Inspection probe and inspection device

Abstract

A test probe is provided. [Solution] The inspection probe includes a barrel having a tubular barrel body and a plurality of skirt portions separated from each other by a plurality of slits formed in the longitudinal direction at one end of the barrel body, and a plunger having a sliding portion accommodated in the barrel body and slidable along the length of the barrel, and a terminal contact portion extending longitudinally from the sliding portion beyond the skirt portion. The skirt portion has a skirt body portion extending in the longitudinal direction of the barrel body, and a skirt reduced diameter portion bent at a tip region of the skirt body portion to reduce in diameter in the axial direction of the barrel and having a facing end facing a surface of the terminal contact portion. The axial facing length of the facing end is greater than the thickness of the skirt reduced diameter portion.

Description

[Technical field]

[0001] The present invention relates to a test probe and a test apparatus for testing electrical characteristics of a test object such as a semiconductor. [Background technology]

[0002] FIG. 1 is a diagram showing a conventional test probe 10. As shown in FIG.

[0003] Referring to FIG. 1, an inspection probe 10 includes a cylindrical barrel 11, a plunger 12 slidably coupled within one side of the barrel 11, a terminal 13 fixedly coupled to the other side of the barrel 11, and a spring 14 interposed between the plunger 12 and the terminal 13 within the barrel 11 to provide elastic force.

[0004] The inspection signal may be transmitted from the plunger 12 to the terminal 13 via the barrel 11 and the spring 14. More specifically, the inspection signal applied to the plunger 12 is transmitted to the terminal 13 fixed to the other end of the barrel 11 through one end of the barrel 11, the inner wall of the barrel 11, and the spring 14. At this time, an appropriate gap must be maintained between the plunger 12 and the barrel 11 for smooth sliding of the plunger 12. Such a gap causes an unstable contact state during inspection, generating an unstable resistance value as shown in FIG. 2, and causing a problem of determining a good inspected product as a defective product.

[0005] Furthermore, the end of the barrel is narrowed to prevent the sliding plunger from slipping out, and there is a problem that the sliding plunger applies a large load to the sharp end of the barrel during inspection, which can damage the plated portion coated on the outer surface of the plunger. Summary of the Invention [Problem to be solved by the invention]

[0006] An object of the present invention is to provide an inspection probe and an inspection device capable of improving the reliability of the inspection by ensuring a stable signal transmission path during the inspection.

[0007] Another object of the present invention is to provide an inspection probe and an inspection device which are highly durable. [Means for solving the problem]

[0008] In order to achieve the above object, there is provided an inspection probe according to an embodiment of the present invention. The inspection probe includes a barrel having a tubular barrel body and a plurality of skirt portions separated from each other by a plurality of slits formed in the longitudinal direction at one end of the barrel body, and a plunger having a sliding portion accommodated in the barrel body and slidable along the longitudinal direction of the barrel, and a terminal contact portion extending from the sliding portion to the skirt portion along the longitudinal direction. The skirt portion includes a skirt body portion extending in the longitudinal direction of the barrel body, and a skirt reduced diameter portion having a facing end portion bent at a tip region of the skirt body portion so as to reduce in diameter in the axial direction of the barrel and facing a surface of the terminal contact portion. The axial facing length of the facing end portion is greater than the thickness of the skirt reduced diameter portion.

[0009] The skirt reduced diameter portion may have a thickness greater than that of the skirt main body portion, thereby allowing the axial facing length of the facing end to be extended.

[0010] The skirt reduced diameter portion may include a thick portion having a relatively large thickness in at least a portion of its length, which allows the axial facing length of the facing end portion to be extended and increases durability.

[0011] The inner diameter of the opposing end may be formed by a cylindrical cutting process along the axial direction of the barrel, which makes it easy to form the opposing end of the reduced diameter skirt portion.

[0012] The edge of the tip of the reduced diameter skirt portion may have a chamfered portion, which makes it possible to prevent the plating layer of the terminal contact portion from being damaged by the edge of the tip of the reduced diameter skirt portion during inspection.

[0013] The skirt portion and the barrel body portion may have different outer diameters, which allows the radial elasticity of the skirt portion to be adjusted.

[0014] The width of the slit may be gradually increased along the open end, which may facilitate machining of the slit and reduce the occurrence of burrs on the inner edge of the skirt.

[0015] According to an embodiment of the present invention, there is provided a test apparatus, which includes a test probe having the above-mentioned characteristics, and a test socket supporting the test probe such that both ends of the test probe partially protrude. Effect of the Invention

[0016] The inspection probe according to an embodiment of the present invention includes a barrel body and a plurality of skirt portions separated by slits formed in the longitudinal direction at one end of the barrel body and tapering toward the central axis. The inner surface of the tip region of each skirt portion contacts the outer surface of the plunger over a predetermined length section, so that the plunger and the barrel maintain stable contact during the inspection, thereby improving the reliability of the inspection. In addition, when a large load is generated at the end of the barrel during the sliding operation of the plunger, the skirt portions spread outward in the radial direction, thereby preventing damage to the plating portion of the plunger due to the load.

[0017] The durability of the skirt portion may be reduced because it is separated by slits, but durability can be increased by making the axial facing length of the facing end portion that contacts the plunger longer than the thickness of the skirt reduced diameter portion or the skirt main body portion, and a length that allows for chamfering of the tip edge can be secured.

[0018] The edge of the tip of the reduced diameter skirt portion is chamfered to prevent the outer surface of the plunger from being scratched. [Brief description of the drawings]

[0019] [Figure 1] FIG. 1 illustrates a conventional inspection probe. [Diagram 2] FIG. 13 is a diagram showing a distribution of resistance values ​​measured during testing using a conventional testing probe. [Diagram 3] 1 is a perspective view showing an inspection probe according to a first embodiment of the present invention; [Figure 4] 4 is a cross-sectional view of the inspection probe taken along line AA in FIG. 3. [Diagram 5] 4 is a diagram showing a contact state between the skirt portion in FIG. 3 and a terminal contact portion of the plunger. FIG. [Figure 6] FIG. 11 is a diagram showing an inspection probe according to a second embodiment of the present invention. [Figure 7] FIG. 11 is a diagram showing an inspection probe according to a third embodiment of the present invention. [Figure 8] FIG. 10 is a diagram showing a barrel of an inspection probe according to a fourth embodiment of the present invention. [Figure 9] FIG. 13 is a diagram showing a barrel of an inspection probe according to a fifth embodiment of the present invention. [Figure 10] FIG. 13 is a diagram showing an inspection probe according to a sixth embodiment of the present invention. [Figure 11] FIG. 13 is a diagram showing an inspection probe according to a seventh embodiment of the present invention. [Figure 12] FIG. 13 is a diagram showing an inspection probe according to an eighth embodiment of the present invention. [Figure 13] FIG. 4 is a schematic diagram showing a method for manufacturing the barrel of FIG. 3. [Figure 14] FIG. 7 is a schematic diagram showing a method for manufacturing the barrel of FIG. 6. [Figure 15] FIG. 8 is a schematic diagram showing a method for manufacturing the barrel of FIG. 7. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an inspection probe 100 according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0021] For example, an inspection device for inspecting electrical characteristics of an object to be inspected, such as a semiconductor, includes a plate-shaped probe support (not shown) and an inspection probe 100 supported so that both ends partially protrude from the upper and lower surfaces of the probe support.

[0022] FIG. 3 is a diagram showing an inspection probe 100 according to a first embodiment of the present invention, FIG. 4 is a cross-sectional view of the inspection probe 100 cut along line AA in FIG. 3, and FIG. 5 is a diagram showing the contact state between the skirt portion 112 in FIG. 3 and the terminal contact portion 122 of the plunger 120.

[0023] 3 to 5, the inspection probe 100 includes, for example, a cylindrical barrel 110, a plunger 120 slidably coupled within one side of the barrel 110, a terminal 130 fixedly coupled to the other side of the barrel 110, and an elastic body 140 interposed between the plunger 120 and the terminal 130 within the barrel 110 to provide an elastic force.

[0024] The barrel 110 includes a barrel body 111 and a skirt 112 separated by a plurality of slits 113 formed at a predetermined interval along the circumferential direction at one end into which the plunger 120 is inserted. The number of slits 113 is not limited to three, and may be two or four or more. The slits 113 may extend obliquely or spirally with respect to the longitudinal direction of the inspection probe 100. The slits 113 are cut with a constant width.

[0025] The plunger 120 includes a sliding portion 121 that is accommodated in the barrel body 111 and slides therein, and a terminal contact portion 122 that extends from the sliding portion 121, passes through the skirt portion 112, is exposed to the outside, and contacts the skirt portion 112.

[0026] The sliding part 121 has a diameter corresponding to the inner diameter of the barrel body 111. The diameter of the sliding part 121 is set smaller than that of the barrel body 111 so that the sliding part 121 can slide within the barrel body 111.

[0027] The terminal contact portion 122 has a diameter smaller than that of the sliding portion 121. The diameter of the terminal contact portion 122 is set to such an extent that the terminal contact portion 122 can pass through the skirt portion 121 while facing the tip of the skirt portion 121. The tip of the terminal contact portion 122 comes into contact with a terminal (not shown) for testing.

[0028] The terminal 130 is fixedly coupled to the other end of the barrel 110 by dimpling or cocking, or alternatively, the terminal 130 may be loosely inserted so as to be slidable therein.

[0029] During testing, the elastic body 140 is compressed and restored by the sliding movement of the plunger 120. The elastic body 140 may be embodied by, for example, a coil spring.

[0030] Referring to FIG. 5, the skirt portion 112 has a skirt body portion 1121 extending along the barrel body portion 111, and a skirt reduced diameter portion 1122 that is bent in the tip region of the skirt body portion 1121 so as to reduce in diameter in the axial direction X of the barrel 110.

[0031] The skirt body portion 1121 extends alongside the barrel body portion 111 with the same thickness.

[0032] The skirt reduced diameter portion 1122 has a facing end 1122E at its tip region that faces the surface of the terminal contact portion 122. A facing length L of the facing end 1122E in the axial direction X is greater than the thickness d1 of the skirt reduced diameter portion 1122 and / or the thickness d2 of the skirt main body portion 1121. The thickness d1 of the skirt reduced diameter portion 1122 and the thickness d2 of the skirt main body portion 1121 are substantially the same.

[0033] The inner diameter of the facing end 1122E may be formed by a cylindrical cutting process along the axis X of the barrel.

[0034] The edge at the tip of the skirt reduced diameter portion 1122 may have a chamfered portion. By setting the axial facing length L to be larger than the thickness d1 of the skirt reduced diameter portion 1122 and / or the thickness d2 of the skirt main body portion 1121, it is possible to chamfer the edge at the tip of the skirt reduced diameter portion 1122. If the edge at the tip of the skirt reduced diameter portion 1122 is chamfered without a sufficient axial facing length L being secured, the facing end 1122E will become sharp, and the surface of the terminal contact portion 122 may be damaged during inspection, causing the plating layer to peel off.

[0035] In addition, when the inspection probe 100 is pressed for inspection, the terminal contact portion 122 may be tilted at an angle. If the skirt portion 112 were not present, strong friction would occur between the terminal contact portion 122 and the tip of the barrel 110, damaging the surface of the terminal contact portion 122 and causing the plating layer to peel off. In contrast, in the present invention, the skirt portion 112 is deformed in the radial direction, so that the friction between the terminal contact portion 122 and the tip of the barrel 110 can be reduced.

[0036] FIG. 6 is a diagram showing an inspection probe 100 according to a second embodiment of the present invention.

[0037] 6, the skirt portion 112 includes a skirt main body portion 1121 and a skirt reduced diameter portion 1122 that is bent so as to reduce in diameter from the skirt main body portion 1121 in the axial direction X of the barrel 110.

[0038] The skirt body portion 1121 extends substantially in the longitudinal direction of the barrel body portion 111 .

[0039] The skirt reduced diameter portion 1122 has a thickened portion 1123 that expands radially outward in a region facing the terminal contact portion 122. The thickened portion 1123 expands so as to become gradually thicker along the axial direction X of the barrel 110. The thickness d1 of the skirt reduced diameter portion 1122 is formed by the thickened portion 1123 to be thicker than the thickness d2 of the skirt main body portion 1121. The thickened portion 1123 may be formed by extrusion.

[0040] The edge of the tip of the skirt reduced diameter portion 1122 has a chamfered portion 1124. The thick portion 1123 extends the facing length L of the facing end 1122E that contacts the contact terminal portion 122, and prevents the facing length L from becoming smaller due to the formation of the chamfered portion 1124, and prevents the facing end 1122E from becoming sharp.

[0041] 7 is a diagram showing an inspection probe 100 according to a third embodiment of the present invention. Referring to FIG. 7, the skirt portion 112 includes a skirt main body portion 1121 and a skirt reduced diameter portion 1122 that is bent from the skirt main body portion 1121 in the axial direction X of the barrel 110 so as to reduce in diameter.

[0042] The skirt reduced diameter portion 1222 has a thickened portion 1123 that expands radially outward in a region facing the terminal contact portion 122. The thickened portion 1123 is formed so as to gradually become thicker along the longitudinal direction of the barrel 110 and then become thinner again. That is, the outer surface of the thickened portion 1123 extends along the longitudinal direction of the skirt main body portion 1121 and then extends in a lateral direction substantially perpendicular to the longitudinal direction.

[0043] FIG. 8 is a diagram showing a barrel 110 of an inspection probe according to a fourth embodiment of the present invention.

[0044] 8, the barrel 110 includes a skirt portion 112 formed by a slit 113-1. The slit 113-1 has a tapered shape that gradually narrows toward the flange 114. The tapered slit 113-1 is easier to process than the slit 113 of a constant width shown in FIG. 3, and can reduce burrs remaining on the inner edge of the skirt portion 112.

[0045] FIG. 9 is a diagram showing a barrel 110 of an inspection probe according to a fifth embodiment of the present invention.

[0046] 9, a barrel 110 includes a skirt portion 112 formed by a slit 113-1. The skirt portion 112 may be formed to have different thicknesses in order to adjust the elastic force in the radial direction.

[0047] 9(a), the skirt body portion 1121 may have an outer diameter d5 that is the same as the outer diameter d4 of the barrel body portion 111. In this case, the inner diameters of the skirt body portion 1121 and the barrel body portion 111 are the same.

[0048] 9(b), the skirt body 1121 may be machined to have an outer diameter d5 smaller than the outer diameter d4 of the barrel body 111. That is, the thickness of the skirt 112 may be reduced by cutting the outer diameter on the left side based on the flange 114. In this case, the inner diameters of the skirt body 1121 and the barrel body 111 are the same. When the skirt body 1121 is machined to be thinner, the radial elastic force of the skirt 112 is reduced.

[0049] 9(c), the skirt body 1121 may be machined to have an outer diameter d5 larger than the outer diameter d4 of the barrel body 111. That is, the outer diameter on the right side of the flange 114 may be cut to increase the thickness of the skirt 112. In this case, the inner diameters of the skirt body 1121 and the barrel body 111 are the same. If the skirt body 1121 is formed to be thick, the radial elastic force of the skirt 112 increases.

[0050] FIG. 10 is a diagram showing an inspection probe 100 according to a sixth embodiment of the present invention.

[0051] 10, the barrel 110 includes a skirt portion 112 formed by a slit extending in the longitudinal direction at one end of the barrel 110. The skirt portion 112 includes a skirt body portion 1121 extending in the longitudinal direction from the barrel body portion 111, and a skirt reduced diameter portion 1122 bent from the skirt body portion 1121 to reduce in diameter in the axial direction X of the barrel body portion 111.

[0052] The plunger 120 includes a sliding portion 121 that is inserted into the barrel main body portion 111 and slid, a terminal contact portion 122 that passes from the sliding portion 121 through the tip portion of the skirt portion 112 and is exposed to the outside and contacts a terminal of the device under test, and an inclined contact portion 123 between the sliding portion 121 and the terminal contact portion 122.

[0053] The sliding part 121 has a large diameter part 1211 having an outer diameter set so as to be substantially adjacent to the inner surface of the barrel main body part 111, and a small diameter part 1212 having an outer diameter set so as to form a predetermined gap G1 with the inner surface of the skirt part 112. The gap G1 formed by the small diameter part 1212 prevents the movement of the sliding part 212 from being hindered by burrs remaining on the inner edge of the skirt part 112, and prevents scratches on the surface.

[0054] The skirt narrowing portion 1122 has an inner inclined surface 1122S with a predetermined linear inclination, and the inclined contact portion 123 has an outer inclined surface 123S with a predetermined bending rate. As a result, the inner inclined surface 1122S and the outer inclined surface 123S have a minimum contact area with each other. This can reduce damage to the outer inclined surface 123S of the inclined contact portion 123 caused by burrs remaining on the inner edge of the skirt narrowing portion 1122.

[0055] In an alternative embodiment, the skirt reduced diameter portion 1122 may have an inner inclined surface 1122S with a predetermined bending rate, and the inclined contact portion 123 may have an outer inclined surface 123S with a predetermined linear inclination.

[0056] In an alternative embodiment, the skirt narrowing portion 1122 may have an inner sloping surface 1122S with a first linear slope and the sloping contact portion 123 may have an outer sloping surface 123S with a second linear slope different from the first linear slope. In an alternative embodiment, the skirt narrowing portion 1122 may have an inner sloping surface 1122S with a first bending rate and the sloping contact portion 123 may have an outer sloping surface 123S with a second bending rate different from the first bending rate.

[0057] FIG. 11 is a diagram showing an inspection probe 100 according to a seventh embodiment of the present invention.

[0058] 11, the barrel 110 includes a skirt portion 112 formed by a slit extending in the longitudinal direction at one end of the barrel 110. The skirt portion 112 includes a skirt body portion 1121 extending in the longitudinal direction from the barrel body portion 111, and a skirt reduced diameter portion 1122 bent from the skirt body portion 1121 to reduce in diameter in the axial direction X of the barrel body portion 111.

[0059] The plunger 120 includes a sliding portion 121 that is inserted into the barrel main body portion 111 and slid, a terminal contact portion 122 that passes from the sliding portion 121 through the tip portion of the skirt portion 112 and is exposed to the outside and contacts a terminal of the device under test, and an inclined contact portion 123 between the sliding portion 121 and the terminal contact portion 122.

[0060] The terminal contact portion 122 includes a first tapered portion 1221 whose outer diameter gradually decreases toward the inclined contact portion 123 in at least a portion of the section. Before the plunger 120 slides in the direction of the arrow for the inspection, the first tapered portion 1221 may not contact or may contact with a facing end 1122E provided at the tip of the skirt reduced diameter portion 1122 with a minimum contact force. When the plunger 120 slides in the direction of the arrow for the inspection, the first tapered portion 1221 may contact with the facing end 1122E of the skirt reduced diameter portion 1122 with a stronger contact force. This can prevent elastic deterioration of the skirt portion 122 caused by the facing end 1122E of the skirt portion 122 constantly pressing the terminal contact portion 122 in a standby state in which the inspection is not being performed.

[0061] FIG. 12 is a diagram showing an inspection probe 100 according to an eighth embodiment of the present invention.

[0062] Referring to FIG. 12(a), a barrel 110 includes a skirt portion 112 formed by a longitudinally extending slit at one end.

[0063] The plunger 120 includes a sliding portion 121 that is inserted into the barrel body portion 111 and slid therein, and a terminal contact portion 122 that passes from the sliding portion 121 through a facing end portion 1122E of the skirt portion 112 and is exposed to the outside.

[0064] The terminal contact portion 122 includes an extension bar 1222 extending integrally from the sliding portion 121, a tip 1223 that contacts a terminal of a device under test, and a second tapered portion 1224 provided between the extension bar 1222 and the tip 1223. The second tapered portion 1224 extends at an angle toward the tip 1223 so that its diameter gradually decreases.

[0065] As shown in Fig. 12(b), the terminal contact portion 122 of the plunger 120 passes through the facing end portion 1122E of the skirt portion 112, and is exposed to the outside as shown in Fig. 12(c). At this time, if the terminal contact portion 122 abuts against the inner surface of the skirt portion 112 and an impact is applied, the skirt portion 112 may be deformed. To prevent this, a second tapered portion 1224 having a predetermined inclination is provided adjacent to the tip 1223, which makes it possible to prevent the terminal contact portion 122 from contacting and applying pressure to the inner surface of the skirt portion 112 and being deformed.

[0066] FIG. 13 is a schematic diagram showing a method for manufacturing the barrel 110 of FIG.

[0067] 13(a), a cylindrical pipe member 110M made of a conductive material is formed. The pipe member 110M may include a flange 114.

[0068] 13(b), in the second step, a reduced diameter portion 1122M is formed at one end of the pipe member 110M by, for example, a forging process using a die. The reduced diameter portion 1122M has a shape whose diameter decreases along the axial direction X of the pipe member 110M.

[0069] In the third step, as shown in Fig. 13(c), the facing end 1122E is formed on the tip surface of the reduced diameter portion 1122M. The facing end 1122E is formed substantially along the longitudinal direction of the pipe member 110M. For example, the facing end 1122E may be formed by cutting the inner tip surface of the reduced diameter portion 1122M into a cylindrical shape along the axial direction X of the barrel using a drill.

[0070] In the fourth step, as shown in Fig. 13(d), a chamfered portion 1122C is formed on the edge of the tip of the reduced diameter portion 1122M. The chamfered portion 1122C may be formed by chamfering so as to have an obtuse angle with respect to the facing end portion 1122E.

[0071] In the fifth step, as shown in Fig. 13(e), three slits 113 are formed along the longitudinal direction in the reduced diameter portion 1122M and a portion of the pipe member 110M shown in Fig. 13(d). The three slits 113 are formed at intervals of 120° in the circumferential direction to form three skirt portions 112. The number of slits 113 is not limited to three. The slits 113 may be formed by cutting, for example, using a drill to have a constant width or to gradually widen along the open end.

[0072] FIG. 14 is a schematic diagram showing a method for manufacturing the barrel 110 of FIG.

[0073] 14(a), a cylindrical pipe member 110M made of a conductive material is formed. The pipe member 110M may include a flange 114.

[0074] In the second step, as shown in FIG. 14(b), a reduced diameter portion 1122M is formed at one end of the pipe member 110M by, for example, a forging process using a die. The reduced diameter portion 1122M has a diameter that decreases along the axial direction X of the pipe member 110M. The reduced diameter portion 1122M has a shape in which the thickness gradually increases. The thickness of the reduced diameter portion 1122M is thicker than the thickness of the pipe member 110M.

[0075] In the third step, as shown in (c) of Fig. 14, the facing end 1122E is formed on the tip surface of the reduced diameter portion 1122M. The facing end 1122E is formed substantially along the longitudinal direction of the pipe member 110M. For example, the facing end 1122E may be formed by cylindrical cutting of the inner surface along the longitudinal direction of the barrel using a drill.

[0076] In the fourth step, as shown in Fig. 14(d), a chamfered portion 1122C is formed on the edge of the tip of the reduced diameter portion 1122M. The chamfered portion 1122C may be formed by chamfering so as to have an obtuse angle with respect to the facing end portion 1122E.

[0077] In the fifth step, as shown in Fig. 14(e), three slits 113 are formed along the longitudinal direction in the reduced diameter portion 1122M and a portion of the pipe member 110M shown in Fig. 14(d). The three slits 113 are formed at intervals of 120° in the circumferential direction to form three skirt portions 112. The number of slits 113 is not limited to three. The slits 113 may be formed by cutting using a drill, for example, to have a constant width or to gradually become wider toward the open end.

[0078] FIG. 15 is a schematic diagram showing a method for manufacturing the barrel 110 of FIG.

[0079] 15(a), a cylindrical pipe member 110M made of a conductive material is formed. The pipe member 110M may include a flange 114.

[0080] In the second step, as shown in FIG. 15(b), a reduced diameter portion 1122M is formed at one end of the pipe member 110M by, for example, a forging process using a die. The reduced diameter portion 1122M has a diameter that decreases along the axial direction X of the pipe member 110M. The reduced diameter portion 1122M has a shape in which the thickness gradually increases and then decreases. The reduced diameter portion 1122M is thicker than the thickness of the pipe member 110M.

[0081] In the third step, as shown in FIG. 15(c), the facing end 1122E is formed on the tip surface of the reduced diameter portion 1122M. The facing end 1122E is formed substantially along the longitudinal direction of the pipe member 110M. For example, the facing end 1122E may be formed by cylindrical cutting of the tip inner surface of the reduced diameter portion 1122M along the axial direction using a drill. The reduced diameter portion 1122M has a first outer surface substantially parallel to the facing end 1122E and a second outer surface substantially perpendicular to the facing end 1122E.

[0082] In the fourth step, as shown in Fig. 15(d), a chamfered portion 1122C is formed on the edge of the tip of the reduced diameter portion 1122M. The chamfered portion 1122C may be formed by chamfering so as to have an obtuse angle with respect to the facing end portion 1122E.

[0083] In the fifth step, as shown in Fig. 15(e), three slits 113 are formed along the longitudinal direction in the reduced diameter portion 1122M and a portion of the pipe member 110M shown in Fig. 15(d). The three slits 113 are formed at intervals of 120° in the circumferential direction to form three skirt portions 112. The number of slits 113 is not limited to three. The slits 113 may be formed by cutting, for example, using a drill to have a constant width or to gradually become wider toward the open end.

[0084] Although preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited to the specific embodiments described above, and various modifications can be made by those having ordinary skill in the art to which the invention pertains without departing from the gist of the present invention as claimed in the claims, and such modified embodiments should not be understood as being outside the technical spirit or scope of the present invention. [Explanation of symbols]

[0085] 100: Inspection probe 110: Barrel 111: Barrel body 112: Skirt Club 1121: Skirt body 1122: Skirt narrowing section 1122E: Opposite end 1123: Thick wall part 1124: Chamfered part 113,113-1:Slit 114: Flange 120: Plunger 121: Sliding section 122:Terminal contact part 1221: First taper section 1222: Extension bar 1223: Chip 1224: Second taper section 130: Terminal 140: Elastic body

Claims

1. A barrel having a tubular barrel body and a plurality of skirt portions separated from each other by a plurality of slits formed in a longitudinal direction at one end of the barrel body; a plunger having a sliding portion accommodated within the barrel body portion and slidable along a longitudinal direction of the barrel, and a terminal contact portion extending from the sliding portion along the longitudinal direction beyond the skirt portion, the skirt portion has a skirt main body portion extending in the longitudinal direction of the barrel main body portion, and a skirt reduced diameter portion bent in a tip region of the skirt main body portion so as to reduce in diameter in the axial direction of the barrel and having a facing end portion facing the surface of the terminal contact portion, The axial length of the facing end is greater than the thickness of the skirt reduced diameter portion. Inspection probe.

2. The test probe of claim 1 , wherein the skirt reduced diameter portion has a thickness greater than that of the skirt body portion.

3. The test probe of claim 1 , wherein the skirt reduced diameter section includes a thickened section having a relatively large thickness over at least a portion of its length.

4. 2. The test probe of claim 1, wherein the inner diameter of the facing end is formed by a cylindrical cutting operation along the axis of the barrel.

5. The test probe of claim 1 , wherein a leading edge of the reduced diameter skirt portion has a chamfer.

6. The test probe of claim 1 , wherein the skirt portion and the barrel body portion have different outer diameters.

7. The test probe of claim 1 , wherein the slit has a width that gradually increases toward an open end.

8. An inspection probe according to any one of claims 1 to 7; a test socket that supports the test probe such that both ends of the test probe partially protrude. Inspection equipment.

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