Petal

Abstract

A valve (1), in particular a vacuum valve, for metering the volumetric flow through a flow opening (2), wherein the valve (1) has a valve disk (3) which closes the flow opening (2) in the closed position of the valve (1), and at least two valve rods (4, 5) each extending in the longitudinal direction, the valve rods (4, 5) being attached to the valve disk (3) at positions spaced apart from each other, each of the valve rods (4, 5) being linearly slidably driven by a respective specific valve drive device (6, 7) of the valve (1) for adjusting the position of the valve disk (3), and only a partial amount of the valve rod (4) being linearly slidably driven by its valve drive device (6) in the entire position adjustment path (10) of the valve disk (3) between the closed position and the maximum open position.

Description

Technical Field

[0001] The present invention relates to a valve for metering a volumetric flow through a flow opening, in particular a vacuum valve, the valve having a valve disk that closes the flow opening in the closed position of the valve and at least two valve rods each extending in the longitudinal direction, the valve rods being attached to spaced-apart positions of the valve disk, and each of the valve rods being linearly slidably driven by a dedicated valve drive device of the valve to adjust the position of the valve disk.

[0002] This type of valve is used, in particular in vacuum technology, for metering the volumetric flow through a flow opening, i.e. the inflow or outflow of a fluid, in particular a gas. This flow opening is often the one through which the fluid flows into or out of the process chamber. Such a valve enables good metering of the volumetric flow through the flow opening. This type of valve is shown, for example, in FIGS. 5a and 5b of US Patent No. 10156299.

[0003] The object of the present invention is to provide a valve of the type described at the beginning with a reduced energy requirement.

[0004] This object is solved by the valve according to claim 1.

[0005] Thus, according to the present invention, it is defined that only a partial amount of the plurality of valve rods is linearly slidably driven by its valve drive device in the entire position adjustment path of the valve disk between the closed position and the maximum open position.

[0006] Particularly preferably, it is defined that only one of the plurality of valve rods is linearly slidably driven by its valve drive device in the entire position adjustment path of the valve disk between the closed position and the maximum open position.

[0007] Accordingly, in the present invention, only a partial amount of the plurality of valve drive devices, preferably only one of the plurality of valve drive devices, is actuated in the entire position adjustment path of the valve drive device, whereby the valve can be operated particularly energy-efficiently. Furthermore, such a valve can be manufactured relatively inexpensively.

[0008] Advantageously, it is provided that the valve rod is driven only linearly slidably by its respective valve drive device.

[0009] In the present invention, advantageously, at least one of the plurality of valve rods is driven only linearly slidably by its valve drive device in a partial section of the position adjustment path of the valve disk that faces the closed position and departs from the closed position.

[0010] This can be achieved, for example, by separating at least one of the plurality of valve rods, which is driven only linearly slidably by its valve drive device in a partial section of the position adjustment path of the valve disk that faces the closed position and departs from the closed position, from the valve drive device in another partial section of the position adjustment path of the valve disk that faces the maximum open position and departs from the maximum open position. That is, in such a configuration of the present invention, for the at least one valve rod of the plurality of valve rods that is driven only linearly slidably by its valve drive device in a partial section of the position adjustment path of the valve disk that faces the closed position and departs from the closed position, the linear drive device is actuated only for pressing the valve disk against the valve seat and / or lifting the valve disk from the valve seat. The remaining movement of the valve disk is realized exclusively via the valve drive devices of other valve rods.

[0011] The valve rod may basically be made of various different materials. It may be specified that one of the valve rods is made of a first material, and another valve rod or a plurality of other valve rods are made of another material. However, a preferred variation of the present invention specifies that the valve rod is formed of the same material, preferably steel. Preferably, the valve rod is made of steel, particularly special steel.

[0012] Normally, this type of valve is assembled such that the valve disk is located within the process chamber and the valve drive device is located outside the process chamber. Since a temperature difference often occurs between the region inside the process chamber and the region outside the process chamber, there is a need to compensate for the thermal deformation caused by this temperature difference, particularly so that no particles are generated thereby, or the generation of particles is avoided as much as possible.

[0013] In the valve according to the present invention, in order to compensate for such deformation caused by heat, a compensation element can be used between at least one of the valve rods and the valve disk.

[0014] Another valve according to the present invention can, in this regard, be specified such that the valve rods are formed with different rigidities with respect to lateral displacement with respect to their respective longitudinal extension directions. In these variations of the present invention, the expansion of the length of the valve plate due to temperature can be compensated by the valve rod that is less rigid with respect to lateral displacement with respect to its longitudinal extension direction being displaced more than the valve rod that is more rigid with respect to lateral displacement with respect to its longitudinal extension direction. Thereby, the difference in the expansion of the length due to the temperature inside and outside the process chamber can be compensated particularly well, and in this case, no particles are generated thereby.

[0015] The different rigidities of the valve rods can be achieved, for example, by using various different materials. However, preferably, it is stipulated that the valve rods have different diameters from each other at least in a predetermined region. It should be noted that, naturally in this context, valve rods with the same rigidity in the lateral direction with respect to their respective longitudinal extension directions may have different diameters from each other.

[0016] Regardless of how this is achieved, in any case, preferably, a valve rod that is more rigid with respect to lateral displacement in the lateral direction with respect to its longitudinal extension direction has a resistance moment that is at least five times greater than that of another valve rod, or in other words, a valve rod that is not as rigid with respect to lateral displacement in the lateral direction with respect to its longitudinal extension direction.

[0017] In this case, the resistance moment is a measure representing how much mechanical resistance each valve rod resists when a load is applied. When the displacement of the valve rod is lateral with respect to the respective longitudinal extension directions of these valve rods, the resistance moment can also be called the axial resistance moment or the bending resistance moment.

[0018] Preferably, only the valve rod that is more rigid with respect to lateral displacement in the lateral direction with respect to its longitudinal extension direction is linearly slidably driven by the valve drive device in the entire position adjustment path of the valve disk between the closed position and the maximum open position.

[0019] Simplifying linguistically, the valve rod that is more rigid with respect to lateral displacement in the lateral direction with respect to its longitudinal extension direction may simply be called the shorter and more rigid valve rod in this specification. The valve rod that is not as rigid with respect to lateral displacement in the lateral direction with respect to its longitudinal extension direction may simply be called the shorter and less rigid valve rod in this specification when simplified linguistically.

[0020] As a valve drive device, basically, all known linear valve drive devices are considered when implementing the present invention. That is, this valve drive device may be a hydraulic, pneumatic or also an electric valve drive device.

[0021] It is also advantageous if the valve drive devices of the valve rods are synchronized with each other in a partial section of the position adjustment path where these valve drive devices are operating together.

[0022] Synchronization can be achieved by an electronic or control-technical connection of the valve drive devices. However, in the case of pneumatic and / or hydraulic valve drive devices, synchronization can also be achieved by corresponding hydraulic or pneumatic connecting pipelines.

[0023] The flow opening is preferably surrounded by a valve seat. The valve seat is where the valve disk is pressed against when the valve disk closes the flow opening in its closed position. The valve seat may be part of the valve, or may also be part of a valve seat plate which is also part of the valve. However, the valve seat may also be formed directly on the chamber wall of the process chamber.

[0024] Another feature and details of the preferred embodiment will be illustrated and described below in the description of the drawings.

Brief Description of the Drawings

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[0026] Valve 1 according to the present invention is preferably a so-called vacuum valve also in the embodiments shown herein. Vacuum valves are typically used when working in a special atmosphere and / or at a special pressure level. In particular, it is called a vacuum valve when working with a pressure difference of 0.001 mbar (millibar) or less than 0.1 Pascal. However, it may also be called a vacuum valve even when the vacuum valve is designed for a pressure difference of standard atmospheric pressure, i.e., less than 1 bar. All valves 1 shown in the embodiments herein can be used as vacuum valves.

[0027] FIG. 1 shows the valve 1 of the first embodiment removed from the process chamber 22 in a perspective view, and the valve disk 3 is in the maximum open position. Two valve rods 4, 5 are attached to the valve disk 3. Corresponding valve drive devices 6, 7 are arranged for each valve rod 4, 5.

[0028] In all variations of the present invention described below, and thus also in the first embodiment shown in FIGS. 1 to 11, it is defined that only a partial amount of the valve rods 4, 5 is linearly slidably driven by its valve drive devices 6, 7 in the entire position adjustment path 10 of the valve disk 3 between the closed position and the maximum open position. In the embodiments shown in this specification, the partial amount consists of simply one valve rod 4 each, but this does not necessarily have to be the case. The above-mentioned partial amount may consist of two or more valve rods. In the embodiments described below, the valve rod 5 is linearly slidably driven only in the partial section 11 of the position adjustment path 10 of the valve disk 3 that faces the closed position and / or departs from the closed position by its respective valve drive device 7. In another partial section 12 of the remaining position adjustment path 10, the valve rod 5 is separated from its valve drive device 7 in all implementation variations described in this specification.

[0029] In the first embodiment shown in FIGS. 1 to 11, both valve rods 4, 5 have the same diameters 8, 9. In this first embodiment, the valve rods 4, 5 are formed with the same rigidity with respect to the lateral displacement with respect to their respective longitudinal extension directions.

[0030] By means of the valve drive device 6, the valve disk 3 may be brought to the closed position in order to close the flow-through opening 2, and likewise well to the maximum open position and to an intermediate position arranged between the closed position and the maximum open position, whereby the volume flow of the fluid flowing through the flow-through opening 2, whether it is a gas or a liquid, can be metered.

[0031] The valve drive device 6 is a spindle drive device known per se. Specifically, in this embodiment, the end of the valve rod 4 on the side opposite to the valve disk 3 is attached to the carriage 20, and the carriage 20 is realized to be supported on the guide rail 19 so as to be linearly slidable. The valve drive device 6 has its own motor, an electric motor 16 in this embodiment. The electric motor 16 drives the spindle 18 in a known manner via the drive belt 17. A spindle nut 21 is located on the carriage 20, and the spindle nut 21 engages with the male thread of the spindle 18. Therefore, by the motor 16, the valve drive device 6 can slide the valve rod 4 along the guide rail 19 in a direction parallel to the extending direction of its longitudinal direction. The rod seal 23 surrounding the valve rod 4 serves for sealing against the chamber inner chamber 25. The corresponding rod seal 23 and the spindle drive device are known per se and do not need to be further explained.

[0032] Of course, the form realized in the first embodiment of the valve drive device 6 can also be replaced by another suitable electric, pneumatic or hydraulic linear drive device.

[0033] The valve drive device 7 for the valve rod 5 has a drive pin 27 and a pin drive device 28 for linearly sliding the drive pin 27. A slope 29 is located at the front end of the drive pin 27, and this slope 29 is pressed against the opposing slope 30 provided on the carriage 20 of the valve rod 5 in a connected state. Therefore, by the driving of the drive pin 27 by the pin drive device 28, the valve rod 5 is also pulled in the direction towards the closed position of the valve disk 3 in a connected state. To open, the drive pin 27 is pulled back until the drive pin 27 releases the carriage 20, whereby at this time the valve disk 3 may be run to the intermediate position and the maximum open position exclusively by the valve rod 4 and its valve drive device 6.

[0034] Advantageously, the valve drive devices 6, 7 of the valve rod are defined to be synchronized with each other in a partial section 11 of the position adjustment path 10 where these valve drive devices 6, 7 are operated together. In the embodiment illustrated here, this can be achieved, for example, by corresponding electrical controls of the valve drive devices 6, 7, which are not explicitly shown here. In the case of pneumatic or hydraulic drive devices, this may be achieved by a correspondingly controlled pressure supply.

[0035] The flow-through opening 2 is formed in the valve seat plate 15 in this first embodiment as well as in other illustrated embodiments, and is also formed in the corresponding process chamber 22 as shown in FIGS. 3, 4, and 5. In the embodiment shown here, the valve seat 14 against which the valve disk 3 is pressed in the closed position is located on the valve seat plate 15. That is, the valve seat 14 and the valve seat plate 15 are part of the valve 1 in these embodiments. However, it may also be well-defined that the valve seat plate 15 is omitted. In that case, the valve seat 14 may be formed directly on the chamber wall of the process chamber 22 surrounding the flow-through opening 2. In the illustrated embodiment, a seal 13 for sealing the flow-through opening 2 in the closed position of the valve disk 3 is located on the valve disk 3. However, of course, the corresponding seal 13 may be realized at the valve seat 14, or may be realized at the valve disk 3 and the valve seat 14.

[0036] FIG. 2 shows a plan view of the process chamber 22 schematically shown for the first embodiment, as viewed from above. On the lower surface of the process chamber 22, a valve 1 (FIG. 1) which is not visible in FIG. 2 is correspondingly arranged. In the plan view shown in FIG. 2, only cutting lines A-A, B-B, and C-C are marked. FIGS. 3 to 5 show cross-sectional views along the cutting line A-A. Here, the valve disk 3 of the valve 1 shown in FIG. 3 is in the closed position, the valve disk 3 shown in FIG. 4 is in the intermediate position, and the valve disk 3 shown in FIG. 5 is in the maximum open position. FIGS. 6 to 8 show cross-sectional views along the cutting line B-B. Here, in FIG. 6, the valve disk 3 is similarly in the closed position, in FIG. 7 in the intermediate position, and in FIG. 8 in the maximum open position. FIGS. 9 to 11 show cross-sectional views along the cutting line C-C. In FIG. 9, the valve disk 3 is similarly in the closed position, in FIG. 10 in the intermediate position, and in FIG. 11 in the maximum open position. Further, in FIGS. 3 to 11, while the drive housings 26 of the valve drive devices 6, 7 are located outside the inner chamber 25 of the process chamber 22, it can be clearly seen that the valve disk 3 is always arranged inside the inner chamber 25 at all its positions. Usually, inside the inner chamber 25, a temperature level different from that outside the process chamber 22 exists. The valve disk 3 has the temperature of the inner chamber 25, while the valve drive devices 6, 7 have substantially the temperature outside the process chamber 22. When the temperature inside the inner chamber 25 and the temperature of the process chamber 22 change relatively with respect to each other, length changes due to heat occur in both the valve disk 3 and the valve drive devices 6, 7. These different lengths of expansion due to temperature are compensated by a compensation element 39 in this first embodiment. This compensation element 39 is arranged between the valve rod 5 and the valve disk 3 in this embodiment. Relative sliding in the longitudinal direction of the valve disk 3 between the valve rod 5 and the valve disk 3 is allowed. Thereby, various different expansions due to temperature can be compensated very well without generating particles. The compensation element 39 may be, for example, an intermediate layer made of an elastically deformable material such as metal or elastomer that allows exactly the corresponding relative movement.Of course, the compensating element 39 may alternatively or additionally be arranged between the valve rod 4 and the valve disk 3.

[0037] In FIGS. 3 to 11, an introduction opening 24 is also provided, through which an object to be processed can be introduced into the inner chamber 25 of the chamber and removed from the process chamber 22. These introduction openings 24 can be closed by a valve known per se, not shown here. The valve 1 is used to close the flow-through opening 2 and, as described above, serves to meter the volume flow of gaseous or liquid fluid flowing into or out of the inner chamber 25 of the chamber. The pumps etc. required for this purpose are not shown here but are known per se.

[0038] In the following description of the embodiments, only the differences with respect to the first embodiment will be mentioned. Otherwise, reference should be made to the above description of the first embodiment. The above description can be read analogously for the second embodiment and the following embodiments.

[0039] In the first embodiment shown in FIGS. 1 to 11, the two valve rods 4 and 5 have the same diameters 8 and 9 and are formed with the same rigidity with respect to lateral displacement in their respective longitudinal extending directions. However, this does not apply to the embodiments described below. In the variations shown in FIGS. 12 to 38, it is defined that the valve rods 4 and 5 are formed with different rigidities with respect to lateral displacement in their respective longitudinal extending directions. Preferably in these embodiments, it is defined that the valve rods 4 and 5 are formed from the same material, preferably steel or special steel. In order to form the valve rods 4 and 5 with different rigidities with respect to lateral displacement in their respective longitudinal extending directions, in all the embodiments described below, it is defined that the valve rods 4 and 5 have different diameters 8 and 9 at least in a predetermined region. As already explained at the beginning, it is advantageous that the valve rod 4, which is more rigid with respect to lateral displacement in its longitudinal extending direction, has a resistance moment that is at least five times greater than that of the other valve rod 5. Therefore, advantageously, the diameter 8 of the more rigid valve rod 4 is clearly larger than the diameter 9 of the valve rod 5, which is not as rigid.

[0040] When the temperature in the chamber inner chamber 25 and the temperature of the process chamber 22 change relative to each other, length changes due to heat occur in the valve disk 3 and also in the valve drive devices 6 and 7. These different lengths of expansion due to temperature are compensated in the embodiments described below by corresponding displacements in the lateral direction with respect to the longitudinal extending length of the less rigid valve rod 5. The through guide part 38 passing through the wall of the process chamber 22 and, optionally, the valve seat plate 15, in all the embodiments listed below, is preferably formed to be of such a size that there is correspondingly a lot of space for the displacement of the valve rod 5. The rod seal 23 can easily compensate for this displacement of the valve rod 5 due to heat.

[0041] A second embodiment of the present invention is shown in FIGS. 12 to 22. FIG. 12 shows the valve 1 of the second embodiment, similarly removed from the process chamber 22, in a perspective view. FIG. 13 shows a plan view of the process chamber 22 corresponding to FIG. 2, having cutting lines D-D, E-E, and F-F. FIGS. 14 to 16 show cross-sectional views taken along the cutting line D-D, where in FIG. 14 the valve disk 3 is in the closed position, in FIG. 15 it is in the intermediate position, and in FIG. 16 it is in the maximum open position. FIGS. 17 to 19 show cross-sectional views taken along the cutting line E-E shown in FIG. 13, where FIG. 17 shows the closed position of the valve disk 3, FIG. 18 shows the intermediate position, and FIG. 19 shows the maximum open position. FIGS. 20 to 22 show corresponding cross-sectional views taken along the cutting line F-F. In FIG. 20, the valve disk 3 is in the closed position, in FIG. 21 it is in the intermediate position, and in FIG. 22 it is in the maximum open position.

[0042] The only difference from the first embodiment can already be well confirmed in FIG. 12. In the first embodiment, both valve rods 4, 5 have the same diameter 8, 9 and are formed with the same rigidity with respect to lateral displacement in their respective longitudinal extension directions, while this does not apply to the second embodiment. In the second embodiment, the valve rod 5 is not formed as rigidly as the valve rod 4 with respect to lateral displacement in its respective longitudinal extension direction. The valve rods 4, 5 also have correspondingly different diameters 8, 9. The less rigid valve rod 5 is driven slidably only in the partial section 11 of the position adjustment path 10 of the valve disk 3 towards the closed position by the valve drive device 7. In the remaining partial section 12 of the position adjustment path 10, the valve rod 5 is separated from the valve drive device 7. In FIGS. 12, 21, and 22, the separated state can be well visually recognized. In FIG. 20, it can be seen how the valve drive device 7 engages within the carriage 20 of the less rigid valve rod 5 and thereby presses the valve disk 3 towards the valve seat 14 by pulling in the direction towards the closed position in the less rigid valve rod 5.

[0043] The third embodiment shown in FIGS. 23 to 26 is a modification of the second embodiment shown in FIGS. 12 to 22. FIG. 23 shows a view similar to FIG. 12, and FIGS. 24 to 26 show views corresponding to FIGS. 20 to 22. In this third embodiment, the valve driving device 7 for the valve rod 5 which is not very rigid also has a driving pin 27 and a pin driving device 28. However, in this embodiment, the inclined surface 29 is omitted at the front end portion of the driving pin. Instead of the inclined surface, the moving direction and the extending direction in the longitudinal direction of the driving pin 27 are correspondingly arranged obliquely. Thus, as shown in FIG. 24, by pressing the driving pin 27 against the opposing inclined surface 30 provided on the carriage 20 of the valve rod 5 which is not very rigid, the sliding of the valve rod 5 which is not very rigid is similarly performed. Therefore, the valve disk 3 is also run by both valve rods 4 and 5 in the partial section 11 in the direction toward the valve seat 14 in this example, and is pressed against this valve seat 14. The running of the valve disk 3 in the opening direction is similarly performed solely using the valve driving device 6 and the more rigid valve rod 4 as shown in FIGS. 25 and 26. The valve rod 5 which is not very rigid is separated from the valve driving device 7 in this partial section 12 of the full position adjustment path 10.

[0044] The valve driving device 6 for the more rigid valve rod 4 is configured in the same manner as in the case of the first embodiment, and thus will not be described again. This also applies to the embodiments to be further described below.

[0045] In the fourth embodiment shown in FIGS. 27 to 30, the valve drive device 7 for the less rigid valve rod 5 is formed in the form of an electromagnet 31. This electromagnet 31 can be used to pull the less rigid valve rod 5 downward in the partial section 11 and thus pull the valve disk 3 to the closed position. However, by means of the corresponding polarity reversal, the electromagnet 31 can also be utilized to drive the valve rod 5 in the direction towards the open position in the partial section 11 when the valve disk 3 is opened. In other respects, this fourth embodiment is implemented in the same manner as the third embodiment, so further explanation is unnecessary. In any case, FIG. 27 also shows a perspective view, and FIGS. 28 to 30 show views corresponding to FIGS. 20 to 22 of the second embodiment.

[0046] The fifth embodiment shown in FIGS. 31 to 34 also differs only in the configuration of the valve drive device 7 for the less rigid valve rod 5 from the second, third, and fourth embodiments. In the fifth embodiment, the valve drive device 7 has a cam 32 that can be rotated by a cam drive unit 3, and the cam 32 engages with a slide guide 34 provided on the carriage 20 in the partial section 11 in order to pull the valve rod 5 and thus also the valve disk 3 to the closed position. This can be visually confirmed in FIG. 32. FIGS. 33 and 34 show the position where the cam 32 has disengaged from the slide guide 34 and thus the valve rod 5 has been separated from the valve drive device 7. Also in this variation, the valve drive device 7 is substantially used to pull the valve rod 5 in the last partial section 11 in the direction of the closed position of the valve disk 3. All other movements are realized by the more rigid valve rod 4 and its valve drive device 6.

[0047] In the last embodiment shown in FIGS. 35 to 38, the corresponding drawings are further shown. In this last embodiment, the valve drive device 7 for the less rigid valve rod 5 has a gear 35 that is driven using a gear drive device 36. This gear 35 engages with a rack 37 provided on the carriage 20 of the less rigid valve rod 5 in the lower partial section 11. Thereby, the less rigid valve rod 5 can be driven in the direction toward the closed position of the valve disk 3, but also in the reverse direction away from the closed position in the partial section 11. Here too, the remaining movement in the partial section 12 is simply realized by the more rigid valve rod 4 and its valve drive device 6. The type of illustration in FIGS. 35 to 38 is selected corresponding to the foregoing embodiments.

Explanation of Signs

[0048] 1 Valve 2 Flow-through opening 3 Valve disk 4 Valve rod 5 Valve rod 6 Valve drive device 7 Valve drive device 8 Diameter 9 Diameter 10 Full position adjustment path 11 Partial section 12 Partial section 13 Seal 14 Valve seat 15 Valve seat plate 16 Motor 17 Drive belt 18 Spindle 19 Guide rail 20 Carriage 21 Spindle nut 22 Process chamber 23 Rod seal 24 Introduction opening 25 Inner chamber of the chamber 26 Drive housing 27 Drive pin 28 Pin drive device 29 Inclined plane 30 Opposite inclined plane 31 Electromagnet 32 Cam 33 Cam drive device 34 Slide guide 35 Gear 36 Gear drive device 37 Rack 38 Inside the penetration plan 39 Compensation element

Claims

1. A valve (1), in particular a vacuum valve, for metering a volumetric flow through a flow-through opening (2), wherein the valve (1) has a valve disk (3) which closes the flow-through opening (2) in the closed position of the valve (1), and at least two valve rods (4, 5) each extending in the longitudinal direction, the valve rods (4, 5) being attached to the valve disk (3) at positions spaced apart from each other, and each of the valve rods (4, 5) being linearly slidably driven by a respective valve drive device (6, 7) of the valve (1) for adjusting the position of the valve disk (3). In the valve (1), only a partial amount (4) of the plurality of valve rods is linearly slidably driven by its valve drive device (6) in the entire position adjustment path (10) of the valve disk (3) between the closed position and the maximum open position, characterized in that. Valve (1).

2. The valve according to claim 1, characterized in that only one valve rod (4) of the plurality of valve rods is linearly slidably driven by its valve drive device (6) in the entire position adjustment path (10) of the valve disk (3) between the closed position and the maximum open position.

3. The valve (1) according to claim 1 or 2, characterized in that at least one valve rod (5) of the plurality of valve rods is linearly slidably driven by its valve drive device (7) only in a partial section (11) of the position adjustment path (10) of the valve disk (3) towards and away from the closed position.

4. The valve (1) according to claim 3, characterized in that at least one valve rod (5) which is linearly slidably driven by its valve drive device (7) only in a partial section (11) of the position adjustment path (10) of the valve disk (3) towards and away from the closed position is separated from the valve drive device (7) in another partial section (12) of the position adjustment path (10) of the valve disk (3) towards and away from the maximum open position.

5. The valve (1) according to any one of claims 1 to 4, characterized in that the valve rods (4, 5) are formed of the same material, preferably steel.

6. The valve drive devices (6, 7) of the valve rods (4, 5) are synchronized with each other in a partial section (11) of the position adjustment path (10) where the valve drive devices (6, 7) are operated together, characterized in that the valve (1) according to any one of claims 1 to 5.

7. The valve rods (4, 5) have different diameters (8, 9) from each other at least in a predetermined region, characterized in that the valve (1) according to any one of claims 1 to 6.

8. The valve rods (4, 5) are formed with different rigidities with respect to lateral displacement with respect to their respective longitudinal extension directions, characterized in that the valve (1) according to any one of claims 1 to 7.

9. The valve rod (4) having a higher rigidity with respect to lateral displacement with respect to its longitudinal extension direction has a resistance moment at least five times greater than that of the other valve rod (5), characterized in that the valve (1) according to claim 8.

10. Only the valve rod (4) having a higher rigidity with respect to lateral displacement with respect to its longitudinal extension direction is linearly slidably driven by its valve drive device (6) in the entire position adjustment path (10) of the valve disk (3) between the closed position and the maximum open position, characterized in that the valve (1) according to claim 8 or 9.

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