Sheet processing apparatus

Abstract

To provide a sheet processing device capable of easily mounting a roll member.SOLUTION: A tape sticking device (sheet processing device) 1 includes at least a shaft 7 that supports a roll member 4 configured by winding a sheet member 6 around a cylindrical core 5, and a rotation support portion (a rotation cylinder 7A and an advancing and retracting cylinder 7B) that rotatably supports the shaft 7, and is used by pulling out the sheet member 6 from an outer periphery of the roll member 4 supported by the shaft 7, and includes an RFID tag 101 in the core 5 of the roll member 4, and a reading unit 102 at a rotation axis of the roll member 4 supported by the shaft 7. For example, the RFID tag 101 is attached to the inner peripheral surface of the core 5, and the reading unit 102 is provided at the axial 7C of the shaft 7.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a sheet processing apparatus in which a strip-shaped sheet member is wound around a rotatable roll member and pulled out from the outer periphery of the roll member. [Background technology]

[0002] For example, in the manufacturing process of semiconductor chips used in various electronic devices, a work set is formed by affixing dicing tape to a disk-shaped wafer and a ring frame arranged around it, and then setting this work set in each processing device to process the wafer.

[0003] A tape application device (tape mounter) is used to apply dicing tape to the wafers and ring frames of such work sets. With regard to such tape application devices, Patent Document 1 proposes placing an RFID (Radio Frequency Identification) tag on a cylindrical core around which a strip-shaped sheet material is wound, placing a reading unit on the outside of a roll member around which the sheet material is wound, reading the information recorded on the RFID tag with this reading unit, and recognizing the type of sheet material, etc., based on the information read.

[0004] However, in the tape application device proposed in Patent Document 1, the distance between the RFID tag and the reading unit is long, so the reading unit needs to use radio waves in the UHF (Ultra High Frequency) band with a frequency of 860 to 960 MHz to increase the radio wave output, which may cause radio wave interference.

[0005] Therefore, Patent Document 2 proposes adopting an RFID system of electromagnetic induction type in a tape application device. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Patent Publication No. 2021-059446 [Patent Document 2] Japanese Patent Application Laid-Open No. 2007-012807 Summary of the Invention [Problem to be solved by the invention]

[0007] However, in an electromagnetic induction RFID system, the RFID tag and the reading unit must be placed close to each other, which means that the roll member must be positioned when being attached to the device, making the attachment of the roll member difficult.

[0008] The present invention has been made in view of the above problems, and an object of the present invention is to provide a sheet processing apparatus that allows easy attachment of a roll member. [Means for solving the problem]

[0009] In order to achieve the above-mentioned object, the present invention provides a sheet processing device that includes at least a shaft that supports a roll member formed by wrapping a sheet member around a cylindrical core, and a rotation support part that rotatably supports the shaft, and that uses the sheet member by pulling it out from the outer periphery of the roll member supported by the shaft, wherein the roll member has an RFID tag on the core and a reading part at the rotation axis of the roll member supported by the shaft. [Effects of the Invention]

[0010] According to the present invention, an RFID tag is placed in the core of the roll member and a reading unit is placed at the rotation axis of the roll member. Therefore, when the roll member is attached to the sheet processing device, the RFID tag and the reading unit are placed close to each other and facing each other, and positioning is required when attaching the roll member. Even if an electromagnetic induction method, which does not cause radio wave interference, is used as the RFID tag reading method, the roll member can be easily attached to the sheet processing device. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a diagram illustrating the overall configuration of a tape applying device which is one embodiment of a sheet processing device according to the present invention; [Figure 2] FIG. [Figure 3] FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along line AA in FIG. [Figure 5] 1 is an exploded perspective view of a main part of a storage section of a tape application device according to a first embodiment of the present invention. FIG. [Figure 6] 1 is a perspective view of a main part of a housing section of a tape application device according to a first embodiment of the present invention. [Figure 7] 1 is a side cross-sectional view showing a rotation support structure for a roll member in a tape application device according to a first embodiment of the present invention. [Figure 8] 1 is a side cross-sectional view showing the rotation support structure for a roll member (in a state where the shaft has moved in the axial direction) in the tape application device according to the first embodiment of the present invention. FIG. [Figure 9] 7A is an enlarged detailed view of part B in FIG. 7, and FIG. 8B is an enlarged detailed view of part C in FIG. [Figure 10] FIG. 10 is a perspective view of a main part of a housing section of a tape application device according to a second embodiment of the present invention. [Figure 11] FIG. 10 is a side cross-sectional view showing a rotation support structure for a roll member in a tape application device according to a second embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

[0013] [Tape application device configuration] First, the overall configuration of a tape application device as one embodiment of a sheet processing device according to the present invention will be described below with reference to Fig. 1. In the following description, the directions indicated by the arrows in Fig. 1 will be referred to as the "X-axis direction," "Y-axis direction," and "Z-axis direction," respectively.

[0014] The tape application device 1 shown in Figure 1 is a device that applies a thin, circular dicing tape T to a thin, disc-shaped wafer W shown in Figure 2 and a ring frame F arranged around it when integrating the two into a work set WS.

[0015] Here, the wafer W is, for example, a thin, disk-shaped member made of single-crystal silicon (Si). The surface (top surface in FIG. 2) of this wafer W is divided into a plurality of rectangular regions by mutually orthogonal dividing lines L1, L2 arranged in a grid pattern, and devices D such as ICs and LSIs are formed in each rectangular region. Although not shown, a protective film for protecting the devices D is attached to the surface of the wafer W.

[0016] The wafer W, which has a large number of devices D formed on its surface, is incorporated into the work set WS shown in Figure 2, and the work set WS is configured by adhering the back surface (the underside in Figure 2) of the disk-shaped wafer W to a dicing tape T that is attached to a metal (e.g., SUS) ring frame F, covering the circular opening of the ring frame F, thereby supporting the wafer W on the ring frame F via the dicing tape T and integrating the wafer W with the ring frame F and dicing tape T.

[0017] 1, the tape application device 1 comprises, as main components, a pair of first and second storage sections 2A and 2B arranged from top to bottom, sheet delivery means 20, sheet delivery unit 30, tape peeling means 40, holding means 50, tape application unit 60, sheet take-up means 70, sheet delivery section 80, and sheet wind-up section 90. The configuration of each of these main components will be described below.

[0018] (First and second storage sections) Since the pair of first and second storage sections 2A and 2B arranged side by side along the X-axis direction have the same basic configuration, the following description of the first and second storage sections 2A and 2B will be given with the same symbols assigned to the same elements.

[0019] The first storage unit 2A and the second storage unit 2B each rotatably support and house a cylindrical roll member 4 within a rectangular box-shaped case 3. The roll member 4 housed within each case 3 of the first storage unit 2A and the second storage unit 2B is configured in a roll shape by wrapping a strip-shaped sheet member 6 around a cylindrical core 5, as shown in FIG. 3, and is rotatably supported by a shaft 7 that is long in the Y-axis direction and inserted through each core 5. Here, the strip-shaped sheet member 6 wrapped around the core 5 is configured by bonding together a base material 6a, an adhesive layer 6b formed on one surface of the base material 6a (the upper surface in FIG. 4), and a protective sheet 6c that protects the adhesive layer 6b, as shown in FIG. 4. The base material 6a and the adhesive layer 6b are precut into a circular shape as a dicing tape T to be attached to the wafer W and ring frame F of the work set WS shown in FIG. 2. The diameter of the dicing tape T is set to be larger than the opening diameter of the ring frame F shown in FIG. 2.

[0020] The base material 6a of the sheet member 6 is made of polyethylene or the like, and the adhesive layer 6b is made of a UV-curable adhesive such as an acrylic resin that hardens when exposed to ultraviolet (UV) light and loses its adhesive strength. The dicing tape T, which is formed by pre-cutting the sheet member 6 into a circle, is formed in multiple pieces at appropriate intervals along the longitudinal direction of the sheet member 6, as shown in Fig. 3, and the sheet member 6 is wound around the core 5 in a roll with the dicing tape T on the outside.

[0021] 1, an opening 3a is formed in the bottom wall 3A of each case 3 of the first storage section 2A and the second storage section 2B, allowing the sheet material 6 drawn from each roll member 4 to pass through, and a leading edge detection section 26 is disposed around the open end of each opening 3a for detecting the leading edge of the sheet material 6. Here, each leading edge detection section 26 uses a transmission-type optical sensor such as a photointerrupter equipped with a light receiving section and a light emitting section.

[0022] 1, a pair of guide rollers 27 are disposed directly below the opening 3a that opens in the bottom wall 3A of each case 3 of the first storage section 2A and the second storage section 2B, and the sheet material 6 pulled out of the case 3 can be guided to the sheet delivery means 20 while applying tension by the guide rollers 27. Note that the first storage section 2A and the second storage section 2B have a characteristic configuration of the present invention, and this will be described in detail later.

[0023] (Means for delivering seats) 1 includes a rotation mechanism 22 attached to the lower end of a support member 21, an arm 23 connected to the rotation mechanism 22, a clamp 24 attached to the tip of the arm 23, and a slide mechanism 25 that moves the support member 21 and the rotation mechanism 22 in the X-axis direction. The clamp 24 grips both ends of the end of the sheet member 6 in the Y-axis direction (width direction).

[0024] Here, rotation mechanism 22 can rotate in the direction of the arrow in the figure to position clamp 24 at first gripping position P1, second gripping position P2, and release position P3. Slide mechanism 25 is composed of guide rail 25a arranged along the X-axis direction, slider 25b movable along guide rail 25a, and a ball screw mechanism (not shown) that moves slider 25b. Slider 25b moves in the X-axis direction along guide rail 25a, thereby moving clamp 24 together with rotation mechanism 22 in the X-axis direction.

[0025] (sheet delivery unit) The sheet feeding unit 30 is configured to include a drive roller 31 that rotates around the sheet member 6 to feed the sheet member 6, two driven rollers 32, and a movement mechanism 33 that moves the drive roller 31 and driven rollers 32 closer to or farther apart in the X-axis direction.

[0026] (Tape peeling means) The tape peeling means 40 peels the dicing tape T (see FIGS. 3 and 4) from the sheet member 6, and includes a guide rail 41 arranged at an angle, a slider 42 that slides along the guide rail 41, and a peel plate 43 attached to the slider 42. The peel plate 43 is used to bend the sheet member 6 with the dicing tape T on the inside between the sheet delivery unit 30 and the sheet winding section 90, thereby peeling the dicing tape T from the sheet member 6, and extends in the Y-axis direction with a length equal to or greater than the width of the sheet member 6.

[0027] (holding means) The holding means 50 includes a cylindrical ring frame holding portion 51 that holds the ring frame F shown in FIG. 2 by suction, and a disk-shaped wafer holding portion 52 that holds the wafer W by suction. The ring frame holding portion 51 and the wafer holding portion 52 are supported by a support base 53, which is movable along the X-axis direction along a base 54 together with the ring frame holding portion 51 and the wafer holding portion 52.

[0028] (Tape application unit) The tape application unit 60 is a unit that applies the dicing tape T, which has been peeled off from the sheet member 6 by the peel plate 43 constituting the tape peeling means 40, to the wafer W held by the holding means 50 and the ring frame F, and is equipped with an application roller 61 that rotates while pressing the dicing tape T. Here, the application roller 61 is rotatably supported at the lower end of an inverted L-shaped support arm 63 that moves up and down in the Z-axis direction along a vertically arranged guide rail 62.

[0029] (Means for taking out sheets) The sheet take-up means 70 takes up the sheet member 6 from the clamp 24 of the sheet delivery means 20, and is provided with a guide rail 71 arranged along the X-axis direction, a slider 72 that is movable along the guide rail 71, and a ball screw mechanism (not shown) that moves the slider 72, a support member 73 that extends upward while bending from the slider 72, and a clamp 74 that takes up and grips the sheet member 6 from the clamp 24 of the sheet delivery means 20 is attached to the upper end of the support member 73. A cutter 77 is arranged above the clamp 74 and is attached to a slider 76 that moves up and down in the Z-axis direction along a guide rail 75.

[0030] (Sheet feeding section) The sheet feed section 80 feeds the sheet member 6 from which the dicing tape T has been peeled in the -X-axis direction, and includes a drive roller 81 and two driven rollers 82. Here, the two driven rollers 82 are rotatably supported on the upper end of a support arm 83, and the support arm 83 is attached to a slider 85 that moves up and down in the Z-axis direction along a vertical guide rail 84 attached to a slider 72 provided on the sheet take-up means 70. Therefore, as the slider 85 moves up and down in the Z-axis direction along the guide rail 84, the pair of driven rollers 82 move closer to or away from the drive roller in the Z-axis direction.

[0031] (Sheet winding section) The sheet winding section 90 is equipped with a winding roller 91 that clamps both ends of the Y-axis direction of the end of the sheet material 6 fed in the -X-axis direction by the sheet feeding section 80 and rotates to wind up the sheet material 6 from which the dicing tape T has been peeled off into a roll, and below this winding roller 91 is provided a trash can 92 for disposing of the sheet material 6 that has been cut to an appropriate length by the cutter 77 and wound up by the winding roller 91.

[0032] [Tape application device operation] Next, the operation of the tape application device 1 configured as above will be described.

[0033] For example, to peel off a circular dicing tape T formed on a sheet member 6 wound around a roll member 4 housed in a case 3 of the first housing unit 2A from the sheet member 6 and adhere it to a wafer W and a ring frame F shown in Fig. 2, as shown in Fig. 1, the roll member 4 is rotated in the direction of the arrow to pass the sheet member 6 between the opening 3a of the case 3 and a pair of guide rollers 27, and the pair of guide rollers 27 feed the sheet member 6 downward. Also, the clamp 24 of the sheet delivery means 20 is positioned at a first gripping position P1 by the rotation mechanism 22 and the slide mechanism 25, and both ends in the Y-axis direction of the end of the sheet member 6 being fed are gripped by the clamp 24.

[0034] Then, the clamp 24 is moved in the +X-axis direction by the slide mechanism 25 of the sheet delivery means 20, and the sheet material 6 is further pulled out from the case 3 of the first storage section 2A. Thereafter, the rotation mechanism 22 rotates, and the sheet material 6, the end of which is gripped by the clamp 24, is hooked onto the guide roller 28, and the sheet material 6 is passed between the drive roller 31 and driven roller 32 of the sheet delivery unit 30 and hooked onto the drive roller 31, and the clamp 24 gripping the end of the sheet material 6 moves to the open position P3.

[0035] Next, the slider 25b of the slide mechanism 25 of the sheet delivery means 20 moves in the +X-axis direction, and the clamp 74 of the sheet take-up means 70 moves to the open position P3. Then, the clamp 74 releases the sheet member 6 at the open position P3, and the clamp 74 of the sheet take-up means 70 takes over and clamps both ends of the end of the sheet member 6 in the Y-axis direction. Then, in this state, the clamp 74 moves in the -X-axis direction, and the sheet member 6, whose end is clamped by the clamp 74, is pulled in the same direction, and the sheet member 6 is guided to the sheet winding unit 90, and its end is gripped by the winding roller 91 of the sheet winding unit 90.

[0036] Then, the moving mechanism 33 of the sheet feed unit 30 moves the two driven rollers 32 closer to the drive roller 31, the sheet material 6 is sandwiched between the drive roller 31 and the two driven rollers 32, the slider 85 of the sheet feed section 80 moves upward together with the driven roller 82, the two driven rollers 82 move closer to the drive roller 81, and the sheet material 6 is sandwiched between the drive roller 81 and the two driven rollers 82, thereby completing preparations for applying the dicing tape T.

[0037] Meanwhile, in the wafer holding portion 52 of the holding means 50, the wafer W is suction-held by the wafer holding portion 52, and the ring frame F is suction-held by the ring frame holding portion 51. From this state, the peel plate 43 descends along the guide rails 41 to move to the tape peeling position, and the adhesion roller 61 rises and is positioned at a position slightly higher than the height position when the dicing tape T is adhered to the wafer W and ring frame F. This brings about a state in which the sheet member 6 passes through the gap between the tip of the peel plate 43 and the adhesion roller 61.

[0038] In the above state, the sheet feed-out unit 80 takes up the sheet member 6, causing the drive roller 81 and driven roller 82 of the sheet feed-out unit 80 to rotate, and the dicing tape T formed on the sheet member 6 is fed toward the peel plate 43. Then, the tip of the peel plate 43 comes into contact with the sheet member 6 and presses against the sheet member 6, bending the sheet member 6 at an acute angle with the protective sheet 6c facing inward, causing the dicing tape T to peel off from the sheet member 6, and the peeled dicing tape T is fed below the application roller 61.

[0039] From the above state, when the application roller 61 is lowered and the holding means 50 is moved in the −X-axis direction along the base 54, the dicing tape T is applied to the wafer W and the ring frame F by the application roller 61. At this time, the sheet delivery unit 80 rotates the drive roller 81 and guides the sheet member 6 from which the dicing tape T has been peeled off by the peel plate 43 to the sheet winding unit 90. Then, in the sheet winding unit 90, the winding roller 91 rotates and winds up the sheet member 6 from which the dicing tape T has been peeled off. When the sheet member 6 has been wound up by the winding roller 91 by a predetermined length, the sheet member 6 is cut by the cutter 77. When the winding roller 91 releases its hold on the wound up rolled sheet member 6, the rolled sheet member 6 falls into and is collected in a trash can 92, completing the application of the dicing tape T to the wafer W and the ring frame F. Thereafter, the same process is repeated, and the dicing tape T is adhered to the wafer W and the ring frame F, thereby forming a continuous work set WS (see FIG. 2).

[0040] [Characteristic configuration of the present invention] Next, an embodiment of the layout structure of the RFID system, which is a characteristic configuration of the present invention, will be described.

[0041] First Embodiment As shown in Figures 5 to 8, in each of the first storage section 2A and the second storage section 2B, the roll member 4 is rotatably supported on the shaft 7 by passing a cylindrical core 5, which is a core material that penetrates the axis of the roll member 4, through the shaft 7.

[0042] Here, as shown in Figures 7 and 8, the shaft 7 has a triple-cylinder structure arranged concentrically, and is composed of a cylindrical rotating cylinder 7A that rotates integrally with the roll member 4, a cylindrical advancing / retreating cylinder 7B that is arranged inside the rotating cylinder 7A and rotates together with the rotating cylinder 7A and the roll member 4, and a cylindrical advancing / retreating shaft 7C that is arranged inside the advancing / retreating cylinder 7B and does not rotate.

[0043] One end (the end in the +Y axis direction) of the rotating cylinder 7A is rotatably supported by a cylindrical bearing block 8 attached to the rear wall 3B of the case 3 via a pair of bearings 9, and a driven pulley 10 is attached to one end of the rotating cylinder 7A. The roll member 4 is inserted into and fixed to the rotating cylinder 7A until one axial end face of the roll member 4 and the core 5 abuts against a flange 7a integrally formed on the outer periphery of one end of the rotating cylinder 7A near the bearing block 8. A ring-shaped stopper 11 is attached to the inner periphery of the rotating cylinder 7A at the location where the flange 7a is formed. Only the rear wall 3B of the case 3 is shown in FIGS. 5 to 8. The bearing block 8 and bearing 9 form a rotation support unit that rotatably supports the rotating cylinder 7A and the reciprocating cylinder 7B of the shaft 7 relative to the reciprocating shaft 7C.

[0044] The retractable cylinder 7B is rotatably supported on the retractable shaft 7C together with the roll member 4 and core 5 by bearings 12 arranged at both axial ends thereof, and is also supported so as to be able to move forward and backward along the axial direction (Y-axis direction) together with the retractable shaft 7C. Here, a plurality of (for example, four) core fixing portions 13 are provided at equal angular intervals (for example, 90° intervals) in the circumferential direction at two axial locations on the rotating cylinder 7A and the retractable cylinder 7B.

[0045] 9, each core fixing portion 13 is composed of a movable block 13a accommodated in a recess 7b formed in the rotating barrel 7A so as to be movable in the radial direction (up and down in FIG. 9), a pressing plate 13b attached to the outer circumferential surface of the movable block 13a, balls (steel balls) 13c fitted into circular holes 7c formed in the bottom of each recess 7b of the rotating barrel 7A so as to be movable in the radial direction, and engagement grooves 13d formed in the outer periphery of the advancing / retreating barrel 7B at positions facing each ball 13c. Here, each engagement groove 13d is composed of a first engagement groove 13d1 with a deep bottom, a second engagement groove 13d2 with a shallow bottom, and a tapered surface 13d3 connecting the first engagement groove 13d1 and the second engagement groove 13d2.

[0046] 7 and 8, one end (the right end in FIGS. 7 and 8) of the advancing / retreating shaft 7C penetrates the bearing block 8 and protrudes horizontally, and the upper end of a vertical movable plate 14 is attached to the protruding end. Also, an air cylinder 15 is attached horizontally to the outer surface of the lower part of the rear wall 3B of the case 3, and constitutes an advancing / retreating mechanism that moves the advancing / retreating cylinder 7B of the shaft 7 and the advancing / retreating shaft 7C forward and backward in the axial direction.

[0047] Here, the air cylinder 15 is composed of a cylinder 15a, a piston 15b slidably fitted inside the cylinder 15a, and a piston rod 15c extending horizontally from the piston 15b, and the tip of the part of the piston rod 15c that passes through the cylinder 15a and projects outside is attached to the lower part of the movable plate 14. The inside of the cylinder 15a is divided into two chambers S1 and S2 by the piston 15b, and these chambers S1 and S2 are selectively connected to an air supply source (not shown) such as an air compressor. The advancing and retreating mechanism may be composed of an electric actuator or the like.

[0048] A motor 16 forming a rotational load applying section is mounted horizontally on the lower outer surface of the rear wall 3B of the case 3. A drive pulley 17 having a smaller diameter than the driven pulley 10 is attached to the end of a horizontal output shaft (motor shaft) 16a of the motor 16, and an endless timing belt 18 is wound around the drive pulley 17 and the driven pulley 10. Therefore, when the motor 16 is started and the output shaft 16a rotates, the drive pulley 17 attached to the output shaft 16a rotates, and the rotation of the drive pulley 17 is reduced in speed and transmitted to the driven pulley 10 via the timing belt 18, causing the rotating cylinder 7A of the shaft 7 to which the driven pulley 10 is attached and the advancing / retracting cylinder 7B to rotate integrally at a predetermined speed. When the rotating cylinder 7A of the shaft 7 and the advancing / retracting cylinder 7B rotate integrally in this manner, the core 5 and the roll member 4 having the sheet member 6 wound around the core 5 also rotate integrally.

[0049] 7 and 8, in this embodiment, an RFID tag 101, on which information such as the type of the sheet member 6 wound around the roll member 4 is recorded, is attached to the inner peripheral surface of the end portion in the -Y axis direction of the core 5 (the left end portion in the drawings). Here, the RFID tag 101 is a contactless data carrier that can read and write information contactlessly using electromagnetic waves as a communication medium, and is composed of, for example, an IC chip that can read and write data and a transmitting and receiving antenna (conductive coil) connected to the IC chip.

[0050] On the other hand, as shown in Figures 7 and 8, a cylindrical reading unit (reader) 102 is inserted and fixed to the axial center (rotation center of the roll member 4) of the -Y axis direction end (left end in the figure) of the advancing / retreating axis 7C of the shaft 7, and a code 103 extending from the reading unit 102 passes through the inside of the advancing / retreating axis 7C, passes through a circular hole 14a formed in the upper end of the movable plate 14, extends to the outside, and is electrically connected to a controller 104.

[0051] Here, RFID tag 101, which is a transmitter attached to the inner circumferential surface of the -Y axis direction end (left end in Figs. 7 and 8) of core 5, and reader 102, which is a receiver attached to the axial center of advance / retract axis 7C of shaft 7, form a system that generates a magnetic field between them and transmits and receives information by electromagnetic induction, and in this embodiment, RFID tag 101 and reader 102 are arranged facing each other inside core 5. In an RFID system equipped with such RFID tag 101 and reader 102, information is transmitted and received according to the following procedure.

[0052] That is, when electromagnetic waves are transmitted from the reading unit 102, the antenna of the RFID tag 101 receives the electromagnetic waves. In this way, when the antenna of the RFID tag 101 receives the electromagnetic waves, a current flows through the IC chip of the RFID tag 101, converting the information into a signal, and this signalized information is transmitted as a reflected wave. The reading unit 102 then receives the reflected wave and reads the information.

[0053] In this embodiment, the RFID tag 101 and the reading unit 102 are arranged opposite each other within the core 5, and the reading unit 102 is arranged at the axial center of the advance / retract shaft 7C of the shaft 7, that is, on the rotational axis of the roll member 4. This eliminates the need to position the roll member 4 when attaching it to the shaft 7, and the RFID tag 101 and the reading unit 102 are arranged opposite each other and close to each other within the core 5 at the same time as attaching the roll member 4 to the core 5. This has the effect of making it easy to attach the roll member 4 even if an electromagnetic induction method that does not cause radio wave interference is adopted as the method for reading the RFID tag 101.

[0054] In this embodiment, the retractable cylinder 7B and the retractable shaft 7C of the shaft 7 are configured to be retractable in the axial direction (Y-axis direction) relative to the rotary cylinder 7A. Therefore, as shown in FIG. 7, when compressed air is supplied to one chamber S2 in the cylinder 15a of the air cylinder 15 and air is discharged to the outside from the other chamber S1, the piston 15b and the piston rod 15c move leftward in FIG. 7. In this state, as shown in detail in FIG. 9(a), the balls 13c of each core fixing portion 13 are engaged with the shallow second engagement grooves 13d2 of the engagement grooves 13d formed on the outer periphery of the retractable cylinder 7B. Therefore, the balls 13c push the movable block 13a and the pressure plate 13b radially outward (upward in FIG. 9(a)). Therefore, the pressure plate 13b is in close contact with the inner circumferential surface of the core 5, and the core 5, the roll member 4, the rotary cylinder 7A, and the retractable cylinder 7B of the shaft 7 can rotate together around the retractable shaft 7C. At this time, a gap Δy is formed between one axial end face of the advancing / retreating cylinder 7B of the shaft 7 and the stopper 11, as shown in FIG.

[0055] To remove the roll member 4 together with the core 5 from the shaft 7, compressed air is supplied to one chamber S1 in the cylinder 15a of the air cylinder 15, and air is discharged from the other chamber S2 to the outside. Then, as shown in FIG. 8, the piston 15b and the piston rod 15c move in the direction of the arrow (+Y-axis direction) by Δy shown in FIG. 7 until the end face of the retractable cylinder 7B of the cylinder 15a abuts against the stopper 11. As a result, as shown in FIG. 9(b), the ball 13c of the core fixing part 13 engages with the deep first engagement groove 13d1 in the engagement groove 13d formed on the outer periphery of the retractable cylinder 7B. Then, the movable block 13a and the pressing plate 13b of the core fixing part 13 move radially inward (in the direction of the arrow in FIG. 9(b)), and the pressing plate 13b moves away from the inner circumferential surface of the core 5, allowing the roll member 4 to be easily removed from the shaft 7.

[0056] In addition, by engaging the balls 13c with the engagement grooves 13d, each core fixing portion 13 supports the rotating cylinder 7A and the advancing / retreating cylinder 7B of the shaft 7 so that they can rotate together relative to the advancing / retreating shaft 17C, and also functions as a spline mechanism that allows the advancing / retreating cylinder 7B and the advancing / retreating shaft 7C to move (advance and retreat) in the axial direction (Y-axis) relative to the rotating cylinder 7A.

[0057] Furthermore, in this embodiment, a rotational load applying section is provided in the motor, which is the rotational drive source that rotates the roll member 4, so that a load is applied to the rotation of the roll member 4 when the sheet member 6 is pulled out from the roll member 4, suppressing the rotation of the roll member and preventing the sheet member 6 from being pulled out too far.

[0058] In the first embodiment, the shaft 7 is configured with the rotary cylinder 7A, the retractable cylinder 7B, the retractable shaft 7C, and the bearing 9, but may be configured as a single unit. In this case, a rotary connector or the like is used to connect the wiring.

[0059] Furthermore, the shaft 7 may have a length such that the reading unit 102 disposed at the tip thereof is disposed outside the core 5 of the roll member 4 attached to the shaft 7. The reading unit 102 may also be disposed inside the shaft 7.

[0060] Second Embodiment Next, a second embodiment of the present invention will be described with reference to Figures 10 and 11. In Figures 10 and 11, the same elements as those shown in Figures 5 to 9 are denoted by the same reference numerals, and further description thereof will be omitted below.

[0061] In this embodiment, as in the first embodiment, an RFID tag 101 recording information such as the type of sheet member 6 is attached to the inner surface of one end (the end in the -Y axis direction) of the core 5, but the attachment position of the reading unit 102 is different from that in the embodiment.

[0062] That is, in this embodiment, as shown in Fig. 10, the front wall 3C of the case 3 is configured to be openable and closable around a hinge 19, and a cylindrical reading unit 102 is attached horizontally to the inner surface of the front wall 3C at a predetermined height. The attachment position of the reading unit 102 on the front wall 3C is set at a height where, when the front wall 3C of the case 3 is closed as shown by the chain line in Fig. 10, the reading unit 102 enters the inside of the core 5 and is positioned at the axial center of the core 5, as shown in Fig. 11. Note that, as shown in Fig. 11, a cord 103 extending from the reading unit 102 passes through a circular hole 3b formed through the front wall 3C of the case 3 and extends to the outside, and its end is electrically connected to a controller 104.

[0063] Therefore, in this embodiment as well, the RFID tag 101 and the reading unit 102 are arranged opposite each other inside the core 5, and the reading unit 102 is arranged at the axial center of the advance / retract shaft 7C of the shaft 7, that is, on the rotational axis of the roll member 4, so that positioning of the roll member 4 is not necessary when attaching the roll member 4 to the shaft 7, and the RFID tag 101 and the reading unit 102 are arranged opposite and close to each other at the same time as attaching the roll member 4, thereby achieving the effect of making it easy to attach the roll member 4 even if an electromagnetic induction method that does not cause radio wave interference is adopted as the method for reading the RFID tag 101. Here, in this embodiment, the front wall 3C of the case 3, which functions as an opening / closing door, constitutes an arrangement mechanism that inserts and positions the reading unit 102 into the core 5 from the outside when it closes.

[0064] As another embodiment, similar to the second embodiment described above, the reading unit 102 may be disposed on the front wall 3C of the case 3, which functions as an opening and closing door, and the reading unit 102 may be disposed outside the core 5 without entering the core 5 when the front wall 3C is closed. Furthermore, in this embodiment, the first embodiment, and the second embodiment, the outer shape of the reading unit 102 is not limited to a cylindrical shape, and it is sufficient that the coil center of the reading unit 102 is disposed on the axis of the core 5 or on an extension of the axis of the core 5.

[0065] Furthermore, in the above embodiment, an example has been described in which the present invention is applied to a tape application device that applies dicing tape to a wafer and a ring frame, but the present invention can also be applied to any sheet processing device that processes any other sheet other than dicing tape.

[0066] Furthermore, the present invention is not limited to the application of the above-described embodiments, and it goes without saying that various modifications are possible within the scope of the claims and the technical ideas described in the specification and drawings. [Explanation of symbols]

[0067] 1: tape application device (sheet processing device), 2A: first storage section, 2B: second storage section, 3: Case, 3A: Bottom wall of the case, 3B: Rear wall of the case, 3C: Front wall of the case, 3a: opening, 3b: circular hole, 4: roll member, 5: core, 6: sheet member, 6a: substrate, 6b: adhesive layer, 6c: protective sheet, 7: shaft, 7A: rotating cylinder, 7B: retractable cylinder, 7C: advance / retreat shaft, 7a: flange, 7b: recess, 7c: circular hole, 8: bearing block, 9: bearing, 10: driven pulley, 11: stopper, 12: bearing, 13: Core fixing part, 13a: Movable block, 13b: Pressing plate, 13c: Ball, 13d: engagement groove, 13d1: first engagement groove, 13d2: second engagement groove, 13d3: tapered surface, 14: Movable plate, 14a: Circular hole, 15: Air cylinder (advance / retreat mechanism), 15a: cylinder, 15b: piston, 15c: piston rod, 16: motor, 16a: output shaft (motor shaft), 17: drive pulley, 18: timing belt, 19: hinge, 20: sheet delivery means, 21: support member, 22: rotation mechanism, 23: arm, 24: clamp, 25: slide mechanism, 25a: guide rail, 25b: slider, 26: tip detection unit, 27, 28: guide rollers, 30: sheet delivery unit, 31: drive roller, 32: driven roller, 33: movement mechanism, 40: tape peeling means, 41: guide rail, 42: slider, 53: peel plate, 50: Holding means, 51: Ring frame holding part, 52: Wafer support part, 53: Support stand, 54: base, 60: tape application unit, 61: application roller, 62: guide rail, 63: Support arm, 70: Sheet take-up means, 71: Guide rail, 72: Slider, 73: Support member, 74: Clamp, 75: Guide rail, 76: Slider, 77: cutter, 80: sheet feeding section, 81: driving roller, 82: driven roller, 83: Support arm, 84: Guide rail, 85: Slider, 90: Sheet winding section, 91: Winding roller, 92: Trash can, 101: RFID tag, 102: Reading unit, 103: Code, 104: Controller, D: Device, F: Ring Frame, L1, L2: planned division line, P1: first gripping position, P2: second gripping position, P3: Open position, S1, S2: Chamber, T: Dicing tape, Δy: Amount of movement of the retractable cylinder and retractable shaft, W: Wafer, WS: Work set

Claims

1. a shaft supporting a roll member formed by winding a sheet member around a cylindrical core; a rotation support portion that rotatably supports the shaft; At least A sheet processing apparatus in which the sheet member is drawn from the outer periphery of the roll member supported by the shaft, the roll member includes an RFID tag on the core; a reading unit provided at the rotation axis of the roll member supported by the shaft; Sheet handling device.

2. The sheet processing apparatus according to claim 1 , wherein the reading unit is disposed at the center of the shaft.

3. The shaft a rotatable rotating cylinder that supports the core; an advancing / retreating cylinder arranged within the rotary cylinder so as to be advancing / retreating in the axial direction; an advancing / retracting shaft disposed within the advancing / retracting cylinder so as to be able to advance and retreat in the axial direction together with the advancing / retracting cylinder; a bearing that supports the retractable cylinder together with the rotary cylinder so that the retractable cylinder can rotate about the retractable shaft; an advancing / retracting mechanism that moves the advancing / retracting shaft forward and backward together with the advancing / retracting cylinder; a rotation load applying unit that applies a load to the rotation of the rotary cylinder; Equipped with The sheet processing apparatus according to claim 1 , wherein the reading unit is provided at the axis of the forward / backward shaft.

4. The sheet processing apparatus according to claim 1 , further comprising a positioning mechanism that is inserted from the outside and positions the reading unit within the core.

5. The sheet processing apparatus according to claim 1 , wherein the reading unit is disposed outside the roll member.

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