Sensor and method of manufacturing the same

Abstract

To provide a sensor capable of obtaining stable characteristics, and a method of manufacturing the same.SOLUTION: According to one embodiment, a sensor includes an element part. The element part includes an element layer including a first surface, first and second electrodes provided on the first surface, and a first member including an oxide. A direction from the second electrode toward the first electrode is along a first direction. The first surface includes first and second regions. A direction from a second position in the second direction of the second region toward a first position in the second direction of the first region is along the second direction. The second direction crosses the first direction. The first region is recessed with respect to the second region. The first and second regions overlap at least a portion of the first electrode in a third direction. The third direction crosses a plane including the first direction and the second direction. At least a portion of the first electrode is between the first region and the first member in a third direction.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION Embodiments of the present invention relate to sensors and methods for manufacturing the same. [Background technology]

[0002] For example, there is a sensor that detects a target such as gas, etc. Stable characteristics are desired for the sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6896679 Summary of the Invention [Problem to be solved by the invention]

[0004] The embodiments of the present invention provide a sensor capable of obtaining stable characteristics and a method for manufacturing the same. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a sensor includes an element unit. The element unit includes an element layer including a first surface, a first electrode provided on the first surface, a second electrode provided on the first surface, and a first member including an oxide. A direction from the second electrode to the first electrode is along a first direction. The first surface includes a first region and a second region. A direction from a second position in the second direction of the second region to a first position in the second direction of the first region is along the second direction. The second direction intersects with the first direction. The first region is recessed with respect to the second region. The first region and the second region overlap with at least a portion of the first electrode in a third direction. The third direction intersects with a plane including the first direction and the second direction. At least a portion of the first electrode is between the first region and the first member in the third direction. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 3] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 4] 4A and 4B are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. [Figure 5] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 6] 6A and 6B are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 8] FIG. 8 is a graph illustrating the sensor according to the first embodiment. [Figure 9] 9(a) to 9(c) are schematic cross-sectional views illustrating a method for manufacturing a sensor according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. 2 and 3 are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 2 is a cross-sectional view taken along line A1-A2 in Fig. 1. Fig. 3 is a cross-sectional view taken along line A3-A4 in Fig. 1. 4A and 4B are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. As shown in FIGS. 1 to 3, the sensor 110 according to the embodiment includes an element portion 20E.

[0009] The element portion 20E includes an element layer 20, a first electrode 11, a second electrode 12, and a first member 40. The element layer 20 includes a first surface 20F. The first electrode 11 is provided on the first surface 20F. The second electrode 12 is provided on the first surface 20F. The direction from the second electrode 12 to the first electrode 11 is along a first direction D1.

[0010] The first direction D1 is the Y-axis direction. A direction perpendicular to the Y-axis direction is the X-axis direction. A direction perpendicular to the Y-axis direction and the X-axis direction is the Z-axis direction.

[0011] The element layer 20 is along the XY plane. The element layer 20 is layered. The element layer 20 may be, for example, a membrane. The element layer 20 is, for example, insulating.

[0012] The first member 40 includes an oxide. The first member 40 includes, for example, a plurality of particles (first particles 41) including an oxide (see FIG. 2 ). At least a portion of the first member 40 may be provided on the element layer 20. A portion of the first member 40 may be provided on the first electrode 11 and the second electrode 12.

[0013] The first surface 20F of the element layer 20 includes a first region 21 and a second region 22. The direction from a second position in the second direction D2 of the second region 22 to a first position in the second direction D2 of the first region 21 is along the second direction D2. The second direction D2 intersects with the first direction D1. For example, the direction from the second region 22 to the first region 21 intersects with the first direction D1. The second direction D2 is, for example, the X-axis direction.

[0014] 2, the first region 21 is set back with respect to the second region 22. The first region 21 corresponds to at least a part of the recess (first recess 20d). The second region 22 may correspond to the protrusion.

[0015] In this example, the first region 21 and the second region 22 overlap at least a portion of the first electrode 11 in the third direction D3. The third direction D3 intersects with a plane including the first direction D1 and the second direction D2. The third direction D3 may be, for example, the Z-axis direction.

[0016] 2, at least a portion of the first electrode 11 is located between the first region 21 and the first member 40 in the third direction D3. In FIG. 1, the first member 40 is omitted.

[0017] In the embodiment, the first electrode 11 is spatially separated from the second electrode 12. A first member 40 may be provided in at least a part of the region between the first electrode 11 and the second electrode 12. The characteristics of the oxide contained in the first member 40 change depending on the detection target present around the element unit 20E. In response to the change in the oxide characteristics, the electrical resistance between the first electrode 11 and the second electrode 12 changes depending on the detection target. The detection target can be detected by detecting the change in electrical resistance. The detection target is, for example, a gas or a liquid.

[0018] In this way, the first electrode 11 and the second electrode 12 are configured so that the electrical resistance between the first electrode 11 and the second electrode 12 changes depending on the detection target around the element portion 20E. The detection target may include, for example, hydrogen. The sensor 110 may be, for example, a gas sensor.

[0019] As described above, the first region 21 is set back with respect to the second region 22. For example, a recess (first recess 20d) is provided in the first surface 20F. This allows the multiple first particles 41 included in the first member 40 to be stably and uniformly provided in the recess. For example, in a reference example in which no recess is provided, the multiple first particles 41 tend to be unevenly present in the element layer 20. In contrast, in the embodiment, the multiple first particles 41 are stably and uniformly provided in the recess. This makes the electrical resistance uniform. The characteristics of the change in electrical resistance in response to changes in the detection target are stabilized. For example, stable, highly accurate detection is possible. According to the embodiment, a sensor capable of obtaining stable characteristics can be provided.

[0020] In one example, a liquid containing a plurality of first particles 41 may be applied onto the element layer 20 and the electrodes. By removing the solvent in the liquid, a first member 40 containing a plurality of first particles 41 can be formed. In this manner, the plurality of first particles 41 in the liquid efficiently and stably gather in the recesses. For example, self-assembly occurs in the plurality of first particles 41. A sensor with stable characteristics can be provided.

[0021] 4(a), the first component 40 includes a plurality of first particles 41 containing an oxide. The oxide includes, for example, at least one selected from the group consisting of tin, zinc, tungsten, molybdenum, and indium, and oxygen. The average diameter of the plurality of first particles 41 may be, for example, 10 nm or more and 500 nm or less.

[0022] As shown in FIG. 4(a), the first member 40 may include a plurality of second particles 42. The plurality of second particles 42 may include, for example, at least one selected from the group consisting of platinum, gold, silver, copper, aluminum, and titanium nitride. By providing the plurality of second particles 42, for example, high sensitivity is easily obtained. The plurality of second particles 42 may function as a catalyst, for example.

[0023] 4(a), the first member 40 may include a resin 45. The resin 45 may be, for example, a polymer.

[0024] At least one of the first electrode 11 and the second electrode 12 may include at least one selected from the group consisting of platinum, gold, silver, copper, aluminum, and titanium nitride. For example, the surface portion of the first electrode 11 may include at least one selected from the group consisting of platinum, gold, silver, copper, aluminum, and titanium nitride. For example, the surface portion of the second electrode 12 may include at least one selected from the group consisting of platinum, gold, silver, copper, aluminum, and titanium nitride. These materials may function as catalysts, for example. The region including these materials may be in contact with the first member 40. High sensitivity is likely to be obtained.

[0025] 1 and 2, the first surface 20F may further include a third region 23. A first position of the first region 21 in the second direction D2 is between a second position of the second region 22 in the second direction D2 and a third position of the third region 23 in the second direction D2. The first region 21 is recessed with respect to the third region 23. The third region 23 overlaps with a portion of the first electrode 11 in the third direction D3. The first region 21 between the second region 22 and the third region 23 corresponds to a portion of the first recess 20d.

[0026] By providing the recesses (first recesses 20d), the first members 40 selectively gather in the recesses. The first members 40 do not need to be provided in areas that are not recesses. For example, the first members 40 do not need to overlap with the second region 22 in the third direction D3. Alternatively, the density of the multiple first particles 41 in the second region 22 may be lower than the density of the multiple first particles 41 in the first region 21.

[0027] In the embodiment, the height (depth) of the step formed between the first region 21 and the second region 22 may be, for example, 1 μm or more and 5 μm or less. The step corresponds to the distance in the third direction D3 between the position of the first region 21 in the third direction D3 and the position of the second region 22 in the third direction D3.

[0028] For example, the first member 40 may include a first overlapping portion 40a and a second overlapping portion 40b (see FIG. 4(a)). The first overlapping portion 40a overlaps with the first region 21 in the third direction D3. The second overlapping portion 40b overlaps with the second region 22 in the third direction D3. A first amount of oxides (e.g., a plurality of first particles 41) per unit area in the first overlapping portion 40a is greater than a second amount of oxides (e.g., a plurality of first particles 41) per unit area in the second overlapping portion 40b. The in-plane distribution of the plurality of first particles 41 is appropriately controlled. High sensitivity can be stably obtained.

[0029] For example, the first member 40 may include a third overlapping portion 40c (see FIG. 4(a)). The third overlapping portion 40c overlaps with the third region 23 in the third direction D3. A first amount of oxides (e.g., a plurality of first particles 41) per unit area in the first overlapping portion 40a is greater than a third amount of oxides (e.g., a plurality of first particles 41) per unit area in the third overlapping portion 40c. The in-plane distribution of the plurality of first particles 41 is appropriately controlled. High sensitivity can be stably obtained.

[0030] 1, the first electrode 11 may extend along a second direction D2, and the second electrode 12 may extend along the second direction D2.

[0031] As shown in FIG. 2, the first surface 20F may include a first side surface 21p and a second side surface 21q. The first side surface 21p is located between the first region 21 and the second region 22. The second side surface 21q is located between the first region 21 and the third region 23. The first side surface 21p and the second side surface 21q intersect with the second direction D2. For example, a portion of the first electrode 11 is located between the first side surface 21p and at least a portion of the first member 40. For example, another portion of the first electrode 11 is located between at least a portion of the first member 40 and the second side surface 21q. The first side surface 21p and the second side surface 21q correspond to a portion of the side surface of the first recess 20d. At least a portion of the first member 40 is provided between the two side surfaces. A plurality of first particles 41 are stably collected in the first recess 20d.

[0032] As will be described later, at least a portion of the first side surface 21p may be inclined with respect to the third direction D3, and at least a portion of the second side surface 21q may be inclined with respect to the third direction D3.

[0033] As shown in FIGS. 1 and 3 , the first surface 20F may further include a first inter-electrode region 21A. The position of the first inter-electrode region 21A in the first direction D1 is between the position of the second electrode 12 in the first direction D1 and the position of the first electrode 11 in the first direction D1. The direction from the position of the first inter-electrode region 21A in the first direction D1 to the position of the first region 21 in the first direction D1 is along the first direction D1. The first inter-electrode region 21A is recessed with respect to the second region 22. At least a portion of the first inter-electrode region 21A overlaps with the first member 40 in the third direction D3. For example, at least a portion of the first member 40 (the plurality of first particles 41) is provided on the first inter-electrode region 21A. The first inter-electrode region 21A is part of the first recess 20d. The first inter-electrode region 21A may be recessed with respect to the first region 21.

[0034] 1, the first surface 20F may include a first inter-electrode region 21A and a second inter-electrode region 22A. The position of the first inter-electrode region 21A in the first direction D1 and the position of the second inter-electrode region 22A in the first direction D1 are between the position of the second electrode 12 in the first direction D1 and the position of the first electrode 11 in the first direction D1. The direction from the second inter-electrode position of the second inter-electrode region 22A in the second direction D2 to the first inter-electrode position of the first inter-electrode region 21A in the second direction D2 is along the second direction D2.

[0035] As shown in Fig. 3, the first inter-electrode region 21A is recessed with respect to the second inter-electrode region 22A. At least a portion of the first inter-electrode region 21A overlaps with the first member 40 in the third direction D3. The first inter-electrode region 21A corresponds to a portion of the first recess 20d. The first member 40 (plurality of first particles 41) gathers in the first inter-electrode region 21A. High-precision detection is stably possible.

[0036] In the embodiment, the height (depth) of the step formed between the first inter-electrode region 21A and the second inter-electrode region 22A may be, for example, 1 μm or more and 5 μm or less, and corresponds to the distance in the third direction D3 between the position of the first inter-electrode region 21A in the third direction D3 and the position of the second inter-electrode region 22A in the third direction D3.

[0037] For example, the first member 40 does not overlap the second inter-electrode region 22A in the third direction D3. Alternatively, the density of the multiple first particles 41 in the second inter-electrode region 22A is lower than the density of the multiple first particles 41 in the first inter-electrode region 21A.

[0038] As shown in FIG. 4(b), for example, the first member 40 includes a first inter-electrode portion 40p and a second inter-electrode portion 40q. The first inter-electrode portion 40p overlaps with the first inter-electrode region 21A in the third direction D3. The second inter-electrode portion 40q overlaps with the second inter-electrode region 22A in the third direction D3. The amount of oxides (e.g., a plurality of first particles 41) per unit area in the first inter-electrode portion 40p (first inter-electrode amount) is greater than the amount of oxides (e.g., a plurality of first particles 41) per unit area in the second inter-electrode portion 40q (second inter-electrode amount). The in-plane distribution of the plurality of first particles 41 is appropriately controlled. High sensitivity can be stably obtained.

[0039] 1, the first surface 20F may further include a third inter-electrode region 23A. The position of the first inter-electrode region 21A in the second direction D2 is between the position of the second inter-electrode region 22A in the second direction D2 and the position of the third inter-electrode region 23A in the second direction D2.

[0040] As shown in FIG. 3, the first inter-electrode region 21A is set back with respect to the third inter-electrode region 23A.

[0041] As shown in FIG. 4(b), the first member 40 may include a third inter-electrode portion 40r. The third inter-electrode portion 40r overlaps with the third inter-electrode region 23A in the third direction D3. The amount of oxides (e.g., a plurality of first particles 41) per unit area in the first inter-electrode portion 40p (first inter-electrode amount) is greater than the amount of oxides (e.g., a plurality of first particles 41) per unit area in the third inter-electrode portion 40r (third inter-electrode amount). The in-plane distribution of the plurality of first particles 41 is appropriately controlled. High sensitivity can be stably obtained.

[0042] As shown in FIG. 4(b), the element layer 20 may include a hole 20h. The hole 20h penetrates the element layer 20 along the third direction D3. For example, the hole 20h may be connected to the first inter-electrode region 21A. At least a portion of the hole 20h may be considered to be the first inter-electrode region 21A. For example, at least a portion of the hole 20h is recessed with respect to the second inter-electrode region 22A. As will be described later, when a void is provided under the element layer 20, a sacrificial layer for forming the void may be removed through the hole 20h.

[0043] As shown in FIG. 2, the element unit 20E may include a conductive member 20C. Power may be supplied to the conductive member 20C, causing the temperature of the element unit 20E to rise. The conductive member 20C may be, for example, a heater. In one example, the detection target may be detected when the temperature of the element unit 20E has risen. In another example, the detection target adsorbed to the first member 40 may be separated from the first member 40 by raising the temperature of the first member 40. For example, initialization may be performed. The rise in temperature may remove adsorbed water, for example.

[0044] As shown in FIGS. 2 and 3, the sensor 110 may further include a base 50s and a first fixing portion 31F. The first fixing portion 31F is fixed to the base 50s. The element portion 20E is supported by the first fixing portion 31F. A first gap g1 may be provided between the base 50s and the element layer 20. This can suppress heat dissipation from the element layer 20. For example, the characteristics of the change in electrical resistance are stabilized. The sensor 110 may have, for example, a MEMS (Micro Electro Mechanical Systems) structure.

[0045] An insulating layer 50L may be provided between the base body 50s and the first fixing portion 31F. The insulating layer 50L may be included in the base body 50s.

[0046] As shown in FIGS. 1 and 2, the sensor 110 may further include a first connecting portion 31c. The first connecting portion 31c is supported by a first fixing portion 31F. The first connecting portion 31c supports the element layer 20. The first connecting portion 31c may have, for example, a meander structure. The first connecting portion 31c may have a beam structure. Heat conduction is suppressed. For example, high sensitivity is easily obtained.

[0047] 1 and 2, the sensor 110 may further include a second fixing portion 32F. The second fixing portion 32F is fixed to the base 50s. The element portion 20E is further supported by the second fixing portion 32F. The sensor 110 may further include a second connecting portion 32c. The second connecting portion 32c is supported by the second fixing portion 32F. The second connecting portion 32c supports the element layer 20.

[0048] For example, the direction from first fixed portion 31F to second fixed portion 32F is along a plane including first direction D1 and second direction D2. For example, the position of element portion 20E in second direction D2 is between the position of first fixed portion 31F in second direction D2 and the position of second fixed portion 32F in second direction D2.

[0049] 1, the sensor 110 may further include a third fixing portion 33F. The third fixing portion 33F is fixed to the base 50s. The element portion 20E is further supported by the third fixing portion 33F. The sensor 110 may further include a third connecting portion 33c. The third connecting portion 33c is supported by the third fixing portion 33F. The third connecting portion 33c supports the element layer 20.

[0050] 1, the sensor 110 may further include a fourth fixing portion 34F. The fourth fixing portion 34F is fixed to the base 50s. The element portion 20E is further supported by the fourth fixing portion 34F. The sensor 110 may further include a fourth connecting portion 34c. The fourth connecting portion 34c is supported by the fourth fixing portion 34F. The fourth connecting portion 34c supports the element layer 20.

[0051] The plurality of connection portions may have, for example, a meander structure. The plurality of connection portions may have a beam structure. Heat conduction is suppressed. For example, high sensitivity is easily obtained.

[0052] The number of the multiple connecting parts is preferably four or more. The shape of the element layer 20 is stabilized. When the first member 40 is provided on the element layer 20 by a coating method or the like, it is easy to stably form a layer of liquid containing the multiple first particles 41 on the element layer 20. The number of the multiple connecting parts may be six or more. The number of the multiple connecting parts may be eight or more. It is easy to obtain an element layer 20 with a more stable shape. The first member 40 can be formed more stably.

[0053] 1, the element portion 20E may include a plurality of first electrodes 11 and a plurality of second electrodes 12. These plurality of electrodes are aligned along a first direction D1. One of the plurality of first electrodes 11 is located between one of the plurality of second electrodes 12 and another of the plurality of second electrodes 12. One of the plurality of second electrodes 12 is located between one of the plurality of first electrodes 11 and another of the plurality of first electrodes 11. The first recess 20d overlaps the plurality of first electrodes 11 and the plurality of second electrodes 12.

[0054] For example, a first region 21, a second region 22, and a third region 23 may be provided in each of the multiple first electrodes 11. A first inter-electrode region 21A, a second inter-electrode region 22A, and a third inter-electrode region 23A may be provided between one of the multiple first electrodes 11 and one of the multiple second electrodes 12.

[0055] 1, the element portion 20E may include a first connection electrode 11T and a second connection electrode 12T. The first connection electrode 11T electrically connects the plurality of first electrodes 11 to one another. The second connection electrode 12T electrically connects the plurality of second electrodes 12 to one another. For example, the plurality of first electrodes 11 and the plurality of second electrodes 12 are provided between the first connection electrode 11T and the second connection electrode 12T. The plurality of first electrodes 11 and the plurality of second electrodes 12 may form, for example, comb-shaped electrodes.

[0056] In one example, the electrical resistance between the first connection electrode 11T and the second connection electrode 12T may be detected. These connection electrodes may function as terminals. In one example, a wire electrically connected to the first electrode 11 may pass through a connection portion (e.g., the first connection portion 31c). In one example, a wire electrically connected to the second electrode 12 may pass through a connection portion (e.g., the second connection portion 32c).

[0057] 1, in this example, a plurality of first recesses 20d are provided. The plurality of first recesses 20d are aligned along a first direction D1. A group including the plurality of first recesses 20d may be aligned along a second direction D2. For example, the plurality of first recesses 20d may be aligned along the first direction D1 and the second direction D2. When the first member 40 is formed by a coating method, the surface energy of the liquid used makes it easy for the first member 40 to be uniformly distributed within the surface according to the plurality of first recesses 20d.

[0058] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. 5, in the sensor 111 according to the embodiment, the first surface 20F includes a strip-shaped first recess 20d extending along the first direction D1. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110, for example.

[0059] In the sensor 111, the first region 21 is included in the strip-shaped first recess 20d. The first inter-electrode region 21A is included in the strip-shaped first recess 20d. In the sensor 111, the first member 40 (plurality of first particles 41) efficiently gathers in the strip-shaped first recess 20d. High accuracy can be stably obtained.

[0060] In the sensor 111, the element unit 20E also includes an element layer 20 including a first surface 20F, a first electrode 11 provided on the first surface 20F, a second electrode 12 provided on the first surface 20F, and a first member 40 including an oxide. The direction from the second electrode 12 to the first electrode 11 is along the first direction D1. The first surface 20F includes a first inter-electrode region 21A and a second inter-electrode region 22A. The position of the first inter-electrode region 21A in the first direction D1 and the position of the second inter-electrode region 22A in the first direction D1 are between the position of the second electrode 12 in the first direction D1 and the position of the first electrode 11 in the first direction D1. The direction from the second inter-electrode position of the second inter-electrode region 22A in the second direction D2 to the first inter-electrode position of the first inter-electrode region 21A in the second direction D2 is along the second direction D2. The second direction D2 intersects with the first direction D1. The first inter-electrode region 21A is set back with respect to the second inter-electrode region 22A. At least a portion of the first inter-electrode region 21A overlaps with the first member 40 in the third direction D3. The third direction D3 intersects with a plane including the first direction D1 and the second direction D2.

[0061] In the sensor 111, the first member 40 does not overlap the second inter-electrode region 22A in the third direction D3. Alternatively, the first member 40 includes a first inter-electrode portion 40p that overlaps with the first inter-electrode region 21A in the third direction D3 and a second inter-electrode portion 40q that overlaps with the second inter-electrode region 22A in the third direction D3. The first inter-electrode amount of oxide (plurality of first particles 41) per unit area in the first inter-electrode portion 40p is greater than the second inter-electrode amount of oxide (plurality of first particles 41) per unit area in the second inter-electrode portion 40q. The first member 40 efficiently collects in the first recess 20d.

[0062] In the sensor 111, the first electrode 11 also extends along the second direction D2, and the second electrode 12 also extends along the second direction D2.

[0063] 6A and 6B are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 6(a) is a cross-sectional view corresponding to the line A1-A2 in Fig. 1. Fig. 6(b) is a cross-sectional view corresponding to the line A3-A4 in Fig. 1. 6(a), in the sensor 112 according to this embodiment, the side surface of the first recess 20d is inclined. Except for this, the configuration of the sensor 112 may be the same as the configuration of the sensor 110 or the sensor 111, for example.

[0064] In the sensor 112, the first surface 20F includes a first side surface 21p and a second side surface 21q. The first side surface 21p is located between the first region 21 and the second region 22. The second side surface 21q is located between the first region 21 and the third region 23. At least a portion of the first side surface 21p may be inclined with respect to the third direction D3. At least a portion of the second side surface 21q may be inclined with respect to the third direction D3. The inclined side surface makes it easier to control the in-plane distribution of the first member 40, for example. For example, the inclined side surface makes it easier for the first member 40 to gather in the first recess 20d.

[0065] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. 7, in the sensor 113 according to the embodiment, the shapes of the first electrode 11 and the second electrode 12 are different from those in the sensor 110. Except for this, the configuration of the sensor 113 may be similar to the configuration of the sensor 110, etc.

[0066] In the sensor 113, the first connection electrode 11T is electrically connected to the plurality of first electrodes 11. The second connection electrode 12T is electrically connected to one of the plurality of second electrodes 12. The plurality of second electrodes 12 may be considered to be part of the plurality of first electrodes 11. In this case, one of the plurality of first electrodes 11 may be considered to be the "first electrode 11," and another of the plurality of first electrodes 11 may be considered to be the "second electrode 12."

[0067] The first recess 20d is also provided in the sensor 113. For example, the first member 40 efficiently gathers in the first recess 20d. The sensor 113 also has stable characteristics.

[0068] In the sensor 113, at least a portion of the first recess 20d is located between the first electrode 11 and the second electrode 12. The electrical resistance between the first electrode 11 and the second electrode 12 changes due to a change in the characteristics of the first member 40 provided in at least a portion of the first recess 20d. The change in the characteristics of the first member 40 depends on the object to be detected.

[0069] FIG. 8 is a graph illustrating the sensor according to the first embodiment. FIG. 8 illustrates the characteristics of the sensor 114 according to the embodiment. The configuration of the sensor 114 may include any of the configurations of the sensors described above. The horizontal axis of FIG. 8 represents the position pX in the X-axis direction. The vertical axis represents the distance d1 (see FIG. 1). In the region corresponding to the element layer 20, the distance d1 is the distance d1 between the base 50s and the element layer 20 along the third direction D3. In the region corresponding to the first connection portion 31c, the distance d1 is the distance d1 between the base 50s and the first connection portion 31c along the third direction D3. In the region corresponding to the second connection portion 32c, the distance d1 is the distance d1 between the base 50s and the second connection portion 32c along the third direction D3.

[0070] 8, the distance d1 in the region corresponding to the element layer 20 may be shorter than the distance d1 in the region corresponding to the first connection portion 31c. The distance d1 in the region corresponding to the element layer 20 may be shorter than the distance d1 in the region corresponding to the second connection portion 32c. For example, the first member 40 can be easily and stably formed on the element layer 20.

[0071] 8, in the region corresponding to the element layer 20, the distance d1 may change in a downward convex shape. For example, the element layer 20 may be convex toward the base 50s. This makes it easier to stably form the first member 40 on the element layer 20, for example. For example, when the first member 40 is formed by a coating method, a film containing a liquid including a plurality of first particles 41 can be easily and stably formed on the element layer 20.

[0072] (Second embodiment) 9(a) to 9(c) are schematic cross-sectional views illustrating a method for manufacturing a sensor according to the second embodiment. As shown in FIG. 9(a), a structure 110x is prepared. The structure 110x includes an element layer 20 and a first electrode 11. The element layer 20 includes a first surface 20F including a first recess 20d. The first electrode 11 is provided on the first surface 20F. The structure 110x may include a plurality of first electrodes 11. One of the plurality of first electrodes 11 may be considered as the second electrode 12 (see FIG. 1). The structure 110x may include a base 50s, a fixing portion (e.g., a first fixing portion 31F), and a connecting portion (e.g., a first connecting portion 31c). A first gap g1 may be provided between the base 50s and the element layer 20. The structure 110x may have a MEMS structure.

[0073] 9(b), a liquid film 40L is formed in the first recess 20d of the structure 110x. The liquid film 40L includes an oxide (e.g., a plurality of first particles 41) and a solvent 40s. The solvent 40s may be, for example, an organic solvent. The organic solvent may include, for example, ethylene glycol.

[0074] 9(c), at least a portion of the solvent 40s is removed, and at least a portion of the first member 40 containing an oxide (plurality of first particles 41) is formed in the first recess 20d. This results in, for example, a sensor 110. According to the embodiment, a method for manufacturing a sensor that can obtain stable characteristics can be provided.

[0075] The manufacturing method according to the embodiment may include forming the first recess 20d. For example, the first recess 20d can be formed by removing a portion of the element layer 20. Removing the portion of the element layer 20 may include, for example, etching. The etching may include at least one of wet etching and dry etching.

[0076] The embodiments may include the following technical solutions. (Technical proposal 1) An element portion is provided, The element portion is a device layer including a first surface; a first electrode provided on the first surface; a second electrode provided on the first surface, the direction from the second electrode to the first electrode being along a first direction; a first member including an oxide; Including, the first surface includes a first region and a second region; a direction from a second position in the second direction of the second region to a first position in the second direction of the first region is along the second direction; the second direction intersects with the first direction, the first region is recessed relative to the second region; the first region and the second region overlap with at least a portion of the first electrode in a third direction; the third direction intersects with a plane including the first direction and the second direction, A sensor, wherein at least a portion of the first electrode is between the first region and the first member in the third direction.

[0077] (Technical proposal 2) the first electrode extends along the second direction; The sensor described in Technical Solution 1, wherein the second electrode extends along the second direction.

[0078] (Technical proposal 3) The sensor described in Technical Solution 1 or 2, wherein the first electrode and the second electrode are configured such that the electrical resistance between the first electrode and the second electrode changes depending on the detection target around the element portion.

[0079] (Technical proposal 4) The first member does not overlap the second region in the third direction, or the first member includes a first overlapping portion that overlaps with the first region in the third direction and a second overlapping portion that overlaps with the second region in the third direction; The sensor described in any one of Technical Schemes 1 to 3, wherein a first amount of the oxide per unit area in the first overlapping portion is greater than a second amount of the oxide per unit area in the second overlapping portion.

[0080] (Technical proposal 5) the first surface further includes a third region; the first position of the first region in the second direction is between the second position of the second region in the second direction and the third position of the third region in the second direction; the first region is recessed relative to the third region; The sensor according to any one of Technical Solutions 1 to 4, wherein the third region overlaps with a portion of the first electrode in the third direction.

[0081] (Technical proposal 6) The first surface is a first side between the first region and the second region; a second side between the first region and the third region; and further comprising the first side surface and the second side surface intersect with the second direction, a portion of the first electrode is between the first side surface and at least a portion of the first member; The sensor described in Technical Solution 5, wherein another portion of the first electrode is between the at least one portion of the first member and the second side surface.

[0082] (Technical proposal 7) The sensor described in Technical Solution 6, wherein at least a portion of the first side surface is inclined with respect to the third direction.

[0083] (Technical proposal 8) the first surface further includes a first inter-electrode region; a position of the first inter-electrode region in the first direction is between a position of the second electrode in the first direction and a position of the first electrode in the first direction; a direction from the position in the first direction of the first inter-electrode region to a position in the first direction of the first region is along the first direction, the first inter-electrode region is recessed relative to the second region; The sensor according to any one of Technical Solutions 1 to 7, wherein at least a portion of the first inter-electrode region overlaps with the first member in the third direction.

[0084] (Technical proposal 9) the first surface further includes a first inter-electrode region and a second inter-electrode region; a position of the first inter-electrode region in the first direction and a position of the second inter-electrode region in the first direction are between a position of the second electrode in the first direction and a position of the first electrode in the first direction, a direction from a second inter-electrode position in the second inter-electrode region in the first direction to a first inter-electrode position in the first inter-electrode region in the first direction is along the second direction, the first inter-electrode region is recessed relative to the second inter-electrode region; The sensor according to any one of Technical Solutions 1 to 3, wherein at least a portion of the first inter-electrode region overlaps with the first member in the third direction.

[0085] (Technical proposal 10) The first member does not overlap the second inter-electrode region in the third direction, or the first member includes a first inter-electrode portion overlapping with the first inter-electrode region in the third direction and a second inter-electrode portion overlapping with the second inter-electrode region in the third direction, The sensor described in Technical Solution 9, wherein the first inter-electrode amount of the oxide per unit area in the first inter-electrode portion is greater than the second inter-electrode amount of the oxide per unit area in the second inter-electrode portion.

[0086] (Technical proposal 11) the first surface includes a strip-shaped first recess extending along the first direction, The sensor according to any one of Technical Schemes 1 to 10, wherein the first region is included in the first recess.

[0087] (Technical proposal 12) An element portion is provided, The element portion is a device layer including a first surface; a first electrode provided on the first surface; a second electrode provided on the first surface, the direction from the second electrode to the first electrode being along a first direction; a first member including an oxide; Including, the first surface includes a first inter-electrode region and a second inter-electrode region; a position of the first inter-electrode region in the first direction and a position of the second inter-electrode region in the first direction are between a position of the second electrode in the first direction and a position of the first electrode in the first direction, a direction from a second inter-electrode position in the second direction of the second inter-electrode region to a first inter-electrode position in the second direction of the first inter-electrode region is along the second direction, the second direction intersects with the first direction, the first inter-electrode region is recessed relative to the second inter-electrode region; At least a portion of the first inter-electrode region overlaps with the first member in a third direction, The third direction intersects a plane containing the first direction and the second direction.

[0088] (Technical proposal 13) The first member does not overlap the second inter-electrode region in the third direction, or the first member includes a first inter-electrode portion overlapping with the first inter-electrode region in the third direction and a second inter-electrode portion overlapping with the second inter-electrode region in the third direction, The sensor described in Technical Proposal 12, wherein the first inter-electrode amount of the oxide per unit area in the first inter-electrode portion is greater than the second inter-electrode amount of the oxide per unit area in the second inter-electrode portion.

[0089] (Technical proposal 14) the first electrode extends along the second direction; The sensor described in technical proposal 12 or 13, wherein the second electrode extends along the second direction.

[0090] (Technical proposal 15) the first surface includes a strip-shaped first recess extending along the first direction, The sensor according to any one of Technical Solutions 12 to 14, wherein the first inter-electrode region is included in the first recess.

[0091] (Technical proposal 16) the element portion includes a plurality of the first electrodes and a plurality of the second electrodes, one of the plurality of first electrodes is between one of the plurality of second electrodes and another of the plurality of second electrodes; the one of the plurality of second electrodes is between the one of the plurality of first electrodes and another one of the plurality of first electrodes; The sensor described in Technical Solution 11 or 15, wherein the first recess overlaps with the plurality of first electrodes and the plurality of second electrodes.

[0092] (Technical proposal 17) a substrate; a first fixed portion fixed to the base; Furthermore, the element portion is supported by the first fixing portion, The sensor according to any one of Technical Schemes 1 to 16, wherein a first gap is present between the substrate and the element layer.

[0093] (Technical proposal 18) The sensor according to Technical Solution 17, wherein the element layer is convex toward the substrate.

[0094] (Technical proposal 19) the first component includes a plurality of first particles including the oxide; the oxide contains at least one selected from the group consisting of tin, zinc, tungsten, molybdenum, and indium, and oxygen; A sensor described in any one of technical proposals 1 to 18, wherein at least one of the first electrode and the second electrode includes at least one selected from the group consisting of platinum, gold, silver, copper, aluminum, and titanium nitride.

[0095] (Technical proposal 20) forming a liquid film containing an oxide and a solvent in the first recess of a structure including an element layer including a first surface including a first recess and a first electrode provided on the first surface; The method for manufacturing a sensor further comprises removing at least a portion of the solvent to form at least a portion of a first member containing the oxide in the first recess.

[0096] According to the embodiment, a sensor capable of obtaining stable characteristics and a manufacturing method thereof are provided.

[0097] In this specification, "electrically connected" includes a state in which multiple conductors are physically in contact with each other and a current flows between these multiple conductors. "Electrically connected" also includes a state in which multiple conductors are connected to each other and a current flows between these multiple conductors.

[0098] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the element layer, electrodes, first member, base, fixing portion, and connecting portion, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0099] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0100] In addition, all sensors and manufacturing methods thereof that can be implemented by a person skilled in the art by making appropriate design modifications based on the sensors and manufacturing methods thereof described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0101] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and these modifications and alterations are also considered to fall within the scope of the present invention.

[0102] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0103] 11, 12: first and second electrodes, 11T, 12T: first and second connection electrodes, 20: element layer, 20E: element portion, 20F: first surface, 20C: conductive member, 20d: first recess, 20h: hole, 21-23: first to third regions, 21A-23A: regions between first and third electrodes, 21p, 21q: first and second side surfaces, 31F-34F: first to fourth fixing portions, 31c-34c: first to fourth connection portions, 40: first member, 40L: liquid film, 40a-40c: first to third overlapping portions, 40p-40r: regions between first and third electrodes, 40s: solvent, 41, 42: first and second particles, 45: resin, 50L: insulating layer, 50s: substrate, 110-114: sensor, 110x: structure, D1-D3: first to third directions, d1: distance, g1: first gap

Claims

1. An element portion is provided, The element portion is a device layer including a first surface; a first electrode provided on the first surface; a second electrode provided on the first surface, the direction from the second electrode to the first electrode being along a first direction; a first member including an oxide; Including, the first surface includes a first region and a second region; a direction from a second position in the second direction of the second region to a first position in the second direction of the first region is along the second direction; the second direction intersects with the first direction, the first region is recessed relative to the second region; the first region and the second region overlap with at least a portion of the first electrode in a third direction; the third direction intersects with a plane including the first direction and the second direction, The sensor, wherein at least a portion of the first electrode is between the first region and the first member in the third direction.

2. the first electrode extends along the second direction; The sensor of claim 1 , wherein the second electrode extends along the second direction.

3. The sensor according to claim 1 , wherein the first electrode and the second electrode are configured such that electrical resistance between the first electrode and the second electrode changes depending on a detection target around the element portion.

4. The first member does not overlap the second region in the third direction, or the first member includes a first overlapping portion that overlaps with the first region in the third direction and a second overlapping portion that overlaps with the second region in the third direction; 2. The sensor of claim 1, wherein a first amount of the oxide per unit area in the first overlapping portion is greater than a second amount of the oxide per unit area in the second overlapping portion.

5. the first surface further includes a first inter-electrode region and a second inter-electrode region; a position of the first inter-electrode region in the first direction and a position of the second inter-electrode region in the first direction are between a position of the second electrode in the first direction and a position of the first electrode in the first direction, a direction from a second inter-electrode position in the second inter-electrode region in the first direction to a first inter-electrode position in the first inter-electrode region in the first direction is along the second direction; the first inter-electrode region is recessed relative to the second inter-electrode region; The sensor of claim 1 , wherein at least a portion of the first inter-electrode region overlaps with the first member in the third direction.

6. An element portion is provided, The element portion is a device layer including a first surface; a first electrode provided on the first surface; a second electrode provided on the first surface, the direction from the second electrode to the first electrode being along a first direction; a first member including an oxide; Including, the first surface includes a first inter-electrode region and a second inter-electrode region; a position of the first inter-electrode region in the first direction and a position of the second inter-electrode region in the first direction are between a position of the second electrode in the first direction and a position of the first electrode in the first direction, a direction from a second inter-electrode position in the second direction of the second inter-electrode region to a first inter-electrode position in the second direction of the first inter-electrode region is along the second direction, the second direction intersects with the first direction, the first inter-electrode region is recessed relative to the second inter-electrode region; At least a portion of the first inter-electrode region overlaps with the first member in a third direction, The third direction intersects a plane containing the first direction and the second direction.

7. The first member does not overlap the second inter-electrode region in the third direction, or the first member includes a first inter-electrode portion overlapping with the first inter-electrode region in the third direction and a second inter-electrode portion overlapping with the second inter-electrode region in the third direction, 7. The sensor of claim 6, wherein a first inter-electrode amount of the oxide per unit area in the first inter-electrode portion is greater than a second inter-electrode amount of the oxide per unit area in the second inter-electrode portion.

8. a substrate; a first fixed portion fixed to the base; Furthermore, the element portion is supported by the first fixing portion, The sensor of any one of claims 1 to 7, wherein there is a first gap between the substrate and the element layer.

9. the first component includes a plurality of first particles including the oxide; the oxide contains at least one selected from the group consisting of tin, zinc, tungsten, molybdenum, and indium, and oxygen; 2. The sensor of claim 1, wherein at least one of the first electrode and the second electrode includes at least one selected from the group consisting of platinum, gold, silver, copper, aluminum, and titanium nitride.

10. forming a liquid film containing an oxide and a solvent in the first recess of a structure including an element layer including a first surface including a first recess and a first electrode provided on the first surface; The method for manufacturing a sensor further comprises removing at least a portion of the solvent to form at least a portion of a first member containing the oxide in the first recess.

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