Venting device, manufacturing method of venting device, venting method, and device

Abstract

To provide a venting device that suppresses an occlusion effect, a manufacturing method thereof, and a venting method thereof.SOLUTION: A venting device 100 includes an anchor structure and a membrane 110. The membrane 110 is fixed to the anchor structure and configured to form a first vent 131 and a second vent 132. The membrane includes a first flap 112a, a second flap 112b, and a third flap 112c. The first flap 112a is actuated to move toward a first direction, and the second flap 112b is actuated to move toward a second direction opposite the first direction, so as to form the first vent 131. The first flap 112a is actuated to move in the first direction, and the third flap 112c is actuated to move in the second direction opposite the first direction, so as to form the second vent 132.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a venting device, a method for manufacturing a venting device, a venting method and a device, and in particular to a venting device that is capable of eliminating the occlusion effect, an associated manufacturing method, an associated venting method and an associated device. [Background technology]

[0002] Nowadays, wearable sound devices, such as in-ear earbuds (inserted into the ear canal), on-ear earphones, or over-ear earphones, are commonly used to generate or receive sound. Magnet-based and moving coil (MMC)-based microspeakers have been developed over several decades and are widely used in many such devices. Recently, Micro Electro Mechanical System (MEMS) acoustic transducers, which utilize semiconductor manufacturing processes, have become sound-producing / receiving components in wearable sound devices.

[0003] The occlusion effect is caused by the sealed volume of the ear canal, which causes a loud perceived sound pressure by the listener. For example, the occlusion effect occurs while the listener performs certain actions that generate bone-conducted sound (e.g., walking, jogging, talking, eating, touching an acoustic transducer, etc.) and while using a wearable sound device (e.g., filling the listener's ear canal with the wearable sound device). The occlusion effect is caused by acceleration-based sound pressure level (SPL) generation (SPL ∝ a = dD 2 / dt 2 The difference between the occlusion effect and compression-based SPL generation (SPL ∝ D) makes it particularly strong toward bass. For example, a displacement of only 1 μm at 20 Hz will produce an SPL = 1 μm / 25 mm atm = 106 dB in an occluded ear canal (25 mm is the average length of the ear canal in an adult). Therefore, when the occlusion effect occurs, the listener hears occlusion noise, and the quality of the listening experience is poor.

[0004] In conventional technology, wearable sound devices have an airflow channel between the ear canal and the ambient external environment of the device, which allows the pressure caused by the occlusion effect to be released from the airflow channel, thereby suppressing the occlusion effect. However, because the airflow channel always exists, the SPL at lower frequencies (e.g., less than 500 Hz) in the frequency response is significantly reduced. For example, if a traditional wearable sound device uses a typical 115 dB speaker driver, the SPL at 20 Hz will be much lower than 110 dB. In addition, if the size of the fixed vent configured to form the airflow channel is larger, the SPL reduction will be greater and water and dust protection will be more difficult.

[0005] In some cases, traditional wearable sound devices can use more powerful speaker drivers than a typical 115 dB speaker driver to compensate for the loss of SPL at lower frequencies due to the presence of an airflow channel. For example, assuming an SPL loss of 20 dB, the speaker driver required to maintain the same 115 dB SPL in the presence of the airflow channel would be 135 dB when used in a sealed ear canal. On the other hand, to output 10 times stronger bass, the speaker membrane travel would also need to be increased by 10 times, which means that both the height of the speaker driver's coil and magnet flux gap would need to be increased by 10 times. Thus, it is difficult to reduce the size and weight of traditional wearable sound devices with powerful speaker drivers.

[0006] Therefore, there is a need to improve upon the prior art to reduce the occlusion effect. [Prior art documents] [Patent documents]

[0007] 1. U.S. Patent Application No. 17 / 344,983 2. U.S. Patent Application Publication No. US 2020 / 0211521 A1 3. U.S. Patent Application Publication No. US 2019 / 0098390 A1 4. U.S. Patent Application Publication No. US 2013 / 0121509 A1 5. U.S. Patent Application Publication No. US 2016 / 0176704 A1 6. U.S. Patent Application Publication No. US 2017 / 0021391 A1 7. U.S. Patent Application Publication No. US 2017 / 0325030 A1 8. U.S. Patent Application Publication No. US 2020 / 0213770 A1 9. U.S. Patent Application Publication No. US 2020 / 0178000 A1 10. U.S. Patent Application Publication No. US 2020 / 0100033 A1 11. U.S. Patent Application Publication No. US 2019 / 0039880 A1 12. U.S. Patent Application Publication No. US 2012 / 0053393 A1 13. U.S. Patent No. US 8,724,200 B1 14. U.S. Patent Application Publication No. US 2019 / 0349665 A1 15. U.S. Patent Application Publication No. US 2017 / 0164115 A1 16. U.S. Patent Application Publication No. US 2017 / 0217761 A1 17. U.S. Patent Application Publication No. US 2007 / 0007858 A1 18. U.S. Patent Application Publication No. US 2017 / 0201192 A1 19. U.S. Patent Application Publication No. US 2017 / 0260044 A1 20. U.S. Patent Application Publication No. US 2013 / 0223023 A1 21. U.S. Patent Application Publication No. US 2015 / 0163599 A1 22. Korean Patent Application Publication No. 10-2015-0030691 23. China Patent Application Publication No. 111063790 24. JP 2020-031444 A 25. JP 2009-512375 A 26. U.S. Patent Application Publication No. US 2006 / 0131163 A1 27. United States Patent No. US 11,399,228 B2 28. United States Patent No. US 11,323,797 B2 29. Korean Patent Application Publication No. 10-2010-0002351 30. Japanese Patent Application Publication No. 11-307441 31. U.S. Patent Application Publication No. US 2018 / 0120938 A1 32. U.S. Patent Application Publication No. US 2014 / 0140558 A1 33. U.S. Patent Application Publication No. US 5,970,998 A 34. U.S. Patent Application Publication No. US 2011 / 0051985 A1 35. U.S. Patent Application Publication No. US 2003 / 0029705 A1 36. U.S. Patent Application Publication No. US 2018 / 0020194 A1 37. U.S. Patent Application Publication No. US 2019 / 0215620 A1 38. U.S. Patent Application Publication No. US 2020 / 0193973 A1 39. U.S. Patent No. US 10,367,540 B1 40. China Patent Application Publication No. 107223346 41. China Patent Application Publication No. 105009604 42. China Patent Application Publication No. 104540776 43. Korean Patent Application Publication No. 10-2017-0139320 44. U.S. Patent Application Publication No. US 2017 / 0041708 A1 45. International Publication No. WO 2019 / 177324 A1 46. ​​U.S. Patent Application Publication No. US 2015 / 0237438 A1 47. U.S. Patent Application Publication No. US 2020 / 0244275 A1 48. U.S. Patent Application Publication No. US 2015 / 0204940 A1 49. China Patent Application Publication No. 101785327 50. China Patent Application Publication No. 106937193 51. China Patent Application Publication No. 108702575 52. China Patent Application Publication No. 110022506 53. China Patent Application Publication No. 209402687 54. U.S. Patent Application Publication No. US 2017 / 0040012 A1 55. U.S. Patent Application Publication No. US 2019 / 0208343 A1 56. U.S. Patent Application Publication No. US 2020 / 0178003 A1 57. U.S. Patent Application Publication No. US 2016 / 0381464 A1 58. U.S. Patent Application Publication No. US 2019 / 0181776 A1 59. U.S. Patent Application Publication No. US 2008 / 0267416 A1 60. U.S. Patent Application Publication No. US 2011 / 0181150 A1 61. U.S. Patent Application Publication No. US 2020 / 0352788 A1 62. Taiwan Patent Application Publication No. 202203662 63. U.S. Patent Application Publication No. US 2020 / 0196067 A1 64. U.S. Patent Application Publication No. US 2018 / 0002168 A1 [Non-patent literature]

[0008] 1. HYONSE KIM ET AL, A slim type microvalve driven by PZT films, Sensors and Actuators A: PHYSICAL, 18 January, 2005, pages 162-171, Vol. 121, Elsevier B. V., XP027806904 2. Shen Guohao et al., Structure optimization design for capacitive silicon-based MEMS microphone, Semiconductor Devices, Vol. 43, No. 12, p.912-917, China Academic Journal Electronic Publishing House. 3. HUA Qing et al., Acoustoeletric model of piezoelectric microphone with package structure, Transducer and Microsystem Technologies, 2018 Vol. 37, No. 11, p.42-44, China Academic Journal Electronic Publishing House. 4. Chen Guidong et al., Highly sensitive MEMS humidity sensor based on candle-soot nanoparticle layer, Micronanoelectronic Technology, Vol. 57, No.1, p.36-40, p.48, China Academic Journal Electronic Publishing House 5. Wang Zhicheng, Stylish structure and innovative features of new generation speakers, Household Electric Appliances, Issue 12, 2003, p.38-40, China Academic Journal Electronic Publishing House 6. ZHOU Xiao-wei et al., Preliminary evaluation of predicative performance of BAHA softband in the conductive or mixed hearing loss patients, Journal of Otolaryngology and Ophthalmology of Shandong University, Vol. 29, Issue No. 2, 2015, p. 28-30, China Academic Journal Electronic Publishing House. 7. Stefan Liebich et al., active occlusion cancellation with hear-through equalization for headphones, Institute of Communication Systems, 2018 IEEE international conference on acoustics, speech and signal processing. Canada Summary of the Invention

[0009] It is therefore a first object of the present invention to provide a venting device that is capable of reducing the occlusion effect, as well as a method for manufacturing the venting device, related venting methods, and related devices.

[0010] One embodiment of the present invention provides a venting device, the venting device including an anchor structure and a membrane. The membrane is anchored on the anchor structure and configured to form a first vent and a second vent. The membrane includes a first flap, a second flap, and a third flap. The membrane partitions a space into a first volume and a second volume, and the first volume and the second volume are connected when the membrane forms the first vent and the second vent. The first flap is actuated to move in a first direction, and the second flap is actuated to move in a second direction opposite the first direction, to form the first vent. The first flap is actuated to move in a first direction and the third flap is actuated to move in a second direction opposite the first direction to form a second vent.

[0011] One embodiment of the present invention provides a device, the device including an anchor structure and a thin film. The thin film is fixed to the anchor structure and configured to form a vent. The thin film divides a space into a first volume and a second volume, and when the vent is formed, the first volume and the second volume are connected through the vent. A slit is formed in the thin film, and the slit forms the vent. A segment of the slit zigzags on the membrane.

[0012] One embodiment of the present invention provides a method for manufacturing a venting device, the method including the steps of providing a wafer including a first layer and a second layer, where the first layer includes a membrane, and patterning the first layer of the wafer to form a plurality of slits, whereby the membrane includes a first flap, a second flap, and a third flap separated from each other by the slits. The membrane is configured to be controlled by the plurality of slits to form a plurality of vent holes, where the plurality of slits include a first slit and a second slit, and the vent holes include a first vent hole and a second vent hole. A first slit is formed between the first flap and the second flap, and a second slit is formed between the first flap and the third flap.

[0013] One embodiment of the present invention provides a ventilation method related to the above ventilation device, the ventilation method including the steps of actuating the first flap toward a first direction and actuating the second flap and the third flaps toward a second direction opposite to the first direction, wherein the first slit forms a first ventilation opening between the first and second flaps, and the second slit forms a second ventilation opening between the first and third flaps.

[0014] One embodiment of the present invention provides a method for manufacturing a vent device, comprising the steps of providing a wafer including a first layer and a second layer, the first layer including a membrane, and patterning the first layer of the wafer to form a zigzag slit, the zigzag slit zigzags on the membrane and extending in a certain direction, the membrane including a first flap and a second flap separated from each other by the zigzag slit, the membrane being configured to be controlled to form a vent opening, the vent opening being formed by the zigzag slit.

[0015] These and other objects of the present invention will no doubt become obvious to those skilled in the art after reading the following detailed description of the preferred embodiment that is illustrated in the various figures and drawings. [Brief explanation of the drawings]

[0016] [Figure 1] 1 is a schematic diagram of a top view illustrating a venting device according to a first embodiment of the present invention; FIG. [Figure 2] 1 is a schematic diagram of a cross-sectional view illustrating a ventilation device and a housing structure according to a first embodiment of the present invention; [Figure 3] 1 is a schematic diagram of a cross-sectional view illustrating a venting device in a first mode according to a first embodiment of the present invention; [Figure 4]2 is a schematic diagram of a cross-sectional view illustrating a venting device in a second mode according to a first embodiment of the present invention; FIG. [Figure 5] 2 is a schematic diagram illustrating a venting device in a second mode according to a first embodiment of the present invention; FIG. [Figure 6] FIG. 2 is a schematic diagram illustrating a side view of a plurality of vents of a venting device in a second mode according to a first embodiment of the present invention. [Figure 7] 1 is a schematic diagram of a cross-sectional view illustrating a venting device in a third mode according to a first embodiment of the present invention; FIG. [Figure 8] FIG. 1 is a schematic diagram illustrating a wearable sound device with a ventilation device according to an embodiment of the present invention. [Figure 9] FIG. 1 is a schematic diagram illustrating a wearable sound device with a ventilation device according to an embodiment of the present invention. [Figure 10] 1A-1D are schematic diagrams illustrating the configuration of a venting device at different stages of a method for manufacturing the device according to one embodiment of the present invention. [Figure 11] 1A-1D are schematic diagrams illustrating the configuration of a venting device at different stages of a method for manufacturing the device according to one embodiment of the present invention. [Figure 12] 1A-1D are schematic diagrams illustrating the configuration of a venting device at different stages of a method for manufacturing the device according to one embodiment of the present invention. [Figure 13] 1A-1D are schematic diagrams illustrating the configuration of a venting device at different stages of a method for manufacturing the device according to one embodiment of the present invention. [Figure 14] 1A-1D are schematic diagrams illustrating the configuration of a venting device at different stages of a method for manufacturing the device according to one embodiment of the present invention. [Figure 15]1A-1D are schematic diagrams illustrating the configuration of a venting device at different stages of a method for manufacturing the device according to one embodiment of the present invention. [Figure 16] 1A-1D are schematic diagrams illustrating the configuration of a venting device at different stages of a method for manufacturing the device according to one embodiment of the present invention. [Figure 17] 10A-10C are schematic diagrams illustrating side views of multiple vents of a venting device in a second mode and a third mode according to a second embodiment of the present invention. [Figure 18] FIG. 10 is a schematic diagram of a top view illustrating a venting device according to a third embodiment of the present invention. [Figure 19] FIG. 10 is a schematic diagram illustrating a side view of a plurality of vents of a venting device in a second mode according to a third embodiment of the present invention. [Figure 20] FIG. 10 is a schematic diagram of a top view illustrating a venting device according to a fourth embodiment of the present invention. [Figure 21] FIG. 10 is a schematic diagram of a top view illustrating a venting device according to a fifth embodiment of the present invention. [Figure 22] FIG. 10 is a schematic diagram of a top view illustrating a venting device according to a sixth embodiment of the present invention. [Figure 23] FIG. 10 is a schematic diagram of a top view illustrating a venting device according to a seventh embodiment of the present invention. [Figure 24] FIG. 13 is a schematic diagram of a top view illustrating a venting device according to an eighth embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0017] In order to enable those skilled in the art to better understand the present invention, the following description will describe in detail preferred embodiments and typical materials or range parameters for the main components. The preferred embodiments of the present invention are illustrated in the accompanying drawings using numbered elements to describe in detail the achieved contents and effects. It should be noted that the drawings are simplified schematic diagrams, and the materials and parameter ranges of the main components are illustrated based on today's technology, and therefore only show components and combinations relevant to the present invention to provide a clearer explanation of the basic structure, implementation method, or operation method of the present invention. In reality, the components may be more complex, and the parameter ranges or materials used may evolve with future technological advances. In addition, for ease of explanation, the components shown in the drawings may not represent the actual number, shape, and dimensions, and details may be adjusted according to design requirements.

[0018] In the following specification and claims, the words "include," "comprise," and "have" are used in an open-ended or open-ended manner and should therefore be interpreted to mean "including, but not limited to." In this manner, when the words "include," "comprise," and / or "have" are used in describing the invention, the corresponding features, regions, steps, operations, and / or components will refer to, but not be limited to, the presence of one or more of the corresponding features, regions, steps, operations, and / or components.

[0019] In the following specification and claims, when it is stated that "the A1 component is formed by / from B1," B1 is present in the process of forming the A1 component, or B1 is used in the process of forming the A1 component, and the presence and use of one or more other features, regions, steps, operations, and / or components in the process of forming the A1 component is not excluded.

[0020] In the following specification and claims, the term "substantially" generally means that there may or may not be a small deviation. For example, the terms "substantially parallel" and "substantially along" mean that the angle between two components may be equal to or less than a certain threshold, such as 10 degrees, 5 degrees, 3 degrees, or 1 degree. For example, the term "substantially aligned" means that the deviation between two components may be equal to or less than a certain difference threshold, such as 2 μm or 1 μm. For example, the term "substantially the same" means that the deviation is, for example, within 10% of a given value or range, or within 5%, 3%, 2%, 1%, or 0.5% of a given value or range.

[0021] In the specification and the claims that follow, the term "horizontal" generally means a direction that is parallel to the horizontal plane, the term "horizontal surface" generally means a surface that is parallel to the directions X and Y in the drawings (i.e., the directions X and Y in the present invention may be considered to be horizontal), and the terms "vertical" and "top view" generally mean a direction that is parallel to the direction Z in the drawings and perpendicular to the horizontal, with the directions X, Y, and Z being perpendicular to one another. In the specification and the claims that follow, the term "top view" generally means a view taken along the vertical direction. In the specification and the claims that follow, the term "side view" generally means a view taken along the horizontal direction. In the specification and the claims that follow, the term "cross-section" generally means that a structure cut along the vertical direction is viewed along the horizontal direction.

[0022] Terms such as first, second, third, etc. may be used to describe various elements, but such elements are not limited by these terms. These terms are used merely to distinguish one element from other elements in the specification, and do not relate to the order of manufacture unless the specification describes otherwise. Claims may not use the same terms, but rather may use terms such as first, second, third, etc., with respect to the order in which an element is described in a claim. Thus, in the following specification, a first element may be a second element in a claim.

[0023] It should be noted that the technical features in the different embodiments described below may be replaced, recombined, or mixed with each other to form other embodiments without departing from the spirit of the present invention.

[0024] In the present invention, a ventilation device (or MEMS ventilation device) capable of suppressing occlusion effects may be associated with an acoustic device and / or may be located within an acoustic device (such as, for example, a wearable sound device). For example, but not limited to, the ventilation device may be located within a wearable sound device (such as, for example, an in-ear device).

[0025] In the present invention, the acoustic apparatus may include an acoustic transducer configured to perform acoustic transformation, which may convert a signal (e.g., an electrical signal or other suitable type of signal) into an acoustic wave, or may convert an acoustic wave into another suitable type of signal (e.g., an electrical signal). In some embodiments, the acoustic transducer may be, but is not limited to, a sound producing device, a speaker, a microspeaker, or other suitable device, and may convert an electrical signal into an acoustic wave. In some embodiments, the acoustic transducer may be, but is not limited to, a sound measuring device, a microphone, or other suitable device, and may convert an acoustic wave into an electrical signal. The presence of the ventilation device of the present invention may reduce the occlusion effect, allowing the user to better experience the acoustic transformation provided by the acoustic apparatus.

[0026] In the following, the ventilation device of the present invention may be related to a wearable sound device configured to generate acoustic waves, or may be disposed within the wearable sound device. For example, the wearable sound device may be an earphone or a hearing aid. The following description is designed to enable those skilled in the art to better understand the present invention.

[0027] To reduce occlusion noise, U.S. Pat. No. 11,323,797 discloses an acoustic transducer or venting device, which includes a first flap and a second flap configured to form a vent, balancing the pressure of the two volumes separated by the flaps. To improve the pressure balancing (relief) efficiency, the acoustic resistance corresponding to the vent needs to be as small as possible. A simple approach to reducing the acoustic resistance is to either increase the dimensions of the two flaps (e.g., by increasing the length or width of the flaps through membrane design) or enlarge the vent opening (by increasing the displacement of the flaps in the open mode). Increasing the dimensions of the flaps may increase the size of the venting device, while enlarging the vent opening may result in a severe notch effect in sensitive audio bands (e.g., 1 kHz to 10 kHz) due to strong mechanical-acoustic coupling. The approach described above has undesirable effects.

[0028] In this invention, a venting device is disclosed that reduces acoustic resistance (rather than simply increasing the size / displacement of the flaps).

[0029] Specifically, in addition to the first and second flaps forming a first vent therebetween, the vent device includes a third flap configured to enlarge a vent opening of a second vent formed between the first and third flaps to reduce acoustic resistance.Furthermore, instead of straight-line slits (slits formed as straight lines), slits may be formed in a zigzag pattern on the membrane to reduce acoustic resistance.

[0030] 1 and 2, Fig. 1 is a schematic diagram of a top view illustrating a venting device according to a first embodiment of the present invention, and Fig. 2 is a schematic diagram of a cross-sectional view illustrating the venting device and a housing structure according to the first embodiment of the present invention. As shown in Figs. 1 and 2, the venting device 100 may be disposed on a base BS. The base BS may be hard or flexible and may include silicon, germanium, glass, plastic, quartz, sapphire, metal, polymer (such as polyimide (PI) or polyethylene terephthalate (PET)), any other suitable material, or a combination thereof. As one example, the base BS may be, but is not limited to, a circuit board including a laminate (such as copper clad laminate, CCL), a land grid array (LGA) board, or any other suitable substrate including a conductive material. In some embodiments, the base BS may be a substrate.

[0031] In Fig. 2, the base BS has a top surface SH that is parallel to the direction X and the direction Y (i.e., the top surface SH of the base BS is a horizontal plane). In Fig. 2, the normal direction of the top surface SH of the base BS is parallel to the direction Z.

[0032] The venting device 100 includes at least one anchor structure 140 and a membrane 110, which is anchored by / on the anchor structure 140, which may be disposed outside the membrane 110 (e.g., in FIG. 5 , the anchor structure 140 may surround the membrane 110). The membrane 110 and the anchor structure 140 may comprise any suitable material. In some embodiments, the thin film 110 and the anchor structure 140 may individually include, but are not limited to, silicon (e.g., single crystalline silicon or polycrystalline silicon), a silicon compound (e.g., silicon carbide, silicon oxide), germanium, a germanium compound, gallium, a gallium compound (e.g., gallium nitride or gallium arsenide), other suitable materials, or a combination thereof. In some embodiments, the thin film 110 and the anchor structure 140 may comprise the same material.

[0033] During operation of the venting device 100, the membrane 110 may be actuated to have a movement, and the anchor structure 140 may be immobilized. That is, the anchor structure 140 may be a fixed end (or fixed edge) respecting the membrane 110 during operation of the venting device 100. In some embodiments, the membrane 110 may be actuated to move upwards and downwards, including, but not limited to, these directions. In the present invention, the terms "move upwards" and "move downwards" refer to the membrane 110 moving substantially along the Z direction. Furthermore, "upward" may refer to the Z direction (i.e., the +Z direction), and "downward" may refer to the direction opposite to the Z direction (i.e., the -Z direction).

[0034] 1 and 2, the thin film 110 of the venting device 100 includes at least one slit 130. The thin film 110 may be divided into multiple flaps 112 by the slit 130, and the flaps 112 are separated from each other by the slit(s) 130. The number of flaps 112 may be designed based on requirements. For example, as shown in FIGS. 1 and 2, the thin film 110 may be divided into a first flap 112a, a second flap 112b, a third flap 112c, a fourth flap 112d, a fifth flap 112e, and a sixth flap 112f by the slit 130. Each slit 130 may define a boundary of the thin film 110 and / or a boundary of a flap 112.

[0035] In the present invention, the arrangement of the flaps 112 may be designed based on requirements. In Fig. 1, the flaps 112 may be arranged in an array (such as, but not limited to, a 3x2 array). In FIG. 1 , although not limited thereto, the first flap 112a may be adjacent to the second flap 112b in the direction Y, the third flap 112c may be adjacent to the fourth flap 112d in the direction Y, the fifth flap 112e may be adjacent to the sixth flap 112f in the direction Y, the first flap 112a may be adjacent to the third flap 112c and the fifth flaps 112e in the direction X (i.e., the first flap 112a is between the third flap 112c and the fifth flaps 112e in the direction X), and the second flap 112b may be adjacent to the fourth flap 112d and the sixth flaps 112f in the direction X.

[0036] The flaps 112 of the thin film 110 have at least one anchor edge (or anchor end) anchored on the anchor structure 140 and at least one free edge (or free end) not permanently anchored to any component in the ventilating device 100, and the anchor edge and free edge of each flap 112 may be designed based on requirements. For example, but not limited to, each flap 112 shown in Figures 1 and 2 has one anchor edge, and the edges of the flap 112 other than the anchor edge are non-anchored to serve as free edges. 1 and 2, without limitation, the first flap 112a may have a first anchor edge AE1 secured to the anchor structure 140, the second flap 112b may have a second anchor edge AE2 secured to the anchor structure 140, the third flap 112c may have a third anchor edge AE3 secured to the anchor structure 140, and the fourth flap 112d may have a fourth anchor edge AE4 secured to the anchor structure 140. The fifth flap 112e may have a fifth anchor edge AE5 secured to the anchor structure 140, and the sixth flap 112f may have a sixth anchor edge AE6 secured to the anchor structure 140, and the edges of these flaps 112 other than the first anchor edge AE1, the second anchor edge AE2, the third anchor edge AE3, the fourth anchor edge AE4, the fifth anchor edge AE5, and the sixth anchor edge AE6 are free edges.

[0037] 1, although not limited thereto, the first flap 112a, the third flap 112c, and the fifth flap 112e may be anchored on the same side, and the second flap 112b, the fourth flap 112d, and the sixth flap 112f may be anchored on the same side, such that the first flap 112a, the third flap 112c, and the fifth flap 112e are opposite the second flap 112b, the fourth flap 112d, and the sixth flap 112f, respectively, in direction Y. Although not limited thereto, in FIG. 1, the first anchor edge AE1, the second anchor edge AE2, the third anchor edge AE3, the fourth anchor edge AE4, the fifth anchor edge AE5, and the sixth anchor edge AE6 may be parallel to the same direction (e.g., direction X).

[0038] In the present invention, the shape of the flap 112 may be designed based on requirements. The shape of the flap 112 may be a polygon (e.g., a rectangle, etc.) or a shape having a curved edge (e.g., a circle, an oval, etc.). For example, in FIG. 1 , but not limited thereto, each flap 112 may be a rectangle, whereby each flap 112 includes one anchor edge and three free edges.

[0039] In the first flap 112a, the free edge FE1_1 faces the first anchor edge AE1 in the direction Y, and the free edges FE1_2 and FE1_3 face each other in the direction X between the free edge FE1_1 and the first anchor edge AE1. In the second flap 112b, the free edge FE2_1 faces the second anchor edge AE2 in the direction Y, and the free edges FE2_2 and FE2_3 face each other in the direction X between the free edge FE2_1 and the second anchor edge AE2. In the third flap 112c, the free edge FE3_1 faces the third anchor edge AE3 in the direction Y, and the free edges FE3_2 and FE3_3 face each other in the direction X between the free edge FE3_1 and the third anchor edge AE3. In the fourth flap 112d, the free edge FE4_1 faces the fourth anchor edge AE4 in the direction Y, and the free edges FE4_2 and FE4_3 face each other in the direction X between the free edge FE4_1 and the fourth anchor edge AE4. In the fifth flap 112e, the free edge FE5_1 faces the fifth anchor edge AE5 in the direction Y, and the free edges FE5_2 and FE5_3 face each other in the direction X between the free edge FE5_1 and the fifth anchor edge AE5. In the sixth flap 112f, the free edge FE6_1 faces the sixth anchor edge AE6 in the direction Y, and the free edges FE6_2 and FE6_3 face each other in the direction X between the free edge FE6_1 and the sixth anchor edge AE6.

[0040] In the present invention, the number of slits 130 included in the thin film 110 may be adjusted based on requirements, and the slits 130 may be disposed at any suitable position on the thin film 110 and have any suitable top-view pattern. For example, the slits 130 may be straight slits, curved slits, a combination of straight slits, a combination of curved slits, or a combination of straight slits and curved slits.

[0041] In FIG. 1, the slit 130 includes a first slit 131, a second slit 132, and a third slit 133, and the first slit 131 is formed between the first flap 112a and the second flap 112b, between the third flap 112c and the fourth flap 112d, and between the fifth flap 112e and the sixth flap 112f, the second slit 132 is formed between the first flap 112a and the third flap 112c, and between the second flap 112b and the fourth flap 112d, and the third slit 133 is formed between the first flap 112a and the fifth flap 112e, and between the second flap 112b and the sixth flap 112f. 1, slit 130 may optionally include fourth slit 134 and fifth slit 135, which are formed around the periphery of thin film 110 to define the boundaries of thin film 110 (e.g., fourth slit 134 and fifth slit 135 are formed between anchor structure 140 and thin film 110 as shown in FIG. 5). As shown in FIG. 1, third flap 112c and fourth flaps 112d may be present between second slit 132 and fourth slit 134, and fifth flap 112e and sixth flaps 112f may be present between third slit 133 and fifth slit 135. The first slit 131 may extend along the direction X, but is not limited to this, and the second slit 132, the third slit 133, the fourth slit 134, and the fifth slit 135 may extend along the direction Y.

[0042] 1, these slits 130 define several free edges of the flaps 112. A first slit 131 may define a free edge FE1_1 of the first flap 112a, a free edge FE2_1 of the second flap 112b, a free edge FE3_1 of the third flap 112c, a free edge FE4_1 of the fourth flap 112d, a free edge FE5_1 of the fifth flap 112e, and a free edge FE6_1 of the sixth flap 112f. A second slit 132 may define a free edge FE1_2 of the first flap 112a, a free edge FE2_2 of the second flap 112b, a free edge FE3_3 of the third flap 112c, and a free edge FE4_3 of the fourth flap 112d. The third slit 133 may define a free edge FE1_3 of the first flap 112a, a free edge FE2_3 of the second flap 112b, a free edge FE5_2 of the fifth flap 112e, and a free edge FE6_2 of the sixth flap 112f. The fourth slit 134 may define a free edge FE3_2 of the third flap 112c and a free edge FE4_2 of the fourth flap 112d. The fifth slit 135 may define a free edge FE5_3 of the fifth flap 112e and a free edge FE6_3 of the sixth flap 112f.

[0043] Thus, according to the arrangement of the flaps 112 and the arrangement of the slits 130, in FIG. 1, although not limited thereto, the free edge FE1_1, the free edge FE1_2, and the free edge FE1_3 of the first flap 112a may be respectively adjacent to the second flap 112b, the third flap 112c, and the fifth flap 112e, the free edge FE2_1, the free edge FE2_2, and the free edge FE2_3 of the second flap 112b may be respectively adjacent to the first flap 112a, the fourth flap 112d, and the sixth flap 112f, the free edge FE3_1 and the free edge FE3_3 of the third flap 112c may be respectively adjacent to the fourth flap 112d and the first flap 112a, and the free edge FE4_1 of the fourth flap 112d may be respectively adjacent to the fourth flap 112d and the first flap 112a. and free edge FE4_3 of the fifth flap 112e may be adjacent to the third flap 112c and the second flap 112b, respectively, free edge FE5_1 and free edge FE5_2 of the fifth flap 112e may be adjacent to the sixth flap 112f and the first flap 112a, respectively, and free edge FE6_1 and free edge FE6_2 of the sixth flap 112f may be adjacent to the fifth flap 112e and the second flap 112b, respectively.

[0044] The venting device 100 includes an actuator 120 disposed on the membrane 110 and configured to actuate the membrane 110. For example, but not limited to, in Figures 1 and 2, the actuator 120 may be in contact with the membrane 110. As shown in Figures 1 and 2, the actuator 120 may not completely overlap the membrane 110 in direction Z, but may be in contact with the membrane 110 in direction Z.

[0045] 1 and 2, the actuator 120 may include a plurality of actuating portions disposed on the plurality of flaps 112 of the membrane 110. For example (as shown in FIG. 1), the actuator 120 includes a first actuating portion 120a disposed on the first flap 112a, a second actuating portion 120b disposed on the second flap 112b, a third actuating portion 120c disposed on the third flap 112c, a fourth actuating portion 120d disposed on the fourth flap 112d, a fifth actuating portion 120e disposed on the fifth flap 112e, and a sixth actuating portion 120f disposed on the sixth flap 112f.

[0046] Actuator 120 has a monotonic electromechanical converting function with respect to the motion of membrane 110 along direction Z. In some embodiments, actuator 120 may include, but is not limited to, a piezoelectric actuator, an electrostatic actuator, a nanoscopic-electrostatic-drive (NED) actuator, an electromagnetic actuator, or any other suitable actuator. For example, in one embodiment, the actuator 120 may include, but is not limited to, a piezoelectric actuator, which may include, for example, two electrodes and a piezoelectric material layer (e.g., lead zirconate titanate, PZT, etc.) disposed between the two electrodes, and which may actuate the thin film 110 based on driving signals (e.g., driving voltages and / or a driving voltage difference between the two electrodes) received by the electrodes. For example, in another embodiment, the actuator 120 may include an electromagnetic actuator (e.g., a planar coil, etc.), which may actuate the thin film 110 based on a received driving signal (e.g., a driving current, etc.) and a magnetic field (i.e., the thin film 110 may be actuated by an electromagnetic force).For example, in yet another embodiment, actuator 120 may include, but is not limited to, an electrostatic actuator (e.g., a conducting plate) or an NED actuator, which may actuate membrane 110 based on a received drive signal (e.g., a drive voltage) and an electrostatic field (i.e., membrane 110 may be actuated by an electrostatic force). Hereinafter, actuator 120 may be, for example, a piezoelectric actuator.

[0047] In this embodiment, the venting device 100 may optionally include a chip disposed on the upper surface SH of the base BS, and the chip may include at least the thin film 110, the anchor structure 140, and the actuator 120. The method for manufacturing the chip is not limited. For example, in this embodiment, the chip may be formed by at least one semiconductor process to become a MEMS chip, and the thin film 110 may thereby become a MEMS structure, although this is not limited thereto.

[0048] Additionally, as shown in Figure 2, a chamber CB may be present between the base BS and the thin film 110. As shown in Figure 2, the base BS may further include a back opening BVT through which the chamber CB may be connected to the rear outside of the venting device 100 (i.e., the space back of the base BS).

[0049] As shown in Fig. 2, the ventilation device 100 and the base BS are disposed in a housing structure HSS inside the wearable sound device WSD. In Fig. 2, the housing structure HSS may have a first housing opening HO1 and a second housing opening HO2, the first housing opening HO1 may be connected to the ear canal of a user of the wearable sound device, the second housing opening HO2 may be connected to an ambient of the wearable sound device WSD, and the thin film 110 is present between the first housing opening HO1 and the second housing opening HO2. It should be noted that the ambient of the wearable sound device WSD does not have to be inside the ear canal (for example, the ambient of the wearable sound device WSD may be directly connected to the space outside the ear). Further, in FIG. 2, a chamber CB may be present between the base BS and the thin film 110, so that the chamber CB may be connected to its periphery of the wearable sound device WSD through the rear opening BVT of the base BS and the second housing opening HO2 of the housing structure HSS.

[0050] As shown in FIG. 2, the thin film 110 of the ventilation device 100 partitions the space formed in the housing structure HSS into a first volume VL1 and a second volume VL2, where the first volume VL1 is connected to the ear canal of the user of the wearable sound device and the second volume VL2 is connected to the periphery of the wearable sound device WSD. In FIG. 2, the first volume VL1 is connected to the first housing opening HO1 of the housing structure HSS, and the second volume VL2 is connected to the second housing opening HO2 of the housing structure HSS. In this way, the first volume VL1 is configured to be connected to the ear canal of the user of the wearable sound device through the first housing opening HO1, and the second volume VL2 is configured to be connected to the periphery of the wearable sound device WSD through the second housing opening HO2. As shown in FIG. 2, the chamber CB is part of the second volume VL2.

[0051] It should be noted that the housing structure HSS may be designed based on practical requirements and is not limited to the housing structure shown in Fig. 2. As long as the first volume VL1 and the second volume VL2 are connected when forming the vent 130T, the requirements of the present invention are met.

[0052] The flaps 112 of the membrane 110 may be individually actuated to move upwards and downwards by an actuator 120. Further, with reference to Figures 3-7, Figure 3 is a schematic diagram of a cross-section illustrating a venting device in a first / close mode according to a first embodiment of the present invention, Figure 4 is a schematic diagram of a cross-section illustrating a venting device in a second / open mode according to the first embodiment of the present invention, Figure 5 is a schematic diagram of a venting device in the second mode according to the first embodiment of the present invention, Figure 6 is a schematic diagram of a side view of a venting device in the second mode according to the first embodiment of the present invention, and Figure 7 is a schematic diagram of a cross-section illustrating a venting device in a third / comfort mode according to the first embodiment of the present invention. 1 to 7, free edges FE1_1, FE2_1, FE3_1, FE4_1, FE5_1, and FE6_1 opposite to the corresponding anchor edges of the flaps 112 may be configured to perform up-and-down movements. Based on this requirement, the moving directions of the up-and-down movements of the free edges FE1_1, FE2_1, FE3_1, FE4_1, FE5_1, and FE6_1 may be the same or opposite, and the moving distances of the up-and-down movements of the free edges FE1_1, FE2_1, FE3_1, FE4_1, FE5_1, and FE6_1 may be the same or different.

[0053] 1 to 7, the thin film 110 (flap 112) may be actuated / controlled by the actuator 120 to move upward or downward, thereby forming / opening or closing a plurality of vents 130T associated with the slits 130 (i.e., the thin film 110 is configured to form / open or close the vents 130T), each vent 130T formed between opposite sidewalls of the slit 130 (i.e., free edges defined by the slit 130). That is, the vent 130T is formed by (or in) the slit 130. In the present invention, each vent 130T is formed between two different flaps 112. In the "vent 130T closed / sealed" state, air does not easily flow between the first volume VL1 and the second volume VL2 through the space between the opposing side walls of the slit 130, and this resistance to flow means that the acoustic resistance of the vent 130T is high or above a threshold. In the "vent 130T formed" state, air does easily flow between the first volume VL1 and the second volume VL2 through the space between the two opposing side walls of the slit 130, and this resistance to flow means that the acoustic resistance of the vent 130T is low or below another threshold.

[0054] 1, the ventilation openings 130T include a first ventilation opening 131T, a second ventilation opening 132T, and a third ventilation opening 133T. The first slits 131 may form the first ventilation openings 131T between a free edge FE1_1 of the first flap 112a and a free edge FE2_1 of the second flap 112b, between a free edge FE3_1 of the third flap 112c and a free edge FE4_1 of the fourth flap 112d, and between a free edge FE5_1 of the fifth flap 112e and a free edge FE6_1 of the sixth flap 112f. The second slits 132 may form second ventilation holes 132T between the free edge FE1_2 of the first flap 112a and the free edge FE3_3 of the third flap 112c, and between the free edge FE2_2 of the second flap 112b and the free edge FE4_3 of the fourth flap 112d. The third slits 133 may form third ventilation holes 133T between the free edge FE1_3 of the first flap 112a and the free edge FE5_2 of the fifth flap 112e, and between the free edge FE2_3 of the second flap 112b and the free edge FE6_2 of the sixth flap 112f.

[0055] When the ventilation device 100 is operated in a first mode M1 (e.g., also known as the closed mode, such as in Figures 2 and 3) to make the vents 130T temporarily closed or even temporarily sealed, the first volume VL1 is substantially separated from the second volume VL2, whereby the surroundings of the wearable sound device WSD and the ear canal of the user of the wearable sound device are substantially separated (isolated) from each other. Conversely, when the ventilation device 100 is operated in a second mode / open mode M2 ​​(e.g., as shown in FIGS. 4 and 5, also known as the open mode) to temporarily form the vents 130T, the first volume VL1 is configured to be connected to the second volume VL2 through the vents 130T, thereby connecting the surroundings of the wearable sound device WSD and the ear canal of the user of the wearable sound device. In this way, the total size of the vents 130T in the second mode / open mode M2 ​​is much larger than the total size of the vents 130T in the first mode / closed mode M1. For example, the size of the vent 130T in the first mode / closed mode M1 of each of the multiple vents 130T is much smaller than the size of the vent 130T in the second mode / open mode M2. It should be noted that the term "size of vent 130T" refers to the area between the opposing side walls of the associated slit 130 (such as the free edges of flap 112), and the "total size of vent 130T" refers to the sum of all sizes of vent 130T.

[0056] Similarly, the vent opening may be rated by the distance / deviation between the edges of the flaps: the greater the distance / deviation between the edges of the flaps, the larger the vent opening.

[0057] It should be noted that in addition to the first flap 112a and the second flap 112b, which form the first vent 131T between them, the vent device 100 also includes a third flap 112c, which can move in a direction opposite to that of the first flap 112a. As can be seen from Fig. 5, when the third flap 112c moves in a direction opposite to that of the first flap 112a (e.g., the third flap 112c moves downward while the first flap 112a moves upward), the venting opening of the second vent 132T is enlarged compared to when the first flap 112a and the third flap 112c move in the same direction or when no flaps are present near the first flap 112a. Due to the enlarged second vent 132T, in the second mode / open mode M2, the acoustic resistance of the ventilation device 100 can be reduced and the time to achieve pressure balancing between the first volume VL1 and the second volume VL2 can be shortened.

[0058] Optionally, the ventilation device 100 is operated in a third mode M3 (e.g., FIG. 7 , also known as the comfort mode), in which the total size of the vents 130T in the third mode M3 (comfort mode) is greater than the total size of the vents 130T in the first mode M1 (closed mode) and less than the total size of the vents 130T in the second mode M2 ​​(open mode). For example, for each of the plurality of vents 130T, the size of that vent 130T in the third mode M3 is greater than the size of that vent 130T in the first mode / closed mode M1 and less than the size of that vent 130T in the second mode / open mode M2.

[0059] According to the modes described above, the first airflow between the first volume VL1 and the second volume VL2 in the first / close mode M1 is much smaller than the second airflow between the first volume VL1 and the second volume VL2 in the second / open mode M2, and the third airflow between the first volume VL1 and the second volume VL2 in the third / comfort mode M3 is larger than the first airflow and smaller than the second airflow.

[0060] In terms of acoustic resistance, the ventilation device 100 has a resistance of R ac,M2 <R ac,M3 <R ac,M1 It has the properties of R ac,M2 , R ac,M3 , and R ac,M1 represent the acoustic resistance of the ventilation device 100 or vent 130T in the second mode / open mode M2, the acoustic resistance of the ventilation device 100 or vent 130T in the third mode / comfort mode M3, and the acoustic resistance of the ventilation device 100 or vent 130T in the first mode / closed mode M1, respectively.

[0061] 2 and 3 show an example of the vent device 100 in the first mode / closed mode M1, where, for example, the first flap 112a and the second flap 112b are shown. As shown in FIGS. 2 and 3, the thin film 110 is actuated and maintained in a first position parallel or substantially parallel to the upper surface SH of the base BS, making the vents 130T closed and sealed. For example, in FIGS. 2 and 3, two opposing side walls of the slit 130 (i.e., two free edges of different flaps 112 associated with the same slit 130) partially or completely overlap in the horizontal direction (i.e., the free edges FE1_1 and FE2_1 overlap each other in the direction Y), closing the vent 130T. Since the membrane 110 has a plurality of flaps 112, all of the flaps 112 are actuated and held in their first positions to close the vent 130T in the first / closed mode M1.

[0062] As shown in FIGS. 2 and 3 , when the thin film 110 is actuated and maintained in the first position, a gap 130P exists between two opposing sidewalls of the slit 130 (i.e., two free edges of different flaps 112 associated with the same slit 130) in a horizontal plane parallel to the upper surface SH of the base BS. The gap 130P refers to, but is not limited to, a space widthwise along the slit 130, and the width of the gap 130 may be equal to or substantially equal to the width of the slit 130. The width of the slit 130 (the width of the gap 130P) may be designed based on requirements. For example, the width of the slit 130 may be, but is not limited to, 5 μm or less, 3 μm or less, 2 μm or less, or in the range of 1 μm to 2 μm. It should be noted that the size of the vent 130T in the first mode / closed mode M1 is equivalent to the width of the gap 130P.

[0063] The width of the gap 130P needs to be sufficiently small so that airflow through the gap 130P (i.e., a narrow channel) can be significantly attenuated due to viscous forces / resistance along the walls of the airflow pathways, a phenomenon known in the field of fluid dynamics as the boundary layer effect. Therefore, the airflow flowing through the gap 130P between the first volume VL1 and the second volume VL2 in the first mode M1 is significantly small or negligible. In other words, when the ventilation device 100 is in the first mode M1, the vent 130T is closed or even sealed.

[0064] In the case of the first mode / closed mode M1, the air flow flowing between the first volume VL1 and the second volume VL2 through the gap 130P in the first mode M1 is very small or negligible, so that the user of the wearable sound device experiences high-performance acoustic transformation (e.g., high-performance sound) in the whole audio frequency range, which acoustic transformation is provided by the acoustic transducer of the wearable sound device WSD.

[0065] 4 to 6 show an example of the ventilation device 100 in the second mode / open mode M2, where FIG. 4 shows, for example, the first flap 112a and the second flap 112b, and FIG. 6 shows a side view of the first ventilation opening 131T along direction Y and a side view of the second ventilation opening 132T along direction X. As shown in Figures 4 and 5, the first flap 112a (e.g., free edge FE1_1), the fourth flap 112d (e.g., free edge FE4_1), and the sixth flap 112f (e.g., free edge FE6_1) may be actuated to move toward a first direction, and the second flap 112b (e.g., free edge FE2_1), the third flap 112c (e.g., free edge FE3_1), and the fifth flap 112e (e.g., free edge FE5_1) may be actuated to move toward a second direction opposite to the first direction, thereby temporarily forming an air vent 130T. That is, the moving direction of the first up-and-down movement of the free edges FE1_1, FE4_1, and FE6_1 is opposite to the moving direction of the second up-and-down movement of the free edges FE2_1, FE3_1, and FE5_1. That is, two adjacent flaps 112 may move in opposite directions in the second mode M2. As shown in FIGS. 4 and 5, the first direction and the second direction may be substantially parallel to the direction Z.For example, but not limited to, the first direction may be the same direction as direction Z (i.e., the +Z direction), and the second direction may be the opposite direction to direction Z (i.e., the −Z direction), whereby the first flap 112 a, the fourth flap 112 d, and the sixth flap 112 f may be actuated to move upwards and above their first positions, and the second flap 112 b, the third flap 112 c, and the fifth flaps 112 e may be actuated to move downwards and below their first positions. As shown in FIGS. 4 and 5 , according to the movement of the flaps 112 in the second mode M2, a vent 130T is temporarily formed between two opposing side walls of the slits 130 associated with the flaps in direction Z. It should be noted that the movement of the flap 112 in the second mode M2 ​​provides a venting method for the venting device 100.

[0066] In the present invention, the side shape of the ventilation opening 130T may be a polygon (e.g., a rectangle), a shape with curved edges, or any other suitable shape. For example, as shown in Figures 5 and 6, the first ventilation opening 131T may be formed in the Z direction and may have a quadrilateral shape (e.g., a rectangle), but is not limited thereto. The upper edge of the first ventilation opening 131T may be formed by the free edge FE1_1 of the first flap 112a, the free edge FE4_1 of the fourth flap 112d, and the free edge FE6_1 of the sixth flap 112f, and the lower edge of the first ventilation opening 131T may be formed by the free edge FE2_1 of the second flap 112b, the free edge FE3_1 of the third flap 112c, and the free edge FE5_1 of the fifth flap 112e. For example, as shown in Figures 5 and 6, the second ventilation opening 132T may be formed in direction Z, may have a rectangular shape (e.g., a diamond), and the two upper edges of the second ventilation opening 132T may be formed from the free edge FE1_2 of the first flap 112a and the free edge FE4_3 of the fourth flap 112d, respectively, and the two lower edges of the second ventilation opening 132T may be formed from the free edge FE3_3 of the third flap 112c and the free edge FE2_2 of the second flap 112b, respectively, although this is not limited thereto. For example, the third ventilation opening 133T may be similar to the second ventilation opening 132T, but is not limited thereto, whereby the third ventilation opening 133T may be formed in direction Z and may have a rectangular shape (e.g., a diamond shape), and the four edges of the third ventilation opening 133T may be formed respectively from the free edge FE1_3 of the first flap 112a, the free edge FE5_2 of the fifth flap 112e, the free edge FE2_3 of the second flap 112b, and the free edge FE6_2 of the sixth flap 112f.

[0067] 6, in the second mode / open mode M2, the size of the first vent 131T may be larger than the sizes of the second vent 132T and the third vent 133T. Thus, in this embodiment, without being limited thereto, the first vent 131T may be a main / primary vent, and the second vent 132T and the third vent 133T may be side / secondary vents.

[0068] When temporarily forming the vent 130T, an airflow may be formed to flow between the first volume VL1 and the second volume VL2 due to the pressure difference between the two sides of the membrane 110, thereby releasing the pressure caused by the occlusion effect (i.e., the pressure difference between the ear canal and the surroundings of the wearable sound device WSD may be released by the airflow flowing through the vent 130T), thereby suppressing the occlusion effect. Furthermore, since the ventilation device 100 forms multiple vents 130T in the second mode M2, it is possible to increase the efficiency and effectiveness of suppressing the occlusion effect. The efficiency and effectiveness of suppressing the occlusion effect may be increased by increasing the size of the vent 130T and / or the total size of the vents 130T.

[0069] 3 and 4, in the first mode / closed mode M1, a gap 130P exists between two opposing side walls of the slit 130, and in the second mode / open mode M2, a vent 130T exists between the two opposing side walls of the slit 130. The width of the gap 130P is sufficiently small so that the first air flow through the gap 130P in the first mode M1 is negligible compared to the second air flow through the vent 130T in the second mode M2 ​​(e.g., less than 10% of the second air flow).

[0070] During a transition from a first / closed mode M1, such as the mode shown in Figure 3, to a second / open mode M2, such as the mode shown in Figure 4, the first flap 112a, the fourth flap 112d, and the sixth flap 112f may move upward, while the second flap 112b, the third flap 112c, and the fifth flap 112e may move downward. Conversely, during a transition from the second mode M2 ​​shown in Figure 4 back to the first mode M1 shown in Figure 3, the first flap 112a, the fourth flap 112d, and the sixth flap 112f may move downward, while the second flap 112b, the third flap 112c, and the fifth flap 112e may move upward.

[0071] Additionally, during a transition from the first mode M1 to the second mode M2, or during a transition from the second mode M2 ​​back to the first mode M1, the free edge FE1_1 (and also the free edges FE4_1 and FE6_1) may be actuated to have a first displacement Uz_a in the direction Z, and the free edge FE2_1 (and also the free edges FE3_1 and FE5_1) may be actuated to have a second displacement Uz_b in the direction Z. During a transition from the first mode M1 to the second mode M2, the sum of the first displacement Uz_a and the second displacement Uz_b may be greater than the thickness of the thin film 110.

[0072] In one embodiment, the first displacement Uz_a and the second displacement Uz_b may be of substantially equal in distance but may be of opposite directions. The first displacement Uz_a and the second displacement Uz_b may be (temporarily) symmetric. The movements of the free edges FE1_1 and FE2_1 (and also the movements of the free edges FE4_1 and FE3_1, and the movements of the free edges FE6_1 and FE5_1) are substantially equal length-wise but opposite in direction over any period of time. That is, with respect to the first flap 112a and the second flap 112b, when the first flap 112a and the second flap 112b are held in their first positions in the first mode M1 (as shown in FIG. 3), when the membrane 110 is actuated to change to the second mode M2 ​​or to transition between the first mode M1 and the second mode M2 ​​(e.g., transitioning from the first mode M1 to the second mode M2), a moving distance of the first flap 112a respecting its first position may be equal to the moving distance of the second flap 112b respecting the first position (as shown in FIG. 4).

[0073] The first flap 112a, the fourth flap 112d, and the sixth flap 112f are actuated to move in a first direction, thereby generating a first air movement, the direction of which is related to the first direction. The second flap 112b, the third flap 112c, and the fifth flap 112e are actuated to move in a second direction opposite the first direction, thereby generating a second air movement, the direction of which is related to the second direction. Because the first air movement and the second air movement may be respectively related in opposite directions, at least a portion of the first air movement and at least a portion of the second air movement may cancel each other when the flaps 112 are actuated to simultaneously form / close the air vent 130T.

[0074] In some embodiments, the movement of the free edges FE1_1, FE4_1, and FE6_1 is symmetrical to the movement of the free edges FE2_1, FE3_1, and FE5_1, respectively, so that when the flap 112 simultaneously forms and closes the vent 130T, the entire first air movement and the entire second air movement may substantially cancel each other out. That is, the net air movement, including the first air movement and the second air movement, generated due to the formation and closing of the vent 130T is substantially zero. As a result, because the net air movement is substantially zero during the forming and / or closing of the vent 130T, the operation of the vent 130T does not generate an acoustic disturbance perceptible to a user of the ventilation device 100, and the forming and / or closing of the vent 130T is said to be “concealed.”

[0075] 7 shows an example of the ventilation device 100 in the third mode / comfort mode M3, showing, for example, the first flap 112a and the second flap 112b. As shown in FIG. 7, the membrane 110 bends downwards and is below a first location (i.e., the membrane 110 hangs downwards). That is, the flap 112 bends downwards and is below a first location, such that the free edges FE1_1, FE2_1, FE3_1, FE4_1, FE5_1, and FE6_1 may move / bend toward the base BS in the third mode M3.

[0076] As shown in FIGS. 3, 4, and 7, the size of the vent 130T in the third mode / comfort mode M3 (FIG. 7) is larger than the size of the vent 130T (i.e., the width of the gap 130P) in the first mode / closed mode M1 (FIG. 3) and smaller than the size of the vent 130T in the second mode / open mode M2 ​​(FIG. 4). That is, the vent 130T is slightly open in the third mode M3. In the "slightly open vent 130T" state, a small amount of air leakage may occur between the first volume VL1 and the second volume VL2 through the space between the two opposing side walls of the slit 130.

[0077] For example, in FIG. 7, two opposing side walls of a slit 130 (i.e., two free edges of different flaps 112 associated with the same slit 130) partially or completely overlap each other in the horizontal direction (i.e., free edge FE1_1 and free edge FE1_2 overlap each other in direction Y).

[0078] When transitioning from the first mode M1 or the second mode M2 ​​to the third mode / comfort mode M3, all or some of the flaps 112 may move downward so that all of the flaps 112 are below their first location. When transitioning from the third mode M3 to the first mode M1 or the second mode M2, all or some of the flaps 112 may move upward so that all of the flaps 112 reach their desired location.

[0079] Furthermore, as shown in Figures 3, 4 and 7, in the first mode M1, the second mode M2, the third mode M3 and the transitions between the two modes, the free edges FE1_1, FE2_1, FE3_1, FE4_1, FE5_1 and FE6_1 do not come into physical contact with any other components in the ventilation device 100.

[0080] For the ventilation device 100 of the present invention and a wearable sound device WSD including an acoustic transducer configured to perform acoustic transduction, the low frequency roll-off (LFRO) corner frequency of the acoustic transducer's frequency response is affected by the mode of the ventilation device 100. The LFRO corner frequency increases as the overall size of the ventilation opening 130T increases. Thus, the LFRO corner frequencies in the first mode M1 and the third mode / comfort mode M3 are low, and the low frequency SPL drop in the first mode M1 and the low frequency SPL drop in the third mode M3 are not evident, while the LFRO corner frequency in the second mode M2 ​​is significantly higher than the LFRO corner frequencies in the first mode M1 and the third mode M3, and the low frequency SPL drop in the second mode M2 ​​is evident. It should be noted that because the vent 130T is slightly open in the third mode M3, the LFRO corner frequency in the third mode M3 is slightly higher than the LFRO corner frequency in the first mode M1.

[0081] According to the frequency response of the acoustic transducer, the first mode / closed mode M1 of the ventilation device 100 allows the user of the wearable sound device to experience acoustic transformation with high performance (such as high performance sound) in the whole audio frequency range, the second mode / open mode M2 ​​of the ventilation device 100 suppresses the occlusion effect, and the third mode / comfort mode M3 of the ventilation device 100 allows the effect between the first mode M1 and the second mode M2 ​​to function as a comfort mode.

[0082] The actuator 120 may receive at least one appropriate drive signal to actuate the membrane 110 and cause the membrane 110 to maintain or change its position, thereby maintaining or changing the mode of the venting device 100. As shown in FIGS. 3, 4, and 7, the venting device 100 may be switched to a first mode M1, a second mode M2, or a third mode M3 based on the drive signal received by the actuator 120, whereby the size of each of the vent openings 130T is adjusted according to the drive signal applied to the actuator 120. If the membrane 110 is divided into multiple flaps 112, the actuating portions of the actuator 120 may receive the same drive signal or different drive signals. For example, when the actuator 120 is a piezoelectric actuator, the drive signal may be a drive voltage and / or a drive voltage difference between two electrodes, and the displacement of the membrane 110 and the drive signal may have a linear relationship.

[0083] The following description describes drive signals applied to a first actuating portion 120a disposed on the first flap 112a and a second actuating portion 120b disposed on the second flap 112b. The drive signals applied to a fourth actuating portion 120d disposed on the fourth flap 112d and a sixth actuating portion 120f disposed on the sixth flap 112f may be the same as the drive signal applied to the first actuating portion 120a disposed on the first flap 112a, and the drive signals applied to a third actuating portion 120c disposed on the third flap 112c and a fifth actuating portion 120e disposed on the fifth flap 112e may be the same as the drive signal applied to the second actuating portion 120b disposed on the second flap 112b, and therefore these portions will not be described redundantly.

[0084] 3, in the first mode / closed mode M1, the first actuating portion 120a disposed on the first flap 112a receives a drive signal DV1_1, and the second actuating portion 120b disposed on the second flap 112b receives a drive signal DV2_1. The first flap 112a and the second flap 112b move to or remain at a first position according to the drive signal DV1_1 and the drive signal DV2_1 to close or seal the air vent 130T. The drive signal DV1_1 and the drive signal DV2_1 may be designed based on requirements. In some of the embodiments, the drive signal DV1_1 may be a constant voltage having a first threshold, the drive signal DV2_1 may be a constant voltage having a second threshold, and the drive signals DV1_1 and DV2_1 may be the same or substantially the same (i.e., the first threshold is the same or substantially the same as the second threshold). For example, the drive signals DV1_1 and DV2_1 may be, but are not limited to, 15 V.

[0085] 4, in the second mode / open mode M2, the first actuating portion 120a disposed on the first flap 112a receives a drive signal DV1_2, and the second actuating portion 120b disposed on the second flap 112b receives a drive signal DV2_2. According to the drive signals DV1_2 and DV2_2, the free edge FE1_1 moves upward to a first location, and the free edge FE2_1 moves downward to a first location to form the vent 130T. The drive signals DV1_2 and DV2_2 may be designed based on requirements. In some embodiments, the drive signal DV1_2 may be a constant voltage greater than a first threshold, the drive signal DV2_2 may be a constant voltage less than a second threshold, the drive signals DV1_2 and DV2_2 may be different, and the size of the vent 130T in the second mode M2 ​​is related to the difference between the drive signals DV1_2 and DV2_2. For example, but not limited to, the drive signal DV1_2 may be 30 V, and the drive signal DV2_2 may be 0 V.

[0086] In addition, due to the design of the drive signals DV1_2 and DV2_2, the movements of the free edges FE1_1 and FE2_1 are temporally symmetrical with respect to the first position. For example, but not limited to, the difference between the drive signal DV1_2 and the first threshold value may be the same as the difference between the drive signal DV2_2 and the second threshold value.

[0087] As shown in FIG. 7 , in the third mode / comfort mode M3, the first actuating portion 120a disposed on the first flap 112a receives the drive signal DV1_3, and the second actuating portion 120b disposed on the second flap 112b receives the drive signal DV2_3. According to the drive signals DV1_3 and DV2_3, the free edges FE1_1 and FE2_1 move downward from the first location, thereby slightly opening the air vent 130T. The drive signals DV1_3 and DV2_3 may be designed based on requirements. In some of the embodiments, but not limited to these, the drive signal DV1_3 may be a constant voltage less than a first threshold, and the drive signal DV2_3 may be a constant voltage less than a second threshold, and the drive signals DV1_3 and DV2_3 may be the same or substantially the same. For example, the drive signal DV1_3 and the drive signal DV2_3 may be, but are not limited to, 0 V or a ground voltage. In some embodiments, the first actuating section 120a and the second actuating section 120b may be, but are not limited to, floating.

[0088] According to the drive signals in these modes, the ventilation device 100 consumes the least power in the third mode / comfort mode M3. In some embodiments, in the third mode M3, no voltage is applied to the actuator 120 (i.e., the drive signal applied to the actuator 120 is 0 V or ground, or the actuator 120 is floating). In some cases, including but not limited to, to reduce the power consumption of the ventilation device 100, the ventilation device 100 may normally be in the third mode M3 (e.g., comfort mode), and when necessary, the ventilation device 100 may be changed to the first mode / closed mode M1 or the second mode / open mode M2 ​​(e.g., the ventilation device 100 may be changed to the first mode M1 for high-performance acoustic transduction, and the ventilation device 100 may be changed to the second mode M2 ​​to reduce occlusion effects).

[0089] In some embodiments, the drive signals applied to the first actuating section 120a and the second actuating section 120b may be unipolar with respect to the ground voltage. For example, according to the drive signals DV1_1, DV1_2, DV1_3, DV2_1, DV2_2, and DV2_3 mentioned above, the drive signals applied to the first actuating section 120a and the second actuating section 120b may be, but are not limited to, in the range of 0 V to 30 V.

[0090] In the present invention, the drive signal applied to the actuator 120 does not exceed the breakdown voltage of the actuator 120, which may result in, but is not limited to, stable operation of the ventilation device 100 or less distortion of the ventilation device 100.

[0091] Referring to Fig. 8, Fig. 8 is a schematic diagram illustrating a wearable sound device having a ventilation device according to one embodiment of the present invention. As shown in Fig. 8, the wearable sound device WSD may further include a sensing device 150 and a controller 160 electrically connected to the sensing device 150, an acoustic transducer, and a ventilation device 100 (such as the actuator 120 of the ventilation device 100). In Fig. 8, the component SED includes the acoustic transducer and the ventilation device 100 to make Fig. 8 simple and clear.

[0092] The sensing device 150 may be configured to sense any required factor outside the wearable sound device WSD and generate a sensing result accordingly, for example, the sensing device 150 may sense any required factor using, but not limited to, an infrared (IR) sensing method, an optical sensing method, an acoustic sensing method, an ultrasonic wave sensing method, a capacitive sensing method, or any other suitable sensing method.

[0093] In some embodiments, whether or not the vent 130T is formed is determined according to a sensing result. The vent 130T is formed when the sensed quantity indicated by the sensing result crosses a certain threshold value having a first polarity, and the vent 130T is closed when the sensed quantity crosses the certain threshold value having a second polarity opposite to the first polarity. For example, but not limited to, the first polarity may be from a small value to a large value, and the second polarity may be from a large value to a small value, whereby the vent 130T is formed when the sensed quantity changes from a value smaller than the certain threshold value to a value larger than the certain threshold value, and the vent 130T is closed when the sensed quantity changes from a value larger than the certain threshold value to a value smaller than the certain threshold value.

[0094] Furthermore, in some embodiments, the size of the vent 130T (or the total size of the vent 130T) may be monotonically related to the sensed quantity indicated by the sensing result, i.e., the size of the vent 130T (or the total size of the vent 130T) increases or decreases as the sensed quantity increases or decreases.

[0095] In some embodiments, the sensing device 150 may optionally include a motion sensor configured to detect the user's body motion and / or the movement of the wearable sound device WSD. For example, the sensing device 150 may detect body motion that causes an occlusion effect, such as walking, jogging, talking, or eating. In some embodiments, the sensed amount indicated by the sensing result represents the user's body motion and / or the movement of the wearable sound device WSD, and the size of the vent 130T (or the total size of the vent 130T) is correlated to the sensed motion. For example, the size of the vent 130T (or the total size of the vent 130T) increases as the motion increases.

[0096] In some embodiments, the sensing device 150 may optionally include a proximity sensor configured to sense the distance between an object and the proximity sensor. In some embodiments, the sensed quantity indicated by the sensed result represents the distance between the object and the proximity sensor, and the size of the vent 130T (or the total size of the vent 130T) is correlated to the sensed distance. For example, the vent 130T is formed when the distance is smaller than a predetermined distance, and as the distance decreases, the size of the vent 130T (or the total size of the vent 130T) increases. For example, when a user wants to form the vent 130T, the user may use any suitable object (such as a hand) to approach the wearable sound device WSD, causing the proximity sensor to sense the object and generate a corresponding sensed result, thereby forming the vent 130T.

[0097] In addition, since these tapping or touching movements may also cause occlusion effects, the proximity sensor may also have the capability to detect when a user (predictably) taps or touches the wearable sound device WSD with the ventilation device 100.

[0098] In some of the embodiments, the detection device 150 may optionally include a force sensor configured to detect a force applied to the force sensor of the wearable sound device WSD, the detected amount indicated by the detection result representing the force pressing on the wearable sound device WSD, and the size of the air vent 130T (or the total size of the air vent 130T) being correlated to the detected force.

[0099] In some of the embodiments, the detection device 150 may optionally include a light sensor configured to detect ambient light around the wearable sound device WSD, the detected quantity indicated by the detection result representing the luminance of the ambient light detected by the light sensor, and the size of the vent 130T (or the total size of the vent 130T) being correlated to the luminance of the detected ambient light.

[0100] In some embodiments, the detection device may optionally include an acoustic sensor, such as a microphone, configured to detect sound outside the wearable sound device WSD. For example, but not limited to, the detected amount indicated by the detection result represents the SPL of the sound detected by the acoustic sensor, and the size of the vent 130T (or the total size of the vent 130T) is correlated to the sound detected by the acoustic sensor.

[0101] The controller 160 is configured to generate drive signals that are applied to the acoustic transducers and the ventilation device 100 to control the acoustic transducers to perform acoustic transduction, as well as to control the mode of the ventilation device 100 .

[0102] Controller 160 may be designed based on requirements, and may include any suitable components. For example, in Figure 8, controller 160 may include an analog-to-digital converter (ADC) 162, a digital signal processing (DSP) unit 164, a digital-to-analog converter (DAC) 166, any other suitable components, or a combination thereof. For example, controller 160 may be, but is not limited to, an integrated circuit.

[0103] The controller 160 generates drive signals (such as the above-mentioned drive signals DV1_1, DV1_2, DV1_3, DV2_1, DV2_2, and DV2_3) that are applied to the actuators 120 of the ventilation device 100 to control the mode and the size of the ventilation openings 130T (or the total size of the ventilation openings 130T) of the ventilation device 100. In this way, the controller 160 controls the ventilation device 100 to form the ventilation openings 130T to reduce occlusion effects, or to close the ventilation openings 130T to allow the user of the wearable sound device to experience high performance sound conversion across the entire audible frequency range.

[0104] In some embodiments, the drive signal applied to the actuator 120 of the ventilation device 100 may be generated according to, but not limited to, the sensing result. In some embodiments, the size of the vent 130T may be monotonically related to the sensed quantity indicated by the sensing result, and therefore the drive signal applied to the actuator 120 may have a monotonic relationship with the sensed quantity indicated by the sensing result.

[0105] When sensing device 150 includes a motion sensor, the magnitude of the drive signal applied to actuator 120 may, but is not limited to, increase (or decrease) as motion increases. Similarly, when sensing device 150 includes a proximity sensor, the magnitude of the drive signal applied to actuator 120 may, but is not limited to, increase (or decrease) as distance decreases or as distance decreases below a threshold value. Similarly, when sensing device 150 includes a force sensor, the magnitude of the drive signal applied to actuator 120 may, but is not limited to, increase (or decrease) as force increases. Similarly, when sensing device 150 includes a light sensor, the magnitude of the drive signal applied to actuator 120 may, but is not limited to, increase (or decrease) as ambient light intensity decreases.

[0106]

[0033] Referring to Fig. 9, Fig. 9 is a schematic diagram illustrating a wearable sound device having a ventilation device according to an embodiment of the present invention. The wearable sound device WSD shown in Fig. 9 may include a plurality of acoustic transducers (e.g., acoustic transducers SPK1 and SPK2), which are configured to perform acoustic transduction. That is, acoustic waves are generated by the acoustic transducers SPK1 and SPK2, and the ventilation device 100 is configured to be operated to form or close a ventilation opening 130T to suppress occlusion effects. As shown in Fig. 9, the acoustic waves generated by the acoustic transducers SPK1 and SPK2 may propagate from a front chamber FBC of the wearable sound device WSD to the ear canal of a user of the wearable sound device.

[0107] The frequency range of the acoustic waves generated by each acoustic transducer may be designed based on requirements. For example, but not limited to, one embodiment of the acoustic transducer may generate acoustic waves having a frequency range covering the human audible frequency range (e.g., 20 Hz to 20 kHz). For example, but not limited to, another embodiment of the acoustic transducer may generate acoustic waves having a frequency higher than a certain frequency, thereby making the acoustic transducer a high-frequency sound unit (a tweeter for reproducing high-pitched sounds). For example, but not limited to, another embodiment of the acoustic transducer may generate acoustic waves having a frequency lower than a certain frequency, thereby making the acoustic transducer a low-frequency sound unit (a woofer for reproducing low-pitched sounds). It should be noted that the specific frequency may be, but is not limited to, a value in the range of 800 Hz to 4 kHz (e.g., 1.44 kHz). Details of the high frequency sound unit and the low frequency sound unit may be found in commonly filed U.S. patent application Ser. No. 17 / 153,849, which will not be described here for the sake of brevity.

[0108] The acoustic transducers SPK1 and SPK2 may be the same or different, for example, but not limited to, the acoustic transducer SPK1 may be a high-frequency sound unit (a tweeter for reproducing high-pitched sounds) and the acoustic transducer SPK2 may be a low-frequency sound unit (a woofer for reproducing low-pitched sounds).

[0109] The front chamber FBC of the wearable sound device WSD shown in FIG. 9 may be connected to a first volume VL1 in the housing structure HSS (shown in FIG. 2) in which the ventilation device 100 is arranged. For example, the front chamber FBC of the wearable sound device WSD may be directly connected to the first volume VL1 in the housing structure HSS, or may be connected to the first volume VL1 in the housing structure HSS through the ear canal of the user of the wearable sound device. Also, the back chamber BBC of the wearable sound device WSD shown in FIG. 9 may be connected to a second volume VL2 in the housing structure HSS (shown in FIG. 2) in which the ventilation device 100 is arranged. For example, the back chamber BBC of the wearable sound device WSD may be directly connected to the second volume VL2 in the housing structure HSS, or may be connected to the second volume VL2 in the housing structure HSS through the periphery of the wearable sound device WSD.

[0110] The detection device 150 may include an acoustic sensor (e.g., a microphone) and may be positioned in the front chamber FBC and / or back chamber BBC of the wearable sound device WSD, and the detection device 150 is configured to detect an occlusion event.

[0111] The ventilation device 100, the acoustic transducers SPK1 and SPK2, and the sensing device 150 may be electrically connected to a controller 160. The controller 160 may apply acoustic driving signals to the acoustic transducers SPK1 and SPK2, such that the acoustic waves generated by the acoustic transducers SPK1 and SPK2 may correspond to the acoustic driving signals. The controller 160 may apply driving signals to the ventilation device 100 based on the sensing results of the sensing device 150 to form or close the vent 130T. For example, the controller 160 may include, but is not limited to, a device controller 168a and a device driver 168b. For example, but not limited to, the device controller 168a may determine voltages applied or to be applied to multiple actuating portions of the actuator 120 according to the sensing results generated by the sensing device 150.

[0112] In the following description, further details of the method of manufacturing the venting device 100 will be explained by way of example. It should be noted that in the following manufacturing method, the actuator 120 of the venting device 100 may include, for example, but is not limited to, a piezoelectric actuator. The actuator 120 of the venting device 100 may include any suitable type of actuator.

[0113] In the following fabrication methods, the forming process may include an atomic layer deposition (ALD) process, a chemical vapor deposition (CVD) process, or other suitable process, or a combination thereof. The patterning process may include photolithography, an etching process, or other suitable process, or a combination thereof.

[0114] 10-15, which are schematic diagrams illustrating configurations at different stages of a method for manufacturing a venting device according to one embodiment of the present invention. In this embodiment, the venting device 100 may be manufactured by at least one semiconductor process, such as, but not limited to, a MEMS chip. As shown in FIG. 10, a wafer WF is provided. The wafer WF may include a first layer WL1 and a second layer WL2. The wafer WF may optionally include an insulating layer WL3 between the first layer WL1 and the second layer WL2.

[0115] The first layer WL1, the insulating layer WL3, and the second layer WL2 may each include any suitable material, thereby making the wafer WF any suitable type. For example, the first layer WL1 and the second layer WL2 may each include silicon (e.g., single crystalline silicon or polycrystalline silicon), a silicon compound (e.g., silicon carbide or silicon oxide), germanium, a germanium compound, gallium, a gallium compound (e.g., gallium nitride or gallium arsenide), other suitable materials, or a combination thereof. In some embodiments, the first layer WL1 may include, but is not limited to, monocrystalline silicon, thereby allowing the wafer WF to be a silicon-on-insulator (SOI) wafer. For example, the insulating layer WL3 may include, but is not limited to, an oxide, such as silicon oxide (e.g., silicon dioxide). The thicknesses of the first layer WL1, the insulating layer WL3, and the second layer WL2 may be individually adjusted based on requirements.

[0116] 10, a compensation oxide layer CPS may be optionally formed on the upper side of the wafer WF, and its upper side is above an upper surface WL1a of the first layer WL1 facing the second layer WL2, so that the first layer WL1 is between the compensation oxide layer CPS and the second layer WL2. The material of the oxide contained in the compensation oxide layer CPS and the thickness of the compensation oxide layer CPS may be designed based on requirements.

[0117] 10, a first conductive layer CT1 and an actuating material AM may be formed, in order, on the top side of the wafer WF (above the first layer WL1), such that the first conductive layer CT1 is between the actuating material AM and the first layer WL1. In some embodiments, the first conductive layer CT1 may be in contact with the actuating material AM.

[0118] The first conductive layer CT1 may include any suitable conductive material, and the actuation material AM may include any suitable material. In some embodiments, the first conductive layer CT1 may include a metal, and the actuation material AM may include a piezoelectric material. For example, the piezoelectric material may include, but is not limited to, a lead zirconate titanate (PZT) material. Furthermore, the thicknesses of the first conductive layer CT1 and the actuation material AM may be individually adjusted based on requirements.

[0119] Then, in FIG. 10, the actuating material AM, the first conductive layer CT1, and the compensation oxide layer CPS may be patterned in order.

[0120] 11, a separating insulating layer SIL may be formed on the actuating material AM and then patterned. The thickness and material of the separating insulating layer SIL may be designed based on requirements. For example, the material of the separating insulating layer SIL may be, but is not limited to, an oxide.

[0121] 11, a second conductive layer CT2 may be formed on the actuating material AM and the isolation insulating layer SIL, and then the second conductive layer CT2 may be patterned. The thickness of the second conductive layer CT2 and the material of the second conductive layer CT2 may be designed based on requirements. For example, the second conductive layer CT2 may include, but is not limited to, a metal. For example, the second conductive layer CT2 may contact the actuating material AM.

[0122] The actuating material AM, the first conductive layer CT1, and the second conductive layer CT2 may be sub-layers in the actuator 120 of the ventilation device 100 to form the actuator 120, which includes a piezoelectric actuator, which includes two electrodes and the actuating material AM between the two electrodes.

[0123] In FIG. 11, the isolation insulating layer SIL may be configured to separate at least a portion of the first conductive layer CT1 from at least a portion of the second conductive layer CT2.

[0124] As shown in Figure 12, the first layer WL1 of the wafer WF may be patterned to form trench lines TL. In Figure 12, the trench lines TL are portions of the first layer WL1 that have been removed. That is, the trench lines TL exist between two portions of the first layer WL1.

[0125] As shown in Figure 13, the wafer WF is placed on a substrate SB and an adhesive layer AL, which is bonded between the substrate SB and a first layer WL1 of the wafer WF. In Figure 13, the actuator 120 is present between the wafer WF and the substrate SB. Because of this step, the first layer WL1 of the wafer WF and structures above the wafer WF (i.e., structures above the upper surface WL1a of the wafer WF) may be protected in subsequent steps.

[0126] As shown in FIG. 14 , the second layer WL2 of the wafer WF may be patterned to form anchor structures 140 in the patterned second layer WL2 and to form a thin film 110 in the first layer WL1 to which the anchor structures 140 are attached. Specifically, the second layer WL2 of the wafer WF may have a first portion and a second portion, and the first portion of the second layer WL2 may be removed, and the second portion of the second layer WL2 may form the anchor structure 140. Since the first portion of the second layer WL2 is removed, the first layer WL1 forms the thin film 110, which corresponds to the removed first portion of the second layer WL2 in the direction Z. For example, the first portion of the second layer WL2 may be removed by, but is not limited to, a deep reactive ion etching (DRIE) process. It should be noted that the flaps 112 of the thin film 110 are determined when the first layer WL1 of the wafer WF is patterned to form the trench lines TL.

[0127] Optionally, in FIG. 14, although not limited thereto, since an insulating layer WL3 of the wafer WF is present, after patterning the second layer WL2 of the wafer WF, a portion of the insulating layer WL3 corresponding to the first portion of the second layer WL2 may also be removed to form a thin film 110 on the first layer WL1.

[0128] Furthermore, in FIG. 14, the second portion of the second layer WL2, the portion of the insulating layer WL3 that overlaps with the second portion of the second layer WL2, and the portion of the first layer WL1 that overlaps with the second portion of the second layer WL2 may be combined to function as anchor structure 140.

[0129] 15, the substrate SB and adhesive layer AL are removed by an appropriate process to complete the fabrication of the venting device 100. For example, but not limited to, the substrate SB and adhesive layer AL may be removed by a peel-off process.

[0130] 15 , a first portion of the second layer WL2 is removed to form the thin film 110 included in the first layer WL1, and therefore, a slit 130 is formed in and penetrates the thin film 110 for the trench line TL. Since the slit 130 is formed by the trench line TL, the width of the trench line TL may be designed based on the requirements of the slit 130. For example, the width of the trench line TL may be, but is not limited to, 5 μm or less, 3 μm or less, 2 μm or less, or in the range of 1 μm to 2 μm, and the slit 130 may have a desired width.

[0131] The ventilation device, wearable sound device, and method for manufacturing a ventilation device of the present invention are not limited to the above-described embodiments. Other embodiments of the present invention will be described below. In the following description, for ease of comparison, the same components will be denoted by the same reference numerals. The following description will focus on the differences between the multiple embodiments, and repeated descriptions will not be repeated.

[0132] 16 and 17, Fig. 16 is a schematic diagram of a plan view illustrating a ventilation device according to a second embodiment of the present invention, and Fig. 17 is a schematic diagram of a side view of the vents of the ventilation device in a second / open mode and a third / comfort mode according to the second embodiment of the present invention, with Fig. 17 showing a side view of a first vent 131T along direction Y and a side view of a second vent 132T along direction X. As shown in Fig. 16, the difference between this embodiment and the first embodiment is the arrangement of the flaps 112 of the ventilation device 200. In Fig. 16, the membrane 110 includes, but is not limited to, four flaps 112 arranged in a 2x2 array.

[0133] 16, the first anchor edge AE1 and the fourth anchor edge AE4 may be parallel to the direction X, and the second anchor edge AE2 and the third anchor edge AE3 may be parallel to the direction Y (i.e., the second anchor edge AE2 and the third anchor edge AE3 may be perpendicular to the first anchor edge AE1 and the fourth anchor edge AE4). In the first flap 112a, the free edge FE1_1 is opposite the first anchor edge AE1 in the direction Y, and the free edges FE1_2 and FE1_3 face each other in the direction X between the free edge FE1_1 and the first anchor edge AE1. In the second flap 112b, the free edge FE2_1 is opposite the second anchor edge AE2 in the direction X, and the free edges FE2_2 and FE2_3 face each other in the direction Y between the free edge FE2_1 and the second anchor edge AE2. In the third flap 112c, the free edge FE3_1 is opposite the third anchor edge AE3 in the direction X, and the free edges FE3_2 and FE3_3 face each other in the direction Y between the free edge FE3_1 and the third anchor edge AE3. In the fourth flap 112d, the free edge FE4_1 is opposite the fourth anchor edge AE4 in the direction Y, and the free edges FE4_2 and FE4_3 face each other in the direction X between the free edge FE4_1 and the fourth anchor edge AE4.

[0134] In FIG. 16, the first slit 131 may define a free edge FE1_1 of the first flap 112a, a free edge FE2_3 of the second flap 112b, a free edge FE3_2 of the third flap 112c, and a free edge FE4_1 of the fourth flap 112d, and the second slit 132 may define a free edge FE1_2 of the first flap 112a, a free edge FE2_1 of the second flap 112b, a free edge FE3_1 of the third flap 112c, and a free edge FE4_3 of the fourth flap 112d. Further, the slits 130 may optionally include a third slit 133, a fourth slit 134, a fifth slit 135, and a sixth slit 136 formed around the periphery of the thin film 110 to define the boundary of the thin film 110, wherein the third slit 133 may define a free edge FE1_3 of the first flap 112a, the fourth slit 134 may define a free edge FE2_2 of the second flap 112b, the fifth slit 135 may define a free edge FE3_3 of the third flap 112c, and the sixth slit 136 may define a free edge FE4_2 of the fourth flap 112d.

[0135] Thus, according to the arrangement of the flaps 112 and the arrangement of the slits 130, in FIG. 16, the free edges FE1_1 and FE1_2 of the first flap 112a are adjacent to the second flap 112b and the third flap 112c, respectively, the free edges FE2_1 and FE2_3 of the second flap 112b are adjacent to the fourth flap 112d and the first flap 112a, respectively, the free edges FE3_1 and FE3_2 of the third flap 112c are adjacent to the first flap 112a and the fourth flap 112d, respectively, and the free edges FE4_1 and FE4_3 of the fourth flap 112d are adjacent to the third flap 112c and the second flap 112b, respectively.

[0136] The first ventilation opening 131T may be formed between the free edge FE1_1 of the first flap 112a and the free edge FE2_3 of the second flap 112b, and between the free edge FE3_2 of the third flap 112c and the free edge FE4_1 of the fourth flap 112d, by the first slit 131. The second ventilation opening 132T may be formed between the free edge FE1_2 of the first flap 112a and the free edge FE3_1 of the third flap 112c, and between the free edge FE2_1 of the second flap 112b and the free edge FE4_3 of the fourth flap 112d, by the second slit 132.

[0137] The mode of operation of the ventilation device 200 of this embodiment is the same as that of the first embodiment mentioned above, and repeated portions will not be redundantly described.

[0138] 16 and 17, the side shape of the vent 130T is different from that of the first embodiment mentioned above. For example, as shown in Figures 16 and 17, in the second mode / open mode M2 ​​(where two adjacent flaps 112 move in opposite directions), the first vent 130T is formed in the direction Z to have a pentagonal shape, and an upper edge of the first vent 131T may be formed from the free edge FE1_1 of the first flap 112a and the free edge FE4_1 of the fourth flap 112d, and two lower edges of the first vent 131T may be formed from the free edge FE2_3 of the second flap 112b and the free edge FE3_2 of the third flap 112c, respectively, without being limited thereto. For example, as shown in Figures 16 and 17, in the second mode / open mode M2, although not limited thereto, the second ventilation opening 132T may be formed in the direction Z to have a pentagonal shape, and the two upper edges of the second ventilation opening 132T may be formed from the free edge FE1_2 of the first flap 112a and the free edge FE4_3 of the fourth flap 112d, respectively, and the lower edge of the second ventilation opening 132T may be formed from the free edge FE2_1 of the second flap 112b and the free edge FE3_1 of the third flap 112c.

[0139] For example, as shown in Figures 16 and 17, but not limited to, in the third mode / comfort mode M3 (in which all of the flaps 112 are bent downward), the first air vent 132T may be formed in direction Z to have two triangular shapes, and the upper edges of the first air vent 131T may be formed from the free edge FE2_3 of the second flap 112b and the free edge FE3_2 of the third flap 112c, respectively, and the lower edges of the first air vent 131T may be formed from the free edge FE1_1 of the first flap 112a and the free edge FE4_1 of the fourth flap 112d, respectively. For example, as shown in Figures 16 and 17, but not limited to, in the third mode M3, the second ventilation opening 132T may be formed in the direction Z to have two triangular shapes, and the upper edge of the second ventilation opening 132T may be formed from the free edge FE1_2 of the first flap 112a and the free edge FE4_3 of the fourth flap 112d, respectively, and the lower edge of the second ventilation opening 132T may be formed from the free edge FE2_1 of the second flap 112b and the free edge FE3_1 of the third flap 112c, respectively.

[0140] 18 and 19, Fig. 18 is a schematic diagram of a top view illustrating a vent device according to a third embodiment of the present invention, and Fig. 19 is a schematic diagram illustrating a side view of the vents of the vent device in a second / open mode according to the third embodiment of the present invention, with Fig. 19 showing a side view of the first vent 131T along direction Y and a side view of the second vent 132T along direction X. As shown in Fig. 18, the difference between this embodiment and the first embodiment is the arrangement of the flaps 112 of the vent device 300.

[0141] 18, the first anchor edge AE1 and the second anchor edge AE2 may be parallel to the direction X, and the third anchor edge AE3, the fourth anchor edge AE4, the fifth anchor edge AE5, and the sixth anchor edge AE6 may be parallel to the direction Y (i.e., the first anchor edge AE1 and the second anchor edge AE2 may be perpendicular to the third anchor edge AE3, the fourth anchor edge AE4, and the fifth anchor edge AE5). In the first flap 112a, the free edge FE1_1 faces the first anchor edge AE1 in the direction Y, and the free edges FE1_2 and FE1_3 face each other in the direction X between the free edge FE1_1 and the first anchor edge AE1. In the second flap 112b, the free edge FE2_1 faces the second anchor edge AE2 in the direction Y, and the free edges FE2_2 and FE2_3 face each other in the direction X between the free edge FE2_1 and the second anchor edge AE2. In the third flap 112c, the free edge FE3_1 faces the third anchor edge AE3 in the direction X, and the free edges FE3_2 and FE3_3 face each other in the direction Y between the free edge FE3_1 and the third anchor edge AE3. In the fourth flap 112d, the free edge FE4_1 faces the fourth anchor edge AE4 in the direction X, and the free edges FE4_2 and FE4_3 face each other in the direction Y between the free edge FE4_1 and the fourth anchor edge AE4. In the fifth flap 112e, the free edge FE5_1 faces the fifth anchor edge AE5 in the direction X, and the free edges FE5_2 and FE5_3 face each other in the direction Y between the free edge FE5_1 and the fifth anchor edge AE5. In the sixth flap 112f, the free edge FE6_1 faces the sixth anchor edge AE6 in the direction X, and the free edges FE6_2 and FE6_3 face each other in the direction Y between the free edge FE6_1 and the sixth anchor edge AE6.

[0142] The first slit 131 may define a free edge FE1_1 of the first flap 112a, a free edge FE2_1 of the second flap 112b, a free edge FE3_2 of the third flap 112c, a free edge FE4_2 of the fourth flap 112d, a free edge FE5_3 of the fifth flap 112e, and a free edge FE6_3 of the sixth flap 112f. The second slit 132 may define a free edge FE1_2 of the first flap 112a, a free edge FE2_2 of the second flap 112b, a free edge FE3_1 of the third flap 112c, and a free edge FE4_1 of the fourth flap 112d. The third slit 133 may define a free edge FE1_3 of the first flap 112a, a free edge FE2_3 of the second flap 112b, a free edge FE5_1 of the fifth flap 112e, and a free edge FE6_1 of the sixth flap 112f. Further, the slits 130 may optionally include a fourth slit 134, a fifth slit 135, a sixth slit 136, and a seventh slit 137 formed around the periphery of the thin film 110 to define the boundary of the thin film 110, the fourth slit 134 may define a free edge FE3_3 of the third flap 112c, the fifth slit 135 may define a free edge FE4_3 of the fourth flap 112d, the sixth slit 136 may define a free edge FE5_2 of the fifth flap 112e, and the seventh slit 137 may define a free edge FE6_2 of the sixth flap 112f.

[0143] In this way, according to the arrangement of the flaps 112 and the arrangement of the slits 130, in FIG. 18, the free edge FE1_1, the free edge FE1_2, and the free edge FE1_3 of the first flap 112a may be adjacent to the second flap 112b, the third flap 112c, and the fifth flap 112e, respectively; the free edge FE2_1, the free edge FE2_2, and the free edge FE2_3 of the second flap 112b may be adjacent to the first flap 112a, the fourth flap 112d, and the sixth flap 112f, respectively; and the free edge FE3_1 and the free edge FE4_2 of the third flap 112c may be adjacent to the first flap 112a, the fourth flap 112d, and the sixth flap 112f. FE3_2 may be adjacent to the first flap 112a and the fourth flap 112d, respectively; the free edges FE4_1 and FE4_2 of the fourth flap 112d may be adjacent to the second flap 112b and the third flap 112c, respectively; the free edges FE5_1 and FE5_3 of the fifth flap 112e may be adjacent to the first flap 112a and the sixth flap 112f, respectively; and the free edges FE6_1 and FE6_3 of the sixth flap 112f may be adjacent to the second flap 112b and the fifth flap 112e, respectively.

[0144] The first ventilation opening 131T may be formed by the first slit 131 between the free edge FE1_1 of the first flap 112a and the free edge FE2_1 of the second flap 112b, between the free edge FE3_2 of the third flap 112c and the free edge FE4_2 of the fourth flap 112d, and between the free edge FE5_3 of the fifth flap 112e and the free edge FE6_3 of the sixth flap 112f. The second ventilation opening 132T may be formed by the second slit 132 between the free edge FE1_2 of the first flap 112a and the free edge FE3_1 of the third flap 112c, and between the free edge FE2_2 of the second flap 112b and the free edge FE4_1 of the fourth flap 112d. The third ventilation opening 133T may be formed by the third slit 133 between the free edge FE1_3 of the first flap 112a and the free edge FE5_1 of the fifth flap 112e, and between the free edge FE2_3 of the second flap 112b and the free edge FE6_1 of the sixth flap 112f.

[0145] The mode of operation of the ventilation device 300 of this embodiment may be the same as that of the first embodiment mentioned above, and therefore the repeated parts will not be redundantly described.

[0146] As shown in FIGS. 18 and 19, the side shape of the vent 130T is different from that of the first embodiment mentioned above. For example, as shown in Figures 18 and 19, but not limited to, in the second mode / open mode M2 ​​(where two adjacent flaps 112 move in opposite directions), the first ventilation opening 131T may be formed in direction Z to have a hexagonal shape, and the three upper edges of the first ventilation opening 131T may be formed from the free edge FE1_1 of the first flap 112a, the free edge FE4_2 of the fourth flap 112d, and the free edge FE6_3 of the sixth flap 112f, respectively, and the three lower edges of the first ventilation opening 131T may be formed from the free edge FE2_1 of the second flap 112b, the free edge FE3_2 of the third flap 112c, and the free edge FE5_3 of the fifth flap 112e, respectively. For example, as shown in Figures 18 and 19, in the second mode M2, although not limited thereto, the second ventilation opening 132T may be formed in the direction Z to have a hexagonal shape, and the two upper edges of the second ventilation opening 132T may be formed from the free edge FE1_2 of the first flap 112a and the free edge FE4_1 of the fourth flap 112d, respectively, and the two lower edges of the second ventilation opening 132T may be formed from the free edge FE2_2 of the second flap 112b and the free edge FE3_1 of the third flap 112c. For example, but not limited to, in the second mode M2, the third ventilation opening 133T may be similar to the second ventilation opening 132T, whereby the third ventilation opening 133T may be formed in the direction Z to have a hexagonal shape, and the two upper edges of the third ventilation opening 133T may be formed from the free edge FE1_3 of the first flap 112a and the free edge FE6_1 of the sixth flap 112f, respectively, and the two lower edges of the third ventilation opening 133T may be formed from the free edge FE2_3 of the second flap 112b and the free edge FE5_1 of the fifth flap 112e.

[0147] For example, in the third mode / comfort mode M3 (in which all of the flaps 112 are bent downward), the second air vent 132T may be formed in the direction Z to have two triangles (similar to the second air vent 132T in the third mode M3 shown in FIG. 17), but is not limited to these, and the upper edge of the second air vent 132T may be formed from the free edge FE1_2 of the first flap 112a and the free edge FE2_2 of the second flap 112b, respectively, and the lower edge of the second air vent 132T may be formed from the free edge FE3_1 of the third flap 112c and the free edge FE4_1 of the fourth flap 112d, respectively. For example, in the third mode M3, the third ventilation opening 133T may be formed in the direction Z to have two triangles (similar to the second ventilation opening 132T in the third mode M3 shown in FIG. 17), although this is not limited thereto, and the upper edge of the third ventilation opening 133T may be formed from the free edge FE1_3 of the first flap 112a and the free edge FE2_3 of the second flap 112b, respectively, and the lower edge of the third ventilation opening 133T may be formed from the free edge FE5_1 of the fifth flap 112e and the free edge FE6_1 of the fifth flap 112e, respectively.

[0148]

[0063] Referring to Figure 20, Figure 20 is a schematic diagram of a top view illustrating a venting device according to a fourth embodiment of the present invention. As shown in Figure 20, the difference between this embodiment and the first embodiment is the design of the first slit 131 of the venting device 400. In Figure 20, the first slit 131 is a saw-shaped slit / zigzag slit, whereby the free edges FE1_1 and FE2_1 are corresponding saw-shaped edges / zigzag edges, the free edges FE3_1 and FE4_1 are corresponding saw-shaped edges / zigzag edges, and the free edges FE5_1 and FE6_1 are corresponding saw-shaped edges / zigzag edges.

[0149] 20, the zigzag pattern of the slits 130 may be a sawtooth pattern, whereby the sawtooth / zigzag edges include multiple units having at least one suitable sub-edge (e.g., straight edge, curved edge, etc.). For example, the units may have two connected sub-edges that are, but are not limited to, straight bevel edges.

[0150] Because their free edges are sawtooth / zigzag edges (the first slit 131 is a sawtooth slit), the length of the first vent 131T is enhanced, which enhances the airflow passing through the first vent 131T and reduces the acoustic resistance of the first vent 131T.

[0151] In the manufacturing method of the ventilation device 400 of this embodiment, the trench lines TL are formed to have a sawtooth shape or a zigzag shape (e.g., in the step shown in FIG. 12 ), causing the associated slits 130 to have a sawtooth shape / zigzag shape. For example, in this embodiment, the trench lines TL corresponding to the first slits 131 are formed to have a sawtooth shape, causing the first slits 131 to have a sawtooth shape / zigzag shape.

[0152] 21, which is a schematic diagram of a plan view illustrating a ventilation device according to a fifth embodiment of the present invention. As shown in FIG. 21, the difference between this embodiment and the fourth embodiment is the design of the other slits 130 of the ventilation device 500. The second slit 132 is a sawtooth slit / zigzag slit, whereby the free edges FE1_2 and FE3_3 have corresponding sawtooth / zigzag edges, and the free edges FE2_2 and FE4_3 have corresponding sawtooth / zigzag edges. The third slit 133 is a sawtooth slit / zigzag slit, whereby the free edges FE1_3 and FE5_2 have corresponding sawtooth / zigzag edges, and the free edges FE2_3 and FE6_2 have corresponding sawtooth / zigzag edges.

[0153] Optionally, the fourth slit 134 may be a sawtooth / zigzag slit, whereby the free edges FE3_2 and FE4_2 are sawtooth / zigzag edges. Optionally, the fifth slit 135 may be a sawtooth / zigzag slit, whereby the free edges FE5_3 and FE6_3 are sawtooth / zigzag edges.

[0154] Therefore, as the number of sawtooth / zigzag edges increases, the lengths of the vents 130T are further enhanced, enhancing the airflow through the vents 130T and reducing the acoustic resistance of the vents 130T.

[0155] Referring to Fig. 22, Fig. 22 is a schematic diagram of a plan view illustrating a ventilation device according to a sixth embodiment of the present invention. As shown in Fig. 22, the difference between this embodiment and the fourth embodiment is the design of the sawtooth edge units of the ventilation device 600. In Fig. 22, the zigzag pattern of the slits 130 may be, but is not limited to, a trapezoidal pattern, whereby a sawtooth edge / zigzag edge unit has three connected sub-edges, two of which may be straight bevel edges, and one sub-edge connected between the two straight bevel edges may be a straight horizontal edge.

[0156] According to the above, at least one sawtooth slit may be used in one of the above-mentioned ventilation devices 100, 200, 300 to form variant embodiments, and the number of sawtooth slits / zigzag slits 130 may be designed based on requirements, and the unit of sawtooth slits / zigzag slits may be designed based on requirements.

[0157] It should be noted that zigzag slits are not limited to being sawtooth or having a sawtooth pattern. The slits formed in the thin film may have a trapezoidal pattern (as in FIG. 22), a rectangular pattern (as in FIG. 23), a sinusoidal pattern (as in FIG. 24), a polynomial pattern (similar to FIG. 24), a tooth pattern, or other suitable patterns, all of which are within the scope of the present invention. A polynomial pattern means that the thin film is patterned to form slits such that the segments of the slits (substantially) conform to a polynomial function.

[0158] More generally, a slit segment formed in a membrane is within the scope of the present invention as long as it has a zigzag pattern in the membrane (which reduces the acoustic resistance corresponding to a vent formed in the membrane compared to a straight slit). Furthermore, the slit 130 may be considered to extend in a certain direction. For example, the first slit 131 may be considered to extend in direction X, and the second slit 132 may be considered to extend in direction Y. The first slit 131 and the second slit 132 shown in FIGS. 21-24 may be considered to have a zigzag pattern in the membrane 110 and to extend in directions X and Y (respectively). In the present invention, a slit segment having a zigzag pattern may refer to (1) that the slit segment does not include a straight slit pattern, or (2) that the slit segment changes / changes direction back and forth, regardless of how frequently the slit direction changes (in spatial domain / dimension).

[0159] In summary, the present invention utilizes a third flap that moves in the opposite direction to the movement of the first flap to widen the vent opening of the second vent, thereby reducing acoustic resistance. Additionally, the present invention utilizes a zigzag slit to increase the slit length, thereby reducing acoustic resistance.

[0160] Those skilled in the art will readily appreciate that numerous modifications and variations of the devices and methods may be made while retaining the teachings of the present invention. Accordingly, the above disclosure should be construed as limited only by the metes and bounds of the appended claims.

Claims

1. A device, the device comprising: An anchor structure; a membrane secured to the anchor structure and configured to form a vent; the thin film divides a space into a first volume and a second volume, and when the vent hole is formed, the first volume and the second volume are connected via the vent hole; a slit is formed in the thin film, the slit forming the vent hole; the slit segments are zigzag in the membrane; device.

2. 10. The device of claim 1, wherein the slits have a zigzag pattern that is a sawtooth pattern, a tooth pattern, a trapezoidal pattern, a rectangular pattern, a sinusoidal pattern, or a polynomial pattern.

3. 1. A method of manufacturing a venting device, the method comprising: providing a wafer including a first layer and a second layer, the first layer including a thin film; patterning the first layer of the wafer to form a zigzag slit, the zigzag slit extending in a zigzag direction in the thin film, the thin film including a first flap and a second flap separated from each other by the zigzag slit; The thin film is configured to be controlled to form a vent, the vent being formed by the zigzag slit. Manufacturing method.

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