Rotary joint assembly and positioning device including rotary joint assembly and linear guide device

Abstract

The rotary joint assembly (DGA) includes a first portion (15), a second portion (70), and a coupling device (KE) having at least one solid joint (80A, 80B) connecting the first portion (15) and the second portion (70) so that the second portion is rotatable relative to the first portion about a rotation axis (DZ) extending in a first direction (Z), the first portion (15) and the second portion (70) each having an extension length perpendicular to the rotation axis (DZ). The second portion (70) is positioned relative to the first portion (15) and offset by a predetermined distance in the axial direction from the rotation axis (DZ). The coupling device (KE) includes a first solid joint (80A) and a second solid joint (80B), each of which has two end sections and a central section connected to the end sections via elastically deformable web portions, and each of the end sections of the solid joints (80A, 80B) is rigidly connected to the second part (70), and each of the central sections of the solid joints (80A, 80B) is rigidly connected to the first part (15).

Description

[Technical Field]

[0001] The present invention relates to a rotary joint assembly comprising a first part, a second part, and a coupling device comprising at least one solid joint connecting the first part and the second part, and a positioning device with a linear guide device including the rotary joint assembly. [Background technology]

[0002] Such a rotary joint assembly is typically designed such that the coupling device is configured to connect a first part and a second part via at least one solid joint, where the second part is rotatable relative to the first part about a rotation axis extending in a certain direction, and the first part and the second part each have an extension length perpendicular to the rotation axis. The rotation of the first part relative to the second part about the rotation axis is accompanied by elastic deformation of the solid joint connecting the first part and the second part.

[0003] A large number of different solid joints such as those described above are known, each of which comprises a fixed end and a flexible end, the fixed end and the flexible end being connected by a thin, spring-elastic web, the fixed end of the solid joint being designed to be connected to a first part of a rotary joint assembly, such as those described above, while the flexible end of the solid joint being designed to be connected to a second part of the rotary joint assembly.

[0004] The above-described rotary joint assembly is used, for example, in a positioning device for positioning a movable element, the positioning device being suitable for moving the movable element relative to a flat surface formed on a base along two different directions arranged at right angles to each other. This type of positioning device often has two different axes arranged at right angles to each other and parallel to the flat surface of the base, and in this case, one of the axes is further guided by a guide means provided on the other axis so that this one axis can move relative to the other axis in the longitudinal direction of the other axis. In this case, the solid joint of the above-described rotary joint assembly is used, for example, to connect a guide means to one of the axes so that the guide means can rotate relative to the one axis, for example, about a rotation axis extending substantially perpendicular to the flat surface of the base. In this case, the guide means is connected to one of the shafts by a solid joint so that the guide means can be rotated about a rotation axis within at least a specified angular range with respect to the one shaft, and therefore the spatial position of the guide means relative to the one shaft can be changed. This allows the guide means to always be held in a predetermined spatial position with respect to the other shaft, even if it is desired that the spatial position of one shaft relative to the other shaft be changed within a specified tolerance. In this case, the respective tolerance regarding the spatial position of one shaft relative to the other shaft can be compensated for by deformation of the solid joint.

[0005] Such positioning devices are used, for example, in the semiconductor industry, in particular to bring semiconductor wafers into various positions during process steps for manufacturing microstructures on the surface of the semiconductor wafer, or to position the semiconductor wafer relative to a measuring device for metrological purposes.

[0006] For industrial applications, for example, for carrying out process steps for the manufacture of microstructures or the inspection and / or metrological characterization of microstructures, there is a demand for positioning devices that are suitable for moving a movable element (e.g., a platform or table that accommodates an object to be positioned) in a first direction and a second direction (i.e., two-dimensionally relative to a predefined plane) at as high a speed as possible and, in some cases, with as high an acceleration as possible (e.g., in the range of 2 g or more), and in so doing, repeatedly and reproducibly positioning it in a predefined position each time with high precision (i.e., with precision in the sub-micrometer range).

[0007] To enable rapid and accurate positioning of the movable element in the first and second directions, such a positioning device often includes a base (e.g., a block of granite) with a flat guide surface arranged parallel to the first direction and parallel to the second direction, and a movement mechanism for moving the movable element relative to the flat guide surface of the base. In this case, the movement mechanism may, for example, have a first movement device in the form of a gantry structure, in particular, including a gantry beam arranged above the flat guide surface and extending in the second direction at a distance from the flat guide surface, and a gantry drive for moving the gantry beam in the first direction relative to the base. In this case, the gantry beam has a first end and a second end opposite the first end, and the gantry drive comprises two first linear axes extending in a first direction, each of the first linear axes including one linear drive, and the two first linear axes extending in the first direction are designed such that the linear drive of one of the two first linear axes is coupled to the first end of the gantry beam, and the linear drive of the other of the two first linear axes is coupled to the second end of the gantry beam.

[0008] To enable movement of the movable element in the first direction and the second direction, the movable element is supported on the gantry beam so that the movable element is linearly movable on the gantry beam in the second direction, and the gantry beam has a second linear axis extending in the second direction, the second linear axis comprising a linear drive coupled to the movable element that moves the movable element in the second direction.

[0009] In order to enable the movable element to be repeatedly and reproducibly positioned relative to the guide surface of the base in a predefined position each time with great precision (i.e., with precision in the nanometer range), it may be advantageous for many applications for the gantry beam of the first movement device to be supported on the base using air bearings when moving along the flat guide surface of the base, so that when the gantry beam moves relative to the base, the opposing surface areas of the gantry beam and the guide surface of the base that are moved relative to each other are each separated by air cushions in the area of ​​the air bearings, and as a result can be moved relative to each other without contact.

[0010] For many applications of such positioning devices, it is necessary to make such a positioning device "highly dynamic", so that it is suitable for moving the movable element with high accelerations (for example in the range of 2 g or more). For such highly dynamic positioning devices, the main requirement is that the positioning device, in particular the gantry beam of the first movement device, is deformed as little as possible due to mass inertia during high accelerations of the gantry beam by the linear drives of the two first linear axes in a first direction and of the movable element by the linear drive of the second linear axis in a second direction, and therefore should have as high a stiffness as possible with respect to deformations in the form of bending and / or torsion about the first and / or second direction.

[0011] For such positioning devices, in which the gantry beam is guided at its base by air bearings and which are highly dynamic, structures are known which have a "flat" structural configuration, in particular in order to maximize the dynamic torsional stiffness of the gantry beam (depending on its natural frequency), in which both linear drives of the first linear axis are arranged as close as possible to the height of the center of gravity of all elements of the positioning device which are moved by these linear drives. The above issue is related to the fact that the larger the vertical distance (i.e., perpendicular to the flat guide surface of the base) between the force vector acting on the gantry beam of the two first linear axis linear drive devices and the center of gravity of all members moved by the two first linear axis linear drive devices of the positioning device, the stronger the gantry beam will be twisted based on the mass inertia of the members moved by the two first linear axis linear drive devices of the positioning device during accelerated movement in the first direction, which undesirably extends the settling time required for the gantry beam to reach a stable position again after acceleration of the gantry beam in the first direction.

[0012] A highly dynamic positioning device of the above type, in which a gantry beam is guided by air bearings on a flat guide surface of a base, is known, for example, from Chinese Patent Application Publication No. 113977294. This positioning device is designed for precise positioning of a movable element in the form of a movable table for receiving workpieces (e.g., for micromachining of workpieces). The gantry beam of this positioning device is guided by two horizontal air bearings on a flat guide surface provided on the upper surface of the base, one of the two horizontal air bearings being located at a first end of the gantry beam so that the first end of the gantry beam can be supported or guided on the flat guide surface of the base when moving in a first direction, and the other of the two horizontal air bearings being located at a second end of the gantry beam so that the second end of the gantry beam can be supported or guided on the flat guide surface provided on the upper surface of the base when moving in the first direction. The movable table to be positioned is movable in a second direction (longitudinal direction of the gantry beam) by a linear drive of a second linear axis arranged on the gantry beam and is supported or guided by a flat guide surface provided on the upper surface of the base, also by a horizontal air bearing. To guide the gantry beam laterally during movement in the first direction, lateral guide surfaces are provided, which extend parallel to the first direction and perpendicular to the flat guide surface of the base. The lateral guide surfaces are arranged at approximately the same height as the gantry beam with respect to the flat guide surface provided on the upper surface of the base, and are disposed laterally beside the gantry beam, near one of the ends of the gantry beam and spaced apart from this end of the gantry beam. The gantry beam is guided on one of the lateral guide surfaces by a lateral air bearing which for this purpose is attached to one side of the gantry beam at said one end of the gantry beam which is located near the lateral guide surface.This arrangement of the lateral guide surfaces (i.e., laterally beside the gantry beam, near one of the ends of the gantry beam, and spaced apart from this end of the gantry beam) allows maximizing the dynamic bending stiffness of the gantry beam during acceleration of the moveable table in the second direction (corresponding to the longitudinal direction of the gantry beam). This is related to the fact that the greater the distance between the location where the gantry beam is guided by the lateral air bearing on this one lateral guide surface and the center of gravity of the moveable table disposed on the gantry beam, the greater the bending moment acting on the gantry beam or the lateral air bearing during acceleration of the moveable table in the second direction, which reduces the bending stiffness of the gantry beam and undesirably extends the settling time required for the gantry beam to reach a stable position again after acceleration of the moveable table in the second direction. To compensate for tolerances and different speeds of the linear drives of the two first linear axes during movement of the gantry beam in the first direction, the side air bearings are coupled to the one end of the gantry beam via solid couplings (located between the side air bearings and the one end of the gantry beam) so that the side air bearings can oscillate relative to the gantry beam.

[0013] The solid joint includes, among other things, a relatively thin first web portion extending substantially parallel to the second direction and perpendicular to the first direction and in a third direction extending perpendicular to the second direction. The first web portion is flexible such that the first web portion has low stiffness in bending about an axis extending in the third direction, thereby enabling rotation of the lateral air bearing relative to the gantry beam about the axis extending in the third direction. The solid joint further includes a relatively thin second web portion extending substantially parallel to the first direction and parallel to the second direction. This second web portion is flexible, such that the second web portion has a low stiffness in bending about an axis extending in the first direction, so that the second web portion of the solid joint allows rotation of the lateral air bearing relative to the gantry beam about an axis extending in the first direction.

[0014] The positioning device known from CN 113977294 has the disadvantage that it requires a relatively large space (with respect to the bottom surface parallel to the first direction and the second direction, on which the respective parts of the positioning device are spatially distributed and arranged) compared to the distance over which the movable element to be positioned can move relative to the flat guide surface of the base using the respective positioning device, which is due, inter alia, to the spatial arrangement of the two first linear axes and one second linear axis, and the spatial arrangement of the lateral air bearing guiding the gantry beam on one lateral guide surface, which is arranged next to and to the side of the gantry beam, near one of the two ends of the gantry beam and spaced apart from this one end of the gantry beam.

[0015] Furthermore, in the case of the positioning device known from CN 113977294, the aforementioned solid joints form a coupling between the lateral air bearings and the gantry beam, which coupling has a relatively low stiffness with respect to rotation of the lateral air bearings relative to the gantry beam about an axis extending in a first direction or about an axis extending in a second direction, and an even lower stiffness with respect to translation of the lateral air bearings relative to the gantry beam in the first or second direction. Therefore, the coupling formed by the solid joints between the lateral air bearings and the gantry beam will be deformed relatively greatly when a mechanical load is applied to the gantry beam, which will induce a rotation of the gantry beam relative to the lateral air bearings about an axis extending in the first or second direction or a translation of the gantry beam relative to the lateral air bearings in the first or second direction. The latter imposes limitations in highly dynamic applications where the gantry beam is subjected to mechanical loads such as those mentioned above, when it is desirable to move the movable table in the first and / or second direction with as high an acceleration as possible. [Prior art documents] [Patent documents]

[0016] [Patent Document 1] Chinese Patent Application Publication No. 113977294 Summary of the Invention [Problem to be solved by the invention]

[0017] The problem underlying the present invention is to avoid the above-mentioned drawbacks and to improve a rotary joint assembly comprising a first part, a second part and a coupling device with at least one solid joint connecting the first part and the second part in such a way that the second part is rotatable relative to the first part about a rotation axis extending in a first direction, so that the coupling device allows in particular a compact arrangement of the first part and the second part in a relatively small space requirement and further ensures a relatively high stiffness of the coupling device with respect to rotation of the first part relative to the second part about at least one direction extending perpendicular to the rotation axis.

[0018] It is further desirable to provide a positioning device that includes a rotary joint assembly in combination with a linear guide device. [Means for solving the problem]

[0019] This problem is solved by a rotary joint assembly having the features of claim 1 and a positioning device having the features of claim 13.

[0020] The rotary joint assembly includes a first part, a second part, and a coupling device having at least one solid joint connecting the first part and the second part so that the second part is rotatable relative to the first part about a rotation axis extending in a first direction, the first part and the second part each having an extension length perpendicular to the rotation axis, and the second part is positioned relative to the first part, offset axially by a predetermined distance from the rotation axis.

[0021] According to the invention, a connecting device comprises a first solid joint and a second solid joint, the first solid joint consisting of a first elongated solid body extending perpendicular to the first direction along a first plane parallel to the first direction and having a longitudinal axis disposed perpendicular to the first direction, the first elongated solid body comprising the following longitudinal sections disposed one after the other in the direction of the longitudinal axis of the first elongated solid body: a first end section forming a first end of the first elongated solid; a second end section forming a second end of the first elongated solid body, the second end section being located opposite the first end of the first elongated solid body in the direction of the longitudinal axis of the first elongated solid body; a central section disposed between the first end section and the second end section of the first elongated solid body; a first web portion disposed between the first end section and the central section of the first elongated solid body and coupled to the first end section and the central section; a second web portion coupled to the second end section and the central section of the first elongated solid, the second web portion being disposed between the second end section and the central section of the first elongated solid; and It has the following characteristics.

[0022] The second solid joint comprises a second elongated solid body, the second elongated solid body extending perpendicular to the first direction along a second plane parallel to the first direction and having a longitudinal axis disposed perpendicular to the first direction, the second elongated solid body comprising the following longitudinal sections disposed one after the other in the direction of the longitudinal axis of the second elongated solid body: a first end section forming a first end of a second elongated solid body; a second end section forming a second end of the second elongated solid body, the second end section being located opposite the first end of the second elongated solid body in the direction of the longitudinal axis of the second elongated solid body; a central section disposed between the first end and the second end of the second elongated solid; a first web portion disposed between the first end section and the central section of the second elongated solid body and coupled to the first end section and the central section; a second web portion coupled to the second end section and the central section of the first elongated solid, the second web portion being disposed between the second end section and the central section of the second elongated solid; and It has the following characteristics.

[0023] The first portion is coupled to the second portion via a first solid joint and a second solid joint such that a first end section of the first elongated solid body and a second end section of the first elongated solid body are rigidly connected to the first portion and a central section of the first elongated solid body is rigidly connected to the second portion, and such that a first end section of the second elongated solid body and a second end section of the second elongated solid body are rigidly connected to the second portion and a central section of the second elongated solid body is rigidly connected to the first portion, wherein the first plane and the second plane are inclined relative to each other such that the first plane and the second plane form a common intersection line extending parallel to the first direction.

[0024] The first web portion and the second web portion of the first elongated solid of the first solid joint have extension lengths perpendicular to the first plane that are smaller than the extension lengths perpendicular to the first plane of the first end section of the first elongated solid, the extension lengths perpendicular to the first plane of the second end section of the first elongated solid, and the extension lengths perpendicular to the first plane of the central section of the first elongated solid, so that the first web portion and the second web portion of the first elongated solid are elastically deformable and the central section of the first solid joint is movable relative to the first end section of the first solid joint and relative to the second end section of the first solid joint.

[0025] The first web portion and the second web portion of the second elongated solid body of the second solid joint have extension lengths perpendicular to the second plane that are smaller than the extension lengths perpendicular to the second plane of the first end section of the second elongated solid body, the extension lengths perpendicular to the second plane of the second end section of the second elongated solid body, and the extension lengths perpendicular to the second plane of the central section of the second elongated solid body, whereby the first web portion and the second web portion of the second elongated solid body are elastically deformable and the central section of the second solid joint is movable relative to the first end section of the second solid joint and relative to the second end section of the second solid joint.

[0026] The first and second parts are connected by a first solid joint and a second solid joint, where the second part is supported in the first part by the first and second solid joints so as to be rotatable about a common intersection line between the first and second planes.

[0027] The use of a solid joint allows for frictionless and play-free relative movement between the first and second parts of the rotary joint assembly and provides a simple possibility to precisely controllably and reproducibly vary the positioning of the first part relative to the second part.

[0028] For simplicity, the first solid joint and the second solid joint can be formed identically, in particular with respect to the shape of the solid joint and with respect to the material (e.g. steel) from which the solid joint is made.

[0029] The coupling device, consisting of the first and second solid joints, ensures a connection between the first and second parts such that the common intersection of the first and second planes forms an imaginary pivot axis about which the first part can pivot relative to the second part, and the spatial position of the pivot axis relative to the first or second part is therefore decisively determined by the spatial positions of the first and second planes.

[0030] The rotary joint assembly therefore offers the possibility to suitably select the spatial position of the pivot axis relative to the first part and the second part as required, in which case the spatial positions of the first solid joint and the second solid joint relative to each other and relative to the first part and the second part can be selected depending on what spatial position of the pivot axis relative to the first part and the second part is desired for a particular application of the rotary joint assembly, thereby realizing the desired spatial position of the pivot axis.

[0031] By displacing the second part relative to the first part in the axial direction with respect to the rotation axis by a predetermined distance, the first part and the second part are arranged one after the other in a row with respect to the rotation axis, thereby ensuring a space-saving arrangement of the first part and the second part in the radial direction with respect to the rotation axis with respect to the spatial extension of the rotary joint assembly.

[0032] The first and second solid couplings of the coupling device are connected to the first and second parts such that both the two end sections of the first solid coupling (or the first and second end sections) and the two end sections of the second solid coupling (or the first and second end sections) are rigidly connected to the second part of the rotary coupling assembly, while both the central section of the first solid coupling and the central section of the second solid coupling are rigidly connected to the first part of the rotary coupling assembly. This configuration of the coupling device has the effect that when the first part moves relative to the second part, not only must the central section of the first solid coupling move relative to the two end sections of the first solid coupling that are rigidly connected to the second part, but also the central section of the second solid coupling must move relative to the two end sections of the second solid coupling that are rigidly connected to the second part. The above-mentioned movement of the central section of the first solid coupling relative to both end sections of the first solid coupling rigidly connected to the second part assumes that both the first web section and the second web section of the first solid coupling are elastically deformed during the movement of the central section of the first solid coupling. Accordingly, the above-mentioned movement of the central section of the second solid coupling relative to the two end sections of the second solid coupling rigidly connected to the first part assumes that both the first web section and the second web section of the second solid coupling are elastically deformed during the movement of the central section of the second solid coupling.

[0033] A first solid joint of the coupling device is coupled to the first and second parts of the rotary joint assembly, where the first solid joint forms a coupling between the first and second parts that has a relatively small stiffness with respect to rotation of the first part relative to the second part about a first direction and with respect to translation of the first part relative to the second part perpendicular to the first plane (compared to the stiffness of the coupling between the first and second parts with respect to translation of the first part relative to the second part in a direction parallel to the first plane).

[0034] Correspondingly, a second solid joint of the coupling device is coupled to the first and second parts of the rotary joint assembly, where the second solid joint forms a coupling between the first and second parts that has a relatively small stiffness with respect to rotation of the first part relative to the second part about the first direction and with respect to translation of the first part relative to the second part perpendicular to the second plane (compared to the stiffness of the coupling between the first and second parts with respect to translation of the first part relative to the second part in a direction parallel to the second plane).

[0035] The arrangement of the first solid joint and the second solid joint desirably combines with one another to ensure that the first part is pivotally arranged on the second part, and in this case the arrangement of the first solid joint and the second solid joint combines with one another to have as little rotational stiffness as possible with respect to rotation of the first part relative to the second part about a common intersection line (extending in the first direction) of the first plane and the second plane.

[0036] The stiffness of each of the coupled systems formed by the first part, the second part, the first solid joint and the second solid joint with respect to rotation of the first part relative to the second part about the first direction and with respect to translation of the first part relative to the second part along an axis extending perpendicular to the first direction or with respect to rotation of the first part relative to the second part about an axis extending perpendicular to the first direction depends on the arrangement of the first solid joint and the second solid joint relative to each other, in particular the magnitude of the tilt of the first plane with respect to the second plane. Thus, the magnitude of the tilt of the first plane with respect to the second plane can be selected appropriately to select the respective stiffnesses as needed.

[0037] The first solid coupling and the second solid coupling may be configured such that the spatial extension of the first solid coupling and the spatial extension of the second solid coupling are relatively small compared to the spatial extension of the first part and the second part of the rotary coupling assembly, and thus the first solid coupling and the second solid coupling can be provided such that the arrangement of the first solid coupling and the second solid coupling occupies a relatively small space, thus forming a compact connection between the first part and the second part of the rotary coupling assembly.

[0038] A rotational stiffness as small as possible of the arrangement of the combined first and second solid couplings with respect to a rotation of the first part relative to the second part about the first direction further has the advantage that the first part and the second part together form a system connected by the first and second solid couplings, which system has a low natural frequency (e.g. in the range below 30 Hz) with respect to a rotation of the first part relative to the second part about the first direction. A low natural frequency is in this case advantageous with respect to the dynamic behavior of the rotary coupling during accelerated movements of the rotary coupling assembly in a second and / or third direction perpendicular to the first direction, for example with respect to the control of a drive device serving to move the rotary coupling assembly in the second and / or third direction perpendicular to the first direction. This advantage is important, for example, in applications where one part of a rotary joint assembly (i.e., the first part or alternatively the second part of the rotary joint assembly) is guided using a linear guide such that the part is linearly movable in a second direction perpendicular to the first direction, and the respective other part (i.e., the second part or alternatively the first part of the rotary joint assembly) is coupled using multiple drives that move the respective other part in the second direction. In this case, a rotational stiffness as small as possible of the arrangement of the first solid joint and the second solid joint is advantageous, because in this case the multiple drives do not need to drive the respective other parts perfectly synchronously, but can instead be controlled independently of each other within specified tolerances.

[0039] On the other hand, with regard to the dynamic behavior of the rotary joint assembly during accelerated movements of the rotary joint assembly in a second and / or third direction perpendicular to the first direction, it is advantageous for the first part and the second part to together form a system connected by a first solid joint and a second solid joint, which system has a high stiffness with respect to translation of the first part relative to the second part in the first direction and / or the second direction and / or the third direction and with respect to rotation of the first part relative to the second part about the second and / or the third direction perpendicular to the first direction, respectively, during accelerated movements of the first part and the second part in the second and / or the third direction perpendicular to the first direction. The high stiffness of the coupled system formed by the first part, the second part, the first solid joint and the second solid joint with respect to translation of the first part relative to the second part in the first direction and / or the second direction and / or the third direction and with respect to rotation of the first part relative to the second part about the second direction and / or the third direction perpendicular to the first direction allows for rapid control of the drive device for moving the rotary joint assembly about the second direction and / or the third direction perpendicular to the first direction, improves the vibration behavior of the first part or the second part during accelerated movement of the first part and / or the second part in the first direction and about accelerated movement of the movable element in the second direction and / or the third direction perpendicular to the first direction, and allows for greater accuracy in positioning of the rotary joint assembly using the drive device.

[0040] In one embodiment of the rotary joint assembly, the first solid joint or the second solid joint is configured such that the first solid joint is symmetrically formed with respect to a first plane in an undeformed state of the first solid joint, and / or the second solid joint is symmetrically formed with respect to a second plane in an undeformed state of the second solid joint.

[0041] The symmetrical construction of the first solid joint or the second solid joint allows for a relatively simple manufacture and a compact arrangement of the respective solid joint with small space requirements.

[0042] The arrangement of the first and second solid couplings has the technical effect that the second part is held in a stationary position with respect to the first part by the first and second solid couplings, wherein the second part is movable out of the stationary position by pivoting relative to the first part about the common intersection of the first and second planes. When the first and second solid couplings are in their undeformed states, respectively, the second part is in a stationary position whereby the respective central sections of these solid couplings are held in a stable position relative to the first and second end sections of the first or second solid coupling, respectively. When the second portion is moved out of the rest position by rotation relative to the first portion, the web portions of the first solid joint and the second solid joint are elastically deformed, whereby the first solid joint and the second solid joint together generate a return force acting on the second portion that acts against movement of the second portion from the rest position.

[0043] Another embodiment of the rotary joint assembly is configured such that a first end section of a first elongated solid of the first solid joint has an extension length in a first direction greater than an extension length perpendicular to a first plane of the first end section of the first elongated solid, and / or a second end section of the first elongated solid of the first solid joint has an extension length in a first direction greater than an extension length perpendicular to a first plane of the second end section of the first elongated solid, and / or a central section of the first elongated solid of the first solid joint has an extension length in a first direction greater than an extension length perpendicular to a first plane of the second end section of the first elongated solid. The central section of the solid body has a length of extension perpendicular to the first plane that is greater than the length of extension perpendicular to the first plane, and / or the first web portion of the first elongated solid body of the first solid joint has a length of extension perpendicular to the first plane that is greater than the length of extension perpendicular to the first plane of the first web portion of the first elongated solid body, and / or the second web portion of the first elongated solid body of the first solid joint has a length of extension perpendicular to the first plane that is greater than the length of extension perpendicular to the first plane of the second web portion of the first elongated solid body. and / or a first end section of the second elongated solid body of the second solid coupling has an extension length in the first direction greater than an extension length perpendicular to the second plane of the first end section of the second elongated solid body, and / or a second end section of the second elongated solid body of the second solid coupling has an extension length in the first direction greater than an extension length perpendicular to the second plane of the second end section of the second elongated solid body, and / or a central section of the second elongated solid body of the second solid coupling has an extension length in the first direction greater than an extension length perpendicular to the second plane of the second end section of the second elongated solid body. The central section has a length of extension perpendicular to the second plane that is greater than the length of extension perpendicular to the second plane, and / or the first web portion of the second elongated solid of the second solid joint has a length of extension perpendicular to the second plane that is greater than the length of extension perpendicular to the second plane of the first web portion of the second elongated solid of the second solid joint, and / or the second web portion of the second elongated solid of the second solid joint has a length of extension perpendicular to the second plane that is greater than the length of extension perpendicular to the second plane of the second web portion of the second elongated solid of the second solid joint.

[0044] By virtue of the aforementioned configuration of the first solid joint or the second solid joint, the coupling device forms a connection between the first and second parts of the rotary joint assembly, which connection has a relatively high stiffness with respect to translation of the first part relative to the second part in a first direction (coincident with the rotation axis of the rotary joint assembly) and with respect to rotation of the first part relative to the second part about an axis oriented perpendicular to the first direction.

[0045] Another embodiment of the rotary joint assembly is characterized in that the first solid joint in its undeformed state and the second solid joint in its undeformed state are arranged relative to each other such that the first solid joint and the second solid joint are symmetrically arranged about a third plane extending parallel to the first direction, and wherein a common intersection line of the first plane and the second plane extends within the third plane.

[0046] In this arrangement of the first solid joint and the second solid joint, the first part and the second part form a system connected by the coupling device, which system has a particularly high stiffness with respect to translation of the first part relative to the second part along an axis extending parallel to the third plane and perpendicular to the first direction.

[0047] Furthermore, it is achieved that, upon translation of the first part relative to the second part along an axis extending parallel to the third plane and perpendicular to the first direction, the first solid joint and the second solid joint are each subjected to the same mechanical load and corresponding deformation. This prevents the coupling device from allowing rotation of the first part relative to the second part about the first direction when a mechanical load is applied that induces translation of the first part relative to the second part parallel to the third plane and perpendicular to the first direction, and therefore makes it possible to stabilize the spatial position of the first part relative to the second part when, for example, a dynamic load that induces translation of the first part relative to the second part as described above is applied to the rotary joint assembly.

[0048] Some embodiments of the rotary joint assembly are configured such that the first solid joint is disposed relative to the second solid joint such that the first solid joint has a spacing relative to the second solid joint perpendicular to the first direction, which spacing can be appropriately selected, for example, to allow the first and second solid joints to be easily coupled to the first and second parts of the rotary joint assembly (e.g., depending on the shape of the first or second part, respectively), and further to define the spatial location of the rotation axis of the rotary joint assembly relative to the first and second parts, as needed.

[0049] In one embodiment of the rotary joint assembly, the second part has a first elongated cavity extending along a first plane in a first direction, and the first solid joint is disposed within the first elongated cavity such that the first solid joint extends through the first elongated cavity in the first direction over at least a portion of its length in the first direction. Correspondingly, the second part may have a second elongated cavity extending along a second plane in the first direction, and the second solid joint is disposed within the second elongated cavity such that the two solid joints extend through the second elongated cavity in the first direction over at least a portion of their length in the first direction.

[0050] This configuration of the second part offers the possibility of incorporating the first and / or second solid coupling into the second part, so that the first and / or second solid coupling do not protrude from the respective cavity in the first direction, or at most protrude only a relatively small distance, whereby the first and second parts can be connected to one another via the first and / or second solid coupling in such a way that the rotary joint assembly as a whole has a relatively small construction height in the direction of the rotation axis.

[0051] In a refinement of the aforementioned embodiment, it may be provided that the first elongated cavity is arranged along a first plane with the longitudinal axis of the first elongated cavity being parallel to the first plane and perpendicular to the first direction, and that the first elongated cavity extends laterally with respect to the first plane as defined by two opposing side walls of the second part, which side walls each extend parallel to the first plane in the first direction and are spaced apart from each other in a direction perpendicular to the first plane. Correspondingly, it may be provided that the second elongated cavity is arranged along the second plane with its longitudinal axis parallel to the second plane and perpendicular to the first direction, and that the second elongated cavity extends laterally with respect to the second plane as defined by two opposing side walls of the second part, which side walls each extend parallel to the second plane in the first direction (Z) and are spaced apart from each other in a direction perpendicular to the second plane. The first and second cavity are each easy to manufacture and allow for a simple and space-saving integration of the first or second solid coupling into the second part.

[0052] In another refinement of the aforementioned embodiment, it may be provided that the two opposing side walls of the second part, which laterally define the first elongated cavity with respect to the first plane, are shaped to surround the first and second end sections of the first solid coupling, whereby the first and second end sections of the first solid coupling are form-fittingly connected to the second part.

[0053] The aforementioned shape of the side wall of the first elongated cavity makes it possible to easily realize a rigid connection between the first end section of the first solid coupling and the second part, and a rigid connection between the second end section of the first solid coupling and the second part. The side wall of the first elongated cavity can be shaped, for example, so that the first end section of the first solid coupling and the second end section of the first solid coupling are held in a form-locking manner between the side wall of the first elongated cavity over the entire extension length of the first end section or the second end section, respectively, in the direction of the rotation axis of the rotary coupling assembly. In this way, the first end section and the second end section of the first solid coupling can be fixedly connected to the second part so that they cannot be deformed during movement of the first part relative to the second part.

[0054] Two opposing side walls of the second part, which define the second elongated cavity laterally with respect to the second plane, may be shaped to surround the first and second end sections of the second solid coupling, thereby connecting the first and second end sections of the second solid coupling to the second part in a form-fitting manner.

[0055] The aforementioned shape of the side wall of the second elongated cavity makes it easy to realize a rigid connection between the first end section of the second solid coupling and the second part, and between the second end section of the second solid coupling and the second part. The side wall of the second elongated cavity can be shaped, for example, so that the first end section of the second solid coupling and the second end section of the second solid coupling are positively held between the side wall of the second elongated cavity over the entire extension length of the first end section or the second end section, respectively, in the direction of the rotation axis of the rotary coupling assembly. In this way, the first end section and the second end section of the second solid coupling can be fixedly connected to the second part so that they cannot be deformed during movement of the first part relative to the second part.

[0056] The rotary joint assembly may include one or more stop elements acting as mechanical stops to limit the rotation of the second part relative to the first part about the rotation axis. To this end, the second part may have, for example, at least one stop element arranged such that, when the second part is arranged in a stationary position relative to the first part, the stop element is spaced from the central section of the first solid joint and can contact the central section of the first solid joint upon rotation of the second part through a predetermined maximum rotation angle about the common intersection line of the first and second planes, whereby the central section of the first solid joint forms a mechanical stop for the second part that limits the rotation of the second part. Alternatively or additionally, the carrier may have at least one stop element arranged such that, when the second part is arranged in a stationary position relative to the first part, the stop element is spaced from the central section of the second solid joint and can contact the central section of the second solid joint upon rotation of the second part through a predetermined maximum rotation angle about a common intersection line of the first plane and the second plane, thereby forming a mechanical stop for the second part that limits rotation of the second part, thereby avoiding mechanical overload of the first solid joint and the second solid joint.

[0057] In another refinement of the aforementioned embodiment, it may be provided that the two opposing side walls of the second part, which laterally define the first elongated cavity with respect to the first plane, are shaped to surround the central section of the first solid joint, and that the two opposing side walls of the second part, which laterally define the first elongated cavity with respect to the first plane, have a distance therebetween perpendicular to the first plane that is greater than an extension length perpendicular to the first plane of the central section of the first solid joint, whereby the central section of the first solid joint is movable relative to the second part.

[0058] The aforementioned shape of the side walls of the first elongated cavity allows the first and second parts of the rotary joint assembly to be rotated relative to each other about the pivot axis, as long as the central section of the first solid joint does not collide with one of the two opposing side walls of the second part that laterally define the first elongated cavity with respect to the first plane during rotation of the first part relative to the second part. Thus, each of the two opposing side walls of the second part that laterally define the first elongated cavity with respect to the first plane forms a mechanical stop for the central section of the first solid joint and thereby limits the rotation angle of the first part relative to the second part about the pivot axis of the rotary joint assembly. Additionally or alternatively, the two opposing side walls of the second part, which laterally define the second elongated cavity with respect to the second plane, may be shaped to surround the central section of the second solid joint, and in this case, the two opposing side walls of the second part, which laterally define the second cavity with respect to the second plane, may have a distance perpendicular to the second plane that is greater than the extension length perpendicular to the second plane of the central section of the second solid joint, thereby providing that the central section of the second solid joint is movable relative to the second part.

[0059] The aforementioned shape of the side walls of the first elongated cavity or the second elongated cavity allows the first and second parts of the rotary joint assembly to be rotated relative to each other about the pivot axis, as long as the central section of the second solid joint does not collide with one of the two opposing side walls of the second part that laterally define the second elongated cavity with respect to the second plane during rotation of the first part relative to the second part. Thus, each of the two opposing side walls of the second part that laterally define the second elongated cavity with respect to the first plane forms a mechanical stop for the central section of the second solid joint and thereby limits the rotation angle of the first part relative to the second part about the pivot axis of the rotary joint assembly.

[0060] An embodiment of the rotary joint assembly is configured such that the central section of the first solid joint is movable relative to the second part in a translational movement perpendicular to the first plane and / or the central section of the first solid joint is movable relative to the second part in a rotational movement about a rotation axis extending in the first direction. Similarly, it may be provided that the central section of the second solid joint is movable relative to the second part in a translational movement perpendicular to the second plane and / or the central section of the second solid joint is movable relative to the second part in a rotational movement about a rotation axis extending in the first direction. The aforementioned movement of the central sections of the first solid joint and the second solid joint ensures that the first part of the rotary joint assembly is rotatable relative to the second part about the rotation axis of the rotary joint assembly extending in the first direction.

[0061] One embodiment of the rotary joint assembly is configured such that the first plane and the second plane are tilted relative to one another such that the first plane and the second plane intersect at a common intersection line at an angle greater than or equal to 10° and less than or equal to 120°.

[0062] In this embodiment, the coupled system formed from the first portion, the second portion, the first solid joint, and the second solid joint has a relatively low stiffness with respect to rotation of the first portion relative to the second portion about the first direction, and a relatively high stiffness with respect to translation of the first portion relative to the second portion along an axis extending perpendicular to the first direction or rotation of the first portion relative to the second portion about an axis extending perpendicular to the first direction that is sufficient for many applications.

[0063] Correspondingly, the coupled system formed by the first portion, the second portion, the first solid coupling, and the second solid coupling has a relatively low natural frequency for vibration of the coupled system due to rotation of the first portion relative to the second portion about the first direction, and a relatively high natural frequency for vibration of the coupled system due to translation of the first portion relative to the second portion along an axis extending perpendicular to the first direction or rotation of the first portion relative to the second portion about an axis extending perpendicular to the first direction, which is advantageous in terms of transient response behavior of the rotary coupling assembly in dynamic applications where the rotary coupling assembly as a whole must be moved at large accelerations.

[0064] In some embodiments, the first and second planes may be formed so that they are tilted relative to one another such that they intersect at a common intersection at an angle greater than or equal to 30° and less than or equal to 90°.

[0065] In this embodiment, it is ensured that the connected system formed by the first part, the second part, the first solid joint and the second solid joint has a particularly high stiffness with respect to translation of the first part relative to the second part along an axis extending perpendicular to the first direction or with respect to rotation of the first part relative to the second part about an axis extending perpendicular to the first direction.

[0066] The rotary joint assembly according to the invention can be advantageously used as an integral part of a positioning device for positioning a movable element, for example so that the rotary joint assembly serves as a support structure for the movable element to be positioned.

[0067] A corresponding positioning device may, for example, comprise a rotary joint assembly according to the invention and a linear guide device for guiding a second part of the rotary joint assembly, the second part of the rotary joint assembly being guided by means of the linear guide device, such that the second part is linearly movable in a second direction extending perpendicular to the first direction. By guiding the second part of the rotary joint assembly by means of the linear guide device, the rotary joint assembly as a whole can be guided and moved in the second direction, and the structure of the rotary joint assembly allows the first part to be rotatable relative to the second part about a rotation axis extending in the first direction.

[0068] Alternatively, the positioning device may comprise a rotary joint assembly according to the present invention and a linear guide device for guiding a first portion of the rotary joint assembly, the first portion of the rotary joint assembly being guided using the linear guide device such that the first portion is linearly movable in a second direction extending perpendicular to the first direction.

[0069] The linear guide device may be realized using known techniques, for example, the second part may be guided in a guide surface or guide rail by means of rolling elements, or alternatively, the second part may be guided in a guide surface by means of a plain bearing or an air bearing.

[0070] One embodiment of the positioning device is configured so that the positioning device includes at least one linear drive coupled to the first part of the rotary joint assembly for moving the first part in the second direction. There may be multiple linear drives coupled to the first part of the rotary joint assembly for moving the first part, and these linear drives may be spatially distributed and independently controllable. For example, linear motors are suitable as linear drives of the positioning device. The positioning device may be configured, for example, so that each linear drive is a linear motor. Other structural forms of linear drives, such as linear drives with threaded spindles or ball screw or roller screw mechanisms, are also suitable in principle.

[0071] A refinement of the aforementioned embodiment of the positioning device includes a base with at least one flat guide surface and / or a guide beam with at least one flat guide surface, and the second part is guided on the flat guide surface of the base and / or the flat guide surface of the guide beam by means of at least one air bearing. The rotary joint assembly ensures that the second part, together with the at least one air bearing, can rotate relative to the first part about a rotation axis extending in the first direction. This allows the spatial position of the air bearing relative to the first part to be changed, for example, to compensate for tolerances in the arrangement of the first part relative to the flat guide surface or guide beam. This prevents the air bearing from contacting and damaging the flat guide surface or guide beam when the rotary joint assembly moves in the second direction.

[0072] An embodiment of the positioning device may alternatively be designed such that the first portion is guided using a linear guide device and there is at least one linear drive device coupled to the second portion of the rotary joint assembly for moving the second portion in a second direction.

[0073] In a refinement of this embodiment of the positioning device, the linear guide device may include a base with at least one flat guide surface and / or a guide beam with at least one flat guide surface, and the first part may be guided on the flat guide surface of the base and / or the flat guide surface of the guide beam using at least one air bearing.

[0074] Further details of the invention, and in particular exemplary embodiments of a rotary joint assembly and positioning device according to the invention, are described below with reference to the accompanying drawings. [Brief explanation of the drawings]

[0075] [Figure 1] FIG. 1 is an exploded perspective view of a rotary joint assembly including a first part, a second part, and a coupling device connecting the first part and the second part, such that the second part is rotatable about a rotation axis DZ relative to the first part, and the coupling device includes an arrangement of two solid joints, in which the individual parts of the rotary joint assembly are separated from each other in the direction of the rotation axis DZ. [Figure 2] 2 is a side view of the rotary joint assembly shown in FIG. 1, taken in a direction extending perpendicular to the rotation axis DZ. [Figure 3] 2 is a plan view of the rotary joint assembly DGA shown in FIG. 1 as seen from above in a direction extending along the rotation axis DZ. [Figure 4A] FIG. 2 is a perspective view showing one of the two solid joints shown in FIG. 1. [Figure 4B] 4B is a plan view of the solid joint shown in FIG. 4A as seen from above in the direction of the rotation axis DZ. [Figure 4C] 4C is a side view of the solid joint shown in FIG. 4B in a direction perpendicular to the plane of symmetry ME1 or ME2 shown in FIG. 4B. [Figure 5A]4B is a plan view from above of the solid joint shown in FIG. 4A in the undeformed state, looking in the direction of the pivot axis DZ, illustrating two degrees of freedom of movement of the central section of the solid joint relative to the first and second end sections of the solid joint; [Figure 5B] FIG. 5B is a plan view of the solid joint shown in FIG. 5A viewed from above in the direction of the pivot axis DZ, the solid joint in a deformed state after the central section of the solid joint has moved relative to the first and second end sections of the solid joint according to a first degree of movement; [Figure 5C] FIG. 5B is a plan view of the solid joint shown in FIG. 5A viewed from above in the direction of the pivot axis DZ, the solid joint in a deformed state after the central section of the solid joint has moved relative to the first and second end sections of the solid joint according to a second degree of movement; [Figure 6A] 1 is a perspective view of a conventional solid joint according to the prior art; [Figure 6B] 6B is a plan view of the conventional solid joint shown in FIG. 6A in an undeformed state, viewed from above in the direction of axis Z. FIG. [Figure 6C] 6B is a plan view of the conventional solid joint shown in FIG. 6A in a deformed state, viewed from above in the direction of axis Z. FIG. [Figure 7] 2 is a plan view of the second part of the rotary joint assembly shown in FIG. 1 as seen from above in a direction Z extending along the rotation axis DZ. [Figure 8] 2 is an enlarged plan view of a second portion of the rotary joint assembly shown in FIG. 1, viewed from above in a direction Z extending along the rotation axis DZ. [Figure 9] 2 shows a positioning device comprising the rotary joint assembly shown in FIG. 1 and a linear guide device for guiding a second part of the rotary joint assembly; [Figure 10] FIG. 10 is an exploded perspective view showing a portion of the positioning device shown in FIG. 9. DETAILED DESCRIPTION OF THE INVENTION

[0076] Unless otherwise noted, the same reference numerals are used in the figures to refer to the same elements.

[0077] Figures 1 to 3 show a rotary joint assembly DGA according to the present invention in different views from different viewpoints. Figure 1 shows the rotary joint assembly DGA in a perspective view related to the coordinate system shown in Figure 1 having three axes X, Y, and Z (X-axis, Y-axis, Z-axis) (which are orthogonal relative to one another), and Figures 2 and 3 show the same rotary joint assembly DGA from different viewpoints, in particular a (side) view perpendicular to the Z-axis (in this example, along the X-axis) and a plan view along the Z-axis.

[0078] The rotary joint assembly DGA includes a first part 15, a second part 70, and a coupling device KE that connects the first part 15 and the second part 15 such that the second part is rotatable relative to the first part about a rotation axis DZ extending in a first direction Z. The structure and function of the coupling device will be described in more detail below.

[0079] In this example, the first portion 15 and the second portion 70 each have a rectangular parallelepiped shape. Alternatively, the first portion 15 and the second portion 70 may each be a component having essentially any shape.

[0080] The first part 15 and the second part 70 each have an extension length perpendicular to the pivot axis DZ, and the second part 70 is positioned relative to the first part 15, offset axially by a predetermined distance from the pivot axis DZ.

[0081] In this example, the coupling device KE has a first solid joint 80A and a second solid joint 80B.

[0082] Figure 1 shows the rotary joint assembly DGA in an exploded view, in which all of its individual parts - in this case the first part 15, the second part 70 and the two solid joints 80A and 80B of the coupling device KE - are separated from one another in the direction of the Z axis. In contrast, Figure 2 shows the rotary joint assembly DGA in an assembled state, in which the first part 15 and the second part 70 are connected to one another via the two solid joints 80A, 80B of the coupling device KE, as will be explained in more detail below.

[0083] As shown schematically in Figures 1 and 3, the second part 70 has a first elongated cavity 71A and a second elongated cavity 71B formed on the side facing the first part 15, and these elongated cavities 71A, 71B serve to accommodate the first solid coupling 80A and the second solid coupling 80B, so that (when the rotary coupling assembly DGA is assembled) at least one section of the first solid coupling 80A extends into the first elongated cavity 71A, and at least one section of the second solid coupling 80B extends into the second elongated cavity 71B.

[0084] As can be seen from FIGS. 1 to 3 and 4A, the first solid joint 80A comprises a first elongated solid body, which extends perpendicular to the first direction Z along a plane ME1 extending parallel to the first direction Z and has a longitudinal axis disposed perpendicular to the first direction Z, and which comprises the following longitudinal sections disposed one after the other in the direction of the longitudinal axis of the first elongated solid body: - a first end section E1 forming a first end of the first elongated solid body; a second end section E2 forming a second end of the first elongated solid body, located opposite the first end of the first elongated solid body in the direction of the longitudinal axis of the first elongated solid body; - a central section F arranged between the first and second end sections of the first elongated solid body; a first web portion S1 disposed between the first end section E1 and the central section F of the first elongated solid body and connected to the first end section E1 and the central section F; and a second web portion S2 arranged between the second end section E2 and the central section F of the first elongated solid body and connected to the second end section E2 and the central section F of the first elongated solid body; It has the following characteristics.

[0085] Correspondingly, the second solid joint 80B comprises a second elongated solid body, which extends perpendicular to the first direction Z along a second plane ME2 parallel to the first direction Z and has a longitudinal axis disposed perpendicular to the first direction Z, and which comprises the following longitudinal sections disposed one after the other in the direction of the longitudinal axis of the second elongated solid body: - a first end section E1 forming a first end of a second elongated solid body; a second end section E2 forming a second end of the second elongated solid body, located opposite the first end of the second elongated solid body in the direction of the longitudinal axis of the second elongated solid body; - a central section F arranged between the first and second end sections of the second elongated solid body; a first web portion S1 disposed between the first end section E1 and the central section F of the second elongated solid body and connected to the first end section E1 and the central section F; and a second web portion S2 arranged between the second end section E2 and the central section F of the second elongated solid body and connected to the second end section E2 and the central section F of the first elongated solid body; (Figs. 1 to 3 and 4).

[0086] The first portion 70 is coupled to the second portion 15 via a first solid joint 80A and a second solid joint 80B, where a first end section E1 of the first elongated solid and a second end section E2 of the first elongated solid are rigidly connected to the second portion 70, a central section F of the first elongated solid is rigidly connected to the first portion 15, a first end section E1 of the second elongated solid and a second end section E2 of the second elongated solid are rigidly connected to the second portion 70, and the central section F of the second elongated solid is rigidly connected to the first portion 15.

[0087] The first ME1 plane and the second ME2 plane are tilted relative to each other so that the first ME1 plane and the second ME2 plane form a common intersection line DZ extending parallel to the first direction (Z) (Figures 1 and 3).

[0088] The first web portion S1 and the second web portion S2 of the first elongated solid of the first solid joint 80A have extension lengths perpendicular to the first plane ME1 that are smaller than the extension length perpendicular to the first plane ME1 of the first end section E1 of the first elongated solid, the extension length perpendicular to the first plane ME1 of the second end section E2 of the first elongated solid, and the extension length perpendicular to the first plane ME1 of the central section F of the first elongated solid, whereby the first web portion S1 and the second web portion S2 of the first elongated solid are elastically deformable, and the central section F of the first solid joint 80A is movable relative to the first end section E1 of the first solid joint 80A and the second end section E2 of the first solid joint 80A.

[0089] Correspondingly, the first web portion S and the second web portion S2 of the second elongated solid of the second solid joint 80B have extension lengths perpendicular to the second plane ME2 that are smaller than the extension lengths perpendicular to the second plane ME2 of the first end section E1 of the second elongated solid, the extension lengths perpendicular to the second plane ME2 of the second end section E2 of the second elongated solid, and the extension lengths perpendicular to the second plane ME2 of the central section F of the second elongated solid, so that the first web portion S1 and the second web portion S2 of the second elongated solid are elastically deformable and the central section F of the second solid joint 80B is movable relative to the first end section E1 of the second solid joint 80B and the second end section E2 of the second solid joint 80B.

[0090] The arrangement of the first solid joint 80A and the second solid joint 80B has the effect that the second part 70 is supported by the first solid joint 80A and the second solid joint 80B in the first part 15 so as to be rotatable about the common intersection line DZ of the first plane ME1 and the second plane ME2.

[0091] In this example, the rotary joint assembly DGA is formed such that, in the undeformed state of the first solid joint 80A, the first solid joint 80A is formed symmetrically with respect to the first plane ME1, and in the undeformed state of the second solid joint 80A, the second solid joint 80B is formed symmetrically with respect to the second plane ME2 (FIGS. 1, 3 and 4).

[0092] In this example, the first solid joint 80A and the second solid joint 80B are formed identically.

[0093] In this example, the rotary joint assembly (DGA) is further formed as follows (FIGS. 1, 4A, 4B, and 4C): the first end section E1 of the first elongated solid body of the first solid body joint 80A has an extension length h in the first direction Z that is greater than the extension length t_3 of the first end section E1 of the elongated solid body perpendicular to the first plane ME1; the second end section E2 of the first elongated solid body of the first solid body joint 80A has an extension length h in the first direction Z that is greater than the extension length t_3 of the second end section E2 of the first elongated solid body perpendicular to the first plane ME1; - the first elongated solid intermediate section F of the first solid joint 80A has an extension length hF in the first direction Z that is greater than the extension length t_4 of the first elongated solid intermediate section F perpendicular to the first plane ME1; the first web portion S1 of the first elongated solid body of the first solid body joint 80A has an extension length h in the first direction Z that is greater than an extension length t_2 of the first web portion S1 of the first elongated solid body perpendicular to the first plane ME1; the second web portion S2 of the first elongated solid body of the first solid body joint 80A has an extension length h in the first direction Z that is greater than an extension length of the second web portion S2 of the first elongated solid body perpendicular to the first plane ME1; the first end section E1 of the second elongated solid body of the second solid body joint 80B has an extension length h in the first direction Z that is greater than the extension length t_3 of the first end section E1 of the second elongated solid body perpendicular to the second plane ME2; the second end section E2 of the second elongated solid body of the second solid body joint 80B has an extension length h in the first direction Z that is greater than the extension length t_3 of the second end section E2 of the second elongated solid body perpendicular to the second plane ME2; the central section F of the second elongated solid body of the second solid joint 80B has an extension length hF in the first direction Z that is greater than the extension length t_4 of the central section F of the second elongated solid body perpendicular to the second plane ME2; the first web portion S1 of the second elongated solid body of the second solid body joint 80B has an extension length h in the first direction Z that is greater than an extension length t_2 of the first web portion S1 of the second elongated solid body perpendicular to the second plane ME2; The second web portion S2 of the second elongated solid of the second solid joint 80B has an extension length h in the first direction Z that is greater than an extension length t_2 of the second web portion S2 of the second elongated solid perpendicular to the second plane ME2.

[0094] As shown in Figures 1, 4A and 4B, the first web portion S1 of the first solid joint 80A does not need to be formed such that the extension length perpendicular to the first plane ME1 of the first web portion S1 of the first solid joint 80A is constant over the entire extension length l_2 of the first web portion S1 between the first end section E1 and the central section F along the longitudinal axis of the first solid joint 80A, or the first web portion S1 of the second solid joint 80B does not need to be formed such that the extension length perpendicular to the second plane ME2 of the first web portion S1 of the second solid joint 80B is constant over the entire extension length l_2 of the first web portion S1 between the first end section E1 and the central section F along the longitudinal axis of the second solid joint 80A.

[0095] Correspondingly, the second web portion S2 of the first solid joint 80A does not need to be formed such that the extension length perpendicular to the first plane ME1 of the second web portion S2 of the first solid joint 80A is constant over the entire extension length l_2 of the second web portion S2 between the second end section E2 and the central section F along the longitudinal axis of the first solid joint 80A, or the first web portion S2 of the second solid joint 80B does not need to be formed such that the extension length perpendicular to the second plane ME2 of the second web portion S2 of the second solid joint 80B is constant over the entire extension length l_2 of the second web portion S2 between the second end section E2 and the central section F along the longitudinal axis of the second solid joint 80B.

[0096] As shown in Figures 4A and 4B, in this example, the first web portion S1 of the first solid joint 80A has a variable extension length perpendicular to the first plane ME1, and the first web portion S1 of the second solid joint 80B has a variable extension length perpendicular to the second plane ME2.

[0097] In this example, the first web portion S1 of the first solid joint 80A or the first web portion S1 of the second solid joint 80B has, in particular, three longitudinal sections arranged one after the other in the longitudinal direction of the solid joint, namely, a first thin longitudinal section G1 adjacent to the first end section E1, a second thin longitudinal section G2 adjacent to the central section F, and a central longitudinal section connecting the first thin longitudinal section G1 and the second thin longitudinal section G2.

[0098] The first thin longitudinal section G1 and the second thin longitudinal section G2 have an extension length l_1 along the longitudinal axis of the first solid joint 80A or along the longitudinal axis of the second solid joint 80B, respectively.

[0099] In this example, the first thin longitudinal section G1 and the second thin longitudinal section G2 of the first solid joint 80A have an extension length t_1 perpendicular to the first plane ME1 that is smaller than the extension length t_2 perpendicular to the first plane M1 of the central longitudinal section connecting the first thin longitudinal section G1 and the second thin longitudinal section, and the first thin longitudinal section G1 and the second thin longitudinal section G2 of the second solid joint 80B have an extension length t_1 perpendicular to the second plane ME2 that is smaller than the extension length t_2 perpendicular to the second plane M2 of the central longitudinal section connecting the first thin longitudinal section G1 and the second thin longitudinal section.

[0100] Correspondingly, in this example, the second web portion S2 of the first solid joint 80A or the second web portion S2 of the second solid joint 80B has, in particular, three longitudinal sections arranged one after the other in the longitudinal direction of the solid joint, namely, a fourth thin longitudinal section G4 adjacent to the second end portion E2, a third thin longitudinal section G3 adjacent to the central section F, and a central longitudinal section connecting the third thin longitudinal section G3 and the fourth thin longitudinal section G4.

[0101] The third thin longitudinal section G3 and the fourth thin longitudinal section G4 have an extension length l_1 along the longitudinal axis of the first solid joint 80A or along the longitudinal axis of the second solid joint 80B, respectively.

[0102] In this example, the third thin longitudinal section G3 and the fourth thin longitudinal section G4 of the first solid joint 80A have an extension length t_1 perpendicular to the first plane ME1 that is smaller than the extension length t_2 perpendicular to the first plane ME1 of the central longitudinal section connecting the third thin longitudinal section G and the fourth thin longitudinal section G4, and the third thin longitudinal section G3 and the fourth thin longitudinal section G4 of the second solid joint 80B have an extension length t_1 perpendicular to the second plane ME2 that is smaller than the extension length t_2 perpendicular to the second plane ME2 of the central longitudinal section connecting the third thin longitudinal section G and the fourth thin longitudinal section G4.

[0103] 3, in this example, the rotary joint assembly DGA is formed as follows: the first solid joint 80A in its undeformed state and the second solid joint 80B in its undeformed state are arranged relative to each other such that the first solid joint 80A and the second solid joint 80B are arranged symmetrically with respect to a third plane ME3 extending parallel to the first direction Z, and in this case, a common intersection line DZ between the first plane ME1 and the second plane ME2 extends within the third plane E3. This achieves that upon translation of the first part 15 relative to the second part 70 along an axis extending parallel to the plane of 3E3 and perpendicular to the first direction Z, the first solid joint 80A and the second solid joint 80B are mechanically loaded in the same way and are correspondingly deformed.

[0104] In this example, the rotary joint assembly DGA is configured as follows: the first solid joint 80A is disposed relative to the second solid joint 80B such that the first solid joint 80A is spaced from the second solid joint 80B perpendicular to the first direction Z (FIG. 3). As can be seen from FIG. 3, the first solid joint 80A and the second solid joint 80B are disposed symmetrically with respect to the third plane E3 and are offset relative to each other by a distance in the direction of the X-axis perpendicular to the third plane E3. This arrangement of the first solid joint 80A and the second solid joint 80B has the effect that the rotary joint assembly DGA has a relatively high stiffness with respect to rotation of the second part 70 relative to the first part 15 about the Y-axis; this stiffness increases the greater the spacing between the first solid joint 80A and the second solid joint 80B in the direction of the X-axis.

[0105] As can be seen from Figures 1 and 3, the rotary joint assembly DGA may be formed such that the second part 70 has a first elongated cavity 71 extending along a first plane ME1 in a first direction Z, and the first solid joint 80A is arranged within the first elongated cavity 71A such that the first solid joint 80A extends through the first elongated cavity 71A in the first direction Z over at least a portion of its extension length in the first direction Z.

[0106] Correspondingly, the second part 70 may have a second elongated cavity 71B extending along a second plane ME2 in the first direction Z, and the second solid joint 80B is arranged within the second elongated cavity 71B such that the second solid joint 80B extends through the second elongated cavity 71B in the first direction Z over at least a portion of its extension length in the first direction Z.

[0107] In this example, the first elongated cavity 71A is dimensioned such that at least the first end section E1 and the second end section E2 of the first solid coupling 80A extend through the first elongated cavity 71A over their entire extension length h in the first direction Z. Correspondingly, the second elongated cavity 71B is dimensioned such that the first end section E1 and the second end section E2 of the second solid coupling 80B extend through the second elongated cavity 71B over their entire extension length h in the first direction Z. In this case, since the first solid coupling 80A is substantially completely embedded in the first elongated cavity 71A and the second solid coupling 80B is completely embedded in the second elongated cavity 71B, this embodiment of the rotary joint assembly DGA is made particularly compact.

[0108] As shown schematically in Figures 2, 4A and 4C, in this example, the extension length hF in the first direction of the central section F of each of the first solid joint 80A and the second solid joint 80B is greater than the extension length h of the first end section E1 and the second end section E2.

[0109] In this case, the central section F of the first solid joint 80A projects a predetermined distance from the first elongated cavity 71A on the side facing the first part 15 in the first direction Z, and the central section F of the second solid joint 80B projects a predetermined distance from the second elongated cavity 71B on the side facing the first part 15 in the first direction Z. This is advantageous because the central sections F of the first solid joint 80A and the second solid joint 80B can be attached to the side of the first part 15 facing the second part 70 by attachment means, whereby the central sections F of the first solid joint 80A and the second solid joint 80B are rigidly connected to the first part.

[0110] 3, 7 and 8, in this example, the rotary joint assembly DGA is formed such that the first elongated cavity 71A extends along the first plane ME1 such that the longitudinal axis of the first elongated cavity 71A is disposed parallel to the first plane ME1 and in the first direction Z, and the elongated cavity 71A is defined laterally with respect to the first plane ME1 by two opposing side walls HSA1 and HSA2 of the second part 70, which extend parallel to the first plane ME1 in the first direction Z and are spaced apart from each other in a direction perpendicular to the first plane ME1.

[0111] Correspondingly, the rotary joint assembly DGA is formed such that the second elongated cavity 71B extends along the second plane ME2 such that the longitudinal axis of the second elongated cavity 71B is arranged parallel to the second plane ME2 and perpendicular to the first direction Z, and the second elongated cavity 71B is defined laterally with respect to the second plane ME2 by two opposing side walls HSB1 and HSB2 of the second part 70, which extend parallel to the second plane ME2, respectively, in the first direction Z and are spaced apart from each other in the direction perpendicular to the second plane ME2.

[0112] 3, 7 and 8, in this example, the two opposing side walls HSA1, HSA2 of the second part 70, which laterally define the first elongated cavity 71A with respect to the first plane ME1, are shaped so that these side walls HSA1, HSA2 surround the first end section E1 and the second end section E2 of the first solid coupling 80A, thereby connecting the first end section E1 and the second end section E2 of the first solid coupling 80A in a form-fitting manner to the second part 70. This ensures that the first end section E1 and the second end section E2 of the first solid coupling 80A are rigidly held in the second part 70.

[0113] Correspondingly, the two opposing side walls HSB1, HSB2 of the second part 70, which laterally define the second elongated cavity 71B with respect to the second plane ME2, may be shaped so that these side walls HSB1, HSB2 surround the first end section E1 and the second end section E2 of the second solid coupling 80B, thereby connecting the first end section E1 and the second end section E2 of the second solid coupling 80B in a form-fitting manner to the second part 70. This ensures that the first end section E1 and the second end section E2 of the second solid coupling 80B are rigidly held in the second part 70.

[0114] The first end section E1 and the second end section E2 of the first solid joint 80A and the second solid joint 80B can be attached to the second part 70 (by conventional attachment means suitable for this type of connection, e.g., by screws and / or adhesive).

[0115] 3, 7, and 8, in this example, the two opposing side walls HSA1, HSA2 of the second part 70, which define the first elongated cavity 71A laterally with respect to the first plane ME1, are shaped so that these side walls HSA1, HSA2 surround the central section F of the first solid joint 80A, and in this case, the two side walls HSA1, HSA2 of the second part 70 have a distance, perpendicular to the first plane ME1, greater than the extension length t_4, perpendicular to the first plane ME1, of the central section F of the first solid joint 80A. This ensures that the central section F of the first solid joint 80A can move relative to the second part 70 when it is desired to move the first part 15 relative to the second part 70.

[0116] Correspondingly, the two opposing side walls HSB1, HSB2 of the second part 70, which define the second elongated cavity 71B laterally with respect to the second plane ME2, are shaped so that these side walls HSB1, HSB2 surround the central section F of the second solid joint 80B, with the two side walls HSB1, HSB2 of the second part 70 having a distance perpendicular to the second plane ME2 that is greater than the extension length t_4 perpendicular to the second plane ME2 of the central section F of the second solid joint 80B. This ensures that the central section F of the second solid joint 80B can move relative to the second part 70 when it is desired to move the first part 15 relative to the second part 70.

[0117] As shown schematically in Figures 3, 5A to 5C, 7 and 8, in this example, the first solid joint 80A and the second solid joint 80B of the rotary joint assembly DGA are arranged as follows: - the central section F of the first solid joint 80A is movable relative to the second part 70 in a translational movement perpendicular to the first plane ME1 (Fig. 5B); - the central section F of the first solid joint 80A is movable relative to the second part 70 by rotation about a rotation axis extending in the first direction Z (Fig. 5C); - the central section F of the second solid joint 80B is movable relative to the second part 70 in a translational movement perpendicular to the second plane ME2 (Fig. 5B); The central section F of the second solid joint 80A is movable relative to the second part 70 in a pivotal movement about a pivot axis extending in the first direction Z (FIG. 5C).

[0118] The rotary joint assembly DGA may be configured as follows: the first plane ME1 and the second plane ME2 are inclined relative to each other so that they intersect at a common intersection line DZ at an angle α (hereinafter referred to as arrangement angle α) that is greater than or equal to 10° and less than or equal to 120°. The rotary joint assembly DGA may particularly be configured as follows: the first plane ME1 and the second plane ME2 are inclined relative to each other so that they intersect at a common intersection line DZ at an angle that is greater than or equal to 30° and less than or equal to 90°.

[0119] The magnitude of each of the alignment angles α is important to the stiffness and natural frequency of the coupled system formed by the first section 15, the second section 70, the first solid joint 80A and the second solid joint 80B.

[0120] One aspect of the present invention relates to a configuration of solid joints 80A, 80B connecting the second part 70 of the rotary joint assembly DGA to the first part 15 of the rotary joint assembly DGA, the solid joints 80A, 80B being rigidly connected to the second part 70 on both sides at both end sections E1, E2, with an intermediate member F rigidly connected to the first part 15 and movable relative to the two end sections E1, E2, where the first part is axially offset relative to the second part 70 about the pivot axis DZ (stacked structure). This configuration and the arrangement angle α of the individual solid joints 80A, 80B allow for the desired system natural frequency and static stiffness to be adjusted. Arranging two compact solid joints 80A, 80B to form one functional unit in the form of a coupling device KE is space-saving and therefore can be easily integrated into the rotary joint assembly DGA.

[0121] In the case of the coupling device KE of the rotary joint assembly DGA, the elastically deformable web portions S1 and S2 provide translational and rotational degrees of freedom. The two main degrees of freedom of the central section F of the solid joint 80A or 80B shown in Figures 4A-4C and 5A-5C are translation in the X direction and rotation about the Z axis, relative to the coordinate system shown in Figures 4A-4C and 5A-5C, which has three (relatively orthogonal) axes X, Y, and Z (X-axis, Y-axis, and Z-axis). Here, the X axis is oriented perpendicular to the first plane ME1 (for the first solid joint 80A) or perpendicular to the second plane ME2 (for the second solid joint 80B).

[0122] These two primary degrees of freedom are distinguished by their correspondingly low natural frequencies and static stiffness. The third degree of freedom of the central section F is rotation (torsion) about the Y-axis, which is primarily influenced by the length and thickness of the web sections S1 and S2. Based on the fact that the two end sections E1 and E2 of each solid joint 80A and 80B are rigidly connected to the second section 70 on both sides, the displacement of the central section F occurs in conjunction with deformation of the web sections S1 and S2, which correspond to a combination of tensile stress and bending (due to translation of the central section F in the direction of the X-axis and rotation of the central section F about an axis extending parallel to the Z-direction, as illustrated in FIGS. 5A, 5B, and 5C). This results in significantly higher stiffness in all six degrees of freedom compared to the conventional joint illustrated in FIGS. 6A-6C.

[0123] 6A-6C show a conventional solid joint. This conventional solid joint has a fixed end F1 connected to a first component A and a flexible end F2 connected to a second component B, the flexible end F2 being connected to the first fixed end F1 via an elastically deformable web portion S1. When a mechanical load is applied to the flexible end F2 by a force K, the flexible end F2 typically moves relative to the fixed end F1, causing the web portion S1 to bend but not be subjected to a tensile load. This results in a lower stiffness of the conventional solid joint compared to the coupling device KE of the rotary joint assembly DGA according to the present invention.

[0124] Rigidly connecting both end sections E1, E2 of both solid joints 80A, 80B to the second part 70 as described above, and disposing the two solid joints 80A, 80B relative to one another at the aforementioned disposition angle α, allows for a rigid connection between the end sections E1, E2 of the two solid joints 80A, 80B, thereby forming a combined solid joint having a virtual pivot axis DZ. A rotational degree of freedom about the virtual pivot axis DZ is generated for each of the two solid joints 80A and 80B by a combination of two degrees of freedom of translation of the central section F in the X direction, as shown in Figure 5B, and rotation of the central section F about an axis extending parallel to the Z direction, as shown in Figure 5C.

[0125] In order to achieve the highest possible stiffness of the rotary joint assembly DGA with respect to the rotation of the first part 15 relative to the second part 70 about the Y axis shown in Figures 1-3, it is advantageous to position the two solid joints 80A and 80B with as large a distance as possible from each other (in the X direction shown in Figures 1-3). The stiffness with respect to the rotation of the first part 15 relative to the second part 70 about the X axis can be influenced through the configuration of the two solid joints 80A, 80B and by the arrangement angle α. The combination of two solid joints 80A, 80B arranged at the angle α, each fixedly connected at both ends to the second part 70, allows only a relatively small rotation about the Z axis due to the high stiffness of both solid joints 80A, 80B. To protect the solid joints 80A and 80B from overload and / or to limit the movement of the intermediate member F, corresponding stops (corresponding to the side walls HSA1, HSA2, HSB1, HSB2) can be incorporated in the second part 70.

[0126] In this example, it is desirable to keep the rotational stiffness about the first direction (Z-axis) between the second part 70 and the first part 15 as small as possible, while the stiffness in the Y-direction is as high as possible. An alignment angle α of approximately 60° provides a good compromise for this application. A parallel orientation of the two solid joints 80A, 80B (α=0°) results in a significant increase in rotational stiffness about the Z-axis between the second part 70 and the first part 15, while the stiffness in the X-direction is minimized. On the other hand, an alignment angle of α=180° results in a stiffening of the system in the X-direction and a significant reduction in stiffness in the Y-direction and in the stiffness for rotation of the first part 15 relative to the second part 70 about the X- and Z-axes.

[0127] With respect to the stiffness and natural frequencies of the individual solid joints 80A and 80B, the following explanations apply with respect to FIGS. 4A-4C and 5A-5C.

[0128] The individual solid joints 80A and 80B are substantially symmetrical about both central planes XZ and YZ (FIG. 4B), where the shapes of the end sections E1 and E2 and the central section F may vary.

[0129] The individual solid joints 80A and 80B preferably have small static stiffnesses and natural frequencies for translation in the X direction and rotation about an axis extending parallel to the Z direction, while the static stiffnesses and natural frequencies for translation in the X and Z directions and rotation about the X and Y directions should remain as high as possible.

[0130] The stiffness and natural frequencies for translation in the X direction and rotation about an axis parallel to the Z direction are significantly influenced by the thickness t_1 of the web section and the distance l_2 between one of the two end sections E1 and E2 and the central section F. The larger the distance l_2, the smaller the stiffness and natural frequencies for translation in the X direction and rotation about an axis parallel to the Z direction. In this case, l_2 is usually smaller than the height h. The smaller the web thickness t_1, the smaller the stiffness and natural frequencies in all axial directions.

[0131] The stiffness and natural frequency for rotation about the Y axis can be influenced by the web thicknesses t_1 and t_2 and the spacing l_2. In this case, the following applies: the larger the web thicknesses t_1 and t_2, the higher the stiffness and natural frequency for rotation about the Y axis. The smaller the spacing l_2, the higher the stiffness and natural frequency for rotation about the Y axis.

[0132] Local thickening of web sections S1 and S2 to t_2 increases the torsional stiffness and natural frequency for rotation about the Y axis by many times (>3x), reducing the risk of instability in the Y direction due to buckling or bending. Increases in stiffness (~+50%) and natural frequency (~+15%) also occur for other axial directions.

[0133] The stiffness and natural frequencies for translation in the Z direction and rotation about an axis parallel to the X direction are influenced by the web thickness t_1 and the height h. The greater the height h, the higher the stiffness and natural frequencies for translation in the Z direction and rotation about an axis parallel to the X direction. Preferably, the web thickness t_1, web thickness t_2, thickness t_3, height h and lengths l_1 and l_2 can be selected as follows: the ratio of web thickness t_1 to height h may preferably be in the range of 1:10 to 1:30; the ratio of web thickness t_1 to web thickness t_2 may suitably be in the range of 1:2 to 1:5; the ratio of web thickness t_1 to thickness t_3 may suitably be in the range of 1:5 to 1:30; the ratio of web thickness t_1 to web length l_1 may preferably be in the range of 1:2 to 1:5; The ratio of web length l_1 to web length l_2 may preferably be less than 1.

[0134] 9 and 10, a positioning device in combination with a rotary joint assembly DGA according to the invention will now be described.

[0135] 9 and 10 show a positioning device 1 (or part of this positioning device 1) according to the invention for positioning a movable element 5. The movable element 5 is designed in this example as a movable platform or a movable table with a support surface on which, for example, an object to be positioned together with the movable element 5 by the positioning device 1 can be placed.

[0136] 9 and 10 show the positioning device 1 in a perspective view with respect to a coordinate system illustrated in FIGS. 9 and 10, which has three axes X, Y, Z (X-axis, Y-axis, Z-axis).

[0137] As can be seen from FIG. 10, the positioning device 1 includes a base B, which may be realized as a plate made of granite, for example, and in this example has a flat guide surface FF on its upper side, and the flat guide surface FF is arranged parallel to a second direction (corresponding to the direction of the X-axis shown in FIG. 10, hereinafter referred to as the "second direction X") and parallel to a third direction (corresponding to the direction of the Y-axis shown in FIG. 1, hereinafter referred to as the "third direction Y").

[0138] The positioning device 1 is designed to move the movable element 5 in a second direction X and / or a third direction Y parallel to a flat guide surface FF of the base B, and in so doing to position it in predefined positions with an accuracy in the sub-micrometer range (i.e. less than 1 μm). To enable rapid positioning, it is provided that the movable element 5 can be moved in the second direction X and / or the third direction Y with relatively high accelerations (2 g or more).

[0139] For this purpose, the positioning device 1 comprises a first movement device 10 in the form of a gantry structure, which includes a gantry beam 15 arranged on a flat guide surface FF and extending at a distance from the flat guide surface FF in a third direction Y, and a gantry drive GA for moving the gantry beam 15 in a second direction X relative to the base B. The gantry beam 15 has a longitudinal axis extending in the third direction Y and has, with respect to this longitudinal axis, a first end 15.1 and a second end 15.2 located opposite the first end 15.1, and the gantry drive GA includes two first linear axes X1 and X2 extending in the second direction X, each of which is equipped with a linear drive LMX1 and LMX2. In this case, the linear drive LMX1 of one first linear axis X1 is coupled to a first end 15.1 of the gantry beam 15, whereby the first end 15.1 of the gantry beam 15 is movable in the second direction X by means of the linear drive LMX1. Correspondingly, the linear drive LMX2 of the other first linear axis X2 is coupled to a second end 15.2 of the gantry beam 15, whereby the second end 15.2 of the gantry beam 15 is also movable in the second direction X by means of the linear drive LMX2.

[0140] In this example, the linear drives LMX1 and LMX2 are each formed as a conventional linear motor. Correspondingly, the linear drive LMX1 (formed as a linear motor) includes a stator 20A extending linearly in the second direction X and attached to a base B, and a mover 20B movable in the second direction X relative to the stator 20A and attached to a first end 15.1 of the gantry beam 15 via an adapter plate 15a. Correspondingly, the linear drive LMX2 (formed as a linear motor) includes a stator 21A extending linearly in the second direction X and attached to a base B, and a mover 21B movable in the second direction X relative to the stator 21A and attached to a second end 15.2 of the gantry beam 15 via an adapter plate 15b.

[0141] Both the stator 20A of the linear drive LMX1 and the stator 21A of the linear drive LMX2 have a substantially U-shaped profile in a cross section perpendicular to the second direction X, with each substantially U-shaped profile having two legs arranged side by side that define a gap extending over the entire length of the respective stator 20A or 20B in the second direction X, i.e., gap SX1 in the case of stator 20A and gap SX2 in the case of stator 21A. As is typical in conventional linear motors, stator 20A includes means for providing a static magnetic field in gap SX1 of stator 20A, and stator 21A includes means for providing a static magnetic field in gap SX2 of stator 21A. Correspondingly, the mover 20B of the linear drive device LMX1 includes a coil (not shown) that can be supplied with alternating current and generates an alternating magnetic field, and spatially extends such that a section 20B-1 of the mover 20B including the coil of the mover 20B protrudes into the gap SX1 of the stator 20A and the mover 20B is movable in this gap SX1 in the second direction X over a distance corresponding to the extension length of the stator 20A in the second direction X. Correspondingly, mover 21B of linear drive unit LMX2 includes a coil (not shown) that can be supplied with an alternating current and generates an alternating magnetic field, and spatially extends such that section 21B-1 of mover 21B including the coil of mover 21B protrudes into gap SX2 of stator 21A and mover 21B is movable in second direction X within this gap SX2 over a distance corresponding to the extension length of stator 21A in second direction X. To control the movement of gantry beam 15 in second direction X, linear drives LMX1 and LMX2 of both first linear axes X1 and X2 can be operated independently of each other using control units (not shown).

[0142] In order to achieve a space-saving arrangement of the two first linear axes X1 and X2, the stators of the linear drives LMX1 and LMX2 of this embodiment of the positioning device 1 shown in FIG. 1 are arranged such that the gap SX1 of the stator 20A, the gap SX2 of the stator 21A, as well as the movers 20B and 21B, extend substantially parallel to a plane that is arranged parallel to the second direction X and perpendicular to the flat guide surface FF of the base B, so that the gap SX1 of the stator 20A, the gap SX2 of the stator 21A, as well as the movers 20B and 21B, respectively, have an extension length in the third direction Y that is significantly smaller than their extension length in the direction perpendicular to the flat guide surface FF. This arrangement of the two first linear axes X1 and X2 is advantageous in terms of requiring the smallest possible footprint in a plane extending parallel to the second direction X and parallel to the third direction Y, in particular because, based on the respective structures of the stators 20A and 21A and the movers 20B and 21B, each of the two linear drives LMX1 and LMX2 has, in the aforementioned arrangement, an extension perpendicular to the flat guide surface FF that is several times larger (typically more than twice as large) than the extension of the respective linear drive LMX1 or LMX2 in the third direction Y. This latter can be clearly seen, in particular, on the basis of the illustration of the positioning device 1 in FIG. 10. The aforementioned arrangement of the two first linear axes X1 and X2 therefore enables the construction of a positioning device 1 that has a particularly small spatial extension in the third direction Y (corresponding to the longitudinal direction of the gantry beam 15), which is particularly minimized with respect to the arrangement of the two first linear axes X1 and X2.

[0143] As shown schematically in Figure 9, the movable element 5 is supported on the gantry beam 15 so that the movable element 5 is movable linearly in the third direction Y on the gantry beam 15, and the gantry beam 15 has a second linear axis Y1 extending in the third direction Y, and this second linear axis Y1 is provided with a linear drive device LMY coupled to the movable element 5 for moving the movable element 5 in the third direction Y.

[0144] In this example, the linear drive LMY of the second linear axis Y1 is also formed as a conventional linear motor and includes a stator 100A extending linearly in the third direction Y (similar to the structure of the linear drives LMX1 and LMX2), which is attached to the upper side of the gantry beam 15 and extends over the entire length of the gantry beam 15 between a first end 15.1 and a second end 15.2 in the third direction Y, and a mover 100B attached to a movable element 5 that is movable in the third direction Y relative to the stator 100A.

[0145] The stator 100A of the linear drive device LMY has a substantially U-shaped profile in a cross section perpendicular to the third direction Y, with the substantially U-shaped profile comprising two legs arranged side by side, each of which defines a gap SY extending over the entire length of the stator 100A in the third direction Y. The stator 100A includes a means for providing a static magnetic field in the gap SY of the stator 100A. Correspondingly, the mover 100B of the linear drive device LMY has a coil (not shown) that can be supplied with an alternating current and generates an alternating magnetic field, and extends spatially such that a section 100B-1 of the mover 100B, including the coil of the mover 100B, projects into the gap SY of the stator 100A and the mover 100B is movable in this gap SY in the third direction Y over a distance corresponding to the extension length of the stator 100A in the third direction Y. To control the movement of the movable element 5 in the third direction Y, the linear drive LMY is operable by means of a control device (not shown).

[0146] As shown schematically in Fig. 9, the positioning device 1 includes a first air bearing device LL1 having a plurality of air bearings coupled to the gantry beam 15, which guides the gantry beam on a flat guide surface FF of the base B. As can be seen from Fig. 9, the first air bearing device LL1 has a first air bearing assembly 30, which includes at least one first horizontal air bearing arranged at a first end 15.1 of the gantry beam 15, which guides the first end 15.1 of the gantry beam 15 on a first section FF1 of the flat guide surface FF extending in the second direction X. Additionally, the first air bearing device LL1 has a second air bearing assembly 35, which includes at least one second horizontal air bearing arranged at the second end 15.2 of the gantry beam 15 and which guides the second end 15.2 of the gantry beam 15 in a second section FF2 of the flat guide surface FF extending in the second direction X. Each air bearing of the first air bearing assembly 30 and the second air bearing assembly 35 has the task of supporting or guiding the gantry beam 15 on the flat guide surface FF in one section provided at the first end 15.1 of the gantry beam 15 and in one section provided at the second end 15.2 of the gantry beam 15, respectively.

[0147] As further shown schematically in Figure 9, the first air bearing device LL1 additionally has a third air bearing assembly 50, which includes at least one third horizontal air bearing and at least one fourth horizontal air bearing, which are arranged in the "central section" of the gantry beam 15 between the first end 15.1 of the gantry beam 15 and the second end 15.2 of the gantry beam 15, so that the "central section" of the gantry beam 15 is guided by the third horizontal air bearing and the fourth horizontal air bearing in a third section FF3 of the flat guide surface FF, which is arranged between the first section FF1 of the flat guide surface FF and the second section FF2 of the flat guide surface, with respect to a third direction Y extending in the second direction X. Details of the third air bearing assembly 50, relating to the at least one third horizontal air bearing and the at least one fourth horizontal air bearing, are described further below, particularly in conjunction with FIG. 10.

[0148] In this regard, the "central section" of the gantry beam 15 should be considered to be one longitudinal section of the gantry beam 15 extending in the third direction Y, which extends over a length in the third direction Y that is at most 50% of the extension length of the gantry beam 15 in the third direction Y, and which has a spacing in the third direction Y between the first end 15.1 of the gantry beam 15 and the second end 15.2 of the gantry beam 15, each of which is at least 25% of the extension length of the gantry beam 15 in the third direction Y.

[0149] As further shown in Figure 9, a guide beam FB is arranged on the base B beside the third section FF3 of the flat guide surface FF, extending in the second direction X, and the guide beam FB has one flat side surface SF that extends parallel to the second direction X and parallel to a first direction (corresponding to the Z-axis direction shown in Figure 9, hereinafter referred to as the "first direction Z") oriented substantially perpendicular to the flat guide surface FF. The third air bearing assembly 50 further includes at least one side air bearing arranged in a central section of the gantry beam 15 that guides the gantry beam at the one flat side surface SF of the guide beam FB. Details of the third air bearing assembly 50 regarding the at least one side air bearing will be described further below, particularly in conjunction with Figure 10.

[0150] As will be explained in more detail below, in this example, all air bearings of the third air bearing assembly 50 are part of a "component group" that forms one unit and is attached to the gantry beam 15, this component group being arranged below the gantry beam 15 in the intermediate space between the gantry beam 15 and the flat guide surface FF and having the task of supporting or guiding the gantry beam 15 in the area of ​​the central section of the gantry beam 15, in the area of ​​the third section FF3 of the flat guide surface FF, by means of the horizontal air bearings of the third air bearing assembly 50, and guiding it laterally at the flat side surfaces SF of the guide beam FB during movement in the second direction X, by means of at least one lateral air bearing of the third air bearing assembly 50. The aforementioned components thus form a "slide element" GE attached to the gantry beam 15, which slide element GE is configured to slide contactlessly in the second direction X during operation of the positioning device 1 on the third section FF3 of the flat guide surface FF and along the flat side surface SF of the guide beam FB, in particular on an air cushion which can be generated between the slide element GE and the third section FF3 of the flat guide surface FF by means of the respective horizontal air bearings of the third air bearing assembly 50, and along an air cushion which can be generated between the slide element GE and the flat side surface SF of the guide beam FB by means of the respective lateral air bearings of the third air bearing assembly 50.

[0151] Additionally, all horizontal air bearings of the first air bearing device LL1 are preloaded with respect to a flat guide surface FF of the base B, and all lateral air bearings of the first air bearing device LL1 are preloaded with respect to a flat side surface SF of the guide beam FB. Correspondingly, all air bearings of the second air bearing device LL2 are preloaded with respect to one of the flat guide surfaces FFG1 or FFG2 of the gantry beam 15, or with respect to a flat side surface SFG2 of the gantry beam 15. In this example, magnetic means are used to preload the respective air bearings, which are not important to the invention and will not be described in detail here.

[0152] 9 and 10, details of the sliding element GE will now be described in relation to the air bearings of the third air bearing assembly 50. As can be seen particularly from FIG. 10, the sliding element GE has a carrier 70 as a main component, which is defined as housing the air bearings of the third air bearing assembly 50 and attached to the gantry beam 15 in order to hold the air bearings of the third air bearing assembly 50 in a predefined position relative to the gantry beam 15. In this example, the carrier 70 is formed as a housing having a plurality of hollow chambers.

[0153] 9 and 10, the carrier 70 is assembled to the gantry beam 15 in such a way that it extends below the gantry beam 15, in the intermediate space between the gantry beam 15 and the third section FF3 of the flat guide surface FF, parallel to the flat guide surface FF of the base B and parallel to the flat side surface SF of the guide beam FB.

[0154] As can be seen from Figure 10, the third air bearing assembly 50 in this example includes a total of two horizontal air bearings L3 and L4, which are arranged on the underside of the carrier 70 facing the flat guide surface FF of the base B.

[0155] As can be seen from FIG. 10, the two horizontal air bearings L3 and L4 are arranged relative to each other such that the two horizontal air bearings L3 and L4 are spaced apart from each other in the second direction X.

[0156] As can be seen from FIG. 10, in this example, the third air bearing assembly 50 includes two lateral air bearings L1 or L2 that guide the gantry beam 15 on the flat side SF of the guide beam FB, and the two lateral air bearings L1 and L2 are arranged relative to each other such that the two lateral air bearings L1 and L2 are spaced apart from each other in the second direction X.

[0157] As can be seen from Figure 10, two elongated, approximately rectangular parallelepiped cavities 71A and 71B are formed in the carrier 70 on the upper surface of the carrier 70 facing the gantry beam 15, and these cavities 71A and 71B have longitudinal axes extending perpendicular to the first direction Z or parallel to the flat guide surface FF of the base B, respectively, and are arranged such that the elongated cavities 71A and 71B are spaced apart from each other in the second direction X. As shown diagrammatically in FIG. 10, the elongated cavities 71A and 71B are used to accommodate a first solid joint 80A or a second solid joint 80B, the first solid joint 80A being defined to be inserted into the cavity 71A and the second solid joint 80B being defined to be inserted into the cavity 71B, the two solid joints 80A or 80B being provided to form a connection between the carrier 70 and the gantry beam 15, the connection being achieved when the sliding element GE is connected to the gantry beam 15 via the two solid joints 80A or 80B. On the one hand, the sliding element GE is held in a stable position, and on the other hand, via two solid joints 80A or 80B, the sliding element GE is supported on the gantry beam 15 so as to be rotatable relative to the gantry beam 15 around a rotation axis extending in the first direction Z, whereby the arrangement of the two solid joints 80A or 80B correspondingly forms a "rotary joint", which is used to connect the sliding element GE to the gantry beam 15 and to hold it movable (rotatable) on the gantry beam 15.

[0158] In this example, the positioning device 1 is designed such that the gantry beam 15, the carrier 70, the first solid joint 80A and the second solid joint 80B form one embodiment of a rotary joint assembly according to the present invention.

[0159] The gantry beam 15, carrier 70, first solid joint 80A, and second solid joint 80B of the positioning apparatus 1 correspond particularly structurally and functionally to the rotary joint assembly DGA illustrated in Figures 1 to 3. The gantry beam 15 of the positioning apparatus 1 corresponds to the first part 15 of the rotary joint assembly DGA, the carrier 70 of the positioning apparatus 1 corresponds to the second part 70 of the rotary joint assembly DGA, the first solid joint 80A of the positioning apparatus 1 is identical to the first solid joint 80A of the rotary joint assembly DGA, and the second solid joint 80B of the positioning apparatus 1 is identical to the second solid joint 80B of the rotary joint assembly DGA.

[0160] The elongated cavities 71A and 71B formed in the carrier 70 of the positioning device 1, which accommodate the first solid joint 80A or the second solid joint 80B, similarly correspond to the elongated cavities 71A and 71B formed in the second part 70 of the rotary joint assembly DGA.

[0161] The aforementioned structure of the carrier 70 makes it possible to incorporate two solid joints 80A or 80B into the carrier 70. For this purpose, the first solid joint 80A can be inserted as a whole into the first elongated cavity 71A, with the two end sections E1 and E2 of the first solid joint 80A being rigidly connected to the carrier 70 (using conventional attachment means suitable for this type of connection, for example using screws and / or by adhesive bonding), while the central section F of the first solid joint 80A is rigidly connected to the gantry beam 15.

[0162] For this purpose, the second solid joint 80B as a whole can be inserted into the second elongated cavity 71B, and the two end sections E1 and E2 of the second solid joint 80B are rigidly connected to the carrier 70 (using conventional attachment means suitable for this type of connection, for example using screws and / or by adhesive bonding), while the central section F of the second solid joint 80B is rigidly connected to the gantry beam 15.

[0163] As shown schematically in FIG. 10, both the first solid joint 80A and the second solid joint 80B are made of an elongated solid body (e.g., steel) that extends perpendicular to the first direction Z along a plane parallel to the first direction Z and has a longitudinal axis that is also disposed perpendicular to the first direction Z.

[0164] As shown schematically in Figures 1 and 10, in this connection it is assumed that a first elongated solid forming the first solid joint 80A extends along a first plane ME1 parallel to the first direction Z, and a second elongated solid forming the second solid joint 80B extends along a second plane ME2 parallel to the first direction Z.

[0165] The first solid joint 80A and the second solid joint 80B are configured to hold the carrier 70 or sliding element GE in a stable rest position relative to the gantry beam 15 when both solid joints 80A and 80B are in their respective undeformed base states (as shown in FIG. 9). Because the first web portion S1 and the second web portion S2 of the first solid joint 80A and the first web portion S1 and the second web portion S2 of the second solid joint 80B are each formed elastically deformable, and because the central section F of the first solid joint 80A has a distance from each of the wall sections HSA1 and HSA2 in a direction perpendicular to the first plane ME1 (in the undeformed basic state of the first solid joint 80A), and because the central section F of the second solid joint 80B has a distance from each of the wall sections HSB1 and HSB2 in a direction perpendicular to the second plane ME2 (in the undeformed basic state of the second solid joint 80B), the carrier 70 or the sliding element GE can be easily attached to the first solid joint 80A. The carrier 70 or sliding element GE is held on the gantry beam 15 by the first solid joint 80A and the second solid joint 80B, such that the carrier 70 or sliding element GE is movable relative to the gantry beam 15 as long as the central section F of the first solid joint 80A does not collide with one of the wall sections HSA1 or HSA2 and one of the wall sections HSA1 or HSA2 does not hinder the corresponding movement of the carrier 70 or sliding element GE relative to the gantry beam 15, and / or as long as the central section F of the second solid joint 80B does not collide with one of the wall sections HSB1 or HSB2 and one of the wall sections HSB1 or HSB2 does not hinder the corresponding movement of the carrier 70 or sliding element GE relative to the gantry beam 15.

[0166] In the case of the positioning device 1, it is important that the arrangement of the first solid joint 80A and the second solid joint 80B forms a connection between the carrier 70 or sliding element GE and the gantry beam 15 which, on the one hand, ensures as high a stiffness as possible with regard to translation of the carrier 70 or sliding element GE relative to the gantry beam 15 in the second direction X and the third direction Y and the first direction Z, but on the other hand has as little stiffness as possible with regard to rotation of the carrier 70 or sliding element GE relative to the gantry beam 15 about a rotation axis extending in the first direction Z.

[0167] To meet the aforementioned requirements, the first solid joint 80A and the second solid joint 80B are arranged on the carrier 70 so that the first plane ME1 and the second plane ME2 are not arranged parallel to each other, but are tilted relative to each other so that the first plane ME1 and the second plane ME2 form a common intersection line DZ extending parallel to the first direction Z (as shown in FIG. 1 ). In this case, the first plane ME1 and the second plane ME2 form an angle α with respect to the common intersection line DZ, and the angle α must be greater than 0° and less than 180°. To ensure a sufficiently high rigidity of the arrangement of the first solid joint 80A and the second solid joint 80B with respect to the translation of the carrier 70 or the sliding element GE relative to the gantry beam 15 in the second direction X and the third direction Y, the angle α preferably satisfies the condition 30°≦α≦90°. In the example shown in Figures 9 and 10, the angle α is approximately 60°.

[0168] An arrangement of the first solid joint 80A and the second solid joint 80B such that the first plane ME1 and the second plane ME2 form an angle α of approximately 60° with respect to the common intersection line DZ represents a good compromise in this case so that the stiffness of the arrangement of the first solid joint 80A and the second solid joint 80B with respect to rotation of the carrier 70 or sliding element GE relative to the gantry beam 15 about the common intersection line DZ of the first plane ME1 and the second plane ME2 is sufficiently low, and the stiffness of the first solid joint 80A and the second solid joint 80B with respect to translation of the carrier 70 or sliding element GE relative to the gantry beam 15 in the second direction X and the third direction Y is sufficiently high.

[0169] In this regard, the common intersection line DZ of the first plane ME1 and the second plane ME2 forms a "virtual" pivot axis (extending in the first direction Z) about which the carrier 70 or sliding element GE is rotatably supported relative to the gantry beam 15 by an arrangement of a first solid joint 80A and a second solid joint 80B.

[0170] Thus, by appropriate selection of the arrangement of the wall sections HSA1 and / or HSA2 and / or HSB1 and / or HSB2 of G, the maximum pivot angle through which the carrier 70 can be pivoted from its rest position about the "virtual" pivot axis DZ can be predefined. This protects the first solid joint 80A and the second solid joint 80B from mechanical overload. In the case of the positioning device 1, for example, the carrier 70 can be pivoted about the "virtual" pivot axis DZ relative to the gantry beam 15 by an angle of at least ±0.1°.

Claims

1. 1. A rotary joint assembly (DGA), comprising: a first portion (15); a second portion (70); a coupling device (KE) having at least one solid joint (80A, 80B) connecting the first part (15) and the second part (70) so that the second part is rotatable relative to the first part about a rotation axis (DZ) extending in a first direction (Z); Including, The first portion (15) and the second portion (70) each have an extension length perpendicular to the rotation axis (DZ), The second part is disposed relative to the first part and is shifted by a predetermined distance in the axial direction about a rotation axis (DZ), the coupling device (KE) has a first solid coupling (80A) and a second solid coupling (80B); The first solid joint (80A) comprises a first elongated solid body, which extends perpendicular to the first direction (Z) along a first plane (ME1) parallel to the first direction (Z) and has a longitudinal axis disposed perpendicular to the first direction (Z), and the first elongated solid body comprises the following longitudinal sections disposed one after the other in the direction of the longitudinal axis of the first elongated solid body: a first end section (E1) forming a first end of said first elongated solid body; a second end section (E2) forming a second end of the first elongated solid body, located opposite the first end of the first elongated solid body in the direction of the longitudinal axis of the first elongated solid body; a central section (F) arranged between the first and second end sections of said first elongated solid body; a first web portion (S1) arranged between the first end section (E1) and the central section (F) of said first elongated solid body and connected to the first end section (E1) and the central section (F); a second web portion (S2) disposed between the second end section (E2) and the central section (F) of said first elongated solid body and connected to the second end section (E2) and the central section (F) of said first elongated solid body; It has The second solid joint (80B) comprises a second elongated solid body, which extends perpendicular to the first direction (Z) along a second plane (ME2) parallel to the first direction (Z) and has a longitudinal axis disposed perpendicular to the first direction (Z), and the second elongated solid body comprises the following longitudinal sections disposed one after the other in the direction of the longitudinal axis of the second elongated solid body: a first end section (E1) forming a first end of said second elongated solid body; a second end section (E2) forming a second end of the second elongated solid body, located opposite the first end of the second elongated solid body in the direction of the longitudinal axis of the second elongated solid body; a central section (F) arranged between the first and second end sections of said second elongated solid body; a first web portion (S1) arranged between the first end section (E1) and the central section (F) of said second elongated solid body, said first web portion (S1) being connected to said first end section and said central section; a second web portion (S2) connected to the second end section (E2) and the central section (F) of said second elongated solid body, said second web portion (S2) being arranged between said second end section (E2) and the central section (F) of said second elongated solid body; It has The first portion (15) is connected to the second portion (70) via the first solid joint (80A) and the second solid joint (80B), a first end section (E1) of said first elongated solid body and a second end section (E2) of said first elongated solid body are rigidly connected to said second portion (70), and a central section (F) of said first elongated solid body is rigidly connected to said first portion (15); a first end section (E1) of the second elongated solid body and a second end section (E2) of the second elongated solid body are rigidly connected to the second portion (70), and a central section (F) of the second elongated solid body is rigidly connected to the first portion (15). are combined, the first plane (ME1) and the second plane (ME2) are inclined relative to each other so that the first plane (ME1) and the second plane (ME2) form a common intersection line (DZ) extending parallel to the first direction (Z); The first web portion (S1) and the second web portion (S2) of the first elongated solid body of the first solid joint (80A) are arranged perpendicular to a first plane (ME1) so as to define an extension length (t_3) of a first end section (E1) of the first elongated solid body perpendicular to the first plane (ME1), a length (t_3) of a second end section (E2) of the first elongated solid body perpendicular to the first plane (ME1), and a length (t_3) of a central section (F) of the first elongated solid body perpendicular to the first plane (ME1). each having an extension length (t_1, t_2) that is smaller than an extension length (t_4) perpendicular to a first end section (E1) of the first solid joint (80A), whereby the first web portion (S1) and the second web portion (S2) of the first elongated solid joint are elastically deformable, and the central section (F) of the first solid joint (80A) is movable relative to the first end section (E1) of the first solid joint (80A) and relative to the second end section (E2) of the first solid joint (80A); The first web portion (S1) and the second web portion (S2) of the second elongated solid body of the second solid joint (80B) are arranged perpendicular to the second plane (ME2) so as to define an extension length (t_3) of the first end section (E1) of the second elongated solid body perpendicular to the second plane (ME2), a length (t_3) of the second end section (E1) of the second elongated solid body perpendicular to the second plane (ME2), and a length (t_3) of the second end section (E2) of the second elongated solid body perpendicular to the second plane (ME2). ), whereby the first web portion (S1) and the second web portion (S2) of the second elongated solid body are elastically deformable, and the central section (F) of the second solid joint (80B) is movable relative to the first end section (E1) of the second solid joint (80B) and relative to the second end section (E2) of the second solid joint (80B); A rotary joint assembly (DGA), characterized in that the second part (70) is supported in the first part (15) by the first solid joint (80A) and the second solid joint (80B) so as to be rotatable about a common intersection line (DZ) between a first plane (ME1) and a second plane (ME2).

2. the first solid joint (80A) is symmetrically formed with respect to a first plane (ME1) in an undeformed state of the first solid joint (80A); and / or 2. The rotary joint assembly (DGA) according to claim 1, wherein the second solid joint (80B) is formed symmetrically with respect to a second plane (ME2) in an undeformed state of the second solid joint (80A).

3. a first end section (E1) of the first elongated solid body of the first solid joint (80A) has an extension length (h) in a first direction (Z) that is greater than an extension length (t_3) of the first end section (E1) of the first elongated solid body perpendicular to a first plane (ME1); and / or the second end section (E2) of the first elongated solid body of the first solid joint (80A) has an extension length (h) in a first direction (Z) that is greater than an extension length (t_3) of the second end section (E2) of the first elongated solid body perpendicular to the first plane (ME1); and / or the first elongated solid central section (F) of the first solid joint (80A) has an extension length (hF) in a first direction (Z) that is greater than an extension length (t_4) of the first elongated solid central section (F) perpendicular to the first plane (ME1); and / or the first web portion (S1) of the first elongated solid body of the first solid joint (80A) has an extension length (h) in a first direction (Z) that is greater than an extension length (t_2) of the first web portion (S1) of the first elongated solid body perpendicular to the first plane (ME1); and / or the second web portion (S2) of the first elongated solid body of the first solid joint (80A) has an extension length (h) in a first direction (Z) that is greater than the extension length (t_2) of the second web portion (S1) of the first elongated solid body perpendicular to the first plane (ME1); and / or the first end section (E1) of the second elongated solid body of the second solid joint (80B) has an extension length (h) in a first direction (Z) that is greater than an extension length (t_3) of the first end section (E1) of the second elongated solid body perpendicular to the second plane (ME2); and / or the second end section (E2) of the second elongated solid body of the second solid joint (80B) has an extension length (h) in the first direction (Z) that is greater than an extension length (t_3) of the second end section (E2) of the second elongated solid body perpendicular to the second plane (ME2); and / or the second elongated solid central section (F) of the second solid joint (80B) has an extension length (hF) in the first direction (Z) that is greater than an extension length (t_4) of the second elongated solid central section (F) perpendicular to the second plane (ME2); and / or the first web portion (S1) of the second elongated solid body of the second solid joint (80B) has an extension length (h) in a first direction (Z) that is greater than an extension length (t_2) of the first web portion (S1) of the second elongated solid body perpendicular to the second plane (ME2); and / or a second web portion (S2) of the second elongated solid body of the second solid joint (80B) having an extension length (h) in a first direction (Z) that is greater than an extension length (t_2) of the second web portion (S2) of the second elongated solid body perpendicular to a second plane (ME2); A rotary joint assembly (DGA) according to claim 1 or 2.

4. 4. The rotary joint assembly (DGA) according to claim 1, wherein the first solid joint (80A) in an undeformed state and the second solid joint (80B) in an undeformed state are arranged relative to each other such that the first solid joint (80A) and the second solid joint (80B) are arranged symmetrically with respect to a third plane (E3) extending parallel to the first direction (Z), wherein a common intersection line (DZ) of the first plane (ME1) and the second plane (ME2) extends within the third plane (E3).

5. 4. The rotary joint assembly (DGA) according to claim 1, wherein the first solid joint (80A) is disposed relative to the second solid joint (80B) such that the first solid joint (80A) is spaced apart from the second solid joint (80B) perpendicular to the first direction (Z).

6. the second part (70) has a first elongated cavity (71A) extending along a first plane (ME1) in a first direction (Z), and the first solid joint (80A) is arranged in the first elongated cavity (71A) such that the first solid joint (80A) extends through the first elongated cavity (71A) in the first direction (Z) over at least a portion of its extension length in the first direction (Z); the second part (70) has a second elongated cavity (71B) extending along a second plane (ME2) in a first direction (Z), and the second solid joint (80B) is arranged in the second elongated cavity (71B) such that the second solid joint (80B) extends through the second elongated cavity (71A) in the first direction (Z) over at least a portion of its extension length in the first direction (Z); A rotary joint assembly (DGA) according to any one of claims 1 to 5.

7. the first elongated cavity (71A) is disposed along a first plane (ME1) with a longitudinal axis of the first elongated cavity (71A) being parallel to the first plane (ME1) and perpendicular to a first direction (Z); the first elongated cavity (71A) extends laterally with respect to the first plane (ME1) as defined by two opposing side walls (HSA1, HSA2) of the second part (70), the two side walls (HSA1, HSA2) each extending parallel to the first plane (ME1) in the first direction (Z) and spaced apart from each other in a direction perpendicular to the first plane (ME1); 7. The rotary joint assembly (DGA) of claim 6, wherein the second elongated cavity (71B) is disposed along a second plane (ME2) with a longitudinal axis of the second elongated cavity (71B) parallel to the second plane (ME2) and perpendicular to the first direction (Z), and the second elongated cavity (71B) extends laterally with respect to the second plane (ME2) as defined by two opposing side walls (HSB1, HSB2) of the second part (70), the two side walls (HSB1, HSB2) each extending parallel to the second plane (ME2) in the first direction (Z) and spaced apart from each other in a direction perpendicular to the second plane (ME2).

8. two opposing side walls (HSA1, HSA2) of the second part (70), which laterally define the first elongated cavity (71A) with respect to the first plane (ME1), are shaped in such a way that the side walls (HSA1, HSA2) surround the first end section (E1) and the second end section (E2) of the first solid coupling (80A), whereby the first end section (E1) and the second end section (E2) of the first solid coupling (80A) are form-fittingly connected to the second part (70); 8. The rotary joint assembly (DGA) according to claim 6 or 7, wherein the two opposing side walls (HSB1, HSB2) of the second part (70), which define the second elongated cavity (71B) laterally with respect to the second plane (ME2), are shaped in such a way that the side walls (HSB1, HSB2) surround the first end section (E1) and the second end section (E2) of the second solid joint (80B), whereby the first end section (E1) and the second end section (E2) of the second solid joint (80B) are connected to the second part (70) in a form-fitting manner.

9. The two opposing side walls (HSA1, HSA2) of the second part (70), which define the first elongated hollow chamber (71A) laterally with respect to the first plane (ME1), are shaped so that the side walls (HSA1, HSA2) surround the central section (F) of the first solid joint (80A), and define the first elongated hollow chamber (71A) laterally with respect to the first plane (ME1). the two opposing side walls (HSA1, HSA2) of the two parts (70) have a distance, perpendicular to the first plane (ME1), greater than an extension length (t_4) of the central section (F) of the first solid joint (80A) perpendicular to the first plane (ME1), thereby allowing the central section (F) of the first solid joint (80A) to move relatively to the second part (70); The two opposing side walls (HSB1, HSB2) of the second part (70), which define the second elongated cavity (71B) laterally with respect to the second plane (ME2), are shaped so that the side walls (HSB1, HSB2) surround the central section (F) of the second solid joint (80B), and the two opposing side walls (HSB1, HSB2) of the second part (70), which define the second elongated cavity (71B) laterally with respect to the second plane (ME2), are shaped so that the side walls (HSB1, HSB2) surround the central section (F) of the second solid joint (80B).

9. The rotary joint assembly (DGA) according to claim 6, wherein the side walls (HSB1, HSB2) of the second solid joint (80B) have a distance, perpendicular to the second plane (ME2), that is greater than an extension length (t_4) of the central section (F) of the second solid joint (80B) perpendicular to the second plane (ME2), thereby allowing the central section (F) of the second solid joint (80B) to move relative to the second part (70).

10. the central section (F) of said first solid joint (80A) is movable relative to said second part (70) in a translational movement perpendicular to a first plane (ME1); and / or a central section (F) of said first solid joint (80A) is pivotally movable relative to said second part (70) about a pivot axis extending in a first direction (Z); and / or a central section (F) of said second solid joint (80B) is movable relative to said second part (70) in translation perpendicular to said second plane (ME2); and / or 9. A rotary joint assembly (DGA) according to any one of claims 6 to 8, wherein a central section (F) of the second solid joint (80A) is movable relative to the second part (70) by rotation about a rotation axis extending in the first direction (Z).

11. 11. A rotary joint assembly (DGA) according to any one of claims 1 to 10, wherein the first plane (ME1) and the second plane (ME2) are inclined relative to each other so that they intersect at a common intersection line (DZ) at an angle of greater than 10° and less than 120°.

12. 12. A rotary joint assembly (DGA) according to any one of claims 1 to 11, wherein the first plane (ME1) and the second plane (ME2) are inclined relative to each other so that they intersect at a common intersection line (DZ) at an angle greater than 30° and less than 90°.

13. A positioning device (1) comprising a rotary joint assembly (DGA) according to any one of claims 1 to 12 and a linear guide device (B, FB) for guiding a first part (15) or a second part (70) of the rotary joint assembly (DGA), the first portion of the rotary joint assembly (DGA) is guided by the linear guide device so that the first portion is movable linearly in a second direction (X) extending perpendicular to the first direction (Z); or A positioning device (1), wherein the second part (70) of the rotary joint assembly (DGA) is guided using the linear guide device (B, FB) so that the second part (70) is linearly movable in a second direction (X) extending perpendicular to the first direction (Z).

14. 14. The positioning device (1) according to claim 13, wherein there is at least one linear drive device (LMX1, LMX2) coupled to the first part (15) of the rotary joint assembly (DGA) for moving the first part (15) in a second direction (X) when the second part (70) is guided by means of the linear guide device (B, FB).

15. 15. The positioning device according to claim 13 or 14, wherein the linear guide device comprises a base (B) with at least one flat guide surface (FF) and / or a guide beam (FB) with at least one flat guide surface (SF), and the second part (70) is guided on the flat guide surface of the base (B) and / or on the flat guide surface (SF) of the guide beam (FB) by means of at least one air bearing (L1, L2, L3, L4).

16. When the first portion is guided using the linear guide device, 14. The positioning device (1) according to claim 13, wherein there is at least one linear drive coupled to the second part of the rotary joint assembly for moving the second part in a second direction (X).

17. 17. A positioning device according to claim 13 or 16, wherein the linear guide device comprises a base (B) with at least one flat guide surface (FF) and / or a guide beam (FB) with at least one flat guide surface (SF), and the first part is guided on the flat guide surface of the base (B) and / or the flat guide surface (SF) of the guide beam (FB) using at least one air bearing.

Images