Inspection apparatus and inspection method

Abstract

To provide an inspection device capable of quantifying a clogging degree in a nozzle in discharge of a fluid from the nozzle.SOLUTION: According to an embodiment, there is provided an inspection apparatus including a nozzle, a fluid supply unit, a pressure adjustment unit, a first flowmeter, a pressure sensor, and a second flowmeter, in which a supply flow path of a fluid to the nozzle is formed in the fluid supply unit. In the supply flow path, the pressure regulator regulates the pressure of the fluid to be supplied to the nozzle, and the first flowmeter measures the flow rate of the fluid to the nozzle on the downstream side of the pressure regulator and in the vicinity of the nozzle. In the supply flow path, between the pressure regulator and the first flowmeter, the pressure sensor detects the pressure of the fluid to the nozzle, and the second flowmeter measures the flow rate of the fluid to the nozzle.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] FIELD An embodiment of the present invention relates to an inspection apparatus and an inspection method. [Background technology]

[0002] During product manufacturing and use of manufactured products, fluids such as liquids and gases are discharged from nozzle outlets. For example, in battery manufacturing, electrolyte is discharged from the nozzle into a liquid injection hopper, where the electrolyte is stored. When fluid is discharged from the nozzle as described above, clogging of the nozzle may occur. Therefore, there is a need to quantify the degree of nozzle clogging so that users, manufacturers, designers, managers, and the like of the nozzle can understand the degree of nozzle clogging. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 9-1822 Summary of the Invention [Problem to be solved by the invention]

[0004] The problem to be solved by the present invention is to provide an inspection device and an inspection method that make it possible to quantify the degree of clogging in a nozzle when a fluid is ejected from the nozzle. [Means for solving the problem]

[0005] An inspection device according to an embodiment includes a nozzle, a fluid supply unit, a pressure adjustment unit, a first flow meter, a pressure sensor, and a second flow meter. The nozzle is capable of ejecting a fluid, and a supply flow path for the fluid to the nozzle is formed in the fluid supply unit. The pressure adjustment unit adjusts the pressure of the fluid supplied to the nozzle in the supply flow path, and the first flow meter measures the flow rate of the fluid to the nozzle downstream of the pressure adjustment unit and in the vicinity of the nozzle in the supply flow path. The pressure sensor detects the pressure of the fluid to the nozzle in the supply flow path between the pressure adjustment unit and the first flow meter, and the second flow meter measures the flow rate of the fluid to the nozzle in the supply flow path between the pressure adjustment unit and the first flow meter. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic diagram showing an example of an inspection device according to an embodiment. [Figure 2] FIG. 2 is a flowchart schematically showing an example of a process for adjusting the discharge flow rate from the nozzle, which is performed by the calculation unit and the control unit of the process execution unit in the inspection device according to the embodiment. [Figure 3] FIG. 3 is a schematic diagram showing an example of the adjustment pressure-discharge flow rate characteristic calculated by the calculation unit in the example process of FIG. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments will be described with reference to the drawings.

[0008] FIG. 1 is a schematic diagram showing an example of an inspection device 1 according to an embodiment. The example inspection device 1 of FIG. 1 includes a nozzle 2 and a fluid supply unit 3 that supplies a fluid to the nozzle 2. The nozzle 2 has a discharge port 5 formed therein, and the fluid supply unit 3 has a supply flow path 6 for the fluid to the nozzle 2. In the fluid supply unit 3, the supply flow path 6 is formed by either a pipe or a tube. In the inspection device 1, the fluid is supplied to the nozzle 2 through the supply flow path 6 from a supply source (not shown) including a storage tank or the like. The nozzle 2 then discharges the fluid supplied through the supply flow path 6 from the discharge port 5. Here, in the supply flow path 6, the side facing the nozzle 2 is defined as the downstream side. In the supply flow path 6, the side opposite the downstream side, i.e., the side facing the supply source, is defined as the upstream side.

[0009] The fluid ejected from the nozzle 2 may be a liquid or a gas. Examples of the liquid ejected from the nozzle 2 include an electrolyte solution, an ink solution, and a beverage. The gas ejected from the nozzle 2 may be air or a gas other than air, such as oxygen, nitrogen, or helium gas. The ejection of the fluid from the nozzle 2 in the inspection device 1 may be performed during the manufacturing process of a product, or may be performed when the manufactured product is in use. In one example, the inspection device 1 including the nozzle 2 is used in the manufacturing process of a battery (not shown). During the battery manufacturing process, an electrolyte solution is supplied to the nozzle 2 through a supply flow path 6. The nozzle 2 then ejects the supplied electrolyte solution from a discharge port 5 into a liquid injection hopper (not shown), thereby collecting the electrolyte solution in the liquid injection hopper.

[0010] The inspection device 1 includes a pressure adjusting unit 11, a first flow meter 12, a pressure sensor 13, and a second flow meter 15. The pressure adjusting unit 11, the first flow meter 12, the pressure sensor 13, and the second flow meter 15 are each disposed in the supply flow path 6.

[0011] The pressure adjustment unit 11 is, for example, a regulator, and is disposed upstream of the nozzle 2 in the supply flow path 6. The pressure of the fluid supplied from the pressure adjustment unit 11 to the nozzle 2 is adjusted by the pressure adjustment unit 11. That is, the pressure of the fluid flowing out from the pressure adjustment unit 11 to the downstream side is adjusted by the pressure adjustment unit 11. The pressure of the fluid flowing out from the pressure adjustment unit 11 to the downstream side, i.e., the pressure of the fluid adjusted by the pressure adjustment unit 11, is also referred to as the "adjusted pressure." In the inspection device 1, the adjusted pressure changes in response to the operating state of the pressure adjustment unit 11, thereby changing the flow rate of the fluid downstream of the pressure adjustment unit 11. Therefore, the change in the adjusted pressure in the pressure adjustment unit 11 changes the flow rate of the fluid discharged from the discharge port 5 of the nozzle 2.

[0012] The first flow meter 12 is disposed downstream of the pressure adjustment unit 11 in the supply flow path 6 and in the vicinity of the nozzle 2. The first flow meter 12 measures the flow rate of the fluid flowing downstream at the position where it is disposed. That is, the first flow meter 12 measures the flow rate of the fluid to the nozzle 2 downstream of the pressure adjustment unit 11 and in the vicinity of the nozzle 2 in the supply flow path 6. The first flow meter 12 is also referred to as a "downstream flow meter."

[0013] Furthermore, in the fluid flow path up to the discharge port 5 of the nozzle 2, including the supply flow path 6, the opening area of ​​the discharge port 5 is smaller than the flow path cross-sectional area of ​​the first flow meter 12. For this reason, in the fluid flow path up to the discharge port 5, one or more sections where the flow path cross-sectional area decreases toward the downstream side are formed between the first flow meter 12 and the discharge port 5. In such a configuration, clogging is likely to occur in the nozzle 2 (discharge port 5) and its vicinity in the fluid flow path up to the discharge port 5, and clogging is likely to occur between the first flow meter 12 and the discharge port 5.

[0014] The pressure sensor 13 is disposed in the supply flow path 6 between the pressure adjustment unit 11 and the first flow meter 12. The pressure sensor 13 detects the pressure of the fluid flowing downstream at the position where it is disposed. That is, the pressure sensor 13 detects the pressure of the fluid to the nozzle 2 between the pressure adjustment unit 11 and the first flow meter 12 in the supply flow path 6. In the fluid flow path up to the outlet 5 of the nozzle 2, including the supply flow path 6, the influence of the pressure adjusted by the pressure adjustment unit 11 is large in and near the pressure adjustment unit 11. Therefore, in and near the pressure adjustment unit 11, the pressure of the fluid is at or near the adjusted pressure, regardless of the discharge state from the outlet 5, the degree of clogging in the nozzle 2, and the like. On the other hand, in an area some distance downstream from the pressure adjustment unit 11, such as the position where the pressure sensor 13 is disposed, the influence of the pressure adjusted by the pressure adjustment unit 11 is reduced, and the pressure of the fluid is a value corresponding to the discharge state from the outlet 5, the degree of clogging in the nozzle 2, and the like. Therefore, by configuring the pressure sensor 13 to be located downstream of the pressure adjustment unit 11, the pressure detected by the pressure sensor 13 will be a different value from the adjustment pressure adjusted by the pressure adjustment unit 11, and a pressure difference will occur with respect to the adjustment pressure at the pressure adjustment unit 11.

[0015] The second flow meter 15 is disposed in the supply flow path 6 between the pressure adjustment unit 11 and the first flow meter 12. In the example shown in FIG. 1 , the second flow meter 15 is disposed between the pressure adjustment unit 11 and the pressure sensor 13, and is disposed upstream of the pressure sensor 13. The second flow meter 15 measures the flow rate of the fluid flowing downstream at the position where it is disposed. That is, the second flow meter 15 measures the flow rate of the fluid to the nozzle 2 between the pressure adjustment unit 11 and the first flow meter 12 in the supply flow path 6. In the example shown in FIG. 1 , the second flow meter 15 measures the flow rate of the fluid downstream between the pressure adjustment unit 11 and the pressure sensor 13. The second flow meter 15 is also referred to as an "upstream flow meter."

[0016] In the supply flow path 6, a pressure loss or the like occurs in the fluid as it flows from the second flow meter 15 to the first flow meter 12, causing a change in the flow rate of the fluid downstream. As a result, the flow rate measured by the second flow meter 15 differs from the flow rate measured by the first flow meter 12, resulting in a flow rate difference from the flow rate measured by the first flow meter 12.

[0017] As described above, the pressure adjustment unit 11, the first flow meter 12, the pressure sensor 13, and the second flow meter 15 are each arranged, and in the example of Figure 1, the pressure adjustment unit 11, the second flow meter 15, the pressure sensor 13, and the first flow meter 12 are arranged in this order from upstream to downstream in the supply flow path 6.

[0018] The path length (separation distance) along the supply flow path 6 between the pressure sensor 13 and the first flow meter 12 is preferably longer (larger) than the path length (separation distance) along the supply flow path 6 between the pressure adjustment unit 11 and the second flow meter 15 and the path length (separation distance) along the supply flow path 6 between the second flow meter 15 and the pressure sensor 13. The path length along the supply flow path 6 between the pressure sensor 13 and the first flow meter 12 is preferably longer than the path length (separation distance) along the supply flow path 6 between the pressure adjustment unit 11 and the pressure sensor 13. In one example, the path length between the pressure sensor 13 and the first flow meter 12 is about 1 m, and the path length between the second flow meter 15 and the pressure sensor 13 is about 0.2 m. The path length between the pressure adjustment unit 11 and the second flow meter 15 is shorter (smaller) than the path length between the second flow meter 15 and the pressure sensor 13.

[0019] In addition, in one example, the second flow meter 15 is arranged downstream of the pressure sensor 13 in the supply flow path 6. In this case, the second flow meter 15 and the pressure sensor 13 are also arranged between the pressure adjustment unit 11 and the first flow meter 12. The second flow meter 15 detects the flow rate of the fluid to the nozzle 2 between the pressure adjustment unit 11 and the first flow meter 12 in the supply flow path 6, and the pressure sensor 13 measures the pressure of the fluid to the nozzle 2 between the pressure adjustment unit 11 and the first flow meter 12 in the supply flow path 6. In this example, the pressure adjustment unit 11, the pressure sensor 13, the second flow meter 15, and the first flow meter 12 are arranged in this order from upstream to downstream in the supply flow path 6.

[0020] Here, in a configuration in which the second flow meter 15 is disposed downstream of the pressure sensor 13, the path length (separation distance) along the supply flow path 6 between the second flow meter 15 and the first flow meter 12 is preferably longer (larger) than the path length (separation distance) along the supply flow path 6 between the pressure adjustment unit 11 and the pressure sensor 13 and the path length (separation distance) along the supply flow path 6 between the pressure sensor 13 and the second flow meter 15. Furthermore, the path length along the supply flow path 6 between the second flow meter 15 and the first flow meter 12 is preferably longer than the path length (separation distance) along the supply flow path 6 between the pressure adjustment unit 11 and the second flow meter 15.

[0021] Furthermore, in the embodiments and the like, as long as the pressure sensor 13 and the second flow meter 15 are arranged between the pressure adjustment unit 11 and the first flow meter 12, the pressure sensor 13 may be arranged either downstream or upstream of the second flow meter 15. However, particularly when a liquid such as an electrolyte is supplied to the nozzle 2, it is preferable that the pressure sensor 13 be arranged downstream of the second flow meter 15. That is, similar to the example of FIG. 1 , it is preferable that the pressure adjustment unit 11, the second flow meter 15, the pressure sensor 13, and the first flow meter 12 are arranged in this order from upstream to downstream in the supply flow path 6.

[0022] The inspection device 1 also includes a processing execution unit 21, which includes a calculation unit 22 and a control unit 23. The processing execution unit 21 includes a processor or integrated circuit (control circuit) including a CPU (Central Processing Unit), an ASIC (Application Specific Integrated Circuit), or an FPGA (Field Programmable Gate Array), and a storage medium such as a memory. The processing execution unit 21 may include only one integrated circuit or multiple integrated circuits. The processing execution unit 21 performs processing by executing a program stored in a storage medium. The calculation unit 22 and the control unit 23 each perform part of the processing by the processing execution unit 21 and perform the processing described below. The processing described below by the processing execution unit 21 may be performed by an integrated circuit or the like of a single computer (server), or may be performed by integrated circuits or the like of multiple computers working together. At least part of the processing described below by the processing execution unit 21 may be performed by a server or the like in a cloud environment.

[0023] In the inspection device 1, while a fluid is being discharged from the nozzle 2, the calculation unit 22 and control unit 23 of the process execution unit 21 adjust (control) the discharge flow rate F of the fluid from the nozzle 2. In adjusting the discharge flow rate F, the calculation unit 22 acquires the flow rate measurement results from each of the first flow meter 12 and the second flow meter 15 and the pressure detection result from the pressure sensor 13. Then, the calculation unit 22 performs calculations using the measurement results from each of the first flow meter 12 and the second flow meter 15 and the detection result from the pressure sensor 13. At this time, calculations related to the degree of clogging in the nozzle 2, that is, calculations related to the degree of clogging of the flow path downstream of the first flow meter (downstream flow meter) 12, are performed.

[0024] The control unit 23 controls the operation of the pressure adjustment unit 11 based on the calculation result of the calculation unit 22, and adjusts the adjustment pressure Preg of the pressure adjustment unit 11 to a pressure value corresponding to the calculation result of the calculation unit 22. As a result, the discharge flow rate F of the fluid from the nozzle 2 is adjusted to the target flow rate Ftar.

[0025] 2 is a flowchart schematically illustrating an example of a process for adjusting the discharge flow rate F from the nozzle 2, which is performed by the calculation unit 22 and the control unit 23 of the process execution unit 21 in the inspection device 1 according to the embodiment. The example process of FIG. 2 is repeatedly performed over time while a fluid is being supplied to the nozzle 2 through the supply flow path 6 and is being discharged from the nozzle 2. Furthermore, while the example process of FIG. 2 is being repeatedly performed over time, the calculation unit 22 acquires the real-time adjusted pressure Preg, the real-time pressure detection result by the pressure sensor 13, and the real-time flow rate measurement results by each of the first flow meter 12 and the second flow meter 15, and performs calculations using the acquired values.

[0026] 2 starts, the calculation unit 22 uses the adjusted pressure Preg by the pressure adjustment unit 11 and the pressure detection result by the pressure sensor 13 to calculate a real-time pressure difference ΔP between the adjusted pressure Preg and the detection result by the pressure sensor 13 (S101). Then, the calculation unit 22 uses the flow rate measurement results by the first flow meter 12 and the second flow meter 15 to calculate a real-time flow rate difference ΔF between the measurement results by the first flow meter 12 and the second flow meter 15 (S102).

[0027] Here, while a fluid is being discharged from the nozzle 2, salt components and the like contained in the liquid that becomes the fluid may precipitate and solidify, and the salt components may adhere to the nozzle 2, causing clogging of the nozzle 2. Furthermore, dust and the like mixed in the gas or liquid that becomes the fluid may adhere to the nozzle 2, causing clogging of the nozzle 2. In the supply flow path 6, the pressure of the fluid detected by the pressure sensor 13 and the flow rate of the fluid measured by the first flow meter 12 change depending on the degree of clogging at the nozzle 2, i.e., the degree of clogging of the flow path downstream of the first flow meter (downstream flow meter) 12.

[0028] When a clog occurs in the nozzle 2 (at or near the discharge port 5), the cross-sectional area of ​​the flow path decreases in the clogged portion compared to when the clog does not occur. The cross-sectional area of ​​the flow path changes in response to the degree of clog, with the higher the degree of clog, the smaller the cross-sectional area of ​​the flow path. In the nozzle 2, a change (including an increase or decrease) in the cross-sectional area of ​​the flow path in response to the degree of clog occurs, causing a change in the pressure distribution in the fluid flow path up to the discharge port 5 of the nozzle 2, including the supply flow path 6. In particular, a change in the cross-sectional area of ​​the flow path in response to the degree of clog in the nozzle 2 causes a change in pressure in a portion of the flow path away from the pressure adjustment unit 11 downstream. For example, a decrease in the cross-sectional area of ​​the flow path in the nozzle 2 where a clog occurs causes a decrease in pressure in a portion of the flow path away from the pressure adjustment unit 11 downstream.

[0029] In the embodiment, the pressure sensor 13 is located downstream and away from the pressure adjustment unit 11. Therefore, if other conditions are the same, when the nozzle 2 is clogged, the fluid pressure at the pressure sensor 13 decreases compared to when the nozzle 2 is not clogged. Furthermore, if other conditions are the same, the greater the degree of clogging at the nozzle 2, the lower the fluid pressure detected by the pressure sensor 13. Furthermore, since the influence of the regulated pressure by the pressure adjustment unit 11 is large in the pressure adjustment unit 11 and its vicinity, as described above, the fluid pressure is at or near the regulated pressure regardless of the degree of clogging at the nozzle 2. Therefore, the pressure difference ΔP between the regulated pressure Preg and the detection result by the pressure sensor 13 is a parameter related to the degree of clogging at the nozzle 2 and changes in response to the degree of clogging at the nozzle 2.

[0030] Furthermore, if other conditions are the same, when a clog occurs in the nozzle 2, the flow rate of the fluid measured by the first flow meter (downstream flow meter) 12 is lower than when a clog does not occur in the nozzle 2. Furthermore, if other conditions are the same, the greater the degree of clogging in the nozzle 2, the smaller the flow rate of the fluid measured by the first flow meter 12. Therefore, the flow rate difference ΔF between the measurement results of the first flow meter 12 and the second flow meter 15 is a parameter related to the degree of clogging in the nozzle 2, and changes in response to the degree of clogging in the nozzle 2.

[0031] 2, the calculation unit 22 performs the process of S101 and the process of S102 to calculate the pressure difference ΔP and the flow rate difference ΔF described above as parameters related to the degree of clogging in the nozzle 2. By calculating the pressure difference ΔP and the flow rate difference ΔF in real time, the degree of clogging in the nozzle 2 in real time is quantified and digitized.

[0032] After calculating the pressure difference ΔP and the flow rate difference ΔF in real time, the calculation unit 22 uses the calculation results of the pressure difference ΔP and the flow rate difference ΔF to calculate an adjustment pressure-discharge flow rate characteristic, which is the relationship between the adjustment pressure Preg and the discharge flow rate F from the nozzle 2 (S103). As a result, the adjustment pressure-discharge flow rate characteristic in real time is calculated as the discharge performance from the nozzle in real time. The adjustment pressure-discharge flow rate characteristic is expressed by a relational expression or a function, etc., with the adjustment pressure Preg and the discharge flow rate F from the nozzle 2 as variables. Furthermore, in calculating the adjustment pressure-discharge flow rate characteristic, the calculation unit 22 performs the calculation using any of a relational expression, a table, etc. stored in a storage medium, etc., of the processing execution unit 21. At this time, for example, the adjustment pressure-discharge flow rate characteristic is calculated by substituting the calculation results of the pressure difference ΔP and the flow rate difference ΔF into the relational expression stored in the storage medium, etc.

[0033] Here, in the inspection device 1, as described above, the discharge flow rate F of the fluid from the nozzle 2 changes as the regulated pressure Preg in the pressure regulating unit 11 changes. That is, the discharge flow rate F from the nozzle 2 is adjusted by adjusting the regulated pressure Preg. Therefore, by calculating both the pressure difference ΔP and the flow rate difference ΔF described above, it is possible to calculate the regulated pressure-discharge flow rate characteristics. Furthermore, the regulated pressure-discharge flow rate characteristics, which are one of the discharge performances from the nozzle 2, change in response to the degree of clogging in the nozzle 2, that is, the degree of clogging of the flow path downstream of the first flow meter (downstream flow meter) 12. Therefore, the regulated pressure-discharge flow rate characteristics are calculated as a characteristic (discharge performance) related to the degree of clogging in the nozzle 2. Therefore, the real-time regulated pressure-discharge flow rate characteristics allow the real-time degree of clogging in the nozzle 2 to be quantified and quantified.

[0034] Fig. 3 is a schematic diagram showing an example of the adjustment pressure-discharge flow rate characteristics calculated by the calculation unit 22 in the example processing of Fig. 2. In Fig. 3, the adjustment pressure-discharge flow rate characteristics are shown in a graph with the adjustment pressure Preg on the horizontal axis and the discharge flow rate F from the nozzle 2 on the vertical axis. Fig. 3 also shows the adjustment pressure-discharge flow rate characteristics for four states α1 to α4, which differ from one another in the degree of clogging in the nozzle 2. Of the four states α1 to α4, the states with the highest degree of clogging in the nozzle 2 are state α4, state α3, state α2, and state α1.

[0035] 3, when the degree of clogging in the nozzle 2 is low, such as in state α1, it is possible to increase the discharge flow rate F from the nozzle 2 without increasing the regulated pressure Preg. When the degree of clogging in the nozzle 2 is low, the rate of increase in the discharge flow rate F relative to the regulated pressure Preg is large.

[0036] 3, the higher the degree of clogging in the nozzle 2, the more it becomes necessary to increase the adjustment pressure Preg in order to increase the discharge flow rate F from the nozzle 2. Furthermore, the higher the degree of clogging in the nozzle 2, the smaller the rate of increase in the discharge flow rate F with respect to the adjustment pressure Preg. For example, among the four states α1 to α4 described above, the states α1, α2, α3, and α4 are arranged in descending order of the rate of increase in the discharge flow rate F with respect to the adjustment pressure Preg. Furthermore, as shown in FIG. 3, in a state in which the degree of clogging in the nozzle 2 is excessively high, such as state α4, once the discharge flow rate F from the nozzle 2 reaches a certain level, the discharge flow rate F tends not to increase even if the adjustment pressure Preg is increased.

[0037] 2, when the adjustment pressure-discharge flow rate characteristic is calculated as the discharge performance from the nozzle 2, the control unit 23 controls the operation of the pressure adjustment unit 11 based on the calculation result of the adjustment pressure-discharge flow rate characteristic to adjust the adjustment pressure Preg. At this time, the control unit 23, in cooperation with the calculation unit 22, calculates a pressure value of the adjustment pressure Preg in the pressure adjustment unit 11 that sets the discharge flow rate F from the nozzle 2 to a target flow rate Ftar based on the calculation result of the adjustment pressure-discharge flow rate characteristic (S104). The target flow rate Ftar is stored in a storage medium or the like of the process execution unit 21, or is input by a user of the nozzle 2 or the like via a user interface (not shown).

[0038] The pressure value of the adjustment pressure Preg calculated by the calculation process of S104 changes depending on the degree of clogging in the nozzle 2. Then, if other conditions including the flow rate value that becomes the target flow rate Ftar are the same, the higher the degree of clogging in the nozzle 2, the higher the pressure value of the adjustment pressure Preg calculated in S104. For example, in the example of Fig. 3, as the adjustment pressure Preg that sets the discharge flow rate F in the nozzle 2 to the target flow rate Ftar, a pressure value Preg1 is calculated in state α1, a pressure value Preg2 that is higher than the pressure value Preg1 in state α2, and a pressure value Preg3 that is higher than the pressure value Preg2 in state α3 are calculated.

[0039] 2, the calculation of S104 is performed to calculate the pressure value of the adjustment pressure Preg that sets the discharge flow rate F to the target flow rate Ftar as a value that changes in response to the degree of clogging in the nozzle 2. Therefore, the pressure value of the adjustment pressure Preg calculated in S104 also quantifies and digitizes the degree of clogging in the nozzle 2 in real time. Furthermore, in the calculation process of S104, the pressure value of the adjustment pressure Preg is calculated as a control target value for controlling the operation of the pressure adjustment unit 11.

[0040] 2, after calculating the adjustment pressure Preg that sets the discharge flow rate F to the target flow rate Ftar, the control unit 23 controls the operation of the pressure adjustment unit 11 to adjust the adjustment pressure Preg to the pressure value calculated in S104 (S105). By adjusting the adjustment pressure Preg to the pressure value calculated in S104, the discharge flow rate F from the nozzle 2 is adjusted to the target flow rate Ftar. For example, in the example of FIG. 3, the adjustment pressure Preg is adjusted to pressure values ​​Preg1, Preg2, and Preg3 in states α1, α2, and α3, respectively, to adjust the discharge flow rate F from the nozzle 2 to the target flow rate Ftar.

[0041] 2, the degree of clogging in the nozzle 2 is quantified, and feedback control is performed to adjust the regulated pressure Preg in the pressure adjustment unit 11 in accordance with the degree of clogging in the nozzle 2. Then, the discharge flow rate F is adjusted to the target flow rate Ftar by the feedback control that adjusts the regulated pressure Preg in the pressure adjustment unit 11.

[0042] Here, if other conditions including the adjusted pressure Preg are the same, the higher the degree of clogging at the nozzle 2, the greater the deficit, such as a pressure deficit, in the fluid flow path up to the discharge port 5, and therefore the discharge flow rate F at the discharge port 5 decreases. By performing the example process of FIG. 2, even if the deficit in the flow path changes in response to the degree of clogging at the nozzle 2, the adjusted pressure Preg is adjusted in response to the change in the deficit, thereby suppressing a decrease in the discharge flow rate F from the target flow rate Ftar. In other words, the change in the deficit in the flow path in response to the degree of clogging at the nozzle is compensated for by adjusting the adjusted pressure Preg.

[0043] Note that in a state where the degree of clogging in the nozzle 2 is excessively high, such as state α4 in the example of Figure 3, even if the adjustment pressure Preg is increased, the discharge flow rate F may not increase to the target flow rate Ftar. In such a case, instead of the processing of S104 in the example of Figure 2, the control unit 23 determines that it is impossible to set the discharge flow rate F to the target flow rate Ftar. In this case, the control unit 23 performs calculations related to the determination based on the adjustment pressure-discharge flow rate characteristics calculated in S103, and determines that it is impossible to increase the discharge flow rate F to the target flow rate Ftar.

[0044] If it is not possible to set the discharge flow rate F to the target flow rate Ftar, the control unit 23 issues a warning to that effect. The warning is issued using a user interface or the like, for example, by displaying the warning on a screen or issuing a sound. In one example, if it is not possible to set the discharge flow rate Ftar to the target flow rate Ftar, the control unit 23 forcibly stops the supply of fluid to the nozzle 2 instead of or in addition to issuing a warning. This forcibly stops the discharge of fluid from the nozzle 2.

[0045] As described above, in the embodiments and the like, in the supply flow path 6, the pressure adjustment unit 11 adjusts the pressure of the fluid supplied to the nozzle 2, and the first flow meter 12 measures the flow rate of the fluid to the nozzle 2 downstream of the pressure adjustment unit 11 and in the vicinity of the nozzle 2. Then, in the supply flow path 6, between the pressure adjustment unit 11 and the first flow meter 12, the pressure sensor 13 detects the pressure of the fluid to the nozzle 2, and the second flow meter 15 measures the flow rate of the fluid to the nozzle 2. As a result, when the fluid is discharged from the nozzle 2, it is possible to calculate the pressure difference ΔP between the adjusted pressure Preg and the detection result by the pressure sensor 13, and the flow rate difference ΔF between the measurement results by the first flow meter 12 and the second flow meter 15.

[0046] Here, as described above, the pressure difference ΔP and the flow rate difference ΔF are parameters related to the degree of clogging in the nozzle 2, and change in accordance with the degree of clogging in the nozzle 2. Therefore, by being able to calculate the pressure difference ΔP and the flow rate difference ΔF, it becomes possible to quantify and numerically express the degree of clogging in the nozzle 2 when discharging fluid from the nozzle 2. This enables users, manufacturers, designers, managers, etc. of the nozzle 2 to appropriately understand the degree of clogging in the nozzle 2 based on the pressure difference ΔP, the flow rate difference ΔF, etc.

[0047] In one example of the embodiments, the pressure adjustment unit 11, the second flow meter 15, the pressure sensor 13, and the first flow meter 12 are arranged in this order from upstream to downstream in the supply flow path 6. With this arrangement, the pressure sensor 13 is arranged between the second flow meter 15 and the first flow meter 12, and the path length along the supply flow path 6 between the second flow meter 15 and the first flow meter 12 is appropriately secured to a certain length. As a result, even when the fluid is a liquid such as an electrolyte, the flow rate difference ΔF between the second flow meter 15 and the first flow meter 12 appropriately reflects the degree of clogging in the nozzle 2. In other words, the flow rate difference ΔF between the second flow meter 15 and the first flow meter 12 is appropriately calculated in accordance with the degree of clogging in the nozzle 2.

[0048] Furthermore, in the above-described embodiments, the discharge performance from the nozzle 2, such as the adjusted pressure-discharge flow rate characteristics, which changes in response to the degree of clogging in the nozzle 2, is calculated based on the pressure difference ΔP and the flow rate difference ΔF. By calculating the adjusted pressure-discharge flow rate characteristics, the degree of clogging in the nozzle 2 is quantified and quantified in more detail.

[0049] Furthermore, in the above-described embodiment and the like, the discharge flow rate F from the nozzle 2 is adjusted to the target flow rate Ftar by controlling the operation of the pressure adjustment unit 11 based on the calculation results for the discharge performance from the nozzle 2. For example, based on the calculation results for the adjustment pressure-discharge flow rate characteristics, a pressure value for the adjustment pressure Preg that sets the discharge flow rate F to the target flow rate Ftar is calculated, and the operation of the pressure adjustment unit 11 is controlled so that the adjustment pressure Preg becomes equal to the pressure value of the calculation result. Therefore, feedback control is appropriately performed in the pressure adjustment unit 11 to adjust the adjustment pressure Preg in accordance with the degree of clogging in the nozzle 2, and the discharge flow rate F from the nozzle 2 is appropriately adjusted to the target flow rate Ftar.

[0050] By stably discharging the fluid from the nozzle 2 with the discharge flow rate F at the target flow rate Ftar, when the fluid is discharged from the nozzle 2 during the manufacturing process of a product, the occurrence of defective products due to poor fluid discharge or the like is appropriately suppressed. For example, in the manufacturing process of a battery, it is effectively suppressed that the required amount of electrolyte is not discharged from the nozzle 2. This improves the yield in the manufacturing process. Furthermore, by stably discharging the fluid from the nozzle 2 with the discharge flow rate F at the target flow rate Ftar, when the fluid is discharged from the nozzle 2 during product use, it is appropriately suppressed that malfunctions of the product due to poor fluid discharge or the like are

[0051] According to at least one of these embodiments or examples, in a supply flow path, a pressure adjustment unit adjusts the pressure of the fluid supplied to the nozzle, and a first flow meter measures the flow rate of the fluid to the nozzle downstream of the pressure adjustment unit and near the nozzle. In the supply flow path, between the pressure adjustment unit and the first flow meter, a pressure sensor detects the pressure of the fluid to the nozzle, and a second flow meter measures the flow rate of the fluid to the nozzle. It is possible to provide an inspection device and an inspection method that make it possible to quantify the degree of clogging in the nozzle when discharging a fluid from the nozzle.

[0052] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0053] 1...inspection device, 2...nozzle, 3...fluid supply unit, 6...supply flow path, 11...pressure adjustment unit, 12...first flow meter (downstream flow meter), 13...pressure sensor, 15...second flow meter (upstream flow meter), 21...processing execution unit, 22...calculation unit, 23...control unit, Preg...adjusted pressure, F...discharge flow rate, ΔP...pressure difference, ΔF...flow rate difference, Ftar...target flow rate.

Claims

1. a nozzle capable of discharging a fluid; a fluid supply unit in which a supply flow path for the fluid to the nozzle is formed; a pressure adjusting unit that adjusts the pressure of the fluid supplied to the nozzle in the supply flow path; a first flow meter located in the supply flow path downstream of the pressure adjusting unit and in the vicinity of the nozzle, the first flow meter measuring a flow rate of the fluid to the nozzle; a pressure sensor that detects the pressure of the fluid to the nozzle, in the supply flow path between the pressure adjustment unit and the first flow meter; a second flow meter in the supply flow path between the pressure adjusting unit and the first flow meter, the second flow meter measuring the flow rate of the fluid to the nozzle; An inspection device comprising:

2. The inspection device according to claim 1 , wherein the pressure adjusting unit, the second flow meter, the pressure sensor, and the first flow meter are arranged in this order from the upstream side to the downstream side in the supply flow path.

3. 3. The inspection device according to claim 1, further comprising a calculation unit that calculates a pressure difference between the adjusted pressure by the pressure adjustment unit and the detection result by the pressure sensor, and a flow rate difference between the measurement results by the first flow meter and the second flow meter, as parameters related to the degree of clogging in the nozzle.

4. The inspection device according to claim 3 , wherein the calculation unit calculates the discharge performance from the nozzle, which changes in response to the degree of clogging in the nozzle, based on the pressure difference and the flow rate difference.

5. 5. The inspection device of claim 4, further comprising a control unit that adjusts the discharge flow rate from the nozzle to a target flow rate by controlling the operation of the pressure adjustment unit based on the calculation result of the calculation unit regarding the discharge performance from the nozzle.

6. adjusting a pressure of the fluid supplied to a nozzle by a pressure adjusting unit in a supply flow path of the fluid to the nozzle capable of ejecting the fluid; measuring a flow rate of the fluid to the nozzle with a first flow meter in the supply flow path downstream of the pressure adjusting unit and in the vicinity of the nozzle; Detecting the pressure of the fluid to the nozzle by a pressure sensor in the supply flow path between the pressure adjustment unit and the first flow meter; measuring the flow rate of the fluid to the nozzle with a second flow meter in the supply flow path between the pressure adjustment unit and the first flow meter; An inspection method comprising:

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