Pressurization system

Abstract

To provide a pressurizing system capable of selecting a plurality of different pressurizing systems.SOLUTION: The pressurizing system S according to the present invention includes a plurality of pressurizing units 1 to 4, one pressurizing area A1 in which a pressurizing process is performed, a plurality of standby areas A2 to A5 disposed on the sides of the pressurizing area as viewed in the vertical direction, and unit support members R1 to R12 that support the respective pressurizing units so that the pressurizing units can be conveyed between the standby areas and the pressurizing area corresponding to the respective pressurizing units. When the workpiece W is pressurized, one of the plurality of pressurizing units is disposed above or below the workpiece in the pressurizing area and is relatively movable with respect to the workpiece. The remaining pressurizing units are disposed in the corresponding standby areas, and each of the pressurizing units is configured to be able to perform the pressurizing processing on the workpiece by a different pressurizing method.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a pressurization system. [Background technology]

[0002] BACKGROUND ART Pressure devices are used, for example, in the manufacturing process of electronic components to apply pressure (pressure bonding, sintering) to stacked workpieces (substrates, elements, sheets, etc.) (see, for example, Patent Documents 1 to 3).

[0003] The pressure device disclosed in Patent Document 1 applies pressure to a workpiece using a pressure pad formed of a special elastic body that deforms to follow the shape of each workpiece. That is, the pressure device applies pressure to the workpiece from multiple directions (hereinafter referred to as the "quasi-isotropic pressure method"), thereby evenly applying pressure to the workpiece. As a result, the pressure device can apply pressure evenly from multiple directions to, for example, a workpiece with uneven surfaces or multiple workpieces of different heights.

[0004] Here, in the pressure device disclosed in Patent Document 1, pressure is applied to areas that do not require pressure (for example, areas other than the chips on the substrate). Some workpieces have areas with low strength (for example, eaves-shaped areas). When such workpieces are pressurized using the pressure device, defects such as cracks or chips may occur in the areas with low strength. Therefore, there is a demand for a pressure device that can apply pressure using a pressure method that applies pressure collectively only to the areas that require pressure.

[0005] The pressurizing device disclosed in Patent Document 2 presses a workpiece using a rigid body (e.g., a steel plate) with a flat press surface. That is, the pressurizing device presses the workpiece from above and below (one direction) (hereinafter referred to as the "uniaxial pressurizing method"). As a result, the pressurizing device can pressurize a workpiece that requires a flat surface (e.g., a thin, easily deformed workpiece such as a ceramic green sheet) so that the surface becomes flat. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-296746 [Patent Document 2] Japanese Patent Application Laid-Open No. 2001-145911 [Patent Document 3] Japanese Patent Application Laid-Open No. 2024-036929 Summary of the Invention [Problem to be solved by the invention]

[0007] In recent years, electronic components have become increasingly diverse. Accordingly, the types of workpieces (e.g., whether or not they have a heat sink, whether or not they have clips to temporarily secure the laminate, etc.), the shapes required of the workpieces after pressing (e.g., the degree of surface flatness, whether or not they are rounded, etc.), and the processing conditions of the workpieces (e.g., pressure, temperature conditions, etc.) have also become more diverse. As mentioned above, the optimal pressing method varies depending on the workpiece. Furthermore, pressing devices are generally designed to enable pressing using a single pressing method. Therefore, to appropriately pressurize each of the diverse workpieces, multiple pressing devices compatible with different pressing methods are required.

[0008] Here, Patent Document 3 discloses a pressurizing system capable of applying pressure using two types of pressurizing methods (both uniaxial pressurizing methods) with different pressurizing conditions. In this pressurizing system, two pressurizing devices are arranged in parallel on a process line. After the workpiece is pressurized by the first pressurizing device, additional pressure is applied by the second pressurizing device. In this way, this pressurizing system can apply pressure to the workpiece W using multiple pressurizing methods. However, because multiple pressurizing devices are arranged in parallel, this pressurizing system becomes large. Furthermore, changing the pressurizing method requires redesigning the pressurizing system. In other words, this pressurizing system cannot select multiple different pressurizing methods to suit the workpiece.

[0009] An object of the present invention is to provide a pressurizing system that allows selection of a plurality of different pressurizing methods. [Means for solving the problem]

[0010] In one embodiment of the present invention, the pressure application system is a pressure application system that performs pressure application on at least one workpiece, and comprises a plurality of pressure application units, one pressure application area where the pressure application is performed, a plurality of waiting areas arranged to the sides of the pressure application area when viewed from the top to bottom, and a unit support member that supports each of the pressure application units so that it can be transported between the waiting area corresponding to each of the pressure application units and the pressure application area, wherein when the workpiece is pressurized, one of the plurality of pressure application units is arranged above or below the workpiece in the pressure application area and is movable relative to the workpiece, and the remaining pressure application units are arranged in the corresponding waiting area, and each of the pressure application units is configured to be able to perform the pressure application on the workpiece using a different pressure application method. [Effects of the Invention]

[0011] The present invention provides a pressurizing system that allows selection of a plurality of different pressurizing methods. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a schematic perspective view of a pressurization system showing an embodiment of the pressurization system according to the present invention. [Figure 2] FIG. 2 is a schematic plan view of the pressurizing system. [Figure 3] FIG. 3 is a schematic cross-sectional view of the pressurizing system taken along line AA in FIG. 2. [Figure 4] FIG. 2 is a schematic cross-sectional view of an upper pressurizing unit of the pressurizing system. [Figure 5] FIG. 10 is a schematic cross-sectional view of another upper pressurizing unit of the pressurizing system. [Figure 6] FIG. 6 is a schematic bottom view of the upper pressure unit of FIG. 5. [Figure 7] FIG. 6 is a partially enlarged schematic cross-sectional view of the upper pressure unit of FIG. 5. [Figure 8]FIG. 10 is a schematic cross-sectional view of yet another upper pressurizing unit of the pressurizing system. [Figure 9] FIG. 10 is a schematic cross-sectional view of yet another upper pressurizing unit of the pressurizing system. [Figure 10] 5 is a schematic plan view of the pressurizing system, showing a state in which the upper pressurizing unit of FIG. 4 is transported to a pressurizing area of ​​the pressurizing system in a first operation of the pressurizing system. FIG. [Figure 11] FIG. 11 is a schematic cross-sectional view of the pressurizing system, showing the state of FIG. 10. [Figure 12] (a) is a partially enlarged schematic cross-sectional view of the pressurizing system showing the state before the upper pressurizing unit of Figure 4 is attached to the upper heat unit of the pressurizing system, and (b) is a partially enlarged schematic cross-sectional view of the pressurizing system showing the state after the upper pressurizing unit of Figure 4 is attached to the upper heat unit. [Figure 13] FIG. 2 is a schematic cross-sectional view of the pressurizing system, showing a state in which the chamber unit is assembled. [Figure 14] FIG. 3 is a schematic cross-sectional view of the pressurizing system, showing a state in which a workpiece is pressed. [Figure 15] FIG. 3 is a schematic cross-sectional view of the pressurizing system, showing a state in which the workpiece has been cooled. [Figure 16] 1 is a graph showing an example of a temperature profile for rapid heating and rapid cooling of a workpiece. [Figure 17] 6 is a schematic plan view of the pressurizing system, showing a state in which the upper pressurizing unit of FIG. 5 is transported to a pressurizing area in a second operation of the pressurizing system. FIG. [Figure 18] FIG. 18 is a schematic cross-sectional view of the pressurizing system, showing the state of FIG. 17. [Figure 19] 6 is a schematic cross-sectional view of the pressurizing system, showing a state in which a first movement restricting member of the upper pressurizing unit of FIG. 5 is in contact with a mounting plate of the pressurizing system. FIG. [Figure 20] FIG. 3 is a schematic cross-sectional view of the pressurizing system, showing a state in which a workpiece is pressed. [Figure 21] 10 is a graph showing an example of a temperature profile of constant temperature heating of a workpiece. [Figure 22] 9 is a schematic plan view of the pressurizing system, illustrating a state in which the upper pressurizing unit of FIG. 8 has been transported to the pressurizing area in a third operation of the pressurizing system. FIG. [Figure 23] FIG. 23 is a schematic cross-sectional view of the pressurizing system, showing the state of FIG. 22. [Figure 24] FIG. 2 is a schematic cross-sectional view of the pressurizing system, showing a state in which the chamber unit is assembled. [Figure 25] FIG. 3 is a schematic cross-sectional view of the pressurizing system, showing a state in which the workpiece has been cooled. [Figure 26] 1 is a graph showing an example of a temperature profile for slow heating and slow cooling of a workpiece. [Figure 27] 10 is a schematic plan view of the pressurizing system, illustrating a state in which the upper pressurizing unit of FIG. 9 is transported to the pressurizing area in a fourth operation of the pressurizing system. FIG. [Figure 28] FIG. 28 is a schematic cross-sectional view of the pressurizing system, showing the state of FIG. 27. [Figure 29] 10 is a schematic cross-sectional view of the pressurizing system, showing a state in which a movement restricting member of the upper pressurizing unit of FIG. 9 is in contact with the placing plate. FIG. [Figure 30] FIG. 3 is a schematic cross-sectional view of the pressurizing system, showing a state in which a workpiece is pressed. [Figure 31] FIG. 10 is a schematic cross-sectional view of an upper pressurizing unit in a first modified example of the pressurizing system. [Figure 32] 32 is a schematic cross-sectional view of the pressurizing system, showing a state in which the workpiece is pressed by the upper pressurizing unit of FIG. 31. FIG. [Figure 33] FIG. 10 is a schematic cross-sectional view of a pressurizing system, showing a second modified example of the pressurizing system. [Figure 34] 10 shows a third modified example of the pressurizing system. DETAILED DESCRIPTION OF THE INVENTION

[0013] An embodiment of a pressurization system according to the present invention will be described below. In the following description, reference will be made to the drawings as appropriate. In the drawings, the same members and elements are designated by the same reference numerals, and duplicate descriptions will be omitted. Furthermore, the dimensional proportions of the elements may be exaggerated for the sake of convenience, and are not limited to the proportions shown in the drawings.

[0014] In the following explanations and drawings, when the three mutually orthogonal axes in space are the X-axis, Y-axis, and Z-axis, the X-axis and Y-axis are parallel to the horizontal direction, and the Z-axis is parallel to the up-down direction. The "X-axis direction" is the direction along the X-axis, the "+X-direction" is one direction along the X-axis, and the "-X-direction" is the other direction along the X-axis. The "Y-axis direction" is the direction along the Y-axis, the "+Y-direction" is one direction along the Y-axis, and the "-Y-direction" is the other direction along the Y-axis. The "Z-axis direction" is the direction along the Z-axis and is the up-down direction. The "+Z-direction" is the upward direction, and the "-Z-direction" is the downward direction. The "XY-direction" is the direction along the X-axis and Y-axis directions, and the "XY-plane" is an imaginary plane parallel to the XY-direction (horizontal direction). The "XZ-direction" is the direction along the X-axis and Z-axis directions, and the "XZ-plane" is an imaginary plane parallel to the XZ-direction (vertical direction). The "YZ direction" is a direction along the Y-axis direction and the Z-axis direction, and the "YZ plane" is an imaginary plane parallel to the YZ direction (vertical direction).

[0015] In the following description, the lower surface is a surface that faces downward and is parallel to the XY directions. The upper surface is a surface that faces upward and is parallel to the XY directions. In other words, the lower and upper surfaces are flat. The thickness (height) of each member is the length of each member in the vertical direction.

[0016] ●Pressure system● ●Configuration of the pressurization system FIG. 1 is a schematic perspective view of a pressurizing system showing an embodiment of the pressurizing system according to the present invention. FIG. 2 is a schematic plan view of the pressurizing system. In Fig. 1, the boundaries of each area, which will be described later, are indicated by thick two-dot chain lines. In Fig. 2, for the sake of convenience, some components of the pressurizing system S are omitted from the illustration. In the following description, Fig. 1 and Fig. 2 will be referred to as appropriate.

[0017] The pressurizing system S applies pressure to the workpiece W using a pressurizing method suitable for the workpiece W. The pressurizing system S includes a housing (not shown; the same applies below), multiple (four in this embodiment) upper pressurizing units 1, 2, 3, and 4, a pressurizing device 5, a lower heating unit 6, a conveying mechanism 7, a control device 8, a mounting plate 9, a pump P (see FIG. 3), and multiple mounting bolts Bo (see FIG. 12; the same applies below). The upper pressurizing units 1 to 4 are examples of pressurizing units in the present invention.

[0018] The "workpiece W" is the object (i.e., the object to be pressurized) on which pressure treatment is performed in the pressure system S, and is, for example, a sheet-like substrate (such as a ceramic green sheet), a substrate on which electronic components, circuits, etc. are mounted, etc.

[0019] The "pressure method" refers to the way pressure is applied to the workpiece W (method of applying pressure). Pressurization methods are distinguished by, for example, the direction of pressure applied to the workpiece W (e.g., multi-axial, uniaxial), the number of press surfaces for multiple workpieces W (whether the press surface is divided into multiple areas that can move up and down individually), the flatness of the upper surface Wa (surface) of the workpiece W after pressure is applied, etc.

[0020] Specifically, the pressure application method includes a pseudo-isotropic pressure application method and a uniaxial pressure application method. The "pseudo-isotropic pressure application method" is a method of applying pressure to the workpiece W from multiple directions (i.e., multiple axial directions). As described below, in the pseudo-isotropic pressure application method, the workpiece W is applied by a member that deforms to follow the surface shape of the workpiece W (e.g., a pressure pad 15 (described below)) and a non-deformable member (e.g., a mounting plate 9 (described below)). At this time, pressure is applied to the workpiece W not from all directions, but from multiple directions that are feasible due to the configuration of the pressure application system S. In other words, the pseudo-isotropic pressure application method is a method of achieving pseudo-isotropic pressure. The "uniaxial pressure application method" is a method of applying pressure to the workpiece W from one axial direction (up and down). Here, the top surface Wa of the workpiece W applied by the uniaxial pressure application method is flatter (has a higher flatness) than the top surface Wa of the workpiece W applied by the pseudo-isotropic pressure application method. The pressure application method also includes a batch pressure application method and an individual pressure application method. The "collective pressing method" is a method in which multiple workpieces W are pressed collectively using one press surface. The "individual pressing method" is a method in which multiple partitioned press surfaces (hereinafter referred to as "individual press surfaces") corresponding to each of the multiple workpieces W are pressed (collectively). Here, in the individual pressing method, one workpiece W out of the multiple workpieces W is pressed by one individual press surface out of the multiple individual press surfaces. In this embodiment, the pressing method is one of four methods that combine either one of the pseudo-isotropic pressing method and the uniaxial pressing method with either one of the collective pressing method and the individual pressing method.

[0021] Furthermore, the "pressure method" is determined based on the operation for pressing the press surfaces of the upper pressurizing units 1 to 4 against the workpiece W and the configuration of the press surfaces (e.g., material, number of pressurizing surfaces). That is, for example, if either the operation or the configuration of the press surfaces is different between two pressurizing methods, the two pressurizing methods are different. On the other hand, if the operation and the configuration of the press surfaces are the same between two pressurizing methods, the two pressurizing methods are the same. Therefore, two pressurizing methods that differ only in the magnitude of the pressure applied to the workpiece W (pressure only) are the same. Furthermore, two pressurizing methods that differ only in the size of the mold that provides the press surfaces (so-called mold only) are the same.

[0022] The housing accommodates upper pressure units 1 to 4, a pressure device 5, a lower heating unit 6, a transport mechanism 7, a control device 8, a mounting plate 9, a pump P, and mounting bolts Bo. The shape of the housing is, for example, a rectangular parallelepiped along the XY directions when viewed from above.

[0023] When viewed from above and below, the space inside the housing of the pressurizing system S is roughly divided into one pressurizing area A1 and multiple (four in this embodiment) waiting areas A2, A3, A4, and A5. In other words, the pressurizing system S has one pressurizing area A1 and multiple waiting areas A2 to A5.

[0024] The "pressure area A1" is an area where the workpiece W is pressurized (where the pressurization process is performed).

[0025] The "standby area A2" is an area where the upper pressurizing unit 1 waits (is stored) when it is not in use. When viewed from the top-bottom direction, the standby area A2 is disposed adjacent to the pressurizing area A1 in the +X direction of the pressurizing area A1.

[0026] The "standby area A3" is an area where the upper pressurizing unit 2 waits (is stored) when the upper pressurizing unit 2 is not in use. When viewed from the top-bottom direction, the standby area A3 is disposed adjacent to the pressurizing area A1 in the -Y direction of the pressurizing area A1.

[0027] The "standby area A4" is an area where the upper pressurizing unit 3 waits (is stored) when the upper pressurizing unit 3 is not in use. When viewed from the top-bottom direction, the standby area A4 is disposed adjacent to the pressurizing area A1 in the -X direction of the pressurizing area A1.

[0028] The "standby area A5" is an area where the upper pressurizing unit 4 waits (is stored) when the upper pressurizing unit 4 is not in use. When viewed from the top-bottom direction, the standby area A5 is disposed adjacent to the pressurizing area A1 in the +Y direction of the pressurizing area A1.

[0029] Each of the upper pressurizing units 1 to 4 applies pressure to the workpiece W using a different pressurizing method. The upper pressurizing units 1 to 4 can be transported back and forth between the corresponding standby areas A2 to A5 and the pressurizing area A1 via the transport mechanism 7. In this embodiment, the upper pressurizing units 1 to 4 are transported manually by a user of the pressurizing system S. The specific configuration of the upper pressurizing units 1 to 4 will be described later.

[0030] FIG. 3 is a schematic cross-sectional view of the pressurizing system S taken along line AA in FIG. In the following description, FIGS. 1 and 2 will be referred to together with FIG. 3 as appropriate.

[0031] The pressurizing device 5 uses the upper pressurizing units 1 to 4 transported to the pressurizing area A1 to pressurize the workpiece W. The pressurizing device 5 includes an upper base 50, an upper heating unit 51, and an elevating device 52. The pressurizing device 5 is disposed in the pressurizing area A1.

[0032] The upper base 50 supports the upper heating unit 51, the upper pressure units 1 to 4, and the rails R9 to R12. The upper base 50 is made of, for example, a metal having high rigidity (for example, carbon steel). The shape of the upper base 50 is, for example, a rectangular parallelepiped along the X and Y axes when viewed from above and below.

[0033] The upper heating unit 51 is attached to the underside of the upper base 50. The upper heating unit 51 includes a main body 51a, a heat insulating member 51b, multiple female screw holes 51c, multiple heating sources H1, and multiple cooling sources C1. The main body 51a is made of, for example, a metal having high rigidity (e.g., carbon steel). The main body 51a has a rectangular parallelepiped shape aligned along the X- and Y-axes when viewed from the top-bottom direction. The heat insulating member 51b is arranged to cover the upper side of the main body 51a. The female screw holes 51c are arranged at equal intervals around the outer edge of the lower surface of the main body 51a. The heat source H1 heats the main body 51a. The heat source H1 is, for example, a known straight tube heater. The heat source H1 is contained (arranged) in the lower half of the main body 51a. The cooling source C1 cools the main body 51a. The cooling source C1 is, for example, a straight pipe-shaped flow path through which a refrigerant (not shown, same below) flows. The refrigerant is cooled by a cooling device (not shown, same below) and circulated between the cooling source C1 and the cooling device. The cooling source C1 is contained within the upper half of the main body 51a. The upper heating unit 51 is an example of a heating unit in the present invention. The main body 51a is an example of a heating mold in the present invention.

[0034] The lifting device 52 lifts and lowers the upper base 50, the upper heating unit 51, and the upper pressurizing units 1 to 4. The lifting device 52 is, for example, a known hydraulic cylinder.

[0035] The lower heating unit 6 heats and cools the workpiece W. The lower heating unit 6 includes a lower heating unit 60, a lower cooling unit 61, and a lower heating unit transport device 62.

[0036] The lower heating unit 60 heats and cools the workpiece W. The lower heating unit 60 can be transported between a heat treatment position (pressure area A1) below the upper heating unit 51 and a standby position (standby area A4) spaced horizontally (in the -X direction in this embodiment) from the heat treatment position. The lower heating unit 60 includes a main body 60a, multiple heating sources H2, and multiple cooling sources C2. The lower heating unit 60 is an example of a heat unit in the present invention. The standby position (standby area A4) is an example of a heat unit standby area in the present invention.

[0037] The configuration of the main body 60a is the same as the configuration of the main body 51a. The heat source H2 heats the main body 60a. The configuration of the heat source H2 is the same as the configuration of the heat source H1. The heat source H2 is contained in the upper half of the main body 60a. The cooling source C2 cools the main body 60a. The configuration of the cooling source C2 is the same as the configuration of the cooling source C1. The cooling source C2 is contained in the lower half of the main body 60a. The main body 60a is an example of a thermal mold of the present invention.

[0038] The lower cooling unit 61 cools the workpiece W. The lower cooling unit 61 can be transported between a heat treatment position and a standby position (standby area A2) spaced apart from the heat treatment position in the horizontal direction (in this embodiment, the +X direction). The lower cooling unit 61 includes a main body 61a and multiple cooling sources C3. The lower cooling unit 61 is an example of a heat unit in the present invention. The standby area A2 is an example of a heat unit standby area in the present invention.

[0039] The configuration of the main body 61a is the same as the configuration of the main body 51a. The configuration of the cooling source C3 is the same as the configuration of the cooling source C1. The cooling source C3 is contained within the main body 61a. The main body 61a is an example of a thermal mold of the present invention.

[0040] The lower heating unit transport device 62 transports the lower heating unit 60 and the lower cooling unit 61 between the heat treatment position and their respective standby positions. The lower heating unit transport device 62 includes, for example, a known power source (e.g., a motor: not shown), a power transmission mechanism (e.g., a gear, a ball screw, etc.: not shown), and a rail (not shown).

[0041] The transport mechanism 7 supports (movably transports) the upper pressure units 1 to 4. The transport mechanism 7 includes a plurality of (twelve in this embodiment) rails R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, and R12, a plurality of (four in this embodiment) bases B1, B2, B3, and B4 (see FIGS. 4, 5, 8, and 9; the same applies below), and a plurality of rollers Ro.

[0042] The rails R1 to R12 support the upper pressure units 1 to 4 so that the upper pressure units 1 to 4 can be transported in the horizontal direction (X-axis direction or Y-axis direction). The rails R1 to R12 have an elongated shape that extends along the X-axis direction or Y-axis direction, for example. When viewed in the longitudinal direction of the rails R1 to R12, the shape of the rails R1 to R12 is "L" shaped (see FIGS. 4, 5, 8, and 9). The rails R1 to R12 have enough strength to support the upper pressure units 1 to 4, which are heavy loads. The rails R1 to R12 are an example of a unit support member in the present invention.

[0043] The bases B1 to B4 are shaped like rectangular parallelepipeds aligned along the X and Y axes when viewed from above. Base B1 is disposed in waiting area A2. Base B2 is disposed in the upper space. Base B3 is disposed in waiting area A4. Base B4 is disposed in waiting area A5. Bases B1 to B4 are attached to the ceiling of the housing.

[0044] Rails R1 to R8 are attached to the lower surfaces of corresponding bases B1 to B4 with their protruding portions facing each other. Rails R1 and R2 correspond to base B1, rails R3 and R4 correspond to base B2, rails R5 and R6 correspond to base B3, and rails R7 and R8 correspond to base B4.

[0045] The rails R9 to R12 are attached to the lower surface of the upper base 50 with their protruding portions facing each other. That is, the rails R9 to R12 are (indirectly) attached to the lifting device 52 via the upper base 50. The rails R9 to R12 are an example of the individual unit support member of the present invention. In this embodiment, the rails R9 to R12 are detachable from the upper base 50.

[0046] In the present invention, the rails R9 to R12 may be attached directly to the lifting device 52.

[0047] Rails R1, R2, R5, R6, R9, and R10 are arranged so that their longitudinal direction is along the X-axis direction, and rails R3, R4, R7, R8, R11, and R12 are arranged so that their longitudinal direction is along the Y-axis direction.

[0048] The rollers Ro are rotatably attached to the side surfaces of the upper pressure units 1 and 3 on the X-axis direction side and to the side surfaces of the upper pressure units 2 and 4 on the Y-axis direction side. As the rollers Ro placed on the rails R1 to R12 rotate, the upper pressure units 1 to 4 are transported along the rails R1 to R12.

[0049] The control device 8 controls the overall operation of the pressurization system S. The control device 8 includes, for example, a processor such as a CPU (Central Processing Unit), a volatile memory such as a RAM (Random Access Memory) that functions as a work area for the CPU, and a non-volatile memory such as a ROM (Read Only Memory) that stores various information such as control programs. The control device 8 is realized, for example, by a PC (Personal Computer) or a PLC (Programmable Logic Controller).

[0050] The mounting plate 9 is a member on which the workpiece W is placed. The mounting plate 9 is made of, for example, graphite or a metal with high thermal conductivity (for example, a copper alloy). The mounting plate 9 has a rectangular plate shape extending along the XY direction when viewed from above. The mounting plate 9 is transported onto the lower heating unit 60 or the lower cooling unit 61.

[0051] The pump P reduces the pressure inside the accommodation chambers Ra1 to Ra4 (described later). The pump P is a known vacuum pump. The pump P is connected via piping to exhaust holes 12a, 22a, 32a, and 42a (described later) of the upper pressurizing units 1 to 4 after transport to the pressurizing area A1.

[0052] Upper pressure unit configuration Next, the configuration of the upper pressurizing units 1 to 4 will be described below. In the following description, FIGS. 1 to 3 will be referred to as appropriate.

[0053] ●Configuration of upper pressure unit (1) FIG. 4 is a schematic cross-sectional view of the upper pressure unit 1. As shown in FIG. The figure shows a cross section of the upper pressure unit 1 along the YZ plane, in which the upper pressure unit 1 is cut at the center in the X-axis direction.

[0054] The upper pressure applying unit 1 includes a base 10, a mold 11, a side unit 12, a support unit 13, a frame member 14, and a pressure pad 15. The upper pressure applying unit 1 is configured to be transportable between the standby area A2 and the pressure applying area A1.

[0055] The base 10 supports the mold 11, the side unit 12, and the support unit 13. The base 10 has a plurality of bolt insertion holes 10a. The base 10 has a rectangular parallelepiped shape aligned with the XY direction when viewed from the top-bottom direction. The bolt insertion holes 10a are through holes that penetrate the base 10 in the top-bottom direction. The bolt insertion holes 10a are arranged at equal intervals on the outer edge of the base 10.

[0056] The mold 11 applies pressure to the workpiece W via the pressure pad 15 by applying pressure downward with the pressure pad 15. The mold 11 is made of, for example, a metal having high rigidity (for example, carbon steel). The shape of the mold 11 is a rectangular parallelepiped along the XY direction when viewed from above and below. The mold 11 is attached to the underside of the base 10.

[0057] In the present invention, the mold 11 may be molded integrally with the base 10.

[0058] When the workpiece W is pressurized, the side unit 12, together with the mounting plate 9 and the base 10, forms a space (hereinafter referred to as "accommodation chamber Ra1"; see FIG. 13; the same applies below) in which the workpiece W is accommodated. The side unit 12 is disposed below the base 10. The side unit 12 includes a first side member 121, a second side member 122, three seal members 123, 124, and 125, a cylinder 126, and an exhaust hole 12a.

[0059] The first side member 121 and the second side member 122 are shaped like a rectangular cylinder extending along the XY direction when viewed in the up-down direction. The first side member 121 is attached to the lower surface of the base 10. In the horizontal direction, the first side member 121 is disposed so as to surround the mold 11 and the support unit 13. The second side member 122 is supported by the base 10 via a cylinder 126. In the horizontal direction, the second side member 122 is disposed so as to surround the first side member 121. The exhaust hole 12a is a through-hole that penetrates the second side member 122.

[0060] The seal members 123 to 125 are, for example, known O-rings. The seal member 123 is disposed between the base 10 and the first side member 121. The seal member 124 is disposed between the first side member 121 and the second side member 122. The seal member 125 is attached to the lower surface of the second side member 122.

[0061] The cylinder 126 is attached to the base 10 and the second side member 122, and supports the second side member 122 so that it can move up and down. The cylinder 126 is, for example, a known air cylinder.

[0062] The support unit 13 is disposed below the base 10. The support unit 13 includes a support member 131 and a plurality of spring members 132.

[0063] The support member 131 supports the frame member 14. The support member 131 has a rectangular frame shape along the XY direction when viewed from the top and bottom. In the horizontal direction, the support member 131 is disposed on the side of the mold 11 so as to surround the mold 11.

[0064] The spring member 132 is attached to the base 10 and the support member 131, and supports the support member 131 so that the support member 131 can move vertically relative to the mold 11. The spring member 132 is, for example, a known coil spring.

[0065] The frame member 14 holds the pressure pad 15. The frame member 14 is made of, for example, a metal (e.g., stainless steel) having high rigidity. When viewed from the top-bottom direction, the frame member 14 has a rectangular frame shape that is aligned with the XY axis direction. In the top-bottom direction, the frame member 14 is located below the mold 11. The frame member 14 is supported by the base 10 via a support unit 13 so as to be movable relative to the mold 11 in the top-bottom direction.

[0066] When pressure is applied to the workpiece W, the pressure pad 15 deforms to follow the shape of the surface of the workpiece W, thereby applying uniform pressure to the workpiece W. The pressure pad 15 is held by the frame member 14 and is disposed below the mold 11. The pressure pad 15 includes an elastic body 15a and two film members 15b and 15c.

[0067] When the workpiece W is pressurized, the elastic body 15a uniformly transmits the pressure from the mold 11 to the workpiece W. The elastic body 15a is made of, for example, a known elastic material having high fluidity and low resilience (for example, a high-damping thermally conductive gel sheet "αGEL (registered trademark)" manufactured by Geltec Co., Ltd.). The outer edges of the film members 15b and 15c are held so as to be sandwiched between the frame member 14 along their entire periphery. The elastic body 15a is filled between the film members 15b and 15c, which are arranged above and below the elastic body 15a. As a result, the elastic body 15a is surrounded by the frame member 14 in the horizontal direction.

[0068] When viewed from below, the portion (center portion) of the pressure pad 15 that is not held by the frame member 14 is partitioned into a single rectangular area by the frame member 14. The lower surface 15p of this area faces all of the workpieces W when pressure is applied to the workpieces W, and functions as a single press surface that collectively presses all of the workpieces W. In other words, the lower surface 15p functions as the press surface in the present invention.

[0069] In the present invention, the upper pressure unit 1 may be provided below the pressure pad 15 with a heat insulator that has high heat insulation properties and is deformable to follow the shape of the surface of the workpiece W.

[0070] ●Configuration of upper pressure unit (2) FIG. 5 is a schematic cross-sectional view of the upper pressure unit 2. As shown in FIG. FIG. 6 is a schematic bottom view of the upper pressure unit 2. As shown in FIG. FIG. 5 shows a cross section of the upper pressure unit 2 along the XZ plane, in which the upper pressure unit 2 is cut at the center in the Y-axis direction.

[0071] The upper pressure applying unit 2 includes a base 20, a mold 21, a side unit 22, a support unit 23, a plurality (nine in this embodiment) of individual protective plates 24, a plurality (nine in this embodiment) of individual pressure applying pads 25, a support mold 26, a plurality (nine in this embodiment) of individual pressure applying members 27, a plurality (nine in this embodiment) of biasing units 28, and a movement restricting member 29. The upper pressure applying unit 2 is configured to be transportable between the waiting area A3 and the pressure applying area A1.

[0072] The base 20 has a plurality of bolt insertion holes 20a. The configuration of the base 20 is the same as the configuration of the base 10, so a detailed description thereof will be omitted.

[0073] The mold 21 applies pressure to the workpiece W via the individual pressure members 27 by applying pressure downward with the individual pressure members 27. The mold 21 is made of, for example, a metal having high rigidity (for example, carbon steel). The mold 21 is attached to the lower surface of the base 20. The mold 21 includes a base portion 21a and a plurality of (nine in this embodiment) individual molds 21b.

[0074] The base portion 21a has a rectangular parallelepiped shape extending along the XY direction when viewed from above. A portion of the lower surface of the base portion 21a protrudes downward in a rectangular parallelepiped shape to form the individual mold 21b. In other words, the base portion 21a is molded integrally with the individual mold 21b.

[0075] The individual molds 21b apply pressure to the corresponding individual pressure members 27 downward to pressurize the corresponding workpieces W. The individual molds 21b have a rectangular parallelepiped shape aligned along the X and Y directions when viewed from the top and bottom. When viewed from the top and bottom, the individual molds 21b are evenly arranged (3 rows x 3 columns) along the X and Y directions.

[0076] In the present invention, the mold 21 may be molded integrally with the base 20 .

[0077] In the present invention, the mold 21 does not necessarily have to include the base portion 21a. In this case, for example, the individual molds 21b may be attached to the lower surface of the base 20.

[0078] Side unit 22 includes a first side member 221, a second side member 222, three seal members 223, 224, and 225, a cylinder 226, and an exhaust hole 22a. The configuration of side unit 22 is the same as the function and configuration of side unit 12, and therefore a detailed description thereof will be omitted.

[0079] The support unit 23 supports the support mold 26. The support unit 23 includes a support member 231 and a plurality of spring members 232. The configuration of the support unit 23 is the same as the configuration of the support unit 13, and therefore a detailed description thereof will be omitted.

[0080] FIG. 7 is a partially enlarged schematic cross-sectional view of the upper pressurizing unit 2. As shown in FIG. This figure shows the portion C of Fig. 5 of the upper pressurizing unit 2. In the following description, Figs. 5 and 6 will be referred to together with Fig. 7 as appropriate.

[0081] The individual protective plates 24 protect the individual pressure pads 25. The individual protective plates 24 are made of, for example, a metal (e.g., carbon steel) having high rigidity. The individual protective plates 24 are shaped like a rectangular plate extending along the XY direction when viewed from the top and bottom. In the XY direction, the length of the individual protective plates 24 is slightly shorter than the length of the corresponding accommodating holes 26a (described below; the same applies hereinafter). The individual protective plates 24 are disposed below the corresponding individual molds 21b, accommodated in the corresponding accommodating holes 26a, and placed on the corresponding individual pressure pads 25.

[0082] When the workpiece W is pressed, the individual pressure pad 25 deforms according to the amount of relative movement of the corresponding individual pressure member 27 with respect to the support mold 26. The individual pressure pad 25 includes an elastic body 25a and two membranes 25b, 25c. The individual pressure pad 25 is housed in the corresponding housing hole 26a and is disposed above and adjacent to the corresponding individual pressure member 27. In other words, the individual pressure pad 25 is disposed between the corresponding individual pressure member 27 and the corresponding individual mold 21b (mold 21). The individual pressure pad 25 is an example of a pressure pad in the present invention.

[0083] When the workpiece W is pressed, the elastic body 25a uniformly transmits the pressure from the corresponding individual mold 21b to the corresponding individual pressing member 27. The material of the elastic body 25a is the same as the material of the elastic body 15a. The elastic body 25a is filled, for example, between the films 25b and 25c arranged above and below the elastic body 25a.

[0084] The films 25b and 25c prevent the corresponding individual pressure members 27 and individual protective plates 24 from adhering to the elastic body 25a. The films 25b and 25c also prevent the elastic body 25a from penetrating into the gaps between the corresponding accommodating holes 26a and the individual pressure members 27, and into the gaps between the corresponding accommodating holes 26a and the individual protective plates 24. The films 25b and 25c are rectangular and extend along the X and Y directions when viewed from the top and bottom. In the X and Y directions, the lengths of the films 25b and 25c are the same as or slightly longer than the lengths of the corresponding accommodating holes 26a.

[0085] The support mold 26 supports the individual pressure members 27 so that they can move vertically relative to the support mold 26. The support mold 26 is made of, for example, a metal having high rigidity (for example, carbon steel). The shape of the support mold 26 is a rectangular parallelepiped along the XY direction when viewed from the top and bottom. The support mold 26 is arranged below the mold 21 and the support unit 23. The support mold 26 has a plurality of (nine in this embodiment) accommodation holes 26a. The support mold 26 is supported by a support member 231.

[0086] The accommodation hole 26a is a through-hole that penetrates the support mold 26 in the vertical direction. The accommodation hole 26a has a two-stage rectangular prism shape that is aligned with the XY direction when viewed in the vertical direction. The accommodation hole 26a has an inner flange portion 26b. The lower end of the inner peripheral surface of the accommodation hole 26a protrudes inward around the entire circumference to form the inner flange portion 26b. The shape of the inner flange portion 26b is a rectangular frame shape that is aligned with the XY direction when viewed in the vertical direction.

[0087] The individual pressure members 27 individually pressurize the corresponding workpieces W from above. The individual pressure members 27 are made of, for example, a metal having high rigidity (e.g., carbon steel). The individual pressure members 27 include a main body portion 27a, an outer flange portion 27b, and a lower surface 27p. Each individual pressure member 27 is housed in a corresponding housing hole 26a and can move (slide) in the vertical direction within the housing hole 26a. That is, the individual pressure members 27 can move in the vertical direction relative to the support mold 26.

[0088] The main body portion 27a has a rectangular parallelepiped shape extending along the X and Y directions when viewed in the vertical direction. In the X and Y directions, the length of the main body portion 27a is shorter than the length of the accommodating hole 26a in the inner flange portion 26b. In the vertical direction, the length of the main body portion 27a is shorter than the length of the accommodating hole 26a. The upper end of the outer peripheral surface of the main body portion 27a protrudes outward along the entire circumference, forming an outer flange portion 27b. The outer flange portion 27b has a rectangular frame shape extending along the X and Y directions when viewed in the vertical direction. In the X and Y directions, the length of the outer flange portion 27b is slightly shorter than the length of the accommodating hole 26a. In the vertical direction, the outer flange portion 27b is disposed so as to face the corresponding inner flange portion 26b.

[0089] When viewed from below, the lower surface 27p of each individual pressure member 27 is partitioned into a plurality of (nine in this embodiment) rectangular regions by the support mold 26. When a plurality of workpieces W are pressed, each lower surface 27p faces a corresponding one of the workpieces W and functions as one individual press surface that presses the workpiece W. In other words, the lower surface 27p functions as an individual press surface in the present invention.

[0090] The biasing units 28 bias the individual pressure members 27 upward. The biasing units 28 include, for example, a plurality of biasing members (for example, coil springs). The biasing units 28 are housed in the corresponding housing holes 26a and are disposed between the corresponding inner flange portions 26b and outer flange portions 27b.

[0091] The movement restricting member 29 includes a first movement restricting member 291 and a second movement restricting member 292 .

[0092] The first movement restricting member 291 restricts downward movement of the support mold 26 and determines the position (height) of the support mold 26 relative to the mounting plate 9 in the vertical direction when pressure is applied to the workpiece W. The first movement restricting member 291 is made of, for example, a known hard insulating material (for example, an insulating material having a compressive strength of several tens of MPa to 100 MPa or more). The shape of the first movement restricting member 291 is a rectangular frame extending along the XY direction when viewed in the vertical direction. The first movement restricting member 291 is attached to the outer edge of the lower surface of the support mold 26. As a result, the first movement restricting member 291 faces the mounting plate 9. In the vertical direction, the length L29 of the first movement restricting member 291 is greater than the length Lw of the workpiece W.

[0093] The second movement restricting member 292 restricts upward movement of the individual pressure members 27, the individual pressure pads 25, and the individual protection plates 24 by the biasing unit 28. The second movement restricting member 292 has a rectangular plate shape extending along the XY direction when viewed in the up-down direction. The second movement restricting member 292 is attached to the upper surface of the support mold 26. The second movement restricting member 292 has a plurality of (nine in this embodiment) insertion holes 29a.

[0094] The insertion hole 29a is a through-hole that penetrates the second movement restricting member 292 in the up-down direction. The shape of the insertion hole 29a is a rectangle that is aligned with the XY direction when viewed in the up-down direction. When viewed in the up-down direction, the insertion hole 29a is disposed at the same position as the corresponding individual mold 21b and the accommodating hole 26a. When viewed from above, the portion of the second movement restricting member 292 surrounding the insertion hole 29a covers the outer edge of the corresponding accommodating hole 26a in the shape of a rectangular frame. In the XY direction, the length of the insertion hole 29a is greater than the length of the corresponding individual mold 21b and less than the lengths of the corresponding accommodating hole 26a and individual protection plate 24.

[0095] When the workpiece W is not being pressurized, the biasing units 28 bias the corresponding individual pressure members 27, individual pressure pads 25, and individual protective plates 24 upward in the accommodation holes 26a. As a result, the individual pressure members 27 are accommodated in the corresponding accommodation holes 26a and do not protrude downward from the support mold 26. Furthermore, the individual protective plates 24 abut against the second movement restricting members 292, and the individual pressure members 27, individual pressure pads 25, and individual protective plates 24 do not protrude upward from the accommodation holes 26a. The individual mold 21b is positioned above the corresponding accommodation holes 26a and insertion holes 29a.

[0096] In the present invention, the upper pressure unit 2 does not necessarily have to include the individual protection plates 24.

[0097] In the present invention, the upper pressure applying unit 2 does not necessarily have to include the second movement restricting member 292.

[0098] Furthermore, in the present invention, the first movement restricting member 291 may be attached to the mounting plate 9.

[0099] Furthermore, in the present invention, the first movement restricting member 291 may be molded integrally with the support mold .

[0100] ●Configuration of upper pressure unit (3) FIG. 8 is a schematic cross-sectional view of the upper pressure unit 3. As shown in FIG. The figure shows a cross section of the upper pressure unit 3 along the YZ plane, in which the upper pressure unit 3 is cut at the center in the X direction.

[0101] The upper pressurizing unit 3 includes a base 30, a mold 31, and a side unit 32. The upper pressurizing unit 3 is configured to be transportable between the standby area A4 and the pressurizing area A1.

[0102] The base 30 has a plurality of bolt insertion holes 30a. The configuration of the base 30 is the same as the configuration of the base 10, so a detailed description thereof will be omitted.

[0103] The die 31 has a lower surface 31p. The configuration of the die 31 is the same as the configuration of the die 11, so a detailed description thereof will be omitted. Here, the lower surface 31p faces the workpiece W when pressure is applied to the workpiece W, and functions as a press surface that applies pressure to the workpiece W. In other words, the lower surface 31p functions as a press surface in the present invention.

[0104] Side unit 32 includes a first side member 321, a second side member 322, three seal members 323, 324, and 325, a cylinder 326, and an exhaust hole 32a. The configuration of side unit 32 is the same as that of side unit 12, and therefore a detailed description thereof will be omitted.

[0105] In the present invention, the upper pressure applying unit 3 may include a member between the base 30 and the mold 31 that controls the distribution of pressure applied from the lower surface 31p to the workpiece W. Here, the member that controls the pressure distribution is, for example, an elastic body or a plate-like member having a constricted structure in which the area of ​​a cross section along the XY plane when viewed in the up-down direction is smaller than the surface of the workpiece W to be pressed.

[0106] ●Configuration of upper pressure unit (4) FIG. 9 is a schematic cross-sectional view of the upper pressure unit 4. As shown in FIG. The figure shows a cross section of the upper pressure unit 4 along the XZ plane, in which the upper pressure unit 4 is cut at the center in the Y-axis direction.

[0107] The upper pressure applying unit 4 includes a base 40, a mold 41, a side unit 42, a support unit 43, a frame member 44, a pressure pad 45, a support mold 46, a plurality of (nine in this embodiment) individual pressure applying members 47, a plurality of (nine in this embodiment) biasing units 48, and a movement restricting member 49. The upper pressure applying unit 4 is configured to be transportable between the waiting area A5 and the pressure applying area A1.

[0108] The base 40 has a plurality of bolt insertion holes 40a. The configuration of the base 40 is the same as the configuration of the base 10, so a detailed description thereof will be omitted.

[0109] The configuration of the mold 41 is the same as that of the mold 11, and therefore a detailed description thereof will be omitted.

[0110] Side unit 42 includes a first side member 421, a second side member 422, three seal members 423, 424, and 425, a cylinder 426, and an exhaust hole 42a. The configuration of side unit 42 is the same as that of side unit 12, and therefore a detailed description thereof will be omitted.

[0111] The support unit 43 includes a support member 431 and a plurality of spring members 432. The configuration of the support unit 43 is the same as the configuration of the support unit 13, and therefore a detailed description thereof will be omitted.

[0112] The configuration of the frame member 44 is the same as that of the frame member 14, and therefore a detailed description thereof will be omitted.

[0113] When the workpiece W is pressed, the pressure pad 45 deforms according to the amount of relative movement of the individual pressure members 47 with respect to the support mold 46. The pressure pad 45 is disposed above the support mold 46 so as to cover the entire surface of a recess 46c (described later) of the support mold 46 when viewed from above, and is disposed below the mold 41 so as to cover the entire surface of the mold 41 when viewed from below. In other words, the pressure pad 45 is disposed between the mold 41 and the individual pressure members 47. The pressure pad 45 includes an elastic body 45a and two film members 45b, 45c. The configuration of the pressure pad 45 is the same as that of the pressure pad 15, and therefore a detailed description thereof will be omitted.

[0114] The support mold 46 supports the individual pressure members 47 so that they can move vertically relative to the support mold 46. The support mold 46 has a plurality of (nine in this embodiment) accommodation holes 46a, an inner flange portion 46b, and a recess 46c. The configuration of the support mold 46 is the same as the configuration of the support mold 26, except for the recess 46c. Therefore, a detailed description thereof will be omitted. The support mold 46 is disposed below the frame member 44 and the pressure pad 45. The support mold 26 is supported by the frame member 44. In other words, the support mold 26 is (indirectly) supported by the support member 431 via the frame member 44.

[0115] The upper surface of the support mold 46, excluding the outer edge, is recessed downward in a rectangular plate shape to form a recess 46c. In the XY directions, the length (width) of the recess 46c is the same as or slightly smaller than the length (width) of the mold 41.

[0116] The individual pressure applying members 47 include a main body portion 47a, an outer flange portion 47b, and a lower surface 47p. Each individual pressure applying member 47 is housed in a corresponding housing hole 46a. The configuration of the individual pressure applying members 47 is the same as that of the individual pressure applying members 27, and therefore a detailed description thereof will be omitted. Here, when multiple workpieces W are pressed, the lower surface 47p faces a corresponding one of the workpieces W and functions as a single individual pressing surface that presses the workpiece W. In other words, the lower surface 47p functions as an individual pressing surface in the present invention.

[0117] The urging units 48 are housed in the corresponding housing holes 46a. The configuration of the urging units 48 is the same as the configuration of the urging units 28, so a detailed description thereof will be omitted.

[0118] The movement restricting member 49 restricts the downward movement of the support mold 46, and also determines the position (height) of the support mold 46 relative to the mounting plate 9 in the vertical direction when pressure is applied to the workpiece W. The shape of the movement restricting member 49 is a rectangular lattice along the XY direction when viewed in the vertical direction. The movement restricting member 49 is attached to a portion of the underside of the support mold 46 where the accommodation holes 46a are not located. In the vertical direction, the length of the movement restricting member 49 is greater than the length of the workpiece W.

[0119] When the workpiece W is not pressurized, the individual pressure members 47 are housed in the corresponding housing holes 46a, similar to the individual pressure members 27, and do not protrude downward from the support mold 46.

[0120] ●Operation of the pressurization system● Next, the operation of the pressurizing system S will be described below using as examples first to fourth operations using the upper pressurizing units 1 to 4. In the following description, FIGS. 1 to 3 will be referred to as appropriate.

[0121] ●First action The "first operation" is an operation in which the workpiece W is pressurized by the upper pressurizing unit 1. In the following explanation, the first operation will be described using an example in which the workpiece W is rapidly heated and rapidly cooled. In the following explanation of the first operation, FIG. 4 will be referred to as appropriate. In the first operation, one or more workpieces W are placed on the mounting plate 9. The mounting plate 9 is placed on the lower cooling unit 61. The temperature of the lower cooling unit 61 is maintained at a predetermined temperature (e.g., approximately 20°C) by the cooling source C3. Meanwhile, in the upper heating unit 51, the heating source H1 and the cooling source C1 are not operating, and the temperature of the upper heating unit 51 is at room temperature.

[0122] In the present invention, when the workpiece W is rapidly heated and rapidly cooled, the cooling source C3 is not operating in the lower cooling unit 61 in the initial state, and the temperature of the lower cooling unit 61 may be room temperature.

[0123] FIG. 10 is a schematic plan view of the pressurizing system S, showing a state in which the upper pressurizing unit 1 is transported to the pressurizing area A1 in the first operation. FIG. 11 is a schematic cross-sectional view of the pressurizing system S, showing the state of FIG. For convenience of explanation, Fig. 10 shows only a part of the configuration of the pressurizing system S (the same applies to Figs. 17, 22, and 27). Fig. 11 shows a cross section of the pressurizing system S taken along line AA in Fig. 2 (the same applies to Figs. 13 to 15 and 23 to 25).

[0124] First, the upper pressurizing unit 1 is attached to the upper heating unit 51. Specifically, the upper pressurizing unit 1 is transported from the waiting area A2 to the pressurizing area A1. At this time, the upper pressurizing units 2 to 4 are arranged in the corresponding waiting areas A3 to A5. The upper pressurizing unit 1 is positioned at a predetermined position in the pressurizing area A1, for example, by a stopper (not shown) that abuts against the upper pressurizing unit 1. Next, the upper pressurizing unit 1 is attached to the upper heating unit 51 with the mounting bolts Bo. Next, the pump P is connected to the exhaust hole 12a.

[0125] In the present invention, when the rail R12 interferes with the upper pressure unit 1 being transported, the rail R12 may be removed.

[0126] Figure 12(a) is a partially enlarged schematic cross-sectional view of the pressurization system S showing the state before the upper pressurization unit 1 is attached to the upper heat unit 51, and (b) is a partially enlarged schematic cross-sectional view of the pressurization system S showing the state after the upper pressurization unit 1 is attached to the upper heat unit 51.

[0127] As shown in FIG. 1(a), when the upper pressure applying unit 1 is transported to the pressure applying area A1, the upper pressure applying unit 1 is positioned below the upper heating unit 51 and spaced apart from the upper heating unit 51. Next, as shown in FIG. 1(b), when the upper pressure applying unit 1 is attached to the upper heating unit 51 with the attachment bolts Bo, the rollers Ro (upper pressure applying unit 1) are spaced upward from the rails R9 and R10. Here, the attachment bolts Bo are inserted through the bolt insertion holes 10a and fitted into the female threaded holes 51c. At this time, the base 10 (upper pressure applying unit 1) is (indirectly) fixed to the lifting device 52 via the upper heating unit 51.

[0128] Next, the upper pressurizing unit 1 and the mounting plate 9 are assembled (formed) into the chamber unit CU1.

[0129] FIG. 13 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the chamber unit CU1 is assembled.

[0130] First, the lower heating unit transport device 62 transports the lower heating unit 60 from the heat treatment position (pressurizing area A1) to the standby position (standby area A4), and transports the lower cooling unit 61 from the standby position (standby area A2) to the heat treatment position. At this time, the upper pressurizing unit 1 is disposed above the workpiece W. Here, the temperature of the lower heating unit 60 is maintained at a predetermined temperature (for example, about 300°C) in advance by the heat source H2.

[0131] Next, the lifting device 52 lowers the upper base 50 until the seal member 125 abuts against the mounting plate 9. At this time, a storage chamber Ra1 is formed between the upper pressure unit 1 and the mounting plate 9, and the workpiece W is stored in the storage chamber Ra1.

[0132] Next, the control device 8 operates the pump P to reduce the pressure inside the accommodation chamber Ra1. As a result, the mounting plate 9 is attached to the second side member 122 by vacuum pressure. At this time, the pressure pad 15 deforms according to the shape of the surface of the workpiece W, and the workpiece W is held by the mounting plate 9 and the pressure pad 15. In this way, by attaching the mounting plate 9 to the upper pressure unit 1, the chamber unit CU1 is assembled, and the workpiece W is accommodated in the chamber unit CU1.

[0133] Next, the workpiece W is rapidly heated and pressurized.

[0134] FIG. 14 is a schematic cross-sectional view of the pressurizing system S showing a state in which the workpiece W is pressed.

[0135] First, the lifting device 52 lifts the upper base 50 until the chamber unit CU1 is separated from the lower cooling unit 61. Next, the lower heating unit transport device 62 transports the lower heating unit 60 from the standby position to the heat treatment position, and transports the lower cooling unit 61 from the heat treatment position to the standby position. Next, the lifting device 52 lowers the upper base 50 until the mounting plate 9 abuts against the lower heating unit 60. At this time, the workpiece W is rapidly heated by the lower heating unit 60 to a predetermined temperature (for example, about 300°C).

[0136] Next, the lifting device 52 lowers the upper base 50 until a specified pressure (for example, 10 MPa to 20 MPa, hereinafter referred to as "specified pressure") is applied to the workpiece W. At this time, the mold 11 descends relative to the frame member 14. As a result, the mold 11 presses the pressure pad 15 downward, and the pressure pad 15 deforms to follow the shape of the surface of the workpiece W, applying uniform pressure to the workpiece W. As a result, the workpiece W is uniformly pressurized from all directions (multiple directions). Pressurization of the workpiece W can be performed during or after the temperature of the workpiece W has been raised.

[0137] Here, when the upper base 50 descends, the rails R9, R10 descend together with the upper base 50. As described above, the rollers Ro are spaced apart from the rails R9, R10. Therefore, when the workpiece W is pressed, the rollers Ro do not pressurize the rails R9, R10, and no mechanical load is applied to the rollers Ro and the rails R9, R10.

[0138] Next, after a predetermined time has elapsed, the lifting device 52 raises the upper base 50 to finish applying pressure to the workpiece W. Next, the workpiece W is cooled.

[0139] FIG. 15 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the workpiece W has been cooled.

[0140] First, the lifting device 52 lifts the upper base 50 until the chamber unit CU1 is separated from the lower heating unit 60. Next, the lower heating unit transport device 62 transports the lower heating unit 60 from the heat treatment position to the standby position, and transports the lower cooling unit 61 from the standby position to the heat treatment position. Next, the lifting device 52 lowers the upper base 50 until the mounting plate 9 abuts against the lower cooling unit 61. At this time, the workpiece W is rapidly cooled to a predetermined temperature (for example, about 50°C) by the lower cooling unit 61.

[0141] Next, the control device 8 stops the pump P and purges the accommodation chamber Ra1 with inert gas. Next, the lifting device 52 raises the upper base 50. At this time, the workpiece W is removed from the chamber unit CU1. Next, the mounting bolts Bo are removed, and the upper pressurizing unit 1 is removed from the upper heating unit 51. Next, the upper pressurizing unit 1 is transported from the pressurizing area A1 to the waiting area A2.

[0142] FIG. 16 is a graph showing an example of a temperature profile for rapid heating and rapid cooling of the workpiece W.

[0143] As described above, the lower heating unit 60 and the lower cooling unit 61 are transported between the standby position and the heat treatment position, and the chamber unit CU1 is raised and lowered. As a result, as shown in the figure, the workpiece W is rapidly heated from room temperature to approximately 300°C in approximately three minutes, and rapidly cooled from approximately 300°C to approximately 100°C or less in approximately one minute. In other words, in the pressurization system S, the lower heating unit 60 and the lower cooling unit 61 are used, and the chamber unit CU1 is formed, so that rapid heating and rapid cooling of the workpiece W can be performed.

[0144] Thus, in the pressurization process using the upper pressurization unit 1, the upper pressurization unit 1 moves relative to the workpiece W in the pressurization area A1 to perform the pressurization process on the workpiece W. As a result, the workpiece W is evenly pressed from all directions (multi-directions) by the pressurization pad 15, which deforms to follow the shape of the surface of the workpiece W. Furthermore, in this pressurization process, multiple workpieces W are pressed collectively by a single press surface (lower surface 15p). In other words, the pressurization method in this pressurization process is a combination of the pseudo-isotropic pressurization method and the batch pressurization method.

[0145] ●Second operation The "second operation" is an operation in which the workpiece W is pressurized by the upper pressurizing unit 2. In the following explanation, the second operation will be explained mainly with respect to the differences from the first operation, taking as an example the case in which the workpiece W is heated at a constant temperature. In the following explanation of the second operation, FIGS. 4 to 7 will be referred to as appropriate. In the second operation, a plurality of workpieces W (nine in this embodiment) are placed on the placement plate 9.

[0146] In the present invention, the number of works W to be pressed in the second operation may be equal to or less than the number of individual press surfaces provided on the upper press unit 2, and is not limited to nine (the same number as the number of individual press surfaces).

[0147] FIG. 17 is a schematic plan view of the pressurizing system S, showing a state in which the upper pressurizing unit 2 is transported to the pressurizing area A1 in the second operation. FIG. 18 is a schematic cross-sectional view of the pressurizing system S showing the state of FIG. FIG. 18 shows a cross section of the pressurizing system S taken along the line BB in FIG. 2 (the same applies to FIGS. 19, 20, 28 to 30).

[0148] First, as in the first operation, the upper pressure unit 2 is transported to the pressure area A1 and attached to the upper heating unit 51. At this time, the upper pressure units 1, 3, and 4 are arranged in the corresponding waiting areas A2, A4, and A5. The mounting bolts Bo are inserted into the bolt insertion holes 20a and fitted into the female thread holes 51c. At this time, the upper heating unit 51 is maintained at a predetermined temperature (e.g., approximately 180°C) in advance by the heat source H1. Next, the mounting plate 9 on which the workpiece W is placed is placed on the lower heating unit 60. At this time, the temperature of the lower heating unit 60 is maintained at a predetermined temperature (e.g., approximately 180°C) in advance by the heat source H2. Therefore, the workpiece W is rapidly heated to the predetermined temperature.

[0149] In the present invention, from the viewpoint of user safety, the upper heating unit 51 may be heated to a predetermined temperature after the upper pressurizing unit 2 is attached.

[0150] Next, in the same manner as in the first operation, the upper pressurizing unit 2 and the mounting plate 9 are assembled into the chamber unit CU2.

[0151] Next, the lifting device 52 lowers the upper base 50 until the first movement restricting member 291 abuts against the mounting plate 9.

[0152] FIG. 19 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the first movement restricting member 291 is in contact with the mounting plate 9. As shown in FIG.

[0153] When the first movement restricting member 291 abuts against the mounting plate 9, the first movement restricting member 291 is sandwiched between the support mold 26 and the mounting plate 9. At this time, downward pressure is applied to the first movement restricting member 291 from the support mold 26. Furthermore, due to this pressure, a frictional force is generated between the first movement restricting member 291 and the mounting plate 9 that prevents horizontal movement of the support mold 26 relative to the mounting plate 9. As a result, horizontal sliding of the support mold 26 relative to the mounting plate 9 does not occur. Furthermore, the position of the support mold 26 relative to the mounting plate 9 (workpiece W) in the vertical direction is fixed. In this state, the support mold 26 and the individual pressure members 27 (lower surfaces 27p) do not come into contact with the workpiece W. Therefore, problems resulting from their contact with the workpiece W (such as movement of the workpiece W or unintended pressure on the workpiece W) do not occur.

[0154] Next, the workpiece W is pressurized.

[0155] FIG. 20 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the workpiece W is pressed.

[0156] Next, the lifting device 52 lowers the upper base 50 until each individual pressure member 27 abuts against the corresponding workpiece W. At this time, the individual mold 21b is inserted into the corresponding insertion hole 29a and abuts against the corresponding individual protective plate 24. In addition, the support member 231 and the support mold 26 move upward relative to the mold 21. Next, the individual mold 21b presses the corresponding individual protective plate 24 downward. At this time, the individual mold 21b, the individual pressure member 27, the individual pressure pad 25, and the individual protective plate 24 move downward (slide) within the accommodating hole 26a against the biasing force of the biasing unit 28. That is, the individual mold 21b, the individual pressure member 27, the individual pressure pad 25, and the individual protective plate 24 move downward relative to the support mold 26. As a result, the individual pressure member 27 protrudes from the accommodating hole 26a toward the corresponding workpiece W and abuts against the portion (upper end) of the corresponding workpiece W that needs to be pressed.

[0157] Next, the lifting device 52 lowers the upper base 50 until a specified pressure (for example, 10 MPa to 30 MPa) is applied to the workpiece W.

[0158] In this state, the individual pressure pads 25 are deformed according to the relative movement of the corresponding individual pressure members 27. As a result, the specified pressure from the corresponding individual molds 21b is transmitted evenly to the corresponding individual pressure members 27. As described above, the elastic body 25a is sandwiched between the two films 25b and 25c. Therefore, the elastic body 25a does not penetrate into the gaps between the accommodating holes 26a and the individual pressure members 27 and the individual protective plates 24. Furthermore, the elastic body 25a absorbs differences in the relative movement of the corresponding individual pressure members 27. As described above, the elastic body 25a is made of a gel sheet, and therefore can absorb differences on the order of several hundred microns. Therefore, the specified pressure from the individual molds 21b is transmitted evenly to all of the workpieces W.

[0159] As described above, the individual pressure members 27 contact only the upper end of the corresponding workpiece W and apply pressure only to the upper end in a downward direction (in one axial direction). Therefore, even if a part of the workpiece W protrudes horizontally, the part will not be pressurized, and defects such as cracking or chipping will not occur in the part. In this way, the pressure system S can use the upper pressure unit 2 to simultaneously apply pressure to only the parts of each of the multiple workpieces W that require pressure.

[0160] When the workpiece W is being pressed, each of the coil springs constituting the biasing unit 28 is not fully compressed. Therefore, the specified pressure transmitted to the individual pressure members 27 is transmitted to the workpiece W, but not to the support mold 26. Also, as described above, when the workpiece W is being pressed, the support member 231 and the support mold 26 move upward relative to the mold 31. Therefore, the specified pressure from the mold 31 is transmitted intensively to the individual pressure members 27, but not to the support mold 26. Therefore, in the upper pressure unit 2, the pressure from the lifting device 52 required to pressurize the workpiece W is reduced (for example, to about one-quarter) compared to the upper pressure unit 4 described below. Also, the pressure resistance required of the support mold 26 is smaller compared to when pressure is applied to the upper surface of the support mold 26. Therefore, the thickness of the support mold 26 can be reduced, and the weight of the support mold 26 can be reduced.

[0161] Next, after a predetermined time has elapsed, the lifting device 52 lifts the upper base 50, and the pressurization of the workpiece W is completed. Next, the control device 8 purges the accommodation chamber Ra2 with an inert gas. Next, the lifting device 52 lifts the upper base 50. Next, the mounting bolts Bo are removed, and the upper pressurizing unit 2 is removed from the upper heating unit 51. Next, the upper pressurizing unit 2 is transported from the pressurizing area A1 to the waiting area A3.

[0162] FIG. 21 is a graph showing an example of a temperature profile for constant temperature heating of the workpiece W.

[0163] As described above, before the workpiece W is pressurized, the workpiece W is heated by the upper heating unit 51 and the lower heating unit 60, which have been preheated to a predetermined temperature. As a result, the temperature of the workpiece W is maintained at the predetermined temperature before pressurization. Furthermore, forced cooling of the workpiece W using the cooling sources C1 and C2 is not performed. Therefore, the temperature of the workpiece W is less likely to drop after pressurization, and the time required for pressurization of the workpiece W is shortened. In other words, in the pressurization system S, the preheated upper heating unit 51 and the lower heating unit 60 are used, and forced cooling of the workpiece W is not performed, so constant temperature pressurization of the workpiece W can be performed.

[0164] Thus, in the pressurizing treatment using the upper pressurizing unit 2, the upper pressurizing unit 2 moves relative to the workpiece W in the pressurizing area A1 to perform the pressurizing treatment on the workpiece W. As a result, the workpiece W is pressed from above and below (in one axial direction) by the individual metal pressurizing members 27. In addition, in this pressurizing treatment, each of the multiple workpieces W is pressed (collectively) by its corresponding individual press surface (lower surface 27p). In other words, the pressurizing method in this pressurizing treatment is a combination of the uniaxial pressurizing method and the individual pressurizing method.

[0165] In the present invention, when the workpiece W is heated at a constant temperature, the upper heating unit 51 does not have to be heated.

[0166] Furthermore, in the present invention, when the workpiece W is heated to a constant temperature, the lower heating unit 60 may, for example, use a plurality of springs to floatingly support the mounting plate 9. In this case, the main body 60a may, for example, have a plurality of holes in which the springs are disposed. In this configuration, when the chamber unit CU2 is assembled, the mounting plate 9 is pressed downward by the upper pressurizing unit 2 and abuts against the lower heating unit 60, thereby rapidly heating the workpiece W.

[0167] ●Third action The "third operation" is an operation in which the workpiece W is pressurized by the upper pressurizing unit 3. In the following explanation, the third operation will be described focusing on the differences from the first and second operations, using as an example the case in which the workpiece W is slowly heated and slowly cooled. In the following explanation of the third operation, FIG. 8 will be referred to as appropriate. In the third operation, one workpiece W is placed on the placement plate 9. When the workpiece W is slowly heated and slowly cooled, the placement plate 9 is placed on the lower heating unit 60. In the upper heating unit 51 and the lower heating unit 60, the heating sources H1, H2 and the cooling sources C1, C2 are not operating, and the temperatures of the upper heating unit 51 and the lower heating unit 60 are at room temperature.

[0168] In the present invention, the number of workpieces W to be pressed in the third operation may be plural, provided that the thicknesses of the workpieces W are the same.

[0169] FIG. 22 is a schematic plan view of the pressurizing system S, showing a state in which the upper pressurizing unit 3 is transported to the pressurizing area A1 in the third operation. FIG. 23 is a schematic cross-sectional view of the pressurizing system S showing the state of FIG.

[0170] First, as in the first operation, the upper pressure unit 3 is transported to the pressure area A1 and attached to the upper heating unit 51. At this time, the upper pressure units 1, 2, and 4 are arranged in the corresponding waiting areas A2, A3, and A5. The mounting bolts Bo are inserted into the bolt insertion holes 30a and fitted into the female thread holes 51c. Next, the mounting plate 9 on which the workpiece W is placed is placed on the lower heating unit 60. At this time, the temperature of the workpiece W is room temperature.

[0171] Next, in the same manner as in the first operation, the upper pressurizing unit 3 and the mounting plate 9 are assembled into the chamber unit CU3 (see FIG. 24).

[0172] FIG. 24 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the chamber unit CU3 is assembled.

[0173] When the chamber unit CU3 is assembled, the workpiece W is accommodated in the chamber unit CU3 (accommodation chamber Ra3). At this time, the mold 31 is in contact with the workpiece W to the extent that it does not apply pressure to the workpiece W (a pressure sufficiently smaller than the specified pressure).

[0174] Next, the control device 8 controls the operation of the heat sources H1 and H2 to heat the upper heating unit 51 and the lower heating unit 60 to a preheating temperature (e.g., about 150°C). As a result, the workpiece W is slowly heated to the preheating temperature together with the upper heating unit 51 and the lower heating unit 60. Next, after a predetermined time has elapsed, the control device 8 controls the operation of the heat sources H1 and H2 to heat the upper heating unit 51 and the lower heating unit 60 to a main heating temperature (e.g., about 300°C). As a result, the workpiece W is slowly heated to the main heating temperature together with the upper heating unit 51 and the lower heating unit 60.

[0175] Next, the lifting device 52 lowers the upper base 50 until a specified pressure (for example, 20 MPa to 30 MPa) is applied to the workpiece W. At this time, the die 31 presses the workpiece W downward evenly.

[0176] Next, after a predetermined time has elapsed, the lifting device 52 raises the upper base 50 to finish applying pressure to the workpiece W. Next, the control device 8 stops the operation of the heating sources H1 and H2 and starts the operation of the cooling sources C1 and C2 to cool the upper heating unit 51 and the lower heating unit 60.

[0177] FIG. 25 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the workpiece W has been cooled.

[0178] The main bodies 51a and 61a have a large heat capacity. Therefore, the upper heating unit 51 and the lower heating unit 60 are cooled slowly. As a result, the workpiece W, together with the upper heating unit 51 and the lower heating unit 60, is cooled slowly to a temperature at which it can be removed.

[0179] Next, the control device 8 purges the accommodation chamber Ra3 with an inert gas. Next, the lifting device 52 raises the upper pressurizing unit 3. Next, the mounting bolts Bo are removed, and the upper pressurizing unit 3 is removed from the upper heating unit 51. Next, the upper pressurizing unit 3 is transported from the pressurizing area A1 to the waiting area A4.

[0180] FIG. 26 is a graph showing an example of a temperature profile for slow heating and slow cooling of the workpiece W.

[0181] As described above, the workpiece W is slowly heated together with the upper heating unit 51 and the lower heating unit 60, and slowly cooled together with the upper heating unit 51 and the lower heating unit 60. That is, in the pressurizing system S, the workpiece W is heated and cooled together with the upper heating unit 51 and the lower heating unit 60, thereby enabling the workpiece W to be slowly heated and slowly cooled.

[0182] Thus, in the pressurization process using the upper pressurization unit 3, the upper pressurization unit 3 moves relative to the workpiece W in the pressurization area A1 to perform the pressurization process on the workpiece W. As a result, the workpiece W is evenly pressed from above and below (in one axial direction) by the metal press surface (lower surface 31p). Furthermore, in this pressurization process, multiple workpieces W can be pressed collectively by one press surface (lower surface 31p). In other words, the pressurization method in this pressurization process is a combination of the uniaxial pressurization method and the batch pressurization method.

[0183] ●Fourth action The "fourth operation" is an operation in which the workpiece W is pressurized by the upper pressurizing unit 4. In the following explanation, the fourth operation will be explained mainly with respect to the differences from the first to third operations, taking as an example a case in which the workpiece W is not heated or cooled. In the fourth operation explained below, FIG. 9 will be referred to as appropriate. In the fourth operation, multiple (nine in this embodiment) workpieces W are placed on the placement plate 9. In the upper heating unit 51 and the lower heating unit 60, the heating sources H1, H2 and the cooling sources C1, C2 are not operating, and the temperatures of the upper heating unit 51 and the lower heating unit 60 are at room temperature.

[0184] FIG. 27 is a schematic plan view of the pressurizing system S, showing a state in which the upper pressurizing unit 4 is transported to the pressurizing area A1 in the fourth operation. FIG. 28 is a schematic cross-sectional view of the pressurizing system S showing the state of FIG.

[0185] First, as in the first operation, the upper pressure unit 4 is transported to the pressure area A1 and attached to the upper heating unit 51. At this time, the upper pressure units 1 to 3 are arranged in the corresponding waiting areas A2 to A4. The attachment bolts Bo are inserted into the bolt insertion holes 40a and fitted into the female thread holes 51c. Next, the mounting plate 9 on which the workpiece W is placed is placed on the lower heating unit 60. At this time, the temperature of the workpiece W is room temperature.

[0186] Next, similar to the first operation, the chamber unit CU4 (see FIG. 29) is assembled using the upper pressurizing unit 4 and the mounting plate 9. Next, similar to the second operation, the upper base 50 is lowered until the movement restricting member 49 abuts against the mounting plate 9.

[0187] FIG. 29 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the movement restricting member 49 is in contact with the mounting plate 9. As shown in FIG.

[0188] When the movement restricting member 49 abuts against the mounting plate 9, similar to the second operation, the supporting mold 46 does not slide horizontally relative to the mounting plate 9. Furthermore, the position of the supporting mold 46 relative to the mounting plate 9 (workpiece W) in the vertical direction is fixed. In this state, the supporting mold 46 and the individual pressure members 47 (lower surfaces 47p) do not come into contact with the workpiece W. Therefore, no defects resulting from these contacts with the workpiece W occur.

[0189] Next, the workpiece W is pressurized.

[0190] FIG. 30 is a schematic cross-sectional view of the pressurizing system S showing a state in which the workpiece W is pressurized.

[0191] The lifting device 52 lowers the upper base 50 until each individual pressure member 47 abuts against the corresponding workpiece W. At this time, the mold 41 enters the internal space of the frame member 44 while applying pressure to the pressure pad 45 in the downward direction. Furthermore, the support member 431 and the frame member 44 move upward relative to the mold 41 as the mold 41 descends. As a result, the pressure pad 45 enters the recess 46c and the accommodating hole 46a while deforming to follow the shapes of the recess 46c and the accommodating hole 46a, and presses the individual pressure member 47 downward. At this time, the individual pressure member 47 moves downward relative to the support mold 46, as in the second operation. As a result, the individual pressure member 47 protrudes from the accommodating hole 46a toward the corresponding workpiece W and abuts against the portion (upper end) of the corresponding workpiece W that needs to be pressed.

[0192] Next, the lifting device 52 lowers the upper base 50 until a specified pressure (for example, 10 MPa to 30 MPa) is applied to the corresponding workpiece W by each individual pressure member 47.

[0193] In this state, the pressure pads 45 are deformed according to the relative movement of the corresponding individual pressure members 47. As a result, the specified pressure from the mold 41 is transmitted evenly to each individual pressure member 47. Also, similar to the second operation, the elastic bodies 45a absorb the difference in the relative movement of each individual pressure member 47. Therefore, the specified pressure from the mold 41 is transmitted evenly to all of the workpieces W.

[0194] As described above, the individual pressure members 47 contact only the upper end portions of the corresponding workpieces W and apply pressure only to the upper end portions downward (in one axial direction). Therefore, the pressure system S can collectively apply pressure to only the portions of each of the multiple workpieces W that require pressure, using the individual pressure members 47 that move relatively to the support mold 46.

[0195] As described above, the pressure pad 45 is disposed above the support mold 46. Therefore, the support mold 46 is pressed by the mold 41 at a specified pressure via the elastic body 45a. The movement restricting members 49 are disposed in a lattice pattern between the lower surface of the support mold 46 and the mounting plate 9, and support the support mold 46, which is pressed at a specified pressure. Therefore, the support mold 46 does not deform even when the specified pressure is applied.

[0196] Next, after a predetermined time has elapsed, the lifting device 52 lifts the upper base 50, thereby completing the pressurization of the workpiece W. Next, the control device 8 purges the accommodation chamber Ra4 with an inert gas. Next, the lifting device 52 lifts the upper pressurizing unit 4. Next, the mounting bolts Bo are removed, and the upper pressurizing unit 4 is removed from the upper heating unit 51. Next, the upper pressurizing unit 4 is transported from the pressurizing area A1 to the waiting area A5.

[0197] Thus, in the pressurization treatment using the upper pressurization unit 4, the upper pressurization unit 4 moves relative to the workpiece W in the pressurization area A1 to perform the pressurization treatment on the workpiece W. As a result, the workpiece W is uniformly pressed from above and below (in one axial direction) by the metal press surface (lower surface 47p). Furthermore, in this pressurization treatment, each of the multiple workpieces W can be pressed (collectively) by its corresponding individual press surface (lower surface 47p). In other words, the pressurization method in this pressurization treatment is a combination of the uniaxial pressurization method and the individual pressurization method.

[0198] Summary According to the embodiment described above, the pressurizing system S includes upper pressurizing units 1-4, a pressurizing area A1, standby areas A2-A5, and rails R1-R12. When viewed from the top-bottom, the standby areas A2-A5 are located adjacent to and to the sides of the pressurizing area A1. When the workpiece W is pressed, one of the upper pressurizing units 1-4, upper pressurizing unit 1, is located in the pressurizing area A1 and is vertically movable relative to the workpiece W. The remaining upper pressurizing units 2-4 are located in the corresponding standby areas A3-A5. Each of the upper pressurizing units 1-4 is configured to perform a pressurizing process on the workpiece W using a different pressurizing method. With this configuration, the user can select an appropriate pressurizing method for the workpiece W by selecting the upper pressurizing unit 1-4 to be transported to the pressurizing area A1. Furthermore, only the selected upper pressurizing unit 1-4 is transported to one pressurizing area A1, and the workpiece W is pressed only by the pressurizing device 5 located in the pressurizing area A1. That is, the pressurizing system S can pressurize the workpiece W using a plurality of pressurizing methods using only a single pressurizing device 5. Therefore, although the pressurizing system S can select from a plurality of pressurizing methods, it is smaller and lighter than a pressurizing system equipped with a plurality of pressurizing devices.

[0199] Furthermore, according to the embodiment described above, the pressurizing method includes a quasi-isotropic pressurizing method in which pressure is applied to the workpiece W from multiple directions, and a uniaxial pressurizing method in which pressure is applied to the workpiece W only from above and below. With this configuration, the user can select either the quasi-isotropic pressurizing method or the uniaxial pressurizing method depending on the workpiece W.

[0200] Furthermore, according to the embodiment described above, the pressurizing method includes a batch pressurizing method in which multiple workpieces W are pressed collectively with one lower surface 15p, 31p, and an individual pressurizing method in which multiple partitioned lower surfaces 27p, 47p are pressed individually with each of the multiple workpieces W. According to this configuration, the user can select either the batch pressurizing method or the individual pressurizing method depending on the workpiece W.

[0201] Furthermore, according to the embodiment described above, the upper pressure unit 1, which pressurizes the workpiece W by the quasi-isotropic pressure method, includes a mold 11, a frame member 14, and a pressure pad 15. When the workpiece W is pressed, the mold 11 applies pressure to the workpiece W with the pressure pad 15. The frame member 14 holds the pressure pad 15. The pressure pad 15 includes an elastic body 15a that deforms to follow the shape of the surface of the workpiece W when the workpiece W is pressed. According to this configuration, the upper pressure unit 1 has the necessary components to perform pressure processing by the quasi-isotropic pressure method. Therefore, a user can easily select the quasi-isotropic pressure method by selecting the upper pressure unit 1 and transporting the upper pressure unit 1 to the pressure area A1.

[0202] Furthermore, according to the embodiment described above, the upper pressure units 2 to 4, which pressurize the workpiece W using the uniaxial pressure method, are made of metal and have flat lower surfaces 27p, 31p, and 47p. The lower surfaces 27p, 31p, and 47p face the workpiece W when the workpiece W is pressed. With this configuration, the user can easily select the uniaxial pressure method by selecting one of the upper pressure units 2 to 4 and transporting it to the pressure area A1. Furthermore, the user can simultaneously pressurize multiple workpieces W of the same thickness or multiple workpieces W of different thicknesses while ensuring the flatness of the upper surface Wa of the workpiece W after pressing.

[0203] Furthermore, according to the embodiment described above, the upper pressure unit 4, which applies pressure to the workpiece W using the individual pressure method, includes a mold 41, a frame member 44, a pressure pad 45, a support mold 46, and an individual pressure member 47. The mold 41 applies pressure to the workpiece W using the individual pressure member 47. The frame member 44 holds the pressure pad 45. The frame member 44 is disposed to the side of the mold 41 when viewed from the top-bottom direction and is movable vertically relative to the mold 41. The pressure pad 45 is disposed between the mold 41 and the individual pressure member 47 and covers the entire surface of the mold 41 when viewed from the bottom. The pressure pad 45 deforms according to the amount of movement of each individual pressure member 47 relative to the support mold 46. The support mold 46 supports the individual pressure members 47, is disposed below the frame member 44 and the pressure pad 45, and is supported by the frame member 44. The individual pressure member 47 is capable of individually applying pressure to each of the multiple workpieces W and has a lower surface 47p. The individual pressure applying members 47 are movable in the vertical direction relative to the support mold 46. When the workpiece W is pressed, the individual pressure applying members 47 protrude from the support mold 46 toward the corresponding workpiece W. With this configuration, the upper pressure applying unit 4 has the necessary components to perform pressure applying processing using a method that combines the uniaxial pressure applying method and the individual pressure applying method. Therefore, the user can easily select the method that combines the uniaxial pressure applying method and the individual pressure applying method by selecting the upper pressure applying unit 4 and transporting the upper pressure applying unit 4 to the pressure applying area A1.

[0204] Furthermore, according to the embodiment described above, the upper pressure unit 2, which presses the workpiece W using the individual pressure method, includes the mold 21, the support member 231, the support mold 26, the individual pressure member 27, and the individual pressure pad 25. The mold 21 presses the individual pressure member 27 toward the workpiece W. The support member 231 is disposed to the side of the mold 21 when viewed in the vertical direction and supports the support mold 26. The support mold 26 supports the individual pressure member 27. The individual pressure member 27 is capable of individually pressing each of the multiple workpieces W and has a lower surface 27p. The individual pressure member 27 is movable vertically relative to the support mold 26. When the workpiece W is pressed, the individual pressure member 27 protrudes from the support mold 26 toward the corresponding workpiece W. The individual pressure pad 25 is disposed between the mold 21 and the individual pressure member 27 and deforms according to the amount of relative movement of each individual pressure member 27 with respect to the support mold 26. According to this configuration, the upper pressurizing unit 2 has the necessary components to perform pressurizing processing using a method that combines the uniaxial pressurizing method and the individual pressurizing method. Therefore, the user can easily select the method that combines the uniaxial pressurizing method and the individual pressurizing method by selecting the upper pressurizing unit 2 and transporting the upper pressurizing unit 2 to the pressurizing area A1.

[0205] Furthermore, according to the embodiment described above, the pressurization system S includes an upper heating unit 51, a lower heating unit 60, and a lower cooling unit 61. The upper heating unit 51 and the lower heating unit 60 are capable of heating and cooling the workpiece W. The lower cooling unit 61 is capable of cooling the workpiece W. The upper heating unit 51, the lower heating unit 60, and the lower cooling unit 61 are each equipped with main bodies 51a, 60a, and 61a, heating sources H1 and H2, and cooling sources C1 to C3. The heating sources H1 and H2 are contained within the main bodies 51a and 60a and heat the main bodies 51a and 60a. The cooling sources C1 to C3 are contained within the main bodies 51a, 60a, and 61a and cool the main bodies 51a, 60a, and 61a. With this configuration, a user can combine different heating and cooling methods into a pressurization method by combining these heating units and their operations.

[0206] Furthermore, according to the embodiment described above, the pressurizing system S includes waiting areas A2 and A4, a lifting device 52, a lower heating unit transport device 62, and a mounting plate 9. When viewed in the vertical direction, the waiting areas A2 and A4 are disposed to the sides of the pressurizing area A1. The lifting device 52 lifts and lowers the upper pressurizing units 1 to 4 transported to the pressurizing area A1. The lower heating unit transport device 62 transports the lower heating unit 60 and the lower cooling unit 61 back and forth between the waiting areas A2 and A4 and the pressurizing area A1. The upper pressurizing units 1 to 4, together with the mounting plate 9, form chamber units CU1 to CU4 in the pressurizing area A1. The lifting device 52 lifts the chamber units CU1 to CU4 when the lower heating unit 60 and the lower cooling unit 61 are transported. When the lower heating unit 60 or the lower cooling unit 61 is transported to the pressurizing area A1, the lifting device 52 lowers the chamber units CU1 to CU4 to bring the chamber units CU1 to CU4 into contact with the lower heating unit 60 or the lower cooling unit 61 transported to the pressurizing area A1. With this configuration, the user can combine rapid heating and / or rapid cooling of the workpiece W with the pressurizing method.

[0207] Furthermore, according to the embodiment described above, the pressurizing system S includes an elevator device 52. The elevator device 52 is disposed in the pressurizing area A1 and raises and lowers the upper pressurizing units 1 to 4 transported to the pressurizing area A1. The rails R1 to R12 include rails R9 to R12. The rails R9 to R12 are disposed in the pressurizing area A1 and are (indirectly) attached to the elevator device 52 via the upper base 50. The upper pressurizing units 1 to 4 each include a base 10, 20, 30, 40, a mold 11, 21, 31, 41, and a lower surface 15p, 27p, 31p, 47p. The base 10, 20, 30, 40 supports the mold 11, 21, 31, 41. The mold 11, 21, 31, 41 presses the lower surface 15p, 27p, 31p, 47p toward the workpiece W. The lower surfaces 15p, 27p, 31p, and 47p face the workpiece W. When the upper pressure units 1 to 4 are positioned in the pressure area A1, the upper pressure units 1 to 4 are disposed above the workpiece W. The bases 10, 20, 30, and 40 are fixed to the lifting device 52 via the upper base 50 and the upper heating unit 51. The upper pressure units 1 to 4 are spaced upward from the rails R9 to R12. With this configuration, when the workpiece W is being pressed, even if the bases 10, 20, 30, and 40 are lowered, the rollers Ro do not press against the rails R9 to R12, and no mechanical load is applied to the rollers Ro and the rails R9 to R12.

[0208] ●Variations● Next, modifications of the pressurizing system will be described below, focusing on the differences from the embodiment described above (hereinafter referred to as the "first embodiment"). In the following description of the modifications, the same elements as in the first embodiment and elements having common functions are given the same reference numerals as in the first embodiment for the sake of convenience, and their description will be omitted. In the following description, reference will be made to Figures 1 to 9 as appropriate.

[0209] First modified example FIG. 31 is a schematic cross-sectional view of an upper pressurizing unit in a first modified example of the pressurizing system. The figure shows a cross section of the upper pressure unit 1A along the YZ plane, in which the upper pressure unit 1A is cut at the center in the X-axis direction.

[0210] The upper pressure applying unit 1A in the first modified example differs from the upper pressure applying unit 1 in that the upper pressure applying unit 1A includes a mold 16, a frame member 17, and a pressure pad 18 instead of the mold 11, the frame member 14, and the pressure pad 15. The upper pressure applying unit 1A includes a base 10, a side unit 12, a support unit 13, the mold 16, the frame member 17, and the pressure pad 18. The upper pressure applying unit 1 can be transported, for example, between the waiting area A2 and the pressure applying area A1.

[0211] The die 16 applies pressure to the workpiece W via the pressure pad 18 by applying pressure downward with the pressure pad 18. The die 16 includes a main body 16a and a plurality of individual dies 16b. The configuration of the die 16 is the same as the configuration of the die 21. Therefore, a detailed description of the die 16 will be omitted.

[0212] The frame member 17 holds the pressure pad 18. The frame member 17 is made of, for example, a metal having high rigidity (e.g., stainless steel). When viewed from the top-bottom direction, the shape of the frame member 17 is a rectangular lattice along the X- and Y-axis directions. When viewed from the bottom, the frame member 17 has a plurality of window portions 17a (nine in this embodiment). The window portions 17a are rectangular through-holes that penetrate the frame member 17 in the top-bottom direction. In the top-bottom direction, the frame member 17 is located lower than the mold 16. The frame member 17 is supported by the base 10 via the support unit 13 so as to be movable in the top-bottom direction relative to the mold 16.

[0213] When pressure is applied to the workpiece W, the pressure pad 18 deforms to follow the shape of the surface of the workpiece W, thereby applying uniform pressure to the workpiece W. The pressure pad 18 is held by a frame member 17 and is disposed below the mold 16. The pressure pad 18 includes an elastic body 18a and film members 18b and 18c.

[0214] When the workpiece W is pressurized, the elastic body 18a transmits the pressure from the mold 16 evenly to the workpiece W. The material of the elastic body 18a is the same as the material of the elastic body 15a. The membrane members 18b and 18c are held so as to be sandwiched between the frame member 17. The elastic body 18a is filled between the two membrane members 18b and 18c arranged above and below the elastic body 18a in each window portion 17a.

[0215] When viewed from below, the pressure pad 18 is partitioned by the frame member 17 into a plurality of (nine in this embodiment) rectangular regions 18d. The regions 18d are an example of individual pressure pads in the present invention. The lower surface 18p of each region 18d faces a corresponding workpiece W and functions as an individual press surface that presses the workpiece W. In other words, the lower surface 18p functions as an individual press surface in the present invention.

[0216] FIG. 32 is a schematic cross-sectional view of the pressurizing system SA, showing a state in which the workpiece W is pressed by the upper pressurizing unit 1A.

[0217] When the workpiece W is pressed, the die 16 presses the pressure pad 18 downward. At this time, each individual die 16b presses a corresponding portion of the pressure pad 18 (the portion located in the corresponding window portion 17a) downward. As a result, the pressure pad 18 deforms to follow the shape of the surface of the workpiece W, evenly pressing the workpiece W. Here, when viewed from the top and bottom, the size of the individual pressing surface (lower surface 18p) for the workpiece W is slightly larger than the size of the surface of the workpiece W. Therefore, the pressure pad 18 does not reach the mounting plate 9, and a portion of the workpiece W (the portion on the side of the mounting plate 9) is not pressed from the side. In other words, the direction of pressure applied to the workpiece W by the individual pressing surface (18p) is slightly different from the direction of pressure applied to the workpiece W by the pressing surface (lower surface 15p). In this way, in the upper pressure unit 1A, the workpiece W is evenly pressed from almost all directions (multi-directions).

[0218] In this way, in the pressurization process using the upper pressurization unit 1A, the workpiece W is pressurized uniformly from almost all directions (multi-directions) by the pressurization pad 18, which deforms to follow the shape of the surface of the workpiece W. Furthermore, in this pressurization process, each of the multiple workpieces W can be pressed (collectively) by its corresponding individual press surface (lower surface 18p). In other words, the pressurization method in this pressurization process is a combination of the pseudo-isotropic pressurization method and the individual pressurization method.

[0219] In the first modified example, the size of the individual pressing surface (lower surface 18p) for the workpiece W may be the same as the size of the surface of the workpiece W or slightly smaller than the size of the surface of the workpiece W.

[0220] Second modified example FIG. 33 is a schematic cross-sectional view of a pressurizing system showing a second modified example of the pressurizing system.

[0221] In the pressurizing system SB of the second modified example, the vertical orientation is reversed compared to the pressurizing system S. The pressurizing system SB comprises a housing, four lower pressurizing units 1B, 3B (two of which are not shown; the same applies below), a pressurizing device 5B, an upper heating unit 6B, a conveying mechanism (not shown; the same applies below), a control device 8, a film mount 9B, a pump P, and a plurality of mounting bolts Bo. The lower pressurizing units 1B, 3B are examples of the pressurizing units of the present invention.

[0222] Except for the fact that the vertical orientations of the lower pressure units 1B and 3B are reversed, the configuration of the lower pressure units 1B and 3B is the same as the configuration of the upper pressure units 1 and 3. Therefore, detailed description of the lower pressure units 1B and 3B will be omitted.

[0223] The pressure applying device 5B applies pressure to the workpiece W using the lower pressure applying units 1B and 3B that have moved to the pressure applying area A1. The pressure applying device 5B includes a lower base 50B, a lower heating unit 51B, and an elevating device 52B. The pressure applying device 5B is disposed in the pressure applying area A1. The configuration of the pressure applying device 5B is the same as that of the pressure applying device 5, except that the up-down direction is reversed. Therefore, a detailed description of the pressure applying device 5B will be omitted.

[0224] The upper heating unit 6B heats and cools the workpiece W. The upper heating unit 6B includes an upper heating unit 60B. The configuration of the upper heating unit 60B is the same as the configuration of the lower heating unit 60, except that the upper heating unit 60B is upside down and fixed. Therefore, a detailed description of the upper heating unit 60B will be omitted.

[0225] The transport mechanism movably supports the lower pressure units 1B and 3B. The transport mechanism includes, for example, a plurality of rails (not shown), a plurality of bases (not shown), and a plurality of rollers (not shown). The configuration of the transport mechanism is the same as that of the transport mechanism 7, except that the vertical direction is reversed. Therefore, a detailed description of the transport mechanism will be omitted.

[0226] The mounting film 9B is a film on which the workpiece W is placed. The mounting film 9B is disposed in a position between the lower heating unit 51B and the upper heating unit 60B and close to the upper heating unit 60B, with a predetermined tension being applied thereto.

[0227] When the workpiece W is pressed by the lower pressurizing unit 1B, the lower pressurizing unit 1B is transported from the waiting area A2 to the pressurizing area A1 and attached to the lower heating unit 51B. Next, the lifting device 52B raises the lower pressurizing unit 1B. At this time, the mounted film 9B is sandwiched between the upper heating unit 60B and the lower pressurizing unit 1B and is pressed together with the workpiece W.

[0228] Third variant FIG. 34 is a schematic cross-sectional view of a pressurizing system showing a third modified example of the pressurizing system.

[0229] In the third modified example, the pressurizing system SC includes, instead of the waiting areas A2 to A5, one waiting area A6 corresponding to the five upper pressurizing units 1 to 4, 1A, and an elevator (not shown; the same applies below) for raising and lowering the upper pressurizing units 1 to 4, 1A. The length of the waiting area A6 in the vertical direction is greater than the lengths of the waiting areas A2 to A5. The waiting area A6 is divided into individual waiting areas A61 to A65, each of which accommodates the upper pressurizing units 1 to 4, 1A. The individual waiting areas A61 to A65 are arranged in the vertical direction. The individual waiting areas A61 to A65 are an example of a waiting area according to the present invention. When viewed in the vertical direction, the waiting area A6 is disposed adjacent to the pressurizing area A1 in the +X direction of the pressurizing area A1. The upper pressurizing units 1 to 4, 1A can be raised and lowered within the waiting area A6 by the elevator. The upper pressurizing units 1 to 4 and 1A to be used are raised and lowered to an appropriate height, and are thereby transported to the pressurizing area A1.

[0230] ●Other embodiments● ●Waiting area In the present invention, the number of waiting areas A2 to A5 may be any number greater than one, and is not limited to 4. That is, for example, among the waiting areas A2 to A5, the pressurizing system S may include only waiting areas A2 and A4, only waiting areas A3 and A5, or only waiting areas A2 and A3.

[0231] In the present invention, the waiting areas A2 to A5 only need to be located to the sides of the pressurizing area A1 when viewed from the top and bottom, and do not necessarily have to be adjacent to the pressurizing area A1.

[0232] Furthermore, in the present invention, the waiting areas A2 to A5 may be arranged in the vertical direction like the individual waiting areas A61 to A65.

[0233] Upper pressure unit Furthermore, in the present invention, the arrangement of the upper pressurizing units 1 to 4 relative to the waiting areas A2 to A5 is not limited to the arrangement in the first embodiment. That is, for example, the upper pressurizing unit 1 may be arranged in the waiting areas A3 to A5, and the upper pressurizing unit 2 may be arranged in the waiting areas A2, A4, and A5.

[0234] Furthermore, in the present invention, the pressurizing system S may include a plurality of upper pressurizing units 1 to 4 of different pressurizing methods, and may not include any two of the upper pressurizing units 1 to 4. Also, for example, the pressurizing system S may include an upper pressurizing unit 1A instead of any one of the upper pressurizing units 1 to 4.

[0235] Furthermore, in the present invention, the upper pressurizing units 1 to 4 are examples for realizing each pressurizing method, and the configuration of each of the upper pressurizing units 1 to 4 for realizing each pressurizing method is not limited to the configuration in the first embodiment.

[0236] Furthermore, the upper pressurizing units 1 to 4 may not be equipped with the side units 12, 22, 32, and 42. In this case, the upper pressurizing units 1 to 4 do not form the chamber units CU1 to CU4. Furthermore, the lower heating unit 60 and the lower cooling unit 61 are not interchanged (rapid heating and rapid cooling of the workpiece W are not performed).

[0237] Furthermore, in the present invention, the shape of the molds 11, 21, 31, and 41 does not have to be rectangular. That is, for example, the shape of the molds 11, 21, 31, and 41 may be cylindrical when viewed from the top and bottom. In this case, the shape of each member disposed below the molds 11, 21, 31, and 41 is designed according to the shape of the molds 11, 21, 31, and 41.

[0238] Furthermore, in the present invention, the number of individual pressure members 27, 47 may be any number and is not limited to 9. In this case, the numbers and arrangements of the individual molds 21b, 31b, individual protective plates 24, accommodating holes 26a, 46a, individual pressure pads 25, and biasing units 28, 48 are appropriately set according to the number and arrangement of the individual pressure members 27, 47.

[0239] Furthermore, in the present invention, the shape of the main body portions 27a, 47a of the individual pressure members 27, 47 is not limited to a rectangular parallelepiped shape. That is, for example, the shape of the main body portions 27a, 47a may be a columnar shape when viewed in the vertical direction.

[0240] Furthermore, in the present invention, the individual pressure members 27, 47 may be formed of a plurality of separable members, in which case the members may include an elastic body or a heat insulator.

[0241] Furthermore, in the present invention, the pressure system S may include an upper pressure unit including an elastic body made of a material (such as silicone rubber) that conforms less to the surface of the workpiece W than the gel sheet.

[0242] Heat unit Furthermore, in the present invention, the pressurization system S does not necessarily have to include the upper heating unit 51 and / or the lower heating unit 6.

[0243] Furthermore, in the present invention, the pressurizing system S does not necessarily have to include the lower heating unit 60 or the lower cooling unit 61.

[0244] Furthermore, in the present invention, the lower heating unit 60 may be designed exclusively for heating.

[0245] Furthermore, in the present invention, the pressurizing system S may include, instead of the lower heating unit 6, one heating unit fixed to the pressurizing area A1.

[0246] Furthermore, in the present invention, the methods of heating and cooling the workpiece W performed in the first to fourth operations may be interchanged. That is, for example, in the first operation, the workpiece W may be slowly heated and slowly cooled. In this way, the pressurizing system S can appropriately select and combine a heating method in addition to a pressurizing method.

[0247] ●Transportation Furthermore, in the present invention, the transport mechanism 7 may be provided with a mechanism capable of transporting the upper pressure units 1 to 4 automatically.

[0248] Furthermore, in the present invention, the rails R9 to R12 may be designed to be retractable to positions where they do not interfere with the transport of the upper pressure units 1 to 4.

[0249] Furthermore, in the present invention, the transport mechanism 7 does not necessarily have to include rails R11 and R12 (rails R9 and R10). In this case, for example, the rails R9 and R10 (rails R11 and R12) may be designed to be rotatable by 90° clockwise or counterclockwise when viewed from above.

[0250] Furthermore, in the present invention, the pump P and the exhaust holes 12a, 22a, 32a, 42a after the upper pressurizing units 1 to 4 have been transported may be automatically connected by an easily detachable member (for example, a coupler).

[0251] Furthermore, in the present invention, the configuration of the transport mechanism 7 is not limited to that of the first embodiment. That is, for example, the transport mechanism 7 may have a configuration capable of transporting the upper pressure applying units 1 to 4 placed on a transport table.

[0252] Furthermore, in the present invention, when the upper pressure units 1 to 4 are attached to the upper heating unit 51, the rollers Ro do not have to be separated from the rails R9 to R12. In this case, the rails R9 to R12 may be removed.

[0253] Furthermore, in the present invention, the upper pressure units 1 to 4 may be transported while being placed on a transport table.

[0254] ●Embodiments of the present invention● Next, the embodiments of the present invention that can be understood from the above-described embodiments will be described below, using the terms and symbols described in the respective embodiments.

[0255] A first embodiment of the present invention is a pressurizing system (for example, pressurizing system S, SA, SB) that performs pressurizing treatment on at least one work (for example, work W), and includes a plurality of pressurizing units (for example, upper pressurizing units 1 to 4, 1A, lower pressurizing units 1B to 4B), one pressurizing area (for example, pressurizing area A1) in which the pressurizing treatment is performed, and a plurality of waiting areas (for example, waiting areas A2 to A6, individual waiting areas A61 to A65) arranged on the sides of the pressurizing area when viewed in the vertical direction, and a pressurizing unit that transports each of the pressurizing units between the waiting areas corresponding to each of the pressurizing units and the pressurizing areas. and a unit support member (e.g., rails R1 to R12) that supports the workpiece in a movable manner, and when the workpiece is pressurized, one of the multiple pressurizing units (e.g., upper pressurizing unit 1) is arranged above or below the workpiece in the pressurizing area and is movable relative to the workpiece, and the remaining pressurizing units (e.g., upper pressurizing units 2 to 4) are arranged in the corresponding waiting areas (e.g., waiting areas A3 to A6), and each of the pressurizing units is configured to be able to perform the pressurizing process on the workpiece using a different pressurizing method. According to this configuration, the user can select an appropriate pressurizing method according to the workpiece by selecting the upper pressurizing unit to be transported to the pressurizing area.

[0256] A second embodiment of the present invention is a pressure application system in which, in the first embodiment, the pressure application method includes either a pseudo-isotropic pressure application method in which pressure is applied to the workpiece from multiple directions, or a uniaxial pressure application method in which pressure is applied to the workpiece only from above and below. According to this configuration, the user can select either the quasi-isotropic pressure method or the uniaxial pressure method depending on the workpiece.

[0257] A third embodiment of the present invention is a pressurization system in which, in the first or second embodiment, the pressurization method includes either a batch pressurization method in which multiple workpieces are pressed simultaneously using a single press surface (e.g., lower surfaces 15p, 31p), or an individual pressurization method in which each of the multiple workpieces is pressed individually using multiple partitioned individual press surfaces (e.g., lower surfaces 17p, 27p, 47p). According to this configuration, the user can select either the collective pressurization method or the individual pressurization method depending on the workpiece.

[0258] A fourth embodiment of the present invention is a pressure system in which, in the second embodiment, the pressure unit (e.g., upper pressure unit 1, 1A, lower pressure unit 1B) that pressurizes the workpiece using the pseudo-isotropic pressure method includes a pressure pad (e.g., pressure pad 15, 18) having an elastic body (e.g., elastic body 15a, 18a) that deforms to follow the shape of the surface of the workpiece when the workpiece is pressed, a frame member (e.g., frame member 14, 17) that holds the pressure pad, and a mold (e.g., mold 11, 21) that presses the pressure pad toward the workpiece when the workpiece is pressed. According to this configuration, the user can easily select the quasi-isotropic pressure method by selecting the upper pressure unit.

[0259] A fifth embodiment of the present invention is a pressure system in which, in the second embodiment, the pressure units (e.g., upper pressure units 2 to 4, lower pressure unit 3B) that pressurize the workpiece using the uniaxial pressure method have press surfaces (27p, 31p, 47p) that are directed toward the workpiece when the workpiece is pressed, and the press surfaces are made of metal and are flat. According to this configuration, the user can easily select the uniaxial pressure method by selecting the upper pressure unit.

[0260] A sixth embodiment of the present invention is the third embodiment, wherein the pressurizing unit (for example, upper pressurizing unit 4) that pressurizes the workpiece by the individual pressurizing method is capable of individually pressurizing each of the workpieces, and includes a plurality of individual pressurizing members (for example, individual pressurizing members 47) having the individual press surfaces, a support mold (for example, support mold 46) that supports the individual pressurizing members, a mold (for example, mold 41) that can press the individual pressurizing members toward the workpiece, a pressurizing pad (for example, pressurizing pad 45) that is arranged between the individual pressurizing members and the mold, and a pressurizing pad that is arranged on the side of the mold in a vertical direction view and that presses the pressurizing pad. and a frame member (e.g., frame member 44) that holds a pad, wherein the frame member is movable in the vertical direction relative to the mold, the individual pressure members are movable in the vertical direction relative to the support mold, the pressure pads cover the entire surface of the mold when viewed from below and are deformable according to the amount of relative movement of each of the individual pressure members with respect to the support mold, the support mold is disposed below the pressure pad and the frame member and supported by the frame member, and when the work is pressed, the individual pressure members protrude from the support mold toward the corresponding work. According to this configuration, the user can easily select a system that combines the uniaxial pressure system and the individual pressure system by selecting the upper pressure system.

[0261] A seventh embodiment of the present invention is a pressure system in which, in the third embodiment, the pressure unit (e.g., upper pressure unit 2) that pressurizes the workpiece by the individual pressure method can pressurize each of the workpieces individually, and includes a plurality of individual pressure members (e.g., individual pressure members 27) having the individual press surfaces, a support mold (e.g., support mold 26) that supports the individual pressure members, a mold (e.g., mold 21) that can pressurize the individual pressure members toward the workpiece, a pressure pad (e.g., individual pressure pad 25) that is arranged between the individual pressure members and the mold, and a support member (e.g., support member 231) that is arranged on the side of the mold in a vertical direction and supports the support mold, wherein the support member is movable vertically relative to the mold, the individual pressure members are movable vertically relative to the support mold, and the pressure pad is deformable according to the relative movement amount of each of the individual pressure members with respect to the support mold, and when the workpiece is pressed, the individual pressure members protrude from the support mold toward the corresponding workpiece. According to this configuration, the user can easily select a system that combines the uniaxial pressure system and the individual pressure system by selecting the upper pressure system.

[0262] An eighth embodiment of the present invention is a pressure system in which, in the third embodiment, the pressure unit (e.g., upper pressure unit 1A) that pressurizes the workpiece using the individual pressure method comprises a pressure pad (e.g., pressure pad 18) having an elastic body that deforms in accordance with the shape of the surface of the workpiece when the workpiece is pressed, a frame member (e.g., frame member 17) that holds the pressure pad, and a mold (e.g., mold 16) that presses the pressure pad toward the workpiece when the workpiece is pressed, wherein the frame member divides the pressure pad into a plurality of individual pressure pads (e.g., region 18d), the mold comprises a plurality of individual molds (e.g., individual mold 16b) corresponding to each of the individual pressure pads, and the individual pressure pads comprise the individual press surfaces (e.g., lower surface 18p). According to this configuration, the user can easily select a system that combines the quasi-isotropic pressure system and the individual pressure system by selecting the upper pressure unit.

[0263] A ninth embodiment of the present invention is a pressure system in the first embodiment, which comprises a thermal unit (e.g., upper thermal unit 51, lower thermal unit 60, lower cooling unit 61, lower thermal unit 51B, upper thermal unit 60B, upper cooling unit 61B) capable of heating or cooling the workpiece, and the thermal unit comprises an upper thermal unit (e.g., upper thermal unit 51, upper thermal unit 60B, upper cooling unit 61B) arranged above the pressure unit moved to the pressure area, and a lower thermal unit (e.g., lower thermal unit 51B, lower thermal unit 60, lower cooling unit 61) arranged below the workpiece, and each of the upper thermal unit and the lower thermal unit comprises a thermal mold (e.g., main body 51a, 60a, 61a), a heat source (e.g., heat source H1, H2) contained in the thermal mold for heating the thermal mold, and a cooling source (e.g., cooling source C1 to C3) contained in the thermal mold for cooling the thermal mold. This configuration allows the user to combine different heating and cooling methods into a pressurizing method by combining the thermal units and their operations.

[0264] A tenth embodiment of the present invention is the ninth embodiment, and further comprises: a mounting plate (e.g., mounting plate 9) on which the work is mounted; a heat unit standby area (e.g., standby area A2, A4) arranged on the side of the pressurizing area in a vertical view; a heat unit transport device (e.g., lower heat unit transport device 62) that transports the lower heat unit (e.g., lower heating unit 60, lower cooling unit 61) back and forth between the heat unit standby area and the pressurizing area; and a lifting device (e.g., lifting device 52) that lifts and lowers the pressurizing unit transported to the pressurizing area, and the lower heat unit is provided with the heat source (e.g., heat source H2) and includes a lower heating unit (e.g., lower heating unit 60) that can heat the work; and a cooling source (e.g., , cooling source C3) and a lower cooling unit (e.g., lower cooling unit 61) capable of cooling the workpiece, wherein when the pressurizing unit is positioned in the pressurizing area, the pressurizing unit, together with the loading plate, forms a chamber unit (e.g., chamber units CU1 to CU4) in which the workpiece is accommodated, and the lifting device lifts the chamber unit when the lower heating unit and the lower cooling unit are transported, and lowers the chamber unit when the lower heating unit or the lower cooling unit is transported to the pressurizing area, so that the chamber unit abuts against the lower heating unit or the lower cooling unit transported to the pressurizing area. This configuration allows the user to combine rapid heating and / or rapid cooling of the workpiece with the pressurization method.

[0265] An eleventh embodiment of the present invention is a pressurizing system according to the first embodiment, comprising a lifting device (e.g., lifting device 52, 52B) that lifts and lowers the pressurizing unit transported to the pressurizing area, wherein the lifting device is arranged in the pressurizing area, and the unit support member comprises an individual unit support member (e.g., rails R9 to R12) that is arranged in the pressurizing area and attached to the lifting device, and each of the pressurizing units comprises a press surface (e.g., lower surface 15p, 17p, 27p, 31p, 47p) facing the work, a mold (mold 11, 21, 31, 41) that can pressurize the press surface toward the work, and a base (e.g., base 10, 20, 30, 40) that supports the mold, and when the pressurizing unit is located in the pressurizing area, the pressurizing unit is arranged above the work, the base is fixed to the lifting device, and the pressurizing unit is separated from the individual unit support member. With this configuration, when the workpiece is under pressure, no mechanical load is applied to the rollers and rails. [Explanation of symbols]

[0266] S Pressurized System 1 Upper pressure unit (pressure unit) 10 base 11 Mold 14 Frame members 15 Pressure Pad 15p bottom (pressed surface) 2 Upper pressure unit 20 base 21 Mold 21b Individual mold 231 Support member 25 Individual pressure pads (pressure pads) 26 Support mold 27 Individual pressure members 27p bottom surface (individual press surface) 3 Upper pressure unit 30 base 31 Mold 31p Bottom surface (press surface) 4 Upper pressure unit 40 base 41 Mold 44 Frame members 45 Pressure Pad 46 Support mold 47 Individual pressure members 47p bottom (individually pressed surface) 51 Upper Heat Unit (Heat Unit) 51a Main body (thermal mold) 52 Lifting device 60 Lower heating unit (heat unit) 60a Main body (heat mold) 61 Lower cooling unit (heat unit) 61a Main body (thermal mold) 62 Lower heat unit transport device A1 Pressurized area A2 Waiting area (heat unit waiting area) A3 Waiting Area A4 Waiting area (heat unit waiting area) A5 Waiting Area C1~C3 Cooling source H1,H3 heating source SA pressurized system 1A Upper pressure unit (pressure unit) 16 Mold 17 Frame members 18 Pressure Pad 18d area (individual pressure pad) 18p bottom (individually pressed) SB pressurized system 1B Lower pressure unit (pressure unit) 3B Lower pressure unit (pressure unit) 51B Lower Heat Unit (Heat Unit) 60B Upper heating unit (heat unit) A6 Waiting Area A61~A65 Individual waiting areas (waiting areas)

Claims

1. A pressure system that performs pressure treatment on at least one workpiece, A plurality of pressurizing units; one pressurizing area in which the pressurizing treatment is performed; a plurality of waiting areas disposed on the sides of the pressurizing area when viewed in the up-down direction; a unit support member that supports each of the pressurizing units so that the pressurizing units can be transported between the standby area corresponding to each of the pressurizing units and the pressurizing area; and When the workpiece is pressurized, among the plurality of pressurizing units, one of the pressurizing units is disposed above or below the workpiece in the pressurizing area and is movable relative to the workpiece; The remaining pressurizing units are arranged in the corresponding waiting areas, Each of the pressurizing units is configured to be able to perform the pressurizing treatment on the workpiece using a different pressurizing method. Pressurized system.

2. The pressurization method is Either a pseudo-isotropic pressure method in which pressure is applied to the workpiece from multiple directions, or a uniaxial pressure method in which pressure is applied to the workpiece only from the vertical direction, Including, The pressurization system of claim 1 .

3. The pressurization method is Either a batch pressurizing method in which a plurality of workpieces are pressed collectively using one press surface, or an individual pressurizing method in which a plurality of workpieces are individually pressed using a plurality of partitioned individual press surfaces, Including, A pressurization system according to claim 1 or 2.

4. The pressurizing unit that pressurizes the workpiece by the pseudo-isotropic pressure method includes: a pressure pad having an elastic body that deforms to follow the shape of the surface of the workpiece when pressure is applied to the workpiece; a frame member for holding the pressure pad; a die that presses the pressure pad toward the workpiece when the workpiece is pressed; Equipped with The pressurization system of claim 2 .

5. The pressurizing unit that pressurizes the workpiece by the uniaxial pressurizing method includes: a press surface that faces the workpiece when the workpiece is pressed; With The press surface is made of metal and is flat. The pressurization system of claim 2 .

6. The pressurizing unit that pressurizes the workpiece by the individual pressurizing method includes: A plurality of individual pressing members each having the individual press surfaces and capable of individually pressing the workpieces; a support mold for supporting the individual pressing members; a mold capable of pressing the individual pressing members toward the workpiece; a pressure pad disposed between the individual pressure members and the mold; a frame member that is disposed on a side of the mold when viewed in the up-down direction and that holds the pressure pad; With the frame member is movable relative to the mold in the up and down direction, the individual pressing members are movable relative to the support mold in a vertical direction, the pressure pad covers the entire surface of the mold when viewed from below, and is deformable in accordance with the relative movement of each of the individual pressure members with respect to the support mold; the support mold is disposed below the pressure pad and the frame member and is supported by the frame member, When the workpiece is pressed, the individual pressing members protrude from the support mold toward the corresponding workpiece. The pressurization system of claim 3 .

7. The pressurizing unit that pressurizes the workpiece by the individual pressurizing method includes: A plurality of individual pressing members each having the individual press surfaces and capable of individually pressing the workpieces; a support mold for supporting the individual pressing members; a mold capable of pressing the individual pressing members toward the workpiece; a pressure pad disposed between the individual pressure members and the mold; a support member that is arranged on the side of the mold when viewed in the up-down direction and supports the support mold; With the support member is movable relative to the mold in the up and down direction, the individual pressing members are movable relative to the support mold in a vertical direction, the pressure pad is deformable in accordance with the amount of relative movement of each of the individual pressure members with respect to the support mold; When the workpiece is pressed, the individual pressing members protrude from the support mold toward the corresponding workpiece. The pressurization system of claim 3 .

8. The pressurizing unit that pressurizes the workpiece by the individual pressurizing method includes: a pressure pad having an elastic body that deforms to follow the shape of the surface of the workpiece when pressure is applied to the workpiece; a frame member for holding the pressure pad; a die that presses the pressure pad toward the workpiece when the workpiece is pressed; With The frame member divides the pressure pad into a plurality of individual pressure pads, The mold is a plurality of individual molds corresponding to the individual pressure pads, With The individual pressure pads are the individual press surfaces; Equipped with The pressurization system of claim 3 .

9. a thermal unit capable of heating or cooling the workpiece; and The thermal unit comprises: an upper heating unit disposed above the pressurizing unit that has moved to the pressurizing area; a lower heating unit disposed below the workpiece; With Each of the upper heating unit and the lower heating unit is With a hot mold, a heat source contained in the thermal mold for heating the thermal mold; a cooling source contained in the thermal mold for cooling the thermal mold; Equipped with The pressurization system of claim 1 .

10. a mounting plate on which the workpiece is placed; a heating unit standby area disposed to the side of the pressurizing area when viewed from above; a heating unit transport device that transports the underheating unit back and forth between the heating unit standby area and the pressurizing area; a lifting device that lifts and lowers the pressurizing unit transported to the pressurizing area; and The underheating unit is a lower heating unit including the heat source and capable of heating the workpiece; a lower cooling unit including the cooling source and capable of cooling the workpiece; With When the pressurizing unit is located in the pressurizing area, the pressurizing unit forms a chamber unit together with the loading plate in which the workpiece is accommodated, The lifting device is When the lower heating unit and the lower cooling unit are transported, the chamber unit is raised, When the lower heating unit or the lower cooling unit is transported to the pressurizing area, the chamber unit is lowered to bring the chamber unit into contact with the lower heating unit or the lower cooling unit transported to the pressurizing area. The pressurization system of claim 9.

11. a lifting device that lifts and lowers the pressurizing unit transported to the pressurizing area; and The lifting device is disposed in the pressure area, The unit support member is an individual unit support member disposed in the pressure area and attached to the lifting device; With Each of the pressurizing units comprises: a press surface facing the workpiece; a die capable of pressing the press surface toward the workpiece; a base for supporting the mold; With When the pressurizing unit is located in the pressurizing area, The pressurizing unit is disposed above the workpiece, The base is fixed to the lifting device, The pressure unit is spaced apart from the individual unit support member. The pressurization system of claim 1 .

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