Sample measurement device

Abstract

To provide a sample measurement device which can transport a sample to a measurement position with high accuracy.SOLUTION: A sample measurement device includes: a measuring device which measures a sample; a cassette which may store the multiple samples; and a transport device which takes out one of the multiple samples from the cassette to transport the sample to the measuring device. Further, the sample measurement device includes a contact avoidance part which prevents contact between the sample and a part of the cassette when the transport device takes out the one sample.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a sample measurement device. [Background technology]

[0002] Conventionally, a transport device that transports samples such as thin substrates stored in a cassette to the next process has been known (see Patent Document 1). The transport device described in Patent Document 1 includes a substrate distance detection device disposed between two cassettes, a robot that moves the thin substrate upward and is capable of moving the thin substrate in the front-to-back and left-to-right directions and rotating on a horizontal plane, and a control device that controls the robot.

[0003] The substrate distance detection device is disposed so as to face the side surface of the thin substrate stored in each cassette, and has first distance sensors. The first distance sensors are disposed in at least two locations in the front-rear direction near one side surface of the thin substrate stored in the cassette, and detect the distance from the side surface of the thin substrate.

[0004] The robot has a second distance sensor capable of detecting the distance to the front surface of the thin substrate. The control device calculates the amount of correction for positional and angular deviation of the thin substrate relative to a predetermined position based on the detection results of the first and second distance sensors. The control device then moves the robot to a pickup position for the thin substrate based on the calculated amount of correction. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 10-120172 Summary of the Invention [Problem to be solved by the invention]

[0006] However, in the transport device described in Patent Document 1, if the thin substrate comes into contact with the wall of the cassette, friction occurs between the wall and the thin substrate when the robot picks up the thin substrate and pulls it out of the cassette. This can cause the thin substrate to shift, changing the robot's pick-up position or causing the thin substrate to come off the robot's pick-up. As a result, a problem can occur in which the thin substrate cannot be placed in the measurement position.

[0007] The present invention has been made to solve the above problems, and an object of the present invention is to provide a sample measurement device that can transport a sample to a measurement position with high precision (accuracy). [Means for solving the problem]

[0008] A sample measurement device embodying one aspect of the present invention includes a measuring instrument for measuring a sample, a cassette capable of storing multiple samples, and a transport device for removing one of the multiple samples from the cassette and transporting it to the measuring instrument. The sample measurement device further includes a contact avoidance unit for preventing contact between the sample and a part of the cassette when the transport device removes the sample. [Effects of the Invention]

[0009] According to the sample measurement device having the above configuration, the sample can be transported to the measurement position with high precision. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic front view showing the configuration of a sample measurement device according to a first embodiment. [Figure 2] FIG. 2 is a schematic plan view showing a cassette and a position detection unit of the sample measurement device according to the first embodiment. [Figure 3] FIG. 2 is a cross-sectional view taken along the line AA shown in FIG. [Figure 4] FIG. 2 is a block diagram showing the configuration of a control system of the sample measurement device according to the first embodiment. [Figure 5]1A and 1B are diagrams illustrating the displacement of a sample that occurs when the sample, which is in contact with the side wall of the cassette, is pulled upward. [Figure 6] 1A and 1B are diagrams illustrating the displacement of a sample that occurs when the sample, which is in contact with the side wall of the cassette, is pulled out horizontally. [Figure 7] 5 is a flowchart showing a contact avoidance process performed by a control unit according to the first embodiment. [Figure 8] 10 is a flowchart showing a contact avoidance process performed by a control unit according to the second embodiment. [Figure 9] FIG. 10 is a front view showing a support portion of a cassette in a sample measurement device according to a third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In this specification and the drawings, elements having substantially the same functions or configurations are designated by the same reference numerals, and redundant description will be omitted.

[0012] First Embodiment [Configuration of sample measurement device] First, the configuration of the sample measurement device according to the first embodiment will be described with reference to FIGS. Fig. 1 is a schematic front view showing the configuration of the sample measurement device according to the first embodiment, Fig. 2 is a schematic plan view showing the cassette and position detection unit of the sample measurement device according to the first embodiment, and Fig. 3 is a cross-sectional view taken along line AA shown in Fig. 1.

[0013] 1 and 2, the sample measurement device 10 includes a measuring device 11 that measures the sample 30, a cassette 12, a transport device 13, a position detection unit 14, and a control unit 17 (see FIG. 4). The measuring device 11, cassette 12, transport device 13, and position detection unit 14 are installed on a stand 15.

[0014] The cassette 12 can store a plurality of samples 30. The transport device 13 removes the samples 30 from the cassette 12 and transports them to the measuring instrument 11. The position detection unit 14 detects the positions of the plurality of samples 30 stored in the cassette 12. The control unit 17 controls the driving of the transport device 13.

[0015] The measuring instrument 11 has a measuring unit. The measuring unit is a part that measures (measures) the sample 30 for predetermined measurement items. For example, if the measuring instrument 11 is a device that measures the surface condition of the sample 30, the measuring unit measures the surface condition of the sample 30.

[0016] The surface condition of the sample 30 is at least one of the color, surface properties, and glossiness of the sample 30. The surface properties of the sample 30 are typically the surface roughness of the sample 30. In this embodiment, as an example, the measuring instrument 11 is an instrument that measures the color of the sample 30, i.e., a colorimeter. The sample 30 to be measured is placed with its surface to be measured close to and facing the measurement unit of the measuring instrument 11.

[0017] A single cassette 12 can store a plurality of samples 30 of different sizes. The sample 30 to be measured is typically a plate-shaped component. In this embodiment, the shape of the sample 30 refers to the shape of the sample 30 when viewed from the front, in other words, the planar shape of the sample placed horizontally. In this embodiment, as an example, the measurement target is a plate-shaped sample 30 that is quadrangular (e.g., rectangular, square, etc.) in plan view. The sample is made of a material that does not substantially transmit visible light, i.e., an opaque material.

[0018] Here, the reason for using the cassette 12 capable of storing a plurality of samples 30 of different sizes will be explained. If only samples of the same size are stored in one cassette 12, a dedicated cassette 12 must be prepared for each sample size. Therefore, even if one cassette 12 can store 50 samples, if even one sample of a different size is included among the samples to be measured, the different-sized samples must be stored in two cassettes 12. As a result, a cassette 12 storing only one sample occupies the same area as a cassette capable of storing 50 samples, thereby reducing the number of samples that can be stored in the sample measurement device 10 as a whole. In contrast, if a cassette 12 capable of storing multiple samples of different sizes is used, the above-mentioned different-sized samples can be stored together with other samples in a single cassette 12. Therefore, using a cassette 12 capable of storing multiple samples of different sizes increases the number of samples that can be stored in the sample measurement device 10 as a whole compared to storing only samples of the same size in a single cassette 12. For the above reasons, in this embodiment, a cassette 12 capable of storing a plurality of samples of different sizes is used.

[0019] A plurality of cassettes 12 are placed on the stand 15. The plurality of cassettes 12 include a first cassette 12 in which samples 30 before measurement are stored, and a second cassette 12 for storing samples 30 after measurement. Hereinafter, the samples 30 before measurement are also referred to as "unmeasured samples 30." Furthermore, the samples 30 after measurement are also referred to as "measured samples 30."

[0020] The cassette 12 can store a plurality of samples stacked at a predetermined interval in the vertical direction, i.e., arranged in multiple stages (multiple stages) in the vertical direction. Each stage of the cassette 12 stores a sample 30 with the surface to be measured facing downward. The number of cassettes 12 that can be placed on the stand 15 can be changed as needed. In this embodiment, a total of two cassettes 12, a first cassette 12 and a second cassette 12, are placed on the stand 15.

[0021] The transport device 13 sequentially takes out samples from the designated first cassette 12 and transports them to the measuring instrument 11. The transport device 13 is configured by a multi-axis robot. In this embodiment, as an example, the transport device 13 is configured by a six-axis robot. The six-axis robot serving as the transport device 13 is equipped with a force sensor (six-axis force sensor) not shown.

[0022] The transport device 13 is equipped with a hand unit 16 that holds the sample. The hand unit 16 is located at the tip of a six-axis robot that constitutes the transport device 13. The hand unit 16 has a vacuum generator and a suction pad. The suction pad is a rubber pad that can suction the sample 30. The suction pad is formed in a cylindrical shape. The vacuum generator generates a suction force in the suction pad for vacuum suction. The suction pad suctions the surface of the sample 30 opposite the surface to be measured (hereinafter also referred to as the "suction surface").

[0023] The transport device 13 holds the unmeasured samples 30 stored in the first cassette 12 one by one using the hand unit 16, and transports the held samples toward the measurement position of the measuring device 11. In addition, the transport device 13 places the sample 30 at the measurement position of the measuring device 11, and when the measurement unit has finished measuring the color of the sample (measurement), it transports the measured sample 30 toward the specified second cassette 12.

[0024] 1 to 3, the width direction of cassette 12 is defined as the X direction, the depth direction of cassette 12 as the Y direction, and the height direction of the cassette as the Z direction. Cassette 12 allows samples 30 to be inserted and removed from it in the horizontal direction (depth direction Y). Therefore, the front side of cassette 12 in the depth direction Y is open for inserting and removing samples 30. In the height direction Z of cassette 12, the lower side is closed by stand 15, and the upper side is open so as not to interfere with (contact with) hand unit 16 of transport device 13.

[0025] The cassette 12 has a pair of side plates 121, 122 that stand vertically from the stand 15, and a back plate 123 that connects the pair of side plates 121, 122. The pair of side plates 121, 122 face each other in the width direction X of the cassette 12. The back plate 123 is located on the far side of the cassette 12 in the depth direction Y. The back plate 123 has approximately the same height as the pair of side plates 121, 122. An inner surface 123a of the back plate 123 is arranged facing the front side (the lower side in FIG. 4) in the depth direction Y of the cassette 12.

[0026] Inner surfaces 121a, 122a of the pair of side plate portions 121, 122 face each other in the width direction X of the cassette 12. A plurality of support portions 125 are fixed to the inner surface 121a of the side plate portion 121. A plurality of support portions 126 are fixed to the inner surface 122a of the side plate portion 122. The plurality of support portions 125, 126 are arranged at predetermined intervals in the height direction Z of the cassette 12.

[0027] The multiple support parts 125, 126 support the samples on each stage when multiple samples are stacked and stored in one cassette 12. The support parts 125, 126 supporting the samples on the same stage are at the same position in the height direction Z and face each other in the width direction X.

[0028] 2, the support portions 125 and 126 are formed in the shape of flat plates that are long in the depth direction Y. The support portion 125 is arranged to protrude from the inner surface 121a of the side plate portion 121 toward the center of the cassette 12 in the width direction, and the support portion 126 is arranged to protrude from the inner surface 122a of the side plate portion 122 toward the center of the cassette 12 in the width direction. The sample 30 stored in the cassette 12 is supported in a horizontal position with the ends of the surface to be measured placed on the pair of support portions 125 and 126.

[0029] 3, the side plate portions 121 and 122 have a plurality of detection windows 124. The plurality of detection windows 124 face the side surfaces of the sample 30 supported by the support portions 125 and 126. Each of the plurality of detection windows 124 is formed in the shape of a slit that is long in the depth direction Y.

[0030] In the height direction Z, the bottoms of the multiple detection windows 124 are located higher than the upper surfaces of the opposing support portions 125, 126 that support the sample 30. In addition, the length of the multiple detection windows 124 in the height direction Z is shorter than the length of the sample 30 in the thickness direction. This prevents the sample 30 from protruding from the detection window 124 to the outside of the cassette 12.

[0031] The support portions 125, 126 in this embodiment protrude from the inner surfaces 121a, 122a of the pair of side plate portions 121, 122. However, the support portions according to the present invention may be a plurality of grooves that support the samples 30 on the inner surfaces 121a, 122a of the pair of side plate portions 121, 122. In other words, the cassette according to the present invention may be configured to be able to store a plurality of samples of different sizes.

[0032] 1 and 2, the position detection unit 14 is disposed on the side of the first cassette 12. The position detection unit 14 faces, for example, the side plate portion 121 of the first cassette 12. The position detection unit 14 has a frame 141 that stands vertically from the stand 15 and a plurality of position detection sensors 142 attached to the frame 141.

[0033] The position detection sensors 142 are, for example, laser displacement meters. The position detection sensors 142 face the detection windows 124 in the first cassette 12, respectively. The laser emitted from the position detection sensor 142 passes through the opposing detection window 124 and is irradiated onto the side surface of the sample 30.

[0034] The position detection sensor 142 receives the laser reflected by the side surface of the sample 30 and detects the position of the side surface of the sample 30 and the position in the depth direction Y of the sample 30. The position detection sensor 142 transmits the measurement results to the control unit 17 (see FIG. 4). The control unit 17 detects the positions of the sample 30 in the width direction X and the depth direction Y from the measurement results of the position detection sensor 142.

[0035] The position detection unit 14 of this embodiment has a plurality of position detection sensors 142. However, the position detection unit according to the present invention may have one position detection sensor 142 and a movement mechanism that moves the one position detection sensor 142 in the height direction Z. In this case, the number of position detection sensors 142 can be reduced.

[0036] Furthermore, the position detection unit according to the present invention may detect the position of not only unmeasured samples 30 but also samples 30 stored in the second cassette 12 (samples 30 for which measurement has been completed). In this case, the detection result is used by the control unit 17 when the sample 30 for which measurement has been completed is transported by the transport device 13.

[0037] [Configuration of the control system of the sample measurement device] Next, the configuration of the control system of the sample measurement device 10 will be described with reference to FIG. FIG. 4 is a block diagram showing the configuration of the control system of the sample measurement device 10.

[0038] 4, the sample measurement device 10 includes, in addition to the measuring instrument 11 and transport device 13 described above, a control unit 17, an operation unit 18, and a storage unit 19. The control unit 17 includes, for example, as computer hardware resources, a CPU (Central Processing Unit) 21, a ROM (Read Only Memory) 22, and a RAM (Random Access Memory) 23. The control unit 17 comprehensively controls the operation of each unit of the sample measurement device 10 by having the CPU 21 read out a predetermined program from the ROM 22, load it into the RAM 23, and execute the loaded program.

[0039] Specifically, the control unit 17 controls the operation of the transport device 13 when removing an unmeasured sample 30 from a specified cassette 12, the operation of the measuring instrument 11 and the transport device 13 when measuring the sample 30, and the operation of the transport device 13 when storing a measured sample 30 in a specified cassette 12.

[0040] The operation unit 18 functions as a user interface that displays various information to the user using the sample measurement device 10 and accepts input of various information from the user. The operation unit 18 includes, for example, a display unit and an input unit (not shown). Information input via the operation unit 18 includes information about the sample 30 stored in the cassette 12. The information about the sample 30 includes information indicating the type of sample 30, information indicating the size (including shape) of the sample 30, information specifying the cassette 12 in which the unmeasured sample 30 (to be measured) is stored, and information specifying the cassette 12 in which the measured sample 30 should be stored. This information is input by the user operating the operation unit 18 before starting operation of the sample measurement device (described later).

[0041] The memory unit 19 is electrically connected to the control unit 17, the position detection unit 14, and the measuring instrument 11. The memory unit 19 can be a storage device such as a hard disk drive or a solid state drive, a storage area inside a computer, or a storage area on a network. The memory unit 19 stores information necessary for controlling the transport device 13 (position information and parameters necessary for operation), the measurement results of the position detection unit 14, the measurement results of the measuring instrument 11, etc.

[0042] Furthermore, the type and storage location of the sample are stored in the memory unit 19. The type and storage location of the sample 30 is information indicating, for example, that type A samples are stored in the second to fifth rows of the first cassette 12. The memory unit 19 also stores size information of the sample 30 or an algebra derived from the size information.

[0043] [Failure when the sample is in contact with the side panel of the cassette] Next, a problem that occurs when the sample 30 comes into contact with the inner surfaces 121a, 122a of the side plate portions 121, 122 of the first cassette 12 will be described with reference to FIGS.

[0044] 5A and 5B are diagrams illustrating the displacement of the sample 30 that occurs when the sample in contact with the side plate portions 121 and 122 of the first cassette 12 is pulled up. For example, as shown in FIG. 5A, when the side surface of the sample 30 is in contact with the inner surfaces 121a and 122a of the side plate portions 121 and 122, the hand unit 16 of the transport device 13 holding the sample 30 is raised. At this time, a force is generated in the sample 30 in a direction that rotates the sample 30 around the upper corner of the side surface of the sample 30 as a fulcrum.

[0045] When the hand unit 16 is further raised from the state shown in Fig. 5A, the sample 30 rotates around the upper corner of the side surface as a fulcrum, as shown in Fig. 5B, which may cause the position where the hand unit 16 holds the sample 30 to shift.

[0046] 6A and 6B are diagrams illustrating the displacement of the sample 30 that occurs when the sample 30, which is in contact with the side plate portions 121 and 122 of the first cassette 12, is pulled out horizontally. For example, as shown in FIG. 6A, when the side surface of the sample 30 is in contact with the inner surfaces 121a and 122a of the side plate portions 121 and 122, the hand unit 16 holding the sample 30 is moved toward the front side in the depth direction Y. At this time, a force is generated in the sample 30 in a direction that rotates the sample 30 around the front corner of the side surface of the sample 30 as a fulcrum.

[0047] When the hand unit 16 is moved further toward the front from the state shown in Fig. 6A, the sample 30 rotates around the front corner of the side surface as a fulcrum, as shown in Fig. 6B, which may cause the position where the hand unit 16 holds the sample 30 to shift.

[0048] In this way, if the sample 30 is pulled out of the first cassette 12 while the sample 30 is in contact with any part of the first cassette 12, the position where the hand unit 16 holds the sample 30 may shift. If the position where the hand unit 16 holds the sample 30 shifts, the sample 30 may not be accurately positioned at the measurement position of the measuring instrument 11. Furthermore, if the sample 30 is significantly shifted from the hand unit 16, the hand unit 16 may release its hold on the sample 30.

[0049] Therefore, in this embodiment, when the sample 30 is in contact with the inner surfaces 121 a, 122 a of the side plate portions 121, 122, the sample 30 is moved in a direction away from the inner surfaces 121 a, 122 a of the side plate portions 121, 122, and then is raised or moved toward the front. Whether or not the side surface of the sample 30 is in contact with the inner surfaces 121 a, 122 a of the side plate portions 121, 122 is determined by the control unit 17 detecting the position of the sample 30 in the width direction X from the measurement result of the position detection sensor 142.

[0050] [Sample measurement process] Next, the sample measurement process performed by the control unit 17 will be described with reference to FIG. FIG. 7 is a flowchart showing the sample measurement process performed by the control unit 17 according to the first embodiment.

[0051] First, the control unit 17 retrieves information about the sample 30 to be measured from the storage unit 19 (S1). The information about the sample 30 includes information indicating the type of the sample 30 and information indicating the size (including the shape) of the sample 30. Next, the control unit 17 detects the position of the sample 30 to be measured from the detection result of the position detection unit 14 (S2).

[0052] Next, the control unit 17 determines whether the position of the side surface of the sample 30 to be measured is within a specified value range (S3). The specified value range is determined in advance according to the size of the sample 30 and the size of the first cassette 12.

[0053] When the position of the side surface of the sample 30 is within the specified value range, the side surface of the sample 30 is away from the inner surfaces 121a, 122a of the side plate portions 121, 122, and there is no possibility of them coming into contact thereafter. On the other hand, when the position of the side surface of the sample 30 is outside the specified value range, there is a possibility that the side surface of the sample 30 is in contact with the inner surface 121a of the side plate portion 121 or the inner surface 122a of the side plate portion 122, or that they will come into contact thereafter.

[0054] In step S3, when it is determined that the position of the side surface of the sample 30 is within the specified value range (if S3 is determined as YES), the control unit 17 controls the driving of the transport device 13 to hold and lift the sample 30 (S4). As a result, the sample 30 moves away from the supports 125, 126 of the first cassette 12. After processing step S4, the control unit 17 proceeds to processing step S7.

[0055] In step S3, when it is determined that the position of the side surface of the sample 30 is outside the specified value range (when S3 is determined as NO), the control unit 17 controls the driving of the transport device 13 to hold and lift the sample 30 (S5). Next, the control unit 17 controls the driving of the transport device 13 to move the sample 30 in a direction away from the inner surfaces 121a, 122a of the side plate portions 121, 122 (S6). As a result, the position of the side surface of the sample 30 moves within the specified value range.

[0056] After the processing of step S6 or step S4, the control unit 17 controls the driving of the transport device 13 to extract the sample 30 from the first cassette 12 (S7). Subsequently, the control unit 17 controls the driving of the transport device 13 to place the sample 30 at the measurement position of the measurement instrument 11 (S8). Thereafter, the control unit 17 controls the measurement instrument 11 to measure the surface condition of the sample 30 (S9).

[0057] Next, the control unit 17 controls the driving of the transport device 13 to transport the measured sample 30 to the second cassette 12 that stores the measured sample 30 (S10). After the process of step S10, the control unit 17 ends the sample measurement process.

[0058] The position detection unit 14 and the control unit 17 of the first embodiment correspond to the contact avoidance unit according to the present invention. The sample measurement device 10 of the first embodiment detects the position of the sample 30 based on the detection result of the position detection unit 14. When the sample 30 is close to or in contact with the inner surfaces 121a, 122a of the side plate portions 121, 122, the sample 30 is moved in a direction away from the inner surfaces 121a, 122a of the side plate portions 121, 122.

[0059] This prevents the sample measurement device 10 from pulling out the sample 30 while it is in contact with the inner surfaces 121a, 122a of the side plate portions 121, 122 of the first cassette 12. As a result, the sample measurement device 10 can prevent the position where the sample 30 is held by the hand unit 16 from shifting, and transport the sample 30 to the measurement position of the measuring instrument 11 with high accuracy.

[0060] Second Embodiment The configuration of the sample measurement device of the second embodiment is the same as the configuration of the sample measurement device 10 of the first embodiment. The sample measurement device of the second embodiment differs from the sample measurement device 10 of the first embodiment in the sample measurement process. Therefore, the sample measurement process of the second embodiment will be described here, and descriptions that overlap with the sample measurement device 10 of the first embodiment will be omitted.

[0061] When the hand unit 16 holds and lifts the sample 30, one end of the sample 30 in the width direction may droop, and a lower corner of the side surface of the sample 30 may come into contact with the upper surfaces of the supports 125 and 126. In this state, when the hand unit 16 holding the sample 30 is moved forward in the depth direction Y, a force is generated in the sample 30 in a direction that rotates the sample 30 around the lower corner of the side surface of the sample 30 as a fulcrum. This may cause the position where the hand unit 16 holds the sample 30 to shift.

[0062] Therefore, in this embodiment, when one end of the sample 30 in the width direction sags, the position where the hand unit 16 holds the sample 30 is changed, and then the sample 30 is raised or moved forward. Whether or not one end of the sample 30 in the width direction sags is determined by the control unit 17 detecting a deviation between the position where the hand unit 16 holds the sample 30 and the position of the center of gravity of the sample 30 from the measurement result of the position detection sensor 142.

[0063] [Sample measurement process] The sample measurement process performed by the control unit 17 according to the second embodiment will be described with reference to FIG. FIG. 8 is a flowchart showing the sample measurement process performed by the control unit 17 according to the second embodiment.

[0064] First, the control unit 17 retrieves information about the sample 30 to be measured from the storage unit 19 (S21). Next, the control unit 17 detects the position of the sample 30 to be measured from the detection result of the position detection unit 14 (S22). Next, the control unit 17 determines whether the position of the center of gravity of the sample 30 to be measured is within a specified value range (S23). The specified value range is determined in advance depending on the size of the sample 30 and the size of the first cassette 12.

[0065] When the position of the center of gravity of the sample 30 is within the specified value range, the position where the hand unit 16 holds the sample 30 is close to the position of the center of gravity of the sample 30. Therefore, the amount of drooping of one end of the sample 30 in the width direction is small, and there is no possibility that it will come into contact with the support units 125, 126. On the other hand, when the position of the center of gravity of the sample 30 is outside the specified value range, the position where the hand unit 16 holds the sample 30 is far from the position of the center of gravity of the sample 30. Therefore, one end of the sample 30 in the width direction will droop and come into contact with the support units 125, 126, or there is a possibility that it will come into contact with the support units 125, 126.

[0066] In step S23, when it is determined that the position of the center of gravity of the sample 30 is not within the specified value range (outside the specified value range) (if S23 is determined as NO), the control unit 17 controls the driving of the transport device 13 to hold and lift the sample 30 (S24). Next, the control unit 17 controls the driving of the transport device 13 to move the sample 30 a predetermined amount in a direction in which the position of the center of gravity of the sample 30 approaches the center position of the first cassette 12 (S25).

[0067] Next, the control unit 17 controls the driving of the transport device 13 to lower the sample 30 and place it on the supports 125, 126 (S26). After the process of step S26, the control unit 17 returns to the process of step S22. That is, the control unit 17 changes the position of the sample 30 with respect to the first cassette 12 until the position of the center of gravity of the sample 30 falls within the specified value range.

[0068] In step S23, when it is determined that the position of the center of gravity of the sample 30 is within the specified value range (if S23 is determined as YES), the control unit 17 controls the driving of the transport device 13 to hold and lift the sample 30 (S27). Next, the control unit 17 controls the driving of the transport device 13 to pull out the sample 30 from the first cassette 12 (S28).

[0069] Next, the control unit 17 controls the driving of the transport device 13 to place the sample 30 at the measurement position of the measurement instrument 11 (S29). Thereafter, the control unit 17 controls the measurement instrument 11 to measure the surface condition of the sample 30 (S30). Next, the control unit 17 controls the driving of the transport device 13 to transport the measured sample 30 to the second cassette 12 that stores measured samples 30 (S31). After processing of step S31, the control unit 17 ends the sample measurement process.

[0070] The position detection unit 14 and control unit 17 of the second embodiment correspond to the contact avoidance unit of the present invention. The sample measurement device of the second embodiment detects the position of the center of gravity of the sample 30 based on the detection result of the position detection unit 14. If the position of the center of gravity of the sample 30 is not within a specified value range, the sample measurement device moves the sample 30 a predetermined amount in a direction in which the position of the center of gravity of the sample 30 approaches the center position of the first cassette 12, thereby changing the position in which the hand unit 16 holds the sample 30. In other words, the sample measurement device moves the position in which the hand unit 16 holds the sample 30 closer to the center of gravity of the sample 30.

[0071] This prevents one widthwise end of the sample 30 from sagging down and coming into contact with the support parts 125, 126. As a result, the sample measurement device of the second embodiment can prevent the position where the sample 30 is held by the hand part 16 from shifting, and transport the sample 30 to the measurement position of the measuring instrument 11 with high accuracy.

[0072] In the second embodiment, the position where the sample 30 is placed is changed so that the position where the hand unit 16 holds the sample 30 is closer to the center of gravity of the sample 30. However, in the sample measurement device according to the present invention, the position where the hand unit 16 holds the sample 30 may be changed so that the position where the hand unit 16 holds the sample 30 is closer to the center of gravity of the sample 30.

[0073] <Third embodiment> The sample measurement device of the third embodiment differs from the sample measurement device 10 of the first embodiment in the cassette support portion. Therefore, here, the cassette support portion of the third embodiment will be described, and descriptions that overlap with the sample measurement device 10 of the first embodiment will be omitted.

[0074] [Cassette support] Fig. 9 is a front view showing a cassette support portion in a sample measurement device according to the third embodiment. As shown in Fig. 9, a cassette 12B according to the third embodiment has a pair of side plate portions 121, 122 that stand vertically from a stand 15 (see Fig. 1), and a back plate portion (not shown) that connects the pair of side plate portions 121, 122.

[0075] The pair of side plate portions 121, 122 face each other in the width direction X of the cassette 12B. Inner surfaces 121a, 122a of the pair of side plate portions 121, 122 face each other in the width direction X of the cassette 12B. A plurality of support portions 127 (one is shown in FIG. 9) are fixed to the inner surface 121a of the side plate portion 121. A plurality of support portions 128 (one is shown in FIG. 9) are fixed to the inner surface 122a of the side plate portion 122. The plurality of support portions 127, 128 are arranged at predetermined intervals in the height direction Z of the cassette 12B.

[0076] When a plurality of samples are stored in a single cassette 12B by stacking them in multiple stages, the plurality of support portions 127, 128 support the samples on each stage. The support portions 125, 126 supporting the samples on the same stage are at the same position in the height direction Z and face each other in the width direction X.

[0077] The support portion 127 has an upper plate portion 127a and a lower plate portion 127b adjacent to each other in the width direction X, and a connection portion 127c connecting the upper plate portion 127a and the lower plate portion 127b. The upper plate portion 127a is located on the center side of the cassette 12B in the width direction X and higher in the height direction Z than the lower plate portion 127b.

[0078] The lower plate portion 127b is located on the side plate portion 121 side in the width direction X of the cassette 12B, and is located lower than the upper plate portion 127a in the height direction Z. As a result, a recess 127d is formed in the end portion of the support portion 127 on the side plate portion 121 side. When viewed from the top, the recess 127d is formed in a rectangular shape that is long in the depth direction Y.

[0079] The support portion 128 has an upper plate portion 128a and a lower plate portion 128b adjacent to each other in the width direction X, and a connection portion 128c connecting the upper plate portion 128a and the lower plate portion 128b. The upper plate portion 128a is located on the center side of the cassette 12B in the width direction X and higher in the height direction Z than the lower plate portion 128b.

[0080] The lower plate portion 128b is located on the side plate portion 122 side in the width direction X of the cassette 12B, and is located lower than the upper plate portion 128a in the height direction Z. As a result, a recess 128d is formed in the end portion of the support portion 128 on the side plate portion 122 side. When viewed from the top, the recess 128d is formed in a rectangular shape that is long in the depth direction Y.

[0081] The recesses 127d and 128d described above correspond to the contact avoidance portion according to the present invention. The recesses 127d and 128d prevent one end of the sample 30 held by the hand unit 16 in the width direction from coming into contact with the support portions 127 and 128 when the end sags. As a result, the sample measurement device of the third embodiment can prevent the position where the sample 30 is held by the hand unit 16 from shifting, and can transport the sample 30 to the measurement position of the measurement instrument 11 with high accuracy.

[0082] The sample measurement device of the present invention has been described above, including its effects. However, the sample measurement device of the present invention is not limited to the above-described embodiment, and various modifications are possible within the scope of the invention as set forth in the claims.

[0083] Furthermore, the above-described embodiments have been described in detail to clearly explain the present invention, and the present invention is not necessarily limited to those including all of the described configurations. Furthermore, it is possible to replace part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Furthermore, it is possible to add, delete, or replace part of the configuration of each embodiment with other configurations. For example, the contact avoidance units in the above-described first to third embodiments can be simultaneously applied to one device.

[0084] The position detection unit in the above-described embodiment detects the position of the sample 30 using the position detection sensor 142. However, the position detection unit according to the present invention may also detect the position of the sample 30 using a camera or a force sensor. Furthermore, the sample measurement device according to the present invention may be configured to prevent the sample 30 from coming into contact with the back plate 123 of the cassette 12 when the sample 30 is drawn out of the first cassette 12. [Explanation of symbols]

[0085] 10...Sample measurement device, 11...Measuring instrument, 12, 12B...Cassette, 13...Transport device, 14...Position detection unit, 15...Stand, 16...Hand unit, 17...Control unit, 18...Operation unit, 19...Memory unit, 21...CPU, 22...ROM, 23...RAM, 30...Sample, 121, 122...Side plate unit, 121a, 122a...Inner surface, 123...Back plate unit, 124...Detection window, 125, 126, 127, 128...Support unit, 127a, 128a...Upper plate unit, 127b, 128b...Lower plate unit, 127c, 128c...Connection unit, 127d, 128d...Recess, 141...Frame, 142...Position detection sensor

Claims

1. a measuring instrument for measuring the sample; A cassette that can store multiple samples, a transport device that removes one of the plurality of samples from the cassette and transports the sample to the measuring device; a contact avoidance unit that prevents the sample from coming into contact with a part of the cassette when the transport device takes out the sample. Sample measurement device.

2. The contact avoidance portion is a position detection unit that detects the position of the sample in a direction facing a side wall of the cassette; a control unit that controls the transport device, When the detection result of the position detection unit indicates that the one sample is in contact with the side wall of the cassette, the control unit controls the transport device to move the one sample held by the transport device in a direction away from the side wall of the cassette, and then causes the sample to be removed from the cassette. The sample measurement device according to claim 1 .

3. The contact avoidance portion is a position detection unit that detects the position of the sample in a direction facing a side wall of the cassette; a control unit that controls the transport device, When the position of the center of gravity of the one sample is not within a specified value range based on the detection result of the position detection unit, the control unit controls the transport device to move the position of the transport device holding the one sample closer to the center of gravity of the sample, and then causes the sample to be removed from the cassette. The sample measurement device according to claim 1 .

4. The contact avoidance portion is a position detection unit that detects the position of the sample in a direction facing a side wall of the cassette; a control unit that controls the transport device, The control unit controls the transport device to move the sample held by the transport device in a direction away from the side wall of the cassette when the detection result of the position detection unit indicates that the one sample is in contact with the side wall of the cassette, and controls the transport device to move the sample held by the transport device in a direction away from the side wall of the cassette when the detection result of the position detection unit indicates that the position of the center of gravity of the one sample is not within a specified value range, to move the position of the transport device holding the one sample closer to the center of gravity of the sample, and then to remove the sample from the cassette. The sample measurement device according to claim 1 .

5. The contact avoidance portion is a recess formed at an end portion of a support portion of the cassette that supports the plurality of samples, the end portion being closer to the side wall of the cassette. The sample measurement device according to any one of claims 1 to 4.

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