Induction coil assembly drive system and control method thereof, and semiconductor process equipment

Abstract

The present application provides a drive system for an induction coil assembly, a control method thereof, and a semiconductor processing apparatus. The drive system for the induction coil assembly includes a rotary drive device, an elevator assembly operably connected to the rotary drive device to raise and lower the induction coil assembly, and a controller configured to determine a theoretical rotation speed of the rotary drive device based on a target elevation speed of the induction coil assembly within a predetermined time, determine whether the theoretical rotation speed of the rotary drive device is equal to or lower than the predetermined rotation speed, which is a critical rotation speed at which the rotary drive device generates vibration, and, if the theoretical rotation speed of the rotary drive device is equal to or lower than the predetermined rotation speed, control the rotary drive device to alternately stop operation and operate at a target rotation speed greater than the predetermined rotation speed within the predetermined time, thereby making an average rotation speed of the rotary drive device within the predetermined time equal to the theoretical rotation speed.

Description

[Technical Field]

[0001] The present application relates to the technical field of driving devices, and more particularly to a driving system for an induction coil assembly and a control method thereof, and a semiconductor processing device. [Background technology]

[0002] In the course of semiconductor processing, it may be necessary to heat an apparatus to be heated with an induction coil assembly, or to move and drive the induction coil assembly with a driving device to heat various parts of the apparatus to be heated. For example, referring to Fig. 1, in a process for producing crystals based on the PVT (Physical Vapor Transport) method, it is necessary to move the induction coil assembly 10 outside the crystal production apparatus 20 in order to heat the crystal production apparatus 20 according to the requirements of the process.

[0003] In the prior art, a rotary drive device and an elevator assembly can be used to lift and lower the induction coil assembly 10. However, the rotary drive device typically has an applicable speed range. When the induction coil assembly 10 needs to be moved at a relatively slow speed, the movement accuracy of the output end of the rotary drive device decreases. Therefore, the rotary drive device cannot accurately move and drive the induction coil assembly 10. Summary of the Invention [Problem to be solved by the invention]

[0004] The embodiments of the present application provide a driving system for an induction coil assembly, a control method thereof, and a semiconductor processing device, in order to solve the problem of how to improve the driving accuracy of a rotary driving device. [Means for solving the problem]

[0005] In a first aspect, embodiments of the present application provide a drive system for an induction coil assembly. A drive system for an induction coil assembly according to an embodiment of the present application is applicable to a semiconductor processing apparatus and includes: a rotary drive device; an elevator assembly to which the rotary drive device is drivably connected, the elevator assembly being drivably connected to the induction coil assembly and used to drive the induction coil assembly up and down; and a controller: determining a theoretical rotation speed of the rotary drive device, which is a rotation speed at which the rotary drive device operates at a constant speed within a predetermined time, based on a target elevator speed of the induction coil assembly within the predetermined time; determining whether the theoretical rotation speed of the rotary drive device is equal to or lower than a predetermined rotation speed, which is a critical rotation speed at which the rotary drive device generates vibration; and, if the theoretical rotation speed of the rotary drive device is equal to or lower than the predetermined rotation speed, controlling the rotary drive device to alternately stop operating and operate at a target rotation speed higher than the predetermined rotation speed within the predetermined time; and equalizing an average rotation speed of the rotary drive device within the predetermined time to the theoretical rotation speed.

[0006] Optionally, the controller is further configured to control the rotational drive device so that, when the theoretical rotational speed of the rotational drive device is equal to or less than the preset rotational speed, the rotational drive device switches to a stopped state a plurality of times within the preset time period, the rotational drive device is maintained in the stopped state for a first time each time, the number of times the rotational drive device switches to an operating state at the target rotational speed is equal to the number of times the rotational drive device switches to the stopped state, and the rotational drive device is maintained in the operating state at the target rotational speed for a second time each time, and the sum of the accumulated time the rotational drive device is in the stopped state and the accumulated time it is in the operating state at the target rotational speed is equal to the preset time.

[0007] Optionally, if the theoretical rotational speed is greater than the preset rotational speed, the controller is further used to control the rotational drive device to operate at the theoretical rotational speed within the preset time period so as to drive the induction coil assembly up and down.

[0008] Optionally, the lifting assembly includes a screw and a slider, the slider being threadedly engaged with the screw such that the rotating screw drives the slider to move, the rotary drive device being drivingly connected to the screw and used to drive the screw to rotate, and the slider being connected to the induction coil assembly.

[0009] Optionally, the drive system of said induction coil assembly further comprises a rotary encoder connected to said screw and also electrically connected to said controller.

[0010] Optionally, the drive system of said induction coil assembly further comprises a reducer, said rotary drive being drivingly connected to said screw via said reducer.

[0011] Optionally, the reducer includes a first sub-reduction gear and a second sub-reduction gear, the second sub-reduction gear is a direction-changing reducer, the second sub-reduction gear is provided with a second power output shaft, the rotary drive device is drivingly connected to the first sub-reduction gear, the first sub-reduction gear is drivingly connected to the second sub-reduction gear, the second power output shaft is provided in a height direction of a drive system of the induction coil assembly, and the screw is coaxially connected to the second power output shaft.

[0012] Optionally, the first sub-reduction gear is provided with a first power output shaft, and the drive system of the induction coil assembly further includes an electromagnetic brake, the electromagnetic brake including a magnetic fixing member and a magnetic attraction member, the magnetic attraction member being positioned and connected to the first power output shaft in a circumferential direction, and when the electromagnetic brake switches from a power-on state to a power-off state, the magnetic attraction member and the magnetic fixing member switch from a separated state to an attracted state.

[0013] In a second aspect, embodiments of the present application provide a method for controlling a drive system of an induction coil assembly.

[0014] A drive system for an induction coil assembly according to an embodiment of the present application may be applied to any of the drive systems for an induction coil assembly according to the embodiment of the present application, and a control method for the drive system for the induction coil assembly may include: determining, using the controller, a theoretical rotation speed of the rotary drive device, which is the rotation speed at which the rotary drive device operates at a constant speed within a predetermined time, based on a target lifting speed of the induction coil assembly within the predetermined time; determining, using the controller, whether the theoretical rotation speed of the rotary drive device is equal to or lower than a predetermined rotation speed, which is a critical rotation speed at which the rotary drive device generates vibration; and, if the theoretical rotation speed of the rotary drive device is equal to or lower than the predetermined rotation speed, controlling, using the controller, the rotary drive device to alternately stop operating and operate at a target rotation speed higher than the predetermined rotation speed within the predetermined time, and making an average rotation speed of the rotary drive device within the predetermined time equal to the theoretical rotation speed.

[0015] Optionally, the method for controlling a drive system of the induction coil assembly further includes using the controller to control the rotation drive device to drive the induction coil assembly up and down at the theoretical rotation speed within the preset time period when the theoretical rotation speed is greater than the preset rotation speed.

[0016] In a third aspect, an embodiment of the present application includes a drive system for an induction coil assembly, the drive system for the induction coil assembly including a rotation drive device, a lifting assembly to which the rotation drive device is drivably connected, the lifting assembly being drivably connected to the induction coil assembly and used to drive the induction coil assembly to lift and lower, a processor, and a readable storage medium, wherein a program or instructions are stored in the readable storage medium, and the processor, when executing the program or the instructions, controls the rotation drive device to lift and lower the induction coil assembly within a predetermined time based on a target lifting speed of the induction coil assembly within the predetermined time. and a controller that implements a control method including the steps of: determining a theoretical rotation speed of the rotary drive device, which is the rotation speed at which the rotary drive device operates at a constant speed; determining whether the theoretical rotation speed of the rotary drive device is equal to or less than a preset rotation speed, which is a critical rotation speed at which the rotary drive device generates vibration; and, if the theoretical rotation speed of the rotary drive device is equal to or less than the preset rotation speed, controlling the rotary drive device to alternately stop operation and operate at a target rotation speed higher than the preset rotation speed within the preset time period, so as to make an average rotation speed of the rotary drive device within the preset time period equal to the theoretical rotation speed.

[0017] In a fourth aspect, embodiments of the present application provide a readable storage medium.

[0018] A readable storage medium according to an embodiment of the present application is applied to any of the drive systems for induction coil assemblies according to the embodiments of the present application, and a program or instruction is stored in the readable storage medium, and when executed by a processor, the program or instruction realizes steps of a control method for any of the drive systems for induction coil assemblies according to the embodiments of the present application. [Effects of the Invention]

[0019] The above at least one technical solution used in the embodiments of the present application can achieve the following beneficial effects:

[0020] In the present embodiment, the rotary drive device alternately stops and operates at a target rotation speed, so that the average rotation speed of the rotary drive device within a predetermined time period is equal to the theoretical rotation speed, thereby ensuring that the lifting speed of the induction coil assembly meets the requirements. Here, when the rotary drive device operates at the target rotation speed, the target rotation speed may be greater than the critical rotation speed at which the rotary drive device generates vibration. In this way, the rotary drive device can avoid generating vibration, thereby improving the driving accuracy of the rotary drive device. Furthermore, the rotary drive device and the lifting assembly can be used to drive and lift the induction coil assembly more accurately. [Brief explanation of the drawings]

[0021] In order to more clearly describe the technical solutions in the embodiments of the present application or related technologies, the drawings necessary for describing the embodiments or related technologies will be briefly described below. However, the drawings in the following description are only some of the embodiments described in the present application, and it is obvious that those skilled in the art can obtain other drawings based on these drawings without performing creative work. [Figure 1] 1 is a schematic diagram of an induction coil assembly and crystal manufacturing apparatus according to an embodiment of the present application. [Figure 2] FIG. 2 is a schematic diagram of a drive system for an induction coil assembly according to an embodiment of the present application. [Figure 3] FIG. 1 is a schematic diagram of an induction coil assembly according to an embodiment of the present application. [Figure 4] 1 is a schematic diagram of a transmission mechanism according to an embodiment of the present application; [Figure 5] FIG. 2 is a partial cross-sectional view of a drive system for an induction coil assembly according to an embodiment of the present application. [Figure 6] 1 is a flowchart of a method for controlling a driving system of an induction coil assembly according to an embodiment of the present application. DETAILED DESCRIPTION OF THE INVENTION

[0022] In order to clarify the objectives, technical solutions and advantages of the present application, the technical solutions of the present application will be described below clearly and completely with reference to specific embodiments of the present application and corresponding drawings. It is clear that the described embodiments are only a part of the embodiments of the present application, and do not represent all of the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0023] In the description of this application, unless otherwise expressly specified and limited, the terms "attach," "couple," and "connect" should be understood in a broad sense, and may refer to, for example, a fixed connection, a detachable connection, or an integral connection. They may be directly connected, indirectly connected via an intermediate medium, or internal communication between two elements. Those skilled in the art can specifically understand the specific meanings of the above terms in this application.

[0024] Furthermore, although the terms used in this application are selected from well-known terms, some of the terms described in the specification of this application are selected at the discretion of the applicant, and their detailed meanings are described in the relevant parts of the description of this specification.

[0025] Furthermore, the present application is to be understood not only by the actual terms used, but also by the meaning implied by each term.

[0026] In order to help those skilled in the art better understand the inventive concept of the present application, it is first necessary to briefly introduce other methods for driving the induction coil assembly up and down in the related art.

[0027] In related technology, a dual motor, a bidirectional clutch, a multi-stage reducer, and a multi-stage synchronous belt transmission are combined to form a high-speed and low-speed lifting and positioning system, which can drive the lifting and lowering of an induction coil assembly. Here, the dual motor includes a low-speed motor and a high-speed motor. The multi-stage synchronous belt transmission includes a first synchronous belt, a second synchronous belt, and a third synchronous belt. The multi-stage reducer includes a first reducer and a second reducer.

[0028] The low-speed motor is directly connected to the first reducer and the lower input end of the bidirectional clutch via a first synchronous belt, and then connected to the second reducer and the lifting assembly via a third synchronous belt, forming a low-speed lifting positioning mechanism. The high-speed motor is connected to the upper input end of the bidirectional clutch via a second synchronous belt, and similarly connected to the second reducer and the lifting assembly via a third synchronous belt, forming a high-speed lifting positioning mechanism. In this way, switching between high and low speeds is achieved by controlling the power on or off of the upper and lower input clutches of the bidirectional clutch.

[0029] For example, if the induction coil assembly needs to be driven up and down at a slow speed, a bidirectional clutch can be used to allow the low-speed motor to output power and the high-speed motor to be cut off. If the induction coil assembly needs to be driven up and down at a high speed, a bidirectional clutch can be used to allow the high-speed motor to output power and the low-speed motor to be cut off.

[0030] The related art solution requires a two-stage synchronous belt to transmit the motor's power to the lifting assembly. Belt transmission is flexible, so it cannot achieve the same transmission accuracy as gears. Furthermore, the more stages of synchronous belt transmission there are, the greater the cumulative lifting and positioning error compared to gear transmission. Therefore, it was found that the prior art solution has problems such as a complex structure and low accuracy.

[0031] Hereinafter, the technical solutions according to the embodiments of the present application will be described in detail with reference to the drawings.

[0032] An embodiment of the present application provides a drive system for an induction coil assembly, which is applied to a semiconductor processing apparatus. Referring to FIGS. 2 to 5, a drive system 100 for an induction coil assembly according to an embodiment of the present application may include a rotation drive device 110, an elevation assembly 130, and a controller 150.

[0033] The rotary drive device 110 may be drivingly connected to the lifting assembly 130, which is movably connected to the induction coil assembly 200 and used to drive the induction coil assembly 200 up and down.

[0034] The controller 150 is used to determine the theoretical rotation speed of the rotary drive device 110, which is the rotation speed at which the rotary drive device 110 operates at a constant speed within a predetermined time, based on the target lifting speed of the induction coil assembly 200 within a predetermined time. The controller 150 is further used to determine whether the theoretical rotation speed of the rotary drive device 110 is equal to or lower than a predetermined rotation speed, which is the critical rotation speed at which the rotary drive device 110 generates vibration. If the theoretical rotation speed of the rotary drive device 110 is equal to or lower than the predetermined rotation speed, the controller 150 is further used to control the rotary drive device 110 to alternately stop operating and operate at a target rotation speed higher than the predetermined rotation speed within a predetermined time, thereby making the average rotation speed of the rotary drive device 110 within the predetermined time equal to the theoretical rotation speed.

[0035] In this manner, in the present embodiment, the rotary drive device 110 alternately stops and operates at the target rotation speed, thereby making the average rotation speed of the rotary drive device 110 within a predetermined time period equal to the theoretical rotation speed, and thereby ensuring that the lifting speed of the induction coil assembly 200 meets the requirements. Here, when the rotary drive device 110 operates at the target rotation speed, the target rotation speed may be greater than the critical rotation speed at which the rotary drive device 110 generates vibrations. In this way, the rotary drive device 110 can avoid generating vibrations, thereby improving the driving accuracy of the rotary drive device 110. Furthermore, the induction coil assembly 200 can be lifted and lowered more accurately using the rotary drive device 110 and the lifting assembly 130.

[0036] In addition, compared with solutions in the related art, the solution according to the embodiment of the present application has the following advantages: no clutch is required for switching; one rotary drive device 110 controls the induction coil assembly 200, allowing for both high-speed and low-speed positioning; the structure is simple, easy to install, and hardware costs are low.

[0037] In an embodiment of the present application, controller 150 is further configured to control, when the theoretical rotation speed of rotary drive device 110 is equal to or lower than a predetermined rotation speed, that rotary drive device 110 switches to a stopped state a plurality of times within a predetermined time period, that rotary drive device 110 is maintained in the stopped state for a first period each time, that the number of times rotary drive device 110 switches to an operating state at the target rotation speed is equal to the number of times rotary drive device 110 switches to the stopped state, and that rotary drive device 110 is maintained in an operating state at the target rotation speed for a second period each time. Here, the sum of the accumulated time that rotary drive device 110 is in the stopped state (the product of the number of times in the stopped state and the first time) and the accumulated time that rotary drive device 110 is in the operating state at the target rotation speed (the product of the number of times in the operating state at the target rotation speed and the second time) is equal to the predetermined time.

[0038] For example, if a preset time is T, the theoretical rotation speed of rotary drive device 110 is V0, the target rotation speed of rotary drive device 110 is V1, the duration of one operation of rotary drive device 110 at target rotation speed V1 is T1, and the duration of one stopping operation of rotary drive device 110 is T2, then the number of switching operations of rotary drive device 110 is N, where T = N(T1 + T2) and V0 = NV1 × T1 / T.

[0039] In the present embodiment, the controller 150 further controls the rotary drive device 110 to lift and lower the induction coil assembly 200 when the theoretical rotation speed is greater than a predetermined rotation speed, thereby operating the rotary drive device 110 at the theoretical rotation speed for a predetermined time. That is, in the present embodiment, when the theoretical rotation speed is greater than a critical rotation speed at which the rotary drive device 110 generates vibration, the rotary drive device 110 may be directly operated at the theoretical rotation speed and at a constant speed. In this way, the difficulty of control by the controller 150 can be reduced.

[0040] In the present embodiment, the lifting assembly 130 may include a screw 131 and a slider 132. The slider 132 is threadedly engaged with the screw 131, such that the slider 132 is driven by the rotating screw 131 and moves along the extension direction of the screw 131. The rotational driving device 110 is drivingly connected to the screw 131 and is used to rotate the screw 131. The slider 132 is connected to the induction coil assembly 200. In this manner, the screw 131 can be rotated by the rotational driving device 110, and the rotating screw 131 may further drive the slider 132 to move. As a result, the induction coil assembly 200 can be raised and lowered by the slider 132.

[0041] In another embodiment of the present disclosure, the lifting assembly 130 may include a cam and an ejector pin, and the rotary drive 110 may be drivingly connected to the cam to rotate the cam. The rotating cam can raise and lower the ejector pin. The raising and lowering ejector pin can then raise and lower the induction coil assembly 200.

[0042] In an embodiment of the present application, the drive system 100 of the induction coil assembly may further include a reducer 120 , and the rotary drive 110 may be drivingly connected to the screw 131 via the reducer 120 .

[0043] Referring to FIG. 2 , in an embodiment of the present application, the reducer 120 may include a first sub-reduction gear 121 and a second sub-reduction gear 122. The second sub-reduction gear 122 is a direction-switching reducer, i.e., the reducer 120 can switch between two opposite rotation directions, and the second sub-reduction gear 122 is provided with a second power output shaft. The rotation drive device 110 is drivably connected to the first sub-reduction gear 121, which in turn is drivably connected to the second sub-reduction gear 122. The second power output shaft is provided along the height direction of the induction coil assembly drive system 100, and the screw 131 is coaxially connected to the second power output shaft. In this manner, the screw 131 may be provided along the vertical direction, thereby making it possible to use the vertically provided screw 131 to drive the slider 132 threaded onto the screw 131 up and down, thereby easily raising and lowering the induction coil assembly 200 together with the slider 132.

[0044] Illustratively, in the embodiment of the present application, both the first sub-reduction mechanism 121 and the second sub-reduction mechanism 122 may be gear reducers.

[0045] In the present embodiment, the first sub-reduction gear 121 is provided with a first power output shaft, and the induction coil assembly drive system 100 may further include an electromagnetic brake 140. The electromagnetic brake 140 may include a magnetic fixing member 141 and a magnetic attraction member 142. The magnetic attraction member 142 is circumferentially positioned on and connected to the first power output shaft. When the electromagnetic brake 140 switches from a power-on state to a power-off state, the magnetic attraction member 142 and the magnetic fixing member 141 switch from a separated state to an attracted state. In this way, when it is necessary to stop the lifting or lowering of the induction coil assembly 200, the electromagnetic brake 140 can be turned off, thereby braking the first power output shaft of the first sub-reduction gear 121 using the electromagnetic brake 140 to stop the rotation of the first power output shaft and cut off the power transmitted to the induction coil assembly 200. When the induction coil assembly 200 needs to be raised or lowered, the electromagnetic brake 140 can be turned on, so that the attraction member 142 and the magnetic fixing member 141 are in a separated state. At this time, the electromagnetic brake 140 releases the first power output shaft of the first sub-reduction gear 121, allowing the first power output shaft to rotate normally and transmit power to the induction coil assembly 200.

[0046] In an embodiment of the present application, the first sub-reduction gear 121 may be provided with a first power input shaft, and the rotary drive device 110 may be drivably connected to the first power input shaft to transmit the power output by the rotary drive device 110 to the first sub-reduction gear 121.

[0047] In this embodiment, the second sub-reduction gear 122 may be provided with a second power input shaft, and the first power output shaft of the first sub-reduction gear 121 is operatively connected to the second power input shaft via a first coupling and a transmission shaft. In this way, the power output by the rotary drive device 110 can be transmitted to the second sub-reduction gear 122 via the first sub-reduction gear 121, the first coupling, and the transmission shaft.

[0048] Furthermore, the second power output shaft of the second sub-reduction device 122 may be drivably connected to the screw 131 via a second coupling. In this manner, the power output by the rotation drive device 110 can be transmitted to the screw 131. As a result, the rotating screw 131 can be used to drive the slider 132 threadedly engaged with the screw 131 up and down, thereby moving the induction coil assembly 200 up and down together with the slider 132.

[0049] 5, an electromagnetic brake 140 is provided on a transmission shaft connecting the first sub-reduction gear 121 and the second sub-reduction gear 122. A magnetic attraction member 142 of the electromagnetic brake 140 is connected to the transmission shaft via a key, and a magnetic fixing member 141 is fixedly connected to the housing of the second sub-reduction gear 122. When the system is powered on, the two parts, the magnetic attraction member 142 and the magnetic fixing member 141 of the electromagnetic brake 140, are disconnected, and the transmission shaft can transmit power to the screw 131 of the lifting assembly 130 by driving the rotation drive device 110.

[0050] When power is cut off from the system, the two parts of the electromagnetic brake 140, the magnetic attraction member 142 and the magnetic fixing member 141, are attracted to each other. The magnetic fixing member 141 is fixedly connected to the housing of the second sub-reduction gear 122, which in turn is fixedly connected to the fixing frame of the lifting assembly 130, which in turn is fixedly connected to the overall frame. This prevents the induction coil assembly 200 from instantly falling under its own weight when the brake power supply to the rotation drive device 110 is cut off and the brake no longer functions. This improves the safety of the induction coil assembly drive system 100.

[0051] Optionally, in another embodiment of the present application, if the induction coil assembly driving device includes an electromagnetic brake 140, the magnetically attractive member 142 of the electromagnetic brake 140 may be connected to the screw 131, and when the electromagnetic brake 140 switches from a power-on state to a power-off state, the magnetically attractive member 142 may switch from a detached state to an attracted state with respect to the magnetic fixing member 141 of the electromagnetic brake 140. In this way, the rotary driving device 110 can also prevent the induction coil assembly 200 from instantly falling under its own weight when the power supply to the brake is cut off and the brake no longer functions, thereby improving the safety of the induction coil assembly driving system 100.

[0052] 2 , optionally, in an embodiment of the present application, when the lifting assembly 130 may include a screw 131 and a slider 132, the driving system 100 of the induction coil assembly may further include a rotary encoder 160, which may be connected to the screw 131 and which is further electrically connected to the controller 150. In this manner, the rotary encoder 160 can be used to obtain the number of rotations of the screw 131, and thereby determine the movement speed of the slider 132 based on the number of rotations of the screw 131. Furthermore, the movement speed of the slider 132 detected by the rotary encoder 160 can be fed back to the controller 150, thereby enabling the controller 150 to perform closed-loop control of the movement speed of the slider, and improving the lifting drive accuracy for the induction coil assembly 200.

[0053] For convenience of explanation, the working principle of the driving system 100 for the induction coil assembly will be mainly described below by taking the example where the rotary drive device 110 is a servo motor and the controller 150 is a servo controller for the servo motor.

[0054] When the rotation drive device 110 is a servo motor and the controller 150 is a servo controller for the servo motor, the servo controller can control the rotation speed of the servo motor by sending pulse signals to the servo motor and controlling the pulse frequency and number of pulses, thereby controlling the lifting speed of the induction coil assembly 200.

[0055] For example, the pitch of the screw 131 of the lifting assembly 130 is defined as h, and the two-stage reduction ratio consisting of the first sub-reduction gear 121 and the second sub-reduction gear 122 is defined as i. In the initial stage of the crystal growth process, the average speed at which the induction coil assembly 200 is positioned at high speed is defined as V. 高 Then, the rotation speed of the rotary drive device 110 is R 高 =iV 高 / h. During the process, the average speed at which the induction coil assembly 200 is positioned at a slow speed should be adjusted to V 低min If the process requires that the rotation speed of the rotary drive device 110 is R 低min =iV 低min / h. The average speed at which the induction coil assembly 200 is positioned at a slow speed should be adjusted to V 低max If the process requires that the rotation speed of the rotary drive device 110 is R 低max =iV 低max It needs to be adjusted to / h.

[0056] In the actual process, V 低max and V 低min There may be a difference of 10 to 103 digits between V 高 and V 低min There may be a difference of multiples of 104 digits between V and V. 高 and V 低max There is a difference of ten orders of magnitude between R and R. 低min ~R 高 The difference between the two is a multiple of 104 digits.

[0057] Since the transmission system is not a completely rigid structure and the weight of the load induction coil assembly 200 is relatively large, there is a large inertia, and when the rotary drive device 110 is decelerated to a predetermined value at a low speed, elastic torsion of the transmission mechanism occurs between the motor and the load, and accidental vibration may occur in the induction coil assembly 200 on the load side. The vibration generated in the induction coil assembly 200 can be measured through experiments. In the embodiment of the present application, the critical rotation speed at which the rotary drive device 110 generates vibration is set as R 臨界 where R 臨界 The magnitude of V is related to the load weight of the transmission structure. As a result, the average speed at which the induction coil assembly 200 is raised and lowered to position is V 臨界 =R 臨界 h / i, and according to actual measurements, V 低min <V 臨界 <V 低max <V 高 and the corresponding rotation speed of the rotary drive device 110 is R 低min <R 臨界 <R 低max <R 高 is.

[0058] Using the solution according to the embodiment of the present application, the controller 150 is used to adjust the rotational drive 110 to alternate between moving and stationary, so that the rotational drive 110 drives the induction coil assembly 200 to generate V 低min ~V 高 Between 10 4 Positioning can be performed by lifting or lowering at high or low speed within the speed adjustment range, which is a multiple of the digit difference. The low speed adjustment range is V 低min ~V 低max Between these, 10 to 10 3 There is a difference of several orders of magnitude.

[0059] Illustratively, within a time T, the induction coil assembly 200 低min If the rotational drive 110 needs to be positioned at a low speed by an average speed of R, the time T can be divided into N sets of times T1 and T2, i.e., T=N(T1+T2). Within the time T1, the rotational drive 110 臨界During time T2, the rotary drive 110 is adjusted to remain stationary. The required average speed V at which the induction coil assembly 200 is positioned at low speed is 低min From R 低min Calculate the magnitude of R 低min Adjust the ratio of T1 to T2, and the magnitude of N and R1 based on the magnitude of R 低min =NT1R1 / T. As a result, the rotary drive device 110 低min The induction coil assembly 200 is driven to be positioned at a slow speed by a speed of .

[0060] In order to help those skilled in the art better understand the solutions provided by the embodiments of the present application, the following provides more specific examples for reference by those skilled in the art.

[0061] In one embodiment of the present application, the pitch h of the screw 131 of the lifting assembly 130 is 5 mm, the total reduction ratio i of the first sub-reduction gear 121 and the second sub-reduction gear 122 is 600, and the maximum rotation speed R of the rotation drive device 110 is 100. 高 is 6000 r / min. During the initial stage of the crystal growth process, the average speed at which the induction coil assembly 200 is positioned at high speed is up to V 高max =50mm / min.

[0062] As a result of the test, the rotation speed of the rotary drive device 110 was R 臨界 If the speed drops below 1 r / min=60 r / h, accidental vibrations may occur during the lifting and lowering process if the positioning speed of the induction coil assembly 200 drops to 0.5 mm / h.

[0063] The range of average speed at which the induction coil assembly 200 is positioned at high and low speeds is 1 to 30 mm / min, i.e., V 高 = 30 mm / min, V 低max If you need to set V = 1 mm / min 高 and V 低max In this case, the rotation speed range of the rotary drive device 110 is set to 120 to 3600 r / min, that is, R 高=3600r / min, R 低max =120r / min>R 臨界 In this way, the rotation drive device 110 can be operated at a constant speed according to the theoretical rotation number.

[0064] The range of average speed at which the induction coil assembly 200 is positioned at high and low speeds is 0.05 mm / h to 30 mm / min, i.e., V 高 = 30 mm / min, V 低min If you need to set V = 0.05 mm / h, 高 and V 低min There is a difference of 36,000 times. 低max and V 低min In this case, the rotation speed range of the rotary drive device 110 is set to 6 r / h to 3600 r / min, that is, R 高 =3600r / min, R 低min =6r / h <R 臨界 It is necessary to adjust to.

[0065] The rotation drive device 110 is R 低min In the process of rotating at a constant speed of V = 6 r / h and driving the induction coil assembly 200 up and down, accidental vibrations may occur. However, by adopting the solution according to the embodiment of the present application, the rotation drive device 110 is controlled to alternate between standing still and moving, and the average speed at which the rotation drive device 110 drives the induction coil assembly 200 to move up and down at a low speed and position it is set to V. 低min =0.05mm / h, V 低min =0.05mm / h.

[0066] The induction coil assembly 200 is positioned at a slow speed of 0.05 mm within 1 h, and T=1 h=60 min is divided into N sets of T1 and T2, and R1=2 r / min>R within the T1 time. 臨界 It can be understood that rotational driving device 110 is controlled so that it operates at a rotational speed of 100 rpm and comes to a standstill within time T2.

[0067] The average speed V at which the induction coil assembly 200 is positioned at the slow speed 低min=0.05mm / h, R 低min = 6 r / h. R1 = 2 r / min and R 低min = 6r / h, and the magnitudes of T1, T2, and N may be adjusted according to the actual needs of the crystal growth process. For example, T = 1h = 60min may be divided into N = 6 pairs of T1 and T2, where T1 = 0.5min, T2 = 9.5min, and R 低min =NT1R1 / T=0.1 r / min=6 r / h. As a result, the rotation drive device 110 低min The induction coil assembly 200 is driven to be positioned at a slow speed with an average speed of 0.05 mm / h.

[0068] In this embodiment, the induction coil assembly 200 is fixedly connected to the slider 132 of the lifting assembly 130 via an adapter plate, and the slider 132 lifts and positions the induction coil assembly 200. The rotary encoder 160 may be connected to the top end of the screw 131 of the lifting assembly 130 via a third coupling. The rotary encoder 160 detects the rotation angle of the screw 131 of the lifting assembly 130 to determine the lifting displacement and speed of the induction coil assembly 200 and feeds back the lifting displacement and speed signals of the induction coil assembly 200 to the controller 150. The controller 150 compares the displacement and speed fed back from the rotary encoder 160 with the adjusted and set displacement and speed, converts them into driving pulses through calculations, and sends them to the rotary drive device 110 for compensation. In this way, the positioning accuracy of the induction coil assembly drive system 100 can be significantly improved.

[0069] For example, within a certain period of time, V 低max The rotational drive unit 110 must drive the induction coil assembly 200 to slowly position it by 60 mm at an average speed of R = 1 mm / min. 低max= 120 r / min, the screw 131 of the lifting assembly 130 must rotate 7200 revolutions at an average rotation speed of 120 r / min, and the screw 131 of the lifting assembly 130 must rotate synchronously with the rotary drive device 110. As the rotation speed of the screw 131 reaches 7200 revolutions, the rotary encoder 160 detects its actual rotation speed in real time and feeds the detected data back to the controller 150. When the rotary drive device 110 is supposed to rotate 1200 revolutions, the rotation speed of the screw 131 actually detected by the rotary encoder 160 is 1199 revolutions, and the rotary encoder 160 feeds the detected data back to the controller 150, which compensates for the movement of the rotary drive device 110 to ensure the accuracy of the positioning precision.

[0070] An embodiment of the present application provides a method for controlling a drive system of an induction coil assembly, where the drive system of the induction coil assembly is any of the drive systems 100 of the induction coil assembly according to the embodiment of the present application.

[0071] Referring to FIG. 6, the control method for the driving system of the induction coil assembly according to the embodiment of the present application may include the following steps 310 to 330.

[0072] Step 310: Based on the target lifting and lowering speed of the induction coil assembly within a preset time, a theoretical rotation speed of the rotary drive device, which is the rotation speed at which the rotary drive device operates at a constant speed within a preset time, is determined.

[0073] Illustratively, in an embodiment of the present application, controller 150 may be used to determine a theoretical rotational speed of rotary drive device 110, which is the rotational speed at which rotary drive device 110 operates at a constant speed within a preset time, based on a target lifting speed of induction coil assembly 200 within a preset time.

[0074] Step 320: Determine whether the theoretical rotation speed of the rotary drive device is equal to or less than a preset rotation speed, which is the critical rotation speed at which the rotary drive device generates vibration.

[0075] Illustratively, in embodiments of the present application, controller 150 may be utilized to determine whether the theoretical rotational speed of rotary drive 110 is less than or equal to a predetermined rotational speed, which is a critical rotational speed at which rotary drive 110 generates vibrations.

[0076] Step 330: If the theoretical rotation speed of the rotary drive device is equal to or lower than the preset rotation speed, the rotary drive device is controlled to alternately stop operation and operate at a target rotation speed higher than the preset rotation speed within a preset time, so that the average rotation speed of the rotary drive device within the preset time is equal to the theoretical rotation speed.

[0077] For example, in an embodiment of the present application, when the theoretical rotational speed of rotary drive device 110 is equal to or less than a predetermined rotational speed, controller 150 may be used to control rotary drive device 110 to alternate between stopping operation and operating at a target rotational speed greater than the predetermined rotational speed within a predetermined time period, so that the average rotational speed of rotary drive device 110 within the predetermined time period is equal to the theoretical rotational speed.

[0078] Furthermore, in an embodiment of the present application, the control method for the driving system of the induction coil assembly may further include the following steps:

[0079] If the theoretical rotational speed is greater than the preset rotational speed, the rotational drive device is controlled to drive the induction coil assembly up and down, so that it operates at the theoretical rotational speed within the preset time.

[0080] Illustratively, in an embodiment of the present application, the controller 150 may be used to control the rotary drive 110 to operate at a theoretical number of revolutions within a preset time period and drive the induction coil assembly 200 up and down.

[0081] An embodiment of the present application provides a semiconductor processing apparatus including an induction coil assembly drive system 100, the induction coil assembly drive system 100 including a rotary drive device 110, a lifting assembly 130 to which the rotary drive device 110 is drivably connected, the lifting assembly 130 being drivably connected to the induction coil assembly 200 and used to drive the induction coil assembly 200 up and down, a processor, and a readable storage medium, wherein a program or instruction is stored in the readable storage medium, and the processor, when executing the program or instruction, controls the rotary drive device 110 to move up and down based on a target lifting speed of the induction coil assembly 200 within a predetermined time. and a controller 150 that implements a control method including the steps of determining a theoretical rotation speed of the rotary drive device 110, which is the rotation speed at which the rotary drive device 110 operates at a constant speed within a set time period; determining whether the theoretical rotation speed of the rotary drive device 110 is equal to or less than a preset rotation speed, which is a critical rotation speed at which the rotary drive device 110 generates vibration; and, if the theoretical rotation speed of the rotary drive device 110 is equal to or less than the preset rotation speed, controlling the rotary drive device 110 to alternately stop operation and operate at a target rotation speed higher than the preset rotation speed within the set time period, so as to make the average rotation speed of the rotary drive device 110 within the set time period equal to the theoretical rotation speed.

[0082] An embodiment of the present application provides a readable storage medium having stored thereon a program or instructions that, when executed by a processor, implements steps of a method for controlling a drive system of an induction coil assembly according to any of the embodiments of the present application.

[0083] In this manner, in the present embodiment, the rotary drive device 110 alternately stops and operates at the target rotation speed, so that the average rotation speed of the rotary drive device 110 within a predetermined time period is equal to the theoretical rotation speed, thereby ensuring that the lifting speed of the induction coil assembly 200 meets the requirements. Here, when the rotary drive device 110 operates at the target rotation speed, the target rotation speed may be greater than the critical rotation speed at which the rotary drive device 110 generates vibrations. In this way, the rotary drive device 110 can avoid generating vibrations, thereby improving the driving accuracy of the rotary drive device 110. Furthermore, the induction coil assembly 200 can be lifted and lowered more accurately by using the rotary drive device 110 and the lifting assembly 130.

[0084] It should be noted that, in this specification, relational terms such as first and second are used merely to distinguish one entity or operation from another, and do not necessarily require or imply that such an actual relationship or ordering exists between those entities or operations. Furthermore, the terms "comprise," "include," or any other variant thereof are intended to include a non-exclusive inclusion, such that a process, method, article, or device that includes a set of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or device.

[0085] Although embodiments of the present application have been shown and described, it will be understood by those skilled in the art that many changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the embodiments of the present application, and that the scope of the embodiments of the present application is defined by the appended claims and their equivalents. [Explanation of symbols]

[0086] 10 induction coils 20 Crystal manufacturing equipment 100 Induction coil assembly drive system 110 Rotational drive unit 120 Reducer 121 1st sub-reducer 122 2nd auxiliary reducer 130 Lifting Assembly 131 Screw 132 slider 140 Electromagnetic Brake 141 Magnetic fixing member 142 Magnetic attraction member 150 Controller 160 rotary encoder 200 Induction Coil Assembly

Claims

1. 1. A driving system for an induction coil assembly applied to a semiconductor process device, comprising: a rotary drive device; an elevating assembly to which the rotary drive device is drivably connected, the elevating assembly being drivably connected to an induction coil assembly for driving the induction coil assembly up and down; determining a theoretical rotation speed of the rotary drive device, which is a rotation speed at which the rotary drive device operates at a constant speed within the preset time, based on a target lifting speed of the induction coil assembly within the preset time; determining whether the theoretical rotation speed of the rotary drive device is equal to or less than a predetermined rotation speed, which is a critical rotation speed at which the rotary drive device generates vibrations; a controller configured to control the rotary drive device so that, when the theoretical rotational speed of the rotary drive device is equal to or lower than the preset rotational speed, the rotary drive device alternately stops operating and operates at a target rotational speed greater than the preset rotational speed within the preset time period, and to make an average rotational speed of the rotary drive device equal to the theoretical rotational speed within the preset time period.

2. The controller further configures, when the theoretical rotation speed of the rotary drive device is equal to or less than the preset rotation speed, to: the rotation drive device is switched to the stopped state a plurality of times, and the rotation drive device is maintained in the stopped state for a first time each time; the number of times the rotation drive device switches to an operating state at the target rotation speed is equal to the number of times the rotation drive device switches to a non-operating state, and the rotation drive device is used to control the rotation drive device so that it is maintained in the operating state at the target rotation speed for a second time each time; 2. The driving system of claim 1, wherein the sum of the accumulated time during which the rotary drive device is in the non-operating state and the accumulated time during which the rotary drive device is in the operating state at the target rotation speed is equal to the predetermined time.

3. 2. The driving system of claim 1, wherein when the theoretical rotation speed is greater than the preset rotation speed, the controller drives the induction coil assembly to move up and down, and further controls the rotation drive device to operate the induction coil assembly at the theoretical rotation speed within the preset time.

4. the lifting assembly includes a screw and a slider, and the slider is threadedly engaged with the screw, so that the slider is moved and driven by the rotating screw; 2. The driving system of claim 1, wherein the rotary drive device is drivingly connected to the screw and is used to rotate the screw, and the slider is connected to the induction coil assembly.

5. 5. The drive system for an induction coil assembly of claim 4, further comprising a rotary encoder connected to the screw and also electrically connected to the controller.

6. 5. The drive system of claim 4, wherein the drive system of the induction coil assembly further includes a reducer, and the rotary drive is drivingly connected to the screw through the reducer.

7. the reducer includes a first sub-reduction gear and a second sub-reduction gear, the second sub-reduction gear is a direction-changing reducer, and the second sub-reduction gear is provided with a second power output shaft; 7. The drive system of claim 6, wherein the rotation drive device is drivably connected to the first sub-reduction gear, the first sub-reduction gear is drivably connected to the second sub-reduction gear, the second power output shaft is provided along a height direction of the drive system of the induction coil assembly, and the screw is connected coaxially to the second power output shaft.

8. 8. The drive system for an induction coil assembly according to claim 7, wherein the first sub-reduction device is provided with a first power output shaft, and the drive system for the induction coil assembly further includes an electromagnetic brake, the electromagnetic brake including a magnetic fixing member and a magnetic attraction member, the magnetic attraction member being positioned on and connected to the first power output shaft in a circumferential direction, and when the electromagnetic brake is switched from a power-on state to a power-off state, the magnetic attraction member and the magnetic fixing member are switched from a separated state to an attracted state.

9. 1. A method for controlling a drive system of an induction coil assembly, comprising: The driving system for the induction coil assembly is the driving system for the induction coil assembly according to any one of claims 1 to 8, The method for controlling a drive system of the induction coil assembly includes: determining, using the controller, a theoretical rotation speed of the rotary drive device, which is a rotation speed at which the rotary drive device operates at a constant speed within a preset time, based on a target lifting speed of the induction coil assembly within the preset time; determining, using the controller, whether the theoretical rotational speed of the rotary drive device is equal to or less than a predetermined rotational speed that is a critical rotational speed at which the rotary drive device generates vibrations; and if the theoretical rotation speed of the rotary drive device is equal to or lower than the preset rotation speed, using the controller to control the rotary drive device so that, within the preset time, it alternately stops operating and operates at a target rotation speed that is higher than the preset rotation speed, thereby making an average rotation speed of the rotary drive device within the preset time equal to the theoretical rotation speed.

10. The method for controlling a drive system of the induction coil assembly includes:

10. The method of claim 9, further comprising: using the controller to control the rotation drive device to lift and lower the induction coil assembly at the theoretical rotation speed within the preset time period when the theoretical rotation speed is greater than the preset rotation speed.

11. a drive system for an induction coil assembly, the drive system for the induction coil assembly comprising: a rotary drive device; an elevating assembly to which the rotary drive device is drivably connected, the elevating assembly being drivably connected to an induction coil assembly for driving the induction coil assembly up and down; a processor and a readable storage medium, wherein a program or instruction is stored in the readable storage medium, and when the processor executes the program or the instruction, determining a theoretical rotation speed of the rotary drive device, which is a rotation speed at which the rotary drive device operates at a constant speed within the preset time, based on a target lifting speed of the induction coil assembly within the preset time; determining whether the theoretical rotational speed of the rotary drive device is equal to or less than a predetermined rotational speed, which is a critical rotational speed at which the rotary drive device generates vibrations; and a step of controlling the rotary drive device so that, when the theoretical rotational speed of the rotary drive device is equal to or lower than the preset rotational speed, the rotary drive device alternately stops operation and operates at a target rotational speed higher than the preset rotational speed within the preset time period, and making an average rotational speed of the rotary drive device within the preset time period equal to the theoretical rotational speed.

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