Measurement device, measurement method, and program

Abstract

To make it possible to radiate electromagnetic waves toward a measurement target with a simple configuration under various measurement environments.SOLUTION: A measurement device includes a first antenna that outputs electromagnetic waves generated in a signal generating source, a second antenna that receives reflected waves from a measurement object of the electromagnetic waves output from the first antenna, and a control unit that acquires a physical quantity of the measurement object based on the reflected waves received by the second antenna. The control unit acquires the position of the measurement object, determines the frequency of the electromagnetic waves to be output from the first antenna based on the acquired position of the measurement object, and causes the signal generating source to generate electromagnetic waves to output electromagnetic waves of the determined frequency from the first antenna.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a measurement device, a measurement method, and a program. [Background technology]

[0002] Radars using millimeter waves or terahertz waves are known as a technology for measuring the displacement, speed, vibration, etc. of an object by using electromagnetic waves. For example, Patent Document 1 describes a technology related to a terahertz radar using a leaky wave antenna. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2020 / 213525 Summary of the Invention [Problem to be solved by the invention]

[0004] Radars that use electromagnetic waves irradiate an object with electromagnetic waves and measure a desired physical quantity by analyzing the waves reflected from the object. Conventional radars have room for improvement in terms of irradiating electromagnetic waves toward an object with a simple configuration under various measurement environments.

[0005] An object of the present disclosure is to enable electromagnetic waves to be irradiated toward a measurement target with a simple configuration under various measurement environments. [Means for solving the problem]

[0006] In some embodiments, the measurement device comprises: (1) a first antenna that outputs an electromagnetic wave generated by a signal source; a second antenna that receives the electromagnetic wave output from the first antenna and reflected from the measurement target; a control unit that acquires the physical quantity of the measurement target based on the reflected wave received by the second antenna; Equipped with The control unit Acquire the position of the measurement object; determining a frequency of the electromagnetic wave to be output from the first antenna based on the acquired position of the object to be measured; The signal source generates an electromagnetic wave for outputting the electromagnetic wave of the determined frequency from the first antenna.

[0007] In this way, since the measurement device has the first antenna and the second antenna as separate components, it is possible to perform measurements in various environments, for example, by placing a vibrator between the first antenna and the second antenna and operating the device while applying vibration to the object to be measured. Furthermore, since the measurement device automatically determines and outputs the vibration frequency for irradiating the object with electromagnetic waves based on the position of the object to be measured, it is possible to measure physical quantities related to the object to be measured with simple operations.

[0008] In one embodiment, (2) In the measuring device of (1), At least one of the first antenna and the second antenna may be a leaky wave antenna that continuously outputs or receives electromagnetic waves through a transmission line.

[0009] In this way, since the first antenna and the second antenna are leaky wave antennas, it is possible to irradiate the electromagnetic waves in the direction of the object to be measured by adjusting the frequency of the electromagnetic waves.

[0010] In one embodiment, (3) In the measuring device of (1) or (2), The control unit acquiring a distance between the object to be measured and a plane on which the first antenna and the second antenna are installed as a position of the object to be measured; The frequency of the electromagnetic wave to be output from the first antenna may be determined based on the acquired position of the object to be measured.

[0011] In this way, the measurement device determines the frequency of the electromagnetic waves output from the first antenna based on the distance between the plane on which the first and second antennas are installed and the object to be measured, allowing the user to perform measurements on the object to be measured with simple operations.

[0012] In one embodiment, (4) In any of the measuring devices described in (1) to (3), The control unit Acquire the position of the measurement target by FMCW method; The frequency of the electromagnetic wave to be output from the first antenna may be determined based on the acquired position of the object to be measured.

[0013] In this way, the measurement device acquires the position of the object to be measured using the FMCW method and determines the frequency of the electromagnetic waves to be output from the first antenna, allowing the user to perform measurements on the object to be measured with simple operations.

[0014] In one embodiment, (5) In any of the measuring devices described in (1) to (4), The device may further include an analysis unit that performs analysis based on the electromagnetic wave output by the first antenna and the electromagnetic wave received by the second antenna.

[0015] Therefore, the measurement device can acquire a physical quantity related to the measurement target based on the electromagnetic wave output by the first antenna and the electromagnetic wave received by the second antenna.

[0016] In some embodiments, the measurement method includes: (6) a first antenna that outputs an electromagnetic wave generated by a signal generation source; a second antenna that receives the electromagnetic wave output from the first antenna and reflected from the measurement target; a control unit that acquires the physical quantity of the measurement target based on the reflected wave received by the second antenna; A measurement method for a measurement device comprising: The control unit acquiring a position of the measurement object; determining a frequency of the electromagnetic wave to be output from the first antenna based on the acquired position of the object to be measured; causing the signal source to generate an electromagnetic wave for outputting the electromagnetic wave of the determined frequency from the first antenna; Includes:

[0017] As described above, the measurement method uses a measurement device having a first antenna and a second antenna as separate components, and therefore, it is possible to perform measurements in various environments, for example, by placing a vibrator between the first antenna and the second antenna and operating the device while applying vibration to the object to be measured. Furthermore, the measurement method automatically determines and outputs the frequency for irradiating the electromagnetic wave to the object to be measured based on the position of the object to be measured, and therefore, it is possible to measure the physical quantity of the object to be measured with simple operations.

[0018] In some embodiments, the program (6) a first antenna that outputs an electromagnetic wave generated by a signal generation source; a second antenna that receives the electromagnetic wave output from the first antenna and reflected from the measurement target; a control unit that acquires the physical quantity of the measurement target based on the reflected wave received by the second antenna; A measuring device comprising: The control unit acquiring a position of the measurement object; determining a frequency of the electromagnetic wave to be output from the first antenna based on the acquired position of the object to be measured; causing the signal source to generate an electromagnetic wave for outputting the electromagnetic wave of the determined frequency from the first antenna; Execute the following.

[0019] In this way, the program controls a measurement device having a first antenna and a second antenna as separate components, and therefore it is possible to perform measurements in various environments, for example, by placing a vibrator between the first antenna and the second antenna and operating the device while applying vibration to the object to be measured. Furthermore, the program automatically determines and outputs the frequency for irradiating the electromagnetic wave to the object to be measured based on the position of the object to be measured, and therefore it is possible to measure physical quantities related to the object to be measured with simple operations. [Effects of the Invention]

[0020] According to an embodiment of the present disclosure, it is possible to irradiate electromagnetic waves toward a measurement target with a simple configuration under various measurement environments. [Brief explanation of the drawings]

[0021] [Figure 1A] FIG. 10 is a diagram illustrating readjustment of the antenna angle according to a comparative example. [Figure 1B] FIG. 10 is a diagram illustrating readjustment of the antenna angle according to a comparative example. [Figure 1C] FIG. 10 is a diagram illustrating readjustment of the antenna angle according to a comparative example. [Figure 2] FIG. 1 is a diagram illustrating an example of the configuration of a measurement device according to an embodiment. [Figure 3] 3 is a block diagram showing an example of the configuration of the control terminal of FIG. 2. [Figure 4] 3 is a flowchart showing an example of the operation of the measurement device of FIG. 2. DETAILED DESCRIPTION OF THE INVENTION

[0022] <Comparative Example> The millimeter-wave radar serving as the first comparative example includes a millimeter-wave source, a transmitting antenna, and a receiving antenna. The millimeter-wave radar outputs millimeter waves generated by the millimeter-wave source from the transmitting antenna toward the object to be measured. The millimeter-wave radar receives reflected waves from the object to be measured using the receiving antenna. The millimeter-wave radar uses the millimeter waves generated by the millimeter-wave source as a reference signal and mixes the reflected waves received by the receiving antenna using a mixer. The millimeter-wave radar analyzes the signal mixed by the mixer using an A / D (Analog-to-Digital) converter or the like.

[0023] In this configuration, the propagation speed of electromagnetic waves in the air is constant, so millimeter-wave radar can measure the distance to a target based on the time it takes from transmitting millimeter waves to receiving the reflected waves.

[0024] Furthermore, when the measurement target is stationary relative to the millimeter-wave radar, the phase shift between the reflected wave from the measurement target and the reference signal is constant over time, and in this case the signal output from the mixer exhibits a shape similar to a constant DC signal over time.

[0025] On the other hand, if the distance between the millimeter-wave radar and the measurement object changes due to the movement of the measurement object, the optical path length from the transmitting antenna, through the measurement object, to the receiving antenna changes over time. In this case, the phase of the reflected wave from the measurement object changes asynchronously with respect to the reference signal. The signal output from the mixer exhibits a shape similar to an AC signal that changes over time. The millimeter-wave radar can measure the speed of the moving measurement object using the frequency of the signal output from the mixer.

[0026] To measure the speed of a small target with high accuracy using such a millimeter-wave radar, it is necessary to increase the frequency of the electromagnetic waves to improve spatial resolution, while adjusting the angles and positions of the transmitting and receiving antennas to irradiate the electromagnetic waves at the desired position and receive the reflected waves. If the target is moving at a high speed, it may be necessary to readjust the antenna angle during measurement.

[0027] 1A to 1C are diagrams showing readjustment of the antenna angle in a first comparative example. In FIG. 1A, a transmitting antenna 91 and a receiving antenna 92 ​​are configured as horn antennas. The millimeter waves output from the transmitting antenna 91 of the millimeter-wave radar 9 are reflected by a sample S, which is the measurement target. The reflected waves from the sample S reach the receiving antenna 92. Therefore, in the example of FIG. 1A, the millimeter-wave radar 9 can measure the position and velocity of the sample S with high accuracy.

[0028] Now, assume that the sample S is moving. In FIG. 1B, the sample S is moving downward in the drawing, and therefore the millimeter waves output from the transmitting antenna 91 do not reach the sample S. As a result, the receiving antenna 92 ​​cannot receive the reflected waves from the sample S, and the position and speed of the sample S cannot be measured. Therefore, when the sample S moves, the millimeter-wave radar 9 needs to adjust the angles of the transmitting antenna 91 and the receiving antenna 92 ​​according to the position of the sample S, as shown in FIG. 1C.

[0029] As described above, in the first comparative example, it is necessary to mechanically adjust the angle, position, etc. of the transmitting antenna 91 and the receiving antenna 92, which are constituted by horn antennas or the like, according to the position of the measurement target.

[0030] The second comparative example is "an antenna device having a waveguide having an incident end, and a first antenna and a second antenna connected to the waveguide, wherein the first antenna receives at least one of a first signal radiated from the first antenna and reflected externally and returning, and a second signal radiated from the second antenna and reflected externally and returning, in a direction within the first antenna that does not generate returning light to the incident end, and multiplexes the received signal with a first reference light that is not radiated from the first antenna but remains within the first antenna" (Claim 1 of Patent Document 1). In the second comparative example, by configuring the first antenna and the second antenna as leaky wave antennas, the emission angle and reception angle of the electromagnetic wave can be adjusted by sweeping the frequency of the electromagnetic wave.

[0031] The second comparative example uses a leaky wave antenna and can adjust the working distance by sweeping the frequency, without requiring a mechanical angle adjustment mechanism for the antenna. However, in the second comparative example, the transmitting antenna and the receiving antenna are integrated, making it difficult to place a vibration load device such as a vibrator between the two antennas. As a result, it is difficult to perform measurements in a measurement environment where vibration is applied to the sample S in the second comparative example.

[0032] As described above, the configuration according to the comparative example has room for improvement in terms of irradiating electromagnetic waves toward a measurement target with a simple configuration under various measurement environments.

[0033] <Embodiment> Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. In each drawing, parts having the same configuration or function are denoted by the same reference numerals. In the description of this embodiment, duplicated descriptions of the same parts may be omitted or simplified as appropriate.

[0034] 2 is a diagram showing an example of the configuration of a measurement device 1 according to an embodiment. The measurement device 1 measures physical quantities such as the position, velocity, and vibration of a sample S that is a measurement target. The measurement device 1 includes a signal source 10, a divider 20, coaxial cables 31, 32, and 35, waveguides 33 and 34, a frequency multiplier 41, leaky wave antennas 51 and 52, a mixer 60, a spectrum analyzer 70, a communication cable 75, and a control terminal 80. The mixer 60 includes a mixer circuit 61 and a frequency multiplier 42.

[0035] In FIG. 2, the emission angle A1 of the electromagnetic wave emitted from the leaky-wave antenna 51 and the incidence angle A2 of the electromagnetic wave received by the leaky-wave antenna 52 are determined by the frequency of the electromagnetic wave and the hardware structure of the leaky-wave antenna 51. The hardware structure of the leaky-wave antenna 51 includes the presence or absence of a diffraction grating in the leaky-wave antenna 51 and the shape of the diffraction grating. The diffraction grating may be formed, for example, by protrusions, slits, or other elements in addition to metal strips. Furthermore, the diffraction grating may have any pattern capable of diffracting light waves, such as a ladder pattern, a corrugated pattern, or a meander pattern, in addition to a branch pattern. Therefore, the measuring device 1 determines the emission angle A1 and the incidence angle A2 in advance based on the antenna distance D1 and the working distance D2, sets an appropriate frequency in the signal source 10, and then turns on the electromagnetic wave output from the signal source 10 at an appropriate power. Details of how the frequency is determined depending on the relative positions of the sample S and the leaky-wave antennas 51 and 52 will be described later with reference to FIG. 4.

[0036] The signal source 10 outputs an electromagnetic wave of a predetermined frequency to the divider 2 under the control of the control terminal 80 .

[0037] The divider 2 divides the electromagnetic wave output from the signal source 10 at an appropriate power ratio and inputs the divided waves to the coaxial cables 31 and 32 .

[0038] The coaxial cable 31 inputs the electromagnetic waves input from the divider 20 to the frequency multiplier 41. The frequency multiplier 41 multiplies the frequency of the electromagnetic waves input from the coaxial cable 31 by a constant number (N). The frequency multiplier 41 inputs the frequency-multiplied electromagnetic waves into the waveguide 33.

[0039] The waveguide 33 inputs the frequency-multiplied electromagnetic wave to the leaky wave antenna 51 .

[0040] The leaky-wave antenna 51 as the first antenna is an antenna that synthesizes a highly directional beam with a linear phase delay by continuously leaking waves propagating along a transmission line into the air and outputting the waves. The leaky-wave antenna 51 may output a carrier wave of a desired frequency, for example, an electromagnetic wave in the sub-terahertz band.

[0041] In the configuration example of FIG. 2, the measurement device 1 multiplies the frequency of the electromagnetic wave output from the signal source 10 in the frequency multiplier 41 just before transmitting the electromagnetic wave from the leaky wave antenna 51 into space, and outputs an electromagnetic wave of a desired carrier frequency toward the sample S. Generally, when an electromagnetic wave of a constant frequency passes through a dielectric, a dielectric loss occurs in which electrical energy is converted into heat and lost. It is known that such dielectric loss increases as the frequency of the electromagnetic wave increases. In the configuration example of FIG. 2, the effect of such dielectric loss is reduced by placing the frequency multiplier 41 just before the leaky wave antenna 51. The waveguide 33 between the leaky wave antenna 51 on the signal generation side and the frequency multiplier 41 may be short and made of a material with low propagation loss for high-frequency electromagnetic waves.

[0042] The electromagnetic wave output from the leaky wave antenna 51 enters the sample S at an incident angle equal to the output angle A1. The output angle A1 is the angle between the direction perpendicular to the surface of the leaky wave antenna 51 that outputs the electromagnetic wave and the output direction of the electromagnetic wave.

[0043] The electromagnetic wave reflected by the sample S reaches the leaky wave antenna 52 on the receiving side at an incident angle A2. Incident angle A2 is the angle between the direction perpendicular to the surface of leaky wave antenna 52 that receives the electromagnetic wave and the incident direction of the electromagnetic wave. Below, we will explain an example in which leaky wave antennas 51 and 52 are installed on the same surface and sample S is installed at equal distances from leaky wave antennas 51 and 52. In this case, exit angle A1 and incident angle A2 are the same.

[0044] The electromagnetic wave that reaches the leaky wave antenna 52 serving as the second antenna is input to the mixer 60 via the waveguide 34 as an RF (Radio Frequency) signal.

[0045] The leaky wave antennas 51 and 52 may be configured so that the user can freely set the inter-antenna distance D1, which is the distance between them, and the working distance D2, which is the distance between the plane on which the leaky wave antennas 51 and 52 are installed and the sample S. This allows the user to measure the sample S in various environments. For example, the user can install a vibrator between the leaky wave antennas 51 and 52 and perform measurements while applying vibrations to the sample S.

[0046] On the other hand, the coaxial cable 32 inputs the other signal branched by the divider 20 to a frequency multiplier 42 inside the mixer 60 as a reference LO (Local Oscillator) signal.

[0047] In the mixer 60, the frequency multiplier 42 multiplies the frequency of the electromagnetic wave input from the coaxial cable 32 by the same constant (N) as the frequency multiplier 41. The mixer circuit 61 of the mixer 60 mixes the RF signal input from the waveguide 34 with a reference LO signal and outputs an IF (Intermediate Frequency) signal to the coaxial cable 35. The mixer circuit 61 may calculate the difference between the RF signal and the reference LO signal and output a low-frequency component signal of the RF signal as an IF signal. In other words, the signal mixed by the mixer 60 is down-converted and output as an IF signal. For example, if the carrier frequency of the RF signal is 1.1 THz and the frequency of the reference LO signal is 1.0 THz, the frequency of the IF signal output from the mixer 60 is 0.1 THz (=1.1 THz-1.0 THz). If the sample S is moving during measurement by the measurement device 1, the mixer 60 outputs an AC signal as the IF signal.

[0048] The IF signal output from the mixer 60 is input to the spectrum analyzer 70 via the coaxial cable 35 .

[0049] The spectrum analyzer 70 performs spectrum analysis of the input IF signal and measures physical quantities such as the position, velocity, and vibration of the sample S. The spectrum analyzer 70 transmits the analysis results to the control terminal 80 via a communication cable 75.

[0050] The control terminal 80 is connected to the signal generation source 10 and the spectrum analyzer 70 via a communication cable 75 so that they can communicate with each other. The communication cable 75 is a cable for communication via a LAN (Local Area Network), a USB (Universal Serial Bus), a GPIB (General Purpose Interface Bus), a DIO (Digital Input / Output), etc., but is not limited to these. The control terminal 80 may also be connected to the signal generation source 10 and the spectrum analyzer 70 so that they can communicate with each other via wireless communication such as a wireless LAN or Bluetooth (registered trademark). The control terminal 80 controls the operation of the signal generation source 10 and the spectrum analyzer 70 via the communication cable 75.

[0051] The control terminal 80 outputs the analysis results regarding the sample S received via the communication cable 75 to an output unit 85, which will be described later.

[0052] 2, the measurement device 1 is equipped with a separate leaky wave antenna 51 on the transmitting side and a leaky wave antenna 52 on the receiving side. Therefore, it is easy to perform measurements in a measurement environment in which a vibration load device such as a vibrator is placed between the leaky wave antennas 51 and 52 to apply vibration to the sample S.

[0053] Furthermore, as will be described later, the traveling direction of the electromagnetic wave L output from the leaky wave antenna 51 changes depending on the frequency of the electromagnetic wave L. Therefore, the measurement device 1 determines the frequency of the electromagnetic wave to be output from the leaky wave antenna 51 based on the position of the measurement target, and outputs the electromagnetic wave of the determined frequency to the signal generating source 10. Therefore, the measurement device 1 can perform reflection measurement of the electromagnetic wave by adjusting the working distance to the target to which the electromagnetic wave is to be directed, even without a mechanical angle adjustment mechanism for the antenna.

[0054] Therefore, the measurement device 1 can irradiate the sample S with electromagnetic waves in a variety of measurement environments with a simple configuration.

[0055] 3 is a block diagram showing an example of the configuration of the control terminal 80 of FIG. 2. The control terminal 80 is one or more computer devices that can communicate with each other. The control terminal 80 is not limited to these, and may be any general-purpose electronic device such as a PC (Personal Computer) or a tablet, or may be another dedicated electronic device. As shown in FIG. 3, the control terminal 80 includes a control unit 81, a storage unit 82, a communication unit 83, an input unit 84, and an output unit 85.

[0056] The control unit 81 includes one or more processors. In one embodiment, the "processor" may be, but is not limited to, a general-purpose processor or a dedicated processor specialized for a particular process. The control unit 81 is communicably connected to each component of the control terminal 80 and controls the operation of the entire control terminal 80.

[0057] The storage unit 82 includes any storage module, such as a hard disk drive (HDD), a solid state drive (SSD), a read-only memory (ROM), and a random access memory (RAM). The storage unit 82 may function as, for example, a main storage device, an auxiliary storage device, or a cache memory. The storage unit 82 stores any information used in the operation of the control terminal 80. For example, the storage unit 82 may store system programs, application programs, and various information received by the communication unit 83. The storage unit 82 is not limited to being built into the control terminal 80, but may also be an external database or an external storage module.

[0058] The communication unit 83 includes any communication module that can communicate with other devices such as the signal generator 10 and the spectrum analyzer 70 using any communication technology. The communication unit 83 may further include a communication control module for controlling communication with other devices, and a storage module for storing communication data such as identification information required for communication with other devices.

[0059] The input unit 84 includes one or more input interfaces that receive input operations from an operator and acquire input information based on the operator's operations. For example, the input unit 84 may be, but is not limited to, a physical key, a capacitance key, a pointing device, a touch screen that is integrated with the display of the output unit 85, or a microphone that receives voice input.

[0060] The output unit 85 includes one or more output interfaces that output information to the operator and notify the operator. For example, the output unit 85 is, but is not limited to, a display that outputs information as an image or a speaker that outputs information as sound. Such a display may be, for example, a liquid crystal panel display or an organic EL (Electro Luminescence) display. At least one of the input unit 84 and the output unit 85 may be configured integrally with the control terminal 80 or may be provided separately.

[0061] The functions of the control terminal 80 can be realized by executing a computer program (program) according to this embodiment on a processor included in the control unit 81. In other words, the functions of the control terminal 80 can be realized by software. The computer program causes a computer to execute the processing of steps included in the operation of the control terminal 80, thereby causing the computer to realize the functions corresponding to the processing of each step. In other words, the computer program is a program for causing a computer to function as the control terminal 80 according to this embodiment. The computer program may be recorded on a computer-readable recording medium. Programs include information used for processing by an electronic computer that is equivalent to a program. For example, data that is not a direct instruction to a computer but has properties that define computer processing falls under the category of "something equivalent to a program."

[0062] Some or all of the functions of the control terminal 80 may be realized by a dedicated circuit included in the control unit 81. In other words, some or all of the functions of the control terminal 80 may be realized by hardware. Furthermore, the control terminal 80 may be realized by a single computer or by multiple computers working together.

[0063] At least one of the signal generating source 10 and the spectrum analyzer 70 may have part or all of the configuration and functions of the control terminal 80. For example, the signal generating source 10 and the spectrum analyzer 70 may have the same configuration and functions as at least one of the control unit 81, the storage unit 82, the communication unit 83, the input unit 84, and the output unit 85.

[0064] The operation of the measurement device 1 will be described with reference to Fig. 4. Fig. 4 is a flowchart showing an example of the operation of the measurement device 1 of Fig. 2. The operation of the measurement device 1 described with reference to Fig. 4 may correspond to one of the measurement methods of the measurement device 1. The operation of each step in Fig. 4 may be performed under the control of the control unit 81 of the control terminal 80. If the signal generating source 10 and the spectrum analyzer 70 are equipped with processors, the operation of at least one of the steps in Fig. 4 may be performed under the control of these processors.

[0065] In step S1, the control unit 81 acquires the position of the sample S to be measured. For example, if the working distance D2 is fixed, the control unit 81 may receive input of the antenna distance D1 from the user and acquire the input antenna distance D1 as the position of the sample S. Alternatively, the control unit 81 may receive input of the exit angle A1 and the incident angle A2 from the user and acquire the input exit angle A1 and incident angle A2 as the position of the sample S.

[0066] Alternatively, the control unit 81 may automatically detect at least one of the antenna distance D1, the working distance D2, the emission angle A1, and the incident angle A2, and acquire the position of the sample S based on the detection results. For example, the control unit 81 may acquire the position of the sample S using a frequency modulated continuous wave (FMCW) radar system, which outputs electromagnetic waves while changing the frequency and detects the position of the sample S from the frequency of the received waves reflected by the sample S. Specifically, the control unit 81 may output electromagnetic waves from the leaky wave antenna 51 and detect the position of the sample S from the frequency of the electromagnetic waves received by the leaky wave antenna 52. Alternatively, a sensor may be separately provided to detect at least one of the antenna distance D1, the working distance D2, the emission angle A1, and the incident angle A2, and the control unit 81 may acquire the position of the sample S based on the detection results of this sensor.

[0067] In step S2, the control unit 81 adjusts the frequency f of the electromagnetic wave output from the leaky wave antenna 51 based on the position of the sample S to be measured. o Here, when a diffraction grating is formed in the leaky wave antenna 51, the output angle A1, the wave number k0 in the air, the wave number k in the waveguide (leaky wave antenna 51) are determined. g , and the wave number k of the periodic scatterer (diffraction grating) p is known to be related by equation (1). k0sin(A1)=k g +nk p (1) where n is an integer.

[0068] When no diffraction grating is formed in the leaky wave antenna 51, the output angle A1, the wave numbers k0 and k g is known to be related by equation (2). k0sin(A1)=k g (2)

[0069] Therefore, the control unit 81 calculates the emission angle A1 based on the position of the sample S to be measured, and determines the frequency f of the electromagnetic wave to be supplied to the leaky wave antenna 51 using equation (1) or (2) depending on whether or not a diffraction grating is present in the leaky wave antenna 51. g where the wave numbers k0 and k g , and k p The relationship between the wave numbers k0 and k1 is previously acquired and stored in the storage unit 82 or the like. g , and k p Using the above relationship, the frequency f of the electromagnetic wave to be output from the leaky wave antenna 51 is calculated based on the output angle A1. o may be determined.

[0070] In step S3, the control unit 81 adjusts the frequency f determined in step S2. o The control unit 81 outputs the electromagnetic waves having the wave number k0 and the wave number k g From the above relationship, the frequency f of the electromagnetic wave to be supplied to the leaky wave antenna 51 is g Determine the frequency f g Alternatively, the signal source 10 may be caused to output an electromagnetic wave that is 1 / N of the above.

[0071] In step S4, the control unit 81 causes the leaky wave antenna 52 to receive the reflected wave from the sample S. The signal of the reflected wave is observed as an RF signal.

[0072] In step S5, the control unit 81 causes the mixer 60 to perform mixing of the RF signal based on the LO reference signal to obtain an IF signal. Specifically, the control unit 81 may cause the mixer 60 to perform mixing of the RF signal using the signal of the signal generating source 10 multiplied by the frequency multiplier 42 as the LO reference signal.

[0073] In step S6, the control unit 81 acquires desired physical quantities such as the position, velocity, and vibration of the sample S based on the IF signal, which is the signal of the reflected wave that has been mixed in step S5. The control unit 81 may acquire the physical quantities by having the spectrum analyzer 70 analyze the IF signal. The control unit 81 may display the physical quantities acquired as a result of the analysis of the IF signal on the display of the output unit 85 or store them in the memory unit 82. After completing the processing of step S6, the control unit 81 terminates the processing of the flowchart.

[0074] As described above, the measuring device 1 applies radar technology using the leaky wave antennas 51 and 52, and is able to adjust the working distance D2 and the like without a mechanical angle adjustment mechanism for the antenna.

[0075] 2, the measurement device 1 includes leaky wave antennas 51 and 52 as both the transmitting and receiving antennas. However, the transmitting and receiving antennas may include, for example, horn antennas. For example, if a sufficient exit angle A1 or incident angle A2 cannot be achieved by frequency sweeping, the measurement device 1 may configure one of the leaky wave antennas 51 and 52 as a horn antenna and include a movable part for moving the orientation of the horn antenna. With this configuration, it is possible to measure the physical quantity of the sample S even if the sample S is positioned in a direction that makes it difficult to irradiate the electromagnetic wave by frequency sweeping.

[0076] Furthermore, the measurement device 1 controls the emission angle A1 of the electromagnetic wave from the leaky wave antenna 51 and the incidence angle A2 of the electromagnetic wave to the leaky wave antenna 52 by changing the frequency of the electromagnetic wave output from the signal generating source 10. Therefore, the measurement device 1 can measure physical quantities of the sample S in various directions without having a mechanical adjustment mechanism. The physical quantities may be, for example, at least one of the displacement (position), movement speed, and vibration (e.g., amplitude, vibration frequency, etc.) of the measurement target.

[0077] Furthermore, the measuring device 1 may determine the electromagnetic wave frequency of the carrier wave by calculating in advance one or more of the emission angle A1 of the leaky wave antenna 51 on the transmitting side and the incidence angle A2 of the leaky wave antenna 52 on the receiving side from the working distance D2 to the measurement target. With this configuration, the measuring device 1 can quickly determine the frequency of the carrier wave.

[0078] Furthermore, the measurement device 1 may calculate the working distance D2 using the FMCW method. With this configuration, it is possible to irradiate the sample S with an electromagnetic wave without the user having to manually measure and input the working distance D2.

[0079] The present disclosure is not limited to the above-described embodiments. For example, multiple blocks shown in the block diagrams may be integrated, or one block may be divided. Multiple steps shown in the flowcharts may be executed in parallel or in a different order depending on the processing capabilities of the device executing each step, or as needed, instead of being executed in chronological order as described. Other modifications are possible without departing from the spirit of the present disclosure. [Explanation of symbols]

[0080] 1. Measuring equipment 10 Signal Source 20 Divider 31, 32, 35 Coaxial cable 33, 34 Waveguide 41, 42 Frequency multiplier 51, 52 Leaky wave antenna 60 Mixer 61 Mixer Circuit 70 Spectrum Analyzer 75 Communication Cable 80 Control Terminal 9. Millimeter wave radar 91 Transmitting Antenna 92 receiving antenna A1 Output angle A2 angle of incidence D1 Antenna distance D2 working distance S sample

Claims

1. a first antenna that outputs an electromagnetic wave generated by a signal source; a second antenna that receives the electromagnetic wave output from the first antenna and reflected from a measurement target; a control unit that acquires the physical quantity of the measurement target based on the reflected wave received by the second antenna; Equipped with The control unit Acquire the position of the measurement object; determining a frequency of the electromagnetic wave to be output from the first antenna based on the acquired position of the object to be measured; causing the signal source to generate an electromagnetic wave for outputting the electromagnetic wave of the determined frequency from the first antenna; Measuring device.

2. The measuring device according to claim 1 , wherein at least one of the first antenna and the second antenna is a leaky wave antenna that continuously outputs or receives an electromagnetic wave through a transmission line.

3. The control unit acquiring a distance between the object to be measured and a plane on which the first antenna and the second antenna are installed as a position of the object to be measured; determining a frequency of the electromagnetic wave to be output from the first antenna based on the acquired position of the measurement target; 3. The measuring device according to claim 1 or 2.

4. The control unit Acquire the position of the measurement object by the FMCW method; determining a frequency of the electromagnetic wave to be output from the first antenna based on the acquired position of the measurement target; 3. The measuring device according to claim 1 or 2.

5. The measurement device according to claim 1 , further comprising an analysis unit that performs analysis based on the electromagnetic wave output by the first antenna and the electromagnetic wave received by the second antenna.

6. a first antenna that outputs an electromagnetic wave generated by a signal source; a second antenna that receives the electromagnetic wave output from the first antenna and reflected from a measurement target; a control unit that acquires the physical quantity of the measurement target based on the reflected wave received by the second antenna; A measurement method for a measurement device comprising: The control unit acquiring a position of the measurement object; determining a frequency of the electromagnetic wave to be output from the first antenna based on the acquired position of the measurement object; causing the signal source to generate an electromagnetic wave for outputting the electromagnetic wave of the determined frequency from the first antenna; , including, a measurement method.

7. a first antenna that outputs an electromagnetic wave generated by a signal source; a second antenna that receives the electromagnetic wave output from the first antenna and reflected from a measurement target; a control unit that acquires the physical quantity of the measurement target based on the reflected wave received by the second antenna; A measuring device comprising: The control unit acquiring a position of the measurement object; determining a frequency of the electromagnetic wave to be output from the first antenna based on the acquired position of the object to be measured; causing the signal source to generate an electromagnetic wave for outputting the electromagnetic wave of the determined frequency from the first antenna; A program that executes.

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