Sealing mechanism for a load port door

Abstract

The present disclosure describes a device and system for a seal and a method for using the seal. The seal includes a base portion configured to couple to a groove formed by an end face of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between a first component and a sealing surface of a second component in response to a threshold sealing force being applied to the sealing portion. The seal further includes a holding portion substantially perpendicular to the base portion. The surface of the holding portion is configured to be pressed against the end face of the first component in response to a threshold sealing force being applied to the sealing portion.

Description

Technical Field

[0001]

[0001] Embodiments of the present disclosure generally relate to a sealing mechanism for a load port door.

Background Art

[0002]

[0002] An electronic device manufacturing system may include one or more tools or components for transporting and manufacturing substrates. Such tools or components may include a factory interface (e.g., an equipment front end module (EFEM)) connected to a load lock and / or a transfer chamber. In some cases, the front of the factory interface may include one or more load ports. A load port is a station for loading and unloading a substrate carrier. The load port may include a frame adapted to connect the load port to the factory interface. The frame may include a transfer opening that enables one or more substrates to be transported therethrough between the substrate carrier and the factory interface.

[0003]

[0003] Current load ports generally do not include a seal between the frame of the load port and the load port door. However, such a configuration can be inefficient. This is because the current system does not maintain an environmentally controlled atmosphere at the interface between the frame and the door.

Summary of the Invention

[0004]

[0004] Some of the embodiments described are directed to a seal that includes a base portion configured to couple to a groove formed by an end face of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between a first component and a sealing surface of a second component in response to a threshold sealing force being applied to the sealing portion. The seal further includes a holding portion that is substantially perpendicular to the base portion. The surface of the holding portion is configured to be pressed against the end face of the first component in response to a threshold sealing force being applied to the sealing portion.

[0005]

[0005] Some of the embodiments described are directed to a load port door. The load port door includes an inner surface and an outer surface. The load port door further includes an end face that includes a groove formed therein. The load port further includes a seal coupled to the groove. The seal includes a base portion configured to couple to the groove and a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the load port door and a sealing surface of a frame of the load port in response to a threshold sealing force being applied to the sealing portion. The seal further includes a holding portion that is substantially perpendicular to the base portion. The surface of the holding portion is configured to be pressed against the end face in response to a threshold sealing force being applied to the sealing portion.

[0006]

[0006] Some of the embodiments described herein are directed to load ports for receiving substrate carriers. The load port includes a frame adapted to connect the load port to a factory interface. The frame includes a transfer port that enables one or more substrates to be transferred therethrough between the substrate carrier and the factory interface. The load port further includes a load port door configured to substantially fill the transfer port. The load port door includes an end face that forms a groove. The load port further includes a seal coupled to the groove formed in the end face of the load port door. The seal includes a base portion and a sealing portion extending from the base portion. The seal is coupled to the groove of the load port door via the base portion. The sealing portion is configured to create an airtight seal between the load port door and a sealing surface of the frame in response to a threshold sealing force being applied to the sealing portion. The seal further includes a holding portion substantially perpendicular to the base portion. The surface of the holding portion is configured to be pressed against the end face of the load port door in response to a threshold sealing force being applied to the sealing portion.

[0007]

[0007] The present disclosure is shown by way of example and not limitation, and like reference numerals in the accompanying drawings indicate similar elements. Note that different references to "an" or "one" embodiment in the present disclosure are not necessarily to the same embodiment, and such references mean at least one.

Brief Description of the Drawings

[0008]

Figure 1A

[0008] A schematic top view of an exemplary electronic device manufacturing system according to various aspects of the present disclosure.

Figure 1B

[0009] A schematic side view of an exemplary electronic device manufacturing system according to various aspects of the present disclosure.

Figure 1C

[0010] A front schematic view of an exemplary electronic device manufacturing system according to multiple aspects of the present disclosure.

Figure 2A

[0011] A front schematic view of an exemplary load port frame and seal assembly according to multiple aspects of the present disclosure.

Figure 2B

[0012] A perspective view of an exemplary load port frame and seal assembly according to multiple aspects of the present disclosure.

Figure 2C

[0013] A cross-sectional view of an exemplary seal assembly according to multiple aspects of the present disclosure.

Figure 3A

[0014] A cross-sectional view of an exemplary load port frame and seal assembly according to multiple aspects of the present disclosure.

Figure 3B

[0015] A perspective cross-sectional view of an exemplary load port frame and seal assembly according to multiple aspects of the present disclosure.

Figure 4A

[0016] A cross-sectional view of an exemplary load port door according to multiple aspects of the present disclosure.

Figure 4B

Figure 4C

[0017] A perspective view of an exemplary load port door according to multiple aspects of the present disclosure.

Figure 4D

Figure 5

[0018] A flowchart of a method for transporting a substrate from a substrate carrier to a factory interface according to multiple embodiments of the present disclosure. [[Embodiments for Carrying Out the Invention]] [

[0009] ]

[0019] The multiple embodiments described in this specification are directed to systems and methods related to seals for load ports. Some embodiments are directed to seals configured to be coupled to a load port door. Some embodiments are directed to a load port door having a seal. Some embodiments are directed to a load port including a door having a seal. A plurality of other embodiments are directed to seals that can be used for other components of a processing system, such as a side storage pod (SSP) or a front opening unified pod (FOUP). It should be understood that the multiple embodiments described in this specification in relation to seals for load port doors are also applicable to seals used for any other component, chamber, or device within a manufacturing system (e.g., within a semiconductor manufacturing system).

[0010]

[0020] Many conventional load ports do not include a seal at the interface between the load port door and the load port frame. Accordingly, conventional systems often experienced leakage around the load port door. A positive pressure can be maintained inside a factory interface (EFEM) coupled to the load port. Thereby, contaminants do not enter through the interface between the load port door and the load port frame. However, when such a positive pressure is maintained, gas leakage can increase the cost of using the factory interface. Alternatively, gas leakage through a conventional unsealed interface with the load port door can result in corrosion at the interface and lead to particle generation. The generated particles are introduced into both the substrate carrier (e.g., FOUP) and the factory interface, thereby contaminating conventional systems.

[0011]

[0021] Some conventional load ports may include a conventional O-ring seal (e.g., having a substantially circular cross-section) between the load port door and the frame of the load port. However, these conventional O-ring seals often rely on large forces to create an airtight seal. In many cases, the actuator of the load port door cannot provide the large forces that the conventional O-ring seals rely on. As an example, when a conventional O-ring seal is used, the actuator of the load port door will push the load port door against the load port frame. Thereby, the O-ring seal disposed between the load port door and the load port frame is sufficiently compressed to create an airtight seal. By including an actuator of the load port door that can provide sufficient force to seal using a conventional O-ring seal, it can lead to additional cost and weight of the system. Further, conventional load port doors often have complex shapes (e.g., having a rabbet around the edge of the door, etc.). This increases the manufacturing cost of the load port door due to the use of additional materials and additional machining performed. Further, conventional O-ring seals often cannot be included due to space constraints. However, conventional load port doors incorporating conventional O-ring seals often have a thick profile to accommodate the machined grooves for fixing the O-ring seals, increasing the weight and cost of the door.

[0012]

[0022] In some embodiments of the present disclosure, a load port includes a frame adapted to connect the load port to a factory interface. The frame includes a transfer port that enables one or more substrates to be conveyed therethrough between a substrate carrier and the factory interface. The load port includes a load port door on the factory interface side of the frame when the door is in the closed position, substantially filling the transfer port. The load port door is coupled to a door mechanism (e.g., an actuator operated by a load port controller). The door mechanism can position the load port door from the closed position to the open position and vice versa.

[0013]

[0023] The load port door includes a seal having a base portion, a sealing portion, and / or a retaining portion. The seal is configured to be coupled to a groove in the load port door via the base portion. The groove is formed by an end face of the load port door and may extend along an outer periphery of the load port door. The sealing portion of the seal may extend from the base portion. The sealing portion may create an airtight seal against a sealing surface of a frame of the load port when the door is closed (e.g., by a door mechanism). The sealing portion may create a seal in response to a force being applied to the sealing portion. The retaining portion of the seal may be substantially perpendicular to the base portion. The surface of the retaining portion may be pressed against an end face of the load port door in response to a force being applied to the sealing portion. The retaining portion may hold the base portion of the seal within the groove of the load port door when a force is applied to the sealing portion.

[0014]

[0024] By providing the seal of the present disclosure, many improvements can be realized. For example, the seal of the present disclosure provides a force smaller than the sealing force used for conventional O-ring seals to create an airtight seal between the load port door and the load port frame, reducing the force requirements of the door actuator and enabling the load port frame to be constructed of a less expensive material such as sheet metal. Further, the seal of the present disclosure reduces the leakage that existed in conventional systems by sealing the interface between the load port door and the load port frame, thus reducing material consumption (e.g., gas, etc.) and the amount of contaminants leaking around the load port door compared to conventional systems. The contaminants can remain in the system and be properly discharged. Further, by including a seal on the load port door, a sensing system (e.g., a laser beam, etc.) can detect the wafer present in the transfer opening of the load port frame without any interference from the seal (e.g., when the door is opened, the seal moves away with the door). Also, as a further improvement over conventional seals and systems, the retaining portion of the seal contributes to the seal remaining within the receiving groove of the load port door rather than "rolling out" of the groove when a force is applied to the sealing portion of the seal. Further, the retaining portion allows the seal to seat more loosely compared to conventional seals, thus improving the mounting attributes of the seal and making it easier to install the seal while still retaining itself within the groove of the load port door.

[0015]

[0025] FIGS. 1A-1C illustrate an electronic device manufacturing system 100. In that case, one or more load ports are coupled to a factory interface 106. FIG. 1A is a top schematic view of an exemplary electronic device manufacturing system 100 according to various aspects of the present disclosure. FIG. 1B is a side schematic view of an exemplary electronic device manufacturing system 100 according to various aspects of the present disclosure. FIG. 1C is a front schematic view of an exemplary electronic device manufacturing system 100 according to various aspects of the present disclosure. It should be noted that FIGS. 1A-1C are used for illustrative purposes and that various components may be arranged in various positions in relation to each figure.

[0016]

[0026] An electronic device manufacturing system 100 (also referred to as an electronic equipment processing system) is configured to execute one or more processes on a substrate 102. The substrate 102 can be any suitable rigid, dimensionally stable, planar article (e.g., a silicon-containing disk or wafer, a patterned wafer, a glass plate, etc.) suitable for manufacturing electronic devices or circuit components thereon.

[0017]

[0027] The electronic device manufacturing system 100 includes a process tool (e.g., a mainframe) 104 and a factory interface 106 coupled to the process tool 104. The process tool 104 includes a housing 108 having a transfer chamber 110 therein. The transfer chamber 110 includes one or more processing chambers (also referred to as process chambers) 114, 116, 118 disposed around and coupled to the transfer chamber 110. The processing chambers 114, 116, 118 can be coupled to the transfer chamber 110 via respective ports such as slit valves.

[0018]

[0028] The processing chambers 114, 116, 118 can be adapted to perform any number of processes on the substrate 102. In each of the processing chambers 114, 116, 118, the same or different substrate processes can be performed. A plurality of examples of substrate processes include atomic layer deposition (ALD), physical vapor deposition (PVD), chemical vapor deposition (CVD), etching, annealing, curing, pre-cleaning, removal of metals or metal oxides, etc. In one embodiment, a PVD process is performed in one or both of the processing chambers 114, an etching process is performed in one or both of the processing chambers 116, and an annealing process is performed in one or both of the processing chambers 118. Other processes can also be performed on the substrate within the processing chambers. The processing chambers 114, 116, 118 can each include a substrate support assembly. The substrate support assembly can be configured to hold the substrate in place while the substrate process is being performed.

[0019]

[0029] The transfer chamber 110 also includes a transfer chamber robot 112. The transfer chamber robot 112 may include one or more arms. In that case, each arm includes one or more end effectors at the end of each arm. The end effector may be configured to handle a specific object such as a wafer. Alternatively or additionally, the end effector is configured to handle an object such as a process kit ring. In some embodiments, the transfer chamber robot 112 is a selective compliance assembly robot arm (SCARA) robot such as a 2-link SCARA robot, a 3-link SCARA robot, or a 4-link SCARA robot.

[0020]

[0030] The load lock 120 may also be coupled to the housing 108 and the transfer chamber 110. The load lock 120 may be configured to interact with and be coupled to the transfer chamber 110 on one side and the factory interface 106 on the other side. In some embodiments, the load lock 120 may have an environmentally controlled atmosphere that changes from a reduced pressure environment (where the substrate is transferred in and out of the transfer chamber 110) to an inert gas environment at or near atmospheric pressure (where the substrate is transferred in and out of the factory interface 106). In some embodiments, the load lock 120 is a stacked load lock having a pair of upper internal chambers and a pair of lower internal chambers positioned at different vertical heights (e.g., one above the other). In some embodiments, the pair of upper internal chambers may be configured to receive from the transfer chamber 110 a processed substrate for removal from the processing tool 104. On the other hand, the pair of lower internal chambers is configured to receive a substrate from the factory interface 106 for processing within the processing tool 104. In some embodiments, the load lock 120 is configured to perform a substrate process (e.g., etching or pre-cleaning) on one or more received substrates 102.

[0021]

[0031] The factory interface 106 can be any suitable housing (e.g., an equipment front-end module (EFEM), etc.). The factory interface 106 can be configured to receive the substrate 102 from a substrate carrier 122 (e.g., a front-opening unified pod (FOUP)) docked to various load ports 124 of the factory interface 106. A factory interface robot 126 (shown in dashed lines) can be configured to transfer the substrate 102 between the substrate carrier (also called a container) 122 and the load lock 120. In other and / or similar embodiments, the factory interface 106 is configured to receive replacement parts from a replacement part storage container. The factory interface robot 126 can include one or more robot arms and can be or include a SCARA robot. In some embodiments, the factory interface robot 126 has more links and / or degrees of freedom than the transfer chamber robot 112. The factory interface robot 126 can include an end effector on the end of each robot arm. The end effector can be configured to pick up and handle a specific object such as a wafer. Alternatively or additionally, the end effector can be configured to handle an object such as a process kit ring. Any conventional type of robot can be used as the factory interface robot 126. The transfer can be performed in any order or in any direction. In some embodiments, the factory interface 106 can be maintained, for example, in a slightly positive pressure non-reactive gas environment (e.g., using nitrogen, other inert gas, or air with controlled sub-component parameters as the non-reactive gas).

[0022]

[0032] The factory interface 106 can be configured with any number of load ports 124. Any number of load ports 124 can be arranged on one or more sides of the factory interface 106 at the same or different heights. One or more load ports 124 can include a load port door of a design that includes a seal having a base portion, a sealing portion, and / or a holding portion, as described herein. Such seals and load ports of this design will be described in more detail with respect to FIGS. 2A - 2C, FIGS. 3A - 3B, and FIGS. 4A - 4D.

[0023]

[0033] The factory interface 106 can include one or more auxiliary components (not shown). Auxiliary components can include, for example, a substrate storage container, measuring equipment, a server, an air conditioning unit, etc. The substrate storage container can store, for example, substrates and / or substrate carriers (e.g., FOUPs). Measuring equipment can be used to measure characteristic data of products produced by the electronic device manufacturing system 100. In some embodiments, as seen in FIGS. 1B - 1C, the factory interface 106 can include an upper section 160. The upper section 160 can house an electronic system (e.g., a server, an air conditioning unit, etc.), utility cables, the system controller 128, or other components.

[0024]

[0034] In some embodiments, the transfer chamber 110, the process chambers 114, 116, and 118, and / or the load lock 120 are maintained at a reduced pressure level. The electronic equipment processing system 100 can include one or more vacuum ports coupled to one or more stations of the electronic device manufacturing system 100. For example, a first vacuum port 130a can couple the factory interface 106 to the load lock 120. A second vacuum port 130b can be coupled to the load lock 120 and arranged between the load lock 120 and the transfer chamber 110.

[0025]

[0035] The electronic device manufacturing system 100 may also include a system controller 128. The system controller 128 is a computing device and / or may include a computing device such as a personal computer, a server computer, a programmable logic controller (PLC), a microcontroller, etc. The system controller 128 may include one or more processing devices that may be general-purpose processing devices such as a microprocessor or a central processing unit. More specifically, the processing device may be a complex instruction set computing (CISC) microprocessor, a reduced instruction set computing (RISC) microprocessor, a very long instruction word (VLIW) microprocessor, or a processor that implements other instruction sets or a combination of instruction sets. The processing device may also be one or more dedicated processing devices such as an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), a digital signal processor (DSP), a network processor, etc. The system controller 128 may include a data storage device (e.g., one or more disk drives and / or solid state drives), main memory, static memory, a network interface, and / or other components. The system controller 128 may execute instructions for performing any one or more of the methods and / or embodiments described herein. The instructions may be stored in a computer-readable storage medium that may include main memory, static memory, secondary storage, and / or the processing device (during execution of the instructions). The system controller 128 may include an environmental controller configured to control the environment (e.g., pressure, humidity, vacuum level, etc.) within the factory interface 106. In a plurality of embodiments, execution of instructions by the system controller 128 causes the system controller to perform one or more of the methods of FIG. 5. The system controller 128 may also be configured to permit input and display of data, operation commands, etc. by a human operator.

[0026]

[0036] Figures 2A - 2C illustrate an exemplary load port and seal assembly 200 according to certain embodiments of the present disclosure. FIG. 2A is a front schematic view of a load port and seal assembly 200 according to embodiments of the present disclosure. FIG. 2B is a perspective view of a load port and seal assembly 200 according to embodiments of the present disclosure. FIG. 2C is a cross - sectional view of a seal 220 as indicated by section A - A230. In some embodiments, the exterior of the load port frame 224 (or any other load port frame described herein) may comply with SEMI (Semiconductor Equipment and Materials International) standards and requirements.

[0027]

[0037] The load port door 210 can be positioned in a closed position fixed to the transfer port to maintain an environmentally controlled atmosphere within the factory interface 106. The load port door can be positioned in an open position using a door mechanism. While in the open position, the transfer port within the assembly 200 enables a substrate (e.g., a wafer) to be transferred between a substrate carrier 122 coupled to the load port 124 and the factory interface 106 using the factory interface robot 126.

[0028]

[0038] Seal 220 can be disposed around load port door 210. In some embodiments, the seal has the following shape dimensions. That is, the base portion 222 of the seal is coupled to the load port door 210, and the surface of the sealing portion 223 extending from the base portion 222 contacts the surface (e.g., the sealing surface) of the load port frame 224 (depending on the load port door being in the closed position). In some embodiments, the sealing portion 223 projects cantilevered from the base portion 222. Seal 220 can create an airtight seal when the load port door 210 is in the closed position. In some examples, the surface of the sealing portion 223 near the distal end of the seal 220 engages the sealing surface of the load port frame 224 to create an airtight seal. The base portion 222 can form a seal against the load port door 210. When the load port door 210 is in the closed position, the load port door 210 applies a force (e.g., a threshold sealing force) to the seal 220, and the load port frame 224 can apply a reaction force 227 to the sealing portion 223 of the seal 220. In some embodiments, the load port door 210 moves to the closed position when a force is applied (e.g., by a door actuator). In some embodiments, the force (e.g., load) applied to the seal 220 during sealing (e.g., when the door is closed) is perpendicular to the surface where the seal contacts the load port door (e.g., as shown in FIG. 2C). Such a perpendicular force can cause the seal to disengage from the load port door. In some embodiments, the seal 220 is configured to remain engaged with the load port door even under sealing conditions where the sealing force is perpendicular to the connection between the load port door and the seal.

[0029]

[0039] In some embodiments, the seal 220 is a piece of material such as, for example, vulcanized rubber or any other type of elastomer. The seal 220 can be composed of a flexible elastomeric material. Those skilled in the art will understand that other suitable materials can be used, such as natural rubber, silicone, plastic, other synthetic rubbers, polymers, foamed foams, etc. In some embodiments, the seal 220 can be composed of a plurality of components joined together. In some examples, the base portion 222 can be composed of a first material, the sealing portion 223 and the retaining portion 226 can be composed of a second material, and can be adhered and / or joined to the base portion 222. In some embodiments, at least a portion of the seal 220 can be composed of a plastic material. In some embodiments, the seal 220 is extruded or molded.

[0030]

[0040] The retaining portion 226 of the seal 220 can be disposed proximate to the base portion 222. In some embodiments, the retaining portion 226 is a protrusion that protrudes substantially perpendicular to the base portion 222. The retaining portion 226 can be disposed toward the distal end of the seal, but can be disposed proximate to the base portion 222. The retaining portion 226 can include rounded corners. In some embodiments, the seal 220 includes rounded corners between the retaining portion 226 and the base portion 222. In some embodiments, the seal 220 includes rounded corners where the sealing portion 223 extends from the retaining portion 226. The retaining portion 226 can cause the seal to remain connected to the load port door under sealing conditions (e.g., a sealing force is applied to create an airtight seal). Further details regarding the function of the retaining portion 226 are described with reference to FIG. 3A.

[0031]

[0041] In some embodiments, the seal 220 may have an overall height between approximately 10 mm and 15 mm. The base portion 222 may have a height between approximately 1.5 mm and 2.5 mm. In some embodiments, the seal 220 may have a non-flexed width (e.g., width in a natural state) between approximately 6 mm and 10 mm. The seal 220 may flex to a narrower width when a sealing force is applied (e.g., to the sealing portion 223). In some embodiments, the sealing portion 223 may have a width between approximately 1 mm and 2 mm. In some embodiments, the sealing portion 223 may become wider closer to the base portion 222 and narrower closer to the distal end. The sealing portion 223 may gradually become thinner as it moves away from the base portion 222. In many embodiments, the base portion 222 is configured to fit into a conventional groove (e.g., a dovetail groove, a grooved slot, a square groove, etc.). The surface of the base portion 222 may have a radius that fits into a dovetail groove. In some embodiments, the base portion 222 may be configured to substantially fill the groove but not perfectly fit into the groove (see, e.g., FIG. 3A). The base portion 222 may include rounded corners. The base portion 222 may have a width between approximately 2.5 mm and 4 mm. In some embodiments, the neck portion (e.g., the narrow section of the base portion 222) of the base portion 222 may have a width between approximately 2 mm and 3.5 mm. One of ordinary skill in the art will understand that the seal 220 may have dimensions different from those described herein to fit a particular application.

[0032]

[0042] FIGS. 3A and 3B show an exemplary load port frame and seal assembly 300 according to various aspects of the present disclosure. FIG. 3A is a cross-sectional view of an exemplary load port frame and seal assembly 300. FIG. 3B is a perspective view of the assembly 300. The assembly 300 includes a first component (e.g., a load port door 210), a seal 220, and a second component (e.g., a load port frame 224). As shown, the load port door 210 is in a closed position, and the seal 220 creates an airtight seal between the sealing surface 224A of the load port frame 224 and the end surface 210A of the load port door 210.

[0033]

[0043] In some embodiments, the end face 210A can be at an angle with respect to the sealing face 224A. As shown, the end face 210A is substantially perpendicular to the sealing face 224A. The load port door 210 can be movable relative to the load port frame 224. A door actuator (not shown) can move the load port door 210 between a closed position and an open position. The load port door 210 can be shown in the closed position. To move to the open position, the load port door 210 can move away from the load port frame 224 to the left (as shown) and then move down (as shown) to open the conveyance port. The door actuator can apply a force to the load port door 210 to move it to the closed position. The sealing portion 223 of the seal 220 can be pressed against the load port frame 224 in response to the load port door 210 moving to the closed position. (For example, by the door actuator, by the load port frame 224, etc.) An airtight seal can be created by the seal 220 in response to a threshold force being applied to the sealing portion 223.

[0034]

[0044] The sealing surface 224A of the load port frame 224 can apply a reaction force 227 to the surface of the sealing component 223. The reaction force 227 is perpendicular to the plane of the sealing surface 224A and can be substantially equivalent to the threshold sealing force. The threshold sealing force can be applied substantially parallel to the plane of the end face 210A. In some embodiments, in order to create an airtight seal, the applied sealing force is a force between approximately 50 and 210 Newtons. In some embodiments, the applied sealing force is between approximately 70 and 130 Newtons. In some embodiments, the applied sealing force is less than the maximum force that can be applied to the load port door 210 by a door actuator (not shown). A sealing force greater than the threshold sealing force can be applied to create an airtight seal. In some embodiments, at least a portion of the seal 220 can flex when the sealing force is applied. The airtight seal can inhibit the flow of fluids (e.g., gas, air, nitrogen, etc.) and contaminants (e.g., particles, etc.) across the interface between the load port door 210 and the load port frame 224.

[0035]

[0045] In some embodiments, a portion of the end face 210A applies a reaction force 228 to the surface of the holding portion 226 of the seal 220. The reaction force 228 can be perpendicular to the end face 210A. The reaction force 228 can be applied in response to the moment about the axis of the seal 220 created by the reaction force 227. The reaction force 228 can then cause a reaction force 229 to be applied to the surface of the base portion 222 of the seal 220. In some embodiments, the reaction force 229 can result in the base portion 222 being held within the groove 214 of the load port door 210. In some embodiments, the base portion 222 can be held within the groove 214 of the load port door 210 by the elastic properties of the seal 220. In some examples, the seal 220 is elastically stretched and contracted so as to conform around the load port door 210 and the base portion 222 seats within the groove 214. The elastic properties of the seal 220 can result in the base portion 222 being held within the groove 214. The groove 214 can be a full groove, a semi - full groove, or a square groove. The downward vertical component of the reaction force 229 on the base portion 222 (as shown) contributes to the base portion 222 remaining within the groove 214, thereby allowing the seal 220 to remain coupled to the load port door 210 when a sealing force is applied to the sealing portion 223. In some embodiments, a deeper groove can help hold the seal 220 within the groove 214. In many embodiments, the sum of the reaction forces 227, 228, 229 and the sealing force applied to the sealing portion 223, and the sum of any moments about the axis of the seal 220 created by those forces, are a net zero force and moment.

[0036]

[0046] Figures 4A and 4B are cross - sectional views of an exemplary load port door 210 according to various aspects of the present disclosure. Figures 4C and 4D are perspective views of an exemplary load port door 210 according to various aspects of the present disclosure. Figure 4A shows a cross - section of the groove 214A. Figure 4B shows a cross - section of the groove 214B.

[0037]

[0047] In some embodiments, groove 214A is a through-groove formed within end face 210A. Groove 214A can be configured to receive base portion 222 of seal 220. In some embodiments, groove 214A can be a joint portion for coupling seal 220 to load port door 210. Groove 214A can include two side walls 217 and one bottom wall.

[0038]

[0048] In some embodiments, groove 214A can be machined (e.g., by a machining tool such as a milling machine) along a linear section (e.g., a straight or non-curved portion) of the outer periphery of load port door 210 (see, e.g., FIGS. 4C and 4D). Groove 214A can be machined by a through-groove milling machine. Due to the nature of the through-groove milling machine (e.g., wider at the bottom than at the top), the through-groove may not be able to machine a profiled rounded (e.g., along a curved surface). Thus, in some embodiments, rectangular groove 214B (e.g., substantially square, not a through-groove, etc.) can be machined along a curved section (e.g., a curved portion or a rounded corner) of the outer periphery of load port door 210 (see, e.g., FIGS. 4C and 4D). In some examples, groove 214B can be machined in a curved (e.g., rounded) section of end face 210A of load port door 210. Groove 214B can be machined by a conventional milling machine. In some embodiments, groove 214B is configured to receive base portion 222 of seal 220. In some embodiments, grooves 214A and 214B are configured to receive O-rings of standard sizes common in the industry. A transition zone 216 can be included within end face 210A where groove 214A meets groove 214B. Transition zone 216 can be a milling plunge zone where the through-groove milling machine starts and / or ends the machining of through-groove 214.

[0039]

[0049] In some embodiments, grooves 214A and 214B have substantially the same depth. In some examples, grooves 214A and 214B have a depth between approximately 1.5 mm and 2.5 mm. In some embodiments, throat 213 of groove 214A may have a width between approximately 2.2 mm and 3.5 mm. In some embodiments, throat 215 of groove 214B may have a width between approximately 3 mm and 4 mm. In some embodiments, the width of throat 215 is wider than the width of throat 213. In some embodiments, the maximum width of groove 214A is greater than the depth of groove 214A. In some embodiments, sidewall 217 of groove 214A forms an angle with end face 210A. In some examples, sidewall 217 and end face 210A form an angle between approximately 45 degrees and 80 degrees. In some examples, at least one sidewall forms an angle with end face 210A. In some embodiments, the sidewalls of groove 214B are substantially perpendicular to end face 210A. It will be understood by those skilled in the art that grooves 214A and 214B may have dimensions different from those described herein to suit a particular application.

[0040]

[0050] FIG. 5 is a flowchart of a method 500 for transporting a substrate from a substrate carrier to a factory interface according to multiple embodiments of the present disclosure. In some embodiments, method 500 is executed and / or caused to be executed by processing logic that includes hardware (e.g., circuits, dedicated logic, programmable logic, microcode, processing devices, etc.), software (e.g., instructions executed by a processing device, a general-purpose computer system, or a dedicated machine), firmware, microcode, or combinations thereof. In some embodiments, method 500 is at least partially executed by an electronic device manufacturing system (e.g., the electronic device manufacturing system 100 of FIGS. 1A-1C).

[0041]

[0051] For simplicity of explanation, method 500 is depicted and described as a series of steps. However, the various steps according to the present disclosure may be performed in various orders and / or simultaneously, and may be performed with other operations not presented or described herein. Further, in some embodiments, not all of the illustrated steps are performed to implement method 500 in accordance with the disclosed subject matter. Additionally, those skilled in the art will understand and appreciate that method 500 may alternatively be represented as a series of interrelated states via a state diagram or events.

[0042]

[0052] At block 510, the load port receives a substrate carrier. In some examples, the substrate carrier is a FOUP. In some embodiments, the load port includes a frame adapted to connect the load port to a factory interface. The frame includes a transfer opening that enables one or more substrates to be transferred therethrough between the substrate carrier and the factory interface. The load port also includes an actuator coupled to the frame and a load port door coupled to the actuator. The load port door may be configured to seal the transfer opening. The actuator can position the load port door from a closed position to an open position and from the open position to the closed position.

[0043]

[0053] The load port door may include one or more seals coupled to an end face of the load port door. The seal may include a base portion, a sealing portion extending from the base portion, and a retaining portion protruding substantially perpendicular to the base portion. The sealing portion may be configured to engage a sealing surface of the load port frame in response to a threshold sealing force being applied to the sealing portion to create an airtight seal between the load port door and the load port frame when the load port door is in the closed position. The base portion may be configured to be coupled to the load port door via a groove formed within the end face of the load port door.

[0044]

[0054] In block 520, the substrate carrier can be arranged such that the front portion of the substrate carrier is aligned with the opening (e.g., the transfer port) of the load port frame.

[0045]

[0055] In block 530, the load port door disposed within the opening can be opened (e.g., via a door actuator). The load port door can be moved away from the opening (e.g., by a door actuator) such that a seal coupled to the load port door is disengaged from the sealing surface of the load port frame. Subsequently, the door can be lowered away from the opening.

[0046]

[0056] In block 540, a factory interface robot disposed within the factory interface can remove the substrate from the substrate carrier.

[0047]

[0057] In block 550, when the substrate is removed, the load port door can be arranged from the open position to the closed position using an actuator. Thereby, a seal coupled to the load port door engages the sealing surface of the load port frame to form an airtight seal. The actuator can apply a sealing force greater than the threshold sealing force to the load port door. Thereby, the seal can create an airtight seal between the load port door and the load port frame.

[0048]

[0058] The foregoing description sets forth numerous specific details, such as examples of specific systems, components, methods, etc., in order to provide a good understanding of several embodiments of the present disclosure. However, it will be apparent to those skilled in the art that at least some embodiments of the present disclosure can be practiced without these specific details. In other instances, well-known components or methods are not described in detail or are presented in a simple block diagram format in order to avoid unnecessarily obscuring the present disclosure. Accordingly, the specific details described are merely illustrative. Specific embodiments can be considered to be within the scope of the present disclosure even if they differ from these illustrative details.

[0049]

[0059] Throughout this specification, references to "one embodiment" or "an embodiment" mean that the particular features, structures, or characteristics described in connection with the embodiment are included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Additionally, the term "or" is intended to mean an inclusive "or" rather than an exclusive "or". When the terms "about" or "substantially" are used in this specification, it is intended to mean that the recited nominal value is accurate within ±10%.

[0050]

[0060] The operations of the methods in this specification are illustrated and described in a particular order, but the order of operations of each method may be changed such that certain operations are performed in the reverse order and certain operations are at least partially performed concurrently with other operations. In another embodiment, the instructions or sub-operations for distinct operations may be intermittent and / or alternating.

[0051]

[0061] It should be understood that the above description is intended to be illustrative and not restrictive. Many other embodiments will be apparent to those of ordinary skill in the art upon reading and understanding the above description. Accordingly, the scope of the disclosure should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.

Claims

1. A base portion configured to couple to a groove formed by an end face of a first component, A sealing portion extending from the base portion, the sealing portion being configured to create an airtight seal between a sealing surface of the first component and a second component in response to a threshold sealing force being applied to the sealing portion, and A holding portion substantially perpendicular to the base portion, the surface of the holding portion being configured to press against the end face of the first component in response to the threshold sealing force being applied to the sealing portion, a seal comprising the holding portion.

2. The end face of the first component is substantially perpendicular to the sealing surface of the second component, and the first component is movable relative to the second component, the seal according to claim 1.

3. At least the sealing portion of the seal comprises a flexible elastomer material, the seal according to claim 1.

4. The first component is a load port door of a factory interface, the second component is a frame of a load port having an opening for receiving the load port door, and in response to the threshold sealing force being applied to the sealing portion, the load port door moves to a closed position, and the threshold sealing force is applied substantially parallel to a plane of the end face of the first component, the seal according to claim 1.

5. The threshold sealing force is from approximately 50 to 210 Newtons, the seal according to claim 1.

6. The holding portion is configured to generate a moment about an axis of the seal in response to the threshold sealing force being applied to the sealing portion, and the base portion is configured such that a reaction force against a surface of the base portion holds the base portion within the groove, the seal according to claim 1.

7. At least a portion of the groove formed by the end face of the first component is a dovetail groove having two side walls and one bottom wall, a maximum width between the two side walls being greater than a depth of the dovetail groove, and at least one side wall forming an angle of approximately 45 to 80 degrees with respect to the bottom wall, the seal according to claim 1.

8. A load port door, An inner surface, An outer surface, The end face including a groove formed within the end face, and comprising a seal coupled to the groove, the seal comprising: a base portion configured to couple to the groove; a sealing portion extending from the base portion and configured to create an airtight seal between the load port door and a sealing surface of a frame of the load port in response to a threshold sealing force being applied to the sealing portion; and a retaining portion substantially perpendicular to the base portion, the surface of the retaining portion being configured to be pressed against the end face in response to the threshold sealing force being applied to the sealing portion, a load port door comprising the retaining portion. **Claim 9** The load port door according to claim 8, wherein the end face of the load port door is configured to be substantially perpendicular to the sealing surface of the frame of the load port, and the load port door is configured to be movable relative to the frame of the load port. **Claim 10** The load port door according to claim 8, wherein at least the sealing portion of the seal comprises a flexible elastomeric material. **Claim 11** The load port door according to claim 8, wherein the threshold sealing force is from approximately 50 to 210 Newtons, and the threshold sealing force is applied substantially parallel to a plane of the end face. **Claim 12** The load port door according to claim 8, wherein the retaining portion of the seal is configured to generate a moment about an axis of the seal in response to the threshold sealing force being applied to the sealing portion of the seal, and the base portion of the seal is configured such that a reaction force against a surface of the base portion of the seal retains the base portion within the groove. **Claim 13** The load port door according to claim 8, wherein at least a portion of the groove is a dovetail groove having two side walls and one bottom wall, a maximum width between the two side walls being greater than a depth of the dovetail groove, and at least one of the side walls forming an angle of approximately 45 to 80 degrees with respect to the bottom wall. **Claim 14** The load port door according to claim 8, wherein the groove is formed within the end face along an outer periphery of the load port door, the groove being a dovetail groove along at least a linear portion of the end face, and the groove being a substantially rectangular groove along at least a curved portion of the end face. **Claim 15** A load port for receiving a substrate carrier, comprising: A frame adapted to connect the load port to a factory interface, the frame comprising a transfer port through which one or more substrates can be transferred between the substrate carrier and the factory interface. A load port door configured to substantially fill the transfer port, the load port door including an end face forming a groove, and A seal coupled to the groove formed in the end face of the load port door, the seal comprising: A base portion to which the seal is coupled to the groove of the load port door via the base portion, A sealing portion extending from the base portion, the sealing portion being configured to create an airtight seal between the load port door and a sealing surface of the frame in response to a threshold sealing force being applied to the sealing portion, and A holding portion substantially perpendicular to the base portion, the surface of the holding portion being configured to be pressed against the end face of the load port door in response to the threshold sealing force being applied to the sealing portion, a load port comprising the holding portion.

16. The end face of the load port door is configured to be substantially perpendicular to the sealing surface of the frame, the load port door is configured to be movable relative to the frame of the load port, and the seal is configured to engage the sealing surface of the frame when the load port door is in a closed position. The load port according to claim 15.

17. The holding portion of the seal is configured to generate a moment about the axis of the seal in response to the threshold sealing force being applied to the sealing portion of the seal, and the base portion of the seal is configured such that a reaction force against the surface of the base portion of the seal holds the base portion in the groove of the load port door. The load port according to claim 15.

18. At least a portion of the groove of the load port door is a groove having two side walls and one bottom wall, the maximum width between the two side walls being greater than the depth of the groove, and at least one side wall forming an angle of approximately 45 to 80 degrees with respect to the bottom wall. The load port according to claim 15.

19. The groove of the load port door is formed in the end face of the load port door along the outer periphery of the load port door, the groove is a caulking groove along at least a linear portion of the end face of the load port door, and the groove is a substantially rectangular groove along at least a curved portion of the end face of the load port door. The load port according to claim 15.

20. The threshold sealing force is approximately 50 to 210 Newtons, and the threshold sealing force is applied substantially parallel to the plane of the end face of the load port door. The load port according to claim 15.

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