Apparatus and method for measuring or processing objects

Abstract

The present invention relates to an apparatus (1) for measuring and / or processing an object (7), comprising a specimen slide (6) on which an object (7) can be placed, a working head (9) associated with the specimen slide (6) for measuring or processing the object (7), and a frame (2) having support elements for carrying the specimen slide (6), in particular a table (3) and an arm (4) for holding the working head (9). According to the invention, a plurality of individually actuable distributed clamping devices (12) are associated with the specimen slide (6), and the clamping devices (12) are designed to clamp the specimen slide (6) with a predetermined force for local reinforcement depending on the vibration behavior of the specimen slide (6), the object (7), and / or the working head (9) in order to provide local reinforcement of the specimen slide (6) that minimizes vibrations of the working head (9) and the object (7) relative to each other.

Description

[Technical Field]

[0001] This application claims priority from German Patent Application No. 10 2022 210 368.8, filed September 30, 2022, the contents of which are incorporated herein by reference in their entirety.

[0002] The present invention relates to an apparatus for measuring and / or processing an object, in particular a scanning force microscope, comprising a specimen slide on which an object can be placed, a working head associated with the specimen slide for measuring or processing the object, and a frame having a table for carrying the specimen slide and an arm for holding the working head.

[0003] The present invention also relates to a method of operating the device. [Background technology]

[0004] Apparatuses of the above-mentioned type are known in the prior art. Particularly when processing and / or measuring objects or workpieces used in microlithography, especially optical elements such as mirrors and lenses, devices capable of measuring and / or processing objects with very high precision are advantageous. However, devices with precision in the nanometer or picometer range, such as scanning force microscopes, are sensitive to external vibrations, i.e., disturbances from the outside, e.g., from the floor on which the device rests or airborne noise, as well as slight vibrations of the device itself. Resonant frequencies within the device are a key factor in the relative motion between the object and a working head, which is specifically designed as a measuring head for measurements or a processing head for processing the object. If these resonant frequencies are undesirable or if the motion between the working head and the object is in antiphase, e.g., if the object and working head move toward or away from each other near their respective resonant frequencies, the measurement or processing results will be affected by stochastic or deterministic interference signals, resulting in a decrease in measurement or processing quality. If there are high levels of disturbances, e.g., from the floor, this can lead to large displacements between the object and the working head, which can increase errors, particularly measurement or processing errors, many times over. Summary of the Invention [Problem to be solved by the invention]

[0005] Accordingly, the present invention seeks to create an improved apparatus and method of operating the apparatus that advantageously minimizes processing or measurement errors. [Means for solving the problem]

[0006] The problem underlying the present invention is solved by an apparatus having the features of claim 1 and a method having the features of claim 10. An advantage of the present invention is that by locally stiffening the specimen slide, the vibration behavior of the specimen slide, and thus the vibration behavior of an object positioned on the specimen slide, is or can be influenced to optimize the processing or measurement results of the apparatus. To this end, in the apparatus according to the present invention, a plurality of individually actuable distributed clamping devices are associated with the specimen slide, and each clamping device is designed to clamp the specimen slide with a predetermined force depending on the vibration behavior of the specimen slide, the object, and / or the working head to provide a localized stiffening of the specimen slide that minimizes vibrations of the working head and the object relative to each other. In other words, depending on the vibration behavior of the specimen slide, the object, and / or the working head, the specimen slide is fixed with a predetermined force such that the specimen slide is locally stiffened, and the localized stiffening of the specimen slide minimizes relative vibrations between the working head and the object, i.e., between the working head and the object. Due to the distributed clamping devices, the specimen slide can be stiffened at different points by each clamping device. When a clamping force is applied to the specimen slide by the clamping device, the specimen slide is stiffened in this region, which affects the vibration behavior of the specimen slide at least in this region. Thus, for example, the vibration mode of the specimen slide can be particularly influenced by, for example, setting up in-phase vibration of the working head and the object at the measurement or processing point in order to minimize the relative vibration of the working head and the object relative to each other. By individually controlling or operating the clamping devices, the overall measurement or processing result can be optimized. Preferably, the working head is held opposite the specimen slide by an arm. The working head is preferably held above or below the specimen slide, to the side of the specimen slide, or diagonally to the side of the specimen slide. The specific arrangement depends, inter alia, on the application. Preferably, the arm is attached or held at one end by a frame. Alternatively, the arm is preferably supported or held at both ends by a frame, such as part of a gantry. In some cases, the arm can be moved, particularly in a gantry-like manner, preferably on rails.According to yet another embodiment, the frame with the arms is preferably mounted so as to be movable or displaceable relative to the table.

[0007] Preferably, the clamping devices are evenly distributed over the entire specimen slide. This allows the vibration behavior of the specimen slide to be advantageously adapted to various objects by appropriate control or actuation of the clamping devices. It is particularly preferred that the clamping devices or at least some of the clamping devices are arranged in a matrix, i.e., distributed in rows and columns, in order to always ensure an advantageous influence on the vibration behavior. According to an alternative embodiment, the clamping devices or at least some of the clamping devices are arranged in an annular or circular pattern. According to yet another embodiment of the invention, the clamping devices are arranged depending on the vibration behavior of the specimen slide and / or the object in order to ensure an optimal and precise influence of the vibration behavior.

[0008] According to a preferred embodiment of the present invention, the specimen slide has a plurality of recesses, each of which has an annular, in particular circular, side wall and which are open at least towards the table, and in at least some of the recesses, at least a partial area of ​​one of the clamping devices is arranged. Thus, the specimen slide has a plurality of recesses, and one of the clamping devices is arranged in each of the recesses or in at least some of the recesses, in order to locally reinforce the specimen slide, if necessary. Since the clamping devices engage in the recesses of the specimen slide, they are distributed over the entire length and width of the specimen slide, and if necessary, the specimen slide can be reinforced, for example, in areas away from its edges. The clamping devices are preferably attached to the table or directly to the bottom surface of the specimen slide, which is attached to the table or rests on the table.

[0009] According to a preferred embodiment of the present invention, at least one of the clamping devices includes at least two clamping jaws, which are positioned at least partially in one of the recesses and can be displaced in different directions so as to clamp against the side walls of the recess, thereby applying tension to the specimen slide from the inside. The clamping jaws abut the side walls of the recesses inside and are either fixed to each other or subjected to forces in different directions, thereby fixing the specimen slide within the recess by applying forces in different directions to the specimen slide within the recess. By applying forces, the specimen slide is reinforced in the area around the affected recess, resulting in the above-mentioned influence on the vibration mode or vibration behavior.

[0010] Preferably, the clamping device has more than two clamping jaws, in particular three or four clamping jaws, which are evenly distributed around the clamping device, so that the application of force results in a uniform force on the specimen slide. Preferably, the clamping jaws have an outer contour which corresponds to the inner contour of the side wall, so that they can advantageously face or rest against the side wall of the recess to ensure a permanent and safe transfer of force, and in particular of large forces.

[0011] Furthermore, each clamping device preferably has at least one controllable actuator associated with the clamping jaws, which actuator is in particular a pneumatically, hydraulically, electrically, or electromagnetically operated and / or operable actuator designed to displace the clamping jaws and / or apply or release force to or from the clamping jaws. Thus, according to one embodiment, the actuator of each clamping device can be used to individually set the clamping force for each clamping device for applying force to the specimen slide, which clamping force is specified, in particular by the control unit, as a function of the vibration behavior of the specimen slide and / or the working head, as described above, in order to minimize relative movements between the working head and the specimen slide or object. According to an alternative embodiment, the actuator preferably has at least one spring element, which is pretensioned to press the clamping jaws against the specimen slide and locally stiffen the specimen slide, and which can be elastically deformed or pretensioned by activating the actuator, in particular pneumatically, hydraulically, electrically, or electromagnetically, to release the clamping force. As a result, localized reinforcement of the specimen slide can be maintained without the need for active force application, resulting in an energy-efficient solution.

[0012] Preferably, at least one clamping device has a clamping cone or wedge, and the clamping jaws are longitudinally displaceably attached to the clamping cone or wedge so that they can be displaced laterally by the clamping cone or wedge while being displaced longitudinally to generate or reduce clamping force or local reinforcement. Thus, the clamping force is generated by the wedge elements, particularly by an actuator that longitudinally displaces each clamping element along the wedge, so that the wedge displaces laterally while displacing the element longitudinally. The transmission ratio provided by the wedge shape allows for the generation of large lateral forces. Preferably, the clamping cone or wedge is centrally positioned in each clamping device so that at least two clamping jaws hold the clamping cone or wedge therebetween. When the two clamping jaws move longitudinally along the wedge, they move toward or away from each other to generate or release the clamping force. The particularly symmetrical arrangement of the clamping jaws and the central placement of the clamping cones or wedges ensure favorable force distribution from the clamping device to the specimen slide.

[0013] It is also preferred that the device has a specially designed control unit that controls the clamping device individually depending on the vibration behavior of the specimen slide and / or object, on the one hand, and the working head, on the other hand. Thus, the control unit controls the clamping device to apply or release a clamping force in order to locally reinforce the specimen slide so that its vibration behavior is advantageously adapted to the vibration behavior of the working head, so that relative vibrations are minimized during the processing or measuring process. The control unit automatically controls the clamping device, which means that, for example, various objects can be processed or measured in a short time.

[0014] Preferably, the control unit is specially designed to control the clamping device to bring at least the natural frequency of the object and the disturbance into different frequency ranges, thereby preventing the disturbance from causing resonant vibrations of the specimen slide and / or the object that may affect the work result.

[0015] The method according to the invention, characterized by the features of claim 10, is characterized in that the specimen slide is locally stiffened with one or more selected clamping devices, each with a predetermined force, depending on the vibration behavior of the specimen slide, the object, and / or the working head. This provides the advantages already mentioned above. By taking into account the vibration behavior of the specimen slide, the object, and / or the working head, stiffening at locally selected points on the specimen slide ensures that the relative vibration between the object and the working head is reduced or optimized during the working process. In particular, the vibration behavior of the specimen slide is influenced by controlling the clamping devices in such a way that the object and the working head vibrate in phase at the measuring or working point of the device.

[0016] Preferably, the vibration behavior of the specimen slide, the object, and / or the working head is determined by testing and / or calculated. Preferably, a finite element method is used for the calculation of the vibration modes of the specimen slide, taking into account in particular the objects positioned on the specimen slide. This allows the specimen slide to be stiffened locally with high precision by controlling the clamping device, so that the vibration modes can be influenced and the vibration behavior can be optimized.

[0017] According to a further preferred development of the invention, the clamping device is controlled by detected or determined vibration modes of the specimen slide and / or object on the one hand and of the working head on the other hand, which provides the advantages already mentioned above.

[0018] Preferably, the clamping device is controlled in response to detected, determined or predicted disturbances, thereby ensuring that the disturbances do not affect the vibration between the working head and the object. In particular, as already mentioned above, the vibration behavior or frequency of the specimen slide and / or the object and / or the working head is moved outside the frequency range of the disturbances by stiffening the specimen slide with the clamping device at appropriate points.

[0019] Furthermore, it is preferred that the clamping device is controlled according to the resonant frequency of the device, which, as mentioned above, prevents reaching natural frequencies of the device, in particular of the working head or the specimen slide, which could seriously impair the work result.

[0020] Preferably, the position of the object on the specimen slide is predetermined according to the shape, size, and weight of the object. The position / positioning of the object on the specimen slide further influences its vibration behavior. If an advantageous position is selected from the beginning, the vibration behavior of the specimen slide can also be advantageously influenced and optimized, for example, by controlling the smallest clamping device.

[0021] Further advantages and preferred features and feature combinations emerge particularly from the foregoing and from the claims.The invention will now be explained in more detail with reference to the accompanying drawings, in which: FIG. [Brief explanation of the drawings]

[0022] [Figure 1] 1 shows a simplified diagram of an advantageous apparatus; [Figure 2] 1 shows a simplified diagram of the device in operation. [Figure 3] 1 shows a simplified top view of the specimen slide of the device. [Figure 4A] 1 shows a simplified diagram of an exemplary embodiment of a clamping device of the device; [Figure 4B] 1 shows a simplified diagram of an exemplary embodiment of a clamping device of the device; [Figure 5A] 1 shows a schematic diagram of the vibration behavior of the device in one operating state. [Figure 5B] 1 shows a schematic diagram of the vibration behavior of the device in one operating state. DETAILED DESCRIPTION OF THE INVENTION

[0023] FIG. 1 shows a simplified diagram of an advantageous device for measuring an object. The device 1 comprises a frame 2 or stand having at least one support element, in particular a table 3, and an arm 4, which leads from and is arranged above and spaced apart from the table 3. The support element, in particular the table 3, can itself be complemented by, for example, legs 5, which serve to support the support element or table 3 on a floor, such as a hall floor or a room floor. A specimen slide 6 is arranged on the support element or table 3, on which an object 7 to be examined or measured can be placed. The specimen slide 6 is plate-shaped and, according to this exemplary embodiment, has a rectangular outer contour. The specimen slide 6 rests on a base 8, which rests on the table 3. Alternatively, the base 8 is omitted.

[0024] The working head 9 is also called a measuring head, since it is held on the arm 4 and is used to measure the object 7. The working head 9 is held, for example, on a device 10 attached to the arm 4, which device 10 is designed to support and in particular pivot the working head 9 so that the object 7 can be scanned or measured up to its surface.

[0025] Figure 2 shows the ideal vibration-free state of the apparatus 1, as shown in Figure 1, with a dashed line, and the state affected by vibration with a solid line; the vibrations are exaggerated for clarity. The frame 2, specimen slide 6, and working head 9 can be induced to move by external disturbances, such as the floor and / or by movement of the working head 9, as well as by airborne sound. In this case, the apparatus 1 is designed as a scanning force microscope, used to mechanically scan the surface of an object 7 and measure scanning forces in the nanometer range. Therefore, even slight vibrations or oscillations of the working head 9 and the object 7 can lead to poor measurement results. Large and heavy measuring instruments, such as the present apparatus 1, are particularly susceptible to floor vibrations and acoustic influences, due to their relatively soft structure and low natural frequencies. Unfavorable locations of resonant frequencies and out-of-phase movements between the object 7 and working head 9 can result in significant interference that distorts the measurement results. If the floor excitation is also very large in the range of the resonant frequency, this can lead to large displacements between the object 7 and the working head 9, thereby increasing the measurement error many times over.

[0026] In order to achieve advantageous working results with the apparatus 1 despite the presence of external disturbances, whether acoustic or floor vibrations, a clamping system 11 is associated with the specimen slide 6, which allows the specimen slide 6 to be locally stiffened at selected points. For this purpose, the clamping system 11 comprises a plurality of individually controllable clamping devices 12 which are able to apply a clamping force to the specimen slide 6 so that the specimen slide 6 is locally stiffened.

[0027] 3 shows a schematic top view of the underside of a specimen slide 6 facing the table 3, the specimen slide 6 being formed with recesses 13 which, according to this exemplary embodiment, are arranged in a matrix and open towards the table 3. Clamping devices 12 are associated with some or all of the recesses 12.

[0028] 4A and 4B show different exemplary embodiments of such clamping devices in cross section. Each clamping device 12 protrudes at least partially into one of the recesses 13 of the specimen slide 6. The clamping device 12 has a clamping wedge 14 arranged on a base 8, the cross section of which tapers in the direction of the specimen slide 6. Two clamping jaws 15 are attached to the clamping wedge 14 so as to be longitudinally movable. Each clamping jaw 15 has a contact surface 16 associated with the clamping wedge 14, which contact surface abuts the clamping wedge 14 in a face-to-face manner. On its outer side, facing away from the clamping wedge 14, the clamping jaw 15 has a clamping surface 17, which is designed to abut a side wall 17 of the recess 13 in a face-to-face manner. Advantageously, the recess 13 has an annular or continuous side wall 17, which may be circular or annular, as shown in FIG. 3 by way of example. Therefore, the clamping surfaces 17 of the clamping jaws 15 are preferably designed with a curved outer contour that corresponds to the curvature of the side walls 17 to ensure surface contact.

[0029] The clamping jaws 15 are mounted on the clamping edge 14 so as to be displaceable in the longitudinal direction, i.e., perpendicular to the plane of the specimen slide 6, and an actuator 18 having a displaceable actuator element 19 is associated therewith. The actuator 18 is designed, for example, as a pneumatic, hydraulic, electric, and / or electromagnetic actuator, which moves the actuator 19 as needed to apply or release the clamping force of the clamping jaws 15. In this case, the actuator element 19 engages the rear of the clamping jaws 15 such that activation of the actuator 18 displaces the clamping jaws 15 towards the base 8, as shown by the arrows in FIG. 4A , so that the clamping jaws 15 are spread apart by the clamping wedges 14. When the clamping jaws 15 are spread apart, they press against the side walls 17 of the recess 13 and are clamped together or by the clamping wedges 14 and the side walls 17. On the one hand, the specimen slide 6 is clamped to the base 8 or support element or table 3, and on the other hand, the specimen slide 6 is locally reinforced in the area of ​​the clamping device 12 under control, in particular by the clamping force and the associated material compression in the area of ​​the recess side walls 17. Preferably, one or more return springs are associated with the clamping jaws 15, which return the clamping jaws 15 to their initial position as soon as the actuating force of the actuator 18 is released or sufficiently reduced.

[0030] Alternatively, instead of a return spring, the actuator 18 has at least one spring element that is preloaded to tension the clamping jaws against the specimen slide 6, in particular to displace the actuator element towards the base 8. That is, the clamping force is provided by the spring element so that it does not have to be actively maintained. Preferably, the actuator 18 is designed so that it can be controlled pneumatically, hydraulically, electrically, and / or electromagnetically to release the clamping jaws 15 against the force of the spring element and relieve the local stiffening.

[0031] Yet another exemplary embodiment of the clamping device 12 is shown in Figure 4B. It differs from the exemplary embodiment of Figure 4A in that the clamping jaws 15 or clamping elements do not interact with the clamping wedges 14 but instead receive the clamping force directly from the actuator 18 so that they are forced apart in order to be clamped against the side walls 17 of the associated recesses 13. For this purpose, the actuator 18 comprises, for example, a spindle gear or an electromagnetic drive which interacts with the clamping jaws 15.

[0032] The control unit 19 of the device 1 is designed to individually or selectively control the clamping device 12 depending on the vibration behavior of the specimen slide 6, the object 7 and / or the working head 9 to achieve local reinforcement of the specimen slide 6, thereby minimizing the relative vibration or movement of the working head 9 and the object 7 relative to each other.

[0033] The principle will be explained with reference to Figures 5A and 5B. Figure 5A shows, as an example, the working head 9 and the surface of the object 7 facing the working head 9. When the working head 9 and the object 7 oscillate in opposite phases, the oscillation alternately maximizes and minimizes the distance between the working head 9 and the object 7, and different measurement results are recorded depending on the measurement time. Figure 5A shows, as an example, the maximum distance with a solid line and the minimum distance with a dashed line.

[0034] However, as shown in FIG. 5B, when the object 7 and the working head 9 oscillate in the same phase, the working head 9 and the object 7 oscillate together rather than oscillate relative to each other, so that the distance between the working head 9 and the surface of the object 7 is the same or approximately the same regardless of the measurement time.

[0035] The clamping devices 12 thus act as variable stiffening elements in the intermediate region between the object 7 / specimen slide 6 and the working head 9, and can influence the shape of the vibration modes of the specimen slide 6 and the object 7 in such a way that the relative movement between the working head 9 and the measured object 7 is minimized. The equalization of the resonance points of the two vibrating individual structures and the resulting optimal control of the clamping devices 12 are preferably determined by tests or calculated, with the finite element method being particularly used for the calculation. In this way, the vibration behavior of, for example, the specimen slide 6 can be determined and advantageously influenced by the control of selected ones of the clamping devices 12.

[0036] 5A and 5B show examples of clamping devices 12, in which all clamping devices 12 are activated in Fig. 5A to locally stiffen the specimen slide 6, whereas in the embodiment of Fig. 5B only two of the clamping devices 12, shown in dashed lines, are deactivated or not activated to provide additional local stiffening of the specimen slide 6. Depending on the operating state of the clamping devices 12, the vibration behavior of the specimen slide 6 and thus of the object 7 can be influenced, in particular ensuring in-phase vibration of the object 7 and the working head 9.

[0037] Depending on the shape, size and weight of the object 7, in particular an optical element such as a mirror or a lens, an optimum position of the object 7 on the specimen slide 6 is determined and stored, in particular for each object 7. As a result, the vibration behavior can be optimized by optimally positioning the object 7 on the specimen slide 6. If the floor vibrations coincide with resonance points of the object 7, these resonance points are preferably equalized by individually activated clamping devices 12 so that undesired resonance peaks do not occur.

[0038] To improve the measurement result, the frequency range to which the measurement range is sensitive can be intentionally shifted outside the resonant frequency range of the device 1. This is the case, for example, when there is a corresponding spatial wavelength range that is desirable in certain locations, such as in tactile roughness measurement techniques, but is not important for the process measurement technique in other locations. Thus, depending on the measurement process and the object 7 to be measured, the control unit 19 can individually control the clamping device 12 to ensure optimal measurement results.

[0039] Although the present exemplary embodiment refers to a measuring device, in particular a scanning force microscope, in which the working head 9 is designed as a measuring head, the described technique can also be used in machining devices, such as milling or grinding devices, in which unwanted dynamic relative movements can occur during machining between the workpiece (object 7) and the working head 9, in which case the working head 9 is designed as a machining head. These unwanted relative movements can also be avoided or at least minimized by the advantageous adaptive clamping system 11.

[0040] As mentioned above, the design of the device 1 is particularly advantageous for dynamic problems. However, the advantageous design also improves measurement or work results in the case of static problems. For example, if the static relative displacement of the processing or measuring head (working head 9) and the specimen slide 6 is too large, the clamping system 11 with the clamping device 12 can ensure a more desirable static support combination that better corresponds to the target shape of the object 7 and the subsequent use of the object 7. In particular, the object 7 is clamped in a state that is as close as possible to the state in the case of the subsequent actual load.

Claims

1. 1. An apparatus (1) for measuring and / or processing an object (7), in particular a scanning force microscope, comprising: a specimen slide (6) on which an object (7) can be placed; a working head (9) associated with the specimen slide (6) for measuring or processing the object (7); and a frame (2) having a table (3) for carrying the specimen slide (6) and an arm (4) for holding the working head (9), characterized in that a plurality of individually actuable distributed clamping devices (12) are associated with the specimen slide (6), each clamping device (12) designed to clamp the specimen slide (6) with a predetermined force for local reinforcement depending on the vibration behavior of the specimen slide (6), the object (7), and / or the working head (9) in order to provide local reinforcement of the specimen slide (6) that minimizes vibrations of the working head (9) and the object (7) relative to each other.

2. 2. The apparatus according to claim 1, characterized in that the clamping devices (12) are evenly distributed over the specimen slide (6).

3. 3. The apparatus according to claim 1 or 2, characterized in that the specimen slide (6) has a plurality of recesses (13) which are open at least towards the support element and each have an annular, in particular circular, side wall (17), and in each of at least some of the recesses (13) one of the clamping devices (12) is at least partially arranged.

4. 4. The device according to claim 1, wherein at least one of the clamping devices (12) comprises at least two clamping jaws (15), which are at least partially positioned in one of the recesses (13) and which can be displaced in different directions so as to be able to clamp against the side wall (17) of the recess (13).

5. 5. Apparatus according to claim 4, characterized in that said at least one of the clamping devices (12) has more than two, in particular three or four, clamping jaws (15) evenly distributed.

6. 6. Device according to claim 4 or 5, characterized in that at least one controllable actuator (18) is associated with said clamping jaw (15), in particular a pneumatically, hydraulically, electrically or electromagnetically operated and / or operable actuator (18), designed to apply or release a force to said clamping jaw (15).

7. 7. The apparatus according to claim 4, wherein the at least one clamping device (12) comprises a clamping cone or wedge (14), the clamping jaws (15) being longitudinally displaceably mounted on the clamping cone or wedge (14) so ​​as to be displaced laterally by the clamping cone or wedge (14) while being longitudinally displaced to generate or reduce a clamping force.

8. 8. The device according to any one of claims 1 to 7, characterized by a control unit (19) specially designed to individually control the clamping device (12) depending on the vibration behavior of the specimen slide (6), the object (7) and / or the working head (9).

9. 9. The device according to claim 8, characterized in that the control unit (19) is specially designed to individually control the clamping devices (12) for at least natural frequencies of the object (7) and disturbances in different frequency ranges.

10. 10. A method for operating an apparatus (1) for measuring and / or processing objects (7), in particular as claimed in any one of claims 1 to 9, comprising a specimen slide (6) on which an object (7) can be placed, a working head (9) associated with the specimen slide (6) for measuring or processing the object (7), and a frame (2) having a support element (3) for carrying the specimen slide (6) and an arm (4) for holding the working head (9), characterized in that the specimen slide (6) is locally reinforced with a predetermined force by one or more selected clamping devices (12) depending on the vibration behavior of the specimen slide, the object (7) and / or the working head (9).

11. 11. The method according to claim 10, characterized in that the vibration behavior of the specimen slide (6), the object (7) and / or the working head (9) is determined by testing and / or calculated, in particular by the finite element method.

12. 12. The method according to claim 10 or 11, characterized in that the clamping device (12) is controlled by detected or determined vibration modes of the specimen slide (6), the object (7) and / or the working head (9).

13. The method according to any one of claims 10 to 12, characterized in that the clamping device is controlled in response to a detected or determined disturbance.

14. Method according to any one of claims 10 to 13, characterized in that the clamping device is controlled depending on the resonant frequency of the device (1).

15. 15. The method according to any one of claims 10 to 14, characterized in that the position of the object (7) on the specimen slide (6) is predetermined depending on the shape, size and weight of the object (7).

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