Nozzle for plasma irradiation device and plasma irradiation device

Abstract

To provide a nozzle of a plasma irradiation device having a structure in which plasma is emitted from the nozzle, capable of performing plasma treatment on a long treatment object more uniformly, and a plasma irradiation device using the nozzle.SOLUTION: A nozzle 2 is provided with a cylindrical jig portion 23 having an opening at at least one end in an axial direction for inserting and removing an object to be processed. The jig portion 23 has a through-hole 23a formed for guiding plasma into the jig portion 23, causing the plasma flow to swirl within the jig portion 23.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a nozzle for a plasma irradiation device and a plasma irradiation device equipped with the nozzle. [Background technology]

[0002] Plasma has been irradiated onto long objects to be treated to modify their surfaces. For example, plasma has been irradiated onto fishing line to clean the surface or to make the surface hydrophilic and improve the adhesion of paint. One device for irradiating plasma onto such long objects is disclosed in Patent Document 1, which includes a cylindrical treatment vessel having multiple ring-shaped electrodes on the outer periphery thereof, and which applies power from the ring-shaped electrodes while supplying gas into the treatment vessel to generate plasma within the treatment vessel while passing the long object through the treatment vessel from one end to the other in the longitudinal direction. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-97904 Summary of the Invention [Problem to be solved by the invention]

[0004] When plasma processing the surface of a long object to be processed, such as a fishing line, it is necessary to perform plasma processing more uniformly on the surface of the object to be processed. To achieve this, in the plasma processing apparatus described in Patent Document 1, since there is a difference in plasma density between the center and the vicinity of the inner wall inside a cylindrical processing vessel where plasma is generated, a plurality of disk-shaped guide members are provided inside the processing vessel, and these guide members guide the long object to be processed only near the inner wall, thereby achieving uniform plasma processing on the surface of the long object to be processed.

[0005] In recent years, in particular with regard to plasma irradiation devices based on non-thermal equilibrium plasma, known as low-temperature plasma or atmospheric pressure plasma, plasma irradiation devices with a structure in which plasma is emitted from a nozzle have become known in addition to the plasma processing device described in Patent Document 1. Such plasma irradiation devices with a structure in which plasma is emitted from a nozzle have the advantages of being smaller in size, consuming less power, and being usable for a wider range of applications than the plasma processing device described in Patent Document 1.

[0006] Even in plasma irradiation devices with a structure that emits plasma from a nozzle, there is a need to irradiate plasma on long objects to be treated. For example, since plasma devices with this structure do not reach high temperatures during plasma treatment, they are preferable for use on long resin objects such as fishing line, as this prevents the resin from melting or changing in quality. Furthermore, plasma can be irradiated on objects with curved or tapered shapes. However, because a normal nozzle emits plasma from an opening at the tip, it is unavoidable that the treatment is performed at a "point," making it difficult to perform uniform plasma treatment on a long object to be treated.

[0007] The present invention aims to provide a nozzle for a plasma irradiation device that can perform more uniform plasma treatment on a long-sized treatment object in a plasma irradiation device that has a structure in which plasma is emitted from a nozzle, and a plasma irradiation device that uses the nozzle. [Means for solving the problem]

[0008] The present invention includes the following [1] to

[15] . [1] A nozzle from which plasma is emitted in a plasma irradiation device, A nozzle of a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, wherein a through hole is formed in the jig part for guiding plasma into the jig part, and the plasma flow is swirled within the jig part. [2] A nozzle of the plasma irradiation device according to [1], wherein the penetration direction of the through hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig part. [3] A nozzle of the plasma irradiation device according to [1], wherein the penetration direction of the through hole is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig part. [4] A nozzle from which plasma is emitted in a plasma irradiation device, A nozzle of a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, wherein a through hole is formed in the jig part for guiding plasma into the jig part, and the penetration direction of the through hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig part. [5] A nozzle from which plasma is emitted in a plasma irradiation device, A nozzle for a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, wherein a through hole is formed in the jig part for guiding plasma into the jig part, and the penetration direction of the through hole is inclined with respect to a direction perpendicular to the axis in a cross section parallel to the axis of the jig part. [6] A nozzle of the plasma irradiation device according to [1], [4] or [5], in which a hole is formed in the jig portion for sucking in and discharging gas from within the jig portion. [7] The nozzle of the plasma irradiation device according to [1], [4] or [5], in which a plurality of the through holes are formed in the axial direction of the jig part. [8] A nozzle of a plasma irradiation device according to [1], [4] or [5], wherein the jig part has a tapered shape in a cross section parallel to the axis of the jig part, the inner diameter of which gradually widens toward the opening through which the object to be treated is extracted. [9] The nozzle of the plasma irradiation device of [1], [4] or [5], wherein the jig part has an opening or a plurality of protrusions or grooves formed on the inner peripheral surface for guiding the object to be treated.

[10] The nozzle of the plasma irradiation device of [1], [4] or [5], wherein at least a part of the jig part is transparent or translucent, and the jig part is equipped with a spectrometer or a photodetector.

[11] A nozzle of a plasma irradiation device according to [1], [4] or [5], wherein the nozzle comprises a nozzle body that generates plasma, a connection part connected to the nozzle body, and a jig part that is connected to the connection part, and the connection part and the jig part are detachable from the nozzle body.

[12] A plasma irradiation device equipped with a nozzle as described in [1], [4] or [5].

[13] A jig that is detachably attached to a nozzle from which plasma is emitted in a plasma irradiation device, A nozzle jig for a plasma irradiation device, characterized by being cylindrical and having an opening at at least one end in the axial direction for inserting and removing the object to be treated, and having a through hole formed to guide plasma into the jig portion.

[14] A nozzle jig for the plasma irradiation device of

[13] , in which the plasma flow swirls within the cylindrical body.

[15] A jig for a nozzle of a plasma irradiation device according to

[13] , wherein the penetration direction of the through hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig, or is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig. [Effects of the Invention]

[0009] According to the nozzle of the plasma irradiation device and the plasma irradiation device of the present invention, it is possible to perform plasma treatment on an elongated treatment object more uniformly or efficiently. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a configuration diagram of a plasma irradiation device according to an embodiment of the present invention. [Figure 2] FIG. [Figure 3] 3A and 3B are schematic cross-sectional views of the jig part 23, with FIG. 3A showing a cross section perpendicular to the axis of the jig part 23 and FIG. 3B showing a cross section parallel to the axis of the jig part 23. FIG. [Figure 4]These are cross-sectional views showing modified examples of the jig portion 23, where Figure 4(a) is a schematic cross-sectional view perpendicular to the axis of the jig portion 23(I), Figure 4(b) is a schematic cross-sectional view perpendicular to the axis of the jig portion 23(II), and Figure 4(c) is a schematic cross-sectional view parallel to the axis of the jig portion 23(III). [Figure 5] 5(a) and 5(c) are cross-sectional views showing another modified example of the jig portion 23, where FIG. 5(a) is a schematic cross-sectional view perpendicular to the axis of the jig portion 23(IV), FIG. 5(b) is a schematic cross-sectional view parallel to the axis of the jig portion 23(IV), and FIG. 5(c) is a schematic cross-sectional view parallel to the axis of the jig portion 23(V). [Figure 6] 10 is a schematic cross-sectional view of a jig portion 23(VI) which is another modified example of the jig portion 23, taken along a line parallel to the axis thereof. FIG. [Figure 7] 10 is a schematic cross-sectional view of a jig portion 23(VII) which is another modified example of the jig portion 23, taken along a line parallel to the axis thereof. FIG. [Figure 8] These are cross-sectional views showing another modified example of the jig portion 23, where Figure 8(a) is a schematic cross-sectional view parallel to the axis of the jig portion 23(VIII), and Figure 8(b) is a schematic cross-sectional view parallel to the axis of the jig portion 23(IX). [Figure 9] These are cross-sectional views showing another modified example of the jig part 23, where Figure 9(a) is a schematic cross-sectional view parallel to the axis of the jig part 23(X), and Figure 9(b) is a schematic cross-sectional view parallel to the axis of the jig part 23(XI). DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the nozzle of the plasma irradiation device and the plasma irradiation device will be described in more detail with reference to the drawings.

[0012] The irradiation device of this embodiment is preferably based on the principle of non-thermal equilibrium plasma, also known as low-temperature plasma or atmospheric pressure plasma. In the plasma irradiation device of this embodiment, plasma is generated by applying a voltage to a gas continuously supplied into the device. The gas species is not particularly limited, and for example, one selected from the group consisting of argon gas, nitrogen gas, oxygen gas, carbon dioxide gas, helium gas, and air can be used. These gases may be used alone, or a mixture of multiple gases may be used. Gases containing the above gases and water vapor can also be used. An example of a plasma irradiation device based on the principle of non-thermal equilibrium plasma is the atmospheric pressure low-temperature plasma device SPR-DFMJ from Sunline Co., Ltd., but the device is not limited to this.

[0013] FIG. 1 shows an example of the configuration of a plasma irradiation device according to this embodiment. The plasma irradiation device 1 shown in FIG. 1 is manufactured by Plasma Concept Tokyo Co., Ltd. The plasma irradiation device 1 includes a nozzle 2 that generates and irradiates plasma, and the plasma is irradiated from this nozzle 2. This nozzle 2 will be described in detail later. Furthermore, a gas cylinder 3 containing one or more gas types is provided as a gas supply unit that supplies gas to the nozzle 2. The gas cylinder 3 and the nozzle are connected by a gas flow path, and a gas flow meter 4 is provided in the gas flow path. The gas flow rate is measured by this gas flow meter 4, and the gas flow rate is appropriately adjusted by manual or automatic control. The illustrated gas flow meter 4 includes a means for controlling such gas flow rate.

[0014] To generate plasma, an electrode is provided inside the nozzle 2, and plasma (preferably atmospheric pressure plasma) is generated by supplying appropriate power to the gas introduced into the nozzle 2, and the plasma is then emitted from the nozzle opening. A known structure can be used for generating plasma. A plasma generation power supply 5 is provided, which is connected to the electrode of the nozzle 2 and supplies power. To generate plasma appropriately, a control unit 6 is connected to the plasma generation power supply 5. This control unit 6 controls the power conditions of the plasma generation power supply 5. Note that the control unit 6 shown in FIG. 1 controls the power conditions. In another embodiment, the control unit 6 can be configured to control both the power conditions and the gas flow rate, and the control unit 6 can be connected to the plasma generation power supply 5 and a gas flow meter 4 to control the gas flow rate.

[0015] 2 shows a front view of the nozzle 2. The nozzle 2 has a generally cylindrical nozzle body 21. The nozzle body 21 is provided with a gas inlet 21a and a power terminal 21b, and an electrode electrically connected to the terminal 21b is provided in the internal space of the nozzle body 21. An opening (not shown in the figure) is formed at one end of the nozzle body 21 in the axial direction, and plasma generated in the internal space of the nozzle body 21 is emitted from this opening. The number of openings is not limited to one, and there may be multiple openings.

[0016] The nozzle 2 is provided with a connecting portion 22 at the end of the nozzle main body 21 where the opening is located. The connecting portion 22 is a portion that connects the nozzle main body 21 to a jig portion 23, which will be described next. The connecting portion 22 has a recess that accommodates the end of the nozzle main body 21, and the tip of the nozzle main body 21, including the opening, fits into this recess of the connecting portion 22. An opening 22a is formed in the bottom surface of the recess of the connecting portion 22 and is positioned coaxially with the opening at the end of the nozzle main body 21 when the nozzle main body 21 is fitted, and this opening 22a guides the plasma generated in the nozzle main body 21 to the jig portion 23, which will be described next.

[0017] The jig portion 23 has openings at both axial ends and is generally cylindrical with a hollow interior, preferably a cylinder. The outer shape may be a rectangular tube, but it is preferable that at least the hollow interior is approximately cylindrical. The inner diameter is large enough to allow insertion of at least a long object to be processed m. The outer diameter of the long object to be processed can be, for example, approximately 0.5 to 50 mm. By appropriately selecting and adjusting the inner diameter of the jig portion 23 and the plasma gas flow rate introduced into the jig portion 23 according to the outer diameter of such an object to be processed, appropriate plasma processing can be performed. The length L of the jig portion 23 is not particularly limited. The length L of the jig portion 23 is related to the length of the object to be processed m that can be plasma processed. Therefore, by adjusting the length L, the length of the object to be processed m that can be plasma processed can be adjusted. Materials for the jig portion 23 include metals such as stainless steel and aluminum, resins, glass, and ceramics.

[0018] The jig portion 23 has a through hole 23a formed therein that is coaxial with the opening formed in the bottom surface of the recess of the connection portion 22, and the plasma generated in the nozzle main body portion 21 is introduced into the internal space of the jig portion 23 through this through hole 23a.

[0019] With plasma introduced into the internal space of the jig part 23, the surface of the object to be treated m can be subjected to plasma treatment by inserting the object to be treated m into the internal space of the jig part 23 from an opening at one axial end of the jig part 23. Furthermore, if the object to be treated m is long, the entire surface of the long object to be treated m can be continuously plasma treated by inserting the object to be treated m into the internal space of the jig part 23 from the opening at one axial end of the jig part 23, moving the object to be treated m through the axial direction of the jig part 23 within the internal space, and removing it from the opening at the other axial end of the jig part 23.

[0020] The nozzle 2 of this embodiment swirls the plasma flow within the internal space of the jig portion 23. Swirling refers to the directional movement of all or part of the plasma (gas) within the internal space, preferably the formation of a flow that rotates around an axis along the circumferential direction of the wall surface of the internal space, and may include turbulence. Research by the inventors has revealed that swirling the plasma flow within the jig portion 23 is essential for uniform plasma processing of the surface of a long object to be processed within the jig portion 23. It is estimated that the plasma flow will swirl within the internal space of the jig portion 23 if the penetration direction of the through-hole 23a of the jig portion 23 is inclined relative to the diameter direction in a cross section perpendicular to the axis of the jig portion 23, or if the penetration direction is inclined relative to the direction perpendicular to the axis in a cross section parallel to the axis of the jig portion 23.

[0021] In order to swirl the plasma flow within the jig part 23, in this embodiment, the penetration direction of the through holes 23a of the jig part 23 is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig part 23. This structure will be described with reference to FIG.

[0022] 3A and 3B are schematic cross-sectional views of the jig portion 23, with Fig. 3A showing a cross section perpendicular to the axis of the jig portion 23 and Fig. 3B showing a cross section parallel to the axis of the jig portion 23. As shown in Fig. 3A, the penetration direction of the through hole 23a is inclined with respect to the diameter direction, and the angle α formed between the penetration direction and the diameter direction has a positive value. Here, the penetration direction refers to the axial direction of the through hole 23a, and if the through hole 23a is bent or curved, it refers to the axial direction at the portion where the through hole 23a contacts the inner surface of the jig portion 23.

[0023] Because the penetration direction of through-hole 23a is inclined with respect to the diameter direction, plasma P swirls within jig portion 23 along the inner surface of jig portion 23, as shown by the arrows in FIG. 3(a) indicating the flow direction of plasma P. In a cross section parallel to the axis of jig portion 23 in FIG. 3(b), plasma P swirls along the inner surface of jig portion 23 so as to spread from through-hole 23a toward both ends within jig portion 23. The same applies when a processing object m is inserted into jig portion 23, and plasma P swirls along the inner surface of jig portion 23. Therefore, plasma can be more uniformly brought into contact with the entire surface of processing object m inserted into jig portion 23, and ultimately the surface of processing object m can be more uniformly plasma-treated.

[0024] Furthermore, since the penetration direction of the through hole 23a is inclined with respect to the diameter direction, the flow pressure of the plasma and the gas accompanying the plasma that the object to be processed m receives is reduced, thereby reducing the vibration of the object to be processed m and allowing the long object to be processed m to be moved stably within the jig section 23.

[0025] If the penetration direction of the through hole 23a is the diameter direction, i.e., if the angle α between the penetration direction and the diameter direction is 0°, the plasma P will hardly swirl along the inner surface of the jig part 23, and therefore the plasma density of the plasma that comes into contact with the part of the object to be treated m inserted into the jig part 23 will be different between the part facing the through hole 23a and the other part, making it difficult to uniformly plasma treat the surface of the object to be treated m.

[0026] The angle α between the penetration direction and the diameter direction is preferably 5 to 60°, more preferably 10 to 40°, and even more preferably 15 to 30°.

[0027] The shape of the through-hole 23 is not particularly limited. It may be a round hole, a polygonal hole, or a slit-shaped hole. The number of through-holes 23 is not limited to one, and there may be multiple holes depending on the number of openings in the nozzle main body 21 that emit plasma.

[0028] There are other possible means for swirling the plasma flow within the jig section 23 besides the means described above with reference to Fig. 3, such as providing a rectifying member for changing the plasma flow within the jig section 23. However, the present embodiment shown in Fig. 3 is advantageous because it can reliably swirl the plasma flow within the jig section 23 with a simple structure.

[0029] The object m to be treated with plasma in the jig portion 23 of the nozzle 2 of this embodiment is not particularly limited, but a long object is preferable. Examples include thread (fishing line, etc.), filament, fiber, string, wire, tube, and rod. The outer diameter of the object m is assumed to be, for example, approximately 0.5 to 50 mm. However, the outer diameter of the object m is not limited to the range of approximately 0.5 to 50 mm. Examples of materials for the object m include, but are not limited to, resin, rubber, metal, glass, and ceramics. In the case of low-temperature plasma, the plasma emitted from the nozzle 2 is low temperature, which prevents melting or deterioration of resin, as occurs with high-temperature plasma. Therefore, the nozzle 2 of this embodiment is suitable for use with objects made of resin. The shape of the object m is not limited to a straight shape; it may be bent, curvilinear, or tapered.

[0030] When the object to be treated m is long, the nozzle 2 of this embodiment inserts the object to be treated m into the jig section 23 through one of the openings at both ends in the axial direction of the jig section 23, irradiates the object with plasma while continuously moving it within the jig section 23, and then removes it from the other opening, thereby enabling more uniform plasma treatment over the entire circumference and length of the object to be treated m. For plasma treatment of such a long object to be treated m, known devices for feeding and winding long objects can be provided near the openings at both ends of the jig section 23.

[0031] If it is desired to perform plasma treatment only on the tip of the object to be treated m, this can be achieved by inserting the object to be treated m into the jig section 23 through one of the openings at both ends of the jig section 23 in the axial direction, irradiating it with plasma within the jig section 23, and then removing it from the same opening.

[0032] Fig. 4 shows modified examples of the jig part 23. Fig. 4(a) is a schematic cross-sectional view perpendicular to the axis of the jig part 23(I), Fig. 4(b) is a schematic cross-sectional view perpendicular to the axis of the jig part 23(II), and Fig. 4(c) is a schematic cross-sectional view parallel to the axis of the jig part 23(III).

[0033] The jig portion 23(I) in FIG. 4(a) is an example in which a plurality of through holes 23a are formed. The jig portion 23(I) is configured such that the through holes 23a are formed in a plurality of directions so that the swirling of the plasma flow is in the same direction. This configuration, in addition to the effects of the jig portion 23 shown in FIG. 3, enables more uniform plasma processing of the surface of the object to be processed (m). Furthermore, the flow rate of the swirling flow of the plasma P can be increased, which also enables more uniform plasma processing of the surface of the object to be processed (m). The angle α (see FIG. 3(a)) between the through direction and the diameter direction of each of the plurality of through holes 23a may be the same or different. Furthermore, in FIG. 4(a), two through holes 23a are formed at positions opposite each other when viewed from the center of the jig portion 23, but the through holes 23a may be formed at any position. Also, in Figure 4(a), the multiple through holes 23a are formed on the same plane in a cross section perpendicular to the axis of the jig portion 23(I), but the multiple through holes 23a may be formed at different positions from each other in the axial direction of the jig portion 23(I).

[0034] The jig portion 23(I) in FIG. 4(a) can be realized by forming a plurality of plasma flow paths connected to the openings of the nozzle main body portion 21 in the connection portion 22 and the jig portion 23(I), and connecting the end of each plasma flow path to the through-hole 23a.

[0035] The jig member 23(II) in FIG. 4(b) is an example in which the jig member 23(II) and the connecting member 22 are integrally formed, resulting in no clear distinction between the plasma flow path of the connecting member 22 and the through-hole 23b. If the plasma flow path of the connecting member 22 is defined as the through-hole 23b, the illustrated through-hole 23b has a flow path that is bent midway. The axis of the through-hole 23b at the point where it contacts the inner surface of the jig member 23(II), i.e., the penetration direction of the through-hole 23b, is inclined with respect to the diameter direction of the jig member 23(II). This causes the plasma P to swirl within the jig member 23(II) along the inner surface of the jig member 23(II). Therefore, similar to the effect of the jig member 23 shown in FIG. 3, the plasma can be uniformly brought into contact with the entire surface of the workpiece m inserted into the jig member 23(II), thereby enabling uniform plasma processing of the surface of the workpiece m. In addition, since the plasma and gas flow pressure associated with the plasma that the object to be processed m receives are reduced, the vibration of the object to be processed m can be reduced, and the movement of the long object to be processed m within the jig section 23 can be carried out stably.

[0036] The jig portion 23(III) in Fig. 4(c) is an example in which the penetration direction of the through hole 23c is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig portion 23(III). In Fig. 4(c), the angle β between the penetration direction and the direction perpendicular to the axis has a positive value. Here, the penetration direction refers to the axial direction of the through hole 23c. If the through hole 23c is bent or curved, it refers to the axial direction at the portion where the through hole 23c contacts the inner surface of the jig portion 23.

[0037] The through hole 23c does not need to be inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig portion 23(III), but is preferably inclined with respect to the diameter direction, similar to the jig portion 23 shown in Fig. 3(a). Therefore, the plasma P swirls within the jig portion 23(III) along the inner surface of the jig portion 23(III), similar to the case of the jig portion 23 shown in Fig. 3(a). Furthermore, since the penetration direction of the through hole 23c of the jig portion 23(III) is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig portion 23(III), the plasma P moves mainly from the through hole 23c within the jig portion 23 toward the opening at one end while swirling along the inner surface of the jig portion 23(III). Here, if the object to be treated m is inserted through the opening at the end toward which the plasma P is directed, or inserted and withdrawn through the opening at the other end, the direction in which the plasma P swirls and moves toward the end and the direction of the airflow that flows inward from the end of the jig section 23(III) due to the movement of the object to be treated are opposite to each other, thereby lengthening the residence time of the plasma in the system. Therefore, in addition to the effect of the jig section 23 shown in FIG. 3, the plasma can be more uniformly brought into contact with the entire surface of the object to be treated m inserted into the jig section 23(III), thereby enabling more uniform plasma treatment of the surface of the object to be treated m. Furthermore, the plasma treatment efficiency is improved.

[0038] The angle β formed between the penetration direction and the direction perpendicular to the axis is preferably 0 to 50°, more preferably 5 to 30°, and even more preferably 5 to 20°.

[0039] Fig. 5 shows another modified example of the jig part 23. Fig. 5(a) is a schematic cross-sectional view perpendicular to the axis of the jig part 23(IV), Fig. 5(b) is a schematic cross-sectional view parallel to the axis of the jig part 23(IV), and Fig. 5(c) is a schematic cross-sectional view parallel to the axis of the jig part 23(V).

[0040] 5(a) and 5(b) is an example in which a hole 23d is formed to suck and exhaust gas inside the jig part 23(IV). The hole 23d to suck and exhaust gas is connected to a known suction and exhaust device.

[0041] The jig portion 23(IV) has a through hole 23c for guiding plasma, similar to the jig portion (III) in Fig. 4(c). The through hole 23c has a penetration direction that is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig portion 23(IV) (Fig. 5(a)), and is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig portion 23(IV) (Fig. 5(b)).

[0042] The jig section 23(IV) has the same effect as the jig section 23(IV) shown in FIG. 4(c) due to the through-hole 23c formed therein. Furthermore, the formation of the hole 23d for sucking and exhausting gas increases the flow rate of the swirling flow of the plasma P. Therefore, in addition to the effect of the jig section 23(III) shown in FIG. 4(c), plasma processing can be performed over a longer range in the longitudinal direction of the object to be processed. Furthermore, the gas sucked through the hole 23d can be recovered and reused.

[0043] The penetration direction of holes 23d that draw in and exhaust gas is preferably inclined relative to the diameter direction as shown in Figure 5(a), as this allows for smooth gas intake and exhaust. However, the penetration direction may be the same as the diameter direction, and the number of holes 23d is not limited to one, and multiple holes 23d may be provided. Furthermore, holes 23d are preferably formed downstream of the swirling flow of plasma P relative to through-holes 23c as shown in Figure 5(b).

[0044] The jig part 23(V) in Fig. 5(c) is an example in which holes 23d for suctioning and discharging gas are formed, similar to the jig part 23(IV) in Fig. 5(a) and (b). Therefore, the jig part 23(V) has the same effect as the jig part 23(IV) in Fig. 5(a) and (b). The difference between jig portion 23(V) and jig portion 23(IV) is that a wall 23e that seals the opening is provided at each of both axial ends of jig portion 23(V), and this wall 23e has an opening with a small gap between it and the object to be processed.

[0045] Walls 23e that seal the openings are provided at both axial ends of the jig part 23(V), and the small gaps at the openings formed in these walls 23e allow the pressure inside the jig part 23(V) to be reduced by differential evacuation. This increases the mean free path of the plasma inside the jig part 23(V), allowing for more uniform plasma processing over the entire circumference and length of the object to be processed inserted into or passing through the jig part 23(V).

[0046] Figure 6 shows another modified example of the jig part 23. Figure 6 is a schematic cross-sectional view parallel to the axis of the jig part 23(VI). The jig part 23(VI) in Figure 6 is an example in which the nozzle includes a plurality of nozzle main bodies 21, and a plurality of through holes 23a are formed in the axial direction of the jig part 23(VI), and each of the through holes 23a is connected to a respective one of a plurality of plasma flow paths that guide plasma from the plurality of nozzle main bodies 21.

[0047] The jig portion 23(VI) has a through hole 23a formed therein, and thus has the same effect as the jig portion 23 shown in FIG. 3 . In addition, the jig portion 23(VI) has a plurality of through holes 23a formed in the axial direction of the jig portion 23(VI), and each of the through holes 23a is connected to a plurality of plasma flow paths that guide plasma from the plurality of nozzle main bodies 21. Each of the plurality of nozzle main bodies 21 emits a different plasma, allowing a different plasma to be introduced into the jig portion 23(VI) from each of the plurality of through holes 23a. Therefore, different plasmas can be simultaneously irradiated along the longitudinal direction of the processing object. Differences in the plasmas include gas species, plasma generation conditions, temperature, and gas flow rate. The plurality of nozzle main bodies 21 can also emit the same plasma. In this case, plasma processing can be performed over a long range along the longitudinal direction of the processing object, improving plasma processing efficiency.

[0048] Fig. 7 shows another modified example of the jig part 23. Fig. 7 is a schematic cross-sectional view parallel to the axis of the jig part 23(VII). The jig part 23(VII) in Fig. 7 is an example having a tapered shape in which the inner diameter gradually widens toward the opening for extracting the processing object in the cross-section parallel to the axis of the jig part 23(VII).

[0049] The jig portion 23(VII) has a through-hole 23a formed therein, and thus has the same effect as the jig portion 23 shown in FIG. 3. Additionally, the jig portion 23(VII) has a tapered shape in a cross section parallel to the axis of the jig portion 23(VII), with the inner diameter gradually increasing toward the opening through which the object to be treated is extracted. Therefore, the swirling flow of plasma P within the jig portion 23(VII) generates a flow moving toward the opening at one end, specifically, toward the opening through which the object to be treated is extracted. This swirling flow of plasma P generates a negative pressure at the opening at the other end, specifically, the opening through which the object to be treated is inserted, generating a force that sucks the object to be treated from the opening into the jig portion 23(VII). Therefore, the object to be treated, such as gas, mist, powder, or particles, can be supplied to the jig portion 23(VII) through one opening without requiring a special feeding device, and can be plasma-treated. The plasma P can then be collected from another opening along with the swirling flow of plasma P. That is, the jig portion 23(VII) is not limited to long objects such as threads, but also expands the object to be treated m to gas, mist, powder, particles, and the like.

[0050] Fig. 8 shows another modified example of the jig part 23. Fig. 8(a) is a schematic cross-sectional view parallel to the axis of the jig part 23(VIII). Fig. 8(b) is a schematic cross-sectional view parallel to the axis of the jig part 23(IX).

[0051] The jig portion 23(VIII) in FIG. 8(a) is an example in which a protrusion 23f is provided on the inner peripheral surface of the jig portion 23(VIII).

[0052] The jig portion 23(VIII) has a through hole 23a and thus has the same effect as the jig portion 23 shown in FIG. 3. In addition, the jig portion 23(VIII) has multiple protrusions 23f in the axial direction of its inner circumferential surface. The protrusions guide the processing object m, preventing uneven movement within the jig portion 23. This reduces processing irregularities. Furthermore, because the jig portion 23(VIII) has multiple protrusions 23f, even if the processing object m comes into contact with the inner circumferential surface of the jig portion 23(VIII) when its diameter is slightly smaller than the inner diameter of the jig portion 23(VIII) or when the processing object m's movement direction within the jig portion 23(VIII) is unstable, the contact occurs only with the tips of the protrusions 23f on the inner circumferential surface, preventing the processing object m from adhering to the inner circumferential surface. The plasma P can swirl through the gaps between the multiple protrusions 23f. Therefore, the swirling flow of the plasma P is not impeded, and the plasma processing can be performed uniformly all around the object to be processed.

[0053] The protrusions 23f can be formed, for example, by forming spiral grooves on the inner circumferential surface. Therefore, the same effect can be expected when grooves are formed on the inner circumferential surface instead of the protrusions 23f. The protrusions 23f are not limited to being spirally shaped, and may also be formed, for example, in a dotted pattern on the inner circumferential surface. By circulating the plasma along the spirally arranged protrusions or spiral grooves, processing unevenness can be reduced.

[0054] The height of the protrusions, i.e., the length from the base to the tip of the protrusions, can be, for example, about 0.1 to 5 mm. It is preferably about 0.5 to 3 mm, and more preferably about 0.7 to 2 mm. If the height of the protrusions is too low, the swirling flow of the plasma P may be hindered. If the height of the protrusions is too high, the irradiation distance between the plasma and the object to be treated increases, which is thought to work to reduce the plasma treatment efficiency.

[0055] The jig part 23(IX) in Figure 8(b) is an example in which a wall 23g that seals an opening is provided at each of both axial ends of the jig part 23(IX), and this wall 23g has an opening with a small gap between it and the object to be processed.

[0056] The jig section 23(IX) has a through-hole 23a formed therein, and thus has the same effect as the jig section 23 shown in FIG. 3. In addition, the jig section 23(IX) has a wall 23g that seals the opening at each of both axial ends of the jig section 23(IX), and these walls 23g have openings with small gaps between them and the object to be treated. This opening guides the object to be treated m, and prevents uneven movement within the jig section 23. This reduces processing unevenness. It also lengthens the residence time of the plasma within the jig section 23(IX). This allows the surface of the object to be treated m to be more uniformly plasma-treated, and improves plasma processing efficiency.

[0057] 9 shows another modified example of the jig part 23. Fig. 9(a) is a schematic cross-sectional view parallel to the axis of the jig part 23(X). Fig. 9(b) is a schematic cross-sectional view parallel to the axis of the jig part 23(XI).

[0058] The jig part 23(X) in FIG. 9(a) is an example in which the jig part 23(X) is transparent or translucent, and is provided with a spectroscope or a photodetector 24.

[0059] The jig portion 23(X) has a through-hole 23c formed therein, and thus has the same effect as the jig portion 23(III) shown in FIG. 4(c). In addition, at least a portion of the cylindrical body constituting the jig portion 23(X) is transparent or translucent, and a spectroscope or photodetector 24 is provided to connect to the transparent or translucent portion. This allows the state of plasma during plasma processing to be monitored with the spectroscope or photodetector 24. When at least a portion of the cylindrical body is transparent, the plasma excitation light itself can be monitored. When at least a portion of the cylindrical body is translucent, monitoring can be performed by detecting the diffused light of the plasma.

[0060] Examples of materials for a cylindrical body having at least a portion that is transparent or translucent include glass, resin, and ceramics. Glass is a preferred material due to its availability. The cylindrical body may be transparent, such as clear glass or transparent plastic, or translucent, such as frosted glass or milky white plastic. "Transparent" refers to a material that allows light to pass through it, with extremely high transmittance, allowing the viewer to see through it. "Translucent" refers to a material that allows light to pass through, but that diffuses the transmitted light or has low transmittance, making it impossible to clearly or completely recognize the shape of the other side through the material. At least a portion of the cylindrical body may be transparent or translucent, and the entire body may be transparent or translucent. When the cylindrical body is partially transparent, for example, a transparent glass window for a spectrometer or photodetector 24 may be provided in the cylindrical body.

[0061] 9(a), the spectrometer or photodetector monitors the state of plasma in the jig section 23(X) from outside the cylinder through the transparent or translucent cylinder. The spectrometer or photodetector may be attached directly to the cylinder, or indirectly via an optical fiber attached to the cylinder. The spectrometer or photodetector 24 may be a known one.

[0062] The jig part 23(XI) in FIG. 9(b) is an example in which the jig part 23(XI) is translucent and is provided with a spectroscope or a photodetector 24. The jig portion 23(XI) has the through-hole 23c formed therein, and therefore has the same effect as the jig portion 23(III) shown in Fig. 4(c). In addition, the jig portion 23(XI) has at least a portion of the cylindrical body constituting the jig portion 23(XI) that is transparent or translucent, and is provided with a spectroscope or photodetector 24 connected to the transparent or translucent portion, and therefore has the same effect as the jig portion 23(X) shown in Fig. 9(a).

[0063] The jig part 23(XI) in Figure 9(b) differs from the jig part 23(X) in Figure 9(a) in that in the jig part 23(X) in Figure 9(a), the cylinder is transparent or translucent, and a spectroscope or photodetector 24 is provided from the outside of the cylinder toward the inside, and the excitation light or scattered light within the jig part 23(X) is monitored through the transparent or translucent cylinder, whereas in the jig part 23(XI), the cylinder is translucent, and a spectroscope or photodetector 24 is provided facing the cylinder itself, and the diffused light within the cylinder is monitored.

[0064] The translucent cylindrical body of the jig part 23(XI) is made of, for example, frosted glass. The light receiving portion of a spectroscope or photodetector 24 is embedded in the translucent cylindrical body, and the diffused light from the cylindrical body is directly monitored by the spectroscope or photodetector 24. This prevents degradation of monitoring performance due to contamination of the optical fiber or lens, and allows accurate monitoring of the state of plasma inside the jig part 23(XI).

[0065] In the nozzles of the respective embodiments described above, the connecting portion 22 and the jig portion 23 (23(I) to 23(XI)) can be configured to be detachably attached to the nozzle main body 21. With this configuration, when the connecting portion 22 and the jig portion 23 (23(I) to 23(XI)) are detached from the nozzle main body 21, plasma can be irradiated onto the object to be treated from the nozzle main body 21, and the nozzle can be used for the same multi-purpose purposes as before. When the connecting portion 22 and the jig portion 23 (23(I) to 23(XI)) are attached from the nozzle main body 21, plasma can be irradiated uniformly all around the circumference of the long object to be treated, as described in this specification.

[0066] Moreover, the jig portion 23 (23(I) to 23(XI)) can be a jig serving as an adapter that can be detachably attached to a nozzle used for multiple purposes up to now. The jig preferably includes the structure of the connection portion 22.

[0067] The nozzle and plasma irradiation device of the plasma irradiation device of the present invention have been described above based on the embodiments, but it goes without saying that the nozzle and plasma irradiation device of the plasma irradiation device of the present invention are not limited to those of the embodiments, and many modifications are possible within the scope that does not contradict the spirit of the invention.

Claims

1. A nozzle from which plasma is emitted in a plasma irradiation device, A nozzle of a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, wherein a through hole is formed in the jig part for guiding plasma into the jig part, and the plasma flow is swirled within the jig part.

2. 2. The nozzle of the plasma irradiation device according to claim 1, wherein the penetration direction of the through-hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig portion.

3. 2. The nozzle of the plasma irradiation device according to claim 1, wherein the penetration direction of the through-hole is inclined with respect to a direction perpendicular to the axis in a cross section parallel to the axis of the jig part.

4. A nozzle from which plasma is emitted in a plasma irradiation device, A nozzle of a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, wherein a through hole is formed in the jig part for guiding plasma into the jig part, and the penetration direction of the through hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig part.

5. A nozzle from which plasma is emitted in a plasma irradiation device, A nozzle for a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, wherein a through hole is formed in the jig part for guiding plasma into the jig part, and the penetration direction of the through hole is inclined with respect to a direction perpendicular to the axis in a cross section parallel to the axis of the jig part.

6. 6. The nozzle of the plasma irradiation device according to claim 1, wherein the jig portion is formed with a hole for sucking and discharging gas from within the jig portion.

7. 6. The nozzle of the plasma irradiation device according to claim 1, wherein a plurality of the through holes are formed in the axial direction of the jig portion.

8. 6. The nozzle of a plasma irradiation device according to claim 1, 4 or 5, wherein the jig portion has a tapered shape in a cross section parallel to the axis of the jig portion, the inner diameter of which gradually widens toward an opening for extracting the object to be treated.

9. 6. The nozzle of a plasma irradiation device according to claim 1, 4 or 5, wherein the jig portion has an opening for guiding the object to be treated or a plurality of protrusions or grooves formed on the inner peripheral surface.

10. 6. The nozzle of the plasma irradiation device according to claim 1, 4 or 5, wherein at least a part of the jig part is transparent or translucent, and the jig part is provided with a spectroscope or a photodetector.

11. 6. The nozzle of the plasma irradiation device according to claim 1, 4 or 5, wherein the nozzle comprises a nozzle main body that generates plasma, a connection part connected to the nozzle main body, and the jig part connected to the connection part, and the connection part and the jig part are detachable from the nozzle main body.

12. A plasma irradiation device comprising the nozzle of the plasma irradiation device according to claim 1, 4 or 5.

13. A jig that is detachably attached to a nozzle from which plasma is emitted in a plasma irradiation device, A nozzle jig for a plasma irradiation device, characterized by being cylindrical and having an opening at at least one end in the axial direction for inserting and removing the object to be treated, and having a through hole formed to guide plasma into the jig portion.

14. The nozzle jig for a plasma irradiation device according to claim 13, wherein the plasma flow swirls within the cylindrical body.

15. A nozzle jig for a plasma irradiation device as described in claim 13, wherein the penetration direction of the through hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig, or is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig.

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