Operator detection system

Abstract

To eliminate construction of changing the sensor position and angle as much as possible even when the arrangement of a substrate working device, which works on a substrate, is changed upon sensor's detection of an operator present around the substrate working device.SOLUTION: An operation detection system 60 that detects a facility operator 17 present around a substrate working device M, which works on a substrate, includes: an operator detection sensor 12 for detecting the facility operator 17; and an automatic guided carrier management device 13 (operator detection device) that detects the facility operator 17 based on a detection signal of the operator detection sensor 12, in which the operator detection sensor 12 is arranged at the substrate working device M.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The technology disclosed in this specification relates to an operator detection system and an automated guided vehicle management system. [Background technology]

[0002] Conventionally, when supplies to be supplied to equipment are automatically transported by an automatic transport vehicle in a factory or the like, obstacles (such as an operator or some other object) on the transport route are detected by a sensor (see, for example, Patent Document 1). Specifically, Patent Document 1 describes a method in which a number of cameras are placed to monitor an area that the autonomous vehicle's planned route traverses, and while the autonomous vehicle is moving along the planned route within the area, the cameras are used to detect the presence of objects within the area, and if an object at the current position interferes with the autonomous vehicle's planned route, the movement of the autonomous vehicle is changed. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-109879 Summary of the Invention [Problem to be solved by the invention]

[0004] The above-mentioned Patent Document 1 describes that cameras are installed on the interior walls, ceilings, pillars, floors, etc. of a factory. However, if cameras are installed on the interior walls, ceilings, pillars, floors, etc. of a factory, when the layout of the equipment is changed and the planned route is changed, the positions and angles of the cameras will no longer be appropriate, and work to change them will be required. This specification discloses a technology that, when a sensor is used to detect an operator around a board work device performing work on a board, can minimize the need for work to change the position or angle of the sensor even if the placement of the board work device is changed. [Means for solving the problem]

[0005] An operator detection system that detects an operator present around a substrate working device performing work on a substrate, comprising a sensor for detecting the operator and an operator detection device that detects the operator based on a detection signal from the sensor, the sensor being disposed on the substrate working device. [Effects of the Invention]

[0006] According to the above configuration, when a sensor detects an operator around a substrate working device performing work on a substrate, even if the placement of the substrate working device is changed, construction work to change the position or angle of the sensor can be minimized. [Brief explanation of the drawings]

[0007] [Figure 1] Schematic diagram of a manufacturing plant according to embodiment 1 [Figure 2] A block diagram showing the electrical configuration of a board working device. [Figure 3] Schematic diagram of the board work device, operator detection sensor, and equipment operator viewed from above [Figure 4] Block diagram showing the electrical configuration of the automated guided vehicle management device [Figure 5] Schematic diagram of the operator detection system (also serves as an automated guided vehicle management system) [Figure 6] Sequence chart for creating a route plan [Figure 7] Schematic diagram showing a specific example of creating a route plan [Figure 8] Schematic diagram of an operator detection system (also serving as an automated guided vehicle management system) according to embodiment 2. [Figure 9A] Schematic diagram of the board work device, operator detection sensor, and equipment operator viewed from above [Figure 9B] Schematic diagram of a 360-degree image captured by an omnidirectional camera [Figure 9C] Schematic diagram of a 360-degree image captured by an omnidirectional camera [Figure 10]Schematic diagram of an operator detection system according to a third embodiment. [Figure 11] Schematic diagram of an operator detection system (also serving as an automated guided vehicle management system) according to a fourth embodiment. [Figure 12] FIG. 10 is a schematic diagram showing a specific example of a route plan according to the fifth embodiment. [Figure 13] 13 is a schematic diagram showing a specific example of an instruction to transport supplies to a substrate processing device according to a sixth embodiment. [Figure 14] FIG. 13 is a block diagram showing the electrical configuration of a board working device according to a seventh embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] (Outline of this embodiment) (1) The operator detection system according to the present disclosure is an operator detection system that detects an operator present around a substrate working device that performs work on a substrate, and includes a sensor for detecting the operator and an operator detection device that detects the operator based on a detection signal from the sensor, and the sensor is disposed on the substrate working device.

[0009] According to the above-described operator detection system, since the sensor is disposed on the board work device, the position and angle of the sensor are changed when the position of the board work device is changed. Therefore, when the sensor is used to detect an operator around the board work device, even if the position of the board work device is changed, construction work to change the position and angle of the sensor can be minimized.

[0010] (2) The operator detection system according to the present disclosure is an operator detection system that detects an operator present around a substrate work device that performs work on a substrate, and includes the substrate work device, a sensor for detecting the operator, and an operator detection device that is communicatively connected to the substrate work device and detects the operator based on a detection signal from the sensor, wherein the sensor is disposed on the substrate work device, and the detection signal from the sensor is transmitted to the operator detection device via the substrate work device.

[0011] According to the above-described operator detection system, since the sensor is disposed on the board work device, the position and angle of the sensor are changed when the position of the board work device is changed. Therefore, when the sensor is used to detect an operator around the board work device, even if the position of the board work device is changed, construction work to change the position and angle of the sensor can be minimized. Furthermore, in the above-described operator detection system, the detection signal of the sensor is transmitted to the operator detection device via the board working device, which simplifies the configuration of the operator detection system compared to a case in which the detection signal of the sensor is transmitted to the operator detection device using a signal line separate from the communication line that communicatively connects the operator detection device and the board working device.

[0012] (3) The operator detection system according to the present disclosure is an operator detection system for detecting an operator present around a substrate work device performing work on a substrate, and includes the substrate work device and a sensor for detecting the operator, the sensor being disposed on the substrate work device, and the substrate work device also functions as an operator detection device for detecting the operator based on the detection signal of the sensor.

[0013] According to the above-described operator detection system, since the sensor is disposed on the board work device, the position and angle of the sensor are changed when the position of the board work device is changed. Therefore, when the sensor is used to detect an operator around the board work device, even if the position of the board work device is changed, construction work to change the position and angle of the sensor can be minimized. Furthermore, according to the above-described operator detection system, the board work device also functions as an operator detection device, so the configuration of the operator detection system can be simplified compared to when a device that detects an operator based on a sensor detection signal is provided separately from the board work device.

[0014] (4) The above-described operator detection system may include a plurality of the sensors, and may detect the position of the operator based on detection signals from the plurality of sensors.

[0015] The above-described operator detection system is based on detection signals from multiple sensors, and can detect not only whether an operator is present, but also the position (direction and distance) of the operator if present. In other words, when multiple sensors are provided, the position of the operator can be detected by integrating the detection signals from the multiple sensors and performing stereo processing.

[0016] (5) The sensor may be a camera.

[0017] When cameras are used as sensors, the direction in which the operator is located from the camera's perspective is determined from the operator's position on the images captured by each camera, and the intersection of the directions in which the operator is located determined for each camera is detected as the operator's position (orientation and distance), making it possible to detect not only whether or not an operator is present, but also the operator's position if an operator is present.

[0018] (6) The operator detection system may include a plurality of different types of sensors.

[0019] If there is only one type of sensor, it may not be possible to distinguish between the operator and objects other than the operator. If there are multiple sensors of different types, the accuracy of distinguishing between the operator and objects other than the operator improves compared to when there is only one type of sensor.

[0020] (7) The automated guided vehicle management system according to the present disclosure is an automated guided vehicle management system that manages automated guided vehicles that automatically transport supplies to substrate work devices that perform work on substrates, and includes an operator detection system described in any one of (1) to (6) and a management device, and the management device performs predetermined processing to efficiently operate the automated guided vehicle based on the detection results of the operator detection system.

[0021] According to the above-described automated guided vehicle management system, the automated guided vehicles can be operated efficiently based on the detection results of the operator detection system.

[0022] (8) The specified processing is a processing instructing the automatic guided vehicle to transport supplies to the board work device, and the management device may instruct the automatic guided vehicle to transport supplies to the board work device other than the board work device in the vicinity of the operator detected by the operator detection system in the specified processing.

[0023] If an operator is performing some kind of work on a board processing device, the operator is detected near the board processing device. In this case, when an automatic guided vehicle is instructed to transport supplies to the board processing device, the automatic guided vehicle must detect the operator and wait until the operator leaves the vicinity of the board processing device for safety reasons. According to the above-mentioned automatic guided vehicle management system, an instruction is given to transport supplies to a board work device other than the board work device in the vicinity of the detected operator (in other words, the board work device on which the operator is working), thereby enabling the automatic guided vehicle to operate more efficiently than if supplies were transported to the board work device on which the operator is working.

[0024] (9) The specified processing may be a processing for creating a route plan for the automated guided vehicle, and the management device may create a route plan in the specified processing so that the automated guided vehicle travels along a transport route that avoids operators detected by the operator detection system.

[0025] When transporting supplies to a substrate processing device, it is desirable to transport them via the shortest route, but if the shortest route is used even when an operator is on the shortest route, the automated guided vehicle will have to wait until the operator leaves the shortest route. According to the above-mentioned automated guided vehicle management system, a route plan is created to travel along a transport route that avoids operators detected by the operator detection system, allowing the automated guided vehicle to operate more efficiently than if it were to wait until the operator was no longer on the transport route.

[0026] (10) The predetermined process is a process for creating a route plan for the automated guided vehicle, and in the predetermined process, the management device may determine the number of operators for each transport route based on the detection results of the operator detection system, and create a route plan so that the automated guided vehicle travels along the transport route with the fewest number of operators.

[0027] If there is an operator on the transport route, the automated transport vehicle must wait until the operator leaves the transport route, so if there are many operators on the transport route, it takes longer to transport the item than if there are only a few operators on the transport route. According to the above-described automated guided vehicle management system, a route plan is created so that the automated guided vehicle travels along a transport route with the fewest number of operators, allowing the automated guided vehicle to operate more efficiently than when traveling along a transport route with a large number of operators.

[0028] (11) The predetermined process may be a process of notifying the operator detected by the operator detection system that the operator is on the transport route of the automated guided vehicle.

[0029] If an operator is present on the transport route, the automated guided vehicle must wait until the operator leaves the transport route, which causes a waiting time for the automated guided vehicle. According to the above-described automated guided vehicle management system, the notified operator moves off the transport route, thereby reducing the waiting time of the automated guided vehicle, thereby enabling the automated guided vehicle to operate efficiently.

[0030] [Details of the embodiments of the present disclosure] The present disclosure will be described below with reference to exemplary embodiments. The present disclosure is not limited to these examples, but is defined by the scope of the claims, and is intended to include all modifications within the meaning and scope of the claims. The embodiments of the present disclosure can be realized in various forms, such as an apparatus, a method, a computer program for realizing the functions of these apparatuses or methods, and a recording medium on which the computer program is recorded.

[0031] <Embodiment 1> The first embodiment will be described with reference to Figures 1 to 7. In the following description, the front-rear direction and left-right direction refer to the front-rear direction and left-right direction shown in Figure 1. In the following description, the reference numerals in the drawings may be omitted for the same components, with some exceptions.

[0032] (1) Manufacturing factory A manufacturing factory 1 according to a first embodiment will be described with reference to Fig. 1. The manufacturing factory 1 is a factory that manufactures mounting boards on which components are mounted. The manufacturing factory 1 is equipped with a plurality of mounting lines L (L1, L2, L3) that mount components on boards, a storehouse 10 that stores supplies to be supplied to board working devices M (described later) that make up the mounting lines L, one or more automated guided vehicles 11 that transport the supplies, a plurality of operator detection sensors 12 (an example of a sensor) that detect equipment operators 17 (an example of an operator), and an automated guided vehicle management device 13 (an example of an operator detection device and a management device). The board working device M, the automated guided vehicle 11, and the automated guided vehicle management device 13 are communicably connected via a communication network (not shown). The automated guided vehicle 11 is wirelessly connected to the communication network via an access point (not shown).

[0033] In Figure 1, setup area 14 is a place where supplies are loaded onto automatic guided vehicles 11 (in other words, stowed). Storage 10 is located in setup area 14. Waiting area 15 is a place where automatic guided vehicles 11 wait. Waiting area 15 is located near setup area 14. The setup area operator 16 is an operator who loads supplies onto the automatic guided vehicle 11 in the setup area 14. The equipment operator 17 is an operator who performs work that occurs on the mounting line L (such as attaching supplies that have been transported to the board work device M by the automatic guided vehicle 11 to the board work device M, and dealing with errors in the board work device M).

[0034] (1-1) Mounting line 1, the mounting line L1 is equipped with multiple board working devices M (loader M11, screen printing machine M12, print inspection machine M13, dispenser M14, surface mounting machine M15, post-mounting appearance inspection machine M16, reflow machine M17, post-cure appearance inspection machine M18, and unloader M19), which are lined up in a row via multiple conveyors (not shown). The same is true for mounting lines L2 and L3.

[0035] The supplies supplied to the board work device M vary depending on the board work device M. For example, in the case of the screen printer M12, solder paste for printing circuit patterns on the board is supplied as a supply item. In the case of the dispenser M14, adhesive to be applied to the board is supplied as a supply item. In the case of the surface mounter M15, reels on which component tape is wound, component trays on which components are arranged in rows, etc. are supplied as supplies.

[0036] 2, a description will be given of the electrical configuration common to each board working apparatus M. The board working apparatus M includes a control unit 20, a storage unit 21, a communication unit 22, a working unit 23, and an operation panel 24. The control unit 20 includes a CPU 20A, a RAM 20B, etc. The memory unit 21 stores various programs and data executed by the control unit 20. The communication unit 22 is a communication circuit for connecting the board work device M to a communication network. The configuration of the working unit 23 differs depending on the board work device M. For example, the working unit 23 of the screen printing machine M12 performs the work of printing a circuit pattern on a board using a mask. The working unit 23 of the surface mounting machine M15 performs the work of mounting components on a board on which a circuit pattern has been printed. The operation panel 24 is composed of a liquid crystal display, a touch panel, various operation buttons, etc. The equipment operator 17 can perform various settings for the board working device M by operating the operation panel 24.

[0037] (1-2) Operator detection sensor 2, the operator detection sensor 12 according to the first embodiment is electrically connected to the control unit 20 of the board working apparatus M. The operator detection sensor 12 according to the first embodiment is an ultrasonic sensor. Two operator detection sensors 12 are connected to one board working apparatus M. Two is just an example, and the number of operator detection sensors 12 may be one, or three or more.

[0038] The arrangement of the operator detection sensors 12 will be described with reference to Fig. 3. For convenience, Fig. 3 shows only four board working apparatuses M. The two operator detection sensors 12 arranged on one board working apparatus M are provided on both the left and right sides of the top surface of the board working apparatus M. A fan-shaped area 30 indicated by a dashed line in Fig. 3 indicates the detection range of the operator detection sensors 12. As shown in Fig. 3, the detection ranges of the operator detection sensors 12 of adjacent board working apparatuses M partially overlap.

[0039] In the first embodiment, it is assumed that no object other than the equipment operator 17 exists within the detection range of the operator detection sensor 12 (i.e., the ultrasonic sensor). The automated guided vehicle 11 may also exist around the board work device M, but since the automated guided vehicle 11 is generally shorter than the board work device M, it is assumed that it does not enter the detection range of the operator detection sensor 12. For this reason, in this embodiment, when an object is detected by the operator detection sensor 12, it is assumed that the object is the equipment operator 17.

[0040] (1-3)Automated guided vehicles The automated guided vehicle 11 will be described with reference to FIG. 1. The automated guided vehicle 11 is a vehicle that automatically transports supplies from the setup area 14 to the board working device M. The automated guided vehicle 11 is, for example, an AGV (Automatic Guided Vehicle). The automated guided vehicle 11 may also be an AMR (Autonomous Mobile Robot) in which a robot is mounted on an AGV. When the automated guided vehicle 11 is an AMR, the automated guided vehicle 11 automatically replenishes supplies to the board working device M.

[0041] The automated guided vehicle 11 is equipped with a control unit, a wireless communication unit, a sensor for detecting its own position, a sensor for detecting obstacles on the transport route (such as the equipment operator 17 or some other object), etc. If the automated guided vehicle 11 detects an obstacle on the transport route while traveling, it stops for safety reasons and waits until the obstacle is removed from the transport route. For this reason, if there is an obstacle on the transport route of the automated guided vehicle 11, a waiting time will occur for the automated guided vehicle 11.

[0042] (1-4)Automatic guided vehicle management device The automated guided vehicle management device 13 is a device that creates a route plan for when the automated guided vehicle 11 transports supplies from the setup area 14 to the board working device M. Creating a route plan can also be described as determining a transport route or selecting a transport route.

[0043] The electrical configuration of the automated guided vehicle management device 13 will be described with reference to Fig. 4. The automated guided vehicle management device 13 is a so-called personal computer, and includes a control unit 40, a storage unit 41, a communication unit 42, an input unit 43, and an output unit 44. The control unit 40 includes a CPU 40A, a RAM 40B, etc. The memory unit 41 stores various programs and data executed by the control unit 40. The communication unit 42 is a communication circuit for connecting the automated guided vehicle management device 13 to a communication network. The input unit 43 is an input device such as a keyboard, mouse, or touch panel. The output unit 44 is a display device such as a liquid crystal display. The programs stored in the storage unit 41 include an automated guided vehicle management program that causes the personal computer to function as the automated guided vehicle management device 13 .

[0044] (1-5) Operator detection system and automated guided vehicle management system As shown in Fig. 5, the operator detection system 60 according to the first embodiment is composed of a plurality of operator detection sensors 12, a plurality of board working devices M, and an automated guided vehicle management device 13. The automated guided vehicle management device 13 is an example of an operator detection device. That is, in the first embodiment, the automated guided vehicle management device 13 also functions as an operator detection device. In the first embodiment, since the automated guided vehicle management device 13 also functions as an operator detection device, the operator detection system 60 is also an example of an automated guided vehicle management system according to the first embodiment. The automated guided vehicle management device 13 and the operator detection device may be configured as separate devices.

[0045] (2) Creating a route plan for the automated guided vehicle The creation of a route plan for an automated guided vehicle executed by the automated guided vehicle management device 13 will be described with reference to FIG. The board work device M predicts the time when the supply will run out based on the remaining number (or remaining amount) of supplies and the usage status of the supplies. The board work device M stores the time until the supply will run out. When the time until the supply will run out falls below the time, the board work device M transmits a supply request for supplies to the automatic guided vehicle management device 13.

[0046] When the automated guided vehicle management device 13 receives a supply request from the board working device M, it creates a route plan for the automated guided vehicle 11 based on the detection signal of the operator detection sensor 12. The process by which the automated guided vehicle management device 13 creates a route plan based on the detection signal of the operator detection sensor 12 is an example of a predetermined process for efficiently operating the automated guided vehicle. Here, the sequence for creating a route plan will be explained first, and then a specific example will be explained.

[0047] (2-1) Sequence of creating a route plan The sequence of creating a route plan will be described with reference to FIG. In S101, a replenishment request is sent from any one of the board working devices M to the automatic guided vehicle management device 13. In S102, the automated guided vehicle control device 13 requests each board processing device M to transmit a detection signal from the operator detection sensor 12. In S103, each board working device M acquires a detection signal from the operator detection sensor 12.

[0048] In S104, each board working device M transmits a detection signal from the operator detection sensor 12 to the automated guided vehicle management device 13. In S105, the automated guided vehicle management device 13 detects the equipment operators 17 around the board work devices M based on the detection signals received from each board work device M. In S106, the automated guided vehicle management device 13 creates a route plan so that the automated guided vehicle travels along a transport route that avoids the detected equipment operator 17.

[0049] In S107, the automated guided vehicle management device 13 transmits to the automated guided vehicle 11 transport information indicating the board processing device M that is the request source of the supply request (in other words, the destination of the supply items) and the route plan created in S106. In S108, the automated guided vehicle 11 travels along the transport route indicated by the received transport information and transports the supplies to the board working device M indicated by the transport information.

[0050] (2-2) Example of route planning A specific example of creating a route plan will be described with reference to Fig. 7. The example shown in Fig. 7 shows a case where a replenishment request is received from the board work device M29. The transport route R2 shown in Fig. 7 is the shortest route to the board work device M29. Normally, it would be preferable to travel along the shortest route R2, but in the example shown in Fig. 7, an equipment operator 17 is located on the shortest route R2. For this reason, the automated guided vehicle management device 13 creates a route plan so that the automated guided vehicle travels along a transport route that avoids the detected equipment operator 17.

[0051] Specifically, in the example shown in Fig. 7, there are transport routes R1, R3, and R4 as transport routes that avoid the detected equipment operator 17. If there are multiple transport routes that can transport supplies while avoiding the detected equipment operator 17, it is preferable that the automated guided vehicle management device 13 selects the shortest transport route among the multiple transport routes (transport route R1 in the example shown in Fig. 7).

[0052] (3) Effects of the embodiment According to the operator detection system 60 of the first embodiment, the operator detection sensor 12 is disposed on the board working device M, and therefore when the location of the board working device M is changed, the position and angle of the operator detection sensor 12 are also changed. Therefore, when the operator detection sensor 12 detects an equipment operator 17 around the board working device M, even if the location of the board working device M is changed, construction work to change the position, angle, etc. of the operator detection sensor 12 can be minimized.

[0053] According to the operator detection system 60, the detection signal of the operator detection sensor 12 is transmitted to the automated guided vehicle management device 13 (an example of an operator detection device) via the board work device M. Therefore, the configuration of the operator detection system 60 can be simplified compared to when the detection signal of the operator detection sensor 12 is transmitted to the automated guided vehicle management device 13 using a signal line separate from the communication line (i.e., communication network) that communicatively connects the automated guided vehicle management device 13 and the board work device M.

[0054] According to the automated guided vehicle management system 60, a route plan is created so that the automated guided vehicle 11 travels along a transport route that avoids the equipment operator 17 detected by the operator detection system 60, so the automated guided vehicle 11 can be operated more efficiently than if it waits until the equipment operator 17 leaves the transport route.

[0055] <Embodiment 2> An operator detection system 260 according to the second embodiment will be described with reference to Fig. 8. Similar to the first embodiment, the operator detection system 260 according to the second embodiment is configured with a plurality of operator detection sensors 212, a plurality of board work devices M, and an automated guided vehicle management device 13. The operator detection sensors 212 are also connected to the board work devices M. In the second embodiment as well, the automated guided vehicle management device 13 also serves as the operator detection device. The operator detection sensor 212 according to the second embodiment is an omnidirectional camera (one example of a camera) that captures 360-degree images. In the second embodiment, one omnidirectional camera 212 is disposed for each board working apparatus M, approximately in the center of the top surface of the board working apparatus M.

[0056] Fig. 9A shows a situation where three equipment operators 17 are positioned around the mounting line. Image 70 shown in Fig. 9B is a schematic representation of a 360-degree image captured by omnidirectional camera 212 disposed on board working apparatus M11 in the situation shown in Fig. 9A. Image 71 shown in Fig. 9C is a schematic representation of a 360-degree image captured by omnidirectional camera 212 disposed on board working apparatus M12.

[0057] When the automated guided vehicle management device 13 receives a 360-degree image (an example of a detection signal) from each board working device M, it detects the equipment operator 17 on the received 360-degree image. Methods for detecting the equipment operator 17 on the image include face detection using Haar-like features and human silhouette detection using HOG (Histograms of Oriented Gradients) features. Additionally, since the equipment operator 17 generally wears a work cap, the work cap may be detected as a feature. Alternatively, the clothing of the equipment operator 17 may be detected as a feature.

[0058] 9A, when the automated guided vehicle management device 13 detects an equipment operator 17 on a 360-degree image, it determines the angular orientation of the equipment operator 17 relative to the omnidirectional camera 212 that captured the 360-degree image. Then, for each omnidirectional camera 212, the automated guided vehicle management device 13 sets a straight line extending in the above-mentioned angular direction from the omnidirectional camera 212 as the starting point, and detects the position (XY coordinates) of the intersection of the lines set for each omnidirectional camera 212 as the position (orientation and distance) of the equipment operator 17.

[0059] Calibration of the multiple omnidirectional cameras 212 can be performed in the same manner as calibration of a stereo camera. Generally, in calibration of a stereo camera, a calibration jig is placed in a position that is commonly visible to each camera, and each camera takes an image of the jig to adjust the resolution and positional relationship. Calibration of the multiple omnidirectional cameras 212 can also be performed in a similar manner.

[0060] The operator detection system 260 according to the second embodiment is provided with a plurality of omnidirectional cameras 212, and determines for each omnidirectional camera 212 which direction the equipment operator 17 is located as seen from that omnidirectional camera 212, and detects the intersection of the directions in which the equipment operator 17 is located determined for each omnidirectional camera 212 as the position of the equipment operator 17, thereby making it possible to detect not only whether or not the equipment operator 17 is present, but also the position of the equipment operator 17 if present. In other words, when a plurality of omnidirectional cameras 212 are provided, the position of the equipment operator 17 can be detected by integrating the detection signals of the plurality of omnidirectional cameras 212 and performing stereo processing.

[0061] Normally, a linear arrangement of multiple board work devices M based on a conveyor (not shown) is guaranteed, and therefore, when omnidirectional cameras 212 are arranged on board work device M, the positional relationship of the multiple omnidirectional cameras 212 is unlikely to change even if the arrangement of board work device M is changed. Therefore, when omnidirectional cameras 212 are arranged on board work device M, when the position of equipment operator 17 is detected based on detection signals from the multiple omnidirectional cameras 212, there is also the advantage that even if the arrangement of board work device M is changed, the position of equipment operator 17 can be detected without adjusting the positional relationship of the multiple omnidirectional cameras 212 (or with little adjustment).

[0062] <Embodiment 3> 10 , an operator detection system 360 according to the third embodiment is configured with an operator detection sensor 12 and a board work device M. In the third embodiment, each board work device M also functions as an operator detection device that detects an equipment operator 17 based on the detection signal of the operator detection sensor 12. Each board work device M transmits the detection result to the automated guided vehicle management device 13.

[0063] According to the operator detection system 360 of embodiment 3, the board work device M also functions as an operator detection device, so the configuration of the operator detection system 360 can be simplified compared to when a device that detects the equipment operator 17 based on the detection signal of the operator detection sensor 12 is provided separately from the board work device M.

[0064] When the automated guided vehicle management device 13 detects the equipment operators 17 based on the detection signals transmitted from each board work device M, the load is concentrated on the automated guided vehicle management device 13. In contrast, in the operator detection system 360 according to the third embodiment, the process of detecting the equipment operators 17 is distributed to multiple board work devices M, which has the advantage of preventing the load from being concentrated on the automated guided vehicle management device 13.

[0065] Furthermore, when the automated guided vehicle management device 13 detects the equipment operator 17 based on the detection signal transmitted from each board work device M, the detection signal is transmitted via the communication network, which increases the load on the communication network. In contrast, when the board work device M detects the equipment operator 17, it only needs to transmit the detection result to the automated guided vehicle management device 13, which has the advantage of reducing the load on the communication network compared to when a detection signal is transmitted.

[0066] <Embodiment 4> 11, an operator detection system 460 according to the fourth embodiment is made up of a plurality of operator detection sensors 12 and an automated guided vehicle management device 13. In the fourth embodiment, the automated guided vehicle management device 13 also serves as the operator detection device. In the fourth embodiment, the board working device M does not constitute the operator detection system 460.

[0067] The operator detection sensor 12 according to the fourth embodiment is also disposed on the board work device M, but is not electrically connected to the board work device M, and is instead directly connected to the automated guided vehicle management device 13 via a signal line 61. Therefore, the detection signal of the operator detection sensor 12 is transmitted to the automated guided vehicle management device 13 without passing through the board work device M.

[0068] According to the operator detection system 460 of embodiment 4, when an equipment operator 17 in the vicinity of a board working device M is detected by an operator detection sensor 12, even if the placement of the board working device M is changed, construction work to change the position, angle, etc. of the operator detection sensor 12 can be minimized.

[0069] <Embodiment 5> In the above-described first embodiment, the automated guided vehicle management device 13 executes a process of creating a route plan as a predetermined process for efficiently operating the automated guided vehicle so that the automated guided vehicle travels along a transport route that avoids the detected equipment operators 17. In contrast, in the fifth embodiment, the automated guided vehicle management device 13 determines the number of equipment operators 17 for each transport route based on the detection results of the operator detection system 60, and creates a route plan so that the automated guided vehicle travels along a transport route with the fewest number of equipment operators 17.

[0070] A specific example of creating a route plan according to the fifth embodiment will be described with reference to Fig. 12. In the example shown in Fig. 12, there are four transport routes R1, R2, R3, and R4 as transport routes for transporting supplies to the board working device M29. In the example shown in Fig. 12, there are three equipment operators 17 on transport route R1, two equipment operators 17 each on transport routes R2 and R3, and one equipment operator 17 on transport route R4. In this case, since transport route R4 is the transport route with the fewest number of equipment operators 17, the automated guided vehicle management device 13 creates a route plan so that the automated guided vehicle travels along transport route R4.

[0071] According to the automated guided vehicle management system 60 of embodiment 5, a route plan is created so that the automated guided vehicle 11 travels along a transport route with the fewest number of equipment operators 17, allowing the automated guided vehicle 11 to operate more efficiently than when traveling along a transport route with a large number of equipment operators 17.

[0072] <Embodiment 6> The specified processing in embodiment 6 is a processing to instruct the automatic guided vehicle 11 to transport supplies to a board working device M, and instructs the automatic guided vehicle 11 to transport supplies to a board working device M other than the board working device M near the operator detected by the operator detection system.

[0073] A specific example of a predetermined process according to the sixth embodiment will be described with reference to Fig. 13. In the example shown in Fig. 13, it is assumed that board work apparatus M26 and board work apparatus M34 transmit supply requests to the automated guided vehicle management device 13. In the example shown in Fig. 13, an equipment operator 17 is performing some kind of work on board work apparatus M26. Therefore, the equipment operator 17 is detected near the board work apparatus M26. In this case, when the automated guided vehicle 11 is instructed to transport supplies to the board work apparatus M26, the automated guided vehicle 11 will have to wait until the equipment operator 17 leaves the vicinity of the board work apparatus M26. Therefore, the automated guided vehicle management device 13 instructs the automated guided vehicle 11 to transport supplies to board work apparatus M34, for which an equipment operator 17 is not detected near the board work apparatus M26.

[0074] According to the automatic guided vehicle management system 60 of embodiment 6, an instruction is given to transport supplies to a board work device M34 other than the board work device M26 in the vicinity of the detected equipment operator 17, so the automatic guided vehicle 11 can be operated more efficiently than when the equipment operator 17 transports supplies to a nearby board work device M26.

[0075] <Embodiment 7> The predetermined process according to the seventh embodiment is a process of notifying the equipment operator 17 detected by the operator detection system 60 that the equipment operator 17 is on the transport path of the automatic guided vehicle 11. As shown in Fig. 14, the board work device M according to the seventh embodiment is equipped with a sound generation unit 25 such as a buzzer or speaker. In the seventh embodiment, the automated guided vehicle management device 13 creates a route plan so that the automated guided vehicle 11 travels to the board work device M via the shortest route. When an equipment operator 17 is detected on the shortest route, the automated guided vehicle management device 13 instructs the board work device M closest to the detected equipment operator 17 to emit an alarm sound. The board work device M instructed to emit an alarm sound uses the sound generation unit 25. The automated guided vehicle management device 13 may instruct not only the board work device M closest to the equipment operator 17 to emit an alarm sound, but also the surrounding board work devices M.

[0076] According to the automated guided vehicle management system 60 of the seventh embodiment, the notified equipment operator 17 moves off the transport route, thereby reducing the waiting time of the automated guided vehicle 11. This allows the automated guided vehicle 11 to operate efficiently.

[0077] <Other embodiments> The technology disclosed in this specification is not limited to the embodiments described above and in the drawings, and for example, the following embodiments are also included in the technical scope disclosed in this specification.

[0078] (1) In the above embodiment, an ultrasonic sensor and an omnidirectional camera are used as examples of operator detection sensors, but the operator detection sensor is not limited to these. For example, the operator detection sensor may be a LiDAR (Light Detection and Ranging), a digital camera (an example of a camera), or a human presence sensor (infrared sensor). LiDAR is a sensor that detects objects using light. Generally, LiDAR can detect in all directions, so when using LiDAR, only one can be installed in the center of the top surface of the board work device M. In the case of LiDAR, the sensor alone can detect the position (direction and distance) of the equipment operator 17.

[0079] When a digital camera is used as the operator detection sensor, the position (orientation and distance) of the equipment operator 17 may be detected by integrating the detection signals of multiple digital cameras and performing stereo processing, as in the case of the omnidirectional camera 212. Here, we have explained the case where the position of the equipment operator 17 is detected by integrating the detection signals of the omnidirectional camera 212 and the digital camera, but the position of the equipment operator 17 may also be detected by integrating the detection signals of sensors other than the omnidirectional camera 212 and the digital camera.

[0080] (2) In the above embodiments, an example has been described in which one type of operator detection sensor (an ultrasonic sensor in the case of embodiment 1, and an omnidirectional camera in the case of embodiment 2) is used to detect the equipment operator 17. However, the operator detection sensor used for detection is not limited to one type, and multiple types of sensors may be combined. For example, ultrasonic sensors and LiDAR can detect objects, but cannot detect whether the object is a person. For this reason, they may be combined with a human presence sensor, and if the temperature of the detected object is equal to or higher than a predetermined value, it may be determined that the object is the equipment operator 17. In this way, when a plurality of different types of operator detection sensors 12 are provided, the accuracy of distinguishing between the operator and an object other than the operator is improved compared to when only one type of operator detection sensor 12 is provided.

[0081] (3) In the above second embodiment, an example was described in which the omnidirectional camera 212 is used as the operator detection sensor. However, it is also possible to capture 360 ​​degrees using two 180-degree cameras, or to divide 360 ​​degrees into n equal parts and capture 360 ​​degrees using n cameras.

[0082] (4) In the above embodiment, the operator detection sensor is disposed on the top surface of the board working apparatus M. However, the operator detection sensor may be disposed on the left or right side surface of the board working apparatus M.

[0083] (5) In the above embodiment, an operator detection sensor is provided for each of the multiple board working devices M. However, an operator detection sensor may be provided for only one of the board working devices M. Alternatively, an operator detection sensor may be provided for every other board working device M, and it is not necessary that an operator detection sensor be provided for every board working device M.

[0084] (6) In the seventh embodiment, an example was described in which an equipment operator 17 on the shortest route was notified. In contrast, when a route plan is created so that the transportation route with the fewest number of equipment operators 17 is traveled, as in the fifth embodiment, an equipment operator 17 on the transportation route with the fewest number of equipment operators 17 may be notified. [Explanation of symbols]

[0085] 11:Automated guided vehicle 12: Operator detection sensor (example of a sensor) 13: Automatic guided vehicle management device (an example of an operator detection device and management device) 17: Equipment operator (an example of an operator) 60: Operator detection system (automated guided vehicle management system) 212: Operator detection sensor, omnidirectional camera (example of sensor) 260: Operator detection system (automated guided vehicle management system) 360: Operator Detection System 460: Operator detection system (automated guided vehicle management system) M (M11~M19, M21~M29, M31~M39): Board work equipment R1~R4: Transport route

Claims

1. An operator detection system for detecting an operator present around a substrate work device performing work on a substrate, a plurality of sensors for detecting an operator; an operator detection device that detects an operator based on a detection signal from the sensor; Equipped with The sensor is provided in each of the plurality of substrate working devices, the sensor is a camera; The operator detection device detects the operator on an image captured by each of the cameras, determines the angular direction of the operator relative to the camera, sets a straight line starting from the camera and extending in the angular direction, and detects the intersection of the straight lines set for each of the cameras as the position of the operator.

2. An operator detection system for detecting an operator present around a substrate work device performing work on a substrate, the substrate working device; a plurality of sensors for detecting an operator; an operator detection device that is communicatively connected to the substrate working device and detects an operator based on a detection signal from the sensor; Equipped with the sensor is provided in each of the plurality of substrate working devices, and a detection signal from the sensor is transmitted to the operator detection device via the substrate working device; the sensor is a camera; The operator detection device detects the operator on an image captured by each of the cameras, determines the angular direction of the operator relative to the camera, sets a straight line starting from the camera and extending in the angular direction, and detects the intersection of the straight lines set for each of the cameras as the position of the operator.

3. An operator detection system for detecting an operator present around a substrate work device performing work on a substrate, the substrate working device; a plurality of sensors for detecting an operator; Equipped with The sensor is provided in each of the plurality of substrate working devices, the substrate working device also functions as an operator detection device that detects an operator based on the detection signal of the sensor; the sensor is a camera; The operator detection device detects the operator on an image captured by each of the cameras, determines the angular direction of the operator relative to the camera, sets a straight line starting from the camera and extending in the angular direction, and detects the intersection of the straight lines set for each of the cameras as the position of the operator.

4. 4. The operator detection system according to claim 1, further comprising: An operator detection system comprising a plurality of different types of said sensors.

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