Safety device

Abstract

To provide a safety device capable of solving the problem that an operator inserts a key into the safety device by mistake to cause an extremely dangerous state although the operator is performing maintenance.SOLUTION: A key 31, a main body 32, and a stopper 36 that is disposed on the door 22 and engages with the key, wherein the main body includes an insertion port 321 into which the key is inserted, a switch 35 that allows operation of the processing device, an insertion port 322 into which the stopper is inserted, and a rejection unit 34 that rejects insertion of the key in a state in which the stopper is not inserted into the insertion port. When the door is in a closed state, the stopper is inserted into the insertion port of the main body to open the rejection part, and the key is inserted from the insertion port of the main body to engage with the stopper and turn on the switch.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a safety device that allows a door disposed on a housing of a processing device to be opened or closed. [Background technology]

[0002] A wafer has multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side of the wafer is ground using a grinding machine to form it to the desired thickness, and then the wafer is divided into individual device chips using a dicing machine and laser processing machine. These chips are then used in electrical devices such as mobile phones and personal computers.

[0003] The grinding device is configured to include a turntable, multiple chuck tables arranged on the turntable, a transport means for transporting wafers to the chuck tables, and a cleaning means for cleaning the ground wafers, and is capable of grinding wafers with high precision (see, for example, Patent Document 1).

[0004] When performing maintenance on the grinding device described above, the door of the grinding device must be opened and the operator must lean into the device to perform the maintenance. Therefore, a safety device is provided to turn off the power to the device when the door is opened. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-199227 Summary of the Invention [Problem to be solved by the invention]

[0006] The safety device is configured with a key, a main body, and a stopper that is disposed on the door and engages with the key, and is designed so that when the key is removed, the door opens and the power to the device is turned off. However, in conventional safety devices, the key can be inserted into the main body of the safety device even when the door is open, which poses the risk of turning the power on by inserting the key with the door open. If an operator accidentally inserts the key into the safety device while performing maintenance, this can lead to an extremely dangerous situation.

[0007] The present invention has been made in consideration of the above-mentioned facts, and its main technical object is to provide a safety device that can solve the problem of an operator accidentally inserting a key into the safety device while performing maintenance. [Means for solving the problem]

[0008] In order to solve the above-mentioned main technical problem, according to the present invention, there is provided a safety device that allows the opening and closing of a door arranged on the housing of a processing device, the safety device comprising: a key; a main body; and a stopper arranged on the door and engaging with the key; the main body comprising an insertion port for inserting the key, a switch that allows the processing device to operate, an insertion port into which the stopper is inserted, and a rejection unit that rejects the insertion of the key when the stopper is not inserted into the insertion port; the main body is installed on the housing; when the door is in an open state, the stopper is not inserted into the insertion port of the main body, the insertion of the key is rejected by the rejection unit and the switch is maintained OFF; and when the door is in a closed state, the stopper is inserted into the insertion port of the main body and the rejection unit is opened; and when the key is inserted into the insertion port of the main body, the safety device engages with the stopper and turns the switch ON. [Effects of the Invention]

[0009] The safety device of the present invention comprises a key, a main body, and a stopper disposed on the door that engages with the key. The main body comprises an insertion port for inserting the key, a switch that allows the processing device to operate, an insertion port into which the stopper is inserted, and a rejection section that rejects the insertion of the key when the stopper is not inserted into the insertion port. The main body is installed on the housing, and when the door is open, the stopper is not inserted into the insertion port, the insertion of the key is rejected by the rejection section and the switch is kept OFF. When the door is closed, the stopper is inserted into the insertion port of the main body and the rejection section is opened, and when the key is inserted into the insertion port of the main body, it engages with the stopper and turns the switch ON. Therefore, when the door is open, even if a key is inserted into the insertion port of the main body, the rejection section prevents the key from being inserted, and the key cannot reach the switch, so that operation of the processing device is not permitted. Therefore, when an operator opens the door and leans into the processing device to perform maintenance, the grinding device will not operate inadvertently as long as the door is open, ensuring the safety of the operator and eliminating the problem of the operator accidentally inserting a key into the safety device, which could lead to a dangerous situation. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a perspective view of a grinding machine to which a safety device of the present invention is applied; [Figure 2] 2 is a perspective view of a safety device disposed in the grinding machine shown in FIG. 1. FIG. [Figure 3] 3 is a perspective view showing a procedure for opening the door by the safety device shown in FIG. 2. FIG. [Figure 4] FIG. 3 is a perspective view showing the internal configuration of the safety device shown in FIG. 2. [Figure 5] 3 is a perspective view showing a procedure for activating the safety device shown in FIG. 2 to close the door. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0011] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a safety device configured based on the present invention will be described in detail with reference to the accompanying drawings.

[0012] 1 shows a grinding machine 1, which is a processing device to which a safety device 30 of this embodiment is applied. Note that the safety device 30 configured based on the present invention is not limited to being applied to the grinding machine 1 shown in the figure, and may be applied to any processing device as long as it is necessary to restrict access to the inside of the device by the safety device 30. The processing device may be, for example, a cutting device, a laser processing device, etc.

[0013] The grinding device 1 shown in Fig. 1 includes a roughly rectangular parallelepiped device housing 2. In Fig. 1, a rough grinding unit 3 as a rough grinding means and a finish grinding unit 4 as a finish grinding means are mounted on the rear end side of the device housing 2 so as to be movable in the vertical direction.

[0014] The rough grinding unit 3 and the finish grinding unit 4 are each provided with a grinding feed mechanism for raising and lowering the rough grinding unit 3 and the finish grinding unit 4 .

[0015] The grinding device 1 is equipped with a turntable 5 arranged so as to be substantially flush with the upper surface of the device housing 2. The turntable 5 is formed in the shape of a relatively large disk, and is rotated appropriately by a rotation drive mechanism (not shown). The turntable 5 is provided with three of the chuck tables 6, each at an angle of 120 degrees. Each chuck table 6 is equipped with a rotation drive means (not shown) and is configured to be rotatable. The chuck table 6 has a holding surface formed of a breathable material.

[0016] As the turntable 5 is rotated, the three chuck tables 6 arranged on the turntable 5 are moved sequentially to the workpiece loading / unloading area at the front side of the figure, the rough grinding area directly below the rough grinding unit 3, and the finish grinding area directly below the finish grinding unit 4.

[0017] The illustrated grinding apparatus 1 comprises a first cassette 7 disposed on one side of the workpiece carry-in / out area and accommodating a plurality of wafers W, which are workpieces before grinding; a second cassette 8 disposed on the other side of the workpiece carry-in / out area and accommodating a plurality of wafers W after grinding; a temporary placement table 9 disposed between the first cassette 7 and the workpiece carry-in / out area and for aligning the center of the wafers W; cleaning means 10 disposed between the workpiece carry-in / out area and the second cassette 8; The workpiece carrying-in / out means 11 carries out the wafer W stored therein to the temporary placement table 9 and carries the wafer W cleaned by the cleaning means 10 into the second cassette 8, a first transport means 12 carries the wafer W held on the temporary placement table 9 onto the chuck table 6 positioned in the workpiece carrying-in / out area, and a second transport means 13 carries the wafer W after grinding placed on the chuck table 6 positioned in the workpiece carrying-in / out area to the cleaning means 11.

[0018] A control means 100 including an operation panel for issuing grinding instructions and specifying processing conditions is disposed on the front side of the apparatus housing 2, where the workpiece carry-in / out means 11 is disposed. The control means 100 is equipped with a central processing unit (CPU) that performs calculations according to a control program, a read-only memory (ROM) that stores the control program and the like, a readable / writable random access memory (RAM) that serves as storage means for storing calculation results and the like, an input interface, and an output interface (all of which are not shown). The control means 100 configured in this manner controls each operating unit of the grinding apparatus 1, and also controls the operation of the grinding apparatus 1 based on an ON / OFF signal transmitted from a safety device 30 (described later in detail).

[0019] Above the device housing 2 of the grinding device 1, there is disposed a casing 20 (shown by a two-dot chain line for convenience of explanation) that isolates from the outside the area in which the rough grinding unit 3, finish grinding unit 4, chuck table 6, first cassette 7, second cassette 8, etc. are disposed, and the casing 20 is provided with a door 22 that is opened when performing maintenance on the inside of the grinding device 1. The door 22 is supported on the casing 20 via hinges 26, 26 so as to be able to open and close, and the door 22 is provided with a handle 24 that the operator grasps when opening the door 22.

[0020] In the housing 20, a safety device 30 is disposed near the position where the handle 24 of the door 22 is disposed, on the edge of the opening opened by the door 22. The safety device 30 regulates the opening and closing of the door 22, and functions to prevent the operation of the grinding device 1 of this embodiment when the door 22 is opened for internal maintenance of the grinding device 1, for example, when cleaning the inside of the housing 20, when replacing the chuck table 6, or when replacing the grinding wheels of the rough grinding unit 3 or the finish grinding unit 4.

[0021] As shown in Fig. 2, the safety device 30 includes a key 31, a main body 32, and a stopper 36 (described later) disposed on the door 22 side and engaging with the key 31. The main body 32 has a fixed plate 32a fixed to the housing 20 and a main body cover 32b covering the fixed plate 32a, and the main body cover 32b includes an insertion opening 321 into which the key 31 is inserted from above and an insertion opening 322 into which the stopper 36 is inserted (described in detail later). Fig. 2 shows a state in which the door 22 is closed and the key 31 is inserted into the insertion opening 321 of the main body 32, preventing the door 22 from being opened.

[0022] To open the door 22, as shown in Figure 3(a), by pulling out the key 31 from the insertion port 321 in the direction indicated by the arrow R1, the stopper 36, which had been restricted by the engagement slit 361 (see Figure 3(b)) of the stopper 36 with which the key 31 engages inside the main body 32, becomes free, and as shown by the arrow R2 in Figure 3(b), the stopper 36 can be removed from the insertion port 322, and the door 22 is opened in the direction indicated by the arrow R3.

[0023] The internal configuration of the main body 32 of the safety device 30 will now be described in more detail with reference to FIG. 4. In FIG. 4, the main body cover 32b is indicated by a two-dot chain line for ease of explanation. As shown in FIG. 4(a), the main body 32 is provided with a rejection unit 34 and a switch 35. The rejection unit 34 includes a movable block 341 and a pair of springs 342, 342, and is disposed on a support plate 323 that extends horizontally at an angle of 90° relative to the fixed plate 32a. As shown in FIG. 4(b), by pushing the movable block 341 in the direction indicated by arrow R4 against the elastic force of the pair of springs 342, 342, a slit 323a formed in the support plate 323, into which the key 31 can be inserted, is exposed.

[0024] The switch 35 includes a push button 351 with a tapered tip. As shown in FIG. 4( a), when no horizontal load is applied to the push button 351, the push button 35 is protruded in the direction indicated by arrow R5 by an internal spring (not shown). The switch 35 does not issue an ON signal to the control means 100, and the switch 35 remains OFF. The switch 35 of this embodiment is provided to control the operation of the grinding apparatus 1. When the switch 35 remains OFF, the operation of the grinding apparatus 1 is not permitted. In contrast, when the push button 351 is biased in the direction indicated by arrow R6 in FIG. 4( b), the switch 35 responds and outputs an ON signal to the control means 100. The ON signal is output to the control means 100, allowing the control means 100 to operate the grinding apparatus 1. The functions, actions, and effects of the safety device 30 of this embodiment will be described in more detail with reference to FIG. 5 in addition to FIG. 4 described above.

[0025] When the door 22 is in the open state, as shown in FIG. 4(a), the stopper 36 of the main body 32 of the safety device 30 is not inserted into the insertion opening 322, and the moving block 341 closes the slit 323a formed in the support plate 323 by the action of the pair of springs 342, 342. As a result, when an operator enters the housing 20 to perform maintenance with the door 22 open, the moving block 341 of the rejecting unit 34 prevents the insertion of the key 31, and the switch 35 is maintained in the OFF position. In other words, operation of the grinding device 1 is not permitted, and the safety of the operator is ensured.

[0026] On the other hand, when the door 22 is closed, the stopper 36 is inserted into the insertion opening 322 of the main body 32, as shown in FIG. 5(a). This causes the stopper 36 to push the moving block 341, exposing the slit 323a formed in the support plate 323, opening the rejection portion 34, and the engagement groove slit 361 of the stopper 36 vertically aligns with the slit 323a of the support plate 323. In the state shown in FIG. 5(a), the key 31 is not yet inserted, the switch 35 remains OFF, and operation of the grinding machine 1 is still not permitted. As shown in FIG. 5(a), the key 31 has a straight portion 31b with a tapered tip portion 31a and a grip portion 31c at the rear end that is perpendicular to the straight portion 31b. When an operator grasps the grip portion 31c and inserts the key 31 into the insertion port 321 of the main body 32 in the direction indicated by the arrow R7 in the figure, the straight portion 31b of the key 31 engages with the engagement slit 361 of the stopper 36 and the slit 323a of the support plate 323, as shown in Figure 5(b). This restricts the opening of the door 22, and the tip portion 31a of the key 31 presses the push button 351 of the switch 35 horizontally, turning the switch 35 ON. An ON signal is transmitted from the switch 35 to the control means 100, allowing the operation of the grinding device 1, and the grinding device 1 is operated in accordance with a signal instructed by the control means 100.

[0027] As described above, in the safety device 30 of this embodiment, when the door 22 is open, even if the key 31 is inserted into the insertion port 322 of the main body 32, the rejection portion 34 prevents further insertion, preventing the tip 31a of the key 31 from reaching the switch 35, and operation of the grinding device 1 is not permitted. Furthermore, when the door 22 is closed and the key 31 is inserted into the safety device 30, operation of the grinding device 1 is permitted, and the key 31 engages with the engagement slit 361 of the stopper 36 to prevent the door 22 from opening. Therefore, the door 22 will not open accidentally unless the key 31 is removed. Therefore, when the operator opens the door 22 to perform maintenance, the grinding device 1 will not operate inadvertently, ensuring the safety of the operator. [Explanation of symbols]

[0028] 1: Grinding device 2: Device housing 3: Rough grinding unit 4: Finish grinding unit 5: Turntable 6: Chuck table 7: First Cassette 8: Second cassette 9: Temporary table 10: Cleaning method 11: Workpiece loading / unloading means 12: First conveyance means 13: Second transport means 20: Cabinet 22: Door 24: Handle 26: Hinge 30:Safety device 31: Key 32: Main body 32a: Fixing plate 32b: Main body cover 321:Outlet 322: Insertion port 323: Support plate 323a:Slit 34: Rejection Department 341: Moving Block 342: Spring 35: Switch 351: Press button 36: Stopper 361: Engagement slit

Claims

[Claim 1] A safety device that allows a door disposed on a housing of a processing device to be opened and closed, a key, a main body, and a stopper disposed on the door and engaging with the key; the main body includes a slot for inserting a key, a switch for permitting operation of the processing device, a slot for inserting the stopper, and a rejection unit for rejecting insertion of the key when the stopper is not inserted into the slot; The main body is installed in the housing, and when the door is open, the stopper cannot be inserted into the insertion port, the rejection section rejects the insertion of the key and keeps the switch OFF, and when the door is closed, the stopper is inserted into the insertion port of the main body and the rejection section is opened, and when the key is inserted into the insertion port of the main body, it engages with the stopper and turns the switch ON, a safety device.

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