Laser irradiation apparatus and laser irradiation method

Abstract

To provide a safe laser irradiation device and a laser irradiation method.SOLUTION: The laser irradiation apparatus includes an irradiation unit configured to irradiate a laser to an irradiation object, a first shielding unit disposed between a carry-in position at which the irradiation object is carried in and the irradiation object irradiated with the laser by the irradiation unit and configured to shield the laser reflected by the irradiation object and directed toward the carry-in position, a second shielding unit disposed between the irradiation object irradiated with the laser by the irradiation unit and a carry-out position at which the irradiation object is carried out and configured to shield the laser reflected by the irradiation object and directed toward the carry-out position, and a conveyance unit configured to convey the irradiation object from the carry-in position to a position irradiated with the laser by the irradiation unit while bypassing the first shielding unit and convey the irradiation object from the position irradiated with the laser by the irradiation unit to the carry-out position while bypassing the second shielding unit.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a laser irradiation device and a laser irradiation method. [Background technology]

[0002] For example, Patent Document 1 discloses a laser irradiation system including a transport device for transporting an object to be irradiated, a laser device for irradiating the object with laser light, and a protective enclosure for enclosing the object and the optical path of the laser irradiated from the laser device toward the object to be irradiated. The protective enclosure has an opening through which the object to be irradiated is carried into the laser irradiation system. Summary of the Invention [Problem to be solved by the invention]

[0003] However, in the laser irradiation system described in Patent Document 1, there is a possibility that the laser reflected by the object to be irradiated may leak outside the laser irradiation device directly through the position where the object to be irradiated is carried in, and there is room for improvement in terms of safety.

[0004] An object of the present invention is to provide a safe laser irradiation device and a safe laser irradiation method. [Means for solving the problem]

[0005] A laser irradiation device according to one aspect of the present invention includes an irradiation unit that irradiates a laser beam onto an irradiated object; a first shielding unit that is arranged between a loading position where the irradiated object is loaded and the irradiated object onto which the laser beam is irradiated by the irradiation unit, and that blocks the laser beam reflected by the irradiated object and directed toward the loading position; a second shielding unit that is arranged between the irradiated object onto which the laser beam is irradiated by the irradiation unit and an unloading position where the irradiated object is unloaded, and that blocks the laser beam reflected by the irradiated object and directed toward the unloading position; and a transport unit that transports the irradiated object from the loading position, bypassing the first shielding unit, to a position where the laser beam is irradiated by the irradiator, and transports the irradiated object from the position where the laser beam is irradiated by the irradiator to the unloading position, bypassing the second shielding unit. [Effects of the Invention]

[0006] According to the present invention, a safe laser irradiation device and a safe laser irradiation method can be provided. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a schematic top view of a laser irradiation device according to a first embodiment of the present invention. [Figure 2] 1 is a schematic cross-sectional view of a transport section included in a laser irradiation device according to a first embodiment of the present invention. [Figure 3] 1 is a diagram showing an irradiation position and an object to be irradiated in a laser irradiation device according to a first embodiment of the present invention. [Figure 4] 3 is a diagram showing a first example of a first reflection reducing portion disposed on a first outer wall included in the laser irradiation device according to the first embodiment of the present invention. FIG. [Figure 5] 10 is a diagram showing a second example of a first reflection reduction portion disposed on a first outer wall included in the laser irradiation device according to the first embodiment of the present invention. FIG. [Figure 6] FIG. 4 is a schematic top view of a laser irradiation device according to a second embodiment of the present invention. [Figure 7] FIG. 10 is a schematic top view of a laser irradiation device according to a third embodiment of the present invention. [Figure 8]FIG. 10 is a schematic top view showing a part of a transport unit included in a laser irradiation device according to a third embodiment of the present invention. [Figure 9] FIG. 10 is a schematic side view showing an irradiation object and the surrounding configuration of the irradiation object as seen through a carry-in opening of an enclosure provided in a laser irradiation device according to a third embodiment of the present invention. [Figure 10] FIG. 10 is a schematic front view showing an object to be irradiated that is transported by a transport unit included in a laser irradiation device according to a third embodiment of the present invention. [Figure 11] FIG. 10 is a schematic side view showing a first example of a first guide portion included in a laser irradiation device according to a third embodiment of the present invention. [Figure 12] FIG. 10 is a schematic side view showing how light is reflected by a first guide portion included in a laser irradiation device according to a third embodiment of the present invention. [Figure 13] FIG. 11 is a schematic side view showing a second example of the first guide portion included in the laser irradiation device according to the third embodiment of the present invention. [Figure 14] FIG. 10 is a schematic side view showing a third example of a first guide portion included in a laser irradiation device according to a third embodiment of the present invention. [Figure 15] FIG. 10 is a schematic side view showing a fourth example of the first guide portion included in the laser irradiation device according to the third embodiment of the present invention. [Figure 16] FIG. 10 is a schematic top view showing a fifth example of a first guide portion included in the laser irradiation device according to the third embodiment of the present invention. [Figure 17] FIG. 11 is a schematic top view showing a sixth example of the first guide portion included in the laser irradiation device according to the third embodiment of the present invention. [Figure 18] FIG. 10 is a schematic top view of a laser irradiation device according to a fourth embodiment of the present invention. [Figure 19] 2 is a schematic diagram showing a light scanning unit included in the laser irradiation device according to the embodiment of the present invention; FIG. [Figure 20] 3A and 3B are diagrams showing changes in the surface properties of an irradiated object due to laser irradiation from a laser irradiation device according to an embodiment of the present invention. [Figure 21] FIG. 10 is an enlarged view of a printed surface formed by changing the surface texture. [Figure 22] FIG. 10 is a diagram showing the microstructure of the printing surface formed by changing the surface texture. [Figure 23] FIG. 10 is a diagram showing a case where the microstructure of the printing surface formed by changing the surface texture is close to a circle. [Figure 24] FIG. 10 is a diagram showing a case where the fine structure of the printing surface formed by changing the surface texture is linear. [Figure 25] 10A and 10B are diagrams illustrating a first example of a method for adjusting pixel values ​​of output pixels in an illuminated object. [Figure 26] 10A and 10B are diagrams illustrating a second example of a method for adjusting pixel values ​​of output pixels in an irradiated object. [Figure 27] 10A and 10B are diagrams illustrating a third example of a method for adjusting pixel values ​​of output pixels in an illuminated object. [Figure 28] FIG. 10 is a schematic diagram showing variations in processing depth. [Figure 29] FIG. 10 is a diagram showing overlapping of beams when multiple beams are used. [Figure 30] 1 is a diagram showing a first example of the appearance of an irradiated object marked by a laser irradiation device according to an embodiment of the present invention. FIG. [Figure 31] 10 is a diagram showing a second example of the appearance of an irradiated object marked by the laser irradiation device according to the embodiment of the present invention. FIG. [Figure 32] 10 is a diagram showing a third example of the appearance of an irradiated object marked by the laser irradiation device according to the embodiment of the present invention. FIG. [Figure 33] 1 is a diagram showing a first example of an image marked on an irradiated object by a laser irradiation device according to an embodiment of the present invention. FIG. [Figure 34] FIG. 32 is an enlarged view of the depicted portion in FIG. 31. [Figure 35] 10 is a diagram showing a second example of an image marked on an irradiated object by the laser irradiation device according to the embodiment of the present invention. FIG. [Figure 36] 10 is a diagram showing a third example of an image marked on an irradiated object by the laser irradiation device according to the embodiment of the present invention. FIG. [Figure 37]10 is a diagram showing a fourth example of an image marked on an irradiated object by the laser irradiation device according to the embodiment of the present invention. FIG. [Figure 38] 1 is a diagram showing a first example of an image formed on a curved surface near the mouth of an irradiated object by a laser irradiation device according to an embodiment of the present invention. FIG. [Figure 39] 10 is a diagram showing a second example of an image formed on a curved surface near the mouth of an irradiated object by a laser irradiation device according to an embodiment of the present invention. FIG. [Figure 40] 10 is a diagram showing a third example of an image formed on a curved surface near the mouth of an irradiated object by a laser irradiation device according to an embodiment of the present invention. FIG. [Figure 41] 1 is a schematic diagram showing a first example of the configuration of a laser irradiation device according to an embodiment of the present invention. [Figure 42] 42 is a flowchart showing the operation of the laser irradiation device of FIG. 41. [Figure 43] FIG. 3 is a schematic diagram showing a second example of the configuration of a laser irradiation device according to an embodiment of the present invention. [Figure 44] 44 is a flowchart showing the operation of the laser irradiation device of FIG. 43. DETAILED DESCRIPTION OF THE INVENTION

[0008] A laser irradiation apparatus and a laser irradiation method according to an embodiment of the present invention will be described in detail with reference to the drawings. However, the following embodiments are merely examples of the laser irradiation apparatus and the laser irradiation method according to the embodiment of the present invention, and are not limited to the following.

[0009] Furthermore, unless otherwise specified, the dimensions, materials, shapes, relative arrangements, etc. of components described in the embodiments of the present invention are merely illustrative examples and are not intended to limit the scope of the embodiments of the present invention to those specific embodiments. The sizes, positional relationships, etc. of components shown in the drawings may be exaggerated for clarity. In the following description, the same names and symbols indicate the same or similar components, and detailed descriptions will be omitted where appropriate.

[0010] In the following explanation, for ease of understanding, the arrangement and configuration of each part will be described using an XYZ Cartesian coordinate system. The three axes in the XYZ Cartesian coordinate system are mutually orthogonal. In the XYZ Cartesian coordinate system, the direction in which the X axis extends is referred to as the X direction, the direction in which the Y axis extends is referred to as the Y direction, and the direction in which the Z axis extends is referred to as the Z direction. The direction in which the arrow indicating the X axis points is referred to as the +X direction or +X side, and the direction opposite to the +X direction is referred to as the -X direction or -X side. The direction in which the arrow indicating the Y axis points is referred to as the +Y direction or +Y side, and the direction opposite to the +Y direction is referred to as the -Y direction or +Y side. The direction in which the arrow indicating the Z axis points is referred to as the +Z direction or +Z side, and the direction opposite to the +Z direction is referred to as the -Z direction or -Z side.

[0011] However, the above directional expressions merely describe the relationship of relative position, orientation, direction, etc., and do not necessarily correspond to the relationship when in use. "To place" is not limited to direct contact, but also includes indirect placement, for example, via another member.

[0012] [First embodiment] <Configuration of the laser irradiation device according to the first embodiment> A laser irradiation device according to a first embodiment of the present invention will be described with reference to Fig. 1 to Fig. 5. Fig. 1 is a schematic top view of a laser irradiation device 100 according to the first embodiment of the present invention. Fig. 2 is a schematic cross-sectional view of a transport unit 56 provided in the laser irradiation device 100. Fig. 3 is a diagram showing an irradiation position 510 by the laser irradiation device 100 and an irradiated object 10. Fig. 4 is a diagram showing a first reflection reduction unit 571 arranged on a first outer wall 57 provided in the laser irradiation device 100. Fig. 5 is a diagram showing a first uneven portion 572 arranged on a first outer wall 57 provided in the laser irradiation device 100.

[0013] The laser irradiation device 100 is a device that performs marking by irradiating an irradiated object 10 with a laser beam L. Marking refers to imparting various information such as characters, figures, and photographs to the irradiated object 10 by melting, scorching, peeling, oxidizing, scraping, discoloring, or the like, the surface of the irradiated object 10 with the irradiated laser beam L. The characters include logos, product names, serial numbers, model numbers, and the like that correspond to or relate to the irradiated object 10.

[0014] The laser irradiation device 100 includes an irradiation unit 51 that irradiates the irradiated object 10 with a laser beam L. The laser irradiation device 100 also includes a first shielding unit 53 that is disposed between a carry-in position 52 where the irradiated object 10 is carried in and the irradiated object 10 onto which the laser beam L from the irradiation unit 51 is irradiated, and that blocks the laser beam R that is reflected by the irradiated object 10 and headed toward the carry-in position 52. The laser irradiation device 100 also includes a second shielding unit 55 that is disposed between the irradiated object 10-1 onto which the laser beam L from the irradiator 51 is irradiated and a carry-out position 54 from which the irradiated object 10 is carried out, and that blocks the laser beam R2 that is reflected by the irradiated object 10-1 and headed toward the carry-out position 54. In addition, the laser irradiation device 100 is equipped with a transport unit 56 that transports the irradiated object 10 from the loading position 52, bypassing the first shielding unit 53, to a position where the laser L is irradiated by the irradiation unit 51, and also transports the irradiated object 10 from the position where the laser L is irradiated by the irradiation unit 51, bypassing the second shielding unit 55, to an unloading position 54.

[0015] 1 , the laser irradiation device 100 has an inlet 591 for carrying in the irradiated object 10 and an outlet 592 for carrying out the irradiated object 10, and includes an enclosure 59 that surrounds the irradiation unit 51, the irradiation object 10 to be irradiated with the laser L from the irradiation unit 51, a first shielding unit 53, and a second shielding unit 55. The laser irradiation device 100 also includes a first outer wall 57 that separates a space 41-3 on the opposite side of the first conveying path 561 from the side where the irradiation unit 51 is located, from a space 41-1 where the first conveying path 561 is located. The laser irradiation device 100 also includes a second outer wall 58 that separates a space 42-3 on the opposite side of the second conveying path 562 from the side where the irradiation unit 51 is located, from the space 42-1 where the second conveying path 562 is located.

[0016] The first shielding section 53 includes a first inner wall 53-1 and a first inner wall 53-2 that separate the space 41-1 from the space 41-2 on the side where the irradiation section 51 is located, with the first transport path 561 as the reference. The first shielding section 53 also includes a first partition wall 53-3 that separates the space 43 where the irradiation section 51 is located from the space 41-2. The first inner wall 53-1 and the first inner wall 53-2, and the first inner wall 53-2 and the first partition wall 53-3 are connected to each other.

[0017] The second shielding portion 55 includes a second inner wall 55-1 and a second inner wall 55-2 that separate the space 42-1 from the space 42-2 on the side where the irradiation portion 51 is located, with the second transport path 562 as the reference. The second shielding portion 55 also includes a second partition wall 55-3 that separates the space 43 where the irradiation portion 51 is located from the space 42-2. The second inner wall 55-1 and the second inner wall 55-2 are connected to each other, and the second inner wall 55-2 and the second partition wall 55-3 are connected to each other.

[0018] The first transport path 561 of the laser irradiation device 100 includes a path along which the irradiated object 10 is transported from the carry-in position 52 to the irradiation position 510 by the transport unit 56. The second transport path 562 of the laser irradiation device 100 includes a path along which the irradiated object 10 is transported from the irradiation position 510 to the carry-out position 54 by the transport unit 56. The transport unit 56 transports the irradiated object 10 from the carry-in position 52 to the irradiation position 510 along the first transport path 561, and transports the irradiated object 10 from the irradiation position 510 to the carry-out position 54 along the second transport path 562.

[0019] The irradiation position 510 refers to a position irradiated with the laser L by the irradiation unit 51. In Fig. 1, the irradiated object 10 irradiated with the laser L by the irradiation unit 51 at the irradiation position 510 is denoted as the irradiated object 10-1.

[0020] The "space 41-1 in which the first transport path 561 is located" includes the space above the first transport path 561. The "space 42-1 in which the second transport path 562 is located" includes the space above the second transport path 562. The "space 43 in which the irradiation unit 51 is located" includes the space above the irradiation unit 51. However, the space 41-1 may include not only the space directly above the first transport path 561 but also the space around the first transport path 561. The space around the first transport path 561 includes the space to the side of the first transport path 561 and the space above that side space, etc. The space 42-1 may not only include the space directly above the second transport path 562 but also the space around the second transport path 562. The space around the second transport path 562 includes the space to the side of the second transport path 562 and the space above that side space, etc. The space 43 may include not only the space directly above the irradiation unit 51 but also the space around the irradiation unit 51. The space around the irradiation unit 51 includes the space to the side of the irradiation unit 51 and the space above the space to the side.

[0021] The laser irradiation device 100 transports the irradiated object 10, which has been carried into the laser irradiation device 100 through the carry-in position 52, in a transport direction M by a transport unit 56. The laser irradiation device 100 irradiates the irradiated object 10 with a laser L at an irradiation position 510 to mark the irradiated object 10. The laser irradiation device 100 further transports the marked irradiated object 10 in the transport direction M by the transport unit 56, and carries it out of the laser irradiation device 100 through the carry-out position 54.

[0022] The irradiation unit 51 includes a laser light source that emits a laser L. The laser light source is, for example, a pulsed laser light source that emits a pulsed laser. For example, a fiber laser can be used as the pulsed laser light source. The laser light source emits a laser with an output (light intensity) suitable for changing the properties of at least one of the surface and the interior of an irradiated object, such as a PET (Polyethylene Terephthalate) bottle, that is irradiated with the laser.

[0023] The laser light source can control the on / off of laser emission, emission frequency, light intensity, etc. As an example, the laser light source can have a wavelength of 355 nm or more and 1064 nm or less, a laser pulse width of 1 picosecond or more and 10 nanoseconds or less, and an average output of 10 W or more and 50 W or less. The diameter of the laser beam in the region where the properties of the irradiated object are changed is preferably 1 μm or more and 200 μm or less.

[0024] 1, the first shielding unit 53 and the conveying unit 56 are arranged so that the laser beam L reflected by the irradiated object 10 is reflected one or more times by a first outer wall 57 that faces the first shielding unit 53 across the first shielding unit 53 or the conveying unit 56, before proceeding to the carry-in position 52. The second shielding unit 55 and the conveying unit 56 are also arranged so that the laser beam L reflected by the irradiated object 10 is reflected one or more times by a second outer wall 58 that faces the second shielding unit 55 across the second shielding unit 55 or the conveying unit 56, before proceeding to the carry-out position 54. The first outer wall 57 is an example of a first opposing portion. The second outer wall 58 is an example of a second opposing portion.

[0025] The transport unit 56 transports the irradiated object 10, for example, so that the irradiated object 10 detours around the first shielding unit 53 by turning twice, and so that the irradiated object 10 detours around the second shielding unit 55 by turning twice.

[0026] In the example shown in FIG. 1 , the object 10 to be irradiated is transported in the +X direction and carried into the laser irradiation device 100 from the carry-in position 52, and then turns approximately at a right angle in a top view toward the +Y direction for the first time to bypass the first shielding portion 53. After that, the object 10 to be irradiated is transported in the +Y direction, and then turns approximately at a right angle in a top view toward the +X direction for the second time. In this way, the transport unit 56 bypasses the first shielding portion 53. After that, the object 10 to be irradiated is transported in the +X direction, and is irradiated with the laser L at the irradiation position 510.

[0027] The object 10 to be irradiated that has passed the irradiation position 510 is transported in the +X direction and turns approximately at a right angle in a top view once in the -Y direction to bypass the second shielding portion 55. After that, the object 10 to be irradiated is transported in the -Y direction and then turns approximately at a right angle in a top view once again in the +X direction. In this way, the transport unit 56 bypasses the second shielding portion 55. After that, the object 10 to be irradiated is transported in the +X direction and is transported out of the laser irradiation device 100 through the transport-out position 54.

[0028] As shown in FIG. 2, the transport unit 56 includes a transport plate 61, a sprocket 62, an idler wheel 63, and a return roller 64. The transport plate 61 is a member that transports the irradiation object 10. The transport plate 61 includes a placement surface 610 and a lower surface 611. The placement surface 610 is the upper surface (+Z side surface) of the transport plate 61, and is the surface on which the irradiation object 10 is placed. The lower surface 611 is the lower surface (-Z side surface) of the transport plate 61. A chain to which driving force is transmitted from a driving unit such as a motor is arranged on the lower surface 611.

[0029] The transport plate 61 includes a plurality of plates each having a predetermined length in the transport direction M. The plurality of plates are connected along the transport direction M by connecting members such as pins to form the belt-like transport plate 61. The belt-like transport plate 61 is wound around a sprocket 62 and an idler wheel 63. The return roller 64 is a roller member that supports the transport plate 61 on the return side.

[0030] The conveying unit 56 causes the conveying plate 61 to travel in a circular motion in the conveying direction M by a driving force transmitted from the driving unit via a sprocket 62, and conveys the irradiated object 10 placed on the placing surface of the conveying plate 61 in the conveying direction M.

[0031] 1, the conveying unit 56 continuously conveys the irradiation object 10 at an approximately constant speed without stopping from the carry-in position 52 to the carry-out position 54. The conveying unit 56 also conveys a plurality of irradiation objects 10 arranged at predetermined intervals along the conveying direction M on a mounting surface 610 of a conveying plate 61. The laser irradiation device 100 irradiates each of the plurality of irradiation objects 10 conveyed by the conveying unit 56 at an approximately constant speed with a laser L at an irradiation position 510. However, the conveying unit 56 does not necessarily have to convey the irradiation object 10 at an approximately constant speed, and may stop, accelerate, decelerate, etc. the irradiation object 10 as appropriate.

[0032] The tops of the first shielding portion 53 and the second shielding portion 55 are open. The top of the enclosure portion 59 is closed. By leaving the tops of the first shielding portion 53 and the second shielding portion 55 open, the configuration of the laser irradiation device 100 can be simplified. Furthermore, by closing the top of the enclosure portion 59, it is possible to further reduce the laser leaking outside the enclosure portion 59. Note that it is preferable that the top of the enclosure portion 59 is completely closed, or that the tops of the first shielding portion 53 and the second shielding portion 55 are open.

[0033] 3 is a PET bottle that contains a beverage or other contents, for example. In the example shown in Fig. 3, the laser irradiation device 100 irradiates a part of the PET bottle located within the irradiation position 510 with a laser beam L, and marks characters 10a including "123" on the surface of the part of the PET bottle.

[0034] 4 and 5, the first outer wall 57 includes a first reflection reduction portion 571 on a first outer wall surface 570 facing the first transport path 561. The first reflection reduction portion 571 is a member that reduces reflection of light incident on the first reflection reduction portion 571.

[0035] 4 includes a coating film that is disposed on first outer wall surface 570 and has light-absorbing properties with respect to the wavelength of laser L emitted by irradiation unit 51. The coating film is, for example, a black coating film. The coating film absorbs incident light, thereby reducing specularly reflected light and diffusely reflected light of light that enters first reflection reduction unit 571.

[0036] 5 includes an uneven portion that is disposed on first outer wall surface 570 and diffuses laser light L emitted by irradiation unit 51. The uneven portion is formed, for example, by roughening first outer wall surface 570 using a blasting method. The uneven portion diffuses the incident light, thereby reducing the specular reflection of light that is incident on first reflection reduction portion 571.

[0037] 4 and 5 show the first reflection reduction section 571 arranged on the first outer wall 57 as a representative example, but the second reflection reduction section arranged on the second outer wall 58 can also be configured in the same manner as the first reflection reduction section 571. That is, the second outer wall 58 can include a second reflection reduction section on the second outer wall surface 580 facing the second transport path 562. The second reflection reduction section can include the coating film shown in FIG. 4 or the uneven portion shown in FIG. 5, etc.

[0038] The first shielding portion 53, the second shielding portion 55, the first outer wall 57, the second outer wall 58, and the enclosure portion 59 are each made of a metal material. This increases the resistance of each portion to the laser L emitted by the irradiation portion 51. However, the first shielding portion 53, the second shielding portion 55, the first outer wall 57, the second outer wall 58, and the enclosure portion 59 may be made of a resin material or the like having light-shielding properties. The light-shielding properties of the enclosure portion 59 refer to the property of reflecting or absorbing 90% or more of the incident laser light L.

[0039] <Effects of the laser irradiation device 100> Generally, the wavelength, output, etc. of the laser irradiated onto an irradiated object in a laser irradiation device are selected depending on the material constituting the irradiated object, the productivity of the laser irradiation device, etc. In order to provide information to an irradiated object using a laser, it is preferable to use a high-output laser. However, if the laser reflected by the irradiated object is irradiated onto a human body, there is a possibility that the human body may be affected. Furthermore, since the loading and unloading positions of the irradiated object relative to the laser irradiation device are connected to the outside of the laser irradiation device, there is a possibility that the laser leaking to the outside through the loading and unloading positions may be irradiated onto a person outside the laser irradiation device. Therefore, there is a need for a safe laser irradiation device that can reduce the possibility of the laser reflected by the irradiated object being irradiated onto a human body.

[0040] In the laser irradiation device 100 according to this embodiment, the transport unit 56 transports the irradiated object 10 from the carry-in position 52 to the irradiation position 510, bypassing the first shielding unit 53, and also transports the irradiated object 10 from the irradiation position 510 to the carry-out position 54, bypassing the second shielding unit 55. Of the laser beams L reflected by the irradiated object 10 at the irradiation position 510, the laser beam R1 heading toward the carry-in position 52 is blocked by the first shielding unit 53 and cannot reach the carry-in position 52. This reduces the amount of laser beam leaking to the outside through the carry-in position 52. Furthermore, of the laser beams L reflected by the irradiated object 10 at the irradiation position 510, the laser beam R2 heading toward the carry-out position 54 is blocked by the second shielding unit 55 and cannot reach the carry-out position 54. This reduces the amount of laser beam leaking to the outside through the carry-out position 54. As a result of the above, in this embodiment, the laser leaking from the laser irradiation device 100 to the outside is reduced from being irradiated onto humans, and a safe laser irradiation device 100 and laser irradiation method can be provided.

[0041] For example, the laser irradiation device 100 can realize the function of the first shielding portion 53 by the first inner wall 53-1 and the first inner wall 53-2. Also, the laser irradiation device 100 can realize the function of the second shielding portion 55 by the second inner wall 55-1 and the second inner wall 55-2.

[0042] The laser irradiation device 100 includes a first outer wall 57 and a second outer wall 58. This reduces leakage of the laser reflected by the irradiated object 10, and the laser reflected by the first shielding portion 53 or the second shielding portion 55 after being reflected by the irradiated object 10, to the side opposite the side where the irradiation unit 51 is located, relative to the first transport path 561 or the second transport path 562. As a result, the safety of the laser irradiation device 100 is further improved.

[0043] In the laser irradiation device 100, the first shielding unit 53 and the conveying unit 56 are arranged so that the laser beam L reflected by the irradiated object 10 is reflected one or more times by a first outer wall 57 facing the first shielding unit 53 across the first shielding unit 53 or the conveying unit 56 before heading toward the carry-in position 52. This makes it easier for the first shielding unit 53 to block the laser beam R1 that is reflected by the irradiated object 10 and heading toward the carry-in position 52. As a result, the laser beam R1 that leaks to the outside through the carry-in position 52 is reduced. In addition, the second shielding unit 55 and the conveying unit 56 are arranged so that the laser beam L reflected by the irradiated object 10 is reflected one or more times by a second outer wall 58 facing the second shielding unit 55 across the second shielding unit 55 or the conveying unit 56 before heading toward the carry-out position 54. This makes it easier for the second shielding portion 55 to shield the laser beam R2, which is reflected by the irradiation object 10 and heads toward the carry-out position 54, from the laser beam L. As a result, the laser beam R1 leaking to the outside through the carry-out position 54 is reduced.

[0044] In the laser irradiation device 100, the laser L irradiated from the irradiation unit 51 and reflected by the irradiated object 10 is reflected at the first shielding unit 53 one or more times before reaching the carry-in position 52. Also, the laser L is reflected at the second shielding unit 55 one or more times before reaching the carry-in position 52. This reduces the laser R1 leaking to the outside through the carry-in position 52 and the laser R1 leaking to the outside through the carry-out position 54.

[0045] In the laser irradiation device 100, the conveying unit 56 conveys the irradiated object 10 so that the irradiated object 10 turns two or more times to bypass the first shielding unit 53. As a result, of the laser beam L reflected by the irradiated object 10, the laser beam R1 heading toward the carry-in position 52 is more likely to be blocked by the first shielding unit 53. As a result, the laser beam R1 leaking to the outside through the carry-in position 52 is reduced. Furthermore, the conveying unit 56 conveys the irradiated object 10 so that the irradiated object 10 turns two or more times to bypass the second shielding unit 55. As a result, of the laser beam L reflected by the irradiated object 10, the laser beam R2 heading toward the carry-out position 54 is more likely to be blocked by the second shielding unit 55. As a result, the laser beam R1 leaking to the outside through the carry-out position 54 is reduced.

[0046] The laser irradiation device 100 includes a first reflection reduction portion 571 on the first outer wall 57. This reduces the amount of laser reflected by the irradiated object 10 and the amount of laser reflected by the first shielding portion 53 after being reflected by the irradiated object 10, reflected by the first outer wall 57 and reaching the carry-in position 52. For example, if the first reflection reduction portion 571 includes a light-absorbing coating film, the coating film absorbs the laser incident on the first reflection reduction portion 571, thereby reducing the amount of laser reflected by the first outer wall 57. Furthermore, if the first reflection reduction portion 571 includes an uneven portion, the uneven portion optically diffuses the laser incident on the first reflection reduction portion 571, thereby reducing the amount of laser reflected by the first outer wall 57. Note that the first reflection reduction portion 571 is not limited to the first outer wall 57, and at least one of the first inner wall 53-1 and the first inner wall 53-2 and the first outer wall 57 may include the first reflection reduction portion 571.

[0047] Furthermore, the second outer wall 58 may include a second reflection reduction portion. This reduces the amount of laser reflected by the irradiated object 10 and the amount of laser reflected by the irradiated object 10 and then reflected by the second shielding portion 55 being reflected by the second outer wall 58 and reaching the unloading position 54. Note that the second reflection reduction portion is not limited to the second outer wall 58, and at least one of the second inner wall 55-1, the second inner wall 55-2, and the second outer wall 58 may include the second reflection reduction portion.

[0048] The laser irradiation device 100 includes an enclosure 59 that includes an inlet 591 and an outlet 592. The carry-in position 52 includes the inlet 591, and the carry-out position 54 includes the outlet 592. This reduces the leakage of laser light, etc. reflected by the irradiated object 10 to the outside of the laser irradiation device 100, further increasing the safety of the laser irradiation device 100. In addition, this reduces the leakage of laser light, etc. reflected by the irradiated object 10 to the outside of the laser irradiation device 100 through the inlet 591 or the outlet 592, further increasing the safety of the laser irradiation device 100. Furthermore, since the laser irradiation device 100 includes the enclosure 59, it becomes difficult for people to approach the irradiation unit 51. As a result, the safety of the laser irradiation device 100 is further increased.

[0049] [Second embodiment] Next, a laser irradiation device according to a second embodiment of the present invention will be described. Note that the same names and symbols as those in the already described embodiments indicate the same or similar members or configurations, and detailed descriptions will be omitted as appropriate. This also applies to the following embodiments.

[0050] 6 is a schematic top view of a laser irradiation device 100a according to a second embodiment of the present invention. The laser irradiation device 100a differs from the laser irradiation device 100 according to the first embodiment in that the object 10 does not bend at a right angle in top view when the transport unit 56 transports the object 10 around the first shielding unit 53 and when the transport unit 56 transports the object 10 around the second shielding unit 55.

[0051] 6, the object 10 to be irradiated is transported in the +X direction and carried into the laser irradiation device 100a from the carry-in position 52, and then turns diagonally to the +Y side as viewed from above for the first time to bypass the first shielding portion 53. After that, the object 10 to be irradiated is transported diagonally to the +Y side as viewed from above, and then turns toward the +X direction for the second time. As a result, the transport unit 56 bypasses the first shielding portion 53. After that, the object 10 to be irradiated is transported in the +X direction, and is irradiated with the laser L at the irradiation position 510.

[0052] The irradiated object 10 that has passed the irradiation position 510 is transported in the +X direction and turns diagonally to the -Y side in a top view for the first time to bypass the second shielding portion 55. After that, the irradiated object 10 is transported diagonally to the -Y side in a top view, and then turns in the +X direction for the second time. This allows the transport unit 56 to bypass the second shielding portion 55. After that, the irradiated object 10 is transported in the +X direction and is transported out of the laser irradiation device 100a through the transport-out position 54.

[0053] The first transport path 561 of the laser irradiation device 100a includes a path along which the irradiated object 10 is transported in the transport direction M from the carry-in position 52 to the irradiation position 510 by the transport unit 56. The second transport path 562 of the laser irradiation device 100a includes a path along which the irradiated object 10 is transported in the transport direction M from the irradiation position 510 to the unloading position 54 by the transport unit 56.

[0054] The laser irradiation device 100a can also provide the same effects as those of the laser irradiation device 100 according to the first embodiment.

[0055] [Third embodiment] Next, a laser irradiation apparatus according to a third embodiment of the present invention will be described with reference to Figs. 7 to 17. Fig. 7 is a schematic top view of a laser irradiation apparatus 100b according to the third embodiment of the present invention. Fig. 8 is a schematic top view showing a part of a transport section 56b provided in the laser irradiation apparatus 100b. Fig. 9 is a schematic side view showing an irradiated object 10 and the surrounding configuration of the irradiated object 10 as seen through a carry-in opening 591 of an enclosure section 59 provided in the laser irradiation apparatus 100b. Fig. 10 is a schematic front view showing an irradiated object transported by a transport section provided in the laser irradiation apparatus according to the third embodiment of the present invention.

[0056] FIG. 11 is a schematic side view showing a first example of the first guide portion 71 included in the laser irradiation device 100b. FIG. 12 is a schematic side view showing how light is reflected by the first guide portion 71 included in the laser irradiation device 100b. FIG. 13 is a schematic side view showing a second example of the first guide portion 71 included in the laser irradiation device 100b. FIG. 14 is a schematic side view showing a third example of the first guide portion 71 included in the laser irradiation device 100b. FIG. 15 is a schematic side view showing a fourth example of the first guide portion 71 included in the laser irradiation device 100b. FIG. 16 is a schematic top view showing a fifth example of the first guide portion 71 included in the laser irradiation device 100b. FIG. 17 is a schematic top view showing a sixth example of the first guide portion 71 included in the laser irradiation device 100b.

[0057] The laser irradiation device 100b differs from the laser irradiation device 100 according to the first embodiment in that it includes a transport section 56b, a first guide section 71, and a second guide section 72.

[0058] The transport unit 56b includes a first transport unit 56-1 that transports the irradiated object 10 in a straight line, passing through the carry-in position 52; a second transport unit 56-2 that transports the irradiated object 10 in a straight line from the carry-in position 52 to the carry-out position 54, passing through the irradiation position 510; and a third transport unit 56-3 that transports the irradiated object 10 in a straight line, passing through the carry-out position 54. The first transport unit 56-1, the second transport unit 56-2, and the third transport unit 56-3 transport the irradiated object 10 in the same direction. This same direction is, for example, the transport direction M, which is the +X direction in FIG. 7. The second transport unit 56-2 is disposed adjacent to the first transport unit 56-1 and the third transport unit 56-3 in a direction (for example, the Y direction) perpendicular to the transport direction M. The first guide unit 71 moves the irradiation object 10 being transported by the first transport unit 56-1 so that it is transported by the second transport unit 56-2. The second guide unit 72 moves the irradiation object 10 being transported by the second transport unit 56-2 so that it is transported by the third transport unit 56-3.

[0059] The object to be irradiated 10 is moved from above the first conveyor unit 56-1 onto the second conveyor unit 56-2 by the first guide unit 71, and after making a second turn, is conveyed in the conveying direction M by the second conveyor unit 56-2. In other words, the object to be irradiated 10 makes two turns to bypass the first shielding unit 53. The object to be irradiated 10 is also moved from above the second conveyor unit 56-2 onto the third conveyor unit 56-3 by making a first turn by the second guide unit 72, and after making a second turn, is conveyed in the conveying direction M by the third conveyor unit 56-3. In other words, the object to be irradiated 10 makes two turns to bypass the second shielding unit 55.

[0060] The first guide part 71 and the second guide part 72 move the irradiated object 10 by coming into contact with the irradiated object 10 being transported by the transport part 56b. The coefficient of friction of the first guide part 71 with respect to the irradiated object 10 is smaller than the coefficient of friction of the first shielding part 53 with respect to the irradiated object 10. The coefficient of friction of the second guide part 72 with respect to the irradiated object 10 is smaller than the coefficient of friction of the second shielding part 55 with respect to the irradiated object 10.

[0061] The first guide section 71 includes a first inner guide section 71-1 that is arranged on the side where the irradiation section 51 is located, with respect to the irradiated object 10 transported by the first transport section 56-1, and that comes into contact with the irradiated object 10 transported by the first transport section 56-1. The first guide section 71 also includes a first outer guide section 71-2 that is arranged on the opposite side from the side where the irradiation section 51 is located, with respect to the irradiated object 10 transported by the first transport section 56-1.

[0062] The second guide section 72 includes a second inner guide section 72-1 that is arranged on the side where the irradiation section 51 is located, with respect to the irradiated object 10 transported by the second transport section 56-2. The second guide section 72 also includes a second outer guide section 72-2 that is arranged on the opposite side from the side where the irradiation section 51 is located, with respect to the irradiated object 10 transported by the second transport section 56-2, and that comes into contact with the irradiated object 10 transported by the second transport section 56-2.

[0063] The object to be irradiated 10 is transported in the transport direction M by the first transport unit 56-1 and transported through the carry-in position 52 into the laser irradiation device 100b. After passing through the carry-in position 52, the object to be irradiated 10 comes into contact with the first inner guide unit 71-1. By contacting the first inner guide unit 71-1, the object to be irradiated 10 moves in a first movement direction N1 from the first transport unit 56-1 to the second transport unit 56-2. After moving in the first movement direction N1 and arriving on the second transport unit 56-2, the object to be irradiated 10 is moved in the transport direction M by the second transport unit 56-2. The object to be irradiated 10 is irradiated with a laser L by the irradiation unit 51 at the irradiation position 510.

[0064] After being irradiated with the laser L, the object 10 is transported in the transport direction M by the second transport unit 56-2 and comes into contact with the second outer guide unit 72-2. By contacting the second outer guide unit 72-2, the object 10 moves in a second movement direction N2 from the second transport unit 56-2 toward the third transport unit 56-3. After moving in the second movement direction N2 and arriving on the third transport unit 56-3, the object 10 is transported in the transport direction M by the third transport unit 56-3. The object 10 passes through the transport position 54 and is transported out of the laser irradiation device 100b.

[0065] The first transport path 561 of the laser irradiation device 100b includes a path along which the irradiated object 10 is transported from the carry-in position 52 in the transport direction M, a path along which the irradiated object 10 moves in the first movement direction N1, and a path along which the irradiated object 10, after moving in the first movement direction N1, is transported in the transport direction M to the irradiation position 510. The second transport path 562 of the laser irradiation device 100b includes a path along which the irradiated object 10 is transported from the irradiation position 510 in the transport direction M, a path along which the irradiated object 10, after being transported from the irradiation position 510 in the transport direction M, moves in the second movement direction N2, and a path along which the irradiated object 10 is transported in the transport direction M to the unloading position 54.

[0066] FIG. 8 shows the first transport unit 56-1 and the second transport unit 56-2 at an enlarged scale compared to FIG. 7. The first transport unit 56-1 includes a first transport plate 61-1 configured by multiple plates connected in the transport direction M. The second transport unit 56-2 includes a second transport plate 61-2 configured by multiple plates connected in the transport direction M. The first transport unit 56-1 and the second transport unit 56-2 are arranged adjacent to each other in the Y direction, which is perpendicular to the transport direction M. In the example shown in FIG. 8, the first transport unit 56-1 and the second transport unit 56-2 are driven independently of each other. However, the first transport unit 56-1 and the second transport unit 56-2 may be driven by power from the same power source. The object 10 to be irradiated, being conveyed in the conveying direction M by the first conveying unit 56-1, moves in contact with the first inner guide portion 71-1 shown in Fig. 7, thereby moving from above the first conveying unit 56-1 onto the second conveying unit 56-2. Thereafter, the object 10 to be irradiated, having moved onto the second conveying unit 56-2, is conveyed in the conveying direction M by the second conveying unit 56-2.

[0067] FIG. 9 shows the object 10 to be irradiated being carried into the laser irradiation device 100b through the carry-in opening 591 from a direction opposite the carry-in opening 591 of the enclosure 59. FIG. 10 shows the object 10 to be irradiated, viewed from the -Y direction perpendicular to the conveying direction M, in the section from when the object 10 passes through the carry-in opening 591 until it comes into contact with the first inner guide portion 71-1. In FIG. 9, the object 10 to be irradiated is placed on the placement surface 610 of the first conveying plate 61-1 of the first conveying unit 56-1. Supporting units 73 are arranged on both sides of the first conveying unit 56-1 in the Y direction perpendicular to the conveying direction M (+X direction) of the first conveying unit 56-1. The supporting units 73 support the first inner guide portion 71-1 and the first outer guide portion 71-2. The supporting units 73 are rod-shaped members extending in the Z direction. As shown in FIG. 10, a plurality of support portions 73 are arranged at approximately equal intervals in the conveying direction M.

[0068] As shown in FIG. 7, the first inner guide portion 71-1 and the first outer guide portion 71-2 are members that extend in the first direction N1 in the section of the first transport path 561 where the irradiation object 10 moves in the first movement direction N1. As shown in FIG. 9, a cylindrical body with a cylindrical axis extending along the first movement direction N1 is provided at the end of each of the first inner guide portion 71-1 and the first outer guide portion 71-2 on the side where the irradiation object 10 is located. The shape of the end of the first inner guide portion 71-1 and the first outer guide portion 71-2 on the side where the irradiation object 10 is located is approximately circular in a cross-sectional view perpendicular to the first movement direction N1. The irradiation object 10 moves in the first movement direction N1 by coming into contact with the cylindrical body provided on each of the first inner guide portion 71-1 and the first outer guide portion 71-2.

[0069] The first inner guide portion 71-1 and the first outer guide portion 71-2 are made of a resin material or the like having a smaller coefficient of friction with respect to the irradiated object 10 than the coefficient of friction of the first shielding portion 53. The second inner guide portion 72-1 and the second outer guide portion 72-2 are made of a resin material or the like having a smaller coefficient of friction with respect to the irradiated object 10 than the coefficient of friction of the second shielding portion 55. In the first inner guide portion 71-1, the first outer guide portion 71-2, the second inner guide portion 72-1, and the second outer guide portion 72-2, the portion supported by the support portion 73 and the portion in contact with the irradiated object 10 may be made of different materials, and only the portion in contact with the irradiated object 10 may be made of a material with a small coefficient of friction.

[0070] <Functions and Effects of Laser Irradiation Device 100b> As described above, the laser irradiation device 100b has a simple configuration using the conveying unit 56b, the first guide unit 71, and the second guide unit 72, and conveys the irradiated object 10 so that the irradiated object 10 turns two or more times to bypass the first shielding unit 53 and the irradiated object 10 turns two or more times to bypass the second shielding unit 55. As a result, in this embodiment, the simple configuration reduces the risk of laser leaking from the laser irradiation device 100b being irradiated onto humans, and a safe laser irradiation device 100b and laser irradiation method can be provided.

[0071] For example, when the irradiated object 10 is moved by bringing a member into contact with the irradiated object 10 being transported, if there is a large friction between the irradiated object 10 and the contacting member, the position or posture of the irradiated object 10 may change due to the contact, or the irradiated object 10 may fall over. If the position or posture of the irradiated object 10 changes or the irradiated object 10 falls over, the position or posture of the irradiated object 10 may deviate from the desired position at the irradiation position 510, which may result in a decrease in marking accuracy. Furthermore, when some post-processing is performed on the irradiated object 10 after it has been carried out from the laser irradiation device 100b, the post-processing accuracy may decrease.

[0072] In the laser irradiation device 100b, the first guide part 71, which has a smaller coefficient of friction than the first shielding part 53, is brought into contact with the irradiated object 10. This makes it possible to prevent the position or posture of the irradiated object 10 from changing or the irradiated object 10 from tipping over due to contact, compared to when the first shielding part 53 is brought into contact with the irradiated object 10. Also, in the laser irradiation device 100b, the second guide part 72, which has a smaller coefficient of friction than the second shielding part 55, is brought into contact with the irradiated object 10. This makes it possible to prevent the position or posture of the irradiated object 10 from changing or the irradiated object 10 from tipping over due to contact, compared to when the second shielding part 55 is brought into contact with the irradiated object 10, and thus to prevent a decrease in marking accuracy. Also, when performing some kind of post-processing on the irradiated object 10 after it is removed from the laser irradiation device 100b, it is possible to prevent a decrease in post-processing accuracy. In the example shown in Figure 7, the first guide portion 71 and the second guide portion 72 are arranged along the entire transport path of the transport portion 56, but the first guide portion 71 and the second guide portion 72 do not need to be arranged around the irradiation portion 51.

[0073] 11, the first outer guide portion 71-2 can come into point contact with the irradiation object 10 in a cross-sectional view perpendicular to the first movement direction N1. In the example shown in FIG. 11, the first outer guide portion 71-2 comes into contact with the irradiation object 10 at point P. With this configuration, as shown in FIG. 12, even when the laser beam R1 reflected by the irradiation object 10 is incident on the first outer guide portion 71-2, most of the laser beam R1 reflected by the first outer guide portion 71-2 travels upward or downward, and therefore the amount of laser beam R1 traveling to the carry-in position 52 is reduced. As a result, the amount of laser beam leaking to the outside from the laser irradiation device 100b through the carry-in position 52 is reduced.

[0074] For example, if the coefficient of friction of the first guide portion 71 with respect to the irradiated object 10 is made smaller than the coefficient of friction of the first shielding portion 53, the material that can be used to form the first guide portion 71 is limited, and it may not be possible to use a material that has a low reflectance with respect to the wavelength of the laser L emitted by the irradiating portion 51. If the first guide portion 71 cannot be formed from a material that has a low reflectance with respect to the wavelength of the laser L, there is a possibility that the laser R1 that is reflected by the first guide portion 71 and proceeds to the carry-in position 52 will increase.

[0075] In the laser irradiation device 100b, the first outer guide portion 71-2 is configured to be able to make point contact with the irradiated object 10 in a cross-sectional view perpendicular to the first movement direction N1. This reduces the amount of laser R1 reflected by the first guide portion 71 and proceeding to the carry-in position 52, even when the first guide portion 71 cannot be made of a material with low reflectivity for the wavelength of the laser L. As a result, the amount of laser R1 that passes through the carry-in position 52 and leaks out of the laser irradiation device 100b is reduced.

[0076] The shape of the end of the first outer guide portion 71-2 on the side where the irradiation object 10 is located is not limited to a circle as long as it allows point contact in a cross section perpendicular to the first movement direction N1. For example, as shown in Fig. 13, the shape of the end of the first outer guide portion 71-2 on the side where the irradiation object 10 is located may be a triangle with its apex at the side where the irradiation object 10 is located in a cross section perpendicular to the first movement direction N1. Furthermore, as shown in Figs. 14 and 15, the shape of the end of the first outer guide portion 71-2 on the side where the irradiation object 10 is located may be a plurality of circles or triangles arranged in a normal direction (e.g., Z direction) to the placement surface 610 of the transport plate 61 in a cross section perpendicular to the first movement direction N1.

[0077] 11 to 15 illustrate the first outer guide portion 71-2. However, the second outer guide portion 72-2 can also achieve the same effect by being capable of point contact with the irradiated object 10 in a cross-sectional view perpendicular to the second movement direction N2. Furthermore, the first inner guide portion 71-1 may be capable of point contact with the irradiated object 10 in a cross-sectional view perpendicular to the first movement direction N1. The second inner guide portion 72-1 may be capable of point contact with the irradiated object 10 in a cross-sectional view perpendicular to the second movement direction N2. In these cases, the amount of laser light that is multiple-reflected between the first inner guide portion 71-1 and the first outer guide portion 71-2 and the amount of laser light that is multiple-reflected between the second inner guide portion 72-1 and the second outer guide portion 72-2 is reduced. As a result, the amount of multiple-reflected laser light that leaks out of the laser irradiation device 100b through the carry-in position 52 or the carry-out position 54 is reduced.

[0078] As shown in FIG. 16 , the first outer guide portion 71-2 includes a plurality of first protrusions 74 aligned in the first movement direction N1. The plurality of first protrusions 74 can be made to make point contact with the irradiated object 10 in both a top view and a cross-sectional view perpendicular to the first movement direction N1. This configuration reduces the amount of laser beam R1 traveling to the carry-in position 52, thereby reducing the amount of laser beam leaking from the laser irradiation device 100b through the carry-in position 52. The second outer guide portion 72-2 includes a plurality of second protrusions aligned in the second movement direction N2. The plurality of second protrusions can be made to make point contact with the irradiated object 10 in both a top view and a cross-sectional view perpendicular to the second movement direction N2. This configuration reduces the amount of laser beam R1 traveling to the carry-in position 52, thereby reducing the amount of laser beam leaking from the laser irradiation device 100b through the carry-in position 52.

[0079] As shown in FIG. 17 , the height h2 of the first outer guide portion 71-2 relative to the placement surface 610 of the irradiated object 10 in the conveying section 56 is different from the height h1 of the first inner guide portion 71-1. This configuration reduces the amount of laser light L reflected by the irradiated object 10 that is multiple-reflected between the first outer guide portion 71-2 and the first inner guide portion 71-1 and then leaks out of the laser irradiation device 100b through the carry-in position 52. Furthermore, the height of the second outer guide portion 72-2 relative to the placement surface 610 of the irradiated object 10 in the conveying section 56 can also be made different from the height of the second inner guide portion 72-1. This configuration reduces the amount of laser light L reflected by the irradiated object 10 that is multiple-reflected between the second outer guide portion 72-2 and the second inner guide portion 72-1 and then leaks out of the laser irradiation device 100b through the carry-out position 54. The configuration is not limited to one in which the height h1 is greater than the height h2, and the height h2 may be greater than the height h1.

[0080] In the laser irradiation device 100b, the reflectance of the first outer guide portion 71-2 for the wavelength of the laser L can be set lower than the reflectance of the first inner guide portion 71-1 for the wavelength of the laser L. This reduces the amount of the laser L reflected by the irradiated object 10 being reflected by the first outer guide portion 71-2, and thus reduces the amount of the laser L leaking out of the laser irradiation device 100b through the carry-in position 52. Furthermore, the reflectance of the second outer guide portion 72-2 for the wavelength of the laser L can be set lower than the reflectance of the second inner guide portion 72-1 for the wavelength of the laser L. This reduces the amount of the laser L reflected by the irradiated object 10 being reflected by the second outer guide portion 72-2, and thus reduces the amount of the laser L leaking out of the laser irradiation device 100b through the carry-out position 54.

[0081] The effects of the laser irradiation device 100b other than those mentioned above are similar to those of the laser irradiation device 100 according to the first embodiment.

[0082] [Fifth embodiment] 18 is a schematic top view of a laser irradiation device 100c according to a fifth embodiment of the present invention. The laser irradiation device 100c differs from the laser irradiation device 100c according to the first embodiment in that the laser irradiation device 100c includes an inspection unit 81 that is disposed downstream of the irradiation object 10 to be irradiated with the laser L from the irradiation unit 51 in the transport direction M of the irradiation object 10 and inspects the state of the irradiation object 10 after the irradiation with the laser L from the irradiation unit 51.

[0083] The inspection unit 81 shown in FIG. 18 is disposed between the irradiated object 10-1, which is irradiated with the laser L by the irradiation unit 51, and the irradiated object 10-2, which is about to start detouring around the second shielding unit 55. The inspection unit 81 is composed of, for example, a camera, a photographing light, and the like. The camera photographs the irradiated object 10 after being irradiated with the laser L at an inspection position 810 located downstream of the irradiation position 510 in the conveying direction M. The shutter timing of the camera is determined by the timing at which the irradiated object 10 is detected by a sensor installed in the conveying unit 56. The inspection unit 81 inspects the state of the irradiated object 10 after being irradiated with the laser L, based on the image photographed by the camera. However, the configuration, inspection items, inspection method, etc. of the inspection unit 81 are not limited to those listed above.

[0084] In the laser irradiation device 100c, the inspection unit 81 inspects the state of the irradiated object 10 after the irradiation unit 51 has irradiated the laser L, thereby inspecting whether or not the marking by the irradiation unit 51 has been performed appropriately. If the marking by the irradiation unit 51 has not been performed appropriately, the laser irradiation device 100c can perform the marking by the irradiation unit 51 appropriately by changing the irradiation conditions of the laser L by the irradiation unit 51. Note that "performing marking appropriately" includes forming the characters, figures, etc. to be marked at a predetermined position with reduced positional deviation, forming the characters, figures, etc. in a predetermined shape, etc.

[0085] For example, when the second guide unit 72 moves the irradiated object 10, if the second guide unit 72 comes into contact with the irradiated object 10, the position and posture of the irradiated object 10 may change relative to the irradiated object 10-1 that is irradiated with the laser L by the irradiation unit 51. For this reason, if the inspection unit 81 is disposed downstream in the second movement direction N2 of the irradiated object 10-2 that starts to detour around the second shielding unit 55, the change in the position and posture of the irradiated object 10 may prevent the inspection by the inspection unit 81 from being performed with high accuracy.

[0086] In the laser irradiation device 100c, the inspection unit 81 is disposed between the irradiated object 10-1, which is irradiated with the laser L by the irradiation unit 51, and the irradiated object 10-2, which starts to detour around the second shielding unit 55. This allows the inspection by the inspection unit 81 to be performed before the irradiated object 10 comes into contact with the second guide unit 72. As a result, in the laser irradiation device 100c, changes in the position and posture of the irradiated object 10 due to contact with the second guide unit 72 are suppressed, and the inspection by the inspection unit 81 can be performed with high accuracy.

[0087] The effects of the laser irradiation device 100c other than those mentioned above are similar to those of the laser irradiation device 100 according to the first embodiment.

[0088] [Detailed Description of Laser Irradiation Apparatus, Irradiated Object, and Laser Irradiation Method According to the Embodiment] Hereinafter, the details of each configuration of the laser irradiation apparatus according to the embodiment of the present invention, the irradiated body, and each step of the laser irradiation method according to the embodiment of the present invention will be described. In the following explanation, each configuration and each step will be described using the laser irradiation apparatus 100 as an example, but the same configuration and steps can also be applied to the laser irradiation apparatus 100a, the laser irradiation apparatus 100b, and the laser irradiation apparatus 100c.

[0089] <Irradiation unit 51> The irradiation unit 51 of the laser irradiation device 100 includes an optical scanning unit 29. FIG. 19 is a schematic diagram showing the optical scanning unit 29 included in the laser irradiation device 100. The optical scanning unit 29 includes an X-axis galvanometer scanner 31, a Y-axis galvanometer scanner 32, and an imaging optical element 33. The X-axis galvanometer scanner 31 further includes an X-axis galvanometer driver and a deflection mirror rotatably attached to the tip of the X-axis galvanometer driver. The Y-axis galvanometer scanner further includes a Y-axis galvanometer driver and a deflection mirror rotatably attached to the tip of the Y-axis galvanometer driver. The rotation directions of these two deflection mirrors are perpendicular to each other, and by rotating the deflection mirrors, the laser emitted from the laser light source can be scanned at any position.

[0090] An fθ lens can be used for the imaging optical element 33. The fθ lens focuses the incident laser beam scanned by the X-axis galvanometer scanner 31 and the Y-axis galvanometer scanner 32 at a position displaced from the center of the lens optical axis in proportion to the incident angle. However, the irradiation unit 51 may configure the imaging optical element by including a lens other than the fθ lens, a mirror, a diffractive optical element, etc.

[0091] The laser irradiation device 100 irradiates the object with a laser with a certain delay from the timing when the object is detected by a sensor installed on the conveying section. The object is irradiated with the laser while being conveyed on the conveying section. The laser scanning by the X-axis galvano scanner 31 and the Y-axis galvano scanner 32 is determined based on the processing content, conveying speed, etc., and a single-stroke vector scan or a reciprocating raster scan is selected.

[0092] <Method of marking on the irradiated object 10> The surface properties of the container body can be changed to form individual microstructures by changing the shape and the physical properties. The surface modification is carried out by the surface modification means, which involves at least one of these changes.

[0093] Fig. 20 is a diagram showing changes in the surface properties of the irradiated object 10 due to laser irradiation from the laser irradiation device 100. Fig. 20 is merely an example and does not limit the types of changes in the surface properties or the means for changing them, and as long as they involve optical properties, for example, yellowing of a resin material, shape changes due to cutting, oxidation reactions, etc. may be used.

[0094] Fig. 21 is an enlarged view of a printed surface formed by changing the surface texture. Fig. 22 is a diagram showing the microstructure of a printed surface formed by changing the surface texture. Fig. 23 is a diagram showing a case where the microstructure of a printed surface formed by changing the surface texture is linear. Fig. 24 is a diagram showing a case where the microstructure of a printed surface formed by changing the surface texture is close to circular.

[0095] As shown in FIG. 22, the printing surface of an irradiated object in any region is marked with multiple microstructures. In FIG. 22, two microstructures are arranged in line relative to the printing line width, but this does not limit the number of structures relative to the printing width. Depending on the method for forming the microstructures, it is also conceivable that the microstructures may have a shape close to a circle, as shown in FIG. 23. The shape of the microstructures is also not particularly limited, and as shown in FIG. 23, the method of assembly may be changed depending on the content to be printed and the position. Here, "assembling microstructures" refers to a state in which they are arranged at different times in any range. As shown in FIG. 24, even if they are processed in the same line, they can be assembled by folding back, resulting in an assembly of microstructures in this embodiment.

[0096] Fig. 25 is a diagram showing a first example of a method for adjusting pixel values ​​of output pixels in an irradiated object. Fig. 26 is a diagram showing a second example of a method for adjusting pixel values ​​of output pixels in an irradiated object. Fig. 27 is a diagram showing a third example of a method for adjusting pixel values ​​of output pixels in an irradiated object.

[0097] The irradiated object used in this embodiment can assign any region on the surface of the container body to be printed as an output pixel. As shown in FIG. 25, the pixel value of the output pixel can be adjusted by adjusting the density of the fine structure within the output pixel region. The position of the fine structure on the output pixel in FIG. 25 is merely an example, and the arrangement can be set arbitrarily. When allocating pixel values ​​as shown in FIG. 25, the gradation values ​​that can be expressed are determined taking into account the resolution required for the output pixel and the size of the fine structure, and the gradation in FIG. 25 is merely an example. As shown in FIG. 26, assigning a gradation value to the output pixel can also be achieved by adjusting the range of surface texture modification in the depth direction from the surface of the container body. FIG. 26 is merely an example and does not limit the distribution of the modified region after adjustment. Similarly, assigning a gradation value to the output pixel can also be achieved by changing the optical characteristics of a single fine structure, as shown in FIG. 27.

[0098] In this embodiment, for simplicity, the irradiated object is described as a PET bottle, but the irradiated object may be a transparent container made of other resin materials or glass.

[0099] In this embodiment, depending on the color of the contents, the visibility is higher when the contents are inside. When the visible area appears white, the highest contrast is achieved when the color of the contents placed in the irradiated body is black, but other colors such as brown or colorless are also acceptable. The visible area can also be formed in black, and when it appears black, the highest contrast is achieved when the color of the contents placed in the irradiated body is white. When forming a black area, it is possible to form the visible area by carbonization. The color of the irradiated body itself can be colored as well as colorless.

[0100] Fig. 28 is a schematic diagram showing variations in processing depth in marking, and Fig. 29 is a diagram showing overlapping of beams when multiple beams are used.

[0101] There are four conditions A to D for variations in marking depth: A: The ratio of processed to non-processed parts is 1 to 3 to 9 to 7, and the processing depth and strength are high. B: Processing depth where the ratio of processed area to non-processed area is 7 to 9 to 3 to 1 C: Processing depth where the ratio of processed area to non-processed area is 4 to 6 to 6 to 4 D: Various processing depths coexist, and information variation increases. Specifically, for example, in the case of condition A, when the container thickness is 100 μm or more and 500 μm or less, the processing depth is 10 μm or more. The container capacity is 500mL or 2L, with the largest being 30L.

[0102] In marking, irradiation is performed with multiple beams to increase speed. The multi-beam laser arrangement is 1D, and there are three variations in the overlap of the beams. Figure 29 shows an image of the overlap of beams during processing with multiple beams. For example, the above condition A has a processing width of 42.6 μm and a gap of 23.6 μm.

[0103] <Marking example> Fig. 30 is a diagram showing a first example of the appearance of the irradiated object 10 marked by the laser irradiation device 100. Fig. 31 is a diagram showing a second example of the appearance of the irradiated object 10 marked by the laser irradiation device 100. Fig. 32 is a diagram showing a third example of the appearance of the irradiated object 10 marked by the laser irradiation device 100.

[0104] The printed portion is, for example, an image marked by changing the surface properties of the irradiated object 10. FIG. 30 shows a case where the contents contained in the irradiated object 10 or the background is black, and the printed surface is white. FIG. 31 shows a case where the contents are white. In FIG. 31, the printed surface is darker than the non-printed surface by, for example, making the transmittance of the printed surface lower than that of the non-printed surface. As shown in FIG. 32, an aggregate of microstructures may be marked on the non-printed surface.

[0105] FIG. 33 is a diagram showing a first example of an image marked on the irradiated object 10 by the laser irradiation device 100. FIG. 34 is an enlarged view of the drawn portion in FIG. 33. FIG. 35 is a diagram showing a second example of an image marked on the irradiated object 10 by the laser irradiation device 100. FIG. 36 is a diagram showing a third example of an image marked on the irradiated object 10 by the laser irradiation device 100. FIG. 37 is a diagram showing a fourth example of an image marked on the irradiated object 10 by the laser irradiation device 100. FIG. 38 is a diagram showing a first example of an image formed on a curved surface near the mouth of the irradiated object 10 by the laser irradiation device 100. FIG. 39 is a diagram showing a second example of an image formed on a curved surface near the mouth of the irradiated object 10 by the laser irradiation device 100. FIG. 40 is a diagram showing a third example of an image formed on a curved surface near the mouth of the irradiated object 10 by the laser irradiation device 100.

[0106] 33 to 37 show an example of an irradiated object 10 on which markings have been applied, and the drawn portion (identifiable area / whitened area) is a collection of microstructures formed by modifying the material of the irradiated object 10.

[0107] FIG. 35 is an image diagram showing an example of a delicate design marked on the irradiated object 10 by the laser irradiation device 100. Methods for realizing design drawing that contribute to improving the commercial value of the irradiated object 10 marked by the laser irradiation device 100 include pointillism image expression and gradation image expression. It is desirable that the pointillism, binary, multi-value, image size, and drawable area cover almost the entire height of the irradiated object 10. Specifically, a drawing area with a height of 2 cm to 20 cm is desirable. It is also economical to set the height that can be written at one time to, for example, 2.54 cm, and record in several steps.

[0108] The laser emitted by the laser irradiation device 100 uses a laser with a small beam diameter to draw an aggregate of fine structures, making it possible to draw delicate designs that are difficult to draw with conventional laser printing. In addition, drawing can be done using a similar process on biodegradable resin, which has been attracting attention in recent years for its recyclability. It is desirable that the biodegradable resin is 100% biodegradable. Even if the biodegradable resin is only about 30%, environmental friendliness is greatly improved. The irradiated object 10 is made using, for example, at least one of the resin materials listed below. A typical resin material that makes up the irradiated object 10 is PET.

[0109] (Resin list) Polyvinyl alcohol (PVA) Polybutylene adipate / terephthalate (PBAT) Polyethylene terephthalate succinate Polyethylene (PE) Polypropylene (PP) Polyethylene terephthalate (PET) Polyvinyl chloride (PVC) Polystyrene (PS) Polyurethane Epoxy Biopolybutylene succinate (PBS) Polylactic acid blend PBAT Starch blend polyester resin Polybutylene terephthalate succinate Polylactic acid (PLA) Polyhydroxybutyrate / hydroxyhexanoate (PHBH), polyhydroxyalkanoate (PHA) BioPET30 Biopolyamide (PA) 610, 410, 510 Bio PA1012, 10T Bio PA11T, MXD10 Bio-polycarbonate Bio-Polyurethane BioPE BioPET100 Bio PA11 Bio PA1010

[0110] In addition to PET bottles, examples of the irradiated object 10 include resin cups used in convenience stores to serve iced coffee. The irradiated object 10 is not limited to a resin material and may be made of, for example, a glass material. For glass, too, the visible area can be marked with an aggregate of fine structures.

[0111] The structure of the irradiated object 10 used in this embodiment may have a circular or polygonal shape, which is the shape of a container when cut into slices. Therefore, the marking surface may be not only a single flat surface, but also a combination of multiple flat surfaces, a curved surface, or a combination of a curved surface and a flat surface. Figure 38 shows an example of the result of marking on a curved surface near the mouth of the irradiated object 10.

[0112] As shown in Figure 39, if the height direction of the irradiated object 10 is the Z axis, the drawing formed when viewing the XY plane from the Z axis direction has good visibility from the Z axis direction, and for example, if a manufacturer name, product name, image, logo, QR code (registered trademark), barcode, etc. are included, it will be easy to understand even when packed in a box, etc.

[0113] To improve the visibility of barcodes and the like from the Z-axis direction when the height direction of the irradiated object 10 is the Z-axis, it may be easier to read if the spacing between the lower lines is narrowed and the lines are drawn to match the curvature, as shown in Figure 40, for example.

[0114] <Operation of the laser irradiation device 100> (Example 1) FIG. 41 is a schematic diagram showing a first example of the configuration of a laser irradiation device 100. In the first example shown in FIG. 41, the laser irradiation device 100 has an irradiation unit 51 and a rotation mechanism 11. The irradiation unit 51 includes a laser light source 1, a beam expander 2, a scanning optical element 3, and a focusing optical element 4. The object to be irradiated 10 is a cylindrical PET bottle. The rotation mechanism 11 supports the object to be irradiated 10 and rotates the object to be irradiated 10 about an axis that is approximately parallel to the cylindrical axis of the object to be irradiated 10. The irradiation unit 51 irradiates the object to be irradiated 10 rotated by the rotation mechanism 11 with a laser.

[0115] Fig. 42 is a flowchart showing the operation of the laser irradiation device 100 of Fig. 41. The laser irradiation device 100 starts the operation of Fig. 42 when, for example, an operation input for starting the operation is received from the operator of the laser irradiation device 100 via the operation unit of the laser irradiation device 100.

[0116] First, in step S10, the laser irradiation device 100 emits a laser from the laser light source 1. Subsequently, in step S11, the laser irradiation device 100 changes the beam diameter of the laser using the beam expander 2. Subsequently, in step S12, the laser irradiation device 100 scans the laser using the scanning optical element 3. Subsequently, in step S13, the laser irradiation device 100 focuses the laser using the focusing optical element 4. Subsequently, in step S14, the laser irradiation device 100 irradiates the irradiated object 10 with the laser scanned by the scanning optical element 3. Thereafter, the laser irradiation device 100 ends the operation of FIG. 42 on the condition that, for example, an operation input to end the operation is received from the operator of the laser irradiation device 100 via the operation unit of the laser irradiation device 100.

[0117] (Example 2) FIG. 43 is a schematic diagram showing a second example of the configuration of the laser irradiation device 100. The second example shows a configuration in which the optical system is arrayed. In the second example shown in FIG. 43, the laser irradiation device 100 has an irradiation unit 51a and a rotation mechanism 11. The irradiation unit 51a has an array laser light source 6 including a plurality of light-emitting units 60, and a plurality of optical elements 7 arranged in a predetermined direction and corresponding to the plurality of light-emitting units 60. The rotation mechanism 11 supports the irradiation target 10 and rotates the irradiation target 10 around an axis approximately parallel to the cylindrical axis of the irradiation target 10. The irradiation unit 51a irradiates the irradiation target 10, which is rotated by the rotation mechanism 11, with lasers emitted from the plurality of light-emitting units 60.

[0118] Fig. 44 is a flowchart showing the operation of the laser irradiation device 100 of Fig. 43. The laser irradiation device 100 starts the operation of Fig. 44 when, for example, an operation input for starting the operation is received from the operator of the laser irradiation device 100 via the operation unit of the laser irradiation device 100.

[0119] First, in step S20, the laser irradiation device 100 emits laser from the multiple light-emitting units 60 of the array laser light source 6. Subsequently, in step S21, the laser irradiation device 100 focuses the laser using the multiple optical elements 7. Subsequently, in step S22, the laser irradiation device 100 irradiates the laser focused by the multiple optical elements 7 onto the irradiated object 10. Thereafter, the laser irradiation device 100 ends the operation of FIG. 44 on the condition that, for example, an operation input to end the operation is received from the operator of the laser irradiation device 100 via the operation unit of the laser irradiation device 100.

[0120] Although the preferred embodiments have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments of the present invention without departing from the scope of the claims.

[0121] All ordinal numbers, quantitative numbers, and other figures used in the description of the embodiments of the present invention are provided as examples to specifically explain the technology of the present invention, and the present invention is not limited to the illustrated figures. Furthermore, the connection relationships between components are provided as examples to specifically explain the technology of the present invention, and do not limit the connection relationships that realize the functions of the present invention.

[0122] For example, aspects of the present invention are as follows. <1> a first shielding section disposed between a loading position where the irradiated object is loaded and the irradiated object onto which the laser from the irradiating section is irradiated, and blocking the laser reflected by the irradiated object and directed toward the loading position; a second shielding section disposed between the irradiated object onto which the laser from the irradiating section is irradiated and a transport position where the irradiated object is transported out, and blocking the laser reflected by the irradiated object and directed toward the transport position; and a transport section that transports the irradiated object from the loading position to a position where the laser from the irradiating section is irradiated, bypassing the first shielding section, and transports the irradiated object from the position where the laser from the irradiating section is irradiated to the transport position, bypassing the second shielding section. <2> the first shielding unit and the conveying unit are arranged so that the laser reflected by the object to be irradiated is reflected one or more times by the first shielding unit or a first opposing unit that faces the first shielding unit across the conveying unit before heading to the carry-in position, and the second shielding unit and the conveying unit are arranged so that the laser reflected by the object to be irradiated is reflected one or more times by the second shielding unit or a second opposing unit that faces the second shielding unit across the conveying unit before heading to the carry-out position; <1> The laser irradiation device is described in <3> the laser beam irradiated from the irradiation unit and reflected by the object to be irradiated is reflected at least once by the first shielding unit and then reaches the carry-in position, or is reflected at least once by the second shielding unit and then reaches the carry-out position; <1> or the above <2> The laser irradiation device is described in <4> the conveying unit conveys the irradiated object such that the irradiated object turns two or more times to bypass the first shielding unit and the irradiated object turns two or more times to bypass the second shielding unit; <1> From the above <3> The laser irradiation device is described in any one of the above. <5> the transport unit transports the irradiated object from the carry-in position to a position where the laser is irradiated by the irradiation unit along a first transport path, and transports the irradiated object from the position where the laser is irradiated by the irradiation unit to the carry-out position along a second transport path, the first shielding unit includes a first inner wall that separates a space on a side where the irradiation unit is located with respect to the first transport path from a space where the first transport path is located, and the second shielding unit includes a second inner wall that separates a space on a side where the irradiation unit is located with respect to the second transport path from a space where the second transport path is located. <1> From the above <4> The laser irradiation device is described in any one of the above. <6> a first outer wall separating a space on the opposite side of the first transport path from the side where the irradiation unit is located, and a space where the first transport path is located; and a second outer wall separating a space on the opposite side of the second transport path from the side where the irradiation unit is located, and a space where the second transport path is located. <5> The laser irradiation device is described in <7> At least one of the first inner wall and the first outer wall includes a first reflection reduction portion on a surface facing the first transport path, and at least one of the second inner wall and the second outer wall includes a second reflection reduction portion on a surface facing the second transport path. <6> The laser irradiation device is described in <8> the transport unit includes a first transport unit that transports the irradiated object in a straight line passing through the carry-in position, a second transport unit that transports the irradiated object from the carry-in position side to the carry-out position side, passing through a position where the laser is irradiated by the irradiation unit, and a third transport unit that transports the irradiated object in a straight line passing through the carry-out position, the first, second, and third transport units transport the irradiated object in the same direction, the second transport unit is disposed adjacent to the first and third transport units in a direction perpendicular to a direction in which the irradiated object is transported by the first, second, and third transport units, and further includes a first guide unit that moves the irradiated object transported by the first transport unit so as to be transported by the second transport unit, and a second guide unit that moves the irradiated object transported by the second transport unit so as to be transported by the third transport unit, <1> From the above <7> The laser irradiation device is described in any one of the above. <9> the first guide portion moves the irradiated object in a first movement direction by contacting the irradiated object being transported by the transport portion, and the second guide portion moves the irradiated object in a second movement direction by contacting the irradiated object being transported by the transport portion, a friction coefficient of the first guide portion with respect to the irradiated object is smaller than a friction coefficient of the first shielding portion, and a friction coefficient of the second guide portion with respect to the irradiated object is smaller than a friction coefficient of the second shielding portion; <8> The laser irradiation device is described in <10> the first guide section includes a first inner guide section that is arranged on a side where the irradiation section is located with respect to the irradiated object transported by the first transport section and that comes into contact with the irradiated object transported by the first transport section, and a first outer guide section that is arranged on an opposite side to the side where the irradiation section is located with respect to the irradiated object transported by the first transport section; and the second guide section includes a second inner guide section that is arranged on a side where the irradiation section is located with respect to the irradiated object transported by the second transport section, and a second outer guide section that is arranged on an opposite side to the side where the irradiation section is located with respect to the irradiated object transported by the second transport section, and that comes into contact with the irradiated object transported by the second transport section. <9> The laser irradiation device according to claim 1. <11> the first outer guide portion is capable of making point contact with the irradiated object in a cross-sectional view perpendicular to the first movement direction, and the second outer guide portion is capable of making point contact with the irradiated object in a cross-sectional view perpendicular to the second movement direction; <10> The laser irradiation device is described in <12> the first outer guide portion includes a plurality of first protrusions aligned in the first movement direction, the second outer guide portion includes a plurality of second protrusions aligned in the second movement direction, the plurality of first protrusions being capable of making point contact with the irradiated object in both a top view and a cross-sectional view orthogonal to the first movement direction, the plurality of second protrusions being capable of making point contact with the irradiated object in both a top view and a cross-sectional view orthogonal to the second movement direction, <10> or the above <11> The laser irradiation device is described in <13> The reflectance of the first outer guide portion with respect to the wavelength of the laser is lower than the reflectance of the first inner guide portion, and the reflectance of the second outer guide portion is lower than the reflectance of the second inner guide portion. <10> From the above <12> The laser irradiation device is described in any one of the above. <14> a height of the first outer guide portion based on a placement surface of the irradiated object in the transport unit is different from a height of the first inner guide portion, and a height of the second outer guide portion based on a placement surface of the irradiated object in the transport unit is different from a height of the second inner guide portion; <10> From the above <13> The laser irradiation device is described in any one of the above. <15> an inspection unit that is disposed downstream of the object to be irradiated with the laser by the irradiation unit in a conveying direction of the object to be irradiated by the conveying unit, and that inspects a state of the object to be irradiated after the laser is irradiated; <1> From the above <14> The laser irradiation device is described in any one of the above. <16> the inspection unit is disposed between the irradiation object onto which the laser is irradiated by the irradiation unit and the irradiation object that starts to detour around the second shielding unit; <15> The laser irradiation device is described in <17> a carrying-in entrance for carrying in the irradiated object and a carrying-out exit for carrying out the irradiated object, and a surrounding part for surrounding the irradiation part, the irradiated object to be irradiated with a laser by the irradiation part, the first shielding part, and the second shielding part, <1> From the above <16> The laser irradiation device is described in any one of the above. <18> A laser irradiation method using a laser irradiation device, in which the laser irradiation device irradiates an irradiated object with a laser using an irradiation unit, a first shielding unit arranged between a carry-in position where the irradiated object is carried in and the irradiated object onto which the laser is irradiated by the irradiation unit blocks the laser reflected by the irradiated object and heading toward the carry-in position, a second shielding unit arranged between the irradiated object onto which the laser is irradiated by the irradiation unit and an unloading position where the irradiated object is unloaded blocks the laser reflected by the irradiated object and heading toward the unloading position, and a transport unit transports the irradiated object from the carry-in position, bypassing the first shielding unit, to a position where the laser is irradiated by the irradiator, and transports the irradiated object from the position where the laser is irradiated by the irradiator to the unloading position, bypassing the second shielding unit. [Explanation of symbols]

[0123] 1. Laser light source 2 Beam Expander 3. Scanning optical elements 4. Light-concentrating optical elements 6 Array laser light source 60 Light-emitting part 7 Optical Elements 10 Irradiated object 10a character 10-1 Irradiated object irradiated with laser by irradiation unit 10-2 Irradiated object starting to bypass the second shielding part 11 Rotation mechanism 29 Optical scanning unit 31 X-axis galvanometer scanner 32 Y-axis galvanometer scanner 33 Imaging optics 41-1, 41-2, 41-3 Space 42-1, 42-2, 42-3 Space 51, 51a Irradiation section 510 Irradiation position 52 Loading position 53 First shielding part 53-1, 53-2 First inner wall 53-3 First bulkhead 54 Unloading position 55 Second shielding section 55-1, 55-2 Second inner wall 55-3 Second bulkhead 56, 56b Conveying section 56-1 First conveying section 56-2 Second conveying section 56-3 Third conveyor section 561 First Transport Route 562 Second transport route 57 First outer wall (an example of a first opposing portion) 570 First exterior wall 571 First reflection reduction unit 58 Second outer wall (an example of a second opposing portion) 580 Second exterior wall 59 Enclosure 591 Loading entrance 592 Exit 61 Transport plate 61-1 First transfer plate 61-2 Second transfer plate 62 sprocket 63 Idler wheel 64 Return roller 71 First guide part 71-1 First inner guide part 71-2 First outer guide part 72 Second guide part 72-1 Second inner guide part 72-2 Second outer guide part 73 Support part 74 First convex part 81 Inspection Department 810 Inspection position 100, 100a, 100b, 100c laser irradiation device h1, h2 height L Laser R1, R2 laser M Conveying direction N1 1st movement direction N2 2nd movement direction P point [Prior art documents] [Patent documents]

[0124] [Patent Document 1] Patent No. 6750258

Claims

1. an irradiation unit that irradiates a laser beam onto an object to be irradiated; a first shielding unit that is disposed between a carry-in position where the irradiation object is carried in and the irradiation object onto which the laser from the irradiation unit is irradiated, and that shields the laser that is reflected by the irradiation object and directed toward the carry-in position; a second shielding unit that is disposed between the irradiated object onto which the laser from the irradiating unit is irradiated and a carry-out position from which the irradiated object is carried out, and that shields the laser that is reflected by the irradiated object and travels toward the carry-out position; a transport unit that transports the irradiated object from the loading position, bypassing the first shielding unit, to a position where the laser is irradiated by the irradiation unit, and transports the irradiated object from the position where the laser is irradiated by the irradiation unit to the unloading position, bypassing the second shielding unit.

2. the first shielding unit and the conveying unit are arranged so that the laser reflected by the irradiated object is reflected one or more times by the first shielding unit or a first opposing unit that faces the first shielding unit across the conveying unit, and then travels toward the carry-in position; The laser irradiation device of claim 1, wherein the second shielding section and the conveying section are arranged so that the laser reflected by the irradiated object is reflected one or more times by the second shielding section or a second opposing section that faces the second shielding section across the conveying section before heading toward the unloading position.

3. 2. The laser irradiation device according to claim 1, wherein the laser irradiated from the irradiation unit and reflected by the irradiated object is reflected at least once by the first shielding unit before reaching the loading position, or is reflected at least once by the second shielding unit before reaching the unloading position.

4. 2. The laser irradiation device according to claim 1, wherein the transport unit transports the object so that the object detours around the first shielding portion by bending two or more times and the object detours around the second shielding portion by bending two or more times.

5. the transport unit transports the irradiated object from the carry-in position to a position where the laser is irradiated by the irradiation unit along a first transport path, and transports the irradiated object from the position where the laser is irradiated by the irradiation unit to the carry-out position along a second transport path; the first shielding section includes a first inner wall that separates a space on a side where the irradiation section is located with respect to the first transport path from a space where the first transport path is located, 2. The laser irradiation device according to claim 1, wherein the second shielding section includes a second inner wall that separates a space on a side where the irradiation section is located relative to the second transport path from a space where the second transport path is located.

6. a first outer wall that separates a space on the opposite side of the first transport path from a side on which the irradiation unit is located, and a space in which the first transport path is located; 6. The laser irradiation device according to claim 5, further comprising: a second outer wall that separates a space on the opposite side of the second transport path from the side on which the irradiation unit is located, and a space in which the second transport path is located.

7. At least one of the first inner wall and the first outer wall includes a first reflection reduction portion on a surface facing the first transport path, The laser irradiation device according to claim 6 , wherein at least one of the second inner wall and the second outer wall includes a second reflection reducing portion on a surface facing the second transport path.

8. The conveying unit is a first conveying unit that conveys the irradiation object in a straight line through the carry-in position; a second conveying unit that conveys the irradiated object in a straight line from the carry-in position to the carry-out position, passing through a position where the irradiating unit irradiates the laser beam; a third transport unit that transports the irradiated object in a straight line, passing through the unloading position; the first, second, and third transport units transport the irradiation object in the same direction; the second transport unit is disposed adjacent to the first and third transport units in a direction perpendicular to a direction in which the irradiation object is transported by the first, second, and third transport units; a first guide unit that moves the irradiation object transported by the first transport unit so that the irradiation object is transported by the second transport unit; The laser irradiation device according to claim 1 , further comprising: a second guide unit that moves the object to be irradiated, which is transported by the second transport unit, so that the object to be irradiated is transported by the third transport unit.

9. the first guide portion contacts the irradiation object transported by the transport portion to move the irradiation object in a first movement direction; the second guide portion contacts the irradiation object being transported by the transport portion to move the irradiation object in a second movement direction; a coefficient of friction of the first guide portion with respect to the irradiation object is smaller than a coefficient of friction of the first shielding portion; 9. The laser irradiation device according to claim 8, wherein a coefficient of friction of the second guide portion with respect to the object to be irradiated is smaller than a coefficient of friction of the second shielding portion with respect to the object to be irradiated.

10. The first guide portion a first inner guide portion that is arranged on a side where the irradiation unit is located with respect to the irradiation object transported by the first transport portion, and that comes into contact with the irradiation object transported by the first transport portion; a first outer guide unit disposed on an opposite side to a side on which the irradiation unit is located, with respect to the irradiation object transported by the first transport unit; The second guide portion a second inner guide portion disposed on a side where the irradiation portion is located with respect to the irradiation object transported by the second transport portion; 10. The laser irradiation device according to claim 9, further comprising: a second outer guide portion that is arranged on the opposite side of the irradiation unit from the side on which the irradiation unit is located, with respect to the irradiation object transported by the second transport portion, and that contacts the irradiation object transported by the second transport portion.

11. the first outer guide portion is capable of making point contact with the irradiation object in a cross-sectional view perpendicular to the first movement direction, The laser irradiation device according to claim 10 , wherein the second outer guide portion is capable of making point contact with the object to be irradiated in a cross section perpendicular to the second movement direction.

12. the first outer guide portion includes a plurality of first protrusions aligned in the first movement direction, the second outer guide portion includes a plurality of second protrusions aligned in the second movement direction, the plurality of first protrusions are capable of making point contact with the irradiation object in both a top view and a cross-sectional view orthogonal to the first movement direction, The laser irradiation device according to claim 10 , wherein the plurality of second protrusions are capable of making point contact with the object to be irradiated both in a top view and in a cross-sectional view perpendicular to the second movement direction.

13. a reflectance of the first outer guide portion with respect to the wavelength of the laser is lower than the reflectance of the first inner guide portion; The laser irradiation device according to claim 10 , wherein the reflectance of the second outer guide portion is lower than the reflectance of the second inner guide portion.

14. a height of the first outer guide portion relative to a placement surface of the irradiation object in the transport portion is different from the height of the first inner guide portion; The laser irradiation device according to claim 10 , wherein the height of the second outer guide portion relative to a mounting surface of the object to be irradiated in the transport portion is different from the height of the second inner guide portion.

15. 2. The laser irradiation device according to claim 1, further comprising an inspection unit that is arranged downstream of the object to be irradiated with the laser by the irradiation unit in the transport direction of the object to be irradiated by the transport unit, and that inspects the state of the object to be irradiated after the laser is irradiated.

16. 16. The laser irradiation device according to claim 15, wherein the inspection unit is disposed between the irradiation object onto which the laser is irradiated by the irradiation unit and the irradiation object at which a detour around the second shielding unit is started.

17. an entrance for carrying in the irradiated object and an exit for carrying out the irradiated object are formed, and the apparatus includes an enclosure that surrounds the irradiation unit, the irradiated object onto which the laser from the irradiation unit is irradiated, the first shielding unit, and the second shielding unit; the loading location includes the loading entrance; The laser irradiation device according to claim 1 , wherein the unloading position includes the unloading port.

18. A laser irradiation method using a laser irradiation device, the laser irradiation device comprising: The irradiation unit irradiates the object with a laser beam, a first shielding unit disposed between a carry-in position where the irradiated object is carried in and the irradiated object onto which the laser from the irradiation unit is irradiated blocks the laser reflected by the irradiated object and directed toward the carry-in position; a second shielding unit disposed between the irradiated object onto which the laser from the irradiating unit is irradiated and a carry-out position from which the irradiated object is carried out blocks the laser reflected by the irradiated object and directed toward the carry-out position; a conveying unit conveying the irradiated object from the loading position, bypassing the first shielding unit, to a position where the laser is irradiated by the irradiation unit, and conveying the irradiated object from the position where the laser is irradiated by the irradiation unit, bypassing the second shielding unit, to the unloading position.

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