Electrical and thermal connection cable for charged particle microscopes

Abstract

To provide systems, methods, and communication cables for providing cryogenic cooling, high voltage connections, and other electrical connections to a sample on a stage within a vacuum environment while still enabling stage motion in at least five degrees of freedom with minimal stage vibration to enable new or improved measurement applications in-situ within a microscope such as atom probe tomography and testing of quantum computing components.SOLUTION: Connection cables combine connections into a single connection cable within an outer spring that is suitable for use in ultra-high vacuum. The connection cables are also shaped and configured to maintain at least a minimum standoff distance from components in a nearby environment (e.g., chamber walls and other equipment) to prevent mechanical, electrical, and thermal shortcutting.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an electrical and thermal connection cable for a charged particle microscope. [Background technology]

[0002] Atom probe tomography (APT) proceeds by evaporating a needle-shaped sample, and derives information about the sample's structure, composition, and / or morphology through the progressive measurement of atoms removed from the sample's surface. Information about changes in the sample's morphology, structure, and composition during the process is important for avoiding artifacts in the APT data. Combining APT tools within charged particle microscopes (e.g., electron microscopes) provides new information that enhances the 3D reconstruction of the sample and improves overall APT performance. APT tools can be combined with scanning electron microscope and / or transmission electron microscope techniques.

[0003] Typically, charged particle microscopy information about the needle's shape, structure, and composition is used as input for APT reconstruction at the beginning and end of an APT experiment due to significant challenges associated with sample realignment during an APT experiment, which would be faced at least when removing the sample from the APT instrument to the microscope to update the microscopy data. Therefore, there is a need for systems, methods, and algorithms for on-the-fly switching between APT and scanning or transmission charged particle (e.g., electron) microscopy (S / TEM) operations to improve correlation between the two different information channels and reduce artifacts in the APT data. Summary of the Invention

[0004] According to some examples taught herein, a connection cable for electrical and thermal connectivity in an ultra-high vacuum is provided. The connection cable includes an outer spring including a lumen extending therethrough. The outer spring includes a vacuum conductance path for enabling evacuation of the lumen in a vacuum environment. The connection cable includes a braid located at least partially within the lumen of the outer spring and configured to conduct high voltage and thermal energy. The connection cable includes an inner structural element at least partially disposed within the braid to maintain the shape of the connection cable.

[0005] According to some examples taught herein, a method for manufacturing a connection cable providing electrical and thermal connectivity is provided. The method includes expanding an end of an outer spring. The outer spring includes a lumen extending therethrough. The method includes inserting an inner structural element into a braid. The method includes inserting the braid and the inner structural element into the lumen of the outer spring.

[0006] According to some examples taught herein, a connecting cable for electrical and thermal connectivity in ultra-high vacuum is provided. The connecting cable includes a first section configured to enable movement of a connected stage in three translational dimensions and a first rotational dimension. The first section includes an outer spring including a first lumen extending through the first section. The first section includes a braid at least partially disposed within the first lumen of the outer spring and configured to conduct high voltage and thermal energy. The first section includes an inner structural element at least partially disposed within the braid to maintain a shape of the first section. The connecting cable includes a second section configured to enable movement of the connected stage in a second rotational dimension. The second section includes the braid. The connecting cable includes an intermediate fixture connecting the first section and the second section. [Brief explanation of the drawings]

[0007] To easily identify the discussion of any particular element or act, the most significant digit(s) in a reference number refers to the number of the figure in which that element is first introduced.

[0008] It should be understood that the figures are not necessarily drawn to scale, and that objects within the figures are not necessarily drawn to scale in relationship to each other. The figures are representations intended to provide clarity and understanding of various embodiments of the devices, systems, and methods disclosed herein. Wherever possible, the same reference numbers will be used throughout the figures to refer to the same or like parts. Furthermore, it should be understood that the figures are not intended to limit the scope of the present teachings in any way. [Figure 1] 1 illustrates a schematic diagram of a connecting cable for operation in an ultra-high vacuum environment, according to various examples taught herein. [Figure 2] 1 illustrates a cross section through a cross section of a connecting cable. [Figure 3] 1 illustrates an internal view of an intermediate fixture of a connecting cable, according to certain examples taught herein. [Figure 4] 1 illustrates a cross-sectional view of an end of a connection cable according to certain examples taught herein. [Figure 5] 1 illustrates a schematic diagram of a connecting cable taught herein in an exemplary charged particle system. [Figure 6] 1 illustrates a schematic diagram of the electrical and thermal systems of a charged particle system including connecting cables attached to an exemplary stage, in accordance with various examples taught herein. [Figure 7] 1 illustrates a schematic view of a longitudinal section of a portion of a connecting cable. [Figure 8A] 1 illustrates a perspective view of an exemplary connecting cable connected to a stage in a neutral tilt position. [Figure 8B] 8A, with views of the connecting cable 100 superimposed at three beta angle tilt states. [Figure 8C]8A, with views of the connecting cable 100 superimposed at three alpha angle tilt states. [Figure 8D] 1 illustrates a side view of a connecting cable attached to a stage within an ultra-high vacuum environment. [Figure 9] 1 illustrates a method of manufacturing a connection cable according to some examples taught herein. DETAILED DESCRIPTION OF THE INVENTION

[0009] The systems, methods, and communication cables taught herein provide cryogenic cooling, high-voltage connections, and other electrical connections to a sample on a stage within a vacuum environment while still allowing stage motion in at least five degrees of freedom with minimal stage vibration. In existing conventional systems, thermal connections, high-voltage connections, and electrical sensor connections had to be provided separately. Providing separate connections with varying degrees of stiffness and / or looseness poses the risk of the connections coming into contact with the ambient environment, leading to short circuits, loss of cooling, or damage to components. Similarly, the separate connections can provide individual sources of undesirable vibrational motion (leading to poor imaging) and create large effective loads that limit stage movement or lead to motion hysteresis. The connection cables taught herein overcome these issues by combining the connections into a single connection cable within an external spring that is suitable for use in ultra-high vacuum. These connecting cables enable new or improved measurement applications in situ within microscopes, such as atom probe tomography and testing of quantum computing components, where both cryogenic temperatures and access to electrical sensing and testing equipment are desired at the stage while the stage retains five degrees of freedom of precision motion. The connecting cables are also shaped and configured to maintain at least a minimum standoff distance from components in the nearby environment (e.g., chamber walls and other equipment) to prevent mechanical, electrical, and thermal short-circuits.

[0010] Advances in electron microscopy, 3D reconstruction software, and computing power have made it possible to accurately image and reconstruct objects measuring 100 nm or less. Areas of particular interest include biology (including research related to viruses such as the novel coronavirus) and materials science, where nanotechnology continues to develop new structures and novel compositions. For high resolution, minimizing sample vibrations can be desirable. At the same time, as the size of sample particles increases, the number of images required increases, resulting in longer times to perform a single study. In both cases, the sample stability required for accurate reconstruction becomes more stringent and can be addressed by cryogenically cooling the sample to reduce atomic motion and radiation damage that can occur to the sample after the long imaging times used for ultra-high resolution imaging. Conventional techniques using liquid nitrogen or liquid helium reservoirs suffer from vibrations induced by boiling the liquid. Therefore, maintaining stable low temperatures of 77 K, 35 K, 20 K, or even lower without external vibrations for periods of 6, 12, or even longer is crucial. The connecting cables taught herein enable the provision of cryogenic temperatures to a sample on a stage without associated vibration or mechanical disturbances by mechanically isolating the reservoir from the stage and by using a braid that dampens vibrational motion of the cable itself. For example, the connecting cables taught herein can form part of a cold chain from a solid thermal reservoir of the type described in U.S. Patent Application Publication No. 2022 / 0404247, published December 22, 2022, the entire contents of which are incorporated herein by reference.

[0011] As used herein, "about" in reference to dimensions includes measures that are within 10% of the stated measurement.

[0012] As used herein, "ultra-high vacuum" refers to a vacuum of 1×10 -8This refers to an environment with an ambient pressure of 1000 mbar or less. Maintaining an ultra-high vacuum within the chamber is disrupted by real or virtual leaks that prevent the pump from decreasing below a threshold where the rate of gas or contaminant removal by the pump equals the rate of gas or contaminant introduction by the real or virtual leak. A virtual leak is a source of gas or contaminant that is physically trapped within a volume within the chamber, with only a low-conductance path between the volume and the chamber body. To achieve ultra-high vacuum conditions, components within the chamber must be free of contaminants (by thorough cleaning) and / or virtually leak-free (by ensuring that any trapped volumes within components are accessible by a high-conductance path so they can be quickly evacuated). The connecting cables taught herein are suitable for use in ultra-high vacuum environments.

[0013] FIG. 1 illustrates a schematic diagram of a connection cable 100 for operation in an ultra-high vacuum environment, according to various examples taught herein. The connection cable 100 includes a first section 102 and a second section 108 connected at an intermediate fixture 106. The connection cable 100 conducts thermal and electrical energy from a sample interface connector 112 to an external interface connector 114. The sample interface connector 112 is attached to a stage that holds a sample or a cartridge containing a sample (as described and illustrated in more detail below with respect to FIG. 6 ). The external interface connector 114 provides cryogenic temperature (e.g., via a heat sink) and power supplied from outside the vacuum chamber to the connection cable 100. The connection cable 100 provides a mechanical connection between the external interface connector 114 and the sample interface connector 112, while still allowing the stage to translate, tilt, and rotate in five dimensions. The connection cable 100 is constructed to mitigate virtual leakage within the connection cable 100, as described in more detail below with respect to FIG. 7 .

[0014] In some examples, the first section 102 of the connection cable 100 forms a helix. The cylindrical component of the helix can be oriented in the yz plane (as shown in FIG. 1 ), while the longitudinal component is oriented along the x-axis. The first section 102 is oriented to route electrical and thermal connections from outside the vacuum chamber to the sample or stage without contacting other elements within the vacuum chamber. In charged particle microscope instruments, the volume inside the vacuum chamber, particularly near the stage, is limited because the fairly large charged particle optics (such as electromagnetic coils) for manipulating the charged particle beam must be located near the stage to improve imaging quality and reduce aberrations. At the same time, contact between thermal or electrical conductors and other elements (such as coils or chamber walls) is avoided to avoid electrical and thermal leakage, improve safety on the chamber walls and system components (e.g., avoid high voltages, short circuits, or low temperatures), and better isolate the stage from the environment. Arranging first section 102 into a rigid but bendable shape (such as a helix) helps prevent contact between connecting cable 100 and other system elements while also allowing motion in three translational directions and at least one rotational direction (e.g., an α-angle rotation about the x-axis). In some examples, first section 102 traverses an angular range in the x-y plane of approximately 630 degrees.

[0015] The second section 108 of the connection cable 100 can have a U-shape or a bent shape. In some examples, the second section 108 can generally extend along the same direction (e.g., the x-direction) as the longitudinal component defined by the helix of the first section 102. In some examples, the second section 108 generally extends along a direction orthogonal to the shape of the first section 102. The shape of the second section 108 can enable continuous electrical and thermal contact between the stage or sample and the external environment during stage motion along at least a second rotational direction (e.g., a β-angle rotation about the y-axis). Using first and second sections 102, 108 oriented generally orthogonal to one another allows the connection cable 100 to accommodate motion in multiple directions without interrupting the charged particle beam while maintaining an acceptable bend radius at all points within the connection cable.

[0016] The intermediate fixture 106 provides a stable mounting point for the second end 104b of the first section 102 and the first end 110a of the second section 108. In some examples, the intermediate fixture 106 can include a housing 118, one or more cable mounts 122, and fasteners 120 for securing the intermediate fixture 106 to a mounting plate 116 or other element within the vacuum chamber of the charged particle microscope.

[0017] The mounting plate 116 can connect at least a portion of the connecting cable 100 to a base for a stage or to another sturdy fixture within the charged particle microscope that provides translational and rotational motion. In some examples, the intermediate fixture 106 is attached to the mounting plate 116.

[0018] 1 includes separated first and second sections 102, 108 oriented generally orthogonal to one another, the connection cables 100 taught herein are not so limited. For example, those skilled in the art will understand that the scope of the present disclosure encompasses connection cables 100 having a single continuous section extending between connectors, or may include three or more segments connected to one another via connectors or intermediate fixtures 106.

[0019] In some examples, the connection cable 100 taught herein can be supplied or manufactured as only elongated, cable-like elements, such as the first section 102 and the second section 108. In other words, elements such as the sample interface connector 112, the external interface connector 114, and the intermediate fixture 106 can be supplied separately or pre-installed on the charged particle microscope such that the supplied or manufactured connection cable 100 can be installed on the charged particle microscope by attachment to existing fixtures and connections. In other examples, the connection cable 100 taught herein can be supplied or manufactured such that one or more of the sample interface connector 112, the external interface connector 114, or the intermediate fixture 106 are pre-connected to the first section 102 or the second section 108. In such examples, the connection cable 100, including the connectors (sample interface connector 112, external interface connector 114) or fixture elements (intermediate fixture 106), can be installed on an existing charged particle microscope.

[0020] In some examples, the overall length of the first section 102, intermediate fixture 106, and second section 108 of the connecting cable 100 is in the range of 200 mm to 500 mm, in the range of 300 mm to 400 mm, or approximately 360 mm.

[0021] FIG. 2 illustrates a cross-sectional view through the connection cable 100 taken, for example, at the location illustrated in FIG. 1 . The connection cable 100 includes an inner structural element 204, one or more braids 206, and one or more electrical conductors 210 at least partially housed within the outer spring 202. The braid 206 can ensure a good thermal connection between the sample or stage at the sample interface connector 112 and the external interface connector 114. The electrical conductors 210 provide electrical contact between the stage or sample (via the sample interface connector 112) and an external device, such as a voltage supply or electrical test or probe circuitry (via the external interface connector 114). The inner structural element 204 has sufficient rigidity to maintain the relevant portions of the connection cable 100 in a substantially uniform shape, while the outer spring 202 surrounds and houses the components of the connection cable 100 as a single bundle.

[0022] In various examples taught herein, the connection cable 100 can include one electrical conductor 210 or multiple electrical conductors 210, such as two, three, four, or more electrical conductors 210. For example, the use of four electrical conductors 210 can enable four-point temperature measurements to read out a temperature sensor or determine the exact power being dissipated inside the sample by a heater without sensitivity to electrical resistance within the electrical conductors 210 themselves. In other examples, a single electrical conductor can provide a potential to the sample when another component (e.g., the stage) in the charged particle microscope is grounded. In some examples, the electrical conductors 210 are surrounded by an insulator 208 to prevent contact between the conductive portions of the electrical conductors 210 and the braid 206. In examples having multiple electrical conductors 210, the electrical conductors 210 can be collectively wrapped around one or more layers of insulation 208 and bundled together, each electrical conductor 210 can be individually wrapped around one or more layers of insulation 208, or both individual and collectively wrapped layers of insulation 208 can be used. When individual insulation 208 is used, improved vacuum pumping capabilities and limited motion hysteresis of the cable 100 can be achieved. In some examples, the insulation 208 can include one or more electrically insulating materials, such as a polyimide film (e.g., Kapton™ film). The conductive portions of the electrical conductors 210 can include copper or other conductive materials. In some examples, the diameter of the conductive portions of the electrical conductors 210 can be in the range of 0.05 to 0.25 mm, in the range of 0.1 to 0.2 mm, or approximately 0.16 mm. The conductive portions of electrical conductors 210 may be sized as 34 American wire gauge (34 AWG) in some examples. In other examples, the conductive portions of electrical conductors 210 may be other diameters. In some examples, electrical conductors 210 are rated to carry a 5V signal at a current of 200mA per conductor.

[0023] The braid 206 is configured to create a highly thermally conductive channel between the sample or stage and a thermal control element (e.g., a heat sink) or device located away from the sample or stage. The thermal control element is generally located outside the vacuum chamber. The braid 206 is also configured to connect to a high-voltage supply outside the vacuum chamber (via the external interface connector 114) and deliver high voltage to the stage (via the sample interface connector 112). In some examples, the braid 206 is composed of many individual conductive elements 216 or smaller braids 206 bundled together and housed within the outer spring 202. The individual conductive elements 216 can include or be made from a material with high thermal conductivity, such as various coppers (e.g., high-purity, oxygen-free copper). In some examples, each individual conductive element 216 within the braid 206 can have a diameter ranging from 10 micrometers to 50 micrometers, or a diameter of approximately 25 micrometers. In some examples, the braid 206 as a unit is collectively formed from 5,000 to 15,000 individual conductive elements, 5,000 to 10,000 individual conductive elements, or more than 9,000 individual conductive elements. The individual conductive elements can be fixed to one another at the ends of the connection cable 100 (such as by a cable mount, as described below), but can move freely relative to one another throughout the bulk of the cable. By including a braid 206 formed from a large number of thin individual conductive elements, such as thin copper wires, the connection cable 100 can be easily bent or manipulated into a desired shape and can move and bend during stage movement during imaging operations. In some examples, the braid 206 is suitable for maintaining temperatures in the range of 10 Kelvin to 35 Kelvin, 25 to 35 Kelvin, 50 to 100 Kelvin, or 100 to 300 Kelvin. In some examples, the braid 206 can maintain the sample interface connector 112 (and thereby the sample or stage) at a temperature of 35 Kelvin or less.In some instances, the use of several small diameter individual conductive elements 216 improves vibration damping of the cable relative to the vibratory motion of a similarly sized unitary conductor due to energy dissipation as the individual conductive elements move relative to one another.

[0024] In some examples, the outer diameter 212 of the connection cable 100 (e.g., the outer diameter 212 of the first section 102 or the second section 108) can be in the range of 1 mm to 10 mm, or in the range of 2 mm to 6 mm. In one example, the outer diameter 212 of the connection cable 100 is preferably 4 mm.

[0025] The inner structural element 204 can be formed of a solid wire, a hollow wire, or a spring in various examples. In some examples, the inner structural element 204 can be included in both the first section 102 and the second section 108, while other examples of the connection cable 100 include the inner structural element 204 only in the first section 102 and not in the second section 108. The inner structural element 204 can be bent into a desired three-dimensional shape to provide spatial routing for the first section 102 or the second section 108, or in some examples, a single section that makes up the entire connection cable 100. The thickness of the inner structural element 204 can be selected to balance the competing factors of allowing the relevant portion of the connection cable 100 to bend easily to accommodate five degrees of freedom of stage movement while ensuring that the overall shape of the relevant portion of the connection cable remains rigid enough to hold its shape in space. The inner structural element 204, which maintains the stiffness and shape of the connection cable 100, is located within a bundle of components that is at least partially contained within the outer spring 202. In some examples, the inner structural element 204 is at least partially contained within the braid 206. By locating the inner structural element 204 within the bundle, the inner structural element 204 can help hold the connection cable 100 in the correct shape and can help the components within the bundle (e.g., the electrical conductors 210 and the braid 206) maintain their relative positions. The inner structural element 204 can retain its shape in various ways, either while being held under tension or naturally as a result of its internal structural properties.

[0026] In various examples, the inner structural element 204 has a diameter ranging from 0.5 mm to 2.0 mm, or a diameter of approximately 1 mm. In some examples, the inner structural element 204 is formed of or includes titanium or other non-magnetic material. In some examples, the material, shape, or length of the inner structural element 204 is selected to critically dampen the vibratory motion within the connecting cable 100. By critically damping the vibratory motion of the connecting cable 100, impulses from the external environment (such as mechanical vibrations) do not generate long-period oscillations in the stage or sample motion caused by the motion of the connecting cable 100.

[0027] The outer spring 202 can be any suitable tension or extension spring, depending on the needs of a particular application. The outer spring 202 encapsulates or houses the other components in the connection cable 100 in a single bundle, thus avoiding the risk of using separately routed cables for each electrical and thermal connection. In some examples, the outer spring 202 can be an endless tension or extension spring, meaning the spring does not have a termination element, such as an eyelet or loop, at its end. The outer spring 202 can be made of or include any suitable material with suitable flexibility, conductivity, and non-magnetic or non-magnetizable properties. The conductivity of the outer spring 202 prevents charging effects due to the accumulation of charged particles from the charged particle system, and the non-magnetic or non-magnetizable properties allow the outer spring 202 to avoid interference with the movement of charged particles within the chamber. For example, the outer spring 202 can include titanium or phosphor bronze. The outer spring 202 may include an outer coating to increase the thermal radiation reflectance (i.e., decrease the emissivity) of the outer spring 202. For example, in some examples, the outer spring 202 may be coated with gold.

[0028] In some examples, one or more of the inner structural element 204, the electrical conductor 210, and the braid 206 are contained within the outer spring 202 along substantially the entire length of the connection cable 100. In other examples, the outer spring 202 encloses and contains only components within the connection cable 100 over a section of the cable 100, such as, for example, only the first section 102 or only the second section 108.

[0029] The outer spring 202 includes an outer portion (e.g., a coil) with a lumen 218 or cavity that extends through the outer spring 202. The electrical conductor 210, the braid 206, and the inner structural element 204 pass at least partially through this cavity or lumen 218 and are housed within the connection cable 100. Specifically, the electrical conductor 210, the braid 206, and the inner structural element 204 may pass through the lumen 218, however, as described further below, there may be portions of the electrical conductor 210, the braid 206, and the inner structural element 204 that extend beyond the outer spring 202, such as into the intermediate fixture 106.

[0030] The outer spring 202 expands and contracts to allow bending of the connection cable 100. When the connection cable 100 bends (such as the helical bend of the first section 102 or the U-shaped bend of the second section 108 described above), the coil segments of the outer spring 202 spread apart on the outer diameter 212 of the connection cable 100, forming a gap, as described in more detail below with respect to FIG. 7 . The gap formed in the outer spring 202 can allow gas trapped within the connection cable 100 to vent from within the lumen 218 or cavity of the connection cable 100 to the outside of the connection cable 100 so that the vacuum chamber can achieve an ultra-high vacuum. In some examples, the spring thickness 214 of the outer spring 202 can be in the range of 0.1 to 0.5 mm, in the range of 0.1 to 0.3 mm, or approximately 0.2 mm.

[0031] The braid 206, the outer spring 202, or both the braid 206 and the outer spring 202 can, in some examples, magnetically shield the electrical conductor 210. By embedding the electrical conductor 210 within the braid 206 set within the outer spring 202, electromagnetic fields induced by currents in the electrical conductor 210 are shielded by the braid 206 or the outer spring 202, such that the electromagnetic fields do not enter the vacuum chamber or interfere with the flow of charged particles in the charged particle system. Additionally, embedding the electrical conductor 210 within the braid 206 also prevents charge buildup on the insulator 208 surrounding the electrical conductor 210.

[0032] In some examples, a majority of the cross-sectional area of ​​the connecting cable 100 is dedicated to the braid 206. In some examples, the available cross-sectional area of ​​the braid 206 is less than 4 mm 2 ~8mm 2 In some examples, the connecting cable 100 does not include magnetic materials. Because magnetic materials can divert the flight path of charged particles, excluding magnetic materials from the connecting cable 100 can be beneficial to avoid interfering with charged particle beams used for imaging or other processes such as milling.

[0033] In some examples, the stiffness of the first section 102 of the connecting cable 100 is greater than or equal to 1×10 -4The stiffness of the first section 102 is less than N / m. While the inner structural element 204 can contribute a majority of the cable's stiffness, other factors, such as the packing fraction of the braid 206 within the lumen 218, can also contribute. In some examples, the stiffness of the first section 102 can dictate the maximum deviation of the first section 102's position from its nominal position due to gravity on the first section 102. In these examples, the parameters of the inner structural element 204 can be selected to provide sufficient support to maintain the position of the first section 102 while avoiding increased stress on the inner structural element 204, which can lead to lifetime degradation issues. For example, the maximum deviation of the first section 102's position can be less than 1.5 mm, less than 1.0 mm, or in the range of 0.4 to 0.8 mm. FIG. 3 illustrates a view of the connection cable 100 mounted in a fixture 302, showing the interior of the intermediate fixture 106 of the connection cable 100, according to some examples taught herein. In FIG. 3, the housing 118 of the intermediate fixture 106 has been removed. The braid 206 passes from the first section 102 to a cable mount 122, enters an open area, and then enters another cable mount 122 that routes the braid 206 into the second section 108. Electrical conductors 210 are located outside the bundle of individual conductive elements in the braid 206 in the open section, as will be described in more detail below with respect to FIG. 4. The electrical conductors 210 can also be seen extending from the first end 104a of the first section 102 (i.e., at the external interface connector 114) and from the second end 110b of the second section 108 (i.e., at the sample interface connector 112).

[0034] As the inner structural element 204 exits the first section 102, it is positioned outside the bundle of individual conductive elements within the braid 206. The inner structural element 204 is clamped with an inner structural element clamp 304 to provide axial fixation and generate tension in the inner structural element 204. When clamped, the inner structural element 204 can more effectively hold its shape. The inner structural element clamp 304 can be, for example, a vise or groove that can generate a compressive force from the movement of an associated screw or bolt. In other examples, the inner structural element clamp 304 can include a set screw that pins the inner structural element 204 against a flat or grooved surface. The use of a set screw can generate a more consistent clamping force across the operating temperature range and reduce issues with meeting manufacturing tolerances. In some examples, the inner structural element clamp 304 can include pre-loading the inner structural element 204 into a hole, either alone or in combination with a set screw or bolt, to mechanically secure the inner structural element 204.

[0035] 4 illustrates a cable mount 122 for attaching an end (e.g., first end 104a, second end 104b, first end 110a, second end 110b) of a section (e.g., first section 102 or second section 108) of the connection cable 100 in some examples. The cable mount 122 can be located at one or more of the intermediate fixture 106, the external interface connector 114, and the sample interface connector 112 in the exemplary connection cable 100 configuration. The cable mount 122 preferably does not use chemical adhesives or glues to provide fixation of the components of the connection cable 100 to avoid introducing contaminants or virtual leaks that could compromise the high vacuum level in the vacuum chamber.

[0036] The cable mount 122 includes a braid clamp 402 and an outer spring clamp 410. The outer spring clamp 410 includes a collar 404 and an insert 406. The insert 406 may have a wedge shape that is complementary to the inner surface 412 of the collar 404. When the outer spring is driven into the outer spring clamp 410, the wedge shape of the insert 406 causes the outer spring 202 to spread radially outward at the collar, increasing the internal volume within the outer spring 202 at the outer spring clamp 410. This larger volume can facilitate insertion of the braid 206, electrical conductor 210, and inner structural element 204 during manufacture of the connection cable 100. The outer spring clamp 410 maintains tension on the end of the outer spring 202 to hold it in place and ensure that the outer spring 202 shields the braid 206 along the entire length of the connection cable 100.

[0037] The braid clamp 402 securely clamps the individual conductive elements within the braid 206, increasing contact between the braid clamp 402 and the braid 206 and reducing electrical and thermal resistance at the interface. Thermal and / or high-voltage electrical connections can be made to the braid 206 through the braid clamp 402. The braid clamp 402, in some examples, can include a vice or split ring to which a compressive force is applied by an associated screw. In arrangements where the braid 206 does not terminate at the cable mount 122 (e.g., in the intermediate fixture 106), the braid clamp 402 may not be present as part of the cable mount 122.

[0038] In some examples, a gap 408 is formed between the braid clamp 402 and the outer spring clamp 410. In the gap 408, the electrical conductors 210 can be brought out from inside the braid 206 and routed to terminals or contacts to connect to the stage (e.g., at the sample interface connector 112) or to external electrical equipment such as a source or sensor (e.g., at the external interface connector 114). In other examples, the electrical conductors 210 are simply routed outside the braid clamp 402 to avoid being crushed under the clamping pressure of the braid clamp 402. For example, the electrical conductors 210 can be routed out of the braid 206 (e.g., exiting the first section 102) at the gap 408 in the first cable mount 122 in the intermediate fixture 106, and then routed back into the braid 206 (e.g., entering the second section 108) at the gap 408 in the second cable mount 122 in the intermediate fixture 106.

[0039] For sections of the connection cable 100 that do not have an inner structural element 204, the cable mount 122 does not include the inner structural element clamp 304. For sections of the connection cable 100 that do not include the outer spring 202, the cable mount 122 can omit the outer spring clamp 410. At some junctions (such as where the first end 110a of the second section 108 feeds into the intermediate fixture 106), the cable mount 122 can allow the braid 206 and / or the electrical conductor 210 to pass through unsecured.

[0040] 5 illustrates a schematic diagram of the connection cable 100 taught herein in an exemplary charged particle system 600. In this example, the charged particle system 600 is configured to perform both atom probe tomography (APT) and transmission electron microscopy (TEM) on a sample 516. The exemplary charged particle system 600, compatible with the connection cable 100 as taught herein, can also perform alternative or additional imaging modalities, including, but not limited to, X-ray energy dispersive spectroscopy (EDS) or electron energy loss spectroscopy (EELS). In some examples, the beam of charged particles in the charged particle system 600 can be used for machining operations, such as in a focused ion beam (FIB) system.

[0041] The charged particle system 600 can include a vacuum chamber 606 connecting a charged particle source section 601, a stage 510, a connecting cable 100, an imaging section 602, an EELS analyzer 603, a counter electrode 604, and a detector 608. The stage 510 can be connected to a sample support 612 (e.g., silicon or metal posts) that supports a sample 516. The charged particle source section 601 generates a beam of charged particles that interact with the sample 516. Charged particles scattered, reflected, attenuated, or emitted by the interaction of the beam with the sample 516 are focused, imaged, and / or received in the imaging section 602 to generate a signal typical of a charged particle microscope, such as a TEM. In the specific case of EELS, an EELS spectrometer 603 can receive the charged particles after the sample and generate an EELS signal.

[0042] To perform the APT process, the charged particle system 600 applies a continuous or pulsed high voltage to the sample 516 via the connecting cable 100 (including the braid 206, the outer spring 202, and / or the electrical conductor 210), as described in connection with FIG. 5 . The electric field induced in the sample 516 is sufficient to evaporate ions from the sample surface, which are then accelerated by the counter electrode 604 until they eventually impact the detector 608. In some instances, ion evaporation can be controlled by the application of pulses of energy from the laser 610. In some cases, individual ions can be evaporated and accelerated onto the detector 608. The flight time of the ions from the sample 516 to the detector 608 allows for the identification of ion species across a range of ion masses. Notably, the APT process is capable of identifying light elements, which is particularly interesting for assessing dopant distribution in semiconductor devices.

[0043] The charged particle system 600 can perform the APT process in conjunction with other imaging processes, such as TEM, EDS, or EELS, thereby determining structural data describing the sample, such as diffraction patterns, secondary electron emission data, and sample thickness information. The charged particle system 600 can be used to perform a method for generating transmission electron microscope images over a range of tilt angles and / or positions as an approach to reconstructing three-dimensional information about a sample through the process of atomic and electron tomography. With a single platform, the charged particle system 600 can switch imaging between APT and EM modes of operation, allowing the electron microscope to provide progressive 2D / 3D information about the sample during the APT procedure. During the APT measurement, electron microscopy can be performed to record changes in the shape, size, structure, and composition of the sample at multiple points during the APT procedure of sample evaporation. These translational and rotational motions occur near the pole pieces 614 associated with the charged particle source section 601 and imaging section 602, significantly limiting the available space. In some examples, the connection cable 100 taught herein advantageously provides electrical and thermal connections to the stage 510 to maintain the sample 516 at the appropriate voltage and temperature, perform APT or atomic tomography (TOMO) processes during sample 516 translation and high-angle tilt rotation, while avoiding physical contact or interference with components near the sample 516 (such as the pole piece 614 or counter electrode 604), and provide imaging capabilities. In some examples, the connection cable 100 applies high voltage only when the sample tilt in both directions is approximately 0 degrees and the sample is located near the focal point of the charged particle beam. Similarly, the connection cable 100 can provide cooling only when the sample is positioned at large tilt angles, such as during an APT or TOMO run. In other examples, the connection cable 100 can apply high voltage while the sample is positioned at a tilt angle greater than zero.

[0044] FIG. 6 illustrates a schematic diagram of the electrical and thermal systems of an exemplary charged particle system 600, including a connecting cable 100 as taught herein. For simplicity, the diagram in FIG. 6 shows only a portion of the vacuum chamber 606 near the pole piece 614. The vacuum chamber 606 encloses the sample 516, the stage 510, and the connecting cable 100. The connecting cable 100 facilitates thermal connection between the cartridge 515 (and thereby the sample 516) and an external reservoir 704. The external reservoir may be a solid-state thermal reservoir of the type described in U.S. Patent Application Publication No. 2022 / 0404247, published December 22, 2022, the entire contents of which are incorporated herein by reference. The connecting cable 100 facilitates electrical connection between the sample 516 and a high-voltage supply 702 and between the sample 516 and an electrical contact 712 external to the vacuum chamber 606.

[0045] The reservoir 704 may be referred to as a heat sink in some applications or examples. In some examples, the reservoir 704 may be a Dewar flask containing a cooling fluid, such as liquid nitrogen or liquid helium. In other examples, the reservoir 704 may be a solid thermal reservoir of the type described in more detail in U.S. Patent Application Publication No. 2022 / 0404247, published December 22, 2022. In some examples, the reservoir 704 may provide cryogenic temperatures in the range of 10-50 K, 10-100 K, or 35-100 K, or temperatures of approximately 77 K or 35 K to the stage 510. In some examples, the temperature stability of the reservoir 704 may be maintained within an acceptable range of 10 mK to 3 K. In some examples, the reservoir 704 may be a heat pump that raises the temperature of the sample 516. The reservoir 704 is connected to the cooler interface 502 via a vacuum feedthrough 706 in the wall of the vacuum chamber 606. In some examples, the cooler interface 502 can be a cold finger. The cooler interface 502 connects to the external interface connector 114 through a high voltage isolator 518 and a mounting interface, as described further below. The braid 206 of the connection cable 100 connects to the external interface connector 114 and transfers thermal energy between the external interface connector 114 and the sample interface connector 112.

[0046] The high-voltage supply 702 is configured to provide a voltage of up to 20 kV, such as a voltage in the range of 5 kV to 20 kV, in various examples. The high-voltage supply 702 is connected to a single port 708 or multiple ports 708, such as two ports, via individual switches. The ports 708 connect to the electrical interface 504 via a vacuum feedthrough 706 in the wall of the vacuum chamber 606. The electrical interface 504 carries the high voltage to the cable mount 122. The braid 206 in the connecting cable 100 carries the high voltage between the external interface connector 114 and the sample interface connector 112. In some examples, the high-voltage supply 702 can provide a high voltage to induce atomic evaporation of the sample 516 to perform APT analysis, as described above. The stage 510 is connected to a stage ground 710 external to the chamber. A high-voltage isolator keeps the grounded stage 510 isolated from the high voltage provided by the connecting cable 100 at the stage 510.

[0047] The electrical contacts 712 are configured to provide a static or variable voltage or current to the sample 516 or the stage 510. In some sample 516 analysis workflows, such as semiconductor chip or quantum computing research, the sample 516 is provided with an electrical signal during or between charged particle analysis (i.e., "before and after" studies). In some examples, the electrical conductors 210 can provide current to a heater (such as a microelectromechanical system or MEMS heater) at or near the stage 510 or sample 516 to locally heat a portion of the sample 516. In some examples, the electrical conductors 210 can carry signals from a sensor, such as a temperature sensor, located at or near the stage 510 or sample 516. Some use cases appropriate for use of the connection cable 100 include situations in which a high voltage is applied to the sample during a first analysis mode (e.g., APT imaging), while other electrical signals are applied to the sample during a second analysis mode (e.g., readout of a temperature sensor or control of a heater near the sample). During a first analysis mode, braid 206 and electrical conductors 210 are all connected together to the same high voltage potential (e.g., using port 708 and an associated switch, the connection being made outside the vacuum chamber) to prevent electrical strikethrough. During a second analysis mode, braid 206 is disconnected from the high voltage and connected to ground potential to prevent charge buildup from the charged particle beam. At the same time, electrical conductors 210 can each independently carry an electrical signal, such as a digital logic signal or a sensor measurement.

[0048] The connection cable 100 taught herein connects the stage 510 to the cooler interface 502 and the electrical interface 504. The stage 510 can include a main platform, a beta-tilt platform, and a cartridge 515 capable of supporting a sample 516. In one example, the beta-tilt platform and cartridge 515 extend from the face of the main platform. The main platform can adjust the position of the cartridge 515 in real space in three translational directions (i.e., along the x-axis, y-axis, and z-axis) and tilt in an alpha rotational direction (i.e., rotation about the x-axis). The beta-tilt platform can adjust the tilt of the cartridge 515 in a beta rotational direction (i.e., rotation about the y-axis). An exemplary stage 510 suitable for use with the connection cable 100 of the present disclosure is described in U.S. Patent No. 11,244,805, issued February 8, 2022, the entire contents of which are incorporated herein by reference.

[0049] The mounting plate 116, in some embodiments, can be connected to the surface of the main platform. In this arrangement, the orientation of the first section 102 of the connecting cable 100 (e.g., the x-y plane in which the helix of the connecting cable 100 rotates axially) is maintained relative to the cartridge 515. The first end 104a of the connecting cable 100 can remain stationary while the cartridge 515 translates and rotates in space. The second end 104b of the first section 102 of the connecting cable 100 does not translate relative to the cartridge 515 during stage translation. The beta tilt platform extends through the interior of the helix of the first section 102.

[0050] The stage 510 can translate in three dimensions and tilt or rotate the sample 516 in at least two rotational directions. In some examples, the stage 510 can translate the sample 516 by a distance ranging from 0.5 mm to 4 mm in either the x-axis, y-axis, or z-axis direction. The range can also be expressed relative to a center point (i.e., a nominal position), such that the stage 510 can translate the sample 516 by a distance ranging from ±0.25 mm to ±2 mm relative to the center point in either the x-axis, y-axis, or z-axis direction. In one example, the stage 510 can translate the sample 516 by a distance of at least ±1 mm relative to the center point in either the x-axis, y-axis, or z-axis direction. In some examples, the stage 510 can rotate the sample 516 in an alpha (α) angle tilt direction by an amount ranging from −90° to +90° relative to a nominal center position. In some examples, the stage 510 can rotate the sample in a beta (β) angle tilt direction by an amount ranging from −10° to +10° relative to a nominal center position. In some examples, the stage 510 includes a high voltage isolator supporting the beta tilt platform to isolate high voltages in the stage 510 and prevent dangerous voltages from being applied to or through the main platform or other components of the charged particle system or vacuum chamber.

[0051] The external interface connector 114 can connect the cooler interface 502 and the electrical interface 504 to the connection cable 100. The external interface connector 114 can include a high-voltage isolator 518 between the braid 206 and the cooler interface 502. The high-voltage isolator 518 prevents high voltage from reaching the cooler interface 502 (which may, in some cases, be electrically grounded) and / or the walls of the vacuum chamber. The high-voltage isolator 518 can be formed of a material with high thermal conductivity but low electrical conductivity, such as sapphire. The high-voltage isolator 518 can be connected to the external interface connector 114 via the external interface's mounting interface.

[0052] The cooler interface 502 can conduct thermal energy between the external interface connector 114 and the sample interface connector 112 via the connecting cable 100. In some examples, the cooler interface 502 can connect a cryogenic reservoir 704 (such as a liquid helium dewar) outside the vacuum chamber to the external interface connector 114.

[0053] The electrical interface 504 may include an electrical connection plate, an external connector, and one or more wires, ribbons, or other electrical conductors that connect a power supply, a sensor, or other digital or analog electronics outside the vacuum chamber to the external interface connector 114. For example, the electrical interface 504 may include pins from the electrical (vacuum) feedthrough, a flex foil that connects to the external interface connector 114, and a plate or connector that electrically connects the pins to the flex foil. The electrical interface 504 may spatially isolate individual wires to prevent electrical discharges between the wires.

[0054] 7 illustrates a schematic view of a longitudinal cross section of a portion of the connection cable 100 showing pump-out of the connection cable 100. In FIG. 7, the portion of the connection cable 100 is bent as described above, occurring in the first section 102 (e.g., a spiral bend) or the second section 108 (e.g., a U-shaped bend). When the connection cable 100 is bent, the individual windings of the outer spring 202 are spaced apart from one another on the side of the outer spring 202 of the connection cable 100 (e.g., at the outer diameter of the bend). The spacing of the individual windings introduces vacuum conductance paths 802 between the windings along the side. These vacuum conductance paths 802 advantageously allow pump-out of the interior of the connection cable 100 (i.e., the internal volume or lumen 218 within the outer spring 202).

[0055] The placement of vacuum conductance paths 802 along the sides of connection cable 100 provides an advantage over conventional cables that are sealed along their sides. The interior of such conventional cables is pumped out from the ends of the cable, but the conductance from the midpoint of the cable to the ends of the cable (i.e., along the length of the cable) is very low. Thus, the interior of conventional cables acts as a virtual leak. The present connection cable 100 avoids these difficulties by providing multiple vacuum conductance paths 802 along the sides of the cable's length.

[0056] In an ultra-high vacuum system, such as the charged particle system 600, the vacuum level in one or more parts of the system may be as low as 1×10 -8 mbar~1×10 -11 The vacuum level is maintained in the range of 5×10 -10 At such high vacuum levels (i.e., low pressures), outgassing from the components within the chamber becomes a significant factor in determining how high a pressure can be achieved. In many conventional components, residual gas molecules within the outer casing of the component can slowly leak through the casing or through small holes in the casing over an extended period of time. In other words, the residual gas only slowly leaves the interior of the component, significantly extending the time required to completely evacuate the component, and therefore the vacuum chamber 606. The connection cable 100 taught herein overcomes this problem by creating a vacuum conductance path 802 within the outer spring 202. The vacuum conductance path 802 is large enough to facilitate the escape of residual gas molecules from within the internal volume or lumen 218 of the outer spring 202 of the connection cable 100.

[0057] In a typical experiment, the connection cable 100, including the outer spring 202 and braid 206, can be held at a high voltage, e.g., 15 kV. If the connection cable 100 gets too close to an electrically grounded portion of the stage 510, the vacuum chamber 606, or the pole piece 614 during movement of the stage 510, there is a risk of high-voltage discharge. Similarly, contact between the outer spring 202 portion of the connection cable 100 and other portions of the stage 510, the vacuum chamber 606, the pole piece 614, or even the connection cable 100 itself can cause thermal leakage that can damage the equipment and lead to loss of cryogenic temperature in the sample 516. The cables and methods described herein provide sufficient clearance at all possible combinations of stage tilt and translation to avoid high-voltage discharge and thermal leakage between the outer spring 202 and the surroundings. In some examples, the connection cable 100 applies high voltage only when the sample tilt in both directions is approximately 0 degrees and the sample is located near the focal point of the charged particle beam. Similarly, the connection cable 100 may only provide cooling when the sample is positioned at a large tilt angle, e.g., during an APT or TOMOrun. In another example, the connection cable 100 may apply a high voltage while the sample is positioned at a tilt angle greater than zero.

[0058] FIG. 8A illustrates a perspective view of a connection cable 100 connected to a stage 510 in a neutral tilt position. In the neutral position, the stage 510 has an alpha angle tilt of approximately 0° and a beta angle tilt of approximately 0°. The first section 102 of the connection cable 100 wraps around the stage 510 and has a nominal standoff distance 902 between any point on the connection cable 100 (e.g., a point on the outer spring 202 of the connection cable 100) and the nearby stage 510. In some examples, the minimum closest standoff distance 902 between the connection cable 100 and other components of the system, such as the stage 510, is greater than 0 mm, in the range of 0 mm to 10 mm, or in the range of 2.5 mm to 10 mm. In some examples, the minimum closest standoff distance 902 is approximately 2.5 mm when the connection cable 100 is in the neutral position (i.e., approximately 0 degrees alpha and beta tilt). In these examples, the standoff distance 902 between the connecting cable 100 and the stage 510 can be reduced below 2.5 mm during tilting when no high voltage is applied but remains greater than 0 mm to prevent thermal contact between the cable and the stage (or other elements in the chamber, such as the pole pieces). In some examples, half the diameter of the spiral formed by the first section 102 is a distance greater than 0 mm, a distance in the range of 0 to 10 mm, or equal to or greater than a distance in the range of 2.5 mm to 10 mm.

[0059] 8B illustrates the same connecting cable 100 connected to stage 510 as in FIG. 8A, with views of connecting cable 100 superimposed in three tilt states: nominal beta tilt 904, negative beta tilt 906, and positive beta tilt 908. In the negative beta tilt 906 state, stage 510 is tilted at a beta angle of −10° in this example. In the positive beta tilt 908 state, stage 510 is tilted at a beta angle of +10° in this example.

[0060] As the stage 510 tilts in the beta angle direction, portions of the second section 108 maintain a standoff distance 902 from the helical spatial path of the first section 102. The shape of the second section 108 (which in some examples includes a U-shaped bend) provides enough slack to allow the stage 510 to beta tilt without pulling the second section 108 taut. At the same time, the second section 108 does not sag excessively so that there is a risk of the second section 108 contacting the first section 102 at large negative beta tilt values.

[0061] 8A and 8B, with views of the connecting cable 100 superimposed in three tilt states: nominal alpha tilt 910, negative alpha tilt 912, and positive alpha tilt 914. In the negative alpha tilt 912 state, the stage 510 is tilted at an alpha angle of −90° in this example. In the positive alpha tilt 914 state, the stage 510 is tilted at an alpha angle of +90° in this example.

[0062] The second end 110b of the second section 108 is connected to the stage 510 (via the sample interface connector 112) as the stage rotates. At the same time, the other end of the connecting cable 100, i.e., the first end 104a of the first section 102, remains fixed in space and attached to the external interface connector 114. As a result of the movement of the second end 104b of the first section 102 of the connecting cable 100 during rotation, the rotation of the stage has the effect of "winding" or "unwinding" the helical shape of the cable (provided primarily by the inner structural element 204).

[0063] In the nominal alpha tilt 910 state, the first section 102 has a nominal standoff distance 916 from the stage 510. During tilting to a positive alpha angle, the first section 102 begins to "wind" from a nominal helical diameter 922 to a reduced helical diameter 924, and the nominal standoff distance 916 reduces to a smaller reduced standoff distance 918. Nevertheless, even at extreme alpha rotation values ​​(such as +90°), the reduced standoff distance 918 between the connecting cable 100 and any nearby objects (such as the stage 510, other portions of the connecting cable 100, the pole piece 614, or the walls of the vacuum chamber 606) is large enough to avoid thermal or electrical leakage between the connecting cable 100 and these other objects. At the same time, the connecting cable 100 is configured to follow a spatial routing path that avoids the connecting cable 100 becoming tangled with itself or other objects. In some examples, the minimum reduced standoff distance 918 between the connecting cable 100 and other components of the system, such as the stage 510, is in the range of 2.5 mm to 10 mm. In some examples, half the diameter of the spiral formed by the first section 102 (e.g., the nominal diameter 922, the reduced diameter 924, or the increased diameter 926) is a distance greater than 0 mm, a distance in the range of 0 mm to 10 mm, or equal to or greater than a distance in the range of 2.5 mm to 10 mm.

[0064] The inner structural element 204 of the connecting cable 100 has sufficient elasticity to restore the original shape of the connecting cable 100 when the stage 510 is rotated from a positive alpha tilt 914 state to a nominal alpha tilt 910 state. As the stage 510 performs the tilt to a negative alpha angle, the first section 102 begins to "unwind" from the nominal helical diameter 922 to an increased helical diameter 926. Simultaneously, the nominal standoff distance 916 relative to the stage 510 increases to a larger increased standoff distance 920 relative to the stage 510. However, the nearest standoff distance 902 does not increase so much that the connecting cable 100 risks connecting with the wall of the vacuum chamber 606 or the pole piece 614. In some examples, the increased diameter 926 of the helical portion of the connecting cable 100 is in the range of 50-70 mm, or approximately 60 mm.

[0065] 8D illustrates a side view of the connecting cable 100 in a negative alpha tilt 912 state, as also seen in the perspective view of FIG. 8C. The connecting cable 100 has an increased diameter 926 of the helical portion (i.e., first section 102) at this stage, along with an increased standoff distance 920 from the stage 510. However, as the standoff distance from the cable to the stage increases during negative alpha angle rotation, the standoff distance 902 from the first section 102 of the connecting cable 100 to the pole piece 614 decreases. In preferred examples of the connection cable 100 taught herein, the spatial routing (e.g., including shape and dimensions) of the connection cable 100 is selected (e.g., by appropriate tensioning or shaping of the inner structural element 204) so ​​that the connection cable 100 maintains a standoff distance 902 between the cable and all environmental surroundings (pole pieces, chamber, stage) of at least 0 mm, at least 2.5 mm, or more preferably at least 5 mm, while still allowing translation in three dimensions (e.g., at least 2 mm total movement in each dimension), rotation of at least 180 degrees in one rotational dimension, and rotation of at least 20 degrees in a second rotational dimension. Thus, the geometric parameters of the connection cable in some examples are selected to strike a balance between maintaining standoff distance 902 to the stage 510 at one extreme of the alpha angle tilt and maintaining standoff distance 902 to other elements (e.g., pole pieces 614) at the other extreme of the alpha angle tilt.

[0066] FIG. 9 illustrates a method 1000 of manufacturing the connecting cable 100 according to examples taught herein. According to various examples taught herein, the steps of the method 1000 can be performed sequentially, or in some cases, two or more steps can be performed simultaneously. The method 1000 includes expanding an end of the outer spring 202 (step 1002). The outer spring includes a lumen 218 extending therethrough. The end of the outer spring 202 can then be clamped to maintain the expanded opening during subsequent steps of manufacturing. For example, the outer spring clamp 410 described above can be used to expand the end of the outer spring. The method includes inserting the inner structural element 204 into the braid 206 (step 1004). For example, the braid 206 can be attached to a thin but relatively rigid guidewire, such as a solid steel wire with a diameter of 0.2 mm. A guidewire may be fed into the expanded end of the outer spring 202, threaded through the outer spring 202, and withdrawn from the opposite end. The braid 206 is then abutted against the expanded end of the outer spring 202. Once the braid 206 abuts against the expanded end of the outer spring 202, the inner structural element 204 is inserted into or combined with the braid 206. The method 1000 also optionally includes inserting one or more electrical conductors 210 into the braid 206 (step 1006). Step 1006 can be performed, for example, before the braid abuts the outer spring or as the braid 206 abuts the outer spring 202. In some examples, the electrical conductors 210 can be inserted into the braid 206 simultaneously with the insertion of the inner structural element 204. Method 1000 includes inserting the braid 206 and inner structural element 204 into the lumen 218 of the outer spring 202 (step 1008). For example, a guidewire can be pulled from the end of the cable opposite the expanded end to urge the braid and inner structural element into the cable. A combination of pulling the guidewire and pushing the braid from the expanded end can be used. Method 1000 also optionally includes inserting the electrical conductor 210 into the lumen 218 of the outer spring 202 during insertion of the braid 206 and inner structural element 204 (step 1010).For example, the electrical conductor 210 can be combined with the braid 206 as in step 1006 and then pulled by a guidewire and / or pushed into an outer spring as described in step 1008.

[0067] While the present teachings are described in conjunction with various embodiments, it is not intended that the present teachings be limited to such embodiments. Rather, the present teachings encompass various alternatives, modifications, and equivalents, as will be appreciated by those skilled in the art.

[0068] The section headings used herein are for organizational purposes only and are not to be construed as limiting the subject matter described in any way.

[0069] In this detailed description of various embodiments, for purposes of explanation, numerous specific details have been set forth in order to provide a thorough understanding of the disclosed embodiments. However, those skilled in the art will understand that in some instances, these various embodiments may be practiced without these specific details. In other instances, structures and devices have been shown in block diagram form. Furthermore, those skilled in the art will readily understand that the specific sequence in which methods are presented and performed is illustrative (unless expressly stated otherwise), and that it is contemplated that the sequence may be varied and still remain within the spirit and scope of the various embodiments disclosed herein.

[0070] All literature and similar materials cited in this application, including but not limited to patents, patent applications, articles, books, papers, and Internet web pages, are expressly incorporated by reference in their entirety for any purpose. Unless otherwise explained, all technical and scientific terms used herein have the meaning commonly understood by one of ordinary skill in the art to which the various embodiments described herein belong.

[0071] It is understood that there is an implicit "about" before specific temperatures, concentrations, times, pressures, flow rates, cross-sectional areas, etc. discussed in the present teachings, so that very small, minor deviations fall within the scope of the present teachings. In this application, the use of the singular includes the plural unless specifically stated otherwise. Similarly, the use of "comprise," "comprises," "comprising," "contain," "contains," "containing," "include," "includes," and "including" is not intended to be limiting. It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present teachings.

[0072] As used herein, "a" or "an" can also refer, in some instances, to "at least one" or "one or more," unless expressly indicated otherwise. Also, the use of "or" is inclusive, so that the phrase "A or B" is true when "A" is true, when "B" is true, or when both "A" and "B" are true. Further, unless otherwise required by context, singular terms shall include pluralities and plural terms shall include the singular.

[0073] As used herein, a "system" refers to a set of components, whether real or abstract, in which each component interacts with or comprises a whole in relation to at least one other component of the whole.

[0074] The advantages and features of the present disclosure can be further illustrated by the following examples.

[0075] Example 1. A connection cable for electrical and thermal connectivity in ultra-high vacuum, comprising: an outer spring including a lumen extending therethrough, the outer spring including a vacuum conductance path to allow evacuation of the lumen in a vacuum environment; a braid located at least partially within the lumen of the outer spring and configured to conduct high voltage and thermal energy; and an inner structural element disposed at least partially within the braid to maintain the shape of the connection cable.

[0076] Example 2. The connecting cable of Example 1, further comprising: a first section configured to enable movement of a connected stage in three translational dimensions and a first rotational dimension, the first section including an outer spring, a braid, and an inner structural element; and a second section configured to enable movement of a connected stage in a second rotational dimension, the second section including a braid.

[0077] Example 3. The connection cable of example 2, wherein the first section is formed in a spiral shape and the second section is formed in a U-shape.

[0078] Example 4. The connection cable of example 2 or 3, further comprising an intermediate fastener connecting the first section to the second section.

[0079] Example 5. A connection cable described in any one of Examples 1 to 4, further comprising an external interface connector for connecting a first end of the connection cable to a thermal reservoir, a high voltage supply, and an electrical interface, and a sample interface connector for connecting a second end of the connection cable to a stage of a charged particle system.

[0080] Example 6. The connection cable of any one of Examples 1-5, further comprising one or more electrical conductors disposed within the outer spring and configured to carry electrical signals.

[0081] Example 7. The connection cable of example 6, wherein the plurality of electrical conductors includes four electrical conductors.

[0082] Example 8. The connection cable according to any one of Examples 1 to 7, wherein the length of the connection cable is in the range of 300 mm to 500 mm.

[0083] Example 9. The connection cable is 10 -9 109. A connection cable according to any one of Examples 108, configured to operate at a pressure below 100 mbar.

[0084] Example 10. The connection cable of any one of Examples 1-9, wherein the connection cable is configured to maintain a standoff distance to an environmental component during movement of a connected stage within the charged particle system.

[0085] Example 11. A method for manufacturing a connection cable that provides electrical and thermal connectivity in a high vacuum environment, the method comprising: expanding an end of an outer spring, the outer spring including a lumen extending therethrough; inserting an inner structural element into a braid; and inserting the braid and inner structural element into the lumen of the outer spring.

[0086] Example 12. The method of example 11, further comprising inserting one or more electrical conductors into the braid and inserting the electrical conductors into the lumen of the outer spring during insertion of the braid and inner structural element.

[0087] Example 13. The method of example 11 or 12, further comprising bending the connecting cable into a helical shape to form a vacuum conductance path through the side of the outer spring.

[0088] Example 14. The method of any one of Examples 11-13, wherein expanding the end of the outer spring includes driving the end of the outer spring between a wedge-shaped insert and a collar having a complementary shape.

[0089] Example 15. The method of any one of Examples 11-14, wherein the outer spring defines a first section of the connecting cable, and the method further comprises threading the braid through a second section of the connecting cable.

[0090] Example 16. A connection cable for electrical and thermal connectivity in ultra-high vacuum, comprising: a first section configured to enable movement of a connected stage in three translational dimensions and a first rotational dimension, the first section including an outer spring, the outer spring including a first lumen extending therethrough; a braid at least partially disposed within the first lumen of the outer spring and configured to conduct high voltage and thermal energy; and an inner structural element at least partially disposed within the braid to maintain the shape of the first section; a second section configured to enable movement of a connected stage in a second rotational dimension, the second section including the braid; and an intermediate fixture connecting the first section and the second section.

[0091] Example 17. The connection cable of example 16, wherein the first section is formed in a spiral shape and the second section is formed in a U-shape.

[0092] Example 18. The connection cable of Example 16 or 17, wherein the connection cable is configured to maintain a standoff distance to an environmental component during movement of a connected stage within the charged particle system.

[0093] Example 19. A connection cable described in any one of Examples 16 to 18, further comprising one or more electrical conductors disposed within the first section and the second section and configured to carry electrical signals.

[0094] Example 20. A connection cable described in any one of Examples 16 to 19, further comprising an external interface connector for connecting a first end of the connection cable to a thermal reservoir, a high voltage supply, and an electrical interface, and a sample interface connector for connecting a second end of the connection cable to a stage of a charged particle system.

Claims

1. A connection cable for electrical and thermal connectivity in ultra-high vacuum, comprising: an outer spring including a lumen extending therethrough, the outer spring including a vacuum conductance path to allow evacuation of the lumen in a vacuum environment; a braid positioned at least partially within the lumen of the outer spring and configured to conduct high voltage and thermal energy; an inner structural element disposed at least partially within the braid to maintain the shape of the connection cable.

2. a first section configured to allow movement of a connected stage in three translational dimensions and a first rotational dimension, the first section including the outer spring, the braid, and the inner structural element; 10. The connection cable of claim 1, further comprising: a second section configured to enable movement of the connected stage in a second rotational dimension, the second section including the braid.

3. 3. The connection cable of claim 2, wherein the first section is formed in a spiral shape and the second section is formed in a U-shape.

4. The interconnect cable of claim 2 , further comprising an intermediate fastener connecting the first section to the second section.

5. an external interface connector for connecting a first end of the connection cable to a thermal reservoir, a high voltage supply, and an electrical interface; The connection cable of claim 1 , further comprising: a sample interface connector for connecting a second end of the connection cable to a stage of a charged particle system.

6. The interconnect cable of claim 1 , further comprising one or more electrical conductors disposed within the outer spring and configured to carry electrical signals.

7. The connection cable of claim 6 , wherein the one or more electrical conductors include four electrical conductors.

8. 2. The connection cable of claim 1, wherein the length of the connection cable is in the range of 300 mm to 500 mm.

9. The connecting cable is 10 －８ 2. A connection cable according to claim 1, configured to operate at a pressure below 1000 psi.

10. The connection cable of claim 1 , wherein the connection cable is configured to maintain a standoff distance to an environmental component during movement of a connected stage within a charged particle system.

11. 1. A method for manufacturing a connection cable that provides electrical and thermal connectivity in a high vacuum environment, the method comprising: expanding an end of an outer spring, the outer spring including a lumen extending therethrough; Inserting an inner structural element into the braid; and inserting the braid and inner structural element into the lumen of the outer spring.

12. Inserting one or more electrical conductors into the braid; The method of claim 11 , further comprising inserting the electrical conductor into the lumen of the outer spring during insertion of the braid and inner structural element.

13. The method of claim 11 , further comprising bending the connecting cable to form a vacuum conductance path through a side of the outer spring.

14. The method of claim 11 , wherein expanding the end of the outer spring includes driving the end of the outer spring between a wedge-shaped insert and a collar having a complementary shape.

15. The method of claim 11 , wherein the outer spring defines a first section of the connecting cable, the method further comprising threading the braid through a second section of the connecting cable.

16. A connection cable for electrical and thermal connectivity in ultra-high vacuum, comprising: a first section configured to enable movement of a connected stage in three translational dimensions and a first rotational dimension, said first section comprising: an outer spring including a first lumen extending therethrough; a braid at least partially disposed within the first lumen of the outer spring and configured to conduct high voltage and thermal energy; a first section including an inner structural element at least partially disposed within the braid to maintain the shape of the first section; a second section configured to allow movement of the connected stage in a second rotational dimension, the second section including the braid; an intermediate fixture connecting the first section and the second section.

17. 17. The connection cable of claim 16, wherein the first section is formed in a spiral shape and the second section is formed in a U-shape.

18. The connecting cable of claim 16 , wherein the connecting cable is configured to maintain a standoff distance to an environmental component during movement of a connected stage within a charged particle system.

19. 17. The interconnect cable of claim 16, further comprising one or more electrical conductors disposed within the first section and the second section and configured to carry electrical signals.

20. an external interface connector for connecting a first end of the connection cable to a thermal reservoir, a high voltage supply, and an electrical interface; The interconnect cable of claim 16 , further comprising: a sample interface connector for connecting a second end of the interconnect cable to a stage of a charged particle system.

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