Controller, bonding system, program, and setting method

Abstract

To achieve accurate temperature control without depending on an individual difference of a heater tool.SOLUTION: The acquirer 32B of the controller 30 is configured to acquire a plurality of sets of resistance values and temperatures by performing, a plurality of times, an acquiring process of acquiring resistance values and temperatures of the heater tool 22 when a current flows through the heater tool 22. Further, the setting unit 32C is configured to derive a resistance of the heater tool 22 when the temperature of the heater tool 22 reaches the welding temperature, based on the plurality of sets of resistances and temperatures acquired by the acquiring unit 32B, and set the derived resistance as a target resistance. Further, controller 32D is configured to control the power supplied to heater tool 22 based on the measured resistance value of heater tool 22 such that the resistance value of heater tool 22 becomes a target resistance value.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a controller, a joint system, a program, and a setting method. [Background technology]

[0002] As disclosed in Patent Document 1, there is known a technique for joining a first part and a second part of a workpiece by heating the workpiece with heat generated by a heater tool. In the technique described in Patent Document 1, the temperature of the heater tool (power supplied to the heater tool) is controlled based on the resistance value of the heater tool. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2003-236675 Summary of the Invention [Problem to be solved by the invention]

[0004] The technology described in Patent Document 1 allows the temperature of a heater tool to be controlled without using a thermocouple or the like, but Patent Document 1 does not disclose how to set a target resistance value of the heater tool to obtain a desired heating temperature. The target resistance value is calculated based on the temperature coefficient of resistance, which indicates the rate of change in resistance value when the temperature of a conductor rises by 1°C, as well as the temperature of the heater tool and its resistance value at that temperature (e.g., room temperature and its resistance value at room temperature), as shown in Equation (1) below. The combination of temperature and resistance value varies due to individual differences, even for the same type of heater tool. Therefore, the optimal target resistance value also differs depending on the heater tool, and as a result, the temperature control accuracy may be poor depending on the heater tool.

[0005] An object of the present invention is to realize accurate temperature control that is not affected by individual differences in heater tools. [Means for solving the problem]

[0006] In order to solve the above problem, the controller of the present invention is a controller that controls the supply power supplied to a heater tool that heats a workpiece by generating heat and joins a first part and a second part of the workpiece to cause the heater tool to generate heat, and includes: an acquisition unit that acquires at least one set of resistance value and temperature of the heater tool when current is passed through the heater tool before the first part and the second part are joined; a setting unit that derives the resistance value of the heater tool when the temperature of the heater tool reaches the joining temperature required to join the first part and the second part based on the at least one set of resistance value and temperature acquired by the acquisition unit, and sets the derived resistance value as a target resistance value; and a control unit that measures the resistance value of the heater tool when the first part and the second part are joined, and controls the supply power based on the measured resistance value so that the resistance value of the heater tool becomes the target resistance value.

[0007] A bonding system according to the present invention includes the above-described controller, and a bonding device controlled by the controller, which includes the heater tool and bonds the first member and the second member with the heater tool.

[0008] A program according to the present invention causes a computer to function as the controller.

[0009] A setting method according to the present invention is a setting method for a controller that controls the supply power supplied to a heater tool that heats a workpiece by generating heat and joins a first part and a second part of the workpiece to cause the heater tool to generate heat, the setting method measuring the resistance value of the heater tool when joining the first part and the second part, and setting the target resistance value for a controller that controls the supply power so that the resistance value of the heater tool becomes a target resistance value based on the measured resistance value. Before joining the first part and the second part, a current is passed through the heater tool and the resistance value and temperature of the heater tool when the current is passed are measured at least once to obtain at least one set of resistance value and temperature of the heater tool, and based on the obtained at least one set of resistance value and temperature, the resistance value of the heater tool when the temperature of the heater tool becomes the joining temperature required to join the first part and the second part is derived, and the derived resistance value is set as the target resistance value. [Effects of the Invention]

[0010] According to the present invention, accurate temperature control is realized that is not affected by individual differences in heater tools. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a diagram showing a joint system according to an embodiment of the present invention. [Figure 2] FIG. 2 is a diagram illustrating an example of a partial configuration of a controller and a joining device of the joining system of FIG. [Figure 3] FIG. 3 is a flowchart of the target resistance value setting process. [Figure 4] FIG. 4 is a diagram showing an example of a configuration when measuring the temperature of a heater tool by a temperature sensor. [Figure 5] FIG. 5 is a flowchart of the joining process. [Figure 6] FIG. 6 is a graph showing the relationship between the change over time in the resistance value of the heater tool and the change over time in the power supplied to the heater tool. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Note that the up-down direction shown in Fig. 2 is for convenience's sake and may or may not coincide with the actual top-bottom direction.

[0013] As shown in FIGS. 1 and 2, a bonding system 10 according to this embodiment includes a bonding device 20, a controller 30, and an interface 40 (FIG. 1).

[0014] The joining device 20 heats the workpiece W (FIG. 2) and joins the components W1 and W2 that make up the workpiece W by thermocompression bonding using pulse heat. The components W1 and W2 form a chip inductor. The component W1 is a coated wire that forms a coil and includes a core wire W11 and a coating film W12. The component W2 is a plate-like member that includes an electrode W21 to which the core wire W11 is joined by thermocompression bonding. During thermocompression bonding, the coating film W12 is removed by heat, and the core wire W11 is thermocompression bonded to the electrode W21. The chip inductor is completed by thermocompression bonding.

[0015] 2, the joining device 20 includes a stage 21 that supports the workpiece W, a heater tool 22 that generates heat to heat the workpiece W and join the parts W1 and W2, and a drive mechanism 23 that presses the heater tool 22 against the workpiece W (here, part W1). The joining device 20 further includes a power supply circuit 25 that supplies power to the heater tool 22 to cause the heater tool 22 to generate heat, an ammeter 29A that detects the current flowing through the heater tool 22, a voltmeter 29B that detects the voltage applied to the heater tool 22, and a temperature sensor S1 that detects the temperature of the heater tool 22.

[0016] The heater tool 22 includes a heater tip 22A made of a heating resistor such as molybdenum (Mo) or tungsten (W) that contacts the workpiece W to actually heat the workpiece W, and a support member 22B made of a low-resistance material such as copper that supports the heater tip 22A from above. Power to generate heat from the heater tip 22A is supplied to the heater tip 22A from a power supply circuit 25 via the support member 22B. The heater tip 22A is a consumable item that deteriorates with use, and is therefore attached to the support member 22B so that it can be replaced with a new heater tip. For example, the heater tip 22A is detachably fixed to the support member 22B with bolts. The support member 22B is preferably made of a low-resistance material so as not to consume the power supplied to the heater tip 22A. The support member 22B may be plated with various materials, such as gold.

[0017] The drive mechanism 23 is configured to include a linear motor and the like. The drive mechanism 23 moves the heater tool 22 in the vertical direction. By moving the heater tool 22 downward, the drive mechanism 23 presses the heater tip 22A against the workpiece W. By this pressing, the drive mechanism 23 sandwiches and presses the workpiece W between the lower end of the heater tip 22A and the upper surface of the stage 21.

[0018] 1, the power supply circuit 25 includes a switch 25A connected to an external power supply E, a rectifier circuit 25B provided downstream of the switch 25A, a smoothing capacitor 25C provided downstream of the rectifier circuit 25B, and an inverter 25D provided downstream of the smoothing capacitor 25C. The power supply circuit 25 further includes a transformer 25E provided downstream of the inverter 25D, and a rectifier unit 25F including a plurality of (here, two) diodes provided downstream of the transformer 25E. The rectifier unit 25F is connected to the heater tool 22.

[0019] When switch 25A is in an on state, it supplies AC power (here, three-phase AC power) from external power supply E to rectifier circuit 25B, and when it is in an off state, it does not supply the AC power to rectifier circuit 25B. Rectifier circuit 25B is made up of bridge diodes and rectifies the AC power from external power supply E. Smoothing capacitor 25C smoothes the AC power rectified by rectifier circuit 25B. The smoothed AC power, i.e., DC power, is input to inverter 25D. Inverter 25D is made up of multiple bridge-connected switching elements and converts the input DC power into AC power by switching the switching elements. Inverter 25D may further include free wheeling diodes and inductors or capacitors connected in series or in parallel to each switching element, and may be configured as a current-type or voltage-type inverter.

[0020] The converted AC power is input to the primary side of the transformer 25E and transformed (here, stepped down). The transformed AC power is output from the secondary side of the transformer 25E. The AC power output from the secondary side is full-wave rectified by the rectifier 25F. The power full-wave rectified by the rectifier 25F is supplied to the heater tool 22 via the support member 22B. As a result, a current flows through the heater tip 22A of the heater tool 22, and the heater tip 22A generates heat due to Joule heat generated by this current. The rectifier 25F may include a capacitor that smoothes the rectified power.

[0021] The power supplied to the heater tool 22 is controlled by switching each switching element of the inverter 25D. This switching control adjusts, for example, the period during which the switching elements are turned on and / or the duty ratio of the pulse signal that turns the switching elements on and off, thereby controlling the power supplied to the heater tool 22 (particularly the heater chip 22A). For example, PWM (Pulse Width Modulation) control is used as the switching control. The switching elements are controlled by the controller 30.

[0022] The ammeter 29A and the voltmeter 29B are connected to respectively detect the current flowing through the heater tool 22 and the voltage applied to the heater tool 22. The current value and voltage value detected by the ammeter 29A and the voltmeter 29B, respectively, are input to the controller 30.

[0023] The temperature sensor S1 is configured to detect the temperature of the heater tool 22 when a target resistance value, which will be described later, is set. Specifically, the temperature sensor S1 is installed on the stage 21 when a target resistance value, which will be described later, is set, and is brought into contact with the lower end of the heater tip 22A of the heater tool 22, which is moved downward by the drive mechanism 23, i.e., the heating portion that heats the workpiece W (see FIG. 4). This contact enables the temperature sensor S1 to detect the temperature of the heater tool 22 (specifically, the heating portion of the heater tip 22A). When joining the parts W1 and W2 of the workpiece W, the temperature sensor S1 is placed outside the stage 21 so as not to interfere with the joining. The temperature sensor S1 inputs the detected temperature to the controller 30. The temperature sensor S1 may be composed of any sensor, for example, a sheet thermocouple.

[0024] The controller 30 is configured to control the operation of the joining device 20. In particular, the controller 30 is configured to control the drive mechanism 23 and the power supply circuit 25 to join the parts W1 and W2 of the workpiece W. In particular, the controller 30 is configured to control the switching of each switching element of the inverter 25D, thereby controlling the power supplied to the heater tool 22.

[0025] The controller 30 includes a nonvolatile storage device 31 that stores various data, programs, and the like, and a processor 32 that executes the programs and performs the processes described below using the various data. The various data stored in the storage device 31 include the junction temperature, heating period, and target resistance value. This information will be described in detail later. The processor 32 includes a CPU (Central Processing Unit) and the like. The controller 30 further includes a main memory 33 that provides a working area for the processor 32, and an I / O (Input / Output) 34 that relays data exchanged between the processor 32 and the outside of the controller 30. The I / O (Input / Output) 34 may include an analog-to-digital conversion circuit that converts analog signals representing current and voltage values ​​input to the controller 30 from an ammeter 29A and a voltmeter 29B, respectively, into digital signals and supplies the digital signals to the processor 32.

[0026] The processor 32 executes the programs in the storage device 31 to operate as a reception unit 32A, an acquisition unit 32B, a setting unit 32C, and a control unit 32D shown in Fig. 2. These will be described in detail later.

[0027] The interface 40 includes a display device 41 that displays various operation screens, and an input device 42 that receives operations from a user or information from an external device. The input device 42 may be, for example, a transparent touch panel that is provided on the screen of the display device 41 and receives touch operations from an operator of the controller 30 (e.g., a user), or may be an operation input device that includes various operation keys.

[0028] As described above, the processor 32 of the controller 30 operates as the reception unit 32A, the acquisition unit 32B, the setting unit 32C, and the control unit 32D.

[0029] The reception unit 32A receives various parameters for joining input by the operator via the input device 42. The various parameters include joining conditions for joining the parts W1 and W2. The joining conditions include a joining temperature for joining the parts W1 and W2 and a heating period for heating the parts W1 and W2 at the joining temperature. The joining conditions further include a first power and a second power, which will be described later. The joining conditions may be derived in advance through experiments and / or various calculations. The reception unit 32A stores the received input parameters in a predetermined storage area of ​​the storage device 31. This sets the various parameters in the controller 30. Note that multiple candidates for the various parameters may be set in the controller 30 in advance, and the reception unit 32A may display the multiple candidates on the display device 41. In this case, the operator operates the input device 42 to select one of the multiple candidates, edit the candidate as necessary, and set the various parameters.

[0030] The acquisition unit 32B and the setting unit 32C are configured to set a target resistance value to be used during bonding before the bonding device 20 starts operating, that is, before bonding each of a large number of workpieces W in the mass production process of chip inductors. In this embodiment, heating of the workpieces W is controlled based on the resistance value of the heater tool 22. The target resistance value is a resistance value corresponding to the bonding temperature specified by the operator as described above, and is set as a target value for the resistance value in control based on this resistance value.

[0031] Before joining the parts W1 and W2, the acquisition unit 32B passes a current through the heater tool 22 and performs an acquisition process multiple times to acquire the resistance value and temperature of the heater tool 22 when the current is passed through. As a result, the acquisition unit 32B acquires multiple pairs of resistance values ​​and temperatures. One pair of resistance values ​​and temperatures is acquired in one acquisition process. A different current is passed through the heater tool 22 in each acquisition process. The resistance value of the heater tool 22 is measured by the acquisition unit 32B by dividing the voltage detected by the voltmeter 29B by the current detected by the ammeter 29A, and the resistance value is acquired by this measurement. The temperature of the heater tool 22 is measured by the temperature sensor S1 shown in FIG. 1 and the temperature is acquired by this measurement.

[0032] The setting unit 32C derives the resistance value of the heater tool 22 when the temperature of the heater tool 22 reaches the bonding temperature set above, based on the multiple sets of resistance values ​​and temperatures acquired by the acquisition unit 32B, and sets the derived resistance value as the target resistance value. Here, the relationship between the temperature and resistance value of the heater tool 22 is expressed by the following formula (1). In formula (1), R Te1 [Ω] and Te1 [°C] are the resistance value and temperature of the heater tool 22 acquired by the acquisition unit 32B, Te2 [°C] is the bonding temperature of the heater tool 22, and R Te2 [Ω] is the resistance value of the heater tool 22 at Te2 [°C], and α [1 / °C] is the resistance temperature coefficient of the heater tool 22. As expressed in equation (1), the resistance value and temperature of the heater tool 22 change linearly. The setting unit 32C derives and sets the target resistance value by utilizing this correlation between the resistance value and the temperature. R Te2 =R Te1 {1+α(Te2-Te1)} (1)

[0033] The acquiring unit 32B and the setting unit 32C execute, for example, the target resistance value setting process shown in Fig. 3. Before the target resistance value setting process is executed, the operator places the temperature sensor S1 on the stage 21.

[0034] 3, first, the acquisition unit 32B controls the drive mechanism 23 to move the heater tool 22 downward, and brings the lower end of the heater tool 22, i.e., the lower end of the heater tip 22A, into contact with the temperature sensor S1 (step S11), as shown in FIG. 4. This lower end is the part that comes into contact with the workpiece W to generate heat when the workpiece W is heated, and transfers the generated heat to the workpiece W.

[0035] Thereafter, the acquiring unit 32B operates the power supply circuit 25 to pass a first current through the heater tool 22 (step S12). The acquiring unit 32B measures the resistance value (here, the resistance value of the entire heater tool 22) and temperature (here, the temperature of the lower end, which is the heat-generating portion of the heater chip 22) of the heater tool 22 while the first current is passing through, thereby acquiring these as a first resistance value and a first temperature (step S13). The acquiring unit 32B stores the acquired first resistance value and first temperature in, for example, the main memory 33.

[0036] Thereafter, the acquiring unit 32B operates the power supply circuit 25 to pass a second current, the second current being different from the first current, through the heater tool 22 (step S14). The acquiring unit 32B measures the resistance value and the temperature of the heater tool 22 while the second current is passing through as a second resistance value and a second temperature (step S15). The acquiring unit 32B stores the acquired second resistance value and second temperature in, for example, the main memory 33.

[0037] The control mode of the power supply circuit 25 for passing the first current and the second current through the heater tool 22 (that is, the switching mode of the switching element of the inverter 25D) may be set in advance.

[0038] Thereafter, the setting unit 32C derives a correlation between the resistance value and the temperature of the heater tool 22 based on the set of the first resistance value and the first temperature and the set of the second resistance value and the second temperature (step S16). Te1、 R Te2 The first resistance value and the second resistance value are respectively substituted into Te1 and Te2, and the first temperature and the second temperature are substituted into Te1 and Te2, and the value of α in the formula (1) is derived as the correlation α1.

[0039] Thereafter, the setting unit 32C derives a resistance value corresponding to the junction temperature stored in the storage device 31 based on the derived correlation (step S17). The setting unit 32C derives the resistance value, for example, by substituting the correlation α1 for α in the above formula (1) to obtain the following formula (2). The setting unit 32C assigns the first temperature to Te1, the junction temperature to Te2, and R Te1 Substitute the first resistor value into R Te2 The resistance values ​​derived here are used for calculation. Te1 and R Te1 The values ​​substituted into may be a second temperature and a second resistance value. R Te2 =R Te1 {1+α1(Te2-Te1)} (2)

[0040] Thereafter, the setting unit 32C sets the resistance value calculated by the above formula (2) as the target resistance value (step S18). The resistance value is set as the target resistance value by being stored in a predetermined storage area of ​​the storage device 31.

[0041] The control unit 32D joins the parts W1 and W2 of the workpiece W. During this joining, the control unit 32D measures the resistance value of the heater tool 22 and controls the power supplied to the heater tool 22 based on the measured resistance value so that the resistance value of the heater tool 22 reaches the target resistance value set by the setting unit 32C. The control of the power supply is performed by controlling the switching of the switching elements of the inverter 25D of the power supply circuit 25.

[0042] The control unit 32D executes, for example, the bonding process shown in Fig. 5. This bonding process will be described below with reference to Fig. 5 and Fig. 6. The upper graph in Fig. 6 shows the change over time in the temperature of the heater tool 22 during the bonding process, and the lower graph shows the change over time in the power supplied to the heater tool 22 during the bonding process.

[0043] In the joining process, the control unit 32D first controls the drive mechanism 23 to move the heater tool 22 toward the workpiece W, and pressurizes the workpiece W with the heater tool 22 (step S21). As a result, the part W1 on the heater tool 22 side of the workpiece W is pressed against the part W2 on the opposite side.

[0044] Thereafter, the control unit 32D operates the power supply circuit 25 to start supplying power to the heater tool 22 (step S22). Furthermore, the power supply circuit 25 controls the switching of the switching elements of the inverter 25D to increase the power supplied to the heater tool 22 to a first power (timings T1 to T2 in FIG. 6) and maintain the first power (step S22, timings T2 to T3). The first power is preset as a power that causes the heater tool 22, more specifically, the heater tip 22A, to generate heat at a temperature higher than the bonding temperature required to bond the workpieces W. The first power allows the temperature of the heater tool 22 to quickly reach the bonding temperature.

[0045] Thereafter, the control unit 32D acquires the current value from the ammeter 29A and the voltage value from the voltmeter 29B, and divides the voltage value by the current value to measure the current resistance value of the heater tool 22 (step S23). The measured resistance value changes depending on the temperature of the heater tool 22, as described above.

[0046] Thereafter, the control unit 32D determines whether the resistance value measured in step S23 has reached the target resistance value set by the setting unit 32C (step S24). The control unit 32D waits until the resistance value reaches the target resistance value (step S24; No). When the control unit 32D determines that the resistance value has reached the target resistance value (step S24; Yes, timing T3), it reduces the power supplied to the heater tool 22 from the currently held first power to the second power (timings T3 to T4), and then maintains it at the second power (step S25, timings T4 to T5). The second power is preset as the power supplied to the heater tool 22 when the heater tool 22 is heated to the bonding temperature.

[0047] The control unit 32D determines whether the heating period set above has elapsed from the timing T3 at which it was determined that the resistance value had reached the target resistance value (step S26).

[0048] The control unit 32D waits before the heating period has elapsed (step S26; No), and performs a joining termination process (step S27) after the heating period has elapsed (step S26; Yes). In the joining termination process, the control unit 32D reduces the power supplied to the heater tool 22 or turns off all switching elements of the inverter 25D to cut off the power supply. The control unit 32D also controls the drive mechanism 23 to move the heater tool 22 away from the workpiece W. In the termination process, the control unit 32D may perform a process of cooling the heater tool 22 and the workpiece W using a cooling device (not shown).

[0049] Various parameters for achieving the above control, such as switching parameters indicating the switching modes of each switching element of the inverter 25D for supplying the first or second power to the heater tool 22, may be identified and set through prior experiments. The switching parameters for achieving the first and second powers may be automatically set by the control unit 32D. In this case, the control unit 32D gradually changes the switching modes (switching parameters) of the switching elements of the inverter 25D in the power supply circuit 25 to gradually increase the power supplied to the heater tool 22 and periodically measures the resistance value of the heater tool 22. The control unit 32D sets the switching parameters when the resistance value reaches the target resistance value as the switching parameters for achieving the second power. The control unit 32D derives switching parameters for achieving a power greater than the second power and sets these switching parameters as the parameters for achieving the first power. The switching parameters for achieving the maximum power that the inverter 25D can output may be set as the switching parameters for achieving the first power.

[0050] The control unit 32D may sequentially measure the resistance value of the heater tool 22 at least during the period from timing T4 to T5, and feedback control the switching of the switch element of the inverter 25D of the power supply circuit 25 (i.e., the power supplied to the heater tool 22) using the measured resistance value as the feedback value and the target resistance value as the target value for feedback control.

[0051] The control unit 32D may sequentially measure the resistance value of the heater tool 22 during the entire period from timing T1 to T5, and feedback control the switching of the switch element of the inverter 25D of the power supply circuit 25 using the measured resistance value as the feedback value and the target resistance value as the target value for feedback control.

[0052] As described above, according to this embodiment, the acquisition unit 32B is configured to acquire multiple sets of resistance values ​​and temperatures by performing an acquisition process multiple times to acquire the resistance value and temperature of the heater tool 22 when a current is applied to the heater tool 22. Furthermore, the setting unit 32C is configured to derive the resistance value of the heater tool 22 when the temperature of the heater tool 22 reaches the bonding temperature (when the heat generation temperature of the heater tool 22 reaches the bonding temperature) based on the multiple sets of resistance values ​​and temperatures acquired by the acquisition unit 32B, and set the derived resistance value as the target resistance value. Furthermore, the control unit 32D is configured to control the power supplied to the heater tool 22 based on the measured resistance value of the heater tool 22 so that the resistance value of the heater tool 22 reaches the target resistance value. With this configuration, the target resistance value is set based on the resistance value and temperature of the heater tool 22 when a current is applied to the heater tool 22, so that an appropriate target resistance value is set regardless of individual differences in the heater tool 22. This allows for accurate temperature control that is not affected by individual differences in the heater tool 22.

[0053] In this embodiment, the setting unit 32C is configured to derive a correlation between the resistance value and temperature of the heater tool 22 based on multiple sets of resistance values ​​and temperatures acquired when different currents are passed through the heater tool 22. The setting unit 32C is then configured to derive the resistance value at which the heater tool 22 reaches the bonding temperature based on the derived correlation and set the resistance value as the target resistance value. According to the above formula (1), if the resistance temperature coefficient α is known, the target resistance value can be derived based on only one set of resistance value and temperature. However, by acquiring multiple sets of resistance values ​​and temperatures of the heater tool 22 as in this embodiment, the target resistance value can be derived even if the resistance temperature coefficient α of the heater tool 22 is unknown. Therefore, in this embodiment, even if the resistance temperature coefficient α of the heater tool 22 is unknown, accurate temperature control that is not dependent on individual differences in the heater tool 22 is realized. In particular, when the heater tool 22 is composed of a heater tip 22A that contacts the workpiece W and generates heat to heat the workpiece W, as described above, and a support member 22B that supports the heater tip 22A with lower resistance than the heater tip 22A, this configuration is effective because the resistance temperature coefficient α of the entire heater tool 22 is unknown.

[0054] The correlation may be information indicating the relationship between the resistance value and temperature of the heater tool 22, and may be, for example, a mathematical formula indicating the relationship between the resistance value and temperature other than the resistance temperature coefficient. Furthermore, the number of pairs of resistance value and temperature acquired in the acquisition process may be three or more. The greater the number of pairs, the higher the accuracy of the correlation.

[0055] (Variation) Various modifications are possible to the above embodiment. Modifications will be described below. At least some of the modifications can be applied to the above embodiment and also to other modifications.

[0056] (Variation 1) The acquisition unit 32B may be configured to perform the acquisition process once to acquire one set of resistance value and temperature. The acquisition unit 32B may be configured to perform the acquisition process at least once to acquire at least one set of resistance value and temperature.

[0057] (Variation 2) The setting unit 32C may be configured to acquire the resistance temperature coefficient of the heater tool 22 and derive the resistance value of the heater tool 22 when the temperature of the heater tool 22 reaches the bonding temperature based on at least one pair of the resistance value, temperature, and resistance temperature coefficient acquired by the acquisition unit 32B. When the heater tool 22 includes two or more types of components as described above, the resistance temperature coefficient of the heater tool 22 is set to the resistance temperature coefficient of the heater chip 22A that actually heats the workpiece W by generating heat. The setting unit 32C may be configured to acquire the resistance temperature coefficient input by the operator via the input device 42, for example. As another example, a table showing the relationship between the material of the heater chip 22A and the resistance temperature coefficient may be prepared in the storage device 31, and the setting unit 32C may be configured to refer to the table based on the material of the heater chip 22A input by the operator via the input device 42, for example, and acquire the resistance temperature coefficient corresponding to the material. These are effective when the heater tool 22 consists of only the heater tip 22A, or when the resistance value of the support member 22B is lower than that of the heater tip 22A, and the resistance value and resistance temperature coefficient of the support member 22B can be ignored. Furthermore, these are also effective when the resistance value of the contact portion of the heater tip 22A with the workpiece W is different from the resistance value of the other portion, and the resistance value of the contact portion is lower than the resistance value of the other portion, and the resistance value and resistance temperature coefficient of the relevant portion can also be ignored. The setting unit 32C calculates the resistance value, temperature, resistance temperature coefficient, and junction temperature by using R Te1 , Te1, α, Te2, and the target resistance value R Te2 is derived.

[0058] (Variation 3) The temperature of the heater tool 22 acquired by the acquisition process may be manually measured by an operator and input to the controller 30 via the input device 42. Similarly, the resistance value of the heater tool 22 acquired by the acquisition process may be manually measured by an operator and input to the controller 30 via the input device 42. In such a case, the acquisition unit 32B acquires the temperature and / or resistance value input to the controller 30 in the acquisition process. Note that the acquisition unit 32B measuring the resistance value and temperature as described above reduces the operator's effort. In this case, as described above, by measuring the temperature of the contact portion of the heater tool 22 with the workpiece W using the temperature sensor S1 that detects the temperature of the contact portion, the relationship between the temperature and the resistance value becomes more accurate, and the accuracy of the set target resistance value increases.

[0059] (Variation 4) The acquisition of the resistance value and temperature by the acquisition unit 32B (particularly acquisition by the above-mentioned measurement) and the setting of the target resistance value by the setting unit 32C based on this (for example, the target resistance value setting process) may be repeated every time a predetermined number of workpieces W are joined. As a result, even if the heater tool 22, particularly the heater tip 22A, deteriorates due to use, the target resistance value is set to reflect this deterioration, thereby achieving accurate temperature control of the heater tool 22. Such an effect is particularly obtained when this modified example is applied to the above-mentioned embodiment.

[0060] (Variation 5) The various configurations described in the above embodiments are optional and can be modified as appropriate. For example, the processor 32 may be composed of at least one or a combination of one or more of one or more CPUs, one or more ASICs (Application Specific Integrated Circuits), and one or more FPGAs (Field-Programmable Gate Arrays). The processor 32 may also be referred to as a processing unit. The program may be stored in a computer-readable non-transitory storage medium such as the non-volatile storage device 31. The present invention is applicable not only to a joining system that performs thermocompression bonding, but also to a joining system that joins components W1 and W2 of a workpiece W by welding or soldering using a heater tool. Furthermore, although the resistance values ​​handled by the above-mentioned units 32A to 32D are described above as the resistance values ​​themselves, other examples of the resistance values ​​may also employ values ​​that can uniquely indicate the resistance values ​​(e.g., voltage values ​​and / or current values).

[0061] (How to set the target resistance value) The above-described embodiment and modified examples can also be understood as a setting method for setting a target resistance value in the controller 30. The controller 30, which is the target of this setting method, may be configured to measure the resistance value of the heater tool 22 during joining of the parts W1 and W2 and, based on the measured resistance value, control the power supplied to the heater tool 22 so that the resistance value of the heater tool 22 reaches the target resistance value. This setting method may include, for example, a first step of acquiring at least one set of resistance value and temperature by passing a current through the heater tool 22 and performing a measurement process to measure the resistance value and temperature of the heater tool 22 at least once before joining of the parts W1 and W2. This setting method may also include, for example, a second step of deriving, based on the at least one set of resistance value and temperature acquired in the first step, the resistance value of the heater tool 22 when the temperature of the heater tool 22 reaches the joining temperature required for joining the parts W1 and W2, and setting the derived resistance value as the target resistance value. The first and second steps do not have to be performed by the controller 30, but may be performed by a person or other device. The first and second steps can be further limited by some of the above-described embodiments and modifications. The above-described setting method is a method for processing a controller before the target resistance value is set into a controller in which the target resistance value is set, and can also be said to be a method for producing a controller.

[0062] (Addendum) The following additional configurations are examples of the above-described embodiments and modifications, and the additional configurations can be combined with each other. (Appendix 1) a controller that controls power supplied to a heater tool that generates heat to heat a workpiece and joins a first part and a second part of the workpiece, and that causes the heater tool to generate heat, an acquisition unit that acquires at least one pair of a resistance value and a temperature of the heater tool when a current is passed through the heater tool before the first component and the second component are joined; a setting unit that derives a resistance value of the heater tool when the temperature of the heater tool reaches a joining temperature required to join the first component and the second component, based on the at least one pair of resistance value and temperature acquired by the acquisition unit, and sets the derived resistance value as a target resistance value; a control unit that measures a resistance value of the heater tool when joining the first component and the second component, and controls the supplied power based on the measured resistance value so that the resistance value of the heater tool reaches the target resistance value; A controller comprising: (Appendix 2) the acquisition unit acquires, as the at least one pair of resistance value and temperature, a plurality of pairs of resistance value and temperature of the heater tool when different currents are applied to the heater tool; the setting unit derives a correlation between the resistance value and the temperature of the heater tool based on the plurality of sets of resistance values ​​and temperatures, and derives the resistance value when the temperature of the heater tool reaches the bonding temperature based on the derived correlation. 10. The controller of claim 1. (Appendix 3) the heater tool includes a heater tip that heats the workpiece by contacting the workpiece and generating heat, and a support member that supports the heater tip and has a resistance lower than that of the heater tip; The resistance value of the heater tool is the resistance value of the entire heater tool. 1. The controller described in Appendix 2. (Appendix 4) the setting unit acquires a resistance temperature coefficient of the heater tool, and derives the resistance value of the heater tool when the temperature of the heater tool reaches the bonding temperature, using the at least one set of resistance value and temperature and the resistance temperature coefficient. 10. The controller of claim 1. (Appendix 5) the heater tool includes a heater tip that heats the workpiece by contacting the workpiece and generating heat, and a support member that supports the heater tip and has a resistance lower than that of the heater tip; the setting unit acquires a resistance temperature coefficient of the heater chip as the resistance temperature coefficient of the heater tool. 6. The controller of claim 4. (Appendix 6) the acquisition unit acquires the at least one set of resistance value and temperature by performing at least once a process of passing the current through the heater tool and measuring a resistance value and a temperature of the heater tool when the current is passed through the heater tool. 6. The controller according to any one of appendixes 1 to 5. (Appendix 7) The acquisition unit measures the temperature when the current is applied using a temperature sensor that detects the temperature of a contact portion of the heater tool with the workpiece. 7. The controller of claim 6. (Appendix 8) the acquisition unit acquires the at least one set of resistance value and temperature again by passing a current through the heater tool and measuring the resistance value and the temperature at least once again after the first part and the second part of each of the plurality of workpieces are joined by the control unit controlling the supply power a plurality of times; the target setting unit re-derives a resistance value of the heater tool when the temperature of the heater tool reaches the bonding temperature based on the at least one set of resistance value and temperature acquired again, and resets the re-derived resistance value as the target resistance value. 7. The controller of claim 6. (Appendix 9) A controller according to any one of Supplementary Notes 1 to 8; a joining device controlled by the controller, the joining device including the heater tool and joining the first member and the second member by the heater tool; A joining system comprising: (Appendix 10) A program that causes a computer to function as the controller according to any one of appendices 1 to 9. (Appendix 11) A controller controls power supplied to a heater tool that heats a workpiece by generating heat and joins a first part and a second part of the workpiece to cause the heater tool to generate heat, the controller measuring a resistance value of the heater tool when joining the first part and the second part, and setting the target resistance value based on the measured resistance value for the controller that controls the power supply so that the resistance value of the heater tool reaches the target resistance value, a first step of, before joining the first component and the second component, passing a current through the heater tool and measuring a resistance value and a temperature of the heater tool at least once to obtain at least one set of a resistance value and a temperature of the heater tool; a second step of deriving a resistance value of the heater tool when the temperature of the heater tool reaches a joining temperature required to join the first component and the second component, based on the at least one pair of resistance value and temperature acquired in the first step, and setting the derived resistance value as the target resistance value; Including how to set it up. (Appendix 12) In the first step, the resistance value and the temperature are measured a plurality of times while varying the current flowing through the heater tool, thereby obtaining a plurality of pairs of the resistance value and the temperature as the at least one pair of the resistance value and the temperature; In the second step, a correlation between the resistance value and the temperature of the heater tool is derived based on the acquired sets of resistance values ​​and temperatures, and the resistance value when the temperature of the heater tool reaches the bonding temperature is derived based on the derived correlation. Setting method described in Appendix 11. (Appendix 13) the heater tool includes a heater tip that heats the workpiece by contacting the workpiece and generating heat, and a support member that supports the heater tip and has a resistance lower than that of the heater tip; In the first step, a resistance value of the entire heater tool is acquired as the resistance value; In the second step, a resistance value of the entire heater tool is measured as the resistance value. Setting method described in Appendix 12. (Appendix 14) In the second step, a resistance temperature coefficient of the heater tool is acquired, and the resistance value of the heater tool when the temperature of the heater tool reaches the bonding temperature is calculated based on the at least one set of resistance value and temperature and the resistance temperature coefficient. Setting method described in Appendix 11. (Appendix 15) the heater tool includes a heater tip that heats the workpiece by contacting the workpiece and generating heat, and a support member that supports the heater tip and has a resistance lower than that of the heater tip; In the second step, a resistance temperature coefficient of the heater tip is obtained as a resistance temperature coefficient of the heater tool. Setting method described in Appendix 14. (Appendix 16) In the first step, the temperature when the current is passed is measured by a temperature sensor that detects the temperature of a contact portion of the heater tool with the workpiece, and the temperature of the contact portion is acquired as the temperature of the heater tool. A setting method according to any one of Supplementary Notes 11 to 15. (Appendix 17) a third step of applying a current to the heater tool and measuring a resistance value and a temperature of the heater tool at least once after joining the first part and the second part of each of the plurality of workpieces, thereby acquiring at least one set of a resistance value and a temperature of the heater tool; a fourth step of deriving a second resistance value of the heater tool when the temperature of the heater tool reaches the bonding temperature based on the at least one pair of resistance value and temperature acquired in the third step, and resetting the derived second resistance value as the target resistance value; A setting method according to any one of Supplementary Notes 11 to 16.

[0063] (Scope of the present invention) Although the present invention has been described above with reference to the embodiments and modifications, the present invention is not limited to the above embodiments and modifications. For example, the present invention includes various modifications to the above embodiments and modifications that can be understood by a person skilled in the art within the scope of the technical concept of the present invention. The configurations listed in the above embodiments and modifications can be combined as appropriate within a range that does not contradict. Furthermore, the omission of each configuration is optional. [Explanation of symbols]

[0064] 10...Bonding system, 20...Bonding device, 21...Stage, 22...Heater tool, 22A...Heater chip, 22B...Support member, 23...Drive mechanism, 25...Power supply circuit, 25A...Switch, 25B...Rectifier circuit, 25C...Smoothing capacitor, 25D...Inverter, 25E...Transformer, 25F...Rectifier unit, 29A...Ammeter, 29B...Voltmeter, 30...Controller, 31...Storage device, 32...Processor, 32A...Reception unit, 32B...Acquisition unit, 32C...Setting unit, 32D...Control unit, 33...Main memory, 40...Interface, 41...Display device, 42...Input device, E...External power supply, S1...Temperature sensor, W...Work, W1...Component, W2...Component, W11...Core wire, W12...Coating film, W21...Electrode.

Claims

1. a controller that controls power supplied to a heater tool that generates heat to heat a workpiece and join a first part and a second part of the workpiece, and that causes the heater tool to generate heat, an acquisition unit that acquires at least one pair of a resistance value and a temperature of the heater tool when a current is passed through the heater tool before the first component and the second component are joined; a setting unit that derives a resistance value of the heater tool when the temperature of the heater tool reaches a joining temperature required to join the first part and the second part, based on the at least one pair of resistance value and temperature acquired by the acquisition unit, and sets the derived resistance value as a target resistance value; a control unit that measures a resistance value of the heater tool when joining the first component and the second component, and controls the supplied power based on the measured resistance value so that the resistance value of the heater tool reaches the target resistance value; A controller comprising:

2. the acquisition unit acquires, as the at least one pair of resistance value and temperature, a plurality of pairs of resistance value and temperature of the heater tool when different currents are applied to the heater tool; the setting unit derives a correlation between the resistance value and the temperature of the heater tool based on the plurality of sets of resistance values ​​and temperatures, and derives the resistance value when the temperature of the heater tool reaches the bonding temperature based on the derived correlation. The controller of claim 1 .

3. the heater tool includes a heater tip that heats the workpiece by contacting the workpiece and generating heat, and a support member that supports the heater tip and has a resistance lower than that of the heater tip; the acquiring unit acquires a resistance value of the entire heater tool as the resistance value, the setting unit measures a resistance value of the entire heater tool as the resistance value; The controller of claim 2 .

4. the setting unit acquires a resistance temperature coefficient of the heater tool, and derives the resistance value of the heater tool when the temperature of the heater tool reaches the bonding temperature, using the at least one set of resistance value and temperature and the resistance temperature coefficient. The controller of claim 1 .

5. the heater tool includes a heater tip that heats the workpiece by contacting the workpiece and generating heat, and a support member that supports the heater tip and has a resistance lower than that of the heater tip; the setting unit acquires a resistance temperature coefficient of the heater chip as the resistance temperature coefficient of the heater tool. The controller of claim 4 .

6. the acquisition unit acquires the at least one set of resistance value and temperature by performing at least once a process of passing the current through the heater tool and measuring a resistance value and a temperature of the heater tool when the current is passed through the heater tool. The controller of claim 1 .

7. The acquisition unit measures the temperature when the current is applied using a temperature sensor that detects the temperature of a contact portion of the heater tool with the workpiece. The controller of claim 6.

8. the acquisition unit acquires the at least one set of resistance value and temperature again by passing a current through the heater tool and measuring the resistance value and the temperature at least once again after the first part and the second part of each of the plurality of workpieces are joined by the control unit controlling the supply power a plurality of times; the target setting unit re-derives a resistance value of the heater tool when the temperature of the heater tool reaches the bonding temperature based on the at least one set of resistance value and temperature acquired again, and resets the re-derived resistance value as the target resistance value. The controller of claim 6.

9. The controller of claim 1; a joining device controlled by the controller, the joining device including the heater tool and joining the first member and the second member by the heater tool; A joining system comprising:

10. A program that causes a computer to function as the controller according to claim 1.

11. A controller controls power supplied to a heater tool that heats a workpiece by generating heat and joins a first part and a second part of the workpiece to cause the heater tool to generate heat, the controller measuring a resistance value of the heater tool when joining the first part and the second part, and setting a target resistance value for the controller that controls the power supplied to the heater tool so that the resistance value of the heater tool reaches the target resistance value based on the measured resistance value, a first step of, before joining the first component and the second component, passing a current through the heater tool and measuring a resistance value and a temperature of the heater tool at least once to obtain at least one set of a resistance value and a temperature of the heater tool; a second step of deriving a resistance value of the heater tool when the temperature of the heater tool reaches a joining temperature required to join the first component and the second component, based on the at least one set of resistance value and temperature acquired in the first step, and setting the derived resistance value as the target resistance value; A setting method having:

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