Perimeter frame for spacing reticle pods

Abstract

A spacer for a reticle pod component includes spacer contacts configured to contact alignment features on a cover and a base plate of the reticle pod such that a gap separates the cover and base plate. The spacer includes a frame connecting at least two of the spacer contacts. The frame can include spring arms that allow deformation so that the spacer contacts can move relative to each other to facilitate connection with the alignment features. The spacer contacts can be configured to surround pins included in the alignment features. The spacer contacts can be configured to be inserted into lead-in portions of channels included in the alignment features.

Description

[Technical Field]

[0001] The present disclosure relates to a reticle pod including a spacer and a spacer connected by a frame for spacing sealing surfaces of the reticle pod. [Background technology]

[0002] Reticle containers can include hard sealing surfaces. When reticle containers are transported, they are typically transported fully assembled. During transport, the sealing surfaces can be subjected to shock and / or vibration beyond normal handling and operation of the reticle pod, leading to wear, damage, and particle generation that can adversely affect the cleanliness or other performance of the reticle pod. Summary of the Invention

[0003] The present disclosure relates to a reticle pod including a spacer and a spacer connected by a frame for spacing sealing surfaces of the reticle pod.

[0004] By providing spacers that interface with alignment features of a reticle container, such as an inner pod of a reticle pod, a gap can be maintained between the sealing surfaces when the reticle pod is transported assembled. The presence of such a gap can reduce or eliminate wear or damage due to shock or vibration experienced during transport of the reticle container. The gap can be sized so that the reticle container can still be fully assembled, e.g., the inner pod can be placed inside the outer pod of the complete reticle container during such transport. This allows the reticle container to be transported with reduced risk of damage or particle generation, even when transported as a complete container. Furthermore, the contacts of the spacers can be joined by a frame for ease of handling. The frame can be configured to extend outside the perimeter of the sealing surfaces of the reticle container, reducing the possibility that wear particles from the spacers will cause cleanliness issues with the reticle pod.

[0005] In one embodiment, a spacer for a reticle pod includes a plurality of spacing contacts. Each spacing contact is configured to contact a first reticle pod portion at a first reticle pod alignment feature and a second reticle pod portion at a second reticle pod alignment feature. The first reticle pod alignment feature is separate from a first sealing surface of the first reticle pod portion, and the second reticle pod alignment feature is separate from a second sealing surface of the second reticle pod portion. The spacer includes a frame that joins at least two of the plurality of spacing contacts. The frame is configured to be located outside the first sealing surface and the second sealing surface in a plan view of the reticle pod. The spacing contacts are configured to contact the first reticle pod portion and the second reticle pod portion such that the first reticle pod portion and the second reticle pod portion are separated by a gap.

[0006] In one embodiment, the plurality of spacing contacts includes at least three spacing contacts.

[0007] In one embodiment, the frame joins all of the spacing contacts of the plurality of spacing contacts.

[0008] In one embodiment, the frame includes at least one spring arm configured to allow flexure of the frame such that the distance between the plurality of spacing contacts varies.

[0009] In one embodiment, each spacing contact includes an inner surface defining an opening configured to receive a first reticle pod alignment feature and an outer surface configured to be received by a second reticle pod alignment feature.

[0010] In one embodiment, the gap has a width in the range of 20 μm to 1 mm.

[0011] In one embodiment, the spacer comprises at least one of a polycarbonate and a polyolefin.

[0012] In one embodiment, the reticle pod includes an inner pod including a cover and a base plate. The cover includes a cover sealing surface and a plurality of cover alignment features distinct from the cover sealing surface. The base plate includes a base plate sealing surface and a plurality of base plate alignment features distinct from the base plate sealing surface. The reticle pod includes a spacer. The spacer includes a plurality of spacing contacts. Each of the spacing contacts is configured to contact one of the plurality of cover alignment features and one of the plurality of base plate alignment features. The spacer includes a frame joining at least two of the plurality of spacing contacts, the frame configured to be located outside the cover sealing surface and the base plate sealing surface in a plan view of the reticle pod. The spacing contacts are configured to contact the cover and the base plate such that the cover and the base plate are separated by a gap.

[0013] In one embodiment, the plurality of spacing contacts includes at least three spacing contacts.

[0014] In one embodiment, the frame joins all of the spacing contacts of the plurality of spacing contacts.

[0015] In one embodiment, the frame includes at least one spring arm configured to allow flexure of the frame.

[0016] In one embodiment, the cover alignment feature is a pin and the base plate alignment feature is a channel configured to receive the pin, the channel including a lead-in portion.

[0017] In one embodiment, each spacing contact includes an inner surface defining an opening configured to receive a pin and an outer surface configured to be received in a lead-in.

[0018] In one embodiment, the gap has a width in the range of 20 μm to 1 mm.

[0019] In one embodiment, the reticle pod further comprises an outer pod including a pod dome and a pod door, the outer pod configured to house the inner pod.

[0020] In one embodiment, a method for preparing a reticle pod for transport includes assembling an inner pod including a cover, a base plate, and a spacer disposed between the cover and the base plate. The spacer includes a plurality of spacing contacts that contact the cover at the cover alignment features. The spacer contacts the base plate at the base plate alignment features. The spacer includes a frame that joins at least two of the plurality of spacing contacts. The cover and base plate are separated by a gap.

[0021] In one embodiment, the frame includes a flexible arm, and assembling the inner pod includes flexing the frame at the flexible arm to align at least one of the plurality of spacing contacts with one of the cover alignment features or one of the base plate alignment features.

[0022] In one embodiment, the gap has a width in the range of 20 μm to 1 mm.

[0023] In one embodiment, the cover alignment features are each a pin and the base plate alignment features are each a channel including a lead-in portion, and assembling the inner pod includes passing each of the pins through one of the spacing contacts and inserting each of the spacing contacts into one of the lead-in portions.

[0024] In one embodiment, the method further includes placing the inner pod within an outer pod including a pod dome and a pod door, joining the pod dome to the pod door to encase the inner pod, and transporting the reticle pod from a packaging location to a destination location with the pod dome joined to the pod door. [Brief explanation of the drawings]

[0025] [Figure 1] 1 illustrates a reticle container according to one embodiment. [Figure 2A] 1 illustrates a cross-sectional view of an inner pod of a reticle container according to one embodiment. [Figure 2B] 2B shows a plan view of the cover and spacer of FIG. 2A. [Figure 3] 1 illustrates a spacer according to one embodiment. [Figure 4] 1 illustrates a spacer according to one embodiment. [Figure 5] 1 illustrates a reticle pod according to one embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0026] The present disclosure relates to a reticle pod including a spacer and a spacer connected by a frame for spacing sealing surfaces of the reticle pod.

[0027] 1 illustrates a reticle container according to one embodiment. Reticle container 100 includes an outer pod 102 that includes a pod dome 104 and a pod door 106. Reticle container 100 further includes an inner pod 108 that includes a cover 110 and a base plate 112. Reticle container 100 also includes a spacer 114.

[0028] The outer pod 102 forms the exterior of the reticle container 100. The outer pod 102 is configured to house the inner pod 108. When the reticle container 100 is transported to a destination or stored at a location, the reticle container can be assembled such that the inner pod 108 is housed inside the outer pod 102. The outer pod 102 may be comprised of a pod dome 104 and a pod door 106.

[0029] The inner pod 108 is an inner pod of the reticle container 100 configured to house a reticle. The inner pod includes a cover 110 and a base plate 112. The cover 110 and the base plate 112 can be configured to contact each other during typical use, for example, at corresponding sealing surfaces on the cover 110 and the base plate 112. The cover 110 and the base plate 112 can be fabricated from a metallic material and can further include metal plating, for example, on at least some of the sealing surfaces. At other times, such as during storage or transportation, the cover 110 and the base plate 112 can be spaced apart using, for example, one or more spacers 114.

[0030] The spacers 114 may be included in the reticle container 100 to space the cover 110 and the base plate 112 from each other when the inner pod 108 is assembled. The spacers 114 may include one or more spacing contacts configured to engage with features included on the cover 110 and the base plate 112. The features may be any suitable features located outside the sealing surfaces included on the cover 110 and the base plate 112. The features may be located between the perimeter of the sealing surfaces and the perimeter of the respective cover 110 or base plate 112. Non-limiting examples of such features include alignment features, ledges, shelves, protrusions, flanges, combinations thereof, and the like, on the cover 110 and the base plate 112. The features that engage the spacers 114 may be located on portions of the cover 110 and / or the base plate 112 that are located outside the sealing surfaces. Outside the sealing surfaces means that when the cover 110 and base plate 112 are assembled with the spacer 114, the features that engage the spacer 114 and the position of the frame of the spacer 114 do not overlap with the sealing surfaces of the cover 110 or base plate 112 in a plan view. The spacer 114 can contact the cover 110 and base plate 112 such that their respective sealing surfaces remain separated by a gap. In one embodiment, the gap can be maintained when the cover 110 and base plate 112 are assembled with the spacer 114 in place and placed within the outer pod 102. When the inner pod 108 is placed within the outer pod 102 and the outer pod 102 is closed, the gap can have a size between 20 micrometers (μm) and 1 millimeter (mm). In one embodiment, the spacer 114 may include one or more spring members configured to increase the size of the gap when the inner pod 108 is not housed within the outer pod 102 compared to the size of the gap maintained when the inner pod 108 is housed within the outer pod 102.

[0031] Optionally, cover 110 may include a cover flange 116. Cover flange 116 protrudes outward from a side of cover 110. Cover flange 116 may provide a point at which a spring member included in spacer 114 may contact cover 110, causing an increase in the size of the gap, when cover 110 and base plate 112 are not housed within outer pod 102.

[0032] 2A illustrates a cross-sectional view of an inner pod of a reticle container according to one embodiment. Inner pod 200 includes a cover 202 including a cover alignment feature 204 and a cover sealing surface 206. Inner pod 200 further includes a base plate 208 including a base plate alignment feature 210 and a base plate sealing surface 212. Spacer 214 includes spacing contacts 216 and a frame 218.

[0033] The cover 202 is a cover for the inner pod 200. The cover 202 is configured to combine with a base plate 208 to define an interior space capable of accommodating a reticle. The cover 202 can be configured to form the top of the inner pod 200. The cover 202 includes cover alignment features 204. The cover alignment features can be any suitable features provided on the cover 204 to provide alignment between the cover 202 and the base plate 208, for example, through engagement between the cover alignment features 204 and appropriate base plate alignment features 210. In the embodiment shown in FIG. 2 , the cover alignment features 204 include a plurality of pins protruding from the cover 202. In some embodiments, the cover alignment features can instead be recesses or openings configured to receive pins provided as base plate alignment features 210 or any other suitable structure for guiding and / or maintaining alignment between the cover 202 and the base plate 208. The cover 202 further includes a cover sealing surface 206. The cover sealing surface 206 is a surface of the cover 202 configured to contact the base plate 208 when the inner pod 200 is assembled for typical use, such as storing a reticle. The cover sealing surface 206 may be one or more surfaces positioned to correspond to the base plate sealing surface 212 when the inner pod 200 is assembled.

[0034] The base plate 208 forms another portion of the inner pod 200. The base plate 208 is configured to combine with the cover 202 to define an interior space capable of housing a reticle. The base plate 208 includes a base plate alignment feature 210. In the embodiment shown in FIG. 2 , the base plate alignment feature 210 is a hole formed in the base plate 208 configured to receive the pin that is the cover alignment feature 204. The hole includes a lead-in portion having a diameter larger than the diameter of the pin. The base plate 208 further includes a base plate sealing surface 212. The base plate sealing surface 212 is configured to contact the cover sealing surface 206 when the inner pod 200 is assembled to house, for example, a reticle. The base plate sealing surface 212 can face the corresponding cover sealing surface 206.

[0035] 2, the spacing contacts 216 are each configured to contact the cover 202 and base plate 208 at the respective cover alignment feature 204 and base plate alignment feature 210. It is understood that the location and shape of the spacing contacts 216 may be any suitable configuration for engaging features of the cover 202 and base plate 208 outside of the respective cover sealing surface 206 and base plate sealing surface 212 to space the sealing surfaces 206, 212. For example, tabs that engage a ledge or shelf may be used as spacing contacts 216 in embodiments that contact the cover 202 and / or base plate 208 at such ledge or shelf. The spacing contacts 216 are configured to contact the cover alignment feature 204 and the base plate alignment feature 210 such that the cover sealing surface 206 and the base plate sealing surface 212 are spaced apart by a gap. In the embodiment shown in FIG. 2 , the spacing contacts 216 are each ring-shaped and include an inner surface defining a bore configured to receive one of the pins of the cover alignment feature 204. The spacing contacts 216 further include an outer surface configured to be received in one of the hole lead-ins of the base plate alignment feature 210. Contact between the spacing contacts 216 and the cover and base plate alignment features 204, 210 can hold the cover 202 away from the base plate 208 such that the cover sealing surface 206 and the base plate sealing surface 212 are separated by a gap. In one embodiment, the number of spacing contacts 216 corresponds to the number of matched cover and base plate alignment features 204, 210 included in the inner pod 200. In one embodiment, the number of spacing contacts 216 is less than the number of matching cover and base plate alignment features 204 , 210 included on the inner pod 200 .The spacer 214 can be provided, for example, with respect to shipping the inner pod 200, to prevent contact between the cover sealing surface 206 and the base plate sealing surface 212 during such shipping or storage of the inner pod 200. The spacer 214 can be configured to maintain separation between the cover 202 and the base plate 208 when the inner pod 200 is placed within an outer pod, such as the outer pod 102 shown in FIG. 1 above, and the outer pod is closed. The spacer 214 can include a frame that joins two or more of the spacing contacts. The frame 218 can be configured to extend outwardly of the cover sealing surface 206 and / or the base plate sealing surface 212 with respect to a plan view of the inner pod 200. By avoiding the areas corresponding to the cover and base plate sealing surfaces 206, 212, the amount of particles that may come into contact with the spacer 214 and its contact with the cover 202 and / or base plate 208 and contact the cover and base plate sealing surfaces 206, 212 and the interior space defined by the cover 202 and base plate 208 can be reduced.

[0036] 2, cover alignment features 204 are shown as pins and base plate alignment features 210 are shown as channels that receive the pins, it is understood that pins may be provided as base plate alignment features 210 and channels that receive the pins may be provided as cover alignment features 204. It is understood that spacers 214 may be appropriately shaped and sized to engage with cover alignment features 204 and base plate alignment features 210, thereby maintaining a gap between cover sealing surface 206 and base plate sealing surface 212.

[0037] 2B shows a plan view of the cover 202 when the spacers 214 are installed thereon. Each of the spacing contacts 216 surrounds one of the cover alignment features 204. A frame 218 surrounds the outer periphery of the cover sealing surface 206 in the plan view of FIG. 2B and is entirely outside the cover sealing surface 206 such that no portion of the frame 218 overlaps the cover sealing surface 206. The base plate sealing surface 212 may be positioned to correspond to the cover sealing surface 206 and, therefore, may have the same relationship to the frame 218 as the base plate sealing surface 212.

[0038] FIG. 3 illustrates a spacer according to one embodiment. The spacer 300 includes spacing contacts 302 and a frame 304. The frame 304 includes spring arms 306. The spacing contacts 302 are configured to contact alignment features of the cover and base plate of a reticle container, such as the cover alignment feature 204 and the base plate alignment feature 210 shown in FIG. 2 and described above. The spacing contacts 302 can be positioned relative to one another such that the spacing contacts 302 are spaced apart by approximately the same distance as the cover and base plate alignment features. The frame 304 can join two or more of the spacing contacts 302. The frame 304 can be configured to be outside of a cover and / or base plate sealing surface, such as a sealing surface, when the spacer 300 is installed in a reticle pod and the reticle pod is viewed in a plan view. The frame 304 can include spring arms 306. The spring arms 306 may be features of the frame 304 that allow the frame 304 to flex so that the relative positions of the spacing contacts 302 can be changed. The spring arms may vary in thickness, include bends or other such features, and / or include resilient material to allow the frame to flex at the spring arms 306. The frame 304 may include any suitable number of spring arms 306. In one embodiment, a spring arm 306 is provided on the frame 304 for each spacing contact 302 included in the spacer 300. In one embodiment, the number of spacing contacts 302 included in the spacer 300 is greater than the number of spring arms included in the frame 304.

[0039] FIG. 4 illustrates a cover and spacer according to one embodiment. Cover 400 includes a cover flange 402. Spacer 404 includes spacing contacts (not shown) joined by a frame 406 and lifting arms 408. The spacing contacts can be any of the spacing contacts described above. Frame 406 can join two or more of the spacing contacts. Frame 406 can be configured to mount spacer 404 to a reticle pod including cover 400 and be outside the cover and / or baseplate sealing surface when the reticle pod is viewed in a plan view. Lifting arms 408 can be provided on spacer 402, for example, extending from frame 406. Lifting arms 408 are positioned such that lifting contacts 410 can contact the cover or baseplate of the reticle pod when spacer 400 is installed in the reticle pod. Lifting contacts 410 can contact cover 400, for example, at cover flange 402. The lifting contacts 410 may be on flexible arms 412 included in the lifting arms 408. The flexible arms 412 may have a flexibility selected to allow the lifting arms 408 to support the cover 400 away from the base plate when the spacer 404 is attached to the inner pod of the reticle pod itself. The flexible arms may be configured to flex when the cover and base plate are pressed together, such as when the cover and base plate are placed within an outer pod, such as outer pod 102 shown in FIG. 1 above. The flexible arms may cause a first gap to exist between the sealing surfaces of the cover 400 and the base plate when the inner pod with the spacer 404 installed is housed within the outer pod of the reticle pod, and a second gap larger than the first gap to exist when the inner pod with the spacer 404 installed is removed from the outer pod but the cover 400 and base plate are still together.The larger second gap can reduce the possibility of contact between the sealing surface of the cover 400 and the sealing surface of the base plate, for example, when unpacking the inner pod and removing the spacer 404 after transporting a reticle pod that uses a spacer 404 to separate the cover 400 and base plate during transport.

[0040] FIG. 5 illustrates a reticle pod according to one embodiment. The reticle pod 500 includes an outer pod 502, which includes a pod dome 504 and a pod door 506. The reticle pod 500 further includes an inner pod 508, which includes a cover 510 and a base plate 512. The cover 510 includes a cover sealing surface 514 and a cover flange 518. The base plate 512 includes a base plate sealing surface 516. A spacer 520 can be installed within the outer pod 502 and engage with the inner pod 508 to provide a gap between the cover sealing surface 514 and the base plate sealing surface 516. The spacer 520 can include a first spacer frame 522, a second spacer frame 524, an anchor 526, and a cover support 528. The anchor 526 can be attached to a support post 530 included in the pod door 506.

[0041] The outer pod 502 is an outer pod of the reticle pod 500 configured to define an interior space capable of accommodating the inner pod 508. The outer pod 502 includes a pod dome 504 and a pod door 506 that combine to define the interior space. The pod door 506 can be joined to the pod dome 504 by any suitable connection, such as a latch mechanism. The pod door 506 can include a support post 530. The support post 530 can be configured to contact the inner pod 508, for example, at a base plate 512, to position the inner pod 508 within the interior space of the outer pod 502.

[0042] Inner pod 508 is an inner pod of reticle pod 500 configured to house a reticle. Inner pod 508 includes a cover 510 and a base plate 512. Cover 510 and base plate 512 may include any suitable cover and base plate features included herein, such as, by way of non-limiting example, cover and base plate alignment features 204, 210 shown in FIGS. 2A and 2B above. Cover 510 and base plate 512 each include a cover sealing surface 514 and a base plate sealing surface 516. Cover sealing surface 514 and base plate sealing surface 516 are surfaces on cover 510 and base plate 512, respectively, that form a seal when inner pod 508 is assembled without spacer 520 present, such as when inner pod 508 houses a reticle. The seal may be a seal based on contact between the cover and baseplate sealing surfaces 514, 516, a proximity seal that allows for the creation of a pressure differential between the inside and outside of the inner pod 508, or any other suitable seal for the inner pod 508. When a spacer 520 is used in the reticle pod 500, a gap may provide spacing between the cover sealing surface 514 and the baseplate sealing surface 516. The gap may be maintained by the presence of the spacer 520 and its engagement with portions of the reticle pod 500, such as the pod dome 504, the pod door 506, the cover 510, and / or the baseplate 512. The gap may have any suitable size to reduce or eliminate contact between the cover sealing surface 514 and the baseplate sealing surface 516 while still allowing the inner pod 508 to be accommodated inside the outer pod 502. In one embodiment, the gap may have a size between 20 micrometers (μm) and 1 millimeter (mm). Spacers 520 can be installed within reticle pod 500 to provide and maintain a gap, for example, during transport and / or storage of reticle pod 500. Maintaining a gap can reduce or eliminate rubbing friction, thus reducing wear and associated particle generation in inner pod 508.Additionally, maintaining the gap can reduce the likelihood or extent of damage resulting from contact between cover 510 and base plate 512 due to impacts occurring during transport or storage of reticle pod 500 .

[0043] 5, the cover 510 includes a cover flange 518. The cover flange 518 may protrude from both sides of the cover 510. The cover flange 518 may contact one or more features of the spacer 520 to enable the cover 510 to be held in a particular position within the outer pod 502, such as to support the cover 510 in a particular position to provide a gap between the cover sealing surface 514 and the baseplate sealing surface 516.

[0044] Spacers 520 can be installed within reticle pod 500 to maintain a gap between cover sealing surface 514 and base plate sealing surface 516, for example, to prevent wear or damage during transport and / or storage of reticle pod 500. Spacers 520 can engage with cover 510 and base plate 512 to hold cover 510 and base plate 512 so that the gap is maintained when reticle pod 500 is assembled. Spacers 520 can include one or more individual structures. Spacers 520, or portions thereof, can be configured to engage with pod dome 504 and / or pod door 506 to secure the position of spacers 520.

[0045] First spacer frame 522 is a frame configured to be positioned outside cover sealing surface 514 and base plate sealing surface 516 when reticle pod 500 is assembled. First spacer frame 522 is configured to position an engagement feature such that it can contact one of cover 510 or base plate 512 to position cover 510 or base plate 512 so that a gap is maintained when spacer 520 is installed within reticle pod 500. The engagement feature may be, for example, a flange, a tab, a spacing contact such as spacing contact 216 shown in FIG. 2B above, or the like.

[0046] Second spacer frame 524 is a frame configured to be positioned outside cover sealing surface 514 and base plate sealing surface 516 when reticle pod 500 is assembled. Second spacer frame 524 is configured to position an engagement feature such that it can contact one of cover 510 or base plate 512 to position cover 510 or base plate 512 so that a gap is maintained when spacer 520 is installed in reticle pod 500. In the embodiment shown in FIG. 5 , the engagement feature positioned by second spacer frame 524 may be cover support 528. Cover support 528 may be a protrusion configured to contact cover flange 530 and support cover 510 above base plate 512 to maintain a gap between cover sealing surface 514 and base plate sealing surface 516. In other embodiments, the engagement feature may be, for example, a flange, a tab, a spacing contact such as spacing contact 216 shown in FIG. 2B above, or the like. In one embodiment, the second spacer frame 524 is part of a continuous structure with the first spacer frame 522. In one embodiment, the second spacer frame 524 is part of a structure separate from the structure that includes the first spacer frame 522.

[0047] Anchors 526 are used to connect the spacer 520, or a portion thereof, to at least one of the pod dome 504 or the pod door 506. The anchors may be configured to engage with any suitable feature of the pod dome 504 or the pod door 506 to maintain the position of the spacer 520 or a portion of the spacer 520, such as the first spacer frame 522 and / or the second spacer frame 524. In the embodiment shown in FIG. 5, the anchors 526 are configured to engage with support posts 530 on the pod door 506. The anchors 526 may be configured to engage with features inherent in the pod dome 504 or the pod door 506 and / or features specifically included on the pod dome 504 or the pod door 506 for engagement with the anchors 526. The features may include any mechanical engagement feature, such as a post, a flange, a groove, a ledge, a shoulder, or the like. In one embodiment, the first one or more anchors 526 are configured to position the first spacer frame 522 and the second one or more anchors 526 are configured to position the second spacer frame 524.

[0048] Aspects: It is understood that any of embodiments 1 to 7 can be combined with any of embodiments 8 to 15 or any of embodiments 16 to 20. It is understood that any of embodiments 8 to 15 can be combined with any of embodiments 16 to 20.

[0049] Aspect 1. A spacer for a reticle pod, comprising: a plurality of spacing contacts, each of the plurality of spacing contacts configured to contact a first reticle pod portion at a first reticle pod feature and to contact a second reticle pod portion at a second reticle pod feature, the first reticle pod feature being outboard of a first sealing surface of the first reticle pod portion and the second reticle pod feature being outboard of a second sealing surface of the second reticle pod portion; a frame that joins at least two of the plurality of spacing contact portions and is configured to be located outside the first sealing surface and the second sealing surface in a plan view of the reticle pod; Equipped with The spacer, wherein the spacing contacts are configured to contact the first reticle pod portion and the second reticle pod portion such that the first reticle pod portion and the second reticle pod portion are separated by a gap.

[0050] Aspect 2. The spacer of Aspect 1, wherein the plurality of spacing contacts includes at least three spacing contacts.

[0051] Aspect 3. The spacer of Aspect 1 or 2, wherein the frame joins all of the spacing contacts of the plurality of spacing contacts.

[0052] Embodiment 4. A spacer according to any one of embodiments 1 to 3, wherein the frame comprises at least one spring arm configured to allow deflection of the frame such that the distance between the plurality of spacing contacts varies.

[0053] Embodiment 5. A spacer described in any of embodiments 1 to 4, wherein each of the spacing contacts includes an inner surface defining an opening configured to receive a first reticle pod feature and an outer surface configured to be received by a second reticle pod feature.

[0054] Aspect 6. The spacer according to any one of Aspects 1 to 5, wherein the gap has a width in the range of 20 μm to 1 mm.

[0055] Embodiment 7. The spacer according to any one of embodiments 1 to 6, wherein the spacer comprises at least one of polycarbonate and polyolefin.

[0056] Embodiment 8. A reticle pod, comprising: an inner pod including a cover and a base plate, the cover including a cover sealing surface and a plurality of cover features outside the cover sealing surface, and the base plate including a base plate sealing surface and a plurality of base plate features outside the base plate sealing surface; Spacer and It is equipped with The spacer is a plurality of spacing contacts, each of the plurality of spacing contacts configured to contact one of the plurality of cover features and one of the plurality of base plate features; a frame that joins at least two of the plurality of spacing contact portions and is configured to be positioned outside the cover sealing surface and the base plate sealing surface in a plan view of the reticle pod; Including, The reticle pod, wherein the spacing contact is configured to contact the cover and the base plate such that the cover and the base plate are separated by a gap.

[0057] Embodiment 9. The reticle pod of embodiment 8, wherein the plurality of spacing contacts includes at least three spacing contacts.

[0058] Embodiment 10. The reticle pod of embodiment 8 or 9, wherein the frame joins all of the spacing contacts of the plurality of spacing contacts.

[0059] Embodiment 11. A reticle pod according to any of embodiments 8-10, wherein the frame comprises at least one spring arm configured to allow flexure of the frame.

[0060] Embodiment 12. A reticle pod according to any of embodiments 8 to 11, wherein the cover feature is a pin and the base plate feature is a channel configured to receive the pin, and the channel includes an introduction portion.

[0061] Aspect 13. A reticle pod as described in aspect 12, wherein each of the spacing contacts includes an inner surface defining an opening configured to receive a pin and an outer surface configured to be received in the lead-in portion.

[0062] Embodiment 14. A reticle pod according to any one of embodiments 8 to 13, wherein the gap has a width in the range of 20 μm to 1 mm.

[0063] Aspect 15. The reticle pod of any of Aspects 8-14, further comprising an outer pod including a pod dome and a pod door, the outer pod configured to house the inner pod.

[0064] Aspect 16. A method of preparing a reticle pod for transport, comprising: Assembling an inner pod, the inner pod including a cover, a base plate, and a spacer provided between the cover and the base plate, the spacer including a plurality of spacing contacts that contact the cover at cover features outside of the cover sealing surface and that contact the base plate at base plate features outside of the base plate sealing surface, and a frame that joins at least two of the plurality of spacing contacts. It contains The method wherein the cover and the base plate are separated by a gap.

[0065] Aspect 17. The method of aspect 16, wherein the frame includes a flexible arm, and assembling the inner pod includes bending the frame at the flexible arm to align at least one of the plurality of spacing contacts with one of the cover features or one of the base plate features.

[0066] Embodiment 18. The method of embodiment 16 or 17, wherein the gap has a width in the range of 20 μm to 1 mm.

[0067] Embodiment 19. A method according to any of embodiments 16 to 18, wherein the cover features are each pins and the base plate features are each channels including an introduction portion, and assembling the inner pod includes passing each of the pins through one of the spacing contacts and inserting each of the spacing contacts into one of the introduction portions.

[0068] Aspect 20. Placing an inner pod within an outer pod including a pod dome and a pod door; joining the pod dome to the pod door to encase the inner pod; and Transporting the reticle pod from the packaging location to the destination location with the pod dome attached to the pod door 20. The method of any one of aspects 16 to 19, further comprising:

[0069] The examples disclosed in this application are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is indicated by the appended claims, rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.

Claims

1. A spacer for a reticle pod, comprising: a plurality of spacing contacts, each of the plurality of spacing contacts configured to contact a first reticle pod portion at a first reticle pod feature and a second reticle pod portion at a second reticle pod alignment portion, the first reticle pod feature being outboard of a first sealing surface of the first reticle pod portion and the second reticle pod feature being outboard of a second sealing surface of the second reticle pod portion; a frame joining at least two of the plurality of spacing contact portions; It is equipped with a spacer, the spacing contacts configured to contact the first reticle pod portion and the second reticle pod portion such that the first reticle pod portion and the second reticle pod portion are separated by a gap;

2. The spacer of claim 1 , wherein the frame is configured to be outboard of the first sealing surface and the second sealing surface.

3. The spacer of claim 1 , wherein the frame joins all of the spacing contacts of the plurality of spacing contacts.

4. The spacer of claim 1 , wherein the frame comprises at least one spring arm configured to permit flexure of the frame such that the distance between the plurality of spacing contacts varies.

5. 2. The spacer of claim 1, wherein each of the spacing contacts includes an inner surface defining an opening configured to receive the first reticle pod feature and an outer surface configured to be received by the second reticle pod feature.

6. The spacer of claim 1 further comprising a lifting arm extending from the frame, the lifting arm including a flexible arm with a lifting contact.

7. an inner pod including a cover and a base plate, the cover including a cover sealing surface and a plurality of cover features outside the cover sealing surface, and the base plate including a base plate sealing surface and a plurality of base plate features outside the base plate sealing surface; Spacer and It is equipped with The spacer is a plurality of spacing contacts, each of the plurality of spacing contacts configured to contact one of the plurality of cover features and one of the plurality of base plate features; a frame joining at least two of the plurality of spacing contact portions; Equipped with The reticle pod, wherein the spacing contact is configured to contact the cover and the base plate such that the cover and the base plate are separated by a gap.

8. The reticle pod of claim 7 , wherein the frame is configured to be outboard of the cover sealing surface and the baseplate sealing surface.

9. The reticle pod of claim 7 , wherein the frame comprises at least one spring arm configured to allow flexure of the frame.

10. The reticle pod of claim 7 , wherein the cover feature is a pin and the base plate alignment portion is a channel configured to receive the pin, the channel including a lead-in portion.

11. The reticle pod of claim 10 , wherein each of the spacing contacts includes an inner surface defining an opening configured to receive the pin and an outer surface configured to be received in the lead-in.

12. The reticle pod of claim 7 , wherein the spacer includes a lifting arm extending from the frame.

13. 13. The reticle pod of claim 12, wherein the lifting arm includes a flexible arm having a lifting contact portion positioned to contact the cover.

14. The reticle pod of claim 7 , further comprising an outer pod including a pod dome and a pod door, said outer pod configured to house said inner pod.

15. 1. A method of preparing a reticle pod for transport, comprising: Assembling an inner pod, the inner pod including a cover, a base plate, and a spacer disposed between the cover and the base plate, the spacer including a plurality of spacing contacts contacting the cover at cover features outside a cover sealing surface and contacting the base plate at base plate features outside a base plate sealing surface, and a frame joining at least two of the plurality of spacing contacts. It contains The method wherein the cover and the base plate are separated by a gap.

16. 16. The method of claim 15, wherein the frame includes a flexible arm, and assembling the inner pod includes flexing the frame at the flexible arm to align at least one of the plurality of spacing contacts with one of the cover features or one of the base plate features.

17. The method of claim 15 , wherein the spacer comprises a lifting arm extending from the frame.

18. The method of claim 17 , wherein the lifting arm includes a flexible arm having a lifting contact portion positioned to contact the cover.

19. 17. The method of claim 16, wherein the cover features are each a pin and the base plate features are each a channel including a lead-in portion, and assembling the inner pod includes passing each of the pins through one of the spacing contacts and inserting each of the spacing contacts into one of the lead-in portions.

20. placing the inner pod within an outer pod including a pod dome and a pod door; joining the pod dome to the pod door to encase the inner pod; and transporting the reticle pod from a packaging position to a destination position with the pod dome joined to the pod door; 17. The method of claim 16, further comprising:

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