Piezoelectric vibrator and piezoelectric vibrator assembly

JP2025505069AActive Publication Date: 2025-02-21AAC MICROTECH (CHANGZHOU) CO LTD
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Patent Information

Application Number
JP2023532302
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-01-18
Filing Date
2023-03-27
Publication Date
2025-02-21
Estimated Expiration
2043-03-27

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Abstract

The present invention provides a piezoelectric vibrator and a piezoelectric vibrator assembly. [Solution] The piezoelectric vibrator includes a piezoelectric body and an amplifying unit supported and fixed on at least one of the opposing sides of the piezoelectric body, the piezoelectric body is made of a material having a piezoelectric effect in a single layer or multiple layers, the amplifying unit is a flat structure having the same shape as the piezoelectric body and composed of an elastic reinforcing element, the elastic reinforcing element is a metal sheet, the piezoelectric body expands or contracts along a first direction parallel to the plane in which the piezoelectric body is located when receiving an external voltage, and the amplifying unit contracts or expands along a second direction, the first direction and the second direction being perpendicular to each other. Compared with the related art, the piezoelectric vibrator and piezoelectric vibrator assembly of the present invention have a small volume, a fast response, an adjustable resonance frequency, a wide operating frequency range, and a high energy conversion efficiency.
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Description

[Technical field]

[0001] The present invention relates to a piezoelectric vibrator, and more particularly to a piezoelectric vibrator and a piezoelectric vibrator assembly applied in the field of electronic products. [Background technology]

[0002] With the development of electronic products, piezoelectric vibrators can realize various applications, and as a piezoelectric motor for tactile feedback, it is used in many fields such as mobile phones, tablets, notebook computers, in-vehicle devices, touch pens, etc., and as a sound unit for speakers, it is used in basic electronic devices such as screen sound, bone conduction, etc., and as a pressure sensor, it can sense the pressure changes in the outside world and convert them into voltage signals. The piezoelectric vibrator has become an important component of electronic products.

[0003] The piezoelectric motor of the haptic feedback, the sound generating unit of the speaker, and the pressure sensor of the prior art each have a configuration based on their own function.

[0004] However, in the related art, the piezoelectric motor for haptic feedback, the speaker sound unit, and the pressure sensor each require a large number of devices in the entire machine, occupy a large volume, and require adjustment of the controller, resulting in slow response of each device and a fixed resonant frequency that cannot be adjusted.

[0005] Therefore, it is necessary to provide a new piezoelectric vibrator to solve the above problems. Summary of the Invention [Problem to be solved by the invention]

[0006] The technical problem to be solved by the present invention is to provide a piezoelectric vibrator and a piezoelectric vibrator assembly that have a small volume, a fast response, an adjustable resonance frequency, a wide operating frequency, and a high energy conversion efficiency. [Means for solving the problem]

[0007] In order to solve the above technical problems, in a first aspect, the present invention provides a piezoelectric vibrator, comprising a piezoelectric body and an amplification unit supported and fixed on at least one of the opposing sides of the piezoelectric body, the piezoelectric body being manufactured from a material having a single layer or multiple layers of piezoelectric effect, the amplification unit being a flat structure having the same shape as the piezoelectric body and composed of an elastic reinforcing element, the elastic reinforcing element being a metal sheet, the piezoelectric body expanding or contracting along a first direction parallel to the plane in which the piezoelectric body is located when subjected to an external voltage, and the amplification unit contracting or expanding along a second direction, the first direction and the second direction being perpendicular to each other.

[0008] Preferably, the piezoelectric body includes a plurality of stacked internal electrodes of opposite polarity, a plurality of stacked piezoelectric layers surrounding the outer peripheral edges of the internal electrodes and electrically connected to the internal electrodes, and an external electrode surrounding the outer peripheral edges of the piezoelectric layers and electrically connected to the piezoelectric layers, the plurality of internal electrodes and the plurality of piezoelectric layers are all stacked along the second direction, and the plurality of piezoelectric layers are all manufactured from single-layer or multi-layer piezoelectric ceramics.

[0009] Preferably, said piezoelectric body presents an elongated or rectangular or circular shape.

[0010] Preferably, the piezoelectric body is made of a multilayer piezoelectric ceramic poled along the first direction.

[0011] Preferably, the amplification unit includes a first segment fixed to the piezoelectric body, two second segments each bent from opposite ends of the first segment and extending at an angle away from the piezoelectric body, two third segments each bent from the two second segments in a direction away from the first segment and spaced apart from the piezoelectric body, a fourth segment which is a mirror image of the first segment and spaced apart from it, two fifth segments each extending outward from the fourth segment and each being a mirror image of the two second segments and spaced apart from it, and two sixth segments which are attached to the two third segments and are mirror images of the first segment and the second segment, respectively, and each of the third segments is attached to and fixed to a corresponding one of the sixth segments and constitutes a thickened end of the amplification unit in cooperation with the sixth segment, and the thickened end is supported and fixed to the piezoelectric body, and the first segment, the second segment, the fourth segment and the fifth segment constitute the flat structure in cooperation.

[0012] Preferably, the length of the thickened end along the first direction is equal to half the length of the flattened structure along the first direction.

[0013] Preferably, the piezoelectric vibrator further includes a fixed end block, the thickened end being supported and connected to the piezoelectric body via the fixed end block, and the fixed end block being electrically insulated from the piezoelectric body.

[0014] Preferably, there are two amplifying units, each located on opposite sides of the piezoelectric body, and there are at least two fixed end blocks, each of which is connected to the piezoelectric body via one of the fixed end blocks.

[0015] Preferably, the first segment is fixed at a central position of the piezoelectric body, the amplification unit has a symmetrical structure centered on the first segment, and the amplification factor of the piezoelectric vibrator is the ratio between the displacement amount of the piezoelectric body along the first direction and the displacement amount of the amplification unit along the second direction.

[0016] Preferably, said amplification unit presents a rectangular, square or circular shape.

[0017] Preferably, the amplification unit further includes a fixing portion extending from the thickened end and fixed to an edge of the piezoelectric body, the thickened end being bent and extending at an angle from the flat structure toward the edge of the piezoelectric body.

[0018] Preferably, there is at least one amplification unit, the amplification unit being located on one side of the piezoelectric body, the other side of the piezoelectric body being connected to another amplification unit or to a mountable structure used for other buffer amplification.

[0019] Preferably, the amplifying unit further includes a bent portion that is bent and extends obliquely from the thickened end toward an edge of the piezoelectric body, and a fixed portion that is fixed to the edge of the piezoelectric body.

[0020] Preferably, there is at least one amplification unit, the amplification unit being located on one side of the piezoelectric body, the other side of the piezoelectric body being connected to another amplification unit or to a mountable structure used for other buffer amplification.

[0021] Preferably, there is at least one fixed end block, which is fixed to the outer side of the piezoelectric body along the first direction, and the corresponding thickened ends of the two amplification units are respectively fixed to opposite ends of the fixed end block along the second direction, and the piezoelectric vibrator further includes a connecting segment, which is made of the same metal as the amplification unit, and which is fixed to one side of the fixed end block away from the piezoelectric body along the first direction, and the third segment of the amplification unit is connected to the connecting segment.

[0022] Preferably, the piezoelectric vibrator further includes a buffer member, the buffer members being of two number, the two buffer members being fixed to one side of the first segment away from the piezoelectric body and spaced apart from the fourth segment.

[0023] Preferably, the cushioning member is made of a high molecular weight polymer.

[0024] Preferably, the piezoelectric vibrator further includes a connecting segment, which is made of the same metal as the amplifying unit, the connecting segment is fixed to the outside of the piezoelectric body along the first direction, and the corresponding third segments of the two amplifying units are each connected to the connecting segment.

[0025] Preferably, the piezoelectric vibrator further includes a buffer member, the buffer members being of two number, the two buffer members being fixed to one side of the first segment away from the piezoelectric body and spaced apart from the fourth segment.

[0026] Preferably, the cushioning member is made of a high molecular weight polymer.

[0027] Preferably, the corresponding sixth segments in the two amplification units each extend in a direction away from the first segment, and opposing sides of the fixed end block along the second direction are interposed between the extending portions of the two sixth segments.

[0028] Preferably, the piezoelectric vibrator further includes a buffer member, the buffer members being of two number, the two buffer members being fixed to one side of the first segment away from the piezoelectric body and spaced apart from the fourth segment.

[0029] Preferably, the cushioning member is made of a high molecular weight polymer.

[0030] Preferably, there are three amplifying units, each of which is a first amplifying unit, a second amplifying unit and a third amplifying unit, the three amplifying units are all located on the same side of the piezoelectric body and jointly form a three-layer elastic element structure, the first amplifying unit and the second amplifying unit are connected in parallel, the third segment of the first amplifying unit and the third segment of the second amplifying unit are all manufactured from the same metal sheet, the sixth segment of the first amplifying unit and the sixth segment of the second amplifying unit are all manufactured from the same metal sheet, the third amplifying unit is stacked on one side of the first amplifying unit and the second amplifying unit away from the piezoelectric body, and the third amplifying unit is stacked on one side of the first amplifying unit and the second amplifying unit away from the piezoelectric body. The first segment of the width unit, the sixth segment of the first amplification unit, and the sixth segment of the second amplification unit are all manufactured from the same metal sheet, the two second segments of the third amplification unit are each the fifth segment extending from the sixth segment where the first amplification unit and the second amplification unit are connected to each other, the two third segments of the third amplification unit are each the fourth segment of the first amplification unit and the fourth segment of the second amplification unit, and the two sixth segments of the third amplification unit are respectively attached and fixed to the fourth segment of the first amplification unit and the fourth segment of the second amplification unit.

[0031] Preferably, there are two amplifying units, and the two amplifying units are located on opposite sides of the piezoelectric body, respectively.

[0032] In a second aspect, the present invention further provides a piezoelectric vibrator assembly, the piezoelectric vibrator assembly including at least two of the piezoelectric vibrators, the two piezoelectric vibrators being stacked and fixed along the second direction, and the fourth segments of the adjacent amplification units of the two piezoelectric vibrators being bonded together and fixed. Effect of the Invention

[0033] Compared with the related art, the piezoelectric vibrator and piezoelectric vibrator assembly of the present invention has a piezoelectric body and an amplifying unit supported and fixed on at least one of the opposing sides of the piezoelectric body, the piezoelectric body is made of a material with a single or multiple layer piezoelectric effect, when the piezoelectric body is subjected to an external voltage, the piezoelectric body expands or contracts along a first direction parallel to the plane on which the piezoelectric body is located due to the inverse piezoelectric effect, and at the same time, the amplifying unit is composed of an elastic reinforcing element and has a flat structure having the same shape as the piezoelectric body, and the elastic reinforcing element is a metal sheet, so that the amplifying unit is configured to contract or expand along a second direction, and the first direction and the second direction are perpendicular to each other, and this structure improves the problem that the response displacement of the piezoelectric body is small or the applied voltage is large, so that the piezoelectric vibrator and piezoelectric vibrator assembly of the present invention have a small volume, a fast response, an adjustable resonance frequency, a wide operating frequency and a high energy conversion efficiency. [Brief description of the drawings]

[0034] [Figure 1] 1 is a schematic perspective view showing a configuration of a piezoelectric vibrator according to a first embodiment of the present invention. [Diagram 2] 2 is a cross-sectional view taken along line AA in FIG. 1. [Diagram 3] 1 is a schematic diagram showing a configuration of a piezoelectric body of a piezoelectric vibrator according to a first embodiment of the present invention. [Figure 4] 5A to 5C are schematic diagrams showing another configuration of the piezoelectric body of the piezoelectric vibrator according to the first embodiment of the present invention. [Diagram 5] 3 is a schematic diagram illustrating the principle of the amplification factor of the piezoelectric vibrator according to the first embodiment of the present invention. FIG. [Figure 6] 4 is a schematic perspective view showing another configuration of the piezoelectric vibrator according to the first embodiment of the present invention. FIG. [Figure 7] 10 is a schematic perspective view showing the configuration of a piezoelectric vibrator according to Example 2 of the present invention. FIG. [Figure 8] 8 is a cross-sectional view taken along the line BB in FIG. 7. [Figure 9] 10 is a schematic perspective view showing another configuration of a piezoelectric vibrator according to Example 2 of the present invention. FIG. [Figure 10] 11 is a schematic perspective view showing the configuration of a piezoelectric vibrator according to Example 3 of the present invention. FIG. [Figure 11] 11 is a cross-sectional view taken along the line CC in FIG. 10. [Figure 12] 13 is a schematic perspective view showing another configuration of a piezoelectric vibrator according to Example 3 of the present invention. FIG. [Figure 13] FIG. 11 is a schematic perspective view showing the configuration of a piezoelectric vibrator according to Example 4 of the present invention. [Figure 14] 13 is a schematic perspective view showing the configuration of a piezoelectric vibrator according to Example 5 of the present invention. FIG. [Figure 15] 13 is a schematic perspective view showing the configuration of a piezoelectric vibrator according to Example 6 of the present invention. FIG. [Figure 16] 13 is an exploded perspective view showing a partial configuration of a piezoelectric vibrator according to Example 7 of the present invention. FIG. [Figure 17] FIG. 13 is a schematic diagram showing a configuration of a piezoelectric vibrator assembly according to Example 8 of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0035] The present invention will be further described below with reference to the drawings and embodiments.

[0036] Example 1 A first embodiment of the present invention provides a piezoelectric vibrator 100 .

[0037] 1 and 2, specifically, the piezoelectric vibrator 100 includes a piezoelectric body 1 and an amplifying unit 2 supported and fixed to at least one of the opposing sides of the piezoelectric body 1. As shown in FIG.

[0038] In this first embodiment, the piezoelectric vibrator 100 further includes a fixed end block 3. The fixed end block 3 is used to support and connect the amplification unit 2 to the piezoelectric body 1.

[0039] The piezoelectric body 1 is made of a material with a piezoelectric effect, either in a single layer or in multiple layers.

[0040] As shown in FIG. 3, specifically, the piezoelectric body 1 includes a plurality of stacked internal electrodes 11 having different polarities, a plurality of stacked piezoelectric layers 12 surrounding the outer peripheral edge of the internal electrodes 11 and electrically connected to the internal electrodes 11, and an external electrode 13 surrounding the outer peripheral edge of the piezoelectric layers 12 and electrically connected to the piezoelectric layers 12.

[0041] The first direction X is the length direction of the piezoelectric body 1. The first direction X is parallel to a plane in which the piezoelectric body 1 is located.

[0042] The internal electrodes 11 and the piezoelectric layers 12 are both stacked in a second direction Y. The internal electrodes 11 of different polarities are alternately provided and connected to the external electrodes 13 corresponding thereto.

[0043] The second direction Y is the direction of the thickness of the piezoelectric body 1. The first direction X and the second direction Y are perpendicular to each other.

[0044] In this embodiment 1, the piezoelectric body 1 is made of a single-layer or multi-layer piezoelectric ceramic. Preferably, the piezoelectric layers 12 are all made of a single-layer or multi-layer lead zirconate titanate ceramic. The piezoelectric body 1 has a first expansion and contraction direction of 10 mm or less and a second expansion and contraction direction of 100 mm or less, and the thickness of the piezoelectric body 1 can be appropriately optimized according to the application scene and the number of layers of lead zirconate titanate ceramic.

[0045] Of course, in another embodiment, the piezoelectric body 1 is made of multilayer piezoelectric ceramics poled along the first direction X, as shown in Fig. 4. The displacement strain direction of the piezoelectric body 1 is in the same dimension as the applied electric field direction, and adopts the inverse piezoelectric effect in the d33 direction (piezoelectric longitudinal effect direction). In this operation mode, a biasing force needs to be applied to the piezo stack to avoid the piezoelectric body 1 from breaking down.

[0046] The piezoelectric body 1 has a rectangular or circular shape. In this embodiment, the piezoelectric body 1 has a rectangular shape. Of course, this is not limited to this, and in another embodiment, as shown in FIG. 5, the piezoelectric body 1A has a rectangular shape.

[0047] The amplifying unit 2 has a rectangular, square or circular shape. In the present embodiment, the piezoelectric body 1 has a square shape, and the amplifying unit 2 has a circular shape, different from the piezoelectric body 1.

[0048] The amplification unit 2 is a flat structure 20, which is composed of an elastic reinforcing element and has the same shape as the piezoelectric body 1. The elastic reinforcing element is a metal sheet. The material of the metal sheet includes metal materials such as titanium, titanium alloy, stainless steel, copper and copper alloy. The elastic reinforcing element may be press-molded, so that the manufacturing cost of the piezoelectric vibrator 100 is low.

[0049] Specifically, the amplification unit 2 includes a first segment 21 fixed to the piezoelectric body 1, two second segments 22 each extending at an angle from both opposing ends of the first segment 21, bending the first segment 21 away from the piezoelectric body 1, two third segments 23 each extending from the two second segments 22 in a direction away from the first segment 21 and spaced apart from the piezoelectric body 1, a fourth segment 24 that is a mirror image of the first segment 21 at a distance, two fifth segments 25 each extending outward from the fourth segment and each mirror image of the two second segments 22 at a distance, and two sixth segments 26 each bonded to the two third segments 23 and mirror image symmetric. Each of the third segments 23 is bonded to and fixed to a corresponding one of the sixth segments 26, and constitutes a thickened end portion 2A of the segment of the amplification unit 2 in cooperation with the sixth segment 26.

[0050] The thickened end portion 2A is supported and fixed to the piezoelectric body 1. In this embodiment 1, the thickened end portion 2A is supported and fixed to the piezoelectric body 1 via the fixed end block 3. The fixed end block 3 is provided so as to be electrically insulated from the piezoelectric body 1. In a specific production and manufacturing process, the fixed end block 3 is connected to both ends of the piezoelectric body 1 by a method such as bonding with an adhesive.

[0051] The first segment 21, the second segment 22, the fourth segment 24 and the fifth segment 25 together constitute the flat structure 20. The flat structure 20 is fixed to an end adjacent to the outer edge of the piezoelectric body 1, thereby making full use of the mechanical deformation of the piezoelectric body 1. The amplifying unit 2 adopts a triangular amplifying principle, and the amplifying unit 2 on one side of the piezoelectric body 1 adopts two layers of the elastic reinforcing element to constitute a diamond amplifying unit structure, i.e., the flat structure 20.

[0052] The sixth segment 26 forms a platform and is used to connect the load that needs to be driven or the base for fixing. In the amplifying unit 2, the angle of the diamond bottom cannot be too small and is generally larger than the angle of the diamond top, and the stiffness of the amplifying unit 2 cannot be too large to avoid excessively restricting the expansion and contraction displacement of the piezoelectric layer.

[0053] In this embodiment 1, the length of the thickened end 2A along the first direction X is equal to half the length of the flat structure 20 along the first direction X. With this structure, the flat structure 20 becomes a diamond-shaped amplified unit structure.

[0054] When the piezoelectric body 1 receives an external voltage, due to the inverse piezoelectric effect, the piezoelectric body 1 expands or contracts along a first direction X parallel to the plane in which the piezoelectric body 1 is located, i.e. perpendicular to the electric field direction of the internal electrodes, and adopts the d31 effect (piezoelectric transverse effect). At the same time, the amplifying unit 2 contracts or expands along a second direction Y. The amplifying unit 2 can not only convert the motion direction from the first direction X to the second direction Y, but also amplify the displacement of the piezoelectric body 1 along the first direction X, thereby improving the problem that the response displacement of the piezoelectric body 1 is small or the applied voltage is large. The structural advantage is that by adopting the inverse piezoelectric effect of the piezoelectric material of the piezoelectric body 1, the biasing force can be applied without being affected by the electromagnetic environment, and the piezoelectric material is in an expansion and contraction mode, which greatly improves the material reliability compared with the bending mode. As a result, the piezoelectric vibrator 100 of the present invention has a small volume, a fast response, an adjustable resonance frequency, a wide operating frequency, and a high energy conversion efficiency. Therefore, the piezoelectric vibrator 100 of the present invention is used as a piezoelectric motor for tactile feedback in many fields such as mobile phones, tablets, notebook computers, car-mounted devices, touch pens, etc., the piezoelectric vibrator 100 of the present invention is used in basic electronic devices in application fields such as speaker sound units, screen sound, and bone conduction, and the piezoelectric vibrator 100 of the present invention is used as a pressure sensor to sense pressure changes in the outside world and convert them into voltage signals.

[0055] Preferably, there are two amplifying units 2. The two amplifying units 2 are located on opposite sides of the piezoelectric body 1. This configuration contributes to further improving the displacement amplification ratio of the piezoelectric vibrator 100 of the present invention.

[0056] In this embodiment 1, the first segment 21 is fixed at the center position of the piezoelectric body 1. The amplification unit 2 has a symmetrical structure with the first segment 21 as the center. This structure converts the lateral displacement of the piezoelectric body 1 into the longitudinal displacement of the amplification unit 2. As shown in FIG. 6, the amplification factor of the piezoelectric vibrator 100 is the ratio of the displacement amount of the piezoelectric body 1 along the first direction X to the displacement amount of the amplification unit 2 along the second direction Y. When the displacement amount of the piezoelectric body 1 along the first direction X is Δx1 and the displacement amount of the amplification unit 2 along the second direction Y is Δx2, the amplification factor of the piezoelectric vibrator 100 satisfies the formula Δx2 / Δx1. Therefore, the amplification unit 2 can be constructed by combining two layers of metal brackets, and the overall amplification factor is the overlap of the upper and lower parts of the diamond shape formed by the metal brackets, thereby further increasing the amplification factor. In a specific design, the amplification factor of the amplifying unit 2 can be flexibly designed, and various design goals can be achieved by changing the opening angle and structure of the upper and lower metal brackets respectively.

[0057] The fixed end block 3 is made of metal. The fixed end block 3 made of metal contributes to manufacturing and forming.

[0058] The fixed end blocks 3 are respectively connected to the piezoelectric body 1 and the amplification unit 2, and are located at the edge of the piezoelectric body 1. The amplification unit 2 is connected to the edge of the end of the piezoelectric body 1 to make full use of the deformation occurring in the piezoelectric body 1, and most preferably, the extending cross beam of the sixth segment 26 is parallel to the surface of the piezoelectric body 1 and is adhered or soldered to both ends of the piezoelectric body 1 via the thickened end 2A, to avoid relative slip between the amplification structure and the piezoelectric layer.

[0059] In the present embodiment 1, there are at least two fixed end blocks 3. Each of the amplification units 2 is connected to the piezoelectric body 1 via one of the fixed end blocks 3.

[0060] Example 2 A second embodiment of the present invention provides a piezoelectric vibrator 200 .

[0061] The piezoelectric vibrator 200 according to the second embodiment of the present invention is basically the same as the piezoelectric vibrator 100 according to the first embodiment of the present invention, and the piezoelectric vibrator 200 according to the second embodiment of the present invention is distinguished from the piezoelectric vibrator 100 as follows.

[0062] 7 and 8, the amplifying unit 2a further includes a bent portion 2Ca that is bent and extends obliquely from the thickened end portion 2Aa toward the edge of the piezoelectric body 1a, and a fixed portion 2Ba that is fixed to the edge of the piezoelectric body 1a. The fixed portion 2Ba is provided so as to be electrically insulated from the piezoelectric body 1a.

[0063] This structure is fixed to the piezoelectric body 1a by the thickened end 2Aa acting as a parallel cross beam, the bent portion 2Ca provided at a predetermined angle downward from the thickened end 2Aa, and the fixing portion 2Ba is further provided, and the same function as the amplification unit 2 of the piezoelectric vibrator 100 of the first embodiment of the present invention can be realized. Naturally, the amplification unit 2a has a certain difference from the amplification unit 2 in the difficulty of mounting and performance.

[0064] In contrast to the piezoelectric vibrator 100 of the first embodiment, the bent portion 2Ca and the fixed portion 2Ba in the second embodiment cooperate to form the fixed end block 3 of the piezoelectric vibrator 100 of the first embodiment.

[0065] In the piezoelectric vibrator 200 of the second embodiment of the present invention, the amplification unit 2a is provided with the bent portion 2Ca and the fixed portion 2Ba that are directly connected to the piezoelectric body 1a, thereby eliminating the need to provide the structure of the fixed end block 3 of the piezoelectric vibrator 100 of the first embodiment separately, simplifying the overall solution and contributing to the processing and manufacturing of the piezoelectric vibrator 200. The bent portion 2Ca added to the structure of the piezoelectric vibrator 200 of the second embodiment of the present invention has a certain deformation, and its displacement amplification performance is inferior to that of the piezoelectric vibrator 100 of the first embodiment of the present invention.

[0066] In this embodiment 2, there is at least one amplifying unit 2a, the amplifying unit 2a is located on one side of the piezoelectric body 1a, and the other side of the piezoelectric body 1a is used to provide a structure with the same shape as the piezoelectric body 1a. The other side of the piezoelectric body 1a is connected to another amplifying unit 2a or another mountable structure used for buffer amplification, that is, the structure provided on the other side of the piezoelectric body 1a can adopt other structures according to the needs of actual design, for example, another amplifying unit 2a can adopt other mountable structures according to the needs.

[0067] In another embodiment, as shown in FIG. 9, the piezoelectric body 1Aa has an elongated shape.

[0068] Example 3 A third embodiment of the present invention provides a piezoelectric vibrator 300 .

[0069] The piezoelectric vibrator 300 according to the third embodiment of the present invention is basically the same as the piezoelectric vibrator 100 according to the first embodiment of the present invention, and the piezoelectric vibrator 300 according to the third embodiment of the present invention is distinguished from the piezoelectric vibrator 100 according to the first embodiment as follows.

[0070] 10-11, the amplifying unit 2b further includes a fixing portion 2Bb extending from the thickened end portion 2Ab and fixed to an edge of the piezoelectric body 1b. The thickened end portion 2Ab is bent and extends obliquely from the flat structure 20b toward the edge of the piezoelectric body 1b. The fixing portion 2Bb is provided so as to be electrically insulated from the piezoelectric body 1b.

[0071] In comparison with the piezoelectric vibrator 100 of the first embodiment, the fixed portion 2Bb in the third embodiment is the fixed end block 3 of the piezoelectric vibrator 100 of the first embodiment.

[0072] In the piezoelectric vibrator 300 of the third embodiment of the present invention, the fixed portion 2Bb directly connected to the piezoelectric body 1b is provided in the amplifying unit 2b, so that it is not necessary to provide the structure of the fixed end block 3 of the piezoelectric vibrator 100 of the first embodiment alone, simplifying the overall solution and contributing to the processing and manufacturing of the piezoelectric vibrator 300. However, in this structure, the connection to the piezoelectric body 1b is made via an inclined cantilever, i.e., the inclined thickened end portion 2Ab, and the amplification factor of the entire amplifying structure can be adjusted by changing the length of the inclined thickened end portion 2Ab, and the thickened end portion 2Ab has a certain deformation as a cantilever, so that the displacement amplification performance is inferior to the piezoelectric vibrator 100 of the first embodiment and the piezoelectric vibrator 200 of the second embodiment of the present invention.

[0073] In this embodiment 3, there is at least one amplifying unit 2b, and the amplifying unit 2b is located on one side of the piezoelectric body 1b, and the other side of the piezoelectric body 1a is used to provide a structure with the same shape as the piezoelectric body 1b. The other side of the piezoelectric body 1b is connected to another amplifying unit 2b or another mountable structure used for buffer amplification, that is, the structure provided on the other side of the piezoelectric body 1b can adopt another structure according to the needs of actual design, for example, another amplifying unit 2b can adopt another mountable structure according to the needs.

[0074] In another embodiment, as shown in FIG. 12, the piezoelectric body 1Ab has an elongated shape.

[0075] Example 4 A fourth embodiment of the present invention provides a piezoelectric vibrator 400 .

[0076] The piezoelectric vibrator 400 according to the fourth embodiment of the present invention is basically the same as the piezoelectric vibrator 100 according to the first embodiment of the present invention, and the piezoelectric vibrator 400 according to the fourth embodiment of the present invention is distinguished from the piezoelectric vibrator 100 according to the first embodiment as follows.

[0077] As shown in Fig. 13, specifically, there is at least one fixed end block 3c. The fixed end block 3c is fixed to the outer side of the piezoelectric body 1c in the first direction Xc. The corresponding thickened ends 2Ac of the two amplifying units 2c are fixed to both opposing sides of the fixed end block 3c in the second direction Yc.

[0078] The piezoelectric vibrator 400 further includes a connection segment 4c. The connection segment 4c is made of the same metal as the amplification unit 2c. The connection segment 4c is fixed to one side of the fixed end block 3c that is away from the piezoelectric body 1c along the first direction Xc. The third segment 23c of the amplification unit 2c is connected to the connection segment 4c. The structure of the piezoelectric vibrator 400 is such that the fixed end blocks 3c on both sides of the piezoelectric body 1c are designed as a whole, and the third segment 23c of the amplification unit 2c can be molded integrally with the connection segment 4c, thereby improving the reliability of the piezoelectric vibrator 400.

[0079] The end of the piezoelectric vibrator 400 is designed in such a way that the connecting segment 4c and one of the fixed end blocks 3c are integrated to realize a rigid body from top to bottom, and the outside of the piezoelectric vibrator 400 is welded to the third segment 23c via the connecting segment 4c, providing higher strength support.

[0080] The piezoelectric body 1c and the fixed end block 3c are connected by a biasing force, and the piezoelectric body 1c is subjected to pressure only and not tension, thereby avoiding the problem of insufficient strength of the connection by adhesive or simply serving as an auxiliary positioning means, thereby improving the reliability of the piezoelectric vibrator 400.

[0081] In the structure of the piezoelectric vibrator 400, the two amplifying units 2c further form a complete elastic amplifying frame, and the piezoelectric body 1c is positioned and energized after the overall assembly is completed, thereby simplifying the overall assembly process and making the piezoelectric vibrator 400 easier to manufacture.

[0082] In order to improve the amplification factor of the amplifying unit 2c, the piezoelectric vibrator 400 according to the fourth embodiment of the present invention is structurally the same as the piezoelectric vibrator 100 according to the first embodiment of the present invention, and has two amplifying units 2c. The two amplifying units 2c are located on opposite sides of the piezoelectric body 1c, respectively.

[0083] In this fourth embodiment, the piezoelectric vibrator 400 further includes a buffer member 5c. There are two buffer members 5c. The two buffer members 5c are fixed to one side of the first segment 21c that is spaced apart from the piezoelectric body 1c and are provided at an interval from the fourth segment 24c.

[0084] The buffer material 5c is made of a high molecular weight polymer. Preferably, the buffer member 5c is made of a high molecular weight polymer such as foam or rubber. In the fourth embodiment, the buffer member 5c is made of foam. The buffer member 5c using foam for buffering prevents the structure from collapsing, and the buffer member 5c can be a position control and buffer structure, which prevents the piezoelectric vibrator 400 from being damaged by excessive pressure or from being disabled by excessive pressure, thereby improving the reliability of the piezoelectric vibrator 400.

[0085] Example 5 A fifth embodiment of the present invention provides a piezoelectric vibrator 500 .

[0086] The piezoelectric vibrator 500 according to the fifth embodiment of the present invention is basically the same as the piezoelectric vibrator 100 according to the first embodiment of the present invention, and the piezoelectric vibrator 500 according to the fifth embodiment of the present invention is distinguished from the piezoelectric vibrator 100 according to the first embodiment as follows.

[0087] As shown in Fig. 14, specifically, the piezoelectric vibrator 500 further includes a connection segment 4d. The connection segment 4d is made of the same metal as the amplification unit 2d. The connection segment 4d is fixed to the outside of the piezoelectric body 1d along the first direction Xd. The corresponding third segments 23d of the two amplification units 2d are each connected to the connection segment 4d.

[0088] There is at least one fixed end block 3d. The fixed end block 3d is fixed to one side of the connection segment 4d that is separated from the piezoelectric body 1d along the first direction Xd. In the structure of the piezoelectric vibrator 500, the fixed end block 3d is disposed on the outermost side between the piezoelectric body 1d and the amplification unit 2d.

[0089] The piezoelectric vibrator 500 is designed to have a rigid body from top to bottom by welding the fixed end block 3d to the end of the connecting segment 4d, and the inner side is welded to the third segment 23d via the connecting segment 4d, providing higher strength support, thereby improving the reliability of the piezoelectric vibrator 500.

[0090] The piezoelectric body 1d and the fixed end block 3d are connected by a biasing force, and the piezoelectric body 1d is subjected to only pressure and not tensile force, thereby avoiding the problem of insufficient strength of the connection by adhesive or simply serving as an auxiliary positioning means, thereby improving the reliability of the piezoelectric vibrator 500.

[0091] In the structure of the piezoelectric vibrator 500, the two amplifying units 2d further form a complete elastic amplifying frame, which makes it possible to position and energize the piezoelectric body 1d after the overall assembly is completed first, simplifying the overall assembly process and thereby making the piezoelectric vibrator 500 easier to manufacture.

[0092] In order to improve the amplification factor of the amplifying unit 2d, the piezoelectric vibrator 500 according to the fifth embodiment of the present invention is structurally the same as the piezoelectric vibrator 100 according to the first embodiment of the present invention, and has two amplifying units 2d. The two amplifying units 2d are located on opposite sides of the piezoelectric body 1d, respectively.

[0093] In this fifth embodiment, the piezoelectric vibrator 100 further includes a buffer member 5d. There are two buffer members 5d. The two buffer members 5d are fixed to one side of the first segment 21d that is spaced apart from the piezoelectric body 1d, and are provided at an interval from the fourth segment 24d.

[0094] The buffer material 5d is made of a high molecular weight polymer. Preferably, the buffer member 5d is made of a high molecular weight polymer such as foam or rubber. In this embodiment 5, the buffer member 5d is made of foam. The buffer member 5d using foam as a buffer prevents the structure from collapsing, and the buffer member 5d can be a position control and buffer structure, which prevents the piezoelectric vibrator 500 from being subjected to excessive pressure and being destroyed or being disabled by excessive pressure, thereby improving the reliability of the piezoelectric vibrator 500.

[0095] Example 6 A sixth embodiment of the present invention provides a piezoelectric vibrator 600 .

[0096] The piezoelectric vibrator 600 according to the sixth embodiment of the present invention is basically the same as the piezoelectric vibrator 500 according to the fifth embodiment of the present invention, and the piezoelectric vibrator 600 according to the sixth embodiment of the present invention is distinguished from the piezoelectric vibrator 500 according to the fifth embodiment as follows.

[0097] 15, specifically, the corresponding sixth segments 26f in the two amplifying units 2f extend in a direction away from the first segment 21f, and both sides of the fixed end block 3f facing the second direction Yf are interposed between the extending parts of the two sixth segments 26f. In the structure of the piezoelectric vibrator 600, the amplifying unit 2f and the fixed end block 3f are connected in a right-angle covering mode.

[0098] The piezoelectric vibrator 600 realizes a rigid body from the top to the bottom by a structural design in which the fixed end block 3f is welded to the end of the connecting segment 4f, and the inner side is welded to the third segment 23f via the connecting segment 4d, thereby providing a higher strength support, thereby improving the reliability of the piezoelectric vibrator 600.

[0099] The piezoelectric body 1f and the fixed end block 3f are connected by a biasing force, and the piezoelectric body 1f is subjected to only pressure and not tension, thereby avoiding the problem of insufficient strength of the connection by adhesive or simply serving as an auxiliary positioning means, thereby improving the reliability of the piezoelectric vibrator 600.

[0100] In the structure of the piezoelectric vibrator 600, the two amplifying units 2f further form a complete elastic amplifying frame, which makes it possible to position and energize the piezoelectric body 1f after the overall assembly is completed first, simplifying the overall assembly process and thereby making the piezoelectric vibrator 600 easier to manufacture.

[0101] In this sixth embodiment, the piezoelectric vibrator 600 further includes a buffer member 5f. There are two buffer members 5f. The two buffer members 5f are fixed to one side of the first segment 21f that is spaced apart from the piezoelectric body 1f and are provided at an interval from the fourth portion 24f.

[0102] The buffer material 5f is made of a high molecular weight polymer. Preferably, the buffer member 5f is made of a high molecular weight polymer such as foam or rubber. In this embodiment 6, the buffer member 5f is made of foam. The buffer member 5f using foam as a buffer prevents the structure from collapsing, and the buffer member 5f can be a position control and buffer structure, which prevents the piezoelectric vibrator 600 from being subjected to excessive pressure and being destroyed or being disabled by excessive pressure, thereby improving the reliability of the piezoelectric vibrator 600.

[0103] Example 7 A seventh embodiment of the present invention provides a piezoelectric vibrator 700 .

[0104] The piezoelectric vibrator 700 according to the seventh embodiment of the present invention is basically the same as the piezoelectric vibrator 100 according to the first embodiment of the present invention, and the piezoelectric vibrator 700 according to the seventh embodiment of the present invention is distinguished from the piezoelectric vibrator 100 according to the first embodiment as follows.

[0105] As shown in FIG. 16, specifically, there are three amplifying units 2h, which are a first amplifying unit 201h, a second amplifying unit 202h, and a third amplifying unit 203h, and the three amplifying units 2h are all located on the same side of the piezoelectric body 1h and cooperate to form a three-layer elastic element structure, the first amplifying unit 201h and the second amplifying unit 202h are connected in parallel, the third segment 23h1 of the first amplifying unit 201h and the third segment 23h2 of the second amplifying unit 202h are all manufactured from the same metal sheet, the sixth segment 26h1 of the first amplifying unit 201h and the sixth segment 26h2 of the second amplifying unit 202h are all manufactured from the same metal sheet, the third amplifying unit 203h is stacked on one side of the first amplifying unit 201h and the second amplifying unit 202h that is separated from the piezoelectric body 1h, and ... stacked on the other side of the piezoelectric body 1h. The first segment 21h3 of the third amplification unit 203h, the sixth segment 26h1 of the first amplification unit 201h, and the sixth segment 26h2 of the second amplification unit 202h are all manufactured from the same metal sheet, the two second segments 22h3 of the third amplification unit 203h are the fifth segment 25h1 extending from the sixth segment 26h1 connected to the first amplification unit 201h and the second amplification unit 202h, respectively, the two third segments 23h3 of the third amplification unit 203h are the fourth segment 24h1 of the first amplification unit 201h and the fourth segment 24h2 of the second amplification unit 202h, respectively, and the two sixth segments 26h3 of the third amplification unit 203h are attached and fixed to the fourth segment 24h1 of the first amplification unit 201h and the fourth segment 24h2 of the second amplification unit 202h, respectively. The amplification unit 2h of the entire structure of the piezoelectric vibrator 700 adopts a three-layer elastic element structure design, which can further improve the displacement amplification factor. The three-layer elastic element structure can be based on the parallel distribution of two layers of diamond-shaped amplification structures in the same piezoelectric body 1h, and a third layer of the elastic reinforcing element can be provided thereon, thereby forming a multi-layer amplification structure.In the three-layer elastic element structure, a larger displacement amplification factor is provided, which is the sum of the amplification factors of the three layers of the elastic reinforcing elements.

[0106] In the seventh embodiment, the three-layer elastic element structure can be designed as a single piece and assembled in a manner of adhesive-free fixing based on bias.

[0107] In order to improve the amplification factor of the amplification unit 2h, the piezoelectric vibrator 700 of the seventh embodiment of the present invention is structurally the same as the piezoelectric vibrator 100 of the first embodiment of the present invention, and there are two amplification units 2h, and the two amplification units 2h are respectively located on opposite sides of the piezoelectric body 1h.

[0108] Example 8 An eighth embodiment of the present invention provides a piezoelectric vibrator assembly 800 .

[0109] The piezoelectric vibrator assembly 800 includes at least one of the two piezoelectric vibrators 100, two piezoelectric vibrators 200, two piezoelectric vibrators 300, two piezoelectric vibrators 400, two piezoelectric vibrators 500, two piezoelectric vibrators 600, and two piezoelectric vibrators 700. The advantage of the piezoelectric vibrator assembly 800 is that it improves the strength of the piezoelectric motor.

[0110] 17, in this embodiment 8, the piezoelectric vibrator assembly 800 includes at least two of the piezoelectric vibrators 100. The two piezoelectric vibrators 100 are stacked and fixed along the second direction Yg. The fourth segments 24g in the adjacent amplifying units 2g of the two piezoelectric vibrators 100 are bonded and fixed.

[0111] When the two piezoelectric vibrators 100 are superimposed, the piezoelectric displacement can be amplified to the maximum extent, and the overall amplification factor is the product of the amplification factors of both.

[0112] When the two piezoelectric vibrators 100 are overlapped, the amplification unit 2g may be welded or bonded to the intermediate portion.

[0113] Compared with the related art, the piezoelectric vibrator and piezoelectric vibrator assembly of the present invention comprises a piezoelectric body and an amplifying unit supported and fixed on at least one of the opposing sides of the piezoelectric body, the piezoelectric body is made of a material with a single or multiple layer piezoelectric effect, when the piezoelectric body is subjected to an external voltage, the piezoelectric body expands or contracts along a first direction parallel to the plane on which the piezoelectric body is located due to the inverse piezoelectric effect, and at the same time, the amplifying unit is composed of an elastic reinforcing element and has a flat structure having the same shape as the piezoelectric body, and the elastic reinforcing element is a metal sheet, so that the amplifying unit contracts or expands along a second direction, and the first direction and the second direction are perpendicular to each other. This structure improves the problem that the response displacement of the piezoelectric body is small or the applied voltage is large, so that the piezoelectric vibrator and piezoelectric vibrator assembly of the present invention have a small volume, a fast response, an adjustable resonance frequency, a wide operating frequency and a high energy conversion efficiency.

[0114] The above are only examples of the present invention and are not intended to limit the scope of the patent of the present invention. Any equivalent structure or equivalent flow transformation made by utilizing the contents of the specification and drawings of the present invention, or any direct or indirect application in other related technical fields, are also included in the scope of patent protection of the present invention.

Claims

1. A piezoelectric vibrator comprising: A piezoelectric body and an amplification unit supported and fixed to at least one of the opposing sides of the piezoelectric body, The piezoelectric body is made of a single layer or multiple layers of a material having a piezoelectric effect; The amplification unit is a flat structure having the same shape as the piezoelectric body and is composed of an elastic reinforcing element, the elastic reinforcing element being a metal sheet; A piezoelectric vibrator characterized in that the piezoelectric body expands or contracts along a first direction parallel to a plane in which the piezoelectric body is located when subjected to an external voltage, and the amplification unit contracts or expands along a second direction, the first direction and the second direction being perpendicular to each other.

2. The piezoelectric vibrator of claim 1, characterized in that the piezoelectric body includes a plurality of stacked internal electrodes of different polarity, a plurality of stacked piezoelectric layers surrounding the outer peripheral edges of the internal electrodes and electrically connected to the internal electrodes, and an external electrode surrounding the outer peripheral edges of the piezoelectric layers and electrically connected to the piezoelectric layers, the plurality of internal electrodes and the plurality of piezoelectric layers are all stacked along the second direction, and the plurality of piezoelectric layers are all manufactured from single-layer or multi-layer piezoelectric ceramics.

3. 2. The piezoelectric vibrator according to claim 1, wherein the piezoelectric body has a rectangular or circular shape.

4. The piezoelectric vibrator of claim 1 , wherein the piezoelectric body is made of a multi-layer piezoelectric ceramic that is polarized along the first direction.

5. The amplification unit includes a first segment fixed to the piezoelectric body, two second segments each bent from opposite ends of the first segment and extending at an angle away from the piezoelectric body, two third segments each bent from the two second segments in a direction away from the first segment and spaced apart from the piezoelectric body, a fourth segment that is a mirror image of the first segment and spaced apart from it, two fifth segments each extending outward from the fourth segment and each being a mirror image of the two second segments and spaced apart from it, and two sixth segments that are attached to the two third segments and are mirror image symmetrical, each of the third segments being attached to and fixed to a corresponding one of the sixth segments and constituting a thickened end portion of the amplification unit together with the sixth segment, the thickened end portion being supported and fixed to the piezoelectric body, and the first segment, the second segment, the fourth segment, and the fifth segment together constituting the flat structure.

6. 6. The piezoelectric vibrator of claim 5, wherein the length of the thickened end along the first direction is equal to half the length of the flat structure along the first direction.

7. The piezoelectric vibrator according to claim 5, further comprising a fixed end block, the thickened end being supported and connected to the piezoelectric body via the fixed end block, and the fixed end block being electrically insulated from the piezoelectric body.

8. The piezoelectric vibrator of claim 7, characterized in that there are two amplifying units, each of which is located on opposite sides of the piezoelectric body, there are at least two fixed end blocks, and each of the amplifying units is connected to the piezoelectric body via one of the fixed end blocks.

9. The piezoelectric vibrator of claim 5, characterized in that the first segment is fixed at a central position of the piezoelectric body, the amplification unit has a symmetrical structure centered on the first segment, and the amplification factor of the piezoelectric vibrator is the ratio between the displacement amount of the piezoelectric body along the first direction and the displacement amount of the amplification unit along the second direction.

10. The piezoelectric vibrator according to claim 5 , wherein the amplifying unit has a rectangular, square or circular shape.

11. The piezoelectric vibrator of claim 5, characterized in that the amplification unit further includes a fixing portion extending from the thickened end and fixed to an edge of the piezoelectric body, and the thickened end is bent and extends at an angle from the flat structure toward the edge of the piezoelectric body.

12. 12. The piezoelectric vibrator of claim 11, wherein there is at least one amplification unit, the amplification unit being located on one side of the piezoelectric body, and the other side of the piezoelectric body being connected to another amplification unit or to a mountable structure used for other buffer amplification.

13. The piezoelectric vibrator according to claim 5 , wherein the amplifying unit further includes a bent portion that is bent and extends obliquely from the thickened end toward an edge of the piezoelectric body, and a fixed portion that is fixed to the edge of the piezoelectric body.

14. 14. The piezoelectric vibrator of claim 13, wherein there is at least one amplification unit, the amplification unit being located on one side of the piezoelectric body, and the other side of the piezoelectric body being connected to another amplification unit or to a mountable structure used for other buffer amplification.

15. There is at least one fixed end block, and the fixed end block is fixed to the outer side of the piezoelectric body along the first direction, and the corresponding thickened ends of the two amplifying units are fixed to both opposing ends of the fixed end block along the second direction, The piezoelectric vibrator of claim 8, further comprising a connection segment, the connection segment being made of the same metal as the amplification unit, the connection segment being fixed to one side of the fixed end block away from the piezoelectric body along the first direction, and the third segment of the amplification unit being connected to the connection segment.

16. The piezoelectric vibrator of claim 15, further comprising a buffer member, the buffer member being of two types, the two buffer members being fixed to one side of the first segment away from the piezoelectric body and spaced apart from the fourth segment.

17. The piezoelectric vibrator of claim 16, wherein the buffer member is made of a polymer.

18. The piezoelectric vibrator of claim 8, further comprising a connecting segment, the connecting segment being made of the same metal as the amplifying unit, the connecting segment being fixed to the outside of the piezoelectric body along the first direction, and the corresponding third segments of the two amplifying units being each connected to the connecting segment.

19. The piezoelectric vibrator of claim 18, further comprising a buffer member, the buffer member being of two types, the two buffer members being fixed to one side of the first segment away from the piezoelectric body and spaced apart from the fourth segment.

20. 20. The piezoelectric vibrator of claim 19, wherein the buffer member is made of a polymer.

21. The piezoelectric vibrator described in claim 18, characterized in that the corresponding sixth segments in the two amplifying units each extend in a direction away from the first segment, and the opposing sides of the fixed end block along the second direction are interposed between the extending portions of the two sixth segments.

22. The piezoelectric vibrator of claim 21, further comprising a buffer member, the buffer member being of two types, the two buffer members being fixed to one side of the first segment away from the piezoelectric body and spaced apart from the fourth segment.

23. 23. The piezoelectric vibrator of claim 22, wherein the buffer member is made of a polymer.

24. The number of the amplifying units is three, and the amplifying units are a first amplifying unit, a second amplifying unit and a third amplifying unit, the three amplifying units are all located on the same side of the piezoelectric body and jointly form a three-layer elastic element structure, the first amplifying unit and the second amplifying unit are connected in parallel, the third segment of the first amplifying unit and the third segment of the second amplifying unit are all manufactured from the same metal sheet, the sixth segment of the first amplifying unit and the sixth segment of the second amplifying unit are all manufactured from the same metal sheet, the third amplifying unit is stacked on one side of the first amplifying unit and the second amplifying unit away from the piezoelectric body, and the first segment of the third amplifying unit is stacked on one side of the first amplifying unit and the second amplifying unit away from the piezoelectric body.

6. The piezoelectric vibrator of claim 5, characterized in that the third amplification unit, the sixth segment of the first amplification unit, and the sixth segment of the second amplification unit are all manufactured from the same metal sheet, the two second segments of the third amplification unit are each the fifth segment extending from the sixth segment where the first amplification unit and the second amplification unit are connected to each other, the two third segments of the third amplification unit are the fourth segment of the first amplification unit and the fourth segment of the second amplification unit, respectively, and the two sixth segments of the third amplification unit are bonded and fixed to the fourth segment of the first amplification unit and the fourth segment of the second amplification unit, respectively.

25. The piezoelectric vibrator according to claim 24, wherein there are two amplifying units, the two amplifying units being located on opposite sides of the piezoelectric body, respectively.

26. 1. A piezoelectric vibrator assembly comprising: A piezoelectric vibrator assembly comprising at least two piezoelectric vibrators as described in claim 8, wherein the two piezoelectric vibrators are stacked and fixed along the second direction, and the fourth segments of the adjacent amplification units of the two piezoelectric vibrators are bonded together and fixed.

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