Piping unit

Abstract

To provide a piping unit capable of efficiently heating a gas flow path and suppressing deposition of deposits in the gas flow path.SOLUTION: The piping unit includes: a pipe main body through which gas passes; a heater having a planar heating element disposed inside the pipe main body; a thin inner plate covering at least a part of the heating element and coating the pipe main body from an inner side; and connection pipes each having a flange portion protruding radially outward from the pipe main body and fitted to the pipe main body at both end portions thereof so as to face each other.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to exhaust piping for semiconductor manufacturing equipment, FPD manufacturing equipment, solar cell manufacturing equipment, as well as chemical plants, vacuum equipment, etc., and more particularly to a piping unit whose inner wall surface, which functions as a flow path, is heated. [Background technology]

[0002] In typical semiconductor and liquid crystal manufacturing equipment, sublimation components volatilize from the film-forming section on the surface of semiconductor wafers or liquid crystal glass substrates, resulting in gas containing the sublimation components flowing into the exhaust pipe. If the gas encounters a temperature drop in the exhaust pipe's flow path, the sublimation components sublimate, forming deposits inside the exhaust pipe. Deposits that adhere to the inside of the exhaust pipe narrow the flow path within the exhaust pipe, reducing the gas exhaust flow rate and affecting the quality of the product as production conditions change. Therefore, they must be removed periodically, resulting in increased maintenance costs. Furthermore, the manufacturing equipment must be shut down each time maintenance is performed, significantly compromising safety and productivity.

[0003] Patent Document 1 describes a gas carrier fumigation device having a ribbon heater wound around the outside of a pipe. With this configuration, the outer periphery of the pipe that forms the gas flow path is heated by the ribbon heater wound in a spiral shape, maintaining the inside of the pipe at a constant temperature and preventing deposits from adhering to the inside of the pipe. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-33581 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the conventional method where the heater is placed outside the piping, the piping is heated from the outside, which results in inefficient heat conduction. Also, because the heater is wound spirally around the outer periphery of the piping, localized low-temperature areas occur in the piping, making it difficult to heat the gas flow path uniformly.

[0006] The present invention has been made in consideration of the above circumstances, and has as its object to provide a piping unit that improves the efficiency of heat conduction and suppresses the deposition of deposits. [Means for solving the problem]

[0007] The piping unit of the present invention comprises a piping body through which gas passes, a heater having a planar heating element arranged within the piping body, a thin inner plate that covers at least a portion of the heating element and covers the piping body from the inside in a planar manner, and a connecting pipe that has a flange protruding radially outward from the piping body and is fitted into the piping body so as to face each other at both ends of the piping body.

[0008] A piping unit according to another aspect of the present invention is a piping unit in which the heating element is arranged adjacent to the inner wall surface of the piping main body, and the heater has a heater wire for passing electricity through the heating element, and a connector provided outside the piping main body and receiving connection to one end of the heater wire. [Effects of the Invention]

[0009] According to the piping unit of the present invention, a configuration is provided which comprises a piping body through which gas passes, a heater having a planar heating element arranged within the piping body, a thin inner plate which covers at least a portion of the heating element and covers the piping body from the inside in a planar manner, and a connecting pipe which has a flange portion protruding radially outward from the piping body and is fitted into the piping body so as to face each other at both ends of the piping body.In this configuration, the planar heating element is arranged adjacent to the inner wall surface of the piping body, and the thin inner plate covers at least a portion of the heating element while covering the piping body from the inside in a planar manner, so that the gas flow path can be heated evenly to a high temperature, the heating efficiency of the flow path exposed to the gas is improved, and deposits can be prevented from adhering to the flow path.

[0010] According to a piping unit of another aspect of the present invention, the heating element is arranged adjacent to the inner wall surface of the piping body, and the heater has a heater wire for passing electricity through the heating element and a connector provided outside the piping body for receiving connection of one end of the heater wire.Therefore, when attaching the heating element to the inner wall surface of the piping body, the heating element is aligned with the inner surface of the piping body and the heater wire is attached, the heater wire is pulled out from the heater wire pull-out portion of the piping body to the outside of the piping body, and the connector is fixed to the outside of the piping body proximal to the heater wire pull-out portion, thereby making it possible to easily perform the installation work. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a perspective view of a piping unit according to an embodiment of the present invention. [Figure 2] 1 is an exploded perspective view of a piping unit according to an embodiment of the present invention. [Figure 3] FIG. 2 is an enlarged perspective view of a portion of the piping unit according to the embodiment of the present invention. [Figure 4] FIG. 2 is an enlarged perspective view of a portion of a heater of the piping unit according to the embodiment of the present invention. [Figure 5] 2 is an enlarged side cross-sectional view of a portion of the piping unit shown in FIG. 1. FIG. [Figure 6]FIG. 2 is an end view taken along line AA in FIG. 1. [Figure 7] FIG. 10 is an end view showing another example of a piping unit according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0012] The present invention aims to prevent deposits from adhering to a flow path by devising the configuration of a heating unit (heater) that heats a pipe that forms a gas exhaust line in a manufacturing device for liquid crystal panels, semiconductors, etc. Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

[0013] The configuration of a piping unit 1 according to this embodiment will be described with reference to FIGS. 1 to 7. FIG. 1 is a perspective view showing the piping unit 1 according to this embodiment. FIG. 2 is an exploded perspective view of the piping with the connecting pipe 5 removed from the piping unit 1 according to this embodiment. FIG. 3 is an enlarged perspective view of a portion of the piping unit 1 shown in FIG. 2. FIG. 4 is an enlarged perspective view of a portion of the heating element 18 of the piping unit 1 of the present invention. FIG. 5 is an enlarged side cross-sectional view of one end of the piping unit 1 shown in FIG. 1. FIG. 6 is an end view of the piping unit 1 shown in FIG. 1 taken along line A-A. Area B enclosed by a two-dot chain line at the bottom of FIG. 6 is an enlarged end view of a portion of the piping unit 1 shown in FIG. 6. FIG. 7 is an end view showing another example of the piping unit 1 according to this embodiment. Area C enclosed by a two-dot chain line at the bottom of FIG. 7 is an enlarged end view of a portion of the piping unit 1 shown in FIG. 7. In describing this embodiment, the right front side and left rear side of FIG. 1 are defined as the front-rear direction, and the left front side and right rear side are defined as the left-right direction.

[0014] 1 and 2, a piping unit 1 according to this embodiment is a piping unit installed in an exhaust line of a sublimate treatment apparatus or the like. The piping unit 1 is composed of a piping main body 2 for forming a gas flow path, a heater 3 having a heating element 18 provided inside the piping main body 2, an inner plate 4 provided so as to cover at least a part of the heating element 18, and connection pipes 5 fitted and fixed to both ends 2a of the piping main body 2 in the longitudinal direction.

[0015] The pipe body 2 is a linearly formed cylindrical body with a hollow interior. The pipe body 2 is made of a metal member such as stainless steel (SUS) with a plate thickness of approximately 1.5 mm, and has a heater wire lead-out portion 11 drilled in a substantially square shape in plan view on the outer circumferential surface near one of the longitudinal ends 2a. A cover body 10 is fitted to this heater wire lead-out portion 11.

[0016] The cover body 10 is made of the same material as the pipe body 2, and is formed into a curved surface having the same radius of curvature as the outer peripheral surface of the pipe body 2. The cover body 10 is formed into a shape that is approximately similar to the heater wire lead-out portion 11, and is formed to be slightly smaller than the opening dimensions of the heater wire lead-out portion 11. As a result, by fitting the cover body 10 onto the heater wire lead-out portion 11 of the pipe body 2, the outer peripheral surface of the pipe body 2 and the outer surface of the cover body 10 become approximately flush with each other.

[0017] 3, the pipe body 2 has protrusions 13, 13 protruding in the left-right direction on the radially outer side of the pipe body 2 at the edges of the openings 12, 12 provided at both longitudinal ends 2a, 2a. The protrusions 13 are formed in a substantially rectangular flat plate shape and have a fastening hole 14 in the center.

[0018] A support stay 15 is provided to protrude upward from the outer peripheral surface of the pipe body 2 near the heater wire draw-out portion 11. The support stay 15 is made of a metallic member and has an attachment portion 16 extending upward from the outer peripheral surface of the pipe body 2, and a connector support portion 17 extending from the upper end of the attachment portion 16 toward the other end of the pipe body 2 along the extension direction of the pipe body 2.

[0019] The mounting portion 16 is formed in a flat plate shape with its thickness direction coinciding with the extension direction of the piping main body 2, and has a connector insertion portion 16a formed in the approximate center thereof so as to penetrate in the front-to-rear direction. The connector support portion 17 is formed in a generally flat plate shape with its thickness direction perpendicular to the extension direction of the piping main body 2. The mounting portion 16 and the connector support portion 17 form a generally "L" shape in side view of the support stay 15.

[0020] As shown in FIG. 4, the heater 3 has a heating element 18 housed inside the piping main body 2 and a heater wire 19 for applying electricity to the heating element 18.

[0021] Heating element 18 is made of a flexible material and is formed into a thin, approximately rectangular plate shape so that the outer surface, which is the heat-generating surface, is heated approximately uniformly when heated. In this embodiment, a silicone rubber heater is used as heating element 18. Here, the silicone rubber heater is a flexible film-shaped heater element made of a patterned conductive film laminated with heat-resistant silicone rubber.

[0022] The heating element 18 is inserted from one of the openings 12 provided in the piping body 2 while deforming into a shape that fits the inner circumferential surface of the piping body 2, and is configured to be large enough to cover almost the entire inner circumferential surface of the piping body 2. The heating element 18 is provided inside the piping body 2 in a manner that allows it to come into close contact with the inner circumferential surface of the piping body 2 due to the elastic force of the heating element 18.

[0023] Heating element 18 is wound around the inner circumferential surface of pipe main body 2 inside pipe main body 2, and has short-side ends 18a, 18a joined together. Note that short-side ends 18a, 18a of heating element 18 may be provided inside pipe main body 2 so as to partially overlap each other.

[0024] Heating element 18 also has power supply portion 18b at one end in the longitudinal direction, approximately in the center in the left-right direction. Power supply portion 18b has a connection terminal for connecting to heater wire 19, and protrudes in the thickness direction of heating element 18. Power supply portion 18b is fitted into the position of heater wire lead-out portion 11, thereby allowing heating element 18 to be attached to a predetermined position in piping main body 2. Furthermore, by covering power supply portion 18b with cover body 10, heater wire lead-out portion 11 is also covered with cover body 10, and the gas flow path in piping main body 2 can be blocked from the outside.

[0025] As shown in Figure 5, the heater wire 19 is a power supply line for supplying electricity to the heating element 18, and one end is connected to the power supply portion 18b of the heating element 18, and the other end is connected to a connector 20 provided outside the piping main body 2.

[0026] As shown in Fig. 3, the connector 20 is fixed to a support stay 15 provided on the outer peripheral surface of the piping body 2 by a fastening member or the like. The connector 20 is connected to a power supply cable (not shown). When power is supplied to the connector 20 via the cable, the heating element 18 generates heat through conduction via the heater wire 19.

[0027] With this configuration, the heating element 18 covers the entire inner circumferential surface of the piping body 2 and is provided in close contact with it due to the elasticity of the heating element 18, so that the piping internal space 26 of the piping body 2, which serves as the gas flow path, can be secured as large as possible. Furthermore, the piping internal space 26, which serves as the gas flow path, is heated without passing through the piping body 2, so the heating efficiency of the gas flow path can be improved. Furthermore, the outer surface of the heating element 18 generates heat almost uniformly, so the gas flow path can be heated evenly and deposits can be prevented from adhering to the flow path.

[0028] Moreover, the heater 3 can be easily installed inside the piping main body 2 by simply pulling the heater wire 19 out of the piping main body 2 from the heater wire pull-out portion 11 of the piping main body 2 and connecting the tip of the heater wire 19 to the connector 20. Furthermore, by providing the power supply portion 18b of the heater 3 at the heater wire pull-out portion 11, troublesome work such as connecting a power supply connector inside the piping main body 2 is eliminated, and work such as connecting the heater wire 19 can be easily performed after the heating element 18 is installed inside the piping main body 2.

[0029] The inner plate 4 is made of a metal member formed into a thin, approximately rectangular plate. The inner plate 4 is formed to a thickness of about 0.1 mm and is made of a material that is corrosion-resistant to gas. In this embodiment, the inner plate 4 has flexibility and elasticity, and is made of, for example, stainless steel (SUS).

[0030] The inner plate 4 is disposed inside the piping body 2 so as to cover the heating element 18. In other words, the inner plate 4 sandwiches the heating element 18 provided inside the piping body 2 between itself and the piping body 2 by elastic action, and presses and fixes the heating element 18 against the inner peripheral surface of the piping body 2.

[0031] With this configuration, the inner plate 4 adheres the heating element 18 to the piping body 2 and forms a gas flow path as wide as possible. Moreover, the inner plate 4 is provided inside the piping body 2 so as to cover almost the entire heating element 18 provided inside the piping body 2, thereby preventing the heating element 18 from being exposed to the gas flowing inside the piping and preventing deterioration and corrosion of the heating element 18.

[0032] As shown in Fig. 6, the inner plate 4 is provided inside the piping body 2 with one end 4a on one side of the lateral side overlapping the other end 4a. With this configuration, when the heating element 18 is heated, the circular inner plate 4 expands in a radial direction due to linear expansion of the inner plate 4, improving the degree of contact between the inner plate 4 and the heating element 18 and enabling efficient heat transfer of the heat generated by the heating element 18 to the inner plate 4. The overlapping portion of the ends 4a, 4a can be covered with a sealing member 27, as shown in Fig. 7. The sealing member 27 is preferably made of a metal foil such as aluminum or stainless steel that is heat-resistant and corrosion-resistant. In this way, by using the sealing member 27, even if the end portion 4a on one end side and the end portion 4a on the other end side in the short direction of the inner plate 4 are joined together or arranged with a slight gap between the end portion 4a on one end side and the end portion 4a on the other end side, the sealing member 27 can cover the space between the end portion 4a on one end side and the end portion 4a on the other end side, thereby preventing gas from coming into contact with the heating element 18.

[0033] Furthermore, the overall length of the inner plate 4 does not need to be the same as that of the heating element 18, and it may be formed to any length as long as the gas does not come into contact with the heating element 18 when flowing inside the piping body 2. However, by making the overall length of the inner plate 4 the same as that of the heating element 18, the heat generated by the heating element 18 can be efficiently used to heat the gas flow path, and there is no risk of temperature unevenness occurring in the gas flow path. In other words, the heat generated by the heating element 18 heats the inner plate 4, which has high thermal conductivity and forms the gas flow path, without passing through air, which has low thermal conductivity. This makes it possible to efficiently heat the inner plate 4, which forms the gas flow path, and there is no risk of temperature unevenness occurring in the gas flow path.

[0034] In this manner, the connecting pipe 5 is fitted into the openings 12, 12 provided at both ends in the longitudinal direction of the piping body 2 accommodating the heating element 18 and the inner plate 4.

[0035] As shown in Figure 5, the connecting pipe 5 is made of a metal material such as stainless steel (SUS), and has a cylindrical fitting portion 21 that fits into the piping main body 2, and a brim-shaped flange portion 22 provided at one end of the fitting portion 21.

[0036] The fitting portion 21 is formed in a cylindrical shape with a hollow interior. The fitting portion 21 has an outer diameter slightly smaller than the inner diameter of the piping main body 2, and is fitted into the opening 12 of the piping main body 2. The fitting portion 21 is also formed in a cylindrical shape with a thickness of approximately 5.0 mm between the inner and outer circumferential surfaces. However, the thickness of the fitting portion 21 is not limited to this, and may be any thickness as long as it is formed to a thickness that ensures a sufficient flow path area for gas flow and is sufficiently warmed by the heat from the heating element 18.

[0037] The flange portion 22 is a disk-shaped expanded portion that protrudes radially outward from the fitting portion 21, and is formed as part of the connecting pipe 5. As shown in FIG. 2, the flange portion 22 has a plurality of mounting holes 23 and a plurality of fixing holes 24 at predetermined positions on its annular surface.

[0038] The connecting pipes 5, 5 configured in this manner are attached to the openings 12, 12 at both ends in the longitudinal direction of the piping body 2 so that the fitting portions 21 face each other, as shown in FIG.

[0039] In addition, the connecting pipe 5 is fixed integrally with the pipe main body 2 by aligning the fastening hole portion 14 of the pipe main body 2 with the fixing hole 24 of the flange portion 22, inserting a fixing means such as a bolt into the fastening hole portion 14, and tightening its tip portion into the fixing hole 24.

[0040] 5, the fitting portion 21 of the connecting pipe 5 forms a double-pipe structure with the piping main body 2 and the connecting pipe 5. The heating element 18, the heater wire 19, and the inner plate 4 are provided in a fitting space 25 formed by the inner peripheral surface of the piping main body 2, the outer peripheral surface of the fitting portion 21 constituting the connecting pipe 5, and the flange portion 22. The fitting space 25 may be formed to have a gap large enough to accommodate the heating element 18, the heater wire 19, and the inner plate 4, and is preferably formed with a gap large enough to allow contact between the outer peripheral surface of the fitting portion 21 and the inner plate 4. By providing the fitting portion 21 and the inner plate 4 in contact with each other in this manner, heat generated by the heating element 18 is efficiently transferred to the fitting portion 21 via the inner plate 4, and the inner peripheral surface of the fitting portion 21 is efficiently heated, preventing deposits from adhering.

[0041] The heater wire 19 of the heater 3 extends from the fitting space 25 through the heater wire lead-out portion 11 to a connector 20 provided radially outside the piping main body 2 and is connected to the power supply connector 20 fixed to the outside of the piping main body 2. At this time, the heater wire lead-out portion 11 of the heater 3 is covered by the cover body 10, and the heater wire 19 is sandwiched between the piping main body 2 and the cover body 10. In this way, heat loss from the small gap between the heater wire lead-out portion 11 and the cover body 10 is suppressed, and the fitting space 25 and the fitting portion 21 are efficiently heated. This makes it possible to efficiently heat the gas flow path.

[0042] Furthermore, a sealing portion 28 is provided at the tip of the fitting portion 21 fitted into the piping body 2, and closes the opening of the fitting space 25. In other words, the fitting space 25 is formed by closing the gap formed between the tip of the fitting portion 21 and the inner plate 4 with the sealing portion 28. The sealing portion 28 is formed, for example, by applying a sealant made of a material with excellent heat resistance, such as silicone.

[0043] In this way, by closing the fitting space 25 with the sealing portion 28, it is possible to prevent the gas flowing through the flow path from entering the fitting space 25, and to minimize the risk of the gas coming into contact with the heating element 18, which is provided in the fitting space 25 with a portion exposed. Note that the sealing portion 28 is made of a material with a certain degree of adhesive strength, such as silicone, but when attaching or detaching the piping main body 2 and the connecting pipe 5, the inner plate 4 and the heating element 18 can be easily removed from the connecting pipe 5 by cutting it with a cutter or the like.

[0044] A thermostat 31 is also provided on the outer peripheral surface of the piping body 2. The heating temperature of the heating element 18 is controlled by the thermostat 31 provided on the outer peripheral surface of the piping body 2. That is, the thermostat 31 controls the power supply to the heating element 18 so that the temperature of the piping body 2 is maintained within a predetermined range (for example, 120°C to 140°C). For example, the thermostat 31 operates to disconnect contacts provided within the thermostat 31 to stop the supply of power to the heating element 18 when the temperature of the piping body 2 reaches 140°C or higher, and to connect contacts provided within the thermostat 31 to allow power to pass through when the temperature of the piping body 2 falls below 120°C. In this way, the power supply to the heating element 18 is controlled to maintain the piping body 2 at a predetermined temperature, prevent the temperature of the inner plate 4 from falling below the predetermined temperature, and prevent damage to the heating element 18 due to excessive heat. That is, by controlling the temperature of the pipe body 2 using the thermostat 31, the amount of heat generated by the heating element 18 is controlled, and the temperature of the inner plate 4 which functions as a gas flow path is controlled.

[0045] In addition, an overheating detection temperature sensor 32, such as a heat collecting plate, is provided between the inner surface of the piping body 2 and the outer circumferential surface of the heating element 18. This configuration allows the overheating detection temperature sensor 32 to accurately detect the temperature of the heating element 18. The overheating detection temperature sensor 32 functions to prevent the heating element 18 from being damaged by self-heating when the thermostat 31 becomes inoperable due to damage or other reasons. The overheating detection temperature sensor 32 is connected to an external control device, and temperature information of the heating element 18 detected by the overheating detection temperature sensor 32 is transmitted to the control device. If the control device detects that the surface temperature of the heating element 18 detected by the overheating detection temperature sensor 32 is, for example, 180°C or higher, it stops supplying power to the heating element 18. Note that if the overheating detection temperature sensor 32 stops the power supply from the control device to the heating element 18, power re-supply to the heating element 18 is not performed because a malfunction has occurred in the thermostat 31 provided outside the piping body 2.

[0046] Furthermore, in the piping unit 1 described in this embodiment, a temperature control temperature sensor 33 is disposed in the downstream piping 29 or the like connected to the downstream side of the piping main body 2. The temperature control temperature sensor 33 is connected to a control device provided outside the piping main body 2, and a signal detected by the temperature control temperature sensor 33 is transmitted to the control device.

[0047] In this way, the temperature of the gas can be confirmed by measuring the temperature of the internal space of the downstream pipe 29 connected to the pipe main body 2 with the temperature control temperature sensor 33. For example, by installing the temperature control sensor inside the downstream pipe or at any desired location and measuring the local actual temperature relative to the set temperature of the heater 3, it is possible to eliminate instability in temperature control and stably heat the entire gas flow path. Such a configuration of the temperature detection section improves the stability of the measured temperature and ensures temperature reproducibility, thereby improving the temperature uniformity throughout the entire gas flow path.

[0048] With the piping unit 1 configured in this manner, by heating the inside of the piping main body 2 with the heating element 18, it is possible to efficiently heat the inner plate 4, which forms the piping internal space 26, which is the gas flow path, and the fitting portion 21 of the connecting pipe 5, and to quickly bring the inner plate 4 and the fitting portion 21 to the target temperature. Furthermore, by accommodating the heating element 18 and the inner plate 4 inside the piping main body 2 in a manner that brings the inner plate 4 into contact with the planar heating element 18 as much as possible, it is possible to uniformly heat the inner plate 4 and the fitting portion 21, which form the gas flow path, and to prevent deposits from forming in specific locations in the piping internal space 26.

[0049] As a result, for example, it is possible to prevent the pipe main body 2 from being clogged with deposits, or to sufficiently lengthen the time until clogging occurs, thereby improving the availability of the device.

[0050] Furthermore, the piping unit 1 described in this embodiment is configured so that the heating element 18 and inner plate 4 housed in the piping main body 2 can be retained within the piping main body 2 by removably fitting the connecting pipe 5 to the piping main body 2. Therefore, if a break occurs in the heater 3, the fastening members that secure the piping main body 2 and the connecting pipe 5 can be loosened to separate them, the faulty heater 3 can be removed, a new heater 3 can be set, the flange portion 22 can be aligned again, and the connecting pipe 5 can be secured to the piping main body 2 with the fastening members, thereby repairing the breakage. In other words, in the piping unit 1 of this embodiment, the heating element 18 that constitutes the heater 3 for uniformly heating the gas flow path and the inner plate 4 that has elastic properties to fit tightly to the heating element 18 are housed inside the piping main body 2 without using adhesive, the connecting pipe 5 is inserted into openings provided on both side ends of the piping main body 2 that houses the heating element 18 and the inner plate 4, and the opening of the fitting space 25 surrounded by the inner surface of the piping main body 2, the fitting portion 21 of the connecting pipe 5, and the flange portion 22 is closed with a sealing portion 28 formed to span the tip of the fitting portion 21 and the inner plate 4, which is a simple configuration that makes repairs and maintenance easy in the event of a malfunction.

[0051] Furthermore, even in the configuration in which the joint portion of the ends 4a, 4a of the inner plate 4 is covered with the sealing member 27, the inner plate 4 is deformed from a thin plate state into a cylindrical state while being accommodated inside the piping main body 2, and the joint portion of the ends 4a, 4a is adhered with the sealing member 27, so the inner plate 4 can be easily removed from inside the piping main body 2, and repairs and restorations can be easily performed in the event of a malfunction, regardless of whether the sealing member 27 is present or not.

[0052] The piping unit according to the present invention can be applied to devices for manufacturing semiconductors, liquid crystals, etc. It can also be used in other devices, etc., as long as it is necessary to heat the inner wall surfaces that define the flow paths or spaces.

[0053] It should be noted that the present invention is not limited to the above-described embodiments, but also includes configurations in which the components disclosed in the above-described embodiments are mutually substituted or the combinations are changed, known inventions, and configurations in which the components disclosed in the above-described embodiments are mutually substituted, etc. Furthermore, the technical scope of the present invention is not limited to the above-described embodiments, but extends to the matters set forth in the claims and their equivalents. [Explanation of symbols]

[0054] 1 Piping unit 2. Piping body 2a end 3 Heater 4 inner plate 4a end 5 Connecting pipe 10 Cover body 11 Heater wire outlet 12 Opening 13 Protrusion 14 Fastening hole 15 Support stay 16 Mounting part 16a Connector insertion part 17 Connector support 18 Heating element 18a End 18b Power supply unit 19 Heater wire 20 Connectors 21 Fitting part 22 Flange 23 Mounting holes 24 Fixing hole 25 Mating space 26 Piping internal space 27 Sealing material 28 Sealing section 29 Downstream piping 31 Thermostat 32 Temperature sensor for detecting excessive temperature rise 33 Temperature sensor for temperature control

Claims

1. A piping body through which gas passes; a heater having a planar heating element disposed within the piping body; a thin inner plate that covers at least a portion of the heating element and covers the piping main body from the inside; a connecting pipe having flange portions protruding radially outward from the piping body and fitted to the piping body at both ends thereof so as to face each other; A piping unit comprising:

2. The heating element is The pipe body is disposed adjacent to an inner wall surface thereof, The heater is a heater wire for energizing the heating element; a connector provided on the outside of the piping body and adapted to receive connection of one end of the heater wire; 2. The piping unit according to claim 1, further comprising:

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