Machining apparatus

Abstract

To provide a worker with an image which allows the worker to easily determine which image is captured from above a holding table and which image is captured from below the holding table.SOLUTION: A first imaging unit that is disposed above the holding table and images a first region of a first surface of the workpiece, a second imaging unit that is disposed below the holding table and images a second region of a second surface corresponding to the first region of the first surface via a predetermined region of the holding table, a first image obtained by imaging the first region, and a second image obtained by imaging the second region; And a controller, wherein the controller sets at least a part of one or both of the first image and the second image to a color different from that of the original image and then displays the first and second images on the display device.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a processing device for processing a workpiece. [Background technology]

[0002] 2. Description of the Related Art Semiconductor device chips used in electronic devices such as mobile phones and PCs (Personal Computers) are manufactured by processing a disk-shaped wafer (workpiece) made of a semiconductor material such as silicon.

[0003] A plurality of planned division lines are set in a grid pattern on the surface side of the workpiece, and a device such as an IC (Integrated Circuit) is formed in each of a plurality of rectangular areas partitioned by the planned division lines.

[0004] To manufacture device chips from a workpiece, for example, the back surface of the workpiece is ground to thin the workpiece to a predetermined thickness, and then the workpiece is cut along each planned division line to divide the workpiece into device units.

[0005] In the cutting process for cutting the workpiece, a cutting device is used that includes a cutting unit having a spindle with a cutting blade attached to one end and a holding table that holds the workpiece by suction. In a typical cutting process, the workpiece is first placed with its front side facing up, and its back side is held by suction on the holding table via dicing tape.

[0006] After suction holding, the surface of the workpiece is imaged with a microscope camera installed above the holding table, and alignment is performed based on the image. This makes the planned dividing lines approximately parallel to the processing feed direction. Next, the holding table is processed and fed relative to the cutting blade rotating around the spindle, cutting the workpiece along each planned dividing line.

[0007] In recent years, with the diversification of devices, a processing method has been developed in which the workpiece is suction-held on a holding table with the back surface of the workpiece facing upward and the front surface of the workpiece facing downward, and then cut the workpiece (see, for example, Patent Document 1).

[0008] When imaging a subject using visible light, if the surface of the workpiece is facing downwards, and visible light cannot pass through the workpiece, such as a wafer, the surface of the workpiece cannot be imaged using a microscope camera. Also, if a metal film is provided on the backside of the workpiece, the surface of the workpiece cannot be imaged using a microscope camera, even if infrared light is used.

[0009] In other words, there are cases where alignment cannot be performed using a microscope camera installed above the holding table. Therefore, the applicant developed a cutting device in which a microscope camera is installed below the holding table and an image of the surface of the workpiece is captured from below the holding table through a holding member made of glass or the like that is transparent to visible light (see, for example, Patent Document 2).

[0010] Furthermore, the applicant has also developed a technology for displaying on a display device both an image of the back surface of the workpiece taken by a microscope camera positioned above the holding table and an image of the front surface of the workpiece taken by a microscope camera positioned below the holding table (see, for example, Patent Document 3). [Prior art documents] [Patent documents]

[0011] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-140341 [Patent Document 2] Japanese Patent Application Laid-Open No. 2010-87141 [Patent Document 3] Patent Publication No. 2021-89938 Summary of the Invention [Problem to be solved by the invention]

[0012] However, when images of both the front and back sides of the workpiece are displayed on a display device, both images are similar and displayed in grayscale, which makes it difficult for the worker to distinguish which image was taken from above the holding table and which image was taken from below the holding table. The same problem occurs even if the images of the front and back sides are displayed in color.

[0013] The present invention has been made in consideration of the above problems, and aims to provide an image that allows an operator to easily distinguish which image was taken from above the holding table and which image was taken from below the holding table when both images of the front and back sides are displayed on a display device. [Means for solving the problem]

[0014] According to one aspect of the present invention, there is provided a processing device for processing a workpiece having a first surface and a second surface located on the opposite side of the first surface in a thickness direction, the processing device comprising: a holding table formed of a transparent material and having a predetermined area that is transparent from the front surface to the back surface, for holding the workpiece; a processing unit for processing the workpiece held by the holding table; a first imaging unit arranged above the holding table and for imaging a first area of ​​the first surface of the workpiece held by the holding table so that the first surface is exposed upward; and a second imaging unit arranged below the holding table and for imaging the first area of ​​the first surface in the thickness direction of the workpiece. A processing device is provided, which includes a second imaging unit that images a second area of ​​the second surface corresponding to the first area through the specified area of ​​the holding table, a display device that displays a first image obtained by imaging the first area and a second image obtained by imaging the second area, and a controller having a processor and memory that controls the operation of the processing unit, the first imaging unit, the second imaging unit and the display device, wherein the controller changes at least a portion of one or both of the first image and the second image to a color different from that of the original image, and then displays the first image and the second image on the display device.

[0015] Preferably, when the first image includes a machining groove but the second image does not include a machining groove, the controller causes the first image and the second image to be displayed on the display device with the machining groove in the first image in a color different from that in the original image.

[0016] In addition, preferably, when the first image includes a machining groove but the second image does not include a machining groove, the controller causes the display device to display the first image and the second image after coloring the area of ​​the first image other than the machining groove in a different color from the original image.

[0017] Furthermore, preferably, when the first image includes a machining groove but the second image does not include a machining groove, the controller colors the machining groove in the first image a first color different from that of the original image, or colors the area of ​​the first image other than the machining groove in the first image the first color different from that of the original image, and colors the entire planned division line included in the second image a second color different from that of the original image and different from the first color, or colors the area of ​​the second image other than the planned division line in the second image the second color different from that of the original image and different from the first color, and colors the overlapping area of ​​the first color and the second color a third color different from the first color and the second color.

[0018] In addition, preferably, when both the first image and the second image contain processing grooves, the controller causes the processing grooves in one of the first image and the second image to be displayed in a color different from that of the original image, and then causes the first image and the second image to be displayed superimposed on each other on the display device.

[0019] Furthermore, preferably, when changing the color of at least a portion of both the first image and the second image, the controller changes the color of at least a portion of the first image and at least a portion of the second image to a different color from that of the original image so that the first color applied to the first image and the second color applied to the second image differ in at least one of hue, lightness, and saturation, and then displays the first image and the second image on the display device.

[0020] In addition, preferably, when both the first image and the second image include processing grooves, the controller causes the display device to display the first image and the second image after changing the processing grooves in both images to colors different from those in the original images so that the first color and the second color differ in at least one of hue, lightness, and saturation.

[0021] Furthermore, preferably, when a machining groove is included in both the first image and the second image, the controller causes the machining groove in the first image to be a different color from that in the original image so that the first color and the second color differ in at least one of hue, brightness, and saturation, and causes the area other than the machining groove in the second image to be a different color from that in the original image, and then superimposes and displays the first image and the second image on the display device; or causes the area other than the machining groove in the first image to be a different color from that in the original image so that the first color and the second color differ in at least one of hue, brightness, and saturation, and causes the machining groove in the second image to be a different color from that in the original image, and then superimposes and displays the first image and the second image on the display device.

[0022] Also, preferably, when a machining groove is included in both the first image and the second image, the controller colors the machining groove in the first image a first color different from that of the original image, or colors the area other than the machining groove in the first image a first color different from that of the original image and colors the machining groove in the second image a second color different from that of the original image and different from the first color, or colors the area other than the machining groove in the second image a second color different from that of the original image and different from the first color, and colors the overlapping area of ​​the first color and the second color a third color different from the first color and the second color.

[0023] In addition, preferably, when the second image includes a predetermined pattern provided on the second surface of the workpiece, the controller causes the first image and the second image to be displayed on the display device after making the predetermined pattern in the second image a color different from that of the original image.

[0024] Furthermore, preferably, when the second image includes a planned dividing line provided on the second surface of the workpiece, the controller causes the first image and the second image to be displayed on the display device after coloring the outline of the planned dividing line or the entire planned dividing line in a color different from that of the original image. [Effects of the Invention]

[0025] In a processing device according to one embodiment of the present invention, a controller changes at least a portion of one or both of the first image and the second image to a color different from that of the original image, and then displays the first image and the second image on a display device.

[0026] The operator can know in advance which image to color, or which part of which image or which part of both images to color, and can set it himself / herself in advance. Therefore, it is easy to distinguish which image was taken from above the holding table and which image was taken from below the holding table. [Brief explanation of the drawings]

[0027] [Figure 1] FIG. [Figure 2] FIG. [Figure 3] FIG. [Figure 4] FIG. 4(A) is a partial cross-sectional side view of the chuck table and the like, and FIG. 4(B) is an enlarged view of area A in FIG. 4(A). [Figure 5] FIG. 2 is an enlarged perspective view of a Z-axis direction moving mechanism and the like. [Figure 6] FIG. 10 is a diagram showing how a cutting groove is formed in a workpiece. [Figure 7] FIG. 7(A) is an example of a first image, FIG. 7(B) is an example of a second image, and FIG. 7(C) is an example of a superimposed image. [Figure 8] FIG. 10 is a diagram showing a first modified example of a superimposed image. [Figure 9]FIG. 9(A) is a diagram showing a second modified example of the superimposed image, FIG. 9(B) is a diagram showing a third modified example of the superimposed image, and FIG. 9(C) is a diagram showing a fourth modified example of the superimposed image. [Figure 10] 10(A), 10(B), 10(C) and 10(D) are diagrams showing a fifth modified example of the superimposed image. [Figure 11] FIG. 11(A) is a diagram showing an example of an image in which a first image and a second image are displayed side by side horizontally, and FIG. 11(B) is a diagram showing an example of an image in which a first image and a second image are displayed side by side vertically. [Figure 12] 10A and 10B are diagrams showing how a cut groove is formed in a workpiece in the second embodiment. [Figure 13] Figure 13(A) is an example of a first image in the second embodiment, Figure 13(B) is an example of a second image in the second embodiment, and Figure 13(C) is an example of a superimposed image in the second embodiment. [Figure 14] 10 is a first modified example of a superimposed image in the second embodiment. [Figure 15] 10 is a second modified example of a superimposed image in the second embodiment. [Figure 16] 10 is a third modified example of a superimposed image in the second embodiment. [Figure 17] FIG. 2 is a perspective view of the laser processing device. DETAILED DESCRIPTION OF THE INVENTION

[0028] (First embodiment) An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view of a cutting device 2 according to a first embodiment. In Fig. 1, some of the components are shown in a functional block diagram.

[0029] The X-axis direction, Y-axis direction, and Z-axis direction shown in Figure 1 are perpendicular to each other. The +X direction and -X direction are parallel to the X-axis and opposite directions to each other. The +Y direction and -Y direction are parallel to the Y-axis and opposite directions to each other, and the +Z direction and -Z direction are parallel to the Z-axis and opposite directions to each other.

[0030] The cutting device (processing device) 2 has a base 4 that supports each of the components. An opening 4a is formed in the front corner (+Y direction) of the base 4, and a cassette elevator (not shown) is provided inside this opening 4a. A cassette 6 for storing multiple workpieces 11 (see FIG. 2) is placed on the top surface of the cassette elevator.

[0031] 1, for ease of explanation, only the outline of the cassette 6 is shown. The workpiece 11 is a disk-shaped wafer, and has, for example, a single crystal substrate made of a semiconductor material such as silicon. However, there are no limitations on the material, shape, structure, size, etc. of the workpiece 11.

[0032] 2, a plurality of mutually orthogonal division lines 13 are set on the surface (second surface) 11a of the workpiece 11. The plurality of division lines 13 divide the surface 11a into a plurality of rectangular regions.

[0033] In each rectangular region on the surface 11a, a device 15 such as an IC, alignment marks 15a (see FIG. 7(B)), etc. are formed. In this specification, the device 15, alignment marks 15a, etc. are referred to as a predetermined pattern provided on the surface 11a.

[0034] However, there are no restrictions on the type, number, shape, structure, size, arrangement, etc. of the devices 15 on the workpiece 11. The devices 15 do not have to be formed on the workpiece 11. There are also no restrictions on the type, number, shape, size, arrangement, etc. of the alignment marks 15a.

[0035] A dicing tape 17 having a diameter larger than that of the workpiece 11 is attached to the surface 11a of the workpiece 11. The dicing tape 17 is made of a substantially transparent resin material that is transmissive to visible light. The dicing tape 17 has a laminated structure of, for example, a base layer and an adhesive layer (glue layer).

[0036] The base layer is made of, for example, polyolefin (PO), and the adhesive layer is made of, for example, an adhesive resin such as an ultraviolet (UV) curable acrylic resin. The adhesive layer of this dicing tape 17 is attached to the surface 11a.

[0037] A metal annular frame 19 is attached to the outer periphery of the dicing tape 17. That is, the workpiece 11 is accommodated in the cassette 6 as a workpiece unit 21 supported by the frame 19 via the dicing tape 17.

[0038] 2 is a perspective view of workpiece unit 21. In the configuration of workpiece unit 21, a back surface (first surface) 11b located on the opposite side to front surface 11a in thickness direction 11c (see FIG. 6) of workpiece 11 is exposed upward.

[0039] Returning now to Fig. 1, an opening 4b is formed behind the opening 4a (in the -Y direction), with its long side aligned along the X-axis. A chuck table (holding table) 10 is provided in the opening 4b. The chuck table 10 and other components will now be further described with reference to Figs. 3, 4(B), and 4(A).

[0040] Fig. 3 is a perspective view of the chuck table 10 etc. Fig. 4(A) is a partial cross-sectional side view of the chuck table 10 etc., and Fig. 4(B) is an enlarged view of area A in Fig. 4(A). However, for convenience, hatching is omitted in Fig. 4(A), and Fig. 4(B) shows some of the components in a functional block diagram.

[0041] As shown in Fig. 3, the chuck table 10 has a disk-shaped holding member 12. The holding member 12 includes a generally flat front surface (holding surface) 12a and a back surface 12b (see Fig. 4(B)) located on the opposite side of the front surface 12a. The holding member 12 is entirely made of a transparent material that transmits visible light, such as soda glass, borosilicate glass, or quartz glass.

[0042] A plurality of flow paths are formed inside the holding member 12. When the holding member 12 is viewed from above, a linear first suction path 12c1 is formed inside the holding member 12 so as to cross the center of the disk. Also, a linear second suction path 12c2 is formed inside the holding member 12 along the front surface 12a and the back surface 12b so as to be perpendicular to the first suction path 12c1.

[0043] The first suction path 12c1 and the second suction path 12c2 intersect and are connected to each other at an intersection 12c3 located at the center of the disk. A plurality of openings 12d are formed at predetermined intervals along the circumferential direction of the holding member 12 on the outer periphery of the surface 12a.

[0044] Each opening 12d is located at the upper end of a columnar flow path (see FIG. 4(B)) that is formed from the front surface 12a to a predetermined depth that does not reach the back surface 12b. Openings 12d are connected to both ends of the first suction path 12c1 and both ends of the second suction path 12c2.

[0045] Each opening 12d is connected in the circumferential direction by a corresponding columnar flow path and an outer circumferential suction path 12e formed at a predetermined depth on the outer periphery of the holding member 12. Further, a suction path 12f (see FIG. 4(B)) extending along the radial direction of the holding member 12 is formed outside each opening 12d and the columnar flow path.

[0046] As shown in Figure 4(B), suction path 12f is connected to suction source 14, such as a vacuum pump or an ejector. Negative pressure generated by suction source 14 is transmitted to opening 12d. This negative pressure causes surface 12a to function as a holding surface that sucks and holds workpiece unit 21 (workpiece 11).

[0047] However, in the flow paths such as the first suction path 12c1, the second suction path 12c2, the opening 12d, the columnar flow path, the outer peripheral suction path 12e, and the suction path 12f, which are respectively formed in the holding member 12, a portion of the light incident on the holding member 12 is scattered or reflected.

[0048] Therefore, when viewed from the front surface 12a or the back surface 12b, the flow path of the holding member 12 is not completely transparent to visible light, but may be translucent or opaque. However, a predetermined region of the holding member 12 excluding the flow path is transparent to visible light from the front surface 12a to the back surface 12b.

[0049] Specifically, each predetermined area 12g (see Figure 3) that is divided into four parts by the first suction path 12c1 and the second suction path 12c2 and is located radially inward of the outer peripheral suction path 12e of the holding member 12 is transparent to visible light from the front surface 12a to the back surface 12b.

[0050] A cylindrical frame 16 made of a metal material such as stainless steel is provided on the outer periphery of the holding member 12. An opening 16a is formed in the upper part of the frame 16 (see FIG. 4(B)), and the holding member 12 is arranged so as to close this opening 16a.

[0051] An annular frame suction plate (not shown) having suction ports formed discretely along the circumferential direction of the chuck table 10 is provided on the outer periphery of the frame 16 in the radial direction of the chuck table 10. The frame 19 of the workpiece unit 21 is held by suction on the frame suction plate.

[0052] 3 and 4(A), the frame body 16 is supported by a first moving table 18. The first moving table 18 includes a bottom plate 18a that is rectangular when viewed from the Z-axis direction. A lower end of a side plate 18b that is rectangular when viewed from the Y-axis direction is connected to one end of the front (+Y direction) of the bottom plate 18a.

[0053] One end located in front of a top plate 18c, which has the same shape as the bottom plate 18a when viewed from the Z-axis direction, is connected to the upper end of the side plate 18b. A space 18d is formed between the bottom plate 18a and the top plate 18c, with one end located in the rear (-Y direction) and both ends in the X-axis direction being open.

[0054] A pair of X-axis guide rails 20 are provided below (in the -Z direction) the bottom plate 18a. The bottom plate 18a is slidably attached to the pair of X-axis guide rails 20. The pair of X-axis guide rails 20 are fixed to the upper surface of a stationary base (not shown) and are arranged substantially parallel to the X-axis direction.

[0055] An X-axis linear scale 20a used to detect the position of the first moving table 18 in the X-axis direction is provided adjacent to the X-axis guide rail 20. In addition, a reading head (not shown) is provided on the underside of the first moving table 18.

[0056] When the first moving table 18 moves, the position (coordinate) of the first moving table 18 in the X-axis direction and the amount of movement in the X-axis direction are calculated by reading the scale of the X-axis linear scale 20a with a reading head.

[0057] A nut portion (not shown) is provided on the underside of the bottom plate 18a of the first moving table 18, and a screw shaft 22 is rotatably coupled to this nut portion via a plurality of balls (not shown). The longitudinal direction of the screw shaft 22 is approximately parallel to the X-axis.

[0058] A drive source 24 such as a servo motor or a stepping motor is connected to one end of the screw shaft 22. When the drive source 24 rotates the screw shaft 22, the first moving table 18 moves in the X-axis direction. The first moving table 18, the pair of X-axis guide rails 20, the screw shaft 22, the drive source 24, etc. constitute an X-axis direction moving mechanism 26.

[0059] The frame 16 is supported on the top plate 18c of the first moving table 18 in a manner that allows it to rotate around a rotation axis that is approximately parallel to the Z-axis direction. The frame 16 has a cylindrical side surface portion 16b. When the frame 16 is supported by the first moving table 18, the side surface portion 16b is located above the top plate 18c. As will be described later, the frame 16 functions as a driven pulley.

[0060] A drive source 30 such as a servo motor or a stepping motor is provided on the side plate 18b of the first moving table 18. A drive pulley 30a is provided on the output shaft of the drive source 30. An endless belt 28 is looped between the drive pulley 30a and the side surface portion 16b of the frame body 16.

[0061] When the drive source 30 is operated to rotate the drive pulley 30a, the frame 16 rotates due to the power transmitted via the endless belt 28. By controlling the rotation of the drive pulley 30a, the chuck table 10 can be rotated by any angle.

[0062] 3, a Y-axis direction moving mechanism 32 is provided near the X-axis direction moving mechanism 26. The Y-axis direction moving mechanism 32 has a pair of Y-axis guide rails 34. A second moving table 36 is slidably attached to the pair of Y-axis guide rails 34.

[0063] The pair of Y-axis guide rails 34 are fixed to the upper surface of a stationary base (not shown) and are arranged substantially parallel to the Y-axis direction. A Y-axis linear scale (not shown) used to detect the position of the second moving table 36 in the Y-axis direction is provided adjacent to the Y-axis guide rails 34. In addition, a reading head (not shown) is provided on the underside of the second moving table 36.

[0064] When the second moving table 36 moves, the position (coordinate) of the second moving table 36 in the Y-axis direction and the amount of movement in the Y-axis direction are calculated by reading the graduations of the Y-axis linear scale with a reading head. A nut portion (not shown) is provided on the underside of the second moving table 36.

[0065] A screw shaft 38 is rotatably coupled to this nut portion via a plurality of balls (not shown). The longitudinal direction of the screw shaft 38 is approximately parallel to the Y-axis. One end of the screw shaft 38 is coupled to a drive source 40 such as a servo motor or a stepping motor.

[0066] When the screw shaft 38 is rotated by the drive source 40, the second moving table 36 moves in the Y-axis direction. The pair of Y-axis guide rails 34, the second moving table 36, the screw shaft 38, the drive source 40, etc. constitute the Y-axis direction moving mechanism 32.

[0067] A Z-axis direction movement mechanism 42 is provided on the upper surface of the second moving table 36. Figure 5 is an enlarged perspective view of the Z-axis direction movement mechanism 42 and other components. The Z-axis direction movement mechanism 42 has a rectangular parallelepiped support structure 42a fixed to the upper surface of the second moving table 36.

[0068] A pair of Z-axis guide rails 44 is provided on the side surface of the support structure 42a that is closer to the first moving table 18. A first moving plate 46 is slidably attached to the pair of Z-axis guide rails 44.

[0069] The pair of Z-axis guide rails 44 are arranged substantially parallel to the Z-axis direction. A Z-axis linear scale (not shown) used to detect the position of the first moving plate 46 in the Z-axis direction is provided adjacent to the Z-axis guide rails 44. A reading head (not shown) is also provided on the rear surface of the first moving plate 46.

[0070] When the first moving plate 46 moves, the position (coordinates) of the first moving plate 46 in the Z-axis direction and the amount of movement in the Z-axis direction are calculated by reading the graduations of the Z-axis linear scale with a reading head. A nut portion (not shown) is provided on the back surface of the first moving plate 46.

[0071] A screw shaft 48 is rotatably coupled to this nut portion via a plurality of balls (not shown). The longitudinal direction of the screw shaft 48 is approximately parallel to the Z axis. A drive source 50 such as a servo motor or a stepping motor is coupled to the upper end of the screw shaft 48.

[0072] When the screw shaft 48 is rotated by the drive source 50, the first moving plate 46 moves in the Z-axis direction. The pair of Z-axis guide rails 44, the first moving plate 46, the screw shaft 48, the drive source 50, etc. constitute the Z-axis direction moving mechanism 42.

[0073] A base end of a support arm 52, whose longitudinal direction is arranged along the X-axis direction, is fixed to the first moving plate 46. A lower imaging unit (second imaging unit) 54 is fixed to the tip end of the support arm 52.

[0074] The lower imaging unit 54 of this embodiment includes a low-magnification camera 56 and a high-magnification camera 58. However, the lower imaging unit 54 does not have to have two cameras, the low-magnification camera 56 and the high-magnification camera 58. The lower imaging unit 54 may have only one camera with a predetermined magnification.

[0075] Each of the low-magnification camera 56 and the high-magnification camera 58 has an objective lens and an imaging element such as a charge-coupled device (CCD) image sensor or a complementary metal-oxide-semiconductor (CMOS) image sensor.

[0076] An illumination device 56a for irradiating a subject (e.g., workpiece 11) located above with visible light is provided on the side of low-magnification camera 56. Similarly, an illumination device 58a is provided on the side of high-magnification camera 58. Each of illumination devices 56a, 58a includes a light-emitting element (not shown) such as an LED (Light Emitting Diode).

[0077] The lower imaging unit 54 is disposed below the chuck table 10. When imaging an object with the lower imaging unit 54, the first moving table 18 is moved in the X-axis direction so that the lower imaging unit 54 enters the space 18d.

[0078] In this way, after the objective lenses of the low-magnification camera 56 and the high-magnification camera 58 are made to face the back surface 12b of the holding member 12, the front surface 11a of the workpiece 11 can be imaged from below by the low-magnification camera 56 and / or the high-magnification camera 58 through the predetermined region 12g of the chuck table 10. This makes it possible to obtain an image of the front surface 11a.

[0079] The image on the surface 11a in this embodiment is an image displayed in 8-bit (256 gradations) grayscale. However, instead of grayscale, the image on the surface 11a may be a color image expressed by additive color mixing combining red, green, and blue, or subtractive color mixing combining yellow, cyan, and magenta.

[0080] 1, we will now explain other components of the cutting device 2. A bellows-shaped, expandable cover member is provided between the top plate 18c and the opening 4b. Also, a gate-shaped support structure 4c is provided above the opening 4b so as to straddle the opening 4b.

[0081] The side surface of the support structure 4c in the -X direction is provided with two processing unit movement mechanisms (indexing feed unit, cutting feed unit) 60. A pair of Y-axis guide rails 62 is fixed to the side surface of the support structure 4c in the -X direction.

[0082] The pair of Y-axis guide rails 62 are arranged substantially parallel to the Y-axis direction. Two second moving plates 64 are attached to the pair of Y-axis guide rails 62 so as to be slidable independently of each other.

[0083] A Y-axis linear scale (not shown) used to detect the Y-axis position of the second moving plate 64 is provided at a position adjacent to the Y-axis guide rail 62. In addition, a reading head (not shown) is provided on the back surface of each second moving plate 64.

[0084] When the second moving plate 64 moves, the position (coordinate) of the second moving plate 64 in the Y-axis direction and the amount of movement in the Y-axis direction are calculated by reading the graduations of the Y-axis linear scale with a reading head. A nut portion (not shown) is provided on the back surface of the second moving plate 64.

[0085] A screw shaft 66 is rotatably coupled to this nut portion via a plurality of balls (not shown). The longitudinal direction of the screw shaft 66 is approximately parallel to the Y-axis. One end of the screw shaft 66 is coupled to a drive source 68 such as a servo motor or a stepping motor.

[0086] When the screw shaft 66 is rotated by the drive source 68, the second moving plate 64 moves in the Y-axis direction. The pair of Y-axis guide rails 62, the second moving plate 64, the screw shaft 66, the drive source 68, etc. constitute the indexing feed unit of the machining unit moving mechanism 60.

[0087] A pair of Z-axis guide rails 72 are fixed to the surface of each second moving plate 64. The pair of Z-axis guide rails 72 are arranged substantially parallel to the Z-axis direction. A third moving plate 70 is slidably attached to the pair of Z-axis guide rails 72.

[0088] A Z-axis linear scale (not shown) used to read the position of the third moving plate 70 in the Z-axis direction is provided at a position adjacent to the Z-axis guide rail 72. In addition, a reading head (not shown) is provided on the back surface of the third moving plate 70.

[0089] When the third moving plate 70 moves, the position (coordinates) of the third moving plate 70 in the Z-axis direction and the amount of movement in the Z-axis direction are calculated by detecting the graduations of the Z-axis linear scale with a reading head. A nut portion (not shown) is provided on the back surface of the third moving plate 70.

[0090] A screw shaft 74 is rotatably coupled to this nut portion via a plurality of balls (not shown). The longitudinal direction of the screw shaft 74 is approximately parallel to the Z axis. A drive source 76 such as a servo motor or a stepping motor is coupled to the upper end of the screw shaft 74.

[0091] When the screw shaft 74 is rotated by the drive source 76, the third moving plate 70 moves in the Z-axis direction. The third moving plate 70, the pair of Z-axis guide rails 72, the screw shaft 74, the drive source 76, etc. constitute the cutting feed unit of the machining unit moving mechanism 60.

[0092] A cutting unit (processing unit) 78 is provided at the lower end of the third moving plate 70. The cutting unit 78 has a spindle housing 80. A part of a cylindrical spindle 82a (see FIG. 6) is rotatably housed in the spindle housing 80 by a hydrostatic air bearing.

[0093] A stator constituting a rotation drive source (not shown), such as a servo motor, is provided on the outer periphery of the spindle 82a (i.e., rotor) within the spindle housing 80, and the spindle 82a rotates within the spindle housing 80. A cutting blade 82b (see FIG. 6) having an annular cutting edge is attached to the tip of the spindle 82a.

[0094] An upper imaging unit (first imaging unit) 84 is fixed to the lower part of each third moving plate 70 in a manner adjacent to the cutting unit 78. The upper imaging unit 84 is disposed above the chuck table 10.

[0095] The upper imaging unit 84 has an objective lens (not shown) provided so as to face the surface 12a of the holding member 12, and an imaging element such as a CCD image sensor or a CMOS image sensor.

[0096] The upper imaging unit 84 images the back surface 11b of the workpiece 11 that is held by suction on the chuck table 10 so that the back surface 11b is exposed upward, thereby obtaining an image of the back surface 11b.

[0097] In this embodiment, the image on the back surface 11b is an image displayed in 8-bit (256 gradations) grayscale. However, the image on the back surface 11b may be a color image expressed by additive or subtractive color mixing instead of grayscale.

[0098] The imaging areas imaged by the lower imaging unit 54 and the upper imaging unit 84 are specified by a coordinate system whose origin is the center of the back surface 12b and the front surface 12a of the holding member 12. Therefore, the area of ​​the back surface 11b imaged by the lower imaging unit 54 and the area of ​​the front surface 11a imaged by the upper imaging unit 84 can be the same area in the XY plane.

[0099] A circular opening 4d is provided near the opening 4b. A cleaning unit 86 is provided inside the opening 4d for cleaning the workpiece 11 and the like after cutting. The cleaning unit 86 includes a spinner table 88 that holds the workpiece 11 by suction, and a nozzle 90 with a cleaning water ejection port disposed opposite the spinner table 88.

[0100] A housing (not shown) is provided on the base 4, and a touch panel 92 serving as both an input device and a display device is provided on the front side of the housing. The touch panel 92 displays images captured by the lower imaging unit 54 and the upper imaging unit 84, letters and numbers indicating processing conditions, GUI (Graphical User Interface) buttons, etc.

[0101] Instead of the touch panel 92, a display device that does not have the function of an input device may be provided in the cutting device 2. In this case, however, an input device (keyboard, mouse, trackball, touchpad, digitizer, etc.) for the operator to input instructions to the cutting device 2 is separately provided.

[0102] The cutting device 2 includes a controller 94. The controller 94 controls the operations of the suction source 14, the X-axis direction moving mechanism 26, the drive source 30, the Y-axis direction moving mechanism 32, the Z-axis direction moving mechanism 42, the lower imaging unit 54, the processing unit moving mechanism 60, the upper imaging unit 84, the cutting unit 78, the touch panel 92, and the like.

[0103] The controller 94 is configured by a computer including, for example, a processor 94a such as a CPU (Central Processing Unit) and a memory 94b. The memory 94b includes a main storage device such as a DRAM (Dynamic Random Access Memory) and an auxiliary storage device such as a flash memory or a hard disk drive.

[0104] The functions of the controller 94 are realized by operating the processor 94a and the like in accordance with software stored in the auxiliary storage device. A predetermined program that performs image processing functions when executed by the processor 94a is stored in a portion of the auxiliary storage device.

[0105] The image processing function extracts, from the images obtained by the lower imaging unit 54 and the upper imaging unit 84, (a) the device 15, (b) patterns or parts thereof such as the alignment mark 15a, (c) the cutting groove (machined groove) 11d or parts thereof (see Figure 7(A)), etc., contained in the images, respectively.

[0106] Furthermore, the area extracted by the image processing function is given a color with appropriately selected hue, value, and saturation. For example, when the upper imaging unit 84 captures an image of the rear surface 11b after cutting, a grayscale image is obtained in which the cut grooves 11d appear slightly black, but the image processing function extracts the cut grooves 11d and assigns a predetermined color to the cut grooves 11d.

[0107] The predetermined program may be stored in a non-transitory tangible recording medium such as a USB (Universal Serial Bus) memory, an optical disk, an SD memory card, or an HDD (hard disk drive) instead of an auxiliary storage device.

[0108] Next, using Figures 6 to 7(C), we will explain a method of cutting at least a portion of the workpiece 11, capturing images of the front surface 11a and back surface 11b of the workpiece 11, and displaying the images of the front surface 11a and back surface 11b on the touch panel 92.

[0109] 6 is a diagram showing how a cutting groove 11d (a so-called half-cut groove) that does not reach the front surface 11a from the back surface 11b is formed in the workpiece 11. After aligning the workpiece 11 held by suction on the chuck table 10 using the lower imaging unit 54, the lower end of the cutting blade 82b that rotates around the spindle 82a is positioned between the front surface 11a and the back surface 11b.

[0110] Then, the chuck table 10 is moved along the X-axis direction while cutting water such as pure water is supplied from a cutting water supply unit (not shown) to the lower end of the cutting blade 82b. As a result, the workpiece 11 is cut within the width 13a (see FIG. 7(B)) of the planned division line 13, and a cut groove 11d is formed.

[0111] After forming a cutting groove 11d on one of the division lines 13, the cutting unit 78 and the chuck table 10 are indexed and fed relatively by a predetermined amount along the Y-axis direction. Next, a cutting groove 11d is similarly formed on another division line 13 adjacent to the cut division line 13.

[0112] In this manner, the cutting grooves 11d are sequentially formed on each of the planned division lines 13. After the cutting grooves 11d are formed on all of the planned division lines 13 along the first direction, the chuck table 10 is rotated by 90 degrees, and similarly, the cutting grooves 11d are formed within the width 13a of each of the planned division lines 13 along the second direction perpendicular to the first direction.

[0113] In this embodiment, after the cutting grooves 11d are formed on all the planned division lines 13, first, an image of a first region 11b1 (see FIG. 7(A)) on the back surface 11b is taken by the upper imaging unit 84. The first region 11b1 in this embodiment is a region where two cutting grooves 11d intersect, but may also be a region including at least one cutting groove 11d.

[0114] 7A is an example of a first image 23 showing a first region 11b1 of the back surface 11b. The cut groove 11d in this embodiment is a so-called half-cut groove, and the cut groove 11d is included in the first image 23 showing the back surface 11b. Note that the actual first image 23 is displayed in grayscale.

[0115] In particular, the area corresponding to cutting groove 11d is displayed in a relatively dark gray that is close to black, and the area other than cutting groove 11d is displayed in a relatively light gray compared to the area corresponding to cutting groove 11d. However, in consideration of ease of viewing the drawing, the gray and its shading are omitted in Figure 7(A), and only the outline of cutting groove 11d is shown.

[0116] After acquiring the first image 23, the first moving table 18 is moved in the X-axis direction so that the lower imaging unit 54 enters the space 18d. Then, the lower imaging unit 54 captures an image of a second region 11a2 (see FIG. 7B) on the surface 11a that corresponds to the first region 11b1 in the thickness direction 11c through a predetermined region 12g.

[0117] In this embodiment, the second region 11a2 is a region where two planned division lines 13 intersect, but if the first region 11b1 is a region that includes only one cutting groove 11d, it may also be a region that includes one planned division line 13.

[0118] 7B is an example of a second image 25 showing the second region 11a2 of the surface 11a. As described above, the cut groove 11d in this embodiment is a so-called half-cut groove, and therefore the cut groove 11d is not included in the second image 25 showing the surface 11a.

[0119] In the actual second image 25, the entire image is displayed in grayscale. However, in consideration of the ease of viewing the drawing, the gray is omitted in FIG. 7(B), and only the outline of the device 15 and the like is shown. The order of capturing images is not particularly limited. After capturing an image of the front surface 11a with the lower imaging unit 54, the back surface 11b with the upper imaging unit 84 may be captured.

[0120] After obtaining the first image 23 and the second image 25, the operator can set which of the first image 23 and the second image 25 to color, or which part of which image or which part of both images to color. The setting operation may be performed before or after cutting starts.

[0121] In addition, if the cutting device 2 has preset settings for which of the first image 23 and the second image 25 to color, or which part of which image or which part of both images to color, the worker can know this setting before starting cutting.

[0122] The controller 94 flips one of the first image 23 and the second image 25 in a predetermined direction, and then displays the first image 23 and the second image 25 on the touch panel 92. In this embodiment, the Y-axis direction of the second image 25 is flipped so that the +Y direction and the −Y direction are interchanged, but the Y-axis direction of the first image 23 may also be flipped.

[0123] In addition to flipping the images in a predetermined direction, the controller 94 displays the first image 23 and the second image 25 on the touch panel 92 after changing at least a portion of one or both of the first image 23 and the second image 25 to a color different from that of the original image.

[0124] Figure 7(C) is an example of a superimposed image 27 in which the first image 23 showing the first region 11b1 of the back surface 11b is overlaid on a second image 25 formed by making the cutting groove 11d a different color from the original image, making the entire image semi-transparent, and then reversing the Y-axis direction.

[0125] In the example shown in Figure 7(C), the controller 94 displays the cutting groove 11d, which is relatively dark gray in the original image, in a color that cannot be expressed in grayscale, such as red, yellow, green, light blue, blue, or purple in the RBG color model.

[0126] In this embodiment, the worker knows in advance that the cutting groove 11d of the first image 23 on the back surface 11b will be colored, so by looking at the superimposed image 27, the worker can easily determine which image was taken from above the chuck table 10 and which image was taken from below the chuck table 10.

[0127] In this embodiment, among the multiple layers that make up the superimposed image 27, it is easy to distinguish that the layer having the colored cutting groove 11d that cannot be expressed in grayscale is an image captured from above the workpiece 11, and the layer not having the cutting groove 11d is an image captured from below the workpiece 11.

[0128] In addition, if chipping is formed in the cutting groove 11d, the chipping in the cutting groove 11d is also colored, so it is easy to check whether the cutting groove 11d formed on the back surface 11b or the chipping (not shown) formed on the edge of the cutting groove 11d is within the width 13a of the planned division line 13 on the front surface 11a.

[0129] In addition, in the above example, one image is made semi-transparent and superimposed on the other image, but instead, addition or multiplication of pixel values ​​constituting the images, comparative brightening or darkening of the two images, etc. may be adopted.

[0130] Incidentally, imaging using the upper imaging unit 84 and the lower imaging unit 54 is not limited to being performed after the cutting grooves 11d have been formed on all of the planned division lines 13. The upper imaging unit 84 and the lower imaging unit 54 may image the workpiece 11 after the cutting groove 11d has been formed on at least one planned division line 13 along the first direction.

[0131] Furthermore, the first image 23 may be an image in which only the cutting groove 11d is extracted by performing image processing on the image obtained by the upper imaging unit 84, or may be an image excluding the cutting groove 11d.

[0132] Similarly, the second image 25 may be an image obtained by applying image processing to the image obtained by the lower imaging unit 54, in which at least one of the planned division lines 13, the devices 15, and the alignment marks 15a is extracted, or it may be an image excluding the planned division lines 13, the devices 15, and the alignment marks 15a.

[0133] (First Modification) Fig. 8 is a diagram showing a first modification of the superimposed image 27. The first modification is different from the first embodiment in that the controller 94 changes the area of ​​the first image 23 other than the cutting groove 11d to a color different from that of the original image, and then displays the first image 23 and the second image 25 on the touch panel 92. Other points are the same as those of the first embodiment.

[0134] 9(A) is a diagram showing a second modified example of the superimposed image 27. The second modified example differs from the first embodiment in that the controller 94 changes the color of the device 15 and alignment mark 15a in the second image 25 to a different color from that in the original image, and then displays the first image 23 and the second image 25 on the touch panel 92. Other points are the same as those in the first embodiment.

[0135] 9(B) is a diagram showing a third modified example of the superimposed image 27. The third modified example differs from the first embodiment in that the controller 94 changes the outline of the planned division line 13 to a color different from that of the original images, and then displays the first image 23 and the second image 25 on the touch panel 92. Other points are the same as those of the first embodiment.

[0136] 9(C) is a diagram showing a fourth modified example of the superimposed image 27. The fourth modified example differs from the first embodiment in that the controller 94 changes the entire intended division line 13 to a color different from that of the original image, and then displays the first image 23 and the second image 25 on the touch panel 92. Other points are the same as those of the first embodiment.

[0137] In Figures 9(A) to 9(C), the first color applied to the cutting groove 11d in the first image 23 is, for example, green, and the second color applied to the device 15, alignment mark 15a, planned division line 13, etc. in the second image 25 is, for example, blue.

[0138] In this way, when changing the color of at least a portion of both the first image 23 and the second image 25, the controller 94 changes the color of at least a portion of the first image 23 and at least a portion of the second image 25 to a different color from the original image so that the first color applied to the first image 23 and the second color applied to the second image 25 differ in at least one of hue, lightness, and saturation. This further improves the visibility for the worker.

[0139] 10A is a diagram showing a fifth modified example of the superimposed image 27. The fifth modified example differs from the first embodiment in that the controller 94 colors the area of ​​the cutting groove 11d in the first image 23 in a first color different from that in the original image, colors the entire planned division line 13 included in the second image 25 in a second color different from that in the original image and different from the first color, and colors the overlapping area 27a between the first color and the second color in a third color different from the first color and the second color, and then displays the first image 23 and the second image 25 on the touch panel 92. The other points are the same as those in the first embodiment.

[0140] As described above, the first color, the second color, and the third color differ from each other in at least one of hue, lightness, and saturation. Note that, when one or both of the first image 23 and the second image 25 are semi-transparent images, the overlapping region 27a between the cutting groove 11d, which is given the first color, and the planned division line 13, which is given the second color, may be a third color obtained by mixing the first color and the second color, or may be a third color different from the color realized by mixing the first color and the second color.

[0141] In this way, by changing the color of the overlapping region 27a, it is possible to visually emphasize the overlapping region 27a between the cutting groove 11d and the planned division line 13. For example, if the width of the planned division line 13 is narrow, the cutting groove 11d may not fit within the planned division line 13 in the width direction, but by highlighting the overlapping region 27a as shown in Figure 10(A), the worker can easily visually grasp the overlapping region 27a, and therefore it is also easy to check the processing accuracy.

[0142] However, the highlighting of the overlapping region 27a is not limited to the aspect shown in Fig. 10(A). Fig. 10(B) is a diagram showing another example of the superimposed image 27. In this example, the controller 94 colors the region other than the cutting groove 11d of the first image 23 in a first color different from that of the original image, colors the entire planned division line 13 included in the second image 25 in a second color different from that of the original image, and colors the overlapping region 27a between the first color and the second color in a third color, and then displays the first image 23 and the second image 25 on the touch panel 92.

[0143] 10(C) is a diagram showing yet another example of the superimposed image 27. In this example, the controller 94 colors the area of ​​the cut groove 11d of the first image 23 in a first color different from that of the original image, colors the area of ​​the second image 25 other than the planned division lines 13 in a second color different from that of the original image, and colors the overlapping area 27a between the first color and the second color in a third color, and then displays the first image 23 and the second image 25 on the touch panel 92.

[0144] 10(D) is a diagram showing yet another example of the superimposed image 27. In this example, the controller 94 displays the first image 23 and the second image 25 on the touch panel 92 after coloring the area other than the cutting groove 11d of the first image 23 a first color different from that of the original image, coloring the area other than the planned division lines 13 of the second image 25 a second color different from that of the original image, and coloring the overlapping area 27a between the first color and the second color a third color.

[0145] 11(A) is a diagram showing an example of an image in which a first image 23 and a second image 25 are displayed side by side. Similar to the first embodiment, the controller 94 inverts a predetermined direction of one of the first image 23 and the second image 25 and then displays the first image 23 and the second image 25 on the touch panel 92.

[0146] However, in the sixth variant, in addition to being flipped in a predetermined direction, at least a portion of one or both of the first image 23 and the second image 25 is made a color different from that of the original image, and the first image 23 and the second image 25 are displayed side by side on the touch panel 92.

[0147] (Seventh Modification) Fig. 11(B) is a diagram showing an example of an image in which a first image 23 and a second image 25 are displayed vertically side by side. In Fig. 11(B), the arrangement of the first image 23 and the second image 25 is different from that in Fig. 11(A).

[0148] (Second embodiment) Next, a second embodiment will be described with reference to Fig. 12 to Fig. 13(C). In the second embodiment, as shown in Fig. 12, a cut groove 11d (i.e., a full-cut groove) is formed that extends from the back surface 11b to the front surface 11a. This is the difference from the first embodiment.

[0149] However, although the following description of the contents common to the first embodiment may be omitted, the contents described in the first embodiment are basically applicable to the second embodiment as well.

[0150] 12 is a diagram showing how a cutting groove 11d is formed in a workpiece 11 in the second embodiment. After alignment is performed on the workpiece 11 held by suction on the chuck table 10, the lower end of a cutting blade 82b rotating around a spindle 82a is positioned between the surface 11a and the surface 12a of the holding member 12.

[0151] Then, similarly to the first embodiment, cutting is performed on the workpiece 11 to form the cut grooves 11d. In the second embodiment as well, after the cut grooves 11d are formed on all of the planned division lines 13, the upper imaging unit 84 first images the first region 11b1 of the back surface 11b.

[0152] Fig. 13(A) is an example of a first image 23 showing a first region 11b1 of the back surface 11b in the second embodiment. Since the cut groove 11d in the second embodiment is a so-called full-cut groove, the first image 23 showing the back surface 11b includes the cut groove 11d. For ease of viewing the drawing, Fig. 13(A) shows only the outline of the cut groove 11d.

[0153] After acquiring the first image 23, the first moving table 18 is moved in the X-axis direction so that the lower imaging unit 54 enters the space 18d. Then, the lower imaging unit 54 captures an image of a second region 11a2 (see FIG. 13(B)) on the surface 11a that corresponds to the first region 11b1 in the thickness direction 11c through a predetermined region 12g.

[0154] 13(B) is an example of a second image 25 showing the second region 11a2 of the surface 11a in the second embodiment. Since the cut groove 11d in the second embodiment is a so-called full-cut groove, the cut groove 11d is also included in the second image 25 showing the surface 11a. For ease of viewing the drawing, only the outlines of the cut groove 11d, the device 15, etc. are shown in FIG. 13(B).

[0155] As in the first embodiment, the controller 94 inverts the predetermined direction of one of the first image 23 and the second image 25, and then displays the first image 23 and the second image 25 on the touch panel 92.

[0156] In addition to reversing the image in a predetermined direction, the controller 94 also changes at least a portion of one or both of the first image 23 and the second image 25 to a color different from that of the original image, and then displays the first image 23 and the second image 25 on the touch panel 92.

[0157] Figure 13(C) is an example of a superimposed image 27 in the second embodiment, in which the first image 23 showing the first region 11b1 of the back surface 11b has the cutting groove 11d in a different color from the original image, and the entire image is made semi-transparent, and then the first image 23 is superimposed on a second image 25 inverted in the Y-axis direction.

[0158] In the example shown in Figure 13(C), the controller 94 displays the cutting groove 11d, which is gray close to black in the original image, in a color that cannot be expressed in grayscale, such as red, yellow, green, light blue, blue, or purple in the RBG color model.

[0159] In this embodiment, the worker already knows that the cutting groove 11d of the first image 23 on the back surface 11b will be colored, so by looking at the superimposed image 27, the worker can easily determine which image was taken from above the chuck table 10 and which image was taken from below the chuck table 10.

[0160] In addition, if chipping is formed in the cutting groove 11d, the chipping is also colored, so it is easy to check whether the chipping (not shown) formed in the cutting groove 11d or on the edge of the cutting groove 11d is within the width 13a of the planned division line 13.

[0161] It is also possible to easily check whether the cutting groove 11d is slanted with respect to the thickness direction 11c (i.e., whether it is diagonally cut), whether the width of the cutting groove 11d on the front surface 11a is smaller than the width of the cutting groove 11d on the back surface 11b (i.e., whether it is tapered), whether there is an uncut area (i.e., whether there is an area on the front surface 11a where the cutting groove 11d is not formed), etc.

[0162] As shown in Figure 13 (C), when changing the color of at least a portion of both the first image 23 and the second image 25, the controller 94 makes at least a portion of the first image 23 and at least a portion of the second image 25 different in color from the original images so that the first color applied to the first image 23 and the second color applied to the second image 25 differ in at least one of hue, brightness, and saturation.

[0163] 13(C), the first color applied to the cutting groove 11d of the first image 23 is, for example, green, and the second color applied to the cutting groove 11d of the second image 25 is, for example, pink.

[0164] 14 shows a first modified example of a superimposed image 27 in the second embodiment. The first modified example of the second embodiment differs from the second embodiment in that the controller 94 colors the cutting groove 11d in the first image 23 in a different color from that in the original image, and colors the area other than the cutting groove 11d in the second image 25 in a different color from that in the original image, and then displays the first image 23 and the second image 25 on the touch panel 92. The other points are the same as those of the second embodiment.

[0165] 15 shows a second modified example of the superimposed image 27 in the second embodiment. The first modified example of the second embodiment differs from the second embodiment in that the controller 94 colors the area other than the cutting groove 11d in the first image 23 in a different color from that in the original image, and colors the cutting groove 11d in the second image 25 in a different color from that in the original image, and then displays the first image 23 and the second image 25 on the touch panel 92. The other points are the same as those in the second embodiment.

[0166] Since this overlaps with the modified example of the first embodiment, detailed explanation will be omitted, but the controller 94 may display the first image 23 and the second image 25 on the touch panel 92 after changing the color of the device 15 and alignment mark 15a in the second image 25 to a different color from that in the original image (see Figure 9(A)).

[0167] In addition, the controller 94 may display the first image 23 and the second image 25 on the touch panel 92 after coloring the outline of the planned division line 13 a different color from the original image (see Figure 9(B)), or may display the first image 23 and the second image 25 on the touch panel 92 after coloring the entire planned division line 13 a different color from the original image (see Figure 9(C)).

[0168] The controller 94 may invert a predetermined direction of one of the first image 23 and the second image 25, color at least a portion of one or both of the first image 23 and the second image 25 in a color different from that of the original image, and display the first image 23 and the second image 25 side by side in the horizontal or vertical direction of the screen on the touch panel 92 (see Figures 11(A) and 11(B)).

[0169] Since the worker knows in advance that the cutting groove 11d of the first image 23 on the back surface 11b is set to be colored, by looking at the superimposed image 27, the worker can easily distinguish which image was taken from above the chuck table 10 and which image was taken from below the chuck table 10.

[0170] (Third Modification of Second Embodiment) Fig. 16 shows a third modification of the superimposed image 27 in the second embodiment. For ease of explanation, in Fig. 16, the reference numeral 11d1 is added to the cutting groove 11d in the first image 23, and the reference numeral 11d2 is added to the cutting groove 11d in the second image 25.

[0171] Incidentally, Figure 16 was created by superimposing a first image 23 and a second image 25 that were captured after actually fully cutting the workpiece 11. In Figure 16, dots, rings, etc. are present irregularly in areas other than the cut grooves 11d1 and 11d2, but these are thought to be due to cutting chips, etc. remaining on the back surface 11b of the workpiece 11.

[0172] The third modified example differs from the second embodiment in that the controller 94 colors the area of ​​the cutting groove 11d1 in the first image 23 a first color different from that in the original image, colors the area of ​​the cutting groove 11d2 in the second image 25 a second color different from that in the original image and different from the first color, and colors the overlapping area 27a between the first color and the second color a third color different from the first color and the second color, and then displays the first image 23 and the second image 25 on the touch panel 92. The other points are the same as those in the second embodiment.

[0173] As described above, the first color, the second color, and the third color differ in at least one of hue, lightness, and saturation. Note that, when one or both of the first image 23 and the second image 25 are semi-transparent images, the overlapping region 27a between the cutting groove 11d1 to which the first color is applied and the cutting groove 11d2 to which the second color is applied may be a third color obtained by mixing the first color and the second color, or may be a third color different from the color realized by mixing the first color and the second color.

[0174] In this way, by changing the color of overlapping region 27a, it is possible to visually emphasize overlapping region 27a between cut groove 11d1 and cut groove 11d2. For example, due to the thickness of workpiece 11, cut groove 11d may be tilted relative to the thickness direction (i.e., oblique cutting may occur). However, by highlighting overlapping region 27a as shown in FIG. 16, the worker can easily visually grasp overlapping region 27a, and therefore, it is also easy to check the processing accuracy.

[0175] However, the highlighting of the overlapping region 27a is not limited to the mode shown in Fig. 16. As in Fig. 10(B) described above, the controller 94 may display the first image 23 and the second image 25 on the touch panel 92 after coloring the region other than the cutting groove 11d1 of the first image 23 in a first color different from that of the original image, coloring the cutting groove 11d2 of the second image 25 in a second color different from that of the original image, and coloring the overlapping region 27a between the first color and the second color in a third color.

[0176] Furthermore, similar to the above-mentioned FIG. 10(C), the controller 94 may display the first image 23 and the second image 25 on the touch panel 92 after coloring the area of ​​the cutting groove 11d1 of the first image 23 a first color different from that of the original image, coloring the area of ​​the second image 25 other than the cutting groove 11d2 a second color different from that of the original image, and coloring the overlapping area 27a between the first color and the second color a third color.

[0177] Furthermore, similar to the above-mentioned FIG. 10(D), the controller 94 may display the first image 23 and the second image 25 on the touch panel 92 after coloring the area other than the cutting groove 11d1 of the first image 23 a first color different from that of the original image, coloring the area other than the cutting groove 11d2 of the second image 25 a second color different from that of the original image, and coloring the overlapping area 27a between the first color and the second color a third color.

[0178] (Third embodiment) Figure 17 is a perspective view of a laser processing device (processing device) 104 to which the above-mentioned first and second embodiments and their modified examples can be applied. Note that the same components as those in the cutting device 2 (see Figure 1) are given the same reference numerals. The following mainly describes the differences from the cutting device 2.

[0179] In the laser processing device 104, the lower imaging unit 54 is fixed to a stationary base 106. The first movable table 18 moves relatively in the Y-axis direction, not the X-axis direction, so that the lower imaging unit 54 can enter the space 18d of the first movable table 18.

[0180] The laser processing device 104 has a third moving table 108 to which a pair of X-axis guide rails 20 are fixed. The third moving table 108 is slidably mounted on a pair of Y-axis guide rails 110 fixed to the upper surface of a stationary base 106.

[0181] A Y-axis scale 110a used to detect the position of the third moving table 108 in the Y-axis direction is provided adjacent to the Y-axis guide rail 110. A nut portion (not shown) is provided on the underside of the third moving table 108, and a screw shaft 112 is rotatably connected to this nut portion via a plurality of balls (not shown).

[0182] The longitudinal direction of the screw shaft 112 is approximately parallel to the Y-axis. A drive source 114 such as a servo motor or a stepping motor is connected to one end of the screw shaft 112. When the drive source 114 rotates the screw shaft 112, the third moving table 108 moves in the Y-axis direction.

[0183] The third moving table 108, the pair of Y-axis guide rails 110, the screw shaft 112, the drive source 114, etc. constitute a Y-axis direction moving mechanism 116. The chuck table 10 is configured to be movable in the Y-axis direction in addition to the X-axis direction.

[0184] A column 118 is provided adjacent to the lower imaging unit 54 so as to protrude upward from the upper surface of the stationary base 106. The base end of an arm 120 having a longitudinal portion substantially parallel to the X-axis direction is fixed to the column 118.

[0185] At least a part of a laser beam irradiation unit (processing unit) 122 is provided on the arm 120. In this manner, in this embodiment, the position of the laser beam irradiation unit 122 within the XY plane is fixed.

[0186] The laser beam irradiation unit 122 has a laser oscillator (not shown) including a laser medium, an excitation light source, a Q switch, etc. At the tip of the arm 120 in the X-axis direction, a head 124 including a condenser (not shown) equipped with a condensing lens is provided.

[0187] The laser beam emitted from the laser oscillator passes through a predetermined optical system and is irradiated downward from the head unit 124. The laser beam irradiated downward from the head unit 124 is a pulsed laser beam, and has a wavelength that is absorbed by the workpiece 11 or that passes through the workpiece 11.

[0188] An upper imaging unit 84 is provided at a position adjacent to the head unit 124 in the Y-axis direction at the tip of the arm unit 120. The operation of the laser processing device 104 is controlled by a controller 126.

[0189] The controller 126 is also configured by a computer including a processor 126a such as a CPU and a memory 126b. The memory 126b includes a main storage device such as a DRAM and an auxiliary storage device such as a flash memory.

[0190] The functions of the controller 126 are realized by operating the processor 126a and the like in accordance with software stored in the auxiliary storage device. A part of the auxiliary storage device stores a predetermined program that performs image processing functions when executed by the processor 126a.

[0191] The image processing function extracts (a) the device 15, (b) patterns or parts thereof such as alignment marks 15a, (c) laser-processed grooves or parts thereof, etc., contained in the images obtained by the lower imaging unit 54 and the upper imaging unit 84, respectively.

[0192] Furthermore, the area extracted by the image processing function is assigned a color with appropriately selected hue, brightness, and saturation. Note that the predetermined program may be stored in a non-transitory tangible recording medium such as a USB memory instead of the auxiliary storage device.

[0193] When the laser processing device 104 is used, the controller 126 displays the first image 23 and the second image 25 on the touch panel 92, either overlapping or side-by-side, as in the first and second embodiments and their variations described above.

[0194] When ablation processing is performed on the workpiece 11 by the laser processing device 104, first, the workpiece 11 is suction-held on the front surface 12a of the chuck table 10 so that the back surface 11b is exposed upward.

[0195] Next, after performing alignment using the lower imaging unit 54, the focal point of the pulsed laser beam having a wavelength that is absorbed by the workpiece 11 is positioned near the back surface 11b, and the chuck table 10 is moved along the X-axis direction relative to the focal point.

[0196] This results in the formation of a laser-processed groove (so-called half-cut groove) not shown in the figure that has a depth that does not reach from the back surface 11b of the workpiece 11 to the front surface 11a, or a laser-processed groove (so-called full-cut groove) not shown in the figure that reaches from the back surface 11b to the front surface 11a.

[0197] In addition, the structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0198] 2: Cutting equipment (processing equipment) 4: base, 4a, 4b: opening, 4c: support structure, 4d: opening, 6: cassette 10: Chuck table (holding table) 11: Workpiece 11a: Surface (second surface), 11a2: Second area 11b: Back side (first side), 11b1: First area 11c: thickness direction, 11d, 11d1, 11d2: cutting groove (machined groove) 12: holding member, 12a: front surface (holding surface), 12b: back surface 12c1: 1st suction path, 12c2: 2nd suction path, 12c3: Intersection 12d: Opening, 12e: Peripheral suction path, 12f: Suction path, 12g: Predetermined area 13: Dividing line, 13a: Width, 15: Device, 15a: Alignment mark 14: Suction source, 16: Frame, 16a: Opening, 16b: Side part 17: Dicing tape 18: first moving table, 18a: bottom plate, 18b: side plate, 18c: top plate, 18d: space 19: Frame 20: X-axis guide rail, 20a: X-axis linear scale 21: Workpiece unit 22: screw shaft, 24: drive source, 26: X-axis direction movement mechanism 23: First image, 25: Second image, 27: Overlapping image, 27a: Overlapping area 28: endless belt, 30: driving source, 30a: driving pulley 32: Y-axis direction movement mechanism, 34: Y-axis guide rail 36: second moving table, 38: screw shaft, 40: driving source 42: Z-axis direction movement mechanism, 42a: support structure, 44: Z-axis guide rail 46: First moving plate, 48: Screw shaft, 50: Driving source 52: Support arm, 54: Lower imaging unit (second imaging unit) 56: low magnification camera, 56a: lighting device 58: High-magnification camera, 58a: Lighting device 60: Processing unit moving mechanism, 62: Y-axis guide rail, 64: Second moving plate 66: screw shaft, 68: driving source, 70: third moving plate 72: Z-axis guide rail, 74: screw shaft, 76: drive source 78: Cutting unit (processing unit), 80: Spindle housing 82a: spindle, 82b: cutting blade 84: Upper imaging unit (first imaging unit) 86: Cleaning unit, 88: Spinner table, 90: Nozzle 92: Touch panel 94: Controller, 94a: Processor, 94b: Memory 104: Laser processing equipment (processing equipment) 106: Stationary base, 108: Third moving table 110: Y-axis guide rail, 110a: Y-axis scale 112: screw shaft, 114: driving source, 116: Y-axis direction movement mechanism 118: Column, 120: Arm 122: Laser beam irradiation unit (processing unit), 124: Head part 126: Controller, 126a: Processor, 126b: Memory A:Area

Claims

1. A processing apparatus for processing a workpiece having a first surface and a second surface located on the opposite side of the first surface in a thickness direction, a holding table formed of a transparent material, having a predetermined area that is transparent from the front surface to the back surface, and holding the workpiece; a processing unit that processes the workpiece held by the holding table; a first imaging unit that is disposed above the holding table and captures an image of a first region of the first surface of the workpiece held by the holding table such that the first surface is exposed upward; a second imaging unit that is disposed below the holding table and that images a second region of the second surface that corresponds to the first region of the first surface in the thickness direction of the workpiece, via the predetermined region of the holding table; a display device that displays a first image obtained by capturing an image of the first region and a second image obtained by capturing an image of the second region; a controller having a processor and a memory, and controlling operations of the processing unit, the first imaging unit, the second imaging unit, and the display device; Equipped with The processing device is characterized in that the controller changes at least a portion of one or both of the first image and the second image to a color different from that of the original image, and then displays the first image and the second image on the display device.

2. The processing device according to claim 1, characterized in that, when the first image includes a machining groove but the second image does not include a machining groove, the controller causes the machining groove in the first image to be displayed in a color different from that of the original image, and then causes the first image and the second image to be displayed on the display device.

3. The processing device according to claim 1, characterized in that, when the first image includes a machining groove but the second image does not include a machining groove, the controller causes the area of ​​the first image other than the machining groove to be colored differently from the original image, and then causes the first image and the second image to be displayed on the display device.

4. The controller, when the first image includes a machining groove but the second image does not include a machining groove, The processing groove of the first image is colored in a first color different from that of the original image, or the area of ​​the first image other than the processing groove is colored in the first color different from that of the original image; The entire planned dividing line included in the second image is colored a second color that is different from the original image and different from the first color, or the area of ​​the second image other than the planned dividing line is colored the second color that is different from the original image and different from the first color, and 2. The processing device according to claim 1, wherein an overlapping area between the first color and the second color is colored with a third color different from the first color and the second color.

5. The processing device according to claim 1, characterized in that, when both the first image and the second image contain a processing groove, the controller causes the processing groove in one of the first image and the second image to be displayed in a color different from that of the original image, and then causes the first image and the second image to be displayed on the display device in an overlaid state.

6. The processing device described in claim 1, characterized in that when changing the color of at least a portion of both the first image and the second image, the controller changes the color of at least a portion of the first image and at least a portion of the second image to different colors from the original images so that the first color applied to the first image and the second color applied to the second image differ in at least one of hue, lightness, and saturation, and then displays the first image and the second image on the display device.

7. The processing device according to claim 6, characterized in that, when both the first image and the second image include a processing groove, the controller causes the display device to display the first image and the second image after changing the processing groove in both images to a color different from that in the original image so that the first color and the second color differ in at least one of hue, lightness, and saturation.

8. When the first image and the second image both include a processing groove, the controller: The first image and the second image are superimposed and displayed on the display device, after the processing groove of the first image is made a color different from that of the original image and the area of ​​the second image other than the processing groove is made a color different from that of the original image so that the first color and the second color are different in at least one of hue, brightness, and saturation, or The processing device according to claim 6, characterized in that the first color and the second color are different in at least one of hue, brightness, and saturation, so that the areas of the first image other than the processing groove are made a color different from that of the original image, and the processing groove of the second image is made a color different from that of the original image, and then the first image and the second image are superimposed and displayed on the display device.

9. When the first image and the second image both include a processing groove, the controller: The processing groove of the first image is colored in a first color different from that of the original image, or the area of ​​the first image other than the processing groove is colored in the first color different from that of the original image; The processing groove of the second image is colored a second color different from the original image and different from the first color, or the area of ​​the second image other than the processing groove is colored a second color different from the original image and different from the first color, and 2. The processing device according to claim 1, wherein an overlapping area between the first color and the second color is colored with a third color different from the first color and the second color.

10. The processing device described in claim 1, characterized in that, when the second image includes a predetermined pattern provided on the second surface of the workpiece, the controller causes the predetermined pattern in the second image to be in a color different from that of the original image, and then displays the first image and the second image on the display device.

11. The processing device according to claim 1, characterized in that, when the second image includes a planned division line provided on the second surface of the workpiece, the controller causes the first image and the second image to be displayed on the display device after coloring the outline of the planned division line or the entire planned division line in a color different from that of the original image.

Images