Substrate processing method and substrate processing apparatus

Abstract

To reduce the amount of particles generated on a substrate when the substrate is dried using a processing fluid in a supercritical state.SOLUTION: The substrate processing apparatus includes a processing container configured to accommodate a substrate, a substrate holding unit configured to horizontally hold the substrate in a state where a surface of the substrate on which a liquid film is formed is directed upward in the processing container, a main supply line connected to a processing fluid supply unit configured to supply a processing fluid in a supercritical state, a first branch supply line and a second branch supply line branched from the main supply line at a first branch point set on the main supply line, a depressurization line branched from the main supply line at a second branch point set on the main supply line at a position on an upstream side of the first branch point, a first discharge unit connected to the first branch supply line and configured to discharge the processing fluid sent from the first branch supply line into the processing container, and a second discharge unit connected to the second branch supply line and configured to discharge the processing fluid sent from the second branch supply line into the processing container.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a substrate processing method and a substrate processing apparatus. [Background technology]

[0002] In recent years, supercritical drying has become common in the manufacture of semiconductor devices. This involves bringing a substrate, the upper surface of which is wet with a processing liquid, into contact with a processing fluid in a supercritical state, replacing the processing liquid with the processing fluid in the supercritical state, thereby drying the substrate. Patent Document 1 describes a supercritical drying method and an apparatus for carrying out this method. Patent Document 1 describes a method in which a supercritical fluid is first supplied into a chamber (processing vessel) from a lower supply port, and then, after the pressure in the chamber reaches critical pressure, a large flow rate of the supercritical fluid is supplied into the chamber from an upper supply port. The supercritical fluid discharged from the lower supply port is configured to collide with a blocking plate and then spread within the chamber to prevent it from directly reaching the substrate. On the other hand, the supercritical fluid discharged from the upper supply port is configured to be directed directly toward the surface of the substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2013-251550 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides techniques that can reduce the amount of particles generated on a substrate when drying the substrate using a processing fluid in a supercritical state. [Means for solving the problem]

[0005] According to one embodiment, the method is performed using a substrate processing apparatus including: a processing vessel for accommodating a substrate; a substrate holder for holding the substrate horizontally in the processing vessel with the surface of the substrate, on which a liquid film is formed, facing upward; a main supply line connected to a processing fluid supply unit for supplying a processing fluid in a supercritical state; a first branch supply line and a second branch supply line branching from the main supply line at a first branch point set in the main supply line; a first discharge unit connected to the first branch supply line and discharging the processing fluid sent from the first branch supply line toward a space below the substrate held by the substrate holder in the processing vessel; a second discharge unit connected to the second branch supply line and discharging the processing fluid sent from the second branch supply line toward a space above the surface of the substrate in the processing vessel; a discharge unit for discharging the processing fluid from the processing vessel; and a discharge line connected to the discharge unit. A substrate processing method is provided, comprising: a pressure-boosting process in which, while the substrate on which the liquid film is formed is held by the substrate holding part and accommodated in the processing vessel, a pressure in the processing vessel is increased to a predetermined processing pressure by supplying a processing fluid into the processing vessel; and a circulation process in which, after the pressure-boosting process, a processing fluid is supplied from the second discharge part into the processing vessel and the processing fluid in the processing vessel is discharged from the discharge part while maintaining the pressure in the processing vessel at the processing pressure, wherein the pressure-boosting process comprises a first pressure-boosting stage in which the pressure in the processing vessel is increased to a predetermined switching pressure by supplying a processing fluid from the first discharge part into the processing vessel; and a second pressure-boosting stage in which, after the first pressure-boosting stage, a processing fluid is supplied from the second discharge part into the processing vessel to increase the pressure in the processing vessel from the switching pressure to the processing pressure. [Effects of the Invention]

[0006] According to the present disclosure, it is possible to reduce the amount of particles generated on a substrate when the substrate is dried using a processing fluid in a supercritical state. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a piping diagram of a supercritical drying apparatus according to an embodiment. [Figure 2A] FIG. 4 is a schematic diagram showing an example of a specific configuration of a second discharge section as viewed from above. [Figure 2B] FIG. 4 is a schematic side view showing an example of a specific configuration of a second discharge section. [Figure 3A] 1 is a diagram illustrating a series of steps in a supercritical drying method according to an embodiment of the present invention. [Figure 3B] 1 is a diagram illustrating a series of steps in a supercritical drying method according to an embodiment of the present invention. [Figure 3C] 1 is a diagram illustrating a series of steps in a supercritical drying method according to an embodiment of the present invention. [Figure 3D] 1 is a diagram illustrating a series of steps in a supercritical drying method according to an embodiment of the present invention. [Figure 3E] 1 is a diagram illustrating a series of steps in a supercritical drying method according to an embodiment of the present invention. [Figure 3F] 1 is a diagram illustrating a series of steps in a supercritical drying method according to an embodiment of the present invention. [Figure 4] FIG. 10 is a schematic diagram of a supercritical drying device according to a modified embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] A supercritical drying apparatus as an embodiment of a substrate processing apparatus will be described with reference to the accompanying drawings. The supercritical drying apparatus can be used to perform a supercritical drying process on a substrate W having a liquid film (e.g., IPA (isopropyl alcohol)) attached to its surface, by using a processing fluid (e.g., carbon dioxide) in a supercritical state to dry it. The substrate W is, for example, a semiconductor wafer, but may also be other types of substrates (e.g., glass substrates, ceramic substrates) used in the technical field of semiconductor device manufacturing. The supercritical drying technique can be advantageously used to dry substrates on which fine patterns with high aspect ratios are formed, because surface tension that can cause pattern collapse does not act on the pattern.

[0009] 1, the supercritical drying apparatus includes a processing unit 10 in which supercritical drying processing is performed. The processing unit 10 includes a processing vessel 12 and a substrate holding tray 14 (hereinafter simply referred to as “tray 14”) that holds substrates W in the processing vessel 12.

[0010] In one embodiment, the tray 14 has a lid 16 that covers an opening in the sidewall of the processing vessel 12, and a horizontally extending substrate support plate (substrate holder) 18 (hereinafter simply referred to as the "plate 18") connected to the lid 16. The substrate W is placed horizontally on the plate 18 with its front surface (the surface on which the device or pattern is formed) facing upward. The plate 18 is, for example, rectangular or square. The area of ​​the plate 18 is larger than that of the substrate W, and when the substrate W is placed at a predetermined position on the plate 18 and viewed from directly below, the substrate W is completely covered by the plate 18.

[0011] The tray 14 can be moved horizontally between a processing position (closed position) and a substrate transfer position (open position) by a tray moving mechanism (not shown). At the processing position, the plate 18 is located within the interior space of the processing vessel 12, and the lid 16 closes the opening in the sidewall of the processing vessel 12 (the state shown in FIG. 1). At the substrate transfer position, the plate 18 is located outside the processing vessel 12, allowing the transfer of substrates W between the plate 18 and a substrate transport arm (not shown). The movement direction of the tray 14 is, for example, the left-right direction in FIG. 1. The movement direction of the tray 14 may also be perpendicular to the plane of FIG. 1, in which case the lid 16 can be provided on the rear or front side of the plate 18 in the figure.

[0012] When the tray 14 is in the processing position, the plate 18 divides the internal space of the processing vessel 12 into an upper space 12A above the plate 18, where the substrate W is present during processing, and a lower space 12B below the plate 18. However, the upper space 12A and the lower space 12B are not completely separated. A gap serving as a communication path connecting the upper space 12A and the lower space 12B is formed between the peripheral edge of the tray 14 in the processing position and the inner wall surface of the processing vessel 12. Furthermore, a through-hole may be provided in the plate 18 near the lid 16, connecting the upper space 12A and the lower space 12B.

[0013] As described above, if the internal space of processing vessel 12 is divided into upper space 12A and lower space 12B and a communication passage is provided to connect upper space 12A and lower space 12B, tray 14 (plate 18) may be configured as a substrate mounting table (substrate holder) that is immovably fixed inside processing vessel 12. In this case, with a lid (not shown) provided on processing vessel 12 open, a substrate transfer arm (not shown) enters the vessel body, and substrates W are transferred between the substrate mounting table and the substrate transfer arm.

[0014] The processing vessel 12 has a first discharge part 21 and a second discharge part 22 for discharging a processing fluid (here, carbon dioxide (also referred to as "CO2" for convenience)) supplied from a supply source 30 of a supercritical fluid (a processing fluid in a supercritical state) into the internal space of the processing vessel 12.

[0015] The first discharge unit 21 is provided below the plate 18 of the tray 14 in the processing position. The first discharge unit 21 discharges CO2 into the lower space 12B toward the lower surface of the plate 18. The first discharge unit 21 may be configured as a through-hole formed in the bottom wall of the processing vessel 12. The first discharge unit 21 may also be a nozzle body attached to the bottom wall of the processing vessel 12.

[0016] The second discharge unit 22 is provided to be located to the side of the substrate W placed on the plate 18 of the tray 14 in the processing position. The second discharge unit 22 can be provided, for example, on one side wall (first side wall) of the processing vessel 12 or in its vicinity. The second discharge unit 22 supplies CO2 into the upper space 12A toward a region slightly above the surface of the substrate W. The second discharge unit 22 is preferably configured to flow CO2 along the upper surface (surface) of the substrate W approximately evenly in the region above the substrate W over the entire diameter of the substrate W. Specific configuration examples of the second discharge unit 22 will be described later.

[0017] The processing vessel 12 further includes a fluid discharge unit 24 that discharges the processing fluid from the internal space of the processing vessel 12. The fluid discharge unit 24 can be formed as a header made of a horizontally extending pipe-shaped member having a plurality of holes, similar to the second discharge unit 22. The fluid discharge unit 24 can be provided, for example, on the side wall (second side wall) opposite to the first side wall of the processing vessel 12 on which the second discharge unit 22 is provided, or in the vicinity thereof.

[0018] The fluid discharge unit 24 can be disposed at any position as long as the CO2 supplied into the processing vessel 12 from the second discharge unit 22 passes through the region above the substrate W on the plate 18 and is then discharged from the fluid discharge unit 24. That is, for example, the fluid discharge unit 24 may be provided at the bottom of the processing vessel 12 near the second side wall. In this case, the CO2 passes through the region above the substrate W in the upper space 12A, flows into the lower space 12B through a communication path provided at the periphery of the plate 18 (or a through-hole formed in the plate 18), and is then discharged from the fluid discharge unit 24.

[0019] Next, we will explain the supply / discharge system that supplies and discharges CO2 to and from the processing vessel 12 in the supercritical drying apparatus. In the piping system diagram shown in Figure 1, the circled T indicates a temperature sensor, and the circled P indicates a pressure sensor. The OLF indicates an orifice (fixed throttle) that reduces the pressure of the CO2 flowing in the downstream piping to a desired value. The SV indicates a safety valve (relief valve) that prevents damage to the piping or the processing vessel 12, or other components of the supercritical drying apparatus, due to unexpected excessive pressure. The F indicates a filter that removes particles and other contaminants contained in the CO2. The CV indicates a check valve. The FV indicates a flow meter. The H indicates a heater that regulates the temperature of the CO2. When it is necessary to distinguish one of the above various components from another, a number will be added to the end of the alphabet (for example, "filter F2"). Components with reference symbol VN (N is a natural number) are on-off valves, and ten on-off valves V1 to V10 are depicted in Figure 1.

[0020] The supercritical drying apparatus has a supercritical fluid supply device 30 as a supply source (30) of supercritical fluid (supercritical CO2). The supercritical fluid supply device 30 has a well-known configuration including, for example, a carbon dioxide gas cylinder, a pressure pump, a heater, etc. The supercritical fluid supply device 30 has the ability to deliver supercritical CO2 at a pressure exceeding the supercritical state guarantee pressure (specifically, approximately 16 MPa) described below.

[0021] A main supply line 32 is connected to the supercritical fluid supply device 30. CO2 flows out of the supercritical fluid supply device 30 into the main supply line 32 in a supercritical state, but may become gaseous due to subsequent expansion or temperature changes. In this specification, a member referred to as a "line" may be constituted by a pipe (a piping member).

[0022] The main supply line 32 branches into a first supply line (first branch supply line) 34 and a second supply line (second branch supply line) 36 at a branch point (first branch point) 33. The first supply line 34 is connected to a first discharge unit 21 of the processing vessel 12. The second supply line 36 is connected to a second discharge unit 22 of the processing vessel 12.

[0023] An exhaust line 38 is connected to the fluid exhaust section 24 of the processing vessel 12. A pressure regulating valve 40 is provided in the exhaust line 38. By adjusting the aperture of the pressure regulating valve 40, the primary pressure of the pressure regulating valve 40 can be adjusted, and therefore the pressure inside the processing vessel 12 can be adjusted. In addition, by adjusting the aperture of the pressure regulating valve 40, the exhaust rate of the processing fluid from the processing vessel 12 can also be adjusted.

[0024] A control unit 100, shown schematically in FIG. 1, feedback-controls the aperture (specifically, the position of the valve element) of the pressure regulating valve 40 based on the deviation between the measured value (PV) and the set value (SV) of the pressure in the processing vessel 12 so that the pressure in the processing vessel 12 is maintained at the set value. The measured value of the pressure in the processing vessel 12 can be, for example, a value detected by a pressure sensor designated PS, which is provided between the on-off valve V3 of the exhaust line 38 and the processing vessel 12, as shown in FIG. 1. That is, the pressure in the processing vessel 12 can be measured directly by a pressure sensor provided in the processing vessel 12, or indirectly by a pressure sensor (PS) provided outside the processing vessel 12 (in the exhaust line 38). The pressure regulating valve 40 can be set to a fixed aperture (not feedback-controlled) based on a command value from the control unit 100.

[0025] The control unit 100 is, for example, a computer, and includes an arithmetic unit 101 and a memory unit 102. The memory unit 102 stores programs that control various processes executed in the supercritical drying apparatus (or a substrate processing system including the supercritical drying apparatus). The arithmetic unit 101 controls the operation of the supercritical drying apparatus by reading and executing the programs stored in the memory unit 102. The programs may be recorded on a computer-readable storage medium and installed from the storage medium into the memory unit 102 of the control unit 100. Examples of computer-readable storage media include a hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnetic optical disk (MO), and a memory card.

[0026] A bypass line 44 branches off from the first supply line 34 at a branch point 42 set on the first supply line 34. The bypass line 44 is connected to the discharge line 38 at a connection point (junction) 46 set on the discharge line 38. The connection point 46 is located upstream of the pressure regulating valve 40.

[0027] A branch discharge line 50 branches off from the discharge line 38 at a branch point 48 set in the discharge line 38 upstream of the pressure regulating valve 40. The downstream end of the branch discharge line 50 is, for example, open to the atmosphere outside the supercritical drying apparatus or connected to a factory exhaust duct.

[0028] Two branch discharge lines 54, 56 branch off from the discharge line 38 at a branch point 52 set in the discharge line 38. The downstream ends of the branch discharge lines 54, 56 merge back into the discharge line 38. The downstream end of the discharge line 38 is connected to, for example, a fluid recovery device (not shown). Useful components (e.g., IPA (isopropyl alcohol)) contained in the CO2 recovered by the fluid recovery device are separated as appropriate and reused. As shown in FIG. 1, the downstream end of the branch discharge line 50 may be merged with the discharge line 38.

[0029] A purge gas supply line 62 is connected to a junction 60 set in the first supply line 34 between the branch point 42 and the processing vessel 12. A purge gas can be supplied to the processing vessel 12 through the purge gas supply line 62.

[0030] A discharge line 66 for discharging the treatment fluid branches off from a branch point (second branch point) 64 set on the main supply line 32 immediately upstream of the branch point (first branch point) 33. This discharge line 66 will hereinafter be referred to as the "depressurization line 66" to distinguish it from the discharge line 38.

[0031] An example of the configuration of the second discharge unit 22 will be described with reference to FIGS. 2A and 2B. The second discharge unit 22 has a pipe-shaped member 221 connected to a second supply line 36. The pipe-shaped member 221 has a discharge region 222 exposed to the internal space of the processing vessel 12 (particularly the upper space 12A). A plurality of discharge ports 223 are formed in the discharge region 222 of the pipe-shaped member 221. The second supply line 36 branches into two and is connected to both ends of the discharge region 222. CO2 supplied from the second supply line 36 flows as shown by the arrows in the figure and is supplied into the processing vessel 12 from the discharge ports 223. Note that the configuration of the second discharge unit 22 is not limited to that shown in FIGS. 2A and 2B.

[0032] Next, an example of a supercritical drying method (substrate processing method) using the above-mentioned supercritical drying apparatus will be described with reference to Figures 3A to 3F. The procedure described below is automatically executed under the control of the control unit 100 based on the processing recipe and control program stored in the storage unit 102. In Figures 3A to 3F, on-off valves shaded in gray are in the closed state, and on-off valves that are not shaded are in the open state.

[0033] [Delivery process] A substrate W such as a semiconductor wafer, with the recesses of the pattern on its surface filled with IPA and a puddle (liquid film) of IPA formed on its surface, is placed by a substrate transport arm (not shown) on the plate 18 of a tray 14 waiting at a substrate transfer position. Note that this substrate W has been sequentially subjected to, for example, (1) chemical processing such as wet etching or chemical cleaning, (2) a rinsing process in which the chemical solution is washed away with a rinsing liquid, and (3) an IPA substitution process in which the rinsing liquid is replaced with IPA to form a puddle (liquid film) of IPA, in a single-wafer cleaning apparatus (not shown). When the tray 14 with the substrate W placed thereon moves to the processing position, a sealed processing space is formed within the processing vessel 12, and the substrate W is positioned within the processing space.

[0034] [Pressure increase process] Next, the pressure increase step is carried out. The pressure increase step is divided into an initial deceleration pressure increase stage and a subsequent normal pressure increase stage, and the normal thickness increase stage is further divided into a first normal thickness increase stage using the first supply line 34 and a second normal thickness increase stage using the second supply line 36.

[0035] Note that from the start of the pressurization step to the end of the depressurization step, the on-off valves V6, V7, V8, and V11 are normally closed, and no reference will be made to these on-off valves. Note that the on-off valve V8 may be normally closed during the pressurization and circulation steps and open during the depressurization step. The on-off valve V8 may be normally closed from the start of the pressurization step to the end of the depressurization step, or may be opened at an appropriate timing as needed. When the on-off valve V8 is opened, exhaust can be performed without passing through the pressure adjustment valve 40, thereby shortening the exhaust or depressurization time. Note that the following description will be given on the assumption that the on-off valve V8 is normally closed.

[0036] <Deceleration boost stage> First, as shown in Fig. 3A, the on-off valves V2, V3, V6, and V7 are closed, and the on-off valves V1, V4, V9, and V10 are opened. During this deceleration pressure-boosting stage, the aperture of the pressure regulating valve 40 is fixed to an appropriate fixed aperture, for example, 2.5%, corresponding to an aperture command value from the control unit 100. In other words, feedback control of the aperture of the pressure regulating valve 40 (for example, control to maintain the primary pressure of the pressure regulating valve 40 constant) is not performed. The aperture of the pressure regulating valve 40 is maintained at the fixed aperture (although it may be changed) until the second normal pressure-boosting stage described below is completed.

[0037] A portion (e.g., about 35%) of the CO2 sent in a supercritical state from the supercritical fluid supply device 30 to the main supply line 32 is discharged from a depressurization line 66 provided with an orifice OLF, and the remainder flows into the first supply line 34. A portion (e.g., about 35%) of the CO2 that has flowed into the first supply line 34 flows into the processing vessel 12 via the first discharge part 21. The remainder of the CO2 that has flowed through the first supply line 34 does not flow into the processing vessel 12 but flows into the discharge lines 38 and 50 through the bypass line 44 and is blocked by the on-off valves V5 to V8, which are in a closed state.

[0038] At this time, by changing the opening degree of the pressure regulating valve 40, it is possible to adjust the ratio of the flow rate of CO 2 flowing into the processing vessel 12 to the flow rate of CO 2 flowing through the bypass line 44.

[0039] Immediately after the start of the deceleration / pressure increase phase, the pressure of the CO2 delivered in a supercritical state from the supercritical fluid supply device 30 gradually decreases, but the decrease is particularly significant when the CO2 flows into the relatively large processing vessel 12, which is at atmospheric pressure. That is, at the beginning of the introduction of CO2 into the processing vessel 12, the pressure of CO2 in the processing vessel 12 is lower than the critical pressure (e.g., approximately 8 MPa), so the CO2 is in a gaseous state. Because the difference between the pressure in the first supply line 34 and the pressure in the processing vessel 12, which is at atmospheric pressure, is very large, CO2 flows into the processing vessel 12 at a high flow rate immediately after the start of the deceleration / pressure increase phase. If CO2 (especially CO2 in a gaseous state at a high rate) collides with the substrate W or flows near the substrate W, the IPA puddle at the peripheral edge of the substrate W may collapse (local evaporation or fluctuation), which may result in pattern collapse.

[0040] In this embodiment, since the orifice (OLF) is provided in the first supply line 34, the flow rate of CO2 flowing from the first discharge unit 21 into the processing chamber 12 is lower than that in the case where there is no orifice, which makes it possible to suppress pattern collapse due to the above-mentioned mechanism.

[0041] In this embodiment, CO2 flowing into the processing vessel 12 from the first discharge unit 21 collides with the plate 18 of the tray 14, then bypasses the plate 18 and enters the upper space 12A where the substrate W is present (see the arrow in FIG. 3A). Therefore, when the gaseous CO2 reaches the vicinity of the substrate W, the flow rate of the CO2 is relatively low. This makes it possible to suppress pattern collapse due to the above-mentioned mechanism.

[0042] Even if CO2 collides with the plate 18 and then bypasses the plate 18 to enter the upper space 12A, if the flow rate of CO2 flowing into the processing vessel 12 is high, the flow rate of CO2 may be high enough to cause pattern collapse when it reaches the vicinity of the periphery of the substrate W. However, in this embodiment, during the deceleration and pressurization stage, i.e., the initial stage of CO2 introduction into the processing vessel 12, some of the CO2 flowing through the main supply line 32 is vented to the depressurization line 66, and further, some of the CO2 flowing through the first supply line 34 is vented to the bypass line 44. This further reduces the flow rate of CO2 flowing into the processing vessel 12 from the first discharge unit 21, thereby more reliably preventing pattern collapse due to the above mechanism.

[0043] The above-described mechanism of pattern collapse can occur only in the initial stage of CO2 introduction into the processing vessel 12. This is because the flow rate of CO2 flowing into the processing vessel 12 via the first discharge unit 21 decreases as the pressure inside the processing vessel 12 increases. Therefore, it is sufficient to perform the deceleration pressure increase stage for a relatively short period of time, for example, about 10 to 20 seconds. For example, the deceleration pressure increase stage is performed for about 20 seconds, during which the internal pressure of the processing vessel 12 increases from atmospheric pressure to 4 MPa.

[0044] Another advantage of providing the deceleration pressure increase stage is that it is not necessary to extremely reduce the diameter of the orifice (OLF) of the first supply line 34. This makes it possible to shorten the pressure increase time when CO2 is supplied from the first supply line 34 to the processing vessel 12.

[0045] <First normal boost stage (first boost stage)> 3B, the on-off valve V10 is closed to stop the discharge of CO2 from the main supply line 32 via the depressurization line 66. The transition from the deceleration pressurization stage to the first normal pressurization stage may be performed after a predetermined time (e.g., 20 seconds as described above) has elapsed since the start of the deceleration pressurization stage, or may be performed when the pressure inside the processing vessel 12 reaches a predetermined pressure (e.g., 4 MPa as described above). The pressure inside the processing vessel 12 can be detected, for example, by a pressure sensor PS (hereinafter also referred to as "pressure sensor PS12") provided on the discharge line 38 near the fluid discharge portion 24 of the processing vessel 12.

[0046] In the first normal pressurization stage, the pressure in the treatment vessel 12 increases at a higher pressurization rate than in the decelerated pressurization stage, due to the absence of CO2 discharge through the depressurization line 66. At the same time, the pressure in the lines 44, 38, 50, 54, and 56, the downstream ends of which are blocked by the on-off valves V5 to V8, also increases.

[0047] When the pressure inside the processing vessel 12 exceeds the critical pressure of CO2 (approximately 8 MPa), the CO2 (CO2 not mixed with IPA) present inside the processing vessel 12 becomes supercritical. When the CO2 inside the processing vessel 12 becomes supercritical, the IPA on the substrate W begins to dissolve into the CO2 in the supercritical state.

[0048] <Depressurization stage> When the detection value of the pressure sensor PS12 (i.e., the pressure inside the processing vessel 12) reaches the predetermined switching pressure of 13 MPa, as shown in FIG. 3C, the on-off valve V9 is closed and the on-off valve V10 is opened. This state is maintained for a short time, e.g., 0.5 seconds. This reduces the pressure in the second supply line 36 upstream of the closed on-off valve V2 and in the main supply line 32 immediately upstream of the branch point 33 to approximately 15 MPa.

[0049] Immediately before the transition from the first normal pressurization stage to the second normal pressurization stage, the internal pressure of the second supply line 36 upstream of the closed on-off valve V2 and the main supply line 32 immediately upstream of the branch point 33 is, for example, approximately 17 MPa, and the pressure inside the processing vessel 12 is, as described above, 13 MPa. In contrast, the filter F (also referred to as "filter F2") installed in the second supply line 36 can withstand a differential pressure of, for example, 3 MPa. If the on-off valve V2 were suddenly opened in this state, a differential pressure of 4 MPa would be applied across the filter F2, potentially damaging the filter F2 (filter element). By performing the depressurization stage described above, damage to the filter F2 can be prevented when the on-off valve V2 is opened. Note that the primary pressure of the on-off valve V2 must not be lower than the secondary pressure due to depressurization. This would allow CO2 (containing IPA containing particle-causing substances) to flow from the processing vessel 12 into the second discharge port 22 when the on-off valve V2 is opened.

[0050] The reason why it is desirable to prevent CO2 containing IPA from flowing into the second discharge part 22 from the processing vessel 12 is described in detail in the description of the effects of the embodiment at the end of the specification.

[0051] When this depressurization step is performed, the on-off valve V1 is kept open, and the supply of CO2 to the processing vessel 12 is not stopped. If the supply of CO2 (which is at a relatively high temperature) to the processing vessel 12 is stopped, the CO2 in the processing vessel 12 may lose heat to the tray 14, causing a temporary drop in the pressure inside the processing vessel 12. This is because the tray 14 is exposed to the ambient atmosphere at room temperature when the substrates W are loaded and unloaded, and therefore has the lowest temperature among the components facing the space inside the processing vessel 12 (the processing vessel inner wall, the nozzle, etc.).

[0052] A similar problem may occur with the filter F (also referred to as "filter F1") provided in the first supply line 34 at the start of the deceleration pressurization stage. However, for the following reasons, there is no risk of a differential pressure exceeding the differential pressure resistance of the filter F1 being applied to the filter F1. (Reason 1) Immediately before the start of the deceleration pressurization stage, the on-off valve V9 is closed and the main supply line 32 has an orifice OLF. Therefore, immediately after the on-off valve V9 is opened, the internal pressure of the main supply line 32 downstream of the orifice OLF does not suddenly increase. (Reason 2) The deceleration pressurization stage is performed with the on-off valve V10 open, and an orifice OLF is provided in the first supply line 34 upstream of the filter F1. Therefore, the primary side pressure of the filter F1 does not suddenly increase.

[0053] <Second normal boost stage (second boost stage)> Immediately after the depressurization step is completed, as shown in FIG. 3D , the on-off valves V1, V4, and V10 are closed, and the on-off valves V2, V3, and V5 are opened. Then, the CO2 flowing through the main supply line 32 flows into the processing vessel 12 via the second supply line 36 and the second outlet 22. No more CO2 flows into the processing vessel 12 via the first supply line 36 and the first outlet 21. By discharging CO2 from the second outlet 22 early in this manner, the amount of CO2 (which contains IPA containing particle-causing substances) flowing from the processing vessel 12 into the second outlet 22 can be at least significantly reduced (as will be described in detail later).

[0054] During the second normal pressure increase stage, the on-off valves V3 and V5 are open, and therefore a portion of the CO2 that has flowed into the processing vessel 12 is discharged through the exhaust line 38. The CO2 discharged through the exhaust line 38 contains IPA that was on the surface of the substrate W. At this time, the opening of the pressure adjustment valve 40 is small, for example, about 2.5%, and therefore the flow rate of CO2 discharged from the processing vessel 12 through the exhaust line 38 is relatively small. As a result, the pressure within the processing vessel 12 continues to increase. In this way, by increasing the pressure while discharging CO2 from the processing vessel 12, it is possible to prevent particles and particle-causing substances present within the processing vessel 12 from remaining within the processing vessel 12 and contaminating the substrate W.

[0055] Because the pressures in the lines 44, 38, 50, 54, and 56 are approximately equal to the pressure in the processing vessel 12 immediately before the start of the second normal pressure increase phase (because the on-off valves V5 to V8 are closed), the pressure in the processing vessel 12 does not drop suddenly immediately after the on-off valves V3 and V5 are switched to the open state. If the pressure in the processing vessel 12 drops suddenly, the CO2 may undergo a phase change, resulting in pattern collapse or an increase in particles. In other words, venting CO2 through the bypass line not only reduces the flow rate into the processing vessel 12 during the deceleration pressure increase phase, but also prevents a sudden drop in the pressure in the processing vessel 12 at the start of the second normal pressure increase phase.

[0056] The second normal pressure increase stage is continued until the pressure in the processing vessel 12 reaches a pressure (supercritical state guarantee pressure) that ensures that the mixed fluid (CO2 + IPA) on the substrate W is maintained in a supercritical state, regardless of the IPA concentration in the mixed fluid and the temperature of the mixed fluid. The supercritical state guarantee pressure is approximately 16 MPa. Once the pressure in the processing vessel 12 reaches the supercritical state guarantee pressure, pattern collapse due to local phase changes (e.g., vaporization) of the mixed fluid on the substrate W no longer occurs. Note that such local phase changes occur due to non-uniform IPA concentration in the mixed fluid on the substrate W, and may occur particularly in regions exhibiting an IPA concentration that increases the critical temperature.

[0057] <Distribution process> When the pressure sensor PS12 detects that the pressure inside the processing vessel 12 has reached the supercritical state guarantee pressure (16 MPa), the operation mode of the pressure regulating valve 40 is switched to a feedback control mode. That is, the control unit 100 (or its subordinate controller) performs feedback control to adjust the aperture (operated variable MV) of the pressure regulating valve 40 based on the deviation between the pressure inside the processing vessel 12 detected by the pressure sensor PS12 (measured value PV) and the set value SV so that the pressure inside the processing vessel 12 is maintained at the set value (set value SV = 16 MPa). At this time, the aperture of the pressure regulating valve 40 fluctuates within a range of, for example, 30 to 50%.

[0058] When performing feedback control of the pressure regulating valve 40, the control unit 100 may send a command to the pressure regulating valve 40 to set the initial opening, which is the opening at the start of feedback control of the pressure regulating valve 40, to, for example, the average opening of the pressure regulating valve 40 in the previous circulation stage. This can suppress fluctuations in the pressure inside the processing vessel 12 at the start of feedback control, stabilizing the control.

[0059] The open / closed state of each on-off valve in the circulation stage is the same as that in the second normal pressure increase stage shown in FIG. 3D, and only the control mode and opening degree of the pressure regulating valve 40 are different.

[0060] In the flow process, supercritical CO2 supplied from the second discharge unit 22 into the processing vessel 12 flows in the region above the substrate and is then discharged from the fluid discharge unit 24. At this time, a laminar flow of supercritical CO2 flowing approximately parallel to the surface of the substrate W is formed in the processing vessel 12. IPA in the mixed fluid (IPA+CO2) on the surface of the substrate W exposed to the laminar flow of supercritical CO2 is gradually replaced with supercritical CO2. Eventually, almost all of the IPA on the surface of the substrate W is replaced with supercritical CO2.

[0061] The mixed fluid consisting of IPA and supercritical CO2 discharged from the fluid discharge portion 24 flows through the discharge line 38 (and the branch discharge lines 54, 56) and is then recovered. The IPA contained in the mixed fluid can be separated and reused. Note that in the circulation process, the on-off valves V6, V7 may be opened or closed depending on the desired flow rate, etc.

[0062] [Discharge process] Once the replacement of IPA with supercritical CO2 is complete, as shown in FIG. 3E, on-off valve V2 is closed to stop the supply of CO2 to the processing vessel 12, and the set pressure of the processing vessel 12 is lowered to atmospheric pressure (time t4 in FIG. 3). This causes the pressure adjustment valve 40 to open significantly (for example, fully open), and the pressure inside the processing vessel 12 gradually drops to atmospheric pressure. As a result, the supercritical CO2 present within the pattern on the substrate W becomes gaseous and escapes from the pattern, and the gaseous CO2 is discharged from the processing vessel 12. Finally, as shown in FIG. 3F, on-off valve V4 on the bypass line 44 is opened to remove CO2 remaining between on-off valves V1 and V4. This completes the drying of the substrate W.

[0063] [Export process] The plate 18 of the tray 14 carrying the dried substrate W moves out of the processing vessel 12 to the substrate transfer position. The substrate W is removed from the plate 18 by a substrate transport arm (not shown) and is placed in, for example, a substrate processing vessel (not shown).

[0064] According to the above embodiment, the following advantageous effects are achieved.

[0065] Assume the following comparative example. CO2 is supplied to the processing vessel 12 from the first outlet 21 throughout the entire pressure increase process, which increases the pressure in the processing vessel 12 from atmospheric pressure to a supercritical-state-guaranteed pressure (16 MPa). Once the pressure in the processing vessel 12 reaches the supercritical-state-guaranteed pressure, the CO2 supply route to the processing vessel 12 is switched from the first supply line 34 (first outlet 21) to the second supply line 36 (second outlet 22), and a flow process is performed. (Note that, for simplicity, this switching will also be referred to simply as "switching the supply route" hereinafter.) This can result in the following: While the pressure in the processing vessel 12 increases from 7 MPa to 14 MPa, most of the IPA puddle on the substrate W diffuses into the CO2. The diffused IPA contains particle-causing substances (particle-causing substances originally dissolved in the IPA or particle-causing substances derived from deposits peeled off from the inner wall of the processing vessel 12 or the surface of the tray 14). Thereafter, while the pressure inside the processing vessel 12 increases to 16 MPa, the CO2 containing IPA is forced into the second discharge part 22 (e.g., the pipe-shaped member 221) and further into the upstream piping (downstream of the filter F2). The IPA forced into the second discharge part 22 and its interior is sprayed from the second discharge part 22 when CO2 is supplied from the second discharge part 22 into the processing vessel 12, contaminating the substrate W. In this case, it has been confirmed that particle contamination occurs intensively in a portion of the substrate W close to the second discharge part 22.

[0066] In contrast, according to the above embodiment, before the pressure inside the processing vessel 12 reaches the supercritical state guarantee pressure (when the pressure reaches 13 MPa in the above embodiment), the supply route of CO2 to the processing vessel 12 is switched from the first discharge part 21 to the second discharge part 22. This significantly prevents CO2 containing IPA from being forced into the second discharge part 22.

[0067] It should be noted that, because IPA begins to diffuse into the processing vessel 12 when the pressure inside the processing vessel 12 exceeds the critical pressure of CO2 (approximately 8 MPa), it is considered preferable to switch the supply route at this point. However, experiments have confirmed that switching the supply route too early can also cause problems. Specifically, in the inventor's experiments, when the supply route was switched when the pressure inside the processing vessel 12 was 8 MPa or 11 MPa, an unquantifiable amount of particles adhered to the substrate. The inventor believes the cause of this is as follows: When CO2 is discharged from the second discharge unit 22 while an IPA paddle remains on the substrate surface, the flow of CO2 causes the IPA paddle to detach, resulting in detachment electrification. This is thought to cause particles floating inside the processing vessel 12 or particles contained in the CO2 discharged from the second discharge unit 22 to be adsorbed onto the substrate. The problem of peeling static electricity resistance is also thought to be related to the CO2 discharge conditions (discharge direction, discharge flow rate, etc.) from the second discharge unit 22. Therefore, depending on the discharge conditions, it may not be necessary to increase the switching pressure for switching the supply route to approximately 13 MPa as in the above embodiment. Furthermore, if the problem of peeling static electricity resistance can be resolved by dissipating the charge using some means, it may be possible to set the switching pressure to the critical pressure of CO2 (approximately 8 MPa). Even in the configuration shown in Figure 4 (described later), CO2 discharged from the second discharge unit 22M flows along the substrate surface after colliding with it, so peeling static electricity may occur depending on the discharge conditions.

[0068] The inventors believe that, from the perspective of preventing peeling static electricity, it is most desirable to switch the supply route immediately after the IPA puddle completely disappears from the substrate surface. When actually performing supercritical drying on a substrate (semiconductor wafer) with a 12 mL IPA puddle formed on its surface, the supply route was switched when the pressure inside the processing vessel 12 reached 12 MPa, 13 MPa, and 14 MPa. The number of particles with a size of 20 nm or larger was 224 at 12 MPa, 144 at 13 MPa, and 189 at 14 MPa. The number of particles was lowest when the supply route was switched at 13 MPa. In a separate test, observations were performed using a supercritical monitor (a device that visualizes the conditions inside the processing vessel 12). The IPA puddle disappeared when the pressure inside the processing vessel 12 reached 13.4 MPa. This result is generally consistent with the inference that it is desirable to switch the supply route immediately after the IPA puddle completely disappears from the substrate surface. However, the above experimental results may change slightly depending on the specific configuration of the apparatus and the amount of IPA puddle, etc., so it should not be assumed that the supply route should be switched just when the pressure inside the processing vessel 12 reaches 13 MPa.

[0069] To summarize what has been described so far, it can be said that it is preferable to switch the supply route when the pressure inside the processing vessel 12 is equal to or higher than the critical pressure of CO2 and lower than the supercritical state guarantee pressure (16 MPa) (preferably a pressure close to the pressure at which IPA disappears on the substrate).

[0070] It may be thought that a similar phenomenon (the intrusion of CO2 containing particles) occurs in the first discharge part 21 (which may adversely affect the processing of the next substrate). However, as can be understood by comparing and referring to Figures 3C and 3D, the on-off valves V1 and V4 are closed in a state where the internal pressure of the first discharge part 21 and the first supply line 34 and bypass line 44 connected thereto is elevated, so there is no or almost no intrusion of IPA into the first discharge part 21.

[0071] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive, and the above-described embodiments may be omitted, substituted, or modified in various ways without departing from the scope and spirit of the appended claims.

[0072] For example, the configuration of the processing unit 10 is not limited to that shown in FIG. 1 and may be as schematically shown in FIG. 4 (10M). Components with the same reference numerals in FIGS. 1 and 4 have substantially the same functions. In the modified embodiment shown in FIG. 5, a substrate W is supported by a substrate support member 14M attached to the ceiling of a processing vessel 12M. A liquid film, for example, IPA, is formed on the upper surface of the substrate W. A main supply line 32M connected to a supercritical fluid supply device 30 branches into a first supply line 34M and a second supply line 36M. The processing fluid (CO2) discharged from the first discharge unit 21 connected to the first supply line 34M collides with the shielding plate 70 and then bypasses the shielding plate 70 and flows toward the substrate W. A second discharge unit 22M connected to the second supply line 36M discharges the processing fluid toward the upper surface of the substrate W. CO2 in the processing vessel 12M can be discharged from the fluid discharge unit 24M to the discharge line 38M. Components not shown in detail in Fig. 4 (various valves, filters, various sensors, etc.) can be arranged in the same manner as in Fig. 1. The processing unit 10M shown in Fig. 4 can be used to perform procedures similar to those in the above-described embodiments. [Explanation of symbols]

[0073] W substrate 12 Processing container 14 Substrate holder (tray) 21 1st discharge part 22 2nd discharge part 32 Main Supply Line 34 First branch supply line 36 Second branch supply line

Claims

1. A substrate processing apparatus, a processing vessel for accommodating a substrate; a substrate holder configured to horizontally hold the substrate in the processing vessel with the surface of the substrate on which the liquid film is formed facing upward; a main supply line connected to a processing fluid supply unit that supplies a processing fluid in a supercritical state; a first branch supply line and a second branch supply line branching from the main supply line at a first branch point set on the main supply line; a depressurization line branching off from the main supply line at a second branch point set on the main supply line at a position upstream of the first branch point; a first discharge unit connected to the first branch supply line and configured to discharge the processing fluid sent from the first branch supply line into the processing vessel; a second discharge unit connected to the second branch supply line and configured to discharge the processing fluid sent from the second branch supply line into the processing vessel; A substrate processing apparatus comprising:

2. The substrate processing apparatus of claim 1 , wherein the depressurization line is capable of reducing pressure in the main supply line at least near the second branch point by discharging processing fluid from the main supply line.

3. The substrate processing apparatus according to claim 1 , wherein the depressurization line is provided with an orifice and an on-off valve for opening and closing the depressurization line.

4. an on-off valve provided in the second branch supply line; a filter provided between the on-off valve and the second discharge portion; The substrate processing apparatus of claim 1 , further comprising:

5. a filter provided between the first branch supply line and the first discharge portion; a purge gas supply line provided between the filter and the first discharge portion; The substrate processing apparatus of claim 1 , further comprising:

6. 2. The substrate processing apparatus of claim 1, wherein the first discharge unit is configured to supply a processing fluid toward a space below the substrate held by the substrate holding unit in the processing vessel, and the second discharge unit is configured to supply a processing fluid toward a space above a surface of the substrate held by the substrate holding unit in the processing vessel.

7. a discharge unit that discharges a processing fluid from the processing vessel; a discharge line connected to the discharge section; The substrate processing apparatus of claim 1 , further comprising:

8. The substrate processing apparatus according to claim 7 , further comprising a bypass line branching from the first branch supply line at a branch point provided in the first branch supply line and joining the discharge line.

9. Further provided is an on-off valve that opens and closes the discharge line, The substrate processing apparatus according to claim 8 , wherein the bypass line joins the discharge line downstream of the on-off valve.

10. a first opening / closing valve is provided in the first branch supply line; a second opening / closing valve is provided in the second branch supply line; a third on-off valve is provided in the depressurization line; a fourth on-off valve is provided in the main supply line upstream of the second branch point; The substrate processing apparatus according to claim 1 .

11. a control unit for controlling an operation of the substrate processing apparatus; the control unit executes a pressure increase step of increasing the pressure in the processing vessel to a predetermined processing pressure by supplying a processing fluid into the processing vessel while the substrate on which the liquid film is formed is held by the substrate holding unit and accommodated in the processing vessel; the pressurization step includes a first pressurization stage in which the pressure in the processing vessel is increased to a predetermined switching pressure by supplying a processing fluid from the first outlet into the processing vessel; a second pressurization stage in which the pressure in the processing vessel is increased from the switching pressure to the processing pressure by supplying a processing fluid from the second outlet into the processing vessel after the first pressurization stage; and a depressurization stage performed between the first pressurization stage and the second pressurization stage, an on-off valve is provided in the second branch supply line, The on-off valve is closed during the first pressurization stage and the depressurization stage, and the on-off valve is opened during the second pressurization stage. The substrate processing apparatus according to claim 1 .

12. The substrate processing apparatus of claim 11 , wherein the depressurizing step comprises discharging the processing fluid from the second branch supply line and the main supply line upstream of the on-off valve.

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