Metal vapor pressure detection device and detection method

Abstract

A metal vapor pressure detection device and detection method includes a metal vapor pressure detection mechanism (3) arranged outside the metal vapor pressure detection chamber (1); the metal vapor pressure detection mechanism (3) includes a displacement generation system and a displacement detection system arranged in the displacement generation system; the displacement generation system includes a displacement slider sleeve (5), a displacement slider (4) arranged in the displacement slider sleeve (5), and a pressure balance spring (6) connected to the displacement slider (4). In the metal vapor pressure detection device, the metal vapor pressure can be directly obtained, providing a basis for the online control and adjustment of the metal vapor pressure.

Description

[Technical field]

[0001] Technical Field The present invention relates to the technical field of metal vapor detection, and in particular to an apparatus and method for detecting metal vapor pressure. [Background technology]

[0002] Background technology Physical vapor deposition (PVD) is a widely used material surface treatment technology that evaporates metals, alloys, or compounds in a vacuum environment, and then condenses the formed metal vapor to deposit on a substrate. By using this technology to coat the surface of a material, the coating can have good wear resistance, corrosion resistance, and dry lubricity, as well as high hardness, which can greatly improve the performance and service life of the material. This technology is environmentally friendly and has been widely used in fields such as machinery, electronics, hardware, aerospace, and chemical industry, making it an important application technology for green manufacturing.

[0003] In the application of physical vapor deposition technology, various coating materials can be used, such as zinc, aluminum, magnesium, chromium, etc. The coating speed is generally fast, typically up to 1-3 m / s. In order to obtain better coating surface quality and spraying effect, it is necessary to keep the flow rate and pressure of metal vapor relatively constant during the spraying process. The pressure of metal vapor is important for controlling the spraying process and is one of the key parameters that determine the adhesion strength between the coating and the substrate.

[0004] At present, common pressure detection devices are mainly suitable for gas and water vapor. Metal vapor is a high-temperature air flow, so it is easy to condense in low-temperature areas, and some metals are relatively reactive and can easily react with other metals and corrode. Therefore, existing pressure detection devices cannot directly obtain the pressure of metal vapor. At present, there are few reports on metal vapor pressure detection methods, and most of them use indirect methods for pressure measurement.

[0005] A literature survey and patent search revealed that there is currently no method or device that can directly measure metal vapor pressure. Therefore, there is a need to develop a measurement method and device that can directly obtain metal vapor pressure to provide a basis for on-line control and regulation of metal vapor. Summary of the Invention

[0006] Contents of the invention In order to address the above-mentioned shortcomings in the prior art, the present invention provides a metal vapor pressure detection device and detection method. By installing a displacement generating system and a displacement detecting system outside the metal evaporation chamber, the pressure of the metal vapor is directly measured according to the displacement of the displacement slider detected in real time and the relationship curve between pressure and displacement obtained by gas calibration, providing a basis for the online control and adjustment of the metal vapor.

[0007] To achieve the above objectives, the present invention adopts the following technical solutions: A first aspect of the present invention provides a metal vapor pressure detection device including a metal evaporation chamber and a pressure detection mechanism disposed outside the metal evaporation chamber, the metal evaporation chamber is used to melt and evaporate metal to form metal vapor; and The pressure detection mechanism includes a displacement generating system and a displacement detection system disposed in the displacement generating system; the displacement generating system includes a displacement slider sleeve, a displacement slider disposed in the displacement slider sleeve, and a pressure balance spring connected to the displacement slider; the displacement slider sleeve is in communication with the metal evaporation chamber, and the displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor; one end of the pressure balance spring is connected to the displacement slider and the other end is connected to the displacement detection system; and the pressure detection mechanism determines the pressure of the metal vapor according to the coordinates of the displacement slider detected by the displacement detection system.

[0008] Preferably, the displacement detection system further includes a fixed bracket and a displacement sensor; the fixed bracket is provided with a spring limit block connected to the pressure balance spring, a fixed ring attached to the displacement slider sleeve, and a sensor fixing block for mounting the displacement sensor; and the spring limit block is disposed between the fixed ring and the sensor fixing block, and the spring limit block is provided with a light-transmitting hole corresponding to the displacement sensor.

[0009] Preferably, the displacement generating system further comprises a heater disposed in the displacement slider sleeve.

[0010] Preferably, the pressure balance spring is made up of 1 to 10 springs with a wire diameter of 0.1 to 6 mm.

[0011] Preferably, the center of the displacement sensor, the center of the light transmitting hole, and the center of the pressure balance spring are on the same axis.

[0012] Preferably, the pressure detection mechanism further includes an intelligent processing module; and the intelligent processing module is used to receive the coordinates of the displacement slider detected by the displacement sensor and calculate the displacement of the displacement slider, and obtain the pressure of the metal vapor according to the displacement of the displacement slider and the relationship curve between the displacement and pressure obtained by calibration.

[0013] A second aspect of the present invention provides a method for detecting metal vapor pressure using the above-mentioned metal vapor pressure detection device. The detection method includes the following steps: S1 introducing gases with different pressures into the metal vapor chamber of the metal vapor pressure detection device for repeated calibration, and obtaining a relationship curve between the pressure and the displacement of the displacement slider; S2 melting and evaporating metal to form metal vapor in the metal vaporization chamber, in which the displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor, and a pressure balance spring gradually contracts under the extrusion of the displacement slider until the displacement slider reaches force equilibrium and stops moving, and a displacement detection system detects the coordinates of the displacement slider in real time to obtain the displacement of the displacement slider; and S3 obtaining the pressure of the metal vapor according to the relationship curve between the pressure and the displacement of the displacement slider obtained in step S1 and the displacement of the displacement slider obtained in step S2. Includes.

[0014] Preferably, in step S1, the gas is 1×10 3 ~1×10 5 The pressure is 1.0 Pa.

[0015] Preferably, in step S2, the displacement ΔS of the displacement slider is ΔS=|S t -S0| (Wherein, ΔS is the displacement of the displacement slider (mm); S t represents the coordinate (mm) of the displacement slider when it reaches force equilibrium after movement; and S0 represents the coordinate of the displacement slider at the zero position (initial coordinate of the displacement slider) (mm). It is.

[0016] Preferably, in step S2, the displacement slider sleeve is heated to a temperature of 20 to 1000° C. by a heater while the displacement slider is moving.

[0017] The metal vapor pressure detection device and method provided by the present invention have the following beneficial effects: 1. The metal vapor pressure detection device and detection method of the present invention directly measure the pressure of the metal vapor based on the displacement of the displacement slider detected in real time through a displacement generating system and a displacement detecting system arranged outside the metal evaporation chamber and the relationship curve between pressure and displacement obtained by gas calibration, thereby providing a basis for online control and adjustment of the metal vapor. 2. The metal vapor pressure detection device and detection method of the present invention can monitor the metal vapor pressure in the temperature range from room temperature to 1000°C in real time, providing a stable detection and adjustment basis for metal evaporation control. 3. The metal vapor pressure detection device and detection method of the present invention are suitable for directly obtaining the pressure of various metal vapors, and are characterized by good structure adaptability and process compatibility. 4. The metal vapor pressure detection device of the present invention has a simple structure, is suitable for various operating conditions and environments, is cost-effective, easy to operate and maintain, and facilitates automatic remote operation. [Brief description of the drawings]

[0018] [Figure 1] FIG. 1 is a schematic diagram showing the structure of a metal vapor pressure detection device according to the present invention. [Figure 2a] FIG. 2a is a structural schematic diagram of the pressure detection mechanism of the present invention. [Figure 2b] FIG. 2b is a cross-sectional view taken along line AA in FIG. 2a. [Figure 3a] FIG. 3a is a schematic diagram showing a displacement slider of the pressure sensing mechanism of the present invention under the action of metal vapor pressure. [Figure 3b] FIG. 3b is a cross-sectional view taken along line BB in FIG. 3a. [Figure 4] FIG. 4 is a structural schematic diagram of the fixing bracket of the present invention. [Figure 5a] FIG. 5a is a structural schematic diagram of the displacement slider sleeve of the present invention. [Figure 5b] FIG. 5b is a cross-sectional view taken along line CC in FIG. 5a. [Figure 6]FIG. 6 is a schematic diagram of the structure of a pressure balance spring that is composed of multiple springs with different specifications such as wire diameter. [Explanation of symbols]

[0019] Reference sign: 1 - metal evaporation chamber, 2 - metal evaporation area, 3 - pressure detection mechanism, 4 - displacement slider, 5 - displacement slider sleeve, 6 - pressure balance spring, 7 - fixing bracket (7-1 spring limit block; 7-2 sensor fixing block; 7-3 fixing ring), 8 - displacement sensor, and 9 - heater. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] Specific embodiments In order to better understand the above technical solution of the present invention, the technical solution of the present invention is further described below in conjunction with the following embodiments.

[0021] As shown in FIG. 1, the present invention provides a metal vapor pressure detection device, which includes a metal evaporation chamber 1 and a pressure detection mechanism 3 arranged outside the metal evaporation chamber 1. The metal evaporation chamber 1 is used for melting and evaporating metal to form metal vapor, and its interior is a metal evaporation area 2. As shown in FIG. 2a and FIG. 2b, the pressure detection mechanism 3 includes a displacement generation system and a displacement detection system arranged in the displacement generation system. The displacement generation system includes a displacement slider sleeve 5 (as shown in FIG. 5a and FIG. 5b), a displacement slider 4 arranged in the displacement slider sleeve 5, and a pressure balance spring 6 connected to the displacement slider 4. The displacement slider sleeve 5 is in communication with the metal evaporation chamber 1, and the displacement slider 4 slides radially along the displacement slider sleeve 5 under the pressure of the metal vapor. One end (movable end) of the pressure balance spring 6 is connected to the displacement slider 4, and the other end (fixed end) of the pressure balance spring 6 is connected to the displacement detection system. The pressure detection mechanism 3 calculates the displacement of the displacement slider 4 based on the coordinates of the displacement slider 4 detected by the displacement detection system, and determines the pressure of the metal vapor.

[0022] As shown in FIG. 2a and FIG. 2b, the displacement detection system of the present invention further includes a fixed bracket 7 and a displacement sensor 8. As shown in FIG. 4, the fixed bracket 7 is provided with a spring limiting block 7-1 connected to the pressure balance spring 6, a fixed ring 7-3 attached to the displacement slider sleeve 5, and a sensor fixing block 7-2 for mounting the displacement sensor 8. In order to make the fixed bracket more stable, two fixed rings 7-3 are arranged. The spring limiting block 7-1 is arranged between the fixed ring 7-3 and the sensor fixing block 7-2, and a light-transmitting hole corresponding to the displacement sensor 8 is provided therein. The fixed bracket 7 serves three functions: first, it determines the position of the fixed end of the pressure balance spring 6 when it is deformed by the spring limit block 7-1, and a light-transmitting hole corresponding to the displacement sensor 8 is designed in the spring limit block 7-1 to facilitate the displacement sensor 8 to measure the coordinate of the displacement slider 4 in real time; second, the displacement sensor 8 is mounted on the sensor fixing block 7-2, which can measure the displacement of the displacement slider 4 under the action of metal vapor; and third, the fixed bracket 7 is mounted on the displacement slider sleeve 5 through the fixing ring 7-3, and the fixed bracket 7 has become an important part connecting the displacement generating system and the displacement detecting system.

[0023] In the present invention, in order to ensure that the displacement sensor 8 is not blocked by other parts during measurement, the center of the displacement sensor 8, the center of the pressure balance spring 6 and the center of the light transmitting hole are essentially on the same axis.

[0024] As shown in Figures 2a and 2b, in order to prevent metal vapor from condensing between the displacement slider 4 and the displacement slider sleeve 5 and on the inner wall of the displacement slider sleeve 5, which may affect the detection effect of the metal vapor pressure, the displacement generating system further includes a heater 9 disposed in the displacement slider sleeve 5, which can heat the displacement slider sleeve 5 to a temperature higher than the metal vapor temperature. In the present invention, the heater 9 adopts resistance heating or induction heating, and the heating temperature range is 20-1000°C.

[0025] In practical applications, a reasonable pressure balance spring 6 can be designed according to different pressure ranges, as shown in FIG. 6. For example, if the detection range of metal vapor pressure is 1×10 3 ~10 5 In the case where the pressure balance spring 6 has a pressure of 0.1 Pa, the pressure balance spring 6 may be composed of a single spring or may be composed of multiple springs, thereby enabling measurement of a wide range of metal vapor pressure. For example, in the present invention, the pressure balance spring 6 is composed of 1 to 10 springs. When measuring metal vapor pressure using a combination of multiple springs, multiple springs are connected in series to form the pressure balance spring 6. For example, in FIG. 6, three springs (6-1, 6-2, and 6-3) with different wire diameters are connected in series to form the pressure balance spring 6. In the pressure balance spring 6, the wire diameter of each spring can be designed according to the pressure range to be measured, and the selectable wire diameter is between 0.1 mm and 6 mm.

[0026] In the present invention, the pressure detection mechanism 3 further includes an intelligent processing module. During the metal evaporation process, the intelligent processing module receives the coordinates of the displacement slider 4 measured in real time by the displacement sensor 8, calculates the displacement ΔS of the displacement slider 4, and obtains the pressure of the metal vapor according to the displacement ΔS and the relationship curve between the pressure and the displacement ΔS of the displacement slider 4 obtained by calibration, thereby obtaining the pressure of the metal vapor in real time.

[0027] The metal vapor pressure detection device of the present invention can be used to measure metal vapor pressure under both standard and vacuum conditions, and is therefore suitable for measuring metal vapor pressure under various operating conditions. The metal vapor pressure detection device of the present invention can directly obtain the pressure of the metal vapor while minimizing the influence of other factors, and has high interference resistance and relatively stable pressure measurement.

[0028] When the metal vapor pressure detection device of the present invention is used, in the absence of metal vapor, the displacement slider 4 leans against the metal evaporation chamber 1 under the compressive stress of the pressure balance spring 6 (the outer wall of the metal evaporation chamber 1 is provided with a limiting portion that holds the displacement slider 4 in the displacement slider sleeve 5), forming a force balance. This position represents the coordinate of the displacement slider 4 when it is not moving, and is called the zero position S0. As shown in Figures 3a and 3b, when metal vapor is generated in the metal evaporation chamber 1 (or other gas is introduced), the metal vapor pressure in the metal evaporation chamber 1 increases as the evaporation process proceeds. When the metal vapor pressure exceeds the initial compressive stress of the pressure balance spring 6, the net external force on the displacement slider 4 is directed in the direction away from the metal evaporation chamber 1 (outward). The displacement slider 4 moves along the wall of the displacement slider sleeve 5 in the direction away from the metal evaporation chamber 1. The pressure balance spring 6 gradually contracts under the extrusion of the displacement slider 4, and at the same time the compressive stress on the displacement slider 4 gradually increases. When the compressive stress of the pressure balance spring 6 is equal to the pressure of the metal vapor, the displacement slider 4 reaches force equilibrium and stops moving. During the metal evaporation process, the pressure of the metal vapor generated inside the metal evaporation chamber 1 decreases, and when the pressure of the metal vapor is smaller than the compressive stress of the pressure balance spring 6, the net external force of the displacement slider 4 is directed toward the metal evaporation chamber 1 (inward). The displacement slider 4 moves toward the metal evaporation chamber 1, and the compressive stress of the pressure balance spring 6 against the displacement slider 4 gradually decreases. When the compressive stress of the pressure balance spring 6 against the displacement slider 4 is equal to the metal vapor pressure, the displacement slider 4 stops moving. When the metal evaporation is nearing completion and the metal vapor pressure continues to decrease, the displacement slider 4 moves toward the metal evaporation chamber 1 under the internal stress of the pressure balance spring 6 until the displacement slider 4 leans against the metal evaporation chamber 1, indicating that the metal vapor pressure is lower than the minimum detection pressure of the detection device for the metal vapor pressure.During the movement of the displacement slider 4 from the time it leaves the metal evaporation chamber 1 until it reaches force equilibrium and stops, the coordinates of the displacement slider 4 are measured in real time by the displacement sensor 8 and transferred to the intelligent processing module, which calculates the displacement ΔS of the displacement slider 4 in real time and can determine the pressure of the metal vapor according to the displacement ΔS and the relationship curve between pressure and displacement obtained by gas calibration.

[0029] The pressure of the metal vapor is detected using the above-mentioned metal vapor pressure detection device, in which the detection method includes the following steps: Introduce gases with different pressures into the metal evaporation chamber of the metal vapor pressure detection device for repeated calibration to obtain the relationship curve between the pressure and the displacement of the displacement slider S1.

[0030] The specific process is as follows: before obtaining the metal vapor pressure, first calibrate the relationship between the pressure of the metal vapor pressure detection device and the displacement of the displacement slider. A gas of known pressure is introduced into the metal evaporation chamber, and the displacement slider leaves the metal evaporation chamber under the action of the gas, and the pressure balance spring gradually contracts under the extrusion of the displacement slider, while exerting an inward compressive stress on the displacement slider, until the displacement slider reaches a force equilibrium and stops moving. The displacement detection system measures the coordinates of the displacement slider in real time. When no gas is introduced into the metal evaporation chamber, the displacement slider leans against the limit of the outer wall of the metal evaporation chamber under the action of the inward compressive stress of the pressure balance spring to form a force equilibrium, and at this time, the position of the displacement slider is recorded as the zero position S0. Based on the above process, the relationship curve between the pressure and the displacement of the displacement slider is obtained. In order to ensure the accuracy of the data, the calibration needs to be repeated. In addition, the gas pressure should also be increased or decreased to repeat the calibration of the relationship between pressure and the displacement of the displacement slider multiple times to obtain the relationship curve between pressure and the displacement of the displacement slider. The gas used during the calibration is 1×10 3 ~1×10 5 The pressure is 1.0 Pa.

[0031] S2 melting and evaporating the metal to form metal vapor in the metal evaporation chamber. The displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor. The pressure balance spring gradually contracts under the extrusion of the displacement slider until the displacement slider reaches force equilibrium and stops moving. The displacement detection system detects the coordinates of the displacement slider in real time to obtain the displacement of the displacement slider.

[0032] The specific process is as follows: metal is melted and evaporated to form metal vapor in the metal evaporation chamber. When the pressure of the metal vapor exceeds the initial internal stress of the pressure balance spring, the displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor. The pressure balance spring gradually contracts under the extrusion of the displacement slider. When the internal stress of the pressure balance spring against the displacement slider becomes equal to the pressure of the metal vapor, the displacement slider stops moving. The displacement detection system detects the coordinate S of the displacement slider at this time. t in real time and send them to the pressure detection system to obtain the displacement ΔS of the displacement slider: ΔS=|S t -S0| (Wherein, ΔS is the displacement of the displacement slider (mm); S t represents the coordinate (mm) of the displacement slider when it reaches equilibrium and stops after moving; and S0 represents the coordinate of the displacement slider at the zero position (mm).

[0033] When the pressure of the metal vapor changes, the displacement at this time can be recalculated based on the coordinates detected by the displacement detection system after the displacement slider reaches force equilibrium again.

[0034] In the above process, the displacement slider sleeve is heated to a temperature of 20-1000°C by a heater to prevent metal vapor from condensing between the displacement slider and the displacement slider sleeve and on the inner wall of the displacement slider sleeve, which may affect the detection effect of metal vapor pressure.

[0035] S3 obtaining the pressure of the metal vapor according to the relationship curve between the pressure and the displacement of the displacement slider obtained in step S1 and the displacement of the displacement slider obtained in step S2.

[0036] The specific process is as follows: according to the relationship curve between the pressure and the displacement of the displacement slider obtained in step S1 and the displacement detected in step S2, the pressure of the metal vapor is obtained in real time. EXAMPLES

[0037] The metal vapor pressure detection device and method of the present invention will be further described below with reference to specific examples.

[0038] Example 1 In this example, the metal vapor pressure measured is 5×10 3 ~1×10 5 The pressure balance spring 4 is composed of a single spring with a wire diameter of 4 to 6 mm. The implementation steps are as follows: First, calibrate the metal vapor pressure detector as follows: In the initial state, the displacement sensor 8 records the coordinate S0 of the initial zero position of the displacement slider 4 and sends it to the intelligent processing module. Nitrogen gas is introduced into the metal evaporation chamber 1. When the pressure of the nitrogen gas in the metal evaporation chamber 1 increases, the displacement slider 4 moves outward under a net external force. The pressure of the nitrogen gas in the chamber can be measured by a pressure gauge, and the displacement sensor 8 can detect the displacement of the displacement slider 4 in real time to obtain the relationship between the displacement and pressure during the increase of the gas pressure. The pressure of nitrogen gas in the metal evaporation chamber is 1×10 5 When the nitrogen pressure in the metal evaporation chamber reaches 5 × 10 Pa, gradually reduce the nitrogen pressure in the metal evaporation chamber to 5 × 10 Pa. 3 Pa. During this process, as the pressure of the gas acting on the displacement slider 4 decreases, the net external force is inward. The real-time displacement of the displacement slider 4 is measured, and the relationship between the displacement and pressure during the decrease in gas pressure is obtained. Throughout the calibration process, the displacement of the displacement slider 4 and the corresponding values ​​of the gas pressure in the metal evaporation chamber are sent to an intelligent processing module in real time. By repeating the measurements multiple times, a relationship curve between the displacement and the pressure is obtained.

[0039] The metal vapor pressure in the metal evaporation chamber is then obtained using the relationship curve between displacement and pressure from the above calibration.

[0040] The initial zero position of the displacement slider at the initial state of metal melting and evaporation is recorded and sent to an intelligent processing module. The metal in the metal evaporation chamber 1 is heated to achieve melting and evaporation, and the temperature of the metal melting and evaporation areas is measured in real time and sent to the intelligent processing module. The intelligent processing module sends the real-time temperature inside the metal evaporation chamber 1 to the heater 9, which heats the displacement slider sleeve 5 to a target temperature (above the metal vapor temperature) to avoid condensation of the metal vapor on the pressure sensing device. The displacement sensor 8 detects in real time the displacement caused by the displacement slider 4. The real time pressure of the metal vapor in the metal evaporation chamber 1 is determined using the relationship curve between displacement and pressure obtained from the calibration.

[0041] By using the above method, 5×10 3 ~1×10 5 Stable measurements of metal vapor pressures in the Pa range can be achieved.

[0042] Example 2 In this example, the metal vapor pressure measured is 1×10 3 ~5×10 3 The pressure balance spring 4 is composed of a single spring with a wire diameter of 2 to 5 mm. Specific implementation methods and steps are the same as those in the first embodiment.

[0043] Example 3 In this example, the metal vapor pressure measured is 1×10 3~5×10 3 The pressure balance spring 4 is configured by connecting two or more springs with different wire diameters of 0.1 to 5 mm in series. This enables highly accurate detection of metal vapor pressure.

[0044] In summary, in the present invention, the displacement generating system and the displacement detecting system are arranged outside the metal evaporation chamber, and the pressure of the metal vapor is directly obtained according to the displacement of the displacement slider detected in real time and the relationship curve between the pressure and the displacement obtained by gas calibration, providing the basis for the online control and adjustment of the metal vapor. The metal vapor pressure detecting device and the detecting method of the present invention can monitor the metal vapor pressure in the temperature range from normal temperature to 1000°C in real time, providing a stable detection and adjustment basis for metal evaporation control. The metal vapor pressure detecting device and the detecting method of the present invention are suitable for detecting the pressure of various metal vapors, and have good structural flexibility and process compatibility. The metal vapor pressure detecting device of the present invention is simple in structure, suitable for various operating conditions and environments, and is especially suitable for detecting the metal vapor pressure under vacuum conditions. It is cost-effective, easy to operate and maintain, and facilitates automatic remote operation.

[0045] It will be understood by those skilled in the art that the above examples are merely illustrative of the present invention and are not intended to limit the present invention. Modifications and variations of the above examples within the spirit of the present invention are intended to be encompassed by the claims of the present invention.

Claims

1. A device for detecting a metal vapor pressure, the device including a metal evaporation chamber and a pressure detection mechanism disposed outside the metal evaporation chamber, the metal evaporation chamber is used to melt and evaporate metal to form metal vapor; and a pressure detection mechanism for detecting a pressure of the metal vapor, the pressure detection mechanism including: a displacement generating system; and a displacement detection system disposed on the displacement generating system; the displacement generating system including: a displacement slider sleeve; a displacement slider disposed in the displacement slider sleeve; and a pressure balance spring connected to the displacement slider; the displacement slider sleeve is in communication with the metal evaporation chamber, and the displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor; one end of the pressure balance spring is connected to the displacement slider and the other end is connected to the displacement detection system; and the pressure detection mechanism determines the pressure of the metal vapor according to the coordinates of the displacement slider detected by the displacement detection system.

2. 2. The metal vapor pressure detection device according to claim 1, wherein the displacement detection system further includes a fixing bracket and a displacement sensor; the fixing bracket is provided with a spring limit block connected to the pressure balance spring, a fixing ring attached to the displacement slider sleeve, and a sensor fixing block for mounting the displacement sensor; and the spring limit block is disposed between the fixing ring and the sensor fixing block, and the spring limit block is provided with a light transmitting hole corresponding to the displacement sensor.

3. The metal vapor pressure sensing apparatus of claim 1 , wherein the displacement generating system further comprises a heater disposed in the displacement slider sleeve.

4. 2. The metal vapor pressure detection device according to claim 1, wherein the pressure balance spring is composed of 1 to 10 springs having a wire diameter of 0.1 to 6 mm.

5. 3. The metal vapor pressure detection device according to claim 2, wherein a center of the displacement sensor, a center of the light transmitting hole, and a center of the pressure balance spring are on the same axis.

6. 2. The metal vapor pressure detection device of claim 1, wherein the pressure detection mechanism further includes an intelligent processing module; and the intelligent processing module is used to receive the coordinates of the displacement slider detected by the displacement sensor and calculate the displacement of the displacement slider, and obtain the pressure of the metal vapor according to the displacement of the displacement slider and a relationship curve between the displacement and pressure obtained by calibration.

7. A method for detecting metal vapor pressure, comprising: detecting a metal vapor pressure by using the metal vapor pressure detection device according to any one of claims 1 to 6; and detecting a metal vapor pressure by the following steps: S1: Inject gases with different pressures into the metal vapor chamber of the metal vapor pressure detection device for repeated calibration, and obtain a relationship curve between the pressure and the displacement of the displacement slider; S2 melting and evaporating metal to form metal vapor in the metal evaporation chamber, in which the displacement slider slides along a displacement slider sleeve under the pressure of the metal vapor, and a pressure balance spring gradually contracts under the extrusion of the displacement slider until the displacement slider reaches force equilibrium and stops moving, and a displacement detection system detects the coordinates of the displacement slider in real time to obtain the displacement of the displacement slider; and S3 obtaining the pressure of the metal vapor according to the relationship curve between the pressure and the displacement of the displacement slider obtained in step S1 and the displacement of the displacement slider obtained in step S2. A method for detecting metal vapor pressure comprising:

8. In step S1, the gas is 1×10 ３ ~1×10 ５ The method for detecting metal vapor pressure according to claim 7, wherein the pressure is 10 Pa.

9. In step S2, the displacement ΔS of the displacement slider is ΔS=|S ｔ -S ０ | (Wherein, ΔS is the displacement of the displacement slider (mm); S ｔ represents the coordinate (mm) of the displacement slider when it reaches force equilibrium after movement; and S ０ represents the coordinate of the displacement slider at the zero position (mm). The method for detecting metal vapor pressure according to claim 7,

10. 8. The method for detecting metal vapor pressure according to claim 7, wherein in step S2, the displacement slider sleeve is heated to a temperature of 20 to 1000° C. by a heater while the displacement slider is moving.

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