Substrate processing method and substrate processing device

Abstract

To provide a substrate processing method and a substrate processing device which enable accurate calculation of a use amount of a processing tape even if a diameter of a tape feed roller changes.SOLUTION: In a substrate processing method; while a tape feed roller 17 of a tape feed device 15 is rotated to feed a processing tape 2 in a prescribed direction, a processing head 10 presses the processing tape 2 against a substrate W so as to process the substrate W; an amount of decrease in a diameter of the tape feed roller 17 is determined, and if the amount of decrease is less than or equal to a first threshold value, the diameter of the tape feed roller 17 is updated by subtracting the amount of decrease from the diameter of the tape feed roller 17; and once the diameter is updated, a corrected feeding amount of the processing tape 2 is calculated on the basis of the number of rotations of the tape feed roller 17 and the diameter of the tape feed roller 17.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a substrate processing apparatus and a substrate processing method for processing a substrate such as a wafer. [Background technology]

[0002] In recent years, managing the surface condition of substrates has attracted attention from the perspective of improving yield in semiconductor device manufacturing. During the semiconductor device manufacturing process, various materials are deposited on silicon wafers. As a result, unwanted films and surface roughness form around the edges of the substrate. In recent years, a method of transporting a substrate by holding only the edges with an arm has become common. Under these circumstances, the unwanted films remaining on the edges peel off during various processes and adhere to devices formed on the substrate, reducing yield. Therefore, to remove the unwanted films from the edges of the substrate, the edges of the substrate are polished using a polishing device.

[0003] This type of polishing apparatus polishes the peripheral edge of a substrate by sliding a polishing tape against the peripheral edge of the substrate. More specifically, the substrate is held by a substrate holder and rotated, while the polishing head presses the polishing tape against the peripheral edge of the substrate, polishing the peripheral edge of the substrate. During polishing of the substrate, the polishing tape is fed from a tape supply reel, via the polishing head, to a tape take-up reel.

[0004] The polishing tape supplied to the polishing head is fed in a predetermined direction by a tape feed device provided on the polishing head. The tape feed device includes a tape feed roller connected to the rotating shaft of a tape feed motor and a nip roller that presses the polishing tape against the tape feed roller. The polishing tape can be fed by rotating the tape feed roller with the tape feed motor. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-87136 [Patent Document 2] Japanese Patent Application Publication No. 2018-46189 Summary of the Invention [Problem to be solved by the invention]

[0006] In order to replace the polishing tape on the tape take-up reel with a new one before it runs out, polishing devices are configured to monitor the amount of polishing tape used and issue an alarm to prompt replacement of the polishing tape when a predetermined amount of usage has been reached. The amount of polishing tape used is calculated based on the number of rotations of the tape feed roller of the tape feed device and the diameter of the tape feed roller. However, the tape feed roller wears due to friction with the polishing tape, and its diameter gradually decreases. When the diameter of the tape feed roller decreases, an error occurs between the calculated amount of polishing tape used and the actual amount of usage, and the polishing tape may be replaced when a large amount remains on the tape take-up reel.

[0007] Therefore, the present invention provides a substrate processing method and a substrate processing apparatus that can accurately calculate the amount of processing tape used even if the diameter of the tape feed roller changes. [Means for solving the problem]

[0008] In one aspect, a substrate processing method is provided, which processes the substrate by rotating a tape feed roller of a tape feeding device to feed a processing tape in a predetermined direction while pressing the processing tape against a substrate with a processing head, determining a reduction in diameter of the tape feed roller, and if the reduction is less than or equal to a first threshold value, updating the diameter of the tape feed roller by subtracting the reduction from the diameter of the tape feed roller, and after updating the diameter, calculating a corrected feed amount of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller.

[0009] In one aspect, determining the amount of reduction in the diameter of the tape feed roller includes calculating the amount of feed of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller, calculating the amount of winding of the processing tape based on the number of rotations of a tape winding reel that supplies the processing tape to the processing head and the outer diameter of the wound processing tape on the tape winding reel, and calculating the amount of reduction in the diameter of the tape feed roller based on the difference between the amount of feed of the processing tape and the amount of winding of the processing tape. In one aspect, determining the amount of reduction in the diameter of the tape feed roller includes calculating the amount of feed of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller, detecting a plurality of tape marks evenly spaced on the processing tape using a tape mark detection sensor, counting the number of detected tape marks, calculating the amount of unwinding of the processing tape, and calculating the amount of reduction in the diameter of the tape feed roller based on the difference between the amount of feed of the processing tape and the amount of unwinding of the processing tape. In one aspect, determining the amount of reduction in diameter of the tape feed roller includes generating an image of the tape feed roller with an imaging device and measuring the amount of reduction in diameter of the tape feed roller based on the image.

[0010] In one embodiment, the substrate processing method further includes, when the decrease amount is greater than the first threshold value and less than or equal to a second threshold value, updating the diameter of the tape feed roller by subtracting a predetermined correction amount from the diameter of the tape feed roller. In one embodiment, the substrate processing method further includes counting the number of times the decrease amount is determined to be greater than the first threshold value and less than or equal to the second threshold value, and issuing an abnormality alarm when the number is greater than a predetermined allowable number. In one embodiment, the substrate processing method further includes issuing an abnormality alarm when the amount of decrease is greater than the second threshold value. In one aspect, the substrate processing method further includes calculating the cumulative usage of the processing tape since the start of use of the processing tape, and issuing a tape replacement warning when the cumulative usage reaches a predetermined tape replacement usage. In one aspect, the substrate processing method further includes calculating a rotational speed command value for the tape feed device to feed the processing tape at a predetermined tape feed speed based on the updated diameter of the tape feed roller, and rotating the tape feed roller at the rotational speed command value. In one embodiment, the amount of decrease in the diameter of the tape feed roller is determined when an increase in the cumulative amount of use of the processing tape since the start of use of the processing tape is equal to or greater than a predetermined length.

[0011] In one aspect, a substrate processing apparatus is provided, comprising: a substrate holding unit that holds and rotates a substrate; a tape feeding device that rotates a tape feed roller to feed a processing tape in a predetermined direction; a processing head that presses the processing tape against the substrate; and a processing system electrically connected to the tape feeding device, wherein the processing system is configured to determine an amount of reduction in diameter of the tape feed roller, and when the amount of reduction is less than or equal to a first threshold, update the diameter of the tape feed roller by subtracting the amount of reduction from the diameter of the tape feed roller, and after updating the diameter, calculate a corrected feed amount of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller.

[0012] In one aspect, the processing system is configured to calculate the feed amount of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller, calculate the amount of winding of the processing tape based on the number of rotations of the tape winding reel that supplies the processing tape to the processing head and the outer diameter of the wound processing tape on the tape winding reel, and calculate the reduction in the diameter of the tape feed roller based on the difference between the feed amount of the processing tape and the amount of winding of the processing tape. In one aspect, the processing system includes a tape mark detection sensor that detects multiple tape marks attached at equal intervals to the processing tape, and a reduction amount calculation unit that counts the number of detected tape marks to calculate the amount of unwinding of the processing tape, calculates the feed amount of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller, and calculates the reduction amount of the diameter of the tape feed roller based on the difference between the feed amount of the processing tape and the unwinding amount of the processing tape. In one aspect, the processing system includes an imaging device that generates an image of the tape feed roller, and a reduction amount measurement unit that measures the reduction amount of the diameter of the tape feed roller based on the image.

[0013] In one embodiment, the processing system is configured to update the diameter of the tape feed roller by subtracting a predetermined correction amount from the diameter of the tape feed roller when the decrease is greater than the first threshold and less than or equal to a second threshold. In one embodiment, the processing system is configured to count the number of times the decrease amount is determined to be greater than the first threshold value and less than or equal to the second threshold value, and to issue an abnormality alarm when the number of times is greater than a predetermined allowable number. In one embodiment, the processing system is configured to issue an abnormality alarm when the decrease is greater than the second threshold. In one aspect, the processing system is configured to calculate the cumulative usage of the processing tape since the start of use of the processing tape, and to issue a tape replacement warning when the cumulative usage reaches a predetermined tape replacement usage. In one aspect, the processing system is configured to calculate a rotational speed command value for the tape feeding device to feed the processing tape at a predetermined tape feeding speed based on the updated diameter of the tape feed roller, and to rotate the tape feed roller at the rotational speed command value. In one aspect, the processing system is configured to determine the amount of decrease in diameter of the tape feed roller when the increase in cumulative usage of the processing tape since the start of use of the processing tape is equal to or greater than a predetermined length. [Effects of the Invention]

[0014] The substrate processing method and the substrate processing apparatus determine the amount of reduction in the diameter of the tape feed roller, and calculate the corrected feed amount of the processing tape based on the determined amount of reduction. Therefore, even if the diameter of the tape feed roller changes, the amount of usage of the processing tape can be accurately calculated. [Brief explanation of the drawings]

[0015] [Figure 1] 1 is a side view showing an embodiment of a substrate processing apparatus. [Figure 2] FIG. 2 is a plan view of the substrate processing apparatus shown in FIG. [Figure 3] FIG. 2 is a schematic diagram of the processing head shown in FIG. [Figure 4] 1 is a flowchart illustrating an embodiment of a substrate processing method using the substrate processing apparatus. [Figure 5] 1 is a flowchart illustrating an embodiment of a substrate processing method using the substrate processing apparatus. [Figure 6] 1 is a flowchart illustrating an embodiment of a substrate processing method using the substrate processing apparatus. [Figure 7] FIG. 10 is a schematic diagram illustrating another embodiment of a processing system. [Figure 8] FIG. 8 is a schematic diagram of the tape mark detection sensor shown in FIG. 7. [Figure 9] FIG. 10 is a plan view schematically illustrating yet another embodiment of the processing system. [Figure 10] FIG. 2 is a schematic diagram illustrating an example of an image generated by an imaging device. DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a side view showing one embodiment of a substrate processing apparatus 1, and FIG. 2 is a plan view of the substrate processing apparatus 1 shown in FIG. 1. The substrate processing apparatus 1 of this embodiment is an apparatus for processing the peripheral portion of a substrate W such as a wafer. In this specification, the peripheral portion of the substrate W refers to an area including at least one of a bevel portion, a top edge portion, and a bottom edge portion of the substrate W. In one embodiment, the substrate processing apparatus 1 may be an apparatus for processing a notch formed in the peripheral portion of the substrate W.

[0017] As shown in Figure 1, the substrate processing apparatus 1 includes a substrate holding unit 5 that holds and rotates the substrate W, a processing head 10 that processes the substrate W by pressing a processing tape 2 against the substrate W, a processing tape supply mechanism 20 that supplies the processing tape 2 to the processing head 10 and recovers it from the processing head 10, a lower supply nozzle 41, and an upper supply nozzle 42.

[0018] Specific examples of the substrate processing apparatus 1 include a polishing apparatus that polishes the peripheral portion of the substrate W, and a cleaning apparatus that cleans the peripheral portion of the substrate W. When the substrate processing apparatus 1 is a polishing apparatus, the processing tape 2 is a polishing tape having a polishing surface to which abrasive grains are fixed, and the processing head 10 is a polishing head that presses the polishing tape against the peripheral portion of the substrate W to polish the peripheral portion of the substrate W. When the substrate processing apparatus 1 is a cleaning apparatus, the processing tape 2 is a cleaning tape made of nonwoven fabric, woven fabric, knitted fabric, or the like, and the processing head 10 is a cleaning head that presses the cleaning tape against the peripheral portion of the substrate W to clean the peripheral portion of the substrate W.

[0019] In this embodiment, the substrate processing apparatus 1 includes one processing head 10, but in one embodiment, the substrate processing apparatus 1 may include two or more processing heads.

[0020] The substrate holder 5 includes a holding stage 7 that holds the substrate W by vacuum suction, a shaft 8 connected to the center of the holding stage 7, and a holding stage drive mechanism 9 that rotates and moves the holding stage 7 up and down. The holding stage drive mechanism 9 is configured to rotate the holding stage 7 about a rotation axis Cr and move it up and down along the rotation axis Cr. The axis passing through the center O1 of the substrate W coincides with the rotation axis Cr of the holding stage 7.

[0021] The processing tape supply mechanism 20 includes a tape supply reel 21 that supplies the processing tape 2 to the processing head 10, a tape take-up reel 22 that takes up the processing tape 2 that has been used to process the substrate W, and a plurality of guide rollers 24, 25, 26, and 27. The tape supply reel 21, the tape take-up reel 22, and the plurality of guide rollers 24, 25, 26, and 27 are fixed to a reel base 28.

[0022] Before being used to process a substrate W, a roll 35 of the processing tape 2 is attached to the tape supply reel 21. The processing tape 2 is fed from the tape supply reel 21 to the tape take-up reel 22 via the processing head 10. The direction of travel of the processing tape 2 is guided by guide rollers 24, 25, 26, and 27. After having been used to process a substrate W, the processing tape 2 is taken up onto the tape take-up reel 22 to form a roll 36.

[0023] The processing tape supply mechanism 20 further includes a supply reel rotation mechanism 31 and a take-up reel rotation mechanism 32. The supply reel rotation mechanism 31 is connected to the tape supply reel 21, and the take-up reel rotation mechanism 32 is connected to the tape take-up reel 22. The supply reel rotation mechanism 31 is configured to apply a rotational torque to the tape supply reel 21 to rotate the tape supply reel 21. The take-up reel rotation mechanism 32 is configured to apply a rotational torque to the tape take-up reel 22 to rotate the tape take-up reel 22.

[0024] In one embodiment, each of the supply reel rotation mechanism 31 and the take-up reel rotation mechanism 32 is a combination of a motor and a motor driver that applies a voltage to the motor. The rotational torque of the motor can be changed by the voltage applied to the motor from the motor driver.

[0025] The supply reel rotation mechanism 31 and the take-up reel rotation mechanism 32 rotate the tape supply reel 21 and the tape take-up reel 22 in opposite directions, thereby applying a predetermined tension to the processing tape 2. The processing tape 2 is fed at a predetermined tape feed speed by the tape feeding device 15, which will be described later.

[0026] As shown in Figure 2, the supply reel rotation mechanism 31 is connected to a rotary encoder 33 that detects the rotation angle of the tape supply reel 21. The rotary encoder 33 is configured to count the number of pulses that increases with the rotation angle of the tape supply reel 21. The rotation angle of the tape supply reel 21 is represented by the number of pulses. The number of rotations of the tape supply reel 21 can be calculated by dividing the number of pulses counted by the rotary encoder 33 by the number of pulses per rotation of the tape supply reel 21. Similarly, the take-up reel rotation mechanism 32 is connected to a rotary encoder (not shown) that detects the rotation angle of the tape take-up reel 22.

[0027] The substrate processing apparatus 1 further includes a tilt mechanism 50 that tilts the processing head 10 relative to the substrate holding surface 7a of the holding stage 7. The tilt mechanism 50 is connected to the processing head 10. The tilt mechanism 50 includes a crank arm 52 connected to the processing head 10, and an arm rotation device 53 that rotates the crank arm 52. One end of the crank arm 52 is located at the same height as the substrate holding surface 7a of the holding stage 7, and is connected to the arm rotation device 53. The other end of the crank arm 52 is connected to the processing head 10.

[0028] When the arm rotation device 53 rotates the crank arm 52, the tilt mechanism 50 can tilt the entire processing head 10 at a predetermined tilting speed relative to the substrate W on the substrate holding surface 7a of the holding stage 7. Furthermore, the tilt mechanism 50 is configured to maintain the processing head 10 at a predetermined tilt angle. Note that the specific configuration of the tilt mechanism 50 is not limited to that of this embodiment, as long as it can tilt the processing head 10 relative to the substrate holding surface 7a of the holding stage 7 and the substrate W.

[0029] 1, the lower supply nozzle 41 is configured to supply liquid to the lower surface of the substrate W. The upper supply nozzle 42 is configured to supply liquid to the upper surface of the substrate W. An example of a liquid supplied to the substrate W is pure water. During processing of the substrate W, the liquid is supplied from the lower supply nozzle 41 to the lower surface of the substrate W, and the liquid is supplied from the upper supply nozzle 42 to the upper surface of the substrate W.

[0030] 3 is a schematic diagram of the processing head 10 shown in FIG. The processing head 10 includes a pressing member 12 that presses the processing tape 2 against the peripheral edge of the substrate W, and an air cylinder (drive mechanism) 13 that moves the pressing member 12 toward the peripheral edge of the substrate W. The pressing force of the processing tape 2 against the substrate W is adjusted by controlling the air pressure supplied to the air cylinder 13. The pressing member 12 is disposed on the back side of the processing tape 2. Instead of the air cylinder 13, an electric actuator may be used as the drive mechanism that moves the pressing member 12 toward the peripheral edge of the substrate W.

[0031] The substrate processing apparatus 1 includes a tape feed device 15 that feeds the processing tape 2 in its longitudinal direction. In this embodiment, the tape feed device 15 is fixed to the processing head 10, but in another embodiment, the tape feed device 15 may be provided at a position remote from the processing head 10.

[0032] The tape feed device 15 includes a tape feed roller 17, a nip roller 18 that presses the processing tape 2 against the tape feed roller 17, and a tape feed motor 16 that rotates the tape feed roller 17. The tape feed motor 16 is disposed on the side of the processing head 10. The tape feed roller 17 is attached to the rotation shaft of the tape feed motor 16. The tape feed roller 17 includes a shaft core 17a and an elastic member 17b, such as polyurethane rubber, wound around the shaft core 17a. The nip roller 18 is disposed adjacent to the tape feed roller 17. The nip roller 18 is supported by a biasing device (not shown) that generates a force in a direction toward the tape feed roller 17. The processing tape 2 is sandwiched between the tape feed roller 17 and the nip roller 18.

[0033] When the tape feed motor 16 rotates, the tape feed roller 17 rotates and feeds the processing tape 2 from the tape supply reel 21 to the tape take-up reel 22 via the processing head 10. The nip roller 18 is configured to be able to rotate around its own axis. During processing of the substrate W, the tape feed device 15 feeds the processing tape 2 in its longitudinal direction at a predetermined tape feed speed (for example, several mm / min to several tens of mm / min).

[0034] The tape feed motor 16 is connected to a rotary encoder 19 that detects the rotation angle of the tape feed motor 16. The rotary encoder 19 is configured to count the number of pulses, which increases with the rotation angle of the tape feed motor 16. The rotation angle of the tape feed motor 16 is represented by the number of pulses. The number of rotations of the tape feed motor 16 can be calculated by dividing the number of pulses counted by the rotary encoder 19 by the number of pulses per rotation of the tape feed motor 16. The tape feed roller 17 is connected to the tape feed motor 16 via a reduction gear (not shown), and the rotation of the tape feed motor 16 is transmitted to the tape feed roller 17 at a predetermined reduction ratio. Therefore, the number of rotations of the tape feed roller 17 can be calculated from the number of rotations of the tape feed motor 16 and the reduction ratio. If a reduction gear is not provided, the number of rotations of the tape feed roller 17 is equal to the number of rotations of the tape feed motor 16.

[0035] The holding stage drive mechanism 9 of the substrate holder 5, the air cylinder 13 and tape feed device 15 of the processing head 10, the supply reel rotation mechanism 31 and take-up reel rotation mechanism 32 of the processing tape supply mechanism 20, the lower supply nozzle 41, the upper supply nozzle 42, and the arm rotation device 53 of the tilt mechanism 50 are electrically connected to a processing system 60 shown in Figure 1. The operations of the holding stage drive mechanism 9 of the substrate holder 5, the air cylinder 13 and tape feed device 15 of the processing head 10, the supply reel rotation mechanism 31 and take-up reel rotation mechanism 32 of the processing tape supply mechanism 20, the lower supply nozzle 41, the upper supply nozzle 42, and the arm rotation device 53 of the tilt mechanism 50 are controlled by the processing system 60.

[0036] The processing system 60 includes at least one computer. The processing system 60 includes a storage device 60a that stores programs and the like, and an arithmetic device 60b that executes calculations according to instructions included in the programs. The storage device 60a includes a main storage device such as a random access memory (RAM) and an auxiliary storage device such as a hard disk drive (HDD) or a solid state drive (SSD). Examples of the arithmetic device 60b include a CPU (central processing unit) and a GPU (graphics processing unit). However, the specific configuration of the processing system 60 is not limited to these examples.

[0037] The peripheral edge of the substrate W is processed as follows. The substrate W to be processed is placed on the substrate holding surface 7a of the holding stage 7 of the substrate holder 5 and held by vacuum suction. The substrate holder 5 lowers the substrate W to the processing position and rotates the holding stage 7. Liquid is then supplied from the lower supply nozzle 41 and the upper supply nozzle 42. The processing tape supply mechanism 20 feeds the processing tape 2 from the tape unwind reel 21 to the tape take-up reel 22 via the processing head 10, and the tape feed device 15 feeds the processing tape 2 at a predetermined tape feed speed. Next, the air cylinder 13 of the processing head 10 is driven to press the processing tape 2 against the peripheral edge of the substrate W with the pressing member 12, thereby processing the peripheral edge of the substrate W. During processing of the substrate W, the tilt mechanism 50 tilts the processing head 10 at a predetermined tilt speed relative to the substrate holding surface 7a of the holding stage 7. Alternatively, the tilt mechanism 50 maintains the processing head 10 at a predetermined tilt angle relative to the substrate holding surface 7a of the holding stage 7. The processing of the substrate W is performed according to a predetermined processing recipe.

[0038] The processing system 60 is configured to calculate the feed amount of the processing tape 2 fed by the tape feeding device 15 based on the number of rotations of the tape feed roller 17 and the diameter of the tape feed roller 17. More specifically, the processing system 60 calculates the feed amount of the processing tape 2 according to the following equation (1). Processing tape 2 feed amount = diameter of tape feed roller 17 × π × (number of rotations of tape feed motor 16 × reduction ratio of tape feed motor 16) = diameter of tape feed roller 17 × π × number of rotations of tape feed roller 17 ···(1)

[0039] In the above formula (1), the diameter of the tape feed roller 17 is updated each time the amount of decrease in the diameter of the tape feed roller 17, which will be described later, is calculated. If the tape feed roller 17 is a new roller that is not worn, the amount of decrease in the diameter of the tape feed roller 17 is 0, and therefore the diameter of the tape feed roller 17 is the initial diameter.

[0040] The initial diameter of the tape feed roller 17 and the reduction ratio of the tape feed motor 16 are stored in advance in the storage device 60a. If there is no reduction gear between the tape feed motor 16 and the tape feed roller 17, the reduction ratio is 1. The processing system 60 is electrically connected to the rotary encoder 19, and the number of pulses representing the rotation angle of the tape feed motor 16 detected by the rotary encoder 19 is sent to the processing system 60. The processing system 60 calculates the number of rotations of the tape feed motor 16 by dividing the number of pulses representing the rotation angle of the tape feed motor 16 by the number of pulses per rotation of the tape feed motor 16.

[0041] The processing system 60 is configured to calculate the cumulative usage amount of the processing tape 2, which is the cumulative value of the amount of feeding of the processing tape 2 since the start of use of the processing tape 2, and to issue a tape replacement warning when the cumulative usage amount reaches a predetermined tape replacement usage amount. The tape replacement warning is a warning to prompt replacement of the processing tape 2. In one embodiment, the tape replacement warning is a signal for displaying a warning on a display device (not shown).

[0042] The elastic member 17b of the tape feed roller 17 wears due to friction with the processing tape 2, so the diameter of the tape feed roller 17 gradually decreases as the processing tape 2 is used. As described above, the feed amount of the processing tape 2 is calculated based on the diameter of the tape feed roller 17, so when the diameter of the tape feed roller 17 decreases, an error occurs between the feed amount of the processing tape 2 calculated by the processing system 60 and the length of the processing tape 2 that has actually been used. Therefore, the processing system 60 of this embodiment has a function for calculating the amount of decrease in the diameter of the tape feed roller 17.

[0043] The processing system 60 is configured to calculate the amount of decrease in the diameter of the tape feed roller 17 when the increase in the cumulative usage of the processing tape 2 since the start of use of the processing tape 2 is equal to or greater than a predetermined length (i.e., when the cumulative usage of the processing tape 2 has increased by equal to or greater than the predetermined length). This predetermined length is determined in advance based on experimental results, etc., and is stored in the storage device 60a of the processing system 60. Each time the operation of the tape feed device 15 stops, the processing system 60 determines whether the increase in the cumulative usage of the processing tape 2 is equal to or greater than the predetermined length, and calculates the amount of decrease in the diameter of the tape feed roller 17 when the increase in the cumulative usage of the processing tape 2 is equal to or greater than the predetermined length.

[0044] The processing system 60 is configured to calculate the amount of winding of the processing tape 2 based on the number of rotations of the tape supply reel 21 and the outer diameter of the winding body 35 of the processing tape 2 on the tape supply reel 21. The calculation of the amount of winding of the processing tape 2 is performed at the same time as the calculation of the feed amount of the processing tape 2. More specifically, the start and end points of the calculation of the amount of winding of the processing tape 2 are the same as the start and end points of the calculation of the feed amount of the processing tape 2.

[0045] The processing system 60 calculates the amount of unwinding of the processing tape 2 according to the following formula (2). Processing tape 2 unwinding amount =Outer diameter of the roll 35 of the processing tape 2 on the tape unwinding reel 21 × π × Number of rotations of tape unwind reel 21 (2)

[0046] The processing system 60 is electrically connected to the rotary encoder 33, and the number of pulses representing the rotation angle of the tape supply reel 21 detected by the rotary encoder 33 is sent to the processing system 60. The processing system 60 calculates the number of rotations of the tape supply reel 21 by dividing the number of pulses representing the rotation angle of the tape supply reel 21 by the number of pulses per rotation of the tape supply reel 21.

[0047] The outer diameter of the reel 35 of the processing tape 2 decreases as the amount of processing tape 2 used increases. Therefore, the amount of processing tape 2 that is unwound is calculated based on the outer diameter of the reel 35 at the time the amount of processing tape 2 that is unwound is calculated. The outer diameter of the reel 35 of the processing tape 2 can be obtained, for example, by the method described in Patent Document 1 (JP 2008-87136 A). Specifically, first, with the tape feeding device 15 stopped, the processing head 10 is tilted by the tilt mechanism 50 to unwind a predetermined length of the processing tape 2 from the tape unwind reel 21. Next, the rotary encoder 33 detects the rotation angle of the tape unwind reel 21 when the predetermined length of the processing tape 2 is unwound. The processing system 60 calculates the outer diameter of the reel 35 based on the detected rotation angle of the tape unwind reel 21. In another example, the processing system 60 may measure the outer diameter of the reel 35 using a displacement sensor (not shown).

[0048] The processing system 60 calculates the amount of processing tape 2 to be unwound based on the outer diameter of the wound body 35 of the processing tape 2 on the tape unwinding reel 21 and the number of rotations of the tape unwinding reel 21 .

[0049] The processing system 60 is configured to calculate the amount of decrease in the diameter of the tape feed roller 17 based on the difference between the feed amount of the processing tape 2 calculated according to the above formula (1) and the unwound amount of the processing tape 2 calculated according to the above formula (2), and to update the diameter of the tape feed roller 17 by subtracting the amount of decrease from the diameter of the tape feed roller 17. More specifically, the processing system 60 calculates the amount of decrease in the diameter of the tape feed roller 17 according to the following formula (3):

[0050] D: The most recent diameter of the tape feed roller 17 before being updated L1: The feed amount of the processing tape 2 calculated according to the above formula (1) using the diameter D of the tape feed roller 17 N1: Number of rotations of the tape feed roller 17 L2: Unwinding amount of processing tape 2 calculated according to the above formula (2) L:L1-L2 Ra: Diameter reduction of tape feed roller 17 Then, L = (D-Ra) × π × N1-L2 Ra = D - (L + L2) / (π × N1) (3)

[0051] The calculation of the decrease amount Ra of the diameter of the tape feed roller 17 is performed when the increase in the cumulative usage amount of the processing tape 2 is equal to or greater than a predetermined length. When the decrease amount Ra of the diameter of the tape feed roller 17 is equal to or less than a first threshold value, the processing system 60 updates the diameter of the tape feed roller 17 by subtracting the decrease amount Ra from the diameter of the tape feed roller 17.

[0052] In the above formula (3), the diameter D of the tape feed roller 17 is updated after the amount of decrease Ra in the diameter of the tape feed roller 17 is calculated. In other words, after the amount of decrease Ra in the diameter of the tape feed roller 17 is calculated and before the next calculation of the amount of decrease Ra, the numerical value of the diameter D of the tape feed roller 17 is replaced with the numerical value D-Ra. If the tape feed roller 17 is a new roller that is not worn out, the amount of decrease Ra in the diameter of the tape feed roller 17 is 0, and therefore the diameter D of the tape feed roller 17 is the initial diameter.

[0053] After the diameter of the tape feed roller 17 is updated, the processing system 60 calculates the corrected feed amount of the processing tape 2 according to the above formula (1) based on the number of rotations of the tape feed roller 17 and the diameter (updated diameter) of the tape feed roller 17. This allows the processing system 60 to calculate the corrected feed amount of the processing tape 2 based on the diameter of the tape feed roller 17 that reflects the decrease amount Ra.

[0054] The first threshold value is determined in advance based on experimental results or the like, and is stored in the storage device 60a of the processing system 60. For example, the first threshold value may be the amount of decrease in the diameter of the tape feed roller 17 that determines that replacement of the tape feed roller 17 is necessary. In one embodiment, without setting a first threshold value, the processing system 60 may update the diameter of the tape feed roller 17 by subtracting the amount of decrease Ra calculated by the processing system 60 from the diameter of the tape feed roller 17.

[0055] The processing system 60 sends a rotation speed command value for feeding the processing tape 2 at a predetermined tape feed speed to the tape feed motor 16. The tape feed motor 16 rotates the tape feed roller 17 at the rotation speed command value, and feeds the processing tape 2 at the predetermined tape feed speed. The tape feed speed is included in the processing recipe, and the externally input tape feed speed value is stored in the storage device 60a of the processing system 60.

[0056] The processing system 60 is configured to calculate a rotational speed command value to be sent to the tape feed motor 16 according to the following equation (4). Rotation speed command value [min -1 ] = Tape feed speed [mm / min] / per rotation of tape feed motor 16 Tape feed amount [mm] = Tape feed speed [mm / min] / (diameter of tape feed roller 17 [mm] × π) (4)

[0057] In one embodiment, the processing system 60 may be configured to calculate a rotational speed command value sent to the tape feed motor 16 according to the following equation (5): Rotation speed command value [pls / sec] = Number of pulses when feeding processing tape 2 by 1 mm [pls / mm] x Tape feed speed [mm / min] ÷ 60 = Number of pulses per revolution of the tape feed motor 16 [pls] / Tape feed amount per rotation of tape feed motor 16 [mm] x Tape feed speed [mm / min] ÷ 60 = Number of pulses per revolution of the tape feed motor 16 [pls] / (Diameter of tape feed roller 17 [mm] × π) × Tape feed speed [mm / min] ÷ 60 (5)

[0058] As can be seen from the above equation (4) or (5), a decrease in the diameter of the tape feed roller 17 changes the rotational speed command value required to feed the processing tape 2 at a predetermined tape feed speed. Therefore, after calculating the amount of decrease Ra in the diameter of the tape feed roller 17, the processing system 60 is configured to update the diameter of the tape feed roller 17 and, based on the updated diameter of the tape feed roller 17, calculate a rotational speed command value for the tape feeding device 15 to feed the processing tape 2 at a predetermined tape feed speed.

[0059] After the reduction amount Ra of the diameter of the tape feed roller 17 is calculated, the processing system 60 is configured to calculate a rotational speed command value to be sent to the tape feed motor 16 based on the most recent diameter D of the tape feed roller 17 before being updated and the reduction amount Ra of the diameter of the tape feed roller 17, according to the following equation (6). Rotation speed command value [min -1 ] = Tape feed speed [mm / min] / ((D-Ra) [mm] × π) (6) This allows the processing system 60 to accurately determine the rotational speed command value based on the diameter of the tape feed roller 17 that reflects the reduction amount Ra.

[0060] In one embodiment, after the reduction amount Ra of the diameter of the tape feed roller 17 is calculated, the processing system 60 may be configured to calculate a rotational speed command value to be sent to the tape feed motor 16 according to the following equation (7): Rotation speed command value [pls / sec] = Number of pulses per revolution of the tape feed motor 16 [pls] / ((D-Ra) [mm] × π) × tape feed speed [mm / min] ÷ 60 (7)

[0061] When calculating the amount of decrease Ra in the diameter of the tape feed roller 17, the amount of decrease Ra in the diameter of the tape feed roller 17 may be calculated as a value larger than the actual amount of decrease due to factors other than the decrease in the diameter of the tape feed roller 17. For example, noise may occur in the pulses detected by the rotary encoder 19 or the rotary encoder 33, increasing the difference between the amount of feed of the processing tape 2 and the amount of unwinding of the processing tape 2. In this case, the amount of decrease Ra in the diameter of the tape feed roller 17 is calculated as a value larger than the actual amount of decrease.

[0062] Therefore, when the calculated decrease amount Ra in the diameter of the tape feed roller 17 is greater than the first threshold value and equal to or less than the second threshold value, the processing system 60 is configured to update the diameter of the tape feed roller 17 by subtracting a predetermined correction amount, instead of the decrease amount Ra, from the diameter of the tape feed roller 17 (the most recent diameter before being updated). The predetermined correction amount is a value smaller than the calculated decrease amount Ra in the diameter of the tape feed roller 17. In one embodiment, the predetermined correction amount is the same value as the first threshold value.

[0063] After the diameter of the tape feed roller 17 is updated using a predetermined correction amount, the processing system 60 calculates the corrected feed amount of the processing tape 2 according to the above equation (1) based on the number of rotations of the tape feed roller 17 and the diameter of the tape feed roller 17 (updated diameter).

[0064] After the diameter of the tape feed roller 17 is updated using the predetermined correction amount, the processing system 60 is configured to calculate a rotational speed command value to be sent to the tape feed motor 16 according to the following equation (8). Rotation speed command value [min -1 ] = Tape feed speed [mm / min] / ((Dh) [mm] × π) (8) Here, D is the most recent diameter of the tape feed roller 17 before being updated, and h is a predetermined correction amount.

[0065] In one embodiment, after the diameter of the tape feed roller 17 is updated using the predetermined correction amount h, the processing system 60 may be configured to calculate a rotational speed command value to be sent to the tape feed motor 16 according to the following equation (9): Rotation speed command value [pls / sec] = Number of pulses per revolution of the tape feed motor 16 [pls] / ((Dh) [mm] × π) × tape feed speed [mm / min] ÷ 60 (9)

[0066] If the difference between the feed amount of the processing tape 2 and the unwind amount of the processing tape 2 temporarily increases due to factors other than a decrease in the diameter of the tape feed roller 17, this may not affect the processing of the substrate W. However, if this occurs a certain number of times, it may indicate some kind of malfunction, and so the processing of the substrate W must be stopped and maintenance must be performed.

[0067] Therefore, the processing system 60 is configured to count the number of times a decrease amount that is greater than the first threshold value and less than or equal to the second threshold value is determined, and to issue an abnormality alarm when the counted number is greater than a predetermined allowable number.

[0068] Furthermore, the processing system 60 is configured to issue an abnormality alarm when the calculated decrease in diameter Ra of the tape feed roller 17 is greater than a second threshold value. The second threshold value is determined in advance based on experimental results or the like, and is stored in the storage device 60a of the processing system 60.

[0069] After the diameter of the tape feed roller 17 is updated using the calculated decrease amount Ra and after the diameter of the tape feed roller 17 is updated using the predetermined correction amount, the processing system 60 is configured to calculate the cumulative usage amount of the processing tape 2, including the cumulative value of the corrected feed amount of the processing tape 2, and to issue a tape replacement alarm when the cumulative usage amount of the processing tape 2 reaches a predetermined tape replacement usage amount. The cumulative usage amount of the processing tape 2 is the cumulative value of the feed amount of the processing tape 2 since the start of use of the processing tape 2. The cumulative usage amount of the processing tape 2 includes the feed amount of the processing tape 2 calculated based on the initial diameter of the tape feed roller 17.

[0070] 4 to 6 are flowcharts showing an embodiment of a substrate processing method using the substrate processing apparatus 1. FIG. 4, in step S101, the tape feeding device 15 starts feeding the processing tape 2. Specifically, the processing system 60 sends a rotation speed command value to the tape feed motor 16 for feeding the processing tape 2 at a predetermined tape feed speed. The tape feed motor 16 rotates the tape feed roller 17 using the rotation speed command value, and feeds the processing tape 2 at the predetermined tape feed speed. The processing tape 2 is fed in a predetermined direction (in this embodiment, the longitudinal direction of the processing tape 2).

[0071] In step S102, the processing tape 2 is fed by the tape feed device 15 while the processing head 10 presses the processing tape 2 against the substrate W to process the substrate W. In step S103, while feeding the process tape 2 using the tape feeding device 15, the processing system 60 calculates the feed amount of the process tape 2 according to the above formula (1) based on the diameter of the tape feed roller 17 and the number of rotations of the tape feed roller 17. The calculated feed amount of the process tape 2 is either the initial feed amount of the process tape 2 calculated based on the initial diameter of the tape feed roller 17, or the corrected feed amount of the process tape 2. As will be described later, after the diameter of the tape feed roller 17 is updated, the processing system 60 calculates the corrected feed amount of the process tape 2 based on the number of rotations of the tape feed roller 17 and the updated diameter of the tape feed roller 17.

[0072] In step S104, the processing system 60 calculates the cumulative usage amount of the processing tape 2, which is the cumulative value of the feed amount of the processing tape 2 since the start of use of the processing tape 2. The cumulative usage amount of the processing tape 2 includes the sum of the cumulative value of the initial feed amount of the processing tape 2 calculated based on the initial diameter of the tape feed roller 17 and the cumulative value of the corrected feed amount of the processing tape 2. In step S105, the processing system 60 determines whether the cumulative usage of the processing tape 2 has reached a predetermined tape replacement usage. When the processing system 60 determines that the cumulative usage of the processing tape 2 has reached the tape replacement usage ("YES" in step S105), it issues a tape replacement warning (step S106). The operator replaces the processing tape 2 based on the tape replacement warning.

[0073] When the processing system 60 determines that the cumulative usage of the processing tape 2 has not reached the tape replacement usage amount ("NO" in step S105), it processes the substrate W according to a predetermined processing recipe and then stops the feeding operation of the processing tape 2 by the tape feeding device 15 (step S107). In step S108, the processing system 60 determines whether the increase in the cumulative usage amount of the processing tape 2 is equal to or greater than a predetermined length. When the processing system 60 determines that the increase in the cumulative usage amount of the processing tape 2 is equal to or greater than the predetermined length ("YES" in step S108), it executes step S109, which will be described later. When the processing system 60 determines that the increase in the cumulative usage amount of the processing tape 2 is not equal to or greater than the predetermined length ("NO" in step S108), it returns to step S101 and causes the tape feeding device 15 to start feeding the processing tape 2 again.

[0074] As shown in Figure 5, in step S109, the processing system 60 calculates the amount of reduction in the diameter of the tape feed roller 17 according to the above formula (3) based on the difference between the amount of feed of the processing tape 2 by the tape feed device 15 calculated according to the above formula (1) and the corresponding amount of unwinding of the processing tape 2 calculated according to the above formula (2), and determines the amount of reduction in the diameter of the tape feed roller 17.

[0075] In step S110, the processing system 60 determines whether the amount of decrease in the diameter of the tape feed roller 17 is equal to or less than a first threshold value. When the processing system 60 determines that the amount of decrease in the diameter of the tape feed roller 17 is equal to or less than the first threshold value ("YES" in step S110), the processing system 60 updates the diameter of the tape feed roller 17 by subtracting the amount of decrease from the diameter of the tape feed roller 17 (step S111). When the processing system 60 determines that the amount of decrease in the diameter of the tape feed roller 17 is greater than the first threshold value ("NO" in step S110), the processing system 60 executes step S113, which will be described later.

[0076] In step S112, the processing system 60 calculates a rotation speed command value for feeding the processed tape 2 at a predetermined tape feed speed based on the updated diameter of the tape feed roller 17, in accordance with the above equation (6) or (7), and sends the calculated rotation speed command value to the tape feed motor 16. The tape feed device 15 starts feeding the processed tape 2 using the rotation speed command value sent from the processing system 60 (return to step S101). In step S103 after the diameter of the tape feed roller 17 has been updated, the processing system 60 calculates a corrected feed amount for the processed tape 2 based on the number of rotations of the tape feed roller 17 and the updated diameter of the tape feed roller 17.

[0077] 6, in step S113, the processing system 60 determines whether the amount of decrease in the diameter of the tape feed roller 17 is greater than a first threshold value and equal to or less than a second threshold value. If the processing system 60 determines that the amount of decrease in the diameter of the tape feed roller 17 is greater than the first threshold value and equal to or less than the second threshold value ("YES" in step S113), the processing system 60 updates the diameter of the tape feed roller 17 by subtracting a predetermined correction amount from the diameter of the tape feed roller 17 (step S114). If the processing system 60 determines in step S113 that the amount of decrease in the diameter of the tape feed roller 17 is greater than the second threshold value ("NO" in step S113), the processing system 60 issues an abnormality alarm (step S117).

[0078] In step S115, the processing system 60 counts the number of times that a decrease amount greater than the first threshold value and equal to or less than the second threshold value has been determined, and determines whether the counted number is greater than a predetermined allowable number. When the processing system 60 determines that the counted number is greater than the predetermined allowable number ("YES" in step S115), it issues an abnormality alarm (step S117).

[0079] When the processing system 60 determines that the counted number is equal to or less than a predetermined allowable number ("NO" in step S115), it calculates a rotation speed command value for feeding the processing tape 2 at a predetermined tape feed speed based on the updated diameter of the tape feed roller 17 in accordance with the above equation (8) or (9), and sends the calculated rotation speed command value to the tape feed motor 16. The tape feed device 15 starts feeding the processing tape 2 using the rotation speed command value sent from the processing system 60 (return to step S101). In step S103 after the diameter of the tape feed roller 17 is updated in the above step 114, the processing system 60 calculates a corrected feed amount of the processing tape 2 based on the number of rotations of the tape feed roller 17 and the updated diameter of the tape feed roller 17.

[0080] According to this embodiment, the processing system 60 determines the amount of decrease in the diameter of the tape feed roller 17, and based on the determined amount of decrease, calculates the corrected amount of usage of the processing tape 2. Therefore, even if the diameter of the tape feed roller 17 changes, the amount of usage of the processing tape 2 can be accurately calculated.

[0081] Figure 7 is a schematic diagram showing another embodiment of the processing system 60, and Figure 8 is a schematic diagram of the tape mark detection sensor 75 shown in Figure 7. The configuration and operation of this embodiment not specifically described are the same as those of the embodiment described with reference to Figures 1 to 6, so redundant description will be omitted. The processing system 60 of this embodiment includes a tape mark detection sensor 75 that detects tape marks M affixed to the processing tape 2, and a reduction amount calculation unit 76 that calculates the amount of reduction in the diameter of the tape feed roller 17.

[0082] As shown in Figure 7, the tape mark detection sensor 75 is disposed near the processing tape 2 supplied to the processing head 10, and is configured to detect tape marks M attached to the processing tape 2 supplied to the processing head 10. As shown in Figure 8, the processing tape 2 of this embodiment has a plurality of tape marks M attached at equal intervals on its back surface 2b. For example, if the processing tape 2 is a polishing tape, the back surface 2b of the processing tape 2 is the surface opposite to the front surface 2a, which is the polishing surface. As shown in Figure 8, the tape mark detection sensor 75 is disposed so as to face the tape marks M attached to the processing tape 2.

[0083] In one embodiment, the tape mark detection sensor 75 is a non-contact optical sensor configured to detect light reflected from or transmitted through the tape mark M. However, the configuration of the tape mark detection sensor 75 is not particularly limited as long as it can detect the tape mark M on the processing tape 2.

[0084] 7, the tape mark detection sensor 75 is electrically connected to the reduction amount calculation unit 76. When the processing tape 2 is fed in a predetermined direction by the tape feeding device 15, the tape mark detection sensor 75 detects a plurality of tape marks M on the processing tape 2. A detection signal indicating the plurality of tape marks M detected by the tape mark detection sensor 75 is sent to the reduction amount calculation unit 76.

[0085] The reduction amount calculation unit 76 of the processing system 60 includes at least one computer. The reduction amount calculation unit 76 includes a storage device 76a storing programs and the like, and an arithmetic unit 76b that executes calculations according to instructions included in the programs. The storage device 76a includes a main storage device such as a random access memory (RAM) and an auxiliary storage device such as a hard disk drive (HDD) or a solid state drive (SSD). Examples of the arithmetic unit 76b include a CPU (central processing unit) and a GPU (graphics processing unit). However, the specific configuration of the reduction amount calculation unit 76 is not limited to these examples. In one embodiment, the reduction amount calculation unit 76 may be configured integrally with the tape mark detection sensor 75.

[0086] The reduction amount calculation unit 76 is configured to count the number of tape marks M detected by the tape mark detection sensor 75 based on the detection signal sent from the tape mark detection sensor 75. The reduction amount calculation unit 76 calculates the amount of unwinding of the processing tape 2 based on the number of detected tape marks M and the pitch (interval) of the tape marks M.

[0087] The reduction amount calculation unit 76 is configured to calculate the reduction amount of the diameter of the tape feed roller 17 when the increase in the cumulative usage amount of the processing tape 2 since the start of use of the processing tape 2 is equal to or greater than the predetermined length (i.e., when the cumulative usage amount of the processing tape 2 has increased by equal to or greater than the predetermined length). Each time the operation of the tape feed device 15 stops, the reduction amount calculation unit 76 determines whether the increase in the cumulative usage amount of the processing tape 2 is equal to or greater than the predetermined length, and calculates the reduction amount of the diameter of the tape feed roller 17 when the increase in the cumulative usage amount of the processing tape 2 is equal to or greater than the predetermined length.

[0088] The operation of calculating the feed amount of the processing tape 2 by the reduction amount calculation unit 76 is the same as the operation of calculating the feed amount of the processing tape 2 by the processing system 60 of the embodiment described with reference to Figures 1 to 6, so duplicate explanations will be omitted.

[0089] The reduction amount calculation unit 76 is configured to calculate the amount of reduction in the diameter of the tape feed roller 17 based on the difference between the calculated feed amount of the processing tape 2 and the unwound amount of the processing tape 2. The operation of calculating the amount of reduction in the diameter of the tape feed roller 17 by the reduction amount calculation unit 76 is the same as the operation of calculating the amount of reduction in the diameter of the tape feed roller 17 by the processing system 60 of the embodiment described with reference to Figures 1 to 6, so a duplicated explanation will be omitted. In this way, the processing system 60 of the embodiment determines the amount of reduction in the diameter of the tape feed roller 17.

[0090] Operations such as comparing the amount of decrease with the first threshold value and the second threshold value, updating the diameter of the tape feed roller 17 using the amount of decrease and the correction amount, calculating the corrected feed amount of the processing tape 2, calculating the rotation speed command value, issuing an abnormality alarm, calculating the accumulated usage amount of the processing tape 2, and issuing a tape replacement alarm are executed by the amount of decrease calculation unit 76. Operations of the amount of decrease calculation unit 76 that are not specifically described are the same as those of the processing system 60 in the embodiment described with reference to Figures 1 to 6, and therefore redundant description thereof will be omitted.

[0091] 9 is a plan view schematically showing yet another embodiment of a processing system 60. The configuration and operation of this embodiment not specifically described are the same as those of the embodiment described with reference to FIGS. 1 to 6, and therefore redundant description will be omitted. The processing system 60 of this embodiment includes an imaging device 80 that generates an image of the tape feed roller 17, and a reduction amount measurement unit 82 that measures the amount of reduction in diameter of the tape feed roller 17 based on the image.

[0092] As shown in Fig. 9, the imaging device 80 is disposed to the side of the processing head 10 and is configured to generate an image of the tape feed device 15 fixed to the processing head 10. Fig. 10 is a schematic diagram showing an example of an image generated by the imaging device 80. In this embodiment, the image generated by the imaging device 80 includes images of the tape feed roller 17 and the nip roller 18. An example of the imaging device 80 is an imaging device equipped with an image sensor such as a CCD or CMOS.

[0093] The imaging device 80 generates an image of the tape feeding device 15 when the increase in the cumulative usage amount of the processing tape 2 is equal to or greater than the predetermined length. The imaging device 80 generates an image of the tape feeding device 15 when the operation of the tape feeding device 15 is stopped. The imaging device 80 is electrically connected to a reduction amount measurement unit 82, and the image generated by the imaging device 80 is sent to the reduction amount measurement unit 82.

[0094] The reduction amount measurement unit 82 includes at least one computer. The reduction amount measurement unit 82 includes a storage device 82a storing programs and the like, and an arithmetic unit 82b that executes calculations according to instructions included in the programs. The storage device 82a includes a main storage device such as a random access memory (RAM) and an auxiliary storage device such as a hard disk drive (HDD) or a solid state drive (SSD). Examples of the arithmetic unit 82b include a CPU (central processing unit) and a GPU (graphics processing unit). However, the specific configuration of the reduction amount measurement unit 82 is not limited to these examples. In one embodiment, the reduction amount measurement unit 82 may be configured integrally with the imaging device 80.

[0095] The reduction amount measuring unit 82 of this embodiment is configured to measure the distance F between the center of the tape feed roller 17 and the center of the nip roller 18 based on an image generated by the imaging device 80. The nip roller 18 is made of a wear-resistant resin or the like and therefore does not generally wear out. Therefore, the reduction amount of the diameter of the tape feed roller 17 can be measured based on the difference in the distance F between the center of the tape feed roller 17 and the center of the nip roller 18 before and after the cumulative usage amount of the processing tape 2 increases by at least the above-mentioned predetermined length.

[0096] When the increase in the cumulative usage of the processing tape 2 is equal to or greater than the above-mentioned predetermined length, the imaging device 80 generates an image of the tape feed device 15, and the reduction amount measurement unit 82 calculates the current distance Fn between the center of the tape feed roller 17 and the center of the nip roller 18 from the image, and measures the reduction amount in the diameter of the tape feed roller 17 based on the difference between the previously calculated distance Fn-1 and the current distance Fn.

[0097] More specifically, the reduction amount measurement unit 82 determines the difference between the distance Fn-1 and the distance Fn multiplied by two as the reduction amount in the diameter of the tape feed roller 17. In this way, the processing system 60 of this embodiment determines the reduction amount in the diameter of the tape feed roller 17. The reduction amount in the diameter of the tape feed roller 17 is determined each time the cumulative usage amount of the processing tape 2 increases by more than the above-mentioned predetermined length.

[0098] In one embodiment, the reduction amount measuring unit 82 may measure the diameter of the tape feed roller 17 based on an image of the tape feed roller 17 generated by the imaging device 80. In this case, the reduction amount measuring unit 82 determines the amount of reduction in the diameter of the tape feed roller 17 by calculating the amount of reduction in the diameter of the tape feed roller 17 based on the difference between the previous measurement value of the diameter of the tape feed roller 17 and the current measurement value.

[0099] Operations such as comparing the amount of decrease with the first threshold value and the second threshold value, updating the diameter of the tape feed roller 17 using the amount of decrease and the correction amount, calculating the corrected feed amount of the processing tape 2, calculating the rotation speed command value, issuing an abnormality alarm, calculating the accumulated usage amount of the processing tape 2, and issuing a tape replacement alarm are performed by the amount of decrease measurement unit 82. Operations of the amount of decrease measurement unit 82 that are not specifically described are the same as those of the processing system 60 in the embodiment described with reference to Figures 1 to 6, and therefore redundant description will be omitted.

[0100] The above-described embodiments have been described for the purpose of enabling a person of ordinary skill in the art to practice the present invention. Various modifications of the above-described embodiments would be obvious to a person skilled in the art, and the technical concept of the present invention may be applied to other embodiments. Therefore, the present invention is not limited to the described embodiments, but is to be interpreted in the broadest scope in accordance with the technical concept defined by the claims. [Explanation of symbols]

[0101] 1. Substrate processing equipment 2 Processing tape 5 Board holding part 7 Holding Stage 7a Board holding surface 8 shafts 9. Holding stage drive mechanism 10 processing heads 12 Pressing member 13 Air cylinder (drive mechanism) 15 Tape feeder 16 Tape feed motor 17 Tape feed roller 18 Nip roller 19 Rotary Encoder 20 Processing tape supply mechanism 21 Tape unwinding reel 22 Tape take-up reel 24, 25, 26, 27 Guide rollers 28 Reelbase 31 Unwinding reel rotation mechanism 32 Take-up reel rotation mechanism 33 rotary encoder 35,36 Scroll 41 Lower supply nozzle 42 Upper supply nozzle 50 Tilt mechanism 52 crank arm 53 Arm rotation device 60 Processing System 60a Storage device 60b Arithmetic unit 75 Tape mark detection sensor 75a Light projector 75b Light receiving unit 76 Decrease amount calculation section 76a Storage device 76b Arithmetic unit 80 Imaging device 82 Decrease amount measuring section 82a Storage device 82b Arithmetic unit

Claims

1. rotating a tape feed roller of a tape feed device to feed the processing tape in a predetermined direction, while pressing the processing tape against the substrate with a processing head to process the substrate; determining an amount of reduction in diameter of the tape feed roller; When the amount of decrease is equal to or less than a first threshold, the diameter of the tape feed roller is updated by subtracting the amount of decrease from the diameter of the tape feed roller; a corrected feed amount of the processing tape calculated based on the number of rotations of the tape feed roller and the diameter of the tape feed roller after updating the diameter of the tape feed roller;

2. Determining the amount of reduction in diameter of the tape feed roller comprises: calculating a feed amount of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller; calculating the amount of processing tape to be unwound based on the number of rotations of a tape unwinding reel that supplies the processing tape to the processing head and the outer diameter of the processing tape wound on the tape unwinding reel; The substrate processing method of claim 1 , further comprising calculating the amount of decrease in diameter of the tape feed roller based on a difference between an amount of feed of the processing tape and an amount of unwinding of the processing tape.

3. Determining the amount of reduction in diameter of the tape feed roller comprises: calculating a feed amount of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller; a tape mark detection sensor detects a plurality of tape marks provided at equal intervals on the processing tape; Counting the number of detected tape marks to calculate the amount of unwinding of the processing tape; The substrate processing method of claim 1 , further comprising calculating the amount of decrease in diameter of the tape feed roller based on a difference between an amount of feed of the processing tape and an amount of unwinding of the processing tape.

4. Determining the amount of reduction in diameter of the tape feed roller comprises: generating an image of the tape feed roller with an imaging device; The method of claim 1 , further comprising measuring the reduction in diameter of the tape feed roller based on the image.

5. 2. The substrate processing method of claim 1, further comprising: updating the diameter of the tape feed roller by subtracting a predetermined correction amount from the diameter of the tape feed roller when the decrease amount is greater than the first threshold value and less than or equal to a second threshold value.

6. Counting the number of times the decrement is determined to be greater than the first threshold value and less than or equal to the second threshold value; The substrate processing method according to claim 5 , further comprising issuing an abnormality alarm when the number of times is greater than a predetermined allowable number of times.

7. The substrate processing method according to claim 5 , further comprising issuing an abnormality alarm when the amount of decrease is greater than the second threshold value.

8. Calculating the cumulative usage of the processing tape from the start of use of the processing tape; 2. The substrate processing method according to claim 1, further comprising issuing a tape replacement alarm when the cumulative usage amount reaches a predetermined tape replacement usage amount.

9. calculating a rotational speed command value for the tape feeding device to feed the processing tape at a predetermined tape feeding speed based on the updated diameter of the tape feeding roller; The substrate processing method according to claim 1 , further comprising rotating the tape feed roller at the rotation speed command value.

10. 2. The substrate processing method according to claim 1, wherein the amount of decrease in the diameter of the tape feed roller is determined when an increase in cumulative usage of the processing tape since the start of use of the processing tape is equal to or greater than a predetermined length.

11. a substrate holder that holds and rotates the substrate; a tape feeding device that rotates a tape feeding roller to feed the processing tape in a predetermined direction; a processing head that presses the processing tape against the substrate; a processing system electrically connected to the tape feeding device; The processing system includes: determining an amount of reduction in diameter of the tape feed roller; When the amount of decrease is equal to or less than a first threshold, the diameter of the tape feed roller is updated by subtracting the amount of decrease from the diameter of the tape feed roller; the substrate processing apparatus is configured to calculate a corrected feed amount of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller after the diameter is updated.

12. The processing system includes: calculating a feed amount of the processing tape based on the number of rotations of the tape feed roller and the diameter of the tape feed roller; calculating the amount of processing tape to be unwound based on the number of rotations of a tape unwinding reel that supplies the processing tape to the processing head and the outer diameter of the processing tape wound on the tape unwinding reel; The substrate processing apparatus according to claim 11 , wherein the apparatus is configured to calculate the amount of decrease in diameter of the tape feed roller based on a difference between an amount of feed of the processing tape and an amount of unwinding of the processing tape.

13. The processing system includes: a tape mark detection sensor that detects a plurality of tape marks attached at equal intervals on the processing tape; 12. The substrate processing apparatus of claim 11, further comprising a reduction amount calculation unit that counts the number of detected tape marks to calculate the amount of processing tape unwound, calculates the amount of processing tape feed based on the number of rotations of the tape feed roller and the diameter of the tape feed roller, and calculates the amount of reduction in the diameter of the tape feed roller based on the difference between the amount of processing tape feed and the amount of processing tape unwound.

14. The processing system includes: an imaging device for generating an image of the tape feed roller; The substrate processing apparatus according to claim 11 , further comprising a reduction amount measuring unit that measures the reduction amount of the diameter of the tape feed roller based on the image.

15. 12. The substrate processing apparatus of claim 11, wherein the processing system is configured to update the diameter of the tape feed roller by subtracting a predetermined correction amount from the diameter of the tape feed roller when the decrease amount is greater than the first threshold value and less than or equal to a second threshold value.

16. The processing system includes: Counting the number of times the decrement is determined to be greater than the first threshold and less than or equal to the second threshold; The substrate processing apparatus according to claim 15, wherein an abnormality alarm is issued when the number of times is greater than a predetermined allowable number of times.

17. The substrate processing apparatus according to claim 15 , wherein the processing system is configured to issue an abnormality alarm when the amount of decrease is greater than the second threshold value.

18. The processing system includes: Calculating the cumulative usage of the processing tape from the start of use of the processing tape; The substrate processing apparatus according to claim 11 , wherein a tape replacement warning is issued when the cumulative usage amount reaches a predetermined tape replacement usage amount.

19. The processing system includes: calculating a rotational speed command value for the tape feeding device to feed the processing tape at a predetermined tape feeding speed based on the updated diameter of the tape feeding roller; The substrate processing apparatus according to claim 11 , wherein the apparatus is configured to rotate the tape feed roller at the rotation speed command value.

20. 12. The substrate processing apparatus of claim 11, wherein the processing system is configured to determine the amount of decrease in diameter of the tape feed roller when an increase in cumulative usage of the processing tape since the start of use of the processing tape is equal to or greater than a predetermined length.

Images