Reticle container with directional purge flow

Abstract

The reticle container includes an outer pod and an inner pod, the inner pod configured to contain the reticle. The outer pod includes a pod door including a purge port and a pod dome including one or more channels configured to receive purge gas from the purge port and direct the purge gas to specific locations within the outer pod. The channels can direct the purge gas to one or more filters in the inner pod. The channels can direct the purge gas so that a pressure differential exists between the pressure in the first filter and the pressure in the second filter. The inner pod can include a deflector or channel to further direct the purge flow through the inner pod to purge an area surrounding the reticle.

Description

[Technical Field]

[0001] The present disclosure relates to reticle containers that include ports and channels for providing directed flow, for example, for providing purging functionality to the reticle container. [Background technology]

[0002] Reticle containers typically include a pod-within-pod construct, where the reticle is contained in an inner pod and an outer pod surrounds the inner pod, which can obstruct or restrict the flow of purge gas over the reticle, slowing down purging of the reticle container. Summary of the Invention

[0003] The present disclosure relates to reticle containers that include ports and channels for providing directed flow, for example, for providing purging functionality to the reticle container.

[0004] Reticles can be adversely affected by the presence of contaminants, for example, causing oxidation or other problems. The contaminants can be gaseous contaminants. The contaminants can include, for example, water in the form of humidity, volatile organic compounds, etc. The reticle can be exposed to such contaminants for extended periods of time when contained within a reticle pod due to pod seals or other restrictions on flow into and out of the pod. The reticle can be purged to drive out these contaminants by providing a purge gas to the reticle pod. In embodiments, the purge gas can be further directed to improve effectiveness in driving out contaminants from the reticle pod.

[0005] By using channels to direct purge gas flow from a port in the pod door to a filter in the inner pod, the purge flow through the inner pod and therefore the ability to purge the environment around the reticle to remove potential contaminants can be improved. Additionally, by using channels to create a pressure differential and optionally providing a flow directing mechanism within the inner pod, flow can be directed into and through the inner pod, providing further improvement in purge effectiveness.

[0006] In one embodiment, the reticle pod includes an inner pod including a cover and a base plate. At least one filter is provided on the cover or the base plate. The inner pod is configured to house a reticle. The reticle pod also includes an outer pod configured to house the inner pod. The outer pod includes a pod door including one or more purge inlets and a pod dome. At least one of the pod door and the pod dome includes one or more channels configured to direct flow from one of the at least one purge inlets to one of the at least one filter.

[0007] In one embodiment, the channel is a closed duct.

[0008] In one embodiment, the inner pod includes a plurality of the filters. In one embodiment, the one or more channels are configured to direct flow such that a first pressure in a first filter of the plurality of filters is greater than a second pressure in a second filter of the plurality of filters. In one embodiment, the inner pod includes one or more deflectors disposed on an inner surface of the inner pod. In one embodiment, the one or more deflectors are disposed between the first filter and the second filter.

[0009] In one embodiment, the one or more channels are formed in the pod dome. In one embodiment, the pod dome includes a pod dome shell and one or more inserts bonded to the pod dome shell, wherein the one or more channels are defined by the pod dome shell and the one or more inserts. In one embodiment, the inserts are mechanically bonded to the pod dome shell. In one embodiment, the pod dome includes a purge inlet interface for each of the one or more purge inlets included in the pod door, the purge inlet interface configured to direct flow from one of the purge inlets to at least one of the one or more channels. In one embodiment, each purge inlet interface includes a seal configured to contact the pod door surrounding one of the purge inlets. In one embodiment, each purge inlet interface is spaced from a surface of the pod door surrounding one of the purge inlets when the pod dome is bonded to the pod door. In one embodiment, each purge inlet interface is configured to define a serpentine path between one of the purge inlets and an interior space of the outer pod outside the channel.

[0010] In one embodiment, the one or more channels are provided in the pod door, hi one embodiment, the one or more channels are at least partially defined by an insert attached to the pod door.

[0011] In one embodiment, a method for purging a reticle pod includes providing a purge gas at one or more purge inlets disposed in the outer pod, and directing the purge gas from the one or more purge inlets through one or more channels formed in the outer pod to at least one filter disposed in the inner pod, where the purge gas enters the inner pod at the at least one filter.

[0012] In one embodiment, one or more of the channels is a closed duct.

[0013] In one embodiment, the inner pod includes a plurality of filters, and the purge gas is directed to at least one filter such that a first pressure at a first filter of the plurality of filters is greater than a second pressure at a second filter of the plurality of filters. In one embodiment, the method further includes deflecting the flow of the purge gas within the inner pod using at least one deflector disposed on an inner surface of the inner pod.

[0014] In one embodiment, the method further includes directing flow from the one or more purge inlets to the one or more channels using one or more purge inlet interfaces. In one embodiment, the purge inlet interfaces each form a seal surrounding one of the one or more purge inlets. In one embodiment, each of the purge inlet interfaces is spaced from a surface of the pod door that surrounds a corresponding one of the purge inlets when the pod dome is mated to the pod door.

[0015] In one embodiment, the one or more channels are formed in a pod dome of the outer pod.In one embodiment, the one or more channels are formed in a pod door of the outer pod.

[0016] In one embodiment, the method includes purging an inner pod of a dual-pod reticle container by directing purge gas from one or more inlets on the outer pod inlet through one or more channels formed in the outer pod to at least one filter provided in the inner pod. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 2 is an exploded view of a reticle container according to one embodiment. [Figure 2] 1A-1C illustrate a method for purging a reticle container according to one embodiment. [Figure 3] 1 is a cross-sectional view of a reticle container according to one embodiment. [Figure 4A] 1 is a cross-sectional view of a reticle container according to one embodiment. [Figure 4B] 1 is a cross-sectional view of a reticle container according to one embodiment. [Figure 4C] 1 is a cross-sectional view of a reticle container according to one embodiment. [Figure 5] 10A-10C illustrate a cover for an inner pod according to one embodiment. [Figure 6] 10A-10C illustrate a base plate of an inner pod according to one embodiment. [Figure 7] 10A-10C illustrate an inner pod base plate and an outer pod door according to one embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0018] The present disclosure relates to reticle containers that include ports and channels for providing directed flow, for example, for providing purging functionality to the reticle container.

[0019] As used herein, a "channel" refers to any guided flow path that can direct purge gas into a reticle pod. A channel can include, for example, a groove or recess through which purge gas can flow, a deflector configured to guide the flow, a closed duct as defined below, a combination thereof, etc. A channel may include multiple features for directing purge gas through the guided flow path, for example, a groove or recess that directs the flow into an inlet of a closed duct or a closed duct where the end point directs the flow at a flow deflector or into a groove or recess.

[0020] As used herein, a "closed duct" refers to a channel that is a passage enclosed on all sides from a beginning, such as an air inlet, to an end, such as a purge distributor. In one embodiment, a closed duct can be used to provide part or all of a channel. The beginning and end of a closed duct as defined herein can optionally be sealed when connecting to other features, such as a purge inlet port or a portion of a reticle pod that receives purge flow, although such sealing is not required for an enclosed passage to be considered a closed duct. When a closed duct is sealed at one or both of its beginning and end, higher pressures of purge gas can be achieved within the closed duct.

[0021] 1 shows an exploded view of a reticle container according to one embodiment. Reticle container 100 includes an inner pod 102 and an outer pod 104. Inner pod 102 includes a cover 106 and a base plate 108. Inner pod 102 is provided with one or more filters 110. Outer pod 104 includes a pod dome 112 and a pod door 114. Pod door 114 includes one or more purge ports 116.

[0022] Reticle container 100 is configured to house a reticle. Reticle container 100 may be, for example, a photolithography reticle pod, for use with reticles processed by extreme ultraviolet (EUV) photolithography. Reticle container 100 can be used for transporting and storing reticles.

[0023] The inner pod 102 is configured to contain a reticle. The inner pod 102 includes a cover 106 and a base plate 108. The inner pod 102 is provided with a filter 110. The filter 110 can be located on one or both of the cover 106 and the base plate 108. In the embodiment shown in FIG. 1 , two filters 110 are provided on the cover 106. The filters 110 can allow gas to pass into and out of the interior space of the inner pod 102, which can contain a reticle. In one embodiment, at least one of the filters 110 can be used to allow a purge to enter the interior space of the inner pod 102, and at least another of the filters 110 can be used to allow a purge to exit the interior space of the inner pod 102. The passage of gas into and out of the interior space of the inner pod 102 through the filters 110 can be based on the relative pressure of the gas in each of the filters 110. In one embodiment, the inner pod 102 may include one or more mechanisms for directing flow inside the inner pod 102, such as recesses or grooves formed in one or both of the cover 106 and base plate 108, flow deflectors positioned between at least two filters 110 on the inner surface of one or both of the cover 106 and base plate 108, combinations thereof, etc.

[0024] The outer pod 104 is configured to house the inner pod 102. The outer pod 104 includes a pod dome 112 and a pod door 114. The pod dome 112 and the pod door 114 can be latched together to secure the pod door 114 to the pod dome 112.

[0025] The pod dome 112 is configured to define an interior space capable of housing the inner pod 102 when a reticle is contained within the inner pod 102. The pod dome 112 can define one or more channels configured to direct the flow of gas, such as a purge gas, within the interior space of the outer pod 104. The channel can be any suitable shape for directing the flow of purge gas through the interior space of the outer pod 104, such as a closed duct or an open groove or recess in the interior surface of the pod dome 112. A closed duct is defined as a passageway completely surrounded by a wall. The closed duct can be configured to allow the pressure within the closed duct to exceed the pressure of at least a portion of the interior space of the outer pod 104. The channel can be positioned to provide a channel inlet configured to interface with the purge port 116. In one embodiment, interfacing the channel with the purge port 116 includes positioning the channel inlet proximate to the purge port 116. In one embodiment, interfacing the channel with the purge port 116 includes a seal. In one embodiment, the channel interface with the purge port 116 includes corresponding features that define a tortuous path so that flow from the purge port 116 enters the channel rather than entering the interior space of the outer pod 104. The channel can be configured to direct the flow of gas from the purge port 116 along a desired flow path or to a desired location for delivery of the gas from the purge port 116. In one embodiment, the desired location for delivery of the gas from the purge port 116 is at one or more of the filters 110. In one embodiment, the channel included in the pod dome 112 can direct the gas from the purge port 116 to at least one, but not all, of the filters 110 provided in the inner pod 102.

[0026] The pod door 114 is configured to be joined to the pod dome 112 at an opening to enclose the outer pod 104. The pod door 114 may include a latch mechanism configured to secure the pod door 114 to the pod dome 112. The pod door 114 may include one or more purge ports 116. The purge ports 116 are ports extending through the pod door 114 to allow gas, such as a purge gas, to be introduced into the interior space of the outer pod 104. The purge ports 116 may include any suitable filter or flow control, such as a valve, e.g., an umbrella valve. Each purge port 116 may include an interface that allows connection to a purge source, such as a purge line of a load port or a storage unit in which the reticle container 100 may reside. The purge ports 116 are configured to deliver gas from the interface with the purge source to an opening inside the pod door 114. The pod door 114 may optionally include an interface mechanism surrounding the inner opening of the pod door 114 to, for example, direct flow into channels provided in the pod dome 112 or restrict flow to the interior space of the outer pod 104, for example, by at least partially defining a serpentine path so that flow through the purge port 116 primarily enters one or more of the channels provided in the pod dome 112.

[0027] 2 illustrates a method for purging a reticle container according to one embodiment. Method 200 includes providing a purge gas at a purge port of an outer pod at 202, receiving the purge gas at one or more channels formed in a pod dome at 204, directing the purge gas to a location on an inner pod at 206, and the purge gas entering the inner pod at 208. Optionally, the method can further include directing a flow of purge gas within the inner pod at 210.

[0028] A purge gas is provided at 202. The purge gas may be any suitable purge gas for introduction into the reticle container, such as, but not limited to, nitrogen, clean dry air (CDA), ultra clean dry air (xCDA), an inert gas, combinations thereof, etc. The purge gas may be provided to the reticle container at one or more purge ports located on the reticle container, such as purge port 116 located on pod door 114 of reticle container 100 shown in FIG. 1 and described above. It will be understood that the purge port may alternatively be located on pod dome 112 or any other suitable point outside the reticle container for introduction into the interior of the reticle container. The purge gas may be provided at one or more purge ports at 202 by any suitable piping or connection to the purge port, such as purge lines and connectors located on a photolithography tool, load port, storage area, etc.

[0029] Purge gas is received in one or more channels at 204. The channels may be defined by a pod dome, such as pod dome 112 described above and shown in FIG. 1 , or an insert comprising a pod dome. The channels may include one end located at or near a purge port where the purge gas is received at 202. In one embodiment, the end of the channel at or near the purge port forms a seal with a corresponding purge port. In one embodiment, the end of the channel at or near the purge port is proximate to the purge port such that a majority of the flow through the purge port enters the channel. In one embodiment, the end of the channel and the purge port are configured such that a tortuous path is defined to prevent flow from the purge port to the interior of the reticle container without entering and passing through the channel.

[0030] The purge gas is directed to a location in the inner pod at 206. The purge gas can be directed at 206 by one or more channels configured to carry the purge gas to a location within the outer pod where it is desired to release it. The channel can be formed in the pod dome or an insert bonded to the pod dome. The channel can be any suitable channel for directing at least a portion of the purge gas, such as a closed duct, an open groove, or other such passage, or a combination thereof. The location to which the purge gas is directed can correspond to a location on or a feature of the inner pod, such as one or more filters provided in the inner pod. In one embodiment, the purge gas can be directed to at least one, but not all, of the filters provided in the inner pod such that there is at least one filter through which the purge gas is exposed to a relatively high pressure and at least one filter through which the purge gas is exposed to a relatively low pressure.

[0031] Purge gas enters the inner pod at 208. The purge gas may enter the inner pod at 208 through one or more of the filters provided in the inner pod. In embodiments with at least one filter having a relatively high purge gas pressure and at least one filter having a relatively low purge gas pressure, the purge gas may enter the inner pod at 208 at the one or more filters having the relatively high purge gas pressure. The purge gas entering the inner pod at 208, and any gaseous substances such as gaseous contaminants purged by the introduction of the purge gas into the inner pod at 208, may leave the inner pod at one or more of the filters. In embodiments with at least one filter having a relatively low purge gas pressure, the purge gas and any other gaseous materials may exit the inner pod at the filter having the relatively low pressure.

[0032] Optionally, the method further includes directing a flow of purge gas within the inner pod at 210. The flow direction at 210 can be performed using one or more deflectors or channels provided inside the interior space of the inner pod, for example, using such features formed on the inner surface of one or both of the cover and base plate. The flow direction at 210 can follow a desired flow path through the inner pod to provide a desired purging of the interior space. The flow direction at 210 can include directing the purge gas from one or more high-pressure filters where the purge gas enters the interior space of the inner pod, through the interior space, and finally to one or more low-pressure filters where the purge gas exits the interior space of the inner pod.

[0033] FIG. 3 illustrates a cross-sectional view of a pod dome of a reticle container according to one embodiment. The pod dome 300 includes a channel 302 defined by an inner wall 304 and an outer wall 306. The channel 302 extends to a purge gas distributor 308. The purge gas distributor 308 is positioned opposite a filter (not shown) provided in a cover (not shown) of the inner pod of the reticle container. The filter may be, for example, one of the filters 110 of the cover 106 described above and shown in FIG. 1 . An insert 310 may provide a portion of the inner wall 304, etc., that defines the channel 302.

[0034] Channel 302 extends from a channel inlet, such as channel inlet 412, described below and shown in Figures 4A-4C. Channel 302 is configured to transport purge gas received at inlet 312 from a purge port, such as purge port 116, described above and shown in Figure 1, or purge port 404, described below and shown in Figures 4A-4C. The channel can have any suitable shape for transporting purge gas from the channel inlet to a desired location where purge flow is provided.

[0035] In one embodiment, channel 302 is a closed duct channel including an inner wall 304 and an outer wall 306. Outer wall 306 can be formed within pod dome 300. In one embodiment, inner wall 304 is also integrally formed with pod dome 300. In one embodiment, inner wall 304 is part of an insert 310 joined to pod dome 300 by a mechanical engagement, such as one or more snap fits. In one embodiment, channel 302 can be defined only by outer wall 306, such as by grooves, recesses, or other features configured to direct the flow of purge gas. In one embodiment, channel 302 omitting inner wall 304 can instead rely on other structures, such as inner pods, including inner pod covers, to help direct the flow to the desired location.

[0036] In the embodiment shown in FIG. 3 , the desired location to which the channel 302 conveys the purge gas is the purge gas distributor 308. The purge gas distributor 308 can be configured to direct the purge gas to a desired point within the interior space defined by the pod dome 300. In the embodiment shown in FIG. 3 , the purge gas distributor 308 faces at least one filter provided in the cover. The purge gas distributor 308 can allow the purge gas to exit the channel 302 proximate the filter so that the purge gas can enter the inner pod through the filter. In one embodiment, the filter can be provided with a purge gas pressure that is greater than the pressure of the purge gas elsewhere within the interior space defined by the pod dome 300. The filter can be provided with a purge gas pressure that is greater than the pressure at a second filter (not shown), allowing the purge gas to enter the inner pod at the filter and allowing gas, including the purge gas and any other gases, to exit the inner pod at the second filter.

[0037] The insert 310 can at least partially define the channel 302 in the pod dome 300. The insert 310 can include a surface that encloses or otherwise defines the channel. In one embodiment, the insert can be retained by contact with the interior of the reticle container, such as a component of the outer pod 104 as described above and shown in FIG. 1 or the exterior of the inner pod 102. In one embodiment, the insert 310 can be configured to be secured to the pod dome 300 via any suitable means, such as by mechanical engagement using corresponding snap-fit ​​or other engagement features on the insert 310 and the pod dome 300. The insert 310 can include channel features configured to interface with purge ports, for example, as described below and shown in FIGS. 4A-4C. The insert 310 can include one or more separate components.

[0038] 4A shows a cross-sectional view of a reticle container according to one embodiment. Reticle container 400 includes a pod door 402. A purge port 404 is included in pod door 402, surrounded by a peripheral region 406. A pod dome 408 defines a channel 410 having a channel inlet 412 positioned closely above purge port 404, with a channel inlet wall 414 separated from peripheral region 406 by an interface gap 416.

[0039] Reticle container 400 is a reticle pod that includes an outer pod defined by pod door 402 and pod dome 408, and an inner pod (not shown) contained within the outer pod. The outer pod is configured to receive a flow of purge gas at purge port 404 and direct the flow of purge gas to specific locations by distributing the flow within the interior space of the outer pod using one or more channels 410.

[0040] 4A , the channel inlet wall 414 is configured to face the peripheral region 406 of the pod door 402 that surrounds the purge port. The channel inlet wall 414 can be configured to be spaced apart from the peripheral region 406 such that there is no contact between the inlet wall 414 and the peripheral region 406. The spacing between the peripheral region 406 and the inlet wall 414 can form an interface gap 416. The interface gap 416 can be sized such that flow through the purge port 404 is primarily directed into the channel inlet 412, into the channel 410, and through the reticle container.

[0041] FIG. 4B illustrates a cross-sectional view of a reticle container according to one embodiment. In the embodiment illustrated in FIG. 4B, a seal 420 is provided at one or both ends of the peripheral region 406 and the channel inlet wall 414 to seal the junction between the purge port 404 and the channel inlet 412. The seal 420 can be made from one or more pieces of resilient material configured to be compressed when the pod dome and pod door are joined to form the outer pod of the reticle container. Any suitable resilient material capable of forming a seal when compressed between the peripheral region 406 and the channel inlet wall 414 can be used. The material of the seal 420 can be selected to limit or eliminate off-gassing, limit particle generation, etc., so that the seal 420 does not substantially contribute to potential contamination of the reticle. Non-limiting examples of materials for the seal 420 can include polyolefins, fluoroelastomers, etc. Further non-limiting examples of materials for the seal 420 can include Viton™ or polybutyl terephthalate (PBT). In one embodiment, the seal 420 can include one or more portions disposed in one or more recesses 422 formed in one or both of the ends of the peripheral region 406 and the channel inlet wall 414. In one embodiment, the seal 420 can fit over the ends of the channel inlet wall. In one embodiment, the seal 420, or portions thereof, can be mechanically joined to one or both of the peripheral region 406 and the channel inlet wall by any suitable mechanical connection, for example, using a press-fit protrusion and corresponding recess, a snap-fit ​​engagement mechanism, or the like. The seal can restrict or prevent flow through the purge port 404 such that flow is directed primarily or entirely into the channel inlet 412, into the channel 410, and through the reticle container.

[0042] FIG. 4C illustrates a cross-sectional view of a reticle container according to one embodiment. In the embodiment illustrated in FIG. 4C, the channel inlet wall 414 includes an inlet-side protrusion 430 and an inlet-side recess 432, and corresponding port-side recesses 434 and 436 are provided in the peripheral region 406. When the outer pod including the pod door 402 and pod dome 408 is assembled, the inlet-side protrusion 430 faces the port-side recess 434, and the inlet-side recess 432 faces the port-side protrusion 436. Each protrusion and corresponding recess 430, 432, 434, 436 can define a serpentine path with a gap 438 having multiple bends in the serpentine path. The gap 438 can vary in width along the serpentine path. The bend can be an area where the flow through the serpentine path must change direction as it flows from the junction of the purge port 404 and the channel inlet 412 toward the interior space of the outer pod defined by the pod door 402 and the pod dome 408. The serpentine path can restrict the flow so that the flow through the purge port 404 is primarily directed into the channel inlet 412 and into the channel 410 and through the reticle container.

[0043] 5 illustrates a cover for an inner pod according to one embodiment. Cover 500 is a cover for an inner pod, such as inner pod 102 described above and shown in FIG. 1. Cover 500 includes a sealing area 502 and a reticle receiving area 504. Reticle receiving area 504 may include a first one or more filter openings 506. In one embodiment, reticle receiving area 504 may also include a second one or more filter openings 508. Optionally, deflector 510 may also be included in reticle receiving area 504.

[0044] Sealing area 502 is an area configured to be adjacent to or in contact with a corresponding sealing area on a base plate included in an inner pod that includes cover 500. The sealing area surrounds and defines reticle receiving area 504. The reticle receiving area is a portion of cover 500 configured to receive at least a portion of a reticle such that the reticle can be contained within an inner pod formed by joining cover 500 to the corresponding base plate.

[0045] The reticle receiving area 504 is provided with one or more first filter openings 506. The first one or more filter openings 506 are openings configured to allow gas to enter and exit the interior space of the inner pod including the cover 500. In one embodiment, the first one or more filter openings 506 are all associated with a particular filter provided in the cover 500. In one embodiment, the first one or more filter openings 506 are associated with a first filter through which the pressure of the purge gas is greater than that of a second filter, such that the purge gas enters the inner pod through the first one or more filter openings.

[0046] In some embodiments, the reticle receiving area 504 can include one or more second filter openings 508. The second one or more filter openings 508 are openings configured to allow gas to enter and exit the interior space of the inner pod including the cover 500. In one embodiment, the second one or more filter openings 508 are all associated with a second specific filter provided in the cover 500 that is separate from the filter associated with the first one or more filter openings 506. The second specific filter can be a filter in which the pressure of the purge gas is relatively lower than the pressure of the purge gas in the first filter, such that the purge gas exits the inner pod including the cover 500 at the second one or more filter openings 508.

[0047] In one embodiment, one or more deflectors 510 may be provided on the cover 500 within the reticle receiving area 504. The one or more deflectors may be protrusions, such as ridges, flanges, blocks, beveled surfaces, or curved surfaces, extending outward from the reticle receiving area 504. The deflectors 510 are configured to direct the flow of purge gas within the inner pod that includes the cover 500. The configuration of the deflectors 510, including their size, shape, placement, etc., may be selected to achieve a desired flow of purge gas through the inner pod. In one embodiment, the deflectors 510 are configured to prevent flow from passing directly from one or more first filter openings 506 in a filter that has a relatively high pressure of purge gas to one or more second filter openings 508 in a filter that has a relatively low pressure of purge gas. In one embodiment, the deflectors 510 may be configured to provide a flow of purge gas to other portions of the interior space of the inner pod that includes the cover 500. In one embodiment, the deflector 510 can direct the flow into a channel in the base plate, such as channel 608, described below and shown in FIG.

[0048] 6 illustrates a base plate of an inner pod according to one embodiment. Base plate 600 is the base plate of an inner pod, such as inner pod 102 described above and shown in FIG. 1. Base plate 600 includes a sealing area 602 and a reticle receiving area 604. Reticle receiving area 604 includes a plurality of reticle supports 606. Recesses or channels 608 are provided in one or both of sealing area 602 and reticle receiving area 604 to allow flow around and under the reticle when it is within the reticle receiving area.

[0049] Sealing area 602 surrounds reticle receiving area 604. Sealing area 602 can include sealing surface 610. Sealing surface 610 is configured to contact or be adjacent to an opposing sealing surface of a cover, such as cover 500 described above and shown in FIG. 5, to define a reticle receiving space.

[0050] Reticle receiving area 604 is an area configured to receive at least a portion of a reticle when a reticle container including base plate 600 is assembled. Reticle receiving area 604 includes a plurality of reticle supports 606 configured to support a reticle and hold the reticle in place when a reticle container including base plate 600 is assembled.

[0051] The recess or channel 608 can be provided in one or both of the sealing region 602 and the reticle receiving region 604. The recess or channel can be, for example, a recessed region, groove, notch, trench, duct, etc. formed in one or both of the sealing region 602 and the reticle receiving region 604. The recess or channel can be provided in any suitable configuration to facilitate the flow of purge gas under the reticle when an inner pod including the base plate 600 is assembled to contain the reticle and purge flow is provided to the inner pod, for example, through one or more filters included in a cover fitted to the base plate 600. The recess or channel 608 can provide an area through which purge flow can pass around and under the reticle when the reticle is placed on the reticle support 606. The configuration of the recess or channel 608, including, for example, the orientation, depth, shape, etc. of the recess or channel 608, can be any suitable configuration to facilitate the desired flow of purge gas under the reticle.

[0052] 7 illustrates a base plate of an inner pod and a pod door of an outer pod according to one embodiment. The base plate 700 includes a filter opening 702 formed therein to allow gas to enter and exit the inner pod, including the base plate 700. The filter opening can have any suitable size and location for allowing gas to enter and exit the inner pod. The filter opening can be located within a reticle-receiving area of ​​the base plate 700.

[0053] The pod door 704 has a purge gas director 706. The purge gas director 706 includes a purge inlet interface 708, a channel 710, and a purge gas distributor 712. The purge gas director 706 can be provided as a module integrally formed with and attached to the pod door 704, or can include features formed in and one or more inserts attached to the pod door 704 to define the features of the purge gas director 706, or portions thereof. Attachment of the module or insert providing the purge gas director 706 can be by a snap fit, a mechanical attachment such as a slot and tab combination, or an adhesive that can be selected at least in part based on gas release characteristics, etc.

[0054] The purge gas director 706 includes a purge inlet interface 708. In one embodiment, the purge inlet interface 708 is integral with a purge port located in the pod door 704, such as purge port 116 described above and shown in FIG. 1. In one embodiment, the purge inlet interface 708 can interface with the purge port via any suitable interface, such as the interfaces shown in FIGS. 4A-4C and described above. The purge inlet interface 708 is configured to receive purge gas from the purge port located in the pod door and direct the received purge gas into a channel 710.

[0055] 7, the channel 710 is a guided flow path configured to direct purge gas from the purge inlet interface 708 to the purge gas distributor 712. In the embodiment shown in FIG. 7, the channel 710 is a closed duct, which is a passage that is surrounded on all sides as it extends from the purge inlet interface 708 to the purge gas distributor 712. The channel 710 may alternately be a recess, a groove, one or more deflectors, a combination thereof, or the like. The channel 710 provides for the flow of purge gas from the purge inlet interface 708 to the purge gas distributor 712.

[0056] The purge gas distributor 712 is configured to direct purge gas toward the filter openings 702 in the base plate 700. The purge gas distributor 712 can include one or more openings positioned opposite the filter openings 702. The purge gas distributor 712 can include one or more walls or deflectors configured to reduce or prevent the flow of purge gas into the interior of the outer pod without passing through the filter openings 702. The purge gas distributor can interface with the filter openings 702 or surrounding features on the base plate 700 to form a seal or otherwise enable a pressure differential to be created between the purge gas in the purge gas distributor 712 and the interior of the outer pod.

[0057] Aspects: It is understood that any of the embodiments 1-13 can be combined with any of the embodiments 14-20.

[0058] Aspect 1. An inner pod including a cover and a base plate, wherein the cover or base plate is provided with at least one filter, and the inner pod is configured to house a reticle; an outer pod configured to house an inner pod, a pod door including one or more purge inlets; and Pod Dome an outer pod comprising: and wherein at least one of the pod door and the pod dome includes one or more channels each configured to direct flow from one of the at least one purge inlets to one of the at least one filters.

[0059] Embodiment 2. The reticle pod of embodiment 1, wherein the channel is a closed duct.

[0060] Aspect 3. A reticle pod according to any one of Aspects 1 to 2, wherein the inner pod includes a plurality of said filters.

[0061] Embodiment 4. A reticle pod as described in embodiment 3, wherein one or more channels are configured to direct flow such that a first pressure in a first filter of the plurality of filters is greater than a second pressure in a second filter of the plurality of filters.

[0062] Embodiment 5. The reticle pod of embodiment 4, wherein the inner pod includes one or more deflectors disposed on an inner surface of the inner pod.

[0063] Embodiment 6. The reticle pod of embodiment 5, wherein one or more deflectors are disposed between the first filter and the second filter.

[0064] Embodiment 7. A reticle pod according to any one of embodiments 1-6, wherein one or more channels are formed within the pod dome.

[0065] Embodiment 8. A reticle pod as described in embodiment 7, wherein the pod dome includes a pod dome shell and one or more inserts joined to the pod dome shell, and the one or more channels are defined by the pod dome shell and the one or more inserts.

[0066] Embodiment 9. The reticle pod of embodiment 8, wherein the insert is mechanically joined to the pod dome shell.

[0067] Embodiment 10. A reticle pod described in any of embodiments 7 to 9, wherein the pod dome includes a purge inlet interface for each of one or more purge inlets included in the pod door, and the purge inlet interface is configured to direct flow from one of the purge inlets to at least one of the one or more channels.

[0068] Embodiment 11. The reticle pod of embodiment 10, wherein each purge inlet interface includes a seal configured to contact a pod door surrounding one of the purge inlets.

[0069] Embodiment 12. A reticle pod according to any one of embodiments 10 to 11, wherein each purge inlet interface is spaced apart from a surface of the pod door that surrounds one of the purge inlets when the pod dome is joined to the pod door.

[0070] Embodiment 13. A reticle pod according to any of embodiments 10-12, wherein each purge inlet interface is configured to define a serpentine path between one of the purge inlets and the interior space of the outer pod outside the channel.

[0071] Embodiment 14. A reticle pod according to any one of embodiments 1 to 13, wherein the one or more channels are provided in the pod door.

[0072] Embodiment 15. A reticle pod according to embodiment 14, wherein the one or more channels are at least partially defined by an insert attached to the pod door.

[0073] Aspect 16. Providing a purge gas at one or more purge inlets provided in the outer pod; directing purge gas from one or more purge inlets to at least one filter disposed in the inner pod through one or more channels formed in the outer pod; wherein the purge gas enters the inner pod at at least one filter.

[0074] Embodiment 17. The method of embodiment 16, wherein one or more channels are closed ducts.

[0075] Embodiment 18. A method according to any of embodiments 16-17, wherein the inner pod includes a plurality of filters, and the purge gas is directed to at least one filter such that a first pressure in a first filter of the plurality of filters is greater than a second pressure in a second filter of the plurality of filters.

[0076] Aspect 19. The method of aspect 18, further comprising deflecting the flow of purge gas within the inner pod using at least one deflector provided on an inner surface of the inner pod.

[0077] Embodiment 20. The method of any of embodiments 16-19, further comprising directing flow from one or more purge inlets to one or more channels using one or more purge inlet interfaces.

[0078] Embodiment 21. The method of embodiment 20, wherein the purge inlet interfaces each form a seal surrounding one of the one or more purge inlets.

[0079] Aspect 22. A method according to any of aspects 20-21, wherein each of the purge inlet interfaces is spaced apart from a surface of the pod door that surrounds a corresponding one of the purge inlets when the pod dome is joined to the pod door.

[0080] Embodiment 23. The method of any of embodiments 16-22, wherein one or more channels are formed in a pod dome of the outer pod.

[0081] Embodiment 24. The method of any of embodiments 16-23, wherein the one or more channels are formed in a pod door of the outer pod.

[0082] Aspect 25. A method comprising purging an inner pod of a dual-pod reticle container by directing purge gas from one or more inlets on the outer pod inlet through one or more channels formed in the outer pod to at least one filter provided in the inner pod.

[0083] The examples disclosed in this application should be considered in all respects as illustrative and not restrictive. The scope of the present invention is indicated by the appended claims, rather than the foregoing description, and all changes that come within the meaning and range of equivalence of the claims are intended to be embraced therein.

Claims

1. an inner pod including a cover and a base plate, wherein the cover or the base plate is provided with at least one filter, and the inner pod is configured to house a reticle; an outer pod configured to receive the inner pod, a pod door including one or more purge inlets; and Pod Dome an outer pod comprising: wherein at least one of the pod door and the pod dome includes one or more channels each configured to direct flow from one of the at least one purge inlets to one of the at least one filters.

2. The reticle pod of claim 1 , wherein the channel is a closed duct.

3. The reticle pod of claim 1 , wherein said inner pod includes a plurality of said filters.

4. 4. The reticle pod of claim 3, wherein the one or more channels are configured to direct flow such that a first pressure in a first filter of the plurality of filters is greater than a second pressure in a second filter of the plurality of filters.

5. The reticle pod of claim 4 , wherein the inner pod includes one or more deflectors disposed on an inner surface of the inner pod.

6. The reticle pod of claim 5 , wherein the one or more deflectors are disposed between the first filter and the second filter.

7. The reticle pod of claim 1 , wherein the one or more channels are formed in the pod dome.

8. 8. The reticle pod of claim 7, wherein the pod dome includes a pod dome shell and one or more inserts joined to the pod dome shell, and the one or more channels are defined by the pod dome shell and the one or more inserts.

9. The reticle pod of claim 8 , wherein the insert is mechanically joined to the pod dome shell.

10. 8. The reticle pod of claim 7, wherein the pod dome includes a purge inlet interface for each of the one or more purge inlets included in the pod door, the purge inlet interface configured to direct flow from one of the purge inlets to at least one of the one or more channels.

11. The reticle pod of claim 10 , wherein each purge inlet interface includes a seal configured to contact the pod door surrounding the one of the purge inlets.

12. 11. The reticle pod of claim 10, wherein each purge inlet interface is spaced apart from a surface of the pod door that surrounds said one of the purge inlets when the pod dome is joined to the pod door.

13. The reticle pod of claim 10 , wherein each purge inlet interface is configured to define a serpentine path between said one of said purge inlets and an interior space of said outer pod outside said channel.

14. The reticle pod of claim 1 , wherein the one or more channels are provided in the pod door.

15. The reticle pod of claim 14 , wherein the one or more channels are at least partially defined by an insert attached to the pod door.

16. providing a purge gas at one or more purge inlets disposed in the outer pod; directing the purge gas from the one or more purge inlets to at least one filter disposed in the inner pod through one or more channels formed in the outer pod; wherein the purge gas enters the inner pod at the at least one filter.

17. The method of claim 16 , wherein the one or more channels are closed ducts.

18. 17. The method of claim 16, wherein the inner pod includes a plurality of filters, and the purge gas is directed to the at least one filter such that a first pressure at a first filter of the plurality of filters is greater than a second pressure at a second filter of the plurality of filters.

19. 20. The method of claim 18, further comprising deflecting the flow of the purge gas within the inner pod using at least one deflector disposed on an inner surface of the inner pod.

20. 17. The method of claim 16, further comprising directing flow from the one or more purge inlets to the one or more channels using one or more purge inlet interfaces.

21. The method of claim 20 , wherein the purge inlet interfaces each form a seal surrounding one of the one or more purge inlets.

22. 21. The method of claim 20, wherein each of the purge inlet interfaces is spaced apart from a surface of the pod door that surrounds a corresponding one of the purge inlets when the pod dome is joined to the pod door.

23. The method of claim 16 , wherein the one or more channels are formed in a pod dome of the outer pod.

24. The method of claim 16 , wherein the one or more channels are formed in a pod door of the outer pod.

25. purging an inner pod of a dual-pod reticle container by directing purge gas from one or more inlets on the outer pod inlet through one or more channels formed in the outer pod to at least one filter provided in the inner pod.

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