Vertical cavity surface emitting laser with transparent conductive layer

Abstract

To provide a vertical cavity surface emitting laser having a transparent conductive layer.SOLUTION: The vertical cavity surface emitting laser with a transparent conductive layer includes a substrate, a first reflective layer, a plurality of active light emitting layers, a plurality of second reflective layers, and a plurality of transparent conductive layers. The first reflective layer is disposed on the top surface, the first reflective layer includes a base portion and a plurality of reflective portions, the plurality of reflective portions are arranged on the base portion at intervals, there is an interval between every two adjacent reflective portions, and a region of a surface of the first reflective layer without the plurality of reflective portions defines a plurality of exposed surfaces. The plurality of active light emitting layers are correspondingly located on the plurality of reflective parts. The plurality of second reflective layers are correspondingly located on the plurality of active light emitting layers. The plurality of transparent conductive layers are correspondingly located on the plurality of second reflective layers.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a vertical cavity surface emitting laser, and more particularly to a vertical cavity surface emitting laser having a transparent conductive layer. [Background technology]

[0002] Existing vertical-cavity surface-emitting lasers contain at least an active layer for generating photons, and upper and lower Bragg reflectors located on either side of the active layer. Photons are excited by applying a bias and injecting current into the active layer, and a vertical cavity is formed by the upper and lower Bragg reflectors, which then emit a laser beam from the surface of the device.

[0003] In existing vertical cavity surface emitting lasers, oxidation is typically used to form a highly resistive oxide layer in the upper Bragg reflector to limit the area through which current passes, but forming a current-limiting oxide layer using oxidation is expensive and results in a larger hole diameter, which affects the light emission efficiency.

[0004] The oxide layer formed by the oxidation process has a large lattice mismatch and a large difference in thermal expansion coefficient between the oxide layer and the semiconductor material that constitutes the upper Bragg reflector, which makes defects (e.g., cracks) more likely to occur due to internal stress, further reducing the yield, affecting the light-emitting effect, and reducing the reliability of the element.

[0005] Therefore, how to improve the light output efficiency of vertical cavity surface emitting lasers by improving their structural design to overcome the above-mentioned defects has become one of the important problems that those skilled in the art are trying to solve. Summary of the Invention [Problem to be solved by the invention]

[0006] The technical problem that the present invention aims to solve is to provide a vertical cavity surface emitting laser with a transparent conductive layer in response to the shortcomings of existing technology. [Means for solving the problem]

[0007] The vertical cavity surface emitting laser with the transparent conductive layer includes a substrate, an electrode layer, a first reflective layer, multiple active light emitting layers, multiple second reflective layers, and multiple transparent conductive layers. The substrate has a top surface and a bottom surface. The electrode layer is disposed on the bottom surface. The first reflective layer is disposed on the top surface, and includes a base portion and multiple reflective portions, the multiple reflective portions being arranged on the base portion with a gap therebetween, and adjacent two reflective portions have a gap therebetween, and areas on the surface of the first reflective layer that do not have the multiple reflective portions define multiple exposed surfaces. The multiple active light emitting layers are respectively positioned on the multiple reflective portions in a corresponding manner. The multiple second reflective layers are respectively positioned on the multiple active light emitting layers in a corresponding manner. The multiple transparent conductive layers are respectively positioned on the multiple second reflective layers in a corresponding manner.

[0008] In one possible embodiment, the vertical cavity surface emitting laser with a transparent conductive layer further includes a protective layer including a plurality of bottom portions, a plurality of side portions, and a plurality of extension portions, where both sides of each bottom portion are connected to one end of each side portion, and each extension portion is connected to the other end of each side portion, and each bottom portion covers each exposed surface. Each side portion covers the same side of each reflective portion, each active light emitting layer, and each second reflective layer. Each extension portion is located between the transparent conductive layer and the second reflective layer, and defines a light exit hole between two adjacent extension portions corresponding to the transparent conductive layer.

[0009] In one possible embodiment, the vertical cavity surface emitting laser with transparent conductive layers further includes a plurality of connecting parts, each connecting part and each transparent conductive layer are made of the same material, both ends of each connecting part are respectively connected to another transparent conductive layer adjacent to the transparent conductive layer, and each connecting part covers two opposite sides and a corresponding bottom.

[0010] In one possible embodiment, the length of each active light-emitting layer in the first direction is equal to or greater than the diameter of each light-emitting hole in the first direction.

[0011] In one possible embodiment, the vertical cavity surface emitting laser with a transparent conductive layer further includes a protective layer including a plurality of bottom portions, a plurality of side portions, and a plurality of extension portions, where both sides of each bottom portion are connected to one end of each side portion, each extension portion is connected to the other end of each side portion, each bottom portion covers each exposed surface, and each side portion covers the same side of each reflective portion, each active light emitting layer, each second reflective layer, and each transparent conductive layer, and each extension portion is located on the transparent conductive layer and defines a light exit hole between two adjacent extension portions corresponding to the transparent conductive layer.

[0012] In one possible embodiment, the length of each active light-emitting layer in the first direction is equal to or greater than the diameter of each light-emitting hole in the first direction.

[0013] In one possible embodiment, the vertical cavity surface emitting laser with transparent conductive layer further includes a plurality of fillers, the fillers being a conductive material or a dielectric material, each filler including a filler portion and two extending portions, defining first and second sidewall surfaces on the sides of the reflective portion, the active light emitting layer, and the second reflective layer, corresponding to each exposed surface, the first and second sidewall surfaces, the exposed surfaces, the first and second sidewall surfaces forming grooves, each filler portion filling each groove, the two extending portions respectively connected to opposite sides of the filler portion, each extending portion being located between the corresponding transparent conductive layer and the second reflective layer, defining a light exit hole between two adjacent extending portions, corresponding to the transparent conductive layer.

[0014] In one possible embodiment, the vertical cavity surface emitting laser with transparent conductive layers further includes a plurality of fillers, the fillers being a conductive material or a dielectric material, each filler including a filler portion and two extending portions, defining first and second sidewall surfaces on the lateral sides of the reflective portion, the active light emitting layer, and the second reflective layer, corresponding to the exposed surfaces, the exposed surfaces, the first and second sidewall surfaces forming grooves, each filler portion filling each groove, and the two extending portions respectively connecting to opposite sides of the filler portion, each extending portion being located on a respective transparent conductive layer, and defining a light exit hole between two adjacent extending portions, corresponding to the transparent conductive layers.

[0015] In one possible embodiment, there are multiple electrode layers, each positioned corresponding to a respective reflective portion, and the length of each electrode layer in the first direction is less than or equal to the length of each transparent conductive layer in the first direction.

[0016] In one possible embodiment, the length of each transparent conductive layer in the first direction is equal to or less than the length of each reflective portion in the first direction.

[0017] In one possible embodiment, the transparent conductive layer is a thin metal film or an indium tin oxide layer. [Effects of the Invention]

[0018] One of the beneficial effects of the present invention is that the vertical cavity surface emitting laser having the transparent conductive layer provided by the present invention uses the transparent conductive layer to conduct current, and the vertical cavity surface emitting laser does not have a current limiting layer (especially an oxide layer formed by oxidation treatment), and thus does not have defects caused by oxidation treatment, further improving the quality of the vertical cavity surface emitting laser.

[0019] One of the beneficial effects of the present invention is that the vertical cavity surface emitting laser having the transparent conductive layer provided by the present invention does not have an oxide layer formed by an oxidation treatment, so that a vertical cavity surface emitting laser with a small size of the mesa, light output surface, or light output hole can be manufactured. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a cross-sectional view of a vertical cavity surface emitting laser having a transparent conductive layer according to an embodiment of the present invention. [Figure 2] 1 is a cross-sectional view of a vertical cavity surface emitting laser having a transparent conductive layer according to an embodiment of the present invention. [Figure 3] 1 is a cross-sectional view of a vertical cavity surface emitting laser having a transparent conductive layer according to an embodiment of the present invention. [Figure 4] 1 is a cross-sectional view of a vertical cavity surface emitting laser having a transparent conductive layer according to an embodiment of the present invention. [Figure 5]1 is a cross-sectional view of a vertical cavity surface emitting laser having a transparent conductive layer according to an embodiment of the present invention. [Figure 6] 1 is a cross-sectional view of a vertical cavity surface emitting laser having a transparent conductive layer according to an embodiment of the present invention. [Figure 7] 1 is a cross-sectional view of a vertical cavity surface emitting laser having a transparent conductive layer according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0021] In order to better understand the features and technical contents of the present invention, reference is made to the following detailed description and drawings of the present invention, but the drawings provided are for reference and explanation only and do not limit the present invention.

[0022] The following describes the implementation of the "vertical-cavity surface-emitting laser with a transparent conductive layer" disclosed by the present invention through specific examples, but those skilled in the art can understand the advantages and effects of the present invention from the disclosure of this specification. The present invention can be implemented or applied through other different specific examples, and various modifications and changes can be made to the details herein based on different perspectives and applications without departing from the concept of the present invention. Furthermore, it should be noted in advance that the accompanying drawings of the present invention are for simple schematic illustrations only and are not drawn to actual size. The technical content of the present invention will be described in more detail based on the following embodiments, but the disclosed content does not limit the protection scope of the present invention.

[0023] It should be understood that although the present specification may use terms such as "first" and "second" to describe various elements or signals, these elements or signals are not limited by these terms. These terms are mainly used to distinguish one element from another element or one signal from another signal. Furthermore, the term "or" used in the present specification may include any one or more combinations of the associated listed items, depending on the actual situation. [Example]

[0024] 1, which is a cross-sectional view of a vertical cavity surface-emitting laser Z1 with a transparent conductive layer according to one embodiment of the present invention. The vertical cavity surface-emitting laser Z1 with a transparent conductive layer includes a substrate 1, an electrode layer 2, a first reflective layer 3, a plurality of active light-emitting layers 4, a plurality of second reflective layers 5, and a plurality of transparent conductive layers 6.

[0025] The substrate 1 has a top surface 11 and a bottom surface 12. The electrode layer 2 is provided on the bottom surface 12. The first reflective layer 3 is provided on the top surface 11, and includes a base portion 31 and a plurality of reflective portions 32. The reflective portions 32 are arranged on the base portion 31 at intervals, with a gap between each adjacent pair of reflective portions 32. Areas on the surface of the first reflective layer 3 that do not have the reflective portions 32 define a plurality of exposed surfaces 311. The active light-emitting layers 4 are respectively positioned on the reflective portions 32 in a corresponding manner. The second reflective layers 5 are respectively positioned on the active light-emitting layers 4 in a corresponding manner. The transparent conductive layers 6 are respectively positioned on the second reflective layers 5 in a corresponding manner.

[0026] The substrate 1 can be an insulating substrate or a semiconductor substrate. The insulating substrate is, for example, sapphire, and the semiconductor substrate is, for example, silicon, germanium, silicon carbide, or a III-V semiconductor. The III-V semiconductor is, for example, gallium arsenide (GaAs), arsenic phosphide (InP), aluminum nitride (AIN), indium nitride (InN), or gallium nitride (GaN). In one embodiment, the electrode layer 2 is a metal or alloy and is disposed on the bottom surface 12 of the substrate 1. In one embodiment, the first reflective layer 3 and the second reflective layer 5 are distributed Bragg reflectors (DBRs) formed by alternately stacking two types of thin films with different refractive indexes, thereby reflecting and resonating a beam having a predetermined wavelength. In one embodiment, the materials of the first reflective layer 3 and the second reflective layer 5 are doped III-V compound semiconductors. In another embodiment, the first reflective layer 3 and the second reflective layer 5 have different conductivity types. For example, the first reflective layer 3 is an N-type semiconductor layer, and the second reflective layer 5 is a P-type semiconductor layer. In one embodiment, the transparent conductive layer 6 is an indium tin oxide layer, which has optical transparency and electrical conductivity and can be used as an electrical contact. In one embodiment, a separate electrode layer (or electrical contact) may or may not be disposed on the surface of the transparent conductive layer 6. In another embodiment, the transparent conductive layer 6 may be a metal thin film, which, when thin enough, also has optical transparency and can be used in vertical cavity surface emitting lasers.

[0027] In one embodiment, the base portion 31 and the plurality of reflective portions 32 are formed by etching the first reflective layer 3, and the plurality of reflective portions 32 are arranged in an array on the base portion 31. For example, after depositing the first reflective layer 3, the active light-emitting layer 4, and the second reflective layer 5, the second reflective layer 5, the active light-emitting layer 4, and the first reflective layer 3 are etched in this order along the vertical direction D2, thereby forming the base portion 31 and the plurality of reflective portions 32 on the first reflective layer 3. However, the present invention is not limited thereto, and in one embodiment, after depositing the base portion 31, a reflective layer may be deposited on the base portion 31, and then the plurality of reflective portions 32 may be formed by etching.

[0028] In one embodiment, the surface of the transparent conductive layer 6 is the light-emitting surface 61, and the length L2 of the light-emitting surface 61 is 10 μm (micrometers) or less. That is, in one embodiment, the length of the mesa in the first direction D1 is 10 μm or less. The mesa portion includes a reflective portion 32, an active light-emitting layer 4, a second reflective layer 5, and a transparent conductive layer 6. With this structure, the size of the light-emitting surface 61 (or light-emitting hole O, see below) is small, so the beam can be emitted in a nearly straight direction, resulting in a focused beam.

[0029] Referring to FIG. 2, FIG. 2 is a cross-sectional view of a vertical cavity surface-emitting laser Z2 having a transparent conductive layer according to one embodiment of the present invention. In this embodiment, there are multiple electrode layers 2, each positioned corresponding to a respective reflector 32. The length L1 of each electrode layer 2 in the first direction D1 is less than the length L2 of each transparent conductive layer 6 in the first direction D1. The sidewall surfaces formed on the same side of the reflector 32, active light-emitting layer 4, second reflector layer 5, and transparent conductive layer 6 may have defects, which are unfavorable for current flow. Therefore, by designing the length L1 of the electrode layer 2 to be shorter than the length L2 of the transparent conductive layer 6 (or shorter than the length of the mesa), current can be concentrated and more easily flow through the electrode layer 2. Furthermore, in one embodiment, the length L2 of the transparent conductive layer 6 in the first direction D1 is less than the length of the reflector 32 in the first direction D1.

[0030] Referring to FIG. 3, FIG. 3 is a cross-sectional view of a vertical cavity surface-emitting laser Z3 with a transparent conductive layer according to one embodiment of the present invention. In this embodiment, the vertical cavity surface-emitting laser Z3 with a transparent conductive layer further includes a protective layer 7. The protective layer 7 includes a plurality of bottom portions 71, a plurality of side portions 72, and a plurality of extension portions 73. Both sides of each bottom portion 71 are connected to one end of each side portion 72, and each extension portion 73 is connected to the other end of each side portion 72. Each bottom portion 71 covers the exposed surface 311. Each side portion 72 covers the same side of each reflective portion 32, each active light-emitting layer 4, and each second reflective layer 5. Each extension portion 73 is located between the transparent conductive layer 6 and the second reflective layer 5, and defines a light-emitting hole O between two adjacent extension portions 73 corresponding to the transparent conductive layer 6. In one embodiment, the material of the protective layer 7 is aluminum oxide (AlO). x ), silicon oxide (SiO x ), or silicon nitride (SiN x ) In one embodiment, the diameter d of the light exit hole O is 10 μm or less. In another embodiment, the length of each active light-emitting layer 4 in the first direction D1 is equal to or greater than the diameter d of each light exit hole O in the first direction D1 so that the beam emitted from the light exit hole O can be emitted in a nearly straight line.

[0031] Referring to FIG. 4, FIG. 4 is a cross-sectional view of a vertical cavity surface-emitting laser Z4 with a transparent conductive layer according to one embodiment of the present invention. In this embodiment, the vertical cavity surface-emitting laser Z4 with a transparent conductive layer further includes a plurality of connectors 8, each connector 8 and each transparent conductive layer 6 are made of the same material. Both ends of each connector 8 are connected to a transparent conductive layer 6 and another adjacent transparent conductive layer 6, and each connector 8 covers two opposite sides 72 and a corresponding bottom 71. In one embodiment, the connectors 8 and the transparent conductive layer 6 belong to the same layer structure. The embodiment shown in FIG. 4 facilitates the fabrication of a vertical cavity surface-emitting laser and provides better current guiding.

[0032] 5, which is a cross-sectional view of a vertical cavity surface emitting laser Z5 having a transparent conductive layer 6 according to an embodiment of the present invention. The difference from the embodiment shown in FIG. 3 is that in the embodiment shown in FIG. 5, each extension 73 is located on the transparent conductive layer 6. According to the embodiment of FIG. 5, the length L3 of the active light emitting layer 4 in the first direction D1 may be equal to or greater than the diameter d of the light output hole O in the first direction D1.

[0033] 6, which is a cross-sectional view of a vertical cavity surface-emitting laser Z6 with a transparent conductive layer according to one embodiment of the present invention. In this embodiment, the vertical cavity surface-emitting laser Z6 with a transparent conductive layer further includes a plurality of fillers 9, each of which includes a filler portion 91 and two extending portions 92, defining a first side wall S1 and a second side wall S2 on the side surfaces of the reflective portion 32, the active light-emitting layer 4, and the second reflective layer 5, respectively, corresponding to each exposed surface 311. The exposed surface 311, the first side wall S1, and the second side wall S2 form a groove V, each of which fills the groove V, and two extending portions 92 are respectively connected to opposite sides of the filler portion 91. Each extending portion 92 is located between the corresponding transparent conductive layer 6 and the second reflective layer 5, defining a light-emitting hole O between two adjacent extending portions 92, respectively, corresponding to the transparent conductive layer 6.

[0034] The filler 9 is a conductive material, and in one embodiment, the filler 9 is a metal. The advantage of filling the groove V with a metal is that it improves the heat dissipation effect of the vertical cavity surface emitting laser while achieving the effect of aligning the current flow direction (current flows from the transparent conductive layer 6 toward the electrode layer 2). In another embodiment, the filler 9 is a dielectric material (e.g., polyimide (PI) resin).

[0035] 7, which is a cross-sectional view of a vertical cavity surface-emitting laser Z7 having a transparent conductive layer 6 according to one embodiment of the present invention. The difference from the embodiment shown in FIG. 6 is that the extension portion 92 of the vertical cavity surface-emitting laser Z7 shown in FIG. 7 is located on the transparent conductive layer 6. [Industrial Applicability]

[0036] [Beneficial Effects of Examples] One of the beneficial effects of the present invention is that the vertical cavity surface emitting laser having the transparent conductive layer provided by the present invention does not have a current limiting layer (particularly, an oxide layer formed by oxidation treatment), which eliminates defects caused by oxidation treatment and improves the quality of the vertical cavity surface emitting laser.

[0037] Furthermore, according to one embodiment of the present invention, the size of the mesa of the vertical cavity surface-emitting laser is reduced, and the size of its light-emitting surface (the diameter of the light-emitting hole) is small, so that the light rays are emitted from the light-emitting hole in a nearly straight direction, and the light rays are concentrated, thereby improving the light-emitting effect of the vertical cavity surface-emitting laser.

[0038] Furthermore, according to one embodiment of the present invention, the grooves of the vertical cavity surface emitting laser are filled with metal, which improves the heat dissipation function of the vertical cavity surface emitting laser and guides the current, thereby aligning the current flow and improving the effectiveness of the vertical cavity surface emitting laser.

[0039] Additionally, according to one embodiment of the present invention, the grooves of the vertical cavity surface emitting laser are filled with a dielectric material.

[0040] The above disclosure is merely a preferred embodiment of the present invention, and the scope of the claims of the present invention is not limited thereto. Therefore, all equivalent technical modifications made by utilizing the contents of the specification and drawings of the present invention are included in the scope of the claims of the present invention. [Explanation of symbols]

[0041] Z1-Z7 Vertical-cavity surface-emitting lasers with transparent conductive layers 1 board 11 Top 12 Bottom 2 electrode layer 3 First Reflective Layer 31 Base 311 Exposed surface 32 Reflector 4. Active light-emitting layer 5 Second Reflective Layer 6 Transparent conductive layer 61 Idemitsu surface 7 Protective layer 71 Bottom 72 Side 73 Extension section 8 Connection 9 Filler 91 Filling section 92 Extension part V groove S1 First side wall S2 Second side wall d Pore diameter L1~L3 length O Light outlet D1 First direction D2 Second direction

Claims

1. a substrate having a top surface and a bottom surface; At least one electrode layer disposed on the bottom surface; a first reflective layer disposed on the top surface and including a base portion and a plurality of reflective portions; a plurality of active light-emitting layers respectively positioned on the plurality of reflecting portions; a plurality of second reflective layers respectively positioned on the plurality of active light-emitting layers; a plurality of transparent conductive layers respectively positioned on the plurality of second reflective layers; A vertical cavity surface emitting laser having a transparent conductive layer, wherein the plurality of reflective portions are arranged on the base portion at intervals, there is a gap between two adjacent reflective portions, and an area on the surface of the first reflective layer that does not have the plurality of reflective portions defines a plurality of exposed surfaces.

2. 2. The vertical cavity surface emitting laser with a transparent conductive layer according to claim 1, further comprising a protective layer including a plurality of bottom portions, a plurality of side portions, and a plurality of extension portions, wherein both sides of each of the bottom portions are connected to one end of each of the side portions, each of the extension portions is connected to the other end of each of the side portions, each of the bottom portions covers each of the exposed surfaces, each of the side portions covers the same side of each of the reflective portions, each of the active light emitting layers, and each of the second reflective layers, each of the extension portions is located between the transparent conductive layer and the second reflective layer, and a light output hole is defined between two adjacent extension portions to correspond to the transparent conductive layer.

3. 3. The vertical cavity surface emitting laser with a transparent conductive layer according to claim 2, further comprising a plurality of connecting portions, each of which is made of the same material as each of the transparent conductive layers, each of which has both ends connected to another transparent conductive layer adjacent to the transparent conductive layer, and each of which covers two of the opposing side portions and the corresponding bottom portion.

4. 4. The vertical cavity surface emitting laser having a transparent conductive layer according to claim 2, wherein the length of each of the active light emitting layers in the first direction is equal to or greater than the diameter of each of the light output holes in the first direction.

5. 2. The vertical cavity surface emitting laser with transparent conductive layer according to claim 1, further comprising a protective layer including a plurality of bottom portions, a plurality of side portions, and a plurality of extension portions, wherein both sides of each of the bottom portions are connected to one end of each of the side portions, and each of the extension portions is connected to the other end of each of the side portions, each of the bottom portions covers each of the exposed surfaces, and each of the side portions covers the same side of each of the reflective portions, each of the active light emitting layers, each of the second reflective layers, and each of the transparent conductive layers, each of the extension portions is located on the transparent conductive layer, and a light output hole is defined between two adjacent extension portions corresponding to the transparent conductive layer.

6. 6. The vertical cavity surface emitting laser having a transparent conductive layer according to claim 5, wherein the length of each of the active light emitting layers in the first direction is equal to or greater than the diameter of each of the light emitting holes in the first direction.

7. 2. The vertical cavity surface emitting laser with transparent conductive layer according to claim 1, further comprising a plurality of fillers, each of which is a conductive material or a dielectric material, and each of which includes a filling portion and two extension portions, and defines first and second sidewall surfaces on side surfaces of the reflective portion, the active light emitting layer, and the second reflective layer, corresponding to each of the exposed surfaces, the exposed surfaces, the first sidewall surface, and the second sidewall surface form grooves, each of which fills each of the grooves, the two extension portions are respectively connected to opposite sides of the filling portion, each of which is located between a corresponding one of the transparent conductive layers and the second reflective layer, and a light output hole is defined between two adjacent extension portions, corresponding to each of the transparent conductive layers.

8. 2. The vertical cavity surface emitting laser with transparent conductive layer according to claim 1, further comprising a plurality of fillers, each of which is a conductive material or a dielectric material, and each of which includes a filling portion and two extension portions, and defines first and second sidewall surfaces on side surfaces of the reflective portion, the active light emitting layer, and the second reflective layer, corresponding to each of the exposed surfaces, the exposed surfaces, the first sidewall surface, and the second sidewall surface form grooves, each of which fills each of the grooves, the two extension portions are respectively connected to opposite sides of the filling portion, each of which extension portions is located on each of the transparent conductive layers, and a light output hole is defined between two adjacent extension portions, corresponding to each of the transparent conductive layers.

9. 2. The vertical cavity surface emitting laser having a transparent conductive layer according to claim 1, wherein the electrode layers are plural, each positioned corresponding to each of the reflecting portions, and the length of each of the electrode layers in the first direction is equal to or less than the length of each of the transparent conductive layers in the first direction.

10. 10. The vertical cavity surface emitting laser having a transparent conductive layer according to claim 9, wherein the length of each of the transparent conductive layers in the first direction is equal to or less than the length of each of the reflecting portions in the first direction.

11. 2. The vertical cavity surface emitting laser having a transparent conductive layer according to claim 1, wherein the transparent conductive layer is a metal thin film or an indium tin oxide layer.

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