Anti-reflective coating on optical waveguide tube

Abstract

To provide an anti-reflective coating on an optical waveguide tube.SOLUTION: An anti-reflective waveguide tube assembly comprises: a waveguide tube substrate that has a first refractive index; a plurality of diffractive optical elements that are disposed on a first surface of a waveguide tube; and an anti-reflective coating that is disposed on a second surface of the waveguide tube. The anti-reflective coating preferably increases absorption of light through a surface to which the coating is applied in the waveguide tube so that at least 97% of the light is transmitted. The anti-reflective coating is composed of four layers of a material having different refractive indexes in which a first refractive index and virtual refractive index are less than 1×10-3, but preferably less than 5×10-4.SELECTED DRAWING: Figure 3

Description

[Background technology]

[0001] (CROSS-REFERENCE TO RELATED APPLICATIONS) This application claims priority to U.S. Provisional Patent Application No. 62 / 596,904, filed December 10, 2017, and U.S. Provisional Patent Application No. 62 / 751,240, filed October 26, 2018, each of which is incorporated herein by reference in its entirety.

[0002] BACKGROUND OF THE INVENTION Surface treatments of substrates such as windows or photovoltaic devices (e.g., solar energy panels) benefit from coatings of layered antireflective materials. Reducing glare from light impinging on glass, improving the retention of natural light for energy savings, or increasing the absorption of light impinging on photovoltaic cells are some of the ways in which antireflective coatings are used. Conventional antireflective coatings provide benefits for light paths that are nearly perpendicular to the normal to the surface of the substrate, and are generally oriented to maximize antireflection for such free-space light, which anticipates light generation entirely outside the substrate. Conventional coatings also seek to increase transmittance. Some optical media operate on light paths other than free-space generation, and antireflective coatings are needed to optimize the performance of such media. Summary of the Invention [Means for solving the problem]

[0003] (Abstract) Embodiments of the present invention generally address specific materials and thicknesses of layers for anti-reflective coatings in optical waveguides. More specifically, the embodiments and techniques described herein relate to anti-reflective coatings that should promote light propagation for total internal reflection (TIR) ​​while simultaneously minimizing light reflections at orthogonal angles or other free-space light. The embodiments described herein deviate from seeking complete transmission of light.

[0004] Some embodiments are directed to a waveguide substrate (e.g., glass) having a first refractive index. The substrate may be planar or cylindrical (e.g., optical fiber). For planar substrates, a plurality of diffractive optical elements (e.g., gratings) are disposed on a first surface and an anti-reflective coating is disposed on an opposite surface. For cylindrical waveguides, an anti-reflective coating is applied to the outer surface.

[0005] In some embodiments, the waveguide is configured to receive light and propagate it along an axis by total internal reflection. In a planar waveguide, light travels in a first direction along such axis and outcouples light in a generally orthogonal direction when the light reflects off a diffractive optical element on its corresponding surface. In a cylindrical waveguide, light reflects along the waveguide and outcouples at the distal end, along an axis generally parallel to the length of the waveguide.

[0006] The anti-reflective coating on such an embodiment is configured to minimize the phase delay between the s and p polarization states of the received light so that the angles of bounce due to TIR for each polarization component of the light are substantially similar.

[0007] In some embodiments, the antireflective coating is a single layer of magnesium fluoride (MgF2) having a thickness of 75 to 125 nanometers (nm). In some embodiments, a layer of silica (SiO2) is applied to the coating as an outer layer.

[0008] In some embodiments, the antireflective coating has a reflectivity of 5×10 -4 In some embodiments, the k value of the complete coating is less than 5×10, regardless of the number of layers that comprise the coating. -4 ~1×10 -3In some embodiments, the coating is a single layer of material. In some embodiments, the coating alternates between two materials, one material having a relatively higher refractive index than the second material. In some embodiments, fewer than eight total layers are utilized.

[0009] In some embodiments, titania (TiO2) with a refractive index greater than 2 is utilized as the coating layer material, and in some embodiments, SiO2 with a refractive index between 1.45 and 1.58 alternates with the titania layers.

[0010] These material and layer selections optimize the efficiency of the light output by the optical waveguide, minimize phase delay, reduce optical defects (e.g., streaks in images output by such waveguides), and minimize the labor and material costs of conventional layers. The present invention provides, for example, the following. (Item 1) An anti-reflective waveguide, comprising: a planar waveguide substrate having a first refractive index; a plurality of diffractive optical elements disposed on a first surface of the waveguide; an anti-reflective coating disposed on a second surface of the waveguide; An anti-reflective waveguide comprising: (Item 2) Item 10. The anti-reflective waveguide of item 1, wherein the waveguide is planar and configured to propagate light in approximately a first direction by total internal reflection between the plurality of diffractive optical elements and the anti-reflective coating and to outcouple light in a second direction that is approximately orthogonal to the first direction. (Item 3) Item 3. The anti-reflective waveguide of item 2, wherein the light propagating by total internal reflection comprises an s-polarized component and a p-polarized component. (Item 4) 4. The antireflective waveguide of claim 3, wherein the antireflective coating is configured to reduce the phase delay between the two components so that the angle of incidence of the s component is substantially similar to that of the p component through the waveguide. (Item 5) 5. The anti-reflective waveguide of claim 4, wherein the anti-reflective coating reduces reflections from the waveguide and increases transmission of light into the waveguide through the second surface. (Item 6) Item 6. The antireflective waveguide of item 5, wherein at least 97 percent of the light is transmitted through the second surface. (Item 7) Item 4. The antireflective waveguide of item 3, wherein the waveguide substrate is glass and the antireflective coating comprises a layer of MgF2. (Item 8) 8. The anti-reflective waveguide according to item 7, wherein the MgF2 layer has a thickness of 75 to 125 nm. (Item 9) 8. The antireflective waveguide of claim 7, wherein the antireflective coating comprises a layer of SiO2. (Item 10) Item 9. The anti-reflective waveguide of item 8, wherein the layer of MgF2 is disposed immediately adjacent to the second surface. (Item 11) Item 11. The anti-reflective waveguide of item 10, wherein a layer of SiO2 is disposed on the layer of MgF2. (Item 12) The cumulative refractive index of the anti-reflective coating is 5×10 -4 Item 12. The anti-reflective waveguide according to item 11, having a virtual refractive index component value of less than (Item 13) The cumulative refractive index of the anti-reflective coating is 5×10 -4 ~1×10 -3 Item 12. The anti-reflective waveguide according to item 11, having a virtual refractive index component value of (Item 14) 4. The antireflective waveguide of claim 3, wherein the antireflective coating consists of fewer than eight layers alternating between a first material and a second material. (Item 15) Item 15. The anti-reflective waveguide of item 14, wherein the anti-reflective coating consists of four layers. (Item 16) Item 15. The anti-reflective waveguide of item 14, wherein the first material has a relatively higher refractive index than the second material. (Item 17) Item 15. The anti-reflective waveguide of item 14, wherein the first material is TiO2. (Item 18) Item 15. The anti-reflective waveguide of item 14, wherein each layer of TiO2 has a refractive index greater than 2. (Item 19) Item 15. The anti-reflective waveguide of item 14, wherein the second material is SiO2. (Item 20) Item 19. The anti-reflective waveguide according to item 19, wherein each layer of SiO2 has a refractive index of 1.45 to 1.58. (Item 21) The cumulative refractive index of the anti-reflective coating is 5×10 -4 21. The anti-reflective waveguide according to item 20, having a virtual refractive index component value of less than (Item 22) The cumulative refractive index of the anti-reflective coating is 5×10 -4 ~1×10 -3 21. The anti-reflective waveguide according to item 20, having a virtual refractive index component value of (Item 23) The cumulative refractive index of the anti-reflective coating is 5×10 -4 Item 2. The anti-reflective waveguide according to item 1, having a virtual refractive index component value of less than [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a top-down view showing an anti-reflective coating as understood in terms of its function of minimizing reflected light and maximizing absorption of light into a waveguide.

[0012] [Figure 2] FIG. 2 is a top-down view illustrating a planar waveguide that outcouples multiple beams propagating through the waveguide by total internal reflection, according to some embodiments.

[0013] [Figure 3] FIG. 3 is a top-down view illustrating a multi-waveguide stack for outcombining multiple beams into a bundle, according to some embodiments.

[0014] [Figure 4] FIG. 4 is a front view of a planar waveguide having three diffractive optical element regions, according to some embodiments.

[0015] [Figure 5] FIG. 5 is a front view illustrating an orthogonal pupil expander that diffracts light across its span, according to some embodiments.

[0016] [Figure 6A] FIG. 6A is a top-down view illustrating multiple light bounces through a waveguide, according to some embodiments.

[0017] [Figure 6B] FIG. 6B is a front view of an inferometer network of energy transmitted through a waveguide configured to assist total internal reflection, according to some embodiments.

[0018] [Figure 7] FIG. 7 is a graph illustrating the phase delay relationship as a function of layers in an antireflective coating according to some embodiments.

[0019] [Figure 8A] FIG. 8A shows captured images of an eyepiece design for blue (455 nm) light on a substrate with anti-reflection coatings of layers with different n values.

[0020] [Figure 8B] FIG. 8B shows simulated images of eyepiece designs for blue (455 nm) light on substrates with anti-reflection coatings of different n-value layers.

[0021] [Figure 8C]FIG. 8C shows captured images of eyepiece designs for red (625 nm) light on substrates with anti-reflective coatings of layers with different n values.

[0022] [Figure 8D] FIG. 8D shows simulated images of eyepiece designs for red (625 nm) light on substrates with anti-reflection coatings of different n-value layers.

[0023] [Figure 9A] 9A-9D are graphs illustrating the efficiency decay of optical energy output by a waveguide as a function of the number of layers and k value of an anti-reflective coating, according to some embodiments. [Figure 9B] 9A-9D are graphs illustrating the efficiency decay of optical energy output by a waveguide as a function of the number of layers and k value of an anti-reflective coating, according to some embodiments. [Figure 9C] 9A-9D are graphs illustrating the efficiency decay of optical energy output by a waveguide as a function of the number of layers and k value of an anti-reflective coating, according to some embodiments. [Figure 9D] 9A-9D are graphs illustrating the efficiency decay of optical energy output by a waveguide as a function of the number of layers and k value of an anti-reflective coating, according to some embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0024] (Detailed explanation) Antireflective coatings are generally constructed to create out-of-phase reflections across layers of materials with different refractive indices. Traditionally, single-layer antireflective coatings seek a refractive index, n, equal to the square root of the refractive index of the coated substrate, and a thickness, t, equal to 1 / 4 of the wavelength, λ, of the light targeted by the antireflective coating.

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[0025] 1 depicts an antireflection material in which light L100 impinges on medium 110, reflecting light R101 while simultaneously reflecting light R103 which transmits to medium 120 and interferes constructively with light R101, with the remaining light L105 being transmitted into medium 103. Many variations are known for improving the total amount of light L105 transmitted. For example, broadband antireflection materials to improve transmission of multiple wavelengths using a single coating are achieved using additional and / or variable thickness layers.

[0026] While the coating arrangement shown in Figure 1 may work as intended for free-space light, some optical systems employ waveguide technology. Augmented or mixed reality systems maximize this technology, particularly in exit pupil expander systems, delivering light from a source, propagating it through a waveguide by TIR, and then out-coupling it toward the user's eye.

[0027] FIG. 2 shows a simplified version of such a system. While one waveguide is illustrated, it should be understood that other waveguides stacked together (as further described below with reference to FIG. 3) could function similarly. Light 400 is launched into the waveguide 1182 at its input surface 1382 and propagates within the waveguide 1182 by TIR. The input surface 1382 may be an internal coupling grating formed by a diffractive optical element that diffracts the light 400 into the waveguide 1382 at angles that support TIR. At the point where the light 400 impinges on the external coupling diffractive optical element 1282, the sampled portion exits the waveguide as multiple output beams 402.

[0028] Each exit beam is a sampled beamlet of light 400, increasing the likelihood that any one sampled beamlet will be seen by the viewer's eye 4. It is therefore important that the waveguide 1182 maintains TIR and creates multiple exit beams across its span; otherwise, the exit beam 402 will not be dispersed and the resulting exit pupil will be visible only at certain locations on the eye 4, limiting the applicability and flexibility of the system.

[0029] While Figure 2 depicts a single waveguide system, those skilled in the art will understand that where a single waveguide 1182 provides a sampled portion of light 400, additional waveguides performing similar functions may impart additional sampled portions to create richer light effects (e.g., multi-color component images or depth perception). Figure 3 illustrates such a multi-layered system with three waveguides 1210, 1220, and 1230 that propagate light by TIR. As each light path 1240, 1242, and 1244 that is internally coupled at locations 1212, 1222, and 1232, respectively, impinges on a separate externally coupled diffractive optical element 1214, 1224, or 1234 disposed on waveguides 1210, 1220, and 1230 (the externally coupled light from paths 1222 and 1232 is not depicted), it diffracts the multiple beamlets in two directions (i.e., toward the viewer (as in eye 4 in FIG. 2), represented by light beam 3010, and away from the viewer, represented by light beam 3020).

[0030] Light beam 3020 may cause undesirable effects (e.g., interference with light beam 3010, increased blur due to any change in angle that may result from reflection, etc.) when it reflects from the subsequent waveguide 1220. Here, an anti-reflective coating applied to the surface of the waveguide opposite its outcoupling diffractive optical element is beneficial to reduce these effects. However, conventional coatings that attempt to increase transmission generally degrade light paths 1240, 1242, and 1244 as they travel across waveguides 1210, 1220, and 1230 due to TIR. This degradation introduces uniformity complications upon outcoupling, resulting in poor image quality.

[0031] Waveguide optical systems employing pupil expander technology exacerbate this problem. In pupil expander systems such as that depicted in FIG. 2, light is dispersed not only generally perpendicular to the output beam path, but also orthogonally. FIG. 4 depicts an orthogonal pupil expander (OPE) 3706 disposed on the waveguide 3704. FIG. 4 also depicts an exit pupil expander (EPE) 3708 for outcoupling the gradual output beam of TIR light, similar to the outcoupling diffractive optical element 1282 depicted in FIG. 2, and an internal coupling grating (ICG) 3702, similar to the input surface 1382 of FIG. 2. In the waveguide system of FIG. 4, light incoupling into the waveguide through the internal coupling grating and diffracting toward the orthogonal pupil expander.

[0032] Figure 5 depicts light sampling across an orthogonal pupil expander. Light 4410B from the internal coupling grating of Figure 4 encounters a grating 4420B (e.g., a series of diffractive optical elements) that diffracts a sample of the light in a first direction and a sample of that same light 4430B in a second direction. The particular direction diffracted is a function of the particular geometry of the diffractive optical elements.

[0033] FIG. 6A depicts a cross-sectional view of this optical path, with one waveguide comprising a grating 662 on one surface and an anti-reflective coating 664 on the opposite surface. As light propagates through the waveguide by TIR, it alternately reflects off the orthogonal pupil expander and the surface opposite the orthogonal pupil expander. Those skilled in the art will appreciate that similar functionality occurs with the exit pupil expander region of the waveguide. An anti-reflective coating is applied to this opposite surface to reduce the reflection described by light beam 3020 with reference to FIG. 3. A cumulative optical inferometer (e.g., the unit cell inferometer depicted by FIG. 6B) can be derived from this interaction. In FIG. 6B, each interaction with the orthogonal pupil expander samples the light into two paths, with a reflection off the anti-reflective coating side between each successive reflection off the orthogonal pupil expander. Each reflection from the orthogonal pupil expander side or the anti-reflection side may further introduce polarization changes into the light, such that each successive bounce perturbs the polarization state and changes the energy at each output node.

[0034] By splitting the polarization into component s and p states, the resulting electric field E is a function of the amplitude A and phase φ of the light and can be written for each s and p path as follows:

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[0035] Each interaction (shown below by a directional arrow, with correlation to the path of light at the output node in FIG. 6B) can be described as a 2×2 matrix multiplied by the energy of the s and p elements of Equation 3 and Equation 4, as follows:

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[0036] Additionally, each bounce from the AR coating can be described by a 2x2 matrix. For a planar coating, the off-diagonal elements of this matrix are zero, and the magnitude of the diagonal elements must be one due to the fact that the layers are parallel in a planar coating. Because there is no diffraction from the AR coating, two of these matrices, namely, [ka] Only exists.

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[0037] The electric field state exiting the output node and propagating downward (towards the exit pupil expander) can now be related to the electric field input state.

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[0038] However, this means that the phase delay (the difference between the phase shifts of the s and p optical paths at each bounce) is [ka] In this case, the anti-reflective coating no longer affects the energy output. In other words, Equation 6 and Equation 7 can be replaced by the following, respectively:

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[0039] Therefore, if an AR coating does not have a phase delay, it will only impart a phase shift to the output, without a change in polarization state or magnitude. If an AR coating has a phase delay, it will change the output polarization state and magnitude, introducing a negative optical effect. This is important when determining the number of layers of anti-reflective coatings to be used on a TIR waveguide display device. Figure 7 depicts the phase delay for TIR light at various angles of incidence. Figure 8A shows a captured image of an eyepiece design for blue (455 nm) light on a substrate with anti-reflective coatings of different n-value layers. Figure 8B shows a simulated image of an eyepiece design for blue (455 nm) light on a substrate with anti-reflective coatings of different n-value layers. Figure 8C shows a captured image of an eyepiece design for red (625 nm) light on a substrate with anti-reflective coatings of different n-value layers. Figure 8D shows a simulated image of an eyepiece design for red (625 nm) light on a substrate with anti-reflective coatings of different n-value layers. Large variations in phase difference have an observable effect on the output beam as "streaks" or uniformity disruptions depicted in Figures 8A-8D. The four-layer antireflective coating was found to have the most uniformity and is therefore preferred over the other coatings depicted in Figures 7 and 8A-8D. It should be understood that the effect of adjusting the number of antireflective layers is consistent across wavelengths (i.e., while Figures 8A-8D depict eyepieces for specific wavelengths of light, the effect is similar for other wavelengths not shown, such as green).

[0040] To minimize this degradation and reduce the amount of inter-waveguide reflection while still maintaining intra-waveguide reflection, embodiments of the present invention are directed to optimized anti-reflective coatings. Such optimization balances the refractive index of the anti-reflective material with the number and thickness of layers applied within the coating. This is achieved by adjusting the θ p θ is substantially equal to s , thereby minimizing the phase delay effect.

[0041] In some embodiments, an anti-reflective coating is applied to one side of a waveguide substrate in a waveguide stack that constitutes the eyepiece of an augmented, mixed, or virtual reality device. Preferably, the coated side is opposite the side where the viewer's eyes are expected to be located, although a coated side on the same side as the viewer's eyes could work as well. In some embodiments, a grating is applied to the surface opposite the coated side of the waveguide. The anti-reflective coating preferably reduces reflections from and increases transmission through the surface to which it is applied. The anti-reflective coating preferably increases light transmission by at least 97 percent.

[0042] The antireflective coating comprises at least one layer, but in preferred embodiments, fewer than eight, alternating layers of two constituent materials with relatively high and relatively low refractive indices. In some embodiments, one of the constituent layers is titania (TiO). In some embodiments, one of the constituent layers is silica (SiO).

[0043] Those skilled in the art will recognize other candidate materials (e.g., SiN, ZrO2, ZnO2, Ta2O5, or Nb2O5, or other metal oxides with low absorptivity in the visible wavelength range). Such materials, like TiO2 and SiO2, are well known in the art for their use in photovoltaics or glass treatment for antireflection.

[0044] In some embodiments, SiO2 is the final (i.e., top) layer of a multi-layer coating as a protective layer against any wet chemistries (sulfuric acid, hydrogen peroxide, etc.) that may result from waveguide cleaning, processing, or patterning.

[0045] The refractive index, n, of a material is composed of two components: the known refractive index and the extinction coefficient, k (or a hypothetical refractive index related to the attenuation of light through the material), such that n = n + k. Different materials have different extinction coefficients that can produce widely varying results; this is particularly variable when multiple materials are layered together to create a net k value for the coating. For example, titania, a well-known antireflective material, and silicon nitride (SiN) have similar reflectance spectra for normal incidence but slightly different k values. While this may be negligible in the normal / orthogonal light direction, at angles that support TIR, all bounces of light at the surface are attenuated with slightly different extinction coefficients compared between the two materials. The cumulative effect of this slight difference in extinction coefficients in coatings that manipulate light across multiple bounces in a TIR system can significantly affect overall image quality (especially uniformity and efficiency).

[0046] Using the energy output by materials with varying extinction coefficients k of various materials, the loss of light as a percentage of output is depicted in Figures 9A-9D. Figure 9A depicts the loss of energy of light output by an EPE as a function of increasing layers and increasing k values. With an exemplary EPE efficiency of 5 percent as depicted, most single-layer anti-reflective coatings have a net k value of about 5 x 10 -4 This efficiency persists within TIR systems (e.g., optical waveguides) when k is less than 1 / 2 k. Each additional layer or increase in net k exponentially decays the efficiency of energy output in the EPE. This is true regardless of the material or number of layers, although the degree of decay varies, as shown by Figures 9B and 9C.

[0047] FIG. 9D depicts an EPE efficiency diagram, which demonstrates that increased layers are detrimental to system performance through increased loss, despite any benefits of anti-reflection known in the art.

[0048] In some embodiments, an anti-reflective coating with fewer than eight layers is utilized. In some embodiments, only a single layer is utilized, such as an MgF2 coating.

[0049] According to Equation 1, the target refractive index can be solved by simple mathematics, but the cumulative effect of specific k values ​​is not so easily derived, and for alternating layer coatings, the cumulative target n may not be so straightforward either. For example, when a conventional antireflective coating material such as titania is applied to a glass substrate, Equation 1 is not satisfied. Glass generally has a refractive index of 1.5 to 1.6, and an antireflective coating on glass should therefore have a refractive index of 1.22 to 1.27. In some embodiments of the present invention, an antireflective coating of MgF2 (the refractive index of MgF2 is 1.38) is applied to a glass substrate.

[0050] Referring to FIG. 3, multiple waveguides may be used, with each waveguide configured to propagate a specific wavelength of light. Distinct thicknesses for the anti-reflective coating for each waveguide may be created based on the wavelength for which the waveguide is configured. For example, for an MgF2 coating on glass configured to propagate green light (approximately 520 nm), a thickness of 94 nm is desired. Alternatively, a common thickness for any waveguide between 75 nm and 125 nm (to reduce manufacturing application complexity) can be applied so that a single layered coating reflects the entire visible spectrum, with the understanding that the exact thickness selected will be more beneficial for a specific wavelength of light as dictated by Equation 2.

[0051] Throughout this document, references to "one embodiment," "an embodiment," "embodiment," or similar terms mean that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment. Thus, the appearances of such phrases in various places throughout this specification do not necessarily all refer to the same embodiment. Furthermore, particular features, structures, or characteristics may be combined in any suitable manner, without limitation, with respect to one or more embodiments.

[0052] The details set forth herein are by way of example and for illustrative discussion only of preferred embodiments of the present invention, and are presented to provide what is believed to be the most useful and readily understood explanation of the principles and conceptual aspects of various embodiments of the present invention. In this regard, no attempt is made to show structural details of the present invention in more detail than is necessary for a fundamental understanding of the invention, and the description will be considered in conjunction with the figures and / or examples to make apparent to those skilled in the art how some forms of the present invention may be embodied in practice.

[0053] As used herein, unless otherwise indicated, the terms "a" and "an" shall be taken to mean "one," "at least one," or "one or more." Unless otherwise required by context, singular terms used herein shall include pluralities and plural terms shall include the singular.

[0054] Unless otherwise required by context, throughout the description and claims, the words "comprises," "comprising," and the like, should be construed in an inclusive sense (i.e., in the sense of "including, but not limited to"), as opposed to an exclusive or inclusive sense. The term "or," as used herein, should be construed as inclusive or meaning any one or any combination. Thus, "A, B, or C" means any of A, B, C, A and B, A and C, B and C, or A and B and C. Exceptions to this definition occur only when combinations of elements, features, steps, or acts are, in some respect, inherently mutually exclusive.

[0055] Words using the singular or plural also include the plural and singular, respectively. Additionally, the words "herein," "above," and "below," and words of similar import, when used in this disclosure, shall refer to this disclosure as a whole and not to any particular portions of this disclosure.

[0056] The description of the embodiments of the present disclosure is not intended to be exhaustive or to limit the disclosure to the precise form disclosed. While specific embodiments and examples for the present disclosure are described herein for illustrative purposes, various equivalent modifications are possible within the scope of the present disclosure, as those skilled in the art will recognize. Such modifications may include, but are not limited to, changes in the dimensions and / or materials shown in the disclosed embodiments.

[0057] All references cited herein are incorporated by reference. Aspects of the present disclosure can be modified, if necessary, to adopt the systems, functions, and concepts of the above references to provide still further embodiments of the present disclosure. These and other changes can be made to the present disclosure in light of the detailed description.

[0058] Specific elements of any foregoing embodiment may be combined with or substituted for elements in other embodiments. Additionally, although advantages associated with certain embodiments of the present disclosure have been described in the context of those embodiments, other embodiments may also exhibit such advantages, and not all embodiments necessarily need to exhibit such advantages, to fall within the scope of the present disclosure.

[0059] It is therefore to be understood that the invention can be practiced with modification and alteration within the spirit and scope of the appended claims. The description is not intended to be exhaustive or to limit the invention to the precise form disclosed. It is to be understood that the invention can be practiced with modification and alteration, and that the invention is limited only by the claims and their equivalents.

Claims

1. A method for propagating light through an anti-reflective waveguide, said method comprising: propagating the light through a first planar waveguide substrate of the anti-reflective waveguide having first and second surfaces and a first refractive index, the first and second surfaces of the first planar waveguide substrate being disposed on opposite sides of the first planar waveguide substrate; diffracting the light in a first direction out of the first planar waveguide substrate toward a viewer and in a second direction into the first planar waveguide substrate away from the viewer using a plurality of diffractive optical elements of the anti-reflective waveguide disposed on the first surface of the first planar waveguide substrate, the anti-reflective waveguide having an anti-reflective coating disposed on the second surface of the first planar waveguide substrate, the light refracted in the second direction leaving the first planar waveguide substrate through the second surface of the first planar waveguide substrate, the anti-reflective coating reducing reflection of light from the second surface of the first planar waveguide substrate and increasing transmission of light into the anti-reflective waveguide through the second surface of the first planar waveguide substrate; A method comprising:

2. The method of claim 1, wherein the first planar waveguide substrate is configured to propagate light substantially in a first direction by total internal reflection between the plurality of diffractive optical elements and the anti-reflective coating, and to externally couple light in a second direction substantially perpendicular to the first direction.

3. The method of claim 2, wherein the light propagating by total internal reflection includes an s-polarized component and a p-polarized component.

4. The method of claim 3, wherein the antireflective coating is configured to reduce the phase delay between the s-polarized component and the p-polarized component so that the angle of incidence of the s-polarized component is substantially similar to the angle of incidence of the p-polarized component through the antireflective waveguide.

5. The method of claim 1, wherein at least 97 percent of the light is transmitted through the second surface of the first planar waveguide substrate.

6. The method of claim 3, wherein the first planar waveguide substrate is glass and the anti-reflective coating comprises a layer of MgF2.

7. The method of claim 6, wherein the layer of MgF 2 has a thickness of 75 nm to 125 nm.

8. The method of claim 6, wherein the anti-reflective coating comprises a layer of SiO 2 .

9. The method of claim 7, wherein the layer of MgF 2 is disposed directly adjacent to the second surface of the first planar waveguide substrate.

10. The method of claim 9, wherein a layer of SiO 2 is disposed on the layer of MgF 2 .

11. The method of claim 10, wherein the cumulative refractive index of the antireflective coating has a virtual refractive index component value of less than 5×10 −4 .

12. The method of claim 10, wherein the cumulative refractive index of the antireflective coating has a virtual refractive index component value between 5×10 −4 and 1×10 −3 .

13. The method of claim 3, wherein the antireflective coating consists of less than eight layers alternating between a first material and a second material.

14. The method of claim 13, wherein the anti-reflective coating comprises four layers.

15. The method of claim 13, wherein the first material has a relatively higher refractive index than the second material.

16. The method of claim 13, wherein the first material is TiO 2 .

17. The method of claim 13, wherein each layer of TiO 2 has a refractive index greater than 2.

18. The method of claim 13, wherein the second material is SiO 2 .

19. The method of claim 18, wherein each layer of SiO 2 has a refractive index between 1.45 and 1.

58.

20. The method of claim 19, wherein the cumulative refractive index of the antireflective coating has a virtual refractive index component value of less than 5×10 −4 .

21. The method of claim 19, wherein the cumulative refractive index of the antireflective coating has a virtual refractive index component value between 5×10 −4 and 1×10 −3 .

22. The method of claim 1, wherein the cumulative refractive index of the antireflective coating has a virtual refractive index component value of less than 5×10 −4 .

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