DEVICE FOR VACUUM DEPOSITION SYSTEM AND SYSTEM FOR VACUUM DEPOSITION - Patent application

Abstract

The present disclosure provides a device for a vacuum deposition system, the device comprising: a movable body; and at least one deposition source mounted on the movable body; The present invention relates to a device comprising: at least one coating window associated with at least one deposition source and mounted on a movable body; and at least one cooling device connected to the at least one coating window and mounted on the movable body.

Description

[Technical field]

[0001] The present disclosure relates generally to devices for vacuum deposition systems and systems for vacuum deposition. [Background technology]

[0002] Systems for coating films on substrates in vacuum often use Physical Vapor Deposition (PVD) or Chemical Vapor Deposition (CVD) processes. In contrast to printing, the coating source has a necessary distance to the film. The coating process can only be aligned with the substrate to a limited extent. As a result, in addition to the substrate, the inside of the vacuum chamber surrounding the source and the substrate is also coated. This allowed non-productive coating contaminates the surroundings. Periodic cleaning is therefore required.

[0003] To simplify cleaning, the chamber is usually provided with plates / parts that can be easily replaced for cleaning. Specifically, a coating window, used as a masking, limits the coating on the substrate. To achieve high coating uniformity on the substrate, the edges of the coating window are coated thickly during the deposition process. As a result, the coating window becomes hot. In flexible coating systems, the substrate is made of a temperature-sensitive film. The maximum temperature tolerance of the film and the temperature of the coating window limit the maximum coating speed.

[0004] In prior art systems, the substrate is cooled by a chill roll during coating. In known processes and equipment, the coating window is suitably connected to the chill roll to ensure sufficient cooling. This leads to difficult and expensive assembly conditions. In particular, the coating window cannot be removed from the system without great effort. The chill roll and the shield move relative to each other and cooling remains limited. This has a negative impact on the productivity of the system, since regular cleaning of the coating of the coating window is essential.

[0005] The prior art system comprises a chamber with a cooled coating roller that moves the substrate along in front of the PVD source. The coating source is on a trolley to move the coating source out of the vacuum chamber (deposition chamber) for maintenance. The coating trolley closes the vacuum chamber. On the trolley are the magnetron cathode / coating source with a shield to receive recoating (back coating), other components, and a cooling system below the vacuum chamber. The shield is attached to the cooling system. A coating window is mounted in the vacuum chamber for better cooling. Installation and removal are time consuming. Summary of the Invention

[0006] The object of the present invention is to provide a device for a vacuum deposition system and a system for vacuum deposition that overcomes the above mentioned limitations of the prior art. One object of the present invention is to provide a coating window that is easy to modify and remains sufficiently cool to achieve high deposition rates. This object is achieved by the features of the independent claims. The dependent claims define preferred embodiments of the invention.

[0007] The present disclosure provides a device for a vacuum deposition system comprising: a moveable body; at least one deposition source mounted on the moveable body; at least one coating window associated with the at least one deposition source and mounted on the moveable body; and at least one cooling device connected to the at least one coating window and mounted on the moveable body.

[0008] Various embodiments may preferably implement the following features.

[0009] Preferably, the movable body is movable relative to a vacuum chamber of a vacuum deposition system such that the movable body can be inserted into and withdrawn from the vacuum chamber.

[0010] Preferably, the movable body closes the vacuum chamber when fully inserted therein.

[0011] Preferably, the at least one coated window comprises a housing having an opening.

[0012] Preferably, the opening is located on the side of the coating window that (in use) faces the substrate to be coated.

[0013] Preferably, the housing includes a sidewall extending substantially in the deposition direction.

[0014] Preferably, the housing includes a front wall extending substantially perpendicular to the deposition direction.

[0015] Preferably, the front wall includes an opening therein.

[0016] Preferably, the at least one deposition source is configured to deposit material in the deposition space with a main deposition direction aligned towards the opening of the at least one coating window.

[0017] Preferably, the housing of the at least one coating window is configured to surround the at least one deposition source within the deposition space such that material that is not deposited through the opening is deposited on the inside of the housing.

[0018] Preferably, each of the at least one coating window is associated with a respective one of the at least one deposition sources.

[0019] Preferably, the device further comprises at least one shield located between the at least one deposition source and the at least one coating window, the at least one shield and the at least one coating window being connected to at least one cooling device.

[0020] That is, according to a preferred embodiment, the shield is carefully designed to accommodate most of the backcoating, i.e., the unused coating material, i.e., the coating material that has not been deposited on the substrate, which helps to reduce heat at the coating window and overcome the coating speed limitations of the prior art.

[0021] Preferably, the at least one shield and the at least one coated window are connected to separate cooling devices or, more preferably, to one and the same cooling device.

[0022] Preferably, the at least one shield is configured to shield a majority of the at least one coated window.

[0023] Preferably, the at least one shield comprises a shield housing having a shield opening, the shield opening being aligned with an opening in the at least one coated window.

[0024] Preferably, the shield housing is located between the at least one deposition source and the at least one coating window at a predetermined distance relative to the coating window.

[0025] Preferably, the shield opening is larger than the opening of the at least one coated window by a predetermined amount.

[0026] Preferably, the shield has substantially the same shape as the coated window.

[0027] Preferably, the at least one cooling device is connected to the at least one shield.

[0028] The present disclosure also provides a system for vacuum deposition comprising a vacuum chamber, a substrate carrier located within the vacuum chamber and having a vacuum chamber cooling device configured to cool the substrate carrier, and a device for the vacuum deposition system as described above.

[0029] Various embodiments may preferably implement the following features.

[0030] Preferably, the movable body is movable relative to the vacuum chamber such that the movable body can be inserted into and withdrawn from the vacuum chamber.

[0031] Preferably, the substrate carrier is configured to hold a substrate, and the substrate carrier is aligned with the at least one coating window such that material can be deposited onto the substrate through the at least one coating window.

[0032] Preferably, the vacuum chamber cooling device and the at least one cooling device are separate devices.

[0033] Preferably, according to the above, the shield is mounted on a cathode trolley for easy maintenance. A connection to a cooling system is preferably ensured. The long distance to the heat sink limits the cooling efficiency.

[0034] The present disclosure also provides a device for a vacuum deposition system comprising at least one deposition source, at least one coating window associated with the at least one deposition source, at least one cooling device connected to the at least one coating window, and at least one shield positioned between the at least one deposition source and the at least one coating window, wherein the at least one shield and the at least one coating window are connected to the at least one cooling device.

[0035] That is, according to a preferred embodiment, the shield is carefully designed to accommodate most of the backcoating, i.e., the unused coating material, i.e., the coating material that has not been deposited on the substrate, which helps to reduce heat at the coating window and overcome the coating speed limitations of the prior art.

[0036] As outlined above, the shield is preferably shaped such that a majority of the backcoating is received by the shield instead of the coating window, thereby reducing the amount of backcoating on the coating window.

[0037] The shield is preferably positioned such that thermal deformation does not affect the coating process. Preferably, the shield is configured such that high temperatures of the shield do not lead to heating of the substrate.

[0038] The shield and coated window and their cooling are preferably optimized to minimize substrate heating, which can cause the shield to get hot and deform, but not the coated window.

[0039] Exemplary embodiments disclosed herein are directed to providing features that will be readily apparent by reference to the following description in conjunction with the accompanying drawings. According to various embodiments, exemplary systems, methods, devices, and computer program products are disclosed herein. However, it is understood that these embodiments are presented by way of example, not limitation, and it will be apparent to those skilled in the art upon reading this disclosure that various modifications to the disclosed embodiments can be made while remaining within the scope of the present disclosure.

[0040] Thus, the present disclosure is not limited to the exemplary embodiments and applications described and illustrated herein. Moreover, the specific order and / or hierarchy of steps in the methods disclosed herein are merely exemplary approaches. Based on design preferences, the specific order or hierarchy of steps in a disclosed method or process can be rearranged while remaining within the scope of the present disclosure. Thus, those skilled in the art will appreciate that the methods and techniques disclosed herein present various steps or operations in a sample order, and that the present disclosure is not limited to the specific order or hierarchy presented, unless otherwise expressly stated.

[0041] These and other aspects and their implementations are described in more detail in the drawings, description, and claims. [Brief description of the drawings]

[0042] [Figure 1] FIG. 2 is a cross-sectional view along the coating direction according to an embodiment of the present invention. [Diagram 2] 2 is a cross-sectional view taken transverse to the coating direction according to the embodiment of FIG. 1. [Diagram 3] FIG. 2 is a cross-sectional view along the coating direction according to another embodiment of the present disclosure. [Figure 4] 4 is a cross-sectional view taken transverse to the coating direction according to the embodiment of FIG. 3. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0043] Figure 1 shows a cross-section along the coating direction. It shows a cooled coating roller 100 moving a substrate 110 along a coating window 20. It also shows a deposition source 10 and a cooling device 30.

[0044] Figure 2 shows respective cross-sectional views transverse to the coating direction corresponding to the embodiment shown in Figure 1. The same reference numerals indicate the same elements and are not repeated.

[0045] As can be seen from Figures 1 and 2, the coating window 20 houses the entire back coating 40. Although not shown in the figures, the deposition source 10, the coating window 20 and the cooling device 30 are mounted on a movable body. The movable body is movable relative to a vacuum chamber (not shown), which comprises a cooled coating roller 100 (also called a substrate carrier). The movable body opens and closes the deposition chamber (also called a vacuum chamber).

[0046] The back coating 40 is a coating that does not reach the substrate, but rather is a coating that is deposited on the coating window 20. Thus, the shape of the coating window 20 is preferably configured to receive all or at least a substantial amount of the back coating 40.

[0047] In an embodiment, the chilled coating roller may be cooled by a vacuum chamber cooling device (not shown), which may be different from cooling device 30 and may be located within the vacuum chamber.

[0048] The coating window 20 comprises an opening through which material is deposited towards the substrate 110. The coating window 20 comprises side walls oriented substantially in the deposition direction and a front wall substantially perpendicular to the deposition direction (parallel to the substrate), the front wall comprising said opening. A first end of the coating window 20 is connected to a cooling device 30. The front wall is positioned on a second end of the coating window 20 opposite the first end.

[0049] Figure 3 is a cross-sectional view along the coating direction. Figure 3 shows a cooled coating roller 100 moving a substrate 110 along a coating window 20. Figure 3 further shows the deposition source 10, the cooling device 30 and the shield 50.

[0050] Figure 4 shows respective cross-sectional views transverse to the coating direction corresponding to the embodiment shown in Figure 3. The same reference numerals indicate the same elements and will not be repeated. In general, the embodiment of Figures 3 and 4 is substantially identical to the embodiment of Figures 1 and 2 (except for the use of an additional shield), and therefore the respective description will not be repeated.

[0051] 3 and 4, the shield 50 contains most of the back coating 40, while the coating window 20 contains only a small portion of the back coating 40. This allows the shield 50 to become hot and may deform without adversely affecting the process, but the coating window 20 does not heat up significantly (e.g., compared to the embodiment of FIG. 1).

[0052] The shield 50 is located inside the coating window 20 and preferably has a predetermined distance relative to the coating window 20. As explained above, the shield 50 is configured such that a majority of the backcoating 40 is deposited on the shield 50 and only a small amount of the backcoating 40 is deposited on the coating window 20, specifically around the opening of the coating window 20.

[0053] In an embodiment, the shield 50 includes sidewalls that substantially follow the sidewalls of the coating window 20. In another embodiment, the shield 50 is located near the opening of the coating window 20, preferably having a predetermined distance from the opening of the coating window 20. The predetermined distance is preferably selected to be as small as possible and such that the shield 50 does not adversely affect the coating process. The predetermined distance can vary over the range of the shield 50.

[0054] In other words, the shield 50 comprises an opening in its front wall, which opening may be slightly larger than the opening provided in the coating window 20. There may be a gap between the opening in the shield 50 and the opening in the coating window 20. It is this gap that receives some (small) amount of the back coating 40, so that the back coating 40 may reach the coating window 20 as explained above.

[0055] In an embodiment, the coating window 20 may be provided with a heat sink soldered to the substrate area, which may allow for a larger amount of coating.

[0056] In view of the above, using the cooling device 30 that directly cools the coating window 20 (located on the movable body) and / or using the shield 50 allows for an integral coating window 20 that can be changed with less effort. In addition, compared to conventional methods, the coating window 20 is expected to remain cooler in the process. This allows for running at higher power or higher coating speeds. This improves product quality and increases productivity.

[0057] Although various embodiments of the present disclosure have been described above, it should be understood that they are presented only as examples and not as limitations. Similarly, various diagrams may depict example architectures or configurations, which are provided to enable those skilled in the art to understand the example features and functions of the present disclosure. However, such skilled in the art will understand that the present disclosure is not limited to the example architectures or configurations shown, but can be implemented using various alternative architectures and configurations. In addition, as will be understood by those skilled in the art, one or more features of one embodiment can be combined with one or more features of another embodiment described herein. Thus, the breadth and scope of the present disclosure should not be limited by any of the example embodiments described above.

[0058] It is also understood that any reference to an element herein using a designation such as "first," "second," etc. generally does not limit the quantity or order of those elements. Rather, these designations may be used herein as a convenient means of distinguishing between two or more elements or instances of an element. Thus, a reference to a first element and a second element does not imply that only two elements may be used or that the first element must precede the second element in any way.

[0059] Various modifications to the implementations described in this disclosure will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other implementations without departing from the scope of the present disclosure. Thus, the present disclosure is not intended to be limited to the implementations shown herein, but is to be accorded the widest scope consistent with the novel features and principles disclosed herein, as set forth in the following claims.

Claims

1. 1. A device for a vacuum deposition system, comprising: A movable body; At least one deposition source (10) mounted on the movable body; at least one coating window (20) associated with said at least one deposition source (10) and mounted on said movable body; and at least one cooling device (30) connected to said at least one coating window (20) and mounted on said movable body.

2. The device of claim 1 , wherein the movable body is movable relative to a vacuum chamber of a vacuum deposition system such that the movable body can be inserted into and withdrawn from the vacuum chamber.

3. The device of claim 1 or 2, wherein the at least one coating window (20) comprises a housing having an opening.

4. 4. The device according to claim 3, wherein the at least one deposition source (10) is configured to deposit material in a deposition space with a main deposition direction aligned towards the opening of the at least one coating window (20).

5. 5. The device of claim 4, wherein the housing of the at least one coating window (20) is configured to surround the at least one deposition source (10) in the deposition space such that material that is not deposited through the opening is deposited on the inside of the housing.

6. The device according to any one of the preceding claims, wherein each of said at least one coating window (20) is associated with a respective one of said at least one deposition sources (10).

7. 7. The device according to any one of claims 1 to 6, further comprising at least one shield (50) located between said at least one deposition source (10) and said at least one coating window (20), said at least one shield (50) and said at least one coating window (20) being connected to said at least one cooling device (30), said at least one shield (50) and said at least one coating window (20) being preferably connected to separate cooling devices (30) or more preferably to one and the same cooling device (30).

8. The device of claim 7, wherein the at least one shield (50) is configured to shield a majority of the at least one coated window (20).

9. 9. The device of claim 7 or 8, wherein the at least one shield (50) comprises a shield housing having a shield opening, the shield opening being aligned with the opening of the at least one coating window (20).

10. 10. The device of claim 9, wherein the shield housing is located at a predetermined distance between the at least one deposition source (10) and the at least one coating window (20).

11. The device of any one of claims 7 to 10, wherein the shield opening is larger than the opening of the at least one coated window (20) by a predetermined amount.

12. 1. A system for vacuum deposition comprising: A vacuum chamber; a substrate carrier (100) located within the vacuum chamber and having a vacuum chamber cooling device configured to cool the substrate carrier (100); A system comprising a device according to any one of claims 1 to 11.

13. The system of claim 12 , wherein the movable body is movable relative to the vacuum chamber such that the movable body can be inserted into and withdrawn from the vacuum chamber.

14. The system of claim 12 or 13, wherein the substrate carrier (100) is configured to hold a substrate (110), and the substrate carrier (100) is aligned with the at least one coating window (20) so that material can be deposited on the substrate (110) through the at least one coating window (20).

15. The device according to any one of claims 12 to 14, wherein the vacuum chamber cooling device and the at least one cooling device (30) are separate devices.

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