Atomic Layer Deposition Part Coating Chamber

Abstract

Embodiments of a part coating reactor are presented herein. In some embodiments, the part coating reactor includes a lid assembly and a blocker plate. The lid assembly includes a body having a central region and a peripheral region. The body includes a central opening in the central region, a first annular heater groove disposed radially outward of the central opening, and a second annular heater groove disposed radially outward of the first annular heater groove. The peripheral region also includes a plurality of vertical slots extending from an upper surface of the body, and a lower surface of the body includes an annular alignment groove. The blocker plate includes a substantially flat plate with a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, the upper surface of the annular wall being disposed within the annular alignment groove of the body.

Description

[Technical Field]

[0001] TECHNICAL FIELD

[0001] Embodiments of the present disclosure generally relate to substrate processing equipment. [Background technology]

[0002] Many manufacturing processes for microelectronic devices are performed in reactors with coated parts or components. Such coated components can provide one or more benefits, such as reduced contamination of substrates placed in the reactor during processing, improved process results, and improved chamber uptime before maintenance is required. The inventors have recognized that the cost of coating reactor components, such as gas distribution faceplates and showerheads, can be prohibitive. For example, such components are traditionally coated in batch reactors capable of holding, for example, approximately two to eight faceplates per batch. However, the coating process can take approximately three to eight days per batch, depending on the specific component configuration and the desired coating applied. Thus, despite the benefits of being able to coat multiple components at once, the unit cost of such coated components remains high.

[0003] Accordingly, the present inventors have provided improved apparatus and techniques for coating process reactor components. Summary of the Invention

[0004]

[0004] Embodiments of a part coating reactor are presented herein. In some embodiments, the part coating reactor includes a lid assembly and a blocker plate. The lid assembly includes a body including a central region and a peripheral region, the body including a central opening in the central region, a first annular heater groove disposed radially outward of the central opening, and a second annular heater groove disposed radially outward of the first annular heater groove, the peripheral region including a plurality of vertical slots extending from an upper surface of the body, the body including an annular gas feed groove extending from an upper surface of the body, an annular purge gas groove extending from a floor of the annular gas feed groove, and a plurality of gas feed openings extending from the purge gas groove to a lower surface of the body, the lower surface of the body including an annular alignment groove, a first heater ring disposed within the first annular heater groove and having one or more heating elements disposed therein, and a second heater ring disposed within the second annular heater groove and having one or more heating elements disposed therein. The blocker plate also includes a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, with the upper surface of the annular wall positioned within the annular alignment groove in the body.

[0005] In some embodiments, a part coating reactor includes a lid assembly, a cap, a bottom lid, a blocker plate, and a liner. The lid assembly includes a body having a central region and a peripheral region. The body includes a central opening in the central region, a first heater ring disposed in a first annular heater groove disposed radially outward of the central opening, and a second heater ring disposed in a second annular heater groove disposed radially outward of the first annular heater groove. The peripheral region includes a plurality of vertical slots extending from an upper surface of the body. The body includes an annular gas feed groove extending from an upper surface of the body, an annular purge gas groove extending from a floor of the annular gas feed groove, and a plurality of gas feed openings extending from the purge gas groove to a lower surface of the body. The cap is disposed within the annular gas feed groove to define a first plenum within the annular gas feed groove and includes one or more gas inlet holes. The bottom lid is coupled to the lid assembly to enclose and define an interior space of the part coating reactor. The blocker plate is disposed in the interior space adjacent to the lid assembly and includes a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, the blocker plate and the lid assembly defining a mixing plenum therebetween. The liner is disposed around the blocker plate and is connected to the body.

[0006] In some embodiments, a processing chamber includes a lid assembly, a cap, a cover plate, a bottom lid, a blocker plate, a liner, and a pedestal heater. The lid assembly includes a body having a central region and a peripheral region. The body includes a central opening in the central region, a first heater ring disposed in a first annular heater groove disposed radially outward of the central opening, and a second heater ring disposed in a second annular heater groove disposed radially outward of the first annular heater groove. The peripheral region includes a plurality of vertical slots extending from an upper surface of the body. The body includes an annular gas supply groove extending from an upper surface of the body, an annular purge gas groove extending from a floor of the annular gas supply groove, and a plurality of gas supply openings extending from the purge gas groove to a lower surface of the body. A cap is disposed in the annular gas supply groove to cover the annular purge gas groove and includes one or more gas inlet holes. A cover plate is disposed over the first heater ring and the second heater ring. The bottom lid is coupled to the lid assembly to surround and define an interior space of the processing chamber. The blocker plate is disposed in the interior space adjacent to the lid assembly and includes a substantially flat plate with a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, the blocker plate and the lid assembly defining a mixing plenum therebetween. The liner is disposed around the blocker plate and coupled to the body, and has a plurality of slots. The pedestal heater is disposed in the interior space.

[0007]

[0007] Other and further embodiments of the present disclosure are also described below.

[0008]

[0008] Embodiments of the present disclosure, briefly summarized above and discussed in more detail below, can be understood by reference to the exemplary embodiments of the present disclosure that are illustrated in the accompanying drawings. However, because the present disclosure may admit of other equally effective embodiments, the accompanying drawings depict only typical embodiments of the present disclosure and therefore should not be considered limiting in scope. [Brief explanation of the drawings]

[0009] [Figure 1]

[0009] FIG. 1 is a schematic side view of a part coating system according to at least some embodiments of the present disclosure. [Figure 2]

[0010] FIG. 1 is a schematic cross-sectional side view of a portion of a part coating reactor according to at least some embodiments of the present disclosure. [Figure 3]

[0011] FIG. 1 is a cross-sectional view of a portion of a lid assembly according to at least some embodiments of the present disclosure. [Figure 4]

[0012] FIG. 1 is a top isometric view of a lid assembly according to at least some embodiments of the present disclosure. [Figure 5]

[0013] FIG. 10 is a top isometric view of a lid assembly with a cover plate according to at least some embodiments of the present disclosure. [Figure 6]

[0014] FIG. 10 is a bottom isometric view of a lid assembly according to at least some embodiments of the present disclosure. [Figure 7]

[0015] FIG. 1 is an isometric view of a cap according to at least some embodiments of the present disclosure. [Figure 8]

[0016] FIG. 1 is an isometric view of a blocker plate according to at least some embodiments of the present disclosure. [Figure 9]

[0017] FIG. 1 is an isometric view of an outer liner according to at least some embodiments of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0010]

[0018] For ease of understanding, the same reference numerals have been used, where possible, to designate identical elements common to the figures. The figures are not drawn to scale and may be simplified for clarity. Elements and features of one embodiment may be beneficially incorporated in other embodiments without further description.

[0011]

[0019] Embodiments of a part coating reactor are presented herein. In some embodiments, the part coating reactor is configured to deposit material on a part using an atomic layer deposition (ALD) process. The disclosed methods and apparatus advantageously reduce the cycle time and cost of producing coated parts by orders of magnitude.

[0012]

[0020] FIG. 1 is a schematic side view of a part coating system 100 in accordance with at least some embodiments of the present disclosure. As shown in FIG. 1 , the part coating system 100 is shown having a part coating reactor 102 disposed on a support 104. The support 104 is illustratively shown as including a frame assembly 106. While the frame assembly 106 is shown having wheels, alternatively or additionally, the frame assembly 106 can include leveling feet, stabilizing brackets, or other elements to support the part coating reactor 102. In some embodiments, the frame assembly 106 may be omitted, and the part coating reactor 102 can be disposed on another type of support 104, such as by resting or mounting on another component, such as a base, a transfer chamber of a cluster tool, or a part handling system for feeding and retrieving parts to and from the part coating reactor 102.

[0013]

[0021] A cover 138 may be provided to enclose the part coating reactor 102. The cover 138 may be disposed on the support 104 or otherwise coupled to the part coating reactor 102. The cover 138 may include a plurality of openings to facilitate air flow for cooling the part coating reactor 102. A fan 140 may be provided to enhance air cooling external to the part coating reactor 102.

[0014]

[0022] The part coating reactor 102 generally includes a lower body 108 and a lid assembly 110, which together define and enclose an interior space 112. The interior space may be small, e.g., about 1 to about 1.5 liters. The lower body 108 and the lid assembly 110 may each include a cavity formed in opposing surfaces of the components that, when assembled together, together define the interior space 112. For example, the lower body 108 may include a bottom plate 182 and a sidewall 184 extending upwardly from the bottom plate 182 and partially enclosing the interior space 112. Similarly, the lid assembly 110 may include a top plate 178 and a sidewall 180 extending downwardly from the top plate 178 and partially enclosing the interior space 112. In some embodiments, each of the sidewalls 180, 184 may have the same or substantially the same dimensions that define the interior space 112 (e.g., diameter in the case of a circular chamber configuration). In some embodiments, the dimension (e.g., inner diameter) across the interior space 112 within the side walls 180, 184 is about 14 to about 20 inches. In some embodiments, the lid assembly 110 and lower body 108 may be coupled together, for example, by clamping, bolting, screwing, etc. A lift system (not shown) may be provided to raise the lid assembly 110 to facilitate loading and unloading of workpieces to be coated, or for other maintenance or work requiring access to the interior space 112. The lid assembly 110 and lower body may be made from any suitable process-compatible material, such as aluminum, stainless steel, etc.

[0015]

[0023] The lid assembly 110 includes one or more heaters 132. The one or more heaters 132 may be coupled to a heater power supply 160. In some embodiments, the one or more heaters 132 include ring-shaped heaters disposed within an annular channel in the top surface of the lid assembly 110 (e.g., in the top surface of the top plate 178). A thermostat 162 may be disposed within or coupled to the lid assembly 110 to monitor the temperature of the lid assembly 110 and, in some embodiments, to facilitate feedback control of the temperature during use. The thermostat 162 may be provided in any suitable location for monitoring the temperature of the lid assembly 110, such as on a side of the lid assembly 110 (shown in FIG. 1) or on the top surface of the lid assembly 110 (shown in FIG. 2).

[0016]

[0024] In some embodiments, at least one of the lower body 108 or the lid assembly 110 may be provided with one or more coolant channels 134 for flowing a heat transfer medium. For example, a coolant source 142 may be coupled to the one or more coolant channels 134 to circulate the coolant. In some embodiments, the one or more coolant channels 134 are disposed only within the lower body 108 and not within the lid assembly 110. In some embodiments, the coolant source 142 and the coolant channels 134 are configured to maintain the temperature of the lid assembly 110 at about 50 to about 75°C.

[0017]

[0025] In some embodiments, the lid assembly 110 is provided with a plurality of gas passages 136 to facilitate supplying one or more gases to the interior space 112 of the part coating reactor 102. A gas source 114 is fluidly connected to the interior space 112 via a plurality of conduits 116 coupled to the plurality of gas passages 136 to supply process gases to the interior space 112 during processes such as an ALD process for coating a workpiece (or part) disposed within the interior space 112, as described below. For example, the gas source may include precursor ampoules, one or more inert gases or purge gases, as well as fast-pulsing valves, purge valves, etc., to supply deposition gases, carrier gases, purge gases, etc. for performing an ALD process to coat the workpiece. For example, a first conduit 118, a second conduit 120, and a third conduit 122 may be provided as shown in FIG. 1 to supply three different gases, such as a first precursor, a second precursor, and an inert gas, to the interior space 112. The first conduit 118, the second conduit 120, and the third conduit 122 can be coupled to the interior space 112 through the lid assembly 110, for example, through a plurality of gas passages 136 and / or through a central opening 121 (discussed in detail below). The gas source can be a purge gas source.

[0018]

[0026] In one non-limiting example, the coating formed can be an aluminum oxide (Al2O3) coating. In such an embodiment, for example, the gas source can be configured to supply a deposition gas (e.g., precursor gas) including trimethylaluminum (TMA) and water (HO) along with an inert gas, such as nitrogen (N2) or a noble gas, e.g., argon (Ar). Other ALD deposited films can be obtained as well, including, but not limited to, films having basic formulas such as MOx, MOxFy, MFx, SiOx, SiCx, SiN, and M1M2Ox, where M is a metal, M1 is a first metal, and M2 is a second metal different from the first metal. Such films can be deposited using appropriate ALD precursors and deposition processes in the apparatus described herein.

[0019]

[0027] In some embodiments, the part coating reactor 102 is configured to deliver one or more process gases in a distributed manner. For example, in some embodiments, the part coating reactor 102 is configured to deliver one or more process gases to multiple zones of the interior space 112. For example, the lid assembly 110 can include multiple fluidly independent plenums, each coupled to a gas source 114. Each of the fluidly independent plenums is configured to deliver one or more process gases to a specific zone of the interior space 112, at least some of the specific zones being different from one another. The fluidly independent plenums advantageously provide gas separation to prevent undesired reactions and / or deposition within the conduits or the lid assembly 110.

[0020]

[0028] In some embodiments, to facilitate cleaning of the part-coating reactor 102 as needed, a remote plasma source (RPS) 127 can be coupled to the interior space 112, for example, through the central opening 121 of the lid assembly 110. Alternatively, or in combination, a gas source 114 can be coupled to the interior space 112 (e.g., the first conduit 118, the second conduit 120, the third conduit 122, or the central opening 121). For example, as shown in FIG. 2, the central opening 121 can be coupled to a gas source 240. The gas source 240 can include one or more of the gas source 114 or the RPS 127.

[0021]

[0029] In some embodiments, a workpiece 158 is coupled to the lid assembly 110. In some embodiments, the workpiece 158 partially defines a processing space portion of the interior space 112. For example, in some embodiments, the workpiece 158 may be a showerhead, a gas distribution plate (or faceplate), or the like. In some embodiments, the workpiece 158 has multiple gas supply holes 220 disposed therein (e.g., to the processing space of the chamber in which the showerhead is installed). The showerhead (e.g., the workpiece) may include multiple openings through the bottom plate radially outward of the peripheral lip to facilitate coupling of the workpiece to the lid assembly 110.

[0022]

[0030] In some embodiments, the component coating reactor 102 is configured to coat a workpiece of a predetermined size. For example, if the workpiece 158 is a showerhead, the showerhead can be configured for use in a process chamber configured to process substrates of a predetermined size. For example, the workpiece 158 can be a showerhead configured to process semiconductor wafers with diameters of 150 mm, 200 mm, 300 mm, etc., or rectangular substrates, such as those for solar, display, and other applications. In some embodiments, the workpiece (e.g., the component to be coated) can be a substrate support pedestal configured to support a planar substrate, such as the pedestal heater 124 described below. For example, the pedestal heater 124 can be coupled to the lower body 108 of the component coating reactor 102 such that a support surface of the substrate support pedestal is positioned within the interior space 112 facing the lid assembly 110. In such an embodiment, a process can be performed without securing the workpiece 158 (e.g., a showerhead) to the lid assembly 110.

[0023]

[0031] In some embodiments, a liner 157 is provided to surround the workpiece or component (e.g., workpiece 158) to be coated to protect the lid assembly 110. The liner 157 can have any suitable shape to surround the workpiece 158 and protect the inner sidewall of the lid assembly 110 (e.g., the periphery of the interior space adjacent to the lid assembly). For example, the general shape of the inner periphery of the liner can be configured to surround a workpiece having a predetermined shape or size to surround the workpiece and fill any voids or spaces between the workpiece and the sidewall of the part coating reactor 102, such as the sidewall of the lid assembly 110. The liner 157 can be coupled to the workpiece 158 via fasteners 290 to hold the workpiece 158. A gap 292 can be maintained between the inner surface of the liner 157 and the outer surface of the workpiece 158 to allow process gas to flow and coat the side of the workpiece 158. In some embodiments, the gap 292 is about 1.5 to about 2.0 mm.

[0024]

[0032] The lower body 108 is sized and configured to receive the pedestal heater 124. For example, the lower body 108 may include an opening 126 formed through the bottom plate 182 to receive the shaft of the pedestal heater 124 (e.g., shaft 228 shown in FIG. 2 ). A pedestal hub 128 may be coupled to the bottom plate 182 to surround and seal the shaft of the pedestal heater 124. In some embodiments, the shaft of the pedestal heater 124 may be coupled to and supported by the pedestal hub 128 such that the bottom surface of the pedestal heater 124 is positioned above and facing the upper surface of the bottom plate 182 of the lower body 108. The workpiece 158 can be coupled to the lid assembly 110 such that the underside of the workpiece (e.g., the bottom plate of the showerhead) is spaced about 1 to about 5 mm (e.g., about 4 mm) from the support surface of the pedestal heater 124.

[0025]

[0033] An exhaust assembly 144 of the part coating reactor 102 is in fluid communication with the interior volume 112 through the pedestal hub 128. The exhaust assembly 144 includes a throttle valve 146 disposed in line with a conduit 148 connecting a pump 150 to the interior volume 112. The throttle valve 146 facilitates pressure control within the interior volume 112. A pressure gauge 152 may also be coupled to the conduit 148 to monitor the pressure within the conduit 148 (and, associated with it, the pressure within the interior volume). In some embodiments, additional valves, such as an isolation valve 154, a bypass valve 155, etc., may be provided to facilitate isolating and / or disconnecting the part coating reactor 102 from the conduit 148 and the pump 150, e.g., for maintenance.

[0026]

[0034] The part coating system 100 may also include a controller 170 coupled to the part coating reactor 102. The controller 170 controls the operation of the part coating reactor 102 using direct control or, alternatively, by controlling a computer (or controller) associated with the part coating reactor 102. During operation, the controller 170 enables data collection and feedback to optimize the performance of the part coating reactor 102. The controller 170 generally includes a central processing unit (CPU) 172, memory 174, and support circuits 176. The CPU 172 may be any form of general-purpose computer processor usable in industrial settings. The support circuits 176 are conventionally coupled to the CPU 172 and may include cache, clock circuits, input / output subsystems, power supplies, etc. Software routines, such as those described herein, may be stored in the memory 174 and, when executed by the CPU 172, transform the CPU 172 into a special-purpose computer (controller 170). The software routines may also be stored and / or executed by a second controller (not shown) located remotely from the part coating reactor 102.

[0027]

[0035] The memory 174 is a form of computer-readable storage medium containing instructions that, when executed by the CPU 172, facilitate the operation of the part coating reactor 102. The instructions in the memory 174 are in the form of a program product, such as a program, that implements the apparatus of the present disclosure. The program code may conform to any one of a number of different programming languages. In one example, the present disclosure may be implemented as a program product stored on a computer-readable storage medium for use with a computer system. One or more programs in the program product define the functionality of aspects. Exemplary computer-readable storage media include, but are not limited to, non-writable storage media on which information is permanently stored (e.g., a read-only memory device in a computer, such as a CD-ROM disk readable by a CD-ROM drive, flash memory, a ROM chip, or any type of solid-state nonvolatile semiconductor memory), and writable storage media on which changeable information is stored (e.g., a floppy disk in a diskette drive or hard disk drive, or any type of solid-state random-access semiconductor memory). Such computer-readable storage media, when carrying computer-readable instructions that direct the functioning of the part coating reactor 102 described herein, become aspects of the present disclosure.

[0028]

[0036] A pedestal heater power supply 130 is coupled to a heater electrode 125 disposed within the pedestal heater 124, for example, through a pedestal hub 128, to power the pedestal heater 124 during use. The heater electrode 125 can be configured with one or more zones, for example, two zones. In some embodiments, the pedestal heater 124 is configured to heat up to about 600°C (e.g., in the range of about 100 to about 600°C, or about 200 to about 500°C) at a rate of up to about 5°C per minute.

[0029]

[0037] Additional details of a part coating reactor according to at least some embodiments of the present disclosure are shown in FIG. 2, which is a schematic cross-sectional side view of a portion of a part coating reactor, such as part coating reactor 102. As shown in FIG. 2, a lid assembly 110 is coupled to a lower body 108 to at least partially define an interior space 112. In some embodiments, a seal may be provided at the interface between the lid assembly 110 and the lower body 108. For example, a groove 226 may be provided in one or more of the lid assembly 110 or the lower body 108 to receive a gasket, such as an O-ring, to facilitate maintaining a seal between the lid assembly 110 and the lower body 108 when assembled. In some embodiments, one or more alignment features may be provided to facilitate alignment and interconnection of the lid assembly 110 and the lower body 108. For example, a protrusion or lip 222 may be disposed around a peripheral edge of one of the lid assembly 110 or the lower body 108. The other of the lid assembly 110 or the lower body 108 may be provided with a mating recess 224 for receiving and interfacing with the lip 222. In the embodiment shown in Figure 2, the lip 222 is shown projecting downwardly from the lid assembly 110, and the mating recess 224 is shown formed in a peripheral edge of the lower body 108.

[0030]

[0038] 2, the one or more heaters 132 include, for example, a first heater ring 132A and a second heater ring 132B. In some embodiments, one or more heat transfer chokes may be provided in the lid assembly 110 to promote reduced heat transfer from an upper central portion of the lid assembly above the interior space 112. For example, a plurality of slots 216 may be formed in the lid assembly 110 to disrupt conductive heat transfer through the lid assembly 110. In some embodiments, the plurality of slots 216 include elongated slots. The plurality of slots 216 may be formed in either or both of the top surface and the side surface of the lid assembly 110.

[0031]

[0039] 2, and as shown more clearly in FIG. 3, a plurality of slots 216 (a plurality of vertical slots 316A in FIG. 3) may be formed in the top surface of the lid assembly 110. The plurality of vertical slots 316A may be arranged, for example, near the outer peripheral edge of the lid assembly 110 and along a circle radially outward of the interior space 112. In some embodiments, the plurality of slots 216 may be elongated slots having major axes that are aligned or substantially aligned with the circle on which they are arranged (e.g., aligned tangentially to the circle at the center of the elongated slot).

[0032]

[0040] In the embodiment shown in FIG. 2 and as shown more clearly in FIG. 3 , a plurality of slots 216 (a plurality of horizontal slots 316B in FIG. 3 ) may be formed in the side of the lid assembly 110. The plurality of horizontal slots 316B may be arranged, for example, in one or more circular rows (two circular rows in the figure) along the peripheral edge of the lid assembly 110. In embodiments in which multiple circular rows of recesses are provided, the recesses in each row may be offset or overlapped to reduce the path for conductive heat transfer from the top surface of the lid assembly 110 to below the side of the lid assembly 110 (e.g., to form a tortuous path for heat transfer). In some embodiments, the lid assembly 110 includes a plurality of horizontal slots 316B arranged in two or more vertical rows and extending from the outer sidewall of the body to a position radially outward of the plurality of vertical slots 316A. In some embodiments, the plurality of horizontal slots 316B may be elongated slots having major axes aligned or substantially aligned with the circular rows in which they are arranged. In some embodiments, the plurality of horizontal slots 316B extend from the outer sidewall of the body to a position radially outward of the plurality of vertical slots 316A.

[0033]

[0041] The foregoing description of the various components of the part coating reactor 102 is illustrative, and other variations are possible within the scope of this disclosure. In some embodiments, the part coating reactor 102 is configured to supply one or more process gases to the outer and central zones. For example, multiple fluidly independent plenums of the lid assembly 110 may be coupled to the gas source 114. This allows a reactive gas to be supplied to the central plenum 252 through the central opening 121 of the lid assembly 110, and one or more inert gases to be supplied to the outer annular plenum 208. The outer annular plenum 208 facilitates supplying one or more gases to the peripheral region of the interior space 112 and the peripheral region of the workpiece 158 to be coated. In some embodiments, an inert gas, for example, may be supplied to the outer annular plenum 208 to prevent deposition on the peripheral portion of the workpiece and / or the peripheral portion of the interior space 112.

[0034]

[0042] A plurality of gas supply openings 248 may be provided in the outer annular plenum 208, for example, along a bottom surface of the outer annular plenum 208, to fluidly connect the outer annular plenum 208 to the interior space 112. The plurality of gas supply openings 248 may be sized and positioned to provide an appropriate gas flow to the interior space 112. In some embodiments, the plurality of gas supply openings 248 may be spaced equidistantly or substantially equidistantly along the outer annular plenum 208. In some embodiments, the plurality of gas supply openings 248 may be arranged in sets of holes, with the holes in each set spaced equidistantly or substantially equidistantly along the plenum.

[0035]

[0043] In some embodiments, the outer annular plenum 208 may be coupled to the gas source 114 or the gas source 240 via a first conduit 118. The first conduit 118 may be coupled to the outer annular plenum 208 via one or more first legs 202. The second conduit 120 may be coupled to the central plenum 252 via one or more second legs 204. The third conduit 122 may be coupled to the central plenum 252 via one or more third legs 206. Each of the one or more legs 202, 204, 206 is coupled to a respective plenum via a respective inlet along the plenum. In some embodiments, the first conduit 118 may be coupled to the outer annular plenum 208 at multiple locations along the outer annular plenum. The multiple locations may be two or more locations, three or more locations, four or more locations, etc. For example, the multiple locations may be six locations. The first conduit 118 may supply an inert gas such as nitrogen (N2) or a noble gas such as argon (Ar).

[0036]

[0044] In some embodiments, the first conduit 118 is azimuthally coupled to the outer annular plenum 208. The first conduit 118 may be coupled to the outer annular plenum 208 via one or more fittings 250 disposed at each end of the one or more first legs 202. A cap 268 may be disposed on top of the outer annular plenum 208 to define the outer annular plenum 208 and may be coupled to the top plate 178 via a plurality of fasteners (e.g., screws, etc.). The one or more fittings 250 may be coupled to the cap 268.

[0037]

[0045] The central plenum 252 facilitates supplying one or more gases, such as different deposition or precursor gases for an ALD process, to a radially inner portion (e.g., a central portion) of the interior space proximate to an area of ​​the workpiece desired to be coated. In some embodiments, the central plenum 252 may include a nozzle assembly 205 to facilitate distribution of process gases into the interior space 112. The nozzle assembly 205 may include a body 207 having an internal opening into which a nozzle may be inserted and held.

[0038]

[0046] The blocker plate 215 is adjacent to the lid assembly 110 and is disposed in the interior space 112 between the central plenum 252 and the workpiece 158. The blocker plate 215 includes a plurality of holes 246 for distributing process gas to the workpiece 158, as described in more detail below with respect to FIG. 8. The blocker plate 215 and the lid assembly 110 define a mixing plenum therebetween. A liner 157 is disposed around the blocker plate 215 and is coupled to the lid assembly 110.

[0039]

[0047] The pedestal heater 124 may include a heater plate 238 and a shaft 228. The heater plate 238 includes a heater electrode 125 and may include a substantially planar upper surface. In some embodiments, the heater plate 238 may be configured to support a planar substrate, such as a semiconductor wafer. In some embodiments, the heater plate 238 may include a planar or substantially planar raised upper surface and a substantially planar ledge disposed radially outward of the raised upper surface. The pedestal heater 124 may have a diameter larger than the workpiece 158 to be coated. For example, the pedestal heater 124 may have a diameter larger than at least the inner diameter of the liner 157. In some embodiments, the pedestal heater 124 may have a diameter of about 500 to about 600 mm.

[0040]

[0048] The lower body 108 is sized to define a first gap 258 between the pedestal heater 124 and a surface of the lower body 108 facing the interior space 112. In some embodiments, the first gap 258 can be about 2 to about 4 mm, e.g., about 3 mm. A second gap 260 is formed between the upper surface of the bottom plate 182 and the opposing lower surface of the heater plate 238. In some embodiments, the second gap 260 can be about 3 to about 6 mm, e.g., about 4 mm. The opening 126 is larger than the outer diameter of the shaft 228 such that a third gap 262 is formed between the opening 126 and the shaft 228. In some embodiments, the third gap 262 can be about 3 to about 6 mm, e.g., about 4 mm.

[0041]

[0049] The pedestal hub 128 is coupled to the lower body 108 around the shaft 228 and the opening 126. The pedestal hub 128 may be bolted or otherwise secured to the lower body 108 using, for example, a plurality of fasteners disposed through a plurality of corresponding openings 234 formed in a flange 232 of the pedestal hub 128 and extending into corresponding threaded openings in the lower body 108. In some embodiments, one or more grooves 251 may be provided in either or both of the pedestal hub 128 and the lower body 108 to facilitate forming a seal therebetween. For example, a gasket such as an O-ring may be disposed in the groove 251.

[0042]

[0050] The pedestal hub 128 has an inner diameter that is larger than the outer diameter of the shaft 228. In some embodiments, the pedestal hub 128 has an inner diameter that is larger than the inner diameter of the opening 126. In some embodiments, as shown in FIG. 2 , a choke cup 230 may be provided to regulate the exhaust flow of gases exiting the interior space 112. The choke cup 230 may be positioned between the pedestal hub 128 and the lower body 108. The choke cup 230 provides a flow conductance choke point to regulate the flow exiting the part coating reactor 102 so that it is more azimuthally uniform. For example, the choke cup 230 may be a tubular member including a flange 254 that rests on a corresponding ledge 256 formed along the inner diameter of the pedestal hub 128. The flange 254 may have a thickness equal to or substantially equal to the height of the ledge 256, such that the flange 254 abuts against the bottom of the lower body 108 when the pedestal hub 128 is coupled.

[0043]

[0051] Choke cup 230 may have an inner diameter substantially equal to the inner diameter of opening 126 so as to define a fourth gap 264 between an inner surface of choke cup 230 and an outer surface of shaft 228. Choke cup 230 further has an outer diameter smaller than the inner diameter of pedestal hub 128 so as to define a fifth gap 266 therebetween. Choke cup 230 further defines a plurality of openings 231 for fluidly connecting fourth gap 264 to fifth gap 266.

[0044]

[0052] In some embodiments, the lower body 108 may be provided with one or more coolant channels 236 for flowing a heat transfer medium. For example, a coolant source 142 may be coupled to the one or more coolant channels 236 to circulate the coolant. Alternatively, the one or more coolant channels 236 may be coupled to a separate coolant source (not shown). In some embodiments, the coolant source 142 (or a different source) and the coolant channels 236 are configured to maintain the temperature of the lower body 108 at about 50°C to about 75°C. The small space and configuration of the coolant channels 134, 236 advantageously facilitates rapid cooling of the part coating reactor 102 for removing completed workpieces and loading new workpieces to be coated, thereby increasing throughput.

[0045]

[0053] During operation, as gas flows through the part coating reactor 102, the gas first enters the part coating reactor 102 through the lid assembly 110. For example, the gas can be introduced through at least one of the gas passages 136 or the central opening 121. The gas then flows through the blocker plate 215 to the workpiece. The gas then flows around the workpiece. In some embodiments, the workpiece is a workpiece 158, such as a showerhead, coupled to the lid assembly 110. In such embodiments, the gas flows across the surface of the workpiece, such as the top surface of the showerhead, through a plurality of gas supply holes disposed through the showerhead, and then flows between the face of the showerhead and across the pedestal heater 124. The gas then flows around the peripheral edge of the pedestal heater 124 (e.g., through the first gap 258), between the bottom of the pedestal heater 124 and the floor of the lower body 108 (e.g., through the second gap 260), through the choke cup 230 and the pedestal hub 128 (e.g., through the third gap 262, the fourth gap 264, and the fifth gap 266 or the sixth gap 602), and is exhausted out of the interior space 112 through a location below the pedestal heater 124. A pump, such as pump 150, is coupled to the interior space 112, for example, through an opening 606 in the pedestal hub 128.

[0046]

[0054] 3 is a top isometric view of a lid assembly 110 in accordance with at least some embodiments of the present disclosure. The lid assembly 110 generally includes a body 310 including a top plate 178 and a sidewall 180. In some embodiments, the body 310 includes one or more openings 304 in the sidewall of the body 310 configured to couple a gas supply line to the body 310 (e.g., to couple the first conduit 118 to the lid assembly 110). The body 310 may include a first annular heater groove 312 for holding the first heater ring 132A. The body 310 may include a second annular heater groove 314 for holding the second heater ring 132B, disposed radially outward of the first annular heater groove 312. In some embodiments, the body 310 includes an O-ring groove 318 disposed radially inward of the first heater ring 132A for coupling with the nozzle assembly 205.

[0047]

[0055] In some embodiments, the lid assembly 110 includes a plurality of service openings 324 disposed between the outer annular plenum 208 and a plurality of vertical slots 316A configured to install and remove the lid assembly 110 from the part coating reactor 102. In some embodiments, the body 310 includes a plurality of holes 308 for coupling the lid assembly 110 to the lower body 108. In some embodiments, the plurality of holes 308 are disposed within recesses 306 formed from the top surface 350 of the body 302 such that, when fastened, the fasteners do not protrude above the top surface 350 of the body 302.

[0048]

[0056] FIG. 4 is a top isometric view of a lid assembly having a cover plate according to at least some embodiments of the present disclosure. In some embodiments, the cover plate 426 is disposed over the first heater ring 132A and the second heater ring 132B. In some embodiments, the cover plate 426 is a circular plate. In some embodiments, the cover plate 426 has a two-piece structure including a first portion 426A and a second portion 426B. In such embodiments, the first portion 426A and the second portion 426B are substantially similar in size. In some embodiments, the interface between the first portion 426A and the second portion 426B is aligned with the central opening 121. In some embodiments, the cover plate 426 includes one or more cutouts 430 to facilitate power connection to one or more heaters 132.

[0049]

[0057] The cap 268 may be coupled to the body 310 via a plurality of fasteners 412. In some embodiments, the top surface 350 of the lid assembly 110 may be formed with a plurality of receivers 420 for receiving corresponding protrusions 422 from the cap 268. In some embodiments, the plurality of fasteners 412 are positioned at locations corresponding to the protrusions 422.

[0050]

[0058] 5 is a cross-sectional view of a portion of a lid assembly according to at least some embodiments of the present disclosure. The body 310 of the lid assembly 110 includes an annular recess 530 extending from an upper surface of the body 310. An annular purge gas groove 508 extends from a floor 532 of the annular recess 530. A plurality of gas supply openings 248 extend from the annular purge gas groove 508 to a lower surface of the body 310. The annular purge gas groove 508 and the plurality of gas supply openings 248 generally define an outer annular plenum 208. The plurality of gas supply openings 248 fluidly connect the outer annular plenum 208 to the interior space 112.

[0051]

[0059] In some embodiments, a plurality of holes 510 may be formed through the cap 268. The holes 510 may be aligned with corresponding holes 520 formed in the top plate 178 to receive fasteners to secure the cap 268 to the top plate 178. The cap 268 may be positioned within an annular recess 530 formed in the top plate 178 to cover the annular purge gas groove 508. The cap 268 may include one or more gas inlet holes (see one or more gas inlet holes 410 in FIG. 4). In some embodiments, the annular recess 530 and the cap 268 may be sized so that the cap 268 is flush with or does not protrude above the upper surface of the top plate 178. The outer annular plenum 208 may be coupled to the gas source 114, for example, via the first conduit 118. A gap 518 may be disposed between the liner 157 and the lower surface of the top plate 178. The gap 518 facilitates gas flow around the liner 157 to the exhaust.

[0052]

[0060] One or more O-ring grooves 512 may be formed in opposing surfaces of at least one of the top plate 178 or the cap 268 to receive an O-ring to facilitate reducing or eliminating leakage from the outer annular plenum 208. For example, a first O-ring groove 512A of the one or more O-ring grooves 512 extends from the floor 532 radially inward of the annular purge gas groove 508. In some embodiments, a second O-ring groove 512B of the one or more O-ring grooves 512 extends from the floor 532 radially outward of the annular purge gas groove 508. In some embodiments, the lid assembly 110 includes an alignment groove 506 in its lower surface to receive and align the blocker plate 215 with the lid assembly 110. In some embodiments, the alignment groove 506 is an annular groove.

[0053]

[0061] 6 is a bottom isometric view of a lid assembly according to at least some embodiments of the present disclosure. In some embodiments, the alignment groove 506 for the blocker plate 215 is disposed radially inward of the plurality of gas feed openings 248. In some embodiments, the body 310 has no openings between the alignment groove 506 and the central opening 121. In some embodiments, the lower surface 610 of the top plate 178, which is disposed between the alignment groove 506 and the central opening 121, is substantially flat.

[0054]

[0062] 7 is an isometric view of a cap 268 according to at least some embodiments of the present disclosure. In some embodiments, the cap 268 includes one or more gas inlet holes 702. In some embodiments, an O-ring groove 706 is disposed around each of the one or more gas inlet holes 702. The cap 268 may include a fastener opening 708 proximate each of the one or more gas inlet holes 702 for connecting one or more fittings 250 to each respective gas inlet hole. For example, the cap 268 may include a fastener opening radially inward, radially outward, or both radially inward and radially outward of the one or more gas inlet holes 702. In other examples, the cap 268 may include a fastener opening disposed at a substantially similar diameter as the one or more gas inlet holes 702.

[0055]

[0063] 8 is an isometric view of a blocker plate in accordance with at least some embodiments of the present disclosure. The blocker plate 215 is advantageously configured to more uniformly mix and distribute process gases for more uniform coating of the workpiece 158. In some embodiments, the blocker plate 215 includes a substantially flat plate 810 and an annular wall 816 extending above and below the flat plate 810. In some embodiments, the annular wall 816 surrounds the flat plate 810. In some embodiments, an upper surface 818 of the annular wall 816 is positioned within the alignment groove 506 of the lid assembly 110 when installed in the part coating reactor 102. In some embodiments, the plurality of holes 246 of the blocker plate 215 includes a central hole 814 and a plurality of peripheral holes 820. In some embodiments, the central hole 814 has a smaller diameter than the diameter of the plurality of peripheral holes 820. In some embodiments, the plurality of holes 812 increases in diameter from the upper surface 824 of the blocker plate 215 to the lower surface of the blocker plate 215. In some embodiments, central hole 814 has a diameter of about 1 to about 4 mm. In some embodiments, plurality of holes 246 comprises more than 50 holes. In some embodiments, plurality of holes 246 comprises more than 100 holes.

[0056]

[0064] 9 is an isometric view of a liner according to at least some embodiments of the present disclosure. In some embodiments, as shown in FIG. 9, the liner 157 can have an annular body 902. The liner 157 can be fabricated from any process-compatible material, such as aluminum. The liner 157 includes a plurality of openings 920 configured to receive fasteners, such as set screws, grub screws, etc., to secure the liner 157 to the workpiece 158, and therefore the workpiece 158 to the lid assembly 110.

[0057]

[0065] In some embodiments, the upper surface of the liner 157 includes a plurality of raised portions 906 (e.g., protrusions) that provide standoff for the liner 157 such that a gap (e.g., gap 518 shown in FIG. 5 ) is defined between the upper surface 905 of the annular body 902 and the lower surface of the top plate 178 of the lid assembly 110. The gap promotes the flow of gas from around the liner 157 to the exhaust. To facilitate coupling the liner 157 to the lid assembly 110, an opening 918 may extend through the sidewall of the annular body 902 and each of the raised portions 906. For example, a recess 922 may be provided opposite each raised portion 906 to facilitate receiving the head of a fastener passing through the respective opening 918 in the annular body 902. To further facilitate the flow of gas around the liner 157 to the exhaust, the liner 157 may include a plurality of through-holes 904 formed through the sidewall of the annular body. The plurality of through-holes 904 may be elongated openings having a width of about 4 to about 6 mm.

[0058]

[0066] While the forgoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof.

Claims

1. 1. A lid assembly comprising: a body including a central region and a peripheral region, the body including a central opening in the central region, a first annular heater groove disposed radially outward of the central opening, and a second annular heater groove disposed radially outward of the first annular heater groove, the peripheral region including a plurality of vertical slots extending from a top surface of the body, the body including an annular recess extending from the top surface of the body, an annular purge gas groove extending from a floor of the annular recess, and a plurality of gas supply openings extending from the purge gas groove to a bottom surface of the body, the bottom surface of the body including an annular alignment groove; a first heater ring disposed within the first annular heater groove and having one or more heating elements disposed therein; a second heater ring disposed within the second annular heater groove and having one or more heating elements disposed therein; a lid assembly including: a blocker plate including a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below said flat plate, the upper surface of said annular wall being disposed within said annular alignment groove of said body; 1. A part coating reactor comprising:

2. 2. The part coating reactor of claim 1, wherein said plurality of holes in said blocker plate includes a central hole and a plurality of peripheral holes, said central hole having a diameter smaller than the diameters of said plurality of peripheral holes.

3. The part coating reactor of claim 1 , wherein the alignment groove is located radially inward of the plurality of gas feed openings.

4. 10. The part coating reactor of claim 1, wherein the body includes a plurality of horizontal slots arranged along two or more vertical rows and extending from an outer sidewall of the body to a location radially outward of the plurality of vertical slots.

5. 10. The part coating reactor of claim 1, further comprising a cap disposed within said annular recess to cover said annular purge gas groove, said cap including one or more gas inlet holes.

6. 6. The part coating reactor of claim 1, wherein the body includes one or more openings in a sidewall of the body configured to connect a gas supply line to the body.

7. 6. The part coating reactor of claim 1, further comprising a cover plate disposed over the first heater ring and the second heater ring, the cover plate being a circular plate.

8. 6. The part coating reactor of claim 1, wherein the lid assembly includes a plurality of service openings disposed between the annular recess and the plurality of vertical slots configured to attach and detach the lid assembly to and from the part coating reactor.

9. a first heater ring disposed within the first annular heater groove; a second heater ring disposed within the second annular heater groove, a second heater ring, the body including an annular gas feed groove extending from the top surface of the body, a cap disposed within the annular gas feed groove to define a first plenum within the annular gas feed groove, the cap including one or more gas inlet holes; a bottom lid coupled to the lid assembly to enclose and define an interior volume of the part coating reactor, the blocker plate being positioned in the interior volume adjacent the lid assembly, the blocker plate and the lid assembly defining a mixing plenum therebetween; a liner disposed around the blocker plate and connected to the body; 5. The part coating reactor of claim 1, further comprising:

10. 10. The part coating reactor of claim 9, further comprising a pedestal heater disposed in the interior space opposite the blocker plate.

11. The part coating reactor of claim 9 , wherein the liner includes a plurality of slots and a plurality of openings for connecting the liner to a workpiece.

12. 10. The part coating reactor of claim 9, wherein the cap includes an O-ring groove disposed around each of the one or more gas inlet holes.

13. 10. The part coating reactor of claim 9, wherein the plurality of holes in the blocker plate increase in diameter from the upper surface of the blocker plate to the lower surface of the blocker plate.

14. 10. The part coating reactor of claim 9, wherein the body further includes a first O-ring groove extending from the floor of the annular gas supply groove radially inward of the annular purge gas groove and a second O-ring groove extending from the floor of the annular gas supply groove radially outward of the annular purge gas groove.

15. 10. The part coating reactor of claim 9, further comprising a pedestal heater disposed in the interior space.

16. 16. The part coating reactor of claim 15, wherein a purge gas source is coupled to the annular purge gas groove.

17. 16. The part coating reactor of claim 15 further comprising a gas source coupled to the central opening of the body.

18. 16. The part coating reactor of claim 15, wherein the body includes one or more openings in a sidewall of the body configured to couple a gas supply line to the body.

19. 16. The part coating reactor of claim 15, wherein the blocker plate is held between the lid assembly and a workpiece being processed in the part coating reactor.

20. 16. The part coating reactor of claim 15 further comprising a remote plasma source coupled to the central opening of the lid assembly.

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