Resist composition, method for producing resist pattern, and compound

Abstract

To provide a compound, a resist composition and the like which allow a resist pattern having a good pattern collapse margin to be produced.SOLUTION: There are provided a compound represented by formula (I) and a resist composition.SELECTED DRAWING: None

Description

[Technical Field]

[0001] The present invention relates to a compound, a resist composition containing the compound, and a method for producing a resist pattern using the resist composition. [Background technology]

[0002] Patent Document 1 describes a resist composition containing a compound of the following structural formula: TIFF2025175980000001.tif3064 [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-173128 Summary of the Invention [Problem to be solved by the invention]

[0004] An object of the present invention is to provide a resist composition that forms a resist pattern that exhibits better pattern collapse resistance (PCM) than a resist pattern formed from a resist composition containing the above compound. [Means for solving the problem]

[0005] The present invention includes the following inventions. [1] A resist composition containing a compound represented by formula (I): TIFF2025175980000002.tif43153 [In formula (I), Ar 1 , Ar 2 and Ar 3 each independently represents an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. L 1 and L 2each independently represents an alkanediyl group having 1 to 16 carbon atoms which may have a substituent, and -CH2- contained in the alkanediyl group is not selected from -O-, -S-, -SO-, -SO2-, -NR 7 It may be replaced by - or -CO-. L 3A , L 3B , L 3C , L 5A , L 5B and L 5C each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms which may have a substituent. R 3A , R 3B and R 3C are each independently -X 3A -R 31 or -X 3A -L 31 -X 3B -R 31 It is expressed as: X 3A and X 3B each independently represents -CO-O-, -O-CO-, -O-CO-O- or -O-. L 31 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -S-, -SO-, -SO2-, -NR 7 It may be replaced by - or -CO-. R 7 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R 31 represents a group containing a cyclic hydrocarbon group having 3 to 36 carbon atoms, the cyclic hydrocarbon group containing an alicyclic hydrocarbon group and optionally having a substituent, and -CH2- contained in the cyclic hydrocarbon group is not -O-, -CO-, -S-, -SO-, -NR 7 - or -SO2- may be replaced by R 31At least one of the cyclic hydrocarbon groups is an alicyclic hydrocarbon group having at least one polar group, or at least one -CH2-CH2- contained in the cyclic hydrocarbon group is replaced with -CO-O- or -SO2-O-, or at least one -CH2-CH2-CH2- contained in the cyclic hydrocarbon group is replaced with -O-CO-O-. R 5A , R 5B and R 5C are each independently, each independently, -X 5A -R 51 or -X 5A -L 51 -X 5B -R 51 It is expressed as: L 51 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -S-, -SO-, -SO2-, -NR 7 It may be replaced by - or -CO-. X 5A and X 5B each independently represents -CO-O-, -O-CO-, -O-CO-O- or -O-. R 51 represents a group represented by formula (IC). m1 represents an integer of 0 to 6, and when m1 is 2 or greater, the groups in the parentheses may be the same or different from each other. m2 represents an integer of 0 to 6, and when m2 is 2 or greater, the groups in the parentheses may be the same or different from each other. m3A, m3B, m3C, m5A, m5B and m5C each independently represent an integer of 0 to 4, and when each is 2 or more, the groups in the respective parentheses may be the same or different. The relationship 1≦m3A+m3B+m3C≦8 is satisfied. The relationship 1≦m5A+m5B+m5C≦8 is satisfied. The relationship 1≦m1+m3A+m5A≦8 is satisfied, and when m1 is 0, m3A and m5A each represent an integer of 1 or more. The relationship 0≦m2+m3B+m5B≦8 is satisfied. 0≦m3C+m5C≦9. TIFF2025175980000003.tif2672[In formula (IC), R A represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R A are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 1 or 2. L 12 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -S-, -CO-, -SO-, -NR 7 It may be replaced by - or -SO2-. * denotes a binding site.] [2] L 1 But -L 1A -X 1A -L 1B - and L 2 But -L 2A -X 2A -L 2B - and L 1A , L 1B , L 2A and L 2B each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms which may have one or more halogen atoms; X 1A and X 2A each independently represents -O-, -CO-O-, -O-CO-, or -O-CO-O-. [3] At least one R 31 is an alicyclic hydrocarbon group having 5 to 12 carbon atoms and one or two hydroxy groups. [4] At least one R 31 But the formula (R 10 -1), formula (R 10 -2) or formula (R 10The resist composition according to any one of [1] to [3], wherein the group is a group represented by the formula (I)-3). TIFF2025175980000004.tif34119[Formula(R 10 -1)~Formula(R 10 -3) Medium, * denotes a binding site. Z 12 represents an oxygen atom, a sulfur atom or a methylene group. R 11 , R 12 and R 13 each independently represents a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. m11 represents an integer of 0 to 5, and when m11 is 2 or more, a plurality of R 11 may be the same or different from each other. m12 represents an integer of 0 to 5, and when m12 is 2 or more, a plurality of R 12 may be the same or different from each other. m13 represents an integer of 0 to 5, and when m13 is 2 or more, a plurality of R 13 may be the same or different from each other. n10 represents an integer of 1 to 3. [5] At least one R 31 But the formula (T 1 5. The resist composition according to claim 1, wherein the aryl group is a group having a ring represented by the formula: TIFF2025175980000005.tif2666[formula(T 1 ) inside, Ring A represents a sultone ring having a carbon number of 2 to 24. -CH2- contained in ring A may be replaced with -O-, -S- or -NH-. R 41Arepresents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41A may be the same or different. The binding site is at any position.] [6] At least one R 31 is a group represented by formula (Ix):

[0022] (Ix) is a group represented by formula (Ix), and

[0023] (Ix) is a group represented by formula (Ix). TIFF2025175980000006.tif3041[In formula (Ix), Ring W x represents a ring of a 3- to 18-membered cyclic carbonate structure which may have a substituent, and the cyclic carbonate structure may have a heteroatom. L 32 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * denotes a binding site.] [7] Ar 1 , Ar 2 and Ar 3 The resist composition according to any one of [1] to [6], wherein each of the groups independently represents an aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a substituent. [8] The resist composition according to any one of [1] to [7], wherein m1 is 0, m3A is 1 or 2, and m5A is 1 or 2. [9] The resist composition according to any one of [1] to [7], wherein the compound represented by formula (I) is a compound represented by formula (IA). TIFF2025175980000007.tif26125[In formula (IA), Ar 1 , Ar 2 , L 1 , L3B , R 3B , L 5B and R 5B has the same meaning as in formula (I). m3B' and m5B' each independently represent 1 or 2.]

[10] The resist composition according to any one of [1] to [9], further comprising an acid generator, wherein the acid generator comprises a salt represented by formula (B1) or a salt represented by formula (B2). TIFF2025175980000008.tif1396[In formula (B1), L b1 represents a single bond or an (nb1+1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. Y b1 represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2- or -CO-. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different. Z1 + represents an organic cation. TIFF2025175980000009.tif1194[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2’ represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. Y b1’represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. nb5 represents an integer of 2 or 3, and when nb5 is 2, A 1 is a nitrogen atom, and when nb5 is 3, A 1 is a carbon atom. The groups in parentheses may be the same or different, and two groups in parentheses are bonded to form A 1 may form a ring together with Z2 + represents an organic cation.

[11] The resist composition according to any one of [1] to

[10] , further comprising a compound having a phenolic hydroxy group or a benzoic carboxy group, or a compound in which the phenolic hydroxy group or the benzoic carboxy group of the compound is protected with an acid labile group.

[12] The resist composition according to

[11] , wherein the compound having a phenolic hydroxy group or a benzoic carboxy group, or the compound in which the phenolic hydroxy group or the benzoic carboxy group of the compound is protected with an acid labile group, is a resin, and the resin contains a structural unit represented by formula (a2-A) or a structural unit represented by formula (a1-4). TIFF2025175980000010.tif30127[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or -CO-. nA2 represents an integer of 1 to 5, and when nA2 is 2 or greater, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer between 0 and 2. TIFF2025175980000011.tif32119[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a18 - may be replaced with R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R a17 may be the same or different from each other. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form, together with the -CO- to which they are bonded, a divalent hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group and the -CH2- contained in the divalent hydrocarbon group may be replaced with -O- or -S-. mc represents an integer between 0 and 2.

[13] The resist composition according to

[12] , wherein the resin further comprises at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). TIFF2025175980000012.tif43144 [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or -O-(CH2) k1 represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—. R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom. Ra6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom. m1' represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3. TIFF2025175980000013.tif4558[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom. Z a1 is a single bond or -(CH2) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents an integer of 1 to 3. s1' represents an integer of 0 to 3. TIFF2025175980000014.tif3681[In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached. Xa61 is a single bond, -CO-O-* or -CO-NR a65 -*, * represents the binding site with Ar, R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OL a62 -, * represents the bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

[14] (1) A step of applying the resist composition according to any one of [1] to

[13] onto a substrate; (2) drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising:

[15] A compound represented by the above formula (I). [Effects of the Invention]

[0006] By using the resist composition of the present invention, a resist pattern with good pattern collapse resistance (PCM) can be produced. DETAILED DESCRIPTION OF THE INVENTION

[0007] In this specification, "(meth)acrylic monomer" means "at least one of an acrylic monomer and a methacrylic monomer." The terms "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. In the groups described in this specification, those that can have both a linear structure and a branched structure may have either. When -CH2- contained in a hydrocarbon group or the like is -O-, -S-, -CO-, -SO-, -NR XWhen replaced with - (X is any symbol) or -SO2-, the same examples apply to each group, and the number of carbon atoms before replacement is the number of carbon atoms in the hydrocarbon group, etc. "Combined group" refers to a group formed by combining two or more of the exemplified groups, and the valence of these groups may vary appropriately depending on the bonding form. "Derived from" or "derived from" refers to the polymerizable C=C bond contained in the molecule becoming a -CC- group (single bond) through polymerization. If stereoisomers exist, all stereoisomers are included. Depending on the number of substituents, etc., any position and number of hydrogen atoms contained in each group may be substituted for the bonding site. The number of carbon atoms in the substituent is not included in the number of carbon atoms in the substituted group. "Acid labile group" refers to a group that, upon contact with acid (e.g., trifluoromethanesulfonic acid, etc.), eliminates the leaving group to form a hydrophilic group (e.g., a hydroxy group or a carboxy group, etc.). The term "base labile group" refers to a group that, when contacted with a base (e.g., trimethylamine, tetramethylammonium hydroxide, etc.), eliminates the leaving group to form a hydrophilic group (e.g., a carboxy group or a hydroxy group, etc.). In this specification, the term "solid content of the resist composition" refers to the sum of all components in the resist composition excluding the solvent (E), which will be described later.

[0008] <Resist composition> The resist composition of the present invention contains a compound represented by formula (I) (hereinafter sometimes referred to as "compound (I)"). The resist composition of the present invention may further contain an acid generator (hereinafter sometimes referred to as "acid generator (B)"), a compound having a phenolic hydroxy group or a benzoic carboxy group, or a compound in which the phenolic hydroxy group or the benzoic carboxy group of such a compound is protected with an acid labile group (hereinafter sometimes referred to as "compound (L)"), or a quencher (hereinafter sometimes referred to as "quencher (C)") such as a salt that generates an acid with a weaker acidity than the acid generated from the acid generator. Compound (L) may constitute a resin containing structural units derived from such compounds. Such a resin may be either a resin containing a structural unit having an acid labile group or a resin not containing a structural unit having an acid labile group. The resist composition of the present invention preferably contains a solvent (hereinafter, may be referred to as "solvent (E)").

[0009] <Compound (I)> The resist composition of the present invention contains compound (I). TIFF2025175980000015.tif43153 [In formula (I), all symbols have the same meanings as defined above.]

[0010] Ar 1 , Ar 2 and Ar 3 Examples of the aromatic hydrocarbon group having 6 to 18 carbon atoms include groups derived from a benzene ring, a naphthalene ring, an anthracene ring, an indene ring, a phenanthrene ring, a fluorene ring, a diphenylmethane ring, etc., and groups derived from a benzene ring, a naphthalene ring, or a diphenylmethane ring are preferred, and groups derived from a benzene ring or a diphenylmethane ring are more preferred. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 16, more preferably 6 to 14, and even more preferably 6 to 10. Ar 1 , Ar 2 and Ar 3Examples of the substituent that may be substituted include a halogen atom, a cyano group, a nitro group, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, a fluorinated alkyl group having 1 to 4 carbon atoms, and a fluorinated alkoxy group having 1 to 4 carbon atoms. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, and a tert-butyl group. Furthermore, examples of the fluorinated alkyl group include groups in which at least one hydrogen atom contained in the above alkyl group is substituted with a fluorine atom, such as a trifluoromethyl group, a perfluoroethyl group, and a perfluoropropyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, and a propyloxy group. Examples of the fluorinated alkoxy group include groups in which at least one hydrogen atom contained in the above alkoxy group has been substituted with a fluorine atom, such as a trifluoromethoxy group, a perfluoroethoxy group, and a perfluoropropoxy group. The alkyl group, alkoxy group, fluorinated alkyl group and fluorinated alkoxy group preferably have 1 to 3 carbon atoms, and more preferably 1 or 2 carbon atoms.

[0011] L 1 and L 2 Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, and hexadecane-1,16-diyl; and Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The alkanediyl group preferably has 1 to 12 carbon atoms, more preferably 1 to 10 carbon atoms, and even more preferably 1 to 8 carbon atoms. The -CH2- contained in the alkanediyl group can be substituted with -O-, -S-, -SO-, -SO2-, or -NR 7 It may be replaced by - or -CO-. The -CH2- in the alkanediyl group can be replaced with -O-, -S-, -SO-, -SO2-, or -NR 7 When it is replaced by - or -CO-, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the alkanediyl group. R 7 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Examples of the group in which -CH2- in the alkanediyl group is replaced by -O- or -CO- include a hydroxy group (a group in which -CH2- in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in the ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in the methyl group is replaced by -S-), an amino group (a group in which -CH2- in the methyl group is replaced by -NR 7 -), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), peptide group (a group in which -CH2-CH2- in an ethylene group is replaced with -CO-NR 7-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR 7 -), alkyl peptide group (wherein -CH2-CH2- at any position in the alkyl group is replaced by -CO-NR 7-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkoxyalkoxy group (a group in which two -CH2- at any position in an alkyl group are replaced with -O-), alkoxyalkyl group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), hydroxyalkyl group (a group in which -CH2- in a methyl group at any position in an alkyl group is replaced with -O-), replaced by -O-), alkanediyloxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), alkanediylcarbonyloxy group ( an alkanediyl group in which any -CH2-CH2- at any position is replaced by -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which any -CH2- at any position is replaced by -SO2-), an alkanediylthio group (an alkanediyl group in which any -CH2- at any position is replaced by -S-), an alkanediylamino group (an alkanediyl group in which any -CH2- at any position is replaced by -NR 7 -), alkanediyl peptide group (wherein any -CH2-CH2- at any position in the alkanediyl group is replaced by -CO-NR 7 -substituted), and groups in which two or more of these groups are combined. Examples of the alkoxy group include alkoxy groups having 1 to 15 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 15 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 15 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylamino group include alkylamino groups having 1 to 15 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkyl peptide group include alkyl peptide groups having 1 to 15 carbon atoms, such as a methyl peptide group, an ethyl peptide group, a propyl peptide group, etc. The number of carbon atoms in the alkyl peptide group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 15 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 16 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 15 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 14 carbon atoms, such as a butoxycarbonyloxy group. Examples of the alkoxyalkoxy group include alkoxyalkoxy groups having 2 to 14 carbon atoms, such as a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, and an ethoxyethoxy group. The alkoxycarbonyl group has preferably 2 to 11 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkylcarbonyl group has preferably 2 to 12 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkylcarbonyloxy group has preferably 2 to 11 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkoxycarbonyloxy group has preferably 2 to 10 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkoxyalkoxy group has preferably 2 to 10 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkoxyalkyl group include alkoxyalkyl groups having 1 to 15 carbon atoms, such as a methoxymethyl group, a methoxyethyl group, an ethoxymethyl group, an ethoxyethyl group, and an ethoxypropyl group. Examples of the hydroxyalkyl group include hydroxyalkyl groups having 1 to 15 carbon atoms, such as a hydroxymethyl group, a dihydroxymethyl group, and a hydroxyethyl group. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the hydroxyalkyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 15 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 15 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 16 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 15 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 15 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 15 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 15 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, a hexyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyl peptide group include alkanediyl peptide groups having 1 to 15 carbon atoms, such as a methylene peptide group, an ethylene peptide group, a propylene peptide group, etc. The number of carbon atoms in the alkanediyl peptide group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. L 1 and L 2 Examples of the substituent that the alkanediyl group may have include a halogen atom, a hydroxy group, a cyano group, a carboxy group, an alkyl group having 1 to 12 carbon atoms, a haloalkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, and a group formed by combining two or more of these groups. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, a nonyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. The haloalkyl group having 1 to 6 carbon atoms represents an alkyl group having a halogen atom, and examples thereof include a fluorinated alkyl group, a chlorinated alkyl group, a brominated alkyl group, and an iodinated alkyl group. Examples of the haloalkyl group include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 4, and more preferably 1 to 3. Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, a dodecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0012] Examples of groups that combine two or more types include an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, and an alkylcarbonyloxy group having 2 to 13 carbon atoms. Examples of the alkoxycarbonyl group having 2 to 13 carbon atoms include a methoxycarbonyl group, an ethoxycarbonyl group, a butoxycarbonyl group, etc., examples of the alkylcarbonyl group having 2 to 13 carbon atoms include an acetyl group, a propionyl group, a butyryl group, etc., and examples of the alkylcarbonyloxy group having 2 to 13 carbon atoms include an acetyloxy group, a propionyloxy group, a butyryloxy group, etc. The number of carbon atoms in the alkoxycarbonyl group, the alkylcarbonyl group, and the alkylcarbonyloxy group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3, respectively.

[0013] L 1 As -L 1A -X 1A -L 1B -or-L 1C - and L 2 As -L 2A -X 2A -L 2B -or-L 2C - are some examples. Among them, L 1 and L 2 At least one -CH2- in the alkanediyl group is preferably replaced by -O- or -CO-, and L 1 and L 2 are respectively, -L 1A -X 1A -L 1B - and -L 2A -X 2A -L 2B - is more preferable. L 1A , L 1B , L 2A and L 2B L each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms which may have one or more halogen atoms. 1C and L 2C each independently represents an alkanediyl group having 1 to 6 carbon atoms which may have a halogen atom. L 1A , L 1B , L 2A and L 2B and L 1C and L 2C As for the alkanediyl group of L, as far as the upper limit of the carbon number allows, 1 and L 2 Examples of the alkanediyl groups include the alkanediyl groups similar to the alkanediyl groups in the above. X 1A and X 2A each independently represents -O-, -CO-O-, -O-CO- or -O-CO-O-. L 1A and L 1BPreferably, one of L is a single bond, and the other is an alkanediyl group having 1 to 3 carbon atoms. 2A and L 2B Preferably, one of the groups is a single bond, and the other is an alkanediyl group having 1 to 3 carbon atoms. L 1C and L 2C are preferably each independently an alkanediyl group having 1 to 3 carbon atoms.

[0014] L 3A , L 3B and L 3C As the alkanediyl group, within the range permitted by the upper limit of the carbon number, L 1 and L 2 Examples of the alkanediyl group include the same groups as the alkanediyl groups listed above. L 3A , L 3B and L 3C The substituents that the alkanediyl group in L may have include 1 and L 2 Examples of the substituents include the same as those that the alkanediyl group may have. L 3A , L 3B and L 3C are each independently preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms which may have a substituent, more preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms which may have a halogen atom, and even more preferably a single bond.

[0015] R 3A , R 3B and R 3C L contained in each 31Examples of the hydrocarbon group in include linear or branched chain hydrocarbon groups such as alkanediyl groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may also be groups combining two or more of these groups (for example, hydrocarbon groups formed from an alicyclic hydrocarbon group and a chain hydrocarbon group). Chain hydrocarbon groups and alicyclic hydrocarbon groups are also referred to as aliphatic hydrocarbon groups, and alicyclic hydrocarbon groups and aromatic hydrocarbon groups are also referred to as cyclic hydrocarbon groups. The hydrocarbon group preferably has 1 to 24 carbon atoms, more preferably 1 to 20, and even more preferably 1 to 18 carbon atoms. Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl groups; Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The terminal of the branched alkanediyl group may be an alkyl group such as a methyl group. The chain hydrocarbon group may have 1 to 24 carbon atoms, preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups: The binding site can be any position. TIFF2025175980000016.tif41165Specifically, the alicyclic hydrocarbon group may be a monocyclic divalent alicyclic hydrocarbon group such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, or a cyclooctane-1,5-diyl group, Examples of such divalent alicyclic hydrocarbon groups include cycloalkyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, adamantane-2,6-diyl, spirocyclohexane-1,2'-cyclopentane, and spiroadamantane-2,3'-cyclopentane, and polycyclic cycloalkanediyl groups such as spiro rings each having a cycloalkyl group bonded to a norbornyl or adamantyl group via a spiro bond. The number of carbon atoms in the alicyclic hydrocarbon group may be 3 to 24, preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group may have 6 to 24 carbon atoms, preferably 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms. Examples of groups combining two or more types include a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group, a group combining an aromatic hydrocarbon group with a chain hydrocarbon group, a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group, a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group, etc. In the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups and chain hydrocarbon groups may each be combined. Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and a chain hydrocarbon group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-. L 31 -CH2- contained in the hydrocarbon group having 1 to 28 carbon atoms is -O-, -S-, -SO-, -SO2-, -NR 7 It may be replaced by - or -CO-. L 31 The -CH2- contained in the hydrocarbon group having 1 to 28 carbon atoms is -O-, -S-, -SO-, -SO2-, -NR 7 When it is replaced with - or -CO-, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group. R 7 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The -CH2- contained in the hydrocarbon group can be -O-, -S-, -SO-, -SO2-, or -NR 7 Examples of the group substituted with - or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 7-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), peptide group (a group in which -CH2-CH2- in an ethylene group is replaced with -CO-NR 7 -), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR 7 -), alkyl peptide group (wherein -CH2-CH2- at any position in the alkyl group is replaced by -CO-NR 7-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkoxyalkoxy group (a group in which two -CH2- at any position in an alkyl group are replaced with -O-), alkoxyalkyl group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), hydroxyalkyl group (a group in which -CH2- in a methyl group at any position in an alkyl group is replaced with -O-), replaced by -O-), alkanediyloxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), alkanediylcarbonyloxy group ( an alkanediyl group in which any -CH2-CH2- at any position is replaced by -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which any -CH2- at any position is replaced by -SO2-), an alkanediylthio group (an alkanediyl group in which any -CH2- at any position is replaced by -S-), an alkanediylamino group (an alkanediyl group in which any -CH2- at any position is replaced by -NR 7 -), alkanediyl peptide group (wherein any -CH2-CH2- at any position in the alkanediyl group is replaced by -CO-NR 7 -substituted), cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylamino group include alkylamino groups having 1 to 27 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkyl peptide group include alkyl peptide groups having 1 to 27 carbon atoms, such as a methyl peptide group, an ethyl peptide group, a propyl peptide group, etc. The number of carbon atoms in the alkyl peptide group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as a butoxycarbonyloxy group. Examples of the alkoxyalkoxy group include alkoxyalkoxy groups having 2 to 26 carbon atoms, such as a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, and an ethoxyethoxy group. The alkoxycarbonyl group has preferably 2 to 11 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkylcarbonyl group has preferably 2 to 12 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkylcarbonyloxy group has preferably 2 to 11 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkoxycarbonyloxy group has preferably 2 to 10 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkoxyalkoxy group has preferably 2 to 10 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkoxyalkyl group include alkoxyalkyl groups having 2 to 27 carbon atoms, such as methoxymethyl group, methoxyethyl group, ethoxymethyl group, ethoxyethyl group, ethoxypropyl group, ethoxybutyl group, propoxymethyl group, propoxyethyl group, isopropoxymethyl group, propoxypropyl group, butoxymethyl group, sec-butoxymethyl group, tert-butoxymethyl group, butoxyethyl group, sec-butoxyethyl group, tert-butoxyethyl group, etc. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of the hydroxyalkyl group include hydroxyalkyl groups having 1 to 27 carbon atoms, such as a hydroxymethyl group, a dihydroxymethyl group, a hydroxyethyl group, a dihydroxyethyl group, a hydroxypropyl group, a hydroxyisopropyl group, a hydroxybutyl group, a hydroxysec-butyl group, a hydroxytert-butyl group, a hydroxypentyl group, etc. The number of carbon atoms in the hydroxyalkyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 27 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, a hexyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyl peptide group include alkanediyl peptide groups having 1 to 27 carbon atoms, such as a methylene peptide group, an ethylene peptide group, a propylene peptide group, etc. The number of carbon atoms in the alkanediyl peptide group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0016] In addition, -CH2- contained in an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining these may be -O-, -S-, -CO-, -SO-, -NR 7 Examples of groups substituted with - or -SO2- include the following groups: -O- or -CO- in the groups shown below are -S-, -SO-, and -NR 7 The binding site can be at any position. TIFF2025175980000017.tif91170

[0017] L 31 Examples of the substituent that may be possessed by L include a halogen atom, a cyano group, and a nitro group. 31 However, in the case of a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be substantially used as a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. 31 The -CH2- contained in the chain hydrocarbon group such as the alkyl group contained in 7 - or -SO2-, L 31 can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an alkoxyalkoxy group, an alkylamino group, an amino group, a thiol group, an alkylthio group, an alkylsulfonyl group, an alkylpeptide group, etc. These groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L 31 The substituent in is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxy group or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and further preferably a methyl group or a fluorine atom.

[0018] L 31is preferably an alkanediyl group having 1 to 10 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-; the alkanediyl group may have a substituent), or a group combining an alkanediyl group having 1 to 4 carbon atoms with an alicyclic hydrocarbon group having 3 to 12 carbon atoms (-CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced with -O- or -CO-; the alkanediyl group and the alicyclic hydrocarbon group may have a substituent), more preferably an alkanediyl group having 1 to 6 carbon atoms, even more preferably an alkanediyl group having 1 to 3 carbon atoms, and even more preferably a methylene group.

[0019] R 3A , R 3B and R 3C X included in 3A is preferably *-CO-O-** or *-O-CO-O-**, more preferably *-CO-O-** (* and ** each represent a bonding site, ** represents L 31 or R 31 represents the binding site with ). R 3A , R 3B and R 3C X included in 3B is preferably *-CO-O-** or *-O-CO-O-**, more preferably *-CO-O-** (* and ** each represent a bonding site, ** represents R 31 represents the binding site with ).

[0020] R 3A , R 3B and R 3C R included in 31 Examples of the group containing a cyclic hydrocarbon group having 3 to 36 carbon atoms include a hydrocarbon group having 3 to 72 carbon atoms containing a cyclic hydrocarbon group having 3 to 36 carbon atoms, and include a group in which a cyclic hydrocarbon group having 3 to 36 carbon atoms or a cyclic hydrocarbon group having 3 to 36 carbon atoms is combined with a hydrocarbon group having 1 to 36 carbon atoms. R 3A , R 3B and R3C R included in 31 Examples of the hydrocarbon group include a linear or branched chain hydrocarbon group, a monocyclic or polycyclic alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which two or more of these groups are combined. These groups include, within the range permitted by the upper limit of the number of carbon atoms, 31 Examples of the hydrocarbon group include the same groups as those exemplified above. The hydrocarbon group may have a substituent, and the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO-, -SO2-, or -NR 7 It may be replaced by - or -CO-. R 31 The substituents that the hydrocarbon group may have include 31 Examples of the substituent that the hydrocarbon group may have include the same groups as those exemplified above, and R 31 The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO-, -SO2-, -NR 7 The group substituted for - or -CO- is L 31 The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO-, -SO2-, -NR 7 Examples of the group substituted with - or -CO- include the same groups as those exemplified above. The hydrocarbon group preferably has 1 to 24 carbon atoms, more preferably 1 to 18 carbon atoms, and even more preferably 1 to 12 carbon atoms. R 31When the group containing a cyclic hydrocarbon group is a group formed by combining a cyclic hydrocarbon group with a hydrocarbon group, the hydrocarbon group is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 12 carbon atoms with an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-), more preferably an alkanediyl group having 1 to 6 carbon atoms, even more preferably an alkanediyl group having 1 to 3 carbon atoms, and even more preferably a methylene group. R 3A , R 3B and R 3C R included in 31 The cyclic hydrocarbon group includes an alicyclic hydrocarbon group, and examples thereof include an alicyclic hydrocarbon group and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The cyclic hydrocarbon group may be saturated or unsaturated, and may be monocyclic or polycyclic (including a spiro ring, a fused ring, or a bridged ring). Examples thereof include an alicyclic hydrocarbon group having 3 to 36 carbon atoms, and a fused ring of an alicyclic hydrocarbon group having 3 to 24 carbon atoms and an aromatic hydrocarbon group having 6 to 10 carbon atoms. The number of carbon atoms in the cyclic hydrocarbon group is preferably 3 to 30, more preferably 3 to 24, and even more preferably 3 to 20. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Specific examples of the alicyclic hydrocarbon group include the groups shown below. The bonding site can be any position. TIFF2025175980000018.tif41165 Examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, and a cyclodecyl group. Examples of polycyclic alicyclic hydrocarbon groups include cycloalkyl groups having 5 to 8 carbon atoms, such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, a spirocyclohexane-1,2'-cyclopentane group, and a spiroadamantane-2,3'-cyclopentane group, and polycyclic cycloalkyl groups such as a spiro ring having a cycloalkyl group having 5 to 8 carbon atoms bonded to a norbornyl group or an adamantyl group via a spiro bond. The alicyclic hydrocarbon group preferably has 3 to 24 carbon atoms, more preferably 3 to 18 carbon atoms, even more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. Examples of the aromatic hydrocarbon group include the groups shown below: The bonding site can be any position. TIFF2025175980000019.tif1185Specific examples include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 24, more preferably 6 to 18, even more preferably 6 to 14, and still more preferably 6 to 10. R 31 The alicyclic hydrocarbon group in is preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an alicyclic hydrocarbon group having 3 to 12 carbon atoms, even more preferably an alicyclic hydrocarbon group having 5 to 12 carbon atoms, still more preferably a cyclohexyl group, norbornyl group or adamantyl group, and even more preferably an adamantyl group. The fused ring of an alicyclic hydrocarbon group and an aromatic hydrocarbon group is preferably a fused ring of the above-mentioned alicyclic hydrocarbon group and an aromatic hydrocarbon group, within the range permitted by the upper limit of the number of carbon atoms, and is preferably a fused ring of the above-mentioned alicyclic hydrocarbon group and a group derived from a benzene ring or a naphthalene ring.

[0021] R 31 The substituents of the cyclic hydrocarbon group are Ar 1 Substituents that may be possessed by aromatic hydrocarbon groups such as R 11 , R 12 and R 13 , R41A and Ring W x Examples of the substituent that the ring may have include the same groups as those exemplified above. Also, R 31 At least one cyclic hydrocarbon group has a polar structure and is an alicyclic hydrocarbon group having at least one polar group, or at least one -CH2-CH2- contained in the cyclic hydrocarbon group is replaced with -CO-O- or -SO2-O-, or at least one -CH2-CH2-CH2- contained in the cyclic hydrocarbon group is replaced with -O-CO-O-. In one embodiment of the present invention, R 31 The cyclic hydrocarbon group is an alicyclic hydrocarbon group having 3 to 36 carbon atoms, at least one of which has at least one polar group. The polar group may be a hydroxy group or a carboxy group, with a hydroxy group being preferred. The number of polar groups is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 to 2. R 31 However, the alicyclic hydrocarbon group having 3 to 36 carbon atoms and at least one polar group is preferably an alicyclic hydrocarbon group having 3 to 12 carbon atoms and one or two hydroxy groups, more preferably an alicyclic hydrocarbon group having 5 to 12 carbon atoms and one or two hydroxy groups, even more preferably a polycyclic alicyclic hydrocarbon group having 6 to 12 carbon atoms and one or two hydroxy groups, and even more preferably an adamantyl group having one or two hydroxy groups.

[0022] In one embodiment of the present invention, R 31Preferably, the cyclic hydrocarbon group is a cyclic hydrocarbon group having a lactone ring structure in which -CH2-CH2- in the cyclic hydrocarbon group is replaced with -CO-O-. The lactone ring structure is a structure obtained by removing one or more hydrogen atoms bonded to the atomic group constituting the lactone ring, and is a cyclic ester containing -CO-O- as the atomic group constituting the ring. The lactone ring structure may contain one or more heteroatoms such as oxygen atoms, sulfur atoms, or nitrogen atoms in addition to -CO-O- as the atomic group constituting the ring, and the hydrogen atoms bonded to the atomic group constituting the lactone ring may be replaced with substituents. The lactone ring may be a monocyclic lactone ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring with another ring. Among these lactone rings, a γ-butyrolactone ring, an adamantanelactone ring, or a condensed ring of a γ-butyrolactone ring with another ring is preferred.

[0023] Examples of the lactone ring corresponding to the structure before removal of the hydrogen atom in the lactone ring structure include lactone rings having 2 to 36 carbon atoms, such as rings in which -CH2-CH2- contained in an alicyclic hydrocarbon ring having 3 to 37 carbon atoms is replaced with -CO-O-. Of these, lactone rings having 3 to 18 carbon atoms are preferred. More specifically, lactone rings represented by formula (R-1), (R-2), (R-3), (R-4), (R-5), (R-6), (R-7), and (R-8) are included. Furthermore, like the lactone ring represented by formula (R-3) or (R-8), the ring may contain a heteroatom in addition to -CO-O- as an atomic group constituting the ring. Furthermore, the hydrogen atoms contained in the lactone ring may be replaced by a substituent. TIFF2025175980000020.tif30159The lactone ring is preferably a lactone ring represented by formula (R-1), formula (R-2), formula (R-3) or formula (R-6). Examples of the substituent on the lactone ring include a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, and a hydrocarbon group having 1 to 18 carbon atoms. Note that -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. The lactone ring may have 2 to 36 carbon atoms, preferably 3 to 36, more preferably 3 to 30, still more preferably 3 to 24, even more preferably 3 to 18, and still more preferably 3 to 12 carbon atoms.

[0024] R 31 is a cyclic hydrocarbon group having a lactone ring structure, at least one R 31 is the formula (R 10 -1), formula (R 10 -2) or formula (R 10 A group having a lactone ring group represented by formula (3) is preferred. TIFF2025175980000021.tif34119[Formula(R 10 -1)~Formula(R 10 -3) Medium, * denotes a binding site. Z 12 represents an oxygen atom, a sulfur atom or a methylene group. R 11 , R 12 and R 13 each independently represents a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. m11 represents an integer of 0 to 5, and when m11 is 2 or more, a plurality of R 11 may be the same or different from each other. m12 represents an integer of 0 to 5, and when m12 is 2 or more, a plurality of R 12 may be the same or different from each other. m13 represents an integer of 0 to 5, and when m13 is 2 or more, a plurality of R 13 may be the same or different from each other. n10 represents an integer of 1 to 3.

[0025] R 11 , R 12 and R 13 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 11 , R 12 and R 13 The fluorinated alkyl group having 1 to 6 carbon atoms refers to an alkyl group having 1 to 6 carbon atoms and containing a fluorine atom, and examples thereof include perfluoroalkyl groups having 1 to 6 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group), as well as 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, and 3,3,4,4,4-pentafluorobutyl group. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. R 11 , R 12 and R 13 Examples of the hydrocarbon group having 1 to 18 carbon atoms include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The alkanediyl group is a linear or branched alkanediyl group, such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, or a hexane-1,6-diyl group; and Examples include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The chain hydrocarbon group preferably has 1 to 12 carbon atoms, more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, even more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position. TIFF2025175980000022.tif47170Specifically, monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Polycyclic alicyclic hydrocarbon groups include cycloalkyl groups such as decahydronaphthyl, adamantyl, norbornyl, spirocyclohexane-1,2'-cyclopentane, and spiroadamantane-2,3'-cyclopentane, as well as polycyclic cycloalkyl groups such as spiro rings having cycloalkyl groups bonded to norbornyl or adamantyl groups via spiro bonds.The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0026] Groups formed by combining two or more groups include groups combining an aromatic hydrocarbon group with a chain hydrocarbon group (e.g., aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*), groups combining an alicyclic hydrocarbon group with a chain hydrocarbon group (e.g., alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*, alkyl group-alicyclic hydrocarbon group-alkanediyl group-*), and groups combining an aromatic hydrocarbon group with a alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*). * represents a bonding site. In each group, -CH2- contained in the alkanediyl group, alkyl group, and alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group. Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, and 1-(adamantan-1-yl)-1-methylethyl group. Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group. Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenylcyclohexyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group. In addition, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Furthermore, -CH2- contained in the alicyclic hydrocarbon group or chain hydrocarbon group (alkanediyl group, alkyl group) may be replaced with -O-, -S-, -CO-, or -SO2-. Any of the combined groups may be bonded to the lactone ring.

[0027] Examples of groups in which -CH2- in a hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include a hydroxy group, a carboxy group, a thiol group, an amino group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkoxy group, an alkylthio group, an alkylsulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an alkoxyalkoxy group, an alkoxyalkyl group, a hydroxyalkyl group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylthio group, an alkanediylsulfonyl group, and the like, and include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Furthermore, examples of groups in which -CH2- contained in an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining these is replaced with -O-, -S-, -CO-, or -SO2- include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. When a -CH2- in a hydrocarbon group is replaced with -O-, -S-, -CO-, or -SO2-, the total number of carbon atoms in the hydrocarbon group is the number of carbon atoms before the replacement, which may be one or more.

[0028] Preferably, m11, m12, and m13 each independently represent 0 to 2, and more preferably 0. n10 is preferably 1 or 2.

[0029] Formula (R 10 -1), formula (R 10 -2) or formula (R 10Examples of the group having a lactone ring group represented by -3) include the following groups: * represents a bonding site. TIFF2025175980000023.tif47155

[0030] In one embodiment of the present invention, R 31 The cyclic hydrocarbon group is preferably a cyclic hydrocarbon group having a sultone ring structure in which one —CH 2 —CH 2 — contained in the cyclic hydrocarbon group is replaced with —SO 2 —O—. R 31 When the cyclic hydrocarbon group is a group having a sultone ring structure, it is a group having —SO2—O— in the cyclic structure (monocyclic or polycyclic), and for example, 1 Here, the bonding site of the sultone ring can be at any position (the same applies hereinafter). TIFF2025175980000024.tif2666[formula(T 1 ) inside, Ring A represents a sultone ring having a carbon number of 2 to 24. -CH2- contained in ring A may be replaced with -O-, -S- or -NH-. R 41A represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41A may be the same or different.] The sultone ring may be either monocyclic or polycyclic. The number of carbon atoms in the sultone ring is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, still more preferably 3 to 16, even more preferably 3 to 12, and still more preferably 3 to 10.

[0031] The sultone ring of ring A is preferably a sultone ring having 3 to 18 carbon atoms, more preferably a sultone ring having 3 to 10 carbon atoms, and examples thereof include sultone rings represented by the following formula (T 1 -0), a polycyclic ring represented by the formula (T 1 -3) and the formula (T 1 Among them, a polycyclic ring is preferable. The polycyclic sultone ring means a bridged ring containing -SO2-O- as an atomic group constituting the ring, and is represented by the formula (T 1 -1), formula (T 1 -2), formula (T 1 -5) and formula (T 1 The sultone ring is represented by the formula (T 1 -2), formula (T 1 -5) and formula (T 1 As in the ring represented by formula (6), in addition to -SO2-O-, a hetero atom may be contained as a ring-constituting atom. Examples of the hetero atom include an oxygen atom, a sulfur atom, and a nitrogen atom, and an oxygen atom is preferred. TIFF2025175980000025.tif32136where X 1A represents an oxygen atom, a sulfur atom, —NH—, or a methylene group. X 31A is preferably an oxygen atom or a methylene group, more preferably a methylene group. R 41A Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group. Preferably, it is an alkyl group having 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms, and even more preferably a methyl group or an ethyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and preferably a trifluoromethyl group. Examples of the alkyl group having a hydroxy group include a hydroxyalkyl group such as a hydroxymethyl group and a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxycarbonyl group include groups in which an alkoxy group, such as a methoxycarbonyl group or an ethoxycarbonyl group, is bonded to a carbonyl group, and preferred are alkoxycarbonyl groups having 6 or less carbon atoms, more preferably a methoxycarbonyl group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. R 41A is preferably an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom or a hydroxy group, more preferably an alkyl group having 1 to 4 carbon atoms, even more preferably a methyl group or an ethyl group, and even more preferably a methyl group. ma is preferably an integer of 0 to 7, more preferably an integer of 0 to 4, further preferably 0 or 1, and even more preferably 0. In other words, the group having -SO2- is more preferably a group having a sultone ring without a substituent.

[0032] As the sultone ring, a ring represented by the following formula (T1A) is preferred, and a ring represented by the formula (T1) is more preferred. TIFF2025175980000026.tif36100 [In formula (T1A) and formula (T1), all symbols have the same meanings as defined above.]

[0033] Formula(T 1 ), the ring represented by formula (T1A), and the ring represented by formula (T1) include the following rings. As described above, the binding site can be at any position, but in the following rings, the 1st or 3rd position is preferred, and the 1st position is more preferred. TIFF2025175980000027.tif77159

[0034] In one embodiment of the present invention, R 31 The cyclic hydrocarbon group is preferably a cyclic hydrocarbon group having a cyclic carbonate structure in which one —CH 2 —CH 2 —CH 2 — contained in the cyclic hydrocarbon group is replaced with —O—CO—O—. R 31 The cyclic carbonate structure means a structure having —O—CO—O— as atoms constituting a ring. The cyclic carbonate structure may be monocyclic or polycyclic, and may have heteroatoms such as oxygen atoms, sulfur atoms, and nitrogen atoms in addition to the oxygen atoms that form the carbonate structure. The number of carbon atoms in the cyclic carbonate structure is, for example, 2 to 30, preferably 2 to 24, more preferably 2 to 18, even more preferably 2 to 16, and even more preferably 3 to 12. The ring of the cyclic carbonate structure is preferably a 3- to 18-membered ring, more preferably a 3- to 16-membered ring, even more preferably a 4- to 12-membered ring, even more preferably a 4- to 10-membered ring, even more preferably a 5- to 8-membered ring, and even more preferably a 5-membered ring. The ring may be a monocyclic structure or a bicyclic or tricyclic polycyclic structure. Two carbon atoms in the ring may be bonded by a double bond. When -CH2- in the ring is replaced with -O- or the like, it is preferred that the -CH2- not adjacent to -O-CO-O- is replaced with -O- or the like.

[0035] Examples of the cyclic carbonate structure include structures represented by formulas (x1) to (x16), preferably a structure represented by any of formulas (x1) to (x3), (x9), and (x16), more preferably a structure represented by any of formulas (x1) to (x3), and even more preferably a structure represented by formula (x1). The binding site can be at any position. TIFF2025175980000028.tif68134

[0036] The cyclic carbonate structure may have a substituent, and examples of the substituent include an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, a hydroxy group, an alkoxy group having 1 to 6 carbon atoms, and a group formed by combining two or more of these groups. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be monocyclic, polycyclic, or spirocyclic. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl, and polycyclic cycloalkyl groups such as norbornyl and adamantyl. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, etc. The alkoxy group preferably has 1 to 4 carbon atoms, and more preferably 1 to 3 carbon atoms.

[0037] The group having a cyclic carbonate structure is preferably a group represented by formula (Ix). TIFF2025175980000029.tif2662[In formula (Ix), Ring W x represents a ring of a 3- to 18-membered cyclic carbonate structure which may have a substituent, and the cyclic carbonate structure may have a heteroatom. L 32 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * denotes a binding site.]

[0038] Ring W of the group having a cyclic carbonate structure x Examples of such groups include the following structures: * in the following groups indicates a binding site. TIFF2025175980000030.tif79157L 32 Examples of the hydrocarbon group include a linear or branched chain hydrocarbon group, a monocyclic or polycyclic alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which two or more of these groups are combined. These groups include, within the range permitted by the upper limit of the number of carbon atoms, 31 Examples of the hydrocarbon group include the same groups as those exemplified above. The hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. L 32 The substituents that the hydrocarbon group may have include 31 Examples of the substituent that the hydrocarbon group of L may have include the same groups as those exemplified above. 32 Examples of the hydrocarbon group in which -CH2- is replaced by -O-, -S-, -CO- or -SO2- include L 31 Examples of the hydrocarbon group include the same groups as those exemplified above in which one --CH.sub.2-- in the hydrocarbon group is replaced by --O--, --S--, --CO-- or --SO.sub.2--. The hydrocarbon group preferably has 1 to 24 carbon atoms, more preferably 1 to 18 carbon atoms, and even more preferably 1 to 12 carbon atoms. L 32 is preferably a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), or a group combining a chain hydrocarbon group having 1 to 12 carbon atoms with an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), more preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms, even more preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, and even more preferably a single bond or a methylene group.

[0039] L 5A , L 5B and L 5C As the alkanediyl group, within the range permitted by the upper limit of the carbon number, L 1 and L 2 Examples of the alkanediyl group include the same groups as the alkanediyl groups listed above. L 5A , L 5B and L 5CThe substituents that the alkanediyl group in L may have include 1 and L 2 Examples of the substituents include the same as those that the alkanediyl group may have. L 5A , L 5B and L 5C is preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms which may have a substituent, more preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms which may have a halogen atom, and even more preferably a single bond.

[0040] R 5A , R 5B and R 5C L contained in each 51 The hydrocarbon group in 31 Examples of the hydrocarbon groups include the same groups as those listed above. L 51 The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO2-, -SO-, -NR 7 - or -CO-, L 31 The hydrocarbon group -CH2- is -O-, -S-, -SO2-, -SO-, -NR 7 Examples include the same groups as those substituted with - or -CO-. L 51 Examples of the substituents that may be possessed by L 31 Examples of the substituents that may be contained in the group include the same groups as those that may be contained in the group. L 51 The substituent that may be possessed by is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxy group, or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and further preferably a methyl group or a fluorine atom.

[0041] L 51is preferably an alkanediyl group having 1 to 10 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-; the alkanediyl group may have a substituent), or a group combining an alkanediyl group having 1 to 4 carbon atoms with an alicyclic hydrocarbon group having 3 to 12 carbon atoms (-CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced with -O- or -CO-; the alkanediyl group and the alicyclic hydrocarbon group may have a substituent), more preferably an alkanediyl group having 1 to 6 carbon atoms, even more preferably an alkanediyl group having 1 to 3 carbon atoms, and even more preferably a methylene group.

[0042] R 5A , R 5B and R 5C X included in 5A is preferably *-CO-O-** or *-O-CO-O-**, more preferably *-CO-O-** (* and ** each represent a bonding site, ** represents L 51 or R 51 represents the binding site with ). R 5A , R 5B and R 5C X included in 5B is preferably *-CO-O-** or *-O-CO-O-**, more preferably *-CO-O-** (* and ** each represent a bonding site, ** represents R 51 represents the binding site with ).

[0043] R 5A , R 5B and R 5C R contained in each of 51 is a group represented by formula (IC). 5A , R 5B and R 5C R contained in each 51 may be the same or different from each other. TIFF2025175980000031.tif2982[In formula (IC), RA represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R A are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 1 or 2. L 12 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -S-, -CO-, -SO-, -NR 7 It may be replaced by - or -SO2-. * denotes a binding site.]

[0044] L 12 Examples of the hydrocarbon group having 1 to 36 carbon atoms include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkanediyl groups, alkenediyl groups, and alkynediyl groups, and monocyclic or polycyclic alicyclic hydrocarbon groups), aromatic hydrocarbon groups, and the like, and may also be hydrocarbon groups formed by combining two or more of these groups. 12 The -CH2- contained in the hydrocarbon group in 7 It may be replaced by - or -SO2-. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, and a dodecane-1,12-diyl group; Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. Examples of the alkenediyl group include an ethenediyl group, a propenediyl group, an isopropenediyl group, a butenediyl group, an isobutenediyl group, a tert-butenediyl group, a pentenediyl group, a hexenediyl group, a heptenediyl group, an octenediyl group, an isooctenediyl group, and a nonenediyl group. Examples of the alkynediyl group include an ethynediyl group, a propynediyl group, an isopropynediyl group, a butynediyl group, an isobutynediyl group, a tert-butynediyl group, a pentynediyl group, a hexynediyl group, an octynediyl group, and a nonynediyl group. The chain hydrocarbon group may have 1 to 24 carbon atoms, preferably 1 to 12, more preferably 1 to 9, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0045] L 12 The -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 7 If it is replaced with - or -SO2-, the number of carbon atoms before replacement is L 12 The total number of carbon atoms in the hydrocarbon group is 1. The number may be 1 or 2 or more. The -CH2- contained in the alkanediyl group may be -O-, -S-, -CO-, -SO-, or -NR 7Examples of the group substituted with - or -SO2- include a hydroxy group, a carboxy group, a thiol group, an amino group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, a peptide group, an alkoxy group, an alkylthio group, an alkylsulfonyl group, an alkylamino group, an alkylpeptide group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an alkoxyalkoxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylthio group, an alkanediylsulfonyl group, an alkanediylamino group, an alkanediylpeptide group, and a group combining two or more of these groups, and include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the carbon number. Note that the substitution in an alkenediyl group or an alkynediyl group may include a carbon-carbon double bond or a carbon-carbon triple bond at any position in the above-mentioned examples of substitution in an alkanediyl group.

[0046] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position. TIFF2025175980000032.tif41165Specifically, examples of monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, cyclohexene-3,6-diyl, and cyclooctane-1,5-diyl; examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl, norbornane-1,5-diyl, and and polycyclic cycloalkanediyl groups such as 5-norbornene-2,5-diyl, 5-norbornene-2,3-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond. The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms. In addition, -CH2- contained in an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining these may be -O-, -S-, -CO-, -SO-, -NR 7 The group substituted with - or -SO2- includes the same groups as those exemplified in this specification, within the upper limit of the carbon number.

[0047] Examples of hydrocarbon groups that combine two or more groups include groups that combine a chain hydrocarbon group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group, and the combinations may each comprise two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups. Examples include -alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-aromatic hydrocarbon group-, and -aromatic hydrocarbon group-alkanediyl group-. Any of the groups may be bonded to an oxygen atom or a carbonyl group.

[0048] L 12 Examples of the substituent on the hydrocarbon group include a halogen atom, a cyano group, a hydroxy group, a carboxy group, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and a dodecyloxy group. The alkoxycarbonyl group having 2 to 13 carbon atoms, the alkylcarbonyl group having 2 to 13 carbon atoms, and the alkylcarbonyloxy group having 2 to 13 carbon atoms represent groups in which a carbonyl group or a carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group. Examples of the alkoxycarbonyl group having 2 to 13 carbon atoms include a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group having 2 to 13 carbon atoms include an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group having 2 to 13 carbon atoms include an acetyloxy group, a propionyloxy group, and a butyryloxy group. L 12 The hydrocarbon group in may have one or more substituents.

[0049] L 12 represents a single bond, an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group is -O-, -S-, -SO2-, -SO-, -NR 7 - or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 7 - or -CO-) or a group in which an alkanediyl group having 1 to 6 carbon atoms is combined with an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2-, -SO-, -NR 7 - or -CO-), more preferably an alkanediyl group having 1 to 6 carbon atoms, even more preferably an alkanediyl group having 1 to 3 carbon atoms, and even more preferably a methylene group.

[0050] s1 is preferably 1, t1 is preferably 1, and the sum of s1 and t1 is preferably 2. The group represented by formula (IC) is preferably a group represented by the following formula: TIFF2025175980000033.tif2396

[0051] In the group represented by formula (IC), u1 is 1 and R A L 12 The group bonded to the carbon atom adjacent to is represented by the formula: TIFF2025175980000034.tif3144R A Examples of the saturated hydrocarbon group include chain saturated hydrocarbon groups such as alkyl groups, alicyclic saturated hydrocarbon groups, and groups in which two or more of these groups are combined. R A Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, a nonyl group, etc. The number of carbon atoms in the chain saturated hydrocarbon group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. The alicyclic saturated hydrocarbon group may be any of monocyclic, polycyclic, and spirocyclic. Examples of the alicyclic saturated hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl, and polycyclic cycloalkyl groups such as norbornyl and adamantyl. The number of carbon atoms in the alicyclic saturated hydrocarbon group is preferably 3 to 10, more preferably 3 to 8, and even more preferably 3 to 6. The combined group may be a group in which one chain saturated hydrocarbon group and one alicyclic saturated hydrocarbon group are combined, or a group in which two or more of either or two or more of both are combined.

[0052] m1 is preferably an integer of 0 to 5, more preferably an integer of 0 to 4, even more preferably an integer of 0 to 3, still more preferably 0, 1 or 2, and even more preferably 0 or 2. m2 is preferably an integer from 0 to 5, more preferably an integer from 0 to 4, even more preferably an integer from 0 to 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m3A is preferably an integer of 0 to 3, and more preferably 0, 1 or 2. m3B is preferably an integer of 0 to 3, and more preferably 0, 1 or 2. m3C is preferably an integer of 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. However, 1≦m3A+m3B+m3C≦8. m5A is preferably an integer of 0 to 3, and more preferably 0, 1 or 2. m5B is preferably an integer of 0 to 3, and more preferably 0, 1 or 2. m5C is preferably an integer of 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. However, 1≦m5A+m5B+m5C≦8.

[0053] Examples of compound (I) include compounds represented by the following formula (Ia), formula (Ib), formula (Ic), formula (Id) or formula (Ie). TIFF2025175980000035.tif119165 [In the formula (Ia), formula (Ib), formula (Ic), formula (Id) and formula (Ie), Symbols other than those shown below have the same meanings as in formula (I). m3A', m3B', m3C', m5A', m5B' and m5C' each independently represent an integer of 1 or 2, and when each is 2, the groups in each of the two parentheses may be the same or different. m3A'', m3B'', m5A'', and m5B'' each independently represent an integer of 0 or 1.] In the compounds of the above formula, Ar 1 , Ar 2 , Ar 3 , L 1 and L 2 When each of these is contained multiple times, each of the multiple Ar 1 , Ar 2 , Ar 3 , L 1 and L 2 may be the same or different from each other.

[0054] When m1 is 0, m3A is preferably 1 or 2, and m5A is preferably 1 or 2. Compound (I) is preferably, for example, a compound represented by the above formula (Ia). When m1 is other than 0, m1 is preferably 1 or 2, more preferably 2. Also, m2 is preferably 0 or 1. Compound (I) is preferably a compound represented by, for example, the above formula (Ia) or formula (Ib), or the following formula (IA), formula (IB) or formula (IC), and more preferably a compound represented by the following formula (IA). TIFF2025175980000036.tif85142 [In formula (IA), formula (IB) and formula (IC), Ar 1 , Ar 2 , L 1 , L 2 , L 3B , L 3C , R 3B , R 3C , L 5B , L 5C , R 5B and R 5C has the same meaning as in formula (I). m3B', m5B', m3C' and m5C' each independently represent 1 or 2.]

[0055] Examples of the compound (I) include compounds represented by the following formula: TIFF2025175980000037.tif248153

[0056] TIFF2025175980000038.tif250155

[0057] TIFF2025175980000039.tif240151

[0058] TIFF2025175980000040.tif246151

[0059] TIFF2025175980000041.tif231153

[0060] TIFF2025175980000042.tif72161

[0061] In the resist composition of the present invention, the content of Compound (I) relative to the solid content of the resist composition is 1% by mass or more, preferably 5% by mass or more, more preferably 10% by mass or more, even more preferably 20% by mass or more, and even more preferably 30% by mass or more. Also, it can be 90% by mass or less, preferably 85% by mass or less, more preferably 80% by mass or less, and even more preferably 75% by mass or less. For example, it can be 0.1 to 90% by mass, preferably 1 to 85% by mass, more preferably 5 to 85% by mass, and even more preferably 10 to 85% by mass.

[0062] <Method for producing compound (I)> Compound (I) can be produced, for example, by reacting a compound represented by formula (Ia) with a compound represented by formula (I-b1) or a compound represented by formula (I-b2) in a solvent in the presence of a catalyst. TIFF2025175980000043.tif87163 (wherein all symbols have the same meanings as defined above.) Examples of the catalyst include potassium carbonate, potassium iodide, pyridine, diethylaminopyridine, triethylamine, and carbonyldiimidazole. Examples of the solvent include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, and water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0063] Examples of compounds represented by formula (Ia) include the compounds represented by the following formulas, which are readily available on the market and can also be easily produced by known production methods. TIFF2025175980000044.tif176157

[0064] Examples of compounds represented by formula (I-b1) include the compounds represented by the following formulas, which are readily available on the market and can also be easily produced by known production methods. TIFF2025175980000045.tif17165 Compounds represented by formula (I-b2) include, for example, the compounds represented by the following formulas, which are readily available on the market and can also be easily produced by known production methods. TIFF2025175980000046.tif17165

[0065] <Acid generator (B)> When the resist composition of the present invention contains an acid generator, the total content of the acid generator is preferably 0.1 to 99.9% by mass, more preferably 1 to 45% by mass, even more preferably 1 to 40% by mass, and even more preferably 3 to 40% by mass, relative to the solid content of the resist composition. When the resist composition of the present invention contains a resin described below, the total content of the acid generator (B) is preferably 1 part by mass or more, more preferably 3 parts by mass or more, and preferably 55 parts by mass or less, more preferably 50 parts by mass or less, and even more preferably 45 parts by mass or less, relative to 100 parts by mass of the resin.

[0066] The acid generator (B) may be either a nonionic or ionic acid generator. Examples of nonionic acid generators include sulfonate esters (e.g., 2-nitrobenzyl esters, aromatic sulfonates, oximesulfonates, N-sulfonyloxyimides, sulfonyloxyketones, and diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfones, ketosulfones, and sulfonyldiazomethanes). Typical examples of ionic acid generators include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, and iodonium salts). Examples of anions of onium salts include sulfonate anions, sulfonylimide anions, sulfonylmethide anions, and carboxylate anions. Furthermore, the acid generator (B) may be a part of a structural unit that constitutes the resin contained in the resist composition of the present invention, such as the structural unit (a7) described below.

[0067] The acid generator (B) may be a compound that generates an acid when exposed to radiation, as described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Pat. No. 3,779,778, U.S. Pat. No. 3,849,137, German Patent No. 3,914,407, or European Patent No. 126,712. Compounds produced by known methods may also be used. The acid generator (B) may be used singly or in combination of two or more. The acid generator (B) may also be an acid generator having an acid labile group. For example, the compound or resin that serves as the acid generator may contain a partial structure that becomes an acid labile group, and the acid labile group preferably contains the group (1) or group (2) described below. When the resist composition of the present invention contains a compound or the like that has an acid labile group, it does not necessarily need to contain a resin that contains a structural unit that has an acid labile group.

[0068] Preferred embodiments of the acid generator (B) include a salt represented by formula (B1) (hereinafter sometimes referred to as "salt (B1)" or "acid generator (B1)") and a salt represented by formula (B2) (hereinafter sometimes referred to as "salt (B2)" or "acid generator (B2)"). TIFF2025175980000047.tif1391 [In formula (B1), all symbols have the same meanings as defined above.]

[0069] L b1 The (nb1+1)-valent hydrocarbon group is a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, or a monovalent group that combines two or more of these groups, from which nb1 hydrogen atoms have been removed to form one or more L b2 The hydrocarbon group may have 1 to 48 carbon atoms, preferably 1 to 42, more preferably 1 to 36, even more preferably 1 to 30, still more preferably 1 to 24, and even more preferably 1 to 18. Examples of the chain hydrocarbon group include groups in which nb hydrogen atoms have been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, isobutyl, tert-butyl, pentyl, hexyl, heptyl, octyl, nonyl, decyl, undecyl, dodecyl, tridecyl, tetradecyl, pentanedecyl, and heptadecyl. Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl. The number of carbon atoms in the chain hydrocarbon group can be 1 to 48, preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 20, still more preferably 1 to 18, even more preferably 1 to 12, and even more preferably 1 to 10. Examples of the alicyclic hydrocarbon group include groups in which nb hydrogen atoms have been removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a bridged structure, cycloalkyl groups in which two or more rings are fused, and cycloalkyl groups in which two rings are bonded via a spiro bond. Examples of cycloalkyl groups having a bridged structure include a norbornyl group and an adamantyl group. Examples of cycloalkyl groups in which two or more rings are fused include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of cycloalkyl groups in which two rings are bonded via a spiro bond include spirocyclic cycloalkyl groups in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is bonded via a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, alicyclic hydrocarbon groups represented by the following formulas are included. TIFF2025175980000048.tif26168When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, still more preferably 3 to 12, even more preferably 3 to 10, and still more preferably 3 to 8.When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, still more preferably 6 to 12, and even more preferably 7 to 12. Examples of aromatic hydrocarbon groups include groups in which nb1 hydrogen atoms have been removed from an aryl group. Examples of aryl groups include phenyl, naphthyl, anthryl, biphenyl, and fluorenyl groups. More specifically, examples of aromatic hydrocarbon groups include those represented by the following formulas: TIFF2025175980000049.tif1187The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, still more preferably 5 to 14, even more preferably 5 to 10, and even more preferably 6 to 10. L b1 When -CH2- in the hydrocarbon group is replaced with -O-, -CO-, -S-, -SO- or -SO2-, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the hydrocarbon group. L b1Among the hydrocarbon groups in the above, groups in which -CH2- in a chain hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2- in an ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), an oxy group (a group in which -CH2- in a methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (an alkyl ... Examples of such a group include an alkyl group in which -CH- at any position is replaced with -CO-), an alkylcarbonyloxy group (a group in which -CH-CH- at any position is replaced with -CO-O-), an alkanediyloxy group (a group in which -CH- at any position is replaced with -O-), an alkanediyloxycarbonyl group (a group in which -CH- at any position is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which -CH- at any position is replaced with -CO-), and an alkanediylcarbonyloxy group (a group in which -CH- at any position is replaced with -CO-) within the range permitted by the upper limit of the number of carbon atoms. Examples of such a substituted group include the same groups as those exemplified in this specification. L b1 Among these hydrocarbon groups, examples of groups in which -CH- in an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining these is replaced with -O-, -CO-, -S-, -SO-, or -SO- include groups containing structures such as cyclic ether, cyclic ketone, cyclic ester (lactone), cyclic thioether, cyclic acetal, cyclic sulfonate ester (sultone), and groups derived from a furan ring, thiophene ring, etc. These substituted groups include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Examples of the group combining two or more groups selected from the group consisting of a chain hydrocarbon group, an alicyclic hydrocarbon group, and an aromatic hydrocarbon group include a group combining the above-mentioned chain hydrocarbon group with the above-mentioned alicyclic hydrocarbon group, a group combining the above-mentioned chain hydrocarbon group with the above-mentioned aromatic hydrocarbon group, a group combining the above-mentioned alicyclic hydrocarbon group with the above-mentioned aromatic hydrocarbon group, and a group combining the above-mentioned chain hydrocarbon group with the above-mentioned alicyclic hydrocarbon group and the above-mentioned aromatic hydrocarbon group. The group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group may be a fused ring. L b2 Examples of the divalent hydrocarbon group include a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group formed by combining two or more of these groups. A monovalent hydrocarbon group can be obtained by removing one hydrogen atom to form Y b1 Examples of such groups include groups that bond to the following: L b2 The divalent chain hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group formed by combining two or more of these groups are each, within the range permitted by the upper limit of the number of carbon atoms, L b1 Examples of the monovalent hydrocarbon group include a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group obtained by combining two or more of these groups and removing one hydrogen atom from them. L b1 and L b2 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L b1 and L b2 When L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as substantially a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. b1 and L b2 The -CH2- of the chain hydrocarbon group contained in the hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO2-, thereby forming L b1 and L b2The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxy group, a carbonyl group, an oxycarbonyl group, a carbonyloxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, or an alkylsulfonyl group. L b1 and L b2 The number of substituents that may be possessed by the group is not particularly limited, and the group may have a plurality of substituents. Y b1 Examples of the cyclic hydrocarbon group include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined. Y b1 The alicyclic hydrocarbon group and the aromatic hydrocarbon group are, respectively, L b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups include those similar to those exemplified in 1., and when they have no substituent, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1 Examples of the substituent that the methyl group may have include a halogen atom, a cyano group, a hydroxy group, and a nitro group. Y b1 Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, and a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group, or a nitro group (-CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-). b1 The number of carbon atoms in the hydrocarbon group that may be contained in the cyclic hydrocarbon group is b1 The carbon number of the cyclic hydrocarbon group is not included in the carbon number of the cyclic hydrocarbon group. The halogen atoms include L b1 and L b2 Examples of the halogen atoms include the same halogen atoms as those exemplified as the substituents of the above. Y b1Examples of the hydrocarbon group having 1 to 18 carbon atoms that may be substituted on the cyclic hydrocarbon group include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups combining two or more of these groups include, within the range permitted by the upper limit of the number of carbon atoms, L b1 Examples of the hydrocarbon groups include the chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups in which two or more of these groups are combined, as exemplified above. Also, Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms in which -CH2- is replaced with -O-, -S-, -CO-, -SO- or -SO2- that may be substituted on the cyclic hydrocarbon group include, within the range permitted by the upper limit of the number of carbon atoms, L b1 Examples of the hydrocarbon group include the same groups as those exemplified above in which -CH2- in the hydrocarbon group is replaced with -O-, -S-, -CO-, -SO- or -SO2-. b1 The hydrocarbon group having 1 to 18 carbon atoms which may be substituted on the cyclic hydrocarbon group may constitute a protecting group or leaving group (acid labile group or base labile group) commonly used in the art. The anion of the salt represented by formula (B1) is preferably an anion represented by the following formula (B1-A1) (hereinafter, sometimes referred to as "anion (B1-A1)") or an anion represented by formula (B1-A2) (hereinafter, sometimes referred to as "anion (B1-A2)"). TIFF2025175980000050.tif30125[In formula (B1-A1), L b2 and Y b1 has the same meaning as in formula (B1). Q b1 , Q b2 , Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer of 0 to 6. When z1 is 2 or more, the groups in the parentheses may be the same or different. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or an (nb2+1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. nb2 represents an integer of 1 to 3. When nb2 is 2 or greater, the groups in the parentheses may be the same or different.] Q b1 , Q b2 , Q b3 and Q b4 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Q b1 , Q b2 , Q b3 and Q b4 Examples of the perfluoroalkyl group include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Q b1 and Q b2 Q b1 and Q b2 At least one of the groups preferably contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4 are each preferably independently a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably an integer of 0 to 3, and more preferably 0, 1 or 2. X 1 is preferably —O—CO— or —CO—O—.

[0070] L b3 As the hydrocarbon group in the formula (B1), within the range permitted by the upper limit of the number of carbon atoms, b1 The same hydrocarbon groups as those exemplified above can be mentioned. In formula (B1-A1), L b3 is preferably a single bond, an optionally substituted chain hydrocarbon group of 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an optionally substituted alicyclic hydrocarbon group of 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-), an optionally substituted aromatic hydrocarbon group of 6 to 10 carbon atoms (-CH2- contained in the aromatic hydrocarbon group may be replaced with -O- or -S-), or a group comprising a combination of two or more of these groups, and more preferably a single bond, an optionally substituted chain hydrocarbon group of 1 to 6 carbon atoms, or a group represented by the following formula (Lb3-1): When -CH2- in the chain hydrocarbon group is replaced with -O- or -CO-, the number of -CH2- in the chain hydrocarbon group replaced with -O- or -CO- is preferably 1 to 4, and it is preferred that one -CH2-CH2- in the chain hydrocarbon group is replaced with -O-CO- or -CO-O-, or one -CH2-CH2-CH2- in the chain hydrocarbon group is replaced with -O-CO-O-. TIFF2025175980000051.tif1581[In formula (Lb3-1), nb2 has the same meaning as in formula (B1-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the chain hydrocarbon group may have a substituent. W b3represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-, and -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent binding sites, * represents X 1 represents the binding site with In formula (Lb3-1), L b31 The chain hydrocarbon group of L is as long as the upper limit of the carbon number allows. b1 Examples of the chain hydrocarbon groups include the same groups as those exemplified above. In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group of L are as long as the upper limit of the carbon number allows. b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups are the same as those exemplified above. In formula (Lb3-1), L b31 The substituents which the chain hydrocarbon group of W may have and b3 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group may have are b1 Examples of the substituent that the hydrocarbon group may have include the same groups as the substituents exemplified above. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group are preferably the alicyclic hydrocarbon group and aromatic hydrocarbon group shown below. In the alicyclic hydrocarbon group and aromatic hydrocarbon group shown below, * and ** represent a bonding site, * represents X 1 or L b31 represents a bonding site with L, and ** represents a hydrogen atom, a substituent, or L b2 represents a binding site with at least one ** b2represents a bonding site with. In the alicyclic hydrocarbon groups represented below, -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-. When -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO-, -SO-, or -SO2-, it is preferable that an ether ring, ester ring (lactone ring), carbonate ester ring, sulfonate ester ring (sultone ring), or acetal ring is formed. In TIFF2025175980000052.tif36163 formula (B1-A1), L b2 is preferably a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and is preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or -L b21 -X 2 -L b22 -**(L b21 and L b22 One of X represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-. * and ** represent binding sites, and ** represents Y b1 represents the binding site with L b21 , X 2 and L b22 The total number of carbon atoms is 12 or less. In formula (B1-A1), Y b1is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and even more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (-CH2- in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-) or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, groups represented by the following formulae (Y1) to (Y36) are more preferred. In formulas (Y1) to (Y36), R Yb is a hydrogen atom or Y b1 Among the substituents that the cyclic hydrocarbon group may have, R represents an alkyl group having 1 to 4 carbon atoms. Yc is a hydrogen atom or Y b1 represents a substituent that the cyclic hydrocarbon group of the formula (I) may have, and * represents a substituent that the cyclic hydrocarbon group of the formula (I) may have, b2 The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formulae may have other substituents, although not specifically shown in the following formulae. TIFF2025175980000053.tif83159

[0071] The anion represented by formula (B1-A1) is preferably an anion represented by formula (B1-A1-1) to formula (B1-A1-85) (hereinafter, sometimes referred to as "anion (B1-A1-1)" depending on the formula number), and more preferably an anion represented by any of formulas (B1-A1-1) to (B1-A1-4), (B1-A1-9), (B1-A1-10), (B1-A1-24) to (B1-A1-33), (B1-A1-36) to (B1-A1-40), and (B1-A1-47) to (B1-A1-85). TIFF2025175980000054.tif216159

[0072] TIFF2025175980000055.tif249150

[0073] TIFF2025175980000056.tif248163

[0074] where R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8 is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 has the same meaning as above. Specific examples of the anion represented by formula (B1-A1) include the anions described in JP-A-2010-204646.

[0075] Preferred anions represented by formula (B1-A1) include those represented by formulas (B1a-1) to (B1a-70). Of these, anions represented by any of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), and (B1a-35) to (B1a-70) are preferred. JPEG2025175980000057.jpg185163

[0076] TIFF2025175980000058.tif250161

[0077] TIFF2025175980000059.tif70163

[0078] The anion represented by formula (B1-A2) is represented by the following formula: TIFF2025175980000060.tif24100[In formula (B1-A2), L b2 and Y b1 has the same meaning as in formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and one --CH.sub.2-- contained in the alkyl group may be replaced with --O-- or --CO--. nb4 represents an integer of 1 to 5. When nb4 is 2 or greater, the groups in the parentheses may be the same or different. nb3 represents an integer of 0 to 4. When nb3 is 2 or more, a plurality of R b1 may be the same or different from each other. However, 1≦nb4+nb3≦5 is satisfied.

[0079] In formula (B1-A2), L b2 Examples of hydrocarbon groups and Y b1 Examples of the cyclic hydrocarbon group include, within the upper limit of the carbon number, L in formula (B1). b2 Examples of hydrocarbon groups and Y b1 Examples of the cyclic hydrocarbon group are the same as those of L. b2 hydrocarbon group, Y b1 The substituents that the methyl group and the cyclic hydrocarbon group may have are also defined as follows: b2 hydrocarbon group, Y b1 Examples of the substituents that the methyl group and cyclic hydrocarbon group may have are the same as those listed above. These hydrocarbon groups, methyl groups and cyclic hydrocarbon groups may have one or more substituents. L b2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and more preferably -CO-OL b41 -(L b41is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. * is SO3 - represents the bonding site with the benzene ring to which L is attached. b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms, and more preferably *-CO-O-. Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and Y in formula (B1-A1) is b1 or L b1 More preferably, it is an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified by the following: Specifically, it is preferably a group represented by the above formulas (Y1) to (Y36), and more preferably a group represented by the above formulas (Y1) to (Y19). b1 The substituents that the cyclic hydrocarbon group may have are preferably a halogen atom or an alkyl group having 1 to 6 carbon atoms (wherein -CH2- in the alkyl group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-), more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- in the alkyl group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-), even more preferably a fluorine atom, an iodine atom, a hydroxy group, an alkoxy group having 1 to 3 carbon atoms or an alkyl group having 1 to 4 carbon atoms, and even more preferably a fluorine atom, an iodine atom, a hydroxy group or an alkyl group having 1 to 4 carbon atoms. b2 The substituent that the cyclic hydrocarbon group may have may constitute a protecting group or leaving group (acid labile group or base labile group) that is commonly used in the art.

[0080] In formula (B1-A2), nb4 is preferably an integer of 1 to 4, more preferably an integer of 1 to 3, even more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 The bond position of SO3 - Preferably, the following structure is substituted at the m-position of the benzene ring relative to the bonding position of the above. TIFF2025175980000061.tif24104 [In the above formula, L b2 , Y b1 , R b1 , nb3 has the same meaning as in formula (B1-A2). In formula (B1-A2), when nb4 is 2 or more, a plurality of L b2 and Y b1 are preferably the same group.

[0081] R b1 Examples of the alkyl group having 1 to 6 carbon atoms include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3. R b1 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of groups in which -CH- in an alkyl group is replaced with -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, etc. These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. R b1are each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), and further preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group. nb3 is an integer of 0 to 4, preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When nb3 is 2, R b1 Preferably, one of R is a halogen atom and the other is a halogen atom or an alkyl group having 1 to 4 carbon atoms, b1 It is more preferable that one of the groups is a fluorine atom or an iodine atom, and the other is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0082] Examples of the anion represented by formula (B1-A2) include the following anions. Among them, the anions represented by formulas (B2a-1) to (B2a-20) are preferred, and the anions represented by formulas (B2a-1) to (B2a-11) and (B2a-16) to (B2a-20) are more preferred. The following anions are preferred in the case where some R b1 is omitted, and may contain substituents not shown. TIFF2025175980000062.tif102153

[0083] Examples of the acid generator (B2) include salts represented by the following formula: TIFF2025175980000063.tif1191 [In formula (B2), all symbols have the same meanings as above.]

[0084] In formula (B2), L b2’ and Y b1’ Examples of the formula (B1-A1) include L b2 and Y b1 The same groups as those shown below can be mentioned. L b2 ' is a single bond, *-L b23 -, *-L b23 -X 2 -or*-L b23 -X 2 -W 2 -X 3 -(L b23 represents a chain hydrocarbon group having 1 to 6 carbon atoms which may contain a fluorine atom. 2 and X 3 each independently represents -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-. W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-. * represents a bonding site with SO2. ) is preferred. Y b1 is preferably a fluorine atom-containing methyl group or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), and more preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Specifically, it is preferably a trifluoromethyl group or a group represented by formulae (Y1) to (Y36) in formula (B1-A1). In formula (B2), two SO2-L b2 '-Y b1 When "A" and "B" are taken together to form a ring, examples of the anion include an anion represented by formula (B2'). TIFF2025175980000064.tif22113[In formula (B2'), A1 , Y b1’ , L b2’ and nb5 have the same meaning as in formula (B2). W b4 represents a disulfonylimide ring or disulfonylmide ring having 2 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmide ring may have 3 to 12 carbon atoms, preferably 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably substituted with a fluorine atom.

[0085] Examples of the anion of the salt represented by formula (B2) include the following: Among these, anions represented by formula (B3a-1), formula (B3a-2) or formula (B3a-12) to formula (B3a-14) are preferred. TIFF2025175980000065.tif189163

[0086] In another embodiment of the acid generator (B), a salt in which the anion in the salt represented by formula (B1) is replaced with a carboxylate anion is also preferably used as the acid generator (B). Examples of carboxylate anions include the following: TIFF2025175980000066.tif41155

[0087] Z1 + and Z2 + Examples of the organic cation include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations or aryl iodonium cations are more preferred. Specific examples include cations represented by any of formulas (b2-1) to (b2-5) (hereinafter, sometimes referred to as "cation (b2-1)" depending on the formula number). TIFF2025175980000067.tif84159[Formula (b2-1) to (b2-5), R b4 ~R b6 each independently represent a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, a hydrogen atom contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 and may be bonded to each other to form a ring together with the sulfur atom to which they are attached, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m7 and n8 each independently represent an integer of 0 to 5; When m7 is 2 or more, multiple R b7 may be the same or different, and when n8 is 2 or more, multiple R b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10and may be bonded to each other to form a ring together with the sulfur atom to which they are attached, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may be bonded to each other to form a ring including the -CH-CO- to which they are bonded, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b13 ~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 and may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are attached, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5. q2 and r2 each independently represent an integer of 0 to 4; u2 represents 0 or 1. When o2 is 2 or more, multiple R b13 are the same or different, and when p2 is 2 or more, multiple R b14 are the same or different, and when q2 is 2 or more, multiple R b15 are the same or different, and when r2 is 2 or more, multiple R b16 are the same or different, and when s2 is 2 or more, multiple R b17 are the same or different, and when t2 is 2 or more, multiple R b18 are the same or different. u3 represents an integer of 1 to 3, and satisfies 1≦u3+q23≦5. u4 and u5 each independently represent an integer of 0 to 3, and satisfy 0≦u4+o21≦5 and 0≦u5+p22≦5. o21, p22, q23, r24, t25 and s26 each independently represent an integer of 0 to 4. When u3, u4 and u5 each represent 2 or more, the groups in the parentheses are the same or different. When o21, p22, q23, r24, t25 and s26 are each 2 or more, multiple R b21 ~R b26 are the same or different.] When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and R b13 ~R b16 At least one of o2, p2, s2, t2, q2 and r2 is preferably a halogen atom, and when u2 is 1, any one of o2, p2, s2, t2, q2 and r2 is 1 or more, and R b13 ~R b18 At least one of these is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. When u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom.

[0088] The aliphatic hydrocarbon group refers to a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. In particular, R b9 ~R b12 The chain hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups: TIFF2025175980000068.tif11157 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, and more preferably has 4 to 12 carbon atoms. Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include a methylcyclohexyl group, a dimethylcyclohexyl group, a 2-methyladamantan-2-yl group, a 2-ethyladamantan-2-yl group, a 2-isopropyladamantan-2-yl group, a methylnorbornyl group, an isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and a fluorine atom, and examples thereof include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. Examples of aromatic hydrocarbon groups include aryl groups such as a phenyl group, a biphenyl group, a naphthyl group, a phenanthryl group, etc. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples thereof include aromatic hydrocarbon groups having a chain hydrocarbon group (such as a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a p-ethylphenyl group, a p-tert-butylphenyl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, etc.) and aromatic hydrocarbon groups having an alicyclic hydrocarbon group (such as a p-cyclohexylphenyl group, a p-adamantylphenyl group, etc.). When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferred. Examples of aromatic hydrocarbon groups in which hydrogen atoms are substituted with alkoxy groups include p-methoxyphenyl groups. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl, phenethyl, phenylpropyl, trityl, naphthylmethyl, and naphthylethyl. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkylcarbonyloxy group include a methylcarbonyloxy group, an ethylcarbonyloxy group, a propylcarbonyloxy group, an isopropylcarbonyloxy group, a butylcarbonyloxy group, a sec-butylcarbonyloxy group, a tert-butylcarbonyloxy group, a pentylcarbonyloxy group, a hexylcarbonyloxy group, an octylcarbonyloxy group, and a 2-ethylhexylcarbonyloxy group. R b4 and R b5and bond to each other together with the sulfur atom to which they are bonded to form a ring which may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a ring having 3 to 18 carbon atoms, preferably a ring having 4 to 18 carbon atoms. The ring containing a sulfur atom may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring, for example, the following rings. * represents a bonding site. TIFF2025175980000069.tif24142R b9 and R b10 The ring formed by these together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. This ring may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring. Examples thereof include a thiolan-1-ium ring (tetrahydrothiophenium ring), a thian-1-ium ring, and a 1,4-oxathian-4-ium ring. R b11 and R b12 The ring formed by combining these may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include a 3- to 12-membered ring, and preferably a 3- to 7-membered ring. Examples include an oxocycloheptane ring, an oxocyclohexane ring, an oxonorbornane ring, and an oxoadamantane ring. R b27 ~R b29 Examples of groups containing an acid labile group include -R c30 , -CO-OR c30 or -L c10 -CO-OR c30 A group represented by (L c10 represents an alkanediyl group having 1 to 6 carbon atoms, and R c30 represents an acid labile group. R b27 ~R b29 The acid labile group includes an acid labile group represented by the formula (1) or (2) described below.

[0089] Among the cations (b2-1) to (b2-5), the cation (b2-1), the cation (b2-4) or the cation (b2-5) is preferred. Examples of the cation (b2-1) include the following cations. TIFF2025175980000070.tif153165Examples of the cation (b2-2) include the following cations. TIFF2025175980000071.tif18150Examples of the cation (b2-3) include the following cations. TIFF2025175980000072.tif26140Examples of the cation (b2-4) include the following cations. TIFF2025175980000073.tif121163Examples of the cation (b2-5) include the following cations. TIFF2025175980000074.tif115159

[0090] The acid generator (B) is a combination of the above-mentioned anions and the above-mentioned organic cations, and these can be combined arbitrarily. Preferred examples of the acid generator (B) include combinations of anions represented by any of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), (B1a-35) to (B1a-70), (B2a-1) to (B2a-11), (B2a-16) to (B2a-20), (B3a-1) to (B3a-3), and (B3a-11) to (B3a-14) with cations (b2-1), (b2-2), (b2-3), (b2-4), and (b2-5).

[0091] Preferred examples of the acid generator (B) include those represented by formulae (B1-1) to (B1-105), (B2-1) to (B2-20), and (B3-1) to (B3-28). Among these, those containing an arylsulfonium cation are preferred, and those represented by formulae (B1-1) to (B1-3), (B1-5) to (B1-7), (B1-11) to (B1-14), (B1-20) to (B1-26), (B1-29), (B1-31) to (B1-105), (B2-1) to (B2-20), and (B3-1) to (B3-28) are particularly preferred. TIFF2025175980000075.tif170159

[0092] TIFF2025175980000076.tif252157

[0093] TIFF2025175980000077.tif252159

[0094] TIFF2025175980000078.tif252161

[0095] TIFF2025175980000079.tif250163

[0096] TIFF2025175980000080.tif248151

[0097] TIFF2025175980000081.tif185159

[0098] <Compounds having a phenolic hydroxy group or a benzoic carboxy group, or compounds in which the phenolic hydroxy group or the benzoic carboxy group of these compounds is protected with an acid labile group (L)> The resist composition of the present invention preferably further contains a compound (L). Such a compound contains one or more structures represented by formula (L0) as partial structures. TIFF2025175980000082.tif2470[In formula (L0), Arlk represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms which may have a substituent. X lk represents a single bond or a carbonyl group. R lk represents a hydrogen atom or an acid labile group. lk represents an integer of 1 or more, and when lk is 2 or more, the groups in the parentheses may be the same or different. * denotes a binding site. lo represents an integer greater than or equal to 1.] Ar lk Examples of the aromatic hydrocarbon ring include a benzene ring, a naphthalene ring, an anthracene ring, and a phenanthrene ring. Ar lk The substituents that the aromatic hydrocarbon ring may have include R lk11 and R lk22 The same groups as those exemplified above are exemplified. Ar lk is preferably a benzene ring or a naphthalene ring which may have a substituent, and more preferably a benzene ring which may have a substituent. R lk Examples of the acid labile group include a group represented by formula (1a) (hereinafter sometimes referred to as "acid labile group (1a)") and a group represented by formula (2a) (hereinafter sometimes referred to as "acid labile group (2a)"). Of these, the group represented by formula (2a) is preferred. TIFF2025175980000083.tif2255[In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. * denotes a binding site.] TIFF2025175980000084.tif2260[In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other and they combine -CX a Together with -, they form a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * denotes a binding site.]

[0099] R aa1 , R aa2 and R aa3 Examples of the alkyl group of R include a methyl group, an ethyl group, a propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, and an n-octyl group. aa1 , R aa2 and R aa3 The alkyl group may have 1 to 8 carbon atoms, preferably 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. R aa1 , R aa2 and R aa3 Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R aa1 , R aa2 and R aa3The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (where * indicates a bonding site): aa1 , R aa2 and R aa3 The alicyclic hydrocarbon group may have 3 to 20 carbon atoms, preferably 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. TIFF2025175980000085.tif9159R aa1 , R aa2 and R aa3 Examples of the aromatic hydrocarbon group of R include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl. aa1 , R aa2 and R aa3 The aromatic hydrocarbon group may have 6 to 18 carbon atoms, preferably 6 to 14 carbon atoms, and more preferably 6 to 10 carbon atoms. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group.

[0100] R aa1 and R aa2-C(R aa1 )(R aa2 )(R aa3 ) includes the following groups. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. * represents the bonding site with -O-. TIFF2025175980000086.tif28138

[0101] The group represented by formula (1a) is a 1,1,1-trialkyl group (R aa1 , R aa2 and R aa3 is an alkyl group, preferably a tert-butyl group), a 2-alkyladamantan-2-yl group (in formula (1a), R aa1 , R aa2 and the carbon atoms to which they are bonded form an adamantyl group, and R aa3 is an alkyl group) and 1-(adamantan-1-yl)-1,1-dialkyl groups (in formula (1a), R aa1 and R aa2 is an alkyl group, and R aa3 is an adamantyl group).

[0102] R aa1' , R aa2' and R aa3' Examples of the hydrocarbon group include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, cyclic hydrocarbon groups such as aromatic hydrocarbon groups, and groups formed by combining these groups. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups are R aa1 , R aa2 and R aa3 Examples of the groups include the same groups as those listed in the above. R aa2' and R aa3' are bonded to each other and the carbon atoms to which they are bonded and X a When forming a heterocyclic group together with -C(R aa1' )(R aa2' )-Xa -(R aa3' ) includes the following groups. * represents a bonding site. The heterocyclic group may have 3 to 20 carbon atoms, preferably 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. TIFF2025175980000087.tif22142R aa1 , R aa2 , R aa3 , R aa1' , R aa2' and R aa3' The halogen atom that may be contained in the ring may be a fluorine atom, a chlorine atom, a bromine atom or an iodine atom. R aa1' and R aa2' At least one of these is preferably a hydrogen atom.

[0103] Specific examples of the acid labile group (1a) include the following groups: * represents a bonding site. TIFF2025175980000088.tif60161

[0104] Specific examples of the acid labile group (2a) include the following groups: * represents a bonding site. TIFF2025175980000089.tif58149

[0105] lk may be any integer equal to or greater than 2. Furthermore, lk may be, for example, any integer equal to or less than 13. Among these, lk is preferably any integer from 1 to 11, more preferably any integer from 1 to 9, even more preferably any integer from 1 to 7, still more preferably any integer from 1 to 6, even more preferably any integer from 1 to 5, and still more preferably any integer from 1 to 4. Io may be any integer equal to or greater than 2. Furthermore, Io may be, for example, any integer equal to or less than 13. Among these, Io is preferably any integer from 1 to 11, more preferably any integer from 1 to 9, even more preferably any integer from 1 to 7, still more preferably any integer from 1 to 6, even more preferably any integer from 1 to 5, and still more preferably any integer from 1 to 4.

[0106] Examples of the compound (L0) include a compound represented by formula (LX) (hereinafter sometimes referred to as "compound (LX)"). TIFF2025175980000090.tif24130[In formula (LX), Ar k1 and Ar k2 each independently represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms. X lk1 and X lk2 each independently represents a single bond or a carbonyl group. R lk1 and R lk2 each independently represents a hydrogen atom or an acid labile group. Lx represents a hydrocarbon group having 1 to 80 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. R lk11 and R lk22 each independently represents a hydrocarbon group having 1 to 20 carbon atoms which may have a halogen atom or a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-; R lk11 and R lk22 , R lk11 and Lx or R lk22 and Lx may be bonded to each other to form a ring, the ring may have a substituent, and -CH2- contained in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. lx2 represents an integer of 1 to 6, and when lx2 is 2 or greater, the groups in the parentheses may be the same or different. lk1' represents an integer of 1 to 13, and when lk1' is 2 or greater, the groups in the parentheses may be the same or different. lk11' represents an integer of 0 to 12, and when lk11' is 2 or greater, the groups in the parentheses may be the same or different. lk2' represents an integer of 1 to 13, and when lk2' is 2 or greater, the groups in the parentheses may be the same or different. lk22' represents an integer of 0 to 12, and when lk22' is 2 or greater, the groups in the parentheses may be the same or different.] Ar k1 and Ar k2 As the aromatic hydrocarbon ring, Ar lk Examples of the aromatic hydrocarbon ring include the same groups as those exemplified above. R lk1 and R lk2 The acid labile group in lk Examples of the acid labile group include the same groups as those exemplified above as the acid labile group. Examples of the hydrocarbon group of Lx include a chain hydrocarbon group, a monocyclic or polycyclic (including a spiro ring, a fused ring, or a bridged ring) alicyclic hydrocarbon group, and an aromatic hydrocarbon group, and may be a group combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group). The hydrocarbon group of Lx is a (lx2+1)-valent hydrocarbon group, and can be a divalent to heptavalent hydrocarbon group depending on lx2. The number of carbon atoms in the hydrocarbon group is preferably 1 to 72, more preferably 1 to 60, even more preferably 1 to 48, still more preferably 1 to 36, and even more preferably 1 to 24. Examples of the chain hydrocarbon group include an alkanediyl group, and examples of the alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, and a tetradecane-1,14-diyl group. and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The branched alkanediyl group may have a terminal methyl group. Further, examples of the chain hydrocarbon group include groups in which one or more hydrogen atoms of the above groups have been replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, preferably 1 to 10, even more preferably 1 to 9, still more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane; and spirocyclic alicyclic hydrocarbon groups such as a spiro ring having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond. Alicyclic hydrocarbon groups also include groups in which one or more hydrogen atoms of the above groups have been replaced with bonding sites. Examples of the alicyclic hydrocarbon group include the following groups: The binding site can be at any position. TIFF2025175980000091.tif41165 The number of carbon atoms in the alicyclic hydrocarbon group is, for example, 3 to 72, and may be 3 to 60, preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The aromatic hydrocarbon group also includes groups in which one or more hydrogen atoms of the above groups have been replaced with a bonding site. The aromatic hydrocarbon group may have 6 to 72 carbon atoms, may have 6 to 60 carbon atoms, is preferably 6 to 24 carbon atoms, is more preferably 6 to 20 carbon atoms, is further preferably 6 to 18 carbon atoms, is further preferably 6 to 14 carbon atoms, and is further more preferably 6 to 10 carbon atoms. Examples of the group combining two or more groups include a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group, a group combining an aromatic hydrocarbon group with a chain hydrocarbon group, and a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. In addition, when any group is Ar k1 or Ar k2 may be bound to Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include -alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, and -chain hydrocarbon group-alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and a chain hydrocarbon group include -aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-, and -chain hydrocarbon group-aromatic hydrocarbon group-. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-. Combined groups also include groups in which one or more hydrogen atoms of the above groups are replaced with a bonding site. The —CH 2 — contained in the hydrocarbon group of L x may be replaced by —O—, —S—, —SO 2 — or —CO—. As described above, examples of groups in which -CH- in a hydrocarbon group is replaced with -O-, -S-, -SO-, or -CO- include a hydroxy group, a carboxy group, a thiol group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkoxy group, an alkylthio group, an alkylsulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and groups in which two or more of these groups are combined. Examples of these substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Furthermore, examples of groups in which -CH2- contained in an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining these is replaced with -O-, -S-, -CO-, or -SO2- include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Examples of the hydrocarbon group in which -CH2- is replaced by -O-, -S-, -SO2- or -CO- include groups in which one or more hydrogen atoms of the above groups have been replaced with bonding sites. Examples of the substituent that Lx may have include a halogen atom and a cyano group. When Lx is a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be used as a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. By replacing -CH2- in a chain hydrocarbon group such as an alkyl group contained in Lx with -O-, -CO-, -S- or -SO2-, Lx can essentially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group or a sulfonyl group. The substituent that Lx may have is R lk11 and R lk22 Also included are groups similar to those exemplified above.

[0107] R lk11 and R lk22 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R lk11 and R lk22 Examples of the hydrocarbon group include chain hydrocarbon groups such as alkyl groups and alkanediyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups. The alkyl group is a linear or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The alkanediyl group is a linear or branched alkanediyl group, and examples thereof include a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a tetradecane-1,16-diyl group, a pentane-1,17-diyl group, a pentane-1,18-diyl group, a pentane-1,19-diyl group, a pentane-1,20-diyl group, a pentane-1,21-diyl group, a pentane-1,22-diyl group, a pentane-1,23-diyl group, a pentane-1,24-diyl group, a pentane-1,25-diyl group, a pentane-1,26-diyl group, a pentane-1,27-diyl group, a pentane-1,28-diyl group, a pentane-1,29-diyl group, a pentane-1,30-diyl group, a pentane-1,31-diyl group, a pentane-1,32-diyl group, a pentane-1,33-diyl group, a pentane-1,34-diyl group, a pentane-1,35-diyl group, a pentane-1,36-diyl group, a pentane-1,3 Examples of the alkanediyl group include linear alkanediyl groups such as decane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The terminal of the branched alkanediyl group may be a methyl group. The chain hydrocarbon group preferably has 1 to 12 carbon atoms, more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, even more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples of the alicyclic hydrocarbon group include the same groups as those exemplified for Lx. Specific examples of monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl. Examples of polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl. Examples of spirocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane, and spiro rings having a cycloalkyl group bonded to a norbornyl or adamantyl group via a spiro bond. The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. Examples of the aromatic hydrocarbon group include the same groups as those exemplified for Lx. Specific examples include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, and a binaphthyl group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. Examples of groups formed by combining two or more groups include a group formed by combining an aromatic hydrocarbon group with a chain hydrocarbon group (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*, where -CH2- contained in the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S-, or -SO2-), a group formed by combining an alicyclic hydrocarbon group with a chain hydrocarbon group (for example, alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic Examples of such groups include an alicyclic hydrocarbon group-*, an alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, where —CH— contained in the alicyclic hydrocarbon group, the alkanediyl group, and the alkyl group may be replaced by —O—, —CO—, —S—, or —SO—, and groups combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, an aromatic hydrocarbon group-alicyclic hydrocarbon group-*, an alicyclic hydrocarbon group-aromatic hydrocarbon group-*, where —CH— contained in the alicyclic hydrocarbon group may be replaced by —O—, —CO—, —S—, or —SO—). * represents a bonding site. The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group. Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group. Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group. Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenylcyclohexyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group. In addition, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined, and any of the groups may be bonded to a benzene ring. R lk11 and R lk22 When -CH2- in the hydrocarbon group represented by the formula (I) is replaced with -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before the replacement is counted as the total number of carbon atoms in the hydrocarbon group. The number may be one or more. Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include groups similar to those exemplified for Lx, within the range permitted by the upper limit of the number of carbon atoms. R lk11 and R lk22 Examples of the substituent that the hydrocarbon group may have include a halogen atom and a cyano group. R lk11 and R lk22 is a hydrocarbon group having a halogen atom, R lk11 and R lk22 Examples of the hydrocarbon group having a halogen atom include a chain hydrocarbon group having a halogen atom such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. The term "haloalkyl group" refers to an alkyl group having a halogen atom, and examples of the haloalkyl group include C1-12 haloalkyl groups such as C1-12 fluorinated alkyl groups, C1-12 chlorinated alkyl groups, C1-12 brominated alkyl groups, and C1-12 iodinated alkyl groups. Specific examples of the haloalkyl group include C1-12 perfluoroalkyl groups (trifluoromethyl, pentafluoroethyl, heptafluoropropyl, nonafluorobutyl, etc.), 2,2,2-trifluoroethyl, 3,3,3-trifluoropropyl, 4,4,4-trifluorobutyl, 3,3,4,4,4-pentafluorobutyl, chloromethyl, bromomethyl, and iodomethyl. The number of carbon atoms in the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. -CH2- contained in the haloalkyl group may be replaced by -O-, -CO- or the like, and examples of such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, haloalkylcarbonyloxy groups, etc. Specific examples include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, etc., and examples include groups in which one or more hydrogen atoms of the groups exemplified above are replaced with halogen atoms. The hydrocarbon group may have one or more substituents.

[0108] Compound (LX) includes a compound represented by formula (LX-0) (hereinafter may be referred to as "compound (LX-0)"). Compound (LX-0) is preferably a compound represented by formula (LX-1) (hereinafter may be referred to as "compound (LX-1)"). TIFF2025175980000092.tif24125 [In formula (LX-0), symbols other than those shown below have the same meanings as defined above. lk1 represents an integer of 1 to 5, and when lk1 is 2 or more, the groups in the parentheses may be the same or different. lk11 represents an integer of 0 to 4, and satisfies 1≦lk1+lk11≦5, and when lk11 is 2 or more, the groups in the parentheses may be the same or different. lk2 represents an integer of 1 to 5, and when lk2 is 2 or greater, the groups in the parentheses may be the same or different. lk22 represents an integer of 0 to 4, and satisfies 1≦lk2+lk22≦5, and when lk22 is 2 or more, the groups in the parentheses may be the same or different.] TIFF2025175980000093.tif41146 [In formula (LX-1), symbols other than those shown below have the same meanings as defined above. X lk3 represents a single bond or a carbonyl group. R lk3 represents a hydrogen atom or an acid labile group. Lx1 and Lx2 each independently represent a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, or -SO2-. R lk33 represents a hydrocarbon group having 1 to 20 carbon atoms which may have a halogen atom or a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. lx3 represents an integer of 0 to 6, and when lx3 is 2 or greater, the groups in the parentheses may be the same or different. lk3 represents an integer of 1 to 4, and when lk3 is 2 or greater, the groups in the parentheses may be the same or different. lk33 represents an integer of 0 to 3, and satisfies 1≦lk3+lk33≦4, and when lk33 is 2 or more, the groups in the parentheses may be the same or different.] Examples of the hydrocarbon groups of Lx1 and Lx2 which may have a substituent (-CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) include the same groups as the hydrocarbon groups exemplified for Lx which may have a substituent (-CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) within the range permitted by the upper limit of the number of carbon atoms, etc. R lk33 The hydrocarbon group optionally having a halogen atom or a substituent (-CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) is, within the range permitted by the upper limit of the number of carbon atoms, R lk11 and R lk22 Examples include the same groups as the hydrocarbon groups exemplified above that may have a halogen atom or a substituent (-CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-). R lk11 and Lx1 or R lk22 and Lx2 may be bonded to each other to form a ring. In this case, the ring is lk11 and R lk22 are bonded to a benzene ring, and thus form a fused ring fused with the benzene ring or a spiro ring spiro-bonded with the benzene ring. The total number of carbon atoms in the fused ring or spiro ring is 3 to 28, may be 3 to 24, and preferably 3 to 20. The fused ring or spiro ring may be a ring containing one or more -O-, -CO-, -S- or -SO2-. The benzene ring (-R lk11 )-Lx1- or benzene ring (-R lk22 )-Lx2-, R lk11 and Lx1 or R lk22 Examples of the ring formed by bonding of R and Lx2 include the following groups. Although the following groups are omitted, at least one R lk1 -OX lk1 -or R lk2 -OX lk2 - has other R lk11 or R lk22 * represents the bonding site to the benzene ring. TIFF2025175980000094.tif17110R lk11 and R lk22 may be bonded to each other to form a ring. In this case, examples of the ring include a ring having a structure represented by the formula (LX-13) described below.

[0109] Compound (LX-1) is preferably a compound represented by formula (LX-11), formula (LX-12), or formula (LX-13) (hereinafter, these may be referred to as "compound (LX-11)," "compound (LX-12)," or "compound (LX-13)," respectively). TIFF2025175980000095.tif123159 [In formula (LX-11), formula (LX-12) and formula (LX-13), Symbols other than those listed below have the same meanings as above. Ly represents a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-.] Examples of the hydrocarbon group for Ly which may have a substituent (-CH2- contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) include, within the range permitted by the upper limit of the number of carbon atoms, groups similar to the hydrocarbon groups exemplified for Lx which may have a substituent (-CH2- contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-). lk1 and lk2 are each independently preferably an integer of 1 to 4, more preferably an integer of 1 to 3, and even more preferably 1 or 2. lk11 and lk22 are each independently preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. lk3 is preferably an integer of 1 to 3, and more preferably 1 or 2. lk33 is preferably an integer of 0 to 2. lx2 is preferably an integer of 1 to 5, more preferably an integer of 1 to 4, even more preferably an integer of 1 to 3, and even more preferably 1 or 2. lx3 is preferably an integer of 0 to 5, more preferably an integer of 0 to 4, even more preferably an integer of 0 to 3, and even more preferably an integer of 0 to 2. R lk11 , R lk22 and R lk33 are each independently preferably a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein —CH— contained in the haloalkyl group or the alkyl group may be replaced with —O— or —CO—), more preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), even more preferably an iodine atom, a fluorine atom, a fluorinated alkyl group having 1 to 3 carbon atoms, a hydroxy group, a carboxy group, an alkoxy group having 1 to 3 carbon atoms, a hydroxyalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 3 carbon atoms, and even more preferably an iodine atom, a fluorine atom, a trifluoromethyl group, a hydroxy group, a carboxy group, a methoxy group, or a methyl group. Lx1, Lx2 and Ly are each independently preferably a chain hydrocarbon group having 1 to 10 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-) or a group in which a chain hydrocarbon group having 1 to 6 carbon atoms is combined with a cyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced by -O- or -CO-), and are each preferably a chain hydrocarbon group having 1 to 8 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-). The —CH2— contained therein may be replaced by —O— or —CO—), or a group in which a chain hydrocarbon group of 1 to 4 carbon atoms is combined with a cyclic hydrocarbon group of 3 to 16 carbon atoms (the —CH2— contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced by —O— or —CO—), and even more preferably a chain hydrocarbon group of 1 to 6 carbon atoms or a group in which a chain hydrocarbon group of 1 to 4 carbon atoms is combined with a cyclic hydrocarbon group of 3 to 12 carbon atoms. Also, R lk11 and Lx1 or R lk22 and Lx2 are preferably bonded to form a ring, and R lk11 and R lk22 are also preferably bonded to form a ring.

[0110] In one embodiment, the compound (L) may be a low-molecular-weight compound. A low-molecular-weight compound is a compound having a weight-average molecular weight of less than 10,000. When compound (L) is a low-molecular-weight compound, the weight-average molecular weight is preferably 7,500 or less, more preferably 5,000 or less, even more preferably 4,000 or less, even more preferably 3,500 or less, even more preferably 3,000 or less, even more preferably 2,500 or less, even more preferably 2,000 or less, and even more preferably 1,500 or less. Also, it may be 100 or more, preferably 120 or more, more preferably 150 or more, even more preferably 200 or more, and even more preferably 300 or more.

[0111] Among the compounds (L), examples of low molecular weight compounds having a phenolic hydroxy group or a benzoic carboxy group include compounds represented by the following formula: Among the compounds (L), low-molecular-weight compounds having a phenolic hydroxy group or a benzoic carboxy group include compounds in which the hydroxy group of the above compounds is replaced with a carboxy group, or vice versa. Compound (L) may have both a hydroxy group and a carboxy group.

[0112] Among the compounds (L), examples of low-molecular-weight compounds having a phenolic hydroxy group or a benzoic carboxy group in which the phenolic hydroxy group or the benzoic carboxy group is protected with an acid labile group include compounds represented by the following formula: Among compounds (L), low-molecular-weight compounds having a phenolic hydroxy group or a benzoic carboxy group, in which the phenolic hydroxy group or the benzoic carboxy group is protected with an acid labile group, include compounds in which the ethoxyethoxy group of the above compound is replaced with an ethoxyethoxycarbonyl group, or the ethoxyethoxycarbonyl group is replaced with an ethoxyethoxy group. Compound (L) may have both an ethoxyethoxy group and an ethoxyethoxycarbonyl group.

[0113] When the resist composition of the present invention contains a low-molecular-weight compound as compound (L), the content of the low-molecular-weight compound is, based on the solid content of the resist composition, 0.1% by mass or more, preferably 0.3% by mass or more, more preferably 0.5% by mass or more, and even more preferably 1% by mass or more. It can also be 90% by mass or less, preferably 80% by mass or less, more preferably 70% by mass or less, even more preferably 60% by mass or less, even more preferably 50% by mass or less, even more preferably 45% by mass or less, even more preferably 40% by mass or less, and even more preferably 35% by mass or less. Specifically, it can be 0.1% by mass or more to 90% by mass or less, preferably 0.3% by mass or more to 80% by mass or less, more preferably 0.5% by mass or more to 70% by mass or less, and even more preferably 1% by mass or more to 50% by mass or less.

[0114] In one embodiment, the compound (L) may be a resin. When the compound (L) having a phenolic hydroxy group or a benzoic carboxy group, or the compound (L) in which the phenolic hydroxy group or the benzoic carboxy group of such a compound is protected with an acid labile group, is a resin containing a structural unit derived from such a compound, the resin is preferably a resin containing a structural unit represented by formula (a2-A) and / or a structural unit represented by formula (a1-4). TIFF2025175980000098.tif30127 [In formula (a2-A), all symbols have the same meanings as defined above.]

[0115] R a2 and R a27 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a2 and R a27Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, even more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a27 Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and still more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. R a27 Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0116] A a21Examples of the alkanediyl group include straight-chain alkyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, decane-1,9-diyl, and undecane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2. R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 When substituted with -, the number of carbon atoms before substitution is regarded as the number of carbon atoms of the alkanediyl group. A a21 -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 Examples of the group substituted for - include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, an alkanediylamino group, etc. These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. For example, A a21 -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 The groups substituted are *-O-, *-CO-O-, *-O-CO-, *-CO-OA a22 -CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 Among them, *-CO-O- and *-CO-OA a22 -CO-O- or *-OA a22 -CO-O-, *-CO-NR a28 - is preferred, where A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a2 A represents the bonding site with the carbon atom to which it is attached. a22 The alkanediyl group of A is, within the limits of the upper limit of the carbon number, a21 Examples of the alkanediyl groups include the same alkanediyl groups as those shown in the above. A a21 is a single bond, *-CO-O- or *-CO-OA a22 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0117] nA2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH is a benzene ring, A a21 It is preferable that at least one of them is bonded to the m-position or p-position, and more preferable that it is bonded to the m-position. In the case of a naphthalene ring, A a21When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a21 When the bonding position of A is the 2nd position, it may be bonded to any of the 1st position and the 3rd to 8th positions. a21 When the bonding position of A is position 1, at least one of A is preferably bonded to position 3 to 6, and more preferably bonded to position 3 or 4. a21 When the bonding position is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0118] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A Nos. 2010-204634 and 2012-12577. The structural unit (a2-A) may be any of the structural units represented by the formulae (a2-2-1) to (a2-2-32) or (a2-3-1) to (a2-3-24) and the structural units represented by the formulae (a2-2-1) to (a2-2-32) or (a2-3-1) to (a2-3-24), in which R in the structural unit (a2-A) a2 and a structural unit in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025175980000099.tif106170

[0119] When the structural unit (a2-A) is contained in the resin, the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on the total structural units. It is also preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, even more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) may be a compound from which the structural unit (a2-A) is derived (e.g., -CH2-C(-R a2 )- is the double bond CH2=C(-R a2 The structural unit (a2-A) can be incorporated into a resin by polymerizing a compound (a2-A') in the state of (a1-4). Alternatively, for example, the structural unit (a1-4) can be polymerized, followed by treatment with an acid such as p-toluenesulfonic acid, to incorporate the structural unit into a resin. Alternatively, the structural unit (a2-A) can be polymerized using acetoxystyrene or the like, followed by treatment with an alkali such as tetramethylammonium hydroxide, to incorporate the structural unit into a resin.

[0120] TIFF2025175980000101.tif30119 [In formula (a1-4), all symbols have the same meanings as above.]

[0121] In formula (a1-4), R a1 , R a17 , A a11 and R a18 are the R in formula (a2-A), respectively. a2 , R a27 , A a21 and R a28 The same can be mentioned. In formula (a1-4), Ra17 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorinated alkyl group having 1 to 4 carbon atoms, a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0122] na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1. R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which these groups are combined. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): TIFF2025175980000102.tif10151 Examples of aromatic hydrocarbon groups include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. In particular, R a36 Examples of the group include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. R a35 and R a36 Examples of the divalent cyclic hydrocarbon group having 2 to 20 carbon atoms that are formed by bonding together with the -CO- to which they are bonded include the following groups: * represents a bonding site, and one of the groups is R a34 This is the binding site for TIFF2025175980000103.tif15104

[0123] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group in R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36The alkyl group and alicyclic hydrocarbon group in R are preferably unsubstituted. a36 The aromatic hydrocarbon group in is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0124] -OC(R a34 )(R a35 )-OR a36 and -CO-OC(R a34 )(R a35 )-OR a36 is eliminated on contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group or a carboxy group, respectively. -X a1 -OC(R a34 )(R a35 )-OR a36 In the case of a benzene ring, A a11 It is preferable that at least one of them is bonded to the o-position or the m-position, and more preferable that it is bonded to the p-position. In the case of a naphthalene ring, A a11 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a11 When the bonding position of A is the 2nd position, it may be bonded to any of the 1st position and the 3rd to 8th positions. a11 When the bonding position of A is position 1, at least one of A is preferably bonded to position 3 to 6, and more preferably bonded to position 3 or 4. a11 When the bonding position is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position. Examples of the structural unit (a1-4) include structural units derived from monomers described in JP-A-2010-204646. Preferred are structural units represented by formulas (a1-4-1) to (a1-4-42) and R in the structural unit (a1-4). a1and more preferably, the structural units represented by formulae (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20). TIFF2025175980000104.tif155163

[0125] When the resin contains the structural unit (a1-4), the content thereof, based on the total of all structural units of the resin, can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. It can also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content may be 5 to 95 mol%, preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0126] When a resin is contained in the resist composition of the present invention, the resin may contain structural units other than the structural unit represented by formula (a2-A) and the structural unit represented by formula (a1-4). Examples of structural units other than the structural unit represented by formula (a2-A) and the structural unit represented by formula (a1-4) include structural units having an acid labile group other than the structural unit represented by formula (a1-4) (hereinafter may be referred to as "structural unit (a1)"), structural units not having an acid labile group other than the structural unit represented by formula (a2-A) (hereinafter may be referred to as "structural unit (s)") (including, for example, a structural unit having a halogen atom (hereinafter may be referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter may be referred to as "structural unit (a5)"), and a structural unit that decomposes upon exposure to generate acid (hereinafter may be referred to as "structural unit (a7)"), as described below), and other structural units derived from monomers known in the field.

[0127] <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid labile group contained in the resin is preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2025175980000106.tif2298[In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining any of these; or R a1 and R a2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and groups combining these may contain a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * denotes a binding site.] TIFF2025175980000107.tif2278[In formula (2), R a1’ and Ra2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na' represents 0 or 1. * denotes a binding site.]

[0128] R a1 , R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. R a1 , R a2 and R a3 Examples of the alkenyl group in the formula (I) include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R a1 , R a2 and R a3 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): a1 , R a2 and R a3 The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms. TIFF2025175980000108.tif10159R a1 , R a2 and Ra3 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. Preferably, ma is 0 and na is 1. R a1 and R a2 -C(R a1 )(R a2 )(R a3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2025175980000109.tif28138

[0129] R a1’ , R a2’ and R a3’ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups are R a1 , R a2 and R a3 Examples of the groups include the same as those listed in the above. R a2’and R a3’ When they are bonded to each other to form a heterocyclic group together with the carbon atoms to which they are bonded and X, -C(R a1’ )(R a2’ )-XR a3’ Examples of the groups include the following: * represents a binding site. TIFF2025175980000110.tif19124R a1 , R a2 , R a3 , R a1 , R a2’ and R a3’ The halogen atom that may be contained in the ring may be a fluorine atom, a chlorine atom, a bromine atom or an iodine atom. R a1’ and R a2’ At least one of these is preferably a hydrogen atom. na' is preferably 0.

[0130] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 is an alkyl group, ma=0, and na=1. The group is preferably a tert-butoxycarbonyl group. In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, and R a3 is an alkyl group, ma=0, and na=1. In formula (1), R a1 and R a2 are each independently an alkyl group, and R a3 is an adamantyl group, ma=0, and na=1. Specific examples of the group (1) include the following: * represents a binding site. TIFF2025175980000111.tif149165

[0131] Specific examples of group (2) include the following groups: * represents a binding site. TIFF2025175980000112.tif55153

[0132] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group. Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. When a resin having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in a resist composition, the resolution of the resist pattern can be improved.

[0133] Examples of structural units derived from a (meth)acrylic monomer having group (1) include a structural unit represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter sometimes referred to as structural unit (a1-2)). Preferably, at least one structural unit selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2) is used, and more preferably at least one or two structural units selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025175980000113.tif43144 [In formula (a1-0), formula (a1-1) and formula (a1-2), all symbols have the same meanings as defined above.]

[0134] R a01 , R a4 , R a5 The halogen atom in the formula (I) may be a fluorine atom, a chlorine atom, a bromine atom or an iodine atom. R a01 , R a4 , R a5Examples of the alkyl group optionally having a halogen atom in the formula (I) include a chloromethyl group, a bromomethyl group, an iodomethyl group, a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, and a perfluorohexyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 , R a4 and R a5 is preferably a hydrogen atom or a methyl group, more preferably a methyl group. L a01 , L a1 and L a2 is preferably an oxygen atom or —O—(CH2) k01 It is —CO—O— (wherein k01 is preferably an integer of any one of 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 , R a03 , R a04 , R a6 and R a7 The alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and combinations thereof in the formula (1) include R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a02 , R a03 , and R a04 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a6 and Ra7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in the formula (I) is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms, and more preferably 5 to 10 carbon atoms. R a02 , R a03 , R a04 , R a6 and R a7 The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms. In the group in which an alkyl group and an alicyclic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the alicyclic hydrocarbon group is preferably 18 or less. In the group in which an alkyl group and an aromatic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the aromatic hydrocarbon group is preferably 18 or less. R a02 and R a03 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, phenyl group or naphthyl group which may have a halogen atom. R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, cyclohexyl group or adamantyl group which may have a halogen atom. R a6 and R a7is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group, or naphthyl group which may have a halogen atom, and even more preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group, or phenyl group which may have a halogen atom. m1' is preferably an integer of 0 to 3, and more preferably 0 or 1. n1 is preferably an integer of 0 to 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0135] Examples of the structural unit (a1-0) include structural units represented by any one of formulas (a1-0-1) to (a1-0-24) and R a01 and structural units in which the methyl group corresponding to the formula (a1-0-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom) or another alkyl group, and structural units represented by any of formulas (a1-0-1) to (a1-0-10), (a1-0-13), (a1-0-14), and (a1-0-19) to (a1-0-24) are preferred. TIFF2025175980000114.tif121159

[0136] Examples of the structural unit (a1-1) include structural units derived from monomers described in JP-A-2010-204646. Among these, structural units represented by any one of formulas (a1-1-1) to (a1-1-7) and R in the structural unit (a1-1) are preferred. a4 A structural unit in which the methyl group corresponding to the formula (a1-1-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group is preferred, and a structural unit represented by any one of formulas (a1-1-1) to (a1-1-4) is more preferred. JPEG2025175980000115.jpg34163

[0137] The structural unit (a1-2) includes a structural unit represented by any one of formulas (a1-2-1) to (a1-2-20) and R a5 and structural units in which the methyl group corresponding to the formula (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20) are substituted with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. When the resin contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these units, based on the total structural units of the resin, is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. Also, the total content may be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the total content may be 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When the resin contains the structural unit (a1-0), the content thereof, based on all structural units in the resin, can be 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, even more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, and still more preferably 35 mol% or more. Also, the content can be 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, and still more preferably 60 mol% or less. Specifically, the content can be 5 to 80 mol%, preferably 5 to 75 mol%, more preferably 10 to 70 mol%, even more preferably 10 to 65 mol%, and still more preferably 10 to 60 mol%. When the resin contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these units, based on the total structural units of the resin, can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. Also, the total content can be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the total content can be 10 to 90 mol%, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, even more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and even more preferably 20 to 70 mol%.

[0138] Examples of the structural unit derived from a (meth)acrylic monomer having the group (2) include a structural unit represented by formula (a1-5) (hereinafter, sometimes referred to as "structural unit (a1-5)"). TIFF2025175980000117.tif4760 [In formula (a1-5), all symbols have the same meanings as defined above.]

[0139] R in formula (a1-5) a8 Examples of the halogen atom and the alkyl group optionally having a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples include the same as those exemplified above. In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 Among these, it is preferred that one is —O— and the other is —S—. s1 is preferably 1. s1' is preferably an integer of 0 to 2. Z a1 is preferably a single bond or —CH2—CO—O—.

[0140] Examples of the structural unit (a1-5) include structural units derived from monomers described in JP-A-2010-61117. Among these, the structural units represented by formulas (a1-5-1) to (a1-5-4) are preferred, and the structural unit represented by formula (a1-5-1) or (a1-5-2) is more preferred. When the resin contains the structural unit (a1-5), the content thereof, based on the total structural units of the resin, is preferably 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more. Alternatively, the content may be 80 mol% or less, preferably 70 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, the content is preferably 1 to 50 mol%, more preferably 3 to 45 mol%, even more preferably 5 to 40 mol%, and even more preferably 5 to 30 mol%.

[0141] An example of the structural unit (a1) having the group (1) is a structural unit represented by formula (a1-6) (hereinafter, sometimes referred to as "structural unit (a1-6)"). TIFF2025175980000119.tif3479 [In formula (a1-6), all symbols have the same meanings as defined above.] R in formula (a1-6) a61 Examples of the halogen atom and the alkyl group optionally having a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples include the same as those exemplified above. R a61 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. R a62 , R a63 , R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, etc. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and even more preferably a methyl group or an ethyl group. Ra62 , R a63 and R a64 The cyclic hydrocarbon group in the formula (I) includes an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of polycyclic alicyclic hydrocarbon groups include a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenylene group and a naphthylene group. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. R a62 and R a63 Examples of the ring formed by bonding together include an adamantane ring, a cyclopentane ring, and a cyclohexane ring. a62 and R a63 -C(R a62 )(R a63 )(R a64 ) includes the following groups. * represents the bonding site with the oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, and more preferably 3 to 12. TIFF2025175980000120.tif32110

[0142] L a61 and L a62Examples of the alkanediyl group having 1 to 4 carbon atoms in the formula include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. L a61 and L a62 are each preferably independently a methylene group or an ethylene group. X a61 is preferably a single bond or —CO—O—*, and more preferably a single bond. X a62 is preferably a single bond or *-OL a61 -, and more preferably a single bond.

[0143] Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms for Ar include a phenylene group, an o-methylphenylene group, an m-methylphenylene group, a p-methylphenylene group, a p-ethylphenylene group, a p-tert-butylphenylene group, a 1-naphthylene group, a 2-naphthylene group, a 1-anthrylene group, a 9-anthrylene group, a biphenylene group, a 1-phenanthrylene group, and a 2-phenanthrylene group. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0144] Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. The substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group.

[0145] Examples of the structural unit (a1-6) include structural units represented by formulas (a1-6-1) to (a1-6-44), preferably structural units represented by formulas (a1-6-1) to (a1-6-9), and (a1-6-37) to (a1-6-44), more preferably structural units represented by formulas (a1-6-1), (a1-6-2), (a1-6-4), (a1-6-5), (a1-6-7), (a1-6-8), and (a1-6-37) to (a1-6-44), and even more preferably structural units represented by formulas (a1-6-7), (a1-6-8), and (a1-6-37) to (a1-6-44). a61 In the structural units shown below, the hydrogen atom corresponding to R is replaced by a methyl group or the like. a61 The structural unit (a1-6) also includes a structural unit in which the methyl group corresponding to the following is replaced with a hydrogen atom or the like. TIFF2025175980000121.tif227161

[0146] When the resin contains the structural unit (a1-6), the content thereof, based on all structural units in the resin, can be 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, still more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more. Also, the content can be 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol%.

[0147] Further, examples of the structural unit (a1) include the following structural units. When the resin contains structural units represented by formulas (a1-7-1) to (a1-7-7), the content thereof, based on the total structural units of the resin, can be 10 mol % or more, preferably 15 mol % or more, more preferably 20 mol % or more, even more preferably 25 mol % or more, even more preferably 30 mol % or more, even more preferably 40 mol % or more, and even more preferably 50 mol % or more. Also, the content can be 95 mol % or less, preferably 90 mol % or less, more preferably 85 mol % or less, even more preferably 80 mol % or less, even more preferably 75 mol % or less, even more preferably 70 mol % or less, and even more preferably 60 mol % or less. Specifically, it is preferably 10 to 95 mol %, more preferably 15 to 90 mol %, even more preferably 20 to 85 mol %, even more preferably 20 to 70 mol %, and particularly preferably 20 to 60 mol %.

[0148] Further, examples of the structural unit (a1) include the following structural units. When the resin contains structural units represented by formulas (a1-8-1) to (a1-8-3), the content of these structural units relative to the total structural units of the resin is 10 mol % or more, preferably 15 mol % or more, more preferably 20 mol % or more, even more preferably 25 mol % or more, even more preferably 30 mol % or more, even more preferably 40 mol % or more, and even more preferably 50 mol % or more. The content may also be 95 mol % or less, preferably 90 mol % or less, more preferably 85 mol % or less, even more preferably 80 mol % or less, even more preferably 75 mol % or less, even more preferably 70 mol % or less, and even more preferably 60 mol % or less. Specifically, it is preferably 10 to 60 mol %, more preferably 15 to 55 mol %, even more preferably 20 to 50 mol %, even more preferably 20 to 45 mol %, and particularly preferably 20 to 40 mol %.

[0149] <Structural unit(s)> The structural unit (s) is derived from a monomer (hereinafter sometimes referred to as "monomer (s)") that does not have an acid labile group. As the monomer from which the structural unit (s) is derived, a monomer that does not have an acid labile group known in the resist field can be used. The structural unit (s) preferably has a hydroxy group, a carboxy group, or a lactone ring. The resist composition of the present invention may contain a resin containing a structural unit having a hydroxy group or a carboxy group but no acid labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring but no acid labile group (hereinafter sometimes referred to as "structural unit (a3)"), thereby improving the resolution of the resist pattern and adhesion to the substrate. In addition to the structural units described above, structural units (s) may also include structural units having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), structural units having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), structural units having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), structural units that decompose upon exposure to generate acid (hereinafter sometimes referred to as "structural unit (a7)"), and other structural units known in the art.

[0150] <Structural unit (a2)> The structural unit (a2) is a structural unit represented by formula (a2) and has a terminal hydroxy group or a terminal carboxy group. TIFF2025175980000124.tif41102[In formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO2-. L a22 represents a single bond or a chain hydrocarbon group of 1 to 12 carbon atoms which may have a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. na2 represents an integer of 1 to 5. When na2 is 2 or more, a plurality of L a22 may be the same or different from each other.

[0151] R a2 , A a21 and R a28 is the R in formula (a2-A). a2 , A a21 and R a28 The same can be mentioned. L a21 The hydrocarbon group in is a (na2+1)-valent hydrocarbon group, and examples thereof include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, and cyclic hydrocarbon groups such as aromatic hydrocarbon groups, and may also be a group combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group). L a21 Examples of the chain hydrocarbon group include divalent to hexavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, an alkanpentyl group, and an alkanehexyl group. Examples of the alkanediyl group include A a21 Examples of the alkanediyl groups include the same alkanediyl groups as those shown in the above. Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decantriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group. Examples of the alkanpentyl group include a methanepentyl group, an ethanepentyl group, a propanepentyl group, a butanepentyl group, a pentanepentyl group, and a hexanepentyl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in the above formula include the following alicyclic hydrocarbon groups: The binding site can be at any position. TIFF2025175980000125.tif45168 Examples include divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentyl group, and a cycloalkanehexyl group. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, and cyclodecanetetrayl group; Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, even more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. L a21 Examples of the aromatic hydrocarbon group in include divalent to hexavalent aromatic hydrocarbon groups such as an arylene group, an arenetriyl group, an arenetetrayl group, an arenetyl group, and an arenehexyl group. Specific examples include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, and a phenanthrenetetrayl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The aromatic hydrocarbon group preferably has 6 to 20 carbon atoms, more preferably 6 to 18 carbon atoms, even more preferably 6 to 14 carbon atoms, still more preferably 6 to 12 carbon atoms, and even more preferably 6 to 10 carbon atoms. Examples of the group combining two or more types include a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group, a group combining an aromatic hydrocarbon group with a chain hydrocarbon group, a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more types of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any group is A a21 and L a22 may be bound to Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -SO-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2 - is replaced with -S-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which an alkyl group in which -CH2-CH2-CH2- at any position is replaced by -O-CO-O-), an oxy group (a methylene group in which -CH2- is replaced by -O-), a carbonyl group (a methylene group in which -CH2- is replaced by -CO-), a thio group (a methylene group in which -CH2- is replaced by -S-), a sulfonyl group (a methylene group in which -CH2- is replaced by -SO2-), an alkanediyloxy group (an alkanediyl group in which -CH2- at any position is replaced by -O-), an alkanediyloxycarbonyl group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced with -SO2-),Examples of such groups include an alkanediylthio group (a group in which -CH- at any position in an alkanediyl group is replaced with -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group combining two or more of these groups. Also included are groups in which one or more hydrogen atoms of these groups are replaced with a bonding site. These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0152] Furthermore, examples of groups in which -CH2- contained in an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining these is replaced with -O-, -S-, -CO-, -SO-, or -SO2- include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L a21 The hydrocarbon group in may have one or more substituents, such as a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, an alkyl group having 1 to 16 carbon atoms (wherein —CH2— contained in the haloalkyl group or the alkyl group may be replaced by —O—, —CO—, —S—, —SO— or —SO2—), an acryloyloxy group, or a methacryloyloxy group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a21 The hydrocarbon group in the formula (I) may have a halogen atom as a substituent, thereby substantially having a substituent such as a haloalkyl group. Examples of the haloalkyl group include alkyl fluoride, alkyl chloride, alkyl bromide, and alkyl iodide, such as a chloromethyl group, bromomethyl group, iodomethyl group, fluoromethyl group, difluoromethyl group, trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, and perfluorobutyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. L a21The hydrocarbon group of L a21 can substantially have a substituent such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 10, even more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. L a21 L is a group in which -CH2- in the hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO2-. a21 may substantially have a substituent such as a hydroxy group, a carboxy group, a thiol group, an alkylthio group, an alkylsulfonyl group, an alkoxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 12, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. The number of carbon atoms in the alkoxycarbonyl group, alkylcarbonyl group, or alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 to 3. The number of carbon atoms in the alkoxyalkyl group or alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, even more preferably 2 to 6, and still more preferably 2 to 4. The above groups also include the same groups as those exemplified in this specification. L a21The substituents that the hydrocarbon group in the formula (I) may have are preferably a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), still more preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group. Also, L a21 When the alkanediyl group is replaced by -O- or -CO-, etc., for example, *-L a23 -X a21 -(L a23 represents an alkanediyl group having 1 to 8 carbon atoms, and X a21 represents -O-, -O-CO-, -CO-O- or -O-CO-O-, * represents A a21 It is also preferred that the bond is L a21is preferably a single bond, an optionally substituted chain hydrocarbon group of 1 to 12 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an optionally substituted cyclic hydrocarbon group of 3 to 20 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-), or a group formed by combining an optionally substituted chain hydrocarbon group of 1 to 8 carbon atoms with an optionally substituted cyclic hydrocarbon group of 3 to 20 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2-, -SO- or -CO-). and more preferably an optionally substituted chain hydrocarbon group of 1 to 10 carbon atoms (provided that -CH2- in the chain hydrocarbon group may be replaced with -O- or -CO-), an optionally substituted cyclic hydrocarbon group of 3 to 18 carbon atoms (provided that -CH2- in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-), or a group formed by combining an optionally substituted chain hydrocarbon group of 1 to 6 carbon atoms with an optionally substituted cyclic hydrocarbon group of 3 to 18 carbon atoms (provided that -CH2- in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO-, -SO2- or -CO-).

[0153] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, 1-methylpropane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-dimethylpropane-1,3-diyl, pentane-2,4-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. L a22 may have one or more fluorine atoms. L a22 The -CH2- in the chain hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-, and these substituted groups may be in the range of L, as long as the upper limit of the number of carbon atoms allows. a21 Examples include the same as those exemplified above. na2 is preferably an integer of 1 to 4, and more preferably an integer of 1 to 3. L a21 When R is a single bond or a chain hydrocarbon group, examples of the structural unit (a2) include the following structural units: a2 A structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom or the like is also a suitable structural unit of the structural unit (a2), similar to the structural unit below. TIFF2025175980000126.tif66168

[0154] When producing a resist pattern from the resist composition of the present invention, if a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) is used as an exposure light source, the structural unit (a2) preferably has a phenolic hydroxy group, and more preferably the structural unit (a2-A) described above. Furthermore, if an ArF excimer laser (193 nm) or the like is used, the structural unit (a2) preferably has an alcoholic hydroxy group, and more preferably the structural unit (a2-C) described below. The structural unit (a2) may contain one type alone or two or more types.

[0155] In the structural unit (a2), L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include a structural unit represented by formula (a2-B) (hereinafter may be referred to as "structural unit (a2-B)"), a structural unit represented by formula (a2-C) (hereinafter may be referred to as "structural unit (a2-C)"), and a structural unit represented by formula (a2-D) (hereinafter may be referred to as "structural unit (a2-D)"). TIFF2025175980000127.tif45100[In formula (a2-B) and formula (a2-C), R a2 has the same meaning as formula (a2). R a27 has the same meaning as formula (a2-A). L a25 is -O- or *-O-(CH2) k2 represents —CO—O—, and k2 represents an integer of 1 to 7. * represents the bonding site with —CO—. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same or different from each other. nB22 represents an integer of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same or different from each other. nC22 represents an integer of 0 to 10. When nC22 is 2 or more, a plurality of R a27 may be the same or different from each other. L a25 is preferably —O— or —O—(CH2) f1 It is —CO—O— (wherein f1 represents an integer of 1 to 4), and more preferably —O—. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably an integer of 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. nC22 is preferably an integer of 0 to 6, more preferably an integer of 0 to 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0156] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from monomers described in JP-A-2010-204646, the following structural units, and R in the following structural units: a2 In particular, structural units represented by any one of formulas (a2-B-1) to (a2-B-5) and formulas (a2-C-1) to (a2-C-9) are preferred. When the resin contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof, based on the total structural units of the resin, can be 1 mol% or more, preferably 2 mol% or more. It can also be 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it can be 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0157] TIFF2025175980000129.tif51104[In formula (a2-D), R a2 and A a21 have the same meaning as in formula (a2). R a27 has the same meaning as formula (a2-A). R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 5. When nD2 is 2 or greater, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27may be the same or different from each other. However, 1≦nD2+nD22≦5. R a21 and R a22 Examples of the fluorinated alkyl groups are each independently a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and the like. R a21 and R a22 As the aryl group, a trifluoromethyl group is preferred. L a24 Examples of the alkanediyl group include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group. L a24 is preferably a single bond or a methylene group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nD2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, even more preferably 1 or 2, and even more preferably 1. Also preferably, nD2 is 1, and the group in parentheses is bonded to the para position. nD22 is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, even more preferably 0 or 1, and even more preferably 0.

[0158] The structural unit (a2-D) is more preferably a structural unit represented by the following formula (a2-D1) (hereinafter, sometimes referred to as "structural unit (a2-D1)"). TIFF2025175980000130.tif51108[In formula (a2-D1), R a2 , A a21 , R a27 , nD2 and nD22 have the same meaning as in formula (a2-D). In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0159] Examples of the structural unit (a2-D) include the structural units shown below. TIFF2025175980000131.tif62168

[0160] In the structural units represented by formulae (a2-D-1) to (a2-D-8), R a2 In the structural units represented by formulas (a2-D-9) to (a2-D-16), the hydrogen atom corresponding to R a2 Specific examples of the structural unit (a2-D) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, etc. Among these, structural units represented by formulas (a2-D-1) to (a2-D-8) are preferred, structural units represented by formulas (a2-D-1) to (a2-D-4) are more preferred, and structural units represented by formula (a2-D-1) are even more preferred.

[0161] When the resin contains the structural unit (a2-D), its content is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin. It is also preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0162] <Structural unit (a3)> The lactone ring contained in the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or a condensed ring of a monocyclic lactone ring with another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0163] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). One of these may be contained alone, or two or more may be contained. TIFF2025175980000132.tif51164 [In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6 are each independently -O- or -O-(CH2) k3 It represents a group represented by —CO—O— (k3 represents an integer of 1 to 7). L a7 -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3. w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 may be the same as or different from each other.

[0164] R a21 , R a22 , R a23 and R a25 Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group. R a18 , R a19 , R a20 and R a24 Examples of the halogen atom and the alkyl group optionally having a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples include the same as those exemplified above. L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group.

[0165] L a4 , L a5 and L a6 are each independently preferably -O- or -O-(CH2) k3 In -CO-O-, k3 is a group in which k3 is any integer of 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and even more preferably an oxygen atom. L a7 is preferably -O- or *-OL a8 It is —CO—O—, and more preferably —O—, —O—CH 2 —CO—O— or —O—C 2 H 4 —CO—O—. R a18 , R a19 , R a20 and R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 , R a23 and R a25 are each independently preferably a carboxy group, a cyano group, or a methyl group. p1, q1 and r1 each independently represent an integer of preferably 0 to 2, and more preferably 0 or 1.

[0166] w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4'). TIFF2025175980000133.tif3055(in the formula, R a24 , L a7 has the same meaning as above.)

[0167] Examples of the structural unit (a3) ​​include structural units derived from monomers described in JP 2010-204646 A, JP 2000-122294 A, and JP 2012-41274 A. Examples of the structural unit (a3) ​​include structural units represented by any of formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the structural units, R in formulas (a3-1) to (a3-4) a18 , R a19 , R a20 and R a24 A structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom is preferred. When the resin contains the structural unit (a3), the total content thereof, based on all structural units in the resin, is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more. It may also be 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it may be 1 to 70 mol%, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, even more preferably 5 to 65 mol%, even more preferably 5 to 60 mol%, and even more preferably 10 to 60 mol%. The content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin. It is also preferably 60 mol% or less, more preferably 55 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it is preferably 1 to 60 mol%, more preferably 3 to 60 mol%, even more preferably 3 to 55 mol%, even more preferably 5 to 55 mol%, even more preferably 5 to 50 mol%, and even more preferably 10 to 50 mol%.

[0168] <Structural unit (a4)> The structural unit represented by formula (a4) is shown below. TIFF2025175980000135.tif3453[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents an aliphatic hydrocarbon group having 1 to 48 carbon atoms and containing a halogen atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-.] R 42 Examples of the aliphatic hydrocarbon group represented by the formula (I) include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups.

[0169] Examples of the chain hydrocarbon group include linear alkyl groups such as methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups, and branched alkyl groups such as isopropyl and isobutyl groups. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include monocyclic alicyclic hydrocarbon groups which are monocyclic cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group; and polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkyl groups such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* indicates a bonding site): TIFF2025175980000136.tif10146 Examples of groups formed by combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic hydrocarbon group-alkyl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and branched alkanediyl groups such as propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom contained in the aliphatic hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 42Examples of the aliphatic hydrocarbon group in which -CH- is replaced with -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group combining two or more of these groups. These substituted groups include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. The number of carbon atoms of these substituted groups, for example, in the case of an alkoxy group or the like, is 1 to 35, and may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3; in the case of an alkoxycarbonyl group or the like, is 2 to 35, and may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3; in the case of an alkylcarbonyl group or the like, is 2 to 36, and may be 2 to 18, preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3; and in the case of an alkoxycarbonyloxy group or the like, is 2 to 34, and may be 2 to 16, preferably 2 to 10, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3.

[0170] The structural unit (a4) is R 42 is preferably an aliphatic hydrocarbon group having a fluorine atom. 42However, examples of the structural unit (a4) that is an aliphatic hydrocarbon group having a fluorine atom include a structural unit represented by formula (a4-1) (hereinafter, may be referred to as structural unit (a4-1)), a structural unit represented by formula (a4-2) (hereinafter, may be referred to as structural unit (a4-2)), a structural unit represented by formula (a4-3) (hereinafter, may be referred to as structural unit (a4-3)), and a structural unit represented by formula (a4-A) (hereinafter, may be referred to as "structural unit (a4-A)"). The structural unit represented by formula (a4-1) is a structural unit represented by the following formula: TIFF2025175980000137.tif4964[In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents a fluorine atom-containing alkanediyl group having 1 to 8 carbon atoms or a fluorine atom-containing cycloalkanediyl group having 3 to 12 carbon atoms. R 42f represents a hydrogen atom or a fluorine atom.

[0171] L 41 Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, and butane-1,4-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, and 2-methylpropane-1,2-diyl. The terminal of the branched alkanediyl group may be a methyl group. L 42fExamples of the alkanediyl group having a fluorine atom in the formula (I) include a linear alkanediyl group having a fluorine atom, such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, and an octane-1,8-diyl group having a fluorine atom; Examples of branched alkanediyl groups having fluorine atoms include ethane-1,1-diyl groups having fluorine atoms, propane-1,1-diyl groups having fluorine atoms, propane-1,2-diyl groups having fluorine atoms, propane-2,2-diyl groups having fluorine atoms, pentane-2,4-diyl groups having fluorine atoms, 2-methylpropane-1,3-diyl groups having fluorine atoms, 2-methylpropane-1,2-diyl groups having fluorine atoms, pentane-1,4-diyl groups having fluorine atoms, and 2-methylbutane-1,4-diyl groups having fluorine atoms. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in the formula (I) include monocyclic cycloalkanediyl groups having a fluorine atom, such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cycloheptane-1,4-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom; Examples of polycyclic cycloalkanediyl groups having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom. L 42fThe number of fluorine atoms contained in the alkanediyl group and cycloalkanediyl group having a fluorine atom in the formula (I) may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group and cycloalkanediyl group having a fluorine atom in the formula (I) are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0172] L 42f Examples of the perfluoroalkanediyl group in the formula (I) include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3 ,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group. L 42f Examples of the perfluorocycloalkanediyl group in the formula (I) include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, and a perfluoroadamantanediyl group.

[0173] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. L 42fis preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0174] The structural unit (a4-1) includes the structural units shown below and R in the structural unit (a4-1) in the structural units shown below. 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. TIFF2025175980000138.tif55168The structural unit represented by formula (a4-2) is the structural unit shown below. TIFF2025175980000139.tif5575[In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. R 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. However, L 43f and R 43f At least one of L has a fluorine atom, 43f and R 43f The maximum total number of carbon atoms is 21.

[0175] L 43f and R 43f Examples of the aliphatic hydrocarbon group in L include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups. 43f and R 43f Examples of the aliphatic hydrocarbon group in 43f and R 43f As long as the upper limit of the total number of carbon atoms in42 Examples of the aliphatic hydrocarbon group include the same groups as the exemplified aliphatic hydrocarbon groups.

[0176] L 43f The aliphatic hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by formula (L43f-1). TIFF2025175980000140.tif13119 [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. L 47f represents a single bond or a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, and ** is -O-CO-R 43f ]

[0177] L in the group represented by formula (L43f-1) 45f , L 46f and L 47f Examples of the divalent aliphatic hydrocarbon group represented by include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic hydrocarbon group, and a divalent aliphatic hydrocarbon group formed by combining an alkanediyl group with a divalent alicyclic hydrocarbon group. Specific examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. Preferably, s is 0.

[0178] Examples of the group represented by formula (L43f-1) include the following groups: In the following examples, * and ** each represent a bonding site, and ** represents -O-CO-R 43f This is the binding site for TIFF2025175980000141.tif47140

[0179] R 43f is preferably an aliphatic hydrocarbon group having a fluorine atom. In this case, examples of the structural unit represented by formula (a4-2) include structural units represented by formula (a4-2A) or (a4-2B). TIFF2025175980000142.tif68102 [In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represents the same as in formula (a4-2). R 43fA represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom. A 43f represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents A 43f represents the binding site with R 43fB represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may contain a fluorine atom. However, in formula (a4-2A), L 43f and R 43fA The total number of carbon atoms in formula (a4-2B) is 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB The total number of carbon atoms in A is 21 or less. 43f and R 43fB At least one of them has at least one fluorine atom.] R 43fA The aliphatic hydrocarbon group of R in formula (a4) is as long as the upper limit of the number of carbon atoms permits. 42 Examples of the aliphatic hydrocarbon groups include the same aliphatic hydrocarbon groups as those exemplified above. R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and containing a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and containing a fluorine atom, or a group combining these, and *-(CF2) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents an integer of 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferred. A 43f and R 43fB The aliphatic hydrocarbon group of R in formula (a4) is as long as the upper limit of the number of carbon atoms permits. 42 Examples of the aliphatic hydrocarbon groups include the same aliphatic hydrocarbon groups as those exemplified above. A 43f is preferably a divalent chain hydrocarbon group which may have a fluorine atom, a divalent alicyclic hydrocarbon group, or a combination thereof, more preferably a divalent chain hydrocarbon group which has a fluorine atom, and even more preferably a fluorinated alkanediyl group having 1 to 6 carbon atoms. R 43fBThe aliphatic hydrocarbon group which may have a fluorine atom is preferably a chain hydrocarbon group which may have a fluorine atom, an alicyclic hydrocarbon group or a group combining these, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms or a group combining these, and more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluoropropyl group, a ... More preferred are fluorinated alkyl groups such as nonafluorobutyl, butyl, perfluoropentyl, 2,2,3,3,4,4,5,5,5-nonafluoropentyl, pentyl, hexyl, perfluorohexyl, heptyl, perfluoroheptyl, octyl, and perfluorooctyl groups, cyclopropylmethyl, cyclopropyl, cyclobutylmethyl, cyclopentyl, cyclohexyl, perfluorocyclohexyl, adamantyl, adamantylmethyl, adamantyldimethyl, norbornyl, norbornylmethyl, perfluoroadamantyl, and perfluoroadamantylmethyl groups.

[0180] In formula (a4-2B), *-A 43f -X 43 -R 43fB An example of a structure that the group represented by the formula (I) can take is the following structure (* indicates the bonding site with the carbonyl group). TIFF2025175980000143.tif15168

[0181] The structural unit represented by formula (a4-2A) includes the structural units shown below and R in the structural unit represented by formula (a4-2A) in the structural units shown below. 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. TIFF2025175980000144.tif100168

[0182] The structural unit represented by formula (a4-2B) includes the structural units shown below and R in the structural unit represented by formula (a4-2B) in the structural units shown below. 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. TIFF2025175980000145.tif110163

[0183] The structural unit (a4) also includes a structural unit represented by formula (a4-3). TIFF2025175980000146.tif5577[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. R 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. However, L 44f and R 44f At least one of L has a fluorine atom, 44f and R 44f The maximum total number of carbon atoms is 21.

[0184] L 44f and R 44f Examples of the aliphatic hydrocarbon group in L include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups. 44f and R 44f Examples of the aliphatic hydrocarbon group in 44f and R 44f As long as the upper limit of the total number of carbon atoms in 42 Examples of the aliphatic hydrocarbon group include the same groups as the exemplified aliphatic hydrocarbon groups. L 44fis preferably an alkanediyl group having 1 to 14 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and -(CH2) j1 -, -(CH2) j2 -O-(CH2) j3 -or-(CH2) j4 -CO-O-(CH2) j5 - (j1 to j5 each independently represent an integer of 1 to 6.) It is more preferable that it is an alkanediyl group having 1 to 4 carbon atoms (one -CH2- contained in the alkanediyl group may be replaced with -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced with -CO-O- or -O-CO-). R 44f is preferably an aliphatic hydrocarbon group having 1 to 10 carbon atoms and having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, an alicyclic hydrocarbon group having 3 to 10 carbon atoms and having a fluorine atom, or a group combining these, further preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms and having a fluorine atom.

[0185] Examples of the structural unit represented by formula (a4-3) include the following structural units and structural units represented by the following formulas: 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. TIFF2025175980000147.tif85170

[0186] Examples of the structural unit (a4) include a structural unit represented by formula (a4-A). TIFF2025175980000148.tif3672[In formula (a4-A), R 44 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 44 represents a single bond or *-CO-O-. * represents R44 represents the bonding site with the carbon atom to which it is bonded. L 44 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO- or -CO-. R 45 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 46 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 44 may bond to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-. mi represents an integer of 1 to 4. When mi is 2 or more, the groups in the parentheses may be the same or different.]

[0187] R 44 Examples of the halogen atom and the alkyl group optionally having a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples include the same as those exemplified above. R 44 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, further preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0188] L 44 Examples of the aliphatic hydrocarbon group in include chain hydrocarbon groups and monocyclic or polycyclic (including spiro rings, fused rings, bridged rings, etc.) alicyclic hydrocarbon groups, and may also be groups that combine two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group). Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanpentyl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl groups; Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups: The binding site can be any position. TIFF2025175980000149.tif45164 Examples include divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, and a cycloalkanepentyl group. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, and the like; Examples include cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, spirocyclohexane-1,2'-cyclopentane-diyl group, and spiroadamantane-2,3'-cyclopentane-diyl group; and polycyclic alicyclic hydrocarbon groups such as spiro rings having cycloalkanediyl groups bonded to norbornanediyl groups or adamantanediyl groups via spiro bonds. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, even more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. Examples of groups that combine two or more types include groups that combine an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups and chain hydrocarbon groups may be combined. In addition, when any of the groups is X 11 may be bound to Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), Examples of such a group include a group having a hydrocarbon group bonded thereto (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group having an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), and a group having an alicyclic hydrocarbon group, a chain hydrocarbon group, and a chain hydrocarbon group bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-...

Claims

1. A resist composition containing a compound represented by formula (I): [In formula (I), Ar １ , Ar ２ and Ar ３ each independently represents an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. L １ and L ２ each independently represents an alkanediyl group having 1 to 16 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -SO-, -SO ２ -, -NR ７ It may be replaced by - or -CO-. L ３Ａ , L ３Ｂ , L ３Ｃ , L ５Ａ , L ５Ｂ and L ５Ｃ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms which may have a substituent. R ３Ａ , R ３Ｂ and R ３Ｃ are each independently -X ３Ａ -R ３１ or -X ３Ａ -L ３１ -X ３Ｂ -R ３１ It is expressed as: X ３Ａ and X ３Ｂ each independently represents —CO—O—, —O—CO—, —O—CO—O— or —O—. L ３１ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO-, -SO ２ -, -NR ７ It may be replaced by - or -CO-. R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３１ represents a group containing a cyclic hydrocarbon group having 3 to 36 carbon atoms, the cyclic hydrocarbon group containing an alicyclic hydrocarbon group and optionally having a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR ７ -or-SO ２ - may be replaced by R ３１ At least one cyclic hydrocarbon group is an alicyclic hydrocarbon group having at least one polar group, or at least one —CH ２ -CH ２ - is -CO-O- or -SO ２ At least one —CH substituted with —O— or contained in the cyclic hydrocarbon group ２ -CH ２ -CH ２ - is replaced with -O-CO-O-. R ５Ａ , R ５Ｂ and R ５Ｃ are each independently, each independently, -X ５Ａ -R ５１ or -X ５Ａ -L ５１ -X ５Ｂ -R ５１ It is expressed as: L ５１ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO-, -SO ２ -, -NR ７ It may be replaced by - or -CO-. X ５Ａ and X ５Ｂ each independently represents —CO—O—, —O—CO—, —O—CO—O— or —O—. R ５１ represents a group represented by formula (IC). m1 represents an integer of 0 to 6, and when m1 is 2 or more, the groups in the parentheses may be the same or different from each other. m2 represents an integer of 0 to 6, and when m2 is 2 or greater, the groups in the parentheses may be the same or different from each other. m3A, m3B, m3C, m5A, m5B, and m5C each independently represent an integer of 0 to 4, and when each is 2 or more, the groups in the respective parentheses may be the same or different. The relationship 1≦m3A+m3B+m3C≦8 is satisfied. The relationship 1≦m5A+m5B+m5C≦8 is satisfied. The relationship 1≦m1+m3A+m5A≦8 is satisfied, and when m1 is 0, m3A and m5A each represent an integer of 1 or more. The relationship 0≦m2+m3B+m5B≦8 is satisfied. 0≦m3C+m5C≦9 is satisfied.] [In formula (IC), R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R Ａ are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 1 or 2. L １２ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO-, -SO-, -NR ７ -or-SO ２ It may be replaced with -. * indicates a binding site.]

2. L １ But, -L １Ａ -X １Ａ -L １Ｂ - and L ２ But, -L ２Ａ -X ２Ａ -L ２Ｂ - and L １Ａ , L １Ｂ , L ２Ａ and L ２Ｂ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms which may have one or more halogen atoms; X １Ａ and X ２Ａ 2. The resist composition according to claim 1, wherein each independently represents —O—, —CO—O—, —O—CO—, or —O—CO—O—.

3. At least one R ３１ 3. The resist composition according to claim 1, wherein is an alicyclic hydrocarbon group having 5 to 12 carbon atoms and one or two hydroxy groups.

4. At least one R ３１ is expressed by the formula (R １０ -1), formula (R １０ -2) or formula (R １０ 3. The resist composition according to claim 1, wherein the aryl group is a group represented by the formula (I-3). [Formula (R)] １０ -1) ~ Formula (R) １０ -3) Middle * indicates a binding site. Z 12 represents an oxygen atom, a sulfur atom or a methylene group. R １１ , R １２ and R １３ each independently represents a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. m11 represents an integer of 0 to 5, and when m11 is 2 or more, a plurality of R １１ may be the same or different from each other. m12 represents an integer of 0 to 5, and when m12 is 2 or more, a plurality of R １２ may be the same or different from each other. m13 represents an integer of 0 to 5, and when m13 is 2 or more, a plurality of R １３ may be the same or different from each other. n10 represents an integer of 1 to 3.

5. At least one R ３１ is expressed as follows: １ 3. The resist composition according to claim 1, wherein the aryl group is a group having a ring represented by the formula: [Formula (T)] １ )middle, Ring A represents a sultone ring having 2 to 24 carbon atoms. ２ - may be replaced by -O-, -S- or -NH-. R ４１Ａ represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R ４１Ａ may be the same or different. The binding site is at any position.]

6. At least one R ３１ 3. The resist composition according to claim 1, wherein is a group represented by formula (Ix). [In formula (Ix), Ring W ｘ represents a ring of a 3- to 18-membered cyclic carbonate ester structure which may have a substituent, and the cyclic carbonate ester structure may have a heteroatom. L ３２ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. * indicates a binding site.]

7. Ar １ , Ar ２ and Ar ３ 3. The resist composition according to claim 1, wherein each of the groups independently represents an aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a substituent.

8. m1 is 0, m3A is 1 or 2, 3. The resist composition according to claim 1, wherein m5A is 1 or 2.

9. 3. The resist composition according to claim 1, wherein the compound represented by formula (I) is a compound represented by formula (IA). [In formula (IA), Ar １ , Ar ２ , L １ , L ３Ｂ , R ３Ｂ , L ５Ｂ and R ５Ｂ represents the same meaning as in formula (I). m3B' and m5B' each independently represent 1 or 2.]

10. 3. The resist composition according to claim 1, further comprising an acid generator, wherein the acid generator comprises a salt represented by formula (B1) or a salt represented by formula (B2). [In formula (B1), L b1 represents a single bond or an (nb1+1)-valent hydrocarbon group which may have a substituent, and —CH 2 - is -O-, -S-, -CO-, -SO- or -SO 2 It may be replaced with -. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO-, -SO- or -SO 2 It may be replaced with -. Y b1 represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and —CH 2 - is -O-, -S-, -SO-, -SO 2 It may be replaced by - or -CO-. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different. Z1 ＋ represents an organic cation. [In formula (B2), A １ represents a nitrogen atom or a carbon atom. L ｂ２’ represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO-, -SO- or -SO 2 It may be replaced with -. Y ｂ１’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO-, -SO- or -SO 2 It may be replaced with -. nb5 represents an integer of 2 or 3, and when nb5 is 2, A １ is a nitrogen atom, and when nb5 is 3, A １ is a carbon atom. The groups in the parentheses may be the same or different, and two groups in the parentheses are bonded to form A １ may form a ring together with Z2 ＋ represents an organic cation.

11. 3. The resist composition according to claim 1, further comprising a compound having a phenolic hydroxy group or a benzoic carboxy group, or a compound in which the phenolic hydroxy group or the benzoic carboxy group of said compound is protected with an acid labile group.

12. The resist composition according to claim 11, wherein the compound having a phenolic hydroxy group or a benzoic carboxy group, or the compound in which the phenolic hydroxy group or the benzoic carboxy group of the compound is protected with an acid labile group, is a resin, and the resin contains a structural unit represented by formula (a2-A) or a structural unit represented by formula (a1-4). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or —CO—. nA2 represents an integer of 1 to 5, and when nA2 is 2 or more, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. mc represents an integer of 0 to 2. [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and —CH ２ - is -O-, -CO- or -NR ａ１８ May be replaced with -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the —C—O— to which they are bonded, and the hydrocarbon group and —CH contained in the divalent hydrocarbon group 2 - may be replaced by -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na12 is 2 or more, a plurality of R ａ１７ may be the same or different from each other. mc represents an integer of 0 to 2.

13. The resist composition according to claim 12, wherein the resin further comprises at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L ａ１ and L ａ２ are each independently —O— or *—O—(CH ２ ) ｋ１ represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—. R a01 , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom. m1' represents an integer of 0 to 14; n1 represents an integer of 0 to 10. n1′ represents an integer of 0 to 3.] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom. Z a1 is a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents —O— or —S—. s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3.] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a6２ , R a63 and R a6４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a6２ and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached. X a61 represents a single bond, —CO—O—*, or —CO—NR a65 - represents *, * represents the bonding site with Ar, R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-O-L a61 - or *-CO-O-L a62 -, * represents a bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

14. (1) a step of applying the resist composition according to claim 1 or 2 onto a substrate; (2) drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) a step of heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising:

15. A compound represented by formula (I): [In formula (I), Ar １ , Ar ２ and Ar ３ each independently represents an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. L １ and L ２ each independently represents an alkanediyl group having 1 to 16 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -SO-, -SO ２ -, -NR ７ It may be replaced by - or -CO-. L ３Ａ , L ３Ｂ , L ３Ｃ , L ５Ａ , L ５Ｂ and L ５Ｃ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms which may have a substituent. R ３Ａ , R ３Ｂ and R ３Ｃ are each independently -X ３Ａ -R ３１ or -X ３Ａ -L ３１ -X ３Ｂ -R ３１ It is expressed as: X ３Ａ and X ３Ｂ each independently represents —CO—O—, —O—CO—, —O—CO—O— or —O—. L ３１ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO-, -SO ２ -, -NR ７ It may be replaced by - or -CO-. R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３１ represents a group containing a cyclic hydrocarbon group having 3 to 36 carbon atoms, the cyclic hydrocarbon group containing an alicyclic hydrocarbon group and optionally having a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR ７ -or-SO ２ - may be replaced by R ３１ At least one cyclic hydrocarbon group is an alicyclic hydrocarbon group having at least one polar group, or at least one —CH ２ -CH ２ - is -CO-O- or -SO ２ At least one —CH substituted with —O— or contained in the cyclic hydrocarbon group ２ -CH ２ -CH ２ - is replaced with -O-CO-O-. R ５Ａ , R ５Ｂ and R ５Ｃ are each independently, each independently, -X ５Ａ -R ５１ or -X ５Ａ -L ５１ -X ５Ｂ -R ５１ It is expressed as: L ５１ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO-, -SO ２ -, -NR ７ It may be replaced by - or -CO-. X ５Ａ and X ５Ｂ each independently represents —CO—O—, —O—CO—, —O—CO—O— or —O—. R ５１ represents a group represented by formula (IC). m1 represents an integer of 0 to 6, and when m1 is 2 or more, the groups in the parentheses may be the same or different from each other. m2 represents an integer of 0 to 6, and when m2 is 2 or greater, the groups in the parentheses may be the same or different from each other. m3A, m3B, m3C, m5A, m5B, and m5C each independently represent an integer of 0 to 4, and when each is 2 or more, the groups in the respective parentheses may be the same or different. The relationship 1≦m3A+m3B+m3C≦8 is satisfied. The relationship 1≦m5A+m5B+m5C≦8 is satisfied. The relationship 1≦m1+m3A+m5A≦8 is satisfied, and when m1 is 0, m3A and m5A each represent an integer of 1 or more. The relationship 0≦m2+m3B+m5B≦8 is satisfied. 0≦m3C+m5C≦9 is satisfied.] [In formula (IC), R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R Ａ are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 1 or 2. L １２ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO-, -SO-, -NR ７ -or-SO ２ It may be replaced with -. * indicates a binding site.]

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