Solid Source Vaporizer

Abstract

A solid source vaporization apparatus includes a housing (1) and several layers of trays (2), a top cover (11) is installed on the top of the housing (1), an air inlet (12) and an air outlet (13) are installed on the top cover (11), the trays (2) are stacked vertically in the housing (1), a carrier gas pipe (3) is installed in the housing (1), and an upper end of the carrier gas pipe (3) is connected to the air inlet (12), the carrier gas pipe (3) penetrates each layer of trays (2) and extends to the bottommost tray (2), several carrier gas outlets (33) are installed in the carrier gas pipe (3), the carrier gas outlets (33) are installed in the cavity (14) of the bottommost tray (2) or in the cavity (14) of the bottommost tray (2) and the remaining several layers of trays (2), and several air guide pipes (21) are installed in each of the remaining trays (2) except for the bottommost tray (2). The solid source vaporizer adopts parallel gas transmission passages, and the carrier gas enters the carrier gas pipe (3) from the inlet (12) and then enters each layer of trays (2) respectively. It can only reach the position of the air guide pipe (21) after being horizontally transmitted a long distance along the surface of the solid source material in each layer of trays (2), so that the carrier gas can carry a large amount of vaporized gas and improve the overall vaporization efficiency of the solid source vaporizer.

Description

[Technical field]

[0001] The present invention relates to the field of solid source vaporizers, and in particular to solid source vaporizers for vaporizing solid precursor materials and delivering the precursor vapor to a precursor vapor-using system, such as a reaction chamber of a chemical vapor deposition instrument, an atomic deposition instrument, or an ion implantation instrument. [Background technology]

[0002] The structure of the conventional solid source vaporizer has one or more trays for containing solid raw materials inside a sealed container, and in the solution for multiple trays, each tray has several ventilation ducts distributed therein, which communicate with each tray. In operation, the sealed container is heated from the outside to the vaporization temperature of the solid raw materials, and the sealed container has a carrier gas inlet, which enters through the inlet, and the carrier gas enters the reaction container connected to the solid source vaporizer through the exhaust port after being thoroughly mixed with the vapor of the solid raw materials. The commonly used carrier gas is an inert gas such as helium. In the application of semiconductor manufacturing, the reaction container is generally the reaction chamber of a thin film deposition device, such as CVD, ALD device. In the conventional solid source vaporizer, the carrier gas enters the container from the top or bottom, is transmitted to the bottom of the housing through the duct, and then rises layer by layer through the duct in each layer tray, and mixes with the vapor of the solid source vaporization during the rising process, and the mixed gas is output from the exhaust port at the top and transported to the reaction container.

[0003] The disadvantages of the conventional solid source vaporizer are as follows: First, the conventional technology adopts a serial gas transmission passage, and the carrier gas enters each layer of trays through the air guide pipe from bottom to top, and finally reaches the top tray and is output from the exhaust port, so that when the carrier gas enters the lower few trays, the steam content in the carrier gas is low, so that the vaporization speed of the solid raw material in the lower few trays is relatively fast, and when the carrier gas reaches the top few trays, the concentration of the steam carried in the carrier gas is relatively high, so that the vaporization speed of the solid raw material in the top few trays is relatively slow, and in the solid source vaporizer, the difference in the vaporization speed of the solid source between the bottom tray and the top tray is very large, which makes it impossible to fully utilize the solid raw material in the top few trays. Secondly, since the trays of each layer have a number of air pipes uniformly distributed, in order to prevent the solid raw material particles from entering the air pipes and causing the air pipes to be blocked, the height of the air pipes is higher than the height of the solid raw material stacked in the trays. Since the loading amount of the solid raw material is generally large, the height of the air pipes is generally close to the outer height of the trays. After stacking the trays, the top of the ventilation air pipe is very close to the bottom of the tray installed in the upper layer, so the flow distance of the carrier gas flow on the surface of the solid raw material is very short, so the amount of solid source vapor that the carrier gas can carry is very small, and the mixing efficiency of the carrier gas and the vapor is very low. In addition, the conventional solid source vaporizer has multiple layers of trays installed, and the total surface area of ​​the solid raw material stacked in the trays is large, but the vaporization efficiency of each upper layer is not maximized, and the overall vaporization efficiency and transmission efficiency are not optimized. Therefore, it is necessary to improve the conventional solid source vaporizer. Summary of the Invention [Problem to be solved by the invention]

[0004] The objective of the present invention is to provide a novel solid source vaporizer to solve the problems of the conventional solid source vaporizer described in the background art, which adopts serial gas transmission passages, resulting in very low vaporization efficiency of the solid source material in the upper trays, and in each layer of trays, the horizontal movement distance of the carrier gas in the trays is very short, resulting in low mixing effect with the solid vapor, and very small amount of vapor that can be carried by the carrier gas, and the overall vaporization efficiency and transmission efficiency of the solid source vaporizer are both very low. [Means for solving the problem]

[0005] In order to achieve the above object, the first realization means of the present invention is as follows: A solid source vaporizer includes a housing and several layers of trays, a top cover is installed on the top of the housing, an air inlet and an exhaust port are installed on the top cover, the trays are stacked vertically in the housing, a carrier gas pipe is installed in the housing, the upper end of the carrier gas pipe is connected to the air inlet, the carrier gas pipe penetrates each layer of trays and extends to the bottommost tray, several carrier gas outlets are installed on the carrier gas pipe, the carrier gas outlets are installed in the cavity of the bottommost tray or in the cavity of the bottommost tray and the remaining several layers of trays, and several air ducts are installed in all the remaining trays except the bottommost tray.

[0006] As a further improvement of the above-mentioned solution, the air guide pipe is installed at a position away from the carrier gas pipe, so that the position where the carrier gas enters the tray can be away from the position of the air guide pipe, and the carrier gas can only reach the position of the air guide pipe of the upper tray after entering the tray and travel a long path, and then rise into the upper tray through the air guide pipe, and in the process of flowing in this way, the carrier gas is thoroughly mixed with the vapor generated by the vaporization of the solid source in the tray, and enters the upper tray with a large amount of vapor, so as to improve the vaporization speed of the solid source material in the tray and the transport efficiency of the vapor.

[0007] As a further improvement of the above-mentioned solution, the carrier gas pipe is installed at a position offset from the center of the tray, which can further increase the distance between the carrier gas pipe and the air guide pipe, so that the carrier gas can be thoroughly mixed with the vapor generated by the vaporization of the solid source material in the tray during the flow of the carrier gas, and can carry a large amount of vapor into the upper tray, thereby improving the vaporization speed of the solid source material in the tray and the transport efficiency of the vapor.

[0008] As a further improvement of the above solution, the air pipes in the adjacent trays are arranged at a set distance apart, so that the mixed gas rising to the upper tray can enter the air pipe of the further upper tray only after passing a certain transmission distance in the tray, and then rise to the next upper tray, thus further improving the mixing efficiency of the mixed gas and the solid source vapor.

[0009] As a further improvement of the above-mentioned solution, a plurality of air guide pipes are installed in each tray of each layer, and the air guide pipes are installed at a position away from the carrier gas pipe, which can improve the transmission efficiency of the mixed gas.

[0010] The second implementation of the present invention is as follows: a solid source vaporizer, which includes a housing and several layers of trays, a top cover is installed on the top of the housing, an exhaust port is installed on the top cover, the trays are stacked vertically in the housing, an inlet port is installed on the bottom of the housing, a carrier gas pipe is installed in the housing, the lower end of the carrier gas pipe is connected to the inlet port, the carrier gas pipe penetrates several layers of trays, several carrier gas outlets are installed on the carrier gas pipe, the carrier gas outlets are installed in the cavity of the bottommost tray or in the cavity of the bottommost tray and the remaining several layers of trays, and several air ducts are installed in all the remaining trays except the bottommost tray.

[0011] As a further improvement of the above-mentioned solution, the air guide pipe is installed at a position away from the carrier gas pipe, so that the position where the carrier gas enters the tray can be away from the position of the air guide pipe, and the carrier gas can only reach the position of the air guide pipe of the upper tray after entering the tray and travel a long path, and then rise into the upper tray through the air guide pipe, and in the process of flowing in this way, the carrier gas is thoroughly mixed with the vapor generated by the vaporization of the solid source in the tray, and enters the upper tray with a large amount of vapor, so as to improve the vaporization speed of the solid source material in the tray and the transport efficiency of the vapor.

[0012] As a further improvement of the above-mentioned solution, the carrier gas pipe is installed at a position offset from the center of the tray, which can further increase the distance between the carrier gas pipe and the air guide pipe, so that the carrier gas can be thoroughly mixed with the vapor generated by the vaporization of the solid source material in the tray during the flow of the carrier gas, and can carry a large amount of vapor into the upper tray, thereby improving the vaporization speed of the solid source material in the tray and the transport efficiency of the vapor.

[0013] As a further improvement of the above solution, the air pipes in the adjacent trays are arranged at a set distance apart, so that the mixed gas rising to the upper tray can enter the air pipe of the further upper tray only after passing a certain transmission distance in the tray, and then rise to the next upper tray, thus further improving the mixing efficiency of the mixed gas and the solid source vapor.

[0014] As a further improvement of the above-mentioned solution, a plurality of air guide pipes are installed in each tray of each layer, and the air guide pipes are installed at a position away from the carrier gas pipe, which can improve the transmission efficiency of the mixed gas.

[0015] The third implementation of the present invention is as follows: A solid source vaporizer includes a housing and several layers of trays, a top cover is installed on the top of the housing, an inlet and an exhaust port are installed on the top cover, the trays are stacked vertically in the housing, a cavity is installed under the bottom tray, a first carrier gas pipe and a second carrier gas pipe are installed in the housing, the upper end of the first carrier gas pipe is connected to the inlet, the first carrier gas pipe extends through each layer of trays into the cavity under the bottom tray, there are multiple second carrier gas pipes, the second carrier gas pipes penetrate several layers of trays from bottom to top, the lower end opening of the second carrier gas pipe is located in the cavity under the bottom tray, several carrier gas outlets are installed on the second carrier gas pipe, the carrier gas outlets are installed in the cavity of the bottom tray or in the cavities of the bottom tray and the remaining several layers of trays, and several air ducts are installed in all the remaining trays except the two lowest trays.

[0016] As a further improvement of the above-mentioned solution, the first carrier gas pipe is installed at the center of the tray or at a position offset from the center of the tray. The first carrier gas pipe can be installed at the center of the tray or at a position offset from the center, and can be flexibly adjusted according to the design needs of the airflow path during design.

[0017] As a further improvement of the above-mentioned solution, the second carrier gas pipe is installed at the center of the tray or at a position offset from the center of the tray. The second carrier gas pipe can be installed at the center of the tray or at a position offset from the center, and can be flexibly adjusted according to the design needs of the airflow path during design.

[0018] As a further improvement of the above-mentioned solution, the second carrier gas pipe is installed at a position away from the first carrier gas pipe, so that the carrier gas fills the cavity below the bottom tray and enters the carrier gas pipe after the pressure is stabilized, so that the pressure of the carrier gas can be more stabilized.

[0019] As a further improvement of the above-mentioned solution, the air guide pipe is installed at a position away from the second carrier gas pipe, so that the position where the carrier gas enters the tray can be away from the position of the air guide pipe, and the carrier gas can only reach the position of the air guide pipe of the upper tray after entering the tray and travel a long path, and then rise into the upper tray through the air guide pipe, and in the process of flowing in this way, the carrier gas can be thoroughly mixed with the vapor generated by the vaporization of the solid source in the tray, and enter the upper tray with a large amount of vapor, thereby improving the vaporization speed of the solid source material in the tray and the transport efficiency of the vapor.

[0020] As a further improvement of the above-mentioned solution, the air ducts in the adjacent trays are arranged at a set distance apart, so that the mixed gas rising to the upper tray can only enter the air duct of the further upper tray after a certain transmission distance in the tray and rise to the further upper tray, thus further improving the mixing efficiency of the mixed gas and the steam.

[0021] As a further improvement of the above solution, a number of air guide pipes are installed in the tray, which can improve the efficiency of the mixed gas transmission.

[0022] As a further improvement of the above-mentioned solution, a plurality of air guide tubes are installed in the tray, and the air guide tubes are installed near the first carrier gas tube, which can improve the transmission efficiency of the mixed gas, and can separate the air guide tubes from the second carrier gas tube, thereby improving the mixing efficiency of the carrier gas and the steam.

[0023] As a further improvement of the above-mentioned solution, the first carrier gas pipe also has an exhaust opening at a position corresponding to one or more tray cavities. With such an arrangement, a small amount of carrier gas can enter the tray through the exhaust opening in the first carrier gas pipe and mix with the vapor generated by vaporizing the solid source in the tray, thereby improving the mixing efficiency.

[0024] As a further improvement of the above-mentioned solution, the second carrier gas pipe is only one or more than one. When only one second carrier gas pipe is installed, the carrier gas enters the tray through the carrier gas outlet of the second carrier gas pipe, and when multiple second carrier gas pipes are installed, the carrier gas transmission efficiency can be improved, and the gas transmission efficiency in the solid source vaporizer can be further improved. Effect of the Invention

[0025] The present invention has positive effects: 1) the solid source vaporizer of the present invention adopts parallel gas transmission passages, the carrier gas can enter each layer of trays after entering the carrier gas pipe from the inlet, the carrier gas can be horizontally transmitted along the surface of the solid source material in each layer of trays for a long distance before it can reach the position of the air guide pipe, so that the carrier gas can carry a large amount of solid source vapor; 2) the carrier gases introduced into each layer of trays are all carrier gases that do not contain volatile gas, so the amount of vapor that the carrier gas can carry is very large, which can make the vaporization speed of the solid source material in each layer of trays close, improve the vaporization efficiency of the solid source material in each layer of trays, and further improve the overall vaporization efficiency of the solid source vaporizer. [Brief description of the drawings]

[0026] [Figure 1a] FIG. 1a is a structural schematic diagram of the solid source vaporizer of Example 1. [Figure 1b] FIG. 1b is a top schematic diagram of the solid source vaporizer of Example 1. [Figure 1c] FIG. 1c is a schematic cross-sectional view taken along the line AA in FIG. 1b. [Figure 1d] FIG. 1d is a diagram of the internal structure of the solid source vaporizer of Example 1. [Figure 1e] FIG. 1e is a schematic diagram of the structure of the first to third layer trays. [Figure 1f] FIG. 1f is a cross-sectional view taken along the line BB in FIG. 1e. [Figure 1g] FIG. 1g is a structural schematic diagram of the fourth layer tray. [Figure 1h] FIG. 1h is a cross-sectional view taken along the CC direction of FIG. 1g. [Figure 2a] FIG. 2a is a structural schematic diagram of the solid source vaporizer of Example 2. [Figure 2b] FIG. 2b is a top schematic view of the solid source vaporizer of Example 2. [Figure 2c] FIG. 2c is a schematic cross-sectional view taken along the line DD in FIG. 2b. [Figure 2d] FIG. 2d is a schematic diagram of the internal structure of the solid source vaporizer of Example 2. [Figure 3a] FIG. 3a is a structural schematic diagram of the solid source vaporizer of Example 3. [Figure 3b] FIG. 3b is a top schematic diagram of the solid source vaporizer of Example 3. [Figure 3c] FIG. 3c is a schematic cross-sectional view taken along the EE direction in FIG. 3b. [Figure 3d] FIG. 3d is a schematic diagram of the internal structure of the solid source vaporizer of Example 3. [Figure 4a] FIG. 4a is a structural schematic diagram of the solid source vaporizer of Example 4. [Figure 4b] FIG. 4b is a top schematic diagram of the solid source vaporizer of Example 4. [Figure 4c] FIG. 4c is a schematic cross-sectional view in the FF direction in FIG. 4b. [Figure 4d] FIG. 4d is a schematic diagram of the internal structure of the solid source vaporizer of Example 4. [Figure 5a] FIG. 5a is a structural schematic diagram of the solid source vaporizer of Example 5. [Figure 5b] FIG. 5b is a top schematic diagram of the solid source vaporizer of Example 5. [Figure 5c] FIG. 5c is a schematic cross-sectional view taken along the line GG in FIG. 5b. [Figure 5d] FIG. 5d is a schematic diagram of the internal structure of the solid source vaporizer of Example 5. [Figure 6a]FIG. 6a is a structural schematic diagram of the solid source vaporizer of Example 6. [Figure 6b] FIG. 6b is a top schematic diagram of the solid source vaporizer of Example 6. [Figure 6c] FIG. 6c is a schematic cross-sectional view taken along the line KK in FIG. 6b. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0027] The following embodiments clearly and completely describe the technical solutions of the present invention, and it is obvious that the described embodiments are only some of the embodiments of the present invention, and not all of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without any creative efforts are within the scope of protection of the present invention.

[0028] Example 1 A solid source vaporizer is shown in FIGS. 1a-1h, which includes a housing 1, several layers of trays 2 and a carrier gas tube 3.

[0029] The housing 1 is a corrosion-resistant housing, and a top cover 11 is installed on the top of the housing 1. After the top cover 11 is fixedly connected to the housing 1, a sealed chamber can be formed in the housing 1, and an inlet 12 and an outlet 13 are installed on the top cover 11. In operation, the housing 1 is heated to a certain temperature, and the solid source is vaporized to generate steam. The heating of the housing 1 can be realized by a heating device wrapped around the housing, or can be realized by putting it in a liquid heating container, or can be realized by other heating devices.

[0030] The carrier gas pipe 3 is a tubular member, the upper end of the carrier gas pipe 3 is connected to the inlet port in the top cover of the housing, and the bottom of the carrier gas pipe extends into the tray 2 at the bottom layer in the housing 1. A carrier gas outlet 33 is opened in the carrier gas pipe 3, and the carrier gas outlet 33 is installed at a position corresponding to the internal cavity of the tray 2 of some layers, so that the carrier gas can directly enter the corresponding tray 2 through the carrier gas pipe 3, for example, the carrier gas outlet 33 is installed at a position corresponding to the internal cavity of the tray 2 at the bottom layer in the carrier gas pipe 3. As a preferred implementation means, the carrier gas outlet 33 may be installed in all the internal cavities of any two or more layers of tray 2, or the carrier gas outlet 33 may be installed in all the internal cavities of the tray 2 of each layer. In order to make the carrier gas entering the solid source vaporizer reach a desired temperature, the carrier gas in the carrier gas pipe 3 is preheated to a desired temperature. The design position of the carrier gas pipe 3 corresponds to the position of the intake port 12 in the top cover 11 of the housing 1, and the carrier gas pipe 3 may or may not be designed to be in the center of the tray 2.

[0031] The tray 2 is a tray for containing a solid source material, and the tray 2 includes a bottom wall of the tray and a side wall of the tray installed at the edge of the bottom wall of the tray, and a chamber for containing the solid source material is formed between the bottom wall of the tray and the side wall of the tray. The number of trays may include several layers, for example, one layer, two layers, three layers, or more layers. In order to improve the vaporization speed of the solid source material, multiple layers of trays are generally installed in the solid source vaporizer. The multiple layers of trays are installed so as to be vertically stacked in the housing. In this embodiment, there are four layers of trays, and the four layers of trays are vertically stacked in the housing. As shown in FIG. 1d and FIG. 1e, the bottom walls of the first to third layers of trays are all provided with through holes for passing the carrier gas pipe 3 through, and a vertical air guide pipe 21 is further installed on the bottom surface of the tray. Meanwhile, there is no through hole and no air guide pipe in the fourth layer of trays. As a preferred solution, the air guide pipe 21 may be installed at a position away from the carrier gas pipe 3. As shown in FIG. 1c, the distance between the air guide pipe 21 and the carrier gas pipe 3 is greater than the distance between the carrier gas pipe 3 and the center position of the tray. The air guide pipe 21 is used to transmit the mixed gas in the lower tray to the upper tray. In order to facilitate vertical stacking of multiple trays, the height of the air guide pipe 21 needs to be lower than the height of the side wall of the tray. The number of air guide pipes 21 and the hole diameter of the air guide pipe 21 may be installed according to the transport speed needs of the carrier gas. One air guide pipe 21 may be installed, or two or more air guide pipes 21 may be installed. In this embodiment, one air guide pipe 21 is installed in each of the first to third trays 2, and the air guide pipe 21 is installed at a position closer to the exhaust port 13.

[0032] In this embodiment, the carrier gas heated outside the solid source vaporizer enters the carrier gas pipe 3 from the inlet 12, and enters each layer of trays 2 through the carrier gas outlet 33 of the carrier gas pipe 3. The carrier gas that enters the trays 2 moves along the surface of the solid material in the trays 2 to the position of the air guide 21. In this process, a large amount of solid source vapor can be carried, the vapor content in the mixed gas can be improved, and the volatilization efficiency of the solid source material can be further improved. Since the air guides of each layer are directly opposite to each other, the mixed gas that enters the upper tray from the lower tray through the air guide can quickly reach the upper tray, and the transmission speed of the mixed gas is fast.

[0033] Example 2 The solid source vaporizer shown in Figures 2a to 2d is based on Example 1, but differs from Example 1 in that the designed positions of the air guide pipes 21 in the first to third trays 2 are located away from the carrier gas pipe 3, and the air guide pipes 21 in adjacent trays 2 are installed at a certain distance apart, that is, the air guide pipes 21 in adjacent trays 2 are installed at a certain distance apart in a direction perpendicular to the bottom wall of the tray. And the positions of the air guide pipes 21 in the trays 2 of each layer are all installed at a certain distance apart from the exhaust port 13. As shown in Figures 2a to 2d, a total of four trays 2 are installed in the housing 1, there is no air guide pipe in the fourth tray, and the air guide pipes 21 in the first and third trays 2 are designed to be near the exhaust port 13 and toward the rear. The air guide pipe 21 in the second tray 2 is designed to be near the exhaust port 13 and toward the front.

[0034] In this embodiment, the carrier gas enters the carrier gas pipe 3 from the inlet 12, and enters the trays 2 of each layer through the carrier gas outlet of the carrier gas pipe 3. The carrier gas that enters the trays 2 moves along the surface of the solid material in the trays 2 to the position of the air guide 21. In this process, it can carry a large amount of solid source vapor, improve the vapor content in the mixed gas, and further improve the volatilization efficiency of the solid source material. The air guide 21 in the adjacent trays 2 is installed at a certain distance, and the position of the air guide 21 in the trays 2 of each layer is installed at a certain distance from the exhaust port 13, so that the mixed gas that enters the upper tray 2 from the lower tray 2 through the air guide 21 can only reach the air guide 21 of the upper tray 2 after traveling a certain distance. Therefore, the mixing distance of the mixed gas in each layer can be increased, and the output mixed gas can be more uniformly mixed.

[0035] Example 3 The solid source vaporization apparatus shown in Figures 3a to 3d is based on the previous Example 1, and differs from the above-mentioned Example 1 in that a plurality of air guide pipes 21 are installed in each tray 2 of each layer except for the tray at the bottom layer, and the air guide pipes 21 are located at a position away from the carrier gas pipe.

[0036] In this embodiment, the carrier gas is heated outside the solid source vaporizer, then enters the carrier gas pipe 3 from the inlet 12, and enters each layer of trays 2 through each carrier gas outlet 33 of the carrier gas pipe 3. The carrier gas is transmitted into each layer of trays 2 along the surface of the solid source material in the trays 2 to the position of the air guide 21 of the upper tray 2. During the gas transmission process, a large amount of solid source vapor can be carried, which improves the vapor content in the mixed gas and further improves the volatilization efficiency of the solid source material. Since multiple air guides 21 are installed in each of the first to third layers of trays, the rising speed of the mixed gas can be accelerated and the transmission efficiency of the volatilization gas can be improved.

[0037] Example 4 The solid source vaporizer shown in Figures 4a to 4d is based on the previous Example 1, and differs from Example 1 in that there are two carrier gas pipes, which are named the first carrier gas pipe 31 and the second carrier gas pipe 32, respectively; the first carrier gas pipe 31 is not provided with a carrier gas outlet or is provided with an exhaust opening; the first carrier gas pipe 31 extends from the intake port 12 into the cavity 14 of the bottommost tray 2 and communicates with the cavity 14; all the remaining trays 2 except the two bottommost trays 2 are provided with air guide pipes 21, and the air guide pipes 21 in adjacent trays 2 are installed with a certain distance between them, that is, the air guide pipes 21 in adjacent trays 2 are installed with a certain distance between them, that is, the air guide pipes 21 in adjacent trays 2 are installed with a difference in the direction perpendicular to the bottom wall of the tray. The second carrier gas pipe 32 penetrates each of the other layer trays 2 except the bottom and top trays 2, and a carrier gas outlet 33 is installed in the second carrier gas pipe 32. The design positions of the air guide pipe 21 and the second carrier gas pipe 32 can be designed as needed. As a preferred embodiment, the air guide pipe 21 can be designed at a position away from the second carrier gas pipe 32, for example, the air guide pipe 21 is designed close to the first carrier gas pipe 31, and the second carrier gas pipe 32 is designed at a position away from the air guide pipe 21, or the second carrier gas pipe 32 is designed at a position close to the first carrier gas pipe 31, and the air guide pipe 21 is designed at a position away from the second carrier gas pipe 32, or other air guide pipes 21 and the second carrier gas pipe 32 are means for separating them from each other.

[0038] As shown in Figures 4a to 4d, in this embodiment, a total of five trays 2 are installed in the housing 1, there is no air guide in the fourth and fifth trays, the air guide 21 in the first and third trays is designed to be near the first carrier gas pipe and at a rear position, and the air guide 21 in the second tray is designed to be near the first carrier gas pipe and at a front position. At this time, the distance between the first carrier gas pipe 31 and the second carrier gas pipe 32 is greater than the distance between the first carrier gas pipe 31 and the center position of the tray, and the distance between the first carrier gas pipe 31 and the second carrier gas pipe 32 is greater than the distance between the second carrier gas pipe 32 and the center position of the tray, and the distance between the air guide 21 and the second carrier gas pipe 32 is greater than the distance between the second carrier gas pipe 32 and the center position of the tray.

[0039] In this embodiment, the carrier gas is transmitted from the inlet 12 through the first carrier gas pipe 31 into the cavity 14 of the fifth layer tray, and in the cavity 14, the carrier gas is transmitted to the lower end opening position of the second carrier gas pipe 32, then enters the second carrier gas pipe 32, rises through the second carrier gas pipe 32, and enters the second layer tray 2 from the fourth layer through each carrier gas outlet 33 in the second carrier gas pipe 32, respectively. The carrier gas is transmitted to the surface of the solid material in the tray 2, and when it reaches the position of the air guide pipe 21, it reaches the upper layer tray 2 through the air guide pipe 21, and then enters the first layer tray 2. From tray A to the third layer, the air guide pipes 21 in adjacent trays 2 are installed with a certain distance offset, so that the mixed gas can only reach the upper tray 2 after rising from the air guide pipes 21 and traveling a certain distance, thereby increasing the mixing distance of the gas and making the gas more uniformly mixed; and since the second carrier gas pipe 32 does not enter the first layer tray 2 directly, the carrier gas and the volatile gas can only enter the first layer tray through the air guide pipe 21 in the first layer tray 2 after being mixed in the second layer tray, thereby making the mixed gas more uniformly mixed.

[0040] Example 5 The solid source vaporization apparatus shown in Figures 5a to 5d is based on Example 4, but differs from Example 4 in that multiple air guide pipes 21 are installed in each of the first layer tray to the third layer tray, and the air guide pipes 21 are distributed near the first carrier gas pipe 31.

[0041] In this embodiment, the carrier gas is transmitted from the inlet 12 through the first carrier gas pipe 31 into the cavity 14 below the bottom tray. In the cavity 14, the carrier gas enters the second carrier gas pipe 32 from the lower end opening of the second carrier gas pipe 32, rises through the second carrier gas pipe 32, and enters the trays 2 from the fourth layer to the second layer through each carrier gas outlet 33 of the second carrier gas pipe 32. After entering each layer of trays 2, the carrier gas travels along the surface of the solid material in the tray 2, and when it reaches the position of the air guide pipe 21, it reaches the upper layer of trays through the air guide pipe 21. Since multiple air guide pipes 21 are installed in each of the first layer trays to the third layer trays, the rising speed of the mixed gas can be increased and the transmission efficiency of the vaporized gas can be improved.

[0042] Example 6 The solid source vaporization apparatus shown in Figures 6a to 6c is based on Example 1, but differs from Example 1 in that the intake port 12 is installed at the bottom of the housing 1, the carrier gas pipe 3 penetrates each layer of trays from bottom to top from the intake port 12, the upper end of the carrier gas pipe 3 is not opened, and a carrier gas outlet 33 is installed in the carrier gas pipe 3, and the carrier gas outlet 33 is installed at a position corresponding to the internal cavity of each remaining layer of trays 2 other than the topmost tray 2.

[0043] In this embodiment, the carrier gas heated outside the solid source vaporizer enters the carrier gas pipe 3 from the air inlet 12 at the bottom of the housing, and enters each of the trays 2 of each layer except the top layer through the carrier gas outlet 33 of the carrier gas pipe 3. The carrier gas that enters the tray 2 moves along the surface of the solid material in the tray 2 to the position where the air guide tube is located. In the process, it can carry a large amount of steam, which improves the steam content in the mixed gas and further improves the vaporization efficiency of the solid source material. Since the air guide tubes of each layer are opposite to each other, the mixed gas that enters the upper tray from the lower tray through the air guide tube can quickly reach the upper tray, and the transmission speed of the mixed gas is fast.

[0044] Although embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is limited by the appended claims and their equivalents.

[0045] (Appendix 1) A solid source vaporization apparatus, comprising: a housing and several layers of trays; a top cover is installed on the top of the housing; an air inlet and an exhaust port are installed on the top cover; the trays are stacked vertically in the housing; a carrier gas pipe is installed in the housing; an upper end of the carrier gas pipe is connected to the air inlet; the carrier gas pipe penetrates each layer of trays and extends to the bottommost tray; several carrier gas outlets are installed on the carrier gas pipe; the carrier gas outlets are installed in the cavity of the bottommost tray or in the cavities of the bottommost tray and the remaining several layers of trays; and several air guide tubes are installed in all the remaining trays except the bottommost tray.

[0046] (Appendix 2) 2. The solid source vaporizer of claim 1, wherein the gas conduit is located away from the carrier gas conduit.

[0047] (Appendix 3) The solid source vaporization apparatus of claim 1, wherein the carrier gas pipe is installed offset from the center position of the tray.

[0048] (Appendix 4) 2. The solid source vaporizer of claim 1, wherein the air tubes in adjacent trays are spaced a set distance apart.

[0049] (Appendix 5) The solid source vaporization apparatus of claim 1, wherein a plurality of air guide tubes are installed in each tray of each layer, and the air guide tubes are installed at positions away from the carrier gas tube.

[0050] (Appendix 6) A solid source vaporization apparatus, comprising: a housing and several layers of trays; a top cover is installed on the top of the housing; an exhaust port is installed on the top cover; the trays are stacked vertically in the housing; an air inlet is installed on the bottom of the housing; a carrier gas pipe is installed in the housing; a lower end of the carrier gas pipe is connected to the air inlet; the carrier gas pipe penetrates the several layers of trays; several carrier gas outlets are installed on the carrier gas pipe; the carrier gas outlets are installed in a cavity of the bottommost tray or in the cavities of the bottommost tray and the remaining several layers of trays; and several air guide tubes are installed in all of the remaining trays except the bottommost tray.

[0051] (Appendix 7) 7. The solid source vaporizer of claim 6, wherein the gas conduit is located at a position away from the carrier gas conduit.

[0052] (Appendix 8) The solid source vaporization apparatus of claim 6, wherein the carrier gas pipe is installed offset from the center position of the tray.

[0053] (Appendix 9) 7. The solid source vaporizer of claim 6, wherein the air tubes in adjacent trays are spaced a set distance apart.

[0054] (Appendix 10) The solid source vaporization apparatus of claim 6, wherein a plurality of air pipes are installed in each tray of each layer, and the air pipes are installed at positions away from the carrier gas pipe.

[0055] (Appendix 11) 1. A solid source vaporization apparatus, comprising: a housing and several layers of trays; a top cover is installed on the top of the housing; an air inlet and an exhaust port are installed on the top cover; the trays are stacked vertically in the housing; a cavity is installed below the lowest tray; a first carrier gas pipe and a second carrier gas pipe are installed in the housing; an upper end of the first carrier gas pipe is connected to the air inlet; the first carrier gas pipe extends through each layer of trays into the cavity below the lowest tray; there are multiple second carrier gas pipes, the second carrier gas pipes penetrate several layers of trays from bottom to top, and the lower end opening of the second carrier gas pipe is located in the cavity below the lowest tray; several carrier gas outlets are installed on the second carrier gas pipe; the carrier gas outlets are installed in the cavity of the lowest tray or in the cavities of the lowest tray and the remaining several layers of trays; and several air guides are installed in all the remaining trays except the lowest tray.

[0056] (Appendix 12) 12. The solid source vaporization apparatus of claim 11, wherein the first carrier gas pipe is installed at a center position of the tray or at a position offset from the center of the tray.

[0057] (Appendix 13) 12. The solid source vaporizer of claim 11, wherein the second carrier gas pipe is installed at a center position of the tray or at a position offset from the center of the tray.

[0058] (Appendix 14) 12. The solid source vaporization apparatus of claim 11, wherein the second carrier gas pipe is installed at a position away from the first carrier gas pipe.

[0059] (Appendix 15) 12. The solid source vaporizer of claim 11, wherein the gas conduit is located away from the second carrier gas conduit.

[0060] (Appendix 16) 12. The solid source vaporizer of claim 11, wherein the air tubes in adjacent trays are spaced a set distance apart.

[0061] (Appendix 17) 12. The solid source vaporizer of claim 11, further comprising a plurality of air tubes disposed within the tray.

[0062] (Appendix 18) 12. The solid source vaporizer of claim 11, wherein a plurality of air pipes are installed in the tray, and the air pipes are installed near the first carrier gas pipe.

[0063] (Appendix 19) 12. The solid source vaporizer of claim 11, wherein the first carrier gas pipe also has an exhaust opening at a position corresponding to one or more layers of tray cavities.

[0064] (Appendix 20) 20. The solid source vaporizer according to any one of claims 11 to 19, wherein the second carrier gas pipe is only one or more than one. [Explanation of symbols]

[0065] Housing 1, top cover 11, intake port 12, exhaust port 13, cavity 14, tray 2, air guide pipe 21, flow guide plate 22, carrier gas pipe 3, first carrier gas pipe 31, second carrier gas pipe 32, carrier gas outlet 33.

Claims

1. A solid source vaporization apparatus, comprising: a housing and several layers of trays; a top cover is installed on the top of the housing; an air inlet and an exhaust port are installed on the top cover; the trays are stacked vertically in the housing; a carrier gas pipe is installed in the housing; an upper end of the carrier gas pipe is connected to the air inlet; the carrier gas pipe penetrates each layer of trays and extends to the bottommost tray; several carrier gas outlets are installed on the carrier gas pipe; the carrier gas outlets are installed in the cavity of the bottommost tray or in the cavities of the bottommost tray and the remaining several layers of trays; and several air guide tubes are installed in all the remaining trays except the bottommost tray.

2. 2. The solid source vaporizer of claim 1, wherein the gas conduit is located at a position separate from the carrier gas conduit.

3. 2. The solid source vaporizer of claim 1, wherein the carrier gas pipe is positioned off-center of the tray.

4. 10. The solid source vaporizer of claim 1, wherein the air conduits in adjacent trays are spaced a set distance apart.

5. 2. The solid source vaporizer according to claim 1, wherein each tray in each layer is provided with a plurality of air pipes, the air pipes being located away from the carrier gas pipe.

6. A solid source vaporization apparatus, comprising: a housing and several layers of trays; a top cover is installed on the top of the housing; an exhaust port is installed on the top cover; the trays are stacked vertically in the housing; an air inlet is installed on the bottom of the housing; a carrier gas pipe is installed in the housing; a lower end of the carrier gas pipe is connected to the air inlet; the carrier gas pipe penetrates the several layers of trays; several carrier gas outlets are installed on the carrier gas pipe; the carrier gas outlets are installed in a cavity of the bottommost tray or in the cavities of the bottommost tray and the remaining several layers of trays; and several air guide tubes are installed in all of the remaining trays except the bottommost tray.

7. 7. The solid source vaporizer of claim 6, wherein the gas conduit is located at a position separate from the carrier gas conduit.

8. 7. The solid source vaporizer of claim 6, wherein the carrier gas pipe is positioned off-center of the tray.

9. 7. The solid source vaporizer of claim 6, wherein the air conduits in adjacent trays are spaced a set distance apart.

10. 7. The solid source vaporizer of claim 6, wherein each tray in each layer is provided with a plurality of air pipes, the air pipes being located away from the carrier gas pipe.

11. A solid source vaporization apparatus, comprising: a housing and several layers of trays; a top cover is installed on the top of the housing; an air inlet and an exhaust port are installed on the top cover; the trays are stacked vertically in the housing; a cavity is installed under the lowest tray; a first carrier gas pipe and a second carrier gas pipe are installed in the housing; an upper end of the first carrier gas pipe is connected to the air inlet; the first carrier gas pipe extends through each layer of trays into the cavity under the lowest tray; there are multiple second carrier gas pipes, the second carrier gas pipes penetrate several layers of trays from bottom to top, and the lower end opening of the second carrier gas pipe is located in the cavity under the lowest tray; several carrier gas outlets are installed on the second carrier gas pipe; the carrier gas outlets are installed in the cavity of the lowest tray or in the cavities of the lowest tray and the remaining several layers of trays; and several air guides are installed in all the remaining trays except the lowest tray.

12. 12. The solid source vaporizer of claim 11, wherein the first carrier gas pipe is located at a center position of the tray or at a position offset from the center of the tray.

13. 12. The solid source vaporizer of claim 11, wherein the second carrier gas pipe is located at a center position of the tray or at a position offset from the center of the tray.

14. 12. The solid source vaporizer of claim 11, wherein the second carrier gas tube is located at a distance from the first carrier gas tube.

15. 12. The solid source vaporizer of claim 11, wherein the gas conduit is located at a location separate from the second carrier gas conduit.

16. 12. The solid source vaporizer of claim 11, wherein the conduits in adjacent trays are spaced a set distance apart.

17. 12. The solid source vaporizer of claim 11, wherein a plurality of air channels are disposed within the tray.

18. 12. The solid source vaporizer of claim 11, wherein a plurality of air conduits are disposed within the tray, and the air conduits are disposed adjacent to the first carrier gas conduit.

19. 12. The solid source vaporizer of claim 11, wherein the first carrier gas pipe also has an exhaust opening at a position corresponding to one or more layers of tray cavities.

20. 20. The solid source vaporizer of claim 11, wherein the number of the second carrier gas pipes is only one or more than one.

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