Cleanroom compatible robotic end effector exchange system

Abstract

The system includes a robot interface disposed on a robot arm and an end effector configured to selectively couple to the robot arm via the robot interface. The end effector includes an upper jaw, a lower jaw, and a pair of arms configured to carry a substrate. The upper and lower jaws are biased together apart in a first direction, and the pair of arms are spaced apart in a second direction orthogonal to the first direction. When the end effector is coupled to the robot arm, the robot interface is disposed between the upper and lower jaws. The upper and lower jaws may be separated to release the robot interface in order to replace the end effector.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to U.S. Provisional Patent Application No. 63 / 307,247, filed and assigned on February 7, 2022, and U.S. Provisional Patent Application No. 63 / 477,761, filed and assigned on December 29, 2022, the entire disclosures of which are incorporated herein by reference.

[0002] The present disclosure relates to robotic arms, and more particularly, to end effectors for robotic arms. [Background technology]

[0003] The evolution of the semiconductor manufacturing industry is placing greater demands on yield management, especially on metrology and inspection systems. As critical dimensions continue to shrink, the industry must reduce the time to achieve high yield, high value production. Minimizing the total time from detection to correction of a yield problem determines the return on investment for semiconductor manufacturers.

[0004] The manufacture of semiconductor devices, such as logic and memory devices, typically involves processing semiconductor wafers using a number of manufacturing processes to form various features and multiple levels of semiconductor devices. For example, lithography is a semiconductor manufacturing process that involves transferring a pattern from a reticle to a photoresist arranged on a semiconductor wafer. Additional examples of semiconductor manufacturing processes include, but are not limited to, chemical mechanical polishing (CMP), etching, deposition, and ion implantation. Multiple semiconductor devices may be manufactured in an array on a single semiconductor wafer and then separated into individual semiconductor devices.

[0005] Inspection processes are used at various stages during semiconductor manufacturing to detect defects on wafers to help improve yields in the manufacturing process and therefore profits. Inspection has always been an important part of the manufacturing of semiconductor devices such as integrated circuits (ICs). However, as the dimensions of semiconductor devices decrease, inspection becomes even more important to the successful manufacture of acceptable semiconductor devices, as smaller defects can cause device failures. For example, as the dimensions of semiconductor devices decrease, detection of defects of shrinking size becomes necessary, since even relatively small defects can cause undesirable aberrations in the semiconductor device.

[0006] Substrates may be transferred between various manufacturing and inspection processes using a robotic arm. End effectors connected to the robotic arm may be specifically shaped to perform various tasks and carry specific objects. However, existing end effectors are generally very bulky and are configured to carry objects that are much larger and / or heavier than semiconductor substrates. Existing end effectors are also generally limited to use by manufacturers of compatible robotic arms. Thus, redesign of semiconductor manufacturing and inspection systems is necessary to accommodate these end effectors.

[0007] Various steps in the manufacturing and inspection process may require different end effectors to process the substrate. Therefore, it may be desirable to quickly switch between end effectors connected to a robot arm. However, the bulkiness of existing end effectors requires an equally powerful tool changer and a larger footprint to accommodate it. Furthermore, existing tool changers are not cleanroom compatible, which may contaminate the system and the substrate. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] US Patent Application Publication No. 2016 / 0158943 Summary of the Invention [Problem to be solved by the invention]

[0009] Therefore, what is needed is an end effector and tool exchange system for transporting semiconductor substrates that is lightweight, compact, robot-free, externally actuated, and cleanroom compatible. [Means for solving the problem]

[0010] An embodiment of the present disclosure provides a system comprising a robot interface disposed on a robot arm and an end effector configured to selectively couple to the robot arm via the robot interface. The end effector may comprise an upper jaw, a lower jaw, and a pair of arms configured to carry a substrate. The upper and lower jaws may be biased together apart in a first direction, and the pair of arms may be biased apart in a second direction orthogonal to the first direction. When the end effector is coupled to the robot arm, the robot interface may be disposed between the upper and lower jaws.

[0011] According to one embodiment of the present disclosure, the end effector may further include a spring connected to the upper and lower jaws. The spring may be preloaded to bias the upper and lower jaws together.

[0012] According to one embodiment of the present disclosure, a first kinematic coupling may be provided between an upper surface of the lower jaw and a lower surface of the robotic interface. A second kinematic coupling may be provided between a lower surface of the upper jaw and an upper surface of the robotic interface. The first kinematic coupling and the second kinematic coupling may engage the robotic interface with the upper and lower jaws when the robotic interface is disposed between the upper and lower jaws.

[0013] According to one embodiment of the present disclosure, the end effector may further comprise a plunger and the robotic interface may further comprise a plunger socket. The plunger may be coupled to the plunger socket when the end effector is coupled to the robotic arm. The plunger may be selectively coupled to the plunger socket by being axially movable by the robotic arm.

[0014] According to an embodiment of the present disclosure, the system may further include a tool changer comprising a pair of gripping arms. The pair of gripping arms may be configured to separate the upper and lower jaws. The tool changer may be disposed within the garage, and the pair of gripping arms may be configured to separate the upper and lower jaws when the end effector is disposed within the garage. An optical sensor may be disposed within the garage, and the optical sensor may be configured to detect when the end effector is disposed within the garage. A measurement sensor may be disposed within the garage, and the measurement sensor may be configured to detect a thickness of the end effector.

[0015] Another embodiment of the present disclosure provides a method. The method may include disposing a robot interface on a robot arm, selectively coupling an end effector to the robot arm via the robot interface, and disposing a substrate on a pair of arms of the end effector. The end effector may include upper and lower jaws that may be biased together spaced apart in a first direction, and the pair of arms may be spaced apart in a second direction orthogonal to the first direction. When the end effector is coupled to the robot arm, the robot interface may be disposed between the upper and lower jaws.

[0016] According to one embodiment of the present disclosure, selectively coupling the end effector to the robot arm via a robot interface may include separating an upper jaw and a lower jaw with a tool changer having a pair of gripping arms, inserting the robot interface between the upper jaw and the lower jaw, and closing the upper jaw and the lower jaw on the robot interface.

[0017] According to one embodiment of the present disclosure, a tool changer may be disposed within the garage, and separating the upper and lower jaws using the tool changer having a pair of gripping arms may include separating the upper and lower jaws using the pair of gripping arms when the end effector is positioned within the garage.

[0018] According to one embodiment of the present disclosure, the method may further include detecting, by an optical sensor, when the end effector is located within the garage.

[0019] According to one embodiment of the present disclosure, the method may further include detecting a thickness of the end effector disposed within the garage by a measurement sensor. [Brief description of the drawings]

[0020] For a fuller understanding of the nature and objects of the present disclosure, reference should be made to the following detailed description taken in conjunction with the accompanying drawings, in which: [Figure 1] FIG. 1 illustrates a system according to one embodiment of the present disclosure. [Figure 2A] FIG. 13 is a top view of an end effector coupled to a robotic interface according to one embodiment of the present disclosure. [Figure 2B] FIG. 2B is a top view of the end effector and robot interface of FIG. 2A decoupled from each other. [Figure 3A] FIG. 2B is a side view of the end effector and robot interface of FIG. 2A coupled together. [Figure 3B] FIG. 3B is a side view of the end effector and robot interface of FIG. 3A decoupled from one another. [Figure 4A] FIG. 2B is a bottom view of the upper jaw of the end effector of FIG. 2A. [Figure 4B] FIG. 2B is a bottom view of the end effector of FIG. 2A. [Figure 4C] FIG. 2B is a top view of the lower jaw of the end effector of FIG. 2A. [Figure 4D] FIG. 4D is a bottom view of the lower jaw of FIG. 4C. [Figure 5A] FIG. 13 illustrates a garage for storing an end effector according to one embodiment of the present disclosure. [Figure 5B] FIG. 5B illustrates a tool changer separating the upper and lower jaws of the end effector of FIG. 5A. [Figure 6A] FIG. 13 is a top cross-sectional view of an end effector coupled to a robotic interface according to another embodiment of the present disclosure. [Figure 6B] FIG. 6B is a top cross-sectional view of the end effector and robot interface of FIG. 6A decoupled from one another. [Figure 7A] FIG. 13 is a top view of an end effector coupled to a robotic interface according to another embodiment of the present disclosure. [Figure 7B] FIG. 7B is a top view of the end effector and robot interface of FIG. 7A decoupled from each other. [Figure 8A] FIG. 7B is a side view of the end effector and robot interface of FIG. 7A coupled together by a pinball locking mechanism. [Figure 8B] FIG. 8B is a side view of the end effector and robot interface of FIG. 8A decoupled from each other. [Figure 9A] FIG. 7B is a side view of the end effector and robot interface of FIG. 7A coupled together by a pin lock mechanism. [Figure 9B] FIG. 9B is a side view of the end effector and robot interface of FIG. 9A decoupled from each other. [Figure 10A] FIG. 7B is a side view of the end effector and robot interface of FIG. 7A coupled together by a cam lock mechanism. [Figure 10B] FIG. 10B is a side view of the end effector and robot interface of FIG. 10A decoupled from each other. [Figure 11A] FIG. 13 is a top view of an end effector coupled to a robotic interface according to another embodiment of the present disclosure. [Figure 11B] FIG. 11B is a top view of the end effector and robot interface of FIG. 11A decoupled from each other. [Figure 12A] FIG. 11B is a side view of the end effector and robotic interface of FIG. 11A coupled together by a dovetail locking mechanism. [Figure 12B] FIG. 12B is a side view of the end effector and robot interface of FIG. 12A decoupled from each other. [Figure 13A] FIG. 11B is a side view of the end effector and robot interface of FIG. 11A coupled together by a pinball lock mechanism. [Figure 13B] FIG. 13B is a side view of the end effector and robot interface of FIG. 13A decoupled from each other. [Figure 14] 1 is a flowchart of a method according to one embodiment of the present disclosure. [Figure 15] 4 is a flowchart of a method according to another embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Although the claimed subject matter is described with respect to certain embodiments, other embodiments, including embodiments that do not provide all of the advantages and features described herein, are also within the scope of this disclosure. Various structural, logical, process, step, and electronic changes may be made without departing from the scope of the disclosure. Accordingly, the scope of the disclosure is defined solely by reference to the appended claims.

[0022] 1-5, an embodiment of the present disclosure provides a system 100. The system 100 may include a robot arm 110. The robot arm 110 may be movable with six degrees of freedom within a robot envelope. The size and shape of the robot envelope may depend on the particular configuration of the robot arm 110 (e.g., arm length, number of joints, etc.) and is not limited herein. The robot arm 110 may include any number of links, joints, or tracks, and any rotary or linear actuator mechanisms, allowing the robot arm 110 to have appropriate degrees of freedom, range, and space for a particular application. It should be understood that the phrase "robot arm" as used herein may refer to any portion of a robotic system and thus need not be embodied as an "arm."

[0023] The system 100 may further include a robotic interface 120. The robotic interface 120 may be made of a material with suitable weight, strength, and rigidity for a particular application. For example, the robotic interface 120 may be made of aluminum, titanium, ceramic, carbon fiber, steel, or other materials. The robotic interface 120 may be disposed on the robotic arm 110. For example, the robotic interface 120 may be disposed at a distal end of the robotic arm 110. It should be understood that the manner in which the robotic interface 120 is disposed on and / or secured to the robotic arm 110 may depend on the particular structure of the robotic arm 110 and is not limited herein. For example, the robotic interface 120 may be attached to a set of locating features or flanges with axial / rotational locking type features of the robotic arm 110 and secured using three or more bolts or welds. The robotic interface 120 may be an integral part of the robotic arm 110 or a portion of the robotic arm 110 may be replaced with the robotic interface 120.

[0024] The system 100 may further include an end effector 130. The end effector 130 may be made of a material of suitable weight, strength, and rigidity for a particular application. For example, the end effector 130 may be made of aluminum, titanium, ceramic, carbon fiber, steel, or other materials. The end effector 130 may be configured to selectively couple to the robotic arm 110 via a robotic interface 120. The end effector 130 may include an upper jaw 140 and a lower jaw 150, as shown in FIGS. 3A and 3B. The upper jaw 140 and the lower jaw 150 may be spaced apart in a first direction. The upper jaw 140 and the lower jaw 150 may be biased together. When the end effector 130 is coupled to the robotic arm 110, the robotic interface 120 may be disposed between the upper jaw 140 and the lower jaw 150.

[0025] The end effector 130 may further include a pair of arms 132, as shown in FIGS. 2A and 2B. The pair of arms 132 may be integrally formed with the upper jaw 140 and / or the lower jaw 150. The pair of arms 132 may be configured to carry the substrate 101. The substrate 101 may have a circular or rectangular shape. The pair of arms 132 may be spaced apart in a second direction. The second direction may be orthogonal to the first direction. The pair of arms 132 may include one or more protrusions 133 configured to contact the substrate 101. The one or more protrusions 133 may be comprised of an elastomeric material and may provide a gripping force when contacting the substrate 101. The one or more protrusions 133 may have a hook-like structure or an angled surface forming an acute angle to provide a force vector for pressing the substrate 101 onto the pair of arms 132. It should be understood that the end effector 130 may alternatively comprise a structure other than a pair of arms 132 configured to carry the substrate 101. Such a structure may be of any shape, such as a T-shape, a web-like structure, a solid flat plate, or other structure.

[0026] The end effector 130 may further include a spring 134 connected to the upper jaw 140 and the lower jaw 150. For example, as shown in FIG. 3A, a first end 134a of the spring 134 may be connected to the upper jaw 140 and a second end 134b of the spring 134 may be connected to the lower jaw 150. The spring 134 may be disposed within an upper guide 143 of the upper jaw 140 and a lower guide 153 of the lower jaw 150. The upper guide 143 and the lower guide 153 may be cylindrical channels extending through the upper jaw 140 and the lower jaw 150, respectively. The upper guide 143 may include an upper cross rod 144 that intersects the upper guide 143 on the upper surface 141 of the upper jaw 140, and the lower guide 153 may include a lower cross rod 154 that intersects the lower guide 153 on the lower surface 152 of the lower jaw 150. A first end 134a of the spring 134 may be connected to the upper cross rod 144, and a second end 134b of the spring may be connected to the lower cross rod 154. For example, the first and second ends 134a and 134b of the spring may have a hook or ring shape that may wrap around the upper and lower cross rods 144 and 154, respectively. The spring 134 may be preloaded to bias the upper and lower jaws 140 and 150 together. In other words, the distance between the lower surface 142 of the upper jaw 140 and the upper surface 151 of the lower jaw 150 may be less than the free length of the spring 134. In this manner, the spring 134 may bias the upper jaw 140 and the lower jaw 150 together.

[0027] According to one embodiment of the present disclosure, the end effector 130 may include four springs 134 connected to the upper jaw 140 and the lower jaw 150. Each spring 134 may be disposed within a respective upper guide 143 and lower guide 153 and may have a first end 134a connected to an upper lateral rod 144 and a second end 134b connected to a lower lateral rod 154 disposed in each upper guide 143 and lower guide 153, respectively. The four springs 134 may be arranged in a square or rectangular shape, as shown in FIGS. 4A, 4C, and 4D.

[0028] The system 100 may further comprise one or more kinematic couplings. The kinematic couplings may engage with each other when the end effector 130 is coupled to the robot arm 110 via the robot interface 120. When the kinematic couplings are engaged, the end effector 130 and the robot interface 120 may be prevented from moving relative to each other (i.e., the end effector 130 and the robot interface 120 may be constrained in all six degrees of freedom). The one or more kinematic couplings may include contact points between a conical, spherical, hemispherical, cylindrical, or canoe-shaped feature of one of the end effector 130 and the robot interface 120 and a tetrahedral, conical, V-shaped, or flat groove of another of the end effector 130 and the robot interface 120. It should be appreciated that in order to constrain all six degrees of freedom, the kinematic coupling may provide at least six contact points between the end effector 130 and the robot interface 120. The six contact points may be established by one or more combinations of tetrahedral grooves (three contact points), V-grooves (two contact points), or flat grooves (one contact point). Alternatively, the kinematic coupling may provide an annular contact between the end effector 130 and the robotic interface 120 by a conical groove.

[0029] A first kinematic coupling may be provided between the upper surface 151 of the lower jaw 150 and the lower surface 122 of the robotic interface 120. For example, one or more spherical structures 156 may be disposed on the upper surface 151 of the lower jaw 150 (as shown in FIG. 4C) and one or more V-shaped grooves 126 may be disposed on the lower surface 122 of the robotic interface 120 (as shown in FIG. 4B). In one embodiment, the first kinematic coupling may be defined by three spherical structures 156 and three V-shaped grooves 126, where each of the three spherical structures 156 is aligned (in the axial and second directions) with a respective one of the three V-shaped grooves 126. Thus, when the end effector 130 is coupled to the robot arm 110 via the robot interface 120, the first kinematic coupling may provide six contact points (i.e., two contact points per pair of spherical structures 156 and V-shaped grooves 126) to constrain all six degrees of freedom. The three spherical structures 156 and the three V-shaped grooves 126 may be arranged in a triangle. For example, two of the spherical structures 156 and two of the V-shaped grooves 126 may be disposed on one side of the lower jaw 150 and the robot interface 120, respectively, and the remaining spherical structures 156 and V-shaped grooves 126 may be disposed on another side of the lower jaw 150 and the robot interface 120, respectively. The three V-shaped grooves 126 may be angled relative to each other. For example, the three V-shaped grooves 126 may be angled at about 120° relative to each other. Although the spherical structure 156 and V-shaped groove 126 are described as being part of the lower jaw 150 and the robotic interface 120, respectively, the opposite arrangement (i.e., an arrangement in which the lower jaw 150 has the V-shaped groove and the robotic interface 120 has the spherical structure) is also considered to be within the scope of the present disclosure.

[0030] A second kinematic coupling may be provided between the lower surface 142 of the upper jaw 140 and the upper surface 121 of the robotic interface 120. For example, one or more spherical structures 146 may be disposed on the lower surface 142 of the upper jaw 140 (as shown in FIG. 4A ) and one or more V-shaped grooves 127 may be disposed on the upper surface 121 of the robotic interface 120 (as shown in FIG. 2B ). In one embodiment, the second kinematic coupling may be defined by three spherical structures 146 and three V-shaped grooves 127, where each of the three spherical structures 146 is aligned (in the axial and second directions) with a respective one of the three V-shaped grooves 127. Thus, when the end effector 130 is coupled to the robot arm 110 via the robot interface 120, the second kinematic coupling may provide six contact points (i.e., two contact points per pair of spherical structures 146 and V-shaped grooves 127) to constrain all six degrees of freedom. The three spherical structures 146 and the three V-shaped grooves 127 may be arranged in a triangle. For example, two of the spherical structures 146 and two of the V-shaped grooves 127 may be disposed on one side of the upper jaw 140 and the robot interface 120, respectively, and the remaining spherical structures 146 and V-shaped grooves 127 may be disposed on another side of the upper jaw 140 and the robot interface 120, respectively. The three V-shaped grooves 127 may be angled relative to each other. For example, the three V-shaped grooves 127 may be angled at about 120° relative to each other. Although the spherical structure 146 and V-shaped groove 127 are described as being part of the upper jaw 140 and the robotic interface 120, respectively, the opposite arrangement (i.e., an arrangement in which the upper jaw 140 has the V-shaped groove and the robotic interface 120 has the spherical structure) is also considered to be within the scope of the present disclosure.

[0031] According to one embodiment of the present disclosure, the system 100 may include both the first kinematic coupling and the second kinematic coupling described above. Thus, when the end effector 130 is coupled to the robot arm 110 via the robot interface 120, the first kinematic coupling and the second kinematic coupling may each constrain all six degrees of freedom by providing six contact points (i.e., two contact points per pair of the spherical structures 156 and the V-shaped groove 126, and two contact points per pair of the spherical structures 146 and the V-shaped groove 127). The first kinematic coupling and the second kinematic coupling may be aligned with respect to each other. For example, each of the spherical structures 156 of the lower jaw 150, the spherical structures 146 of the upper jaw 140, the V-shaped groove 126 and the V-shaped groove 127 of the robot interface 120 may be aligned in a first direction and a second direction. Alternatively, the first kinematic coupling and the second kinematic coupling may not be aligned with respect to each other. For example, the pairs of spherical structures 156 and V-shaped grooves 126 of the first kinematic coupling may not be aligned with the pairs of spherical structures 146 and V-shaped grooves 127 of the second kinematic coupling in the first direction and / or the second direction. In one embodiment, the first kinematic coupling and the second kinematic coupling may be arranged opposite each other. For example, the positions of the pairs of spherical structures 156 and V-shaped grooves 126 of the first kinematic coupling may be a mirror image of the positions of the pairs of spherical structures 146 and V-shaped grooves 127 of the second kinematic coupling. Thus, the first kinematic coupling portion and the second kinematic coupling portion may properly engage when the robotic interface 120 is flipped to either side (i.e., so that the spherical structure 156 and the spherical structure 146 can contact both the orientations of the V-shaped groove 126 or the V-shaped groove 127).

[0032] 2A and 2B, the end effector 130 may further include a plunger 135. The plunger 135 may be disposed at the center of the end effector 130 in the second direction. The plunger 135 may have a first end 135a and a second end 135b. The robot interface 120 may further include a plunger socket 125. The plunger socket 125 may have a first end 125a and a second end 125b. When the end effector 130 is coupled to the robot arm 110 via the robot interface 120, the plunger 135 may be coupled to the plunger socket 125. For example, the first end 135a of the plunger 135 may be coupled to the second end 125b of the plunger socket 125. The robot arm 110 may be configured to axially move the coupled plunger 135 and plunger socket 125 using a pneumatic actuator or other mechanism. For example, the robot arm 110 may axially move the coupled plunger 135 and plunger socket 125 by interacting with the first end 125a of the plunger socket 125. The second end 135b of the plunger 135 may be configured to contact the substrate 101 disposed on the end effector 130. Thus, by axially moving the coupled plunger 135 and plunger socket 125, the second end 135b of the plunger 135 may press against the substrate 101 to hold the substrate on the end effector 130. The second end 135b of the plunger 135 may be constructed from an elastomeric material and may provide a gripping force when in contact with the substrate 101. The robot arm 110 may also be configured to retract the coupled plunger 135 and plunger socket 125 to release the gripping force on the substrate 101. The end effector 130 may include a preload spring 136 configured to bias the plunger 135 toward a retracted position to assist the robotic arm 110 in retracting the combined plunger 135 and plunger socket 125 .Alternatively, the robotic arm 110 may be configured to retract the combined plunger 135 and plunger socket 125 without assistance. The plunger 135 may be disposed within a bushing 137 disposed on an upper surface 151 of the lower jaw 150.

[0033] 5A and 5B, the system 100 may further include a tool changer 160. The tool changer 160 may include a pair of gripping arms 161. The pair of gripping arms 161 may include an upper gripping arm 161a and a lower gripping arm 161b. The upper gripping arm 161a and the lower gripping arm 161b may be configured to separate the upper jaw 140 and the lower jaw 150. For example, the upper gripping arm 161a may contact the lower surface 142 of the upper jaw 140, and the lower gripping arm 161b may contact the upper surface 151 of the lower jaw 150. Thus, once the pair of gripping arms 161 separates the upper jaw 140 and the lower jaw 150, the robotic interface 120 may be withdrawn from (or received into) the end effector 130, thereby providing an effective tool change. The tool changer 160 may include a single pair of gripping arms 161 disposed on one side of the end effector 130, or may include two pairs of gripping arms 161 disposed on opposite sides of the end effector 130.

[0034] The tool changer 160 may be disposed within a garage 165. The garage 165 may be configured to store one or more end effectors 130 (as shown in FIG. 1 ). For example, the garage 165 may include one or more platforms 166, with one end effector 130 disposed on each platform 166. Each end effector 130 may be disposed upside down on the platform 166 (i.e., such that the upper jaw 140 is disposed on the platform 166). Alternatively, each end effector 130 may be disposed such that the lower jaw 150 is disposed on the platform 166. The one or more platforms 166 may be vertically arranged within the garage 165. Each platform 166 may be vertically movable within the garage 165. The tool changer 160 may be vertically movable within the garage 165. When the end effector 130 is positioned within the garage 165, the pair of gripping arms 161 may be configured to separate the upper jaw 140 and the lower jaw 150. For example, the pair of gripping arms 161 may be moved vertically within the garage 165 to align with the end effector 130. The pair of gripping arms 161 may also be moved inward / outward to engage the upper jaw 140 and the lower jaw 150. It should be appreciated that a combination of vertical and inward / outward movement of the pair of gripping arms 161 may be used to avoid contact with the end effector 130 during vertical movement of the tool changer 160 and / or to engage the upper jaw 140 and the lower jaw 150. In some embodiments, the pair of gripping arms 161 may only move vertically within the garage 165 to perform a tool change without moving inward / outward. The pair of gripping arms 161 may be configured to avoid tripping the robot servo open loop of the robot arm 110 by not applying lateral forces to the end effector 130 during tool changes.

[0035] The system 100 may further include a processor 170. The processor 170 may include a microprocessor, a microcontroller, or other device.

[0036] Processor 170 may be coupled to components of system 100 in any suitable manner (e.g., via one or more transmission media, which may include wired and / or wireless transmission media) such that processor 170 may receive the output. Processor 170 may be configured to perform several functions using the output. A wafer inspection tool may receive instructions or other information from processor 170. Processor 170 may optionally receive additional information or send instructions by electronically communicating with another wafer inspection tool, wafer metrology tool, or wafer review tool (not shown).

[0037] The processor 170 may be part of a variety of systems, including a personal computer system, an image computer, a mainframe computer system, a workstation, a network appliance, an Internet appliance, or other devices. The subsystem(s) or system(s) may also include any suitable processor known in the art, such as a parallel processor. In addition, the subsystem(s) or system(s) may include a platform with high speed processing and software, either as a stand-alone or networked tool.

[0038] Processor 170 may be disposed within or otherwise part of system 100 or another device. In one example, processor 170 may be part of a stand-alone control unit or a centralized quality control unit. Multiple processors 170 may be used to define multiple subsystems of system 100.

[0039] The processor 170 may actually be implemented by any combination of hardware, software, and firmware. Also, its functions as described herein may be performed by one unit or may be divided into various components, each of which may in turn be implemented by any combination of hardware, software, and firmware. Program codes or instructions for the processor 170 to implement various methods and functions may be stored in a readable storage medium, such as a memory.

[0040] When system 100 includes two or more subsystems, the various processors 170 may be coupled to one another such that images, data, information, instructions, etc. may be transmitted between the subsystems. For example, one subsystem may be coupled to additional subsystem(s) by any suitable transmission medium, which may include any suitable wired and / or wireless transmission medium known in the art. Two or more such subsystems may also be effectively coupled by a shared computer-readable storage medium (not shown).

[0041] Processor 170 may be configured to perform a number of functions using the output of system 100 or other outputs. For example, processor 170 may be configured to transmit the output to an electronic data storage unit or another storage medium. Processor 170 may be further configured as described herein.

[0042] Processor 170 may be part of a defect review system, an inspection system, a metrology system, or some other type of system. Thus, the embodiments disclosed herein describe several configurations that can be tailored in several ways to systems having different capabilities that are more or less suitable for different applications.

[0043] Processor 170 may be configured according to any of the embodiments described herein. Processor 170 may also be configured to perform other functions or additional steps using the output of system 100 or using images or data from other sources.

[0044] The processor 170 may be communicatively coupled to any of the various components or subsystems of the system 100 in any manner known in the art. Additionally, the processor 170 may be configured to receive and / or acquire data or information from other systems (e.g., inspection results from an inspection system such as a review tool, a remote database containing design data, etc.) by way of a transmission medium, which may include wired and / or wireless portions. In this manner, the transmission medium may serve as a data link between the processor 170 and other subsystems of the system 100 or systems external to the system 100. The various steps, functions, and / or operations of the system 100 and methods disclosed herein are performed by one or more of electronic circuits, logic gates, multiplexers, programmable logic devices, ASICs, analog or digital controllers / switches, microcontrollers, or computing systems. Program instructions implementing the methods as described herein may be transmitted across or stored on a carrier medium. The carrier medium may include a storage medium, such as a read-only memory, a random access memory, a magnetic or optical disk, a non-volatile memory, a solid-state memory, a magnetic tape, etc. The carrier medium may include a transmission medium, such as a wire, cable, or wireless transmission link. For example, various steps described throughout this disclosure may be performed by a single processor 170 (or computer subsystem), or alternatively, by multiple processors 170 (or multiple computer subsystems). Furthermore, various subsystems of system 100 may include one or more computing or logic systems. As such, the above description should not be construed as a limitation on the present disclosure, but merely as an example.

[0045] The system 100 may further comprise a light sensor 171. The light sensor 171 may be in electronic communication with the processor 170. The light sensor 171 may be disposed within the garage 165, for example on the platform 166. The light sensor 171 may be configured to detect when the end effector 130 is disposed within the garage 165, i.e., on the platform 166. For example, the light sensor 171 may generate an output signal based on light received from the light source 172. The light source 172 may be disposed within the garage 165 above the platform 166. The output signal may be identifiable when the end effector 130 is disposed within the garage 165. For example, the light sensor 171 may receive light from the light source 172 when the end effector 130 is not disposed within the garage 165, and the end effector 130 may block or interrupt the light received by the light sensor 171 when the end effector 130 is disposed within the garage 165. In this manner, the system 100 may use the optical sensor 171 to identify which platform 166 the end effector 130 is disposed on, and the processor 170 may control the tool changer 160 to move the end effector 130 to the appropriate platform 166 for coupling / uncoupling with the robot arm 110 via the robot interface 120. The system 100 may also include other sensors, such as a microswitch, a magnetic switch (e.g., a reed switch, a Hall effect switch, etc.), or an air pressure sensor (e.g., an orifice / pressure drop sensor), that may be configured to detect when the end effector 130 is disposed within the garage 165.

[0046] The system 100 may further include a measurement sensor 173. The measurement sensor 173 may be in electronic communication with the processor 170. The measurement sensor 173 may be disposed in a garage above the platform 166. The measurement sensor 173 may be configured to detect a thickness of the end effector 130. For example, the measurement sensor 173 may emit a laser that reflects off a surface of the end effector 130. Based on the amount of time between the laser emission and detection by the measurement sensor 173, the thickness of the end effector 130 may be determined. It should be understood that different end effectors 130 may have different thicknesses, and thus the measurement sensor 173 may be used to determine which type of end effector 130 is disposed on the platform 166. Additionally, the thickness of the end effector 130 may depend on the alignment of the end effector 130 with the robotic interface 120 during mating. For example, the measurement sensor 173 may detect a greater thickness of the end effector 130 when the end effector 130 and the robot interface 120 are misaligned compared to when the end effector 130 and the robot interface 120 are properly aligned. In this manner, the processor 170 may use the measurement sensor 173 to detect if the end effector 130 is properly coupled to the robot arm 110 via the robot interface 120 and may control the tool changer 160 and / or the robot arm 110 to realign the end effector 130 and the robot interface 120 to properly couple. The system 100 may include other sensors configured to detect the thickness of the end effector 130, such as an optical micrometer that measures how much of a wide light beam is blocked by the end effector 130, a capacitive or inductive proximity sensor, a pressure sensor, an ultrasonic sensor, or a shadowgraph camera-based sensor.

[0047] The system 100 provides an end effector and tool exchange system for transporting semiconductor substrates that may offer several advantages over the related art. For example, the system 100 may not impact robot speed or system throughput by being lightweight. The system 100 may also be compact and not limit the robot envelope. The system 100 may integrate with existing and new robot arms by being robot agnostic. The system 100 may also not require integration with a robot arm by being externally actuated, allowing safety checks to ensure proper coupling. The system 100 may be cleanroom compatible by generating small particles (e.g., particles less than 45 nm) when performing tool exchanges.

[0048] 6A and 6B, another embodiment of the present disclosure provides a system 200. System 200 differs from system 100 in the structure of robot interface 220 and end effector 230. Unless otherwise stated herein, components of system 100 may also be applied to system 200.

[0049] The end effector 230 may include a first sleeve 240 and a second sleeve 250. The first sleeve 240 and the second sleeve 250 may extend axially toward the robot interface 220. The first sleeve 240 and the second sleeve 250 may be spaced apart in a second direction. The first sleeve 240 may have a first interior space 245 and the second sleeve 250 may have a second interior space 255. The first interior space 245 and the second interior space 255 may have a cylindrical or rectangular shape. The distal end 246 of the first interior space 245 and the distal end 256 of the second interior space 255 may be comprised of a tetrahedral groove, a conical groove, a V-shaped groove, or a flat groove.

[0050] The end effector 230 may further comprise a pair of arms 232. The pair of arms 232 may be configured to carry a substrate (not shown). The pair of arms 232 may be spaced apart in a second direction. The pair of arms 232 may include one or more protrusions 233 configured to contact the substrate. The one or more protrusions 233 may be comprised of an elastomeric material and may exert a gripping force upon contacting the substrate.

[0051] The robotic interface 220 may include a first insert member 223 and a second insert member 224. The first insert member 223 and the second insert member 224 may extend axially toward the end effector 230. The first insert member 223 and the second insert member 224 may be spaced apart in a second direction. The first insert member 223 and the second insert member 224 may have a cylindrical or rectangular shape. The distal end 226 of the first insert member 223 and the distal end 227 of the second insert member 224 may have a hemispherical shape. When the end effector 230 is coupled to the robotic arm 210, the first insert member 223 and the second insert member 224 of the robotic interface 220 may be housed within the first sleeve 240 and the second sleeve 250. For example, the distal end 226 of the first insertion member 223 may contact the distal end 246 of the first internal space 245, and the distal end 227 of the second insertion member 224 may contact the distal end 256 of the second internal space 255.

[0052] The end effector 230 may further include a first pair of cam locks 247 and a second pair of cam locks 257. The first pair of cam locks 247 and the second pair of cam locks 257 may be disposed within the first interior space 245 and the second interior space 255, respectively. The first pair of cam locks 247 and the second pair of cam locks 257 may be rotatable between an unlocked position (where the cam locks do not extend into the interior space of the respective sleeves) and a locked position (where the cam locks extend into the interior space of the respective sleeves). The first pair of cam locks 247 and the second pair of cam locks 257 may be externally rotatable by a tool changer (not shown) to switch between the unlocked position and the locked position.

[0053] The robotic interface 220 may further include a first circumferential groove 228 on the first insert member 223 and a second circumferential groove 229 on the second insert member 224. When the first insert member 223 and the second insert member 224 are received within the first sleeve 240 and the second sleeve 250, respectively, the first circumferential groove 228 may align with the first pair of cam locks 247 and the second circumferential groove 229 may align with the second pair of cam locks 257. Thus, when the first pair of cam locks 247 and the second pair of cam locks 257 are rotated to the locked position, the first pair of cam locks 247 may be received within the first circumferential groove 228 and the second pair of cam locks 257 may be received within the second circumferential groove 229. In this manner, the robot interface 220 may be constrained within the first sleeve 240 and the second sleeve 250 such that the end effector 230 is selectively coupled to the robot arm 210 via the robot interface 220.

[0054] The end effector 230 may further include a plunger 235. The plunger 235 may be centrally disposed on the end effector 230 in the second direction. The plunger 235 may have a first end 235a and a second end 235b. The robot interface 220 may further include a plunger socket 225. The plunger socket 225 may have a first end 225a and a second end 225b. When the end effector 230 is coupled to the robot arm 210 via the robot interface 220, the plunger 235 may be coupled to the plunger socket 225. For example, the first end 235a of the plunger 235 may be coupled to the second end 225b of the plunger socket 225. The robot arm 210 may be configured to move the coupled plunger 235 and plunger socket 225 axially. For example, the robot arm 210 may axially move the coupled plunger 235 and plunger socket 225 by interacting with the first end 225a of the plunger socket 225. The second end 235b of the plunger 235 may be configured to contact a substrate disposed on the end effector 230. Thus, by axially moving the coupled plunger 235 and plunger socket 225, the second end 235b of the plunger 235 may press against the substrate to hold the substrate on the end effector 230. The second end 235b of the plunger 235 may be constructed from an elastomeric material and may exert a gripping force upon contacting the substrate. The robot arm 210 may also be configured to release the gripping force on the substrate by retracting the coupled plunger 235 and plunger socket 225. The end effector 230 may include a preload spring (not shown) configured to bias the plunger 235 toward a retracted position to assist the robotic arm 210 in retracting the combined plunger 235 and plunger socket 225. Alternatively, the robotic arm 210 may be configured to retract the combined plunger 235 and plunger socket 225 unassisted.

[0055] System 200 provides an end effector and tool exchange system for transporting semiconductor substrates that may offer several advantages over the related art. For example, system 200 may not impact robot speed or system throughput by being lightweight. System 200 may also be compact and not limit the robot envelope. System 200 may integrate with existing and new robot arms by being robot agnostic. System 200 may also not require integration with a robot arm by being externally actuated, allowing safety checks to ensure proper coupling. System 200 may be cleanroom compatible by generating small particles (e.g., particles less than 45 nm) when performing tool exchanges.

[0056] 7-10, another embodiment of the present disclosure provides a system 300. System 300 differs from system 100 in the structure of a robot interface 320 and an end effector 330. Unless otherwise stated herein, components of system 100 may also be applied to system 300.

[0057] The robotic interface 320 may comprise one or more hemispherical structures 323 disposed on a lower surface 322 of the robotic interface 320. The one or more hemispherical structures 323 may be at different heights in a first direction. For example, one of the hemispherical structures 323 may be higher than another hemispherical structure 323 in a first direction. In one embodiment, the robotic interface 320 may comprise three hemispherical structures 323. The three hemispherical structures 323 may be arranged in a triangle. For example, two of the hemispherical structures 323 may be disposed at a lower height of the lower surface 322 of the robotic interface 320 and the third hemispherical structure 323 may be disposed at a higher height of the lower surface 322 of the robotic interface 320.

[0058] The end effector 330 may include one or more grooves 346 disposed on the top surface 331 of the end effector 330. The one or more grooves 346 may include one or more of a tetrahedral groove, a conical groove, a V-shaped groove, or a flat groove. The one or more grooves 346 may be at different heights in a first direction. For example, one of the grooves 346 may be higher than another groove 346 in the first direction. In one embodiment, the end effector 330 may include three V-shaped grooves 346. The three grooves 346 may be arranged in a triangle. For example, two of the V-shaped grooves 346 may be disposed at a lower height of the top surface 331 of the end effector 330 and the third V-shaped groove 346 may be disposed at a higher height of the top surface 331 of the end effector 330. The three V-shaped grooves 346 may be angled with respect to each other. For example, the three V-shaped grooves 346 may be at an angle of approximately 120° relative to one another. When the robot interface 320 is disposed on the end effector 330, the one or more hemispherical structures 323 may align with and contact the one or more grooves 346.

[0059] The end effector 330 may further include a pair of arms 332, as shown in Figures 7A and 7B. The pair of arms 332 may be configured to carry a substrate (not shown). The pair of arms 332 may be spaced apart in a second direction. The pair of arms 332 may include one or more protrusions 333 configured to contact the substrate. The one or more protrusions 333 may be comprised of an elastomeric material and may exert a gripping force upon contacting the substrate.

[0060] The robot interface 320 may include a locking mechanism 340. The locking mechanism may be configured to selectively couple the end effector 330 to the robot arm 310 via the robot interface 320. The locking mechanism may be engaged to lock and / or unlock using a tool changer (not shown) accessible from a top surface 321 of the robot interface 320.

[0061] The locking mechanism 340 may include a pinball locking mechanism. As shown in FIGS. 8A and 8B , the pinball locking mechanism may include a locking pin 324 and one or more ball locks 326 disposed within a shaft 327. The shaft 327 may be biased in a first direction by a preload spring 334. The shaft 327 may be received within a corresponding bore 347 of the end effector 330 when the end effector 330 is coupled to the robot arm 310 via the robot interface 320. The locking pin 324 may be movable within the shaft 327 in a first direction, for example, by a tool changer. When the locking pin 324 is moved downwardly into the shaft 327, the ball lock 326 may be moved radially outward to engage with a circumferential groove 348 of the bore 347. Thus, the robot interface 320 and the end effector 330 may be locked together by the pinball locking mechanism. The locking pin 324 can be moved in the opposite direction to return the ball lock 326 radially inward so that the shaft 327 can be withdrawn from the bore 347 .

[0062] Alternatively, the locking mechanism 340 may comprise a pin lock mechanism. As shown in Figures 9A and 9B, the pin lock mechanism may comprise a removable pin 357. The removable pin 357 may be inserted into a first opening 358 in the shaft 327 and into a second opening 359 in the bore 347. The first opening 358 and the second opening 359 may be aligned in a first direction when the shaft 327 is received in the bore 347, such that the removable pin 357 may be inserted into the first opening 358 and the second opening 359. The removable pin 357 may be inserted in a second direction, for example, by a tool changer.

[0063] Alternatively, the locking mechanism 340 may comprise a cam locking mechanism. As shown in FIGS. 10A and 10B, the cam locking mechanism may comprise one or more radial protrusions 328 extending from the shaft 327. The shaft 327 may be rotatable, for example, by a tool changer. When the shaft 327 is received in the bore 347, the radial protrusions 328 may be received in a keyway 349 of the bore 347. The keyway 349 may open to a top surface 331 of the end effector 330 and may extend downwardly and circumferentially around the bore 347. By rotating the shaft 327, the radial protrusions 328 may be received in a locking portion 353 of the keyway 349, which may prevent the shaft 327 from being pulled out of the bore 347. Thus, the robot interface 320 and the end effector 330 may be locked to one another by the cam locking mechanism. The shaft 327 can be rotated in the opposite direction to move the radial projection 328 out of the locking portion 353 of the keyway 349 so that the shaft 327 can be withdrawn from the bore 347 .

[0064] As shown in FIGS. 7A and 7B, the end effector 330 may further include a plunger 335. The plunger 335 may be centrally disposed within the end effector 330 in the second direction. The plunger 335 may have a first end 335a and a second end 335b. The robot interface 320 may further include a plunger socket 325. The plunger socket 325 may have a first end 325a and a second end 325b. When the end effector 330 is coupled to the robot arm 310 via the robot interface 320, the plunger 335 may be coupled to the plunger socket 325. For example, the first end 335a of the plunger 335 may be coupled to the second end 325b of the plunger socket 325. The robot arm 310 may be configured to move the coupled plunger 335 and plunger socket 325 axially. For example, the robot arm 310 may interact with the first end 325a of the plunger socket 325 to move the coupled plunger 335 and plunger socket 325 axially. The second end 335b of the plunger 335 may be configured to contact a substrate disposed on the end effector 330. Thus, by moving the coupled plunger 335 and plunger socket 325 axially, the second end 335b of the plunger 335 may press against the substrate to hold the substrate on the end effector 330. The second end 335b of the plunger 335 may be constructed from an elastomeric material and may exert a gripping force upon contacting the substrate. The robot arm 310 may also be configured to release the gripping force on the substrate by retracting the coupled plunger 335 and plunger socket 325. The end effector 330 may include a preload spring 336 configured to bias the plunger 335 toward a retracted position to assist the robotic arm 310 in retracting the combined plunger 335 and plunger socket 325. Alternatively, the robotic arm 310 may be configured to retract the combined plunger 335 and plunger socket 325 unassisted.The plunger 335 may be disposed within a bushing 337 disposed on the upper surface 331 of the end effector 330 .

[0065] System 300 provides an end effector and tool exchange system for transporting semiconductor substrates that may offer several advantages over the related art. For example, system 300 may not impact robot speed or system throughput by being lightweight. System 300 may also not limit the robot envelope by being compact. System 300 may integrate with existing and new robot arms by being robot agnostic. System 300 may also not require integration with a robot arm by being externally actuated, allowing safety checks to ensure proper coupling. System 300 may be cleanroom compatible by generating small particles (e.g., particles less than 45 nm) when performing tool exchanges.

[0066] 11-13, another embodiment of the present disclosure provides a system 400. System 400 differs from system 100 in the structure of a robot interface 420 and an end effector 430. Unless otherwise stated herein, components of system 100 may also be applied to system 400.

[0067] The end effector 430 may include an upper jaw 440 and a lower jaw 450, as shown in FIGS. 12A and 12B. The upper jaw 440 and the lower jaw 450 may be spaced apart in a first direction. The upper jaw 440 and the lower jaw 450 may be biased together. When the end effector 430 is coupled to the robot arm 410, the robot interface 420 may be disposed between the upper jaw 440 and the lower jaw 450. The upper jaw 440 and the lower jaw 450 may be separated by a tool changer (not shown) to allow the robot interface 420 to be received between and / or withdrawn from the upper jaw 440 and the lower jaw 450.

[0068] The end effector 430 may further comprise a pair of arms 432, as shown in FIGS. 11A and 11B. The pair of arms may be integrally formed with the upper jaw 440 and / or the lower jaw 450. The pair of arms 432 may be configured to carry a substrate (not shown). The pair of arms 432 may be spaced apart in a second direction. The pair of arms 432 may include one or more protrusions 433 configured to contact the substrate. The one or more protrusions 433 may be comprised of an elastomeric material and may exert a gripping force when in contact with the substrate.

[0069] The robotic interface 420 may include a dovetail-type locking mechanism. As shown in FIGS. 12A and 12B , the dovetail locking mechanism may include a dovetail-like protrusion 427 extending from the robotic interface 420 toward the end effector 430. The upper jaw 440 may include a first dovetail surface 445 on its lower surface 442, and the lower jaw 450 may include a second dovetail surface 455 on its upper surface 451. The first dovetail surface 445 and the second dovetail surface 455 may be configured to engage the dovetail-like protrusion 427 of the robotic interface 420 when the robotic interface 420 is coupled to the end effector 430. The robotic interface 420 may further include a pair of hemispherical structures 426 adjacent to the dovetail protrusions 427 that engage the flat end surfaces of the upper jaw 440 and the lower jaw 450 when the robotic interface 420 is coupled to the end effector 430.

[0070] Alternatively, the end effector 430 may include a pinball locking mechanism. As shown in FIGS. 13A and 13B, the pinball locking mechanism may include a locking pin 457 and one or more ball locks 456 disposed within the shaft 446. The shaft 446 may be axially biased by a preload spring 438. The shaft 446 may be received within a corresponding bore 424 of the robot interface 420 when the end effector 430 is coupled to the robot arm 410 via the robot interface 420. The locking pin 457 may be axially movable inside the shaft 446, for example, by a tool changer (not shown) operable from outside the end effector 430. When the locking pin 457 is moved into the shaft 446, the ball lock 456 may be moved radially outward to engage with the circumferential groove 423 of the bore 424. Thus, the robotic interface 420 and the end effector 430 may be locked together by a pinball lock mechanism. The locking pin 457 may be moved in the opposite direction to return the ball lock 456 radially inward, such that the shaft 446 may be withdrawn from the bore 424. The robotic interface 420 may further comprise a pair of hemispherical structures 426 adjacent the bore 424 that engage flat end faces of the end effector 430 when the robotic interface 420 is coupled to the end effector 430.

[0071] 11A and 11B, the end effector 430 may further include a plunger 435. The plunger 435 may be disposed at the center of the end effector 430 in the second direction. The plunger 435 may have a first end 435a and a second end 435b. The robot interface 420 may further include a plunger socket 425. The plunger socket 425 may have a first end 425a and a second end 425b. When the end effector 430 is coupled to the robot arm 410 via the robot interface 420, the plunger 435 may be coupled to the plunger socket 425. For example, the first end 435a of the plunger 435 may be coupled to the second end 425b of the plunger socket 425. The robot arm 410 may be configured to move the coupled plunger 435 and plunger socket 425 axially. For example, the robot arm 410 may interact with the first end 425a of the plunger socket 425 to move the coupled plunger 435 and plunger socket 425 axially. The second end 435b of the plunger 435 may be configured to contact a substrate disposed on the end effector 430. Thus, by moving the coupled plunger 435 and plunger socket 425 axially, the second end 435b of the plunger 435 may press against the substrate to hold the substrate on the end effector 430. The second end 435b of the plunger 435 may be constructed from an elastomeric material and may exert a gripping force upon contacting the substrate. The robot arm 410 may also be configured to release the gripping force on the substrate by retracting the coupled plunger 435 and plunger socket 425. The end effector 430 may include a preload spring 436 configured to bias the plunger 435 toward a retracted position to assist the robotic arm 410 in retracting the combined plunger 435 and plunger socket 425. Alternatively, the robotic arm 410 may be configured to retract the combined plunger 435 and plunger socket 425 without assistance.The plunger 435 may be disposed within a bushing 437 disposed on an upper surface 451 of the lower jaw 450 .

[0072] The end effector 430 may further include a spring 434 connected to the upper jaw 440 and the lower jaw 450. For example, a first end 434a of the spring 434 may be connected to the upper jaw 440 and a second end 434b of the spring 434 may be connected to the lower jaw 450. The spring 434 may be disposed within an upper guide 443 of the upper jaw 440 and a lower guide 453 of the lower jaw 450. The upper guide 443 and the lower guide 453 may be cylindrical channels extending through the upper jaw 440 and the lower jaw 450, respectively. The upper guide 443 may include an upper cross rod 444 that intersects the upper guide 443 on the upper surface 441 of the upper jaw 440, and the lower guide 453 may include a lower cross rod 454 that intersects the lower guide 453 on the lower surface 452 of the lower jaw 450. A first end 434a of the spring 434 may be connected to the upper cross rod 444, and a second end 434b of the spring may be connected to the lower cross rod 454. For example, the first and second ends 434a and 434b of the spring may have a hook or ring shape that may wrap around the upper and lower cross rods 444 and 454, respectively. The spring 434 may be preloaded to bias the upper and lower jaws 440 and 450 together. In other words, the distance between the lower surface 442 of the upper jaw 440 and the upper surface 451 of the lower jaw 450 may be less than the free length of the spring 434. In this manner, the spring 434 may bias the upper jaw 440 and the lower jaw 450 together.

[0073] The system 400 provides an end effector and tool exchange system for transporting semiconductor substrates that may offer several advantages over the related art. For example, the system 400 may not impact robot speed or system throughput by being lightweight. The system 400 may also be compact and not limit the robot envelope. The system 400 may integrate with existing and new robot arms by being robot agnostic. The system 400 may also not require integration with a robot arm by being externally actuated, allowing safety checks to ensure proper coupling. The system 400 may be cleanroom compatible by generating small particles (e.g., particles less than 45 nm) when performing tool exchanges.

[0074] Another embodiment of the present disclosure provides a method 500. As shown in Figure 14, the method 500 may include the following steps.

[0075] In step 510, the robot interface is disposed on the robot arm. For example, the robot interface may be disposed on a distal end of the robot arm. It should be understood that the manner in which the robot interface is disposed on and / or secured to the robot arm may depend on the particular structure of the robot arm and is not limited herein. The robot arm may be movable with six degrees of freedom within the robot envelope. The size and shape of the robot envelope may depend on the particular structure of the robot arm (e.g., arm length, number of joints, etc.) and is not limited herein.

[0076] At step 520, an end effector is selectively coupled to a robotic arm via a robotic interface. The end effector may include an upper jaw and a lower jaw. The upper jaw and the lower jaw are biased together apart in a first direction. When the end effector is coupled to the robotic arm, the robotic interface may be disposed between the upper jaw and the lower jaw.

[0077] At step 530, a substrate is disposed on a pair of arms of the end effector. The pair of arms may be integrally formed with the upper jaw or the lower jaw. The pair of arms are spaced apart in a second direction orthogonal to the first direction. The pair of arms may include one or more protrusions configured to contact the substrate. The one or more protrusions may be constructed from an elastomeric material and may exert a gripping force upon contact with the substrate.

[0078] In step 540, a plunger of the end effector is extended axially to contact the substrate. The robot arm may be configured to extend the plunger axially. The plunger may be disposed centrally on the end effector in a second direction. The plunger may have a first end and a second end. The robot interface may further comprise a plunger socket. The plunger socket may have a first end and a second end. When the end effector is coupled to the robot arm via the robot interface, the plunger may be coupled to the plunger socket. For example, the first end of the plunger may be coupled to the second end of the plunger socket. The robot arm may be configured to move the coupled plunger and plunger socket axially. For example, the robot arm may interact with the first end of the plunger socket to move the coupled plunger and plunger socket axially. The second end of the plunger may be configured to contact a substrate disposed on the end effector. Thus, by axially moving the coupled plunger and plunger socket, the second end of the plunger may contact the substrate to press against the substrate and hold the substrate on the end effector. The second end of the plunger may be constructed from an elastomeric material and may exert a gripping force upon contact with the substrate. The robot arm may also be configured to release the gripping force on the substrate by retracting the coupled plunger and plunger socket. The end effector may include a preload spring configured to bias the plunger toward a retracted position to assist the robot arm in retracting the coupled plunger and plunger socket. Alternatively, the robot arm may be configured to retract the coupled plunger and plunger socket unassisted.

[0079] According to one embodiment of the present disclosure, step 520 may include the following steps shown in FIG.

[0080] In step 522, the upper and lower jaws are separated using a tool changer comprising a pair of gripping arms. The pair of gripping arms may comprise an upper gripping arm and a lower gripping arm. The upper and lower gripping arms may be configured to separate the upper and lower jaws. For example, the upper gripping arm may contact a lower surface of the upper jaw and the lower gripping arm may contact a top surface of the lower jaw. The tool changer may comprise a single pair of gripping arms disposed on one side of the end effector or may comprise two pairs of gripping arms disposed on opposite sides of the end effector.

[0081] In step 524, the robotic interface is inserted between the upper and lower jaws. It should be appreciated that with the pair of gripping arms separating the upper and lower jaws in step 522, there is sufficient clearance within the end effector to receive the robotic interface. The amount of clearance required may depend on the geometry of the end effector and the robotic interface. Once the robotic interface is inserted between the upper and lower jaws, the robotic arm may move the robotic interface axially. The robotic arm may also align the robotic interface with the upper and lower jaws by moving the robotic interface in a second direction.

[0082] In step 526, the upper and lower jaws are caused to close on the robotic interface. The pair of gripping arms of the tool changer may be configured to cause the upper and lower jaws of the end effector to close on the robotic interface. The end effector may include a spring connected to the upper and lower jaws, and the spring may bias the upper and lower jaws together. Thus, the spring may cause the upper and lower jaws to close on the robotic interface with or without corresponding movement of the pair of gripping arms.

[0083] One or more kinematic couplings may be provided between the end effector and the robotic interface. The kinematic couplings may engage with one another in step 526 when the upper and lower jaws are closed on the robotic interface. When the kinematic couplings are engaged, the end effector and the robotic interface may be prevented from moving relative to one another (i.e., the end effector and the robotic interface may be constrained in all six degrees of freedom). The one or more kinematic couplings may include contacts between a spherical or hemispherical feature of one of the end effector and the robotic interface and a tetrahedral groove, a conical groove, a V-shaped groove, or a flat groove of another of the end effector and the robotic interface. It should be appreciated that to constrain all six degrees of freedom, the kinematic coupling may provide at least six contact points between the end effector and the robotic interface. The six contact points may be established by one or more combinations of a tetrahedral groove (three contact points), a V-shaped groove (two contact points), or a flat groove (one contact point). Alternatively, the kinematic coupling may provide an annular contact between the end effector and the robotic interface via a conical groove.

[0084] According to one embodiment of the present disclosure, a tool changer is disposed within the garage. Thus, step 522 may include separating the upper and lower jaws with a pair of gripping arms once the end effector is disposed within the garage. The garage may be configured to store one or more end effectors. For example, the garage may include one or more platforms, and one end effector may be disposed on each platform. The one or more platforms may be vertically arranged within the garage. The tool changer may be vertically movable within the garage. The pair of gripping arms may be configured to separate the upper and lower jaws once the end effector is disposed within the garage. For example, the pair of gripping arms may be vertically moved within the garage to align with the end effector. The pair of gripping arms may also be moved inward / outward to engage the upper and lower jaws. It should be appreciated that a combination of vertical movement and inward / outward movement of a pair of gripping arms may be used to avoid contact with the end effector during vertical movement of the tool changer and / or engage the upper and lower jaws.

[0085] According to one embodiment of the present disclosure, method 500 may further include detecting, via an optical sensor, when the end effector is placed in the garage at step 515. It should be appreciated that step 515 may be performed prior to step 520 to detect when the end effector is placed in the garage to complete a tool change and / or to detect which platforms in the garage are occupied by the end effector. Step 515 may also be performed after step 520 to detect which platforms in the garage are not occupied by the end effector.

[0086] According to one embodiment of the present disclosure, the method 500 may further include detecting a thickness of an end effector disposed in the garage with a measurement sensor at step 525. It should be understood that step 525 may be performed before step 520 to detect what type of end effector is stored on the platform in the garage. Step 525 may also be performed after step 520 to ensure that the end effector is properly coupled to the robot arm via the robot interface.

[0087] The optical sensors and the measurement sensors may be in electronic communication with a processor, which may be configured to control the robot arm and / or the tool changer based on information received from the optical sensors and / or the measurement sensors.

[0088] Although method 500 is described with respect to components of system 100, it should be understood that method 500 may also be applied to systems 200, 300, and 400 described herein, and any changes or modifications to method 500 for application to components of systems 200, 300, and 400 are deemed to be within the scope of the present disclosure.

[0089] Method 500 provides a method for selectively coupling an end effector to a robot arm that may offer several advantages over the related art. For example, the end effector may be lightweight so as not to impact robot speed or system throughput. The end effector may also be compact so as not to limit the robot envelope. The end effector may be robot agnostic so as to integrate with existing and new robot arms. The end effector may also be externally actuated so as not to require integration with the robot arm, allowing safety checks to ensure proper coupling. Method 500 may be cleanroom compatible by generating small particles (e.g., particles less than 45 nm) when performing tool changes.

[0090] Although the present disclosure has been described with respect to one or more particular embodiments, it will be understood that other embodiments of the present disclosure may be practiced without departing from the scope of the present disclosure. Accordingly, the present disclosure is deemed to be limited only by the appended claims and the reasonable interpretation thereof.

Claims

1. 1. A system comprising: a robot interface disposed on the robot arm; an end effector configured to selectively couple to the robot arm via the robot interface, the end effector comprising: an upper jaw and a lower jaw, the upper jaw and the lower jaw being biased together away from each other in a first direction; and a pair of arms configured to carry a substrate, the pair of arms being spaced apart in a second direction orthogonal to the first direction; an end effector comprising: Equipped with When the end effector is coupled to the robot arm, the robot interface is disposed between the upper jaw and the lower jaw.

2. 10. The system of claim 1, wherein the end effector further comprises a spring connected to the upper and lower jaws, the spring being preloaded to bias the upper and lower jaws together.

3. The system of claim 1 , wherein a first kinematic coupling is provided between an upper surface of the lower jaw and a lower surface of the robotic interface.

4. The system of claim 3 , wherein a second kinematic coupling is provided between a lower surface of the upper jaw and an upper surface of the robotic interface.

5. 2. The system of claim 1, wherein the end effector further comprises a plunger, and the robotic interface further comprises a plunger socket, and when the end effector is coupled to the robotic arm, the plunger is coupled to the plunger socket and axially movable by the robotic arm.

6. The system of claim 1 , further comprising a tool changer comprising a pair of gripping arms configured to separate the upper jaw and the lower jaw.

7. 7. The system of claim 6, wherein the tool changer is disposed within a garage, and wherein the pair of gripping arms are configured to separate the upper jaw and the lower jaw when the end effector is positioned within the garage.

8. The system of claim 7 , further comprising a light sensor disposed within the garage, the light sensor configured to detect when the end effector is disposed within the garage.

9. The system of claim 7 , further comprising a measurement sensor disposed within the garage, the measurement sensor configured to detect a thickness of the end effector.

10. 1. A method comprising: providing a robotic interface on a robotic arm; selectively coupling an end effector to the robot arm via the robot interface, the end effector comprising an upper jaw and a lower jaw, the upper jaw and the lower jaw being biased together apart in a first direction; disposing a substrate on a pair of arms of the end effector, the pair of arms being spaced apart in a second direction perpendicular to the first direction; When the end effector is coupled to the robot arm, the robot interface is disposed between the upper jaw and the lower jaw.

11. 11. The method of claim 10, wherein the end effector further comprises a spring connected to the upper and lower jaws, the spring being preloaded to bias the upper and lower jaws together.

12. The method of claim 10 , wherein a first kinematic coupling is provided between an upper surface of the lower jaw and a lower surface of the robotic interface.

13. The method of claim 12 , wherein a second kinematic coupling is provided between a lower surface of the upper jaw and an upper surface of the robotic interface.

14. 11. The method of claim 10, wherein the end effector further comprises a plunger, and the robotic interface further comprises a plunger socket, and when the end effector is coupled to the robotic arm, the plunger is coupled to the plunger socket and axially movable by the robotic arm.

15. Selectively coupling the end effector to the robot arm via the robot interface includes: separating the upper and lower jaws with a tool changer having a pair of gripping arms; inserting the robotic interface between the upper jaw and the lower jaw; and causing the upper and lower jaws to close on the robotic interface.

16. 16. The method of claim 15, wherein the tool changer is disposed within a garage, and the step of separating the upper and lower jaws using the tool changer with the pair of gripping arms includes the step of separating the upper and lower jaws using the pair of gripping arms when the end effector is positioned within the garage.

17. The method of claim 16 , further comprising detecting when the end effector is located within the garage with an optical sensor.

18. The method of claim 16 , further comprising detecting a thickness of the end effector disposed in the garage by a measurement sensor.

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