Active vibration isolation system

Abstract

To determine whether or not an abnormality occurs in components of a plurality of active vibration isolators more properly in an active vibration isolation system formed by the active vibration isolators.SOLUTION: An active vibration isolation system S, S includes: a plurality of vibration isolators 5 each having an actuator 8 and a state sensor 9; and a diagnostic system. The diagnostic system performs active diagnosis in which the two or more actuators 8 in the vibration isolators 5 are operated at the same time to determine whether or not an abnormality occurs in the state sensor 9 for each vibration isolator 5 in first determination processing. Further, the diagnostic system causes the actuators 8 in the vibration isolator 5 to operate one by one serially to determine whether or not an abnormality occurs in the actuator 8 for each vibration isolator 5 in second determination processing. The diagnostic system outputs determination results of the first and second determination processing to at least one of an external device 1000 and a notification part 101.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to active vibration isolation systems. [Background technology]

[0002] For example, Patent Document 1 discloses a method for diagnosing a fault in a control device. This control device includes a plurality of actuators that apply thrust to an object, and a plurality of sensors that detect state quantities of the object.

[0003] According to Patent Document 1, the method described therein includes a first step of comparing a first signal with a second signal, and a second step of diagnosing the location of a fault based on the comparison result of the first step.

[0004] Here, the first signal is a signal output from each of the sensors when the actuators and sensors are considered to be normal, and the second signal is a signal output from each of the sensors when the control device is in use.

[0005] Furthermore, according to Patent Document 1, "the initial state at the time of assembly of the control device" is used as "a state in which a plurality of actuators and a plurality of sensors are considered to be normal." [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2023-171052 Summary of the Invention [Problem to be solved by the invention]

[0007] As described in Patent Document 1, consider a case where each active vibration isolation device constituting an active vibration isolation system includes elemental parts such as a sensor, an actuator, etc. In this case, if an abnormality occurs in any of the elemental parts, it is not easy to identify the elemental part in which the abnormality occurred.

[0008] In addition, if external equipment such as semiconductor manufacturing equipment is supported by multiple active vibration isolation systems, it is necessary to determine as quickly as possible whether an abnormality has occurred in the external equipment or in the active vibration isolation system, otherwise there is a possibility that manufacturing by the external equipment will be delayed or that an abnormality occurring in the active vibration isolation system will cause a breakdown of the external equipment.

[0009] The present disclosure has been made in consideration of these points, and its purpose is to more accurately determine the presence or absence of abnormalities in the component parts of each active vibration isolation device in an active vibration isolation system made up of multiple active vibration isolation devices. [Means for solving the problem]

[0010] A first aspect of the present disclosure relates to an active vibration isolation system that includes a plurality of active vibration isolation devices installed on a foundation and a diagnostic device that controls each of the plurality of active vibration isolation devices, and in which an external device configured to be able to receive an electrical signal is supported by the plurality of active vibration isolation devices via a base.

[0011] According to the first aspect, the active vibration isolation system includes an actuator provided in each of the plurality of active vibration isolation devices and operating to vibrate the external device, and a plurality of status sensors for detecting vibrations of each of the plurality of active vibration isolation devices or the foundation, and the diagnostic device sequentially executes a first determination process for determining whether or not there is an abnormality in a sensing circuit configured to include the status sensor based on a detection signal from the status sensor, and a second determination process that is executed after completion of the first determination process and determines whether or not there is an abnormality in the actuator.

[0012] Then, in the first determination processing, the diagnostic device inputs control signals to the plurality of active vibration isolation apparatuses so that two or more of the actuators operate simultaneously, and executes dynamic diagnosis to determine individually the presence or absence of an abnormality in each of the plurality of status sensors based on the detection signals corresponding to the control signals; in the second determination processing, the diagnostic device inputs control signals to the plurality of active vibration isolation apparatuses so that the actuators operate one by one in sequence, and determines individually the presence or absence of an abnormality in the actuator of each of the plurality of active vibration isolation apparatuses based on the detection signals corresponding to the control signals; and the diagnostic device outputs the determination results of the first and second determination processing to at least one of the external device and a notification unit of the diagnostic device.

[0013] Here, the term "diagnosis device" may also be called a "controller" in the sense that it is capable of controlling each active vibration isolation apparatus. Regardless of such name, the diagnosis device according to the present disclosure includes general devices that can control active vibration isolation apparatuses. The diagnosis device may be a controller for the vibration isolation table, or may be another controller connected to the active vibration isolation apparatus via that controller, or may be a combination of these.

[0014] Here, the "other controller" includes a general device that can indirectly control the active vibration isolation apparatus via a controller for the vibration isolation table. The other controller may be a controller for controlling an external device, a relay interposed between the controller for vibration isolation and the controller for the external device, or a combination thereof.

[0015] The multiple active vibration isolation apparatuses can be considered to be connected via the surface plate and external devices. Therefore, even if an abnormality occurs in one of the actuators of the multiple active vibration isolation apparatuses, the remaining actuators can be operated, and the vibrations caused by that operation can be detected by each of the multiple status sensors. Then, by individually judging or comparing the detection signals of each status sensor, it is possible to accurately determine which status sensor has an abnormality, even when multiple active vibration isolation apparatuses are used.

[0016] On the other hand, the second determination process, which is performed after the first determination process (particularly the dynamic diagnosis), operates the actuators of the multiple active vibration isolation devices in sequence. By operating the actuators in sequence, it is possible to accurately determine which actuator has developed an abnormality.

[0017] Furthermore, since both the first and second judgment processes are completed by the active vibration isolation apparatus alone, even if an external device is mounted thereon, it is possible to distinguish and judge whether an abnormality has occurred in the external device or in the active vibration isolation apparatus. This makes it possible to respond to various abnormalities as quickly as possible when they occur, and to accurately prevent delays in manufacturing due to the external device, failures of the external device due to an abnormality occurring in the active vibration isolation system, etc.

[0018] According to the second aspect of the present disclosure, at least some of the plurality of state sensors may be provided in each of the plurality of active vibration isolation apparatuses.

[0019] According to the second aspect, if an abnormality occurs in a specific actuator, the influence of the abnormality will be strongly reflected in the detection signal of the status sensor corresponding to that actuator. Therefore, by using the detection signal of the status sensor corresponding to that specific actuator, a more accurate determination can be made in the second determination process.

[0020] According to a third aspect of the present disclosure, the diagnostic device may execute the second determination process when it is determined that there is no abnormality in each of the plurality of status sensors.

[0021] As has been known in the past, in the method of determining by comparison with the initial state, if there is no significant difference in the signals output from each sensor when there is an abnormality in the sensor and when there is an abnormality in the actuator, it is not possible to determine whether there is an abnormality in the sensor or the actuator.

[0022] In contrast to this, according to the third aspect, it is possible to clearly distinguish between the determination of an abnormality in the state sensor of each active vibration isolation apparatus and the determination of an abnormality in the actuator of the same active vibration isolation apparatus, thereby realizing more accurate determination.

[0023] Furthermore, according to a fourth aspect of the present disclosure, the first determination process may be configured to sequentially execute a static diagnosis that diagnoses the entire sensing circuit and the dynamic diagnosis, and during the static diagnosis, the diagnostic device may determine whether or not there is an abnormality in the sensing circuit based on the detection signal of the status sensor when each of the multiple actuators is not operating.

[0024] Generally, operational abnormalities of the sensing circuit may include deviations in the detected values ​​of the status sensors due to abnormalities in the components such as amplifiers connected to each status sensor, or short circuits in the electrical wiring that constitutes each sensing circuit or the electrical wiring connected to each sensing circuit. The influence of such deviations can be called an operational abnormality of the entire sensing circuit, rather than an operational abnormality of the status sensor itself, and it would be convenient if they could be treated separately from the dynamic diagnosis.

[0025] According to the fourth aspect, the diagnostic device performs static diagnosis to determine whether the entire sensing circuit is malfunctioning, in addition to the dynamic diagnosis to determine whether the status sensor itself is malfunctioning, thereby enabling more accurate determination.

[0026] Furthermore, according to a fifth aspect of the present disclosure, the status sensor acquires a detection signal indicating at least one of the acceleration of the upper end of the active vibration isolation apparatus and the amount of displacement of the upper end relative to the base, and the diagnostic device, in the first determination process, during the static diagnosis, determines that there is an abnormality in at least a part of the sensing circuit if the magnitude of the detection value of the status sensor exceeds a predetermined static threshold, and during the dynamic diagnosis, determines that there is an abnormality in the status sensor if the magnitude of the detection value of the status sensor is below a predetermined dynamic threshold, and the diagnostic device, in the second determination process, determines that there is an abnormality in the actuator if the magnitude of the detection value of the status sensor is below a predetermined actuator threshold.

[0027] Furthermore, according to a sixth aspect of the present disclosure, the magnitude of the detection value in the static diagnosis may be the average value of the detection value within a predetermined period, and the magnitude of the detection value in the dynamic diagnosis and the second judgment process may be the difference between the maximum and minimum values ​​of the detection value within a predetermined period.

[0028] As has been known in the past, the method of determining the state by comparing it with the initial state is based on the assumption that the initial state is normal, and cannot be used when the initial state is abnormal, so there are limitations to the scope of application.

[0029] In contrast to this, according to the fifth and sixth aspects, it is possible to accurately determine whether or not there is an abnormality without using a comparison with the initial state.

[0030] Furthermore, according to a seventh aspect of the present disclosure, the dynamic threshold and the actuator threshold may each be composed of a plurality of thresholds of different magnitudes, and when the diagnostic device determines that there is an abnormality in the status sensor or the actuator, it may vary the output manner of the determination result depending on which of the plurality of thresholds has been exceeded.

[0031] According to the seventh aspect, by providing a plurality of threshold values, it is possible to provide a variety of output modes, such as simply issuing a warning to the user or issuing an error notification of a level that requires the active vibration isolation system to be stopped, etc. This makes it possible to improve the usability of the active vibration isolation system.

[0032] Furthermore, according to an eighth aspect of the present disclosure, the external device may include an external controller independent of the controllers that control each of the plurality of active vibration isolation devices, and a driving unit electrically connected to the external controller, wherein the external controller controls the operation of the driving unit by inputting a control signal to the driving unit, and the external controller controls the operation of the driving unit or the actuator based on an electrical signal that indicates the determination results of the first determination process and the second determination process.

[0033] According to the eighth aspect, the operation of the external device and the operation of each active vibration isolation apparatus can be controlled through the external controller, thereby enabling each active vibration isolation apparatus to be appropriately linked with the external device.

[0034] Furthermore, according to a ninth aspect of the present disclosure, the active vibration isolation system may include a second condition sensor that detects the vibration condition on the base plate, the second condition sensor being configured by a sensor different from the condition sensor or the condition sensor itself, and the external controller may control the operation of the drive unit or the actuator based on at least one detection signal of the condition sensor and the second condition sensor.

[0035] According to the ninth aspect, the operation of the external device and the operation of each active vibration isolation apparatus can be controlled through the external controller, thereby enabling each active vibration isolation apparatus to be appropriately linked with the external device.

[0036] Furthermore, according to a tenth aspect of the present disclosure, the active vibration isolation system may include an environmental sensor that senses the installation environment of the active vibration isolation system, the diagnostic device may determine the installation environment of the active vibration isolation system based on a detection signal from the environmental sensor, and the external controller may control the operation of the drive unit or the actuator according to the determination result based on the environmental sensor.

[0037] According to the tenth aspect, the active vibration isolation system executes a process that combines the diagnosis of the active vibration isolation device with the diagnosis of the installation environment of the system. This allows the cause of any inconvenience that occurs in the performance of external equipment to be investigated from multiple perspectives. Furthermore, even an unskilled operator can easily investigate the cause, which contributes to improving user convenience.

[0038] Furthermore, according to an eleventh aspect of the present disclosure, the active vibration isolation system may include an external sensor that senses the operating status of the external device, the diagnostic device may determine the operating status of the external device based on a detection signal from the external sensor, and the external controller may control the operation of the drive unit or the actuator according to the determination result based on the external sensor.

[0039] According to the eleventh aspect, the active vibration isolation system executes a process that combines the diagnosis of the active vibration isolation apparatus with the diagnosis of the operating status of the external device. As a result, when a problem occurs in the performance of the external device, the cause can be investigated from multiple perspectives, such as whether the cause is in the active vibration isolation apparatus or the external device itself. Furthermore, even an unskilled operator can easily investigate the cause, which contributes to improving user convenience.

[0040] Furthermore, according to a twelfth aspect of the present disclosure, the diagnostic device may acquire detection signals from the status sensor, the second status sensor, the environmental sensor, and the external sensor in real time, and record the acquired contents according to a judgment result based on the detection signals from the status sensor, the second status sensor, and the environmental sensor.

[0041] According to the twelfth aspect, the state of the entire active vibration isolation system can be monitored by comprehensively utilizing a plurality of types of sensors, so that the active vibration isolation apparatus, external equipment, and installation environment can be each kept in an ideal state before the external equipment is operated.

[0042] Furthermore, because the detection signals acquired in real time are used for various judgments, if an external device does not perform as expected, investigation into the cause can be started promptly. Because each detection signal is collected in the diagnostic device, the user can comprehensively monitor the active vibration isolation system, external devices, and the entire installation environment. This contributes to improving user convenience because even non-expert operators can easily investigate the cause. Furthermore, because the content acquired from each sensor is recorded, even if a malfunction is overlooked, the timing and cause of the malfunction can be analyzed later.

[0043] Furthermore, according to a thirteenth aspect of the present disclosure, the diagnostic device may have an input unit that accepts user input, and the diagnostic device may change the judgment criteria for judgment based on the detection signals of the status sensor, the second status sensor, the environmental sensor, and the external sensor based on the user input via the input unit.

[0044] According to the thirteenth aspect, a user can easily change various determination criteria, such as threshold values ​​corresponding to each sensor, via an input unit of the diagnostic device. This contributes to improving user convenience because even an unskilled worker can easily change the determination criteria.

[0045] Furthermore, the settings of the entire active vibration isolation system can be flexibly changed, such as by changing the judgment criteria for the active vibration isolation apparatus depending on the type of external device, or by changing the judgment criteria for the external device depending on the type of active vibration isolation apparatus or the installation environment, which also contributes to improving user convenience.

[0046] Furthermore, according to a fourteenth aspect of the present disclosure, the diagnostic device may be configured by at least one of a controller that controls each of the plurality of active vibration isolation devices, an external controller that controls the external device, and a repeater that is interposed between the controller and the external controller. [Effects of the Invention]

[0047] As described above, according to the present disclosure, in an active vibration isolation system made up of a plurality of active vibration isolation apparatuses, it is possible to more accurately determine whether or not there is an abnormality in the component parts of each active vibration isolation apparatus. [Brief explanation of the drawings]

[0048] [Figure 1] FIG. 1 is a diagram illustrating the configuration of an active vibration isolation system. [Figure 2] FIG. 2 is a diagram illustrating the configuration of the vibration isolation table. [Figure 3] FIG. 3 is a block diagram illustrating a control configuration related to the vibration isolation table. [Figure 4] FIG. 4 is a flowchart showing the overall configuration of the first and second determination processes. [Figure 5] FIG. 5 is a flowchart illustrating the static diagnosis of the first determination process. [Figure 6] FIG. 6 is a flowchart illustrating the dynamic diagnosis of the first determination process. [Figure 7] FIG. 7 is a graph for explaining static diagnosis. [Figure 8] FIG. 8 is a graph for explaining dynamic diagnosis. [Figure 9] FIG. 9 is a flowchart illustrating the second determination process. [Figure 10] FIG. 10 is a block diagram illustrating the schematic configuration of an active vibration isolation system. [Figure 11] FIG. 11 is a flowchart illustrating a notification process using the controller itself. [Figure 12] FIG. 12 is a flowchart illustrating a notification process using an external controller. [Figure 13] FIG. 13 is a table showing details of the first and second determination processes. [Figure 14] FIG. 14 is a diagram corresponding to FIG. 10 illustrating the second embodiment. [Figure 15] FIG. 15 is a flowchart illustrating another determination process according to the second embodiment. [Figure 16] FIG. 16 is a flowchart illustrating a notification process in the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0049] A first embodiment of the present disclosure (hereinafter also simply referred to as "embodiment") will be described below with reference to the drawings. Note that the following description is an example.

[0050] <1. Overall structure> Fig. 1 is a diagram illustrating an example of the configuration of an active vibration isolation system S. Fig. 10 is a block diagram illustrating an example of the schematic configuration of the active vibration isolation system S. As shown in Figs. 1 and 10, the active vibration isolation system S includes a vibration isolation table 1, and an external device 1000 that is configured to be able to receive an electrical signal and is supported by the vibration isolation table 1 from below.

[0051] The vibration isolation table 1 is placed on a base F. As will be described later, the vibration isolation table 1 includes a controller 100 and a plurality of actuators 8, and the controller 100 controls each of the actuators 8. Through this control, the vibration isolation table 1 blocks transmission of vibrations from the base F to the external device 1000. In other words, the vibration isolation table 1 is configured to isolate the external device 1000 from the base F.

[0052] <2. External equipment> 1, the external device 1000 is installed or mounted on the vibration isolation table 1. The external device 1000 includes an external controller 1100 that is independent of the controller 100 of the vibration isolation table 1, and a driving unit 1001 that is electrically connected to the external controller 1100. The external controller 1100 controls the operation of the driving unit 1001 by inputting a control signal to the driving unit 1001.

[0053] Specifically, the external device 1000 is a manufacturing device for semiconductors, liquid crystal panels, or LED panels. This external device 1000 supports various loads 1002, such as semiconductor silicon wafers, on a movable stage, and by appropriately moving the stage, the load 1002 on the stage is positioned accurately and quickly. In this case, the driving unit 1001 may be the movable stage itself, or may be an element related to the movable stage, such as a linear motor for moving the stage.

[0054] Alternatively, the external device 1000 may be an electron microscope or an optical measuring device. The external device 1000 is preferably a device that is required to suppress the transmission of vibrations from the floor surface (foundation F) as much as possible. When the external device 1000 is an electron microscope, the driving unit 1001 may be, for example, a focus adjustment mechanism that adjusts the focus position of an optical system.

[0055] For the relationship between the vibration isolation table 1 and the external device 1000, please also refer to Fig. 10. As shown in Fig. 10, an external notification unit 1101 consisting of a display, multiple lamps, a speaker, etc. is connected to an external controller 1100. Similarly, a notification unit 101 consisting of a display, multiple lamps, a speaker, etc. is also connected to the controller 100 of the vibration isolation table 1.

[0056] Additionally, a drive position sensor 1004 is provided associated with the external device 1000. The drive position sensor 1004 detects, for example, the position of a stage. A detection signal from the drive position sensor 1004 is used by an external controller 1100 to control movement of the stage. This movement control is feedback control based on the detection signal from the drive position sensor 1004. When an electron microscope or an optical measurement device is used as the external device 1000, it may be configured to perform similar feedback control regarding the focal position of the optical system.

[0057] <3. Vibration isolation table> Fig. 2 is a perspective view illustrating the configuration of the vibration isolation table 1. As shown in Fig. 2, the vibration isolation table 1 includes one surface plate 3, multiple active vibration isolation devices 5, multiple status sensors 9, and the above-mentioned controller 100. The surface plate 3 is supported from below by each of the multiple active vibration isolation devices 5. The vibration isolation table 1 supports an external device 1000 on a base F via the surface plate 3.

[0058] In the following description, a detailed description will be given of a case in which the number of vibration isolation devices 5 is four as in the illustrated example, but the number is not limited to four. For the sake of simplicity, each active vibration isolation device 5 will hereinafter be referred to simply as a vibration isolation device 5.

[0059] (3-1. Vibration isolation table equipment configuration) The surface plate 3 is formed as a rectangular thick plate. An external device 1000 is placed on the upper surface of the surface plate 3. Meanwhile, four vibration isolators 5 are arranged on the lower surface of the surface plate 3, each supporting the surface plate 3 from below. The four vibration isolators 5 are arranged at different positions from each other, as shown in FIG. 2.

[0060] The configuration of the surface plate 3 is not limited to a rectangular thick plate. Instead of the surface plate 3 as shown in the figure, a table having a plurality of legs on the upper surface of which the external device 1000 is placed may be used. When a table is used, each leg of the table may be supported from below by each vibration isolator 5. Furthermore, instead of using the surface plate 3, a table, etc., the external device 1000 may be directly supported by four vibration isolators 5.

[0061] Hereinafter, the longitudinal direction of the surface plate 3 will be referred to as the "x direction," the lateral direction of the surface plate 3 will be referred to as the "y direction," and the thickness direction of the surface plate 3 will be referred to as the "z direction." The x direction and y direction may be collectively referred to as the horizontal direction. The z direction may also be referred to as the up-down direction. The layout of the four vibration isolation devices 5 also uses the same three defined directions.

[0062] The four vibration isolation devices 5 are each installed on a base F. The base F according to this embodiment has an upper surface that extends horizontally. The four vibration isolation devices 5 are installed on the upper surface. The active vibration isolation system S according to this embodiment supports the external device 1000 from below by the four vibration isolation devices 5. This support is performed via the surface plate 3.

[0063] All four vibration isolation devices 5 are active type vibration isolation devices. Each vibration isolation device 5 can perform so-called "active vibration isolation control" which is configured by at least one of vibration isolation feedback control and vibration isolation feedforward control. When each vibration isolation device 5 performs active vibration isolation control, the transmission of vibration from the foundation F to the external device 1000 is blocked. Hereinafter, the term "feedback" may be simply referred to as "FB", and the term "feedforward" may be simply referred to as "FF".

[0064] The four vibration isolators 5 elastically support the external device 1000 on the base F, and thus also function as passive type vibration isolators.

[0065] The four vibration isolation devices 5 also function as "mounts" for supporting the external device 1000. Therefore, when distinguishing between the four vibration isolation devices 5, the respective vibration isolation devices 5 can also be called a "first mount 5A," a "second mount 5B," a "third mount 5C," and a "fourth mount 5D."

[0066] Specifically, each of the four vibration isolation devices 5 includes one or more supports 7 and one or more actuators 8 .

[0067] The support body 7 of each vibration isolation device 5 is configured from a combination of elastic bodies and / or dampers. For example, the support body 7 according to this embodiment is configured from an air spring that expands and contracts in the vertical direction and supports vertical loads. Each support body 7 includes a case 70 that is placed on a foundation F or the like and has an open upper end, and a piston 72 that is airtightly inserted into the upper end opening via a diaphragm 71 and defines an air chamber within the case 70.

[0068] A top plate 73 that supports the underside of the surface plate 3 is connected to the upper end of each support 7. The top plate 73 corresponds to the upper end of each vibration isolation device 5. When each support 7 expands and contracts, the top plate 73 is displaced in the vertical direction.

[0069] A base plate 74 supported by the upper surface of the foundation F is connected to the lower end of each support 7. The base plate 74 corresponds to the lower end of each vibration isolation device 5.

[0070] Although not shown in the drawings, each support 7 may be configured by combining air springs that expand and contract in the horizontal direction. In such a configuration, the top plate 73 is displaced in the horizontal direction by the air springs that expand and contract in the horizontal direction.

[0071] The actuators 8 of each vibration isolation device 5 are electrically connected to the controller 100 and operate based on electrical signals from the controller 100. Each actuator 8 operates with respect to the external device 1000 to vibrate the external device 1000. This vibration suppression is achieved by each actuator 8 applying a control force or displacement to the base 3, thereby vibrating the external device 1000 via the base 3.

[0072] Specifically, each actuator 8 is configured with a servo valve. Each support 7 is connected to a pipe for supplying compressed air from an air pressure source (not shown), and each actuator 8 is configured with a servo valve interposed in the pipe, and by changing the opening of the servo valve, the supply flow rate and exhaust flow rate of compressed air to the corresponding air spring (support 7) can be adjusted.

[0073] The internal pressure of the air spring is adjusted by adjusting the supply flow rate and the exhaust flow rate. By controlling the internal pressure of the air spring, a control force is applied to the vibration isolation table 1 to suppress vibration.

[0074] Each support 7 may be made up of a coil spring. Also, it is not essential that the actuator 8 be made up of a servo valve. Instead of a servo valve, the actuator may be made up of a linear motor.

[0075] Furthermore, although not shown, when each support 7 is configured by combining air springs that expand and contract in the horizontal direction, each vibration isolation device 5 may be provided with a second actuator for displacing the air springs in the horizontal direction. When this second actuator operates, a control force or displacement is applied to the external device 1000 so as to suppress vibration of the external device 1000.

[0076] The multiple status sensors 9 are electrically connected to the controller 100. The multiple status sensors 9 each input a detection signal to the controller 100 to detect vibration of each of the multiple vibration isolation devices 5 or the foundation F. The term "vibration status" includes state quantities that characterize the vibration of each vibration isolation device 5, such as acceleration and displacement.

[0077] At least some of the multiple status sensors 9 are provided in each of the multiple vibration isolation devices 5. In this embodiment, as such status sensors 9, an FB acceleration sensor 91 and an FB displacement sensor 92 are provided in each vibration isolation device 5. Furthermore, in addition to the FB acceleration sensor 91 and the FB displacement sensor 92, the status sensor 9 is also configured with an FF acceleration sensor 61 that detects the vibration status of the base F.

[0078] Additionally, the vibration isolation table 1 is provided with an on-plate vibration sensor 62 as a second state sensor 6 that detects the vibration state on the surface plate 3. Note that, instead of the on-plate vibration sensor 62, at least one of the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61 may be regarded as the second state sensor 6.

[0079] That is, the second status sensor 6 may be configured by a sensor different from the status sensor 9, or may be configured by the status sensor 9 itself. In a specific example described below, the second status sensor 6 uses an on-board vibration sensor 62 and an FF acceleration sensor 61. The FF acceleration sensor 61 serves both as the status sensor 9 and the second status sensor 6. Additionally, the second status sensor 6 may be regarded as one element of the environment sensor 12 described below, or as one element of the external sensor 13 also described below.

[0080] The FB acceleration sensor 91 detects the acceleration of the top plate 73 of each vibration isolation apparatus 5 or the acceleration of the surface plate 3 at the support positions (see P1 to P4 in FIG. 2) of each vibration isolation apparatus 5. For example, the FB acceleration sensor 91 according to this embodiment detects the acceleration of the top plate 73 (particularly the acceleration in the vertical direction) as the vibration state of each vibration isolation apparatus 5.

[0081] In this embodiment, the FB acceleration sensor 91 is configured as a piezoelectric element sensor, but the present disclosure is not limited to such a configuration. The FB acceleration sensor 91 may also be an acceleration sensor that employs a method other than a piezoelectric element. Instead of the FB acceleration sensor 91, acceleration may be calculated based on the detection signal of a speed sensor or a displacement sensor.

[0082] The FB displacement sensor 92 detects the amount of displacement of the support position of the top plate 73 or the surface plate 3 relative to the foundation F or the base plate 74 in each vibration isolation apparatus 5. For example, the FB displacement sensor 92 according to this embodiment detects the amount of displacement (particularly the amount of displacement in the up-down direction) of the top plate 73 relative to the foundation F for each vibration isolation apparatus 5.

[0083] In this embodiment, the FB displacement sensor 92 is configured as an eddy current displacement sensor, but the present disclosure is not limited to such a configuration. The FB displacement sensor 92 may be a displacement sensor employing other methods, such as a Hall element sensor.

[0084] The FF acceleration sensor 61 can detect the acceleration (floor vibration) of the base plate 74 of each vibration isolation device 5. The FF acceleration sensor 61 detects the acceleration of the base plate 74 (particularly, the acceleration in the vertical direction) as the vibration state of each vibration isolation device 5.

[0085] The on-board vibration sensor 62 can detect the vibration state of the surface plate 3 or the external device 1000. The detection signal of the on-board vibration sensor 62 is used for cooperation with an external controller 1100, which will be described later.

[0086] In addition, when combining air springs that expand and contract in the horizontal direction as described above, in addition to the FB acceleration sensor 91 and FB displacement sensor 92 described above, an FB acceleration sensor 91 that can detect horizontal acceleration and an FB displacement sensor 92 that can detect horizontal displacement may be placed on each vibration isolation device 5.

[0087] Furthermore, when only air springs that expand and contract in the vertical direction are used, the FF acceleration sensor 61 that can detect acceleration in the horizontal direction may be disposed in any one of the four vibration isolation devices 5. On the other hand, when air springs that expand and contract in the horizontal direction are combined, the FF acceleration sensor 61 that can detect acceleration in the horizontal direction may be disposed in three or more of the four vibration isolation devices 5.

[0088] Furthermore, detection signals from each status sensor 9, such as the FB displacement sensor 92, are input to the controller 100 via a signal processing circuit 10. The signal processing circuit 10 has an amplifier (AMP) 10a that amplifies the detection signal, and an analog-to-digital converter (A / D) 10b that converts the amplified detection signal into a digital signal. Each status sensor 9 and each corresponding signal processing circuit 10 constitute a "sensing circuit 11" in this embodiment.

[0089] (3-2. Control configuration of the vibration isolation table) 3 is a block diagram illustrating an example of a control configuration for the vibration isolation table 1. The controller 100 has a CPU, a memory, and an input / output bus. This controller 100 is configured to control each of the multiple vibration isolation apparatuses 5. As shown in FIG. 10, the controller 100 is connected to each of the multiple vibration isolation apparatuses 5, and constitutes a "diagnosis device" in this embodiment.

[0090] Below, we will explain in detail how to control the vibration isolation table 1 via the actuator 8. For convenience, we will only explain the control of the air spring in the vertical direction, but if an air spring is also provided in the horizontal direction, the same control will be performed for this as well.

[0091] Specifically, the controller 100 has an anti-vibration FB control section 100a, a vibration suppression FB control section 100b, an anti-vibration FF control section 100c, etc., and is configured to apply a control force to the anti-vibration table 1 to suppress its vibration by inputting a control signal to the actuator 8.

[0092] As shown in FIG. 3, the input to the actuator 8 mainly includes a vibration isolation feedback operation amount calculated by the vibration isolation FB control unit 100a based on the signal from the FB acceleration sensor 91, a vibration suppression feedback operation amount calculated by the vibration suppression FB control unit 100b based on the output from the FB displacement sensor 92, and a vibration isolation feedforward operation amount calculated by the vibration isolation FF control unit 100c based on the signal from the FF acceleration sensor 61.

[0093] The vibration isolation FB control section 100a executes vibration isolation FB control. Vibration isolation FB control is a process in which an air spring generates a control force that attenuates vibrations based on the detection value of the FB acceleration sensor 91, i.e., the vertical acceleration of the top plate 73 or the base plate 3. For example, the vibration isolation FB control section 100a multiplies the detected acceleration value, its differential value, and its integral value by feedback gains, adds them together, and then inverts the result to be used as a control input to the actuator 8.

[0094] The vibration suppression FB control section 100b executes vibration suppression FB control. Vibration suppression FB control is a control that controls the internal pressure of the air spring to reduce the detected value of the FB displacement sensor 92, i.e., the amount of change in the vertical position of the top plate 73 or the surface plate 3, thereby suppressing the tilt of the surface plate 3 and / or the vibrations caused by that tilt. For example, the vibration suppression FB control section 100b subtracts the detected value of the displacement from a target value (zero), and then determines the control input to the actuator 8 according to the PID control law.

[0095] The vibration isolation FF control section 100c executes vibration isolation FF control. Vibration isolation FF control is a process for generating vibrations of an opposite phase to cancel out vibrations transmitted from the base F to the object to be isolated (surface plate 3) based on the detection value of the FF acceleration sensor 61, i.e., the vibration state of the base F (floor vibration). The vibration isolation FF control section 100c can determine the control input to the actuator 8 using, for example, a digital filter. The characteristics of this digital filter are expressed as -H(s)·K(s) using the transfer function H(s) when floor vibrations are transmitted to the vibration isolation table 1 via the air spring unit 2 and the transfer function K(s) of the compensation system formed by the air spring unit 2. -1 It is expressed as:

[0096] Then, the actuators 8 operate in response to the control inputs described above, and the internal pressure of each support 7 is controlled, thereby applying an appropriate control force to the surface plate 3 and the external device 1000. In other words, with regard to vibrations transmitted from the foundation F, the transmission of vibrations is suppressed by the vibration isolation FF control, while the minute vibrations that are still transmitted are attenuated by the vibration isolation FB control, thereby achieving extremely high vibration isolation performance.

[0097] Furthermore, relatively large vibrations, that is, vibrations (shaking) that occur on the top plate 73 due to the operation of the external device 1000, etc., are attenuated by performing vibration suppression FB control in addition to the vibration isolation FB control described above.

[0098] 3, the detection signal of the drive position sensor 1004 is not involved in the control loop performed by the controller 100. In other words, the control loop of the FB control realized by the external controller 1100 and the control loop of the FB control on the vibration isolation table 1 side configured by the controller 100 are independent of each other.

[0099] The controller 100 according to this embodiment is configured to sequentially execute a first determination process and a second determination process based on the detection signal of the status sensor 9. Both the first and second determination processes are processes for self-diagnosing the vibration isolation table 1, which are configured to be executed by the controller 100. In other words, the vibration isolation table 1 according to this embodiment can diagnose its own status without using an external diagnostic device.

[0100] Both the first and second determination processes are processes for self-diagnosing the components of the vibration isolation table 1. Here, the first determination process is a process for determining whether or not there is an abnormality in the sensing circuit 11. The second determination process is executed after the first determination process is completed, and is a process for determining whether or not there is an abnormality in the actuator 8.

[0101] Furthermore, the first determination process is made up of a dynamic diagnosis for diagnosing the state sensor 9 of each sensing circuit 11 and a static diagnosis for diagnosing the entire sensing circuit 11 including the signal processing circuit 10.

[0102] <4. Details of the first and second determination processes> Fig. 4 is a flowchart showing the overall configuration of the first and second determination processes. Fig. 5 is a flowchart illustrating static diagnosis of the first determination process. Fig. 6 is a flowchart illustrating dynamic diagnosis of the first determination process. For details of the first and second determination processes, please also refer to the table shown in Fig. 13.

[0103] (4-1. First Determination Process) 4, the controller 100 executes static diagnosis of the first determination process based on the detection signal of the status sensor 9. Details of this static diagnosis are as shown in FIG.

[0104] During static diagnosis, the controller 100 determines whether or not there is an abnormality in the sensing circuit 11 based on the detection signals of the status sensors 9 when each of the four actuators 8 is not operating. This determination is performed individually for each of the four vibration isolation devices 5.

[0105] First, in step S101, the controller 100 reads the detection signals of the status sensors 9. The status sensors 9 from which the detection signals are read include the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61. This detection is performed when the actuators 8 are not operating, that is, when no vibration is being applied to the surface plate 3 and the external device 1000.

[0106] In step S101, the controller 100 reads the detection signals multiple times within a predetermined period. The controller 100 reads the detection signals of the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61 multiple times.

[0107] In the next step S102, the controller 100 calculates the magnitude of the detected values ​​of the FB acceleration sensor 91 and the FB displacement sensor 92 of each vibration isolation device 5, and the FF acceleration sensor 61.

[0108] In this embodiment, the controller 100 calculates the average value of a plurality of detection signals or the average value of the acceleration or displacement corresponding to each detection signal for each of the FB acceleration sensor 91 and FB displacement sensor 92 of each vibration isolation device 5 and the FF acceleration sensor 61. The average value here refers to the time average value calculated for each sensor.

[0109] In the following step S103, the controller 100 determines whether the magnitude of the detected value calculated in step S102 (e.g., the absolute value of the average value) of either the FB acceleration sensor 91 and FB displacement sensor 92 of each vibration isolation device 5 or the FF acceleration sensor 61 exceeds a predetermined static threshold value.

[0110] FIG. 7 is a graph for explaining static diagnosis. The vertical axis of FIG. 7 represents the voltage value of the detection signal corresponding to the acceleration or displacement amount. The horizontal axis of FIG. 7 represents time. The dashed line Lt in FIG. 7 represents the static threshold value described above. The static threshold value is a constant value in the time direction. The static threshold value may be different for each sensor constituting the status sensor 9.

[0111] Here, let us consider the case where there is no abnormality in the status sensor 9 (when the status sensor 9 is normal). Considering that there is no vibration applied, the detected value in this case will fluctuate around zero. Therefore, the average value of the detected value is considered to be approximately zero, as shown by the solid line L1 in FIG.

[0112] On the other hand, consider the case where there is an abnormality in the status sensor 9. Possible abnormalities in this case include malfunction of components connected to the FB acceleration sensor 91, FB displacement sensor 92, or FF acceleration sensor 61 in the sensing circuit 11, such as the amplifier 10a, and a short circuit in the electrical circuit connected to the status sensor 9. Hereinafter, these abnormalities will be collectively referred to as the "first abnormality."

[0113] 13, malfunctions of the FB acceleration sensor 91 and malfunctions of components connected to the FB acceleration sensor 91 are collectively referred to as the "FB acceleration sensor." The same applies to other sensors related to the first abnormality.

[0114] In the first abnormality, abnormal operation of a component may cause an offset in the detected value. A short circuit in the electronic circuit may cause the detected value to stick to the power supply voltage. In either case, the average detected value when the first abnormality occurs is expected to deviate from zero, as shown by the solid line L2 in Figure 7. The offset in the detected value is of particular concern for the FB acceleration sensor 91 and the FF acceleration sensor 61. The sticking of the detected value to the power supply voltage is of concern for all of the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61.

[0115] Therefore, by performing the determination as in step S103, it is possible to determine the presence or absence of the first abnormality for each sensing circuit 11. As a result, the sensing circuit 11 in which the first abnormality is occurring is identified for each sensing circuit 11. As is clear from the origin of the first abnormality, the static threshold is set to a value that is at least less than the power supply voltage.

[0116] Specifically, if the determination in step S103 is YES, the controller 100 advances the control process to step S104. In step S104, the controller 100 determines that an abnormality has occurred in the sensing circuit 11 including the sensor for which the determination in step S103 was YES. The controller 100 determines that a "first abnormality" has occurred in the specific sensing circuit 11, and identifies the sensing circuit 11 in which the abnormality has occurred from among the multiple sensing circuits 11.

[0117] If the determination in step S103 is NO, the controller 100 advances the control process to step S105. In this case, the controller 100 determines that all of the sensing circuits 11 have a "first abnormality."

[0118] When the flow of Fig. 5 ends, the controller 100 advances the control process from step S1 to step S2 of Fig. 4. In step S2, the controller 100 executes dynamic diagnosis of the first determination process based on the detection signal of the status sensor 9. Details of this dynamic diagnosis are as shown in Fig. 6.

[0119] In the dynamic diagnosis, the controller 100 inputs control signals to the four vibration isolation devices 5 so that two or more (all four in this embodiment) of the four actuators 8 operate simultaneously. Furthermore, in the dynamic diagnosis, the controller 100 individually determines whether or not there is an abnormality in each of the multiple status sensors 9, based on the detection signals detected in response to the control signals.

[0120] First, in step S201, the controller 100 activates each actuator 8 of all the vibration isolation devices 5. As a result, vibrations are applied to the surface plate 3 and the external device 1000.

[0121] In the following step S202, the controller 100 reads the detection signals of the status sensors 9. The status sensors 9 from which the detection signals are read include both the FB acceleration sensor 91 and the FB displacement sensor 92. This detection is performed when all the actuators 8 are operating, that is, when vibrations are applied to the surface plate 3 and the external device 1000.

[0122] In step S202, the controller 100 reads the detection signals multiple times within a predetermined period. The controller 100 reads the detection signals of the FB acceleration sensor 91 and the FB displacement sensor 92 multiple times.

[0123] In the following step S203, the controller 100 calculates the magnitude of the detection values ​​of the FB acceleration sensor 91 and the FB displacement sensor 92, respectively.

[0124] In this embodiment, the controller 100 calculates the magnitude of the difference between the maximum and minimum values ​​of the multiple detection signals (=|maximum value−minimum value|) for each of the FB acceleration sensor 91 and FB displacement sensor 92 of each vibration isolation device 5.

[0125] In the following step S204, the controller 100 determines whether the magnitude of the difference calculated in step S203 is below a predetermined dynamic threshold (particularly, a first dynamic threshold) for either the FB acceleration sensor 91 or the FB displacement sensor 92 of each vibration isolation device 5. The dynamic threshold may be different for each sensor constituting the status sensor 9.

[0126] Fig. 8 is a graph for explaining dynamic diagnosis. The vertical axis of Fig. 8 indicates the voltage value of the detection signal corresponding to the acceleration or displacement amount. The horizontal axis of Fig. 8 indicates time. Furthermore, plots Smax and Smin in Fig. 8 indicate the maximum and minimum values ​​of the voltage value, respectively.

[0127] Now, consider the case where there is no abnormality in the status sensor 9 (when the status sensor 9 is normal). Considering that vibration is being applied, the detected value in this case will fluctuate significantly around 0, as shown by the solid line L21 in Fig. 8. The magnitude of the difference in this case (=|maximum value - minimum value|) is considered to be significantly larger than zero, as indicated by ΔS in the same figure.

[0128] On the other hand, consider a case where there is an abnormality in the status sensor 9. Possible abnormalities in this case include a malfunction of the FB acceleration sensor 91 or the FB displacement sensor 92 itself, and a short circuit, disconnection, or disconnection of the electrical wiring connected to the FB acceleration sensor 91 or the FB displacement sensor 92. Hereinafter, these abnormalities will be collectively referred to as a "second abnormality." The second abnormality may interfere with the oscillation of the detection value, as exemplified by the solid line L22 in FIG. 8. This second abnormality can be classified into at least two types depending on the severity of the abnormality.

[0129] Therefore, by performing the determination in step S204, it is possible to determine the presence or absence of the second abnormality for each vibration isolation device 5. This allows the status sensor 9 in which the second abnormality is occurring to be identified. Furthermore, the dynamic threshold is made up of a plurality of thresholds with different magnitudes. In this embodiment, the dynamic threshold is made up of a first dynamic threshold and a second dynamic threshold that is closer to zero than the first dynamic threshold. In step S204, the determination is made using the first dynamic threshold.

[0130] Specifically, if the determination in step S204 is YES, the controller 100 advances the control process to step S205. In step S205, the controller 100 determines that an abnormality has occurred in the status sensor 9 for which the determination in step S204 is YES. The controller 100 determines that a "second abnormality (seriousness: low) exists" in the specific status sensor 9, and identifies the status sensor 9 in which the abnormality has occurred from among the status sensors 9 of each of the multiple vibration isolation apparatuses 5.

[0131] If the determination in step S204 is NO, the controller 100 advances the control process to step S206. In this case, the controller 100 determines that all the status sensors 9 have "no second abnormality (seriousness: minor)."

[0132] The contents of the subsequent steps S207, S208, and S209 are substantially the same as the contents of the above-described steps S204, S205, and S206, respectively, except for the following points.

[0133] That is, in step S207, the controller 100 makes a determination using the second dynamic threshold (<first dynamic threshold and >0) instead of the first dynamic threshold. If the determination is YES, in step S208, it is determined that "a second abnormality (seriousness: high) exists" in a specific status sensor 9. On the other hand, if the determination is NO in step S207, it is determined in step S209 that "a second abnormality (seriousness: high) does not exist" in all status sensors 9.

[0134] The processes of steps S207 to S209 may be performed prior to or in parallel with the processes of steps S204 to S206.

[0135] When the flow of Fig. 6 ends, the controller 100 advances the control process from step S2 to step S3 of Fig. 4. In step S3, the controller 100 determines whether all of the sensing circuits 11 are normal based on the diagnosis result of the first determination process.

[0136] If the determination in step S3 is NO, the controller 100 advances the control process from step S3 to step S6 in Fig. 4. The processing when the control process advances to step S6 will be described later.

[0137] On the other hand, if the determination in step S3 is YES, the controller 100 advances the control process to step S4 and executes the second determination process. That is, the controller 100 according to this embodiment is configured to execute the second determination process when it is determined that there is no abnormality in any of the multiple status sensors 9. Details of the second determination process are as shown in FIG.

[0138] Before proceeding to the explanation of the second determination process based on Fig. 9, the second abnormality in the FF acceleration sensor 61 will be further explained. The second abnormality described above can also occur in the FF acceleration sensor 61. However, since the actuator 8 is configured to vibrate a sprung mass such as the surface plate 3, it is inconvenient to perform dynamic diagnosis similar to that of the FB acceleration sensor 91 and the FB displacement sensor 92. On the other hand, the FF acceleration sensor 61 is more suitable for detecting floor vibrations than the FB acceleration sensor 91 and the FB displacement sensor 92.

[0139] Therefore, as shown in Fig. 13, the controller 100 according to this embodiment is configured to detect both the first and second abnormalities during static diagnosis of the FF acceleration sensor 61. The static diagnosis for detecting the second abnormality in the FF acceleration sensor 61 is the same as the flow illustrated in Fig. 6, except that there is no processing corresponding to step S201. The controller 100 determines whether or not the FF acceleration sensor 61 has the second abnormality and how serious it is by using floor vibrations instead of vibrations caused by the operation of the actuator 8.

[0140] (4-2. Second Determination Process) In the second determination process, the controller 100 inputs control signals to the four vibration isolation apparatuses 5 so that the actuators 8 of each vibration isolation apparatus 5 operate one by one in sequence. Furthermore, in the second determination process, the controller 100 determines individually for each of the four vibration isolation apparatuses 5 whether or not there is an abnormality in the actuator 8, based on the detection signals detected in response to the control signals.

[0141] First, in step S301, the controller 100 selects one actuator 8 from among the actuators 8 of each of the four vibration isolation devices 5. Then, the controller 100 activates the selected actuator 8. As a result, vibrations are applied to the surface plate 3 and the external device 1000.

[0142] In the next step S302, the controller 100 reads the detection signals of the status sensors 9. The status sensors 9 from which the detection signals are read include the FB acceleration sensor 91. This detection is performed when one actuator 8 is operating, that is, when vibration is applied to the surface plate 3 and the external device 1000. Because the excitation force in the second determination process is small, using the FB acceleration sensor 91 is advantageous in reliably detecting vibrations associated with the excitation. Depending on the magnitude of the excitation force, the FB displacement sensor 92 may also be used for detection.

[0143] In step S302, the controller 100 reads the detection signals multiple times within a predetermined period of time. The controller 100 reads the detection signals of each FB acceleration sensor 91 multiple times.

[0144] In the next step S303, the controller 100 calculates the magnitude of the detection value for each FB acceleration sensor 91.

[0145] In this embodiment, the controller 100 calculates the magnitude of the difference between the maximum and minimum values ​​of a plurality of detection signals (=|maximum value−minimum value|) for the FB acceleration sensor 91 of each vibration isolation device 5.

[0146] In the following step S304, the controller 100 determines whether the magnitude of the difference calculated in step S203 is below a predetermined actuator threshold value for the FB acceleration sensor 91 of each vibration isolation device 5. The actuator threshold value may be the same as or different from the above-mentioned dynamic threshold value for the status sensor 9.

[0147] The basic concept of the second judgment process is the same as the dynamic diagnosis of the first judgment process, except that it judges whether an abnormality related to the status sensor 9 is judged, or whether an abnormality related to the actuator 8 corresponding to each status sensor 9 is judged.

[0148] That is, consider the case where there is no abnormality in the actuators 8 operated in step S301 (where each actuator 8 is normal). Considering that vibration is being applied, the detected value in this case will oscillate significantly around 0, as shown by the solid line L21 in Fig. 8. The magnitude of the difference in this case (=|maximum value - minimum value|) is considered to be significantly larger than zero, as indicated by ΔS in the figure.

[0149] On the other hand, consider a case where there is an abnormality in the actuator 8 activated in step S301. Possible abnormalities in this case include a malfunction of the actuator 8 itself and a short circuit, disconnection, or disconnection of the electrical wiring connected to the actuator 8. This abnormality is substantially the same as the "second abnormality" described above. The second abnormality may interfere with the oscillation of the detection value, as exemplified by the solid line L22 in FIG. 8. As described above, this second abnormality can be classified into at least two types depending on the severity of the abnormality.

[0150] Therefore, by performing the determination in step S304, it is possible to determine whether or not the second abnormality exists in the operated actuator 8. This allows the actuator 8 in which the second abnormality has occurred to be identified. Furthermore, the actuator thresholds are made up of a plurality of thresholds with different magnitudes. In this embodiment, the actuator thresholds are made up of a first actuator threshold and a second actuator threshold that is closer to zero than the first actuator threshold. In step S304, the determination is made using the first actuator threshold.

[0151] Specifically, if the determination in step S304 is YES, the controller 100 advances the control process to step S305. In step S305, the controller 100 determines that an abnormality has occurred in the actuator 8 selected in step S301. The controller 100 determines that the operated actuator 8 has a "second abnormality (seriousness: low)" and identifies the actuator 8 in which the abnormality has occurred from among the actuators 8 of each of the multiple vibration isolation devices 5.

[0152] If the determination in step S304 is NO, the controller 100 advances the control process to step S306. In this case, the controller 100 determines that the actuator 8 selected and operated in step S301 does not have a "second abnormality (seriousness: minor)."

[0153] The contents of the subsequent steps S307, S308, and S309 are substantially the same as the contents of the above-described steps S304, S305, and S306, respectively, except for the following points.

[0154] That is, in step S307, the controller 100 makes a determination using the second actuator threshold (<first actuator threshold and >0) instead of the first actuator threshold. If the determination is YES, in step S308, it is determined that "a second abnormality (seriousness: high) exists" in the actuated actuator 8. On the other hand, if the determination is NO in step S307, it is determined in step S309 that "a second abnormality (seriousness: high) does not exist" in the actuated actuator 8.

[0155] The processes of steps S307 to S309 may be performed prior to or in parallel with the processes of steps S304 to S306.

[0156] In step S310, which follows step S308 and step S309, the controller 100 determines whether or not the actuation of all actuators 8 is complete. If the determination is NO, the controller 100 returns the control process to step S301. The controller 100 selects an actuator 8 different from the previously selected one and activates it.

[0157] When the flow of Fig. 9 ends, the controller 100 advances the control process from step S4 to step S5 in Fig. 4. In step S5, the controller 100 determines whether or not all of the actuators 8 are normal based on the diagnosis result of the second determination process.

[0158] If the determination in step S5 is YES, the controller 100 ends the flowchart shown in Fig. 4. In this case, it is determined that the sensing circuits 11 and actuators 8 that constitute the vibration isolation table 1 are all normal.

[0159] On the other hand, if the determination in step S5 is NO, the controller 100 advances the control process to step S6. The case where the process advances to step S6 corresponds to a case where at least one of the sensing circuit 11 and the actuator 8 constituting the vibration isolation table 1 is abnormal. In this case, the controller 100 executes a notification process.

[0160] (4-3. Notification processing) 11 is a flowchart illustrating a notification process using the controller 100 itself. FIG. 12 is a flowchart illustrating a notification process using the external controller 1100.

[0161] In the notification process, the controller 100 outputs the determination results of the first and second determination processes to at least one of the external device 1000 and the notification unit 101 of the controller 100 (to both in this embodiment).

[0162] [4-3-1. Example of using the controller itself] Such outputs are shown as examples in Figures 11 and 12. First, in step S601 in Figure 11, the controller 100 inputs the self-diagnosis results of the vibration isolation table 1 (the determination results from the first and second determination processes) to the notification unit 101. The notification unit 101 is, for example, a plurality of indicators (LEDs).

[0163] In the following step S602, the controller 100 refers to the self-diagnosis result referred to in step S601, and determines whether or not a first or second abnormality has occurred in at least one of the plurality of sensing circuits 11 and the plurality of actuators 8 that constitute the vibration isolation table 1. If this determination is NO, the controller 100 ends the control process exemplified in FIG.

[0164] On the other hand, if the determination in step S602 is YES, the controller 100 advances the control process to step S603. In step S603, the controller 100 notifies the user of the location and type of abnormality in the vibration isolation table 1, for example, by turning on a plurality of indicators arranged on the surface of the controller 100. In addition to this notification, the controller 100 also issues a notification indicating that each component part of the vibration isolation table 1 is normal.

[0165] Furthermore, as described above, when a plurality of dynamic thresholds and a plurality of actuator thresholds are prepared, the controller 100 may change the output mode of the determination result depending on which of the plurality of thresholds has been exceeded. Specifically, the controller 100 reflects the level of seriousness (two levels in this embodiment) of each abnormality in the input signal to the notification unit 101. As described above, the controller 100 is configured to issue a notification indicating a caution or warning when the level is "low seriousness," and to issue a notification indicating an error when the level is "high seriousness."

[0166] On the other hand, although only one value is prepared for the static threshold value related to the flow of Figure 5, the first abnormality judgment may be performed multiple times (twice in this embodiment), and the notification content via the notification unit 101 may be changed based on each judgment result.

[0167] For example, if the first abnormality is detected in the first determination (if step S104 is reached), the controller 100 determines that there is a possibility that the first abnormality has occurred, and issues a warning in the same manner as in the case of "low severity." Thereafter, the controller 100 executes a second determination based on the flow of FIG. 5. If the first abnormality is not detected in the second determination (if step S105 is reached), the controller 100 determines that the element part related to the first abnormality is normal, and issues a notification indicating that the element part is normal. On the other hand, if the first abnormality is detected again in the second determination (if step S104 is reached again), the controller 100 determines that the first abnormality has occurred in the element part, and issues a notification indicating that an error has occurred, in the same manner as in the case of "high severity."

[0168] Furthermore, if the first abnormality is not detected in the first determination (if step S105 is reached), the controller 100 determines that the element part related to the first abnormality is normal, and issues a notification indicating that the element part is normal.

[0169] For example, consider the contents of FIG. 13, the fact that the number of FB acceleration sensors 91, FB displacement sensors 92 and actuators 8 is four, and the number of FF acceleration sensors 61 is one.

[0170] In this case, five possible determinations are possible for the four FB acceleration sensors 91: "normal," "first abnormality (at first detection)," "first abnormality (at second detection)," "second abnormality (low severity)," and "second abnormality (high severity)." The same is true for the four FB displacement sensors 92 and the one FF acceleration sensor 61. Furthermore, three possible determinations are possible for the four actuators 8: "normal," "second abnormality (low severity)," and "second abnormality (high severity)."

[0171] Based on the above, the lighting pattern of the indicator can be set to notify of "4·5+4·5+5+4·3=57" different events. In this case, a separate indicator corresponding to some sensors, such as the FF acceleration sensor 61, may be prepared. This allows the operator handling the external device 1000 to know at a glance (instantly) whether the external device 1000 is normal or abnormal.

[0172] If an air spring that expands and contracts in the horizontal direction is used, the number of various sensors and actuators 8 will double. In that case, it is sufficient to increase the number of indicators and add lighting patterns for them.

[0173] For example, if an air spring that expands and contracts in the horizontal direction is used, the degrees of freedom are doubled, so two FB acceleration sensors 91 and FB displacement sensors 92, and two actuators 8 are provided for each vibration isolation unit 5. Also, taking into account the three-dimensional degrees of freedom of floor vibration, an FF acceleration sensor 61 is provided for three of the four vibration isolation units 5. In the example of FIG. 10, each of the three vibration isolation units 5 other than the fourth mount 5D has an FF acceleration sensor 61.

[0174] In this case, based on the same considerations as for the lighting patterns described above, the lighting pattern of the indicator can be set to notify of "8·5 + 8·5 + 3·5 + 8·3 = 119" different events.

[0175] Thereafter, in step S604, the controller 100 stops the vibration isolation table 1. When stopping the vibration isolation table 1, the controller 100 may control each actuator 8 to stop the supply of air to each air spring, thereby seating the surface plate 3 on each support 7, or may stop the FF vibration isolation control and FB vibration isolation control, thereby performing passive type vibration isolation and vibration suppression by the four vibration isolation devices 5.

[0176] [4-3-2. Example of using an external controller] Next, a case where the processing in FIG. 12 is performed instead of or in addition to the processing in FIG. 11 will be described.

[0177] As will be described below, the controller 100 inputs electrical signals indicating the determination results of the first determination process and the second determination process to the external controller 1100. Then, the external controller 1100 controls the operation of the drive unit 1001 or the actuator 8 based on the electrical signals indicating the determination results of the first determination process and the second determination process.

[0178] Specifically, first, in step S611 of FIG. 12, the controller 100 inputs the self-diagnosis results of the vibration isolation table 1 (the determination results of the first and second determination processes) to the external controller 1100.

[0179] Here, as shown in FIG. 12, the controller 100 inputs to the external controller 1100 the detection signal of the FF acceleration sensor 61 indicating floor vibration and the detection signal of the board vibration sensor 62 indicating vibration on the surface plate 3 (board vibration), in addition to the self-diagnosis result of the vibration isolation table 1.

[0180] In the following step S612, the external controller 1100 refers to each signal input in step S611 and determines whether or not a first or second abnormality has occurred in at least one of the multiple sensing circuits 11 and multiple actuators 8 that constitute the vibration isolation table 1. In addition to or instead of this determination, the external controller 1100 also determines whether or not at least one of the magnitude of the floor vibration and the magnitude of the vibration on the panel is equal to or greater than a predetermined value (equal to or greater than a second state threshold).

[0181] If the determination in step S612 is NO, the external controller 1100 ends the control process illustrated in Fig. 12. On the other hand, if the determination in step S612 is YES, the external controller 1100 advances the control process to step S613.

[0182] In step S613, the external controller 1100 controls the display mode (e.g., the display content on the display) of the external notification unit 1101, for example, to notify the location of an abnormality in the vibration isolation table 1 and the type of the abnormality, to notify that an abnormality has occurred in the floor vibration, or to notify that an abnormality has occurred in the vibration on the panel.

[0183] Thereafter, in step S614, the external controller 1100 inputs a control signal to each vibration isolation apparatus 5 via the controller 100 to stop the vibration isolation table 1. When stopping the vibration isolation table 1, the external controller 1100 may control each actuator 8 to stop the supply of air to each air spring, thereby seating the surface plate 3 on each support 7, or may stop the FF vibration isolation control and FB vibration isolation control, thereby performing passive type vibration isolation and vibration suppression by the four vibration isolation apparatuses 5.

[0184] In addition to or instead of such processing, the external controller 1100 may input a control signal to the driving unit 1001 of the external device 1000 to stop driving the driving unit 1001. For example, the driving unit 1001 of the external device 1000 can be stopped based on information about floor vibrations from the FF acceleration sensor 61. This makes it possible to achieve excellent cooperation performance between the vibration isolation table 1 and the external device 1000.

[0185] Additionally, the static threshold, dynamic threshold, and actuator threshold used in the first and second determination processes can be set and changed via the external controller 1100. By configuring it in this way, the usability of the vibration isolation table 1 can be improved.

[0186] Furthermore, the external notification unit 1101 of the external controller 1100 can also display the waveforms exemplified in Figures 7 and 8. This can improve usability when setting the values ​​of each threshold as described above.

[0187] The connection between the controller 100 and the external controller 1100 may be a wired connection as shown in Fig. 10, or a wireless connection. The connection method can be changed as appropriate depending on the type of external device 1000.

[0188] 5. Second Embodiment In the above embodiment, the controller 100 is configured to perform a self-diagnosis, and the external controller 1100 is configured to perform a determination based on the detection signal of the second state sensor 6, but the present disclosure is not limited to this configuration. For example, the external controller 1100 may perform a self-diagnosis of the vibration isolation table 1.

[0189] Additionally, in the above embodiment, the controller 100 is configured to execute processing related to active vibration isolation control and processing related to self-diagnosis, but the present disclosure is not limited to this configuration. For example, as in the second embodiment shown below, the components that execute the two types of processing may be separate from each other.

[0190] The configuration of the active vibration isolation system S according to the second embodiment of the present disclosure will be described below. Of the configuration of the active vibration isolation system S, the description of the configuration common to the active vibration isolation system S according to the first embodiment will be omitted.

[0191] Fig. 14 is a view illustrating a second embodiment of the present disclosure, corresponding to Fig. 10. In addition to the vibration isolation table 1 and the external device 1000, the active vibration isolation system S further includes a repeater 200, an environmental sensor 12, and an external sensor 13, as illustrated in Fig. 14.

[0192] The vibration isolation table 1 according to the second embodiment includes a controller 100 that controls each of the plurality of vibration isolation devices 5. The controller 100 executes the control described with reference to FIG.

[0193] The controller 100 receives at least one of the detection signal from the on-board vibration sensor 62 and the detection signals from the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61 for controlling each vibration isolation device 5. The controller 100 inputs each detection signal to the repeater 200 in real time. Note that each detection signal may be input to the repeater 200 without going through the controller 100.

[0194] The external device 1000 according to the second embodiment includes a driving unit 1001 configured similarly to the above-described embodiment, and an external controller 1100 that controls the operation of the driving unit 1001. The external controller 1100 inputs a control signal to the controller 100 via the repeater 200, thereby controlling the operation of the vibration isolation table 1 (for example, the operation of the actuator 8) via the controller 100.

[0195] The environmental sensor 12 is arranged around the active vibration isolation system S. The environmental sensor 12 senses the installation environment of the active vibration isolation system S and inputs a detection signal corresponding to the sensing result to the repeater 200 in real time. As an example, the environmental sensor 12 may be configured with one or more of a magnetic field sensor, an air pressure sensor, a temperature sensor, and an environmental sound microphone.

[0196] The external sensor 13 is disposed inside or outside the external device 1000. The external sensor 13 senses the operating status of the external device 1000 and inputs a detection signal corresponding to the sensing result to the repeater 200 in real time. As an example, the external sensor 13 can be configured by the drive position sensor 1004 illustrated in FIG. 1.

[0197] The repeater 200 is interposed between the controller 100 and the external controller 1100. The repeater 200 includes an IO unit 201 that relays electrical connection between the controller 100 and the external controller 1100, and a control terminal 202 that is connected to the controller 100 and the external controller 1100 via the IO unit 201.

[0198] The repeater 200 is connected to each vibration isolation apparatus 5 via the controller 100, and can control each vibration isolation apparatus 5 via the controller 100. The repeater 200 can be considered as a component equivalent to the "controller" according to the first embodiment in that it can indirectly control each vibration isolation apparatus 5. The repeater 200 constitutes a "diagnosis device" according to the second embodiment. This example is not limiting, and the diagnosis device may be constituted by at least one of the controller 100, the external controller 1100, and the repeater 200.

[0199] The IO unit 201 acquires detection signals from the status sensor 9, the second status sensor 6, the environment sensor 12, and the external sensor 13 in real time, and inputs each detection signal to the control terminal 202. The IO unit 201 also relays the transmission and reception of electrical signals between the external controller 1100, the controller 100, and the control terminal 202.

[0200] The control terminal 202 executes various processes based on the detection signals of the status sensor 9, the second status sensor 6, the environment sensor 12, and the external sensor 13. The control terminal 202 generates an electrical signal based on the processes and inputs it to the external controller 1100 or the controller 100 via the IO unit 201.

[0201] As an example, the control terminal 202 is configured by a computer such as a desktop computer or a laptop computer, and has an input unit 221 , a display unit 222 , and a storage unit 223 .

[0202] The input unit 221 accepts user input. The input unit 221 is configured with, for example, a keyboard and / or a pointing device. The display unit 222 visualizes and displays various information. The storage unit 223 stores various information.

[0203] In detail, the storage unit 223 stores the static threshold, first dynamic threshold, second dynamic threshold, first actuator threshold, second actuator threshold, and second state threshold described above, as well as the environmental threshold and external threshold described below. These values ​​are judgment criteria for each judgment based on the detection signals of the state sensor 9, the second state sensor 6, the environmental sensor 12, and the external sensor 13. The control terminal 202 can change the values ​​of each judgment criterion stored in the storage unit 223 based on user input via the input unit 221.

[0204] In the second embodiment, the repeater 200 executes the first determination process, the second determination process, and the notification process in place of the controller 100. These processes generally proceed according to the flowchart shown in Fig. 4, as in the previous embodiment. The repeater 200 as a diagnostic device inputs control signals to a plurality of vibration isolation devices 5 via the controller 100 in order to execute the first and second determination processes in sequence. Details of the first and second determination processes are the same as those in the first embodiment, unless otherwise specified.

[0205] (5-1. First Determination Process) 5, the repeater 200 reads the detection signal of the status sensor 9 via the controller 100 (see step S101). The subsequent processes of steps S102 and S103 are executed by the repeater 200, for example, the control terminal 202, unlike the first embodiment.

[0206] The remaining processes of step S104 and step S105 may be executed by the repeater 200 or the controller 100. When executed by the controller 100, the repeater 200 may generate an electrical signal corresponding to the frequency or number of times the determination in step S103 is YES, and input the electrical signal to the controller 100.

[0207] 6, the relay 200 activates all the actuators 8 via the controller 100 (see step S201). In the following step S202, the relay 200 reads the detection signals of the respective status sensors 9 via the controller 100. The processes of the following steps S203, S204, and S207 are executed by the relay 200.

[0208] The remaining processes of step S205, step S206, step S208, and step S209 may be executed by the repeater 200 or by the controller 100. When executed by the controller 100, the repeater 200 may generate an electrical signal corresponding to the frequency or number of times that the determinations of step S204 and step S207 are YES, and input the electrical signal to the controller 100.

[0209] Furthermore, during the static diagnosis and dynamic diagnosis, the repeater 200 displays the determination results of steps S103, S204, and S207 on the display unit 222. This makes it possible to visualize the determination results based on the static threshold, the first dynamic threshold, and the second dynamic threshold.

[0210] (5-2. Second Determination Process) 9, the relay 200 activates one actuator 8 via the controller 100 (step S301). In the following step S302, the relay 200 reads the detection signals of each status sensor 9 via the controller 100. The processes of the following steps S303, S304, and S307 are executed by the relay 200.

[0211] The remaining processes of step S305, step S306, step S308, step S309, and step S310 may be executed by the repeater 200 or by the controller 100. When executed by the controller 100, the repeater 200 may generate an electrical signal corresponding to the frequency or number of times the determinations of step S204 and step S207 are YES, and input the electrical signal to the controller 100.

[0212] Furthermore, during the second determination process, the repeater 200 displays the determination results of steps S304 and S307 on the display unit 222. This makes it possible to visualize the determination results based on the first and second actuator threshold values.

[0213] (5-3. Other judgment processes) 15 is a flowchart illustrating another determination process in the second embodiment. This determination process is repeatedly executed in real time during the execution of active vibration isolation control and before and after the execution of active vibration isolation control. Note that the series of processes from step S81 to step S82, the series of processes from step S83 to step S84, and the series of processes from step S85 to step S86 may be performed in an order different from that shown in the figure, or a plurality of processes may be performed simultaneously.

[0214] 15, the repeater 200 acquires the detection signal of the environment sensor 12 via the IO unit 201. The acquired detection signal is input to the control terminal 202, for example, in real time.

[0215] In the following step S82, the repeater 200 determines the installation environment of the active vibration isolation system S based on the detection signal of the environmental sensor 12. As an example, in step S82, the control terminal 202 compares the detection signal acquired in step S81 with an environmental threshold value corresponding to the type of the environmental sensor 12. Based on the comparison result, the control terminal 202 determines whether or not there is a problem in the installation environment of the active vibration isolation system S.

[0216] As a further example, if a temperature sensor is used as the environmental sensor 12, the control terminal 202 may determine whether the temperature detected by the environmental sensor 12 is within an allowable range defined in correspondence with the environmental threshold. In this case, the control terminal 202 determines that there is no malfunction if the detected temperature is within the allowable range, and determines that there is a malfunction if the detected temperature is outside the allowable range. The same applies when one or more of a magnetic field sensor, a barometric pressure sensor, and an environmental sound microphone are used as the environmental sensor 12.

[0217] In the following step S83, the repeater 200 acquires the detection signal of the external sensor 13 via the IO unit 201. The acquired detection signal is input to the control terminal 202, for example, in real time.

[0218] In the following step S84, the repeater 200 determines the operating status of the external device 1000 based on the detection signal of the external sensor 13. As an example, in step S84, the control terminal 202 compares the detection signal acquired in step S83 with an external threshold corresponding to the type of the external sensor 13. The control terminal 202 determines the operating status of the external device 1000 based on the comparison result.

[0219] As a further example, when the drive position sensor 1004 is used as the external sensor 13, the control terminal 202 may determine whether the position detected by the drive position sensor 1004 is within an allowable range defined in correspondence with the external threshold. In this case, the control terminal 202 determines that there is no malfunction if the detected position is within the allowable range, and determines that there is a malfunction if the detected position is outside the allowable range. The same applies when another sensor is used as the external sensor 13.

[0220] The subsequent processes of steps S85, S86, and S87 are similar to a part of the processes of steps S611 and S612 in Fig. 12. That is, in step S85, the repeater 200 acquires the detection signal of the second state sensor 6 instead of the external controller 1100.

[0221] Furthermore, in step S86, the repeater 200 determines whether or not there is an abnormality in the floor vibration and / or the panel vibration based on the detection signal of the second status sensor 6. This determination is made by comparing the detection signal of the second status sensor 6 with the second status threshold. In this case, the control terminal 202 determines that there is "no abnormality" when the magnitude of the floor vibration and / or the panel vibration is less than the second status threshold, and determines that there is "an abnormality" when the magnitude is equal to or greater than the second status threshold.

[0222] In the next step S87, the repeater 200 determines whether there is a malfunction (abnormality) in one or more of the installation environment, the operating status, and the vibration and / or the vibration on the panel. If the determination is YES, the control terminal 202 advances the control process to step S88. On the other hand, if the determination is NO, the control terminal 202 ends the control process illustrated in FIG. 15.

[0223] When the process proceeds from step S87 to step S88, the control terminal 202 executes the notification process according to the second embodiment.

[0224] (5-4. Notification processing) As in the first embodiment, the notification process according to the second embodiment is configured to output the self-diagnosis result of the vibration isolation table 1 to at least one of the external device 1000 and the notification unit of the repeater 200 serving as a diagnostic device. As an example, the notification process according to the second embodiment is executed by the repeater 200. The repeater 200 executes various notifications via the external controller 1100. Note that the "notification unit of the repeater 200" includes one or more combinations of the notification unit 101 connected to the repeater 200 via the controller 100, the external notification unit 1101 connected to the repeater 200 via the external controller 1100, and the display unit 222 of the repeater 200.

[0225] 16 is a flowchart illustrating a notification process in the second embodiment. This process is executed in step S6 in FIG. 4 or step S88 in FIG.

[0226] First, in step S621, the repeater 200 records at least one of the detection signals (acquired contents) of the status sensor 9, the second status sensor 6, the environmental sensor 12, and the external sensor 13 acquired in real time, according to the judgment result based on the detection signal of each sensor.

[0227] In more detail, the repeater 200 stores the detection signal that triggers the start of the notification process among the status sensor 9, the second status sensor 6, the environmental sensor 12, and the external sensor 13 in the memory unit 223 of the control terminal 202. For example, if the notification process is started when the average value related to the status sensor 9 exceeds the static threshold (the determination in step S103 becomes YES), the repeater 200 stores data indicating the detection signal of each status sensor 9 as a log for a predetermined period that includes the timing when the average value exceeded the static threshold.

[0228] Subsequently, in step S622, the repeater 200 inputs the determination results of the vibration and / or on-board vibration and the determination results based on the environmental sensor 12 and the external sensor 13 to the external controller 1100. These inputs are performed in real time regardless of whether or not active vibration isolation control is being performed.

[0229] Furthermore, if a self-diagnosis of the vibration isolation table 1 is executed while active vibration isolation control is stopped, the repeater 200 inputs the self-diagnosis result of the vibration isolation table 1 to the external controller 1100 in addition to or in addition to the above-mentioned determination result. Note that the self-diagnosis result may be input to the controller 100 instead of or in addition to the external controller 1100. In this case, various processes are executed by the controller 100, similar to the control process exemplified in FIG.

[0230] In the subsequent steps S623 to S625, the external controller 1100 controls the operation of the drive unit 1001 or the actuator 8 in accordance with at least one detection signal (e.g., a judgment result based on the detection signal) of the status sensor 9, the second status sensor 6, the environmental sensor 12, and the external sensor 13.

[0231] Specifically, in step S623, the external controller 1100 determines whether or not there is an abnormality in the self-diagnosis results of the vibration isolation table 1, the vibration and / or on-board vibration determination results, the installation environment of the active vibration isolation system S, or the operating status of the external device 1000, based on the determination results read in step S622.

[0232] More specifically, the external controller 1100 accepts the determination results by the repeater 200 regarding the installation environment of the active vibration isolation system S. On the other hand, for the determination results other than the installation environment, the external controller 1100 comprehensively determines whether or not there is an abnormality that should be notified to the outside, based on the determination results by the repeater 200.

[0233] As an example, consider a case where a determination result indicating that the detection signal from the external sensor 13 exceeds the external threshold is input to the external controller 1100. In this case, the external controller 1100 analyzes the determination result to determine whether or not there is an abnormality that should be notified to the outside. This determination can be made based on, for example, the number of times or frequency that the detection signal from the external sensor 13 exceeds the external threshold.

[0234] If the determination in step S623 is YES, the external controller 1100 advances the control process to step S624. In step S624, the external controller 1100 notifies the presence or absence of an abnormality in the active vibration isolation system S by controlling the display mode in the external notification unit 1101, as in step S613. In addition to notification via the external notification unit 1101, notification may also be made via the notification unit 101 of the controller 100. If the determination in step S623 is NO, the external controller 1100 ends the control process of FIG.

[0235] Thereafter, in step S625 following step S624, the external controller 1100 inputs a control signal to the actuator 8 of each vibration isolation apparatus 5 via the repeater 200 and the controller 100, thereby stopping the vibration isolation table 1. The details of the method for stopping the vibration isolation table 1 are the same as those in the above embodiment.

[0236] In step S625, in addition to or instead of stopping each vibration isolation device 5, the external controller 1100 may input a control signal to the driving unit 1001 of the external device 1000 to stop driving the driving unit 1001.

[0237] The driving unit 1001 may be stopped when the determination result of the second state sensor 6, the environment sensor 12, or the external sensor 13 is YES in step S623, for example.

[0238] 16, the active vibration isolation system S does not allow the operation of the vibration isolation table 1 and / or the external device 1000 until the determination in step S623 is NO. By allowing the operation of the vibration isolation table 1 and / or the external device 1000 only when it is determined that the entire active vibration isolation system S is normal, even an unskilled user can operate the external device 1000 with peace of mind. Furthermore, by storing logs as appropriate as shown in step S621, even if a malfunction occurs, the malfunction can be dealt with appropriately.

[0239] <6. Effects etc.> 1 and 2, the four vibration isolation devices 5 can be considered to be connected via the surface plate 3 and the external device 1000. Therefore, as shown in FIG. 6, even if an abnormality occurs in one of the actuators 8 of the multiple vibration isolation devices 5, the remaining actuators 8 will operate, and vibrations caused by that operation can be detected by each of the multiple status sensors 9. Then, by individually judging or comparing the detection signals of each status sensor 9, it is possible to accurately determine which status sensor 9 has an abnormality, even when multiple vibration isolation devices 5 are used.

[0240] 9, the second determination process performed after the first determination process (particularly the dynamic diagnosis) sequentially operates the actuators 8 of the multiple vibration isolation devices 5. By operating the actuators 8 sequentially, it is possible to accurately determine which actuator 8 has experienced an abnormality.

[0241] Furthermore, since both the first and second determination processes are completed by the vibration isolation table 1 alone, even if the external device 1000 is mounted thereon, it is possible to distinguish and determine whether an abnormality has occurred in the external device 1000 or in the vibration isolation table 1. This makes it possible to respond to various abnormalities as quickly as possible when they occur, and to accurately prevent delays in manufacturing by the external device 1000, breakdowns of the external device 1000 due to abnormalities in the vibration isolation table 1, etc.

[0242] Furthermore, if an abnormality occurs in a specific actuator 8, the effect of the abnormality will be strongly reflected in the detection signal of the status sensor 9 corresponding to that actuator 8. Therefore, by using the detection signal of the status sensor 9 corresponding to that specific actuator 8, a more accurate determination can be made in the second determination process.

[0243] Furthermore, as has been known in the past, in a method of determining whether or not an abnormality exists by comparing with an initial state, if there is no significant difference in the signals output from each sensor when the sensor is abnormal and when the actuator is abnormal, it is not possible to determine whether an abnormality has occurred in the sensor or the actuator.

[0244] In contrast to this, according to the first and second embodiments, by configuring the process to proceed to the second determination process via step S3 in Fig. 4 after the first determination process, it is possible to clearly distinguish between the determination of an abnormality in the state sensor 9 of each vibration isolator 5 and the determination of an abnormality in the actuator 8 of the same vibration isolator 5. This makes it possible to achieve more accurate determination.

[0245] Generally, possible operational abnormalities of the sensing circuit 11 include deviations in the detected values ​​of the status sensors 9 due to abnormalities in the components such as the AMP 10a connected to each status sensor 9, or due to short circuits in the electrical wiring that constitutes each sensing circuit 11 or in the electrical wiring connected to each sensing circuit 11. The effect of such deviations can be called an operational abnormality of the entire sensing circuit 11 rather than an operational abnormality of the status sensor 9 itself, and it would be convenient if they could be handled separately from the dynamic diagnosis illustrated in FIG.

[0246] 5, the controller 100 executes a static diagnosis to determine whether or not there is an operational abnormality in the entire sensing circuit 11, in addition to a dynamic diagnosis to determine whether or not there is an operational abnormality in the status sensor 9 itself. This allows for more accurate determination.

[0247] Furthermore, as has been conventionally known, the method of determining the state by comparing it with the initial state is based on the assumption that the initial state is normal, and cannot be used when the initial state is abnormal, so there are limitations to the scope of application.

[0248] In contrast to this, as explained using Figures 7 and 8, the first and second judgment processes according to this embodiment make it possible to accurately determine whether or not an abnormality exists without relying on comparison with the initial state.

[0249] 6 and 9, by providing a plurality of threshold values, it is possible to provide a variety of output modes, such as simply issuing a warning to the user or issuing an error notification of a level that requires the active vibration isolation system S to be stopped, etc. This makes it possible to improve the usability of the active vibration isolation system S.

[0250] 11, the operation of the external device 1000 and the operation of each vibration isolation device 5 can be controlled through the external controller 1100. This allows each vibration isolation device 5 and the external device 1000 to be linked together appropriately.

[0251] 15, the active vibration isolation system S executes a process that combines a self-diagnosis of the vibration isolation table 1 with a diagnosis of the installation environment of the system S. This allows the cause to be investigated from multiple perspectives when a problem occurs in the performance, etc., of the external device 1000. Furthermore, even an unskilled operator can easily investigate the cause, which contributes to improving user convenience.

[0252] 15, the active vibration isolation system S executes a process that combines the self-diagnosis of the vibration isolation table 1 with the diagnosis of the operating status of the external device 1000. As a result, when a problem occurs in the performance or the like of the external device 1000, the cause can be investigated from multiple perspectives to determine whether the cause lies in the vibration isolation table 1 or the external device 1000 itself. Furthermore, even an unskilled operator can easily investigate the cause, which contributes to improving user convenience.

[0253] Furthermore, as explained with reference to Figures 15 and 16, the state of the entire active vibration isolation system S can be monitored by utilizing multiple types of sensors, such as the state sensor 9, so that the external device 1000 can be operated after the vibration isolation table 1, the external device 1000, and the installation environment are each in an ideal state.

[0254] Furthermore, because the detection signals acquired in real time are used for various judgments, if the external device 1000 does not exhibit the desired performance, investigation into the cause can be started promptly. Since each detection signal is collected in the diagnostic device, the user can comprehensively monitor the vibration isolation table 1, the external device 1000, and the entire installation environment. This contributes to improving user convenience because even an unskilled worker can easily investigate the cause. Furthermore, because the content acquired from each sensor is recorded, even if a malfunction is overlooked, the timing and cause of the malfunction can be analyzed later.

[0255] 14, the settings of the active vibration isolation system S as a whole can be flexibly changed, such as changing the judgment criteria (for example, static threshold value) related to the vibration isolation table 1 in accordance with the type of the external device 1000, or changing the judgment criteria (for example, external threshold value) related to the external device 1000 in accordance with the type of the vibration isolation table 1 or the installation environment. This also contributes to improving user convenience.

[0256] Furthermore, the active vibration isolation system S according to the first and second embodiments can contribute to the achievement of Goal 9, "Build resilient infrastructure, promote inclusive and sustainable industrialization, foster innovation and infrastructural resilience," among the Sustainable Development Goals (SDGs), which are international goals aimed at achieving a sustainable and better world by 2030 as set out in the "2030 Agenda for Sustainable Development" unanimously adopted by member states at the United Nations Summit in September 2015.

[0257] <7. Other embodiments> In the above embodiment, the same status sensor 9 is used in the first and second determination processes, but the present disclosure is not limited to such a configuration. For example, if a linear motor is used for the actuator 8, a current generated by driving the linear motor may be input to the controller 100, and the second determination process may be executed based on that current. In this case, the circuit system that inputs the current generated by driving the linear motor to the controller 100 functions as a status sensor specific to the second determination process. [Explanation of symbols]

[0258] S Active Vibration Isolation System 1. Vibration isolation table 3 Surface Plate 5 Active vibration isolation device 73 Top plate (upper end) 8 Actuators 9 Status sensor (sensing circuit) 91 FB acceleration sensor (status sensor) 92 FB displacement sensor (status sensor) 6 Secondary Status Sensor 61 FF acceleration sensor (status sensor, second status sensor) 62 Panel vibration sensor (second status sensor) 10 Signal processing circuit (sensing circuit) 10a amplifier 10b Analog-to-Digital Converter 11 Sensing circuit 12 Environmental Sensors 13 External Sensor 100 Controller (diagnostic device) 101 Notification Department 200 Repeater (diagnostic device) 201 IO unit 202 Control Terminal 221 Input section 223 Storage section 1000 external devices 1001 Drive unit 1004 Drive position sensor (external sensor) 1100 External Controller 1101 External Notification Department F Basics

Claims

1. An active vibration isolation system comprising: a plurality of active vibration isolation apparatuses installed on a foundation; and a diagnostic device that controls each of the plurality of active vibration isolation apparatuses, wherein an external device configured to be able to receive an electrical signal is supported by the plurality of active vibration isolation apparatuses via a base, an actuator provided in each of the plurality of active vibration isolation devices, the actuator operating with respect to the external device to excite the external device; a plurality of state sensors for detecting vibrations of each of the plurality of active vibration isolation devices or the foundation; the diagnostic device sequentially executes a first determination process for determining whether or not an abnormality exists in a sensing circuit configured to include the status sensor based on a detection signal from the status sensor, and a second determination process, which is executed after the first determination process is completed, for determining whether or not an abnormality exists in the actuator; The diagnostic device comprises: In the first determination process, a control signal is input to the plurality of active vibration isolation apparatuses so that two or more of the actuators are operated simultaneously, and a dynamic diagnosis is performed for each of the plurality of status sensors to determine individually whether or not there is an abnormality in the status sensor based on the detection signal corresponding to the control signal; In the second determination process, control signals are input to the plurality of active vibration isolation apparatuses so that the actuators operate one by one in sequence, and based on the detection signals corresponding to the control signals, it is determined individually whether or not there is an abnormality in the actuator for each of the plurality of active vibration isolation apparatuses; The diagnostic device outputs the determination results of the first and second determination processes to at least one of the external device and a notification unit of the diagnostic device. An active vibration isolation system characterized by:

2. 2. The active vibration isolation system according to claim 1, At least some of the plurality of state sensors are provided in each of the plurality of active vibration isolation apparatuses. An active vibration isolation system characterized by:

3. 2. The active vibration isolation system according to claim 1, The diagnostic device executes the second determination process when it is determined that there is no abnormality in any of the plurality of status sensors. An active vibration isolation system characterized by:

4. 2. The active vibration isolation system according to claim 1, the first determination process is configured to sequentially execute a static diagnosis that diagnoses the entire sensing circuit and the dynamic diagnosis; During the static diagnosis, the diagnostic device determines whether or not there is an abnormality in the sensing circuit based on the detection signals of the state sensors when each of the plurality of actuators is not operating. An active vibration isolation system characterized by:

5. 5. An active vibration isolation system according to claim 4, the state sensor acquires a detection signal indicating at least one of an acceleration of an upper end portion of the active vibration isolation apparatus and a displacement amount of the upper end portion relative to the base, In the first determination process, the diagnostic device During the static diagnosis, if the magnitude of the detection value of the status sensor exceeds a predetermined static threshold, it is determined that there is an abnormality in at least a part of the sensing circuit; During the dynamic diagnosis, if the magnitude of the detection value of the status sensor is below a predetermined dynamic threshold, it is determined that there is an abnormality in the status sensor; In the second determination process, the diagnostic device When the magnitude of the detected value of the status sensor is lower than a predetermined actuator threshold, it is determined that an abnormality exists in the actuator. An active vibration isolation system characterized by:

6. 6. An active vibration isolation system according to claim 5, The magnitude of the detected value in the static diagnosis is an average value of the detected value within a predetermined period, The magnitude of the detected value in the dynamic diagnosis and the second determination process is the difference between the maximum and minimum values ​​of the detected value within a predetermined period. An active vibration isolation system characterized by:

7. 6. An active vibration isolation system according to claim 5, the dynamic threshold and the actuator threshold are each configured with a plurality of thresholds having different magnitudes; When the diagnostic device determines that an abnormality exists in the status sensor or the actuator, the diagnostic device changes the output mode of the determination result depending on which of the plurality of threshold values ​​the abnormality has exceeded. An active vibration isolation system characterized by:

8. 8. The active vibration isolation system according to claim 1, The external device is an external controller independent of the controllers that control each of the plurality of active vibration isolation apparatuses; a driving unit electrically connected to the external controller, the external controller controls the operation of the drive unit by inputting a control signal to the drive unit; The external controller controls the operation of the drive unit or the actuator based on the determination results of the first determination process and the second determination process. An active vibration isolation system characterized by:

9. 9. An active vibration isolation system according to claim 8, a second state sensor for detecting a vibration state on the surface plate; the second status sensor is configured by a sensor different from the status sensor or the status sensor itself; The external controller controls the operation of the drive unit or the actuator based on at least one detection signal from the state sensor and the second state sensor. An active vibration isolation system characterized by:

10. 10. An active vibration isolation system according to claim 9, an environmental sensor for sensing an installation environment of the active vibration isolation system; the diagnostic device determines an installation environment of the active vibration isolation system based on the detection signal of the environmental sensor; The external controller controls the operation of the drive unit or the actuator in accordance with the determination result based on the environmental sensor. An active vibration isolation system characterized by:

11. 11. An active vibration isolation system according to claim 10, an external sensor for sensing an operating state of the external device; the diagnostic device determines an operating status of the external device based on the detection signal of the external sensor; The external controller controls the operation of the drive unit or the actuator in accordance with the determination result based on the external sensor. An active vibration isolation system characterized by:

12. 12. An active vibration isolation system according to claim 11, the diagnostic device acquires detection signals from the status sensor, the second status sensor, the environmental sensor, and the external sensor in real time, and records the acquired contents according to a determination result based on the detection signals from the status sensor, the second status sensor, and the environmental sensor. An active vibration isolation system characterized by:

13. 13. An active vibration isolation system according to claim 12, the diagnostic device has an input unit that accepts user input; The diagnostic device changes a determination criterion for a determination based on the detection signals of the status sensor, the second status sensor, the environmental sensor, and the external sensor, based on a user input via the input unit.

1. An active vibration isolation device characterized by:

14. 2. The active vibration isolation system according to claim 1, The diagnostic device comprises: a controller that controls each of the plurality of active vibration isolation apparatuses; an external controller for controlling the external device; a relay interposed between the controller and the external controller. An active vibration isolation system characterized by:

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