Closure assembly for vacuum valve

Abstract

a closure assembly (10) and a drive unit (7) connected to the closure assembly (10), the closure assembly (10) comprising a support element (20) with a first coupling surface and a closure plate (30, 40) with a second coupling surface, the first and second coupling surfaces being configured to couple the support element (20) to the closure plate (30, 40); the support element (20) and the closure plate (30, 40), a mounting portion and a retaining element, the closure plate (30, 40) being combined with the support element (20), the mounting portion and the retaining element being correspondingly configured such that cooperation between the mounting portion and the retaining element in the combined state generates a clamping force directed perpendicular to the extension of at least one of the coupling surfaces, the retaining element protruding beyond each coupling surface and having a curved boundary for cooperating with the mounting portion.

Description

[Technical Field]

[0001] The present invention relates to a closure assembly for a vacuum valve, comprising a support element, a removable closure plate and a coupling system for attaching the closure plate to the support element. [Background technology]

[0002] Generally, valves are provided in particular to make the flow of fluids adjustable. The valves can allow flow over a maximum valve opening cross section or completely block it. Furthermore, certain types of valves offer the possibility to adjust the amount of flow per unit time, i.e., the adjustability of the fluid flow.

[0003] Vacuum valves constitute a special category of valves, which are known in various embodiments from the prior art for adjusting the volumetric or mass flow rate and / or for substantially gas-tightly closing a flow path extending through an opening formed in a valve housing, and are used in particular in vacuum chamber systems in the field of IC, semiconductor or substrate manufacturing, which must be carried out in a protective atmosphere and as free as possible from the presence of contaminating particles.

[0004] Such a vacuum chamber system comprises, in particular, at least one evacuable vacuum chamber provided for accommodating a semiconductor element or substrate to be processed or manufactured, the vacuum chamber having at least one vacuum chamber opening through which the semiconductor element or another substrate can be introduced into the vacuum chamber and removed from the vacuum chamber, and at least one vacuum pump for evacuating the vacuum chamber.

[0005] For example, in a manufacturing facility for semiconductor wafers or liquid crystal substrates, the highly sensitive semiconductor elements or liquid crystal elements pass sequentially through a number of process vacuum chambers, in which the components located therein are processed by a respective processing device. During the processing process inside the process vacuum chambers and during transport from chamber to chamber, the highly sensitive semiconductor elements or substrates must always be located in a protective atmosphere, in particular an air-free environment.

[0006] For this purpose, on the one hand, peripheral valves are used to open and close gas supply or discharge paths, and on the other hand, transfer valves are used to open and close transfer openings in the vacuum chamber for introducing and discharging components.

[0007] The vacuum valves through which the semiconductor components pass are called vacuum transfer valves based on the described field of use and the associated dimensions, square valves based on their mainly rectangular opening cross section, and gate valves, square gates or transfer gate valves based on their usual functional form.

[0008] Peripheral valves are used, inter alia, to control or regulate gas flow between a vacuum chamber and a vacuum pump or another vacuum chamber. They are located, for example, within a piping system, between a process vacuum chamber or transfer chamber and a vacuum pump, atmosphere, or another process vacuum chamber. The open cross-section of such valves, also called pump valves, is usually smaller than that of vacuum transfer valves. Peripheral valves are also called regulating valves, since, depending on the application, they are used not only to completely open or close an opening by continuously adjusting the open cross-section between a fully open position and a gas-tight closed position, but also to control or regulate the flow. One possible peripheral valve for controlling or regulating gas flow is the pendulum valve.

[0009] In a typical pendulum valve, such as that disclosed in U.S. Pat. No. 6,089,537 (Olmsted), in a first step, a typically circular valve disc is pivoted over a typically circular opening from a position that opens the opening to an intermediate position where it overlaps the opening. In the case of gate valves, such as those described in U.S. Pat. No. 6,416,037 (Geiser) or U.S. Pat. No. 6,056,266 (Blecha), the valve disc and opening are often rectangular, and in a first step, the valve disc of the pendulum or gate valve is linearly displaced from a position that opens the opening to an intermediate position where it overlaps the opening. In this intermediate position, the valve disc of the pendulum or gate valve is positioned spaced apart from and opposite a valve seat surrounding the opening. In a second step, the distance between the valve disc and the valve seat is reduced, so that the valve disc and the valve seat are pressed evenly against each other, effectively closing the opening in a gas-tight manner. The second movement is preferably in a direction substantially perpendicular to the valve seat.

[0010] The sealing may be achieved, for example, by a sealing ring disposed on the closing surface of the valve disc and pressed against a valve seat extending around the opening, or by a sealing ring provided on the valve seat against which the closing surface of the valve disc presses. The two-step closing operation ensures that the sealing ring between the valve disc and the valve seat is not subjected to shear forces that could destroy it, because the movement of the valve disc in the second step is substantially linear and perpendicular to the valve seat.

[0011] Various sealing devices are known from the prior art, for example from U.S. Patent No. 6,629,682 (Duelli). Suitable materials for sealing rings and seals in vacuum valves are, for example, fluororubbers, also called FKM, in particular the fluoroelastomers known under the trade name "Viton", as well as perfluororubbers, abbreviated as FFKM.

[0012] Based on the prior art, for example U.S. Pat. No. 6,089,537 (Olmsted) for pendulum valves and U.S. Pat. No. 6,416,037 (Geiser) for gate valves, various drive systems are known to achieve a combination of rotational movement of the valve disc parallel across the opening in pendulum valves and translational movement in gate valves, with a substantial translational movement perpendicular to the opening.

[0013] The pressing of the valve disc against the valve seat, particularly in vacuum applications, must not only ensure the required gas-tightness across the entire pressure range, but also prevent damage to the sealing medium, particularly the sealing material or the sealing ring (e.g., O-ring), due to excessive pressure loads. To ensure this, known valves have a pressing pressure adjustment that adjusts depending on the pressure difference between the two valve disc sides. However, it is not always possible to ensure an even force distribution around the entire circumference of the sealing ring, especially during large pressure fluctuations or changes from negative pressure to positive pressure or vice versa. However, the goal is generally to decouple the sealing ring from the supporting force that arises due to the pressure applied to the valve.

[0014] During the course of operation of a vacuum valve, changes in the valve components typically occur due to wear of the sealing material or sealing surfaces due to environmental influences (temperature, moisture, collisions, etc.) and structural changes in the valve components, e.g., the drive unit or the valve rod.

[0015] To avoid possible leaks or to maintain a consistently high level of sealing quality, the valve-closing body is typically replaced or updated at specified time intervals. Such maintenance intervals are typically estimated based on the number of expected opening and closing cycles within a specified period or on the number and characteristics of the effects (e.g., process gases) that occur. Maintenance is typically performed preventively so that leaks can be sufficiently prevented in advance.

[0016] In this case, replacing the entire valve closing body, i.e., the entire valve disc, is typically associated with a lot of work, which is undesirable. For this reason, the vacuum system must usually be at least partially vented in order to be able to carry out the replacement. For the replacement itself, the valve disc is separated from the drive and a new disc is used. After the replacement, the previously vented part must then be evacuated and purged. Summary of the Invention [Problem to be solved by the invention]

[0017] SUMMARY OF THE INVENTION The problem underlying the present invention is therefore to provide an improved vacuum valve, in particular a valve closure body, which reduces or avoids the above-mentioned drawbacks. [Means for solving the problem]

[0018] This problem is solved by realizing the features stated in the characterizing part of the independent claims.Alternative or advantageous refinements of the invention can be found in the dependent claims.

[0019] The idea behind the invention is to form the valve closing body from multiple parts, in which case the closing plate can be attached modularly and separably to a support structure (support element), and the closing plate preferably has a sealing material for sealing. Maintenance can be carried out accordingly easily by simply replacing the closing plate alone, in which case the support element can remain connected to the drive unit of the vacuum valve.

[0020] The connection of the closing plate to the support element can be realized in particular by a tight joint, in which case one of the two components, i.e. the closing plate or the support element, has a mounting part and the respective other component has a holding element as a counterpart.

[0021] The closing plate and the support element can preferably be connected to one another by pressing them together, and can be configured in such a way that the cooperation of the rest and the holding element is achieved by or during this pressing together, thereby generating a clamping force that presses or attracts the closing plate onto the support element.

[0022] The rest and / or the holding element may in particular have an undercut profile for generating a clamping force, in which case the undercut profile in particular has a surface oblique to the joining or sealing surface.

[0023] The present invention therefore relates to a vacuum valve for regulating a volumetric or mass flow rate and / or opening or closing a valve opening, the vacuum valve comprising a valve opening defining an opening axis and a valve seat having a first sealing surface extending to surround the valve opening, a closure assembly for regulating the volumetric or mass flow rate and / or for substantially gas-tightly closing the valve opening by means of a second sealing surface corresponding to the first sealing surface, and a drive unit coupled to the closure assembly, the drive unit configured to provide movement of the closure assembly from an open position, in which the closure assembly at least partially opens the valve opening, to a closed position, in which the first sealing surface and the second sealing surface are in sealing contact with each other by a sealing material present therebetween, thereby gas-tightly closing the valve opening, and vice versa.

[0024] The closure assembly includes a support element with a first coupling surface and a closure plate with a second coupling surface, the first and second coupling surfaces configured to couple the support element to the closure plate. The closure assembly also includes a mounting portion and a retaining element, where the first coupling surface includes the mounting portion and the second coupling surface includes the retaining element, or the first coupling surface includes the retaining element and the second coupling surface includes the mounting portion.

[0025] The closing plate is combined with the support element, and the support portion and the holding element are correspondingly configured so that cooperation of the support portion and the holding element in the combined state generates a clamping force directed perpendicular to the extension of at least one of the joining surfaces.

[0026] The holding elements project beyond each of the coupling surfaces and have curved borders for cooperating with the rests.

[0027] The sealing material may be provided in particular on the first or second sealing surface, for example as an O-ring in a groove in the closure plate or vulcanized to the closure plate.

[0028] The support may in particular be configured as a groove, in particular as a dovetail groove. The support may in particular provide a support line or a support surface.

[0029] The rest is particularly configured to allow the generation of a clamping force. Alternatively or additionally, the rest may be configured in such a way that a precise relative positioning of the closure plate and the support element can be provided by the provided rest lines or rest surfaces.

[0030] The closing plate and the support element preferably extend primarily in one direction of extension, which corresponds to the direction of maximum spatial extent of the respective component, and this extension may also be referred to as the width of the closing plate or the respective support element.

[0031] Orthogonal to the extension direction, each component typically has a height that is smaller than its width.

[0032] In a third spatial direction orthogonal to the extension direction and height, each component has a thickness.

[0033] The connecting system of the closure assembly may in particular be configured so that the closure plate and the support element are joined together by pressing them together in a direction perpendicular to the extension direction, in particular along a defined direction, with contact preferably being present between the closure plate and the support element during the joining, the connecting surfaces of both of these components being at least partially in contact by the rests and / or holding elements during the joining.

[0034] When pressed together, the support and the retaining element come into working contact. This cooperation between the retaining element and the support, on the one hand, holds the closure plate on the support element, and on the other hand, generates a pressing force that presses the closure plate against the support element. In this pressed-together state, the closure plate can be fixed in position on the support element. The fixing can be achieved by applying a force in the direction of the pressing, for example by a screw fastening.

[0035] By applying a force, the base and the holding element can be pressed together. Both elements, i.e., the base and the holding element, are preferably designed in such a way that the clamping force acting perpendicular to the connecting surface is variable depending on the applied force. In other words, the greater the force required to fix the closure plate on the support element, the greater the clamping force can be.

[0036] In one embodiment, the vacuum valve may have a curved boundary line with a radius of curvature r, and the width b of the first or second coupling surface may correspond to at least 20 times the radius of curvature r. Correspondingly, b≧r×20 may apply.

[0037] In this case, the boundary line in particular defines at least a part of the edge of the holding element, and in one embodiment, the boundary line may also define (i.e. at least partially include) the area of ​​the holding element which exerts a clamping effect together with the rest.

[0038] In one embodiment, the holding elements may have a rounded or trussed head shape at the end projecting beyond the respective connecting surface.

[0039] The shape of the holding element may be provided by an object having an extent that increases over a predetermined range in a direction perpendicular to the distance normal as the distance from the respective bonding surface increases. The cross section of the round-headed object may have the shape of a trapezoid, in particular an isosceles trapezoid.

[0040] The boundary line may in particular be given by the perimeter of the protruding object with its greatest extent in the direction perpendicular to the spacing normal.

[0041] In particular, the round-headed retaining element provides an undercut in the direction of the joining surface.

[0042] In one embodiment, the boundary line may be an ellipse, a circle, or a semicircle. Alternatively, the boundary line may describe a polygon.

[0043] In one embodiment, the first or second connecting surface may have a receiving portion, in particular a recess or hole with an internal thread, for attaching the retaining element. This provides the advantage that the retaining element can be quickly and easily used on the connecting surface or replaced, for example, if damaged. For this purpose, the retaining element may have a configuration that corresponds to the shape and extent of the receiving portion.

[0044] In one embodiment, a retaining element may be rigidly attached to each of the attachment surfaces.

[0045] In one embodiment, the mounting part has a curved mounting line for cooperating with the holding element, the mounting line having a radius of curvature r, and the width b of the first or second coupling surface may correspond to at least 15 times the radius of curvature r. In one configuration, the mounting line defines an ellipse, a circle or a semicircle.

[0046] In particular, the restraining line can be formed corresponding to the boundary line of the holding element, so that its course and / or dimensioning can at least substantially correspond to the course and / or dimensioning of the boundary line, thereby optimizing the clamping of the closure plate to the support element so that the clamping force at a defined position of the closure plate has the desired amount (magnitude).

[0047] In one embodiment, the closure plate may have attachment elements protruding from a coupling surface of the closure plate for releasably coupling the closure plate to the support plate.

[0048] In particular, the mounting element may be formed to project relative to the connection surface and have a recess, in particular a hole, extending through it for guiding the mounting means, in particular a screw.

[0049] In one embodiment, the mounting element has a stopper oriented parallel to the extension direction of the closure plate, and the support element has a centering surface corresponding to the stopper, and cooperation between the stopper and the centering surface may provide orientation of the closure plate relative to the support element.

[0050] This allows for precise orientation, particularly in the extension direction, in particular so that the closure plate and the support element are positioned one above the other in the desired position and / or so that, for example, the position of the periphery of the closure plate corresponds to the position of the periphery of the support element.

[0051] The mounting elements, which are rigidly connected to the closure plate, advantageously simplify the assembly and joining of the closure plate and the support element, since the position of the mounting elements can be defined and fixed, and the mounting counterparts can be arranged and shaped accordingly to match the support element.

[0052] The convex shape and position of the mounting element allows for a predefined centering or desired positioning relative to the support in the assembly direction (parallel to the height of the closure plate), which facilitates assembly of the closure plate on the support element and prevents, for example, excessively strong pressing of both components.

[0053] In one embodiment, the support element has a first guide element extending perpendicular to the extension direction of the support element, the first guide element having a rectangular groove which may provide an undercut, and the closure plate has a second guide element which may have an undercut, in particular a dovetail, for connection to the rectangular groove.

[0054] In particular, the second guide element may be provided by a holding element.

[0055] Such a guide provides an advantageous assembly aid during the assembly of the closure plate and the support element, as the plate can thus be urged against the support by means of the guide, which already provides for the relative positioning of the components.

[0056] In one embodiment, the closure assembly may have at least two, in particular four, retaining elements, and the second connecting surface may have at least two retaining elements. The arrangement of the retaining elements allows for simplified and easy orientation of the closure plate relative to the support element. In particular, if the retaining elements are formed as round heads (round head pins) or truss heads, this provides for a simple, precise, and at the same time robust connection and fastening.

[0057] In one embodiment, the vacuum valve may include an isolation device for isolating the process ambient region from the outer ambient region.

[0058] The process atmosphere area is particularly understood to be an area that can be defined by a process chamber. In this area, a process atmosphere, particularly a vacuum, can be generated for processing the substrate. The components provided for this area must be sufficient, for example, in terms of material resistance and high requirements. Correspondingly, the outer atmosphere area is particularly understood to be an area where normal atmospheric conditions, for example, room air, exist.

[0059] In this embodiment, the drive unit can be at least partially, in particular completely, assigned to the outer atmosphere region, and the valve-closing body can be assigned, in particular, to the process atmosphere region.

[0060] The isolating device of the valve may be formed, for example, by a bellows, which may be provided, for example, inside the valve housing or the drive unit.

[0061] A valve known from the prior art, as described in U.S. Pat. No. 6,772,989, for example, has a valve body with two connections, a valve seat located within a flow chamber in a passage connecting the two connections, and an opening located opposite the valve seat. A piston of a pneumatic cylinder system is located in a valve cover that closes the opening. This piston drives a valve disc, which opens and closes the valve seat, via a valve rod. The valve cover is gas-tightly attached to the opening by a bellows plate. Both ends of a bellows surrounding the valve rod are gas-tightly attached to the inner edge surface of the bellows plate and the valve disc. The valve disc has an annular retaining groove on its surface facing the valve seat, in which a sealing ring is located.

[0062] The valve housing is typically made of aluminum or stainless steel, or is internally coated with aluminum or another suitable material, while the valve disc and bellows are often made of steel. The bellows, which can expand and contract along its longitudinal axis within the disc's displacement stroke, airtightly seals the flow chamber from the valve rod and drive. Two types of bellows are commonly used: diaphragm bellows and corrugated bellows. These have the advantage over diaphragm bellows in that they have no welded seams and are easier to clean, but they have a smaller maximum stroke.

[0063] The present invention also relates to a closure assembly for a vacuum valve for adjusting a volumetric or mass flow rate and / or opening and closing a valve opening. The closure assembly includes a clutch configured to couple to a drive unit of the vacuum valve and a second sealing surface corresponding to a first sealing surface of a valve seat of the vacuum valve. The closure assembly further includes a support element with a first coupling surface and a closure plate with a second coupling surface, the first and second coupling surfaces configured to couple the support element to the closure plate. The closure assembly also includes a mounting portion and a retaining element, where the first coupling surface includes the mounting portion and the second coupling surface includes the retaining element, or the first coupling surface includes the retaining element and the second coupling surface includes the mounting portion.

[0064] The closure plate is combined with the support element, and the support and the holding element are correspondingly configured so that cooperation of the support and the holding element in the combined state generates a clamping force directed perpendicular to the extension of at least one of the connecting surfaces, the holding element protruding beyond each connecting surface and having a curved boundary for cooperation with the support.

[0065] In one embodiment, the support element has a third connecting surface opposite the first connecting surface and a further closing plate, which is connected to the support element via the third connecting surface, and a further holding element of the closing plate or of the support element may cooperate to clamp with a further mounting part of the closing plate or of the support element.

[0066] At least one of the closure plates of the closure assembly, in particular both closure plates, may be present according to one of the following embodiments according to the invention.

[0067] The present invention also relates to a closure plate for the closure assembly described above, which has a second sealing surface corresponding to the first sealing surface of the valve seat of the vacuum valve and carrying a sealing material (seal), and which is adapted to be coupled to the first or third coupling surface of the support element of the closure assembly and is provided on the rear side of the closure plate relative to the sealing surface, in particular oriented in the opposite direction to the sealing surface.

[0068] The closure plate has a retaining element configured such that, when the closure plate is combined with the support element, cooperation between the support element and the retaining element generates a clamping force directed perpendicular to the extension of the second connecting surface, the retaining element protruding beyond the second connecting surface and having a curved border for cooperation with the support element.

[0069] In one embodiment, the curved boundary line has a radius of curvature r, and the width b of the second bonding surface may correspond to at least 15 times the radius of curvature r.

[0070] In one embodiment, the second connecting surface may have a receiving portion, in particular a recess or a hole with an internal thread, for attaching the holding element.

[0071] In one embodiment, the retaining element may be rigidly attached to the second attachment surface.

[0072] In one embodiment, the retaining element may have a rounded head at the end that projects beyond the second coupling surface.

[0073] In one embodiment, the boundary line may be an oval, a circle, or a semicircle.

[0074] In one embodiment, the closure plate may have attachment elements protruding from the second coupling surface for releasably coupling the closure plate to a support element of the closure assembly.

[0075] In particular, the mounting element may be formed to overhang the second connecting surface and have a recess, in particular a hole, extending through the mounting element for guiding the mounting means, in particular a screw.

[0076] In particular, the mounting element may have a stopper oriented parallel to the extension direction of the closure plate, and the support element may have a centering surface corresponding to the stopper, and cooperation between the stopper and the centering surface may provide orientation of the closure plate relative to the support element.

[0077] In the following, a valve according to the invention or a closure assembly thereof will be described in more detail, purely by way of example, on the basis of examples which are shown diagrammatically in the drawings, in which identical elements are provided with identical reference numerals, and in which the described embodiments are generally not drawn to scale and are not to be construed as limiting. [Brief explanation of the drawings]

[0078] [Figure 1a] 1 shows a first embodiment of a closure assembly according to the invention, comprising a support element and a closure plate; [Figure 1b] 1 shows a first embodiment of a closure assembly according to the invention, comprising a support element and a closure plate; [Figure 1c] 1 shows a first embodiment of a closure assembly according to the invention, comprising a support element and a closure plate; [Figure 2]1 shows a retaining element of a closure assembly according to the present invention; [Figure 3a] 10 shows another embodiment of a closure assembly according to the invention with a support element and a closure plate; FIG. [Figure 3b] 10 shows another embodiment of a closure assembly according to the invention with a support element and a closure plate; FIG. [Figure 4a] 10 shows another embodiment of a closure assembly according to the invention with a support element and a closure plate; FIG. [Figure 4b] 10 shows another embodiment of a closure assembly according to the invention with a support element and a closure plate; FIG. [Figure 5a] 10 shows another embodiment of a closure assembly according to the invention with a support element and a closure plate; FIG. [Figure 5b] 10 shows another embodiment of a closure assembly according to the invention with a support element and a closure plate; FIG. [Figure 6a] 1 is a diagram showing an embodiment of a vacuum valve according to the present invention; [Figure 6b] 1 is a diagram showing an embodiment of a vacuum valve according to the present invention; [Figure 6c] 1 is a diagram showing an embodiment of a vacuum valve according to the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0079] 1a to 1c show an embodiment of a closure assembly 10 according to the invention as well as a closure plate 30 according to the invention. In Fig. 1a, the closure assembly 10 according to the invention is shown, which comprises a support element 20, a first closure plate 30 and a second closure plate 40. The closure plate 30 is shown in partial perspective in order to clearly show its connection to the support element 20, which is located intermediate the closure plates 30, 40.

[0080] By arranging the two closing plates 30, 40 on either side, the valve closing body can provide a seal for two valve openings, which are located opposite each other, and for this purpose, the valve closing body can be selectively pressed against one of the openings.

[0081] Figure 1b shows the connecting surface of the closure plate 30. Figure 1c shows the sealing surface 32 located on the opposite side of the closure plate 30 from the connecting surface 31. This sealing surface 32 has a seal extending all around its periphery, which provides the desired sealing effect.

[0082] Four holding elements 33a to 33d are arranged on the connecting surface 31 of the closing plate 30. In the illustrated configuration, the holding elements 33a to 33d are arranged along a straight line on the connecting surface 31. The closing plate 30 further has four mounting elements 34a to 34d.

[0083] The support element 20 has a rest 21 on its connecting surface 24 .

[0084] The holding elements 33a-33d are arranged and configured to cooperate with the rests 21 of the support element 20 in the assembled and joined state (see FIG. 1a). In this case, the holding elements 33a-33d rest on the rests and clamp the closure plate 30 to the support element 20. Corresponding clamping forces act perpendicular to the extension direction E of the joined components and perpendicular to the direction defining the height h of the closure plate 30. The width b of the closure plate 30 is typically determined by its extension in the extension direction E.

[0085] To provide the clamping force, the retaining elements 33a-33d are formed as round heads in the illustrated configuration. Figure 2 shows a perspective view of the retaining element 33a formed as a round head. The remaining retaining elements 33b-33d are formed similarly. The round head shape provides an increasing expansion in the direction perpendicular to the distance from the closure plate 30 as the distance increases.

[0086] The retaining element 33a (and each of the remaining retaining elements 33b-33d) thereby presents a retaining surface 35a which extends obliquely relative to the surface of the joining surface. Due to the oblique extension of this retaining surface 35a, the closure plate 30 is pressed against the support element 20 when it is assembled with the latter, by cooperation with the resulting support element 21. In particular, for this reason, when the closure plate 30 is already in contact with the support element 20, it is pressed against this support element 20 in the joining direction F. For this purpose, the support element 21 may present an obliquely extending support surface similar to a round head, which allows a simple and precise joining of both components.

[0087] As a result, in the joined state, the placement surface and the holding surface 35a are in contact with each other, and in particular, the placement surface and the holding surface 35a are in surface contact with each other.

[0088] The support 21 may be configured as an edge or a groove, may extend over the entire width of the support element or may be formed from several parts in the form of individual segments, in particular in this case corresponding in number, shape and size to the holding elements 33a-33d.

[0089] At their ends, i.e. in the region with the greatest distance from the connecting surface 31, the retaining elements 33a-33d each have a diameter d (twice the radius r) that is at least 10 times, in particular 15 or 20 times smaller than the width b, the diameter decreasing accordingly as the surface of the closing plate 30 is approached.

[0090] The mounting elements 34a-34d are arranged to overhang the upper end of the closure plate 30. As shown in Fig. 1a, the closure plate 30 may be attached to the support element 20 by the mounting elements 34a-34d. In the illustrated embodiment, the closure plate 30 is screw-fastened to the support element 20 by the mounting elements 34a-34d.

[0091] The positioning of the mounting elements 34a-34d also provides a limitation of the movement of the closure plate 30 (in the joining direction F) relative to the support element 20 during assembly (pushing together), thereby allowing a definition of the relative orientation of the components. Assembly can therefore be carried out simply and without much prior knowledge on the part of the user.

[0092] For the same precise orientation of the closure plate 30 relative to the support element 20 in the extension direction E, the mounting elements 34b, 34c each have lateral stops 36b, 36c that are oriented in opposite directions (parallel to the extension direction E). The support element 20 has centering surfaces 22b, 22c that cooperate and correspond to the stops 36b, 36c.

[0093] When the support element 20 and the closing plate 30 are pressed together, the stops 34b-34c come into contact with the centering surfaces 22b-22c, which are configured so that the distance between the two abutment surfaces 34b-34c substantially corresponds to the distance between the two centering surfaces 22b-22c. The horizontal orientation is automatically achieved when the components are pressed together, thereby providing a simple and reliable assembly.

[0094] 3a and 3b show another embodiment of a closure assembly 10 according to the present invention and a closure plate 30 according to the present invention.

[0095] In contrast to the embodiment shown in Figures 1a to 1c, the closure plate 30 has guide elements 37a, 37b in this embodiment instead of the mounting elements 34a to 34d.

[0096] In such an embodiment, the guide elements 37a-37b may each have an undercut, in particular dovetail-shaped, for connection to the groove. The undercuts are provided on opposite sides of the guide elements 37a-37b. The support element 20 accordingly has corresponding guide elements 23 extending perpendicularly to the extension direction E of the support element 20. In the illustrated configuration, the guide elements 23 of the support element 20 each have a rectangular groove on both sides, which provides the undercut.

[0097] The cooperation of the guide elements 37a-37b with the guide element 23 provides, on the one hand, a precise relative orientation of the closure plate 30 with respect to the support element 20 in the extension direction E, and, on the other hand, a simple and reliable guide when pressing both components together.

[0098] In the illustrated configuration, the closing plate 30 is fixed to the support element 20 by a separate fastening element, which is fixed, for example screwed, to the upper surface of the support element 20 and presses the closing plate 30 in the joining direction F. This ensures that the holding elements 33a-33d cooperate with the base 21 to fasten the closing plate 30 to the support element 20 and that the guide elements hold the closing plate 30 on the support element 20.

[0099] 4a and 4b show another embodiment of a closure assembly 10 according to the invention and a closure plate 30 according to the invention.

[0100] 3a and 3b, the closing plate 30 has only two retaining elements 33b, 33c instead of four retaining elements 33a to 33d, both of which are furthermore located at different positions.

[0101] Both retaining elements 33b, 33c act as guide elements on the closure plate side when the closure plate 30 is assembled with the support element 20 and are positioned to engage in grooves provided by the guide elements 23 on the support element side. Furthermore, both retaining elements 33b, 33c come into contact with the base 21 when the desired positioning relative to the support element 20 in the joining direction F is achieved, thereby resulting in clamping as well as accurate positioning.

[0102] Furthermore, the closure plate 30 may be held on the support element 20 by further guide elements 37a-37b. Alternatively or additionally, the closure plate 30 may be held on the support element 20 by means of mounting bodies provided thereon. For this purpose, the mounting bodies may have corresponding edges which engage in corresponding pieces provided on the closure plate 30.

[0103] 5a and 5b show another embodiment of a closure assembly 10 according to the invention and a closure plate 30 according to the invention.

[0104] In contrast to the previously described embodiment, the closing plate 30 has two different retaining elements 33e, 33f instead of the four round-headed retaining elements 33a-33d, which in the illustrated configuration are formed integrally with the connecting bodies 38a, 38b, respectively, which are stepped from the connecting surface 31. The retaining elements 33e, 33f are provided on the undersides of the connecting bodies 38a, 38b, which face in the connecting direction F.

[0105] The connecting bodies 38a, 38b further have lateral guide elements 37a-37b for a precisely guided pressing-in with the support element 20.

[0106] The support part 21 of the support element 20 can furthermore have recesses corresponding to the arrangement and shape of the holding elements 33e, 33f, so that in the pressed-together state the holding elements 33e, 33f lie in the recesses, which cooperation provides for centering of the closure plate 30 on the support element 20, in particular in the extension direction E. The one-piece construction shown provides a robust and compact variant for precise and simple assembly of the closure plate 30 on the support element 20.

[0107] 6a to 6c show an embodiment of a vacuum valve 1 according to the invention, configured as a (double-sided) vacuum transfer valve 1, in different closed positions.

[0108] The vacuum valve 1 includes a closure assembly 10 according to the present invention, which includes two closure plates (valve disks) 30, 40. Each closure plate has a sealing surface 32a, 32b with a seal for gas-tightly closing the opening 2a, 2b. The openings have a cross-sectional area corresponding to the closure plate and are formed in a valve wall, which may be, for example, a wall of a vacuum process chamber. The openings 2a, 2b are surrounded by valve seats 3a, 3b, respectively, which themselves also provide sealing surfaces corresponding to the sealing surfaces of the closure plates. The sealing surfaces 32a, 32b of the closure plates 30, 40 extend around each closure plate and include a sealing material (seal). In the closed position S (FIG. 6c), the seal is pressurized between the sealing surfaces. The openings 2a, 2b connect the gas region M to the gas regions L, R.

[0109] Naturally, the valve seats 3a, 3b together with their sealing surfaces may alternatively be formed as valve components that are structurally firmly connected to the valve 1 and may, for example, be arranged, for example screwed, in the chamber opening.

[0110] As shown in Figures 6a to 6c, the closure assembly 10 may be arranged on a displacement arm 5, which in the illustrated configuration is, for example, rod-shaped and extends along a geometric displacement axis V. The displacement arm 5 is mechanically coupled to a drive unit 7, by means of which the closure assembly 10 can be displaced in the first gas region M from an open position O (Figure 6a) via an intermediate position Z (Figure 6b) to a closed position S (Figure 6c) by displacement of the displacement arm 5 by the drive unit 7.

[0111] In the open position O, the closure assembly 10 is positioned outside the projected areas of the openings 2a, 2b, completely opening the openings 2a, 2b, as shown in FIG. 6a.

[0112] The closure assembly 10 can be displaced from the open position O to the intermediate position Z by the drive unit 7 by linearly displacing the closure assembly 10 in the axial direction, in a plane parallel to the displacement axis V or coaxial with the displacement axis V and parallel to the valve wall.

[0113] In this intermediate position Z (FIG. 6b), the sealing surfaces 32a, 32b are in a spaced apart facing position relative to the sealing surfaces of the valve seat surrounding the openings 2a, 2b.

[0114] The closure assembly 10 can be displaced from the intermediate position Z to the closed position S (FIG. 6c) by displacement in the direction of the opening axis A defined by the openings 2a, 2b (in the illustrated configuration, transverse to the displacement axis V), i.e., for example, perpendicular to the wall and the valve seat.

[0115] In the closed position S, the closing plate 30 closes the opening 2a gastightly and separates the gas region M from the gas region R gastightly.

[0116] The opening and closing of the vacuum valve is effected by the drive unit 7, which in the illustrated configuration is effected by, for example, an L-shaped movement of the closure assembly 10 in two mutually perpendicular directions. Naturally, analogous to the closure of the opening 2a by the closure plate 30, the closure assembly 10 can be displaced in the other direction along the axis A to provide a gas-tight seal of the opening 2b by the closure plate 40.

[0117] A transfer valve 1 as shown is typically provided for sealing a process volume (vacuum chamber) as well as for loading and unloading the volume. Such use usually involves frequent switching between the open position O and the closed position S, which leads to increased wear of the sealing surfaces 32a, 32b, seals, and mechanically moving components. Easy replacement or maintenance of the sealing elements is provided by the modular, separable arrangement of the closing plates 30, 40 according to the invention.

[0118] Of course, these illustrated drawings only show possible implementations in a schematic manner, and the various approaches may be combined with each other and with prior art devices and methods.

Claims

1. A vacuum valve (1) for adjusting the volumetric or mass flow rate and / or for opening or closing valve openings (2a, 2b), comprising: a valve seat (3, 3b) having the valve opening (2a, 2b) defining an opening axis (A) and a first sealing surface extending to surround the valve opening (2a, 2b); a closure assembly (10) for adjusting the volumetric or mass flow rate and / or for closing the valve openings (2a, 2b) in a substantially gas-tight manner by means of second sealing surfaces (32, 32a, 32b) corresponding to the first sealing surfaces; a drive unit (7) coupled to said closure assembly (10), for driving said closure assembly (10) from an open position (O) in which the closure assembly at least partially opens the valve openings (2a, 2b), The first and second sealing surfaces (32, 32a, 32b) are in sealed contact with each other by the sealing material present therebetween, whereby the valve openings (2a, 2b) are gas-tightly closed in the closed position (S). a drive unit (7) configured to provide movement of the closure assembly (10) so that it can be displaced and reversely displaced from the closed position (S) to the open position (O); A vacuum valve (1) comprising: The closure assembly (10) comprises: a support element (20) with a first connecting surface (24) and a closure plate (30, 40) with a second connecting surface (31), the first and second connecting surfaces (24, 31) being configured to connect the support element (20) to the closure plate (30, 40); a resting part (21) and holding elements (33a-33f), the first coupling surface (24) has the resting portion (21) and the second coupling surface (31) has the holding element (33a-33f), or the first coupling surface (24) has the holding elements (33a-33f) and the second coupling surface (31) has the mounting portion (21); a mounting portion (21) and holding elements (33a-33f); and the closing plate (30, 40) is combined with the support element (20), and the base (21) and the holding elements (33a-33f) are configured in such a way that, in the combined state, cooperation between the base (21) and the holding elements (33a-33f) generates a clamping force directed perpendicular to the extension of at least one of the connecting surfaces (24, 31), The holding elements (33a-33f) project beyond the respective coupling surfaces (24, 31) and have curved borders for cooperating with the rests (21). A vacuum valve (1).

2. 2. The vacuum valve (1) according to claim 1, characterized in that the curved boundary line has a radius of curvature r, and the width b of the first or second connecting surface (24, 31) corresponds to at least 20 times the radius of curvature r.

3. 3. The vacuum valve according to claim 1, wherein the first or second connecting surface (24, 31) has a receiving portion, in particular a recess or a hole with an internal thread, for attaching the holding element (33a-33f).

4. 3. Vacuum valve according to claim 1 or 2, characterized in that the retaining elements (33a-33f) are rigidly connected to the respective connecting surfaces (24, 31).

5. 5. A vacuum valve according to claim 1, wherein the retaining elements (33a-33f) have a rounded head at the end projecting beyond each of the connecting surfaces (24, 31).

6. 6. The vacuum valve according to claim 1, wherein the boundary line is an ellipse, a circle or a semicircle.

7. the resting portion (21) is a curved resting line for cooperating with the holding elements (33a-33f), - has a radius of curvature r, and the width b of said first or said second coupling surface (24, 31) corresponds to at least 20 times said radius of curvature r, and / or - oval, circular or semicircular; 7. The vacuum valve according to claim 1, further comprising a mounting wire.

8. 8. The vacuum valve according to claim 1, wherein the closure plates (30, 40) have mounting elements (34a-34d) protruding from the connecting surfaces (31) of the closure plates (30, 40) for detachably connecting the closure plates (30, 40) to the support element (20).

9. 9. The vacuum valve according to claim 8, wherein the mounting elements (34a-34d) are formed to protrude relative to the connecting surface (31) and have recesses, in particular holes, extending through the mounting elements (34a-34d) for guiding mounting means, in particular screws.

10. 10. The vacuum valve according to claim 8, wherein the mounting elements (34a-34d) have stoppers (36b, 36c) oriented parallel to the extension direction of the closure plates, and the support element (20) has centering surfaces (22c, 22d) corresponding to the stoppers (36b, 36c), and the closure plates (30, 40) are oriented relative to the support element (20) by cooperation of the stoppers (36b, 36c) and the centering surfaces (22c, 22d).

11. the support element (20) has a first guide element (23) extending perpendicularly to the extension direction of the support element, the first guide element having a rectangular groove, the rectangular groove providing an undercut; The closing plates (30, 40) have second guide elements (37a, 37b) which have undercuts, in particular dovetail-shaped, for connection to the rectangular grooves.

11. A vacuum valve according to any one of claims 1 to 10, characterized in that it comprises a valve.

12. 12. The vacuum valve according to claim 11, characterized in that the second guide element is provided by the retaining element.

13. 13. Vacuum valve according to any one of claims 1 to 12, characterized in that the closure assembly (10) has at least two, in particular four, retaining elements, and the second coupling surface (31) has at least two retaining elements.

14. A closure assembly (10) for a vacuum valve (1) for adjusting the volumetric or mass flow rate and / or for opening or closing a valve opening (2a, 2b), comprising: a clutch adapted to be coupled to the drive unit (7) of said vacuum valve (1); - second sealing surfaces (32, 32a, 32b) corresponding to the first sealing surfaces of the valve seats (3a, 3b) of the vacuum valve (1); A closure assembly (10) comprising: a support element (20) with a first connecting surface (24) and a closure plate (30, 40) with a second connecting surface (31), said first and second connecting surfaces (24, 31) being configured to connect said support element (20) to said closure plate (30, 40); a resting part (21) and holding elements (33a-33f), the first coupling surface (24) has the resting portion (21) and the second coupling surface (31) has the holding element (33a-33f), or the first coupling surface (24) has the holding elements (33a-33f) and the second coupling surface (31) has the mounting portion (21); a mounting portion (21) and holding elements (33a-33f); is provided, the closing plate (30, 40) is combined with the support element (20), and the base (21) and the holding elements (33a-33f) are configured in such a way that, in the combined state, cooperation between the base (21) and the holding elements (33a-33f) generates a clamping force directed perpendicular to the extension of at least one of the connecting surfaces (24, 31), The holding elements (33a-33f) project beyond the respective coupling surfaces (24, 31) and have curved borders for cooperating with the rests (21). A closure assembly (10) characterized in that:

15. 15. The closure assembly (10) according to claim 14, characterized in that the support element (20) has a third connecting surface opposite the first connecting surface (24) and a further closure plate (40), which is connected to the support element (20) via the third connecting surface, and a further holding element of the closure plate or the support element cooperates in a clamping manner with a further mounting part of the closure plate or the support element.

16. A closure plate (30, 40) for a closure assembly (10) according to claim 14 or 15, comprising: a second sealing surface (32, 32a, 32b) corresponding to the first sealing surface of the valve seat (3a, 3b) of the vacuum valve (1) and comprising a sealing material; a second coupling surface (31) configured to couple to the first or third coupling surface (24) of the support element (20) of the closure assembly (10) and provided on the rear side of the closure plate (30, 40) relative to the sealing surface (32, 32a, 32b); - retaining elements (33a-33f) configured such that, when the closing plate (30, 40) is combined with the support element (20), a clamping force directed perpendicular to the extension of the second connecting surface (31) is generated by cooperation between the support element (20) and the retaining elements (33a-33f), Equipped with the holding elements (33a-33f) protrude beyond the second coupling surface (31) and have a curved border for cooperating with the rest (21); Closure plates (30, 40).

17. 17. Closure plate (30, 40) according to claim 16, characterized in that the curved boundary line has a radius of curvature r, and the width b of the second connecting surface corresponds to at least 20 times the radius of curvature r.

18. The closing plate (30, 40) according to claim 16 or 17, characterized in that the second connecting surface (31) has a receiving portion, in particular a recess or a hole with an internal thread, for attaching the holding element (33a-33f).

19. Closure plate (30, 40) according to any one of claims 16 to 18, characterized in that the holding elements (33a-33f) are rigidly connected to the second connecting surface.

20. The closing plate (30, 40) according to any one of claims 16 to 19, characterized in that the retaining elements (33a-33f) have a rounded head at the end that projects beyond the second connecting surface (31).

21. Closure plate (30, 40) according to any one of claims 16 to 20, characterized in that the boundary line is an ellipse, a circle or a semicircle.

22. The closure plate (30, 40) according to any one of claims 16 to 21, characterized in that the closure plate (30, 40) has mounting elements (34a-34d) protruding from the second connecting surface (31) for detachably connecting the closure plate (30, 40) to a support element (20) of the closure assembly (10).

23. 23. Closure plate (30, 40) according to claim 22, characterized in that the mounting elements (34a-34d) are formed to protrude relative to the second connecting surface (31) and have recesses, in particular holes, extending through the mounting elements (34a-34d) for guiding mounting means, in particular screws.

24. The closure plate (30, 40) according to claim 22 or 23, characterized in that the mounting elements (34a-34d) have stops (36b, 36c) oriented parallel to the extension direction (E) of the closure plate (30, 40), and the support element (20) has centering surfaces (22b, 22c) corresponding to the stops (36b, 36c), and the cooperation of the stops (36b, 36c) and the centering surfaces (22b, 22c) provides orientation of the closure plate (30, 40) relative to the support element (20).

Images