 18 is a conceptual diagram for ease of understanding, the dimensions and the like have been appropriately changed relative to the actual cross-sectional view. The direction from the left side to the right side of the paper corresponds to the second direction DR2. A cavity is formed in an area other than the predetermined area AR described above in FIG. 1. The second fixed electrode support part 123 is fixed to the predetermined area AR of the substrate 10 by the second fixed electrode fixing part 121. Similarly, the fourth fixed electrode support part 143 is fixed to the predetermined area AR of the substrate 10 by the fourth fixed electrode fixing part 141. The predetermined member 500 that overlaps the predetermined area AR in a plan view of the substrate 10 is fixed to the predetermined area AR by the same method as the second fixed electrode fixing part 121 and the fourth fixed electrode fixing part 141. 18, an insulating member shown in F is formed so as to straddle the second fixed electrode fixing portion 121, the fourth fixed electrode fixing portion 141, and the predetermined member 500, and wiring 152, wiring 153, and wiring 154 are formed on the formed insulating member. Note that although not accurately shown in FIG. 18, for example, the insulating member shown in F may be formed so as to fill the gap between the fixed electrode fixing portion and the predetermined member 500.

[0106] The wires 151-C, 151-D, 152, 153, and 154 thus drawn out to the outside of the movable body MB are connected to electrode terminals (not shown) formed on the substrate 10. This allows the electrical signals detected by the probe electrodes included in the detection unit to be connected to a differential amplifier circuit (not shown) via the electrode terminals (not shown).

[0107] Furthermore, the above description is of an example in which the movable electrode fixing portion 301 includes the first movable electrode support portion 313, the second movable electrode support portion 323, the third movable electrode support portion 333, and the fourth movable electrode support portion 343, but the physical quantity sensor 1 of this embodiment may be configured to include one movable electrode fixing portion 301, for example, as shown in Fig. 19. That is, in Fig. 19, the physical quantity sensor 1 is configured so that the movable electrode fixing portion 301 is connected to all of the first movable electrode support portion 313, the second movable electrode support portion 323, the third movable electrode support portion 333, and the fourth movable electrode support portion 343.

[0108] 19. Furthermore, although detailed description has already been given and will be omitted, a modified example of the method of this embodiment may also be applied to the detection unit of the physical quantity sensor 1 shown in FIG. 19. That is, the dotted-line frame D410 in FIG. 19 may correspond to the dotted-line frame D110 in FIG. 14, the dotted-line frame D420 in FIG. 19 may correspond to the dotted-line frame D120 in FIG. 14, the dotted-line frame D430 in FIG. 19 may correspond to the dotted-line frame D130 in FIG. 14, and the dotted-line frame D440 in FIG. 19 may correspond to the dotted-line frame D140 in FIG. 14. Furthermore, the methods described with reference to FIGS. 15, 16, and 17 may be applied in combination to the physical quantity sensor 1 of FIG. 19. In this way, in the physical quantity sensor 1 of this embodiment, the first to fourth movable electrode support members (313, 323, 333, 343) are fixed to the substrate 10 by one movable electrode fixing member 301. By doing so, one movable electrode fixing portion 301 can be disposed in the center of the substrate, and therefore the movable electrode fixing portion 301 can be fixed to the substrate 10 so as to minimize the influence of warping of the substrate 10.

[0109] The technique of this embodiment may also be implemented by an inertial measurement unit 2000 shown in FIGS. 20 and 21 . That is, the inertial measurement unit 2000 of this embodiment includes the physical quantity sensor 1 described above and a control IC 2360 serving as a control unit that performs control based on a detection signal output from the physical quantity sensor 1. This configuration uses an acceleration sensor unit 2350 including the physical quantity sensor 1 described above, thereby providing an inertial measurement unit 2000 that can enjoy the effects of the physical quantity sensor 1 described above and achieve high accuracy. The inertial measurement unit 2000 (IMU: Inertial Measurement Unit) is a device that detects inertial momentum, such as the attitude and behavior of a moving body such as an automobile or a robot. The inertial measurement unit 2000 is a so-called six-axis motion sensor equipped with acceleration sensors that detect accelerations ax, ay, and az in directions along three axes and angular velocity sensors that detect angular velocities ωx, ωy, and ωz about the three axes.

[0110] The inertial measurement unit 2000 has a rectangular parallelepiped shape with a substantially square planar shape. Screw holes 2110 serving as mounts are formed near two diagonal vertices of the square. Two screws can be inserted into these two screw holes 2110 to secure the inertial measurement unit 2000 to the mounting surface of a mounting body such as an automobile. By selecting appropriate parts and modifying the design, it is possible to reduce the size of the inertial measurement unit 2000 to a size that can be mounted in a smartphone or digital camera, for example.

[0111] Inertial measurement unit 2000 has outer case 2100, joining member 2200, and sensor module 2300, and is configured such that sensor module 2300 is inserted into outer case 2100 with joining member 2200 interposed therebetween. Sensor module 2300 has inner case 2310 and circuit board 2320. Inner case 2310 is formed with recess 2311 for preventing contact with circuit board 2320 and opening 2312 for exposing connector 2330, which will be described later. Circuit board 2320 is bonded to the bottom surface of inner case 2310 via adhesive.

[0112] 21, a connector 2330, an angular velocity sensor 2340z that detects angular velocity around the Z axis, and an acceleration sensor unit 2350 that detects acceleration in the directions of the X, Y, and Z axes are mounted on the top surface of circuit board 2320. Furthermore, an angular velocity sensor 2340x that detects angular velocity around the X axis and an angular velocity sensor 2340y that detects angular velocity around the Y axis are mounted on the side surface of circuit board 2320.

[0113] The acceleration sensor unit 2350 includes at least the physical quantity sensor 1 for measuring acceleration in the X-axis and Y-axis directions described above, and can detect acceleration in one axis direction, or in two or three axes directions as necessary. Note that the angular velocity sensors 2340x, 2340y, and 2340z are not particularly limited, but for example, vibration gyro sensors that utilize the Coriolis force can be used.

[0114] A control IC 2360 is mounted on the underside of the circuit board 2320. The control IC 2360, which serves as a control unit that performs control based on the detection signal output from the physical quantity sensor 1, is, for example, an MCU (Micro Controller Unit), and has a built-in storage unit including a nonvolatile memory, an A / D converter, and the like, and controls each unit of the inertial measurement unit 2000. Note that a plurality of other electronic components are also mounted on the circuit board 2320.

[0115] 20 and 21. For example, inertial measurement unit 2000 may be configured to include only physical quantity sensor 1 as an inertial sensor, without including angular velocity sensors 2340x, 2340y, and 2340z. In this case, inertial measurement unit 2000 may be realized by housing physical quantity sensor 1 and control IC 2360 that realizes a control unit in a package that is a housing container.

[0116] As described above, this embodiment relates to a physical quantity sensor that detects physical quantities in a first direction and a second direction that are in-plane directions and perpendicular to each other. The physical quantity sensor includes a substrate, a first fixed electrode support portion, a first fixed electrode portion, a first movable electrode portion, a second fixed electrode support portion, a second movable electrode portion, and a first movable electrode support portion. The first fixed electrode support portion is fixed to the substrate at the first fixed electrode fixing portion and extends in the first direction. The first fixed electrode portion has a first fixed electrode that extends from the first fixed electrode support portion in the second direction and in a fourth direction that is the opposite direction to the second direction. The first movable electrode portion has a first movable electrode that extends in the second direction and the fourth direction and faces the first fixed electrode. The second fixed electrode support portion is fixed to the substrate at the second fixed electrode fixing portion and extends in the second direction. The second fixed electrode portion has a second fixed electrode that extends from the second fixed electrode support portion in the first direction and in a third direction that is the opposite direction to the first direction. The second movable electrode portion has a second movable electrode that extends in the first direction and the third direction and faces the second fixed electrode. The first movable electrode support portion is fixed to the substrate at the movable electrode fixing portion, extends in a first intersecting direction that intersects the first direction and the second direction, and supports the first movable electrode portion and the second movable electrode portion via a first spring.

[0117] In this way, the first fixed electrode support section has first fixed electrodes extending in the second direction and the opposite fourth direction, and therefore can detect a physical quantity in a direction along the first direction and suppress other-axis sensitivity. Similarly, the second fixed electrode support section has second fixed electrodes extending in the first direction and the opposite third direction, and therefore can detect a physical quantity in a direction along the second direction and suppress other-axis sensitivity. Furthermore, because the first movable electrode support section extends from the movable electrode fixing section in the first intersecting direction, the degree of freedom in designing the physical quantity sensor can be increased and the shape of the physical quantity sensor can be optimized.

[0118] It may also include a movable body supported by a first movable electrode support portion via a first spring, and the movable body may include a first connecting portion extending in a second direction and having a first movable electrode portion, and a second connecting portion extending in the first direction and having a second movable electrode portion.

[0119] By doing so, a relationship can be established in which a movable electrode support part along the first intersecting direction is connected to one side of the first spring, and a movable body including a first connecting part extending in the second direction and a second connecting part extending in the first direction is connected to the other side. This allows the shape of the movable body to be rectangular and the first spring to be positioned further outward. As a result, the movable electrode support part is configured to be longer, making it possible to construct a physical quantity sensor that suppresses operation in the in-plane rotation mode.

[0120] In addition, the first spring may be provided at a corner of the movable body where the first connecting portion and the second connecting portion intersect, and the first movable electrode support portion may extend in a first intersecting direction from the movable electrode fixing portion toward the corner.

[0121] This allows the first spring to be positioned at the corner farthest from the movable electrode fixing part, which makes the movable electrode support part longer, allowing the construction of a physical quantity sensor that suppresses operation in the in-plane rotation mode.

[0122] Furthermore, the length of the first fixed electrode support portion and the length of the second fixed electrode support portion may be approximately the same.

[0123] In this way, a physical quantity sensor can be constructed that minimizes the effects of substrate warping.

[0124] Furthermore, the length of the first connecting portion and the length of the second connecting portion may be approximately the same.

[0125] This makes it possible to establish a standard for constructing a detection unit whose length in the X direction and length in the Y direction are approximately the same, thereby enabling the construction of a physical quantity sensor that minimizes the influence of warping of the substrate.

[0126] Furthermore, the angle formed between the first direction and the first intersecting direction and the angle formed between the second direction and the first intersecting direction may be substantially the same.

[0127] In this way, a standard can be established for constructing detection units whose lengths in the X direction and the Y direction are approximately the same, based on the angle between the first direction and the first intersecting direction and the angle between the second direction and the first intersecting direction, thereby enabling the construction of a physical quantity sensor that minimizes the effects of warping of the substrate.

[0128] Furthermore, the length of the first movable electrode support portion may be longer than the length of the first spring in the first intersecting direction.

[0129] This allows the first spring to be disposed further outward and the length of the first movable electrode support section to be increased, thereby suppressing operation of the physical quantity sensor in an in-plane rotation mode.

[0130] Furthermore, the length of the first movable electrode support portion may be longer than the length of the first fixed electrode support portion and the length of the second fixed electrode support portion.

[0131] In this way, it is possible to construct a physical quantity sensor in which the standard for the length of the first movable electrode support part required to suppress operation in the in-plane rotation mode is clearly defined.

[0132] In addition, the first fixed electrode portion may have a first first fixed electrode and a second first fixed electrode arranged in a first direction from the first first fixed electrode, and in the second direction, the length of the second first fixed electrode may be longer than the length of the first first fixed electrode.

[0133] By doing so, it is possible to improve the efficiency of designing the physical quantity sensor while taking into consideration the positional relationship of the first movable electrode support section that is inclined with respect to the X-axis or Y-axis.

[0134] The first fixed electrode support portion may include a first first fixed electrode support portion and a second first fixed electrode support portion extending parallel to each other in the first direction.

[0135] By doing so, the length of the first fixed electrode can be designed to be short, and the rigidity of the first fixed electrode and the first movable electrode can be increased.

[0136] The first fixed electrode support portion may also include a third first fixed electrode support portion extending parallel to the first first fixed electrode support portion and the second first fixed electrode support portion in the first direction.

[0137] By doing so, the length of the first fixed electrode can be designed to be shorter, and the rigidity of the first fixed electrode and the first movable electrode can be increased.

[0138] In addition, the first fixed electrode portion may have a first first fixed electrode portion and a second first fixed electrode portion arranged in a first direction from the first first fixed electrode portion, and the number of first fixed electrodes arranged in the second direction in the first first fixed electrode portion may be less than the number of first fixed electrodes arranged in the second direction in the second first fixed electrode portion.

[0139] By doing this, it is possible to configure a comb-tooth electrode that takes into account the shape of the detection unit, and the length of the first fixed electrode can be designed to be short, thereby increasing the rigidity of the first fixed electrode and the first movable electrode.

[0140] The electrode may also include a third fixed electrode support portion, a third fixed electrode portion, a third movable electrode portion, a fourth fixed electrode support portion, a fourth fixed electrode portion, a fourth movable electrode portion, a second movable electrode support portion, a third movable electrode support portion, and a fourth movable electrode support portion. The third fixed electrode support portion is fixed to the substrate at the third fixed electrode fixing portion and extends in the third direction. The third fixed electrode portion has a third fixed electrode extending from the third fixed electrode support portion in the second and fourth directions. The third movable electrode portion has a third movable electrode extending in the second and fourth directions and facing the third fixed electrode. The fourth fixed electrode support portion is fixed to the substrate at the fourth fixed electrode fixing portion and extends in the fourth direction. The fourth fixed electrode portion has a fourth fixed electrode extending from the fourth fixed electrode support portion in the first and third directions. The fourth movable electrode portion has a fourth movable electrode extending in the first and third directions and facing the fourth fixed electrode. The second movable electrode support portion is fixed to the substrate at the movable electrode fixing portion, extends in a second intersecting direction intersecting the second direction and the third direction, and supports the second movable electrode portion and the third movable electrode portion via the second spring. The third movable electrode support portion is fixed to the substrate at the movable electrode fixing portion, extends in a third intersecting direction intersecting the third direction and the fourth direction, and supports the third movable electrode portion and the fourth movable electrode portion via the third spring. The fourth movable electrode support portion is fixed to the substrate at the movable electrode fixing portion, extends in a fourth intersecting direction intersecting the fourth direction and the first direction, and supports the fourth movable electrode portion and the first movable electrode portion via the fourth spring.

[0141] By doing this, a physical quantity sensor can be constructed that further includes a third fixed electrode support portion, a third fixed electrode portion, a third movable electrode portion, a fourth fixed electrode support portion, a fourth fixed electrode portion, a fourth movable electrode portion, a second movable electrode support portion, a third movable electrode support portion, and a fourth movable electrode support portion.

[0142] It may also include a movable body supported by the first to fourth movable electrode support portions via the first to fourth springs, and the movable body may include a first connecting portion extending in the second direction and having a first movable electrode portion, a second connecting portion extending in the first direction and having a second movable electrode portion, a third connecting portion extending in the second direction and having a third movable electrode portion, and a fourth connecting portion extending in the first direction and having a fourth movable electrode portion.

[0143] In this way, the second connecting portion and the fourth connecting portion extend along the first direction, and the first connecting portion and the third connecting portion extend along the second direction, so that a physical quantity sensor consisting of a rectangular movable body MB can be constructed, which allows the physical quantity sensor to have a more appropriate shape.

[0144] The movable electrode fixing portion may include first to fourth movable electrode fixing portions that fix the first to fourth movable electrode supporting portions to the substrate.

[0145] In this way, a physical quantity sensor can be constructed in which a plurality of movable electrode support parts are fixed to the substrate using their respective movable electrode fixing parts, thereby improving the degree of freedom in designing the physical quantity sensor.

[0146] The first to fourth movable electrode supporting portions may be fixed to the substrate by one movable electrode fixing portion.

[0147] By doing so, one movable electrode fixing portion can be disposed in the center of the substrate, and therefore the movable electrode fixing portion can be fixed to the substrate so as to minimize the influence of warping of the substrate.

[0148] The inertial measurement unit of this embodiment also includes the above-described physical quantity sensor and a control unit that performs control based on the detection signal output from the physical quantity sensor.

[0149] Although the present embodiment has been described in detail above, it will be readily apparent to those skilled in the art that many modifications are possible without substantially departing from the novel features and advantages of the present disclosure. Therefore, all such modifications are intended to be included within the scope of the present disclosure. For example, a term described at least once in the specification or drawings together with a different term having a broader or equivalent meaning may be replaced with that different term anywhere in the specification or drawings. Furthermore, all combinations of the present embodiment and modifications are also included within the scope of the present disclosure. Furthermore, the configurations and operations of the physical quantity sensors, inertial measurement units, and the like are not limited to those described in the present embodiment, and various modifications are possible. [Explanation of symbols]

[0150] 1...Physical quantity sensor, 10...Substrate, 110,110-C,110-D,110-E,110-F...First fixed electrode part, 111,111-C,111-D,111-E,111-F...First fixed electrode fixing part, 113...First fixed electrode support part, 113-1A,113-1B,113- 1C,113-1D,113-1E,113-1F...First first fixed electrode support part, 113-2A,113-2B,113-2C,113-2D,113-2E,113-2F...Second first fixed electrode support part, 113-3A...Third first fixed electrode support part, 115...First fixed electrode , 120...second fixed electrode part, 121,121-C...second fixed electrode fixing part, 123...second fixed electrode support part, 125...second fixed electrode, 130,130-E,130-F...third fixed electrode part, 131,131-E,131-F...third fixed electrode fixing part, 133...third fixed electrode support part, 133-1E, 133-1F...First third fixed electrode support part, 133-2E,133-2F...Second third fixed electrode support part, 135...Third fixed electrode, 140...Fourth fixed electrode part, 141...Fourth fixed electrode fixing part, 143...Fourth fixed electrode support part, 145...Fourth fixed electrode, 151-C,1 51-D, 152, 153, 154...wiring, 210, 210-C, 210-D, 210-E, 210-F...first movable electrode portion, 213...second fixed electrode support portion, 215...first movable electrode, 220...second movable electrode portion, 225...second movable electrode, 230, 230-E, 230-F...third movable electrode, 235...third movable electrode, 240...fourth movable electrode portion, 245...fourth movable electrode, 301...movable electrode fixing portion, 311...first movable electrode fixing portion, 313...first movable electrode support portion, 317...first spring, 321...second movable electrode fixing portion, 323...second movable electrode support portion, 327...second spring , 331...Third movable electrode fixing portion, 333...Third movable electrode support portion, 337...Third spring, 341...Fourth movable electrode fixing portion, 343...Fourth movable electrode support portion, 347...Fourth spring, 410...First connecting portion, 420...Second connecting portion, 430...Third connecting portion, 440...Fourth connecting portion, 500...Predetermined member, 2000...Inertial measurement unit, 2100...Outer case, 2110...Screw hole, 2200...Joint member, 2300...Sensor module, 2310...Inner case, 2311...Recess, 2312...Opening, 2320...Circuit board, 2330...Connector, 2340x, 2340y,2340z...Angular velocity sensor, 2350...Acceleration sensor unit, DR1...First direction, DR2...Second direction, DR3...Third direction, DR4...Fourth direction, DR11...First intersecting direction, DR12...Second intersecting direction, DR13...Third intersecting direction, DR14...Fourth intersecting direction, L11, L12, L21, L22, L113, L123, L133, L143, L313, L323, L333, L343...Length, LS113, LS123, LS133, LS143, LS1X, LS1Y, LS11X, LS21X...Line segment, MB...Moving body, ax, ay, az...Acceleration, ωx...Angular velocity,

Claims

1. A physical quantity sensor that detects physical quantities in a first direction and a second direction that are in-plane directions and perpendicular to each other, A substrate; a first fixed electrode support portion fixed to the substrate at a first fixed electrode fixing portion and extending in the first direction; a first fixed electrode portion having a first fixed electrode extending from the first fixed electrode support portion in the second direction and a fourth direction opposite to the second direction; a first movable electrode portion extending in the second direction and the fourth direction and having a first movable electrode facing the first fixed electrode; a second fixed electrode support portion fixed to the substrate at a second fixed electrode fixing portion and extending in the second direction; a second fixed electrode portion having a second fixed electrode extending from the second fixed electrode support portion in the first direction and a third direction opposite to the first direction; a second movable electrode portion having a second movable electrode extending in the first direction and the third direction and facing the second fixed electrode; a first movable electrode support portion that is fixed to the substrate at a movable electrode fixing portion, extends in a first intersecting direction that intersects with the first direction and the second direction, and supports the first movable electrode portion and the second movable electrode portion via a first spring; A physical quantity sensor comprising:

2. 2. The physical quantity sensor according to claim 1, a movable body supported by the first movable electrode support portion via the first spring; The movable body is a first connecting portion extending in the second direction and having the first movable electrode portion; a second connecting portion extending in the first direction and having the second movable electrode portion; A physical quantity sensor comprising:

3. 3. The physical quantity sensor according to claim 2, the first spring is provided at a corner of the movable body where the first connecting portion and the second connecting portion intersect, The physical quantity sensor, wherein the first movable electrode support portion extends in the first intersecting direction from the movable electrode fixing portion toward the corner portion.

4. 2. The physical quantity sensor according to claim 1, A physical quantity sensor, wherein the length of the first fixed electrode support portion and the length of the second fixed electrode support portion are substantially the same.

5. 3. The physical quantity sensor according to claim 2, A physical quantity sensor, wherein the first connecting portion and the second connecting portion have substantially the same length.

6. 2. The physical quantity sensor according to claim 1, A physical quantity sensor, characterized in that an angle formed between the first direction and the first intersecting direction and an angle formed between the second direction and the first intersecting direction are substantially the same.

7. 2. The physical quantity sensor according to claim 1, A physical quantity sensor, characterized in that the length of the first movable electrode support portion is longer than the length of the first spring in the first intersecting direction.

8. 2. The physical quantity sensor according to claim 1, A physical quantity sensor, wherein the length of the first movable electrode support portion is longer than the length of the first fixed electrode support portion and the length of the second fixed electrode support portion.

9. 2. The physical quantity sensor according to claim 1, the first fixed electrode portion includes a first first fixed electrode and a second first fixed electrode provided in the first direction from the first first fixed electrode, A physical quantity sensor, characterized in that the length of the second first fixed electrode in the second direction is longer than the length of the first first fixed electrode.

10. 2. The physical quantity sensor according to claim 1, The physical quantity sensor, wherein the first fixed electrode support portion includes a first first fixed electrode support portion and a second first fixed electrode support portion extending parallel to each other in the first direction.

11. The physical quantity sensor according to claim 10, a third first fixed electrode support portion extending parallel to the first first fixed electrode support portion and the second first fixed electrode support portion in the first direction;

12. The physical quantity sensor according to claim 10, the first fixed electrode portion includes a first first fixed electrode portion and a second first fixed electrode portion provided in the first direction from the first first fixed electrode portion, A physical quantity sensor characterized in that the number of first fixed electrodes arranged in the second direction in the first first fixed electrode portion is smaller than the number of first fixed electrodes arranged in the second direction in the second first fixed electrode portion.

13. 2. The physical quantity sensor according to claim 1, a third fixed electrode support portion fixed to the substrate at a third fixed electrode fixing portion and extending in the third direction; a third fixed electrode portion having a third fixed electrode extending in the second direction and the fourth direction from the third fixed electrode support portion; a third movable electrode portion having a third movable electrode extending in the second direction and the fourth direction and facing the third fixed electrode; a fourth fixed electrode support portion fixed to the substrate at a fourth fixed electrode fixing portion and extending in the fourth direction; a fourth fixed electrode portion having a fourth fixed electrode extending in the first direction and the third direction from the fourth fixed electrode support portion; a fourth movable electrode portion having a fourth movable electrode extending in the first direction and the third direction and facing the fourth fixed electrode; a second movable electrode supporting portion that is fixed to the substrate at the movable electrode fixing portion, extends in a second intersecting direction that intersects with the second direction and the third direction, and supports the second movable electrode portion and the third movable electrode portion via a second spring; a third movable electrode supporting portion that is fixed to the substrate at the movable electrode fixing portion, extends in a third intersecting direction that intersects with the third direction and the fourth direction, and supports the third movable electrode portion and the fourth movable electrode portion via a third spring; a fourth movable electrode support portion that is fixed to the substrate at the movable electrode fixing portion, extends in a fourth intersecting direction that intersects the fourth direction and the first direction, and supports the fourth movable electrode portion and the first movable electrode portion via a fourth spring; A physical quantity sensor comprising:

14. The physical quantity sensor according to claim 13, a movable body supported by the first to fourth movable electrode support portions via the first to fourth springs, The movable body is a first connecting portion extending in the second direction and having the first movable electrode portion; a second connecting portion extending in the first direction and having the second movable electrode portion; a third connecting portion extending in the second direction and having the third movable electrode portion; a fourth connection portion extending in the first direction and having the fourth movable electrode portion; A physical quantity sensor comprising:

15. The physical quantity sensor according to claim 13, The physical quantity sensor is characterized in that the movable electrode fixing portion includes first to fourth movable electrode fixing portions that fix the first to fourth movable electrode support portions to the substrate.

16. The physical quantity sensor according to claim 13, The physical quantity sensor is characterized in that the first to fourth movable electrode support portions are fixed to the substrate by one of the movable electrode fixing portions.

17. The physical quantity sensor according to any one of claims 1 to 16, a control unit that performs control based on a detection signal output from the physical quantity sensor; 1. An inertial measurement unit comprising:

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