Machining apparatus and machining tool detection method

Abstract

To detect a state of a grinding wheel formed with a slit.SOLUTION: The processing apparatus 1 includes the cutting unit 20 that cuts the workpiece 200 with the rotating cutting blade 21, the grindstone detection unit 40 having the entry section into which the cutting edge 211 of the cutting blade 21 enters and the light emitting section and the light receiving section with the entry section interposed therebetween, the moving unit 50 that moves the grindstone detection unit 40 and the cutting unit 20 relative to each other, and the control unit 100. the cutting edge 211 is a slitted grindstone having a plurality of slits or a slitless grindstone having no slit. The control unit 100 includes a determining section 104 for determining whether or not the cutting blade 21 is a slitted abrasive member by detecting the cutting edge 211 of the rotating cutting blade 21 by the abrasive sensing unit 40.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a processing device that processes a workpiece with a processing tool including a grindstone, and a method for detecting the processing tool. [Background technology]

[0002] BACKGROUND ART Cutting blade detection mechanisms are known for detecting a reference position in the cutting direction of a cutting blade (machining tool), the timing of cutting blade replacement, and chipping of the cutting blade (see, for example, Patent Document 1).

[0003] Incidentally, one type of cutting blade is a cutting blade (slit blade) that is formed in an annular shape and has a slit in the cutting edge (grindstone) on the periphery of the cutting blade (see, for example, Patent Document 2). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2001-298001 [Patent Document 2] Japanese Patent Publication No. 2020-199556 Summary of the Invention [Problem to be solved by the invention]

[0005] The slit blade described in Patent Document 2 has a slit that opens on the outer periphery of the cutting blade, which is a grinding wheel, and penetrates a first surface of the cutting blade and a second surface behind the first surface, making it difficult to distinguish between defects such as chipped cutting blades or through holes. In particular, conventional cutting blade detection units are adjusted appropriately for non-slit grinding wheels, which do not have slits, making it difficult to detect the condition of slit blade grinding wheels.

[0006] Therefore, when detecting the grindstone of a processing tool in a processing device, there is a problem that the state of the grindstone of the processing tool should be detected in a manner that corresponds to both a grindstone with a slit and a grindstone without a slit.

[0007] The present invention has been made in consideration of such problems, and its purpose is to provide a processing device and a method for detecting a processing tool that can detect the state of a grinding wheel in which a slit has been formed. [Means for solving the problem]

[0008] In order to solve the above-mentioned problems and achieve the object, the processing device of the present invention is a processing device that processes a workpiece with a processing tool including a grindstone, and includes a holding table that holds the workpiece, a processing unit having a spindle to which the processing tool is attached and that processes the workpiece held on the holding table with the processing tool rotated by the spindle, a grindstone detection unit having an entrance portion into which the grindstone of the processing tool enters and a light emitting portion and a light receiving portion sandwiching the entrance portion, and a grindstone detection unit that moves the grindstone detection unit and the processing unit relatively to detect the entrance of the processing tool. The grinding tool is provided with a moving unit that moves the grinding tool into an entrance portion, and a control unit that controls at least the processing unit, the grinding wheel detection unit, and the moving unit, wherein the grinding wheel is a slitted grinding wheel having a plurality of slits that open at least on the outer peripheral edge of the grinding wheel and penetrate a first surface of the grinding wheel and a second surface behind the first surface, or a non-slitted grinding wheel that does not have such slits, and the control unit has a judgment section that detects the grinding wheel of the rotating processing tool using the grinding wheel detection unit and judges whether the processing tool is the slitted grinding wheel or not.

[0009] In the processing device, the control unit may have a tip detection unit that, when the judgment unit of the control unit determines that the processing tool is the slit grinding wheel, detects the tip position of the grinding wheel over one revolution of the processing tool or one revolution of the grinding wheel excluding the position where the slit in the slit grinding wheel is formed.

[0010] In the processing device, the control unit may have an eccentricity calculation unit that calculates the eccentricity of the processing tool from the tip position of the grinding wheel over one revolution of the processing tool or one revolution of the grinding wheel detected by the tip detection unit.

[0011] In the processing device, the processing tool may be a cutting blade having a cutting edge, which is the grindstone, on its outer periphery.

[0012] The method for detecting a machining tool of the present invention is a method for detecting a machining tool in a machining device that processes a workpiece with a machining tool including a grinding wheel, and is characterized by comprising: an attachment step of attaching the machining tool to a spindle of a machining unit that processes the workpiece; a movement step of relatively moving the grinding wheel detection unit and the machining unit so that the grinding wheel of the machining tool enters an entry portion of the grinding wheel detection unit, the entry portion having an light-emitting unit and a light-receiving unit sandwiched between the entry portion; a detection step of detecting the grinding wheel of the machining tool rotated by the machining unit with the grinding wheel detection unit; and a determination step of determining, after the detection step, whether the machining tool is a slotted grinding wheel having a slit that opens at least on the outer peripheral edge of the grinding wheel and penetrates a first surface of the grinding wheel and a second surface behind the first surface.

[0013] The method for detecting a machining tool may further include, after the determination step, a tip detection step of detecting the tip position of the grinding wheel for one revolution of the machining tool or one revolution of the grinding wheel, excluding the position where the slit in the slotted grinding wheel is formed, when the determination step determines that the machining tool is the slotted grinding wheel. [Effects of the Invention]

[0014] The present invention has an effect of being able to detect the state of a grinding wheel in which a slit is formed. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a processing device according to the first embodiment. [Figure 2]2 is a perspective view showing a main part of a cutting unit and a main part of a grindstone detection unit of the processing apparatus shown in FIG. [Figure 3] FIG. 3 is a side view of a cutting blade attached to the spindle of the processing device shown in FIG. [Figure 4] FIG. 4 is a side view of a modification of the cutting blade shown in FIG. [Figure 5] FIG. 5 is a diagram schematically illustrating the configuration of a grindstone detection unit of the cutting machine shown in FIG. [Figure 6] FIG. 6 is a side view schematically showing the cutting blade and pulsed light emitted by the light emitting section of the grindstone detection unit of the cutting machine shown in FIG. [Figure 7] FIG. 7 is a flowchart showing the flow of the processing tool detection method according to the first embodiment. [Figure 8] FIG. 8 is a diagram showing an example of voltage data acquired in the detection step of the machining tool detection method shown in FIG. [Figure 9] FIG. 9 is a diagram showing an example of filtered no-voltage data acquired in the detection step of the machining tool detection method shown in FIG. [Figure 10] FIG. 10 is a diagram showing an example of integrated voltage data generated by integrating the filter no-voltage data shown in FIG. [Figure 11] FIG. 11 is a diagram showing an example of the position of the lower end of the outer peripheral edge of the cutting blade detected in the detection step of the machining tool detection method shown in FIG. [Figure 12] FIG. 12 is a perspective view showing an example of the configuration of a processing device according to the second embodiment. [Figure 13] FIG. 13 is a side view of a grinding wheel mounted on the spindle of the processing device shown in FIG. [Figure 14] FIG. 14 is a plan view of the grinding wheel shown in FIG. 13 as seen from below. [Figure 15] FIG. 15 is a side view of a variation of the grinding wheel shown in FIG. [Figure 16] FIG. 16 is a plan view of the grinding wheel shown in FIG. 15 as seen from below. [Figure 17] 17 is a side view showing a main part of the grinding unit and a main part of the grindstone detection unit of the processing apparatus shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0016] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0017] [Embodiment 1] A processing device according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing an example of the configuration of the processing device according to the first embodiment. Fig. 2 is a perspective view showing a main part of a cutting unit and a main part of a grindstone detection unit of the processing device shown in Fig. 1. Fig. 3 is a side view of a cutting blade attached to a spindle of the processing device shown in Fig. 1. Fig. 4 is a side view of a modified example of the cutting blade shown in Fig. 3.

[0018] (Workpiece) The processing apparatus 1 shown in Fig. 1 according to the first embodiment is a cutting apparatus that cuts (corresponds to processing) a workpiece 200 with a cutting blade 21 (corresponding to a processing tool) having a cutting edge 211 (corresponding to a grindstone). In the first embodiment, the workpiece 200 to be processed by the processing apparatus 1 shown in Fig. 1 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, which has a base material such as silicon, gallium arsenide, SiC (silicon carbide), or sapphire. The workpiece 200 has devices 203 formed in areas partitioned in a grid pattern by a plurality of planned division lines 202 formed in a grid pattern on a surface 201.

[0019] Furthermore, the workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thin central portion and a thick peripheral portion, or may be a resin package substrate such as a rectangular QFN (Quad Flat No leaded) package substrate having a plurality of devices sealed with resin, a ceramic substrate, a ferrite substrate, a substrate containing at least one of nickel and iron, or a glass substrate, etc. In the first embodiment, the back surface 204 of the workpiece 200 is attached to an adhesive tape 206 having an annular frame 205 attached to its outer periphery, and the workpiece 200 is supported by the annular frame 205.

[0020] (Processing equipment) 1 is a cutting device that holds a workpiece 200 on a holding table 10 and cuts the workpiece 200 with a cutting blade 21 along a planned division line 202. As shown in FIG. 1, the processing device 1 includes the holding table 10 that holds the workpiece 200 by suction on a holding surface 11, a cutting unit 20 that cuts the workpiece 200 held on the holding table 10 with the cutting blade 21, an imaging unit 30 that takes an image of the workpiece 200 held on the holding table 10, a grinding wheel detection unit 40, and a control unit 100.

[0021] 1, the processing apparatus 1 also includes a moving unit 50 that moves the holding table 10 and the cutting unit 20 relative to one another. The moving unit 50 includes at least an X-axis moving unit 51, which is a processing feed unit that processes and feeds the holding table 10 in the X-axis direction parallel to the horizontal direction, a Y-axis moving unit 52, which is an indexing feed unit that indexes and feeds the cutting unit 20 in the Y-axis direction that is parallel to the horizontal direction and perpendicular to the X-axis direction, a Z-axis moving unit 53, which is a cutting feed unit that cuts and feeds the cutting unit 20 in the Z-axis direction that is parallel to the vertical direction and perpendicular to both the X-axis and Y-axis directions, and a rotational moving unit 54 that rotates the holding table 10 around an axis parallel to the Z-axis direction.

[0022] The X-axis moving unit 51 is installed in the device main body 2. The X-axis moving unit 51 moves the moving plate 12 that supports the holding table 10 and the rotational moving unit 54 in the X-axis direction, which is the processing feed direction, thereby processing-feeding the holding table 10 and the cutting unit 20 relatively along the X-axis direction.

[0023] The Y-axis moving unit 52 is installed on a gate-shaped support frame 3 that stands upright from the device main body 2. The Y-axis moving unit 52 moves the moving frame 4 in the Y-axis direction, which is the indexing feed direction, thereby moving the cutting unit 20 along the Y-axis direction and indexing and feeding the holding table 10 and the cutting unit 20 relatively along the Y-axis direction.

[0024] The Z-axis moving unit 53 is installed on the moving frame 4. The Z-axis moving unit 53 moves the second moving frame 5 in the Z-axis direction, which is the cutting feed direction, to move the cutting unit 20 along the Z-axis direction, and perform cutting feed between the holding table 10 and the cutting unit 20 relatively along the Z-axis direction. The rotational moving unit 54 is disposed on the moving plate 12.

[0025] The X-axis movement unit 51, the Y-axis movement unit 52, and the Z-axis movement unit 53 each include a well-known ball screw rotatably mounted about its axis, a well-known motor for rotating the ball screw about its axis, and a well-known guide rail for supporting the holding table 10 or the cutting unit 20 movably in the X-axis, Y-axis, or Z-axis direction. The rotational movement unit 54 also includes a well-known motor for rotating the holding table 10 about the Z-axis. The movement unit 50 includes the X-axis movement unit 51, the Y-axis movement unit 52, and the Z-axis movement unit 53, and thereby moves the grinding wheel detection unit 40 and the cutting unit 20 relatively to each other, causing the cutting edge 211 of the cutting blade 21 to enter the entry portion 44 between the light-emitting unit 45 and the light-receiving unit 46 of the grinding wheel detection unit 40.

[0026] The holding table 10 is disk-shaped, and a holding surface 11 for holding the workpiece 200 is formed from porous ceramic or the like. The holding table 10 is provided so as to be movable in the X-axis direction by an X-axis moving unit 51 between a processing area below the cutting unit 20 and a carry-in / out area spaced from below the cutting unit 20 where the workpiece 200 is carried in and out.

[0027] The holding table 10 is provided so as to be rotatable about an axis parallel to the Z-axis direction by a rotary movement unit 54. The holding table 10 is connected to a vacuum suction source (not shown), and is sucked by the vacuum suction source to suck and hold the workpiece 200 placed on the holding surface 11. In the first embodiment, the holding table 10 sucks and holds the back surface 204 of the workpiece 200 via an adhesive tape 206. In addition, as shown in FIG. 1, a plurality of clamps 13 for clamping an annular frame 205 are provided around the periphery of the holding table 10.

[0028] The cutting unit 20 has a spindle 23 to which a cutting blade 21 is attached, and is a processing unit that cuts a workpiece 200 held on the holding table 10 with the cutting blade 21 rotated by the spindle 23. As shown in FIG. 1, the processing device 1 is equipped with two cutting units 20, i.e., a two-spindle dicer, a so-called facing dual type cutting device.

[0029] Each cutting unit 20 is provided so as to be movable in the Y-axis direction by a Y-axis movement unit 52 relative to the workpiece 200 held on the holding table 10, and so as to be movable in the Z-axis direction by a Z-axis movement unit 53. As shown in FIG. 1 , each cutting unit 20 is provided on a support frame 3 erected from the apparatus main body 2 via the Y-axis movement unit 52 and the Z-axis movement unit 53. The cutting unit 20 is capable of positioning the cutting blade 21 at any position on the holding surface 11 of the holding table 10 by the Y-axis movement unit 52 and the Z-axis movement unit 53.

[0030] As shown in Figure 2, the cutting unit 20 comprises a cutting blade 21 (shown in Figure 3), a spindle housing 22 that is movable in the Y-axis and Z-axis directions by a Y-axis moving unit 52 and a Z-axis moving unit 53, a spindle 23 that is rotatable about its axis on the spindle housing 22 and is rotated by a motor (not shown), and has the cutting blade 21 attached to its tip, and a blade cover 24 that is fixed to the tip surface of the spindle housing 22.

[0031] The cutting blade 21 is an extremely thin cutting grindstone having a substantially ring shape. In the first embodiment, the cutting blade 21 is a so-called washer blade consisting only of an annular cutting edge 211, as shown in Fig. 3. The cutting edge 211 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and is formed to a predetermined thickness. The cutting edge 211 cuts the workpiece 200.

[0032] 3 is a slit grindstone having a plurality of slits 215 that open at least on the outer peripheral edge 212 of the cutting blade 211 and penetrate from an annular first surface 213 of the cutting blade 211 to an annular second surface 214 (shown in FIG. 5) behind the first surface 213. The plurality of slits 215 do not open on the inner peripheral edge of the cutting blade 211, but open on the outer peripheral edge 212 and extend linearly parallel to the radial direction of the cutting blade 211. The plurality of slits 215 are arranged at equal intervals in the circumferential direction of the cutting blade 211. In the example shown in FIG. 3, the cutting blade 211 has 12 slits 215.

[0033] In the first embodiment, as shown in Fig. 4, the cutting edge 211 of the cutting blade 21 (hereinafter, designated by the reference numeral 21-1) may be a slitless grindstone that does not have the plurality of slits 215. Note that the cutting blade 21-1 shown in Fig. 4 has the same parts as those of the cutting blade 21 shown in Fig. 3, and the same reference numerals are used to designate the same parts, and the description thereof will be omitted.

[0034] In short, in the first embodiment, the processing device 1 has one of the cutting blade 21 shown in FIG. 3 having a slit grindstone or the cutting blade 21-1 shown in FIG. 4 having a non-slit grindstone attached to the spindle 23 of the cutting unit 20. In addition, in the present invention, the cutting blades 21, 21-1 may be so-called hub blades having a cutting edge 211 and a link-shaped annular base to which the cutting edge 211 is fixed at its outer edge. Thus, in the first embodiment, the processing tool is the cutting blade 21, 21-1 having the cutting edge 211, which is a grindstone, on its outer periphery.

[0035] The spindle housing 22 is fixed to the lower end of the second moving frame 5. The spindle 23 is rotated around its axis by a motor, thereby rotating the cutting blade 21. The blade cover 24 covers at least the upper part of the cutting blade 21.

[0036] The blade cover 24 is fixed to the tip surface of the spindle housing 22. The blade cover 24 also includes a shower nozzle 25 and a pair of blade nozzles 26. The shower nozzle 25 faces the cutting edge of the cutting blade 211 of the cutting blade 21 in the X-axis direction and supplies cutting water to the cutting edge of the cutting blade 211 of the cutting blade 21 during cutting. The blade nozzles 36 extend parallel to the X-axis direction and are spaced apart from each other in the Y-axis direction. The blade nozzles 26 position the lower ends of the cutting edges 211 of the cutting blade 21 between them and supply cutting water to the lower ends of the cutting edges 211 of the cutting blade 21 during cutting.

[0037] The axes of the cutting blade 21 and spindle 23 of the cutting unit 20 are set parallel to the Y-axis direction.

[0038] The imaging unit 30 is fixed to one of the cutting units 20 so as to move integrally with the other cutting unit 20. The imaging unit 30 is equipped with an imaging element that captures an image of an area to be divided of the workpiece 200 held on the holding table 10 before cutting. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 30 captures an image of the workpiece 200 held on the holding table 10 to obtain an image for performing alignment between the workpiece 200 and the cutting blade 21, and outputs the obtained image to the control unit 100.

[0039] The processing apparatus 1 also includes an X-axis position detection unit (not shown) for detecting the position of the holding table 10 in the X-axis direction, a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction, and a Z-axis position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis position detection unit and the Y-axis position detection unit may be configured with a linear scale parallel to the X-axis direction or the Y-axis direction, and a reading head. The Z-axis position detection unit detects the position of the cutting unit 20 in the Z-axis direction using motor pulses. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the position of the holding table 10 in the X-axis direction and the position of the lower end of the cutting blade 211 of the cutting unit 20 in the Y-axis direction or the Z-axis direction to the control unit 100.

[0040] In the first embodiment, the positions of the holding table 10 and the cutting unit 20 of the processing device 1 in the X-axis direction, Y-axis direction, and Z-axis direction are determined based on a predetermined reference position (not shown). In the first embodiment, the reference position of the cutting unit 20 in the Z-axis direction is a position where the holding surface 11 of the holding table 10 and the lower end of the cutting edge 211 of the cutting blade 21 are located on the same plane.

[0041] (Grinding stone detection unit) Next, the grindstone detection unit 40 will be described. Fig. 5 is a diagram schematically showing the configuration of the grindstone detection unit of the cutting machine shown in Fig. 1. Fig. 6 is a side view schematically showing the cutting blade and pulsed light emitted by the light-emitting section of the grindstone detection unit of the cutting machine shown in Fig. 1.

[0042] The grindstone detection unit 40 is a unit that detects the state of the cutting edge of the cutting blade 211 of the cutting blade 21, 21-1 that cuts the workpiece 200. The grindstone detection unit 40 detects, as the state of the cutting edge, the presence or absence of abnormalities such as chipping in which part of the outer peripheral edge 212 of the cutting blade 211 is missing, the position in the Z-axis direction of the lower end of the outer peripheral edge 212 corresponding to the distance from the axis of the outer peripheral edge 212 of the cutting blade 211, and the amount of eccentricity of the outer peripheral edge of the cutting blade 211.

[0043] In embodiment 1, the grinding wheel detection unit 40 is provided around the holding table 10 and attached to the inner surface of a water case 60 having a drain outlet (not shown) that receives and discharges cutting water containing cutting chips generated when the cutting unit 20 cuts the workpiece 200.

[0044] 2 and 5, the grindstone detection unit 40 includes a pair of legs 42 erected in the Z-axis direction and a connecting portion 43. The pair of legs 42 are spaced apart from each other in the Y-axis direction. The distance between the pair of legs 42 is wider than the thickness of the cutting edges 211 of the cutting blades 21, 21-1. For this reason, the pair of legs 42 are provided with an entry portion 44 between them, into which the cutting edges 211 of the cutting blades 21, 21-1 enter.

[0045] The pair of legs 42 are arranged so that when the cutting edge 211 of the cutting blade 21, 21-1 is inserted between them, the cutting edge 211 of the cutting blade 21, 21-1 is sandwiched between them. The connecting portion 43 connects the lower ends of the pair of legs 42 to each other and extends horizontally parallel to the Y-axis direction.

[0046] The grindstone detection unit 40 also has a light-emitting unit 45 and a light-receiving unit 46 that sandwich the entrance portion 44 in the Y-axis direction. That is, the grindstone detection unit 40 has the entrance portion 44, and the light-emitting unit 45 and the light-receiving unit 46 that sandwich the entrance portion 44.

[0047] The light emitting unit 45 is provided on one of the pair of legs 42. The light emitting unit 45 includes an optical fiber 48 that is connected to a light source 47, propagates pulsed light (shown in FIG. 6 , hereinafter referred to as pulsed light 41) from the light source 47, and emits the light toward the other leg 42, i.e., the light receiving unit 46. In the first embodiment, the outer diameter of the optical fiber 48 of the light emitting unit 45 is, for example, 0.3 mm or more and 5 mm or less, and the spot diameter of the pulsed light 41 is, for example, 0.3 mm or more and 5 mm or less. The light emitting unit 45 emits the pulsed light 41 at a predetermined frequency.

[0048] The light receiving section 46 is provided on the other leg section 42 and includes an optical fiber 49 that receives the pulsed light 41 emitted from the light emitting section 45 and outputs the received pulsed light 41 to the control unit 100 .

[0049] (control unit) The control unit 100 controls each component of the processing device 1 to cause the processing device 1 to perform processing operations on the workpiece 200. That is, in the first embodiment, the control unit 100 controls at least the cutting unit 20, the grindstone detection unit 40, and the moving unit 50.

[0050] The control unit 100 is a computer having an arithmetic processing device with a microprocessor such as a CPU (central processing unit), a storage device with memory such as a ROM (read only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing in accordance with a computer program stored in the storage device, and outputs control signals for controlling the processing device 1 and the grinding wheel detection unit 40 to each component of the processing device 1 and the grinding wheel detection unit 40 via the input / output interface device.

[0051] The control unit 100 is connected to a display unit 110 configured with a liquid crystal display device or the like that displays the status and images of the machining operation, an input unit (not shown) that the operator uses to register machining content information, and a notification unit 120 that notifies the operator. The input unit is configured with at least one of a touch panel provided on the display unit 110 and an external input device such as a keyboard. The notification unit 120 notifies the operator by emitting at least one of sound and light.

[0052] 1, the control unit 100 includes a control unit 101, a photoelectric conversion unit 102, a voltage recording unit 103, a determination unit 104, a tip detection unit 105, and an eccentricity calculation unit 106. The control unit 101 controls each of the components of the processing device 1 to cause the processing device 1 to perform a processing operation on the workpiece 200.

[0053] The photoelectric conversion unit 102 converts the amount of pulsed light 41 received by the light receiving unit 46 into a voltage. The photoelectric conversion unit 102 converts the amount of pulsed light 41 input from the light receiving unit 46 into a voltage having a voltage value corresponding to the amount of pulsed light 41. In the first embodiment, the amount of pulsed light 41 received by the light receiving unit 46 is proportional to the voltage value of the voltage converted by the photoelectric conversion unit 102.

[0054] Note that as the amount of pulsed light 41 blocked by the cutting blades 211 of the cutting blades 21, 21-1 increases, the voltage value of the voltage converted by the photoelectric conversion unit 102 decreases. Note that as the amount of pulsed light 41 blocked by the cutting blades 211 of the cutting blades 21, 21-1 decreases, the voltage value of the voltage converted by the photoelectric conversion unit 102 increases. That is, as shown in FIG. 6 , when the cutting blade 211 of the cutting blade 21 enters the entry portion 44 and the slit 215 is located between the light-emitting unit 45 and the light-receiving unit 46, the voltage value of the voltage converted by the photoelectric conversion unit 102 is higher than the voltage value of the voltage converted by the photoelectric conversion unit 102 when the slit 215 is not located between the light-emitting unit 45 and the light-receiving unit 46. That is, as shown in Figure 6, when the cutting edge 211 of the cutting blade 21, which is rotating around its axis, enters the entry portion 44, the voltage value of the voltage converted by the photoelectric conversion unit 102 increases and decreases periodically according to the rotation of the cutting blade 21.

[0055] The voltage recording unit 103 stores the voltage value of the voltage converted by the photoelectric conversion unit 102 for each pulsed light 41. In the first embodiment, the voltage recording unit 103 records the voltage value of the voltage converted by the photoelectric conversion unit 102 in one-to-one correspondence with the time when the pulsed light 41 is input to the photoelectric conversion unit 102. In the first embodiment, the voltage recording unit 103 records either the voltage value of the voltage converted by the photoelectric conversion unit 102 after passing through a filter that smooths the voltage value, or the voltage value of the voltage that does not pass through the filter. That is, in the first embodiment, the voltage recording unit 103 is switchable between a state in which the voltage value of the voltage converted by the photoelectric conversion unit 102 is recorded after passing through the filter, and a state in which the voltage value of the voltage converted by the photoelectric conversion unit 102 is recorded without passing through the filter.

[0056] The determination unit 104 determines whether the cutting edge 211 of the cutting blade 21, 21-1 inserted into the entry portion 44 is a slit grindstone or a non-slit grindstone based on a change in the voltage value recorded by the voltage recording unit 103. That is, the determination unit 104 detects the cutting edge 211 of the rotating cutting blade 21, 21-1 using the grindstone detection unit 40, thereby determining whether the cutting blade 21, 21-1 is a slit grindstone or not.

[0057] The tip detecting unit 105 detects the position in the Z-axis direction of the lower end of the outer peripheral edge 212 of the cutting edge 211 of the cutting blade 21, 21-1 inserted into the entry portion 44 from a change in the voltage value of the voltage recorded by the voltage recording unit 103. That is, the tip detecting unit 105 detects the position in the Z-axis direction of the lower end of the outer peripheral edge 212, which is the tip position of the cutting edge 211 for one revolution of the cutting blade 21, 21-1, i.e., one revolution of the cutting edge 211, excluding the position where the slit 215 is formed.

[0058] The eccentricity calculation unit 106 calculates the amount of eccentricity of the outer peripheral edge 212 of the cutting blade 211 of the cutting blade 21, 21-1 inserted into the entrance portion 44 from changes in the voltage value of the voltage recorded by the voltage recording unit 103. That is, it calculates the amount of eccentricity of the outer peripheral edge 212 of the cutting blade 211 of the cutting blade 21, 21-1 from the position in the Z-axis direction of the lower end of the outer peripheral edge 212 of the cutting blade 211 for one revolution of the cutting blade 21, 21-1, i.e., one revolution of the cutting blade 211, detected by the tip detection unit 105. The eccentricity calculation unit 106 also determines whether or not there is an abnormality, such as chipping, in the cutting blade 211 of the cutting blade 21, 21-1 inserted into the entrance portion 44 from changes in the voltage value of the voltage recorded by the voltage recording unit 103.

[0059] The functions of the control unit 101, photoelectric conversion unit 102, determination unit 104, tip detection unit 105, and eccentricity calculation unit 106 described above are realized by the arithmetic processing unit of the control unit 100 executing a computer program stored in a storage device. The function of the voltage recording unit 103 is realized by the storage device of the control unit 100.

[0060] The grindstone detection unit 40 is also used to determine the reference position of the cutting unit 20 in the Z-axis direction. The control unit 100 preliminarily stores, as a reference voltage, the voltage value converted by the photoelectric conversion unit 102 when the cutting unit 20 is located at the reference position in the Z-axis direction. The grindstone detection unit 40 gradually lowers the cutting blade 21 and gradually inserts it deeper into the entry portion 44, until the light receiving unit 46 receives pulsed light 41 from the light emitting unit 45. When the voltage value converted by the photoelectric conversion unit 102 reaches the reference voltage, the grindstone detection unit detects and stores the detection result from the Z-axis position detection unit as the reference position of the cutting unit 20 in the Z-axis direction. The control unit 101 of the control unit 100 performs cutting using the reference position of the cutting unit 20 in the Z-axis direction detected by the grindstone detection unit 40.

[0061] The timing at which the processing device 1 detects the reference position of the cutting unit 20 in the Z-axis direction using the grinding wheel detection unit 40 is, for example, each time one workpiece 200 is cut or each time a predetermined number of workpieces 200 are cut, and this is stored in the memory device of the control unit 100 as part of the processing content information.

[0062] The processing device 1 having the above-described configuration starts processing operations when an operator or the like registers processing conditions in the control unit 100, the workpiece 200 is placed on the holding surface 11 of the holding table 10 in the loading / unloading area via adhesive tape 206, and the control unit 100 receives an instruction from the operator or the like to start the processing operation.

[0063] When the processing operation starts, the processing device 1 suction-holds the workpiece 200 on the holding surface 11 via the adhesive tape 206, clamps the annular frame 205 with the clamp section 13, rotates the spindle 33 about its axis, and supplies cutting water from the nozzles 25, 26. The processing device 1 moves the holding table 10 from the loading / unloading area toward the processing area to below the imaging unit 30 with the moving unit 50, and the imaging unit 30 captures an image of the workpiece 200 suction-held on the holding table 10 to perform alignment.

[0064] The processing device 1 performs cutting processing by causing the moving unit 50 to relatively move the cutting blade 21 and the workpiece 200 along the planned dividing lines 202, and causing the cutting blade 21 to cut into the planned dividing lines 202 of the workpiece 200 until it reaches the adhesive tape 206, based on the processing conditions. When all of the planned dividing lines 202 of the workpiece 200 have been cut, the processing device 1 moves the holding table 10 from the processing area toward the carry-in / out area.

[0065] The processing device 1 stops the movement of the holding table 10 in the carry-in / out area, stops the suction holding of the workpiece 200 on the holding table 10, releases the clamping of the clamping unit 13, and ends the processing operation.

[0066] (Method for detecting machining tools) Next, a description will be given of a method for detecting a machining tool according to embodiment 1. Fig. 7 is a flowchart showing the flow of the method for detecting a machining tool according to embodiment 1. The method for detecting a machining tool according to embodiment 1 is a method for detecting the cutting edge 211 of the cutting blade 21, which is a machining tool in the machining device 1 having the above-described configuration.

[0067] The method for detecting a machining tool according to the first embodiment is performed at a predetermined timing, for example, when a new cutting blade 21, 21-1 is attached to the spindle 23 and before the machining device 1 starts cutting the workpiece 200. As shown in Fig. 7 , the method for detecting a machining tool according to the first embodiment includes an attachment step 301, a movement step 302, a detection step 303, a determination step 304, and a detection step 305.

[0068] (Installation steps) The mounting step 301 is a step of mounting the cutting blade 21, 21-1 to the spindle 23 of the cutting unit 20 that cuts the workpiece 200. In the first embodiment, in the mounting step 301, an operator or the like mounts the cutting blade 21, 21-1 to the spindle 23 of the cutting unit 20 whose rotation around its axis has been stopped.

[0069] (Movement step) The moving step 302 is a step of relatively moving the grindstone detection unit 40 and the cutting unit 20 so that the cutting edge 211 of the cutting blade 21, 21-1 enters the entry portion 44 of the grindstone detection unit 40. In the first embodiment, in the moving step 302, an operator or the like registers detection conditions in the control unit 100. The detection conditions include the rotation speed of the spindle 23, the position of the cutting unit 20 in the Z-axis direction when the cutting edge 211 of the cutting blade 21, 21-1 enters the entry portion 44, and information indicating the cutting unit 20 to which the cutting blade 21, 21-1 to be detected is attached.

[0070] In the first embodiment, when the control unit 100 receives an instruction to start the detection operation from an operator or the like, the control unit 100 starts the movement step 302. In the first embodiment, in the movement step 302, the control unit 101 of the control unit 100 rotates the spindle 23 of the cutting unit 20, which is the detection target determined by the detection conditions, at the rotation speed determined by the detection conditions, and also emits pulsed light 41 from the light-emitting unit 45 of the grinding wheel detection unit 40 toward the light-receiving unit 46.

[0071] In the first embodiment, in the moving step 302, the control unit 101 of the control unit 100 controls the moving unit 50 to position the cutting edge 211 of the cutting blade 21, 21-1 attached to the spindle 23 of the cutting unit 20 to be detected above the grindstone detection unit 40. In the first embodiment, in the moving step 302, the control unit 101 of the control unit 100 lowers the cutting blade 21, 21-1 of the cutting unit 20 to be detected to a position in the Z-axis direction determined by the detection conditions. In the first embodiment, in the moving step 302, the control unit 101 of the control unit 100 causes the cutting edge 211 of the cutting blade 21, 21-1 to enter the entry portion 44 of the grindstone detection unit 40.

[0072] (Detection step) Fig. 8 is a diagram showing an example of voltage data acquired in the detection step of the machining tool detection method shown in Fig. 7. The detection step 303 is a step in which the grinding wheel detection unit 40 detects the cutting edges 211 of the cutting blades 21, 21-1 rotated by the cutting unit 20.

[0073] In the first embodiment, in the detection step 303, the control unit 101 of the control unit 100 switches the voltage recording unit 103 to a state in which the voltage value of the voltage converted by the photoelectric conversion unit 102 is passed through the filter described above and then recorded. In the first embodiment, in the detection step 303, the control unit 101 of the control unit 100 acquires voltage data 400, an example of which is shown in Fig. 8, recorded by the voltage recording unit 103 while the cutting blades 21, 21-1 make one rotation.

[0074] 8 indicates time, and the vertical axis indicates the voltage value of the voltage recorded by the voltage recording unit 103. The voltage data 400 shown as an example in FIG. 8 is data indicating the change in the voltage value of the voltage output from the photoelectric conversion unit 102 and passed through a filter during one rotation of the cutting blade 21, 21-1, i.e., the cutting blade 211. That is, the voltage data 400 shown as an example in FIG. 8 is data of the voltage value of the voltage output from the photoelectric conversion unit 102 for one rotation of the cutting blade 21, 21-1, i.e., one rotation of the cutting blade 211, and passed through a filter.

[0075] (Decision step) The determination step 304 is a step for determining whether or not the cutting blade 21, 21-1 is a slit grindstone after the detection step 303. In the first embodiment, in the determination step 304, the determination unit 104 of the control unit 100 detects the number of voltage values ​​for which the difference 401 from the previously recorded voltage value in the voltage data 400, an example of which is shown in Fig. 8, is equal to or greater than a predetermined threshold.

[0076] In the first embodiment, in the determination step 304, the determination section 104 of the control unit 100 determines whether or not the number of voltage values ​​at which the difference 401 is equal to or greater than the predetermined threshold is equal to or greater than the number (e.g., 10) corresponding to the slits 215 formed in the cutting blade 21, 21-1. In the first embodiment, in the determination step 304, if the number of voltage values ​​at which the difference 401 is equal to or greater than the predetermined threshold is equal to or greater than the number (e.g., 10) corresponding to the slits 215 formed in the cutting blade 21, 21-1, the determination section 104 of the control unit 100 determines that the cutting blade 21, the cutting edge 211 of which is a slit grindstone, is attached to the spindle 23.

[0077] In the first embodiment, in the determination step 304, if the number of voltage values ​​where the difference 401 is equal to or greater than the predetermined threshold value is less than the number (e.g., 10) corresponding to the number of slits 215 formed in the cutting blades 21, 21-1, the determination unit 104 of the control unit 100 determines that the cutting blade 21-1, whose cutting edge 211 is a grindstone without slits, is attached to the spindle 23. Note that the voltage data 400 shown in Fig. 8 is data when the cutting blade 21, whose cutting edge 211 is a grindstone with slits, is attached to the spindle 23.

[0078] 8 has the same number of minimum values ​​402 and maximum values ​​403 as the number of slits 215 (i.e., the number corresponding to the slits 215) during one rotation of the cutting blade 21, i.e., the cutting edge 211. That is, the number of minimum values ​​402 of the voltage data 400 is the same as the number of slits 215, and the number of maximum values ​​403 of the voltage data 400 is the same as the number of slits 215.

[0079] The minimum value 402 is the voltage value when a position excluding the position where the slit 215 of the cutting blade 211 is formed (i.e., a position where the slit 215 of the cutting blade 211 is not formed) is located between the light-emitting unit 45 and the light-receiving unit 46. The maximum value 403 is the voltage value when the slit 215 of the cutting blade 211 is located between the light-emitting unit 45 and the light-receiving unit 46.

[0080] (Detection step) Fig. 9 is a diagram showing an example of filtered no-voltage data acquired in the detection step of the machining tool detection method shown in Fig. 7. Fig. 10 is a diagram showing an example of integrated voltage data generated by integrating the filtered no-voltage data shown in Fig. 9. Fig. 11 is a diagram showing an example of the position of the lower end of the outer peripheral edge of the cutting blade detected in the detection step of the machining tool detection method shown in Fig. 7.

[0081] The detection step 305 is a step in which the grindstone detection unit 40 detects the state of the cutting edge of the cutting blade 211 of the cutting blade 21, 21-1 attached to the spindle 23 of the cutting unit 20 to be detected. In the detection step 303, in the determination step 304, when the determination unit 104 determines that the cutting blade 21, the cutting edge 211 of which is a slit grindstone, is attached to the spindle 23 of the cutting unit 20 to be detected, the tip detection unit 105 of the control unit 100 switches the voltage recording unit 103 to a state in which the voltage value converted by the photoelectric conversion unit 102 is recorded without passing through the above-mentioned filter.

[0082] In the first embodiment, in the detection step 305, the tip detection unit 105 of the control unit 100 acquires a plurality of filtered no-voltage data 500, an example of which is shown in Fig. 9, recorded by the voltage recording unit 103 during one rotation of the cutting blade 21. Note that the horizontal axis in Fig. 9 indicates time, and the vertical axis indicates the voltage value of the voltage recorded by the voltage recording unit 103.

[0083] The filtered no-voltage data 500, an example of which is shown in Fig. 9, is data that indicates a change in the voltage value of the voltage that is output from the photoelectric conversion unit 102 and that has not passed through a filter during one rotation of the cutting blade 21, which is a slitless grindstone, i.e., the cutting blade 211. In other words, the filtered no-voltage data 500, an example of which is shown in Fig. 9, is data of the voltage value of the voltage that is output from the photoelectric conversion unit 102 for one rotation of the cutting blade 21, which is a slitless grindstone, i.e., for one rotation of the cutting blade 211, and that has not passed through a filter.

[0084] In the first embodiment, in the detection step 305, the leading edge detection unit 105 of the control unit 100 superimposes multiple pieces of filter no-voltage data 500, an example of which is shown in Fig. 9, and integrates the filter no-voltage data 500. In the first embodiment, in the detection step 305, the leading edge detection unit 105 of the control unit 100 integrates the filter no-voltage data 500 to generate integrated voltage data 600, an example of which is shown in Fig. 10.

[0085] 10, the horizontal axis represents time, and the vertical axis represents voltage values ​​obtained by integrating the voltage values ​​recorded by the voltage recording unit 103. The integrated voltage data 600 shown in Fig. 10 is data generated by integrating the filtered no-voltage data 500 shown in Fig. 9, and therefore has the same number of minimum values ​​602 and maximum values ​​603 as the number of slits 215 (i.e., the number corresponding to the number of slits 215) during one rotation of the cutting blade 21, i.e., the cutting edge 211.

[0086] In the first embodiment, in the detection step 305, the tip detection unit 105 of the control unit 100 detects a cutting edge start region 604 and a cutting edge end region 605 from the integrated voltage data 600 shown in FIG. 10. The cutting edge start region 604 is a region between a voltage value that is lower than the voltage value recorded just before in the integrated voltage data 600 and whose difference from the voltage value recorded just before is equal to or greater than a predetermined second threshold, and the voltage value recorded just before this voltage value. The cutting edge end region 605 is a region between a voltage value that is higher than the voltage value recorded just before in the integrated voltage data 600 and whose difference from the voltage value recorded just before is equal to or greater than a predetermined second threshold, and the voltage value recorded just before this voltage value. The number of regions 604, 605 is the same as the number of slits 215 formed in the cutting edge 211 of the cutting blade 21 to be detected.

[0087] In the first embodiment, in the detection step 305, the tip end detection unit 105 of the control unit 100 detects intermediate regions 606 between each cutting edge start region 604 and each cutting edge end region 605 from the integrated voltage data 600 shown in Fig. 10. The number of intermediate regions 606, like the number of regions 604 and 605, is the same as the number of slits 215 formed in the cutting edge 211 of the cutting blade 21 to be detected. In the first embodiment, in the detection step 305, the tip end detection unit 105 of the control unit 100 detects the minimum voltage value of each intermediate region 606 detected from the integrated voltage data 600 shown in Fig. 10 as the minimum value 602.

[0088] In the first embodiment, in the detection step 305, the tip detecting section 105 of the control unit 100 detects the Z-axis position of the lower end of the cutting edge 211 of the cutting blade 21 corresponding to each minimum value 602 from each minimum value 602 detected from the integrated voltage data 600 shown in Fig. 10 and the Z-axis position of the cutting unit 20 when the cutting edge 211 enters the entry section 44. Thus, in the first embodiment, in the detection step 305, the tip detecting section 105 of the control unit 100 detects the Z-axis position of the lower end of the cutting edge 211 of the cutting blade 21 corresponding to the multiple minimum values ​​602 detected from the integrated voltage data 600 (shown in Fig. 11 as a first minimum value 602-1, a second minimum value 602-2, ..., an Nth minimum value 602-N). Also, in embodiment 1, in the detection step 305, the tip detection unit 105 of the control unit 100 calculates the distance from the axis of the outer edge 212 of the cutting edge 211 based on the Z-axis direction position of the lower end of the cutting edge 211 of the cutting blade 21 corresponding to the multiple minimum values ​​602-1, 602-2, ... 602-N.

[0089] Thus, in embodiment 1, after determination step 304, when it is determined in determination step 304 that the cutting blade 21 is a slit grinding wheel, detection step 305 becomes a tip detection step in which the position in the Z-axis direction of the lower end of the outer edge 212, which is the tip position of the cutting blade 211 for one revolution of the cutting blade 211, excluding the position where the slit 215 of the cutting blade 211, which is a slit grinding wheel, is formed, is detected.

[0090] In the first embodiment, in the detection step 305, the eccentricity calculation unit 106 calculates the difference between the largest and smallest minimum values ​​among the minimum values ​​602-1, 602-2, . . . 602-N detected by the tip detection unit 105. In the first embodiment, in the detection step 305, the eccentricity calculation unit 106 calculates the eccentricity of the cutting edge 211 of the cutting blade 21 based on the difference between the largest and smallest minimum values. Thus, in the first embodiment, after the determination step 304, when it is determined that the cutting blade 21 is a slit grindstone in the determination step 304, the detection step 305 becomes an eccentricity calculation step in which the amount of eccentricity of the cutting edge 211 of the cutting blade 21 is calculated based on the position in the Z-axis direction of the lower end of the outer peripheral edge 212, which is the tip position of the cutting edge 211, for one revolution of the cutting blade 211 excluding the position where the slit 215 of the cutting edge 211, which is a slit grindstone, is formed.

[0091] In the first embodiment, in the detection step 305, the eccentricity calculation unit 106 determines whether the difference between the maximum and minimum minimum values ​​is equal to or greater than a predetermined third threshold. In the first embodiment, in the detection step 305, if the difference between the maximum and minimum minimum values ​​is equal to or greater than the third threshold, the eccentricity calculation unit 106 determines that there is an abnormality, such as chipping, in the cutting edge 211, and operates the alarm unit 120 to notify the operator. In the first embodiment, in the detection step 305, if the difference between the maximum and minimum minimum values ​​is less than the third threshold, the eccentricity calculation unit 106 determines that there is no abnormality, such as chipping, in the cutting edge 211. Thus, in embodiment 1, after judgment step 304, when it is determined in judgment step 304 that the cutting blade 21 is a slit grinding wheel, the detection step 305 becomes an abnormality judgment step in which the presence or absence of an abnormality in the cutting blade 211 of the cutting blade 21 is determined based on the position in the Z-axis direction of the lower end of the outer edge 212, which is the tip position of the cutting blade 211 for one revolution of the cutting blade 211 excluding the position where the slit 215 of the cutting blade 211, which is a slit grinding wheel, is formed.

[0092] As described above, in the machining tool detection method according to the first embodiment, when it is determined in determination step 304 that the cutting blade 21 is a slit grindstone, the tip detection unit 105 acquires a plurality of filtered no-voltage data 500, generates integrated voltage data 600, and detects the Z-axis position of the lower end of the outer peripheral edge 212, which is the tip position of the cutting blade 211, for one revolution of the cutting blade 211 excluding the position where the slit 215 of the cutting blade 211 is formed, i.e., for one revolution of the cutting blade 211. Also, in the machining tool detection method according to the first embodiment, when it is determined in determination step 304 that the cutting blade 21 is a slit grindstone, the eccentricity calculation unit 106 calculates the eccentricity of the cutting blade 21 based on the Z-axis position of the lower end of the outer peripheral edge 212, which is the tip position of the cutting blade 211, for one revolution of the cutting blade 211, excluding the position where the slit 215 of the cutting blade 211 is formed, detected by the tip detection unit 105.

[0093] Furthermore, in embodiment 1, when it is determined in determination step 304 that cutting blade 21-1 is a grindstone without slits, in detection step 305, tip detection unit 105 detects the position in the Z-axis direction of the lower end of the outer circumferential edge 212 of the cutting edge 211 of cutting blade 21-1 based on voltage data 400 shown in Fig. 8. In embodiment 1, when it is determined in determination step 304 that cutting blade 21-1 is a grindstone without slits, in detection step 305, eccentricity calculation unit 106 calculates the eccentricity of the cutting edge 211 of cutting blade 21-1 based on voltage data 400 shown in Fig. 8, and determines whether or not there is an abnormality such as chipping.

[0094] As described above, the processing device 1 and processing tool detection method according to embodiment 1 have a determination unit 104 that determines whether the cutting blade 21, 21-1 is a slit grinding wheel by detecting the cutting edge 211 of the rotating cutting blade 21, 21-1 using the grinding wheel detection unit 40 by the control unit 100.

[0095] In addition, the processing device 1 and processing tool detection method according to embodiment 1 include a tip detection unit 105 that detects the tip position of the cutting blade 211 for one revolution of the cutting blade 21 or one revolution of the cutting blade 211 excluding the position where the slit 215 of the slit grinding wheel is formed, and an eccentricity calculation unit 106 that calculates the eccentricity of the cutting blade 21 from the tip position of the cutting blade 211 for one revolution of the cutting blade 21 or one revolution of the cutting blade 211 detected by the tip detection unit 105.

[0096] As a result, the processing device 1 and the processing tool detection method according to the first embodiment have the advantage of being able to detect the state of the cutting blade 211 in which the slit 215 is formed.

[0097] Furthermore, the processing device 1 and the processing tool detection method according to embodiment 1 are equipped with the aforementioned judgment unit 104, tip detection unit 105, and eccentricity calculation unit 106, and therefore have the effect of being able to detect the state of the cutting edge 211 for either the cutting blade 21 or 21-1.

[0098] [Embodiment 2] A processing device and a method for detecting a processing tool according to a second embodiment will be described with reference to the drawings. FIG. 12 is a perspective view showing an example of the configuration of the processing device according to the second embodiment. FIG. 13 is a side view of a grinding wheel attached to the spindle of the processing device shown in FIG. 12. FIG. 14 is a plan view of the grinding wheel shown in FIG. 13, viewed from below. FIG. 15 is a side view of a modified example of the grinding wheel shown in FIG. 13. FIG. 16 is a plan view of the grinding wheel shown in FIG. 15, viewed from below. FIG. 17 is a side view showing the main parts of the grinding unit and the main parts of the grinding wheel detection unit of the processing device shown in FIG. 12. In FIGS. 12 and 17, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0099] 12 according to the second embodiment is a grinding apparatus that holds a workpiece 200 on a holding table 10 and grinds (corresponds to processing) a back surface 204 of the workpiece 200 with a grinding wheel 71 (corresponding to a processing tool). As shown in FIG. 12, the processing apparatus 1-2 includes a holding table 10 that suction-holds a front surface 201 side of the workpiece 200 with a holding surface 11, a grinding unit 70 (corresponding to a processing unit) that grinds the back surface 204 of the workpiece 200 held on the holding table 10 with a grinding wheel 71 (shown in FIGS. 13 to 16), a grindstone detection unit 40 (shown in FIG. 17), a moving unit 50, and a control unit 100. Note that the grindstone detection unit 40 is omitted from FIG. 12.

[0100] The holding table 10 suction-holds the front surface 201 side of the workpiece 200 on the holding surface 11 via a surface protection tape 210 attached to the front surface 201 .

[0101] The grinding unit 70 has a spindle 73 on which a grinding wheel 71, which is a processing tool, is mounted, and is a processing unit that grinds the workpiece 200 held on the holding table 10 with the grinding wheel 71 rotated about its axis by the spindle 73. The grinding unit 70 is supported by an upright wall 6 that stands upright from the end of the device body 2 in the X-axis direction, via a Z-axis movement unit 53.

[0102] As shown in FIG. 12, the grinding unit 70 has a spindle 73 with a disk-shaped mount 74 at its lower end, a motor 75 that rotates the spindle 73 around its axis, a spindle housing 72 that supports the spindle 73 so that it can rotate freely around its axis, and a grinding water supply means (not shown) that supplies grinding water to the workpiece 200 held on the holding surface 11 of the holding table 10.

[0103] The axis of the spindle 73 is parallel to the Z-axis direction. The spindle 73 has the grinding wheel 71 attached to a mount 74, and is rotated around the axis by a motor 75, thereby rotating the grinding wheel 71 around the axis.

[0104] The grinding wheel 71 is attached by bolts or the like to a mount 74 at the lower end of a spindle 73 of the grinding unit 70, and grinds the back surface 204 of the workpiece 200 by rotating the spindle 73 about its axis. As shown in Figures 13 and 14, the grinding wheel 71 includes an annular wheel base 716 attached to the mount 74 at the lower end of the spindle 73, and a plurality of grinding stones 711 (corresponding to grinding stones) arranged in a ring shape on the lower surface of the wheel base 716.

[0105] That is, the grinding wheel 71 has a plurality of grinding stones 711 fixed at equal intervals in the circumferential direction of a wheel base 716. The grinding wheel 71 shown in FIGS. 13 and 14 has slits 715 formed between the grinding stones 711. The slits 715 open as if on a lower surface 712, which is the outer peripheral edge of the grinding stone 711, and penetrate the grinding stone 711 from an outer peripheral surface 713, which is a first surface, to an inner peripheral surface 714, which is a second surface behind the outer peripheral surface 713. That is, the grinding wheel 71 shown in FIGS. 13 and 14 is a machining tool in which the grinding stone 711 is a slit-equipped grinding stone. Furthermore, the grinding wheel 71 has a grinding water supply port 717, which allows grinding water to flow, opened on the lower surface of the wheel base 716.

[0106] The grinding wheel 711 is configured as a so-called segment grinding wheel formed into a single mass by mixing abrasive grains such as diamond or CBN (Cubic Boron Nitride) with a bonding material (also called a bond material) made of metal, ceramic, resin, etc. In the first embodiment, the grinding wheel 711 is formed to have a uniform thickness.

[0107] 15 and 16, in the second embodiment, the grinding stone 711 of the grinding wheel 71 (hereinafter, denoted by reference numeral 71-1) may be a non-slit grinding stone that does not have the multiple slits 215. The grinding stone 711 of the grinding wheel 71-1 is formed in an annular shape, and no slits 715 are formed therein.

[0108] In short, in the second embodiment, the processing device 1-2 has one of a grinding wheel 71 having a slit grinding stone shown in Figures 13 and 14, and a grinding wheel 71-1 having a non-slit grinding stone shown in Figures 15 and 16 attached to the spindle 23 of the grinding unit 70. Note that the grinding wheel 71-1 shown in Figures 15 and 16 has the same parts as the grinding wheel 71 denoted by the same reference numerals, and description thereof will be omitted.

[0109] Similar to the first embodiment, the machining tool detection method according to the second embodiment includes an attachment step 301, a movement step 302, a detection step 303, a determination step 304, and a detection step 305. Similar to the first embodiment, the machining tool detection method according to the second embodiment includes a movement step 302 in which the grinding stone 711 of the grinding wheel 71 rotating around its axis is advanced into the advancement portion 44 of the grinding stone detection unit 40, as shown in Fig. 17 .

[0110] In embodiment 1, as shown in Figure 12, the grinding unit 70 is arranged so that the axis of the grinding wheel 71 and the axis of the holding table 10 positioned in the processing area are parallel to each other with a horizontal gap between them, and the grinding stone 711 of the grinding wheel 71 passes over the center of the back surface 204 of the workpiece 200 held on the holding table 10.

[0111] As in the first embodiment, the processing device 1 and the processing tool detection method according to the second embodiment have a control unit 100 that is equipped with a judgment unit 104, a tip detection unit 105, and an eccentricity calculation unit 106, and therefore have the effect of being able to detect the state of the grinding wheel 711 in which the slit 715 is formed, and also have the effect of being able to detect the state of the grinding wheel 711 for either the grinding wheel 71 or 71-1.

[0112] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0113] 1,1-2 Processing equipment 10 Holding table 20 Cutting unit (processing unit) 21 Cutting blade (processing tool) 23 Spindle 40 Grindstone detection unit 44 Approach section 45 Light-emitting part 46 Light receiving part 50 Mobile Units 70 Grinding unit (processing unit) 71 Grinding wheels (machining tools) 73 Spindle 100 control unit 104 Judgment section 105 Tip detection unit 106 Eccentricity calculation section 200 Workpiece 211 Cutting blade (grindstone) 212 outer edge 213 Page 1 214 2nd page 215 Slit 301 Installation Steps 302 Movement Steps 303 Detection Step 304 Judgment Step 305 Detection step (tip detection step) 711 Grinding wheels (grinding wheels) 712 Bottom surface (outer edge) 713 Outer surface (first surface) 714 Inner surface (2nd surface) 715 Slit

Claims

1. A processing device that processes a workpiece with a processing tool including a grindstone, a holding table for holding the workpiece; a machining unit having a spindle to which the machining tool is attached, the machining unit rotating the spindle and machining the workpiece held on the holding table with the machining tool; a grindstone detection unit having an entrance portion into which the grindstone of the processing tool enters, and a light-emitting portion and a light-receiving portion disposed on either side of the entrance portion; a moving unit that moves the grindstone detection unit and the processing unit relatively to each other to allow the processing tool to enter the entry portion; a control unit that controls at least the processing unit, the grindstone detection unit, and the movement unit; Equipped with The grindstone is a slitted grindstone having a plurality of slits that open at least on the outer periphery of the grindstone and penetrate a first surface of the grindstone and a second surface behind the first surface, or a non-slitted grindstone that does not have any slits; the control unit has a determination unit that determines whether the machining tool is the slit grindstone by detecting the grindstone of the rotating machining tool with the grindstone detection unit; A processing device characterized by:

2. The processing device according to claim 1, wherein the control unit has a tip detection unit that detects the tip position of the grinding wheel over one revolution of the processing tool or one revolution of the grinding wheel excluding the position where the slit in the slotted grinding wheel is formed when the judgment unit of the control unit determines that the processing tool is the slotted grinding wheel.

3. 3. The processing device according to claim 2, wherein the control unit has an eccentricity calculation unit that calculates an eccentricity of the processing tool from the tip position of the grinding wheel over one revolution of the processing tool or one revolution of the grinding wheel detected by the tip detection unit.

4. 2. The processing device according to claim 1, wherein the processing tool is a cutting blade having a cutting edge, which is the grindstone, on its outer periphery.

5. A method for detecting a processing tool in a processing device that processes a workpiece with the processing tool including a grinding wheel, comprising: a mounting step of mounting the machining tool on a spindle of a machining unit that processes the workpiece; a moving step of relatively moving the grindstone detection unit and the processing unit so that the grindstone of the processing tool enters the entrance portion of the grindstone detection unit, the grindstone detection unit having an entrance portion into which the grindstone of the processing tool enters and a light-emitting portion and a light-receiving portion sandwiching the entrance portion; a detecting step of detecting the grindstone of the processing tool rotated by the processing unit with the grindstone detecting unit; a determining step of determining whether or not the machining tool is a slit grindstone having a slit that opens at least on an outer circumferential edge of the grindstone and penetrates a first surface of the grindstone and a second surface behind the first surface; A method for detecting a machining tool comprising:

6. The method for detecting a machining tool according to claim 5, further comprising a tip detection step of detecting the tip position of the grinding wheel over one circumference of the machining tool or one circumference of the grinding wheel excluding the position where the slit in the slotted grinding wheel is formed after the determination step when the determination step determines that the machining tool is the slotted grinding wheel.

Images