Regulating valve

Abstract

To provide a regulating valve that is able to improve the responsiveness of a change in output pressure with a change in signal pressure.SOLUTION: A regulating valve 1 includes: a signal pressure acquisition unit 2 that acquires a supply pressure supplied from an external unit, as a signal pressure corresponding to an electric signal; and a booster 3 that regulates an output pressure using the signal pressure as an input. The booster 3 includes: booster body 31 made of metal; an input plate 34 that applies a signal pressure; an output plate 36 that applies an output pressure; an input diaphragm 33 that separates a space on a signal-pressure side from a space on an atmospheric- pressure side; an output diaphragm 35 that separates an atmospheric-pressure-side space from an output-pressure-side space; and a movable body 37 movable based on the signal pressure applied to the input plate 34. The movable body 37 has a lower poppet-valve 372A made of metal and disposed so as to close a communication hole 314A allowing communication between a supply-pressure-side space defined in the booster body 31 and the output-pressure-side space.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a regulator valve that regulates an output pressure in response to an electrical signal. [Background technology]

[0002] Conventionally, there is known a regulating valve that acquires a supply pressure supplied from an external source as a signal pressure corresponding to an electric signal and adjusts an output pressure using this signal pressure as an input. For example, the regulating valve described in Patent Document 1 includes an electromagnetic nozzle flapper that acquires a supply pressure supplied from an external source as a signal pressure corresponding to an electric signal, and a booster (valve body) that adjusts an output pressure using this signal pressure as an input. An electromagnetic nozzle flapper comprises a nozzle that ejects gas by applying a supply pressure supplied from an external source, and a flapper that moves toward or away from the nozzle outlet in response to an electrical signal, and acquires the back pressure of the nozzle, which changes depending on the distance between the nozzle and the flapper, as a signal pressure.

[0003] The booster comprises a pressure plate (hereinafter referred to as the first pressure plate) that applies the signal pressure obtained by the electromagnetic nozzle flapper, a receiving plate (hereinafter referred to as the second pressure plate) that is fixed to the first pressure plate and applies the output pressure, an input diaphragm that is connected to the booster housing and the first pressure plate and separates the space on the signal pressure side from the space on the atmospheric pressure side, an output diaphragm that is connected to the booster housing and the second pressure plate and separates the space on the atmospheric pressure side from the space on the output pressure side, and a pressure plate (hereinafter referred to as the movable body) that moves based on the signal pressure applied to the first pressure plate. Here, the movable body is connected to a poppet via multiple rods, and the poppet has an O-ring arranged to close a communication hole connecting a space on the supply pressure side and a space on the output pressure side. The movable body moves based on the signal pressure applied to the first pressure plate, so that the poppet moves toward or away from the communication hole based on changes in the signal pressure. The adjusting valve can move the poppet away from the communication hole by increasing the signal pressure, allowing supply pressure to flow into the space on the output pressure side and ultimately increasing the output pressure. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-347745 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the adjusting valve described in Patent Document 1, the O-ring in the poppet closes the communication hole connecting the supply pressure space and the output pressure space, so when the signal pressure is increased to move the poppet away from the communication hole, the O-ring continues to close the communication hole until its elastic deformation returns to normal. Therefore, during this time, the output pressure cannot be increased, and the responsiveness of the output pressure to changes in the signal pressure also decreases.

[0006] An object of the present invention is to provide a regulating valve that can improve the responsiveness of a change in output pressure to a change in signal pressure. [Means for solving the problem]

[0007] The regulating valve of the present invention is a regulating valve comprising a signal pressure acquiring means for acquiring supply pressure supplied from the outside as a signal pressure corresponding to an electrical signal, and a booster for adjusting an output pressure using the signal pressure as an input, wherein the booster comprises a metal housing, a first pressure plate for applying the signal pressure, a second pressure plate fixed to the first pressure plate and applying an output pressure, an input diaphragm connected to the housing and the first pressure plate and separating a space on the signal pressure side from a space on the atmospheric pressure side, an output diaphragm connected to the housing and the second pressure plate and separating a space on the atmospheric pressure side from a space on the output pressure side, and a movable body that moves based on the signal pressure applied to the first pressure plate, wherein the housing has a communication hole that connects the space on the supply pressure side with the space on the output pressure side, and the movable body has a metal blocking portion arranged to block the communication hole.

[0008] With this configuration, the communication hole connecting the supply pressure side space and the output pressure side space and the closing portion of the movable body are both made of metal, so compared to closing the communication hole with an elastic member such as an O-ring, the regulating valve can quickly move the closing portion away from the communication hole by increasing the signal pressure, thereby improving the responsiveness of the regulating valve in terms of changes in output pressure to changes in signal pressure.

[0009] In the present invention, the closing portion is preferably a conical poppet valve that closes the communication hole.

[0010] According to this configuration, the blocking portion is a conical poppet valve that blocks the communication hole, so that the poppet valve can be easily centered with respect to the communication hole, which in turn makes it easier to assemble the booster.

[0011] In the present invention, it is preferable that the signal pressure acquisition means comprises a nozzle that applies supply pressure to eject gas, and a bimorph that moves toward or away from the nozzle outlet in response to an electrical signal, and that the back pressure of the nozzle, which changes in response to the distance between the nozzle and the bimorph, is acquired as the signal pressure.

[0012] Here, a bimorph is a structure in which two pieces of piezoelectric ceramic are bonded together in the same polarization direction, and when one end (base end) is fixed and a voltage is applied, this voltage causes one piezoelectric ceramic to expand and the other piezoelectric ceramic to contract, thereby displacing the other end (tip). This bimorph is lighter and smaller than the electromagnetic nozzle flapper mentioned above, and has excellent responsiveness to changes in electrical signals. Therefore, according to the present invention, the signal pressure acquisition means acquires the nozzle back pressure, which changes depending on the distance between the nozzle and the bimorph, as the signal pressure. Therefore, compared to acquiring the signal pressure using the electromagnetic nozzle flapper described in Patent Document 1, the adjustment valve can be made lighter and smaller, and the responsiveness of changes in signal pressure to changes in the electrical signal can be further improved.

[0013] In the present invention, it is preferable that the signal pressure acquisition means includes an orifice arranged in the flow path of the supply pressure leading to the nozzle, and that the bimorph is positioned at a predetermined distance from the nozzle when no electrical signal is applied.

[0014] With this configuration, when no electrical signal is applied, the bimorph is disposed at a predetermined distance from the nozzle (normally open), so compared to when it is disposed in contact with the nozzle (normally closed), the adjustment valve can lower the output pressure, making it suitable for use in applications where an adjustment valve is required at low output pressure, such as semiconductor exposure devices and laser processing machines. Also, because the signal pressure acquiring means includes an orifice disposed in the flow path of the supply pressure leading to the nozzle, the adjustment valve can suppress the flow rate of gas flowing out of the nozzle even when a normally open bimorph is used. [Brief explanation of the drawings]

[0015] [Figure 1] 1 is a cross-sectional schematic diagram of a regulating valve according to an embodiment of the present invention; [Figure 2] Schematic diagram of the unit body seen from the input port side [Figure 3] Schematic diagram showing the flow path of the supply pressure supplied from the supply port [Figure 4] Schematic diagram showing the flow path of the output pressure output from the output port [Figure 5] Schematic diagram showing the atmospheric pressure flow path leading to the exhaust port DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a cross-sectional schematic diagram of a regulating valve according to one embodiment of the present invention. In Fig. 1, the upward direction on the paper is defined as the +Z axis direction, and two axes perpendicular to the Z axis are defined as the X and Y axes. This also applies to the following drawings. As shown in FIG. 1, the adjusting valve 1 is provided on the +Z-axis direction side and includes a signal pressure acquisition unit 2 (signal pressure acquisition means) that acquires the supply pressure supplied from the outside as a signal pressure corresponding to an electrical signal, and a booster 3 that is attached to the -Z-axis direction side of the signal pressure acquisition unit 2 and adjusts the output pressure using the signal pressure as an input, and is formed in an approximately rectangular parallelepiped shape overall.

[0017] The signal pressure acquisition unit 2 includes a unit body 21 formed in a substantially rectangular parallelepiped shape, and a bimorph unit 22 attached to the +Z-axis direction side of the unit body 21. The unit body 21 includes an input port INP1 formed on the upper surface on the +Z-axis direction side, an input flow path 211 formed to penetrate from the input port INP1 along the Z-axis direction, and an input recess 212 with a circular cross section formed on the -Z-axis direction side of the input flow path 211. The unit body 21 also includes a side input flow path 213 formed to penetrate from a midpoint of the input flow path 211 toward the -Y-axis direction side, and an input-side supply flow path 214 formed to penetrate further from the side input flow path 213 toward the -Y-axis direction and then formed to penetrate along the Z-axis direction. The unit body 21 also includes a filter 215 arranged to separate the side input flow path 213 and the input supply flow path 214, and an orifice 216 provided on the side input flow path 213 side of the filter 215. 1 illustrates a cross section of the regulating valve 1 cut through the center of the input recess 212, but for the sake of explanation, the flow paths for the supply pressure, signal pressure, output pressure, and atmospheric pressure are illustrated. Each of the flow paths will be described in detail later.

[0018] The bimorph unit 22 is attached so as to cover the input port INP1 of the unit main body 21, and comprises a nozzle 221 having an outlet at its end in the +Z-axis direction, a bimorph 222 that is positioned at a predetermined distance from the outlet of the nozzle 221 when no electrical signal is applied, two fixing bars 223 that support one end of the bimorph 222, and fixing screws 224 that fix each fixing bar 223 to the unit main body 21.

[0019] Fig. 2 is a schematic diagram of the unit main body as viewed from the input port side. Note that Fig. 2 shows a portion of the unit main body 21 in a see-through manner to show the relationship between the input port INP1, the side input flow path 213, the input-side supply flow path 214, and the bimorph 222. Also, Fig. 2 does not show the fixing bar 223. 2, the unit body 21 has screw holes 217 into which the above-mentioned fixing screws 224 are screwed. The unit body 21 is fixed to the booster 3 by bolts 218 at the four corners.

[0020] The unit body 21 also has an input port INP2 formed on the −X-axis direction side of the aforementioned input port INP1. This input port INP2 communicates with an input flow path formed to penetrate along the Z-axis direction, and communicates with the input flow path 211 via a horizontal hole 211A formed midway along the input flow path 211. As described above, when one end (base end) of the bimorph 222 is fixed and a voltage is applied, the voltage causes one piezoelectric ceramic to expand and the other piezoelectric ceramic to contract, displacing the other end (tip). The amount of displacement increases toward the tip. Therefore, the unit body 21 can select the gain of the signal pressure corresponding to the electrical signal by attaching a nozzle 221 to either the input port INP1 or the input port INP2. In this embodiment, as described above, the nozzle 221 is attached to the input port INP1.

[0021] As shown in FIG. 1, the booster 3 includes a booster body 31 (housing) made of metal and formed in a substantially rectangular parallelepiped shape, and a cover 32 attached to the booster body 31 on the −Z axis direction side. The booster main body 31 has three ports formed on its side surface on the −Y axis direction side. Specifically, the booster main body 31 has a supply port SUP formed on the −Z axis direction side, an output port OUT formed on the +Z axis direction side of the supply port SUP, and an exhaust port EXH formed on the +Z axis direction side of the output port OUT.

[0022] The booster main body 31 also includes an upper recess 311 formed on the top surface on the +Z axis direction side and having a circular cross section facing the input recess 212 of the unit main body 21, and a small-diameter recess 312 formed in communication with the -Z axis direction side of the upper recess 311 and having a circular cross section with a smaller diameter than the upper recess 311. The booster main body 31 also includes an intermediate recess 313 formed in communication with the -Z axis direction side of the small-diameter recess 312 and having a circular cross section with approximately the same diameter as the upper recess 311, and a lower recess 314 formed on the bottom surface on the -Z axis direction side and having a circular cross section with approximately the same diameter as the upper recess 311 and the intermediate recess 313.

[0023] The booster body 31 also includes an input diaphragm 33 attached to the booster body 31 so as to close the upper recess 311, an input plate 34 attached to the input diaphragm 33 in the -Z axis direction, an output diaphragm 35 attached to the booster body 31 so as to close the small diameter recess 312, and an output plate 36 attached to the output diaphragm 35 in the -Z axis direction. The input plate 34 includes a disk-shaped input plate body 341 that defines the area of ​​the input diaphragm 33, and a center boss 342 that protrudes from the input plate body 341 toward the −Z-axis direction. The output plate 36 comprises a hollow disk-shaped output plate main body 361 that defines the area of ​​the output diaphragm 35, and a cylindrical portion 362 that protrudes from the output plate main body 361 toward the +Z axis direction and fits inside the center boss 342. The input plate 34 and the output plate 36 are fixed to each other and sandwich the output diaphragm 35 therebetween.

[0024] The space in the booster body 31 separated by the input diaphragm 33 and the output diaphragm 35 communicates with the exhaust port EXH described above, and is maintained at a pressure equal to atmospheric pressure. Furthermore, the space of the intermediate recess 313 separated by the output diaphragm 35 communicates with the aforementioned output port OUT, and also communicates with the space of the lower recess 314 via the multiple round holes 315. In other words, the intermediate recess 313, the lower recess 314, and the multiple round holes 315 communicate with the output port OUT. Here, the booster main body 31 is provided with an O-ring 316 attached along the outer edge of the output diaphragm 35 on the +Z-axis direction side. This O-ring 316 has the function of sealing the exhaust port EXH and the output port OUT.

[0025] The booster main body 31 also includes a movable body 37 arranged across the intermediate recess 313 and the lower recess 314, and a zero-point adjustment spring 38 that urges the movable body 37 toward the output plate 36 on the +Z-axis direction side. Here, the lower recess 314 is formed to communicate with the −Z axis direction side and includes a communication hole 314A formed in a circular cross section with a smaller diameter than the lower recess 314. The lower recess 314 is closed by the cover 32.

[0026] The movable body 37 is made of metal and includes a disk-shaped intermediate plate 371 arranged in the intermediate recess 313, a disk-shaped lower plate 372 arranged in the lower recess 314, and a plurality of rods 373 connecting the intermediate plate 371 and the lower plate 372. The intermediate plate 371 has a conical intermediate poppet valve 371A formed at its center. The intermediate plate 371 is biased toward the cylindrical portion 362 by the zero point adjustment spring 38, so that the intermediate poppet valve 371A engages with the cylindrical portion 362. The lower plate 372 has a conical lower poppet valve 372A formed in its center. The lower plate 372 is biased toward the communication hole 314A by the zero point adjustment spring 38, so that the lower poppet valve 372A fits into the communication hole 314A.

[0027] FIG. 3 is a schematic diagram showing a flow path of the supply pressure supplied from the supply port. As shown in Figure 3, the booster main body 31 has a first supply flow path 41 formed to penetrate from the supply port SUP along the Y-axis direction, and a second supply flow path 42 formed to penetrate from the end of the first supply flow path 41 on the -Y-axis side toward the +Z-axis direction. The first supply flow path 41 communicates with the aforementioned communication hole 314 A. The second supply flow path 42 communicates with the aforementioned input supply flow path 214 of the unit body 21 . The operation of the regulating valve 1 will now be described in detail.

[0028] A user of the regulating valve 1 can adjust the output pressure of the output port OUT by applying an electrical signal to the bimorph 222, as shown in FIG. As described above, when one end (base end) of the bimorph 222 is fixed and a voltage is applied, the voltage causes one piezoelectric ceramic to expand and the other piezoelectric ceramic to contract, thereby displacing the other end (tip end). In this embodiment, the bimorph 222 is displaced in a direction approaching the nozzle 221 when the electric signal is increased, and is displaced in a direction away from the nozzle 221 when the electric signal is decreased. In other words, the bimorph 222 moves toward or away from the discharge port of the nozzle 221 in response to the electric signal.

[0029] As shown in the shaded area in Fig. 3, the supply pressure supplied from the supply port SUP passes through the second supply flow path 42 and filter 215 to remove dust, then passes through orifice 216 and is reduced in pressure before being applied to the nozzle 221 as an operating pressure. In other words, orifice 216 is disposed in the supply pressure flow path leading to the nozzle 221, and the nozzle 221 applies the supply pressure to discharge gas. This operating pressure is reduced in accordance with the amount of gas flowing out through the gap between the nozzle 221 and the bimorph 222 and acquired as a signal pressure. This signal pressure acts on the upper surface of the input diaphragm 33 via the input flow path 211 and the input recess 212.

[0030] FIG. 4 is a schematic diagram showing a flow path of the output pressure output from the output port. As described above, the space in the intermediate recess 313 communicates with the output port OUT, and therefore the spaces in the intermediate recess 313, the lower recess 314, and the multiple circular holes 315 communicate with one another and are maintained at the output pressure, as shown in the shaded areas in Figure 4. Therefore, the output pressure acts on the lower surface of the output diaphragm 35. The space of the intermediate recess 313 is connected to a test port TOUT formed on the side surface on the +Y-axis direction side of the booster main body 31, and a sensor port SOUT formed on the top surface on the +Z-axis direction side of the booster main body 31. The test port TOUT is a port for monitoring the output pressure for inspection of the regulating valve 1, and is closed before shipping the regulating valve 1. The sensor port SOUT is a port for attaching a sensor for controlling the regulating valve 1, and closed-loop control of the regulating valve 1 can be performed based on the output pressure detected by this sensor.

[0031] As described above, the supply port SUP communicates with the first supply passage 41, which communicates with the communication hole 314A (see FIG. 3). Therefore, the supply pressure acts on the lower poppet valve 372A fitted thereto. As described above, the movable body 37 has a metallic lower poppet valve 372A (closing portion) arranged to close the communication hole 314A that connects the supply pressure side space and the output pressure side space.

[0032] FIG. 5 is a schematic diagram showing the atmospheric pressure flow path leading to the exhaust port. The space in the booster main body 31 separated by the input diaphragm 33 and the output diaphragm 35 communicates with the exhaust port EXH as shown in the shaded area in FIG. 5, and is maintained at atmospheric pressure. Specifically, the center boss 342 of the input plate 34 described above is constructed by connecting a base formed on the input plate main body 341 and a cylindrical member on the output plate 36 side with a screw (not shown), so that the spaces inside the upper recess 311, the small diameter recess 312, and the cylindrical portion 362 are interconnected and maintained at atmospheric pressure.

[0033] In this type of regulating valve 1, when the electrical signal applied to the bimorph 222 is increased, the bimorph 222 is displaced in a direction approaching the nozzle 221, and the back pressure of the nozzle 221, i.e., the signal pressure, increases. This increased signal pressure acts on the upper surface of the input diaphragm 33, which moves in the -Z-axis direction as the signal pressure increases. In addition, this signal pressure moves the input diaphragm 33, thereby moving the movable body 37 in the -Z-axis direction via the input plate 34, output diaphragm 35, and output plate 36.

[0034] When the movable body 37 is moved, the lower poppet valve 372A moves away from the communication hole 314A, so that the supply pressure flows from the round hole 315 to the lower recess 314, and the output pressure increases. As described above, the output pressure flows through the space in the intermediate recess 313 and acts on the lower surface of the output diaphragm 35 (see FIG. 4). Therefore, the output diaphragm 35 moves in the +Z-axis direction as the output pressure increases. This output pressure also moves the output diaphragm 35, thereby moving the input plate 34 and the output plate 36 in the +Z-axis direction. Because the movable body 37 is biased toward the communication hole 314A by the zero-point adjustment spring 38, the lower poppet valve 372A engages with the communication hole 314A, blocking the flow of supply pressure to the lower recess 314. In this way, the output pressure acting on the lower surface of the output diaphragm 35 and the signal pressure acting on the upper surface of the input diaphragm 33 are balanced.

[0035] In contrast, when the electrical signal applied to the bimorph 222 is reduced, the bimorph 222 is displaced in a direction away from the nozzle 221, and the back pressure of the nozzle 221, i.e., the signal pressure, decreases. This decreased signal pressure acts on the upper surface of the input diaphragm 33. Therefore, the input diaphragm 33 moves in the +Z-axis direction due to the output pressure acting on the lower surface of the output diaphragm 35, via the output diaphragm 35, output plate 36, and input plate 34, as the signal pressure decreases.

[0036] When the input plate 34 and the output plate 36 are moved toward the +Z-axis direction, the intermediate poppet valve 371A moves away from the cylindrical portion 362, and the output pressure flows from the cylindrical portion 362 through the space in the booster body 31 separated by the input diaphragm 33 and the output diaphragm 35 to the exhaust port EXH, causing the output pressure to decrease. As described above, the output pressure flows through the space in the intermediate recess 313 and acts on the lower surface of the output diaphragm 35 (see FIG. 4). Therefore, the output diaphragm 35 moves in the -Z-axis direction as the output pressure decreases. This output pressure also moves the output diaphragm 35, thereby moving the input plate 34 and the output plate 36 in the -Z-axis direction. Therefore, the intermediate poppet valve 371A engages with the cylindrical portion 362, blocking the flow of output pressure to the exhaust port EXH. In this way, the output pressure acting on the lower surface of the output diaphragm 35 and the signal pressure acting on the upper surface of the input diaphragm 33 are balanced.

[0037] In this way, the signal pressure acquisition unit 2 acquires the back pressure of the nozzle 221, which changes depending on the distance between the nozzle 221 and the bimorph 222, as the signal pressure. In addition, the input plate 34 functions as a first pressure plate that applies a signal pressure, the output plate 36 functions as a second pressure plate that applies an output pressure, and the movable body 37 moves based on the signal pressure applied to the input plate 34. The input diaphragm 33 is connected to the booster body 31 and the input plate 34, and separates the signal pressure side space from the atmospheric pressure side space. The output diaphragm 35 is connected to the booster body 31 and the output plate 36, and separates the atmospheric pressure side space from the output pressure side space.

[0038] According to this embodiment, the following actions and effects can be achieved. (1) Since the communication hole 314A, which connects the supply pressure side space with the output pressure side space, and the lower poppet valve 372A of the movable body 37 are both made of metal, the adjusting valve 1 can quickly move the lower poppet valve 372A away from the communication hole 314A by increasing the signal pressure, compared to when the communication hole 314A is closed with an elastic member such as an O-ring. Therefore, the adjusting valve 1 can improve the responsiveness of the change in output pressure to the change in signal pressure. (2) The closing portion is the conical lower poppet valve 372A that closes the communication hole 314A, so that the lower poppet valve 372A can be easily centered with respect to the communication hole 314A, which in turn makes it easier to assemble the booster 3.

[0039] (3) The signal pressure acquisition unit 2 acquires the back pressure of the nozzle 221, which changes depending on the distance between the nozzle 221 and the bimorph 222, as the signal pressure. Therefore, compared to acquiring the signal pressure using the electromagnetic nozzle flapper described in Patent Document 1, the adjustment valve 1 can be made lighter and smaller, and the responsiveness of the change in signal pressure to the change in electrical signal can be further improved. (4) When no electrical signal is applied, the bimorph 222 is positioned at a predetermined distance from the nozzle 221 (normally open), and therefore, compared to when the bimorph 222 is positioned in contact with the nozzle 221 (normally closed), the output pressure of the adjusting valve 1 can be lowered, and the adjusting valve can be suitably used for objects requiring the use of an adjusting valve at a low output pressure, such as semiconductor exposure equipment and laser processing machines. (5) The signal pressure acquisition unit 2 is provided with an orifice 216 arranged in the flow path of the supply pressure leading to the nozzle 221, so that the adjustment valve 1 can suppress the flow rate of gas flowing out from the nozzle 221 even when a normally open bimorph 222 is adopted.

[0040] [Modifications of the embodiment] The present invention is not limited to the above-described embodiment, and any modifications and improvements that can achieve the object of the present invention are included in the present invention. For example, in the above embodiment, the conical lower poppet valve 372A is used as the blocking part that blocks the communication hole 314A. However, the shape of the blocking part may be any shape, and other shapes such as a hemisphere may be used. In short, the blocking part may be any metal part that is arranged to block the communication hole.

[0041] Furthermore, in the above embodiment, the signal pressure acquisition unit 2 acquires as signal pressure the back pressure of the nozzle 221, which changes depending on the distance between the nozzle 221 and the bimorph 222. In contrast, the signal pressure acquisition means may employ any configuration as long as it can acquire the supply pressure supplied from the outside as a signal pressure corresponding to an electrical signal, and for example, the electromagnetic nozzle flapper described in Patent Document 1 may be employed. In addition, in the above embodiment, the bimorph 222 is disposed at a predetermined distance from the nozzle 221 when no electrical signal is applied, but it may be disposed in contact with the nozzle 221. In this case, the signal pressure acquisition unit 2 does not need to include the orifice 216 disposed in the flow path of the supply pressure leading to the nozzle 221. [Industrial Applicability]

[0042] As described above, the present invention can be suitably used for a regulating valve that regulates output pressure in response to an electrical signal. [Explanation of symbols]

[0043] 1. Regulating valve 2. Signal pressure acquisition unit (signal pressure acquisition means) 3 Booster 31 Booster body (casing) 33 Input diaphragm 34 Input plate (first pressure plate) 35 Output diaphragm 36 Output plate (second pressure plate) 37 Movable body 215 filters 216 Orifice 221 Nozzle 222 Bimorph 314A Communication hole 371A Intermediate Poppet Valve 372A Downward Poppet Valve (Closed)

Claims

1. A regulating valve including a signal pressure acquiring means for acquiring a supply pressure supplied from an external source as a signal pressure corresponding to an electric signal, and a booster for adjusting an output pressure using the signal pressure as an input, The booster comprises: A metal housing and a first pressure plate that applies the signal pressure; a second pressure plate fixed to the first pressure plate and applying the output pressure; an input diaphragm connected to the housing and the first pressure plate, and separating the signal pressure side space from the atmospheric pressure side space; an output diaphragm connected to the housing and the second pressure plate, and separating the atmospheric pressure side space from the output pressure side space; a movable body that moves based on the signal pressure applied to the first pressure plate, The housing includes: a communication hole that communicates the supply pressure side space with the output pressure side space, The movable body is A regulating valve characterized by having a metallic closing portion arranged to close the communication hole.

2. The regulating valve according to claim 1, The adjusting valve is characterized in that the closing portion is a conical poppet valve that closes the communication hole.

3. The adjusting valve according to claim 1 or 2, The signal pressure acquiring means a nozzle that applies the supply pressure to discharge gas; a bimorph that moves toward or away from the ejection port of the nozzle in response to the electrical signal, A regulating valve characterized in that the back pressure of the nozzle, which changes depending on the distance between the nozzle and the bimorph, is acquired as the signal pressure.

4. The regulating valve according to claim 3, The signal pressure acquiring means an orifice disposed in a flow path of the supply pressure leading to the nozzle; The adjusting valve is characterized in that the bimorph is disposed at a predetermined distance from the nozzle when the electrical signal is not applied.

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