Gas distribution port insert and device including same

Abstract

Gas distribution port inserts, and apparatus for use therewith, can inhibit or at least reduce process gas interaction with and / or back-diffusion into gas distribution bodies including the gas distribution port inserts associated with semiconductor processing tools.

Description

[Technical Field]

[0001] Incorporated by reference: PCT applications are being filed concurrently herewith as part of this application. Each application to which this application claims the benefit or priority identified in a concurrently filed PCT application is incorporated herein by reference in its entirety for all purposes. [Background technology]

[0002] Semiconductor processing tools can be used to perform various semiconductor processing operations, including deposition and etching operations. Some of these operations can be performed on the frontside or backside of the wafer. For example, a deposition or etching operation can be performed on the backside of the wafer by flowing one or more process gases from gas distribution ports in the showerhead pedestal toward the backside of the wafer and one or more purge gases, e.g., inert gases, from gas distribution ports in the showerhead toward the frontside of the wafer. In this manner, process gases may flow below the wafer in the wafer processing region to perform the deposition or etching operation, and purge gases may flow above the wafer to prevent or at least reduce the possibility of the process gases affecting the frontside of the wafer and / or structures thereon (or therein). During processing, a plasma can be generated by applying radio frequency (RF) power to the showerhead pedestal, which can act as a first electrode to support the wafer during processing. The faceplate or another portion of the showerhead can serve as a second electrode (e.g., ground) so that plasma exists between the backside of the wafer and the gas distribution surface of the showerhead pedestal. In some implementations, the roles of anode and cathode can be reversed, with RF power applied to the showerhead or a component thereof. In other cases, RF power can be applied to both the showerhead pedestal and the showerhead (or a component thereof), thereby using both as electrodes; for example, the wall of the semiconductor processing chamber is used as a ground. Note, however, that process gases can still flow over the wafer and interact with the showerhead and / or back-diffuse into the gas distribution ports of the showerhead.

[0003] The Background Art provided herein is intended to generally present the context for the present disclosure. The work of the inventors named herein, to the extent described in this Background Art, along with aspects described that may not otherwise be considered prior art at the time of filing, is not admitted explicitly or implicitly as prior art to the present disclosure. Summary of the Invention

[0004] The details of one or more implementations of the subject matter described herein are set forth in the accompanying drawings and the description below. Other features, aspects, and advantages will become apparent from the specification, drawings, and claims. The following non-limiting implementations are considered part of this disclosure, and other implementations will become apparent from the entirety of this disclosure and the accompanying drawings.

[0005] Some embodiments provide various gas distribution port inserts (or “inserts”) that can prevent or at least reduce process gas interaction with a gas distribution body (such as a showerhead, showerhead pedestal, etc.) and / or back-diffusion into gas distribution ports (or “ports”) of the gas distribution body, including at least one of the inserts associated with semiconductor processing operations on the first surface of a wafer. Therefore, one or more embodiments seek to provide an insert configured to achieve at least one of the following: 1) increasing the gap between the outer surface of the insert and the inner surface of the associated port to reduce the possibility of wear that may occur therebetween as a result of thermally induced movement of the insert relative to the port, thereby reducing the possibility of particle generation and / or shedding that may otherwise occur as a result of such wear; 2) injecting gas into the gap between the outer surface of the insert and the inner surface of the associated port to prevent process gas from entering the gap and the possibility that deposited material in the gap may later separate and form particles; and 3) generating a directional gas flow configured to at least partially propel gas radially outward from the axis, e.g., central axis, of the gas distribution body, thereby preventing process gas from entering the gap between the gas distribution body and the second surface of the wafer facing the gas distribution body and / or from reaching at least one of the ports, the insert, and the second surface of the wafer, or features formed thereon or therein.

[0006] Some embodiments provide an apparatus including one or more of the inserts, which can prevent or at least reduce process gas interaction with the apparatus (or gas distribution body of the apparatus) and / or back-diffusion into gas distribution ports of the apparatus (or gas distribution body of the apparatus) that include at least one of the inserts.

[0007] Additional aspects will be set forth in the following detailed description, and in part will be obvious from the disclosure or may be learned by practice of the disclosed embodiments and / or claimed subject matter.

[0008] According to some embodiments, a gas distribution port insert ("insert") includes a head portion, a body portion, a bore, and a plurality of gas exit orifices. The head portion includes a gas inlet face, an intermediate face opposite the gas inlet face in a first direction, and at least one first side face connecting the gas inlet face to the intermediate face. The body portion includes a proximal end extending from the head portion and adjacent the intermediate face, a distal end spaced from the proximal end in the first direction, and at least one second side face connecting the distal end to the proximal end. The distal end terminates at the first distal face. The bore extends from the gas inlet face through the head portion and partially through the body portion along a reference axis. The bore terminates at a second distal face within the body portion. The plurality of gas exit orifices are fluidly connected to the bore within the body portion and are arranged around the reference axis. The width of the head portion in a second direction transverse to the first direction is greater than the width of the body portion in the second direction.

[0009] In some embodiments, the proximal end of the gas exit orifice may be formed in the second distal face.

[0010] In some embodiments, the distal end of the gas exit orifice may be formed in the first distal face.

[0011] In some embodiments, the body portion may further include at least one third side connecting the first distal surface to the at least one second side, the at least one third side may be angled relative to the first distal surface, and a distal end of the gas exit orifice may be formed in the at least one third side.

[0012] In some embodiments, the slope angle of the at least one third side may be greater than 0° and less than 80°.

[0013] In some embodiments, the angle of inclination of the at least one third side may be about 45°.

[0014] In some embodiments, the gas exit orifice may extend longitudinally in a first direction.

[0015] In some embodiments, each longitudinally extending axis of the gas exit orifices may extend outward from the reference axis and may form a corresponding oblique angle with the reference axis.

[0016] In some embodiments, each longitudinally extending axis of the gas exit orifices may extend substantially perpendicular to the at least one third side.

[0017] In some embodiments, the insert may further include an additional gas exit orifice at the first distal end face, the gas exit orifice may be disposed around the additional gas exit orifice.

[0018] In some embodiments, the additional gas exit orifice may extend longitudinally in the first direction.

[0019] In some embodiments, the reference axis and the longitudinally extending central axis of the additional gas exit orifice may be substantially coincident.

[0020] In some embodiments, the longitudinally extending axes of the additional gas exit orifices may extend outward from the reference axis and may form an oblique angle with the reference axis.

[0021] In some embodiments, the length of each of the gas exit orifices can be from about 0.04 mm to about 0.6 mm.

[0022] In some embodiments, the length of each of the gas exit orifices may be from about 0.2 mm to about 0.3 mm.

[0023] In some embodiments, each of the gas exit orifices may have a longitudinally extending central axis and a maximum dimension in a plane perpendicular to the central axis. The corresponding maximum dimensions of the gas exit orifices may be substantially equal. The diameter of a reference circle may extend through the corresponding central axis of the gas exit orifice and may be greater than two times the maximum dimension and less than three times the maximum dimension.

[0024] In some embodiments, the diameter of the reference circle may be greater than about 0.08 mm and less than about 0.12 mm.

[0025] In some embodiments, each gas exit orifice in the gas exit orifices can have a central axis extending longitudinally, and the diameter of the reference circle can extend through the corresponding central axis of the gas exit orifice and can be greater than about 0.1 mm and less than about 0.3 mm.

[0026] In some embodiments, the total number of gas exit orifices may be "n", where "n" may be an integer greater than or equal to 2, and the angular pitch between adjacent gas exit orifices among the gas exit orifices may be approximately 360° / n.

[0027] In some embodiments, "n" may be six.

[0028] According to some embodiments, a gas distribution port insert ("insert") includes a head portion, a body portion, a bore, and multiple gas exit orifices. The head portion includes a gas inlet face, a mid-face opposite the gas inlet face in a first direction, and at least one first side face connecting the gas inlet face to the mid-face. The body portion includes a proximal end extending from the head portion and adjacent the mid-face, a distal end spaced from the proximal end in the first direction, and at least one second side face connecting the distal end to the proximal end. The distal end terminates at the first distal face. The bore extends from the gas inlet face through the head portion and partially through the body portion along a reference axis. The bore terminates at a second distal face within the body portion. The multiple gas exit orifices are on the at least one second side face and are fluidly connected to the bore within the body portion. The first gas exit orifice is disposed around the reference axis. The width of the head portion in a second direction transverse to the first direction is greater than the width of the body portion in the second direction.

[0029] In some embodiments, the plurality of gas exit orifices may include a first set of gas exit orifices and a second set of gas exit orifices offset in a first direction from the first gas exit orifices, whereby the first gas exit orifices are located closer to the proximal end of the body portion than the second gas exit orifices.

[0030] In some embodiments, the longitudinally extending axes of each of the gas exit orifices may extend outward from the reference axis.

[0031] In some embodiments, the longitudinally extending axes of each of the gas exit orifices may extend radially outward from the reference axis.

[0032] In some embodiments, each longitudinally extending axis may form a corresponding tilt angle in a first reference plane perpendicular to the reference axis.

[0033] In some embodiments, the second distal surface may abut some of the gas exit orifices.

[0034] In some embodiments, the intermediate surface may extend in a second reference plane, some of the gas exit orifices that border the second distal surface may form a second set of gas exit orifices, and a first gas exit orifice may be spaced apart from the second reference plane in a first direction.

[0035] In some embodiments, the intermediate surface may extend at a second reference plane, and the second reference plane may abut some of the gas exit orifices.

[0036] In some embodiments, some of the gas exit orifices that abut the second distal surface may form a second set of gas exit orifices, and some of the gas exit orifices that abut the second reference surface may form a first set of gas exit orifices.

[0037] In some embodiments, each first opening of the first set of gas exit orifices may have a corresponding first central axis tangent to at least one second side surface, and each second opening of the second set of gas exit orifices may have a corresponding second central axis tangent to at least one second side surface, and the first central axis may be circumferentially offset from the second central axis such that the first central axis does not coincide with the second central axis.

[0038] In some embodiments, the total number of gas exit orifices may be "n", where "n" may be an integer greater than or equal to 4, and the angular pitch between each one of the first central axes and a corresponding adjacent one of the second central axes may be approximately 360° / n.

[0039] In some embodiments, "n" may be 12.

[0040] In some embodiments, "n" may be 14.

[0041] In some embodiments, each opening of the first set of gas exit orifices may have a corresponding first central axis tangent to at least one second side surface, and each opening of the second set of gas exit orifices may have a corresponding second central axis tangent to at least one second side surface, and the first central axes may be substantially aligned with corresponding ones of the second central axes.

[0042] In some embodiments, the total number of first gas outlet orifices may be "k", where "k" may be an integer greater than or equal to 2, and the angular pitch between adjacent first central axes among the first central axes may be approximately 360° / k.

[0043] In some embodiments, "k" may be six.

[0044] In some embodiments, "k" may be seven.

[0045] In some embodiments, the total number of second gas exit orifices may be equal to the total number of first gas exit orifices.

[0046] In some embodiments, the second distal surface may be a generally conical surface having an apex that projects toward the first gas inlet surface in a direction opposite the first direction.

[0047] In some embodiments, the central axis of the hole may extend through the apex of the second distal face.

[0048] In some embodiments, one or more of the gas exit orifices may have a circular cross section in a plane perpendicular to their longitudinally extending axis.

[0049] In some embodiments, the holes and gas exit orifices are configured such that, upon gas flow through the insert, the pressure drop between the inlet of the hole and the outlet of each of the gas exit orifices is greater than or equal to 850×10 -4Torr or less, and the Knudsen number of the gas flow may be greater than 0.01 and less than 0.1.

[0050] In some embodiments, the pressure drop between the inlet of the hole and the outlet of each of the gas exit orifices is greater than or equal to 500×10 -4 It can be less than 1 / 4 inch.

[0051] According to some embodiments, a gas distribution port insert ("insert") includes a head portion, a body portion, a bore, and a gas exit orifice. The head portion includes a gas inlet face, an intermediate face opposite the gas inlet face in a first direction, and at least one first side face connecting the gas inlet face to the intermediate face. The body portion includes a proximal end extending from the head portion and adjacent the intermediate face, a distal end spaced from the proximal end in the first direction, and at least one second side face connecting the distal end to the proximal end. The distal end terminates at the first distal face. The bore extends from the gas inlet face through the head portion and partially through the body portion along a reference axis. The bore terminates at a second distal face within the body portion. The gas exit orifice includes a proximal end opening fluidly connected to the bore within the body portion and a distal end opening formed in the at least one second side face. The width of the head portion in a second direction transverse to the first direction is greater than the width of the body portion in the second direction.

[0052] In some embodiments, the insert may further include a recess in the gas inlet face. The recess may extend longitudinally in a third direction from the at least one first side surface to the first hole. The third direction may be transverse to the first direction. The depth of the recess in the first direction may be less than the height of the head portion in the first direction.

[0053] In some embodiments, the width of the recess in the second direction may be from about 0.02 mm to about 0.06 mm, and the height of the recess in the first direction may be from about 0.005 mm to about 0.02 mm.

[0054] In some embodiments, the distal end opening may be formed between or may extend between the first distal surface and at least one second side surface.

[0055] In some embodiments, the longitudinally extending central axis of the gas exit orifice may extend in a fourth direction transverse to the first direction.

[0056] In some embodiments, the first reference plane may be perpendicular to the first direction, and the angle between the first reference plane and the fourth direction may be between about 10° and about 30°.

[0057] In some embodiments, the third direction and the fourth direction may be substantially equivalent.

[0058] In some embodiments, the height of the gas exit orifice can be from about 0.02 mm to about 0.05 mm.

[0059] In some embodiments, the height of the gas exit orifice may extend in a fifth direction perpendicular to the fourth direction.

[0060] In some embodiments, the width of the gas exit orifice in the second direction can be from about 0.1 mm to about 0.2 mm.

[0061] In some embodiments, the fourth direction may be substantially perpendicular to the first direction.

[0062] In some embodiments, the gas exit orifice can include a first sidewall extending in a sixth direction oblique to a central axis of the gas exit orifice and a second sidewall extending in a seventh direction oblique to the central axis of the gas exit orifice, the seventh direction being different from the sixth direction.

[0063] In some embodiments, the first angle between the central axis of the gas exit orifice and the sixth direction may be between about 45° and about 75°, and the second angle between the central axis of the gas exit orifice and the seventh direction may be between about −45° and about −75°.

[0064] In some embodiments, the magnitudes of the first angle and the second angle may be substantially equal.

[0065] In some embodiments, the insert may further include an additional hole extending partially through the body portion and fluidly connecting the hole with the gas exit orifice.

[0066] In some embodiments, the additional hole may extend along the reference axis.

[0067] In some embodiments, the central axis of the additional hole may be offset from the central axis of the hole.

[0068] In some embodiments, the central axis of the additional hole may be offset from the central axis of the hole in a third direction.

[0069] In some embodiments, the offset may be between 0.01 mm and 0.03 mm.

[0070] In some embodiments, the width of the additional holes in the second direction may be less than or equal to the minimum width of the gas exit orifice in the second direction.

[0071] In some embodiments, the height of the gas exit orifice in the first direction may be less than the height of the additional hole in the first direction.

[0072] In some embodiments, the holes and gas exit orifices are configured such that, upon gas flow through the insert, the pressure drop between the inlet of the hole and the outlet of the gas exit orifice is greater than or equal to 850×10 -4 Torr or less, and the Knudsen number of the gas flow may be greater than 0.01 and less than 0.1.

[0073] In some embodiments, the pressure drop between the inlet of the hole and the outlet of the gas exit orifice is greater than or equal to 500×10 -4 It can be less than 1 / 4 inch.

[0074] According to some embodiments, a gas distribution port insert ("insert") includes a gas inlet, a body portion, a flange portion, a bore, and multiple gas outlet orifices. The gas inlet is configured to receive a flow of gas. The body portion includes a proximal end, a distal end spaced from the proximal end in a first direction, and a first section including a first thread and disposed between the proximal and distal ends. The flange portion extends from the distal end of the body portion. The flange portion includes a mating surface adjacent to the distal end and a first distal surface spaced from the mating surface in the first direction. The bore extends from the proximal end toward the distal end along a reference axis. The bore is fluidly connected to the gas inlet and terminates at a second distal surface inside the body portion. The multiple gas outlet orifices are in the first distal surface. The gas outlet orifices are fluidly connected to the bore inside the body portion and are arranged around the reference axis.

[0075] In some embodiments, the head portion may include a first surface, a second surface spaced from the first surface in a first direction, and an opening extending from the first surface through the second surface in the first direction. The opening may include a second thread configured to mate with the first thread. The head portion may be removably coupled to the body portion, at least in part, by a threaded engagement between the first thread and the second thread, which receives a portion of the first section in the opening. The degree of threaded engagement may be configured to vary the distance between the second surface and the mating surface in the first direction.

[0076] In some embodiments, the gas inlet may be defined by the entrance of a hole in the proximal end of the body portion.

[0077] In some embodiments, the gas inlet may be defined by an entrance to an opening in the first surface of the head portion.

[0078] In some embodiments, each longitudinally extending axis of the gas exit orifice may form a corresponding tilt angle with the reference axis.

[0079] In some embodiments, each of the corresponding tilt angles may be about 45°.

[0080] In some embodiments, the total number of gas exit orifices may be "n", where "n" may be an integer greater than or equal to 2, and the angular pitch between each of the longitudinally extending axes may be approximately 360° / n.

[0081] In some embodiments, "n" may be seven.

[0082] In some embodiments, the body portion may further include a main portion. The first section of the body portion may protrude from the main portion in a direction opposite the axial direction. The width of the head portion in a second direction transverse to the first direction may be greater than the width of the main portion of the body portion in the second direction.

[0083] In some embodiments, the body portion may further include a main portion. The first section of the body portion may protrude from the main portion in a direction opposite the axial direction. A width of the flange portion in a second direction transverse to the first direction may be greater than a width of the main portion of the body portion in the second direction.

[0084] In some embodiments, the difference between the width of the flange and the width of the main portion of the body portion can be greater than 0 mm and less than or equal to about 2 mm.

[0085] In some embodiments, the width of the main portion in the second direction may be greater than the width of the first section in the second direction, and the width of the flange portion in the second direction may be greater than the width of the head portion in the second direction.

[0086] In some embodiments, the head portion may further include at least one side surface connecting the second surface to the first surface. The first surface may include at least one recess. The at least one recess may extend longitudinally from the at least one side surface to the opening in a third direction. The third direction may be transverse to the first direction. The depth of the at least one recess in the first direction may be less than the height of the head portion in the first direction.

[0087] In some embodiments, the flange portion may form a generally cylindrical prism.

[0088] In some embodiments, the reference axis may form a central axis of the insert.

[0089] In some embodiments, the reference axis may extend in a first direction.

[0090] In some embodiments, the length of each of the gas exit orifices may be less than the length of the hole.

[0091] In some embodiments, the depth of the hole along the reference axis can be from about 0.3 mm to about 0.6 mm.

[0092] In some embodiments, the width of the hole in the second direction can be from about 0.1 mm to about 0.2 mm.

[0093] In some embodiments, the width of the head portion in the second direction may be from about 0.1 mm to about 0.4 mm, and the width of the body portion in the second direction may be from about 0.1 mm to about 0.2 mm.

[0094] In some embodiments, the length of the head portion in the first direction may be between about 0.05 mm and about 0.1 mm, and the length of the body portion in the first direction may be between about 0.4 mm and about 0.6 mm.

[0095] In some embodiments, the length of the insert can be from about 0.5 mm to about 0.7 mm.

[0096] In some embodiments, the head portion may form a generally cylindrical prism.

[0097] In some embodiments, the body portion may form a generally cylindrical prism.

[0098] In some embodiments, the body portion may form a generally frusto-conical shape that decreases in size with increasing distance from the head portion.

[0099] In some embodiments, the bore cavity may form a generally cylindrical prism in the head portion.

[0100] In some embodiments, the cavity of the bore may form a generally frusto-conical shape in the head portion.

[0101] In some embodiments, the hole cavity may form a generally cylindrical prism in the body portion.

[0102] In some embodiments, the bore cavity may form a generally frusto-conical shape in the body portion.

[0103] In some embodiments, the insert may include a metal oxide.

[0104] In some embodiments, the insert may be formed from aluminum oxide.

[0105] According to some embodiments, an apparatus includes a gas distribution body. The gas distribution body includes one or more plenums formed between a first surface and a second surface opposite the first surface. The second surface includes a plurality of gas distribution ports fluidly connected to at least one of the one or more plenums. One or more of the gas distribution ports includes a gas distribution port insert (“insert”) at least partially supported therein according to any one of the above-described embodiments.

[0106] In some embodiments, each of the one or more gas distribution ports may include a first port configured to at least partially support the head portion of the insert therein and a second port fluidly connected to the first port, and the second port may be configured to allow the body portion of the insert to extend at least partially therethrough.

[0107] In some embodiments, the first port portion may be configured to form a clearance fit with the head portion of the insert.

[0108] In some embodiments, the maximum dimension of the first port portion in the second direction may be about 1% to about 5% greater than the width of the head portion of the insert.

[0109] In some embodiments, the second port portion can have at least one inner wall adjacent to at least a second side of the body portion, and a first gap between the at least one inner wall and the at least one second side can be greater than 0 and less than or equal to about 1 mm.

[0110] In some embodiments, the first gap can be substantially constant along the length of the second port portion.

[0111] In some embodiments, the first gap may be greater than 0 and less than or equal to about 0.5 mm.

[0112] In some embodiments, the first gap may increase with increasing distance from the first port portion.

[0113] In some embodiments, the first gap may be greater than 0 and less than or equal to about 0.8 mm.

[0114] In some embodiments, a gas distribution port of the one or more gas distribution ports may include a first port portion including a second thread that aligns with the first thread, and a second port portion fluidly connected to the first port portion. The second port portion may include at least a portion of the body portion supported therein.

[0115] In some embodiments, a gas distribution port of the one or more gas distribution ports may include a first port portion including a head portion of the insert at least partially supported therein, and a second port portion fluidly connected to the first port portion, and the second port portion may include at least a portion of a body portion of the insert at least partially supported therein.

[0116] In some embodiments, the mating surface of the flange portion may abut the second surface of the gas distribution body.

[0117] In some embodiments, the second surface of the head portion may abut a support surface at the gas distribution port, and the support surface may define a transition between the first port portion and the second port portion.

[0118] In some embodiments, the apparatus may further include a processing chamber and a pedestal configured to support a wafer in the processing chamber relative to the gas distributor such that a distance in a first direction between the second surface and a surface of the wafer facing the second surface is about 1 mm.

[0119] In some embodiments, the first distal surface can extend beyond the second surface of the gas distribution body in the first direction such that the distance between the first distal surface and the surface of the wafer is between about 0.10 mm and about 0.5 mm.

[0120] In some embodiments, the gas distribution body may form a portion of a showerhead, and the pedestal may be a showerhead pedestal.

[0121] In some embodiments, the gas distributor may further include one or more thermal control elements thermally coupled thereto, and the one or more thermal control elements may include a heating element, a cooling conduit, or both a heating element and a cooling conduit.

[0122] In some embodiments, one or more portions of the thermal control element may be disposed on a reference surface extending between the first surface and the second surface, such that the reference surface is disposed in a first direction between the gas inlet or gas inlet surface and the first distal surface.

[0123] In some embodiments, the apparatus may further include a processing chamber, a component, and a directional flow structure. The processing chamber may include a cleaning gas inlet. The component may include a third surface facing the second surface of the gas distributor inside the processing chamber. The directional flow structure may be supported inside the processing chamber and configured to direct a portion of the flow of the cleaning gas from the cleaning gas inlet to a region between the second surface and the third surface.

[0124] In some embodiments, the gas distribution body may form part of a showerhead, and the component may form part of a showerhead pedestal.

[0125] In some embodiments, the apparatus may further include a remote plasma cleaning ("RPC") source fluidly connected to the cleaning gas inlet. The one or more cleaning gases may include dissociated species from the plasma generated by the RPC source.

[0126] In some embodiments, the semiconductor processing chamber may be a multi-station processing chamber.

[0127] According to one embodiment, a method includes, at least in part, flowing one or more cleaning gases between a first surface of a gas distribution body and a second surface of a component facing the gas distribution body within an interior region of a semiconductor processing chamber, the first surface including a plurality of gas distribution ports configured to at least partially support corresponding gas distribution port insets therein. The method also includes, at least in part, flowing one or more purge gases through a gas distribution port insert as a flow of one or more cleaning gases between the first surface and the second surface. The one or more cleaning gases are flowed at least in part in a first general direction. The second surface faces the first surface in a second direction transverse to the first general direction. The gas distribution port insert includes corresponding gas outlet orifices having respective longitudinally extending axes angled away from the second direction.

[0128] In some embodiments, the second direction may be perpendicular to the first general direction.

[0129] In some embodiments, the gas distribution port insert may be configured to be at least partially supported therein according to any one of the above-described embodiments.

[0130] In some embodiments, each longitudinally extending axis may extend in a first general direction.

[0131] In some embodiments, the gas distribution body may form a portion of a showerhead, and the third surface may form a portion of a showerhead pedestal.

[0132] In some embodiments, the one or more cleaning gases may include dissociated species from a plasma generated outside the semiconductor processing chamber.

[0133] In some embodiments, the semiconductor processing chamber may be a multi-station processing chamber.

[0134] The foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the claimed subject matter.

[0135] The various embodiments disclosed herein are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings, in which like reference numerals refer to like elements and in which: [Brief explanation of the drawings]

[0136] [Figure 1] FIG. 10 is a schematic diagram illustrating a substrate processing system that may be used to process wafers in accordance with some embodiments, as well as suppress (or reduce) process gas interaction with a gas distributor and / or back-diffusion into the gas distribution ports of the gas distributor.

[0137] [Figure 2] 2 is a schematic representation of a partial cross-sectional view of a gas distributor and wafer of the substrate processing system of FIG. 1, according to some embodiments.

[0138] [Figure 3] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 4] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 5]3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0139] [Figure 6] FIG. 6 is a schematic, partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 3-5, according to some embodiments.

[0140] [Figure 7] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 8] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 9] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0141] [Figure 10] FIG. 10 is a schematic representation of a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 7-9, according to some embodiments.

[0142] [Figure 11] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 12] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 13] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0143] [Figure 14] FIG. 14 is a schematic, partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 11-13, according to some embodiments.

[0144] [Figure 15] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 16] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 17] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 18] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0145] [Figure 19] FIG. 19 is a schematic, partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 15-18, according to some embodiments.

[0146] [Figure 20] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 21] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 22] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 23]3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0147] [Figure 24] FIG. 24 is a schematic representation of a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 20-23, according to some embodiments.

[0148] [Figure 25] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 26] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 27] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 28] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0149] [Figure 29] FIG. 29 is a schematic representation of a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 25-28, according to some embodiments.

[0150] [Figure 30] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 31] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 32]3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 33] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0151] [Figure 35] FIG. 34 is a schematic, partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 30-33, according to some embodiments.

[0152] [Figure 36] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 37] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 38] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 39] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 40] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0153] [Figure 41] FIG. 41 is a schematic, partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 36-40, according to some embodiments.

[0154] [Figure 42]3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 43] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 44] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 45] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0155] [Figure 46] FIG. 46 is a schematic representation of a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 42-45, according to some embodiments. [Figure 47] FIG. 46 is a schematic representation of a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 42-45, according to some embodiments.

[0156] [Figure 48] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 49] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 50] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 51] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 52]3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments. [Figure 53] 3A-3C are various schematic views of a gas distribution port insert that may be incorporated as part of the showerhead of FIG. 2 in accordance with some embodiments.

[0157] [Figure 54] FIG. 54 is a schematic representation of a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 48-53, according to some embodiments.

[0158] [Figure 55] FIG. 54 is a schematic representation of a partial cross-sectional view of the showerhead of FIG. 2 including the improved gas distribution port inserts of FIGS. 48-53, according to some embodiments.

[0159] [Figure 56] FIG. 56 is a schematic partial cross-sectional view of the improved showerhead of FIG. 2 including the improved gas distribution port insert of FIG. 55, in accordance with some embodiments.

[0160] [Figure 57] FIG. 1 illustrates a schematic diagram of a multi-station processing tool, according to some embodiments.

[0161] [Figure 58] 58 is a schematic cross-sectional view of the multi-station processing tool of FIG. 57 implementing a remote plasma cleaning (RPC) process utilizing the gas distributor of FIG. 2 and the gas distribution port insert of FIG. 7 in accordance with some embodiments.

[0162] [Figure 59] FIG. 59 is a schematic diagram illustrating a simulated average velocity profile of purge gas output from the gas distribution port insert of FIG. 7 associated with the RPC process of FIG. 58, according to some embodiments.

[0163] [Figure 60] FIG. 59 is a schematic plan view of the support pedestal after the RPC process of FIG. 58, according to some embodiments. [Figure 61] 61 is a schematic illustration of a back view of a semiconductor wafer after being processed using the support pedestal of FIG. 60, according to some embodiments.

[0164] [Figure 62] 58 is a schematic cross-sectional view of the multi-station processing tool of FIG. 57 implementing an RPC process utilizing the gas distributor of FIG. 2 and the gas distribution port insert of FIG. 15 according to some embodiments.

[0165] [Figure 63] 63A-63C are schematic diagrams illustrating simulated average velocity profiles of purge gas output from the gas distribution port insert of FIG. 15 associated with the RPC process of FIG. 62, according to some embodiments.

[0166] [Figure 64] 63 is a schematic plan view of the support pedestal after the RPC process of FIG. 62, according to some embodiments. [Figure 65] FIG. 65 is a schematic illustration of a back view of a semiconductor wafer after being processed using the support pedestal of FIG. 64, according to some embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0167] In the following description, numerous specific details are set forth in order to provide a thorough understanding of various embodiments. The disclosed embodiments may be practiced without some or all of these specific details. In other instances, well-known process operations have not been described in detail so as not to unnecessarily obscure the disclosed embodiments. It should be understood that while the disclosed embodiments will be described in conjunction with specific embodiments, they are not intended to limit the disclosed embodiments.

[0168] In this application, the terms "semiconductor wafer," "wafer," "substrate," "wafer substrate," and "semi-finished integrated circuit" are used interchangeably. Those skilled in the art will understand that the term "semi-finished integrated circuit" can refer to a silicon wafer during any of a number of stages of integrated circuit fabrication. Wafers or substrates used in the semiconductor device industry typically have diameters of 200 mm, 300 mm, or 450 mm. In addition to semiconductor wafers, other workpieces that may utilize the disclosed embodiments include various articles such as printed circuit boards, magnetic recording media, magnetic recording sensors, mirrors, optical elements, micromechanical devices, and the like.

[0169] background As previously mentioned, semiconductor processing tools can be used to perform various semiconductor processing operations, including deposition and etching operations, on the frontside or backside of a wafer. For example, a deposition or etching operation can be performed on the backside of a wafer by flowing one or more process gases from gas distribution ports in a showerhead pedestal toward the backside of the wafer and one or more purge gases, e.g., inert gases, from gas distribution ports in the showerhead toward the frontside of the wafer. As used herein, an inert gas includes a gas that does not substantially react with the process chemistry of the associated semiconductor processing operation, such as a noble gas, or in some cases, a gas such as nitrogen. In this manner, process gases may flow beneath the backside of the wafer in the wafer processing region to perform a deposition or etching operation, and purge gases may flow over the frontside of the wafer to prevent or at least reduce the possibility that the process gases will affect the frontside of the wafer and / or structures thereon (or therein). However, it has been found that process gases can still flow across the frontside of the wafer and, in some cases, interact with the showerhead and / or back-diffuse into the gas distribution ports of the showerhead. This can also be true with respect to cleaning gases and / or remote plasma cleaning (RPC) gases that are flowed into the processing chamber and can remove deposits from exposed surfaces of components within the processing chamber, such as exposed surfaces of the chamber walls, support pedestal, showerhead pedestal, etc. Unwanted gas interaction with the showerhead and / or back-diffusion into the gas distribution ports of the showerhead can reduce the life of the showerhead and / or its components, shorten the time between maintenance cycles (e.g., cleaning, repair, etc.), increase equipment downtime, adversely affect product yield, etc.In some cases, interaction of unwanted gases (e.g., process gases, cleaning gases, RPC gases, etc.) with the showerhead can etch the showerhead, cause corrosion and / or particulate growth thereon or therein, and / or increase the likelihood of material delamination, which can deposit defect-causing contaminants on the frontside of the wafer and / or structures formed thereon / in. Therefore, there is a need for techniques that efficiently and effectively prevent, or at least reduce the likelihood of, process gas interaction with the gas distribution body and / or back-diffusion into the gas distribution ports of the gas distribution body.

[0170] According to one or more embodiments, one or more gas distribution port inserts (or “inserts”) having one or more features as described herein may be utilized in combination with a gas distribution body to regulate the flow of one or more purge gases onto a first surface (e.g., frontside) of a wafer relative to a second surface (e.g., backside) of the wafer in connection with semiconductor processing operations, thereby reducing the likelihood of process gas interaction with the gas distribution body and / or back-diffusion into the gas distribution ports of the gas distribution body. Thus, in one or more embodiments, 1) increasing the gap between the outer surface of the insert and the inner surface of the associated port reduces the likelihood of wear therebetween that may occur as a result of thermally induced movement of the insert relative to the port, thereby otherwise reducing the likelihood of particle generation and / or detachment that may occur as a result of such wear; 2) injecting gas into the gap between the outer surface of the insert and the inner surface of the associated port to prevent inflow of process gas into the gap and possibly deposited material in the gap that may subsequently separate to form particles; and 3) creating a directional gas flow configured to at least partially propel gas outward (e.g., radially outward) from the axis (e.g., central axis) of the gas distributor, thereby causing the process gas to flow through the gas distributor and the wafer facing the gas distributor. 3) preventing gas from flowing into a gap between the outer surface of the insert and the inner surface of the associated port and / or reaching at least one of the ports, the insert, and the second surface of the wafer, or features formed thereon or therein; 4) preventing gas from flowing out of the associated port in which the insert is at least partially supported; and 5) accommodating different port sizes (e.g., lengths), for example, to allow a mating surface of a flange portion of the insert to abut a corresponding surface of the gas distribution body, thereby covering (or closing) the gap between the outer surface of the insert and the inner surface of the associated port, and preventing or at least reducing the possibility of process gas flowing into the gap and depositing material in the gap that may later separate to form particles.

[0171] While various embodiments are described in connection with utilizing one or more inserts in combination with a gas distribution body to regulate the flow of one or more purge gases over the first surface of a wafer, it is also contemplated that in some embodiments, the gas distribution body or another gas distribution body may include one or more inserts having one or more features as described herein to regulate the flow of one or more process gases (and / or one or more other gases) over the first surface and / or second surface of a wafer. In some implementations, the gas distribution body may be configured or otherwise modified to accommodate one or more different densities and / or spatial distributions of the inserts to achieve a desired flow of one or more gases (e.g., purge gases, process gases, etc.). For example, in one implementation, the gas distribution body may include, in a first case, a plurality of first gas distribution ports at least partially supported therein containing one or more inserts configured to regulate the flow of one or more first gases (e.g., one or more purge gases), and a plurality of second gas distribution ports at least partially supported therein containing one or more inserts configured to prevent one or more first gases from flowing out of the second gas distribution port. In another implementation, one or more inserts at least partially supported by at least one of the first or second gas distribution ports may be modified to affect the density and / or spatial distribution of the inserts and, therefore, the points at which gas does or does not flow from the gas distribution body. To this end, in the second case, a modified / improved configuration of the gas distribution body may be utilized to adjust the flow of one or more second gases (e.g., one or more process gases).

[0172] Semiconductor Processing Systems 1 is a schematic illustration of a substrate processing system that may be used to process wafers, and may also be capable of inhibiting (or reducing) process gas interaction with a gas distributor and / or back-diffusion into gas distribution ports of the gas distributor, according to some embodiments. FIG. 2 is a schematic illustration of a partial cross-sectional view of a gas distributor and wafer of the substrate processing system of FIG. 1, according to some embodiments.

[0173] The system 100 includes a processing chamber (or chamber) 101, which may in some cases be divided into upper and lower portions. The center post is configured to support a pedestal 103 while the surface of the wafer 105 is being processed, for example, while a film is being formed on the surface of the wafer 105 or structures formed on the surface of the wafer 105, while features are being etched into the surface of the wafer 105 or structures formed on the surface of the wafer 105, etc. In some embodiments, the surface may be associated with the backside 201 of the wafer 105 facing the pedestal 103. However, it is contemplated that the surface may be associated with the frontside 203 of the wafer 105 facing away from the pedestal 103. In some embodiments, the surface may be associated with or include both the backside 201 and the frontside 203 of the wafer 105. Accordingly, the pedestal 103 may be or include a gas distributor configured to deliver one or more gases to the backside 201 of the wafer 105 during semiconductor processing operations. In some implementations, the one or more gases provided by the pedestal 103 may be or may include one or more process (e.g., reactive) gases and / or one or more inert gases. As such, the pedestal 103 may be referred to as a showerhead pedestal. Another gas distribution body (e.g., gas distribution body 107) may be disposed on the showerhead pedestal 103 and configured to deliver one or more gases toward the frontside 203 of the wafer 105 through one or more openings (e.g., openings 205) in the gas distribution body 107. In some cases, the one or more gases provided by the gas distribution body 107 may be or may include one or more process (e.g., reactive) gases, one or more inert gases, and / or one or more dilution gases. As mentioned previously, the purge gas may be an inert gas, but it is also contemplated that at least one dilution gas may be utilized. In some cases, one or more purge gases may flow from openings 205 in the gas distribution body 107 and one or more process gases flow from the showerhead pedestal 103.As such, gas distribution body 107 may be referred to as a showerhead. As will become more apparent below, openings 205 may be fluidly connected to corresponding gas distribution ports 207 in showerhead 107, which may be configured to at least partially support respective gas distribution port inserts therein (e.g., gas distribution port inserts (or inserts) 209). Generally speaking, inserts such as insert 209 may be configured to control the flow of one or more gases (e.g., one or more purge gases) from showerhead 107, as well as inhibit (or reduce) process gas interaction with showerhead 107 and / or back-diffusion into openings 205 in relation to gas distribution ports 207. Exemplary inserts are described in more detail with respect to FIGS. 3-10 .

[0174] According to various embodiments, the showerhead 107 may be or may include an electrode. As such, the showerhead 107 may be electrically coupled to a power source 109 via a matching network 111. The power source 109 may be controlled by a control module 113, such as a controller. In some embodiments, power may be provided to the showerhead pedestal 103 instead of (or in addition to) the showerhead 107. The control module 113 may be configured to operate the system 100 by executing one or more sequences of one or more instructions that define at least one process recipe. Depending on whether the frontside 203 or backside 201 of the wafer 105 is being processed, the control module 113 may set various operational inputs to define the process recipe, such as power levels, timing parameters, process gases, purge gases, mechanical movement of the wafer 105, height of the wafer 105 from the showerhead pedestal 103, and distance (e.g., distance 211) from the second surface 241 of the showerhead 107 to the frontside 230 of the wafer 105.

[0175] According to some embodiments, the center post may include a lift pin mechanism communicatively coupled to the lift pins. The lift pin mechanism, and therefore the lift pins, may be controlled, for example, by lift pin control signals from the control module 113. The lift pins may be used to lift the wafer 105 off the showerhead pedestal 103, allowing an end effector to pick up the wafer 105 and lower it after placing it by the end effector. In some embodiments, the lift pins may be part of the center post. To this end, the chamber 101 may include a chamber transfer port 115 through which an end effector may introduce or remove the wafer 105 from the chamber 101. In some cases, relative displacement between the showerhead pedestal 103 and the showerhead 107 (or between the wafer 105 and the showerhead 107) may be utilized to provide a controlled separation distance between the wafer 105 and a surface of the showerhead 107 facing the wafer 105. The chamber 101 may also include openings 101 a and 101 b through which corresponding portions of the showerhead pedestal 103 and the showerhead 107 may extend, such as corresponding stem portions of the showerhead pedestal 103 and the showerhead 107. For example, the stem portion 108 of the showerhead 107 may be provided and configured (or include one or more components configured to) provide one or more gases to the showerhead 107, control the temperature of the showerhead 107, provide electrical power, for example, to one or more electrodes of or associated with the showerhead 107, etc. As another example, the stem portion 110 of the showerhead pedestal 103 may be provided and configured (or include one or more components configured to) provide one or more gases to the showerhead pedestal 103, control the temperature of the showerhead pedestal 103, provide electrical power, for example, to one or more electrodes of or associated with the showerhead pedestal 103, etc.In some examples, plasma suppression structures including, for example, one or more spaced plates (not shown) may be provided around and / or above the showerhead 107 and / or around and / or below the showerhead pedestal 103 to suppress unwanted plasma generated within the chamber 101. However, it is contemplated that one or more of the stem portions 108 and 110 may be omitted. For example, the showerhead 107 may be formed as or coupled to, for example, a top wall and / or a side wall of the chamber 101.

[0176] The system 100 may further include gas sources 117 and 119, e.g., gas chemical supplies and / or purge (e.g., inert) gases from the facility. Depending on the process being performed on the surface of the wafer 105, the control module 113 may control the delivery of one or more gases from the gas sources 117 and 119 to the showerhead 107 and / or showerhead pedestal 103. In some embodiments, a gas manifold 121 may be fluidly interposed between the gas source 117 and the showerhead 107, and a gas manifold 123 may be fluidly interposed between the gas source 119 and the showerhead pedestal 103. Appropriate valve mechanisms and mass flow control mechanisms may be used and controlled via the control module 113 to ensure that suitable gases are delivered, for example, during the deposition, etching, cleaning, and / or plasma treatment stages of a process. In this manner, the respective gas flows into the showerhead 107 and showerhead pedestal 103 may be output as gas flows 125 and 127, respectively, and thereby distributed via one or more gas distribution structures of the showerhead 107 and showerhead pedestal 103 in corresponding regions 129 and 131 between the wafer 105 and the respective surfaces of the showerhead 107 and showerhead pedestal 103 facing the wafer 105. Although regions 129 and 131 are shown as rectangular regions, they may also be rather opaque, cloud-like regions in which, for example, a plasma may be generated and / or one or more process gases, purge gases, or both process gases and purge gases may flow.

[0177] During substrate processing, spacers (or other substrate support structures) 133 may be used to maintain a predetermined separation between the wafer 105 and the gas distribution surface of the showerhead pedestal 103 to promote (e.g., optimize or otherwise improve) deposition or etching on the backside 201 of the wafer 105 while reducing (or even preventing) deposition or etching on the frontside 203 of the wafer 105. The spacers 133 may be disposed on (e.g., directly on) the surface of the showerhead pedestal 103 that faces the backside 201 of the wafer 105, as shown schematically in FIG. 1 . In some embodiments, the spacers 133 may be connected to the showerhead pedestal 103 but may not be supported directly on the surface of the showerhead pedestal 103 that faces the backside 201 of the wafer 105. When spacers 133 disposed on and / or connected to the showerhead pedestal 103 are utilized, the spacers 133 may be configured to allow the wafer 105 to remain parallel (or substantially parallel) to the showerhead pedestal 103. For example, the showerhead pedestal 103 and the wafer 105 supported by the spacers 133 may be configured to be manipulated (e.g., translated, rotated, etc.) together when the showerhead pedestal 103 is manipulated (e.g., translated up and / or down) within the chamber 101. Maintaining such parallelism (or substantial parallelism) may contribute more to process uniformity across the wafer 105 than when the wafer 105 is supported by a substrate support structure that is not connected to the showerhead pedestal 103 but is connected to, for example, the showerhead 107 and / or one or more walls (e.g., sidewalls) of the chamber 101 that are not necessarily operated as a unit with the showerhead pedestal 103, since maintaining parallelism (or substantial parallelism) between the backside 201 of the wafer 105 and the facing surface (e.g., top surface) of the showerhead pedestal 103 as the backside 201 of the wafer 105 is processed can improve process uniformity across the wafer 105.In some embodiments, one or more purge gases may be flowed over the front side 203 of the wafer 105 through the showerhead 107 during deposition or etching targeting the backside 201 of the wafer 105 to prevent (or at least reduce) process gases from entering region 129 and / or to direct reactant gases away from region 129 and, thereby, away from the front side 203 of the wafer 105 and the showerhead 107. Alternatively and / or additionally, to prevent, minimize, or reduce exposure of the front side 203 of the wafer 105 to plasma during processing of the backside 201 of the wafer 105, the distance 211 between the front side 203 of the wafer 105 and the second surface 241 of the showerhead 107 may be set to be less than the plasma sheath distance associated with the process. In this manner, reactant gases output from the showerhead pedestal 103 may be directed toward region 131 and, therefore, toward the backside 201 of the wafer 105. According to various embodiments, the gas distribution structure of the showerhead 107 may include one or more inserts (e.g., inserts 209) at least partially supported in the corresponding gas distribution ports 207, which may at least partially cause gas flow 125 from the showerhead 107 into and through region 129 to, for example, prevent, or at least reduce, the likelihood of gas flow 127 interacting with the showerhead 107 and / or back-diffusing into the gas distribution ports 207 of the showerhead 107. In some cases, the gas distribution structure of the showerhead 107 may include one or more inserts (such as inserts 209) at least partially supported in the corresponding gas distribution ports 207 to further prevent, or at least reduce, the likelihood of gas flow 127 from entering region 129, interacting with the frontside 203 of the wafer 105, interacting with the showerhead 107, and / or back-diffusing into the openings 205 of the showerhead 107 associated with the gas distribution ports 207.In some cases, one or more different types of inserts may be utilized in combination with one another in various regions across the gas distribution surface of the showerhead 107 to further condition the flow of the gas flow 125 and / or to prevent, or at least reduce the likelihood of, the gas flow 127 interacting with the showerhead 107 and / or back-diffusing into the gas distribution ports 207 of the showerhead 107.

[0178] In various implementations, the process gas and / or purge gas may exit the chamber 101 through an exhaust port (or outlet) 135 fluidly coupled to a vacuum pump 137, which may be, for example, a single-stage or two-stage mechanical dry pump and / or a turbomolecular pump. In some embodiments, multiple exhaust ports (or outlets) may be provided in the system 100. For example, one or more exhaust ports may be provided on or in one or more sidewalls of the chamber 101. In some cases, the sidewalls may be located in an upper and / or lower portion of the chamber 101. In this manner, the process gas and / or purge gas may exit the chamber 101 to maintain a suitable low-pressure environment within the chamber 101. To this end, a closed-loop flow restriction device, such as a throttle valve or a pendulum valve, may be controlled by the control module 113 to further ensure a suitable low-pressure environment within the chamber 101.

[0179] The system 100 may further include a carrier ring 139 that surrounds an outer region of the showerhead pedestal 103. When the front side 203 of the wafer 105 is being processed, e.g., when material is being deposited thereon, when material is being removed therefrom, etc., the carrier ring 139 may be configured to sit on a carrier ring support region that is stepped down from a wafer support region (or central portion) at the center of the showerhead pedestal 103. The carrier ring 139 may include an outer edge side of a disk structure, e.g., an outer radius, and a wafer edge side of the disk structure, e.g., an inner radius closest to where the wafer 105 is supported. The wafer edge side of the carrier ring 139 may include a plurality of contact support structures configured to lift the wafer 105 when the carrier ring 139 is supported by the spacers 133. In this manner, spider forks (e.g., spider forks 5701 in FIG. 57 ) may be used not only to lift and maintain the carrier ring 139 at a predetermined height, e.g., during backside deposition or etch processes, but also to rotate the wafer 105, e.g., about an axis (e.g., axis 141) that is perpendicular (or substantially perpendicular) to the surface of the showerhead 107 and / or showerhead pedestal 103. Thus, the carrier ring 139 may also be lifted (or otherwise manipulated) along with the wafer 105 and rotated to another station in a multi-station system, e.g., multi-station processing tool 5700 in FIG. 57 . However, embodiments are not limited to the use of a carrier ring 139. For example, in some embodiments, the wafer 105 may be supported by spacers 133 without a carrier ring during one or more processes.

[0180] According to some embodiments, the system 100 may also include a liner (or shroud) that lines one or more interior surfaces of the chamber 101. The liner may be formed from a metal or metal alloy, such as aluminum or an aluminum alloy, but embodiments are not limited thereto. The liner may be configured to be removed during maintenance of the chamber 101 to prevent (or at least reduce) the accumulation of material, e.g., metallic materials, on the walls of the chamber 101. To this end, the liner may also be configured to reduce heat transfer to the walls of the chamber 101 to help stabilize the internal temperature of the chamber 101. As such, the liner may act as a sacrificial layer configured to prevent (or reduce) damage to the chamber 101. In this manner, the liner may be cleaned, maintained, and replaced, thereby extending the life of the chamber 101.

[0181] In various implementations, the system 100 may include or be in communication with a thermal system 143 that may be configured to actively control the temperature of the showerhead 107 and / or showerhead pedestal 103. For example, the thermal system 143 may be configured to control one or more aspects associated with one or more thermal control elements of the showerhead 107 and / or showerhead pedestal 103, such as heating elements, cooling conduits, etc. It should be noted that while the control module 113 may control the operation of the thermal system 143, embodiments are not limited thereto.

[0182] Gas distributor 2 is a schematic diagram illustrating a gas distributor for a wafer in the substrate processing system of FIG. 1, according to some embodiments. Gas distributor 200 is described as corresponding to showerhead 107, although embodiments are not limited thereto. For example, gas distributor 200 may correspond to showerhead pedestal 103. Hereinafter, gas distributor 200 will be referred to as showerhead 107.

[0183] 1 and 2 , the showerhead 107 may be configured to flow one or more purge gases, e.g., an inert gas, a diluent gas, etc., through a plurality of openings 205 in a gas distribution body (or body) 213 toward the frontside 203 of the wafer 105 in connection with one or more semiconductor processing operations (e.g., backside deposition, etching, etc.) of the system 100. In some implementations, the body 213 may include a faceplate assembly 215 coupled to a backplate 217, which may further be coupled to a gas distribution stem 219. The gas distribution stem 219, in some embodiments, may include an inner stem portion that mates with the faceplate assembly 215 and a sleeve portion 223 that mates with the backplate 217. The faceplate assembly 215 may include a faceplate formed from one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, or titanium carbide, and may also include at least one embedded ground / power plane (or electrode) and at least one resistive heating element. In some cases, the showerhead 107 may additionally or alternatively include one or more cooling conduits. The electrode may receive power (e.g., radio frequency (RF) power) from an input portion, and the resistive heating element may receive power from the thermal system 143 through another input portion. The resistive heating element may also be coupled to a reference power level (e.g., ground, floating ground, or another relatively low potential) through an output portion. In some implementations, the input and output portions may be housed within an internal stem portion, which may be configured to shield other components of the showerhead 107 from stray RF energy that might otherwise prematurely induce a plasma within one or more plenums of the showerhead 107.

[0184] According to various embodiments, one or more input gases may flow into the gas distribution body 213 through a gas input passage 235, which may be defined between the inner stem portion and the sleeve portion 223. The gas input passage 235 may be fluidly connected to the plurality of gas distribution ports 207 through one or more plenums 237 defined between a first surface 239 and a second surface 241 of the gas distribution body 213. The first surface 239 may be defined by the backplate 217, and the second surface 241 may be defined by the faceplate assembly 215. Also, it should be noted that the second surface 241 may be axially opposite the first surface 239, although embodiments are not limited thereto. As such, the gas distribution ports 207 may be formed in the faceplate of the faceplate assembly 215 and may be fluidly coupled to (or define) openings 205 in the second surface 241. In some cases, the backplate 217 and gas distribution stem 219 may be fabricated from aluminum, stainless steel, etc., although any other conductive material may be used. Note, however, that aluminum is somewhat easier to machine, is relatively low in cost, and builds up an aluminum fluoride (AlF) passivation layer when exposed to fluorine rather than undergoing material erosion.

[0185] The gas distribution ports 207 may be arranged in any of several different configurations in the gas distribution body 213, including a grid array, a polar coordinate array, a hexagonal array, a spiral, an offset spiral, etc. The arrangement may result in a variation in hole density pattern across the surface 241 of the showerhead 107. In some cases, the gas distribution ports 207 may be configured to at least partially support multiple gas distribution port inserts (e.g., gas distribution port inserts 209) therein to achieve a desired gas flow from the showerhead 107, such as gas flow 243, which may correspond to gas flow 125 in FIG. 1 . The gas flow 243 may be configured to flow through region 129 to prevent, or at least reduce, the likelihood of gas flow 127 from the showerhead pedestal 103 entering region 129, interacting with the frontside 203 of the wafer 105, interacting with the showerhead 107, and / or back-diffusing into the openings 205 of the showerhead 107.

[0186] According to various embodiments, the gas distribution port 207 may include a first port portion 245 and a second port portion 247 extending axially from the first port portion 245, which may extend in a direction opposite to the z-axis. As will become more apparent below, the combination of the first port portion 245 and the second port portion 247 may be configured to mate with a gas distribution port insert, such as the gas distribution port insert 209. The first port portion 245 and the second port portion 247 may both be formed as cavities having a generally circular cylindrical configuration, although embodiments are not limited thereto. For example, one or both of the first port portion 245 and the second port portion 247 may be formed as cavities having any suitable geometric configuration, such as a generally conical shaped cavities, a generally triangular prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, or the like, or a frustum configuration of at least one of such forms. For convenience, the first port portion 245 and the second port portion 247 will be described as having a generally cylindrical configuration, although it should be understood that references to surfaces (e.g., interior surfaces) of such shapes may also refer to one or more surfaces of another shape or form of either the first port portion 245 or the second port portion 247.

[0187] As seen in FIG. 2 , the gas inlet opening 249 may be formed at a proximal end of the first port portion 245, and the second port portion 247 may extend from a distal end of the first port portion 245. As used herein, the terms “proximal” and “distal” refer to directions closer and farther, respectively, relative to a particular reference point, such as a source of gas flow. In this sense, an element designated “proximal” may conversely be designated “distal,” depending on the particular reference point chosen, without departing from the teachings of this disclosure. Note that the gas inlet opening 249 may be fluidly connected to one or more of the plenums 237 of the showerhead 107. The inner surface 251 of the first port portion 245 may extend axially between the proximal and distal ends of the first port portion 245. Thus, first port portion 245 may have a length 253 in the axial direction and a maximum dimension (e.g., diameter) 255 in a second direction, e.g., transverse to the axial direction. In some cases, the second direction may be perpendicular (or substantially perpendicular) to the axial direction, and thus may extend along the x-axis. Additionally, reference axis 257 may form a central axis of first port portion 245.

[0188] Similar to the first port portion 245, the second port portion 247 may have a proximal end fluidly connected to the first port portion 245 and a distal end defining the gas exit opening 205. An inner surface 259 of the second port portion 247 may extend between the proximal and distal ends of the second port portion 247. As such, the second port portion 247 may have a length 261 in the axial direction and a maximum dimension (e.g., diameter) 263 in a second direction. Depending on the geometric configurations of the first and second port portions 245 and 247, the maximum dimensions 255 and 263 may be the width of the gas distribution port 207. Nevertheless, the maximum dimension 255 may be greater than the maximum dimension 263, such that a seating surface 265 may be defined between the first and second port portions 245 and 247. Additionally, second port portion 247 may be coaxially aligned with first port portion 245 such that reference axis 257 also defines a central axis of second port portion 247. Mounting surface 265 may provide an abutment upon which a gas distribution port insert, such as gas distribution port insert 209, rests when inserted into gas distribution port 207. Various gas distribution port inserts are described in connection with FIGS. 3-41.

[0189] Although the showerhead 107 has been described in connection with a chandelier-type implementation, it is contemplated that the gas distribution stem 219 may be omitted or shortened, for example, in embodiments in which the showerhead 107 is mounted flush with the upper interior surface of the chamber 101.

[0190] Gas Distribution Port Insert-1 3-5 schematically illustrate various views of a gas distribution port insert (or inserts) that can be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 3 illustrates a perspective view of insert 300, FIG. 4 illustrates a bottom view of insert 300, and FIG. 5 illustrates a cross-sectional view of insert 300 taken along section line 5-5.

[0191] 3-5 , insert 300 may include a head portion 301 and a body portion 303 extending axially from head portion 301, the axial direction being opposite the z-axis. Both head portion 301 and body portion 303 may be formed as generally circular cylinders, although embodiments are not limited thereto. For example, one or both of head portion 301 and body portion 303 may be formed having any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a frustum configuration of at least one of such forms. For convenience, head portion 301 and body portion 303 will be described with reference to FIGS. 3-5 as having a generally cylindrical configuration, although it should be understood that references to surfaces of such shapes may also refer to one or more surfaces of other shapes.

[0192] According to various embodiments, head portion 301 may have a length 501 in the axial direction and a maximum dimension (e.g., diameter) 503 in a second direction, e.g., transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and thus extend along the y-axis. Body portion 303 may have a length 505 in the axial direction and a maximum dimension (e.g., diameter) 507 in the second direction. Depending on the geometric configuration of head portion 301 and body portion 303, maximum dimensions 503 and 507 may be the width of insert 300. In some embodiments, maximum dimension 503 may be between about 0.19 mm and about 0.33 mm, and maximum dimension 507 may be between about 0.13 mm and 0.25 mm. In any case, maximum dimension 503 may be greater than maximum dimension 507, e.g., between about 15% and about 25% greater than maximum dimension 507, although embodiments are not limited thereto. Length 501 may be about 0.05 mm to about 0.15 mm, and length 505 may be about 0.4 mm to about 0.6 mm. In some cases, length 505 may be greater than length 501, for example, about 450% to about 550% greater than length 501, although embodiments are not limited thereto. Therefore, the total length of insert 300 may be about 0.5 mm to about 0.7 mm, although embodiments are not limited thereto.

[0193] Head portion 301 may include a gas inlet face 305, an intermediate face 307 axially opposite or spaced apart from gas inlet face 305, and a side face 309 connecting intermediate face 307 to gas inlet face 305. In this manner, head portion 301 may extend along a reference axis 311, which may be the central axis of head portion 301 as well as the central axis of insert 300. Body portion 303 may include a proximal end 313, a distal end 315 axially opposite or spaced apart from proximal end 313, and a side face 317 connecting distal end 315 to proximal end 313. Thus, proximal end 313 may extend from, and thereby be adjacent to, intermediate face 307. Distal end 315 may terminate at distal face 319. In this manner, the body portion 303 may also extend along a reference axis 311 , which may also be a central axis of the body portion 303 .

[0194] According to various implementations, the insert 300 may include a bore 509 extending from the gas inlet face 305 toward the distal face 319 along a reference axis 311, which may be a central axis of the bore 509. As such, the bore 509 may form a central bore of the insert 300, although embodiments are not limited thereto. The bore 509 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. For example, the bore 509 may be formed as a void having any suitable geometric configuration, such as a generally conical void, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a void having a frustum configuration of at least one of such shapes. For convenience, the bore 509 will be described as having a generally cylindrical configuration, although it should be understood that references to a surface (e.g., an interior surface) of such a shape may also refer to one or more surfaces of another shape or configuration of the bore 509.

[0195] As shown in FIG. 5 , bore 509 can extend through head portion 301 and partially through body portion 303, terminating at distal face 511 offset from distal face 319 in a first direction (e.g., the z-axis direction). Thus, bore 509 can have a depth 513, e.g., in the axial direction, and a maximum dimension (e.g., diameter) 515, e.g., in a second direction. For example, depth 513 can be about 0.3 mm to about 0.6 mm, and maximum dimension 515 can be about 0.1 mm to about 0.2 mm (and at least less than each of dimensions 503 and 507). Note that, depending on the geometric configuration of bore 509, maximum dimension 515 can be the width of bore 509. Body portion 303 can also include a plurality of gas exit orifices 321 fluidly connected to bore 509 within insert 300. Although a total of seven gas exit orifices 321 are shown, the insert 300 may include any suitable number of gas exit orifices 321. In some cases, the gas exit orifices 321 may extend between the distal face 511 and the distal face 319, allowing one or more gases input into the holes 509 at the gas inlet face 305 to flow through the holes 509 and the gas exit orifices 321, thereby exiting the distal face 319.

[0196] The gas exit orifices 321 may include a first gas exit orifice 321a and a second gas exit orifice 321b. Similar to the holes 509, the gas exit orifices 321 may be formed as cavities having a generally circular cylindrical configuration, although embodiments are not limited thereto. For example, the one or more gas exit orifices 321 may be formed as cavities having any suitable geometric configuration, such as a generally conical shaped cavities, a generally triangular prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, or the like, or a frustum configuration of at least one of such shapes. For convenience, the gas exit orifices 321 will be described as having a generally cylindrical configuration, although it should be understood that reference to a surface (e.g., an interior surface) of such a shape may also refer to one or more surfaces of another shape or configuration. In any event, each of the gas exit orifices 321 may have a longitudinally extending central axis (hereinafter "central axis") and a maximum dimension (eg, diameter) in a plane perpendicular to the central axis.

[0197] For example, each first gas exit orifice 321a may have a corresponding central axis, such as central axis 401, and a corresponding maximum dimension (e.g., diameter), such as maximum dimension 403. Second gas exit orifice 321b may have a central axis 405 and a maximum dimension 407. In some implementations, central axes 401 and 405 may extend axially, and maximum dimensions 403 and 407 may extend, for example, in a second direction. Further, maximum dimensions 403 and 407 may be equal (or substantially equal) in some embodiments. In some implementations, maximum dimensions 403 and 407 may be about 0.01 mm to about 0.1 mm, such as about 0.02 mm to about 0.07 mm, for example, about 0.03 mm to about 0.05 mm. The length (or depth) 517 of gas exit orifice 321 may be less than the depth 513 of hole 509. For example, length 517 may be between about 0.08 mm and about 0.2 mm.

[0198] In some cases, the first gas outlet orifices 321 a may be arranged not only around the reference axis 311 but also around the second gas outlet orifices 321 b. Thus, the central axes 405 of the second gas outlet orifices 321 b may coincide (or substantially coincide) with the reference axis 311. In such a configuration, the gas outlet orifices 321 may be arranged in three columns and three rows, whereby, relative to a third direction (e.g., the x-axis direction), adjacent first gas outlet orifices 321 a in the same central row may be separated by a distance 409, and adjacent first gas outlet orifices 321 a in different rows may be separated by a distance 411. Furthermore, relative to the third direction and the central axis 405, an outermost first gas exit orifice 321 a in a central row and on a first side of the central axis 405 may be separated by a distance 413 from an outermost first gas exit orifice 321 a in a different row and on a second side of the central axis 405. Furthermore, relative to the third direction and the central row, a first one of the first gas exit orifices 321 a may be separated by a distance 415 from a second one of the first gas exit orifices 321 b. In the second direction, adjacent first gas exit orifices 321 a in the same row may be separated by a distance 417, and adjacent first gas exit orifices 321 a in different rows may be separated by a distance 419. Similarly, in the second direction, the second gas exit orifices 321b may be spaced apart from adjacent first gas exit orifices in the first gas exit orifices 321a by a distance 419. As such, the central axis (e.g., central axis 401) of each of the first gas exit orifices 321a may be located on a reference circle 421. The diameter of the reference circle 421 may be more than two times the maximum dimension 403, or less than three times the maximum dimension 403.

[0199] According to various embodiments, the insert 300 may be formed from any suitable material and may be formed by any suitable method. For example, the insert 300 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, etc. In some cases, the insert 300 may be formed from a first material and coated with a second material. For example, the insert 300 may be fabricated from aluminum as a first material and coated with aluminum fluoride (AlF) as a second material, although embodiments are not limited thereto. In various implementations, the insert 300 may be fabricated by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, etc.

[0200] FIG. 6 schematically illustrates a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 3-5, according to some embodiments.

[0201] 2 and 3-6 , the insert 300 is at least partially supported in the gas distribution port 207, such that the intermediate surface 307 of the insert 300 can abut the mounting surface 265 of the gas distribution port 207. To this end, the insert 300 may be configured to form a clearance fit with the gas distribution port 207. As used herein, the phrase “clearance fit” means that a gap or clearance exists between two mated parts such that, upon assembly, at least one of the two parts can slide and / or rotate relative to the other, e.g., when the first part is received within a bore defined in the second part and the first part (or a portion thereof) can slide and / or rotate within a bore defined in the second part when the first and second parts are assembled. With respect to the insert 300 and the gas distribution port 207, forming a loose fit may include the gas distribution port 207 being larger in size than the insert 300, such that the insert 300 (or a portion thereof) can slide and / or rotate within the gas distribution port 207 when the insert 300 is at least partially supported within the gas distribution port 207. In some cases, this may include the maximum dimension 503 of the head portion 301 of the insert 300 being about 1% to about 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the side 309 of the insert 300 is spaced a distance 601 from the inner surface 251 within the gas distribution port 207. To this end, the maximum dimension 507 of the body portion 303 of the insert 300 may be about 1% to about 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the side 317 of the insert 300 is spaced a distance 603 from the inner surface 259 of the gas distribution port 207. In some implementations, the distances 601 and 603 may be equal or substantially equal, although embodiments are not limited thereto.It should also be noted that the head portion 301 can function as a centering mechanism when the insert 300 is inserted into the gas distribution port 207, allowing the central axis (e.g., reference axis 311) of the insert 300 to be aligned (or substantially aligned) with the central axis 257 of the gas distribution port 207.

[0202] Forming the above-described clearance fit may increase the distance between the side surfaces 309 and 317 of the insert 300 and the corresponding interior surfaces 251 and 259 of the gas distribution port 207. This may reduce the likelihood of wear between the insert 300 and the gas distribution port 207, which may occur as a result of thermally induced movement of the insert 300 relative to the gas distribution port 207. Such thermally induced movement may otherwise be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed by the system 100. While the movement of the insert 300 has been described as being caused by thermal effects, it is contemplated that the movement of the insert 300 may additionally or alternatively be caused by other factors, such as pressure differentials or movement of the showerhead 107. In any event, reducing the likelihood of such wear may simultaneously reduce the likelihood of particle generation and / or particle detachment in the gap between the insert 300 and the gas distribution port 207. Such particle generation and / or particle detachment may otherwise result in the deposition of defect-causing contaminants, at least in part, on the front surface 203 of the wafer 105 and / or structures formed thereon / in. To this end, the centering effect of the head portion 301 relative to the body portion 303 may also serve to return the insert 300 to concentric (or substantially concentric) alignment with the gas distribution ports 207 after movement of the insert 300. This may help to maintain a predetermined gas flow profile from the showerhead 107.

[0203] Gas Distribution Port Insert-2 7-9 schematically illustrate various views of a gas distribution port insert (or inserts) that can be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 7 illustrates a perspective view of insert 700, FIG. 8 illustrates a bottom view of insert 700, and FIG. 9 illustrates a cross-sectional view of insert 700 taken along section line 9-9.

[0204] 7-10 , insert 700 may be similar to insert 300 and, therefore, may include a head portion 701 and a body portion 703 extending axially from head portion 701. The axial direction may extend in a direction opposite to the z-axis direction. Both head portion 701 and body portion 703 may be formed as generally circular cylinders, although embodiments are not limited thereto. For example, either or both head portion 701 and body portion 703 may be formed with any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or at least one frustum of such configurations. For convenience, head portion 701 and body portion 703 will be described with reference to FIGS. 7-9 as having a generally cylindrical configuration, although it should be understood that references to surfaces of such shapes may also refer to one or more surfaces of other shapes.

[0205] According to various embodiments, head portion 701 may have a length 901 in the axial direction and a maximum dimension (e.g., diameter) 903 in a second direction transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction, and thus extend along the y-axis. Body portion 703 may have a length 905 in the axial direction and a maximum dimension (e.g., diameter) 907 in the second direction. Depending on the geometric configuration of head portion 701 and body portion 703, maximum dimensions 903 and 907 may be the width of insert 700. In some embodiments, maximum dimension 903 may be between about 0.1 mm and about 0.4 mm, and maximum dimension 907 may be between about 0.1 mm and 0.2 mm. Furthermore, maximum dimension 903 may be greater than maximum dimension 907, for example, about 15% to about 25% greater than maximum dimension 907, although embodiments are not limited thereto. Length 901 may be about 0.05 mm to about 0.1 mm, and length 905 may be about 0.4 mm to about 0.6 mm. Length 905 may be greater than length 901, for example, about 450% to about 550% greater than length 901, although embodiments are not limited thereto. In this manner, the total length of insert 700 may be about 0.5 mm to about 0.7 mm, although embodiments are not limited thereto.

[0206] The head portion 701 may include a gas inlet face 705, an intermediate face 707 axially opposite or spaced apart from the gas inlet face 705, and a side face 709 connecting the intermediate face 707 to the gas inlet face 705. In this manner, the head portion 701 may extend along a reference axis 711, which may be a central axis of the head portion 701 as well as the insert 700. The body portion 703 may include a proximal end 713, a distal end 715 axially opposite or spaced apart from the proximal end 713, and a side face 717 connecting the distal end 715 to the proximal end 713. Thus, the proximal end 713 may extend from the intermediate face 707 and thereby be adjacent to the intermediate face 707. The distal end 715 may terminate at the distal face 719. In this manner, the body portion 703 may also extend along the reference axis 711, which may also be the central axis of the body portion 703.

[0207] According to various implementations, the insert 700 may include a bore 909 extending from the gas inlet face 705 toward the distal face 719 along a reference axis 711, which may be a central axis of the bore 909. Thus, the bore 909 may form a central bore of the insert 700, although embodiments are not limited thereto. The bore 909 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. For example, the bore 909 may be formed as a void having any suitable geometric configuration, such as a generally conical void, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a void having a frustum configuration of at least one of such shapes. For convenience, the bore 909 will be described as having a generally cylindrical configuration, although it should be understood that references to a surface (e.g., an inner surface) of such a shape may also refer to one or more surfaces of another shape or configuration of the bore 909.

[0208] As shown in FIG. 9 , the bore 909 may terminate at a distal surface 911 offset from the distal surface 719 in a first direction (e.g., the z-axis direction), and the bore 909 may extend through the head portion 701 and partially through the body portion 703. In this manner, the bore 909 may have a depth 913, e.g., in the axial direction, and a maximum dimension (e.g., diameter) 915, e.g., in a second direction. For example, the depth 913 may be about 0.1 mm to about 0.6 mm, and the maximum dimension 915 may be about 0.1 mm to 0.2 mm. In this manner, the bore 909 in the insert 700 may have a smaller depth than the bore 509 in the insert 300. Note that depending on the geometric configuration of the bore 909, the maximum dimension 915 may be the width of the bore 909. The body portion 703 may also include a plurality of gas exit orifices 721 fluidly connected to the bore 909 within the insert 700. Although a total of seven gas exit orifices 721 are shown, the insert 700 may include any suitable number of gas exit orifices 321. In some cases, the gas exit orifices 721 may extend between the distal face 911 and the distal face 719, allowing one or more gases input into the holes 909 at the gas inlet face 705 to flow through the holes 909 and the gas exit orifices 721, thereby exiting the distal face 719.

[0209] The gas exit orifices 721 may include a first gas exit orifice 721a and a second gas exit orifice 721b. Similar to the holes 909, the gas exit orifices 721 may be formed as cavities having a generally circular cylindrical configuration, although embodiments are not limited thereto. For example, the one or more gas exit orifices 721 may be formed as cavities having any suitable geometric configuration, such as a generally conical shaped cavities, a generally triangular prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, or the like, or a frustum configuration of at least one of such shapes. For convenience, the gas exit orifices 721 will be described as having a generally cylindrical configuration, although it will be understood that reference to a surface (e.g., an interior surface) of such a shape may also represent one or more surfaces of another shape or configuration. In any event, each of the gas exit orifices 721 may have a central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0210] For example, each first gas exit orifice 721a may have a corresponding central axis, such as central axis 801, and a corresponding maximum dimension (e.g., diameter), such as maximum dimension 803. Second gas exit orifice 721b may have a central axis 805 and a maximum dimension 807. In some implementations, central axes 801 and 805 may extend axially, and maximum dimensions 803 and 807 may extend, for example, in a second direction. Further, maximum dimensions 803 and 807 may be equal (or substantially equal) in some embodiments. In some implementations, maximum dimensions 803 and 807 may be about 0.01 mm to about 0.1 mm, such as about 0.02 mm to about 0.07 mm, for example, about 0.03 mm to about 0.05 mm. The length (or depth) 917 of gas exit orifice 721 may be less than the depth 913 of hole 909. For example, length 917 may be about 0.2 mm to about 0.3 mm. Thus, gas exit orifice 721 in insert 700 may have a longer length than gas exit orifice 321 in insert 300. This reduced depth of hole 909 and increased length of gas exit orifice 721 may, at least in part, cause a greater pressure drop between gas inlet face 705 and distal face 719 associated with gas flow through insert 700 under conditions in the slip flow regime (e.g., Knudsen number greater than 0.01 and less than 0.1). This reduced downstream pressure may result in a greater gas throughput (or average velocity) through insert 700 than through insert 300, and, although not limiting, gas may be output from insert 700 through second gas exit orifice 721b relative to the respective first gas exit orifice 721a. This is reasonable because it is expected that in the slip flow region, gas flow slows down with decreasing distance from the inner wall 919, which may cause, at least in part, more gas to flow through the second gas exit orifices 721b than through the respective first gas exit orifices 721a. For example, assuming gas flow in the slip flow region, the pressure drop through the insert 700 is approximately 800×10 -4Thor and below, approximately 850 x 10 -4 Torr or less, for example, about 798×10 -4 Torr. As used herein, the phrase "average velocity" may refer to a time average of the velocity at one or more points along a flow path of a fluid (e.g., a purge gas), which may be determined over a time interval arbitrarily offset from a fixed time. For example, one or more average velocities of a purge gas flow may be time-averaged velocities determined at various points within the insert after steady-state (or substantially steady-state) flow conditions are achieved.

[0211] In some cases, the first gas exit orifices 721 a may be arranged not only around the reference axis 711 but also around the second gas exit orifices 721 b. As such, the central axis 805 of the second gas exit orifices 721 b may coincide (or substantially coincide) with the reference axis 711. In such a configuration, the first gas exit orifices 721 a may be arranged at an angular pitch 809 around the reference axis 711. Assuming that the insert 700 has “n” first gas exit orifices 721 a (where “n” is an integer greater than or equal to 2), the angular pitch 809 may be equal (or substantially equal) to 360° divided by “n.” For example, although the insert 700 is shown as including six first gas exit orifices 721 a, the angular pitch 809 may be approximately 60°, embodiments are not limited thereto. In this manner, the central axis (e.g., central axis 801) of each of the first gas exit orifices 721a may be disposed on a reference circle 811. The diameter 813 of the reference circle 811 may be greater than twice the maximum dimension 803, or less than three times the maximum dimension 803. For example, the diameter 813 of the reference circle 811 may be greater than or equal to about 0.1 mm and less than or equal to about 0.3 mm in some embodiments.

[0212] According to various embodiments, insert 700 may be formed from any suitable material and may be formed by any suitable method. For example, insert 700 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, etc. In some cases, insert 700 may be formed from a first material and coated with a second material. For example, insert 700 may be fabricated from aluminum as a first material and coated with aluminum fluoride (AlF) as a second material, although embodiments are not limited thereto. In various implementations, insert 700 may be fabricated by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, etc.

[0213] FIG. 10 schematically illustrates a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 7-9, according to some embodiments.

[0214] 2 and 7-9, the insert 700 can be at least partially supported within the gas distribution port 207 such that the intermediate surface 707 of the insert 700 abuts the mounting surface 265 of the gas distribution port 207. To this end, the insert 700 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 903 of the head portion 701 of the insert 700 can be about 1% to about 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the side surface 709 of the insert 700 is spaced a distance 1001 from the inner surface 251 of the gas distribution port 207. To this end, the maximum dimension 907 of the body portion 703 of the insert 700 may be about 1% to about 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the side surface 717 of the insert 700 is spaced a distance 1003 from the inner surface 259 of the gas distribution port 207. In some cases, the distances 1001 and 1003 may be equal or substantially equal, although embodiments are not limited thereto. Note also that the head portion 701 may function as a centering feature when the insert 700 is inserted into the gas distribution port 207, allowing the central axis (e.g., reference axis 711) of the insert 700 to be aligned (or substantially aligned) with the central axis 257 of the gas distribution port 207.

[0215] Similar to insert 300, the formation of the loose fit described above may increase the distance between the side surfaces 709 and 717 of insert 700 and the corresponding interior surfaces 251 and 259 of gas distribution port 207. This may reduce the likelihood of wear between insert 700 and gas distribution port 207, which may occur as a result of thermally induced movement of insert 700 relative to gas distribution port 207. Such thermally induced movement may otherwise be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed via system 100. While the movement of insert 700 is described as occurring in connection with thermal effects, it is contemplated that movement of insert 700 may additionally or alternatively occur due to other factors, such as pressure differentials, movement of showerhead 107, etc. In any event, reducing the likelihood of such wear may also reduce the likelihood of particle generation and / or particle detachment in the gap between insert 700 and gas distribution port 207. Otherwise, defect-causing contaminant deposits may be deposited, at least in part, on the frontside 203 of the wafer 105 and / or structures formed thereon / in. To this end, the centering effect of the head portion 701 relative to the body portion 703 may also serve to return the insert 700 to concentric (or substantially concentric) alignment with the gas distribution ports 207 after movement of the insert 700. This may help to maintain a predetermined gas flow profile from the showerhead 107.

[0216] Gas Distribution Port Insert-3 11-13 show various schematic views of a gas distribution port insert (or inserts) that may be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 11 shows a perspective view of insert 1100, FIG. 12 shows a bottom view of insert 1100, and FIG. 13 shows a cross-sectional view of insert 1100 taken along section line 13-13.

[0217] 11-13 , insert 1100 may be similar to inserts 300 and 700 and, as such, may include a head portion 1101 and a body portion 1103 extending axially from head portion 1101. The axial direction may extend in a direction opposite to the z-axis direction. Head portion 1101 may be formed as a generally circular cylinder, and body portion 1103 may be formed as a generally conical shape, although embodiments are not limited thereto. For example, either or both of head portion 1101 and body portion 1103 may be formed as having any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or at least one frustum of such shapes. For convenience, head portion 1101 and body portion 1103 will be described in connection with Figures 11-13 as having a generally cylindrical and a generally frusto-conical configuration, respectively, although it should be understood that references to surfaces of such shapes may also refer to one or more surfaces of other shapes.

[0218] The head portion 1101 may include a gas inlet face 1105, an intermediate face 1107 axially opposite or spaced apart from the gas inlet face 1105, and a side face 1109 connecting the intermediate face 1107 to the gas inlet face 1105. As such, the head portion 1101 may extend along a reference axis 1111, which may be the central axis of the insert 1100 as well as the central axis of the head portion 1101. The body portion 1103 may include a proximal end 1113, a distal end 1115 axially opposite or spaced apart from the proximal end 1113, and a side face 1117 connecting the distal end 1115 to the proximal end 1113. As such, the proximal end 1113 may extend from the intermediate face 1107 and thereby be adjacent to the intermediate face 1107. Distal end 1115 may terminate at a distal face 1119. As such, body portion 1103 may extend along a reference axis 1111, which may also be a central axis of body portion 1103.

[0219] According to various embodiments, head portion 1101 may have a length 1301 in the axial direction and may have a maximum dimension (e.g., diameter) 1303 in a second direction, e.g., transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction, and thus extend in the y-axis direction. Body portion 1103 may have a length 1305 in the axial direction and may have a variable width (e.g., diameter) in the second direction, for example. In some embodiments, the width of body portion 1103 may vary linearly along the axial direction, such that side 1117 forms an inclination angle (or angle) 1307 with the axial direction and, in some cases, with side 1109. Angle 1307 may be greater than 0° and less than about 10°, such as greater than or equal to about 2.00° and less than or equal to about 5.00°, e.g., greater than or equal to about 2.75° and less than or equal to about 3.25°. As shown, the width of body portion 1103 may have dimension 1309a at proximal end 1113 and dimension 1309b at distal end 1115. Depending on the geometric configuration of head portion 1101 and / or body portion 1103, dimensions 1303, 1309a, and / or 1309b may be the width of insert 1100. In some embodiments, dimension 1303 may be between about 0.1 mm and about 0.4 mm, dimension 1309a may be between about 0.1 mm and 0.2 mm, and dimension 1309b may be between about 0.1 mm and about 0.2 mm. To this end, maximum dimension 1303 may be greater than each of dimensions 1309a and 1309b. For example, maximum dimension 1303 may be at least about 15% to about 25% greater than dimension 1309a (i.e., greater than dimension 1309b), although embodiments are not limited thereto. Length 1301 may be about 0.05 mm to about 0.1 mm, and length 1305 may be about 0.4 mm to about 0.6 mm. Note that length 1305 may be greater than length 1301, for example, about 450% to about 550% greater than length 1301, although embodiments are not limited thereto. Thus, the overall length of insert 1100 may be about 0.5 mm to about 0.7 mm, although embodiments are not limited thereto.

[0220] According to various implementations, the insert 1100 may include a bore 1311 extending from the gas inlet face 1105 toward the distal face 1119 along a reference axis 1111, which may be a central axis of the bore 1311. As such, the bore 1311 may form a central bore of the insert 1100, although embodiments are not limited thereto. The bore 1311 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. For example, the bore 1311 may be formed as a void having any suitable geometric configuration, such as a generally conical void, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a void having a frustum configuration of at least one of such shapes. For convenience, the hole 1311 will be described as having a generally cylindrical configuration, but it should be understood that reference to a surface (e.g., an inner surface) of such a shape may also refer to one or more surfaces of another shape or form of the hole 1311.

[0221] As shown in FIG. 13 , bore 1311 may terminate in distal surface 1313, which may be offset from distal surface 1119 in a first direction (e.g., the z-axis direction), with bore 1311 extending through head portion 1101 and partially through body portion 1103. As such, bore 1311 may have depth 1315, e.g., in the axial direction, and may have maximum dimension (e.g., diameter) 1317, e.g., in a second direction. For example, depth 1315 may be about 0.4 mm to about 0.7 mm, and maximum dimension 1317 may be about 0.1 mm to about 0.2 mm (and at least less than each of dimensions 1309a and 1309b). As such, bore 1311 in insert 1100 may have a greater depth than each of bore 509 in insert 300 and bore 909 in insert 700. Note that depending on the geometric configuration of holes 1311, maximum dimension 1317 may be the width of holes 1311. Body portion 1103 may also include multiple gas exit orifices 1121 fluidly connected to holes 1311 within insert 1100. While a total of seven gas exit orifices 1121 are shown, insert 1100 may include any suitable number of gas exit orifices 1121. In some cases, gas exit orifices 1121 may extend between distal face 1313 and distal face 1119, allowing one or more gases input into holes 1311 at gas inlet face 1105 to flow through holes 1311 and gas exit orifices 1121, thereby outputting from distal face 1119.

[0222] The gas exit orifices 1121 may include a first gas exit orifice 1121a and a second gas exit orifice 1121b. Similar to the holes 1311, the gas exit orifices 1121 may be formed as cavities having a generally circular cylindrical configuration, although embodiments are not limited thereto. For example, the one or more gas exit orifices 1121 may be formed as cavities having any suitable geometric configuration, such as a generally conical shaped cavities, a generally triangular prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, or the like, or a cavities having a frustum configuration of at least one of such shapes. For convenience, the gas exit orifices 1121 will be described as having a generally cylindrical configuration, although it will be understood that reference to a surface (e.g., an interior surface) of such a shape may also refer to one or more surfaces of another shape or form. In any event, each of the gas exit orifices 1121 may have a central axis and a maximum dimension (eg, diameter) in a plane perpendicular to the central axis.

[0223] For example, each first gas exit orifice 1121a may have a respective central axis, such as central axis 1201, and a respective maximum dimension (e.g., diameter), such as maximum dimension 1203. Second gas exit orifice 1121b may have a central axis 1205 and a maximum dimension 1207. In some implementations, central axes 1201 and 1205 may extend axially, and maximum dimensions 1203 and 1207 may extend, for example, in a second direction. Further, maximum dimensions 1203 and 1207 may be equal (or substantially equal) in some embodiments. In some implementations, maximum dimensions 1203 and 1207 may be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, for example, between about 0.03 mm and about 0.05 mm. The length (or depth) 1319 of the gas exit orifice 1121 may be less than the depth 1315 of the hole 1311. For example, the length 1319 may be about 0.02 mm to about 0.07 mm. Thus, the gas exit orifice 1121 in the insert 1100 may have a shorter length than the gas exit orifice 321 in the insert 300 and the gas exit orifice 721 in the insert 700. This increased depth of the hole 1311 and decreased length of the gas exit orifice 1121 may, at least in part, cause a lower pressure drop between the gas inlet face 1105 and the distal face 1119 associated with gas flow through the insert 1100 under slip flow regime conditions. This increased downstream pressure may result in a lower gas throughput (or average velocity) through the insert 1100 than through the inserts 300 and 700. For example, assuming gas flow in the slip flow region, the pressure drop through the insert 1100 is approximately 425×10 -4 Thor and below, approximately 500 x 10 -4 Torr or less, for example, about 405×10 -4Furthermore, as will become more apparent below, although embodiments are not limited to this, gas may be more evenly distributed through the gas exit orifices 1121 from the insert 1100 if the gas exit orifices 1121 are more closely spaced around the reference axis 1111. This is reasonable because it is expected that in the slip flow region, the gas flow is more constant in the central portion of the hole 1311 but slows down with decreasing distance from the inner wall 1321, which may, at least in part, cause the gas flow to be more evenly distributed through the gas exit orifices 1121 than through the gas exit orifices 721 in the insert 700.

[0224] In some cases, the first gas exit orifices 1121 a may be arranged not only around the reference axis 1111 but also around the second gas exit orifices 1121 b. As such, the central axis 1205 of the second gas exit orifices 1121 b may coincide (or substantially coincide) with the reference axis 1111. In such a configuration, the first gas exit orifices 1121 a may be arranged at an angular pitch 1209 around the reference axis 1111. Assuming that the insert 1100 has “n” first gas exit orifices 1121 a (where “n” is an integer greater than or equal to 2), the angular pitch 1209 may be equal (or substantially equal) to 360° divided by “n.” For example, although the insert 1100 is shown as including six first gas exit orifices 1121 a, the angular pitch 1209 may be approximately 60°, embodiments are not limited thereto. In this manner, the central axis (e.g., central axis 1201) of each of the first gas exit orifices 721a may be disposed on a reference circle 1211. However, it should be noted that the diameter 1213 of the reference circle 1211 may be smaller than the diameter 813 of the reference circle 811 of the insert 700. This may correspond to the gas exit orifices 1121 being spaced closer together around the reference axis 1111 in the insert 1100 than the gas exit orifices 721 being spaced around the reference axis 711 in the insert 700. As noted above, this may, at least in part, result in a more even distribution of gas flow through the gas exit orifices 1121 than through the gas exit orifices 721 of the insert 700. In some embodiments, the diameter 1213 may be greater than or equal to about 0.08 mm and less than or equal to about 0.2 mm.

[0225] According to various embodiments, the insert 1100 may be formed from any suitable material and may be formed in any suitable manner. For example, the insert 1100 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, etc. In some cases, the insert 1100 may be formed from a first material and coated with a second material. For example, the insert 1100 may be fabricated from aluminum as a first material and coated with aluminum fluoride (AlF) as a second material, although embodiments are not limited thereto. In various implementations, the insert 1100 may be fabricated by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, etc.

[0226] FIG. 14 schematically illustrates a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 11-13, according to some embodiments.

[0227] 2 and 11-13, the insert 1100 can be at least partially supported within the gas distribution port 207 such that the intermediate surface 1107 of the insert 1100 abuts the mounting surface 265 of the gas distribution port 207. To this end, the insert 1100 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 1303 of the head portion 1101 of the insert 1100 can be about 1% to about 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the side surface 1109 of the insert 1100 is spaced a distance 1401 from the inner surface 251 of the gas distribution port 207. Dimension 1309a of body portion 1103 of insert 1100 may be about 1% to about 10% smaller than maximum dimension 263 of second port portion 247 of gas distribution port 207, and dimension 1309b may be about 8% to about 15% smaller than maximum dimension 263 of second port portion 247 of gas distribution port 207. Thus, side surface 1117 of insert 1100 may be spaced a first distance, e.g., distance 1401, from inner surface 259 of gas distribution port 207 toward proximal end 1113 of body portion 1103, and may be spaced a second distance 1403 from inner surface 259 of gas distribution port 207 toward distal end 1115 of body portion 1103. Distance 1403 may, in some cases, be less than or equal to a sheath thickness associated with a process performed in connection with system 100. For example, distance 1403 may be greater than or equal to about 0.7 mm and less than or equal to about 1.1 mm, e.g., greater than or equal to about 0.9 mm and less than or equal to about 1 mm, such as about 0.997 mm. Note that head portion 1101 may also function as a centering feature when insert 1100 is inserted into gas distribution port 207, allowing a central axis (e.g., reference axis 1111) of insert 1100 to be aligned (or substantially aligned) with central axis 257 of gas distribution port 207.

[0228] Similar to inserts 300 and 700, the formation of the above-described clearance fit associated with insert 1100 may increase the distance between side surface 1109 and inner surface 251 of gas distribution port 207, and may further increase the distance between side surface 1117 of insert 1100 and inner surface 259 of gas distribution port 207. Furthermore, this may reduce the likelihood of wear between insert 1100 and gas distribution port 207 that may occur as a result of thermally induced movement of insert 1100 relative to gas distribution port 207. Such thermally induced movement may otherwise be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed via system 100. While movement of insert 1100 is described as occurring in connection with thermal effects, it is contemplated that movement of insert 1100 may additionally or alternatively occur due to other factors, such as, for example, pressure differentials or movement of showerhead 107. In any event, reducing the likelihood of such wear may simultaneously reduce the likelihood of particle generation in and / or particle detachment from the gap between the insert 1100 and the gas distribution port 207. Such particle generation and / or particle detachment may otherwise result in, at least in part, the deposition of defect-causing contaminants on the front side 203 of the wafer 105 and / or structures formed thereon / in. To this end, the centering effect of the head portion 1101 relative to the body portion 1103 may also serve to return the insert 1100 to concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the insert 1100. This may help maintain a predetermined gas flow profile from the showerhead 107.

[0229] Gas Distribution Port Insert-4 15-18 schematically illustrate various views of a gas distribution port insert (or inserts) that can be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 15 illustrates a perspective view of insert 1500, FIG. 12 illustrates a bottom view of insert 1500, FIG. 17 illustrates a cross-sectional view of insert 1500 taken along section line 17-17, and FIG. 18 illustrates a cross-sectional view of insert 1500 taken along section line 18-18.

[0230] 15-18 , insert 1500 may be similar to inserts 300 and 700 and, therefore, may include a head portion 1501 and a body portion 1503 extending axially from head portion 1501. The axial direction may extend in a direction opposite to the z-axis direction. However, body portion 1503 may include a first body portion 1503a extending axially from head portion 1501 and a second body portion 1503b extending axially from first body portion 1503a. Both head portion 1501 and first body portion 1503a may be formed as a generally circular cylinder, and second body portion 1503b may be formed as a generally frustum of a cone, although embodiments are not limited thereto. For example, one or more of head portion 1501, first body portion 1503a, and second body portion 1503b may be formed having any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a frustum of at least one of such forms. For convenience, head portion 1501 and first body portion 1503a will be described as having a generally cylindrical configuration, and second body portion 1503b will be described as having a generally frustoconical configuration, although it will be understood that reference to surfaces of such shapes may also refer to one or more surfaces of another shape.

[0231] The head portion 1501 may include a gas inlet face 1505, an intermediate face 1507 axially opposite or spaced apart from the gas inlet face 1505, and a side face 1509 connecting the intermediate face 1507 to the gas inlet face 1505. In this manner, the head portion 1501 may extend along a reference axis 1511, which may be a central axis of the head portion 1501 as well as the insert 1500. The first body portion 1503a may include a proximal end 1513, a distal end 1515 axially opposite or spaced apart from the proximal end 1513, and a side face 1517 connecting the distal end 1515 to the proximal end 1513. Thus, the proximal end 1513 may extend from, and thereby be adjacent to, the intermediate face 1507. The distal end 1515 may terminate at a proximal end 1519 of a second body portion 1503b, which also includes a distal end 1521 axially opposite or spaced apart from the proximal end 1519, and a side surface 1523 connecting the distal end 1521 to the proximal end 1519. It should be noted that the proximal end 1519 of the second body portion 1503b may correspond to the distal end 1515 of the first body portion 1503a. Furthermore, the distal end 1521 of the second body portion 1503b may terminate at a distal surface 1525. In this manner, the first and second body portions 1503a and 1503b may also extend along the reference axis 1511, which may also be the central axis of the first and second body portions 1503a and 1503b.

[0232] According to some embodiments, the head portion 1501 may have a length 1701 in the axial direction and a maximum dimension (e.g., diameter) 1703 in a second direction, e.g., transverse to the axial direction. The second direction may be perpendicular (or substantially perpendicular) to the axial direction and thus extend in the y-axis direction. The body portion 1503 may have a length 1705 in the axial direction and a maximum dimension (e.g., diameter) 1707 in the second direction. In this manner, the first body portion 1503a may have a length 1705a in the axial direction and a maximum dimension (e.g., diameter) 1707 in the second direction. The second body portion 1503b may have a length 1705b in the axial direction and may have a variable width (e.g., diameter) in the second direction, e.g., a variable width in the second direction. In some embodiments, the width of the second body portion 1503b may vary linearly along the axial direction, with the side surface 1523 forming an inclination angle (or angle) 1802 with the axial direction and, in some cases, with the side surface 1517. Angle 1802 may be greater than 0° and less than about 80°, such as greater than or equal to about 20° and less than or equal to about 50°, such as about 45°. In this manner, second body portion 1503b may have a maximum dimension (e.g., diameter) corresponding to maximum dimension 1707 associated with proximal end 1519, as well as a minimum dimension (e.g., diameter) 1709 associated with distal end 1521.

[0233] Depending on the geometric configuration of head portion 1501, first body portion 1503a, and second body portion 1503b, dimensions 1703, 1707, and / or 1709 may be the width of insert 1500. In some embodiments, dimension 1703 may be about 0.1 mm to about 0.4 mm, dimension 1707 may be about 0.1 mm to about 0.2 mm, and dimension 1709 may be about 0.1 mm to about 0.2 mm. To this end, maximum dimension 1703 may be greater than each of dimensions 1707 and 1709. For example, maximum dimension 1703 may be at least about 15% to about 25% greater than dimension 1707 (which is greater than dimension 1709), although embodiments are not limited thereto. Length 1701 may be about 0.05 mm to about 0.1 mm, and length 1705 may be about 0.4 mm to about 0.6 mm. To this end, length 1705a may be about 0.3 mm to about 0.6 mm, and length 1705b may be about 0.03 mm to about 0.06 mm. Note that length 1705 may be greater than length 1701, for example, about 450% to about 550% greater than length 1701, although embodiments are not limited thereto. In this manner, the total length of insert 1500 may be about 0.5 mm to about 0.7 mm, although embodiments are not limited thereto.

[0234] In various implementations, the insert 1500 may include a bore 1711 extending from the gas inlet face 1505 toward the distal face 1525 along a reference axis 1511, which may be a central axis of the bore 1711. Thus, the bore 1711 may form a central bore of the insert 1500, although embodiments are not limited thereto. The bore 1711 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. For example, the bore 1711 may be formed as a void having any suitable geometric configuration, such as a generally conical void, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a void having a frustum configuration of at least one of such shapes. For convenience, the hole 1711 will be described as having a generally cylindrical configuration, but it should be understood that references to a surface (e.g., an inner surface) of such a shape may also refer to one or more surfaces of another shape or form of the hole 1711.

[0235] 17 and 18 , the bore 1711 may terminate at a distal surface 1713, which may be offset from the distal surface 1119 in a first direction (e.g., the z-axis direction), with the bore 1711 extending through the head portion 1501 and partially through the body portion 1503. In some implementations, the bore 1711 extends through (or substantially through) the first body portion 1503a and terminates at a transition region between the first body portion 1503a and the second body portion 1503b. Thus, the bore 1711 may not extend into the second body portion 1503b, although embodiments are not limited thereto. Accordingly, the bore 1711 may have a depth 1715, e.g., in the axial direction, and a maximum dimension (e.g., diameter) 1717, e.g., in a second direction. For example, depth 1715 may be about 0.4 mm to about 0.7 mm, and maximum dimension 1717 may be about 0.1 mm to about 0.2 mm (at least less than each of dimensions 1707 and 1709). Note that maximum dimension 1717 of hole 1711 in insert 1500 may be greater than maximum dimension 1317 of hole 1311 in insert 1100. However, hole 1711 may have a greater depth in insert 1500 than each of hole 509 in insert 300 and hole 909 in insert 700. Note also that depending on the geometric configuration of hole 1711, maximum dimension 1717 may be the width of hole 1711. Second body portion 1503b may also include a plurality of gas exit orifices 1527 fluidly connected to hole 1711 within insert 1500. Although a total of seven gas exit orifices 1527 are shown, the insert 1500 may include any suitable number of gas exit orifices 1527. In some cases, the gas exit orifices 1527 may extend between the distal face 1713 and the side face 1523, allowing one or more gases flowing into the holes 1711 in the gas inlet face 1505 to flow through the holes 1711 and the gas exit orifices 1527, thereby outputting from the side face 1523.

[0236] Similar to the holes 1711, the gas exit orifices 1527 may be formed as cavities having a generally circular cylindrical configuration, although embodiments are not limited thereto. For example, one or more of the gas exit orifices 1527 may be formed as cavities having any suitable geometric configuration, such as a generally conical shaped cavities, a generally triangular prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, or the like, or a cavities having a frustum configuration of at least one of such shapes. For convenience, the gas exit orifices 1527 will be described as having a generally cylindrical configuration, although it should be understood that reference to a surface (e.g., an interior surface) of such a shape may also represent one or more surfaces of another shape or configuration. In any event, each gas exit orifice 1527 may have a central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0237] For example, each gas exit orifice 1527 can have a corresponding central axis, such as central axis 1801, and a respective maximum dimension (e.g., diameter), such as maximum dimension 1803. The central axis (e.g., central axis 1801) of the gas exit orifice 1527 can extend outward from the reference axis 1511, thereby forming a respective oblique angle (or angle), such as angle 1805, with the reference axis 1511. In some examples, the central axis (e.g., central axis 1801) can form a respective angle (e.g., angle 1807) with the side surface 1523. For example, the central axis (e.g., central axis 1801) can extend perpendicular (or substantially perpendicular) toward (or from) the side surface 1523. This angling of the gas exit orifice 1527 relative to the reference axis 1511 and the inner surface 259 of the gas distribution port 207 can help inject purge gas into the gap between the side 1523 of the insert 1500 and the lower part of the inner surface 259 of the gas distribution port 207 near the opening 205, and then flow through the region 129. Such a flow of purge gas can additionally prevent process gas from entering one or more of the gap, the insert 1500, and / or the showerhead 107, which could otherwise degrade the insert 1500 and / or the showerhead 107. Additionally, in this manner, the flow of gas from the gas outlet orifice 1527 may prevent or at least reduce the possibility of material deposition between the insert 1500 and the inner surface 259 of the gas distribution port 207, and / or reduce the possibility of material spalling and / or particle formation, which may cause defect-causing contaminants to be deposited on the front surface 203 of the wafer 105 or structures formed thereon / in.

[0238] With respect to the side surface 1523, the central axes (e.g., central axis 1801) of the gas exit orifices 1527 may each be spaced apart from the transition region 1809 by a corresponding distance (e.g., distance 1811) in the extension direction of the side surface 1523. Note that the transition region 1809 may be a region (e.g., a plane) of the body portion 1503 where the first body portion 1503a transitions into the second body portion 1503b. Also, note that the maximum dimension (e.g., maximum dimension 1803) of each of the gas exit orifices 1527 may extend in a direction perpendicular to the extension direction of the corresponding central axis (e.g., central axis 1801) of a corresponding one of the gas exit orifices 1527. In such a configuration, the gas exit orifices 1527 may be arranged around the reference axis 1511 at an angular pitch 1601. Assuming insert 1500 has "n" gas exit orifices 1527, where "n" is an integer greater than or equal to 2, then angular pitch 1601 may be equal to (or substantially equal to) 360° divided by "n." For example, insert 1500 is shown as including seven gas exit orifices 1527, and therefore angular pitch 1601 may be approximately 51.4°, although embodiments are not limited in this respect.

[0239] In some implementations, the maximum dimension (e.g., maximum dimension 1803) of each corresponding gas exit orifice 1527 may be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, such as between about 0.03 mm and about 0.05 mm. Distance 1811 may be equal (or substantially equal) to the maximum dimension (e.g., maximum dimension 1803) of each corresponding gas exit orifice 1527. The length (or depth) of each gas exit orifice 1527 may be less than depth 1715 of hole 1711. In this manner, gas exit orifices 1527 may have a shorter length within insert 1500 than gas exit orifices 321 within insert 300 and gas exit orifices 721 within insert 700, respectively. This increase in the depth of hole 1711, the increase in maximum dimension 1717 of hole 1711, and the decrease in length of gas exit orifice 1527 may, at least in part, result in a lower pressure drop between gas inlet face 1505 and side surface 1523 associated with gas flow through insert 1500 under conditions in the slip flow regime. Such an increase in downstream pressure may result in a lower gas throughput (or average velocity) through insert 1500 than the gas throughput through inserts 300, 700, and 1100. This also makes sense in terms of the positioning of the inlet opening of gas exit orifice 1527 relative to the inner wall 1813 of hole 1711. In other words, in the slip flow region, gas flow is expected to decrease with decreasing distance from the interior wall 1813, which may result, at least in part, in slower gas flow from the gas exit orifice 1527 than through the gas exit orifices 321, 721, and 1121 in the respective inserts 300, 700, and 1100. For example, assuming gas flow in the slip flow region, the pressure drop through the insert 1500 may be approximately 500×10 -4 Torr or less, e.g., about 375 x 10 -4 Thor or less, e.g., about 340 x 10 -4 He could be Thor.

[0240] According to various embodiments, the insert 1500 may be formed from any suitable material and may be formed by any suitable method. For example, the insert 1500 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, etc. In some cases, the insert 1500 may be formed from a first material and coated with a second material. For example, the insert 1500 may be fabricated from aluminum as a first material and coated with aluminum fluoride (AlF) as a second material, although embodiments are not limited thereto. In various implementations, the insert 1500 may be fabricated by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, etc.

[0241] FIG. 19 schematically illustrates a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 15-18, according to some embodiments.

[0242] 2 and 15-19, the insert 1500 can be at least partially supported within the gas distribution port 207 such that the intermediate surface 1507 of the insert 1500 abuts the mounting surface 265 of the gas distribution port 207. To this end, the insert 1500 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 1703 of the head portion 1501 of the insert 1100 can be about 1% to about 10% smaller than the maximum dimension 255 of the first port section 245 of the gas distribution port 207, such that the side surface 1509 of the insert 1500 is spaced a distance 1901 from the inner surface 251 of the gas distribution port 207. Furthermore, dimension 1707 of first body portion 1503a of insert 1500 may be about 1% to about 10% less than maximum dimension 263 of second port portion 247 of gas distribution port 207, and minimum dimension 1709 of second body portion 1503b may be about 8% to about 15% less than maximum dimension 263 of second port portion 247 of gas distribution port 207. In this manner, side surface 1517 of insert 1500 may be spaced a first distance, such as distance 1903, from inner surface 259 of gas distribution port 207, and side surface 1523 may be variably spaced from inner surface 259 of gas distribution port 207. For example, the side surface 1523 may be spaced a first distance, e.g., distance 1903, from the inner surface 259 of the gas distribution port 207 relative to the proximal end 1519, and a second distance, e.g., distance 1905, from the inner surface 259 of the gas distribution port 207 relative to the distal end 1521. In some embodiments, the distance 1905 may be equal to or less than a sheath thickness associated with a process performed in connection with the system 100. For example, the distance 1905 may be greater than or equal to about 0.4 mm and less than or equal to about 1.1 mm, e.g., greater than or equal to about 0.7 mm and less than or equal to about 1 mm. Note also that the head portion 1501 may function as a centering feature when the insert 1500 is inserted into the gas distribution port 207, allowing the central axis (e.g., reference axis 1511) of the insert 1500 to be aligned (or substantially aligned) with the central axis 257 of the gas distribution port 207.

[0243] Similar to inserts 300, 700, and 1100, these clearance fits associated with insert 1500 may increase the distance between side surfaces 1509 and 1517 of insert 1500 and corresponding interior surfaces 251 and 259 of gas distribution port 207. As previously discussed, this may reduce the likelihood of wear between insert 1500 and gas distribution port 207, which may occur as a result of thermally induced movement of insert 1500 relative to gas distribution port 207. Such thermally induced movement may be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed by system 100. While movement of insert 1500 has been described as being caused by thermal effects, it is contemplated that movement of insert 1500 may additionally or alternatively be caused by other factors, such as pressure differentials or movement of showerhead 107. In any event, reducing the likelihood of such wear may also reduce the likelihood of particle generation and / or particle detachment in the gap between insert 1500 and gas distribution port 207. Such particle generation and / or particle detachment may otherwise result in the deposition of defect-causing contaminants, at least in part, on the front surface 203 of the wafer 105 and / or structures formed thereon / in. To this end, the centering effect of the head portion 1501 relative to the body portion 1503 may also serve to return the insert 1500 to concentric (or substantially concentric) alignment with the gas distribution ports 207 after movement of the insert 1500. This may help to maintain a predetermined gas flow profile from the showerhead 107.

[0244] Gas Distribution Port Insert-5 20-23 schematically illustrate various views of a gas distribution port insert (or inserts) that can be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 20 illustrates a perspective view of insert 2000, FIG. 21 illustrates a side view of insert 2000, FIG. 22 illustrates a bottom view of insert 2000, and FIG. 23 illustrates a cross-sectional view of insert 2000 taken along section line 23-23.

[0245] 20-23, the insert 2000 may include a head portion 2001 and a body portion 2003 extending axially from the head portion 2001. The axial direction may extend in a direction opposite to the z-axis direction. The head portion 2001 and the body portion 2003 may both be formed as generally circular cylinders, although embodiments are not limited thereto. For example, either or both of the head portion 2001 and the body portion 2003 may be formed having any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or at least one frustum of such configurations. For convenience, with respect to FIGS. 20-23, the head portion 2001 and the body portion 2003 will be described as having a generally cylindrical configuration, although it will be understood that references to surfaces of such shapes may also refer to one or more surfaces of other shapes.

[0246] According to various embodiments, head portion 2001 may have a length 2301 in the axial direction and a maximum dimension (e.g., diameter) 2303 in a second direction, e.g., transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction, and thus extend along the x-axis. Body portion 2003 may have a length 2305 in the axial direction and a maximum dimension (e.g., diameter) 2307 in the second direction. Depending on the geometric configuration of head portion 2001 and body portion 2003, maximum dimensions 2303 and 2307 may be the width of insert 2000. In some embodiments, maximum dimension 2303 may be between about 0.1 mm and about 0.4 mm, and maximum dimension 2307 may be between about 0.1 mm and about 0.3 mm. Additionally, maximum dimension 2303 may be greater than maximum dimension 2307, e.g., between about 15% and about 25% greater than maximum dimension 2307, although embodiments are not limited thereto. Length 2301 may be about 0.05 mm to about 0.1 mm, and length 2305 may be about 0.4 mm to about 0.6 mm. Length 2305 may be greater than length 2301, for example, about 450% to about 550% greater than length 1001, although embodiments are not limited thereto. In this manner, total length 2309 of insert 2000 may be about 0.5 mm to about 0.7 mm, although embodiments are not limited thereto.

[0247] The head portion 2001 may include a gas inlet face 2005, an intermediate face 2007 axially opposite or spaced apart from the gas inlet face 2005, and a side face 2009 connecting the intermediate face 2007 to the gas inlet face 2005. In this manner, the head portion 2001 may extend along a reference axis 2011, which may be a central axis of the head portion 2001 as well as the insert 2000. The body portion 2003 may include a proximal end 2013, a distal end 2015 axially opposite or spaced apart from the proximal end 2013, and a side face 2017 connecting the distal end 2015 to the proximal end 2013. Thus, the proximal end 2013 may extend from the intermediate face 2007 and thereby be adjacent to the intermediate face 2007. The distal end 2015 may terminate at a distal face 2019. In this manner, the body portion 2003 may also extend along a reference axis 2011, which may also be a central axis of the body portion 2003.

[0248] According to some implementations, the insert 2000 may include a bore 2311 extending from the gas inlet face 2005 toward the distal face 2019 along a reference axis 2011, which may be a central axis of the bore 2311. Thus, the bore 2311 may form a central bore of the insert 2000, although embodiments are not limited thereto. The bore 2311 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. For example, the bore 2311 may be formed as a void having any suitable geometric configuration, such as a generally conical shaped void, a generally triangular shaped prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, or the like, or a void having a frustum configuration of at least one of such shapes. For convenience, the hole 2311 will be described as having a generally cylindrical configuration, however, it should be understood that reference to a surface (e.g., an inner surface) of such a shape may also refer to one or more surfaces of another shape or form of the hole 2311.

[0249] As shown in FIG. 23 , bore 2311 can terminate at distal surface 2313 offset from distal surface 2019 in a first direction (e.g., the z-axis direction), with bore 2311 extending through head portion 2001 and partially through body portion 2003. In this manner, bore 2311 can have a depth 2315, e.g., in the axial direction, and a maximum dimension (e.g., diameter) 2317, e.g., in a second direction. For example, depth 2315 can be about 0.5 mm to about 0.6 mm, and maximum dimension 2317 can be about 0.1 mm to about 0.1 mm. In this manner, bore 2311 can have a greater depth within insert 2000 than bores 509, 909, 1311, and 1711 within inserts 300, 700, 1100, and 1700, respectively. Additionally, maximum dimension 2317 of hole 2311 may be smaller than maximum dimensions 515, 915, 1317, and 1717 of corresponding holes 509, 909, 1311, and 1711 within inserts 300, 700, 1100, and 1700, respectively. Note that depending on the geometric configuration of hole 2311, maximum dimension 2317 may be the width of hole 2311. Body portion 2003 may also include a plurality of gas exit orifices 2021 fluidly connected to holes 2311 within insert 2000. While a total of fourteen gas exit orifices 2021 are shown, insert 2000 may include any suitable number of gas exit orifices 2021. In some cases, the gas exit orifice 2021 may extend between the inner surface 2319 of the hole 2311 and the side surface 2017, allowing one or more gases flowing into the hole 2311 at the gas inlet surface 2005 to flow through the hole 2311 and the gas exit orifice 2021, thereby exiting from the side surface 2017.

[0250] The gas exit orifice 2021 may include a first gas exit orifice 2021a and a second gas exit orifice 2021b axially offset from the first gas exit orifice 2021a. The first gas exit orifice 2021a may be closer to the proximal end 2013 of the body portion 2003 than the second gas exit orifice 2021b. Like the hole 2311, the gas exit orifice 2021 may be formed as a void having a generally circular cylindrical configuration, although embodiments are not limited thereto. For example, the gas exit orifice 2021 may be formed as a void having any suitable geometric configuration, such as a generally conical shaped void, a generally triangular prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, or the like, or a void having a frustum configuration of at least one of such forms. For convenience, the gas exit orifices 2021 will be described as having a generally cylindrical configuration, although it should be understood that reference to a surface (e.g., an interior surface) of such a shape may also refer to one or more surfaces of another shape or form. In any event, each gas exit orifice 2021 may have a central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0251] For example, the first gas exit orifices 2021 a may have a respective central axis (e.g., central axis 2101) and a corresponding maximum dimension (e.g., diameter), such as maximum dimension 2103. The second gas exit orifices 2021 b may have a respective central axis (e.g., central axis 2201) and a corresponding maximum dimension (e.g., maximum dimension 2105). In some cases, the central axes 2101 and 2201 may extend outward from the reference axis 2011, for example, radially outward from the reference axis 2011. However, it is contemplated that the central axes 2101 and 2201 may extend outward from the reference axis 2011 at a corresponding oblique angle relative to the reference axis 2011 or to a first reference plane 2107, which may be perpendicular (or substantially perpendicular) to the reference axis 2011. It should be noted that the central axis (e.g., central axis 2101) of the first gas exit orifice 2021a may be spaced a distance 2321 (or substantially distance 2321) from the distal face 2313, and the central axis (e.g., central axis 2201) of the second gas exit orifice 2021b may be spaced a distance 2323 (or substantially distance 2323) from the distal face 2313. It should be noted that the distances 2321 and 2323 may extend in the axial direction, although embodiments are not limited thereto. It should also be noted that the corresponding maximum dimensions (e.g., maximum dimensions 2103 and 2105) of the first and second gas exit orifices 2021a and 2021b may extend, for example, in the second direction. In some embodiments, the maximum dimensions 2103 and 2105 may be equal (or substantially equal). In some implementations, maximum dimensions 2103 and 2105 may be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, for example between about 0.03 mm and about 0.05 mm. Also, in various embodiments, the surface of each of second gas exit orifices 2021b may be tangential to a reference plane 2313p, which may include distal surface 2313.

[0252] The corresponding lengths (e.g., length 2325) of the gas exit orifices 2021 may be less than the depths 2315 of the holes 2311, respectively. For example, the lengths (e.g., length 2325) may be about 0.06 mm to about 0.08 mm. In this manner, the gas exit orifices 2021 may have a longer length within the insert 2000 than the gas exit orifices 1121 within the insert 1100. This increase in the depth of the holes 2311, the decrease in the maximum dimension 2317 of the holes 2311, and the increase in the length of the gas exit orifices 2021 may, at least in part, result in a greater pressure drop between the gas inlet face 2005 and the side surface 2017 associated with gas flow through the insert 2000 under conditions in the slip flow regime. This reduction in downstream pressure may also result from the combination between the insert 2000 and the gas distribution ports 207 of the gas distributor 200. For example, when the insert 2000 is at least partially supported within the gas distribution port 207, the spacing (such as distance 2407 in FIG. 24 ) between the side surface 2017 of the body portion 2003 and the inner surface 259 of the gas distribution port 207 may extend the effective length of the gas exit orifices 2021, effectively forming a single gas exit port 2403 (see, e.g., FIG. 24 ) that surrounds the distal face 2019 of the insert 2000. The effective exit area of ​​the gas exit port 2403 may be larger than the exit area of ​​each of the gas exit orifices 2021, which may increase flow conductance. For example, assuming gas flow in the slip flow region, the pressure drop through the insert 2000 may be approximately 150×10 -3 Torr or less, e.g., about 100 x 10 -3 Torr or less, e.g., about 81 x 10 -3 In some embodiments, increasing the flow conductance reduces the flow resistance, thereby enabling greater throughput to be achieved in association with the gas outlet port 2403.

[0253] In various embodiments, acceleration of the gas flow in the region corresponding to the gas outlet port 2403 can prevent or at least reduce the possibility of back-diffusion into the gas distribution port 207 and thereby into the showerhead 107. For example, gas flow from the gas outlet orifice 2021 can serve to inject purge gas into the gap between the side 2017 of the insert 2000 and the lower part of the inner surface 259 of the gas distribution port 207 near the opening 205, and then flow through the region 129. Note that the gas outlet orifice 2021 can be configured to inject the purge gas above the gas distribution port 207 rather than the gas outlet orifice 1527 of the insert 1500. Such a flow of purge gas can additionally prevent process gas from entering one or more of the gap, the insert 2000, and / or the showerhead 107. Such inflow could otherwise degrade the insert 2000 and / or the showerhead 107. Additionally, given that the gas outlet orifice 2021 may be configured to inject purge gas above the gas distribution port 207 relative to the gas outlet orifice 1527 of the insert 1500, the insert 2000 may form a greater barrier to process gas than the insert 1500. Furthermore, the flow of gas from the gas outlet orifice 2021 may prevent or at least reduce the possibility of material deposition between the insert 2000 and the inner surface 259 of the gas distribution port 207, and / or reduce the possibility of material spalling and / or particle formation. Such material spalling and / or particle formation may result in the deposition of defect-causing contaminants on the front surface 203 of the wafer 105 or structures formed thereon / in. It is also contemplated that acceleration of the gas flow in the region corresponding to the gas outlet port 2403 may be utilized during a cleaning cycle (or process) to remove coatings, residue, debris, etc., on the inner surface 259 and / or side surface 2017 of the gas distribution port 207.

[0254] According to various embodiments, the first and second gas exit orifices 2021 a and 2021 b may be arranged around the reference axis 2011. In such a configuration, the first gas exit orifice 2021 a and the second gas exit orifice 2021 b may be arranged about the reference axis 2011 at a corresponding angular pitch, such as angular pitch 2203. In some examples, the angular pitch associated with the first gas exit orifice 2021 a may be equal to (or substantially equal to) the angular pitch associated with the second gas exit orifice 2021 b (e.g., angular pitch 2203), although embodiments are not limited thereto. Assuming that the insert 2000 has “k” second gas exit orifices 2021 b (where “k” is an integer greater than or equal to 2), the angular pitch 2203 may be equal to (or substantially equal to) 360° divided by “k.” For example, the insert 2000 is shown as including seven second gas exit orifices 2021b, and therefore the angular pitch 2203 may be approximately 51.4°, although embodiments are not limited thereto. The same may be true with respect to the angular pitch associated with the first gas exit orifices 2021a. It should also be noted that the first gas exit orifices 2021a may be circumferentially offset from the second gas exit orifices 2021b, such that the axially extending centerline (e.g., centerline 2109) of the first gas exit orifices 2021a may not coincide with the axially extending centerline (e.g., centerline 2111) of the second gas exit orifices 2021b. In some examples, the circumferential offset between the first gas exit orifices 2021a and the second gas exit orifices 2021b may be half the amount of the angular pitch 2203, although embodiments are not limited thereto.

[0255] According to various embodiments, the insert 2000 may be formed from any suitable material and may be formed by any suitable method. For example, the insert 2000 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, etc. In some cases, the insert 2000 may be formed from a first material and coated with a second material. For example, the insert 2000 may be fabricated from aluminum as a first material and coated with aluminum fluoride (AlF) as a second material, although embodiments are not limited thereto. In various implementations, the insert 2000 may be fabricated by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, etc.

[0256] FIG. 24 schematically illustrates a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 20-23, according to some embodiments.

[0257] 2 and 20-23 , the insert 2000 can be at least partially supported within the gas distribution port 207 such that an intermediate surface 2007 of the insert 2000 abuts the mounting surface 265 of the gas distribution port 207. Such abutment between the surfaces 265 and 2007 can prevent or at least reduce the possibility of back-diffusion into the gas distribution port 207 and, thereby, into the gas distributor 200. To this end, the insert 2000 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 2303 of the head portion 2001 of the insert 2000 can be about 1% to about 10% smaller than the maximum dimension 255 of the first port section 245 of the gas distribution port 207, such that the side surface 2009 of the insert 2000 is spaced a distance 2405 from the inner surface 251 of the gas distribution port 207. To this end, the maximum dimension 2307 of the body portion 2003 of the insert 2000 may be about 4% to about 15% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the side surface 2017 of the insert 2000 is spaced a distance 2407 from the inner surface 259 of the gas distribution port 207. In some cases, the distance 2407 may be greater than the distance 2405, although embodiments are not limited thereto. Furthermore, the distance 2407 may be about three-quarters or less of a sheath thickness associated with a process performed in connection with the system 100. In some implementations, the distance 2407 may be about 0.3 mm or more and about 0.7 mm or less, e.g., about 0.4 mm or more and about 0.6 mm or less, e.g., about 0.5 mm. Like the head portions 301, 701, 1101, and 1501 of the respective inserts 300, 700, 1100, and 1500, the head portion 2001 of the insert 2000 can also function as a centering mechanism, for example, when the insert 2000 is inserted into the gas distribution port 207, allowing the central axis (e.g., the reference axis 2011) of the insert 2000 to be aligned (or substantially aligned) with the central axis 257 of the gas distribution port 207.

[0258] Similar to inserts 300, 700, 1100, and 1500, the loose fit described above may increase the distance between the sides 2009 and 2017 of the insert 2000 and the corresponding interior surfaces 251 and 259 of the gas distribution port 207. This may reduce the likelihood of wear between the insert 2000 and the gas distribution port 207, which may occur as a result of thermally induced movement of the insert 2000 relative to the gas distribution port 207. Such thermally induced movement may be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed by the system 100. While the movement of the insert 2000 has been described as being caused by thermal effects, it is contemplated that the movement of the insert 2000 may additionally or alternatively be caused by other factors, such as pressure differentials or movement of the showerhead 107. In any event, reducing the likelihood of such wear may also reduce the likelihood of particle generation and / or particle detachment in the gap between the insert 2000 and the gas distribution port 207. Such particle generation and / or particle detachment can otherwise result in the deposition of defect-causing contaminants, at least in part, on the front surface 203 of the wafer 105 and / or structures formed thereon / in. To this end, the centering effect of the head portion 2001 relative to the body portion 2003 can also serve to return the insert 2000 to concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the insert 2000. This can help maintain a predetermined gas flow profile from the showerhead 107. Also, the additional distance between the side surface 2017 of the insert 2000 and the inner surface 259 of the gas distribution port 207, relative to the distance between the side surface 317 of the insert 300 and the inner surface 259 of the gas distribution port 207, for example, can allow for sufficient flow of purge gas from the gas exit orifice 2021.

[0259] Gas Distribution Port Insert-6 25-28 schematically illustrate various views of a gas distribution port insert (or inserts) that can be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 25 illustrates a perspective view of insert 2500, FIG. 26 illustrates a side view of insert 2500, FIG. 27 illustrates a bottom view of insert 2500, and FIG. 28 illustrates a cross-sectional view of insert 2500 taken along section line 28-28.

[0260] 25-28 , insert 2500 may be similar to inserts 1100 and 2000 and, therefore, may include a head portion 2501 and a body portion 2503 extending axially from head portion 2501. The axial direction may extend in a direction opposite to the z-axis direction. Head portion 2501 may be formed as a generally circular cylinder, and body portion 2503 may be formed as a generally frustum of a cone, although embodiments are not limited thereto. For example, either or both of head portion 2501 and body portion 2503 may be formed having any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a frustum of at least one of such forms. However, for convenience, with respect to Figures 25-28, head portion 2501 and body portion 2503 will be described as having a generally cylindrical and a generally frusto-conical configuration, respectively, although it should be understood that references to surfaces of such shapes may also refer to one or more surfaces of other shapes.

[0261] The head portion 2501 may include a gas inlet face 2505, an intermediate face 2507 axially opposite or spaced apart from the gas inlet face 2505, and a side face 2509 connecting the intermediate face 2507 to the gas inlet face 2505. In this manner, the head portion 2501 may extend along a reference axis 2511, which may be a central axis of the head portion 2501 as well as the insert 2500. The body portion 2503 may include a proximal end 2513, a distal end 2515 axially opposite or spaced apart from the proximal end 2513, and a side face 2517 connecting the distal end 2515 to the proximal end 2513. Thus, the proximal end 2513 may extend from the intermediate face 2507 and thereby be adjacent to the intermediate face 2507. The distal end 2515 may terminate in a distal face 2519. In this manner, the body portion 2503 may also extend along a reference axis 2511, which may also be a central axis of the body portion 2503.

[0262] According to various embodiments, head portion 2501 may have a length 2601 in the axial direction and a maximum dimension (e.g., diameter) 2603 in a second direction, e.g., transverse to the axial direction. The second direction may be perpendicular (or substantially perpendicular) to the axial direction and thus extend in the y-axis direction. Body portion 2503 may have a length 2605 in the axial direction and a variable width (e.g., diameter) in the second direction, e.g., in the second direction. In some embodiments, the width of body portion 2503 may vary linearly along the axial direction, with side surface 2517 forming an oblique angle (or angle) 2607 with the axial direction and, in some cases, with side surface 2509. Angle 2607 may be greater than 0° and less than about 10°, e.g., greater than or equal to about 2.00° and less than or equal to about 5.00°, e.g., greater than or equal to about 2.75° and less than or equal to about 3.25°. As shown, the width of body portion 2503 can have dimension 2609a at proximal end 2513 and dimension 2609b at distal end 2515. Depending on the geometric configuration of head portion 2501 and / or body portion 2503, dimensions 2603, 2609a, and / or 2609b can be the width of insert 2500. In some embodiments, dimension 2603 can be between about 0.1 mm and about 0.4 mm, dimension 2609a can be between about 0.1 mm and about 0.2 mm, and dimension 2609b can be between about 0.1 mm and about 0.2 mm. To this end, maximum dimension 2603 can be greater than each of dimensions 2609a and 2609b. For example, maximum dimension 2603 can be at least about 15% to about 25% greater than dimension 2609a (which is greater than dimension 2609b), although embodiments are not limited thereto. Length 2601 may be about 0.05 mm to about 0.1 mm, and length 2605 may be about 0.4 mm to about 0.6 mm. Note that length 2605 may be greater than length 2601, for example, about 450% to about 550% greater than length 2601, although embodiments are not limited thereto. In this manner, the total length of insert 2500 may be about 0.5 mm to about 0.7 mm, although embodiments are not limited thereto.

[0263] According to various implementations, the insert 2500 may include a bore 2801 extending from the gas inlet face 2505 toward the distal face 2519 along a reference axis 2511, which may be a central axis of the bore 2801. Thus, the bore 2801 may form a central bore of the insert 2500, although embodiments are not limited thereto. The bore 1311 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. For example, the bore 2801 may be formed as a void having any suitable geometric configuration, such as a generally conical shaped void, a generally triangular shaped prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, or the like, or a void having a frustum configuration of at least one of such shapes. For convenience, hole 2801 will be described as having a generally frusto-conical configuration, although it should be understood that reference to a surface (e.g., an inner surface) of such a shape may also refer to one or more surfaces of another shape or form of hole 2801.

[0264] 28 , bore 2801 may terminate at distal face 2803 offset from distal face 2519 in a first direction (e.g., the z-axis direction), with bore 2801 extending through head portion 2501 and partially through body portion 2503. Note, however, that unlike distal face 1313 of insert 1100, distal face 2803 may be formed as a generally conical protrusion having apex 2805 extending in a first direction toward gas inlet face 2505. In some embodiments, reference axis 2511 may extend through apex 2805, with apex 2805 being concentrically aligned with bore 2801. Also, bore 2801 may have a maximum depth 2807, e.g., in the axial direction, and a maximum dimension (e.g., diameter) 2809, e.g., in a second direction, at gas inlet face 2505. Inner wall 2811 of hole 2801 may converge toward reference axis 2511 such that inner wall 2811 forms angle 2813 with reference axis 2511. In some cases, angle 2813 may be greater than about 0° and less than or equal to about 10°. Note that depth 2807 of hole 2801 may be less than depth 1315 of hole 1311 in insert 1100. Maximum dimension 2809 may be greater than maximum dimension 1317 of hole 1311 in insert 1100. In some cases, maximum dimension 2809 may be between about 0.1 mm and about 0.2 mm (at least less than each of dimensions 2609a and 2609b). In this manner, holes 2801 may have a greater depth within insert 2500 that is less than each of holes 509, 909, 1311, and 1711 within inserts 300, 700, 1100, and 1500, respectively. Also note that depending on the geometric configuration of hole 2801, maximum dimension 2809 may be the width of hole 2801. Body portion 2503 may also include a plurality of gas exit orifices 2521 fluidly connected to holes 2801 within insert 2500. While a total of twelve gas exit orifices 2521 are shown, insert 2500 may include any suitable number of gas exit orifices 2521.In some cases, the gas exit orifice 2521 may extend between the inner wall 2811 and the side surface 2517, allowing one or more gases flowing into the holes 2801 at the gas inlet surface 2505 to flow through the holes 2801 and the gas exit orifice 2521, thereby exiting the side surface 2517.

[0265] The gas exit orifices 2521 may include a first gas exit orifice 2521 a and a second gas exit orifice 2521 b axially offset from the first gas exit orifice 2521 a. The first gas exit orifice 2521 a may be closer to the proximal end 2513 of the body portion 2503 than the second gas exit orifice 2521 b. The gas exit orifices 2521 may be formed as cavities having a generally circular cylindrical configuration, although embodiments are not limited thereto. For example, one or more of the gas exit orifices 2521 may be formed as cavities having any suitable geometric configuration, such as a generally conical shaped cavities, a generally triangular shaped prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, etc., or a cavities having a frustum configuration of at least one of such forms. For convenience, the gas exit orifices 2521 will be described as having a generally cylindrical configuration, although it should be understood that reference to a surface (e.g., an interior surface) of such a shape may also refer to one or more surfaces of another shape or form. In any event, each gas exit orifice 2521 may have a central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0266] For example, first gas exit orifices 2521 a can have a respective central axis, such as central axis 2815, and a corresponding maximum dimension (e.g., diameter), such as maximum dimension 2817. Second gas exit orifices 2521 b can have a respective central axis (e.g., central axis 2819) and a corresponding maximum dimension (e.g., maximum dimension 2821). In some cases, maximum dimensions 2817 and 2821 can be equal (or substantially equal). Furthermore, central axes 2815 and 2819 can extend outward from reference axis 2511, thereby forming respective inclination angles (or angles) with reference axis 2511, such as angles 2823 and 2825. However, for convenience, angles 2823 and 2825 are illustrated relative to a reference plane 2827 that extends parallel to reference axis 2511. Angles 2823 and 2825 can be equal (or substantially equal), although embodiments are not limited thereto. Additionally, central axes 2815 and 2819 may intersect side surface 2517 at points 2829 and 2831, respectively, which may be axially spaced apart from reference surface 2833 by distances 2835 and 2837, respectively.

[0267] Similar to inserts 1500 and 2000, this angling of gas outlet orifice 2521 relative to reference axis 2011 and inner surface 259 of gas distribution port 207 may help inject purge gas into the gap between side 2517 of insert 2500 and the lower portion of inner surface 259 of gas distribution port 207 near opening 205, and then flow through region 129. Note, however, that gas outlet orifice 2521 may be configured to inject purge gas further up gas distribution port 207 than gas outlet orifice 1527 of insert 1500 and gas outlet orifice 2021 of insert 2000. Such flow of purge gas may additionally prevent process gas from entering one or more of the gap, insert 2500, and / or showerhead 107. Such inflow could otherwise degrade insert 2500 and / or showerhead 107. Furthermore, given that gas outlet orifice 2521 may be configured to inject purge gas further up gas distribution port 207 than gas outlet orifice 1527 of insert 1500 and gas outlet orifice 2021 of insert 2000, insert 2500 may form an even greater barrier to process gases than inserts 1500 and 2000. Furthermore, the flow of gas from gas outlet orifice 2527 may prevent or at least reduce the possibility of material deposition between insert 2500 and inner surface 259 of gas distribution port 207 and / or reduce the possibility of material spalling and / or particle formation. Such material spalling and / or particle formation may cause defect-causing contaminants to be deposited on front surface 203 of wafer 105 or structures formed thereon / in.

[0268] In some embodiments, the intermediate surface 2507 may extend to the reference surface 2833, and the maximum dimension (e.g., maximum dimension 2817) of the first gas exit orifices 2521 a may be sized such that the respective openings 2839 of the first gas exit orifices 2521 a are formed tangentially to the reference surface 2833. Thus, the first gas exit orifices 2521 a may include respective portions that extend within the head portion 2501 of the insert 2500. According to some implementations, the inclination angle (or angle) 2841 of the distal surface 2803 may be equal (or substantially equal) to the angle 2825, and the maximum dimension (e.g., maximum dimension 2821) of the second gas exit orifices 2521 b may be sized such that corresponding portions of the distal surface 2803 form respective portions of the inner surface 2843 of the second gas exit orifices 2521 b. In other words, the inner surface 2843 of each of the second gas exit orifices 2521b may be tangential to the distal surface 2803. In such a configuration, each opening (such as opening 2839) of the gas exit orifices 2521 may have a generally elliptical shape in the side surface 2517 and the inner wall 2811, but the gas exit orifices 2521 may each have a generally circular cross-section in a plane perpendicular to their corresponding longitudinal extension axes.

[0269] According to various implementations, maximum dimensions 2817 and 2821 may be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, such as between about 0.03 mm and about 0.05 mm. The length (or depth) of each of gas exit orifices 2521 may be less than depth 2807 of hole 2801. In this manner, gas exit orifices 2521 may have a shorter length within insert 2500 than gas exit orifices 321 within insert 300 and gas exit orifices 721 within insert 700, respectively, but may have a longer length within insert 2500 than gas exit orifices 1527 within insert 1500 and gas exit orifices 2021 within insert 2000, respectively. The reduced maximum depth 2807 of hole 2801 and the relative sizing of the corresponding length of gas exit orifice 2521 may, at least in part, cause a pressure drop between gas inlet surface 2505 and side surface 2517 associated with gas flow through insert 2500 under slip flow regime conditions, this pressure drop being similar in magnitude to the pressure drop exhibited in association with insert 2000. This drop in downstream pressure may also be due to the convex conical shape of distal surface 2803 within hole 2801 and the combination between insert 2500 and gas distribution port 207 of gas distributor 200. For example, in the slip flow regime, the average velocity of gas flow in the central portion of hole 2803 is expected to be relatively constant and greater than the average velocity of gas flow near inner wall 2811 of hole 2801. Accordingly, the protruding conical shape of the distal surface 2803 within the bore 2801 allows more of this faster moving gas to be distributed and pushed out of the second gas exit orifice 2521b before it loses momentum. Furthermore, when the insert 2500 is at least partially supported within the gas distribution port 207, the spacing (such as distance 2901 in FIG. 29 ) between the side surface 2517 of the body portion 2503 and the inner surface 259 of the gas distribution port 207 can extend the effective length of the gas exit orifice 2521, effectively forming a single gas exit port 2903 (see, e.g., FIG. 29 ) that surrounds the distal surface 2519 of the insert 2500.The effective exit area of ​​the gas exit port 2903 may be larger than the exit area of ​​each of the gas exit orifices 2521, which may increase flow conductance. In various embodiments, increasing flow conductance reduces flow resistance, thereby enabling greater throughput to be achieved in association with the gas exit port 2903. For example, assuming gas flow in the slip flow region, the pressure drop through the insert 2500 is approximately 150×10. -3 Torr or less, e.g., about 100 x 10 -3 Torr or less, e.g., about 80 x 10 -3 It should be noted that acceleration of the gas flow in the region corresponding to the gas outlet port 2903 may prevent or at least reduce the possibility of back-diffusion into the gas distribution port 207 and thereby into the gas distributor 200. Such acceleration of the gas flow in the region corresponding to the gas outlet port 2903 may be utilized during a cleaning cycle (or process) to remove coatings, residue, debris, etc. on the inner surface 259 and / or side surface 2517 of the gas distribution port 207. Furthermore, given the tapered configuration of the body portion 2503 of the insert 2500 and the closer positioning of the gas outlet orifice 2521 to the intermediate surface 2507 of the insert 2500 than the gas outlet orifice 2521 to the intermediate surface 2007 of the insert 2500, a greater portion of the inner surface 259 of the gas distributor 200 and the side surface 2517 of the insert 2500 may be exposed to this faster-moving gas, thus further promoting the aforementioned prevention and cleaning functions.

[0270] 26 and 27, the first and second gas exit orifices 2521a and 2521b may be arranged about the reference axis 2511. In such a configuration, the first gas exit orifice 2521a and the second gas exit orifice 2521b may be arranged about the reference axis 2511 at a corresponding angular pitch, such as angular pitch 2701. In some examples, the angular pitch associated with the first gas exit orifice 2521a may be equal to (or substantially equal to) the angular pitch associated with the second gas exit orifice 2521b, although embodiments are not limited thereto. Assuming that the insert 2500 includes "k" first gas exit orifices 2521b (where "k" is an integer greater than or equal to 2), the angular pitch between adjacent first gas exit orifices 2521b may be equal to (or substantially equal to) 360° divided by "k". For example, the insert 2500 is shown as including six first gas exit orifices 2521 a, and therefore the angular pitch between adjacent first gas exit orifices 2521 b may be approximately 60°, although embodiments are not limited thereto. The same may be true with respect to the angular pitch between adjacent second gas exit orifices 2021 b. In some implementations, the central axis 2815 of each of the first gas exit orifices 2521 a may be circumferentially aligned with the corresponding central axis 2819 of the second gas exit orifice 2521 b, and a centerline (e.g., centerline 2611) extending tangentially to the side surface 2517 of the first gas exit orifice 2521 a may coincide with a centerline (e.g., centerline 2613) extending tangentially to the side surface 2517 of the second gas exit orifice 2521 b, although embodiments are not limited thereto.

[0271] According to various embodiments, the insert 2500 may be formed from any suitable material and may be formed by any suitable method. For example, the insert 2500 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, etc. In some cases, the insert 2500 may be formed from a first material and coated with a second material. For example, the insert 2500 may be fabricated from aluminum as a first material and coated with aluminum fluoride (AlF) as a second material, although embodiments are not limited thereto. In various implementations, the insert 2500 may be fabricated by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, etc.

[0272] FIG. 29 schematically illustrates a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 25-28, according to some embodiments.

[0273] 2 and 25-28 , the insert 2500 can be at least partially supported within the gas distribution port 207 such that the intermediate surface 2507 of the insert 2500 abuts the mounting surface 265 of the gas distribution port 207. To this end, the insert 2500 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 2603 of the head portion 2501 of the insert 2500 can be about 1% to about 10% smaller than the maximum dimension 255 of the first port section 245 of the gas distribution port 207, such that the side surface 2509 of the insert 2500 is spaced a distance 2905 from the inner surface 251 of the gas distribution port 207. Additionally, dimension 2609a of body portion 2503 of insert 2500 may be about 1% to about 10% smaller than maximum dimension 263 of second port portion 247 of gas distribution port 207, and dimension 2609b may be about 8% to about 15% smaller than maximum dimension 263 of second port portion 247 of gas distribution port 207. In this manner, side surface 2517 of insert 2500 may be spaced a first distance, e.g., distance 2905, from inner surface 259 of gas distribution port 207 about proximal end 2513 of body portion 2503, and a second distance, e.g., distance 2901, from inner surface 259 of gas distribution port 207 about distal end 2515 of body portion 2503. In some cases, distance 2901 may be equal to or less than a sheath thickness associated with a process performed in connection with system 100. For example, distance 2901 may be about 0.6 mm or more and about 0.9 mm or less, such as about 0.7 mm or more and about 0.8 mm or less, such as about 0.76 mm. It should also be noted that head portion 2501 may also function as a centering feature when insert 2500 is inserted into gas distribution port 207, allowing a central axis (e.g., reference axis 2511) of insert 2500 to be aligned (or substantially aligned) with central axis 257 of gas distribution port 207 when incorporated as part of gas distributor 200.

[0274] Similar to inserts 300, 700, 1100, 1500, and 2000, the loose fit described above may increase the distance between the sides 2509 and 2517 of the insert 2500 and the corresponding interior surfaces 251 and 259 of the gas distribution port 207. This may reduce the likelihood of wear between the insert 2500 and the gas distribution port 207, which may occur as a result of thermally induced movement of the insert 2500 relative to the gas distribution port 207. Such thermally induced movement may be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed by the system 100. While the movement of the insert 2500 has been described as being caused by thermal effects, it is contemplated that the movement of the insert 2500 may additionally or alternatively be caused by other factors, such as pressure differentials or movement of the showerhead 107. In any event, reducing the likelihood of such wear may also reduce the likelihood of particle generation and / or particle detachment in the gap between the insert 2500 and the gas distribution port 207. Such particle generation and / or particle detachment can otherwise result in the deposition of defect-causing contaminants, at least in part, on the front surface 203 of the wafer 105 and / or structures formed thereon / in. The centering effect of the head portion 2501 relative to the body portion 2503 can also serve to return the insert 2500 to concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the insert 2500. This can help maintain a predetermined gas flow profile from the showerhead 107. Also, the additional distance between the side surface 2517 of the insert 2500 and the inner surface 259 of the gas distribution port 207, relative to the distance between the side surface 317 of the insert 300 and the inner surface 259 of the gas distribution port 207, for example, can allow sufficient flow of purge gas from the gas exit orifice 2521.

[0275] Gas Distribution Port Insert-7 30-33 schematically illustrate various views of a gas distribution port insert (or inserts) that can be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 30 illustrates a perspective view of insert 3000, FIG. 31 illustrates a side view of insert 2000, FIG. 32 illustrates a top view of insert 3000, FIG. 33 illustrates a bottom view of insert 3000, and FIG. 34 illustrates a cross-sectional view of insert 3000 taken along section line 34-34.

[0276] 30-33 , the insert 3000 may include a head portion 3001 and a body portion 3003 extending axially from the head portion 3001. The axial direction may extend in a direction opposite to the z-axis direction. Both the head portion 3001 and the body portion 3003 may be formed as generally circular cylinders, although embodiments are not limited thereto. For example, either or both of the head portion 3001 and the body portion 3003 may be formed having any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or at least one frustum of such configurations. For convenience, with respect to FIGS. 30-33 , the head portion 3001 and the body portion 3003 will be described as having a generally cylindrical configuration, although it should be understood that references to surfaces of such shapes may also refer to one or more surfaces of other shapes.

[0277] According to various embodiments, head portion 3001 may have a length 3101 in the axial direction and a maximum dimension (e.g., diameter) 3103 in a second direction, e.g., transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction, and thus extend along the x-axis. Body portion 3003 may have a length 3105 in the axial direction and a maximum dimension (e.g., diameter) 3107 in the second direction. Depending on the geometric configuration of head portion 3001 and body portion 3003, maximum dimensions 3103 and 3107 may be the width of insert 3100. In some embodiments, maximum dimension 3103 may be between about 0.1 mm and about 0.4 mm, and maximum dimension 3107 may be between about 0.1 mm and about 0.2 mm. In any case, maximum dimension 3103 may be greater than maximum dimension 3107, e.g., between about 15% and about 25% greater than maximum dimension 3107, although embodiments are not limited thereto. It should also be noted that length 3101 may be between about 0.05 mm and about 0.1 mm, and length 3105 may be between about 0.4 mm and about 0.6 mm. In some examples, length 3105 may be greater than length 3101, such as between about 450% and about 550% greater than length 3101, although embodiments are not limited thereto. Thus, overall length 3401 of insert 3000 may be between about 0.5 mm and about 0.7 mm, although embodiments are not limited thereto.

[0278] The head portion 3001 may include a gas inlet face 3005, an intermediate face 3007 axially opposite or spaced apart from the gas inlet face 3005, and a side face 3009 connecting the intermediate face 3007 to the gas inlet face 3005. In this manner, the head portion 3001 may extend along a reference axis 3011, which may be a central axis of the head portion 3001 as well as the insert 3000. The body portion 3003 may include a proximal end 3013, a distal end 3015 axially opposite or spaced apart from the proximal end 3013, and a side face 3017 connecting the distal end 3015 to the proximal end 3013. Thus, the proximal end 3013 may extend from the intermediate face 3007 and thereby be adjacent to the intermediate face 3007. The distal end 3015 may terminate in a distal face 3019. In this manner, the body portion 3003 may also extend along a reference axis 3011, which may also be a central axis of the body portion 3003.

[0279] According to various embodiments, the insert 3000 may include a hole 3403 extending from the gas inlet face 3005 toward the distal face 3019 along a reference axis 3011, which may be a central axis of the hole 3403. Thus, the hole 3403 may form a central hole of the insert 3000, although embodiments are not limited thereto. The hole 3403 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. For example, the hole 3403 may be formed as a void having any suitable geometric configuration, such as a generally conical void, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a void having a frustum configuration of at least one of such shapes. For convenience, the hole 3403 will be described as having a generally cylindrical configuration, however, it should be understood that reference to a surface (e.g., an inner surface) of such a shape may also refer to one or more surfaces of another shape or form of the hole 3403.

[0280] 34, bore 3403 can terminate at distal surface 3405 offset from distal surface 3019 in a first direction (e.g., the z-axis direction), with bore 3403 extending through head portion 3001 and partially through body portion 3003. In this manner, bore 3403 can have a depth 3407, e.g., in the axial direction, and a maximum dimension (e.g., diameter) 3409, e.g., in a second direction. For example, depth 3407 can be about 0.4 mm to about 0.7 mm, and maximum dimension 3409 can be about 0.1 mm to about 0.2 mm (at least less than each of dimensions 3103 and 3107). Note that depending on the geometric configuration of bore 3403, maximum dimension 3409 can be the width of bore 3403.

[0281] According to various embodiments, the head portion 3001 may include a recess 3021 in the gas inlet face 3005. The recess 3021 may have a depth 3109 in the axial direction and may extend longitudinally in a third direction transverse to the axial direction. For example, the third direction may extend in the y-axis direction. In this manner, the recess 3021 may extend from the side surface 3009 to the hole 3403, thereby fluidly connecting to the hole 3403 inside the head portion 3001. The width 3201 of the recess 3021 may extend in the second direction, for example. In various implementations, the width 3201 may be between about 0.02 mm and about 0.06 mm, and the depth 3109 may be between about 0.005 mm and about 0.02 mm. The body portion 3003 may include a gas exit orifice 3023 having a proximal end opening 3411 fluidly connected to the bore 3403 inside the insert 3000 and a distal end opening 3413 formed in at least the distal face 3019. The gas exit orifice 3023 may thus extend between at least the distal faces 3405 and 3019, allowing one or more gases entered into the bore 3403 in the gas inlet face 3005 to flow through the bore 3403 and the gas exit orifice 3023, thereby exiting at least the distal face 3019. In some cases, the gas exit orifice 3023 may be formed in a portion of the side face 3017, allowing at least a portion of the one or more entered gases to exit from the side face 3017. In this manner, the distal end opening 3413 of the gas exit orifice 3023 can span between the distal face 3019 and the side face 3017.

[0282] The gas exit orifice 3023 may be formed as a cavity having a generally linear prismatic configuration, although embodiments are not limited thereto. For example, the gas exit orifice 3023 may be formed as a cavity having any suitable geometric configuration, such as a generally cylindrical cavity, a conical cavity, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a cavity having a frustum configuration of at least one of such shapes. For convenience, the gas exit orifice 3023 will be described as having a generally linear prismatic configuration, although it will be understood that reference to a surface (e.g., an interior surface) of such a shape may also represent one or more surfaces of another shape or form. In either case, the gas exit orifice 3023 may have a longitudinally extending central axis (hereinafter "central axis") 3415 extending in a fourth direction transverse to the axial direction, a maximum width 3301 in the second direction, and a height 3417 in a fifth direction perpendicular to the fourth direction. In some implementations, the rear portions 3303 and 3305 of the opposing sidewalls of the gas exit orifice 3023 may be arcuately shaped such that the width of the gas exit orifice 3023 increases in magnitude as the distance from the rear face 3307 to points 3303t and 3305t increases, where the width of the gas exit orifice may be at its maximum width 3301, although embodiments are not limited thereto. Points 3303t and 3305t may be formed anterior to reference axis 3011 in the y-axis direction, and rear surface 3307 may be formed posterior to reference axis 3011 in a direction opposite to the y-axis direction. Central axis 3415 may form an angle 3418 with reference surface 3419, which may extend perpendicular to the axial direction and may include distal surface 3419. In some examples, angle 3418 may be greater than or equal to about 10° and less than or equal to about 30°, such as greater than or equal to about 15° and less than or equal to about 25°, for example, about 20°. Furthermore, maximum width 3301 may be between about 0.1 mm and about 0.2 mm, and height 3417 may be between about 0.2 mm and about 0.5 mm.Such a configuration of the insert 3000 results in a pressure drop between the gas inlet face 3005 and the distal end opening 3413 of 500×10 associated with gas flow through the insert 3000 under conditions at least in part in the slip flow regime. -4 Less than 495 x 10 -4 He could be Thor.

[0283] Additionally, the configuration of the insert 3000 can be configured to cause a substantially directional flow of gas in a fourth direction, at least in part, from the gas exit orifice 3023. Accordingly, when one or more inserts 3000 are incorporated as part of the showerhead 107, for example, such directional flow of gas from the gas exit orifice 3023 can be utilized to propel purge gas radially outward from the axis (e.g., central axis 141) of the showerhead 107 within region 129. This can prevent process gas from region 131 from flowing into a gap between the showerhead 107 and the front surface 203 of the wafer 105 and / or from reaching at least one of the gas distribution ports 207 of the showerhead 107, the insert 3000 incorporated as part of the showerhead 107, and the front surface 203 of the wafer 105 or features formed thereon or in it. By preventing such flow of purge gas into region 129, a showerhead 107 including one or more inserts 3000 can prevent or at least reduce the possibility of process gases interacting with the showerhead 107 and / or back-diffusing into the gas distribution ports 207 of the showerhead 107.

[0284] According to various embodiments, the insert 3000 may be formed from any suitable material and may be formed by any suitable method. For example, the insert 3000 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, etc. In some cases, the insert 3000 may be formed from a first material and coated with a second material. For example, the insert 3000 may be fabricated from aluminum as a first material and coated with aluminum fluoride (AlF) as a second material, although embodiments are not limited thereto. In various implementations, the insert 3000 may be fabricated by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, etc.

[0285] FIG. 35 schematically illustrates a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 30-33, according to some embodiments.

[0286] 2 and 30-34 , the insert 3000 can be at least partially supported within the gas distribution port 207 such that the intermediate surface 3007 of the insert 3000 abuts the mounting surface 265 of the gas distribution port 207. To this end, the insert 3000 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 3103 of the head portion 3001 of the insert 3000 can be about 1% to about 10% smaller than the maximum dimension 255 of the first port section 245 of the gas distribution port 207, such that the side surface 3009 of the insert 3000 is spaced a distance 3501 from the inner surface 251 of the gas distribution port 207. To this end, the maximum dimension 3107 of the body portion 3003 of the insert 3000 may be about 1% to about 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the side surface 3017 of the insert 3000 is spaced a distance 3503 from the inner surface 259 of the gas distribution port 207. In some cases, the distances 3501 and 3503 may be equal or substantially equal, although embodiments are not limited thereto. Note also that the head portion 3001 may function as a centering feature when the insert 3000 is inserted into the gas distribution port 207, allowing the central axis (e.g., reference axis 3011) of the insert 3000 to be aligned (or substantially aligned) with the central axis 257 of the gas distribution port 207.

[0287] Similar to inserts 300, 700, 1100, 1500, 2000, and 2500, the loose fit described above may increase the distance between the sides 3009 and 3017 of insert 3000 and the corresponding interior surfaces 251 and 259 of gas distribution port 207. This may reduce the likelihood of wear between insert 3000 and gas distribution port 207 that may occur as a result of thermally induced movement of insert 3000 relative to gas distribution port 207. Such thermally induced movement may be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed by system 100. While movement of insert 3000 has been described as being caused by thermal effects, it is contemplated that movement of insert 3000 may additionally or alternatively be caused by other factors, such as pressure differentials or movement of showerhead 107. In any event, reducing the likelihood of such wear may simultaneously reduce the likelihood of particle generation and / or particle detachment from the gap between the insert 3000 and the gas distribution port 207. Such particle generation and / or particle detachment may otherwise result in, at least in part, the deposition of defect-causing contaminants on the front surface 203 of the wafer 105 and / or structures formed thereon / in. The centering effect of the head portion 3001 relative to the body portion 3003 may also serve to return the insert 3000 to concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the insert 3000. This may help maintain a predetermined gas flow profile from the showerhead 107.

[0288] Gas Distribution Port Insert-8 36-40 schematically illustrate various views of a gas distribution port insert (or inserts) that can be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 36 illustrates a perspective view of insert 3600, FIG. 37 illustrates a side view of insert 3600, FIG. 38 illustrates a top view of insert 3600, FIG. 39 illustrates a cross-sectional view of insert 3600 taken along section line 39-39, and FIG. 40 illustrates a cross-sectional view of insert 3600 taken along section line 40-40.

[0289] 36-40 , insert 3600 may be similar to insert 3000 and, therefore, may include a head portion 3601 and a body portion 3603 extending axially from head portion 3601, the axial direction being opposite the z-axis. Both head portion 3601 and body portion 3603 may be formed as generally circular cylinders, although embodiments are not limited thereto. For example, either or both of head portion 3601 and body portion 3603 may be formed having any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or at least one frustum of such configurations. For convenience, with respect to FIGS. 36-40 , head portion 3601 and body portion 3603 will be described as having a generally cylindrical configuration, although it will be understood that references to surfaces of such shapes may also refer to one or more surfaces of other shapes.

[0290] According to various embodiments, head portion 3601 may have a length 3701 in the axial direction and a maximum dimension (e.g., diameter) 3703 in a second direction, e.g., transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction, and thus extend in the y-axis direction. Body portion 3603 may have a length 3705 in the axial direction and a maximum dimension (e.g., diameter) 3707 in the second direction. Depending on the geometric configuration of head portion 3601 and body portion 3603, maximum dimensions 3703 and 3707 may be the width of insert 3700. In some embodiments, maximum dimension 3703 may be between about 0.1 mm and about 0.4 mm, and maximum dimension 3707 may be between about 0.1 mm and about 0.2 mm. In any case, maximum dimension 3703 may be greater than maximum dimension 3707, e.g., between about 15% and about 25% greater than maximum dimension 3707, although embodiments are not limited thereto. It should also be noted that length 3701 may be between about 0.05 mm and about 0.1 mm, and length 3705 may be between about 0.4 mm and about 0.7 mm. In some examples, length 3705 may be greater than length 3701, for example, about 500% to about 600% greater than length 3701, although embodiments are not limited thereto. Thus, the overall length of insert 3600 in the axial direction may be between about 0.6 mm and about 0.7 mm, although embodiments are not limited thereto.

[0291] The head portion 3601 may include a gas inlet face 3605, an intermediate face 3607 axially opposite or spaced apart from the gas inlet face 3605, and a side face 3609 connecting the intermediate face 3607 to the gas inlet face 3605. In this manner, the head portion 3601 may extend along a reference axis 3611, which may be a central axis of the head portion 3601 as well as the insert 3600. The body portion 3603 may include a proximal end 3613, a distal end 3615 axially opposite or spaced apart from the proximal end 3613, and a side face 3617 connecting the distal end 3615 to the proximal end 3613. Thus, the proximal end 3613 may extend from, and thereby be adjacent to, the intermediate face 3607. The distal end 3615 may terminate in a distal face 3619. In this manner, the body portion 3603 may also extend along a reference axis 3611, which may also be a central axis of the body portion 3603.

[0292] According to various embodiments, the insert 3600 may include a bore 4001 extending from the gas inlet face 3605 toward the distal face 3619 along a reference axis 3611, which may be a central axis of the bore 4001. Thus, the bore 4001 may form a central bore of the insert 3600, although embodiments are not limited thereto. The body portion 3603 of the insert 3600 may include an additional bore, such as bore 4003, fluidly connected to the bore 4001. The bore 4003 may extend axially from a distal end opening 4005 of the bore 4001 toward the distal face 3619 along the reference axis 3801. The reference axis 3801 may be parallel to but offset from the reference axis 3611 in a third direction transverse to the axial direction, thereby extending in a direction opposite the x-axis direction. The bore 4001 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. Like hole 4001, hole 4003 may be formed as an elongated void having a generally stadium-shaped (or oval) cross-section in a plane perpendicular to reference axis 3611, although implementation is not limited in this regard. For example, either or both of holes 4001 and 4003 may be formed as a void having any suitable geometric configuration, such as a generally conical void, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a void having a frustum configuration of at least one of such shapes. For convenience, hole 4001 will be described as having a generally cylindrical configuration, and hole 4003 will be described as having a generally elongated configuration with a generally stadium-shaped cross-section in a plane perpendicular to reference axis 3611, although it will be understood that reference to a surface (e.g., an interior surface) of such a shape may also refer to one or more surfaces of another shape or configuration of hole 4001 or hole 4003.

[0293] 40 , bore 4001 can terminate at a distal surface 4007 offset from distal surface 3619 in a first direction (e.g., the z-axis direction), with bore 4001 extending through head portion 3601 and partially through body portion 3603. In this manner, bore 4001 can have a depth 4009, e.g., in the axial direction, and a maximum dimension (e.g., diameter) 4011, e.g., in a second direction. Similar to bore 4001, bore 4003 can terminate at a distal surface 4013 offset from distal surface 3619 in the first direction, such that bore 4003 extends further into body portion 3603 from a distal end opening 4005 of bore 4001. In this manner, bore 4003 can have a depth 4015, e.g., in the axial direction, and a maximum width 3803 in the second direction. To this end, the central axes of semicircular sides 3803s1 and 3803s2 of hole 4003 can be not only spaced apart from reference axis 3805 in the second direction by distance 3807, but also spaced apart from reference axis 3611 in the third direction by distance 3809. Thus, the rectangular portion of the stadium shape can have a width equal to twice distance 3807, and semicircular sides 3803s1 and 3803s2 can have a radius 3811. In various implementations, depth 4009 can be between about 0.4 mm and about 0.7 mm, and maximum dimension 4011 can be between about 0.1 mm and about 0.2 mm (at least less than each of dimensions 3703 and 3707). Depth 4015 may be about 0.3 mm to about 0.5 mm, maximum width 3803 may be about 0.2 mm to about 0.1 mm, and radius 3811 may be about 0.02 mm to about 0.05 mm. Distance 3807 may be about 0.02 mm to about 0.05 mm (in some cases less than radius 3811), and distance 3809 may be about 0.01 mm to about 0.02 mm. Note that depending on the geometry of hole 4001, maximum dimension 4011 may be the width of hole 4001. Additionally, depth 4009 of hole 4001 may be greater than depth 3407 of hole 3403 in insert 3000.It should also be noted that the cross-sectional area of ​​hole 4003 in a plane perpendicular to reference axis 3611 may be smaller than the cross-sectional area of ​​hole 4001, such that hole 4003 is surrounded by hole 4001 when viewed in the axial direction. In this manner, hole 4003 may be configured to constrict the flow of gas through insert 3600, which may cause, at least in part, an acceleration of the flow of gas from hole 4001 through hole 4003.

[0294] According to various embodiments, the head portion 3601 may include a recess 3621 in the gas inlet face 3605. The recess 3621 may have a depth 3709 in the axial direction and may extend longitudinally in a third direction transverse to the axial direction. For example, the third direction may extend in a direction opposite to the x-axis direction. In this manner, the recess 3621 may extend from the side surface 3609 to the hole 4001, thereby fluidly connecting to the hole 4001 within the head portion 3601. The width 3813 of the recess 3621 may extend in the second direction, for example. In various implementations, the width 3813 may be between about 0.02 mm and about 0.06 mm, and the depth 3709 may be between about 0.005 mm and about 0.02 mm. The body portion 3603 may include a gas exit orifice 3623 having a proximal end opening 4017 fluidly connected to the bore 4001 inside the insert 3600 and a distal end opening 4019 in the side surface 3617. In this manner, the bore 4003 may be fluidly interposed between the bore 4001 and the gas exit orifice 3623. Accordingly, the combination of the bore 4001, the bore 4003, and the gas exit orifice 3623 may allow one or more gases flowing into the bore 4001 at the gas inlet surface 3605 to flow through the bore 4001, the bore 4003, and the gas exit orifice 3623, and thereby out the side surface 3617 through the distal end opening 4019.

[0295] The gas exit orifice 3623 may be formed as a cavity extending along the central axis 4021 and expanding in cross-sectional area (in a plane perpendicular to the central axis 4021) from the proximal end opening 4017 to the distal end opening 4019. In some embodiments, the central axis 4021 may extend in a fourth direction transverse to the axial direction, and in some cases may be equal (or substantially equal) to the third direction. The third and fourth directions may be perpendicular or substantially perpendicular to the axial direction, although embodiments are not limited thereto. Additionally, the height 4023 of the gas exit orifice 3623 may extend in a fifth direction perpendicular to the central axis 4021. In some cases, the fifth direction may extend axially.

[0296] According to some embodiments, the gas exit orifice 3623 can have a generally stadium-shaped first cross-sectional area at the proximal end opening 4017, with central axes of semicircular sides 3623s1 and 3623s2 spaced apart by a distance 3711 and having respective radii 3713, and a generally stadium-shaped second cross-sectional area at the distal end opening 4019, with semicircular sides 3623s3 and 3623s4 having respective radii 3715. Distance 3711 can be between about 0.05 mm and about 0.1 mm, and radii 3713 and 3715 can be between about 0.01 mm and about 0.03 mm, although embodiments are not limited thereto. To this end, sidewalls 3901 and 3903 of gas exit orifice 3623 can extend from proximal end opening 4017 to distal end opening 4019, with sidewall 3901 extending in a sixth direction oblique to central axis 4021 and sidewall 3903 extending in a seventh direction oblique to central axis 4021. The sixth direction can form an angle 3905 with central axis 4021, and the seventh direction can form an angle 3907 with central axis 4021. The magnitudes of angles 3905 and 3907 can be between about 45° and about 75° and can be equal or substantially equal. Also, note that the width 3803 of the hole 4003 in the second direction may be less than or equal to the minimum width of the gas exit orifice 3623 in the second direction, and the height 4015 of the hole 4003 in the first direction may be greater than the height 4023 of the gas exit orifice 3623 in the first direction. In some cases, the height 4023 of the gas exit orifice 3623 may be between about 0.02 mm and about 0.05 mm.

[0297] According to various embodiments, the pressure drop through insert 3600 may be greater than through insert 3000 due, at least in part, to the greater depth of hole 4001 compared to the depth 3407 of hole 3403 in insert 3000, the constriction of hole 4003, and the greater cross-sectional area of ​​gas exit orifice 3623 compared to the cross-sectional area of ​​gas exit orifice 3023 in insert 3000. For example, assuming gas flow in the slip flow regime, the pressure drop through insert 3600 may be approximately 850×10 -4Thor or less, e.g., about 817 x 10 -4 Torr, the pressure drop through the insert 3000 is approximately 500 x 10 -4 Thor or lower is fine.

[0298] Additionally, the configuration of the insert 3600 can be configured to cause a substantially directional flow of gas in a fourth direction, at least in part, from the gas exit orifice 3623. Accordingly, when one or more inserts 3600 are incorporated as part of the showerhead 107, for example, such directional flow of gas from the gas exit orifice 3623 can be utilized to propel purge gas radially outward from the axis (e.g., central axis 141) of the showerhead 107 within region 129. This can prevent process gas from region 131 from flowing into a gap between the showerhead 107 and the front surface 203 of the wafer 105 and / or from reaching at least one of the gas distribution ports 207 of the showerhead 107, the insert 3600 incorporated as part of the showerhead 107, and the front surface 203 of the wafer 105 or features formed thereon or in it. By preventing such flow of purge gas into region 129, a showerhead 107 including one or more inserts 3600 can prevent or at least reduce the possibility of process gases interacting with the showerhead 107 and / or back-diffusing into the gas distribution ports 207 of the showerhead 107.

[0299] Although the gas exit orifice 3623 has been described with reference to a particular geometric configuration, embodiments are not limited thereto. For example, the gas exit orifice 3623 may be formed as a cavity having any suitable geometric configuration, such as a generally conical cavity, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a cavity having a frustum configuration of at least one of such forms.

[0300] According to various embodiments, the insert 3600 may be formed from any suitable material and may be formed in any suitable manner. For example, the insert 3600 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, etc. In some cases, the insert 3600 may be formed from a first material and coated with a second material. For example, the insert 3600 may be fabricated from aluminum as a first material and coated with aluminum fluoride (AlF) as a second material, although embodiments are not limited thereto. In various implementations, the insert 3600 may be fabricated by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, etc.

[0301] FIG. 41 schematically illustrates a partial cross-sectional view of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 36-40, according to some embodiments.

[0302] 2 and 36-40 , the insert 3600 can be at least partially supported within the gas distribution port 207 such that the intermediate surface 3607 of the insert 3600 abuts the mounting surface 265 of the gas distribution port 207. To this end, the insert 3600 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 3703 of the head portion 3601 of the insert 3600 can be about 1% to about 10% smaller than the maximum dimension 255 of the first port section 245 of the gas distribution port 207, such that the side surface 3609 of the insert 3600 is spaced a distance 4101 from the inner surface 251 of the gas distribution port 207. To this end, the maximum dimension 3707 of the body portion 3603 of the insert 3600 may be about 1% to about 10% less than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the side surface 3617 of the insert 3600 is spaced a distance 4103 from the inner surface 259 of the gas distribution port 207. In some cases, the distances 4101 and 4103 may be equal or substantially equal, although embodiments are not limited thereto.

[0303] Additionally, the overall length of the insert 3600 can be configured such that the distal surface 3619 of the insert 3600 extends beyond the second surface 241 of the showerhead 107 and into the gap region 4105 between the showerhead 107 and the wafer 105. The gap region 4105 can have a height 211 in the axial direction, but the protruding nature of the distal surface 3619 can reduce the distance between the distal surface 3619 and the opposing surface of the wafer 105 to a height 4107. In some cases, the height 4107 can be between about 0.2 mm and about 0.2 mm. This can further prevent process gases from region 131 from entering the gap region 4105 between the showerhead 107 and the front surface 203. The head portion 3601 can also function as a centering mechanism when the insert 3600 is inserted into the gas distribution port 207, allowing the central axis (e.g., reference axis 3611) of the insert 3600 to be aligned (or substantially aligned) with the central axis 257 of the gas distribution port 207.

[0304] Similar to inserts 300, 700, 1100, 1500, 2000, 2500, and 3000, the formation of the loose fit described above may increase the distance between the side surfaces 3609 and 3617 of the insert 3600 and the corresponding interior surfaces 251 and 259 of the gas distribution port 207. This may reduce the likelihood of wear between the insert 3600 and the gas distribution port 207 that may occur as a result of thermally induced movement of the insert 3600 relative to the gas distribution port 207. Such thermally induced movement may be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed by the system 100. While movement of the insert 3600 has been described as being caused by thermal effects, it is contemplated that movement of the insert 3600 may additionally or alternatively be caused by other factors, such as pressure differentials or movement of the showerhead 107. In any event, reducing the likelihood of such wear may simultaneously reduce the likelihood of particle generation and / or particle detachment from the gap between the insert 3600 and the gas distribution port 207. Such particle generation and / or particle detachment may otherwise result in, at least in part, the deposition of defect-causing contaminants on the front surface 203 of the wafer 105 and / or structures formed thereon / in. The centering effect of the head portion 3601 relative to the body portion 3603 may also serve to return the insert 3600 to concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the insert 3600. This may help maintain a predetermined gas flow profile from the showerhead 107.

[0305] Gas Distribution Port Insert-9 42-45 schematically illustrate various views of a gas distribution port insert that can be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 42 illustrates an exploded perspective view of insert 4200, FIG. 43 illustrates a side view of insert 4200, FIG. 44 illustrates a top view of insert 4200, and FIG. 45 illustrates a cross-sectional view of insert 4200 taken along section line 45-45.

[0306] 42-45, insert 4200 may be similar to inserts 300, 700, 1100, 1500, 2000, 2500, 3000, and 3600 and, therefore, may include a head portion 4301 and a body portion 4303 extending axially from (or connected to) head portion 4301. The axial direction may extend in a direction opposite to the z-axis direction. Insert 4200 may be formed as an assembly of parts or components that may be configured to reduce the potential for undesired gas interaction with a gas distribution body (e.g., gas distribution body 107) and / or back-diffusion into a gas distribution port (e.g., gas distribution port 207) of a gas distribution body that includes insert 4200 at least partially supported therein, as well as to reduce and / or prevent gas flow from or through the gas distribution port of the gas distribution body. In some embodiments, unlike inserts 300, 700, 1100, 1500, 2000, 2500, 3000, and 3600, insert 4200 may not have a gas exit orifice, thereby configured to reduce and / or prevent gas flow from or through gas distribution port 207 in which insert 4200 is at least partially supported. Additionally, insert 4200 may include a flange portion 4305 axially connected to (or extending from) body portion 4303, which may be configured to cover or otherwise close the gas distribution port in which insert 4200 may be at least partially supported, as will become more apparent below. Head portion 4301, body portion 4303, and flange portion 4305 may be formed as generally circular cylinders, although embodiments are not limited thereto. For example, each or at least one of the head portion 4301, body portion 4303, and flange portion 4305 may be formed having any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a frustum of at least one of such forms.For convenience, with respect to Figures 42-45, the head portion 4301, body portion 4303, and flange portion 4305 will be described as having a generally cylindrical configuration, although it should be understood that reference to surfaces of such a shape may also refer to one or more surfaces of another shape.

[0307] According to some embodiments, the assembly forming insert 4200 may include a first part (or body) 4201 coupled (e.g., removably coupled) to a second part (or body) 4203. The first part 4201 may include a protrusion 4205 extending axially from (or connected to) a head portion 4301 and having a first hole 4207 formed therein. The second part 4203 includes a main body 4209 extending axially from (or connected to) a flange portion 4305 at or near a distal end 4211 of the main body 4209 (sometimes referred to herein as the distal end 4211 of the body portion 4303), and may also include a coupling protrusion 4213 extending axially from (or connected to) the main body 4209. In some cases, as shown in at least FIGS. 45-47 , at least a portion of the inner surface 4217 of the first hole 4207 and a corresponding portion of the outer surface 4219 of the coupling protrusion 4213 may each be threaded, allowing the second part 4203 to be detachably coupled to the first part 4201 via a threaded engagement, although embodiments are not limited thereto. For example, other engagement methods and / or mechanisms may also be implemented. Depending on the extent to which the coupling protrusion 4213 is axially received in the first hole 4207, a first gap 4701 may be formed between the distal end 4501 of the first part 4201 and the intermediate surface 4503 of the second part 4203, and a second axial gap 4703 may be formed between the proximal end 4505 of the second part 4203 and the intermediate surface 4507 of the first part 4203. As will become more apparent below, the degree to which the coupling protrusion 4213 is received in the first hole 4207 along the axial direction can be variably set so that when the insert 4200 is at least partially supported in the gas distribution port of the gas distribution body 213, the mating surface 4307 of the flange portion 4305 abuts against the second surface 241 of the gas distribution body 213. In this way, the overall length of the insert 4200 can be adapted to the length 261 of the second port portion 247 of the gas distribution port of the gas distribution body 213.It is also contemplated that in some implementations, the respective lengths of some or all of the various parts, bodies, protrusions, sections, connection points, and / or holes, etc. of the insert 4200 may be varied such that when the first part 4201 and the second part 4203 are engaged and at least partially supported in corresponding gas distribution ports (e.g., gas distribution port 207), only a first gap (e.g., first gap 4701) may be formed, only a second gap (e.g., second gap 4703) may be formed, both a first gap and a second gap may be formed, or no axial gap may be formed between the first part 4201 and the second part 4203 (as shown in FIGS. 45 and 46). It is further contemplated that at least one of the first part 4201 and the second part 4203 may be alternatively configured. For example, the first part 4201 may include a head portion 4301 having a first hole 4207 formed therein, and the second part 4203 may include a main body 4209 extending from (or connected to) the flange portion 4305 in an opposite axial direction at or near the distal end 4211 of the body portion 4303, and may further include a coupling protrusion 4213 extending axially from (or connected to) the main body 4209 and configured to align with the first hole 4207. In this sense, the insert 4200 may be configured at least similarly to the insert 4800 described below in connection with FIGS.

[0308] The head portion 4301 may have a length 4309 in the axial direction and a maximum dimension (e.g., diameter) 4311 in a second direction, e.g., transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and thus extend along the y-axis or in a plane parallel (or substantially parallel) to the xy plane. The body portion 4303 may have a length 4313 in the axial direction and a maximum dimension (e.g., diameter) 4315 in the second direction. As described above, depending on the extent to which the coupling protrusion 4213 is received in the first hole 4207, the length 4313 may be increased (or otherwise extended) by a length amount 4509 that is not received in the first hole 4207. The length 4509 corresponds to the length of the coupling protrusion 4213 in the axial direction. The flange portion 4305 may have a length 4317 in the axial direction and a maximum dimension (e.g., diameter) 4319 in the second direction. In some embodiments, maximum dimension 4311 can be between about 5.9 mm and about 7.3 mm, maximum dimension 4315 can be between about 4.9 mm and 6.5 mm, and maximum dimension 4319 can be between about 7.5 mm and about 9.5 mm. Additionally, maximum dimension 4311 can be greater than maximum dimension 4315, for example, by about 15% to about 25% greater than maximum dimension 4315, although embodiments are not limited thereto. Maximum dimension 4319 can be greater than each of maximum dimensions 4311 and 4315. In some cases, maximum dimension 4319 can be between about 40% to about 60% greater than maximum dimension 4315, although embodiments are not limited thereto. Length 4309 can be between about 1.5 mm and about 3.5 mm, and length 4317 can be between about 0.2 mm and about 0.6 mm. In some cases, length 4313 can vary between about 11 mm and about 18 mm depending on how well coupling protrusion 4213 is received in first hole 4207. Length 4313 can be greater than length 4309, such as, but not limited to, about 500% to about 750% greater than length 4309. In this manner, the overall length of insert 4200 can be between, but not limited to, about 12 mm and about 22 mm.

[0309] The head portion 4301 may include a first surface 4221, an intermediate surface 4223 axially opposite or spaced apart from the first surface 4221, and a side surface 4225 between the intermediate surface 4223 and the first surface 4221. In this manner, the head portion 4301 may extend along a reference axis 4227, which may be a central axis of not only the insert 4200 but also the head portion 4301. The protrusion 4205 may be axially connected to and / or extend from the intermediate surface 4223 (or the proximal end 4215 of the body portion 4303) and terminate at a distal end (or surface) 4501 of the first part 4201. The side surface 4229 of the protrusion 4205 may connect the distal end 4501 to the intermediate surface 4223. In this manner, the head portion 4301 and the protrusion 4205 may combine to form the first part 4201. The body portion 4303 may include a proximal end 4215, a distal end 4211 axially opposite or spaced apart from the proximal end 4215, a side surface 4229 between the proximal end 4215 and the distal end 4501 of the first part 4201, and a side surface 4231 between the mid-surface 4503 and the distal end 4211 of the body portion 4303. Thus, the proximal end 4215 may extend from, and thereby be adjacent to, the mid-surface 4223. The distal end 4211 of the body portion 4303 may extend from, and thereby be adjacent to, the mating surface 4307 of the flange portion 4305. Accordingly, the body portion 4303 may also extend along a reference axis 4227, which may also be a central axis of the body portion 4303. The flange portion 4305 may include a mating surface 4307, a distal surface 4233 axially opposite or spaced apart from the mating surface 4307, and a side surface 4235 between the distal surface 4233 and the mating surface 4307. Like the head portion 4301 and the body portion 4303, the flange portion 4305 may extend along a reference axis 4227, which may also be a central axis of the flange portion 4305.

[0310] According to some implementations, the first part 4201 may include a second hole 4511 extending from the first surface 4221 to the intermediate surface 4507 of the first part 4201 along a reference axis 4227, which may be a central axis of the second hole 4511. Thus, the second hole 4511 may form a central hole of the insert 4200, although embodiments are not limited thereto. The second hole 4511 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. For example, the second hole 4511 may be formed as a void having any suitable geometric configuration, such as a generally conical void, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a void having a frustum configuration of at least one of such shapes. For convenience, the second hole 4511 will be described as having a generally cylindrical configuration, although it should be understood that reference to a surface (e.g., an inner surface) of such a shape may also refer to one or more surfaces of another shape or form of the second hole 4511. In some cases, the second hole 4511 may be fluidly connected to the first hole 4207, and the first hole 4207 may extend from the mid-surface 4507 to the distal end 4501 along the reference axis 4227. Like the second hole 4511, the first hole 4207 may be formed as a void having a generally circular cylindrical configuration, although embodiments are not limited thereto. The maximum dimension (e.g., diameter) 4513 of the second hole 4511 in the second direction may, in some examples, be smaller than the maximum dimension (e.g., diameter) 4515 of the second hole 4511 in the second direction. In some implementations, one or more of the holes in the first part 4201 (e.g., the first hole 4507 and the second hole 4511) may be stepped or sloped so that one or more holes may have multiple or varying diameters.

[0311] The head portion 4301 may, in some cases, include one or more recesses 4237 in the first part 4201. For convenience, it is assumed that the head portion 4301 includes multiple recesses 4237, such as two recesses 4237, as shown in FIGS. 44 and 45 . The recesses 4237 may have a depth 4321 in the axial direction and extend longitudinally in a third direction transverse to the axial direction. For example, the third direction may extend in the x-axis direction or along the x-axis direction. In some implementations, the recesses 4237 may extend radially from the second hole 4511 along the reference axis 4401 to a side surface 4225 of the head portion 4301, thereby fluidly connecting to the second hole 4511 inside the head portion 4301. While FIG. 44 shows the recesses 4237 aligned with one another along the reference axis 4401, embodiments are not limited thereto. For example, one or more of the recesses 4237 (or at least one other recess) can be aligned with, for example, a reference axis 4403 that extends transversely to the reference axis 4401. The width 4405 of the recess 4237 can extend in, for example, a second direction. In various implementations, the depth 4321 and width 4405 of the recess 4237 can be shaped and / or sized to accommodate, for example, one or more blades of a tool that can be utilized to couple (e.g., thread) the first part 4201 to the second part 4203 as part of installing the insert 4200 into a gas distribution port, such as gas distribution port 207.

[0312] According to various embodiments, the insert 4200 (and thereby the first and second parts 4201 and 4203 of the insert 4200) may be formed from any suitable material and may be formed in any suitable manner. For example, the insert 4200 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, or the like. In some cases, the insert 4200 may be formed from a first material and coated with a second material. For example, the insert 4200 may be fabricated from aluminum as the first material and coated with aluminum fluoride (AlF) as the second material, although embodiments are not limited thereto. It is also contemplated that the first part 4201 of the insert 4200 may be formed from the same material as the second part 4203 or may be formed from at least one different material. In various cases, the insert 4200 may be manufactured by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, and the like.

[0313] 46 and 47 schematically show partial cross-sectional views of the showerhead of FIG. 2 including the gas distribution port insert of FIGS. 42-45, according to some embodiments. Note that FIG. 47 shows an example in which the length 261_1 of the gas distribution port 207 is greater than the length 261 shown in FIG.

[0314] 2 and 42-47, the insert 4200 can be at least partially supported within the gas distribution port 207 such that the intermediate surface 4223 of the first part 4201 abuts the mounting surface 265 of the gas distribution port 207. To this end, the first part 4201 and the second part 4203 of the insert 4200 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 4311 of the head portion 4301 of the insert 4200 can be about 1% to about 10% smaller than the maximum dimension 255 of the first port section 245 of the gas distribution port 207, such that the side surface 4225 of the head portion 4301 is spaced from the inner surface 251 of the gas distribution port 207 by a distance (or gap) 4601. To this end, the maximum dimension 4315 of the body portion 4303 of the insert 4200 may be about 1% to about 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the sides 4229 and 4231 of the first and second parts 4201 and 4203 of the insert 4200 are spaced a distance 4603 from the inner surface 259 of the gas distribution port 207. In some embodiments, the distance 4603 may not be constant and may vary, for example, along the reference axis 257. For example, the outer diameter of the side 4229 of the first part 4201 may be different from the outer diameter of the side 4231 of the second part 4203; the outer diameter of the side 4229 or the side 4231 may not be constant and may thereby vary along the reference axis 257; and / or the maximum dimension (e.g., inner diameter) of the second port portion 247 may not be constant and may thereby vary along the reference axis 257. The distance 4603 may be defined to accommodate one or more properties and / or manufacturability of one or more materials used in the various components described herein, taking into account, for example, thermal expansion coefficients and mismatches, machinability, manufacturing tolerances, etc. In some cases, the distances 4601 and 4603 may be equal or substantially equal, although embodiments are not limited thereto. According to some implementations, the relative spacing between the insert 4200 and the gas distribution port 207 can prevent or at least reduce the possibility of damage to the insert 4200 and / or the gas distribution body 213.Such damage may occur due to a mismatch in the coefficient of thermal expansion (CTE) between the insert 4200 and the gas distribution body 213 .

[0315] According to various embodiments, the overall length of the insert 4200 can be configured to accommodate the gas distribution port 207 such that, when the insert 4200 is at least partially supported within the gas distribution port 207, the mating surface 4307 of the flange portion 4305 abuts the second surface 241 of the gas distribution body 213 and the intermediate surface 4223 abuts the mounting surface 265 of the gas distribution port 207. For example, as shown in FIGS. 46 and 47 , the second port section 247 of the gas distribution port 207 can have a length 261 in one implementation and a length 261_1 in another implementation. Note that the second length 261_1 can be axially greater than the length 261 by a distance 4701. Accordingly, during installation, the second part 4203 of the insert 4200 can be inserted into the opening 205 of the gas distribution port 207 until the mating surface 4307 abuts the second surface 241. The first part 4201 can be threaded onto the coupling protrusion 4213 until the intermediate surface 4223 abuts the mounting surface 265 or 265_1. As can be seen from a comparison of the views of FIG. 46 and FIG. 47 , depending on the length of the second port portion 247, the extent to which the coupling protrusion 4213 is axially received in the first hole 4207 when the first part 4201 is detachably coupled to the second part 4203 can vary. Thus, in some cases, as shown in FIG. 46 , the proximal end 4505 of the second part 4203 can abut the intermediate surface 4507 of the first part 4203 and / or the intermediate surface 4503 of the second part 4203 can abut the distal end 4501 of the first part 4201. 47 , the first gap 4701 may be formed between the distal end 4501 of the first part 4201 and the intermediate surface 4503 of the second part 4203, and / or the second gap 4703 may be formed between the proximal end 4505 of the second part 4203 and the intermediate surface 4507 of the first part 4203. In either case, however, at least the mating surface 4307 of the flange portion 4305 may be adapted to abut the second surface 241 of the gas distribution body 213. However, in some embodiments, it is contemplated that a gap may be formed between the mating surface 4307 of the flange portion 4305 and the second surface 241 of the gas distribution body 213.In such an example, the amount of the gap may be small enough to prevent backflow of gas, eg, process gas, into one or more portions of the gas distribution port 207 .

[0316] In some implementations, the distal surface 4233 of the insert 4200 may extend a distance 4707 in the axial direction beyond the second surface 241 of the showerhead 107 into a gap region 4705 between the showerhead 107 and the wafer 105. The distance 4707 may be determined to account for the thickness of the wafer 105 (including any structures or films formed or deposited thereon) and for warpage or curvature of the wafer 105 caused at least in part by, for example, tensile and / or compressive stresses in films formed on the wafer 105. For example, the distance 4707 may be between about 0.2 mm and about 0.8 mm, e.g., about 0.5 mm. Thus, the gap region 4705 may have a height 211 in the axial direction, but the protruding nature of the distal surface 4233 may reduce the distance between the distal surface 4233 and the opposing surface of the wafer 105 to a height 4709. The height 4709 may be between about 0.2 mm and about 0.8 mm in some examples. This can further prevent process gas from region 131 from flowing into gap region 4709 between showerhead 107 and front surface 203 of wafer 105 and causing plasma formation or distribution within gap region 4709. Head portion 4301 can also function as a centering feature when insert 4200 is at least partially installed in gas distribution port 207, allowing a central axis (e.g., reference axis 4227) of insert 4200 to be aligned (or substantially aligned) with central axis 257 of gas distribution port 207. For example, first part 4201 (and thereby head portion 4301) can be at least partially supported by at least first port portion 245 of gas distribution port 207 before second part 4203 is at least partially supported by second port portion 247 of gas distribution port 207. In some cases, the head portion 4301 may be sized larger than the body portion 4303, such that the distance 4601 between the side 4225 of the head portion 4301 and the inner surface 251 of the gas distribution port 207 is smaller than the distance 4603 between the sides 4229 and 4231 of the first and second parts 4201 and 4203 of the insert 4200 and the inner surface 259 of the gas distribution port 207.Thus, when the second part 4203 is inserted into the second port portion 247 and coupled to the first part 4201, the second part 4203 (and thereby the body portion 4303) may be more easily centered within the second port portion 247 because at least the first part 4201 (and thereby the head portion 4301) may already be centered within the first port portion 245. Furthermore, the distance 4601 between the side surface 4225 of the head portion 4301 and the inner surface 251 of the gas distribution port 207 may be relatively small, thus reducing the likelihood that the body portion 4303 will be miscentered from the second port portion 247. This is also true with respect to, for example, thermally induced movement (or other displacement) of the insert 4200 relative to the gas distribution port 207. For example, distance 4601 may be relatively smaller than distance 4603, so that the movement of body portion 4303 may be limited by the amount of movement made available to head portion 4301, thereby reducing the likelihood of body portion 4303 becoming misaligned from second port portion 247.

[0317] Similar to inserts 300, 700, 1100, 1500, 2000, 2500, 3000, and 3600, the presence of the clearance fit described above may increase the distance between side surfaces 4225, 4229, and 4231 of insert 3600 and the corresponding interior surfaces 251 and 259 of gas distribution port 207. This may reduce the likelihood of wear between insert 4200 and gas distribution port 207 that may occur as a result of thermally induced movement or expansion of insert 4200 relative to gas distribution port 207. Such thermally induced movement or expansion may be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed by system 100. While movement of insert 4200 has been described as being caused by thermal effects, it is contemplated that movement of insert 4200 may additionally or alternatively be caused by other factors, such as pressure differentials or movement of showerhead 107. In any event, reducing the likelihood of such wear may simultaneously reduce the likelihood of particle generation at and / or particle detachment from the gap 4605 between the insert 4200 and the gas distribution port 207. Such particle generation and / or particle detachment may otherwise result in, at least in part, the deposition of defect-causing contaminants on the front surface 203 of the wafer 105 and / or structures formed thereon / in. The centering effect of the head portion 4301 relative to the body portion 4303 may also act to return the insert 4200 to concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the insert 4200. However, provided that insert 4200 can be configured to prevent gas flow from and through gas distribution port 207, no gas flow may be provided in the area corresponding to gap 4605, which can prevent or at least reduce the possibility of back diffusion into gas distribution port 207 and thereby back diffusion into showerhead 107, at least as described in connection with inserts 1500, 2000, and 2500.Thus, the flange portion 4305 may protrude laterally outward (e.g., radially outward) from the side surface 4231 of the body portion 4303 a distance 4607 beyond the inner surface 259 of the gas distribution port 207, effectively covering or otherwise closing off a flow path to / from the region corresponding to the gap 4605. In some cases, the distance 4607 may be greater than 0 mm and equal to or less than about 2 mm, although embodiments are not limited thereto. For example, the magnitude of the distance 4607 may be set to a valve sufficient to impede gas flow into the gap 4605, which may depend on one or more process conditions, such as pressure, temperature, flow rate, etc. Accordingly, the flange portion 4305 may be configured to prevent or at least reduce the possibility of back-diffusion into the gas distribution port 207 and thereby back-diffusion into the showerhead 107. To this end, the aforementioned closure of the flow path to the gap 4605 may prevent or at least reduce the possibility of particle detachment from the gap 4605 in such instances if particle generation occurs within the region corresponding to the gap 4605.

[0318] Gas Distribution Port Insert-10 48-53 schematically illustrate various views of a gas distribution port insert that can be incorporated as part of the showerhead of FIG. 2, according to some embodiments. For example, FIG. 48 illustrates a perspective view of insert 4800, FIG. 49 illustrates an exploded perspective view of insert 4800, FIG. 50 illustrates a side view of insert 4800, FIGS. 51 and 52 illustrate top and bottom views of insert 4800, respectively, and FIG. 53 illustrates a cross-sectional view of insert 4800 taken along section line 53-53.

[0319] 48-53 , insert 4800 may be similar to inserts 300, 700, 1100, 1500, 2000, 2500, 3000, and 3600 and, therefore, may include a head portion 4801 and a body portion 4803 extending axially from (or connected to) head portion 4801. The axial direction may extend in a direction opposite to the z-axis direction. However, insert 4800 may be formed as an assembly of parts or components. For example, head portion 4801 may be formed as a first part or component coupled (e.g., detachably coupled) to body portion 4803, which may be formed as a second part or component. Additionally, insert 4800 may include a flange portion 4805, which may be configured similarly to flange portion 4305 of insert 4200. For example, the flange portion 4805 may extend axially from (or be connected to) the body portion 4803 and may be configured to cover or otherwise close a gas distribution port in which the insert 4800 may be at least partially supported, as will become more apparent below. In various implementations, the head portion 4801, the body portion 4803, and the flange portion 4805 may be formed as a generally circular cylinder, although embodiments are not limited thereto. For example, at least one of the head portion 4801, the body portion 4803, and the flange portion 4805 may be formed having any other suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally square prism, a generally pentagonal prism, a generally hexagonal prism, or the like, or a frustum of at least one of such forms. For convenience, with respect to Figures 48-53, head portion 4801, body portion 4803, and flange portion 4805 will be described as having a generally cylindrical configuration, although it should be understood that reference to surfaces of such a shape may also refer to one or more surfaces of another shape.

[0320] As described above, the assembly-forming insert 4800 may include a head portion 4801 coupled (e.g., removably coupled) to a body portion 4803. In some cases, the head portion 4801 may include an opening 4901 configured to receive and engage at least a portion of a first section (or coupling protrusion) 4903 of the body portion 4803. For example, an inner surface 4905 of the opening 4901 and a side surface 4907 of the coupling protrusion 4903 may each be threaded, allowing the head portion 4801 to be removably coupled to the body portion 4803 via a threaded engagement, as shown at least in FIGS. 48 , 50 , and 53 , although embodiments are not limited thereto. For example, any other engagement method and / or mechanism may also be implemented. For example, the body portion 4803 may have an opening configured to receive a coupling protrusion extending from the head portion 4801. It is also contemplated that any other type of connection between the head portion 4801 and the body portion 4803, such as a bayonet-type engagement, may be utilized. However, as illustrated, the threaded engagement between the head portion 4801 and the body portion 4803 may allow the insert 4800 to fit gas distribution ports of different axial heights. For example, depending on the extent to which the coupling protrusion 4903 is received in the opening 4901, a gap 5001 of different axial lengths may be formed between the intermediate surface 4909 of the head portion 4801 and the intermediate surface 4911 of the body portion 4803. As will become more apparent below, the extent to which the coupling protrusion 4903 is received in the opening 4901 may be variably set so that the mating surface 4913 of the flange portion 4805 abuts against the second surface 241 of the gas distribution body 213 when the insert 4800 is at least partially supported in the gas distribution port of the gas distribution body 213. In this way, the overall length of the insert 4800 can be adapted to the length 261 of the second port portion 247 of the gas distribution port.It is also contemplated that in some implementations, the respective lengths of some or all of the various parts, bodies, protrusions, and / or sections, etc., of the insert 4800 may be varied such that a gap (such as gap 5001) may or may not be formed when the head portion 4801 and the body portion 4803 are engaged with and at least partially supported by corresponding gas distribution ports (e.g., gas distribution port 207). In some cases, at least one other gap may be formed between the head portion 4801 and the body portion 4803 in addition to or independent of gap 5001.

[0321] According to some embodiments, the head portion 4801 may include a first surface 4811, an intermediate surface (or second surface) 4909 axially opposite or spaced apart from the first surface 4811, and at least one side surface 4813 between the intermediate surface 4909 and the first surface 4811. In this manner, the head portion 4801 may extend along a reference axis 4815, which may be a central axis of the insert 4800 as well as the head portion 4801. The opening 4901 in the head portion 4801 may extend axially from the first surface 4811 through the intermediate surface 4909 and, in some cases, may be concentrically (or substantially concentrically) aligned with the reference axis 4815. The main section 5007 of the body portion 4803 can include a proximal end 4817, a distal end 4819 axially opposite or spaced apart from the proximal end 4817, and at least one side surface 4821 between the proximal end 4817 and the distal end 4819. In this manner, the proximal end 4817 can be disposed adjacent to the intermediate surface 4909 of the head portion 4801. The coupling projection 4903 of the body portion 4803 may extend axially away from (or be connected to) the intermediate surface 4911 of the main section 5007 and thus may have a proximal end (or surface) 4915, a distal end 4917 axially opposite or spaced apart from the proximal end 4915, and at least one side surface 4907 between the distal end 4917 and the proximal end 4915. In this manner, the distal end 4917 of the coupling projection 4903 may be disposed adjacent the proximal end 4817 of the main section 5007. The distal end 4819 of the main section 5007 may extend from, and thereby be adjacent to, the mating surface 4913 of the flange portion 4805. Accordingly, the body portion 4803 may also extend along a reference axis 4815, which may also be a central axis of the body portion 4303. The flange portion 4805 may include a mating surface 4913, a distal surface 4823 axially opposite or spaced apart from the mating surface 4913, and at least one side surface 4825 between the distal surface 4823 and the mating surface 4913.Similar to the head portion 4801 and the body portion 4803, the flange portion 4805 may extend along a reference axis 4815, which may be a central axis of the flange portion 4805.

[0322] The head portion 4801 may have a length 5003 in the axial direction and a maximum dimension (e.g., diameter) 4905 in a second direction, e.g., transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and thus extend in the y-axis direction or in a plane parallel (or substantially parallel) to the xy plane. The main section 5007 of the body portion 4903 may have a length 5009 in the axial direction and a maximum dimension (e.g., diameter) 5011 in the second direction. The coupling protrusion 4903 of the body portion 4803 may have a length 5301 in the axial direction and a maximum dimension (e.g., diameter) 5303 in the second direction. The flange portion 4805 of the body portion 4803 may have a length 5013 in the axial direction and a maximum dimension (e.g., diameter) 5015 in the second direction. Thus, depending on the extent to which coupling protrusion 4903 is axially received in opening 4901, the length of body portion 4803 rearward of intermediate surface 4909 of head portion 4801 may be increased (or otherwise extended) by the amount of length 5301 of coupling protrusion 4903 not received in opening 4901 (e.g., amount 5017). In some embodiments, maximum dimension 5005 may be between about 5.9 mm and about 7.3 mm, maximum dimension 5011 may be between about 4.9 mm and about 6.5 mm, and maximum dimension 5015 may be between about 5.1 mm and about 9.5 mm. In this manner, maximum dimension 5005 may be larger than maximum dimension 5011, for example, between about 15% and about 25% larger than maximum dimension 5011, although embodiments are not limited thereto. Maximum dimension 5019 may be larger than each of maximum dimensions 5005 and 5011. In some cases, maximum dimension 5015 may be about 40% to about 60% larger than maximum dimension 5011, although embodiments are not limited thereto. Length 5003 may be about 1.5 mm to about 3.5 mm, and length 5013 may be about 0.2 mm to about 0.6 mm. In some cases, the length of body portion 4803 rearward of intermediate surface 4909 may vary from about 11 mm to about 18 mm, depending on the extent to which coupling protrusion 4903 is received in opening 4901.In this manner, the length of body portion 4803 rearward of intermediate surface 4909 is greater than length 5003, and may be, for example, about 500% to about 750% greater than length 5003, although embodiments are not limited thereto. Accordingly, the overall length of insert 4800 may be about 12 mm to about 22 mm, although embodiments are not limited thereto.

[0323] In various implementations, the body portion 4803 of the insert 4800 may include a bore 4919 extending between the proximal end 4915 of the coupling projection 4903 and the distal end 4819 of the main section 5007 along a reference axis 4815, which may be a central axis of the bore 4919. Thus, the bore 4919 may form a central bore of the insert 4800, although embodiments are not limited thereto. The bore 4919 may be formed as a void having a generally circular cylindrical configuration, although implementations are not limited thereto. For example, the bore 4919 may have a uniform cross-section along the axial direction, or may have one or more varying cross-sections (e.g., different shapes and / or different sizes, e.g., diameters) along the axial direction. Furthermore, the holes 4919 may be formed as voids having any suitable geometric configuration, such as generally conical voids, generally triangular prisms, generally square prisms, generally pentagonal prisms, generally hexagonal prisms, etc., or voids having a frustum configuration of at least one of such forms. For convenience, the holes 4919 will be described as having a generally cylindrical configuration, although it will be understood that reference to a surface (e.g., an interior surface) of such a shape may also refer to one or more surfaces of another shape or form of the holes 4919.

[0324] 53 , the hole 4919 can terminate at a distal surface 5305, which can be offset from the distal surface 4823 of the flange portion 4805 in a first direction (e.g., the z-axis direction), with the hole 4919 extending through the coupling protrusion 4903 and partially through the main section 5007 of the body portion 4803. In some implementations, the hole 4919 extends partially through the body portion 4803 and terminates at a transition region before the flange portion 4805. Thus, the hole 4919 may not extend into the flange portion 4905, although embodiments are not limited thereto. Accordingly, the hole 4919 can have a depth 5307, e.g., in the axial direction, and a maximum dimension (e.g., diameter) 5309, e.g., in a second direction. For example, depth 5307 may be about 2.2 mm to about 2.7 mm, and maximum dimension 5309 may be about 12 mm to about 16 mm (at least less than each of dimensions 5005, 5011, and 5303). Depending on the geometric configuration of hole 4919, maximum dimension 5309 may be the width of hole 4919. Body portion 4803 may also include a plurality of gas exit orifices 4827 fluidly connected to holes 4919 within insert 4800. While a total of seven gas exit orifices 4827 are shown, insert 4800 may include any suitable number of gas exit orifices 4827. In some cases, the gas exit orifice 4827 may connect the distal surface 4823 and the distal surface 5305, allowing one or more gases flowed into the gas inlet hole 4919 to flow through the hole 4919 and the gas exit orifice 4827, thereby exiting the distal surface 4823. Depending on the extent to which the coupling protrusion 4903 is axially received in the opening 4901, one or both of the first surface 4811 and the proximal end 4915 may form a gas inlet or a gas inlet face of the insert 4800.In this context, a "gas inlet" or "gas inlet face" may be considered to be at least one first opening into the insert 4800 or at least one surface of the insert 4800 that includes the at least one first opening through which gas from a plenum (e.g., plenum 237) of the gas distribution body (e.g., gas distribution body 200) initially passes when gas is channeled through the plenum, e.g., received in a hole 4919 of the insert 4800. For example, the coupling protrusion 4903 may be received in the opening 4901 such that the first surface 4811 and the proximal end 4915 are flush with one another, thereby allowing both the first surface 4811 and the proximal end 4915 to form the gas inlet / gas inlet face of the insert 4800. In some cases, the coupling protrusion 4903 can be received in the opening 4901 such that the proximal end 4915 is recessed below the first surface 4811, and thus the first surface 4811 can form the gas inlet / gas inlet face of the insert 4800. As another example, the coupling protrusion 4903 can be received in the opening 4901 such that the proximal end 4915 protrudes above the first surface 4811, and thus the proximal end 4915 can form the gas inlet / gas inlet face of the insert 4800.

[0325] Similar to the holes 4919, the gas exit orifices 4827 may be formed as cavities having a generally cylindrical configuration, although embodiments are not limited thereto. For example, one or more of the gas exit orifices 4827 may be formed as cavities having any suitable geometric configuration, such as a generally conical shaped cavities, a generally triangular prism, a generally square shaped prism, a generally pentagonal shaped prism, a generally hexagonal shaped prism, or the like, or a cavities having a frustum configuration of at least one of such shapes. For convenience, the gas exit orifices 4827 will be described as having a generally cylindrical configuration, although it should be understood that reference to a surface (e.g., an interior surface) of such a shape may also represent one or more surfaces of another shape or configuration. In any event, each gas exit orifice 4827 may have a corresponding central axis and a respective maximum dimension (e.g., diameter) in a plane perpendicular to its corresponding central axis.

[0326] For example, each gas outlet orifice 4827 can have a corresponding central axis, such as central axis 5311, and a respective maximum dimension (e.g., diameter), such as maximum dimension 5313. The central axes (e.g., central axis 5311) of the gas outlet orifices 4827 can extend outward from the reference axis 4815, thereby forming a respective oblique angle (or angles), such as angle 5315, with the reference axis 4815. In some embodiments, angle 5315 can be between about 15° and about 75°, such as between about 30° and about 60°, such as between about 40° and about 50°, such as about 45°. This angling of the gas outlet orifices 4827 relative to the reference axis 4815 not only helps to diffuse the outflow of purge gas from the insert 4800, but can also prevent backflow of process gases into the insert 4800 and / or showerhead 107. Such backflow can degrade the insert 4800 and / or showerhead 107. To this end, the flow of gas from the gas outlet orifice 4827 may prevent or at least reduce the possibility of material deposition between the insert 4800 and the inner surface 259 of the gas distribution port 207, and / or reduce the possibility of material spalling and / or particle formation. Such material spalling and / or particle formation may result in the deposition of defect-causing contaminants on the front surface 203 of the wafer 105 or structures formed thereon / in the wafer 105. Furthermore, as will become more apparent below in connection with the description accompanying at least FIGS. 62 and 63 , the angling of the gas outlet orifice 4827 may help to minimize or at least reduce the magnitude of a component (e.g., a vertical or perpendicular component) of the average velocity of the gas flow relative to chamber components facing the gas distribution body, including one or more inserts 4800, such as a pedestal and / or showerhead pedestal, e.g., help to prevent or at least reduce the occurrence of undesirable defects. A more detailed discussion of these effects is also provided below. In some cases, the angle of the gas outlet orifice 4827 relative to the reference axis 4815 may be used to strike a compromise between the performance of the insert 4800 during one or more wafer processing stages and the performance of the insert 4800 during one or more cleaning operations.As will also become more apparent below, the configuration of flange portion 4805 may also contribute to one or more of these effects. Note also that gas exit orifices 4827 may be arranged about reference axis 4815 at an angular pitch 5201. Assuming insert 4800 has "n" gas exit orifices 4827, where "n" is an integer greater than or equal to 2, then angular pitch 5201 may be equal to (or substantially equal to) 360° divided by "n." For example, insert 4800 is shown as including seven gas exit orifices 1527, and therefore angular pitch 5201 may be approximately 51.4°, although embodiments are not limited in this respect.

[0327] In some implementations, the maximum dimension (e.g., maximum dimension 5313) of each corresponding gas exit orifice 4827 may be between about 0.8 mm and about 1.2 mm, such as between about 0.9 mm and about 1.1 mm, such as about 1 mm. The length (or depth) of each gas exit orifice 4827 may be less than the depth 5307 of hole 4919. With respect to the dimensional sizing of inserts 300, 700, and 4800, gas exit orifice 4827 may have a shorter length within insert 4800 than gas exit orifice 321 within insert 300 and gas exit orifice 721 within insert 700, respectively. This increase in the depth of hole 4919, the increase in maximum dimension 5307 of hole 4919, and the decrease in length of gas exit orifice 4827 may, at least in part, result in a lower pressure drop between the gas inlet face (such as proximal end 4915) and distal face 4823 of insert 4800 associated with gas flow through insert 4800 under conditions in the slip flow regime. Such an increase in downstream pressure may result in a lower gas throughput (or average velocity) through insert 4800 than the gas throughput through inserts 300, 700, and 1100. In some cases, assuming gas flow in the slip flow regime, the pressure drop through insert 4800 may be approximately 500×10 -4 Torr or less, e.g., about 375 x 10 -4 Thor or less, e.g., about 340 x 10 -4He could be Thor.

[0328] The head portion 4801 may, in some cases, include one or more recesses 4829 in the first surface 4811. For convenience, the head portion 4801 is assumed to include multiple recesses 4829, such as two recesses 4829 as shown in FIG. 49 . The recesses 4829 may have a depth 5019 in the axial direction and may extend longitudinally in a third direction transverse to the axial direction. For example, the third direction may extend in the x-axis direction or along the x-axis direction. In some cases, the recesses 4829 may extend radially from the opening 4901 along the reference axis 5101 to the side surface 4813 of the head portion 4801, thereby fluidly connecting the opening 4901 within the head portion 4801. While FIG. 51 shows the recesses 4827 aligned with one another along the reference axis 5101, embodiments are not limited thereto. For example, one or more of the recesses 4827 (or at least one other recess) can be aligned with, for example, a reference axis 5103 that extends transversely to the reference axis 5101. The width 5105 of the recess 4827 can extend in, for example, a second direction. In various implementations, the depth 5019 and width 5105 of the recess 4827 can be shaped and / or sized to accommodate, for example, one or more blades of a tool that can be utilized to couple (e.g., thread) the head portion 4801 to the body portion 4803 as part of installing the insert 4800 into a gas distribution port, such as gas distribution port 207.

[0329] According to various embodiments, the insert 4800 (and thereby the head portion 4801 and body portion 4803 of the insert 4800) may be formed from any suitable material and may be formed in any suitable manner. For example, the insert 4800 may be formed from (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, or the like. In some cases, the insert 4800 may be formed from a first material and coated with a second material. For example, the insert 4800 may be fabricated from aluminum as a first material and coated with aluminum fluoride (AlF) as a second material, although embodiments are not limited thereto. It is also contemplated that the head portion 4801 may be formed from the same material as the body portion 4803 or may be formed from at least one different material. In various cases, components of insert 4800, such as head portion 4801 and body portion 4803, may be manufactured by additive manufacturing, stamping, injection molding, compression molding, casting, and / or machining, and the like.

[0330] Figure 54 schematically illustrates a partial cross-sectional view of the showerhead of Figure 2 including the gas distribution port inserts of Figures 48-53, according to some embodiments. Figure 55 schematically illustrates a partial cross-sectional view of the showerhead of Figure 2 including modified versions of the gas distribution port inserts of Figures 48-53, according to some embodiments.

[0331] 2 and 48-55, the insert 4800 can be at least partially supported within the gas distribution port 207 such that the intermediate surface 4909 of the head portion 4801 abuts the mounting surface 265 of the gas distribution port 207 and the mating surface 4913 of the flange portion 4805 abuts the second surface 241 of the gas distributor 107. To this end, the head portion 4801 and the body portion 4803 (excluding the flange portion 4805) of the insert 4800 can be configured so that there is a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 5005 of the head portion 4801 of the insert 4800 can be about 1% to about 10% smaller than the maximum dimension 255 of the first port section 245 of the gas distribution port 207, such that the side surface 4813 of the head portion 4801 is spaced from the inner surface 251 of the gas distribution port 207 by a distance (or gap) 5401. To this end, the maximum dimension 5011 of the main section 5007 of the body portion 4803 of the insert 4800 may be about 1% to about 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the side surface 4821 of the main section 5007 is spaced a distance 5403 from the inner surface 259 of the gas distribution port 207. In some embodiments, the distance 5403 may not be constant and may vary, for example, along the reference axis 257. For example, the outer diameter of the side surface 4821 may not be constant and may vary along the reference axis 257, and / or the maximum dimension (e.g., inner diameter) of the second port portion 247 may not be constant and may vary along the reference axis 257. The distance 5403 may be defined to accommodate one or more properties of, and / or manufacturability of, one or more materials used in the various components described herein, taking into account, for example, thermal expansion coefficients and mismatches, machinability, manufacturing tolerances, etc. In some cases, distances 5401 and 5403 may be equal or substantially equal, although embodiments are not limited to this. According to some implementations, the relative spacing between the insert 4800 and the gas distribution port 207 can prevent or at least reduce the possibility of damage to the insert 4800 and / or the gas distribution body 213.For example, such damage may occur due to a mismatch in the coefficient of thermal expansion (CTE) between the insert 4800 and the gas distribution body 213 .

[0332] According to various embodiments, similar to the insert 4200, the overall length of the insert 4800 can be configured to accommodate the gas distribution port 207 such that when the insert 4800 is at least partially supported within the gas distribution port 207, the mating surface 4913 of the flange portion 4805 abuts the second surface 241 of the gas distribution body 213 and the intermediate surface 4909 of the head portion 4801 abuts the mounting surface 265 of the gas distribution port 207. Accordingly, during installation, the body portion 4803 of the insert 4800 can be inserted into the opening 205 of the gas distribution port 207 until the mating surface 4913 abuts the second surface 241. The head portion 4801 can be threaded onto the coupling protrusion 4903 of the body portion 4803 until the intermediate surface 4909 abuts the mounting surface 265. Depending on the length of the second port portion 247, the degree to which the coupling protrusion 4903 is axially received in the opening 4901 when the head portion 4801 is detachably coupled to the body portion 4803 may vary. This may also affect whether the proximal end 4915 of the body portion 4803 is configured to protrude beyond the first surface 4811 of the head portion 4801, be recessed from the first surface 4811, or be flush with the first surface 4811. In either case, however, at least the mating surface 4913 of the flange portion 4805 may be configured to abut the second surface 241 of the gas distribution body 213. However, in some embodiments, it is contemplated that a gap may be formed between the mating surface 4913 of the flange portion 4805 and the second surface 241 of the gas distribution body 213. In such instances, the amount of the gap may be small enough to prevent backflow of gas, e.g., process gas, into one or more portions of the gas distribution port 207.

[0333] In some implementations, the distal surface 4823 of the insert 4800 may extend axially a distance 5503 beyond the second surface 241 of the showerhead 107 into a gap region 5501 between the showerhead 107 and the wafer 105. The distance 5503 may be between about 0.2 mm and about 0.8 mm, such as about 0.5 mm. Thus, the gap region 5501 may have a height 211 in the axial direction, but the protruding characteristics of the distal surface 4823 may reduce the distance between the distal surface 4823 and the opposing surface of the wafer 105 to a height 5505. The height 5505 may be between about 0.2 mm and about 0.8 mm in some examples. This may further prevent process gases from region 131 from flowing into the gap region 5501 between the showerhead 107 and the front surface 203 of the wafer 105. The head portion 4801 can also function as a centering feature when the insert 4800 is at least partially installed in the gas distribution port 207, allowing the central axis (e.g., reference axis 4815) of the insert 4800 to be aligned (or substantially aligned) with the central axis 257 of the gas distribution port 207. For example, the head portion 4801 of the insert 4800 can be at least partially supported at the first port portion 245 of the gas distribution port 207 before the body portion 4803 is at least partially supported at the second port portion 247 of the gas distribution port 207. In some cases, the head portion 4801 can be sized larger than the body portion 4803, such that the distance 5401 between the side surface 4813 of the head portion 4801 and the inner surface 251 of the gas distribution port 207 is smaller than the distance 5403 between the side surface 4821 of the body portion 4803 of the insert 4800 and the inner surface 259 of the gas distribution port 207. Thus, when the body portion 4803 is inserted into the second port 247 and coupled to the head portion 4801, the body portion 4803 may be more easily centered within the second port 247 because at least the head portion 4801 may already be centered within the first port 245. Because of this, the distance 5401 between the side surface 4813 of the head portion 4801 and the inner surface 251 of the gas distribution port 207 may be relatively small, thus reducing the likelihood of the body portion 4803 being miscentered from the second port 247.This is also true, for example, with respect to thermally induced movement (or other displacement) of the insert 4800 relative to the gas distribution port 207. For example, because the distance 5401 may be relatively smaller than the distance 5403, the movement of the body portion 4803 may be limited by the amount of movement made available to the head portion 4801, thereby reducing the likelihood that the body portion 4803 will become mis-centered from the second port portion 247.

[0334] Similar to inserts 300, 700, 1100, 1500, 2000, 2500, 3000, 3600, and 4200, the presence of the clearance fit described above may increase the distance between the sides 4813 and 4821 of the insert 4800 and the corresponding interior surfaces 251 and 259 of the gas distribution port 207. This may reduce the likelihood of wear between the insert 4800 and the gas distribution port 207, which may occur as a result of thermally induced movement or expansion of the insert 4800 relative to the gas distribution port 207. Such thermally induced movement or expansion may be caused, at least in part, by temperature changes and / or fluctuations associated with semiconductor processing operations performed by the system 100. While movement of the insert 4800 has been described as being caused by thermal effects, it is contemplated that movement of the insert 4800 may additionally or alternatively be caused by other factors, such as pressure differentials or movement of the showerhead 107. In any event, reducing the likelihood of such wear may simultaneously reduce the likelihood of particle generation at and / or particle detachment from the gap 5405 between the insert 4800 and the gas distribution port 207. Such particle generation and / or particle detachment may otherwise result in, at least in part, the deposition of defect-causing contaminants on the front surface 203 of the wafer 105 and / or structures formed thereon / in. The centering effect of the head portion 4801 relative to the body portion 4803 may also act to return the insert 4800 to concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the insert 4800. However, provided that a gas exit orifice 4827 can be formed in the distal face 4823 disposed behind the opening 205 of the gas distribution port 207, purge gas can be prevented from flowing from the area corresponding to the gap 5405, which can prevent or at least reduce the possibility of back diffusion into the gas distribution port 207 and thereby into the showerhead 107, as described in connection with at least inserts 1500, 2000, and 2500.That said, the capping properties of flange portion 4805 can also close the gas distribution port upon which insert 4800 may be at least partially supported, further impeding or preventing purge gas from flowing into the region corresponding to gap 5405. For example, flange portion 4805 can protrude laterally outward (e.g., radially outward) from side 4821 of main section 5007 of body portion 4803, a distance 5407 beyond inner surface 259 of gas distribution port 207, effectively covering or otherwise closing a flow path to / from the region corresponding to gap 5405. In some cases, distance 5407 can be greater than 0 mm and about 2 mm or less, although embodiments are not limited thereto. For example, the magnitude of distance 5407 can be set sufficient to impede gas flow into gap 5405, which can depend on one or more process conditions, such as pressure, temperature, flow rate, etc. For example, as seen in FIG. 55, protrusion distance 5407_1 of flange portion 4805_1 may be greater than protrusion distance 5407 of flange portion 4805 shown in FIG. 54. In either case, flange portion 4805 may be configured to prevent or at least reduce the likelihood of back-diffusion into gas distribution port 207 and thereby back-diffusion into showerhead 107. To this end, the aforementioned closure of the flow path to gap 5405 can prevent or at least reduce the likelihood of particle detachment from gap 5405 in such instances if particle generation occurs in the region corresponding to gap 5405.

[0335] According to some embodiments, the first port portion of the gas distribution port of the gas distribution body may be modified to engage (e.g., removably engage) with the body portion of the insert, and the head portion of the insert may be omitted. An example of such a configuration is described in more detail in connection with FIG. 56 and insert 4800.

[0336] FIG. 56 schematically illustrates a partial cross-sectional view of a modified version of the showerhead of FIG. 2 including a modified version of the gas distribution port insert of FIG. 55, according to some embodiments.

[0337] 56, the head portion 4801 of the insert 4800 may be omitted, and the first port portion 245_1 of the gas distribution body 215_1 may be configured to engage (e.g., removably engage) with the coupling protrusion 4903 of the body portion 4803. For example, the inner surface 251_1 of the first port portion 245_1 may be threaded to engage with threads formed on the side surface 4907 of the coupling portion 4903. In this manner, the body portion 4803 may be threaded onto the first port portion 245_1 until the mating surface 4813 of the flange portion 4805_1 abuts the second surface 241 of the gas distribution body 215_1. The remaining portions of the showerhead 200 and the insert 4800 may be similar to those described in connection with FIGS. 2 and 48-55.

[0338] Multi-Station Processing Tools FIG. 57 illustrates a schematic diagram of a multi-station processing tool according to some embodiments.

[0339] In some implementations, the multi-station processing tool 5700 can include an input load lock 5703 and an output load lock 5705, either or both of which may include a plasma source and / or an ultraviolet (UV) source. A robot 5707 is configured to move wafers from a cassette loaded through a pod 5709 to the input load lock 5703 through an atmospheric pressure port 5711 under atmospheric pressure. The wafer 105 is placed on the pedestal 5713 of the input load lock 5703 by the robot 5707, the atmospheric port 5711 is closed, and the input load lock 5703 is evacuated. In examples where the input load lock 5703 includes a remote plasma source, the wafer 105 may be exposed to a remote plasma treatment in the input load lock 5703 before being introduced into the process chamber (or chambers) 5715. Additionally, the wafer 105 may be heated in the input load lock 5703, for example, to remove moisture and / or adsorbed gases. Next, a chamber transport port 5717 to chamber 5715 is opened and another robot 5719 delivers the wafer 105 into the reactor for processing and places it on the pedestal of the first station shown in the reactor. While the implementation shown in Figure 57 includes a load lock, it should be understood that in some implementations direct entry of the wafer 105 into the processing station may be provided.

[0340] As shown in FIG. 57, chamber 5715 includes four processing stations, numbered 1 through 4. Each station has a temperature-controlled pedestal (such as temperature-controlled pedestal 5721 for station 1) and a gas line inlet. It should be understood that in some cases, each process station may have the same, different, or multiple purposes. Each station may be controlled independently of the other stations in the process chamber. For example, all four stations may be used to deposit a film on a wafer loaded on the pedestal. All four stations may also be used to deposit a film on the backside of the wafer. Alternatively, fewer than four stations may be used to deposit a film on the backside of the wafer, while some stations may be used to deposit a film on the frontside of the wafer or may remain idle. Even when two or more stations are used for the same purpose, different process parameters (such as temperature, gas flow rates, distance between the showerhead, wafer, and pedestal, etc.) may be applied to each station. Also, in some embodiments, the process stations may be switchable between a chemical vapor deposition (CVD) process mode and a PECVD process mode. In another example, a deposition operation, such as a PECVD operation, may be performed in one station, and exposure to UV radiation for UV curing may be performed in another station. In some cases, deposition and UV curing may be performed in the same station. Furthermore, while chamber 5715 is shown as including four stations, embodiments are not limited thereto. For example, chamber 5715 may have any suitable number of stations, such as five or more stations, or three or fewer stations. Furthermore, multi-station processing tool 5700 and chamber 5715 are configured such that interference between stations within chamber 5715 and / or the effect of a process performed in one station on other stations can be monitored and controlled to provide desired process conditions for each station during operation.

[0341] As previously mentioned, the multi-station processing tool 5700 may include a wafer handling system (e.g., a robot 5719 including a spider fork 5701) for transferring and / or positioning wafers within the processing chamber 5715. In some embodiments, the wafer handling system may transfer wafers between various process stations and / or between a process station and a load lock. However, it is contemplated that any suitable wafer handling system may be employed, such as, for example, a wafer carousel or other wafer handling robot. Additionally, the multi-station processing tool 5700 may include (or may be otherwise coupled to) a system controller 5723 employed to control process conditions and hardware states of the multi-station processing tool 5700. The system controller 5723 may include one or more memory devices 5725, one or more mass storage devices 5727, and one or more processors 5729. Each processor 5729 may include a central processing unit (CPU) or computer, analog and / or digital input / output connections, stepper motor controller boards, etc.

[0342] In some embodiments, the system controller 5723 controls each activity of the multi-station processing tool 5700. For example, the system controller 5723 may execute system control software 5731 stored on mass storage device 5727, loaded into memory device 5725, and executed by processor 5729. In some embodiments, the system control software 5731 may be provided in a “cloud” and / or networked computing environment. As used herein, “cloud” refers to an information technology infrastructure in which one or more portions of the system control software 5731 are hosted on a public or private network platform and managed in-house or by a service provider. In this manner, the system control software 5731 may be available on demand in any suitable network configuration. Alternatively, the control logic may be hard-coded into the system controller 5723. Application-specific integrated circuits (ASICs) and / or programmable logic devices (e.g., field-programmable gate arrays (FPGAs)), etc., may be used for these purposes. In the following discussion, whenever “software” or “code” is used, functionally equivalent hard-coded logic may be used instead. The system control software 5731 may include instructions for monitoring and controlling the timing, mixture of gases, gas flow rates, chamber and / or station pressures, chamber and / or station temperatures, wafer temperatures, target power levels, RF power levels, substrate pedestal, chuck and / or susceptor positions, and other parameters of a particular process performed by the multi-station processing tool 5700. The system control software 5731 may be configured in any suitable manner. For example, various process tool component subroutines or control objects may be written to control the operation of process tool components used to perform various process tool processes. The system control software 5731 may be coded in any suitable computer-readable programming language.

[0343] In some embodiments, the system control software 5731 may include input / output control (IOC) sequencing instructions for monitoring and controlling the various parameters described above. In some embodiments, other computer software and / or programs stored on the mass storage device 5727 and / or memory device 5725 associated with the system controller 5723 may be employed. Examples of programs or sections of programs for this purpose include a substrate positioning program, a process gas control program, a pressure control program, a heater control program, a cooler control program, and a plasma control program.

[0344] The substrate positioning program may include program code for process tool components used to load and orient the wafer 105 onto the pedestal 5721 and control spacing between the wafer 105 and other parts of the multi-station processing tool 5700. The substrate positioning program may further include program code for monitoring the performance of, for example, one or more pedestals, one or more actuators, and / or one or more motors, such as, for example, the speed at which the actuators move the pedestal up or down in response to at least one command and / or the accuracy with which the pedestal moves to a desired spacing.

[0345] The process gas control program may include code for controlling gas composition (e.g., silicon-containing gas, oxygen-containing gas, nitrogen-containing gas, dilution (or inert) gas, etc.) and flow rates, and optionally for flowing gas to one or more process stations prior to deposition to stabilize the pressure in the process stations. The pressure control program may include code for controlling the pressure in the process stations, e.g., by adjusting throttle valves in the exhaust systems of the process stations and / or gas flows to the process stations. The pressure control program may further include program code for monitoring the performance of, e.g., mass flow controllers, configured to monitor the flow of gases, e.g., process gases, purge gases, inert gases, etc., to one or more stations of the multi-station processing tool 5700, thereby facilitating control of the flows.

[0346] The heater control program may include code for controlling current to a heating unit used to heat the pedestal (e.g., pedestal 5721) and / or showerhead (e.g., showerhead 107) of the processing chamber 5715, thereby heating the wafer 105. Additionally or alternatively, the heater control program may control the delivery of a heat transfer gas (such as helium) to a gas distributor and thereby to the wafer 105. In some implementations, the heater control program may include program code for controlling the temperature of the multi-station processing tool 5700 or one or more stations thereof. In some cases, the temperature of at least one station of the multi-station processing tool 5700 may differ from the temperature of at least one other station of the multi-station processing tool 5700, and thus the heater control program may include code for ensuring that such processing conditions are provided. It is also contemplated that the heater control program may include code for controlling current to a heating unit used to heat the gas distribution body (e.g., showerhead 107) of the processing chamber 5715 and thereby heat the gases flowing therefrom and / or the gas di...

Claims

1. A gas distribution port insert ("insert") comprising: A head portion, Gas inlet surface, an intermediate surface opposite the gas inlet surface in a first direction; and a head portion including at least one first side connecting the gas inlet surface to the intermediate surface; a body portion extending from the head portion, a proximal end adjacent the intermediate surface; a distal end spaced from the proximal end in the first direction, the distal end terminating in a first distal surface; and a body portion including at least one second side connecting the distal end to the proximal end; a bore extending along a reference axis from the gas inlet face, through the head portion, and partially through the body portion, the bore terminating at a second distal surface within the body portion; a plurality of gas exit orifices fluidly connected to the bore within the body portion and disposed about the reference axis; a proximal end of the gas exit orifice formed in the second distal surface; The gas distribution port insert, wherein a width of the head portion in a second direction transverse to the first direction is greater than a width of the body portion in the second direction.

2. 2. The insert of claim 1, a distal end of the gas exit orifice formed in the first distal surface; The gas exit orifice extends longitudinally in the first direction.

3. 2. The insert of claim 1, the body portion further includes at least one third side connecting the first distal surface to the at least one second side, the at least one third side being angled relative to the first distal surface; a distal end of the gas exit orifice formed in the at least one third side; The longitudinally extending axes of the gas exit orifices extend outwardly from the reference axis and form a corresponding inclination angle with the reference axis.

4. 4. The insert of claim 3, wherein the longitudinally extending axes of the gas exit orifices extend generally perpendicular to the at least one third side.

5. A gas distribution port insert ("insert") comprising: A head portion, Gas inlet surface, an intermediate surface opposite the gas inlet surface in a first direction; and a head portion including at least one first side connecting the gas inlet surface to the intermediate surface; a body portion extending from the head portion, a proximal end adjacent the intermediate surface; a distal end spaced from the proximal end in the first direction, the distal end terminating in a first distal surface; and a body portion including at least one second side connecting the distal end to the proximal end; a bore extending along a reference axis from the gas inlet face, through the head portion, and partially through the body portion, the bore terminating at a second distal surface within the body portion; a plurality of gas exit orifices in the at least one second side surface and fluidly connected to the bore within the body portion, a first gas exit orifice being disposed about the reference axis; The gas distribution port insert, wherein a width of the head portion in a second direction transverse to the first direction is greater than a width of the body portion in the second direction.

6. 6. The insert of claim 5, wherein the plurality of gas exit orifices includes a first set of gas exit orifices and a second set of gas exit orifices offset in the first direction from the first gas exit orifices, whereby the first gas exit orifices are located closer to the proximal end of the body portion than the second gas exit orifices.

7. 7. The insert of claim 6, the longitudinally extending axes of the gas exit orifices extend radially outward from the reference axis; the intermediate surface extends in a second reference plane; some of the gas exit orifices abut the second distal surface to form the second set of gas exit orifices; Some of the gas exit orifices are spaced apart from the second reference plane in the first direction to form the first set of gas exit orifices.

8. 7. The insert of claim 6, each of the longitudinally extending axes forms a corresponding tilt angle in a first reference plane perpendicular to the reference axis; the intermediate surface extends in a second reference plane; some of the gas exit orifices contact the second reference surface to form the first set of gas exit orifices; Some of the gas exit orifices abut the second distal surface to form the second set of gas exit orifices.

9. An insert according to any one of claims 6 to 8, each first opening of the first set of gas exit orifices has a corresponding first central axis tangent to the at least one second side; each second opening of the second set of gas exit orifices has a corresponding second central axis tangent to the at least one second side surface; the first central axis is circumferentially offset from the second central axis such that the first central axis does not coincide with the second central axis; or each opening of the first set of gas exit orifices has a corresponding first central axis tangent to the at least one second side; each opening of the second set of gas exit orifices has a corresponding second central axis tangent to the at least one second side surface; The insert, wherein the first central axis is substantially aligned with a corresponding one of the second central axes.

10. 9. An insert according to any one of claims 5, 6 and 8, wherein the second distal surface is a generally conical surface having an apex that projects toward the first gas inlet surface in a direction opposite to the first direction.

11. A gas distribution port insert ("insert") comprising: A head portion, Gas inlet surface, an intermediate surface opposite the gas inlet surface in a first direction; and a head portion including at least one first side connecting the gas inlet surface to the intermediate surface; a body portion extending from the head portion, a proximal end adjacent the intermediate surface; a distal end spaced from the proximal end in the first direction, the distal end terminating in a first distal surface; and a body portion including at least one second side connecting the distal end to the proximal end; a bore extending along a reference axis from the gas inlet face, through the head portion, and partially through the body portion, the bore terminating at a second distal surface within the body portion; a gas exit orifice, a proximal end opening fluidly connected to the bore within the body portion; and a gas exit orifice including a distal end opening formed in the at least one second side; The gas distribution port insert, wherein a width of the head portion in a second direction transverse to the first direction is greater than a width of the body portion in the second direction.

12. The insert of claim 11 , wherein the distal end opening is formed between and extends between the first distal surface and the at least one second side surface.

13. 13. The insert of claim 12, a longitudinally extending central axis of the gas exit orifice extends in a fourth direction transverse to the first direction; the first reference plane is perpendicular to the first direction; The angle between the first reference plane and the fourth direction is between about 10° and about 30°.

14. 12. The insert of claim 11, a longitudinally extending central axis of the gas exit orifice extends in a fourth direction perpendicular to the first direction; The gas exit orifice is a first sidewall extending in a sixth direction oblique to the central axis of the gas exit orifice; a second sidewall extending in a seventh direction oblique to the central axis of the gas exit orifice, the seventh direction being different from the sixth direction.

15. 15. The insert of claim 14, an additional hole extending partially through the body portion along the reference axis and fluidly connecting the hole and the gas exit orifice; the central axis of the additional hole is offset from the central axis of the hole in the third direction; An insert, wherein the width of the additional hole in the second direction is less than or equal to the minimum width of the gas exit orifice in the second direction.

16. A gas distribution port insert ("insert") comprising: a gas inlet configured to receive a flow of gas; A main body portion, Proximal end, a distal end spaced from the proximal end in a first direction; and a body portion including a first section including a first thread, the first section being disposed between the proximal end and the distal end; a flange portion extending from the distal end of the body portion, a mating surface adjacent the distal end; and a flange portion including a first distal surface spaced from the mating surface in the first direction; a bore extending along a reference axis from the proximal end toward the distal end, the bore fluidly connected to the gas inlet and terminating at a second distal surface within the body portion; a plurality of gas outlet orifices in the first distal surface, the plurality of gas outlet orifices fluidly connected to the bore within the body portion and arranged around the reference axis.

17. 17. The insert of claim 16, A head portion, a first surface, a second surface spaced apart from the first surface in the first direction; and a head portion including an opening extending from the first surface through the second surface in the first direction, the opening including a second thread configured to align with the first thread; the head portion is removably coupled to the body portion at least in part by a threaded engagement between the first thread and the second thread that receives a portion of the first section in the opening; The degree of threaded engagement is configured to vary the distance between the second surface and the mating surface in the first direction.

18. 18. An insert according to claim 16 or 17, the body portion further includes a main portion; the first section of the body portion projects from the main portion in a direction opposite to the axial direction; An insert, wherein the width of the flange portion in a second direction transverse to the first direction is greater than the width of the main portion of the body portion in the second direction.

19. 19. The insert of claim 18, the width of the main portion in the second direction is greater than the width of the first section in the second direction; The width of the flange portion in the second direction is greater than the width of the head portion in the second direction.

20. 1. An apparatus comprising: a gas distribution body including one or more plenums formed between a first surface and a second surface opposite the first surface, the second surface including a plurality of gas distribution ports fluidly connected to at least one of the one or more plenums; one or more of the gas distribution ports includes a gas distribution port insert ("insert") at least partially supported therein in accordance with any one of claims 1, 5, 11, and 17; Each of the one or more gas distribution ports comprises: a first port configured to at least partially support the head portion of the insert therein; and The device includes a second port portion fluidly connected to the first port portion, the second port portion configured to allow a body portion of the insert to extend at least partially therethrough.

21. 21. The apparatus of claim 20, a processing chamber; a pedestal configured to support a wafer in the processing chamber relative to the gas distributor such that a distance between the second surface and a surface of the wafer facing the second surface in the first direction is about 1 mm; the gas distributor forms a portion of a showerhead; The apparatus, wherein the pedestal is a showerhead pedestal.

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