Pore device, particulate measuring system, and method for manufacturing pore device

Abstract

To provide a pore device that can be preserved for a long period without impairing reliability.SOLUTION: A pore device 100 comprises a device body 150 and a sealing member 160. The device body 150 includes a first space 122 and a second space 124 that communicate through a pore 104, and an injection opening 152 for injecting an electrolyte 5 into the first space 122 and the second space 124. A hydrophilic group 154 is added to the inside of the device body 150. The sealing member 160 seals the injection opening 152 while the first space 122 and the second space 124 are filled with the electrolyte 5.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to pore devices. [Background technology]

[0002] A particle size distribution measurement method called the electrical sensing zone method (Coulter principle) is known. In this measurement method, an electrolyte containing particles is passed through a small hole called a nanopore. When a particle passes through the pore, the electrolyte in the pore decreases by an amount equivalent to the particle's volume, increasing the electrical resistance of the pore. Therefore, by measuring the electrical resistance of the pore, the particle volume (i.e., particle size) can be measured.

[0003] 1 is a block diagram of a particle measurement system 1R using an electrical sensing zone method. The particle measurement system 1R includes a pore device 100R, a measuring apparatus 200R, and a data processing apparatus 300.

[0004] The interior of the pore device 100R is filled with an electrolyte 2 containing particles 4 to be detected. The interior of the pore device 100R is separated into two spaces by a pore chip 102, and electrodes 106 and 108 are provided in the two spaces. When a potential difference is generated between the electrodes 106 and 108, an ionic current flows between the electrodes, and the particles 4 move from one space to the other via the pores 104 by electrophoresis.

[0005] The measurement device 200R generates a potential difference between the electrode pair 106, 108 and acquires information correlated with the resistance value Rp between the electrode pair. The measurement device 200R includes a transimpedance amplifier 210, a voltage source 220, and a digitizer 230. The voltage source 220 generates a potential difference Vb between the electrode pair 106, 108. This potential difference Vb serves as a driving source for electrophoresis and also as a bias signal for measuring the resistance value Rp.

[0006] A minute current Is that is inversely proportional to the resistance of the pore 104 flows between the pair of electrodes 106 and 108 . Is=Vb / Rp …(1)

[0007] The transimpedance amplifier 210 converts the minute current Is into a voltage signal Vs. When the conversion gain is r, the following equation holds: Vs = -r × Is … (2) Substituting equation (1) into equation (2) gives equation (3). Vs = -Vb × r / Rp … (3) The digitizer 230 converts the voltage signal Vs into digital data Ds. In this manner, the measurement device 200R can obtain the voltage signal Vs that is inversely proportional to the resistance value Rp of the pore 104.

[0008] 2 is a waveform diagram of an exemplary minute current Is measured by the measurement device 200R. Note that the vertical and horizontal axes of the waveform diagrams and time charts referred to in this specification are appropriately enlarged or reduced for ease of understanding, and each waveform shown is simplified, exaggerated, or emphasized for ease of understanding.

[0009] During the short period that a particle passes through, the resistance value Rp of the pore 104 increases. Therefore, the current Is decreases in a pulsed manner each time a particle passes through. The amplitude of each pulse current correlates with the particle size. The data processing device 300 processes the digital data Ds and analyzes the number and particle size distribution of the particles 4 contained in the electrolyte 2. Part of the data processing device 300 may be a server or a cloud.

[0010] Preparation before use of the pore device 100R will be described. The pore device 100R requires hydrophilic treatment before use. When an electrolyte solution is injected into a pore device 100R that has not been subjected to hydrophilic treatment, air bubbles will adhere to the inner wall surface of the internal space, the surfaces of the electrodes (wiring) 106, 108, the surface of the pore chip 102, the pores 104, etc.

[0011] Air bubbles cause several problems. For example, if air bubbles adhere to the pores 104, the through current of the pores 104 becomes unstable and the path of the particles 4 passing through the pores 104 is obstructed, making it difficult to measure the particles properly.

[0012] Furthermore, if air bubbles are trapped in the internal space that serves as the flow path, the flow path may become constricted, which will prevent particles in the liquid from dispersing evenly.

[0013] If air bubbles are attached to the electrodes 106 and 108, poor contact with the electrolyte 2 occurs, ion exchange does not occur sufficiently, and a normal measurement current cannot be obtained.

[0014] To solve this problem, it is preferable to subject the inside of the pore device 100R to a hydrophilic treatment before injecting the electrolyte. There are various methods for hydrophilic treatment, but one known method is to impart hydrophilic groups to the inside of the pore device 100R by irradiating it with aqua plasma. [Prior art documents] [Patent documents]

[0015] [Patent Document 1] Patent No. 7282177 Summary of the Invention [Problem to be solved by the invention]

[0016] It is not easy for users of the Pore Device 100R to perform hydrophilic treatment. In addition, the hydrophilic groups decrease when exposed to the atmosphere, so the effect of the hydrophilic treatment only lasts for a few days to a week. Therefore, currently, the manufacturer of the Pore Device 100R must perform the hydrophilic treatment in accordance with the time when the user will use the Pore Device 100R and deliver it to the user. Then, the user who receives the Pore Device 100R must use the Pore Device 100R within a few days.

[0017] Patent Document 1 discloses a technique for storing multiple pore devices after hydrophilic treatment in a container filled with an electrolyte solution. This technique prevents the hydrophilic groups from being exposed to the atmosphere, thereby preventing the loss of hydrophilic groups and enabling long-term storage.

[0018] However, in the method described in Patent Document 1, if the container itself is contaminated, the contaminants may enter the pore device during storage in the container and clog the pores. Furthermore, if impurities are present in the container, they may have a chemically adverse effect.

[0019] Furthermore, since the liquid is stored in a container, the weight increases and portability decreases.

[0020] When using a pore device, after removing it from the container, it is necessary to wipe off any electrolyte that has adhered to the outside of the pore device. This is a cumbersome task for users. In addition, wiping off the electrolyte poses the risk of contaminating the device.

[0021] Furthermore, waste liquid is generated from the storage solution in the container, and disposal of this waste liquid is troublesome for the user.

[0022] Furthermore, when multiple devices are stored in one container, once the container is opened and one or more devices are removed, contamination will occur on the other devices, making this less desirable as a particle detection device.

[0023] Furthermore, the contact portions between the probe of the measuring device 200R and the electrodes 106 and 108 are immersed in the electrolyte, so it is necessary to take measures to prevent corrosion of the contact portions.

[0024] The present disclosure has been made in this context, and one exemplary purpose of an embodiment thereof is to provide a pore device that can be stored for a long period of time without compromising reliability. [Means for solving the problem]

[0025] A pore device according to one embodiment of the present disclosure has a first space and a second space connected through a pore, an injection port for injecting an electrolyte solution into the first space and the second space, and comprises a device body having hydrophilic groups attached thereto, and a sealing member that seals the injection port when the first space and the second space are filled with the electrolyte solution.

[0026] Another aspect of the present invention is a method for manufacturing a pore device, which includes the steps of: providing a hydrophilic group inside a device body having a first space and a second space communicating with each other through a pore and an inlet for injecting an electrolyte solution into the first space and the second space; injecting the electrolyte solution into the device body through the inlet; and sealing the inlet with a sealing member.

[0027] Any combination of the above elements, or mutual substitution of elements or expressions between methods, devices, systems, etc., are also valid aspects of the present invention or the present disclosure. Furthermore, the description in this section (Means for Solving the Problems) does not explain all essential features of the present invention, and therefore, subcombinations of the described features may also constitute the present invention. [Effects of the Invention]

[0028] Certain aspects of the present disclosure can improve the reliability of pore devices. [Brief explanation of the drawings]

[0029] [Figure 1] FIG. 1 is a block diagram of a particle measurement system using an electrical sensing zone method. [Figure 2] FIG. 10 is a waveform diagram of an exemplary minute current Is measured by a measuring device. [Figure 3] FIG. 1 is a cross-sectional view of a pore device according to an embodiment. [Figure 4] 10A to 10C are diagrams illustrating a method for manufacturing a pore device according to an embodiment. [Figure 5] FIG. 2 is a cross-sectional view of the device body according to the first embodiment. [Figure 6] FIG. 10 is a diagram showing the results of a surface component analysis of the electrode portion of a comparative sample in which the carbon barrier layer is omitted. [Figure 7] FIG. 10 shows the results of a surface component analysis of the electrode portion of a sample provided with a carbon barrier layer. [Figure 8] FIG. 10 is a cross-sectional view of a device body according to a second embodiment. [Figure 9] FIG. 10 is a cross-sectional view of a device main body according to Modification 1. [Figure 10] FIG. 10 is a cross-sectional view of a device main body according to Modification 2. DETAILED DESCRIPTION OF THE INVENTION

[0030] (Outline of the embodiment) A summary of some exemplary embodiments of the present disclosure is provided. This summary is intended to provide a simplified overview of some concepts of one or more embodiments in order to provide a basic understanding of the embodiments as a prelude to the more detailed description that follows. It is not intended to limit the scope of the invention or disclosure. This summary is not an exhaustive overview of all possible embodiments, and is not intended to identify key elements of all embodiments or to delineate the scope of some or all aspects. For convenience, the term "one embodiment" may refer to one embodiment (example or variant) or multiple embodiments (examples or variants) disclosed herein.

[0031] A pore device according to one embodiment has a first space and a second space connected through a pore, an injection port for injecting an electrolyte solution into the first space and the second space, and comprises a device body having hydrophilic groups attached thereto, and a sealing member that seals the injection port when the first space and the second space are filled with the electrolyte solution.

[0032] This pore device is shipped as a product with the injection port sealed while the inside of the device body is filled with electrolyte. By peeling off the sealing member, the user can inject a liquid containing the particles to be detected through the injection port. With this configuration, the hydrophilic groups do not come into contact with air, allowing for long-term storage. Furthermore, since there is no need to immerse the device body itself in a storage solution, wiping the device body is unnecessary and contamination by the storage solution can be prevented.

[0033] In one embodiment, the device body may include a pore chip having a pore formed therein, and a pore chip case that houses the pore chip and whose interior is divided into a first space and a second space by the pore chip. The pore chip case may include a body that houses the pore chip and has the first space and the second space, and a substrate that is connected to the body and on which an electrode is formed, at least a portion of which is exposed to the interior space of the body.

[0034] In one embodiment, each electrode may include a first metal layer formed on the substrate and a carbon barrier layer formed above the first metal layer in a portion exposed to the internal space of the body. With this configuration, the carbon barrier layer can block chloride ions contained in the electrolyte, thereby preventing the chloride ions from reaching the first wiring layer and improving reliability.

[0035] In one embodiment, the substrate is a printed circuit board, the first metal layer is made of Cu, and the electrode may further include a second metal layer made of Ni formed on the first metal layer and a third metal layer made of Au formed on the second metal layer. A carbon barrier layer may be formed on the third metal layer, which can prevent deterioration of the Cu.

[0036] In one embodiment, the substrate is a film substrate, and the material of the first metal layer may be Ag (silver), which can prevent Ag from being chlorinated.

[0037] In one embodiment, the carbon barrier layer may also be formed on the portion of the body exposed to the external space, thereby preventing oxidation of Ag.

[0038] In one embodiment, the carbon barrier layer may have a thickness of 10 μm to 30 μm.

[0039] In one embodiment, the electrode may further include an Ag / AgCl (silver-silver chloride) layer formed on the carbon barrier layer, which allows for efficient ion exchange with the electrolyte.

[0040] A particle measurement system according to one embodiment may include the above-described pore device and a measurement apparatus that applies an electrical signal to an electrode of the pore device and measures the electrical signal generated in the pore device.

[0041] A manufacturing method according to one embodiment includes the steps of: providing a hydrophilic group inside a device body having a first space and a second space connected through a pore and an injection port for injecting an electrolyte solution into the first space and the second space; injecting the electrolyte solution into the device body through the injection port; and sealing the injection port with a sealing member.

[0042] In one embodiment, the manufacturing method may further comprise the step of testing the device body after the electrolyte is injected. The sealing step may be performed after the testing step.

[0043] (Embodiment) Preferred embodiments will be described below with reference to the drawings. The same or equivalent components, parts, and processes shown in each drawing will be given the same reference numerals, and redundant explanations will be omitted as appropriate. Furthermore, the embodiments are examples and do not limit the disclosure and invention, and all features and combinations thereof described in the embodiments are not necessarily essential to the disclosure and invention.

[0044] In addition, the dimensions (thickness, length, width, etc.) of each component shown in the drawings may be enlarged or reduced as appropriate for ease of understanding. Furthermore, the dimensions of multiple components do not necessarily represent their relative sizes, and even if a component A is depicted as being thicker than another component B in the drawings, it is possible that component A is thinner than component B.

[0045] In this specification, "a state in which component A is connected to component B" includes not only a case in which component A and component B are directly physically connected to each other, but also a case in which component A and component B are indirectly connected to each other via other components that do not substantially affect the electrical connection between them or that do not impair the function or effect achieved by their connection.

[0046] Similarly, "a state in which component C is connected (provided) between component A and component B" includes not only a case in which component A and component C, or component B and component C, are directly connected, but also a case in which they are indirectly connected via other components that do not substantially affect the electrical connection state between them or that do not impair the function or effect achieved by their combination.

[0047] In addition, in this specification, symbols attached to electrical signals such as voltage signals and current signals, or circuit elements such as resistors, capacitors, and inductors, represent the respective voltage values, current values, or circuit constants (resistance values, capacitance values, inductances) as necessary.

[0048] 3 is a cross-sectional view of a pore device 100 according to an embodiment. The pore device 100 includes a device body 150 and a sealing member 160. The device body 150 includes a first space 122 and a second space 124 that communicate with each other through a pore 104. The device body 150 is provided with an injection port 152 for injecting an electrolyte solution containing particles to be measured into the first space 122 and the second space 124 during measurement. The device body 150 also has electrodes 106 and 108 for applying an electric field between the first space 122 and the second space 124.

[0049] The inside of the device body 150 is provided with hydrophilic groups 154 by plasma treatment or the like.

[0050] The inside of the first space 122 and the second space 124 of the device body 150 is filled with a storage electrolyte 5 so that the hydrophilic groups 154 do not come into contact with air.

[0051] The sealing member 160 seals the injection port 152 in a state in which the first space 122 and the second space 124 are filled with the electrolyte solution 5.

[0052] When using the pore device 100, the injection port 152 is exposed by peeling the sealing member 160 from the device body 150. In Fig. 5, two injection ports 152 are blocked by one sealing member 160, but the present disclosure is not limited thereto, and a separate sealing member 160 may be provided for each injection port 152. Furthermore, if the device body 150 has an opening other than the injection port 152, for example, an opening for venting air, the sealing member 160 is attached so as to block the other opening.

[0053] The above is the overall configuration of the pore device 100. According to this pore device 100, the device is shipped as a product with the injection port 152 sealed while the inside of the device body 150 is filled with the storage electrolyte solution 5. The user can inject a liquid containing particles to be detected through the injection port 152 by peeling off the sealing member 160. With this configuration, the hydrophilic groups 154 do not come into contact with air, allowing for long-term storage.

[0054] Furthermore, since there is no need to immerse the device body 150 itself in a preservative solution, there is no need to wipe the device body 150.

[0055] Furthermore, since the contact portions between the probe of the measuring device 200R and the electrodes 106 and 108 are not immersed in the electrolyte, it is necessary to take measures to prevent corrosion of the contact portions.

[0056] Furthermore, in the conventional method of storing multiple pore devices in the same container, there is a possibility that the storage solution may be contaminated when one pore device is removed, which may result in contamination of the other pore devices. In contrast, this embodiment does not cause such a problem.

[0057] Although the storage electrolyte 5 is waste liquid during measurement, the amount is significantly less than the amount of storage liquid described in Patent Document 1.

[0058] Another advantage is that each device is packaged separately, making it easy to handle.

[0059] The configuration of the device main body 150 is not particularly limited, and the technology according to the present disclosure can be applied to various known or future available pore devices. An example of the configuration of the device main body 150 will be described below.

[0060] The device body 150 includes a pore chip 102 and a pore chip case 101 that houses the pore chip 102. A pore 104 is formed in the pore chip 102. The pore chip case 101 includes two spaces 122 and 124 that are partitioned by the pore chip 102. The spaces 122 and 124 are filled with a storage electrolyte 5 during shipping and storage. During measurement, the spaces 122 and 124 are filled with an electrolyte containing particles 4.

[0061] For example, the pore chip case 101 includes a substrate 110 and a body 120. The body 120 is provided on the substrate 110. Wirings 112P and 112N corresponding to the electrodes 106 and 108 are formed on the substrate 110. The wirings 112P and 112N are drawn out from inside the spaces 122 and 124 of the body 120 to the outside, respectively, and perform ion exchange with the electrolyte 2 in an ion exchange region 118 inside the body 120, and are electrically connectable to the measuring device 200 in a contact region 116 outside.

[0062] The above is an example of the configuration of the device main body 150.

[0063] Next, a method for manufacturing the pore device 100 will be described.

[0064] 4 is a diagram illustrating a method for manufacturing the pore device 100 according to the embodiment. First, the device body 150 is manufactured (S100). The method for manufacturing the device body 150 varies depending on the structure and type of the device body 150, and since the structure and type of the device body 150 are not particularly limited in the present disclosure, explanations thereof will be omitted.

[0065] A hydrophilic treatment is performed on the inside of device body 150 (S102). There are various methods for the hydrophilic treatment, but for example, hydrophilic groups 154 can be imparted to the inside of device body 150 by aqua plasma irradiation.

[0066] Next, the storage electrolyte 5 is injected into the device body 150 through the injection port 152 (S104). As a result, the inside of the device body 150 is filled with the electrolyte 5, the air inside the device body 150 is expelled, and the hydrophilic groups 154 are no longer in contact with the air.

[0067] Then, a sealing member 160 is attached to close the injection port 152 of the device body 150 (S106).

[0068] The above is the method for manufacturing the pore device 100.

[0069] Next, the inspection of the pore device 100 will be described. The shape and size of the pores in the pore chip have a significant impact on measurement accuracy. However, mechanical evaluation of the pores requires a scanning electron microscope (SEM) or the like, and accurate evaluation of pores of a few nm to a few hundred nm in size requires a length measurement scanning electron microscope (CD-SEM) or the like, making it unrealistic to inspect every single one. Furthermore, electrical testing requires immersing the inside of the pore device 100 in an electrolyte solution for inspection. Therefore, in the conventional form in which the pore device is shipped in a dry state after hydrophilic treatment, every single one of the electrical tests could not be inspected. For this reason, it was common practice to perform quality assurance for each lot by sampling inspection.

[0070] In contrast, the above-described pore device 100 has the advantage that 100% inspection is possible. In the manufacturing process of the pore device 100, the device body 150 is subjected to a hydrophilic treatment, and an electrical test can be performed after the electrolyte is poured into it. Therefore, an electrical test is performed on all units after the electrolyte is poured into them, and only units that pass the test can be shipped with the sealing member 160 attached. The quality and reliability of the pore device 100 can be further improved by 100% inspection.

[0071] Next, prevention of corrosion of the electrodes 106 and 108 will be described.

[0072] As described above, since device body 150 is not infiltrated into the storage solution, there is no need to worry about corrosion of contact region 116 of wiring 112P, 112N corresponding to electrodes 106, 108, and therefore no special treatment is required.

[0073] On the other hand, in order to maintain the performance of the pore device 100 for a long period of time, such as several months to years, it is necessary to take measures to prevent corrosion of the ion exchange regions 118 of the wirings 112P and 112N.

[0074] The corrosion of the wirings 112P and 112N will be described.

[0075] As the substrate 110, film substrates such as PET (polyethylene terephthalate), printed circuit boards, and glass substrates are possible candidates.

[0076] PET substrates are inexpensive and easy to process, so they are often used in disposable pore devices 100R. Because PET substrates have low heat resistance, the wiring 112P and 112N are often made of silver particles that can be formed at low temperatures.

[0077] However, silver oxidizes quickly, forming a silver oxide insulating film on its surface. This insulating film prevents electrical connection to the substrate 110 in the contact area 116. When establishing an electrical connection using a pogo pin or similar, wiping can break through the silver oxide insulating film to expose the new surface and establish contact, but the thinness of the silver wiring makes the contact unstable.

[0078] Printed circuit boards are generally used for electrode formation and are made of glass epoxy materials such as FR-4 (Flame Retardant Type 4). In the case of printed circuit boards, the wiring layer is copper, which is usually gold-plated on top, so there is no need to worry about oxidation like with PET, and contact with external electrodes is also good.

[0079] However, when used as the substrate 110 of the pore device 100, the inside of the body 120 is filled with the electrolyte 5 and stored for a long period of time, the chloride ions contained in the electrolyte 5 pass through the silver-silver chloride electrode and the gold plating underneath and reach the copper of the wiring layer. This causes copper chlorination, and copper chloride, an insulator, precipitates on the surface of the electrode, causing poor contact.

[0080] Glass substrates are often used in electrochemical measurements that use electrolytes. Because glass has a high melting point, gold can be directly wired using vapor deposition. This means there is less risk of chloride buildup, as with printed circuit boards, and less risk of poor contact, as with PET substrates. However, the price is more than one order of magnitude higher, making it unsuitable for disposable pore devices.

[0081] A preferred wiring structure in the device body 150 will now be described.

[0082] 5 is a cross-sectional view of the device body 150A according to Example 1. Here, the description will be focused on the wiring structure.

[0083] The first electrode 106 and the second electrode 108 are wirings 130A having the same wiring structure.

[0084] The wiring 130A includes a first wiring layer 132, a second wiring layer 136, a third wiring layer 138, a carbon barrier layer 134, and an Ag / AgCl layer 140, which are stacked in this order on the printed circuit board 110A. The first wiring layer 132 is made of Cu, the second wiring layer 136 is made of Ni, and the third wiring layer 138 is made of Au. The carbon barrier layer 134 is conductive and is formed on the third wiring layer 138. In a portion (ion exchange region) on the carbon barrier layer 134 that is exposed to the inside of the body 120, an Ag / AgCl layer 140 is formed to efficiently perform ion exchange with the electrolyte solution 2.

[0085] The thickness of the carbon barrier layer 134 is preferably, for example, about 10 μm to 30 μm, specifically about 20 μm. By setting the thickness in this range, chloride ions can be blocked while suppressing increases in manufacturing costs.

[0086] The above is the structure of the device main body 150A. Next, its advantages will be explained. In order to verify the advantages of the carbon barrier layer 134 in the device main body 150A, a device sample having a carbon barrier layer and a comparative device sample omitting the carbon barrier layer were fabricated. The interiors of the two samples were filled with an electrolyte, and a current was applied, after which the surface components of the electrodes were analyzed.

[0087] Figure 6 shows the results of a surface component analysis of the electrode portion of a comparative sample that did not include a carbon barrier layer. It can be seen that in the sample that did not include a carbon barrier layer, large amounts of Cu and Cl were detected on the electrode surface.

[0088] 7 shows the results of a surface component analysis of the electrode portion of the sample with a carbon barrier layer. It can be seen that in the sample with the carbon barrier layer, Cu does not appear on the surface, but a large amount of Ag contained in the Ag / AgCl layer 140 is detected.

[0089] 5 can prevent chloride ions contained in the electrolytic solution 5 from reaching the first wiring layer 132. This can prevent copper chloride from being generated in the first wiring layer 132 and from being deposited on the electrode surface.

[0090] 8 is a cross-sectional view of a device body 150B according to Example 2. The device body 150B according to Example 2 includes a film substrate 110B instead of the printed circuit board 110A. The film substrate 110B is, for example, a PET substrate, and electrodes 106 and 108 are formed on the film substrate 110B. The electrodes 106 and 108 are formed of wiring 130B having the same structure. The material of the film substrate 110B is not limited to PET, and it can also be made of polyimide, cycloolefin polymer, acrylic, or the like.

[0091] The wiring 130B includes a stacked first wiring layer 132, a carbon barrier layer 134, and an Ag / AgCl layer 140. The first wiring layer 132 is made of Ag. The carbon barrier layer 134 is formed on the first wiring layer 132. The carbon barrier layer 134 is formed both inside and outside the body 120.

[0092] The above is the configuration of the device main body 150 B. In the device main body 150 B, inside the body 120 , the carbon barrier layer 134 can prevent chloride ions in the electrolyte 5 from reaching the first wiring layer 132 .

[0093] Furthermore, on the outside of the body 120, the carbon barrier layer 134 can prevent the first wiring layer 132 from being oxidized.

[0094] Next, a modified example of the wiring 130 will be described.

[0095] (Variation 1) 9 is a cross-sectional view of a device body 150C according to Modification 1. In Examples 1 and 2, the contact region was formed on the upper surface of the substrate 110, but this is not limited thereto. In Modification 1, the contact region 116 is formed on the back surface of the substrate 110, i.e., on the side opposite the ion exchange region 118.

[0096] The wiring 130C has wiring or pads including a first wiring layer 132, a carbon barrier layer 134, and a third wiring layer 138 laminated on the back surface of the substrate 110. The first wiring layer 132 on the upper surface side of the printed circuit board 110A and the first wiring layer 132 on the lower surface side are connected by a via hole 133.

[0097] (Variation 2) 10 is a cross-sectional view of a device body 150D according to Modification 2. In Modification 2, the contact region 116 and the ion exchange region 118 are connected via wiring 131 and a via hole 133 inside the printed circuit board 110D.

[0098] The present invention has been described based on the embodiments, but the embodiments merely illustrate the principles and applications of the present invention, and many modifications and changes in arrangement are permitted to the embodiments as long as they do not deviate from the concept of the present invention defined in the claims. [Explanation of symbols]

[0099] 1. Particle measurement system 2 Electrolyte 4 particles 5 Electrolyte 200 Measuring Equipment 210 Transimpedance Amplifier 220 Voltage Source 230 digitizer 100 pore device 101 Pore Tip Case 102 Pore Tip 104 Pore 106,108 electrode 110 Substrate 110A Printed Circuit Board 110B film substrate 112P, 112N wiring 116 Contact Area 118 Ion Exchange Region 120 Body 122 1st space 124 2nd space 130 Wiring 132 1st wiring layer 134 Carbon Barrier Layer 136 2nd wiring layer 138 3rd wiring layer 140 Ag / AgCl layer 150 Device body 152 Inlet

Claims

1. a device body having a first space and a second space communicating with each other through a pore, and an injection port for injecting an electrolyte into the first space and the second space, the device body having a hydrophilic group added thereto; a sealing member that seals the injection port when the first space and the second space are filled with the electrolyte; A pore device comprising:

2. The device body comprises: a pore tip in which the pores are formed; a pore tip case that accommodates the pore tip and whose interior is divided into the first space and the second space by the pore tip; Including, The pore tip case is a body that houses the pore tip and has the first space and the second space; a substrate on which an electrode is formed, the electrode being connected to the body and at least a portion of which is exposed to the interior space of the body; The pore device of claim 1 , comprising:

3. Each of the electrodes is a first metal layer formed on the substrate; a carbon barrier layer formed above the first metal layer in a portion of the body exposed to the internal space; The pore device of claim 2, comprising:

4. the substrate is a printed circuit board, the material of the first metal layer is Cu; The electrode is a second metal layer of Ni formed on the first metal layer; a third metal layer of Au formed on the second metal layer; further comprising The pore device of claim 3 , wherein the carbon barrier layer is formed on the third metal layer.

5. the substrate is a film substrate, The pore device according to claim 3 or 4, wherein the material of the first metal layer is Ag.

6. The pore device according to claim 3 or 4, wherein the carbon barrier layer is also formed on a portion of the body exposed to the external space.

7. The pore device according to claim 3 or 4, characterized in that the thickness of the carbon barrier layer is 10 μm to 30 μm.

8. The pore device according to claim 3 or 4, wherein the electrode further comprises an Ag / AgCl layer formed on the carbon barrier layer.

9. A pore device according to any one of claims 1 to 4; A measuring device that applies an electrical signal to the electrode of the pore device and measures the electrical signal generated in the pore device; A particle measurement system comprising:

10. A method for manufacturing a pore device, comprising: a step of providing a hydrophilic group inside a device body having a first space and a second space communicating with each other through a pore, and an injection port for injecting an electrolyte into the first space and the second space; injecting an electrolyte solution into the device body through the injection port; sealing the injection port with a sealing member; A manufacturing method comprising:

11. Further comprising a step of testing the device body after injecting the electrolyte solution; The method of claim 10, wherein the sealing step occurs after the testing step.

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