Fluid Delivery Module

Abstract

Fluid flow control devices are important components for delivering process fluids for semiconductor manufacturing. These fluid flow control devices are comprised of a wide variety of fluid flow components, including fluid flow components for measuring various properties of the process fluids. The measuring fluid flow components may be configured to monitor properties such as temperature and pressure, and may be configured to monitor via sensing elements that also serve to surround a portion of the flow path within the fluid flow components.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to U.S. Provisional Patent Application No. 63 / 312,989, filed February 23, 2022, and U.S. Provisional Patent Application No. 63 / 410,666, filed September 28, 2022, the contents of which are incorporated by reference in their entireties herein. Technical Field The present invention relates to a fluid delivery module. [Background technology]

[0002] Flow control is one of the key technologies in semiconductor chip manufacturing. Devices that control fluid flow are important for delivering process fluid flows for semiconductor manufacturing and other industrial processes. Such devices are used to measure and precisely control fluid flow in a variety of applications. This control is relied upon in devices designed for increased packaging density and improved functional performance.

[0003] As chip manufacturing technology improves, component sizes shrink and packaging requirements for flow control devices become more stringent. Increased performance and reduced space requirements have led to improvements in all types of flow control devices. Improved methods and devices are desired to improve the performance of flow control devices. Summary of the Invention

[0004] The present technology relates to a fluid delivery module with an apparatus for controlling flow. The apparatus for controlling flow includes a flow component that measures one or more properties of a process fluid. The apparatus for controlling flow may incorporate multiple fluid flow components to perform a wide range of control functions beyond simple measurement. When measurement is required, it is desirable to provide accurate measurement, fast response time, and minimal impact on the fluid flow. Such an apparatus may be used in a wide range of processes, such as semiconductor chip manufacturing, solar photovoltaic panel manufacturing, etc.

[0005] In one embodiment, the invention is a system for treating an article. The system includes a fluid supply configured to supply a treatment fluid, a treatment chamber configured to treat an article, and a fluid delivery module. The fluid delivery module includes an inlet fluidly connected to the fluid supply, an outlet fluidly connected to the treatment chamber, a flow passage extending from the inlet to the outlet, and a fluid flow component. The fluid flow component includes a component base, an inlet port formed in the component base, an outlet port formed in the component base, and a flow passage. The flow passage extends from the inlet port to the outlet port, the flow passage forming a portion of the flow passage. The fluid flow component further includes a sensing port, the sensing port in fluid communication with the flow passage and disposed between the inlet port and the outlet port. The fluid flow component includes a sensing element sealing the sensing port and a sensor separated from the treatment fluid by the sensing element. The sensor is configured to sense a property of the treatment fluid in the flow passage.

[0006] In one embodiment, the invention is a system for processing an article. The system includes a fluid supply configured to supply at least one processing fluid, a processing chamber configured to process an article, and a fluid delivery module. The fluid delivery module includes an inlet fluidly connected to the fluid supply, an outlet fluidly connected to the processing chamber, a flow passage extending from the inlet to the outlet, a first fluid flow component, and a second fluid flow component. The first fluid flow component includes a first component base, a first inlet port formed in the first component base, a first outlet port formed in the first component base, and a first flow path. The first flow path extends from the first inlet port to the first outlet port, the first flow path forming a portion of the flow path. The first fluid flow component further includes a first sensor configured to sense a first property of at least one processing fluid in the first flow path. A first sensor housing is coupled to the first component base, and the first sensor housing surrounds the first sensor. The second fluid flow component has a second component base, a second inlet port formed in the second component base, a second outlet port formed in the second component base, and a second flow path. The second flow path extends from the second inlet port to the second outlet port, the second flow path forming a portion of the flow passage. The second fluid flow component further has a second sensor configured to sense a second property of at least one process fluid in the second flow path. A second sensor housing is coupled to the second component base, the second sensor housing enclosing the second sensor. The first sensor and the second sensor are different. The first sensor housing and the second sensor housing are the same.

[0007] In another embodiment, the invention is a fluid flow component. The fluid flow component has a component base, an inlet port formed in the component base, an outlet port formed in the component base, and a flow path. The flow path extends from the inlet port to the outlet port. The fluid flow component further has a sensing port, the sensing port in fluid communication with the flow path and located between the inlet port and the outlet port. The fluid flow component has a sensing element sealing the sensing port and a sensor separated from the process fluid by the sensing element. The sensor is configured to sense a property of the process fluid in the flow path.

[0008] In another embodiment, the invention is a method of manufacturing an article. First, a fluid delivery module is provided. The delivery module includes a fluid flow component having an inlet, an outlet, a flow passage extending from the inlet to the outlet, and a flow passage extending from the inlet port to the outlet port, the flow passage forming a portion of the flow passage. Second, a process fluid is provided to the inlet of the fluid delivery module. Third, the process fluid is caused to flow through the flow passage, such that the process fluid flows through the flow passage of the fluid flow component to the outlet of the fluid delivery module. The outlet of the fluid delivery module is fluidly coupled to an outlet manifold. Fourth, a property of the process fluid is measured via a sensing port in fluid communication with the flow passage of the fluid flow component between the inlet port and the outlet port. The sensing port is sealed by a sensing element. A sensor is operably coupled to the sensing element. Fifth, the process fluid from the outlet of the fluid delivery module is delivered to a process chamber via the outlet manifold. The outlet manifold is fluidly coupled to the process chamber. Sixth, a process is performed on the article in the process chamber.

[0009] In yet another embodiment, the invention is a fluid flow component comprising a component base, an inlet port formed in the component base, an outlet port formed in the component base, and a flow path extending from the inlet port to the outlet port. The fluid flow component also comprises a sensing element, the sensing element having a bottom surface and a top surface. The bottom surface contacts a process fluid flowing through the flow path. The flow path has a restricting height and a restricting width at a restricting surface that intersects the sensing element. A restricting ratio between the restricting height and the restricting width is less than or equal to 0.25.

[0010] In another embodiment, the invention is a fluid flow component comprising a component base, an inlet port formed in the component base, an outlet port formed in the component base, and a flow path extending from the inlet port to the outlet port. The fluid flow component also comprises a sensing element, the sensing element having a bottom surface and a top surface. The bottom surface contacts a process fluid flowing through the flow path. The flow path has a restricting height at a restricting surface that intersects the sensing element and a non-restricting height that extends from the sensing element to a floor of the sensing port. A transition ratio between the restricting height and the non-restricting height is less than or equal to 0.316.

[0011] In yet another embodiment, the invention is a fluid flow component comprising a component base, an inlet port formed in the component base, an outlet port formed in the component base, and a flow path extending from the inlet port to the outlet port. The fluid flow component also comprises a sensing element, the sensing element having a bottom surface and a top surface. The bottom surface contacts a process fluid flowing through the flow path. The fluid flow component also comprises a restricting element configured to obstruct the flow path, the flow path having a restricting height between the restricting element and the bottom surface of the sensing element, the restricting height being less than a non-restricting height measured from the bottom surface of the sensing element to a bottom of the flow path.

[0012] Further scope of applicability of the present technology will become apparent from the detailed description provided hereinafter. It should be understood that the detailed description and specific examples, while indicating preferred embodiments, are intended for purposes of illustration only and are not intended to limit the scope of the present technology. [Brief description of the drawings]

[0013] The invention of this disclosure will become more fully understood from the detailed description and the accompanying drawings, in which:

[0014] [Figure 1] FIG. 1 is a schematic diagram of a system for manufacturing semiconductor devices utilizing one or more apparatus for controlling flow.

[0015] [Diagram 2] FIG. 2 is a perspective view of a fluid delivery module including multiple flow control devices that may be utilized in the process of FIG. 1.

[0016] [Diagram 3] 3 is a perspective view of a flow component that may be utilized in the fluid delivery module of FIG. 2.

[0017] [Figure 4] FIG. 4 is an exploded perspective view of the flow components of FIG. 3.

[0018] [Diagram 5] FIG. 5 is a cross-sectional view of the flow element of FIG. 3 taken along line 5-5.

[0019] [Figure 6] FIG. 6 is a detailed view of area 6 shown in FIG. 5.

[0020] [Figure 7] FIG. 4 is a perspective view of a retaining element of the flow part of FIG. 3 .

[0021] [Figure 8] FIG. 4 is a rear bottom perspective view of a retaining element of the flow piece of FIG. 3.

[0022] [Figure 9] FIG. 4 is a perspective view of a sensor housing of the flow component of FIG. 3.

[0023] [Figure 10] FIG. 4 is a rear bottom perspective view of the sensor housing of the flow component of FIG.

[0024] [Figure 11] FIG. 4 is a perspective view of a sensor of the flow component of FIG. 3.

[0025] [Figure 12] FIG. 4 is a rear bottom perspective view of the sensor of the flow component of FIG. 3.

[0026] [Figure 13] FIG. 4 is a perspective view of a spacer of the flow part of FIG. 3.

[0027] [Figure 14] FIG. 4 is a rear bottom perspective view of the spacer of the flow piece of FIG.

[0028] [Figure 15] FIG. 4 is a perspective view of the outer base of the flow piece of FIG. 3.

[0029] [Figure 16] FIG. 4 is a rear bottom perspective view of the outer base of the flow piece of FIG.

[0030] [Figure 17] FIG. 4 is a perspective view of the sensing element and insert of the flow component of FIG. 3.

[0031] [Figure 18] FIG. 4 is a rear bottom perspective view of the sensing element and insert of the flow component of FIG. 3.

[0032] [Figure 19] FIG. 4 is a perspective view of first and second support portions of the flow piece of FIG. 3.

[0033] [Figure 20] FIG. 4 is a rear bottom perspective view of the first and second support portions of the flow piece of FIG. 3.

[0034] [Figure 21] 3 is a perspective view of a second embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0035] [Figure 22] FIG. 22 is an exploded perspective view of the flow components of FIG. 21.

[0036] [Figure 23] FIG. 23 is a cross-sectional view of the flow element of FIG. 21 taken along line 23-23.

[0037] [Figure 24] FIG. 22 is a perspective view of a sensor of the flow component of FIG. 21.

[0038] [Diagram 25] FIG. 22 is a rear bottom perspective view of the sensor of the flow component of FIG. 21.

[0039] [Figure 26] 3 is a perspective view of a third embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0040] [Figure 27] FIG. 27 is an exploded perspective view of the flow components of FIG. 26.

[0041] [Figure 28] FIG. 28 is a cross-sectional view of the flow element of FIG. 26 taken along line 28-28.

[0042] [Figure 29] FIG. 29 is a detailed view of area 29 shown in FIG. 28.

[0043] [Diagram 30] FIG. 27 is a perspective view of a sensor of the flow component of FIG. 26.

[0044] [Diagram 31] FIG. 27 is a rear bottom perspective view of the sensor of the flow assembly of FIG. 26.

[0045] [Diagram 32] FIG. 27 is a perspective view of the sensing element and insert of the flow piece of FIG. 26.

[0046] [Diagram 33] FIG. 27 is a rear bottom perspective view of the sensing element and insert of the flow piece of FIG. 26.

[0047] [Diagram 34]4 is a perspective view of a fourth embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0048] [Diagram 35] FIG. 35 is an exploded perspective view of the flow components of FIG. 34.

[0049] [Diagram 36] FIG. 36 is a cross-sectional view of the flow element of FIG. 34 taken along line 36-36.

[0050] [Figure 37] FIG. 35 is a perspective view of a sensor of the flow component of FIG. 34.

[0051] [Figure 38] FIG. 35 is a rear bottom perspective view of the sensor of the flow assembly of FIG. 34.

[0052] [Figure 39] FIG. 35 is a perspective view of a spacer of the flow piece of FIG. 34.

[0053] [Diagram 40] FIG. 35 is a rear bottom perspective view of the spacer of the flow piece of FIG.

[0054] [Diagram 41] FIG. 35 is a perspective view of a seal of the flow piece of FIG. 34.

[0055] [Diagram 42] FIG. 35 is a rear bottom perspective view of the seal of the flow piece of FIG. 34.

[0056] [Diagram 43] 11 is a perspective view of a fifth embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0057] [Diagram 44] FIG. 44 is an exploded perspective view of the flow components of FIG. 43.

[0058] [Diagram 45]FIG. 45 is a cross-sectional view of the flow element of FIG. 43 taken along line 45-45.

[0059] [Diagram 46] 11 is a perspective view of a sixth embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0060] [Figure 47] FIG. 47 is an exploded perspective view of the flow components of FIG. 46.

[0061] [Figure 48] 13 is a perspective view of a portion of a seventh embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0062] [Figure 49] FIG. 49 is an exploded perspective view of a portion of the flow component of FIG. 48.

[0063] [Figure 50] FIG. 50 is a cross-sectional view of a portion of the flow component of FIG. 48 taken along line 50-50.

[0064] [Figure 51] 13 is a perspective view of a portion of an eighth embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0065] [Figure 52] 52 is a cross-sectional view of a portion of the flow component of FIG. 51 taken along line 52-52.

[0066] [Diagram 53] 13 is a perspective view of a portion of a ninth embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0067] [Figure 54] 54 is a cross-sectional view of a portion of the flow component of FIG. 53 taken along line 54-54.

[0068] [Figure 55] 13 is a perspective view of a portion of a tenth embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0069] [Figure 56] FIG. 56 is a cross-sectional view of a portion of the flow component of FIG. 55 taken along line 56-56.

[0070] [Figure 57] 13 is a perspective view of a portion of an eleventh embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0071] [Figure 58] FIG. 58 is a cross-sectional view of a portion of the flow component of FIG. 57 taken along line 58-58.

[0072] [Figure 59] 13 is a perspective view of a portion of a twelfth embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0073] [Figure 60] 60 is a cross-sectional view of a portion of the flow component of FIG. 59 taken along line 60-60.

[0074] [Figure 61] FIG. 13 is a perspective view of a portion of a thirteenth embodiment of a flow component that may be used in the fluid delivery module of FIG. 2.

[0075] [Figure 62] 62 is a cross-sectional view of a portion of the flow component of FIG. 61 in a neutral state taken along line 62-62.

[0076] [Figure 63] 62 is a cross-sectional view of the portion of the flow element of FIG. 61 in a retracted state taken along line 62-62.

[0077] [Figure 64]62 is a cross-sectional view of the portion of the flow element of FIG. 61 in an extended state taken along line 62-62.

[0078] [Figure 65] ~ [Figure 72] 11 is a graph showing temperature of a sensing element versus time at different restriction heights in a flow path and different fluid flow rates.

[0079] [Figure 73] ~ [Figure 80] 13 is a graph showing sensing element temperature versus time for various sensing element thicknesses and various fluid flow rates.

[0080] All drawings are schematic and not necessarily to scale. Features that are numbered in a particular drawing but not numbered in other drawings are the same features unless otherwise noted herein. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0081] The description of exemplary embodiments according to the principles of the invention is intended to be read in conjunction with the accompanying drawings, which should be considered as part of the entire written description. In the description of the embodiments of the invention disclosed herein, any reference to direction or orientation is intended for convenience of description only and is not intended to limit the scope of the invention in any way. Relative terms such as "lower," "upper," "horizontal," "vertical," "about," "below," "upper," "lower," "left," "right," "top," and "bottom," along with their derivatives (e.g., "horizontally," "downward," "upward," etc.), should be construed as referring to the orientation then being described or as shown in the drawings being described. These relative terms are for convenience of description only and do not require that the device be configured or operated in a particular orientation unless expressly indicated as such. Terms such as "attached," "affixed," "connected," "coupled," "interconnected," and similar terms refer to a relationship in which structures are fixed or attached to one another directly or indirectly through attachments or relationships, both movable and immovable, with intervening structures, unless expressly stated otherwise. Furthermore, the features and advantages of the present invention are described by reference to preferred embodiments. It is therefore expressly intended that the present invention should not be limited to such preferred embodiments, which illustrate some possible non-limiting combinations of features that may exist alone or in other combinations of features, and the scope of the present invention is defined by the claims appended hereto.

[0082] The present invention relates to fluid flow components used in fluid delivery modules and systems. Semiconductor manufacturing is one of the industries that demands high performance in controlling fluid flow. As semiconductor manufacturing technology advances, customers have recognized the need for flow control devices with improved performance. Thus, fluid flow components used to sense the properties of process fluids must achieve faster response times, improved accuracy, and be packaged into increasingly dense assemblies. The present invention enables superior sensing in semiconductor and similar processes.

[0083] FIG. 1 shows a schematic diagram of an exemplary processing system 1000. The processing system 1000 may use multiple flow control devices 100 fluidly coupled to a processing chamber 1300. The multiple flow control devices 100 are used to supply one or more different processing fluids to the processing chamber 1300. The fluids are provided by multiple fluid supplies 1010. As can be seen, two or more fluid supplies 1010 can be connected to a single flow control device 100. The multiple flow control devices 100 collectively belong to a fluid delivery module 1400. Optionally, multiple fluid delivery modules 1400 may be used in the processing system 100. The multiple flow control devices 100 are connected to the processing chamber 1300 by an outlet manifold 401. Articles such as semiconductors and integrated circuits may be processed in the processing chamber 1300.

[0084] The valves 1100 isolate each of the flow control devices 100 from the processing chamber 1300 and allow each of the flow control devices 100 to be selectively connected to or isolated from the processing chamber 1300 to facilitate a wide variety of processing steps. The processing chamber 1300 may include an applicator that applies processing fluids delivered by the multiple flow control devices 100 and can selectively or diffusively distribute the fluids provided by the multiple flow control devices 100. Optionally, the processing chamber 1300 may be a vacuum chamber or a tank or bath for immersing articles in the fluids provided by the multiple flow control devices 100. Fluid supply lines are formed by each flow path from the respective fluid supply to the processing chamber 1300.

[0085] Additionally, the processing system 1000 may further include a vacuum source or drain 1200, which is separated from the processing chamber 1300 by a valve 1100, to allow drainage of processing fluids or to facilitate purging of one or more of the flow control devices 100. This allows for maintenance, switching of processing fluids within the same flow control device 100, or other duties. Optionally, the drain 1200 may be a liquid drain configured to remove liquid from the processing chamber 1300. Alternatively, the drain 1200 may be a vacuum source for removing gases. Optionally, the flow control device 100 may be a mass flow controller, a flow splitter, a flow combiner, or any other device that controls the flow of processing fluids within a processing system. Additionally, if desired, the valve 1100 may be integrated into the flow control device 100. The processing chamber 1300 may contain semiconductor wafers for processing, or the like.

[0086] Processes that may be performed in the processing system 1000 include wet cleaning, photolithography, ion implantation, dry etching, atomic layer etching, wet etching, plasma ashing, rapid thermal annealing, furnace annealing, thermal oxidation, chemical vapor deposition, atomic layer deposition, physical vapor deposition, molecular beam epitaxy, laser lift-off, electrochemical deposition, chemical mechanical polishing, wafer testing, electroplating, or any other process that utilizes gases or liquids.

[0087] 2 illustrates an exemplary fluid delivery module 1400 comprising a plurality of flow control devices 100. The fluid delivery module 1400 comprises a support structure 1402. The support structure 1402, sometimes referred to as a base substrate or base plate, is generally a flat plate or sheet on which one or more flow control devices 100 are mounted. In this embodiment, a plurality of flow control devices 100 are mounted on the support structure. Each of the flow control devices 100 is modular in design and is comprised of a number of individual fluid flow components 110, 120, each of which is directly or indirectly mounted to the support structure 1402. The support structure 1402 has an upper surface 1403 on which the flow control devices 100 are mounted.

[0088] The fluid flow components 110, 120 include active flow components 120 and passive flow components 110. Passive flow components 110 do not modify the flow of fluid, but instead only connect one active component to another active component, or connect an active component to an inlet or outlet. Active flow components 120 can modify the flow of fluid, monitor the state of the fluid, or otherwise perform functions beyond simply transporting fluid. Active flow components 120 include temperature sensors, pressure transducers, mass flow controllers, valves, etc. Additionally, other components may be both active and passive depending on their current application in the device 100 to control the flow. For example, a temperature sensor may also function as a passive flow component that transports fluid from one active flow component 120 to another active flow component 120 and may not actually be used as a sensor to measure temperature. As can be appreciated, a vast number of variations of the fluid flow components 110, 120 are contemplated and a wide range of devices 100 for controlling flow can be assembled using these fluid flow components 110, 120.

[0089] The fluid delivery module 1400 includes multiple inlets 102 that receive fluid from the fluid supply 1010 described above. The fluid delivery module also includes at least one outlet 104 that delivers fluid to the process chamber 1300. Each flow control device 100 may include one inlet 102 and one outlet 104, or multiple inlets 102 or multiple outlets 104. Thus, a fluid may flow through multiple inlets 102 and be delivered via a single outlet 104, or through a single inlet 102 and be delivered via multiple outlets 104. The same fluid may be delivered to multiple inlets 102, or different fluids may be delivered to each inlet 102. The same inlet 102 or outlet 104 may be shared by multiple flow control devices 100, or each flow control device 100 may have one or more dedicated inlets 102 and outlets 104.

[0090] 3-6, a fluid flow component 200 is shown. In this embodiment, the fluid flow component 200 is a temperature sensor configured to measure the temperature of a fluid flowing through the fluid flow component 200. The fluid flow component 200 is an active component because it actively monitors a property of the fluid. The component 200 has a component base 210, a retention element 240, a sensor housing 242, and a connector 244. The component base 210 has a top surface 211 and a bottom surface 212. The bottom surface 212 is attached to the other fluid flow components 110, 120 as described in more detail below. The top surface 211 receives the retention element 240 and the sensor housing 242 as shown.

[0091] The component base 210 further incorporates fastener passages 213 that may extend through the component base 210 to secure the fluid flow component 200 to other fluid flow components 110, 120 or to a support structure 1402. The fastener passages 213 may incorporate counterbores, countersinks, or other features that allow fasteners to be recessed below the top surface 211.

[0092] The component base 210 collectively comprises an outer base 214, a first support 215, a second support 216, an insert 220, and a number of fasteners 217. As can be seen, the component base 210 is made up of a number of separate components that allow fluid flow through the fluid flow component 200. The insert 220 is surrounded by the first and second supports 215, 216. The first and second supports 215, 216 fit within the outer base 214 and are secured by the fasteners 217 during assembly. This allows the component base 210 to be formed from a number of different components to be optimized for strength, cost, or other factors. For example, the insert 220 may be formed from a material that is non-reactive with the fluid being used, while the other components may be formed from materials optimized for cost or other factors. In yet other embodiments, the component base 210 may be formed as a single monolithic, integrally formed piece.

[0093] Fluid flow component 200 further includes sensing element 230, a spacer 245, a sensor 243, an O-ring 241, a retaining element 240, a sensor housing 242, and a connector 244. Sensor housing 242 encloses sensing element 230, spacer 245, sensor 243, and O-ring 241. Connector 244 is also partially mounted within sensor housing 242. Retaining element 240 secures sensor housing 242 to component base 210.

[0094] The connector 244 may be a panel mount connector or any other type of connector that allows for electrical connection to the sensor 243. The connector 244 is electrically connected to the sensor 243 to allow for operation of the sensor 243 and for measurement of one or more properties of the fluid passing through the fluid flow component 200. If desired, the connector 244 may be replaced with a length of wire exiting the sensor housing 242 in place of a panel mount or other electrical connector.

[0095] The sensor housing 242 extends from a base surface 251 to a distal end 252. The connector 244 is disposed in an opening in the distal end 252, with the base surface 251 engaging the top surface 211 of the component base 210. A flange 253 extends from the housing body 254 and forms a part of the base surface 251. The flange 253 engages the retention element 240. When the retention element 240 is secured to the top surface 211 of the component base 210, the flange 253 is also pressed against the top surface 211 of the component base 210.

[0096] The sensor housing 242 further incorporates a cavity 255. The cavity 255 is configured to receive the sensing element 230, the spacer 245, and the sensor 243, as described above. The cavity 255 incorporates a clamping surface 256 that engages with a shoulder surface 261 of the spacer 245, as described in more detail below. Thus, the clamping surface 256 of the sensor housing 242 is in direct physical contact with the shoulder surface 261 of the spacer 245. The sensor 243 engages with the sensor surface 263, which incorporates a sensor engagement feature, such as a rib, that ensures that the sensor 243 is properly positioned within the sensor housing 242. The sensor 243 is in direct physical contact with the sensor surface 263 of the spacer 245.

[0097] The spacer 245 is compressed between the sensor housing 242 and the sensing element 230 due to the interaction of the clamping surface 256 of the sensor housing 242 with the shoulder surface 261 of the spacer 245. The sensing element 230 has a top surface 231 and a bottom surface 232. The bottom surface 262 of the spacer 245 engages the top surface 231 of the sensing element 230, and the bottom surface 232 engages the first seal rib 221, the second seal rib 222, and the O-ring 223 located in the groove 224 of the insert 220. Thus, the interface between the insert 220 and the sensing element 230 comprises three seals that prevent leakage of fluid. The spacer 245 compresses the sensing element 230 against the first seal rib 221, the second seal rib 222, and the O-ring 223. The first seal rib 221 is concentric with the second seal rib 222 and the groove 224. The sensing element 230 may be formed of a hard material such as sapphire, or in other embodiments, a polymer such as polytetrafluoroethane ("PTFE") or other similar material. In this embodiment, the sensing element 230 is formed as a disk having a certain thickness, which may range from 0.5 mm to 3 mm depending on the design requirements. The top surface 231 of the sensing element 230 is in direct physical contact with the bottom surface 262 of the spacer 245, while the bottom surface 232 of the sensing element 230 is in direct physical contact with the first and second seal ribs 221 and 222 of the insert 220.

[0098] The insert 220 has a sensing port 225, a first port 226, and a second port 227. The first port 226 and the second port 227 may be either inlet or outlet ports for connecting fluids. Thus, fluid can flow in either direction through a flow path 228 extending from the first port 226 to the second port 227. The sensing port 225 is fluidly coupled to the flow path 228 between the first port 226 and the second port 227. A longitudinal axis AA extends through the center of the sensing port 225, and the sensing port 225 is rotationally symmetric about the longitudinal axis AA. The longitudinal axis AA also extends through the centers of the sensor housing 242, the spacer 245, the sensor 243, and the sensing element 230. In this embodiment, the flow path 228 is symmetric with respect to the sensing port 225. In other words, reversing the flow through the flow path 228 does not change the path that the fluid takes through the fluid flow component 200. In other embodiments, the flow path 228 need not be symmetrical and may be different between the first port 226 and the sensing port 225 and between the second port 227 and the sensing port 225 .

[0099] The sensing port 225 of the insert 220 comprises a first sealing rib 221, a second sealing rib 222, and a groove 224. Thus, the first sealing rib 221, the second sealing rib 222, and the groove 224 form part of the sensing port 225 and may be altered depending on the design requirements. This may include the pressure or material in the flow passage 228, or a different seal geometry may be required to achieve the desired performance. The mating interface between the bottom surface 232 of the sensing element 230 and the first sealing rib 221 forms a first seal. The mating interface between the bottom surface 232 of the sensing element and the second sealing rib 222 forms a second seal. The mating interface between the bottom surface 232 and the O-ring 223 in the groove 224 forms a third seal. Thus, three distinct seals may be formed to ensure high resistance to leakage. In other embodiments, the O-ring 223 and the groove 224 may be omitted. In yet other embodiments, one of the first and second sealing ribs 221, 222 may be omitted.

[0100] 7 and 8, the retaining element 240 is shown in more detail. The retaining element 240 has a housing opening 246 that allows passage of the housing body 254 of the sensor housing 242. A flange engagement surface 247 extends from the housing opening 246. The flange engagement surface 247 engages a flange 253 of the sensor housing 242 and allows the sensor housing 242 to be compressed against the top surface 211 of the component base 210. The retaining element 240 further includes a bottom surface 248. During assembly, the bottom surface 248 is substantially flush with the base surface 251 of the sensor housing 242. The bottom surface 248 also contacts the top surface 211 of the component base 210, although in other embodiments, the bottom surface 248 may be spaced from the top surface 211. A plurality of fastener passages 249 receive fasteners 217 to secure the retaining element 240 to the component base 210.

[0101] 9 and 10 show the sensor housing 242 in more detail. As described above, the sensor housing 242 extends from a base surface 251 to a distal end 252. A flange 253 forms part of the base surface 251 and extends from the housing body 254. A sealing surface 257 is disposed within the cavity adjacent the base surface 251, and the sealing surface 257 engages the O-ring 241 to seal the cavity 255 from the external environment. A connector opening 258 is disposed at the distal end 252 and is configured to receive the connector 244. The cavity 255 further includes a clamping surface 256, which is disposed closer to the distal end 252 than the sealing surface 257. The flange 253 includes a pair of wings 259 extending from opposite sides of the housing body 254 to increase the contact area between the flange 253 and the flange engagement surface 247 of the retention element 240.

[0102] 11-14, a sensor 243 and a spacer 245 are shown. The sensor 243 has a sensing aperture 264 formed in a sensing surface 265 of the sensor. The sensing aperture 264 allows the sensor 243 to detect the physical property to be measured. In this embodiment, the sensing aperture 264 passes electromagnetic waves that allow the temperature of the fluid to be detected. In this embodiment, the sensor 243 detects the temperature by measuring infrared electromagnetic waves received at the sensing aperture 264. The sensing surface 265 is in physical contact with the sensor surface 263 of the spacer 245, as described above. The sensor 243 is thus positioned such that its sensing aperture 264 is located at a fixed position along the longitudinal axis AA and is centered about the longitudinal axis AA.

[0103] The spacer 245 extends from the sensor face 263 to the bottom face 262 along the longitudinal axis AA. The shoulder face 261 is disposed between the sensor face 263 and the bottom face 262 relative to the longitudinal axis AA. The sensor face 263 incorporates a rib 266 that surrounds the sensing face 265 of the sensor 243 and aids in aligning the sensing aperture 264 with a spacer aperture 267 formed in the sensor face 263. The spacer aperture 267 allows electromagnetic waves to pass through the spacer 245 and is disposed about the longitudinal axis AA. The spacer aperture 267 is disposed at the intersection of the sensor face 263 and an inner face 268.

[0104] An inner surface 268 extends from the spacer opening 267 to the bottom surface 262. Preferably, the inner surface 268 is conical in shape with a diameter that increases as the distance from the spacer opening 267 to the bottom surface 262 increases. The angle of the inner surface 268 relative to the longitudinal axis AA is preferably an acute angle measured between the longitudinal axis AA and the inner surface 268. Formed in the bottom surface 262 are a plurality of notches 269. The notches 269 are rotationally symmetric about the longitudinal axis AA and have a smaller width than the protrusions 270 that form the bottom surface 262 measured circumferentially about the longitudinal axis AA. The protrusions 270 are in direct surface contact with the upper surface 231 of the sensing element 230 and secure the sensing element 230 to the sensing port 225 of the insert 220.

[0105] 15-20 show the sensing element 230 and the components that collectively form the component base 210. FIGS. 15 and 16 show the outer base 214. As described above, the component base 210 has a top surface 211 and a bottom surface 212. The outer base 214 has a top surface 271 and a bottom surface 272. The top surface 271 of the outer base 214 forms a portion of the top surface 211 of the component base 210, while the bottom surface 272 of the outer base 214 forms a portion of the bottom surface 212 of the component base 210. Fastener passages 213 are formed in the outer base 214 of the component base 210, as previously described. Additional fastener passages 273 are formed in the outer base 214 to allow for assembly of the fluid flow component 200.

[0106] A port opening 274 is also formed in the outer base 214 to allow access to the sensing port 225 of the insert 220 through the outer base 214. The port opening 274 extends from a top surface 271 of the outer base 214 to a component receiving cavity 275. The component receiving cavity 275 is formed to a bottom surface 272 and is configured to receive the insert 220 and the first and second supports 215, 216. A fastener passage 273 extends from the top surface 271 of the outer base 214 to the component receiving cavity 275, and the fastener passage 213 of the component base 210 extends from the top surface 271 of the outer base 214 to the bottom surface 271 of the outer base 214. The fasteners 217 secure the components of the component base 210 and couple the retention element 240 to the component base 210. As previously described, the component base 210 may be formed as a single component, omitting the insert 220, the first support 215, and the second support 216.

[0107] 17 and 18 show the insert 220 and the sensing element 230. As described above, the sensing element 230 has a top surface 231 and a bottom surface 232. The bottom surface 232 fits within the sensing port 225 of the insert 220. The bottom surface 232 engages the first sealing rib 221, the second sealing rib 222, and the O-ring 223 within the groove 224, as previously described. The sensing element 230 further comprises an outer diameter 233 sized such that the sensing element 230 fits at least partially within the outer wall 229 of the sensing port 225. Thus, the outer diameter 233 of the sensing element 230 is smaller than or has an interference fit with the outer wall 229, but is not prevented from fitting within the sensing port 225 and engaging the first and second sealing ribs 221, 222.

[0108] The insert 220 extends from a first port 226 to a second port 227 along a flow path 228, and the sensing port 225 is fluidly coupled to the flow path 228. The sensing port 225 forms part of a top surface 211 of the component base 210, and the first port 226 and the second port 227 form part of a bottom surface 212 of the component base 210. An end surface 234 of the sensing port 225 is substantially flush with a top surface 271 of the outer base 214. Optionally, the end surface 234 of the sensing port 225 may protrude beyond the top surface 271 of the outer base 214 or may be recessed relative to the top surface 271 of the outer base 214.

[0109] Similarly, end faces 235 of each of first port 226 and second port 227 are substantially flush with bottom surface 272 of outer base 214. Each of first port 226 and second port 227 forms a portion of bottom surface 212 of component base 210. Optionally, end faces 235 of first port 226 and second port 227 may protrude beyond bottom surface 272 of outer base 214 or may be recessed relative to bottom surface 272 of outer base 214.

[0110] 19 and 20 show the first and second supports 215, 216. The first and second supports 215, 216 each incorporate an insert-receiving section 236 that receives the insert 220. The insert-receiving section 236 provides structural support to the insert 220 and ensures that the insert 220 is properly positioned within the component base 210. The first and second supports 215, 216 fit within a component-receiving cavity 275 and are secured therein via fasteners 217. The fasteners 217 extend through fastener passages 237 and secure the first and second supports 215, 216 and the insert 220 firmly within the outer base 214.

[0111] 21-25 show another embodiment of a fluid flow component 300. The fluid flow component 300 is configured as a temperature sensor that uses a contact temperature sensor element instead of a non-contact temperature sensor element. The fluid flow component 300 is similar to the fluid flow component 200, except as described below. The fluid flow component 300 includes a component base 310, a sensor housing 342, a connector 344, a sensing element 330, a sensor 343, and a number of fasteners 317.

[0112] The component base 310 has a top surface 311 and an opposing bottom surface 312. A sensing port 325 is formed in the top surface 311. The sensing port 325 receives a sensing element 330. A plurality of fastener passages 313 are formed through the component base 310 to allow for direct or indirect assembly of the fluid flow component 300 to another component or substrate such as the support structure 1402. Separately, a plurality of fastener passages 373 are formed in the component base 310 to facilitate assembly of the component base 310 to the sensor housing 342. Both sets of fastener passages 313, 373 may incorporate counterbores, countersinks, or other features to allow for the heads of fasteners to be recessed within the component base 310.

[0113] The component base 310 further incorporates a first port 326, a second port 327, and a flow passage 328 extending from the first port 326 to the second port 327. The sensing port 325 is fluidly coupled to the flow passage 328 between the first port 326 and the second port 327. A longitudinal axis AA extends through the sensing port 325, and the flow passage 328 is symmetrical about the sensing port 325. In other embodiments, the flow passage 328 may be asymmetrical about the sensing port 325.

[0114] The sensing port 325 further includes a first sealing rib 321, a second sealing rib 322, and a groove 324. Each of the first sealing rib 321, the second sealing rib 322, and the groove 324 is symmetrical about the longitudinal axis AA. An O-ring 323 is disposed in the groove 324. The first sealing rib 321, the second sealing rib 322, and the O-ring 323 engage a bottom surface 332 of the sensing element 330 to provide a first, second, and third seal, respectively. An outer diameter 333 of the sensing element 330 is configured to fit within an outer wall 329 of the sensing port 325. The outer diameter 333 of the sensing element 330 may be smaller than a diameter of the outer wall 329 of the sensing port 325, or the outer diameter 333 may be an interference fit with the outer wall 329.

[0115] The sensor 343 is bonded to and in direct contact with the top surface 331 of the sensing element 330. This allows for a rapid measurement of the temperature of the sensing element 330, which is in direct contact with the fluid flowing through the flow path 328. Thus, the sensor 343 accurately measures the temperature of the fluid in the flow path 328. Preferably, the sensor 343 is fast-responding and the sensing element 330 is of high thermal conductivity, ensuring minimal error or delay in response to changes in temperature. In other embodiments, the sensor 343 may monitor the temperature via infrared or other means. In these embodiments, the sensing element 330 is transparent to electromagnetic waves and may or may not have high thermal conductivity. In still other embodiments, the sensor 343 may be a pressure sensor and may respond to deformation of the sensing element 330. As mentioned above, the sensing element 330 may be a thin layer of material such as sapphire, or may be formed of a polymer such as PTFE.

[0116] The sensor housing 342 encloses the sensor 343 and receives the connector 344. The connector 344 is electrically connected to the sensor 343 and is received within a connector opening 358 located at the distal end 352 of the sensor housing 342. The sensor housing 342 further includes a flange 353 extending from the housing body 354. The flange 353 is disposed adjacent to a base surface 351. The base surface 351 mates with the top surface 311 of the component base 310 and receives a fastener 317 to couple the sensor housing 342 to the component base 310. The sensor housing 342 has a cavity 355 that receives the sensor 343, a portion of the connector 344, and a portion of the sensing element 330.

[0117] The sensor housing 342 also incorporates a clamping surface 356 that engages the top surface 331 of the sensing element 330, compressing the sensing element 330 against the first sealing rib 321, the second sealing rib 322, and the O-ring 323 of the sensing port 325 to form a fluid-tight connection between the sensing element 330 and the sensing port 325. Optionally, the top surface 311 of the component base 310 may be spaced apart from a base surface 351 of the sensor housing 342. Alternatively, the top surface 311 may be in contact with the base surface 351.

[0118] 26-33, yet another embodiment of a fluid flow component 400 is disclosed. The fluid flow component 400 is configured as a pressure sensor configured to measure the pressure of a fluid within the fluid flow component 400. The fluid flow component 400 is generally similar to the fluid flow component 200, except as described below. The fluid flow component 400 includes a component base 410, a retention element 440, a sensor housing 442, a connector 444, a sensing element 430, a sensor 443, and a plurality of fasteners 417.

[0119] The component base 410 is an assembly formed from multiple pieces. The component base 410 has a top surface 411 and an opposing bottom surface 412. The component base 410 is formed as an assembly of an outer base 414, a first support 415, a second support 416, an insert 420, and multiple fasteners 417. It can be seen that the component base 410 is made up of multiple individual pieces that allow for fluid flow through the fluid flow component 400. The insert 420 is surrounded by the first and second supports 415, 416. The first and second supports 415, 416 fit within the outer base 414 and are secured by the fasteners 417 during assembly. This allows the component base 410 to be formed from multiple different pieces to be optimized for strength, cost, or other factors. For example, the insert 420 can be formed from a material that is non-reactive with the fluid being used, while other components may be formed from materials optimized for cost or other factors. In yet other embodiments, component base 410 may be formed as a single monolithic, integrally formed piece.

[0120] Fluid flow component 400 further includes sensing element 430, sensor 443, O-ring 441, retaining element 440, sensor housing 442, and connector 444. Sensor housing 442 encloses sensing element 430 and O-ring 441. Connector 444 is also partially mounted within sensor housing 442. Retaining element 440 secures sensor housing 442 to component base 410.

[0121] The connector 444 may be a panel mount connector or any other type of connector that allows for electrical connection to the sensor 443. The connector 444 is electrically connected to the sensor 443 to allow operation of the sensor 443 and to allow measurement of one or more properties of the fluid passing through the fluid flow component 400. If desired, the connector 444 may be replaced with a length of wire exiting the sensor housing 442 instead of a panel mount or other electrical connector.

[0122] The sensor housing 442 extends from a base surface 451 to a distal end 452. The connector 444 is disposed within an opening in the distal end 452, with the base surface 451 engaging the top surface 411 of the component base 410. A flange 453 extends from the housing body 454 and forms a part of the base surface 451. The flange 453 engages the retention element 440. When the retention element 440 is secured to the top surface 411 of the component base 410, the flange 453 is also pressed against the top surface 411 of the component base 410.

[0123] The sensor housing 442 further incorporates a cavity 455. The cavity 455 is configured to receive the sensing element 430 and the sensor 443, as described above. The cavity 455 incorporates a clamping surface 456 that engages a shoulder surface 461 of the sensor 443. Thus, the clamping surface 456 of the sensor housing 442 is in direct physical contact with the shoulder surface 461 of the sensor 443. Thus, the sensor 443 is in direct physical contact with the clamping surface 456 of the sensor housing 442. The sensor housing 442 is further configured such that the clamping surface 456 is flush with the clamping surface 256 of the sensor housing 242. This allows for the use of interchangeable parts between different assemblies, since the sensor housing 242 is identical to the sensor housing 442.

[0124] The sensor 443 is compressed between the sensor housing 442 and the sensing element 430 due to interaction between the clamping surface 456 of the sensor housing 442 and a shoulder surface 461 of the sensor 443. The sensing element 430 has a top surface 431 and a bottom surface 432. The bottom surface 462 of the sensor 443 engages the top surface 431 of the sensing element 430 and the bottom surface 432 engages the sealing surface 421 of the insert 420. The sensing element 430 further comprises an annular ring 422 which engages with a groove 424 formed in the sealing surface 421 of the insert 420. Thus, the annular ring 422 extends from the bottom surface 432 of the sensing element 430 and engages with the groove 424 formed in the sealing surface 421 to provide a seal to prevent leakage of fluid. Optionally, the groove 424 may be an interference fit with the annular ring 422 to facilitate sealing.

[0125] The sensor 443 presses the sensing element 430 against the sealing surface 421 to provide a seal. The sensing element 430 also includes a diaphragm portion 423 that deflects in response to pressure from a fluid within the fluid flow component 400. The diaphragm portion 423 is surrounded by an annular ring 422 and deflects relative to the annular ring 422. The sensing element 430 may be formed of a hard material such as sapphire, or in other embodiments, a polymer such as polytetrafluoroethylene ("PTFE") or other similar material. In this embodiment, the sensing element 430 is formed as a disk having a non-constant thickness. The diaphragm portion 423 may vary in thickness depending on design requirements. A top surface 431 of the sensing element 430 is in direct physical contact with the sensor 443, while a bottom surface 432 of the sensing element 430 is in direct physical contact with the sealing surface 421 of the insert 420.

[0126] The insert 420 has a sensing port 425, a first port 426, and a second port 427. The first port 426 and the second port 427 are either inlet or outlet ports for connecting fluid thereto. Thus, fluid may flow in either direction through a flow path 428 extending from the first port 426 to the second port 427. The sensing port 425 is fluidly coupled to the flow path 428 between the first port 426 and the second port 427. A longitudinal axis AA extends through the center of the sensing port 425, and the sensing port 425 is rotationally symmetric about the longitudinal axis AA. The longitudinal axis AA also extends through the centers of the sensor housing 442, the sensor 443, and the sensing element 430. In this embodiment, the flow path 428 is symmetric with respect to the sensing port 425. In other words, reversing the flow through the flow path 428 does not change the path that the fluid takes through the fluid flow component 400. In other embodiments, the flow path 428 need not be symmetrical and may be different between the first port 426 and the sensing port 425 and between the second port 427 and the sensing port 425 .

[0127] The sensing port 425 of the insert 420 includes a sealing surface 421 and a groove 424. The sealing surface 421 and the groove 424 thus form part of the sensing port 425 and may be altered depending on the design requirements. This may include the pressure or material in the flow passage 428, or a different seal geometry may be required to achieve the desired performance. The mating interface between the bottom surface 432 of the sensing element 430 and the sealing surface 421 forms a first seal. The mating interface between the annular ring 422 of the sensing element 430 and the groove 424 forms at least a second seal, while optionally, second, third, and / or fourth seals are formed on the inner, bottom, and outer surfaces of the annular ring 422. Thus, at least two and up to four separate seals may be formed to ensure high resistance to leakage.

[0128] The insert 420 is similar to, but not identical to, the insert 220. The inserts 220, 420 may be formed by molding or other means. It is further contemplated that the inserts 220, 420 may be formed as identical unfinished blanks and then finished to the different shapes of the sensing ports 225, 425 to allow for the use of different sensing elements 230, 430 without the need for additional manufacturing tools such as molds. This finishing may be performed by machining the sensing ports 225, 425 to achieve a shape appropriate for the type of sensing element used in the fluid flow component.

[0129] 34-42 show yet another embodiment of a fluid flow component 500 configured to measure the temperature of a fluid. The fluid flow component 500 is configured as a temperature sensor using a contact temperature sensor element in a configuration commonly referred to as a "thermowell" for a sensor that is immersed in a fluid. The fluid flow component 500 includes a component base 510, a sensor housing 542, a connector 544, a sensing element 530, a sensor 543, a spacer 545, a seal 541, and a number of fasteners 517.

[0130] The component base 510 has a top surface 511 and an opposing bottom surface 512. A sensing port 525 is formed in the top surface 511. The sensing port 525 receives a sensing element 530. A plurality of fastener passages 513 are formed through the component base 510 to allow for direct or indirect assembly of the fluid flow component 500 to another component or substrate such as the support structure 1402. Separately, a plurality of fastener passages 573 are formed through the component base 510 to facilitate assembly of the component base 510 to a sensor housing 542. Both sets of fastener passages 513, 573 may incorporate counterbores, countersinks, or other features to allow for fastener heads to be recessed within the component base 510.

[0131] The component base 510 further incorporates a first port 526, a second port 527, and a flow passage 528 extending from the first port 526 to the second port 527. The sensing port 525 is fluidly coupled to the flow passage 528 between the first port 526 and the second port 527. A longitudinal axis AA extends through the sensing port 525, and the flow passage 528 is symmetrical about the sensing port 525. In other embodiments, the flow passage 528 may be asymmetrical about the sensing port 525.

[0132] The sensing port 525 further comprises a sealing surface 521 and a groove 524. The sealing surface 521 and the groove 524 are symmetrical about the longitudinal axis AA. An annular ring 523 of a seal 541 is disposed within the groove 524. The annular ring 523 of the seal 541 extends from a bottom surface 532 of the seal 541 into the groove 524. The sealing surface 521 engages with the bottom surface 532 of the seal 541 to form a first seal. The mating interface between the annular ring 523 and the groove 524 may provide a second, third, or fourth seal along the inner, bottom, and outer surfaces of the annular ring 523 and the corresponding surfaces of the groove 524. An outer diameter 533 of the seal 541 is configured to fit within an outer wall 529 of the sensing port 525. The outer diameter 533 of the seal 541 may be smaller than the diameter of the outer wall 529 of the sensing port 525, or the outer diameter 533 may be an interference fit with the outer wall 529. The outer diameter 533 of the seal 541 may be the same as the outer surface of the annular ring 523, or may be on a different surface.

[0133] The sensor 543 is inserted into the sensing element 530. Typically, the sensor 543 is potted in a potting material 545, which may be an epoxy or other material that provides a high degree of thermal conductivity between the sensing element 530 and the sensor 543. This allows for a rapid measurement of the temperature of the fluid flowing through the flow path 528, surrounding the sensing element 530. Thus, the sensor 543 accurately measures the temperature of the fluid in the flow path 528. Preferably, the sensor 543 is fast-responding and the sensing element 530 is of high thermal conductivity to ensure minimal error or delay in response to temperature changes. In other embodiments, the sensor 543 may monitor temperature via infrared or other means. In these embodiments, the sensing element 530 may be transparent to electromagnetic waves and may or may not have high thermal conductivity. In still other embodiments, the sensor 543 may be a pressure sensor and respond to deformation of the sensing element 530. As noted above, the sensing element 530 may be formed from a tube of a material such as sapphire, or may be formed from a polymer such as PTFE.

[0134] Preferably, the sensing element 530 is a hollow tube that extends from the pocket 522 formed at the sensing port 525 through an opening 534 formed in the seal 541 from the top surface 531 of the seal 541 to the bottom surface 532 of the seal 541. Thus, the sensing element 530 has an outer surface 535 that contacts the opening 534 of the seal 541. The sensing element 530 extends through the flow passage 528 and is surrounded by the fluid in the flow passage 528 at the sensing port 525. The opening 534 forms a fluid-tight connection with the outer surface 535 of the sensing element 530, which may be an interference fit or may be bonded via adhesive, ultrasonic welding or other bonding processes known in the art. The pocket 522 does not need to be an interference fit with the outer surface 535 of the sensing element 530 because the potting material 545 may seal the sensor 543. Alternatively, the pocket 522 may be an interference fit with the outer surface 535 of the sensing element 530, or the sensing element 530 may be bonded by the bonding techniques described above to prevent fluid contact with the potting material 545 or for ease of assembly.

[0135] The sensor housing 542 encloses the sensor 543 and a portion of the sensing element 530 and receives a connector 544. The connector 544 is electrically connected to the sensor 543 and fits within a connector opening 558 located at a distal end 552 of the sensor housing 542. The sensor housing 542 further includes a flange 553 extending from the housing body 554. The flange 553 is disposed adjacent to a base surface 551. The base surface 551 mates with a top surface 511 of the component base 510 and receives a fastener 517 to couple the sensor housing 542 to the component base 510. The base surface 551 may be in contact with the top surface 511 or may be spaced apart from the top surface 511. The sensor housing 542 further includes a cavity 555 that receives a portion of the sensor 543, a portion of the connector 544, and a portion of the sensing element 530.

[0136] The sensor housing 542 also incorporates a clamping surface 556 that engages a shoulder surface 561 of the spacer 545. Direct contact between the clamping surface 556 of the sensor housing 542 and the shoulder surface 561 of the spacer 545 ensures that the seal 541 is compressed against the sensing port 525. A bottom surface 562 of the spacer 545 engages a top surface 531 of the seal 541. The top surface 531 may have a protruding conical surface 537 that engages a recessed conical surface 563 of the bottom surface 562 of the spacer 545. An opening 564 is formed through the spacer 545 to allow passage of the sensing element 530 and the sensor 543. The opening 564 is preferably sized to allow the sensing element 530 to pass freely therethrough. In other embodiments, the spacer 545 may be omitted and the seal 541 may engage the clamping surface 556 of the sensor housing 542.

[0137] 43-45 show a fluid flow component 600 in the form of a temperature sensor with a fluid mixer. The fluid flow component 600 comprises a component base 610, a sensor 643, a spacer 645, a sensing element 630, an O-ring 641, and a mixing element 660. The component base 610 has a top surface 611 and a front surface 612. The top surface 611 incorporates two first ports 626 and one second port 627. The two first ports 626 and the second port 627 are fluidly connected via a flow passage 628 in the component base 610. A sensing port 625 is formed in the front surface 612 and is fluidly connected to the flow passage 628 between the first port 626 and the second port 627.

[0138] The mixing element 660 is inserted into the sensing port 625, and the mixing element 660 has an opening 661 extending therethrough. In a typical mode of operation, fluid flows through the first port 626, through the mixing element 660, and out the second port 627. As the fluid flows through the mixing element 660, temperature or pressure may be measured by the sensor 643 through the opening 661 in the mixing element 660. An O-ring 641 engages the sensing element 630 and the mixing element 660 to seal the sensing port 625. The sensing element 630 may be optically transparent, similar to the sensing element 230, and may be formed of sapphire or a polymeric material to allow sensing of properties such as temperature or pressure of the fluid within the fluid flow component 600.

[0139] Spacer 645 incorporates threads that mate with corresponding threads on sensing port 625, and spacer 645 also has a conical inner surface 668 and an opening 667 extending therethrough. Sensor 643 is configured to monitor the temperature of fluid passing through opening 667 in spacer 645, through sensing element 630, and through opening 661 in mixing element 660. Sensing element 630 is clamped by spacer 645, and sensor 643 is coupled to spacer 645.

[0140] 46 and 47 illustrate yet another fluid flow component 700 including a component assembly 702 formed from a number of separate components. The component assembly 702 comprises a valve assembly 704 and a sensing assembly 708 including a component base 710. The valve assembly 704 and the sensing assembly 708 are operably coupled to a fluid passage 728 extending from a first port 705 of the component assembly 702 to a second port 706 of the component assembly 702. Within the component base 710 of the sensing assembly 708, the fluid passage 728 extends from a first port 726 to a second port 727. Additionally, the component base 710 incorporates a sensing port 725 fluidly coupled to the fluid passage 728.

[0141] The sensing assembly 708 further incorporates a sensor housing 742, a sensor 743, a spacer 745, and a sensing element 730. The sensing element 730 seals the sensing port 725 of the component base 710. The sensing element 730 is sealed against the sensing port 725 by pressure from the spacer 745, which in turn is compressed by pressure from the sensor housing 742. The sensor housing 742 further encloses the sensor 743, which is thus in direct contact with the spacer 745. The spacer 745 is in direct contact with the sensing element 730, which is in direct contact with the sensing port 725 of the component base 710.

[0142] In yet another embodiment, a method of manufacturing an article may be employed. Initially, a fluid delivery module 1400 is provided, the fluid delivery module 1400 having an inlet 102 and an outlet 104. A flow passageway extends from the inlet 102 to the outlet 104. A fluid flow component 200 forms part of the fluid delivery module 1400. The fluid flow component has an inlet port 226, an outlet port 227, and a flow passageway 228 extending from the inlet port 226 to the outlet port 227. The flow passageway 228 forms part of the flow passageway extending from the inlet 102 to the outlet 104.

[0143] Second, process fluid is provided from a fluid supply 1010 to the inlet 102 of the fluid delivery module 1400. Third, the process fluid is channeled through the flow passage and through the flow passage 228 of the fluid flow component 200. The process fluid is channeled through the flow passage 228 and the remainder of the flow passage to the outlet 104 of the fluid delivery module 1400. The outlet 104 is fluidly coupled to the outlet manifold 401.

[0144] Fourth, a property of the process fluid is measured via a sensing port 225, which is in fluid communication with a flow path 228 of the fluid flow component 200. The sensing port 225 is located between an inlet port 226 and an outlet port 227 and is sealed by a sensing element 230. A sensor 243 is operably coupled to the sensing element 230 such that the sensor 243 can measure the property of the process fluid via the sensing element 230. This can be done by observation of infrared or other electromagnetic waves, contact temperature measurement, deformation of the sensing element 230, or any other known means.

[0145] Fifth, the processing fluid is delivered from the outlet 104 of the fluid delivery module 1400 through the outlet manifold 401 to the processing chamber 1300. The outlet manifold 401 is fluidly coupled to the processing chamber 1300. Sixth, a process is performed on the article in the processing chamber. This may be any known process that is accomplished by applying one or more fluids to a substrate. For example, the fluid may be a sulfuric acid solution and the substrate may be a wafer made of silicon or other material.

[0146] 48-50 show a portion 800 of a fluid flow component for measuring the temperature of a process fluid. The portion 800 of the fluid flow component includes a component base 810 and a sensing element 830. A flow path 828 extends from an inlet port 826 to an outlet port 827. The flow path 828 enters a sensing port 825, which is fluidly connected to the flow path 828 between the inlet port 826 and the outlet port 827. The sensing port 825 includes a sealing rib 821 and a groove 824. The sensing port 825 also has a floor 840 and a wall 841 that extends from the floor 840 to the sensing element 830. Finally, a restricting element 842 extends from the floor 840 towards the sensing element 830. The restricting element 842 extends along a restricting plane RP that intersects the flow path 828.

[0147] The sensing element 830 has a top surface 831 and a bottom surface 832. The bottom surface 832 fits within the sensing port 825 and engages the sealing rib 821. Optionally, an O-ring may be installed within the groove 824 to provide additional sealing of the sensing element 830. The sensing element 830 has a sensing thickness Ts measured from the top surface 831 to the bottom surface 832. A limiting height H R extends along the limiting plane RP and is measured between the bottom surface 832 of the sensing element 830 and the top surface 843 of the limiting element 842. R extends along the limiting plane RP and is measured between the two ends of the wall 841 of the sensing port 825. Thus, the limiting height H R and the limit width W R The area defined by determines the restricted area through which the fluid must flow.

[0148] Separately, the non-restricted height H U is measured between the bottom surface 832 of the sensing element 830 and the floor 840 of the sensing port 825. U does not extend along the limiting surface RP, but is parallel to it and is measured at a location either upstream or downstream of the limiting element 842. U is the limit height H R In other words, the unrestricted height H U is measured to the floor of the sensing port 825.

[0149] The component base 810 has a top surface 811, a front surface 812, and a bottom surface 813. A sensing port 825 is formed in the top surface 811. An inlet port 826 is formed in the front surface 812. An outlet port 827 is formed in the bottom surface 813. Optionally, the inlet port 826 and the outlet port 827 may be arranged to be formed on the same surface, on opposite surfaces, or in any other configuration. The inlet port 826 and the outlet port 827 are configured as tube extensions configured to receive connectors or tubes. Optionally, the connectors or tubes may be welded to the tube extensions of the inlet port 826 or the outlet port 827. In alternative configurations, the inlet port 826 and the outlet port 827 may incorporate seal cavities or other features configured to receive a seal. Optionally, one or both of the inlet port 826 and the outlet port 827 may be configured to receive a seal, while the other of the inlet port 826 and the outlet port 827 may be configured to incorporate a tube extension.

[0150] In this embodiment, the sensing thickness T S For example, the sensing thickness T S may be 0.5 mm, 1.0 mm, or 2.0 mm. R For example, the limit height H R is 0.5mm, 1.0mm, 1.5mm, 2.0mm, or 3.0mm. The limit width W R is 12.0 mm, but may be different in other embodiments. U is 9.5 mm, but may be different in other embodiments. In this embodiment, the limit height H R This shows that.

[0151] 51-56, an additional portion 800 is shown. The portion 800 shown in FIGS. 51-56 is substantially identical to the portion 800 shown in FIGS. 48-50, except that each embodiment has a different limiting height H R The embodiment of Figures 51 and 52 has a limit height H of 1.5 mm.R The embodiment of Figures 53 and 54 has a limit height H of 2.0 mm. R The embodiment of Figures 55 and 56 has a limit height H of 3.0 mm. R has.

[0152] 57 and 58 show the portion 800 with the limiting element 842 omitted. The portion 800 in FIGS. 57 and 58 shows the limiting height H R is the unrestricted height H U 48-50, except that portion 800 is equal to:

[0153] 59 and 60 show part 900. Part 900 is generally similar to part 800 except as described. Part 900 has a component base 910 and a sensing element 830. Component base 910 has a distinct shape from component base 810 of the embodiment of FIGS. 48-58. Component base 910 has a distinctly different profile but incorporates a similar flow path configuration. A flow path 928 extends from an inlet port 926 to an outlet port 927. A sensing port 925 is disposed between the inlet port 926 and the outlet port 927. The sensing port 925 has a floor 940 and a wall 941 that extends from the floor 940 to the sensing element 830. Finally, a restricting element 942 extends from the floor 940 towards the sensing element. The restricting element 942 extends along a restricting plane RP that intersects the flow path 928.

[0154] Height limit H R extends along the limiting plane RP and is measured between the bottom surface 832 of the sensing element 830 and the top surface 943 of the limiting element 942. U is measured between the bottom surface 832 of the sensing element 830 and the bottom 940 of the sensing port 925. U does not extend along the limiting surface RP, but is parallel to it and is measured at a location either upstream or downstream of the limiting element 942. U is the height limit H R In other words, the unrestricted height H Uis measured to the floor of the channel 928.

[0155] The component base 910 has a top surface 911, a front surface 912, and a bottom surface 913. A sensing port 925 is formed in the top surface 911. An inlet port 926 is formed in the front surface 912. An outlet port 927 is formed in the bottom surface 913. Optionally, the inlet port 926 and the outlet port 927 may be arranged to be formed on the same surface, on opposite surfaces, or in any other configuration. The inlet port 926 is configured as a tube extension configured to receive a connector or tube. The outlet port 927 has a seal cavity configured to receive a seal, which allows for the coupling of two dissimilar surfaces. Optionally, the inlet port 926 may incorporate a seal cavity configured to receive a seal and the outlet port 927 may be a tube stub configured to receive a connector or tube.

[0156] 61-64, an additional portion 1000 is shown. The portion 1000 has a limiting height H R The part 1000 incorporates a component base 1010, a sensing element 830, and a restrictive element 1042. The component base 1010 has a flow path 1028 extending from an inlet port 1026 to an outlet port 1027. The sensing port 1025 is disposed along the flow path 1028 between the inlet port 1026 and the outlet port 1027. The sensing port 1025 has a wall 1041 extending from a bottom surface 832 of the sensing element to the restrictive element 1042.

[0157] The limiting element 1042 has a top surface 1043, a movable portion 1046, a diaphragm 1044, and a fixed portion 1045. The rigid portion 1045 fits within a corresponding cavity in the sensing port 1025 and provides a fluid-tight seal with the component base 1010. The diaphragm 1044 is configured to allow movement of the movable portion 1046 relative to the fixed portion 1045. The top surface 1043 is disposed on the fixed portion 1045 and defines a limiting height H between the top surface 1043 and the bottom surface 832 of the sensing element 830. RDefine the unrestricted height H U is defined between the floor 1047 of the movable part 1046 and the bottom surface 832 of the sensing element 830. R is measured along a limiting plane RP that extends perpendicular to the flow path 1028 and intersects the sensing element 830 and the upper surface 1043 of the limiting element 1042.

[0158] 62 shows the part 1000 in a neutral state whereby the diaphragm 1044 is in the middle of its range of motion. In this state, the limit height H R 63 shows portion 1000 in a retracted state. In this state, diaphragm 1044 is at a limiting height H R 64 shows portion 1000 in an extended state. In this state, diaphragm 1044 is deformed such that the limiting height H R The limiting element 1042 may be operated by an actuator, such as a solenoid or other linear actuator. The limiting element 1042 exerts a force on the movable portion 1046 to achieve the desired limiting height H R As will be described in more detail below, the limiting height H R Varying may improve the response time of the resulting fluid flow component, allowing for faster temperature measurements or less restriction of fluid flow, depending on operational parameters such as the mass flow rate or volumetric flow rate of the fluid passing therethrough.

[0159] Figures 65-72 show various restriction heights H R 65-72. Tables 1 and 2 below show the data underlying Figures 65-72. The data was generated using computational fluid dynamics software. Each part is at an initial steady state temperature of 20.05°C. A 2°C step increase in temperature of the fluid is applied with a transition time of 0 seconds. Fluid flow rates range from 400 mL / min to 4000 mL / min. The sensing thickness TH is 0.5 mm. The limit height H R ranges from 0.5 mm to 9.5 mm, where the limiting element 842 is omitted at 9.5 mm. Table 1 shows the maximum temperature of the upper surface 831 of the sensing element 830, and Table 2 shows the average temperature of the upper surface 831 of the sensing element 830. Measurements are taken at 0.25 second intervals from transition time 0 seconds to 2.0 seconds. All calculations are performed using the embodiment shown in Figures 48-56. [Table 1] [Table 2]

[0160] Referring to Figures 73 to 80, the limit height H of 0.5 mm R A series of graphs of the temperature of the top surface 831 of the sensing element 830 for and various fluid flow rates are shown. Tables 3 and 4 below show the data underlying Figures 73-80. The data was generated using computational fluid dynamics software. Each part is at an initial steady state temperature of 20.05°C. A one-step 2°C increase in temperature of the fluid is applied with a transition time of 0 seconds. Fluid flow rates range from 400 mL / min to 4000 mL / min. The sensing thickness T H ranges from 0.5 mm to 2.0 mm. Table 3 shows the maximum temperatures of the top surface 831 of the sensing element 830 and Table 4 shows the average temperatures of the top surface 831 of the sensing element 830. Measurements are taken at 0.25 second intervals from transition time 0 seconds to 2.0 seconds. All calculations are performed using the embodiment shown in Figures 48-56. [Table 3] [Table 4]

[0161] The limit ratio is the limit height H R The limit width W R In one example, the limit height H Ris 3 mm, and the limit width W R is 12 mm, the limiting ratio is 0.25. In another example, the limiting height H R is 2 mm, and the limit width W R is 12 mm, the limiting ratio is 0.167. R is 1 mm, and the limit width W R is 12 mm, the limiting ratio is 0.083. R is 0.5 mm, and the limit width W R is 12 mm, resulting in a confinement ratio of 0.042. As the confinement ratio decreases, the response time to the maximum and average temperatures of the upper surface 831 of the sensing element 830 decreases, improving the sensing performance.

[0162] The transition ratio is the limiting height H R The non-restrictive height H U In one example, the limit height H R is 3 mm, and the unrestricted height H U is 9.5 mm, resulting in a transition ratio of 0.316. R is 2 mm, and the unrestricted height H U is 9.5 mm, resulting in a transition ratio of 0.211. R is 1 mm, and the unrestricted height H U is 9.5 mm, resulting in a transition ratio of 0.105. R is 0.5 mm, and the unrestricted height H U is 9.5 mm, resulting in a transition ratio of 0.053. Increasing the transition ratio reduces the response time to the maximum and average temperatures of the upper surface 831 of the sensing element 830, improving the sensing performance.

[0163] A set of exemplary claims are provided below to further explain the present invention.

[0164] Exemplary Claim 1: A system for processing an article, the system comprising: a fluid supply configured to supply a processing fluid; a processing chamber configured to process an article; and a fluid delivery module, the fluid delivery module comprising: an inlet fluidly connected to the fluid supply; an outlet fluidly connected to the processing chamber; a flow passage extending from the inlet to the outlet; and a fluid flow component comprising: a component base; an inlet port formed in the component base; an outlet port formed in the component base; a flow passage extending from the inlet port to the outlet port, the flow passage forming a part of the flow passage; a sensing port in fluid communication with the flow passage and disposed between the inlet port and the outlet port; a sensing element sealing the sensing port; and a sensor isolated from the processing fluid by the sensing element and configured to detect a property of the processing fluid in the flow passage.

[0165] Exemplary Claim 2: The system of exemplary claim 1, wherein the sensing element comprises sapphire.

[0166] Exemplary Claim 3: The system of exemplary claims 1 or 2, wherein the sensor is a temperature sensor.

[0167] Exemplary Claim 4: The system of exemplary claim 3, wherein the sensor is a non-contact temperature sensor.

[0168] Exemplary Claim 5: The system of any one of exemplary claims 1-4, wherein the sensor is in direct contact with a spacer, and the spacer is in direct contact with the sensing element.

[0169] Exemplary Claim 6: The system of Exemplary Claim 5, wherein the spacer has a conical inner surface.

[0170] Exemplary Claim 7: The system of exemplary claim 5 or 6, wherein the spacer has a plurality of notches in a bottom surface of the spacer, the bottom surface being in contact with the sensing element.

[0171] Exemplary Claim 8: The system of any one of Exemplary Claims 5 to 7, wherein the spacer is compressed between the sensing element and a sensor housing, and the sensor and the spacer are disposed within a cavity of the sensor housing.

[0172] Exemplary Claim 9: The system of any one of exemplary claims 1-8, wherein the sensing port comprises a groove configured to receive an O-ring.

[0173] Exemplary Claim 10: The system of any one of exemplary claims 1-9, wherein the sensing port comprises a first sealing rib.

[0174] Exemplary Claim 11: The system of exemplary claim 10, wherein the sensing port comprises a second sealing rib concentric with the first sealing rib.

[0175] Exemplary Claim 12: The system of exemplary claim 1, wherein the sensing element comprises a polymer.

[0176] Exemplary Claim 13: The system of exemplary claims 1 or 12, wherein the sensing port comprises a groove configured to receive an annular ring of the sensing element.

[0177] Exemplary Claim 14: The system of exemplary claim 1 or any one of exemplary claims 12-13, wherein the sensor is a pressure sensor.

[0178] Exemplary claim 15; A system as described in exemplary claim 1 or any one of exemplary claims 12-14, wherein the sensor is in direct contact with the sensing element.

[0179] Exemplary Claim 16: The system of exemplary claim 15, wherein the sensor is compressed between the sensing element and a sensor housing, and the sensor is disposed within a cavity of the sensor housing.

[0180] Exemplary Claim 17: The system of any one of exemplary claims 1-16, wherein the fluid flow component comprises a sensor housing coupled to the component base, the sensor housing enclosing the sensor.

[0181] 18. The system of claim 17, further comprising a second fluid flow component, the second fluid flow component comprising: a component base; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port, the flow path forming a part of the flow passage; a sensing port in fluid communication with the flow path and disposed between the inlet port and the outlet port; a sensing element sealing the sensing port; a sensor isolated from a process fluid by the sensing element, the sensor configured to detect a second characteristic of the process fluid in the flow path; and a sensor housing coupled to the component base and enclosing the sensor, wherein the characteristic detected by the sensor of the fluid flow component is different from the second characteristic detected by the sensor of a second fluid flow component, and the sensor housing of the fluid flow component is identical to the sensor housing of the second fluid flow component.

[0182] Exemplary claim 19: A system for processing an article, the system comprising: a fluid supply configured to supply at least one processing fluid; a processing chamber configured to process an article; and a fluid delivery module, the fluid delivery module comprising: an inlet fluidly connected to the fluid supply; an outlet fluidly connected to the processing chamber; a flow passage extending from the inlet to the outlet; a first fluid flow component, the first fluid flow component comprising: a first component base; a first inlet port formed in the first component base; a first outlet port formed in the first component base; a first flow passage extending from the first inlet port to a first outlet port, the first flow passage forming a portion of the flow passage; a first sensor configured to detect a first property of the at least one processing fluid in the first flow passage; and a first component. a second fluid flow component having a first sensor housing coupled to a base and enclosing a first sensor; and a second fluid flow component having: a second component base; a second inlet port formed in the second component base; a second outlet port formed in the second component base; a second flow path extending from the second inlet port to the second outlet port, the second flow path forming a part of the flow passage; a second sensor configured to detect a second property of the at least one process fluid in the second flow path; and a second fluid flow component having a second sensor housing coupled to the second component base and enclosing the second sensor, wherein the first sensor and the second sensor are distinct and the first sensor housing and the second sensor housing are identical.

[0183] Exemplary Claim 20: The system of exemplary claim 19, wherein the first and second characteristics are different.

[0184] Exemplary Claim 21: The system of exemplary claim 19 or 20, wherein the first and second sensor housings each comprise a cavity, the first sensor being enclosed in the first sensor housing, and the second sensor housing enclosing the second sensor.

[0185] Exemplary Claim 22: The system of any one of exemplary claims 19-21, wherein the first sensor is a temperature sensor.

[0186] Exemplary Claim 23: The system of any one of exemplary claims 19-22, wherein the first fluid flow component further comprises a first spacer, the first sensor housing is in direct contact with the first sensor, and the first sensor is in direct contact with the first spacer.

[0187] Exemplary Claim 24: The system of exemplary claim 23, further comprising a first sensing element and a first sensing port, the first sensing element sealing the first sensing port, and the spacer being in direct contact with the first spacer.

[0188] Exemplary Claim 25: The system of any one of exemplary claims 19-24, wherein the second sensor is a pressure sensor.

[0189] Exemplary Claim 26: The system of any one of exemplary claims 19-25, wherein the second fluid flow component further comprises a second sensing element and a second sensing port, the second sensor is in direct contact with the second sensor housing and the second sensing element, and the second sensing element seals the second sensing port.

[0190] Exemplary claim 27: A fluid flow component comprising: a component base; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port; a sensing port in fluid communication with the flow path and disposed between the inlet port and the outlet port; a sensing element sealing the sensing port; and a sensor isolated from a process fluid by the sensing element, the sensor configured to detect a characteristic of the process fluid in the flow path.

[0191] Exemplary Claim 28: The fluid flow component of exemplary claim 27, wherein the sensing element comprises sapphire.

[0192] Exemplary Claim 29: The fluid flow component of exemplary claim 27 or 28, wherein the sensor is a temperature sensor.

[0193] Exemplary Claim 30: The fluid flow component of exemplary claim 29, wherein the sensor is a non-contact temperature sensor.

[0194] Exemplary Claim 31: The fluid flow component of any one of Exemplary Claims 27-30, wherein the sensor is in direct contact with a spacer, and the spacer is in direct contact with the sensing element.

[0195] Exemplary Claim 32: The fluid flow component of Exemplary Claim 31, wherein the spacer has a conical inner surface.

[0196] Exemplary Claim 33: The fluid flow component of exemplary Claim 31 or 32, wherein the spacer has a plurality of notches in a bottom surface of the spacer, the bottom surface being in contact with the sensing element.

[0197] Exemplary Claim 34: A fluid flow component as described in any one of exemplary claims 31 to 33, wherein the spacer is compressed between the sensing element and a sensor housing, and the sensor and the spacer are disposed within a cavity of the sensor housing.

[0198] Exemplary Claim 35: The fluid flow component of any one of Exemplary Claims 27-34, wherein the sensing port comprises a groove configured to receive an O-ring.

[0199] Exemplary Claim 36: The fluid flow component of any one of Exemplary Claims 27-35, wherein the sensing port comprises a first sealing rib.

[0200] Exemplary Claim 37: The fluid flow component of exemplary claim 36, wherein the sensing port comprises a second sealing rib concentric with the first sealing rib.

[0201] Exemplary Claim 38: The fluid flow component of exemplary claim 27, wherein the sensing element comprises a polymer.

[0202] Exemplary Claim 39: The fluid flow component of exemplary claim 27 or 38, wherein the sensing port comprises a groove configured to receive an annular ring of the sensing element.

[0203] Exemplary Claim 40: The fluid flow component of exemplary claim 27 or any one of exemplary claims 38-39, wherein the sensor is a pressure sensor.

[0204] Exemplary Claim 41: The fluid flow component of exemplary claim 27 or any one of exemplary claims 38-40, wherein the sensor is in direct contact with the sensing element.

[0205] Exemplary Claim 42: The fluid flow component of Exemplary Claim 41, wherein the sensor is compressed between the sensing element and a sensor housing, and the sensor is disposed within a cavity of the sensor housing.

[0206] Exemplary Claim 43: The fluid flow component of any one of exemplary claims 27-42, wherein the fluid flow component comprises a sensor housing coupled to the component base, the sensor housing enclosing the sensor.

[0207] Exemplary claim 44: A method of manufacturing an article, comprising the steps of: a) providing a delivery module, the fluid delivery module comprising a fluid flow component having an inlet, an outlet, a flow passage extending from the inlet to the outlet, and a flow passage extending from an inlet port to an outlet port, the flow passage forming a portion of the flow passage; b) supplying a process fluid to the inlet of the fluid delivery module; c) flowing the treatment fluid through the flow passage, the treatment fluid flowing through the flow path of the fluid flow component to the outlet of the fluid delivery module, the outlet of the fluid delivery module fluidly connected to an outlet manifold; d) measuring a characteristic of the treatment fluid through a sensing port in fluid communication with the flow path of the fluid flow component between the inlet port and the outlet port, the sensing port being sealed by a sensing element and a sensor being operably coupled to the sensing element; e) delivering the treatment fluid from the outlet of the fluid delivery module through the outlet manifold to a treatment chamber, the outlet manifold being fluidly connected to the treatment chamber; and f) performing a treatment on an article in the treatment chamber.

[0208] Exemplary Claim 45: The method of Exemplary Claim 44, wherein the sensing element comprises sapphire.

[0209] Exemplary Claim 46: The method of exemplary claims 44 or 45, wherein the sensor is a temperature sensor.

[0210] Exemplary Claim 47: The method of exemplary claim 46, wherein the sensor is a non-contact temperature sensor.

[0211] Exemplary Claim 48: The method of any one of Exemplary Claims 44-47, wherein the sensor is in direct contact with a spacer, and the spacer is in direct contact with the sensing element.

[0212] Exemplary Claim 49: The method of exemplary claim 48, wherein the spacer has a conical interior surface.

[0213] Exemplary Claim 50: The method of exemplary claims 48 or 49, wherein the spacer has a plurality of notches in a bottom surface of the spacer, the bottom surface being in contact with the sensing element.

[0214] Exemplary Claim 51: The method of any one of Exemplary Claims 48 to 50, wherein the spacer is compressed between the sensing element and the sensor housing, and the sensor and the spacer are disposed within a cavity of the sensor housing.

[0215] Exemplary Claim 52: The method of any one of Exemplary Claims 44-51, wherein the sensing port comprises a groove configured to receive an O-ring.

[0216] Exemplary Claim 53: The method of any one of Exemplary Claims 44-52, wherein the sensing port includes a first sealing rib.

[0217] Exemplary Claim 54: The method of Exemplary Claim 53, wherein the sensing port comprises a second sealing rib concentric with the first sealing rib.

[0218] Exemplary Claim 55: The method of exemplary claim 44, wherein the sensing element comprises a polymer.

[0219] Exemplary Claim 56: The method of exemplary claims 44 or 55, wherein the sensing port comprises a groove configured to receive an annular ring of the sensing element.

[0220] Exemplary Claim 57: The method of exemplary claim 44 or any one of exemplary claims 55 or 56, wherein the sensor is a pressure sensor.

[0221] Exemplary Claim 58: The method of exemplary claim 44 or any one of exemplary claims 55-57, wherein the sensor is in direct contact with the sensing element.

[0222] Exemplary Claim 59: The method of exemplary claim 58, wherein the sensor is compressed between the sensing element and a sensor housing, the sensor being disposed within a cavity of the sensor housing.

[0223] Exemplary claim 60: A fluid flow component comprising: a component base; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port; and a sensing element having a bottom surface and a top surface, the bottom surface being in contact with process fluid flowing through the flow path, the flow path having a restricting height and a restricting width at a restricting surface intersecting the sensing element, wherein a restricting ratio between the restricting height and the restricting width is 0.25 or less.

[0224] Exemplary Claim 61: The fluid flow component of exemplary claim 60, wherein the restriction ratio is less than or equal to 0.167.

[0225] Exemplary Claim 62: The fluid flow component of exemplary claim 61, wherein the restriction ratio is less than or equal to 0.083.

[0226] Exemplary Claim 63: The fluid flow component of any one of Exemplary Claims 60-62, further comprising a restrictive element, the restrictive surface intersecting the restrictive element.

[0227] Exemplary Claim 64: The fluid flow component of any one of Exemplary Claims 60-63, further comprising a restricting element, the restricting height being measured between the bottom surface of the sensing element and the restricting element.

[0228] Exemplary Claim 65: The fluid flow component of Exemplary Claim 64, further comprising an actuator, the actuator operably coupled to the restrictive element.

[0229] Exemplary Claim 66: The fluid flow component of exemplary claim 65, wherein the actuator is configured to vary the limiting height.

[0230] Exemplary Claim 67: The fluid flow component of any one of exemplary claims 60-66, wherein the flow path has an unrestricted height extending from the sensing element to a floor of the sensing port, the unrestricted height being greater than the restricted height.

[0231] Exemplary Claim 68: The fluid flow component of exemplary claim 67, wherein a transition ratio between the restricting height and the unrestricted height is less than or equal to 0.316.

[0232] Exemplary Claim 69: The fluid flow component of exemplary claim 68, wherein the transition ratio is less than or equal to 0.211.

[0233] Exemplary Claim 70: The fluid flow component of exemplary claim 69, wherein the transition ratio is less than or equal to 0.105.

[0234] Exemplary Claim 71: The fluid flow component of any one of Exemplary Claims 60-70, wherein the sensing element has a thickness of 3 mm or less.

[0235] Exemplary Claim 72: The fluid flow component of any one of Exemplary Claims 60-71, wherein the sensing element has a thickness of 1 mm or less.

[0236] Exemplary Claim 73: The fluid flow component of any one of Exemplary Claims 60-72, wherein the sensing element has a thickness less than the limiting height.

[0237] Exemplary Claim 74: A fluid flow component as described in any one of exemplary claims 60 to 73, wherein when the process fluid is liquid water having a flow rate of 400 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has a maximum temperature of 21.5°C or greater 0.5 seconds after the transition time.

[0238] Exemplary Claim 75: A fluid flow component as described in any one of exemplary claims 60 to 74, wherein when the process fluid is liquid water having a flow rate of 400 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has an average temperature of 20.85°C or greater 0.5 seconds after the transition time.

[0239] Exemplary Claim 76: A fluid flow component as described in any one of exemplary claims 60 to 75, wherein when the process fluid is liquid water having a flow rate of 1250 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has a maximum temperature of 21.52°C or greater 0.5 seconds after the transition time.

[0240] Exemplary Claim 77: A fluid flow component as described in any one of exemplary claims 60 to 76, wherein when the process fluid is liquid water having a flow rate of 1250 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has an average temperature of 20.86°C or greater 0.5 seconds after the transition time.

[0241] Exemplary Claim 78: The fluid flow component of any one of Exemplary Claims 74-77, wherein the sensing element has a thickness of 0.5 mm.

[0242] Exemplary claim 79: A fluid flow component comprising: a component base; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port; and a sensing element having a bottom surface and a top surface, the bottom surface contacting a process fluid flowing through the flow path, the flow path having a restricting height at a restricting surface intersecting the sensing element and a non-restricting height extending from the sensing element to a floor of the sensing port, wherein a transition ratio between the restricting height and the non-restricting height is 0.316 or less.

[0243] Exemplary Claim 80: The fluid flow component of exemplary claim 79, wherein the transition ratio is less than or equal to 0.211.

[0244] Exemplary Claim 81: The fluid flow component of exemplary claim 79 or 80, wherein the transition ratio is 0.105 or less.

[0245] Exemplary Claim 82: The fluid flow component of any one of Exemplary Claims 79-81, wherein the flow passage has a restrictive width measured along the restrictive surface.

[0246] Exemplary Claim 83: The fluid flow component of exemplary claim 82, wherein a restriction ratio between the restriction height and the restriction width is less than or equal to 0.25.

[0247] Exemplary Claim 84: The fluid flow component of exemplary claim 83, wherein the restriction ratio is less than or equal to 0.167.

[0248] Exemplary Claim 85: The fluid flow component of exemplary claim 83 or 84, wherein the restriction ratio is 0.083 or less.

[0249] Exemplary Claim 86: The fluid flow component of any one of Exemplary Claims 79-85, further comprising a restrictive element, the restricting surface intersecting the restrictive element.

[0250] Exemplary Claim 87: The fluid flow component of any one of Exemplary Claims 79-86, further comprising a restricting element, the restricting height being measured between the bottom surface of the sensing element and the restricting element.

[0251] Exemplary Claim 88: The fluid flow component of any one of exemplary claims 79-87, further comprising a restrictive element and an actuator, the actuator operably coupled to the restrictive element.

[0252] Exemplary Claim 89: The fluid flow component of exemplary claim 88, wherein the actuator is configured to vary the limiting height.

[0253] Exemplary Claim 90: The fluid flow component of any one of exemplary claims 79-89, wherein the unrestricted height is greater than the restricted height.

[0254] Exemplary Claim 91: The fluid flow component of any one of Exemplary Claims 79-90, wherein the sensing element has a thickness of 3 mm or less.

[0255] Exemplary Claim 92: The fluid flow component of any one of exemplary claims 79-91, wherein the sensing element has a thickness of 1 mm or less.

[0256] Exemplary Claim 93: The fluid flow component of any one of Exemplary Claims 79-92, wherein the sensing element has a thickness less than the limiting height.

[0257] Exemplary Claim 94: A fluid flow component as described in any one of exemplary claims 79 to 93, wherein when the process fluid is liquid water having a flow rate of 400 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has a maximum temperature of 21.5°C or greater 0.5 seconds after the transition time.

[0258] Exemplary Claim 95: A fluid flow component as described in any one of exemplary claims 79 to 94, wherein when the process fluid is liquid water having a flow rate of 400 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has an average temperature of 20.85°C or greater 0.5 seconds after the transition time.

[0259] Exemplary Claim 96: A fluid flow component as described in any one of exemplary claims 79 to 95, wherein when the process fluid is liquid water having a flow rate of 1250 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has a maximum temperature of 21.52°C or greater 0.5 seconds after the transition time.

[0260] Exemplary Claim 97: A fluid flow component as described in any one of exemplary claims 79 to 96, wherein when the process fluid is liquid water having a flow rate of 1250 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has an average temperature of 20.86°C or greater 0.5 seconds after the transition time.

[0261] Exemplary Claim 98: The fluid flow component of any one of Exemplary Claims 94-97, wherein the sensing element has a thickness of 0.5 mm.

[0262] Exemplary Claim 99: A fluid flow component comprising: a component base; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port; a sensing element having a bottom surface and a top surface, the bottom surface being in contact with process fluid flowing through the flow path; and a restricting element configured to block the flow path, the flow path having a restricting height between the restricting element and the bottom surface of the sensing element, the restricting height being less than a non-restricting height measured from the bottom surface of the sensing element to a floor of the flow path.

[0263] Exemplary Claim 100: The fluid flow component of exemplary claim 99, wherein a transition ratio between the restricting height and the unrestricted height is less than or equal to 0.316.

[0264] Exemplary Claim 101: The fluid flow component of exemplary claim 100, wherein the transition ratio is less than or equal to 0.211.

[0265] Exemplary Claim 102: The fluid flow component of exemplary claim 100 or 101, wherein the transition ratio is less than or equal to 0.105.

[0266] Exemplary Claim 103: The fluid flow component of any one of exemplary claims 99-102, further comprising a limiting surface intersecting the limiting element and the sensing element, the limiting height being measured along the limiting surface.

[0267] Exemplary Claim 104: The fluid flow component of exemplary claim 103, wherein the flow passage has a restrictive width measured along the restrictive surface.

[0268] Exemplary Claim 105: The fluid flow component of exemplary claim 104, wherein a restriction ratio between the restriction height and the restriction width is less than or equal to 0.25.

[0269] Exemplary Claim 106: The fluid flow component of exemplary claim 105, wherein the restriction ratio is less than or equal to 0.167.

[0270] Exemplary Claim 107: The fluid flow component of exemplary claim 105 or 106, wherein the restriction ratio is 0.083 or less.

[0271] Exemplary Claim 108: The fluid flow component of any one of Exemplary Claims 99-107, further comprising an actuator, the actuator operably coupled to the restrictive element.

[0272] Exemplary Claim 109: The fluid flow component of exemplary claim 108, wherein the actuator is configured to vary the limiting height.

[0273] Exemplary Claim 110: The fluid flow component of any one of Exemplary Claims 99-109, wherein the sensing element has a thickness of 3 mm or less.

[0274] Exemplary Claim 111: The fluid flow component of any one of Exemplary Claims 99-110, wherein the sensing element has a thickness of 1 mm or less.

[0275] Exemplary Claim 112: The fluid flow component of any one of Exemplary Claims 99-111, wherein the sensing element has a thickness less than the limiting height.

[0276] Exemplary Claim 113: A fluid flow component as described in any one of exemplary claims 99 to 112, wherein when the process fluid is liquid water having a flow rate of 400 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has a maximum temperature of 21.5°C or greater 0.5 seconds after the transition time.

[0277] Exemplary Claim 114: A fluid flow component as described in any one of exemplary claims 99 to 114, wherein when the process fluid is liquid water having a flow rate of 400 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has an average temperature of 20.85°C or greater 0.5 seconds after the transition time.

[0278] Exemplary Claim 115: A fluid flow component as described in any one of exemplary claims 99 to 114, wherein when the process fluid is liquid water having a flow rate of 1250 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has a maximum temperature of 21.52°C or greater 0.5 seconds after the transition time.

[0279] Exemplary Claim 116: A fluid flow component as described in any one of exemplary claims 99 to 115, wherein when the process fluid is liquid water having a flow rate of 1250 mL per minute and a steady state temperature of 20.05°C, when a temperature increase of 2°C is applied to the process fluid in one step at a transition time, the upper surface of the sensing element has an average temperature of 20.86°C or greater 0.5 seconds after the transition time.

[0280] Exemplary Claim 117: The fluid flow component of any one of Exemplary Claims 113-116, wherein the sensing element has a thickness of 0.5 mm.

[0281] Although the present invention has been described in terms of specific examples, including currently preferred modes for carrying out the invention, those skilled in the art will appreciate that numerous variations and permutations of the above-described systems and techniques exist. It is to be understood that other embodiments may be utilized and structural and functional changes may be made without departing from the scope of the present invention. Accordingly, the spirit and scope of the present invention should be construed broadly as set forth in the appended claims.

Claims

1. 1. A system for processing an article, the system comprising: a fluid supply configured to supply a process fluid; a processing chamber configured to process the article; and a fluid delivery module; The fluid delivery module includes: an inlet fluidly connected to said fluid supply; an outlet fluidly connected to the processing chamber; a flow passage extending from the inlet to the outlet; and a fluid flow component; The fluid flow component comprises: parts-based; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port, the flow path forming a portion of the flow passage; a sensing port in fluid communication with the flow path and disposed between the inlet port and the outlet port; a sensing element sealing the sensing port; and a sensor isolated from the process fluid by the sensing element and configured to detect a property of the process fluid in the flow path; system.

2. The system of claim 1 , wherein the sensing element comprises sapphire.

3. The system of claim 1 , wherein the sapphire is a non-contact temperature sensor.

4. The system of any one of claims 1 to 3, wherein the sensor is in direct contact with a spacer, and the spacer is in direct contact with the sensing element.

5. The system of claim 4 , wherein the spacer has a plurality of notches in a bottom surface of the spacer, the bottom surface being in contact with the sensing element.

6. The system of any one of claims 1 to 3, wherein the sensing port comprises a groove configured to receive an O-ring.

7. The system of any one of claims 1 to 3, wherein the sensing port comprises a first sealing rib and the sensing port comprises a second sealing rib concentric with the first sealing rib.

8. The system of claim 1 , wherein the sensing element comprises a polymer.

9. The system of claim 1 or 2, wherein the sensor is a pressure sensor.

10. The system of claim 1 or 8, wherein the sensor is in direct contact with the sensing element.

11. The system of any one of claims 1 to 3 and 8, wherein the fluid flow component comprises a sensor housing coupled to the component base, the sensor housing enclosing the sensor.

12. 12. The system of claim 11 further comprising a second fluid flow component, the second fluid flow component comprising: parts-based; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port, the flow path forming a portion of the flow passage; a sensing port in fluid communication with the flow path and disposed between the inlet port and the outlet port; a sensing element sealing said sensing port; a sensor isolated from the process fluid by the sensing element and configured to detect a second property of the process fluid in the flow path; and a sensor housing coupled to the component base and enclosing the sensor; the characteristic sensed by the sensor of the fluid flow component is different from a second characteristic sensed by the sensor of a second fluid flow component; the sensor housing of the fluid flow component is identical to the sensor housing of a second fluid flow component; system.

13. 1. A system for processing an article, the system comprising: a fluid supply configured to supply at least one process fluid; a processing chamber configured to process the article; and 1. A fluid delivery module, comprising: an inlet fluidly connected to the fluid supply; an outlet fluidly connected to the processing chamber; a flow passage extending from the inlet to the outlet; A first fluid flow component, the first fluid flow component comprising: a first component base; a first inlet port formed in the first component base; a first outlet port formed in the first component base; a first flow path extending from a first inlet port to a first outlet port, the first flow path forming a portion of the flow passage; a first sensor configured to detect a first property of the at least one process fluid in the first flow path; and a first fluid flow component including a first sensor housing coupled to the first component base and enclosing a first sensor; and a second fluid flow component, the second fluid flow component comprising: a second parts base; a second inlet port formed in the second component base; a second outlet port formed in the second component base; a second flow path extending from a second inlet port to a second outlet port, the second flow path forming a portion of the flow passage; a second sensor configured to detect a second property of the at least one process fluid in a second flow path; and a fluid delivery module comprising a second fluid flow component coupled to the second component base and comprising a second sensor housing enclosing a second sensor; The first sensor and the second sensor are different, the first sensor housing and the second sensor housing are identical; system.

14. The system of claim 13 , wherein the first characteristic and the second characteristic are different.

15. 15. The system of claim 13 or 14, wherein the first and second sensor housings each comprise a cavity, the first sensor being enclosed by the first sensor housing and the second sensor housing enclosing the second sensor.

16. 1. A fluid flow component comprising: parts base; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port; a sensing port in fluid communication with the flow path and disposed between the inlet port and the outlet port; a sensing element sealing the sensing port; and a sensor isolated from the process fluid by the sensing element, the sensor configured to detect a property of the process fluid in the flow path; A fluid flow component comprising:

17. 17. The fluid flow component of claim 16, wherein the sensor is in direct contact with a spacer, and the spacer is in direct contact with the sensing element.

18. 18. The fluid flow component of claim 17, wherein the spacer is compressed between the sensing element and a sensor housing, the sensor and spacer being disposed within a cavity in the sensor housing.

19. The fluid flow component of claim 16 , wherein the sensing port comprises a groove configured to receive an annular ring of the sensing element.

20. A fluid flow component according to any one of claims 16 to 19, wherein the fluid flow component comprises a sensor housing coupled to the component base, the sensor housing enclosing the sensor.

21. 1. A method of manufacturing an article, comprising: a) providing a delivery module, the fluid delivery module comprising a fluid flow component having an inlet, an outlet, a flow passage extending from the inlet to the outlet, and a flow passage extending from an inlet port to an outlet port, the flow passage forming a portion of the flow passage; b) supplying a treatment fluid to the inlet of the fluid delivery module; c) flowing the process fluid through the flow passage, the process fluid flowing through the flow passage of the fluid flow component to the outlet of the fluid delivery module, the outlet of the fluid delivery module being fluidly connected to an outlet manifold; d) measuring a property of the process fluid through a sensing port in fluid communication with the flow path of the fluid flow component between the inlet port and the outlet port, the sensing port being sealed by a sensing element, and a sensor being operably coupled to the sensing element; e) delivering a processing fluid from the outlet of the fluid delivery module through the outlet manifold to a processing chamber, the outlet manifold being fluidly connected to the processing chamber; and f) processing the article in the processing chamber A method comprising:

22. 1. A fluid flow component comprising: parts base; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port; and a sensing element having a bottom surface and a top surface, the bottom surface in contact with process fluid flowing through the flow path, the flow path having a confining height and a confining width at a confining surface intersecting the sensing element; The restriction ratio between the restriction height and the restriction width is 0.25 or less. Fluid flow components.

23. 23. The fluid flow component of claim 22, further comprising a restricting element, the restricting surface intersecting the restricting element.

24. 24. A fluid flow component according to claim 22 or claim 23, further comprising a restricting element, the restricting height being measured between the bottom surface of the sensing element and the restricting element.

25. 1. A fluid flow component comprising: parts base; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port; and a sensing element having a bottom surface and a top surface, the bottom surface contacting a process fluid flowing through the flow path, the flow path having a restricting height at a restricting surface intersecting the sensing element and an unrestricted height extending from the sensing element to a floor of a sensing port; a transition ratio between the restrictive height and the unrestrictive height is less than or equal to 0.316; Fluid flow components.

26. 26. The fluid flow component of claim 25, wherein the flow passage has a restricted width measured along the restricting surface.

27. 27. A fluid flow component according to claim 25 or claim 26, further comprising a restricting element, the restricting surface intersecting the restricting element.

28. 27. The fluid flow component of claim 25 or 26, further comprising a restricting element, the restricting height being measured between the bottom surface of the sensing element and the restricting element.

29. 1. A fluid flow component comprising: parts base; an inlet port formed in the component base; an outlet port formed in the component base; a flow path extending from the inlet port to the outlet port; a sensing element having a bottom surface and a top surface, the bottom surface in contact with process fluid flowing through the flow path; and a restricting element configured to block the flow path, the flow path having a restricting height between the restricting element and the bottom surface of the sensing element, the restricting height being less than an unrestricted height measured from the bottom surface of the sensing element to a floor of the flow path; Fluid flow components.

30. 30. The fluid flow component of claim 29, further comprising a restriction surface intersecting the restricting element and the sensing element, the restriction height being measured along the restriction surface.

31. 31. The fluid flow component of claim 30, wherein the flow passage has a restricted width measured along the restricting surface.

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