Automatic centering device, centering adjustment mechanism, laser processing device, learning device, inference device, centering adjustment method, and method for manufacturing workpiece

Abstract

To obtain an automatic centering device capable of reducing the weight of a processing head compared with conventional devices. [Solution] The automatic centering device 2 is an automatic centering device 2 for automatically centering the optical axis of a laser beam r and the central axis of a nozzle 1c by moving a condenser lens 1d provided inside a processing head 1, and has a tool 2a that fits into each of a plurality of adjustment members that can adjust the optical axis of the laser beam r and rotates integrally with each of the plurality of adjustment members, and a rotation mechanism 2b that imparts a rotational force to the tool 2a. The automatic centering device 2 is provided separately from the processing head 1.

Description

[Technical Field]

[0001] The present disclosure relates to an automatic centering device, a centering adjustment mechanism, a laser processing device, a learning device, an inference device, a centering adjustment method, and a method for manufacturing a workpiece. [Background technology]

[0002] Conventionally, a machining head equipped with a condenser lens and a nozzle has been known. The condenser lens is provided inside the machining head and condenses a laser beam. The nozzle is provided at the bottom of the machining head and emits the laser beam condensed by the condenser lens toward a workpiece together with an assist gas.

[0003] If there is a misalignment between the optical axis of the laser beam and the central axis of the nozzle (hereinafter referred to as "misalignment"), problems such as the generation of dross, heat input to the base material, uneven melting, etc. For this reason, it is necessary to perform centering to align the optical axis of the laser beam with the central axis of the nozzle.

[0004] Laser processing is temporarily interrupted for centering. Manual centering by an operator takes a significant amount of time, which results in longer interruptions to laser processing and reduced productivity of the workpiece. To address this issue, laser processing equipment equipped with a mechanism that can automatically perform centering has been developed and is now in practical use.

[0005] For example, Patent Document 1 discloses a laser processing apparatus that adjusts the position of a lens holder holding a focusing lens in the X-axis and Y-axis directions by using movement of a processing head. In the laser processing apparatus disclosed in Patent Document 1, a lens holder and a pair of adjustment screws that adjust the position of the lens holder in the X-axis and Y-axis directions are installed inside a lens housing attached to the processing head. In addition, in the laser processing apparatus disclosed in Patent Document 1, a pair of adjustment knobs that are connected to each adjustment screw and rotate integrally with each adjustment screw are installed outside the lens housing. In addition, in the laser processing apparatus disclosed in Patent Document 1, a rotation imparting member that contacts the adjustment knob and imparts a rotational force is installed on a fixed part of the laser processing apparatus.

[0006] In the laser processing device disclosed in Patent Document 1, one of a pair of adjustment knobs is held in contact with a rotation imparting member, and the processing head is moved. This allows each adjustment knob to be rotated individually to adjust the position of the lens holder in the X-axis direction and the Y-axis direction. Note that in the laser processing device disclosed in Patent Document 1, the processing head is equipped with a slide bearing that rotatably supports the adjustment screw, a locking mechanism that prevents the adjustment knob from rotating after the position of the lens holder is adjusted, and other devices. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 2019-58911 Summary of the Invention [Problem to be solved by the invention]

[0008] However, in the technology disclosed in Patent Document 1, most of the mechanisms required for automatic centering, such as the adjustment screws, adjustment knobs, slide bearings, and locking mechanisms, are installed in the processing head, which increases the weight of the processing head. This reduces the movement performance of the processing head, resulting in a problem of reduced productivity of the workpieces.

[0009] The present disclosure has been made in view of the above, and aims to provide an automatic centering device that can reduce the weight of a machining head compared to conventional devices. [Means for solving the problem]

[0010] In order to solve the above-mentioned problems and achieve the object, the automatic centering device according to the present disclosure is an automatic centering device for automatically centering the optical axis of a laser beam with the central axis of a nozzle by moving a focusing lens provided inside a processing head, and includes a tool and a rotation mechanism. The tool is fitted to each of a plurality of adjustment members capable of adjusting the optical axis of the laser beam and rotates integrally with each of the plurality of adjustment members. The rotation mechanism applies a rotational force to the tool. The automatic centering device is provided separately from the processing head. [Effects of the Invention]

[0011] The automatic centering device according to the present disclosure has the effect of making the processing head lighter than conventional ones. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a perspective view showing a laser processing apparatus according to a first embodiment; [Figure 2] FIG. 1 is a perspective view showing a processing head, an automatic centering device, a misalignment amount detection device, and a control device of a laser processing device according to a first embodiment. [Figure 3] FIG. 1 is a horizontal cross-sectional view showing a processing head according to a first embodiment. [Figure 4] FIG. 1 is a vertical cross-sectional view showing the machining head and the automatic centering device in the first embodiment, illustrating a state in which the central axis of the adjustment screw and the central axis of the tool are aligned. [Figure 5] FIG. 1 is a vertical cross-sectional view showing the machining head and the automatic centering device in the first embodiment, illustrating a state in which the central axis of the adjustment screw is misaligned with the central axis of the tool. [Figure 6]FIG. 5 is a partially enlarged cross-sectional view of FIG. 4, showing the adjusting screw and the tool in the first embodiment; [Figure 7] A vertical cross-sectional view of the adjusting screw taken along line VII-VII shown in Figure 6. [Figure 8] Vertical cross section of the tool along line VIII-VIII shown in Fig. 6 [Figure 9] 1 is a flowchart showing the steps of a centering adjustment method using a laser processing apparatus according to a first embodiment. [Figure 10] 1 is a flowchart showing the procedure of a fitting process according to the first embodiment. [Figure 11] FIG. 10 is a vertical cross-sectional view showing a state in which the adjustment screw and the tool are out of phase with each other in the fitting process according to the first embodiment; [Figure 12] FIG. 10 is a vertical cross-sectional view showing a state in the middle of aligning the phases of the adjustment screw and the tool in the fitting process according to the first embodiment. [Figure 13] FIG. 10 is a vertical cross-sectional view showing a state in which the phases of the adjustment screw and the tool are aligned in the fitting process according to the first embodiment. [Figure 14] 1 is a flowchart showing the procedure of a rotation process according to the first embodiment. [Figure 15] FIG. 10 is a vertical cross-sectional view showing a state in which the adjusting screw is free to rotate relative to the tool in the rotation process in the first embodiment. [Figure 16] FIG. 10 is a vertical cross-sectional view showing a state in which the adjusting screw cannot rotate freely relative to the tool in the rotation process in the first embodiment. [Figure 17] 1 is a flowchart showing the procedure of the extraction step in the first embodiment. [Figure 18] FIG. 10 is a perspective view showing a processing head, an automatic centering device, a misalignment amount detection device, and a control device of a laser processing device according to a second embodiment. [Figure 19] FIG. 10 is a plan view showing an automatic centering device of a laser processing device according to a third embodiment; [Figure 20] FIG. 10 is a plan view showing an automatic centering device of a laser processing device according to a fourth embodiment; [Figure 21] FIG. 10 is a plan view showing an automatic centering device of a laser processing device according to a fifth embodiment. [Figure 22] FIG. 13 is a plan view showing an automatic centering device of a laser processing device according to a sixth embodiment. [Figure 23] FIG. 13 is a plan view showing an automatic centering device of a laser processing device according to a seventh embodiment. [Figure 24] FIG. 13 is a plan view showing a processing head and an automatic centering device of a laser processing device according to an eighth embodiment; [Figure 25] FIG. 13 is a plan view showing a processing head and an automatic centering device of a laser processing device according to a ninth embodiment; [Figure 26] FIG. 23 is a horizontal cross-sectional view showing the processing head of the laser processing device according to the tenth embodiment. [Figure 27] FIG. 23 is a horizontal cross-sectional view showing the processing head of the laser processing device according to the eleventh embodiment. [Figure 28] FIG. 23 is a diagram showing an adjustment screw and a tool of a laser processing apparatus according to a twelfth embodiment. [Figure 29] 29 is a cross-sectional view of the adjusting screw taken along line XXIX-XXIX shown in FIG. [Figure 30] Cross-sectional view of the tool taken along line XXX-XXX shown in Figure 28 [Figure 31] FIG. 23 is a vertical cross-sectional view showing an adjusting screw in the thirteenth embodiment. [Figure 32] Vertical cross-sectional view showing a tool in embodiment 13. [Figure 33] 13 is a vertical cross-sectional view showing another example of the tool according to the thirteenth embodiment. [Figure 34] FIG. 23 is a vertical cross-sectional view showing an adjusting screw in a first modified example of the thirteenth embodiment. [Figure 35] FIG. 23 is a vertical cross-sectional view showing a tool according to a first modification of the thirteenth embodiment; [Figure 36] FIG. 23 is a vertical cross-sectional view showing another example of the tool in the first modified example of the thirteenth embodiment. [Figure 37] FIG. 23 is a vertical cross-sectional view showing an adjusting screw in a second modified example of the thirteenth embodiment. [Figure 38] FIG. 23 is a vertical cross-sectional view showing a tool according to a second modification of the thirteenth embodiment. [Figure 39]FIG. 23 is a vertical cross-sectional view showing another example of the tool in the second modification of the thirteenth embodiment. [Figure 40] FIG. 23 is a vertical cross-sectional view showing an adjusting screw in a third modified example of the thirteenth embodiment. [Figure 41] FIG. 23 is a vertical cross-sectional view showing a tool according to a third modification of the thirteenth embodiment. [Figure 42] FIG. 23 is a vertical cross-sectional view showing an adjusting screw in a fourth modified example of the thirteenth embodiment. [Figure 43] FIG. 22 is a vertical cross-sectional view showing a tool according to a fourth modification of the thirteenth embodiment. [Figure 44] FIG. 23 is a vertical cross-sectional view showing an adjusting screw in a fifth modified example of the thirteenth embodiment. [Figure 45] 13 is a vertical cross-sectional view showing a tool in a fifth modified example of the thirteenth embodiment. [Figure 46] Vertical cross-sectional view showing a tool in embodiment 14 [Figure 47] FIG. 23 is a vertical cross-sectional view showing the processing head and automatic centering device of the laser processing device according to the fifteenth embodiment, illustrating a state in which the central axis of the adjustment screw and the central axis of the tool are aligned. [Figure 48] FIG. 23 is a vertical cross-sectional view showing the tool support member in the fifteenth embodiment, illustrating a state in which the inner ring and the outer ring are parallel to each other. [Figure 49] FIG. 23 is a vertical cross-sectional view showing the tool support member in the fifteenth embodiment, illustrating a state in which the inner ring and the outer ring intersect obliquely. [Figure 50] FIG. 23 is a horizontal cross-sectional view showing the processing head of the laser processing device according to the sixteenth embodiment. [Figure 51] FIG. 23 is a diagram showing the configuration of a learning device for a laser processing device according to a nineteenth embodiment. [Figure 52] 22 is a flowchart showing a procedure of a learning process performed by the learning device according to the nineteenth embodiment. [Figure 53] FIG. 23 is a diagram showing the configuration of a neural network used by a learning device according to a nineteenth embodiment. [Figure 54] FIG. 23 is a diagram showing a configuration of an inference device for a laser processing device according to a nineteenth embodiment. [Figure 55]22 is a flowchart showing the procedure of an inference process performed by the inference device according to the nineteenth embodiment. [Figure 56] 20 is a flowchart showing the procedure of a fitting process in a laser processing apparatus according to a twentieth embodiment. [Figure 57] FIG. 29 is a vertical cross-sectional view showing a state in which the adjustment screw and the tool are out of phase with each other in the fitting process in the twentieth embodiment. [Figure 58] FIG. 29 is a vertical cross-sectional view showing a state in the middle of aligning the phase of the adjustment screw and the tool in the fitting process in the twentieth embodiment. [Figure 59] FIG. 29 is a vertical cross-sectional view showing a state in which the phases of the adjusting screw and the tool are aligned in the fitting process in the twentieth embodiment. [Figure 60] 21 is a vertical cross-sectional view showing a state in which the adjusting screw and the tool are rotated clockwise in the twenty-first embodiment. [Figure 61] 21 is a vertical cross-sectional view showing a state in which the adjusting screw and the tool are rotated counterclockwise in the twenty-first embodiment. [Figure 62] FIG. 22 is a vertical cross-sectional view showing a state in which the adjusting screw and the tool rotate when the amount of rotation of the adjusting screw is large in the twenty-second embodiment. [Figure 63] FIG. 22 is a vertical cross-sectional view showing a state in which the adjusting screw and the tool rotate when the amount of rotation of the adjusting screw is small in the twenty-second embodiment. [Figure 64] FIG. 22 is a cross-sectional view showing a state in which the adjusting screw and the tool are stopped when the amount of rotation of the adjusting screw is zero in the twenty-second embodiment. [Figure 65] 23 is a flowchart showing the procedure of a rotation process in a laser processing apparatus according to a twenty-third embodiment. [Figure 66] 24 is a flowchart showing the procedure of a drawing process in a laser processing apparatus according to a twenty-fourth embodiment. [Figure 67] FIG. 24 is a vertical cross-sectional view showing a state in which the adjusting screw cannot rotate freely relative to the tool in the extraction process in the twenty-fourth embodiment. [Figure 68] FIG. 24 is a vertical cross-sectional view showing a state in which the adjusting screw is free to rotate relative to the tool in the extraction process in the twenty-fourth embodiment. [Figure 69]FIG. 24 is a diagram showing a configuration in which the functions of the control unit according to the first to twenty-fourth embodiments are realized by hardware. [Figure 70] FIG. 24 is a diagram showing a configuration in which the functions of the control unit according to the first to twenty-fourth embodiments are realized by software. [Figure 71] FIG. 23 is a diagram showing a hardware configuration of a learning device according to a nineteenth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, an automatic centering device, a centering adjustment mechanism, a laser processing device, a learning device, an inference device, a centering adjustment method, and a method for manufacturing a workpiece according to embodiments will be described in detail with reference to the drawings.

[0014] Embodiment 1 FIG. 1 is a perspective view showing a laser processing apparatus 100 according to a first embodiment. As shown in FIG. 1, the laser processing apparatus 100 processes a workpiece 9 by irradiating the workpiece 9 with a laser beam r. Processing includes, for example, cutting, welding, and drilling. The workpiece 9 is, for example, a metal plate or a substrate. The laser processing apparatus 100 includes a processing head 1, an automatic centering device 2, a misalignment amount detection device 3, a control device 4, a base 5, a bed 6, a column 7, and a laser oscillator 8.

[0015] Hereinafter, when describing the directions of each component of the laser processing apparatus 100, the right-handed XYZ coordinate system shown in FIG. 1 will be used. The X-axis, Y-axis, and Z-axis are three axes that are perpendicular to each other. Of each axis, the direction of the arrow is the + direction, and the direction opposite to the arrow is the - direction. The direction along the X-axis (X-axis direction) and the direction along the Y-axis (Y-axis direction) are directions that are included in the horizontal direction. The direction along the Z-axis (Z-axis direction) coincides with the vertical direction. Furthermore, the + direction of the Z-axis is considered to be upward, and the - direction of the Z-axis is considered to be downward. In this embodiment, the Z-axis corresponds to the first axis, the X-axis corresponds to the second axis, and the Y-axis corresponds to the third axis.

[0016] The bed 6 is a rectangular parallelepiped member extending in the X-axis and Y-axis directions. A workpiece 9 is placed on the upper surface of the bed 6. The column 7 is a gate-shaped member placed on the upper surface of the bed 6. The column 7 has two vertical sections 7a and one horizontal section 7b. The two vertical sections 7a are rectangular prism-shaped sections spaced apart from each other in the Y-axis direction. Each vertical section 7a extends in the Z-axis direction. The horizontal section 7b is a rectangular prism-shaped section spanning the upper ends of the two vertical sections 7a. The horizontal section 7b extends in the Y-axis direction. The column 7 is movable in the X-axis direction along the bed 6 by a driving mechanism (not shown). The laser oscillator 8 is a device that emits a laser beam r. In FIG. 1, the laser beam r (the optical path of the laser beam r) is indicated by a dashed line.

[0017] The processing head 1 is a member that irradiates a laser beam r toward a workpiece 9. The processing head 1 is attached to the horizontal portion 7b. The processing head 1 is provided so as to be movable in the Z-axis direction and the Y-axis direction along the horizontal portion 7b by driving a drive mechanism (not shown). The processing head 1 can also move in the X-axis direction in conjunction with the movement of the column 7 in the X-axis direction. In other words, the processing head 1 can move in three directions: the X-axis direction, the Y-axis direction, and the Z-axis direction. The laser processing apparatus 100 performs laser processing by moving the processing head 1 and the workpiece 9 relative to each other. In the example shown in FIG. 1, the position of the workpiece 9 is fixed, and laser processing is performed by moving the processing head 1 in three directions.

[0018] The processing head 1 has a head-side housing 1a, a lens unit 1b, and a nozzle 1c. The head-side housing 1a is a generally cylindrical member with both ends in the Z-axis direction open. The lens unit 1b is provided inside the head-side housing 1a. The lens unit 1b has a condenser lens 1d that condenses the laser beam r, and a lens holder 1e that holds the condenser lens 1d. The nozzle 1c is provided at the bottom of the head-side housing 1a. The nozzle 1c is positioned lower than the lens unit 1b. The nozzle 1c emits the laser beam r that has passed through the condenser lens 1d toward the workpiece 9 together with an assist gas.

[0019] The automatic centering device 2 is a device for automatically centering the optical axis of the laser beam r and the central axis of the nozzle 1c by moving the focusing lens 1d. The automatic centering device 2 is arranged away from the processing head 1 in the X-axis direction. The automatic centering device 2 is arranged outside the bed 6. The automatic centering device 2 is arranged on the upper surface of the base 5. When performing automatic centering, the processing head 1 moves until the positions of the processing head 1 and the automatic centering device 2 in the Y-axis direction match. In Figure 1, the processing head 1 is shown by a dashed line when it has moved to the position for automatic centering.

[0020] In this specification, "centering" refers to aligning the optical axis of the laser beam r with the central axis of the nozzle 1c. Aligning the optical axis of the laser beam r with the central axis of the nozzle 1c refers to a case where the optical axis of the laser beam r is completely aligned, as well as a case where the optical axis of the laser beam r is slightly misaligned with the central axis of the nozzle 1c in the XY plane. A slight misalignment means that a certain amount of error is allowed in the amount of misalignment between the optical axis of the laser beam r and the central axis of the nozzle 1c. The certain error range refers to a range within which the effects of the present disclosure can be achieved. In other words, the optical axis of the laser beam r may be misaligned with the central axis of the nozzle 1c as long as it is within a range that can suppress problems such as the generation of dross due to misalignment between the optical axis of the laser beam r and the central axis of the nozzle 1c. For example, if the amount of misalignment between the optical axis of the laser beam r and the central axis of the nozzle 1c is within 50 μm, problems such as the generation of dross due to misalignment between the central axis of the focusing lens 1d and the central axis of the nozzle 1c can be suppressed.

[0021] The misalignment detection device 3 is a device for detecting the amount of misalignment between the optical axis of the laser beam r and the central axis of the nozzle 1c. The misalignment detection device 3 is, for example, a plurality of cameras, and captures images of the central axis of the condenser lens 1d and the central axis of the nozzle 1c. The misalignment detection device 3 is disposed on the upper surface of the bed 6. The misalignment detection device 3 is disposed directly below the processing head 1 that has moved to a position where automatic centering is performed. The misalignment detection device 3 captures images of the central axes of the condenser lens 1d and the nozzle 1c from below, and detects the amount of misalignment between the optical axis of the laser beam r and the central axis of the nozzle 1c. The detected amount of misalignment is sent to the control device 4.

[0022] The control device 4 communicates with the machining head 1, the automatic centering device 2, the misalignment amount detection device 3, the laser oscillator 8, etc., and controls the entire laser machining device 100. Details of the control by the control device 4 will be described later. Note that the control device for the machining head 1 and the control device for the automatic centering device 2 may be configured to be provided separately.

[0023] Next, the processing head 1 and the automatic centering device 2 will be described in detail. FIG. 2 is a perspective view showing the processing head 1, automatic centering device 2, misalignment amount detection device 3, and control device 4 of the laser processing apparatus 100 according to the first embodiment. FIG. 3 is a horizontal cross-sectional view showing the processing head 1 in the first embodiment. FIG. 3 illustrates the optical axis A of the laser beam r passing through the processing head 1. FIG. 3 also illustrates a first center line B and a second center line C. The first center line B is an imaginary line along the X-axis that passes through the optical axis A of the laser beam r. The second center line C is an imaginary line along the Y-axis that passes through the optical axis A of the laser beam r.

[0024] As shown in FIG. 3, the head-side housing 1a has a plurality of insertion holes 1f and a plurality of mounting holes 1g formed therein. The plurality of insertion holes 1f penetrate from the inner surface to the outer surface of the head-side housing 1a in the X-axis direction. In this embodiment, the number of insertion holes 1f is two. The two insertion holes 1f are arranged at an interval from each other in the Y-axis direction. The plurality of mounting holes 1g are arranged on the opposite side of the second center line C from the plurality of insertion holes 1f. The plurality of mounting holes 1g are recessed from the inner surface of the head-side housing 1a toward the outer surface. In this embodiment, the number of mounting holes 1g is two. The two mounting holes 1g are arranged at an interval from each other in the Y-axis direction. The two mounting holes 1g are recessed from the inner surface of the head-side housing 1a toward the outer surface in a direction inclined with respect to the X-axis and Y-axis.

[0025] The machining head 1 has a plurality of adjustment screws 1h, a plurality of push rods 1i, and a plurality of head-side biasing members 1j. The plurality of adjustment screws 1h, the plurality of push rods 1i, the plurality of head-side biasing members 1j, and the lens unit 1b constitute a centering adjustment mechanism. The adjustment screws 1h and the push rods 1i constitute adjustment members.

[0026] A circular accommodation hole 1k is formed in the head-side housing 1a. The lens unit 1b is disposed in the accommodation hole 1k. An annular gap N is formed between the inner peripheral surface of the accommodation hole 1k and the outer peripheral surface of the lens holder 1e. The lens unit 1b is movable in the X-axis direction and the Y-axis direction by the amount of the gap N. In this embodiment, the outer peripheral shape of the lens holder 1e is polygonal.

[0027] The outer peripheral surface of the lens holder 1e has two first inclined surfaces 1m, two second inclined surfaces 1n, two first surfaces 1o, and two second surfaces 1p. The two first inclined surfaces 1m, two second inclined surfaces 1n, two first surfaces 1o, and two second surfaces 1p are arranged at equal angles in the circumferential direction around the optical axis A of the laser beam r.

[0028] The two first inclined surfaces 1m are arranged at positions symmetrical to each other with respect to the first center line B. The two second inclined surfaces 1n are arranged at positions symmetrical to each other with respect to the first center line B. One first inclined surface 1m and one second inclined surface 1n are arranged at positions facing each other with the optical axis A of the laser beam r in between. The other first inclined surface 1m and the other second inclined surface 1n are arranged at positions facing each other with the optical axis A of the laser beam r in between.

[0029] The two first surfaces 1o are arranged at positions facing each other in the X-axis direction, sandwiching the optical axis A of the laser beam r therebetween. One first surface 1o is arranged between the two second inclined surfaces 1n in the Y-axis direction. The other first surface 1o is arranged between the two first inclined surfaces 1m in the Y-axis direction. The two second surfaces 1p are arranged at positions facing each other in the Y-axis direction, sandwiching the optical axis A of the laser beam r therebetween. Each second surface 1p is arranged between the first inclined surface 1m and the second inclined surface 1n in the X-axis direction.

[0030] Each first inclined surface 1m is a lens-side inclined surface that inclines toward the second center line C as it moves away from the first center line B along the Y-axis direction. Each first inclined surface 1m is inclined with respect to the X-axis direction and the Y-axis direction. The two first inclined surfaces 1m are inclined in opposite directions to each other. The portion of the insertion hole 1f that opens onto the inner peripheral surface of the machining head 1 is located facing the first inclined surface 1m.

[0031] Each second inclined surface 1n is inclined so as to approach the second center line C as it moves away from the first center line B along the Y-axis direction. Each second inclined surface 1n is inclined with respect to the X-axis direction and the Y-axis direction. The two second inclined surfaces 1n are inclined in opposite directions to each other. The first inclined surface 1m and the second inclined surface 1n, which face each other across the optical axis A of the laser beam r, are parallel to each other.

[0032] Each first surface 1o is a surface extending in the Y-axis direction. Each first surface 1o is a curved surface that is convex in the X-axis direction, away from the optical axis A of the laser beam r. Each second surface 1p is a surface extending in the X-axis direction. Each second surface 1p is a curved surface that is convex in the Y-axis direction, away from the optical axis A of the laser beam r.

[0033] The multiple adjustment screws 1h extend in a direction perpendicular to the Z-axis, which is parallel to the optical axis A of the laser beam r. The multiple adjustment screws 1h can adjust the position of the optical axis of the laser beam r in the X-axis and Y-axis directions. In this embodiment, there are two adjustment screws 1h. Each adjustment screw 1h is inserted into an insertion hole 1f. The two adjustment screws 1h are arranged symmetrically with respect to the first center line B. The extension directions (axial directions) of the two adjustment screws 1h are parallel to each other. The base end of each adjustment screw 1h is exposed to the outside of the machining head 1 through the insertion hole 1f. The tip of each adjustment screw 1h is inserted into the insertion hole 1f. Hereinafter, when it is necessary to distinguish between the two adjustment screws 1h, they will be referred to as adjustment screw 1ha and adjustment screw 1hb.

[0034] The multiple push rods 1i can move back and forth in the X-axis direction as each adjustment screw 1h rotates. In this embodiment, there are two push rods 1i. Each push rod 1i is inserted into an insertion hole 1f. The two push rods 1i are arranged symmetrically across the first center line B. The extension directions (axial directions) of the two push rods 1i are parallel to each other. The base end of each push rod 1i is in contact with the tip of the corresponding adjustment screw 1h. The tip of each push rod 1i protrudes from the insertion hole 1f into the accommodation hole 1k. The tip of each push rod 1i is in contact with the outer circumferential surface of the lens holder 1e.

[0035] The tip of each push rod 1i has a third inclined surface 1q. The third inclined surface 1q is an adjustment member-side inclined surface that inclines toward the second center line C as it moves away from the first center line B along the Y-axis direction and comes into contact with the first inclined surface 1m. The third inclined surfaces 1q of the two push rods 1i are inclined in opposite directions to each other. The inclination angles of the first inclined surface 1m and the third inclined surface 1q that come into contact with each other are the same. Hereinafter, when it is necessary to distinguish between the two push rods 1i, they will be referred to as push rod 1ia and push rod 1ib.

[0036] The multiple head-side biasing members 1j bias the lens unit 1b toward each adjustment screw 1h. Each head-side biasing member 1j includes an elastic body such as a spring. In this embodiment, there are two head-side biasing members 1j. When distinguishing between the two head-side biasing members 1j, they are referred to as head-side biasing member 1ja and head-side biasing member 1jb. Each head-side biasing member 1j is in contact with the outer peripheral surface of the lens holder 1e. The multiple head-side biasing members 1j are arranged on the opposite side of the second center line C from each adjustment screw 1h and each push rod 1i.

[0037] The two head-side urging members 1j are arranged at an interval in the Y-axis direction. The head-side urging member 1ja located at one end in the Y-axis direction urges the lens unit 1b from the positive to the negative direction in the X-axis direction and from the positive to the negative direction in the Y-axis direction. The head-side urging member 1jb located at the other end in the Y-axis direction urges the lens unit 1b from the positive to the negative direction in the X-axis direction and from the negative to the positive direction in the Y-axis direction.

[0038] The head-side biasing member 1ja biases the lens unit 1b in a direction perpendicular to one of the second inclined surfaces 1n. The head-side biasing member 1ja is inclined with respect to the X-axis and Y-axis directions so that the normal direction of one of the second inclined surfaces 1n and the biasing direction of the head-side biasing member 1ja coincide with each other. The head-side biasing member 1ja is disposed in a position facing the adjusting screw 1ha across the optical axis A of the laser beam r. The adjusting screw 1ha and the head-side biasing member 1ja are disposed so that the pressing direction of the adjusting screw 1ha and the biasing direction of the head-side biasing member 1ja are opposite to each other.

[0039] The head-side biasing member 1jb biases the lens unit 1b in a direction perpendicular to the other second inclined surface 1n. The head-side biasing member 1jb is inclined with respect to the X-axis and Y-axis directions so that the normal direction of the other second inclined surface 1n and the biasing direction of the head-side biasing member 1jb coincide with each other. The head-side biasing member 1jb is disposed in a position facing the adjustment screw 1hb across the optical axis A of the laser beam r. The adjustment screw 1hb and the head-side biasing member 1jb are disposed so that the pressing direction of the adjustment screw 1hb and the biasing direction of the head-side biasing member 1jb are opposite to each other.

[0040] The extension direction of each adjustment screw 1h and each push rod 1i is parallel to the X-axis direction. The normal direction of the first inclined surface 1m is inclined with respect to the X-axis direction and the Y-axis direction. A virtual line D passing through the contact point between the third inclined surface 1q of one push rod 1ia and one of the first inclined surfaces 1m is inclined with respect to the X-axis direction and the Y-axis direction. A virtual line E passing through the contact point between the third inclined surface 1q of the other push rod 1ib and the other first inclined surface 1m is inclined with respect to the X-axis direction and the Y-axis direction. In this embodiment, the angle θ1 formed by the virtual line D and the first center line B and the angle θ2 formed by the virtual line E and the first center line B are 45 degrees. The angles θ1 and θ2 may be greater than 0 degrees and less than 90 degrees. Although it is desirable that the angles θ1 and θ2 be the same as in this embodiment, they may also be different from each other.

[0041] When each adjusting screw 1h is rotated clockwise (in the direction of arrow F) as viewed from the tool 2a (described later) against the biasing force of the head-side biasing member 1j, each pushing rod 1i advances toward the lens unit 1b and presses against the lens unit 1b. At this time, a component force acts in the direction of the optical axis A of the laser beam r. Specifically, when the adjusting screw 1ha is rotated clockwise as viewed from the tool 2a and the pushing rod 1ia presses the lens unit 1b toward the left on the paper, a force acts in the direction of arrow G shown in FIG. 3, and the lens unit 1b moves in the direction of arrow G. The movement direction of the lens unit 1b is the positive direction of the X axis and the positive direction of the Y axis. On the other hand, when the adjusting screw 1hb is rotated clockwise as viewed from the tool 2a and the pushing rod 1ib presses the lens unit 1b toward the left on the paper, a force acts in the direction of arrow H shown in FIG. 3, and the lens unit 1b moves in the direction of arrow H. The movement direction of the lens unit 1b is the + direction of the X axis and the - direction of the Y axis.

[0042] Furthermore, when each adjusting screw 1h is rotated counterclockwise as viewed from the tool 2a side (opposite the direction of arrow F), each pushing rod 1i is retracted away from the lens unit 1b. Specifically, when the adjusting screw 1ha is rotated counterclockwise as viewed from the tool 2a side and the pushing rod 1ia is retracted to the right on the page, the biasing force of the head-side biasing member 1ja causes the lens unit 1b to move in the direction opposite to the direction of arrow G in FIG. 3. The movement direction of the lens unit 1b is the negative direction of the X axis and the negative direction of the Y axis. On the other hand, when the adjusting screw 1hb is rotated counterclockwise as viewed from the tool 2a side and the pushing rod 1ib is retracted to the right on the page, the biasing force of the head-side biasing member 1jb causes the lens unit 1b to move in the direction opposite to the direction of arrow H in FIG. 3. The movement direction of the lens unit 1b is the negative direction of the X axis and the positive direction of the Y axis. As described above, by rotating each adjustment screw 1h clockwise or counterclockwise, the position of the lens unit 1b in the X-axis direction and the Y-axis direction can be adjusted.

[0043] 2, the automatic centering device 2 is provided separately from the machining head 1. The automatic centering device 2 has a plurality of tools 2a, a plurality of rotation mechanisms 2b, a plurality of linear motion mechanisms 2c, a plurality of joints 2d, and a plurality of fitting detection sensors 2e. In this embodiment, the number of each of the tools 2a, rotation mechanisms 2b, linear motion mechanisms 2c, joints 2d, and fitting detection sensors 2e is two.

[0044] The two tools 2a are fitted to the respective adjusting screws 1h and rotate integrally with the respective adjusting screws 1h. The two tools 2a extend in the X-axis direction and are spaced apart from each other in the Y-axis direction. Hereinafter, when distinguishing between the two tools 2a, they will be referred to as tool 2aa and tool 2ab. Since the tools 2aa and 2ab have the same configuration, and the adjusting screws 1ha and 1hb also have the same configuration, when one tool 2a and one adjusting screw 1h are shown in Figure 4 and subsequent figures, the symbols 2aa and 2ab and the symbols 1ha and 1hb are used.

[0045] The two rotation mechanisms 2b apply rotational force to each tool 2a. The two rotation mechanisms 2b are arranged at an interval in the Y-axis direction. Each rotation mechanism 2b is, for example, a motor. Each rotation mechanism 2b has an output shaft 2f extending in the X-axis direction.

[0046] The two linear motion mechanisms 2c move each tool 2a linearly in a direction perpendicular to the Z axis, which is parallel to the optical axis A of the laser beam r (the X axis direction in this embodiment), to move the tool 2a toward and away from each adjustment screw 1h. The two linear motion mechanisms 2c are spaced apart from each other in the Y axis direction. Each linear motion mechanism 2c has one guide rail 2g, one stage 2h, and one drive source 2i.

[0047] The guide rail 2g extends in the X-axis direction. The guide rail 2g of one linear motion mechanism 2c and the guide rail 2g of the other linear motion mechanism 2c are disposed at an interval in the Y-axis direction.

[0048] The stage 2h is attached to a guide rail 2g. The stage 2h is movable in the X-axis direction along the guide rail 2g. One rotation mechanism 2b is attached to the stage 2h. FIG. 4 is a vertical cross-sectional view showing the machining head 1 and automatic centering device 2 in embodiment 1, illustrating a state in which the central axis of the adjustment screw 1h and the central axis of the tool 2a are aligned. The stage 2h has a bottom wall 2j and two vertical walls 2k extending upward from both ends of the bottom wall 2j in the X-axis direction. The stage 2h opens upward and in the + and - directions in the Y-axis direction. One of the vertical walls 2k has a shaft hole 2m through which the tool 2a is inserted. The other vertical wall 2k has a shaft hole 2m through which the output shaft 2f of the rotation mechanism 2b is inserted.

[0049] The driving source 2i applies a moving force to the stage 2h and is, for example, an air cylinder.

[0050] As shown in FIG. 4, two joints 2d connect each tool 2a to the output shaft 2f of each rotation mechanism 2b and are configured to be deformable. In this embodiment, each joint 2d is a slit coupling, but other types of couplings may also be used. FIG. 5 is a vertical cross-sectional view of the machining head 1 and automatic centering device 2 in the first embodiment, illustrating a state in which the central axis of the adjustment screw 1h is misaligned with the central axis of the tool 2a. As shown in FIG. 5, each joint 2d serves to absorb the axial misalignment I (declination angle) between each tool 2a and each adjustment screw 1h and the eccentricity of the axes of each tool 2a and each adjustment screw 1h. Even when the axial misalignment I occurs between each tool 2a and each adjustment screw 1h as shown in the figure, the deformation of each joint 2d causes each tool 2a to tilt to the position indicated by the dashed line in FIG. 5, allowing each tool 2a to fit onto each adjustment screw 1h.

[0051] As shown in FIG. 2, the fitting detection sensor 2e is a sensor that detects whether each tool 2a has been fitted to each adjusting screw 1h. Specifically, the fitting detection sensor 2e detects the position of the linear motion mechanism 2c (the position of the stage 2h). Position information of the linear motion mechanism 2c, which is the detection result of the fitting detection sensor 2e, is sent to the control device 4. The control device 4 determines whether each tool 2a has been fitted to each adjusting screw 1h based on the position information of the linear motion mechanism 2c acquired from the fitting detection sensor 2e. The fitting detection sensor 2e is, for example, an auto switch, a proximity sensor, or a contact switch.

[0052] Here, the configuration of each tool 2a and each adjusting screw 1h will be further described with reference to FIGS. 6 to 8. FIG. 6 is a partially enlarged cross-sectional view of FIG. 4, showing a vertical cross-sectional view of the adjusting screw 1h and the tool 2a in the first embodiment. FIG. 7 is a vertical cross-sectional view of the adjusting screw 1h taken along line VII-VII in FIG. 6. FIG. 8 is a vertical cross-sectional view of the tool 2a taken along line VIII-VIII in FIG. 6. As shown in FIG. 6, a recess 2n opening toward the adjusting screw 1h is formed at the tip of each tool 2a. A protrusion 1r that fits into the recess 2n is formed at the base end of each adjusting screw 1h. The recess 2n and the protrusion 1r fit together to connect each tool 2a and each adjusting screw 1h to each other. In this embodiment, the tip of the protrusion 1r has a straight shape formed with a constant diameter along the extension direction of the adjusting screw 1h, but it may also have a tapered shape that tapers toward the tool 2a. The opening edge of the recess 2n has a tapered shape that can come into contact with the tip of the protrusion 1r.

[0053] As shown in FIG. 7, the outer peripheral shape of the convex portion 1r when cut along the Y-axis direction is hexagonal in this embodiment. As shown in FIG. 8, the inner peripheral shape of the concave portion 2n when cut along the Y-axis direction is the same hexagon as the shape of the convex portion 1r. The size of the concave portion 2n is larger than the size of the convex portion 1r. The convex portion 1r is disposed in the concave portion 2n with a gap between it and the inner peripheral surface of the concave portion 2n. In this specification, "engaged" means a state in which there is a gap between the tool 2a and the adjusting screw 1h and the tool 2a and the adjusting screw 1h are in partial contact with each other.

[0054] Next, a centering adjustment method using the laser processing apparatus 100 according to the first embodiment will be described with reference to Fig. 9. Fig. 9 is a flowchart showing the steps of the centering adjustment method using the laser processing apparatus 100 according to the first embodiment. As shown in Fig. 9, the centering adjustment method includes a moving step, a calculating step, a fitting step, a rotating step, and a pulling out step.

[0055] The movement process will be described with reference to Figures 1 and 9. As shown in Figure 1, the movement process is a process of moving the machining head 1 to a position where the machining head 1 and the automatic centering device 2 are adjacent (to the position shown by the dashed line) (step S1). Specifically, the control device 4 moves the machining head 1 in the X-axis direction, Y-axis direction, and Z-axis direction, thereby moving the machining head 1 to a position where the machining head 1 and the automatic centering device 2 are adjacent.

[0056] Next, the calculation step will be described with reference to Fig. 1, Fig. 3, and Fig. 9. The calculation step shown in Fig. 9 is a step of calculating (determining) the amount of rotation of each adjusting screw 1h from the amount of misalignment between the optical axis of the laser beam r shown in Fig. 1 and the central axis of the nozzle 1c (step S2). After performing the movement step, the control device 4 acquires the amount of misalignment from the misalignment amount detection device 3 and calculates the amount of rotation of each adjusting screw 1h based on the acquired amount of misalignment. Specifically, the control device 4 calculates the amount of rotation of each adjusting screw 1h using the following mathematical expressions (1) and (2).

[0057] Here, the amount of rotation of one of the adjusting screws 1ha shown in FIG. 3 is expressed as θ R , the amount of rotation of the other adjusting screw 1hb is θ L , the amount of misalignment along the X axis is X, and the amount of misalignment along the Y axis is Y. Furthermore, the ratio of the amount of movement of the optical axis of the laser beam r to the amount of movement of the condenser lens 1d is n, and the pitch of each of the adjustment screws 1ha, 1hb is P. The ratio n of the amount of movement of the optical axis of the laser beam r to the amount of movement of the condenser lens 1d is derived from an optical relationship. The control device 4 calculates the rotation amount θ of one of the adjustment screws 1ha using formula (1). R The control device 4 also calculates the rotation amount θ of the other adjusting screw 1hb using the formula (2). L3, the X and Y coordinates of the measurement coordinate system of the misalignment detection device 3 (the coordinate system for determining the amount of misalignment) are indicated by dashed arrows, and the movement amounts x and y of the lens unit 1b (the coordinate system of the lens unit 1b) are indicated by hollow arrows. The X and Y coordinates of the measurement coordinate system of the misalignment detection device 3 and the movement amounts x and y of the lens unit 1b match the X and Y coordinates shown in FIG. 1. In formulas (1) and (2), the movement amounts x and y of the lens unit 1b are aligned with the measurement coordinate system of the misalignment detection device 3.

[0058]

number

[0059]

number

[0060] Next, the fitting process will be described with reference to Figs. 2, 4, and 10 to 13. Fig. 10 is a flowchart showing the procedure of the fitting process in the first embodiment. Fig. 11 is a vertical cross-sectional view showing a state in which the phases of the adjusting screw 1h and the tool 2a are shifted in the fitting process in the first embodiment. Fig. 12 is a vertical cross-sectional view showing a state in which the phases of the adjusting screw 1h and the tool 2a are being aligned in the fitting process in the first embodiment. Fig. 13 is a vertical cross-sectional view showing a state in which the phases of the adjusting screw 1h and the tool 2a are aligned in the fitting process in the first embodiment.

[0061] The fitting step shown in FIG. 9 is a step of fitting each tool 2a shown in FIG. 2 to each adjusting screw 1h (step S3). After performing the calculation step, the control device 4 drives the linear motion mechanism 2c to fit each tool 2a to each adjusting screw 1h. Specifically, the control device 4 performs the processes of steps S3-1 to S3-4 shown in FIG. 10. First, the control device 4 sets the torque limit of each rotation mechanism 2b to a value less than the value that can rotate each adjusting screw 1h and greater than or equal to the value that can cause each tool 2a to rotate idly (step S3-1). Next, the control device 4 drives each rotation mechanism 2b to rotate each tool 2a (step S3-2). The control device 4 continues to rotate each tool 2a until the process of step S3-4 is completed.

[0062] Next, the control device 4 drives the linear motion mechanism 2c to bring each tool 2a and each adjusting screw 1h closer to each other (step S3-3). Specifically, the control device 4 drives the drive source 2i shown in FIG. 4 to move the stage 2h along the guide rail 2g toward the machining head 1 in the X-axis direction. At this time, as the stage 2h moves, each tool 2a also moves in the X-axis direction toward the machining head 1, and each tool 2a is pressed against each adjusting screw 1h. Next, when the fitting detection sensor 2e detects that each tool 2a has engaged with each adjusting screw 1h, the control device 4 stops driving each rotation mechanism 2b (step S3-4). The control device 4 acquires position information of the stage 2h of the linear motion mechanism 2c from the fitting detection sensor 2e and determines whether each tool 2a has engaged with each adjusting screw 1h based on the position information. By setting the torque limit of each rotation mechanism 2b as in step S3-1, when the phases of each tool 2a and each adjusting screw 1h do not match as shown in Fig. 11 from step S3-3 to step S3-4, each tool 2a can rotate freely relative to each adjusting screw 1h as shown in Fig. 12. As a result, the phases of each tool 2a and each adjusting screw 1h tend to match as shown in Fig. 13.

[0063] Next, the rotation process will be described with reference to Fig. 2, Fig. 9, and Fig. 14 to Fig. 16. Fig. 14 is a flowchart showing the procedure of the rotation process in embodiment 1. Fig. 15 is a vertical cross-sectional view showing a state in which the adjusting screw 1h can rotate freely relative to the tool 2a in the rotation process in embodiment 1. Fig. 16 is a vertical cross-sectional view showing a state in which the adjusting screw 1h cannot rotate freely relative to the tool 2a in the rotation process in embodiment 1.

[0064] The rotation step shown in FIG. 9 is performed by rotating the rotation amount θ R ,θ L 2 based on the torque limit value, thereby rotating each tool 2a and each adjusting screw 1h (step S4). Specifically, after performing the fitting process, the control device 4 performs the processes of steps S4-1 to S4-5 shown in FIG. 14. First, the control device 4 sets the torque limit of each rotation mechanism 2b to a value less than the value at which each adjusting screw 1h can be rotated and greater than the value at which each tool 2a can be idled (step S4-1). Next, the control device 4 drives each rotation mechanism 2b to idledly rotate each tool 2a (step S4-2). The control device 4 drives each rotation mechanism 2b until each tool 2a no longer idles. As shown in FIG. 15, when each tool 2a and each adjusting screw 1h are in contact with each other so that each tool 2a can idle, the torque limit of each rotation mechanism 2b is set as in step S4-1, so that each tool 2a can idledly rotate relative to each adjusting screw 1h. As a result, as shown in FIG. 16, each tool 2a comes into contact with each adjusting screw 1h so that each tool 2a cannot rotate freely.

[0065] Next, the control device 4 stops each rotation mechanism 2b after each tool 2a has stopped idling (step S4-3). That is, the control device 4 sets the rotation direction output of each rotation mechanism 2b to zero (0). For example, if each rotation mechanism 2b is a servo motor, the control device 4 turns the servo of the servo motor off. Next, the control device 4 sets the torque limit of each rotation mechanism 2b to a value equal to or greater than the value at which each adjustment screw 1h can rotate (step S4-4). The control device 4 calculates the rotation amount θ calculated in the calculation step (step S2).R ,θ L The rotation mechanisms 2b are driven based on the rotation amount θ calculated in the calculation step, thereby rotating the tools 2a and the adjusting screws 1h (step S4-5). At this time, the encoder of each rotation mechanism 2b detects the rotation amount of each rotation mechanism 2b, and the control device 4 controls the driving of each rotation mechanism 2b based on the rotation amount of each rotation mechanism 2b sent from the encoder. The control device 4 calculates the rotation amount θ of each rotation mechanism 2b sent from the encoder based on the rotation amount θ calculated in the calculation step. R ,θ L Each rotation mechanism 2b is driven until it reaches

[0066] Next, the drawing step will be described with reference to Fig. 2, Fig. 4, Fig. 9 and Fig. 17. Fig. 17 is a flowchart showing the procedure of the drawing step in the first embodiment. The drawing step shown in Fig. 9 is performed by rotating the rotation amount θ calculated in the calculation step. R ,θ L 2 by the rotation amount θ ... R ,θ L After rotating each adjusting screw 1h by θ, each rotation mechanism 2b is stopped (step S5-1). That is, the control device 4 sets the rotation direction output of each rotation mechanism 2b to zero (0). The control device 4 calculates the rotation amount θ of each rotation mechanism 2b sent from the encoder based on the rotation amount θ calculated in the calculation step. R ,θ L When the rotation speed reaches 100 kJ / s, each rotation mechanism 2b is stopped.

[0067] Next, the control device 4 drives the linear motion mechanism 2c to separate the tools 2a and the adjusting screws 1h from each other and withdraw the tools 2a from the adjusting screws 1h (step S5-2). Specifically, the control device 4 drives the drive source 2i shown in FIG. 4 to move the stage 2h along the guide rail 2g in the X-axis direction away from the adjusting screws 1h. At this time, as the stage 2h moves, the tools 2a also move in the X-axis direction away from the adjusting screws 1h. This withdraws the tools 2a from the adjusting screws 1h. Next, when the engagement detection sensor 2e detects that the tools 2a are not engaged with the adjusting screws 1h, the control device 4 stops driving the linear motion mechanism 2c (step S5-3) and ends the process.

[0068] Next, a description will be given of a method for manufacturing a workpiece using the laser processing apparatus 100 according to the first embodiment. The method for manufacturing a workpiece includes a centering step and a processing step.

[0069] The centering step is a step of automatically performing centering between the optical axis of the laser beam r shown in FIG. 1 and the central axis of the nozzle 1c by the above-mentioned centering adjustment method.

[0070] The processing step is a step in which, after the centering step, the workpiece 9 is processed by irradiating the workpiece 9 with a laser beam r via the condenser lens 1d and the nozzle 1c. By performing the above steps, the workpiece is manufactured.

[0071] Next, the effects of the first embodiment will be described.

[0072] As disclosed in Patent Document 1, if most of the mechanisms required for automatic centering, such as adjustment screws, adjustment knobs, slide bearings, and locking mechanisms, are installed in the processing head, the weight of the processing head increases accordingly, which reduces the movement performance of the processing head and results in a problem of reduced productivity of the workpieces.

[0073] In this embodiment, as shown in FIG. 2, the laser processing apparatus 100 includes a processing head 1 and an automatic centering device 2 for automatically centering the optical axis of the laser beam r with the central axis of the nozzle 1c by moving a condenser lens 1d. The processing head 1 also includes a lens unit 1b having a condenser lens 1d and a lens holder 1e for holding the condenser lens 1d. The processing head 1 also includes a plurality of adjustment screws 1h extending in a direction perpendicular to the Z axis, which is parallel to the optical axis of the laser beam r, and capable of adjusting the position of the optical axis of the laser beam r in the X-axis and Y-axis directions. The automatic centering device 2 also includes tools 2a fitted to the respective adjustment screws 1h and rotating integrally with the respective adjustment screws 1h, and a rotation mechanism 2b for applying a rotational force to the tools 2a. The automatic centering device 2 is provided separately from the processing head 1. With these configurations, some of the mechanisms required for automatic centering, such as the tool 2a and the rotation mechanism 2b, are installed in the automatic centering device 2, which is provided separately from the processing head 1, making it possible to reduce the weight of the processing head 1 compared to conventional methods. This improves the movement performance of the processing head 1, thereby improving the productivity of the workpiece.

[0074] As disclosed in Patent Document 1, if the adjusting knob provided on the machining head is placed in contact with a rotation imparting member provided outside the machining head and the adjusting knob is rotated by moving the machining head, there is a problem that the centering accuracy is affected by the friction conditions between the adjusting knob and the rotation imparting member. Also, with the configuration disclosed in Patent Document 1, there is a problem that the centering accuracy varies due to wear of the adjusting knob and the rotation imparting member, differences in friction conditions due to differences in the machine body, etc.

[0075] 2, the automatic centering device 2 has multiple rotation mechanisms 2b that apply rotational force to each tool 2a, and each rotation mechanism 2b directly rotates each tool 2a, eliminating the need to consider the friction conditions between members or each member. This makes it possible to prevent problems such as the centering accuracy being affected or varying.

[0076] 2, the automatic centering device 2 includes a linear motion mechanism 2c that moves the tools 2a and the rotation mechanisms 2b in a direction perpendicular to the Z axis to approach and move away from the adjusting screws 1h. With this configuration, the tools 2a can be fitted to and removed from the adjusting screws 1h.

[0077] In this embodiment, as shown in FIG. 2 , there are two tools 2a, two rotation mechanisms 2b, and two linear motion mechanisms 2c. The two tools 2a extend in the X-axis direction and are spaced apart from each other in the Y-axis direction. The two rotation mechanisms 2b are spaced apart from each other in the Y-axis direction. The two linear motion mechanisms 2c are spaced apart from each other in the Y-axis direction. Each linear motion mechanism 2c has a guide rail 2g extending in the X-axis direction. Each linear motion mechanism 2c has a stage 2h attached to the guide rail 2g and movable in the X-axis direction along the guide rail 2g. One rotation mechanism 2b is attached to the stage 2h. Each linear motion mechanism 2c has a drive source 2i that applies a moving force to the stage 2h. With this configuration, each linear motion mechanism 2c can linearly move each tool 2a and each rotation mechanism 2b individually.

[0078] In this embodiment, as shown in Fig. 4, the automatic centering device 2 includes a plurality of deformable joints 2d that connect each tool 2a to the output shaft 2f of each rotation mechanism 2b. With this configuration, as shown in Fig. 5, even if there is an axial misalignment I between each tool 2a and each adjusting screw 1h, each joint 2d deforms, causing each tool 2a to tilt toward each adjusting screw 1h. This allows each tool 2a to fit into each adjusting screw 1h, allowing each adjusting screw 1h to rotate.

[0079] 6, in this embodiment, a recess 2n is formed in each tool 2a, and a protrusion 1r that fits into the recess 2n is formed in each adjusting screw 1h. With this configuration, each tool 2a and each adjusting screw 1h are reliably connected, and the rotational force of each rotation mechanism 2b can be transmitted to each adjusting screw 1h via each tool 2a.

[0080] 6 preferably has a tapered tip that narrows toward each tool 2a, and the opening edge of each recess 2n preferably has a tapered shape that can contact the tip of the protrusion 1r. With this configuration, even if there is an axial misalignment I between each tool 2a and each adjusting screw 1h, when each tool 2a is pressed against each adjusting screw 1h by the linear motion mechanism 2c, the protrusion 1r can be easily inserted into the recess 2n along the taper of the protrusion 1r and the taper of the recess 2n.

[0081] In this embodiment, as shown in FIG. 3, the outer peripheral surface of the lens holder 1e has two first inclined surfaces 1m that are inclined so as to approach the second center line C as the distance from the first center line B increases along the Y-axis direction. The two first inclined surfaces 1m are provided at positions symmetrical with respect to the first center line B and are inclined in opposite directions. The tip of each push rod 1i has a third inclined surface 1q that is inclined so as to approach the second center line C as the distance from the first center line B increases along the Y-axis direction and that comes into contact with the first inclined surface 1m. With this configuration, the position of the optical axis of the laser beam r in the X-axis and Y-axis directions can be adjusted by rotating each adjustment screw 1h clockwise or counterclockwise.

[0082] In this embodiment, the amount of rotation of one of the adjusting screws 1ha shown in FIG. R , the amount of rotation of the other adjusting screw 1hb is θ L , the amount of misalignment along the X axis is X, and the amount of misalignment along the Y axis is Y. In this embodiment, the ratio of the amount of movement of the optical axis of the laser beam r to the amount of movement of the condenser lens 1d is n, and the pitch of each of the adjustment screws 1ha and 1hb is P. The amount of rotation θ of one of the adjustment screws 1ha Ris calculated using the above formula (1), and the rotation amount θ of the other adjusting screw 1hb L is calculated using the above-mentioned formula (2). With this configuration, the rotation amount θ of each adjusting screw 1ha, 1hb R ,θ L can be appropriately derived.

[0083] In this embodiment, as shown in FIG. 2, the laser processing apparatus 100 includes an engagement detection sensor 2e that detects whether each tool 2a is engaged with each adjusting screw 1h. The control device 4 sets the torque limit of each rotation mechanism 2b to a value less than the value that allows each adjusting screw 1h to rotate and greater than the value that allows each tool 2a to rotate freely. The control device 4 then drives each rotation mechanism 2b to rotate each tool 2a, and then moves each tool 2a and each adjusting screw 1h closer to each other. When the engagement detection sensor 2e detects that each tool 2a has engaged with each adjusting screw 1h, the control device 4 stops driving each rotation mechanism 2b. With this configuration, when the phases of each tool 2a and each adjusting screw 1h do not match, as shown in FIG. 11, each tool 2a can be rotated freely relative to each adjusting screw 1h, as shown in FIG. 12. This facilitates the phases of each tool 2a and each adjusting screw 1h to match, as shown in FIG. 13.

[0084] As shown in Figure 15, after each tool 2a is fitted to each adjusting screw 1h, there may be cases where each tool 2a is in contact with each adjusting screw 1h and is able to rotate freely. In such a case, when each tool 2a and each adjusting screw 1h start to rotate, the amount of rotation that can be rotated freely is calculated. R ,θ L In other words, the calculated rotation amount θ R ,θ LEach adjusting screw 1h can only be rotated by an amount obtained by subtracting the amount of free rotation from the calculated rotation amount θ . This may result in poor centering accuracy. In this regard, in this embodiment, after each tool 2a is engaged with each adjusting screw 1h, the control device 4 shown in FIG. 1 sets the torque limit of each rotation mechanism 2b to a value less than the value at which each adjusting screw 1h can be rotated and greater than the value at which each tool 2a can be free-rotated. Furthermore, the control device 4 drives each rotation mechanism 2b to cause each tool 2a to free-rotate. With this configuration, after each tool 2a has free-rotated relative to each adjusting screw 1h, as shown in FIG. 16, each tool 2a and each adjusting screw 1h come into contact with each other so that each tool 2a cannot free-rotate. Thereafter, when each tool 2a and each adjusting screw 1h start to rotate, the calculated rotation amount θ R ,θ L This allows each adjusting screw 1h to be rotated accurately by the amount specified, thereby improving centering accuracy.

[0085] In this embodiment, the control device 4 shown in FIG. 2 calculates the calculated rotation amount θ R ,θ L After rotating each tool 2a by the calculated rotation amount θ, each rotation mechanism 2b is stopped, and then each tool 2a is pulled out from each adjustment screw 1h. With this configuration, when each tool 2a is pulled out from each adjustment screw 1h, it is possible to prevent each tool 2a from getting caught on each adjustment screw 1h, and R ,θ L This can prevent each adjusting screw 1h from rotating.

[0086] Next, a modification of the first embodiment will be described.

[0087] In this embodiment, the extension direction of the processing head 1 (the optical axis of the laser beam r and the central axis of the nozzle 1c) is parallel to the vertical direction as shown in Fig. 2, but it may be inclined relative to the vertical direction. In this configuration, the orientations of the automatic centering device 2 and the misalignment amount detection device 3 are also changed appropriately according to the inclination of the processing head 1.

[0088] 4, the linear motion mechanism 2c includes a guide rail 2g, a stage 2h, and a driving source 2i that is an air cylinder, but is not limited to this. The linear motion mechanism 2c may include, for example, a motor and a ball screw.

[0089] In this embodiment, as shown in Fig. 2, the automatic centering device 2 is disposed adjacent to the processing head 1 in the X-axis direction, but it may be disposed in a direction perpendicular to the extension direction of the processing head 1. The automatic centering device 2 may be disposed adjacent to the processing head 1 in the Y-axis direction, for example. In this configuration, the position of the column 7 shown in Fig. 1 is changed, and the automatic centering device 2 is disposed away from the processing head 1 in the Y-axis direction.

[0090] In this embodiment, as shown in Fig. 3, the processing head 1 is provided with the push rod 1i, but it is not necessary to provide the push rod 1i. In this configuration, the adjustment screw 1h constitutes the adjustment member. In addition, the tip of each adjustment screw 1h comes into direct contact with the first inclined surface 1m of the lens holder 1e.

[0091] In this embodiment, the outer peripheral shape of the lens holder 1e is polygonal as shown in Fig. 3, but this may be changed as appropriate. For example, the outer peripheral shape of the lens holder 1e may be circular.

[0092] In this embodiment, as shown in Fig. 3, the number of head-side biasing members 1j is two, but this may be changed as appropriate. Furthermore, the angle at which the head-side biasing members 1j bias the lens unit 1b is not limited to the example shown in the figure and may be changed as appropriate. Furthermore, the head-side biasing members 1j may be configured to include an elastic body (such as rubber) other than a spring.

[0093] In this embodiment, as shown in FIG. 6, the opening edge of the recess 2n has a tapered shape, but it may have a straight shape formed with a constant diameter along the extension direction of the tool 2a instead of a tapered shape.

[0094] Embodiment 2 Next, a laser processing apparatus 100A according to a second embodiment will be described with reference to Fig. 18. Fig. 18 is a perspective view showing the processing head 1, automatic centering device 2, misalignment amount detection device 3, and control device 4 of the laser processing apparatus 100A according to the second embodiment. This embodiment differs from the first embodiment in that the processing head 1 is moved in the fitting process to fit each tool 2a into each adjustment screw 1h. In the second embodiment, parts that overlap with those in the first embodiment will be given the same reference numerals and will not be described again.

[0095] As shown in Figure 18, the machining head 1 is configured to be movable in a direction perpendicular to the Z axis (in this embodiment, the X-axis direction). The machining head 1 is movable in the X-axis direction in conjunction with movement of the column 7 (see Figure 1) in the X-axis direction. The machining head 1 moves toward and away from the automatic centering device 2 in the X-axis direction.

[0096] Next, the effects of the second embodiment will be described.

[0097] In this embodiment, the tools 2a can be fitted to the adjusting screws 1h by moving the machining head 1 in the fitting process. Therefore, compared to the first embodiment described above, the two linear motion mechanisms 2c (see FIG. 2) of the automatic centering device 2 can be omitted, which simplifies the structure of the automatic centering device 2 and reduces component costs. In this embodiment, the control device 4 acquires position information of the machining head 1 from a fitting detection sensor (not shown), and determines whether the tools 2a have been fitted to the adjusting screws 1h based on the position information.

[0098] Embodiment 3 Next, a laser processing apparatus 100B according to a third embodiment will be described with reference to Fig. 19. Fig. 19 is a plan view showing the automatic centering device 2 of the laser processing apparatus 100B according to the third embodiment. In this embodiment, the configuration of the linear motion mechanism 2c differs from that of the first and second embodiments. In the third embodiment, parts that overlap with those of the first and second embodiments will be given the same reference numerals and will not be described.

[0099] As shown in FIG. 19, the linear motion mechanism 2c has two guide rails 2g, two stages 2h, and two driving sources 2i. Each guide rail 2g extends in the X-axis direction. The two guide rails 2g are spaced apart from each other in the Y-axis direction. The two stages 2h are arranged side by side in the X-axis direction. Each stage 2h is attached to both of the two guide rails 2g and is movable in the X-axis direction along both of the guide rails 2g. One rotation mechanism 2b is attached to each stage 2h. The driving sources 2i apply a moving force to the stage 2h. One driving source 2i is attached to each stage 2h. Each stage 2h is connected to a different driving source 2i. The driving sources 2i are, for example, actuators.

[0100] Next, the effects of the third embodiment will be described.

[0101] In this embodiment, each stage 2h moves while being supported by two guide rails 2g, which stabilizes the movement of each stage 2h, thereby stabilizing the movement of each rotation mechanism 2b and each tool 2a attached to each stage 2h.

[0102] Embodiment 4 Next, a laser processing apparatus 100C according to a fourth embodiment will be described with reference to Fig. 20. Fig. 20 is a plan view showing the automatic centering device 2 of the laser processing apparatus 100C according to the fourth embodiment. In this embodiment, the configuration of the linear motion mechanism 2c differs from that of the first to third embodiments described above. In the fourth embodiment, parts that overlap with those of the first to third embodiments described above will be assigned the same reference numerals and descriptions thereof will be omitted.

[0103] As shown in FIG. 20, the linear motion mechanism 2c has two first guide rails 2o, one large stage 2p, and one driving source 2i. Each first guide rail 2o extends in the X-axis direction. The two first guide rails 2o are spaced apart in the Y-axis direction. The large stage 2p is attached to both of the two first guide rails 2o and is movable in the X-axis direction along both of the first guide rails 2o. The driving source 2i applies a moving force to the large stage 2p. The driving source 2i is, for example, an actuator.

[0104] The automatic centering device 2 further includes two second guide rails 2q, two small stages 2r, and two device-side biasing members 2s. Each second guide rail 2q is provided on the large stage 2p and extends in the X-axis direction. The two second guide rails 2q are spaced apart in the Y-axis direction. A small stage 2r is attached to each second guide rail 2q and is movable in the X-axis direction along each second guide rail 2q. A rotation mechanism 2b is attached to each small stage 2r. A device-side biasing member 2s is attached to each small stage 2r and biases each small stage 2r in the X-axis direction toward a direction away from the machining head 1. The device-side biasing member 2s is, for example, an elastic body such as a spring.

[0105] By moving the large stage 2p in the X-axis direction, each second guide rail 2q, each small stage 2r, each device-side biasing member 2s, each rotation mechanism 2b, and each tool 2a move integrally in the X-axis direction. Also, by moving one small stage 2r in the negative direction in the X-axis direction due to the biasing force of one device-side biasing member 2s, one rotation mechanism 2b and tool 2a move integrally in the negative direction in the X-axis direction. Also, by moving the other small stage 2r in the negative direction in the X-axis direction due to the biasing force of the other device-side biasing member 2s, the other rotation mechanism 2b and tool 2a move integrally in the negative direction in the X-axis direction.

[0106] Next, the effects of the fourth embodiment will be described.

[0107] In this embodiment, each of the two rotation mechanisms 2b is disposed on the large stage 2p of the linear motion mechanism 2c via a small stage 2r and a second guide rail 2q, allowing the single linear motion mechanism 2c to move the rotation mechanisms 2b and the tools 2a together. Furthermore, in this embodiment, the biasing forces of the different device-side biasing members 2s can be used to individually move each small stage 2r away from the machining head 1. This allows the relative positions in the X-axis direction of the rotation mechanism 2b and tool 2a attached to one small stage 2r and the rotation mechanism 2b and tool 2a attached to the other small stage 2r to be changed. This allows the tools 2a to be reliably fitted to the adjustment screws 1h even if there is variation in the positions of the two adjustment screws 1h in the X-axis direction.

[0108] Embodiment 5. Next, a laser processing apparatus 100D according to a fifth embodiment will be described with reference to Fig. 21. Fig. 21 is a plan view showing the automatic centering device 2 of the laser processing apparatus 100D according to the fifth embodiment. This embodiment differs from the first to fourth embodiments in the configurations of the linear motion mechanism 2c, the tool 2a, and the rotation mechanism 2b, and in that a transmission member 2t is provided. In the fifth embodiment, parts that overlap with those in the first to fourth embodiments will be given the same reference numerals, and descriptions thereof will be omitted.

[0109] As shown in FIG. 21, the linear motion mechanism 2c has two guide rails 2g, one stage 2h, and one drive source 2i. Each guide rail 2g extends in the X-axis direction. The two guide rails 2g are spaced apart from each other in the Y-axis direction. The stage 2h is attached to both of the two guide rails 2g and is movable in the X-axis direction along both of the guide rails 2g. The drive source 2i applies a moving force to the stage 2h. The drive source 2i is, for example, an actuator.

[0110] In this embodiment, the number of tools 2a is two. The number of rotation mechanisms 2b is one. The rotation mechanism 2b is arranged at an interval from each tool 2a in the Y-axis direction. A first meshing member 2u is attached to the base end of each tool 2a. The base end of each tool 2a is the end of each tool 2a facing away from the machining head 1. A second meshing member 2v is attached to the output shaft 2f of the rotation mechanism 2b. The first meshing member 2u and second meshing member 2v of each tool 2a are arranged on a straight line along the Y-axis direction. The first meshing member 2u and second meshing member 2v of each tool 2a are arranged at an interval from each other in the Y-axis direction.

[0111] The automatic centering device 2 further includes two transmission members 2t. The two transmission members 2t are members capable of transmitting the rotational force of the rotation mechanism 2b to each of the two tools 2a. Each transmission member 2t has a drive source 2x having an extendable rod 2w and a third interlocking member 2y attached to the tip of the rod 2w. The drive source 2x is, for example, an actuator. The position of the third interlocking member 2y is changed by the extension and contraction of the rod 2w. Hereinafter, when it is necessary to distinguish between the two transmission members 2t, they will be referred to as a transmission member 2ta and a transmission member 2tb.

[0112] The position of the third meshing member 2y of one transmission member 2ta can be changed between a transmitting position and a non-transmitting position. The transmitting position is a position where the third meshing member 2y of one transmission member 2ta contacts the second meshing member 2v of the rotation mechanism 2b and the first meshing member 2u of one tool 2aa to transmit the rotational force to one tool 2aa. The non-transmitting position is a position where the third meshing member 2y of one transmission member 2ta is separated from the second meshing member 2v of the rotation mechanism 2b and the first meshing member 2u of one tool 2aa to not transmit the rotational force to one tool 2aa.

[0113] The position of the third meshing member 2y of the other transmission member 2tb can be changed between a transmitting position and a non-transmitting position. In the transmitting position, the third meshing member 2y of the other transmission member 2tb contacts the second meshing member 2v of the rotation mechanism 2b and the first meshing member 2u of the other tool 2ab to transmit the rotational force to the other tool 2ab. In the non-transmitting position, the third meshing member 2y of the other transmission member 2tb is separated from the second meshing member 2v of the rotation mechanism 2b and the first meshing member 2u of the other tool 2ab to not transmit the rotational force to the other tool 2ab. The first meshing member 2u, the second meshing member 2v, and the third meshing member 2y are, for example, gears or rubber.

[0114] Next, the effects of the fifth embodiment will be described.

[0115] In this embodiment, the position of the third meshing member 2y of each transmission member 2t can be individually changed between a transmission position and a non-transmission position. Therefore, a rotation mode in which both tools 2aa and 2ab are rotated simultaneously, a rotation mode in which only one tool 2aa is rotated, or a rotation mode in which only the other tool 2ab is rotated can be selected. This allows the two tools 2aa and 2ab to share one rotation mechanism 2b, thereby reducing the number of rotation mechanisms 2b.

[0116] Embodiment 6 Next, a laser processing apparatus 100E according to a sixth embodiment will be described with reference to Fig. 22. Fig. 22 is a plan view showing the automatic centering device 2 of the laser processing apparatus 100E according to the sixth embodiment. In this embodiment, the configurations of the linear motion mechanism 2c, the tool 2a, and the rotation mechanism 2b differ from those of the first to fifth embodiments. In the sixth embodiment, the same reference numerals are used for parts that overlap with those of the first to fifth embodiments, and descriptions thereof will be omitted.

[0117] As shown in FIG. 22, the number of each of the tool 2a and the rotation mechanism 2b is one in this embodiment. The linear motion mechanism 2c has two first guide rails 2o, one large stage 2p, two second guide rails 2q, one small stage 2r, and two drive sources 2i. Each first guide rail 2o extends in the Y-axis direction. The two first guide rails 2o are spaced apart from each other in the X-axis direction. The large stage 2p is attached to both of the two first guide rails 2o and is movable in the Y-axis direction along both of the first guide rails 2o. Each second guide rail 2q is provided on the large stage 2p and extends in the X-axis direction. The two second guide rails 2q are spaced apart from each other in the Y-axis direction. The extension direction of the first guide rails 2o and the extension direction of the second guide rails 2q are perpendicular to each other.

[0118] The small stage 2r is attached to both of the two second guide rails 2q and is movable in the X-axis direction along both of the second guide rails 2q. One rotation mechanism 2b is attached to the small stage 2r. One drive source 2i applies a moving force to the large stage 2p. The other drive source 2i applies a moving force to the small stage 2r. The drive source 2i is, for example, an actuator.

[0119] Next, the effects of the sixth embodiment will be described.

[0120] In this embodiment, the rotation mechanism 2b and tool 2a can be moved in the Y-axis direction by moving the large stage 2p along the first guide rail 2o extending in the Y-axis direction. Furthermore, the rotation mechanism 2b and tool 2a can be moved in the X-axis direction by moving the small stage 2r along the second guide rail 2q extending in the X-axis direction. Therefore, one tool 2a can be fitted to each adjustment screw 1h. In other words, one tool 2a can be fitted to two adjustment screws 1h positioned apart in the Y-axis direction in order, and each adjustment screw 1h can be rotated individually.

[0121] Embodiment 7 Next, a laser processing apparatus 100F according to a seventh embodiment will be described with reference to Fig. 23. Fig. 23 is a plan view showing the automatic centering device 2 of the laser processing apparatus 100F according to the seventh embodiment. In this embodiment, the configuration of the linear motion mechanism 2c differs from that of the first to sixth embodiments described above. In the seventh embodiment, parts that overlap with those of the first to sixth embodiments described above will be given the same reference numerals and descriptions thereof will be omitted.

[0122] As shown in FIG. 23, the linear motion mechanism 2c has two first guide rails 2o, one large stage 2p, and one driving source 2i. Each first guide rail 2o extends in the X-axis direction. The two first guide rails 2o are spaced apart in the Y-axis direction. The large stage 2p is attached to both of the two first guide rails 2o and is movable in the X-axis direction along both of the first guide rails 2o. One rotation mechanism 2b is attached to the large stage 2p. The driving source 2i applies a moving force to the large stage 2p. The driving source 2i is, for example, an actuator.

[0123] The automatic centering device 2 further includes one second guide rail 2q, one small stage 2r, and one device-side biasing member 2s. The second guide rail 2q is provided on the large stage 2p and extends in the X-axis direction. The small stage 2r is attached to the second guide rail 2q and is movable in the X-axis direction along the second guide rail 2q. One rotation mechanism 2b is attached to the small stage 2r. The device-side biasing member 2s is attached to the small stage 2r and biases the small stage 2r in the X-axis direction toward moving it away from the machining head 1.

[0124] By moving the large stage 2p in the X-axis direction, the second guide rail 2q, small stage 2r, device-side biasing member 2s, each rotation mechanism 2b, and each tool 2a move together in the X-axis direction. Also, by moving the small stage 2r in the negative direction in the X-axis direction due to the biasing force of the device-side biasing member 2s, one rotation mechanism 2b and one tool 2a move together in the negative direction in the X-axis direction.

[0125] Next, the effects of the seventh embodiment will be described.

[0126] In this embodiment, one rotation mechanism 2b is disposed on the large stage 2p of the linear motion mechanism 2c via the small stage 2r and the second guide rail 2q, and the other rotation mechanism 2b is disposed directly on the large stage 2p. Therefore, the tools 2a and the rotation mechanisms 2b can be moved together using a single linear motion mechanism 2c. Furthermore, in this embodiment, the biasing force of the device-side biasing member 2s can be used to move the small stage 2r away from the machining head 1. Therefore, the positions of the rotation mechanism 2b and tool 2a attached to the small stage 2r and the other rotation mechanism 2b and tool 2a attached only to the large stage 2p can be changed in the X-axis direction. This allows each tool 2a to be reliably fitted to each adjustment screw 1h, even if there is variation in the positions of the two adjustment screws 1h in the X-axis direction.

[0127] Embodiment 8 Next, a laser processing apparatus 100G according to an eighth embodiment will be described with reference to Fig. 24. Fig. 24 is a plan view showing the processing head 1 and the automatic centering device 2 of the laser processing apparatus 100G according to the eighth embodiment. This embodiment differs from the first to seventh embodiments in the configuration of the linear motion mechanism 2c and in that the processing head 1 is also moved in the fitting process to fit the tool 2a into each adjustment screw 1h. In the eighth embodiment, parts that overlap with the first to seventh embodiments will be assigned the same reference numerals and will not be described.

[0128] As shown in FIG. 24, the number of each of the tool 2a and the rotation mechanism 2b is one in this embodiment. The linear motion mechanism 2c has two guide rails 2g, one stage 2h, and one drive source 2i. Each guide rail 2g extends in the X-axis direction. The two guide rails 2g are arranged at an interval in the Y-axis direction. The stage 2h is attached to both of the two guide rails 2g and is movable in the X-axis direction along both of the guide rails 2g. One rotation mechanism 2b is attached to the stage 2h. The drive source 2i applies a moving force to the stage 2h. The drive source 2i is, for example, an actuator.

[0129] The machining head 1 is configured to be movable in a direction perpendicular to the Z axis (in the Y axis direction in this embodiment). The machining head 1 moves in the Y axis direction to a position where each adjustment screw 1h and the tool 2a are aligned.

[0130] Next, the effects of the eighth embodiment will be described.

[0131] In this embodiment, by moving the machining head 1 in the Y-axis direction during the fitting process, the positions of each adjustment screw 1h and the tool 2a in the Y-axis direction can be aligned. Therefore, compared to the first embodiment described above, the number of tools 2a, rotation mechanisms 2b, stages 2h, and drive sources 2i can be reduced. This simplifies the structure of the automatic centering device 2 and reduces component costs.

[0132] Embodiment 9 Next, a laser processing apparatus 100H according to a ninth embodiment will be described with reference to FIG. 25. FIG. 25 is a plan view showing the processing head 1 and the automatic centering device 2 of the laser processing apparatus 100H according to the ninth embodiment. This embodiment differs from the first to eighth embodiments in the configuration of the processing head 1, the configuration of the automatic centering device 2, and the fact that the processing head 1 is moved in the fitting process to fit the tool 2a into each adjustment screw 1h. In the ninth embodiment, parts that overlap with the first to eighth embodiments will be assigned the same reference numerals and will not be described.

[0133] 25, there is one tool 2a and one rotation mechanism 2b. The rotation mechanism 2b and the tool 2a are placed on the upper surface of the base 5 via an immovable stage 2h. The automatic centering device 2 does not include a linear motion mechanism 2c.

[0134] The machining head 1 is configured to be movable in two directions perpendicular to the Z axis (in the X-axis direction and the Y-axis direction in this embodiment). The machining head 1 moves in the Y-axis direction to a position where each adjustment screw 1h and the tool 2a coincide. Also, the machining head 1 moves in the X-axis direction to a position where each adjustment screw 1h and the tool 2a coincide. In other words, by moving the machining head 1 in the X-axis direction, each adjustment screw 1h and the tool 2a can be brought closer to each other, allowing the tool 2a to be fitted into each adjustment screw 1h. Also, by moving the machining head 1 in the X-axis direction, each adjustment screw 1h and the tool 2a can be separated from each other, allowing the tool 2a to be pulled out from each adjustment screw 1h.

[0135] Next, the effects of the ninth embodiment will be described.

[0136] In this embodiment, by moving the machining head 1 in the Y-axis direction, the positions of each adjustment screw 1h and the tool 2a in the Y-axis direction can be aligned. Furthermore, in this embodiment, by moving the machining head 1 in the X-axis direction, the tool 2a can be fitted to each adjustment screw 1h and can be removed from each adjustment screw 1h. Therefore, compared to the first embodiment, the number of tools 2a and rotation mechanisms 2b can be reduced, and the linear motion mechanism 2c can be omitted. This simplifies the structure of the automatic centering device 2 and reduces component costs.

[0137] Embodiment 10 Next, a laser processing apparatus 100I according to a tenth embodiment will be described with reference to Fig. 26. Fig. 26 is a horizontal cross-sectional view showing the processing head 1 of the laser processing apparatus 100I according to the tenth embodiment. In this embodiment, the arrangement of the adjustment screw 1h differs from that in the first to ninth embodiments. In the tenth embodiment, parts that overlap with those in the first to ninth embodiments are given the same reference numerals and descriptions thereof will be omitted.

[0138] As shown in FIG. 26, the adjusting screw 1ha contacts one of the first inclined surfaces 1m in a direction perpendicular to the first inclined surface 1m. The adjusting screw 1ha is inclined with respect to the X-axis and Y-axis directions so that the normal direction of one of the first inclined surfaces 1m and the extension direction of the adjusting screw 1ha coincide. The adjusting screw 1hb contacts the other first inclined surface 1m in a direction perpendicular to the other first inclined surface 1m. The adjusting screw 1hb is inclined with respect to the X-axis and Y-axis directions so that the normal direction of the other first inclined surface 1m and the extension direction of the adjusting screw 1hb coincide. The two adjusting screws 1ha, 1hb are inclined so as to approach each other as they approach the lens holder 1e along the X-axis direction. The extension directions of the two adjusting screws 1ha, 1hb are oblique to each other.

[0139] The head-side biasing member 1ja biases the lens holder 1e in a direction perpendicular to one of the second inclined surfaces 1n. The head-side biasing member 1ja is inclined with respect to the X-axis and Y-axis directions so that the normal direction of one of the second inclined surfaces 1n and the biasing direction of the head-side biasing member 1ja coincide. The head-side biasing member 1ja is positioned opposite the adjusting screw 1ha across the optical axis A of the laser beam r. The extension direction of the adjusting screw 1ha coincides with the biasing direction of the head-side biasing member 1ja. The adjusting screw 1ha and the head-side biasing member 1ja are positioned so that the pressing direction of the adjusting screw 1ha and the biasing direction of the head-side biasing member 1ja are opposite to each other.

[0140] The head-side biasing member 1jb biases the lens holder 1e in a direction perpendicular to the other second inclined surface 1n. The head-side biasing member 1jb is inclined with respect to the X-axis and Y-axis directions so that the normal direction of the other second inclined surface 1n and the biasing direction of the head-side biasing member 1jb coincide. The two head-side biasing members 1ja and 1jb are inclined so that they approach each other along the X-axis direction toward the lens holder 1e. The head-side biasing member 1jb is positioned opposite the adjustment screw 1hb across the optical axis A of the laser beam r. The extension direction of the adjustment screw 1hb coincides with the biasing direction of the head-side biasing member 1jb. The adjustment screw 1hb and the head-side biasing member 1jb are positioned so that the pressing direction of the adjustment screw 1hb and the biasing direction of the head-side biasing member 1jb are opposite to each other. The biasing directions of the two head-side biasing members 1ja and 1jb intersect obliquely with each other.

[0141] Next, the effects of the tenth embodiment will be described.

[0142] In this embodiment, the lens holder 1e can be pressed linearly by the adjustment screws 1ha and 1hb in directions inclined relative to the X-axis direction and the Y-axis direction (arrow G direction, arrow H direction).

[0143] Embodiment 11 Next, a laser processing apparatus 100J according to an eleventh embodiment will be described with reference to Fig. 27. Fig. 27 is a horizontal cross-sectional view showing the processing head 1 of the laser processing apparatus 100J according to the eleventh embodiment. In this embodiment, the configuration of the lens holder 1e, the arrangement of the adjustment screw 1h, and the arrangement of the head-side biasing member 1j differ from those of the first to tenth embodiments described above. In the eleventh embodiment, parts that overlap with those of the first to tenth embodiments described above are denoted by the same reference numerals, and description thereof will be omitted.

[0144] As shown in FIG. 27, each first surface 1o of the lens holder 1e is a flat surface along the Y-axis direction. The two first surfaces 1o are parallel to each other. Each second surface 1p is a flat surface along the X-axis direction. The two second surfaces 1p are parallel to each other. The adjustment screw 1ha contacts one of the second surfaces 1p in a direction perpendicular to the second surface 1p. The adjustment screw 1ha extends along the Y-axis direction so that the normal direction of one of the second surfaces 1p coincides with the extension direction of the adjustment screw 1ha. The adjustment screw 1hb contacts one of the first surfaces 1o in a direction perpendicular to the first surface 1o. The adjustment screw 1hb extends along the X-axis direction so that the normal direction of one of the first surfaces 1o coincides with the extension direction of the adjustment screw 1hb. The extension directions of the two adjustment screws 1ha and 1hb are perpendicular to each other.

[0145] The head-side biasing member 1ja biases the lens holder 1e in a direction perpendicular to the other second surface 1p. The head-side biasing member 1ja extends along the Y-axis direction so that the normal direction of the other second surface 1p and the biasing direction of the head-side biasing member 1ja coincide with each other. The head-side biasing member 1ja is disposed in a position facing the adjustment screw 1ha in the Y-axis direction across the optical axis A of the laser beam r. The adjustment screw 1ha and the head-side biasing member 1ja are disposed so that the pressing direction of the adjustment screw 1ha and the biasing direction of the head-side biasing member 1ja are opposite to each other.

[0146] The head-side biasing member 1jb biases the lens holder 1e in a direction perpendicular to the other first surface 1o. The head-side biasing member 1jb extends along the X-axis direction so that the normal direction of the other first surface 1o and the biasing direction of the head-side biasing member 1jb coincide. The head-side biasing member 1jb is positioned opposite the adjustment screw 1hb in the X-axis direction, with the optical axis A of the laser beam r in between. The adjustment screw 1hb and the head-side biasing member 1jb are positioned so that the pressing direction of the adjustment screw 1hb and the biasing direction of the head-side biasing member 1jb are opposite to each other. The biasing directions of the two head-side biasing members 1ja and 1jb are perpendicular to each other.

[0147] In this embodiment, the position of the optical axis A of the laser beam r in the Y-axis direction can be adjusted by rotating the adjustment screw 1ha clockwise or counterclockwise. Also, the position of the optical axis A of the laser beam r in the X-axis direction can be adjusted by rotating the adjustment screw 1hb clockwise or counterclockwise.

[0148] Next, the effects of the eleventh embodiment will be described.

[0149] In this embodiment, the lens unit 1b can be pressed linearly along the X-axis direction and the Y-axis direction by the adjustment screws 1ha and 1hb.

[0150] Embodiment 12 Next, a laser processing apparatus 100K according to a twelfth embodiment will be described with reference to FIGS. 28 to 30. FIG. 28 is a diagram showing an adjusting screw 1h and a tool 2a of the laser processing apparatus 100K according to the twelfth embodiment. FIG. 29 is a cross-sectional view of the adjusting screw 1h taken along line XXIX-XXIX shown in FIG. 28. FIG. 30 is a cross-sectional view of the tool 2a taken along line XXX-XXX shown in FIG. 28. This embodiment differs from the first to eleventh embodiments in that a recess 1s is formed in the adjusting screw 1h and a protrusion 2z is formed in the tool 2a. In the twelfth embodiment, parts that overlap with those in the first to eleventh embodiments are designated by the same reference numerals and will not be described again.

[0151] As shown in FIG. 28, a recess 1s that opens toward the tool 2a is formed at the base end of each adjusting screw 1h. A protrusion 2z that fits into the recess 1s is formed at the tip of each tool 2a. The recess 1s and the protrusion 2z fit together, connecting each tool 2a and each adjusting screw 1h to each other. In this embodiment, the tip of the protrusion 2z has a tapered shape that tapers toward the adjusting screw 1h, but it may also have a straight shape formed with a constant diameter along the extension direction of the tool 2a. In this embodiment, the opening edge of the recess 1s has a tapered shape that can come into contact with the tip of the protrusion 2z, but it may also have a straight shape formed with a constant diameter along the extension direction of the adjusting screw 1h.

[0152] As shown in FIG. 30, the outer peripheral shape of the convex portion 2z when cut along the Y-axis direction is hexagonal in this embodiment. As shown in FIG. 29, the inner peripheral shape of the concave portion 1s when cut along the Y-axis direction is the same hexagon as the shape of the convex portion 2z. In the illustrated example, the size of the concave portion 1s is the same as the size of the convex portion 2z, but in reality, the size of the concave portion 1s is larger than the size of the convex portion 2z. The convex portion 2z is disposed within the concave portion 1s with a gap between it and the inner peripheral surface of the concave portion 1s.

[0153] Next, the effects of the twelfth embodiment will be described.

[0154] This embodiment can achieve the same effects as those of the above-described embodiment 1. Note that it is sufficient that recesses 2n, 1s (see FIGS. 6 and 28) are formed in either one of the adjusting screws 1h or the tools 2a, and convex portions 1r, 2z (see FIGS. 6 and 28) that fit into the recesses 2n, 1s are formed in the other of the adjusting screws 1h or the tools 2a.

[0155] Embodiment 13 Next, a laser processing apparatus according to a thirteenth embodiment will be described with reference to Figs. 31 to 33. Fig. 31 is a vertical cross-sectional view showing an adjustment screw 1h in the thirteenth embodiment. Fig. 32 is a vertical cross-sectional view showing a tool 2a in the thirteenth embodiment. Fig. 33 is a vertical cross-sectional view showing another example of the tool 2a in the thirteenth embodiment. This embodiment differs from the first to twelfth embodiments described above in that the shapes of the recessed portion 2n and the protruding portion 1r have been changed. In the thirteenth embodiment, parts that overlap with those in the first to twelfth embodiments described above are given the same reference numerals and will not be described again.

[0156] The outer peripheral shape of the convex portion 1r and the inner peripheral shape of the concave portion 2n are not limited to the hexagonal shape of the first embodiment described above and may be modified as appropriate. For example, the outer peripheral shape of the convex portion 1r may be a pentagon as shown in FIG. 31. The inner peripheral shape of the concave portion 2n may be a pentagon, the same as the shape of the convex portion 1r, as shown in FIG. 32, or may be a pentagon in which the corners of the concave portion 2n are rounded off to provide clearance between the corners of the convex portion 1r and the concave portion 2n, as shown in FIG. 33. If the inner peripheral shape of the concave portion 2n is rounded off to provide clearance between the corners of the convex portion 1r, it is possible to prevent the corners of the convex portion 1r from getting caught on the inner peripheral surface of the concave portion 2n.

[0157] FIG. 34 is a vertical cross-sectional view showing an adjusting screw 1h in Modification 1 of Embodiment 13. FIG. 35 is a vertical cross-sectional view showing a tool 2a in Modification 1 of Embodiment 13. FIG. 36 is a vertical cross-sectional view showing another example of a tool 2a in Modification 1 of Embodiment 13. The outer peripheral shape of the convex portion 1r may be rectangular, as shown in FIG. 34. The inner peripheral shape of the concave portion 2n may be the same rectangular shape as the convex portion 1r, as shown in FIG. 35, or may be rectangular in which the corners of the concave portion 2n are rounded off to provide play between the corners of the convex portion 1r and the concave portion 2n, as shown in FIG. 36.

[0158] FIG. 37 is a vertical cross-sectional view showing an adjusting screw 1h in Modification 2 of Embodiment 13. FIG. 38 is a vertical cross-sectional view showing a tool 2a in Modification 2 of Embodiment 13. FIG. 39 is a vertical cross-sectional view showing another example of a tool 2a in Modification 2 of Embodiment 13. The outer peripheral shape of the convex portion 1r may be triangular, as shown in FIG. 37. The inner peripheral shape of the concave portion 2n may be triangular, the same as the shape of the convex portion 1r, as shown in FIG. 38, or may be triangular, with the corners of the concave portion 2n rounded off to provide play between the corners of the convex portion 1r and the concave portion 2n, as shown in FIG. 39.

[0159] Fig. 40 is a vertical cross-sectional view showing an adjusting screw 1h in Modification 3 of Embodiment 13. Fig. 41 is a vertical cross-sectional view showing a tool 2a in Modification 3 of Embodiment 13. The outer peripheral shape of the convex portion 1r may be a + (plus) shape, as shown in Fig. 40. The inner peripheral shape of the concave portion 2n may be a + shape, the same as the shape of the convex portion 1r, as shown in Fig. 41.

[0160] Fig. 42 is a vertical cross-sectional view showing an adjusting screw 1h in Modification 4 of Embodiment 13. Fig. 43 is a vertical cross-sectional view showing a tool 2a in Modification 4 of Embodiment 13. The outer peripheral shape of the convex portion 1r may be a minus (-) shape, as shown in Fig. 42. The inner peripheral shape of the concave portion 2n may be a minus (-) shape, the same as the shape of the convex portion 1r, as shown in Fig. 43.

[0161] Fig. 44 is a vertical cross-sectional view showing an adjusting screw 1h in Modification 5 of Embodiment 13. Fig. 45 is a vertical cross-sectional view showing a tool 2a in Modification 5 of Embodiment 13. The outer peripheral shape of convex portion 1r may be hexalobular, as shown in Fig. 44. The inner peripheral shape of concave portion 2n may be the same hexalobular shape as the shape of convex portion 1r, as shown in Fig. 45.

[0162] Next, the effects of the thirteenth embodiment will be described.

[0163] This embodiment can achieve the same effects as those of the above-described embodiment 1. Furthermore, as in this embodiment, by forming the inner peripheral shape of the recess 2n such that the corners of the recess 2n are rounded off to provide clearance between the recess 2n and the corners of the protrusion 1r, it is possible to prevent the corners of the protrusion 1r from getting caught on the inner peripheral surface of the recess 2n.

[0164] Embodiment 14 Next, a laser processing apparatus according to a fourteenth embodiment will be described with reference to Fig. 46. Fig. 46 is a vertical cross-sectional view showing a tool 2a in the fourteenth embodiment. This embodiment differs from the first to thirteenth embodiments in that the tool 2a is a universal socket. In the fourteenth embodiment, parts that overlap with those in the first to thirteenth embodiments will be given the same reference numerals and will not be described again.

[0165] As shown in FIG. 46, each tool 2a has a cylindrical tube portion 2a1 with a bottom and multiple rods 2a2 packed and arranged inside the tube portion 2a1. Each rod 2a2 is extendable and retractable in the axial direction of the tube portion 2a1. Each rod 2a2 is extendable and retractable independently of each other. Each rod 2a2 is in contact with each other. Some of the multiple rods 2a2 are in contact with the inner circumferential surface of the tube portion 2a1. In this embodiment, the axial direction of the tube portion 2a1 coincides with the X-axis direction.

[0166] Next, the effects of the fourteenth embodiment will be described.

[0167] In this embodiment, when each tool 2a is pressed against each adjusting screw 1h, only the rods 2a2 that contact the adjusting screw 1h contract axially, while the remaining rods 2a2 are positioned along the outer circumferential surface of the adjusting screw 1h, gripping the adjusting screw 1h. This allows each tool 2a to fit onto the adjusting screw 1h. Since each tool 2a is a universal socket, the inner circumferential shape of each tool 2a changes to match the outer circumferential shape of the adjusting screw 1h, allowing one type of tool 2a to fit onto adjusting screws 1h with a variety of outer circumferential shapes.

[0168] Embodiment 15 Next, a laser processing apparatus 100L according to a fifteenth embodiment will be described with reference to FIGS. 47 to 49. FIG. 47 is a vertical cross-sectional view showing the processing head 1 and the automatic centering device 2 of the laser processing apparatus 100L according to the fifteenth embodiment, illustrating a state in which the center axis of the adjustment screw 1h and the center axis of the tool 2a are aligned. FIG. 48 is a vertical cross-sectional view showing the tool support member 10 according to the fifteenth embodiment, illustrating a state in which the inner ring 10a and the outer ring 10b are parallel. FIG. 49 is a vertical cross-sectional view showing the tool support member 10 according to the fifteenth embodiment, illustrating a state in which the inner ring 10a and the outer ring 10b are obliquely intersecting. This embodiment differs from the first to fourteenth embodiments in that the automatic centering device 2 includes multiple tool support members 10. In addition, in the fifteenth embodiment, parts that overlap with those in the first to fourteenth embodiments are designated by the same reference numerals, and descriptions thereof will be omitted.

[0169] As shown in Figure 47, the automatic centering device 2 is equipped with multiple tool support members 10 (only one tool support member 10 is shown in Figure 47) that rotatably support each tool 2a. The tool support member 10 is arranged on the inner circumferential surface of the axial hole 2m of one of the vertical walls 2k. The tool support member 10 and the joint 2d are arranged with a gap between them in the X-axis direction. The tool support member 10 is arranged at a position closer to the machining head 1 than the joint 2d in the X-axis direction. The tool support member 10 is, for example, a bearing.

[0170] Next, the effects of the fifteenth embodiment will be described.

[0171] In this embodiment, since each tool 2a is supported by each tool support member 10, the weight of each tool 2a applied to each joint 2d can be reduced, and deformation of each joint 2d due to the weight of each tool 2a can be suppressed. Also, in this embodiment, since each tool 2a is supported by each tool support member 10, deformation of the joint 2d due to driving of the rotation mechanism 2b can be suppressed, and displacement of the position of the tip of each tool 2a can be suppressed.

[0172] Assume now that the tool support member 10 is a ball bearing, as shown in FIGS. 48 and 49. The tool support member 10 has an inner ring 10a, an outer ring 10b that is disposed around the outer periphery of the inner ring 10a with a gap therebetween, and a plurality of balls 10c that are disposed between the inner ring 10a and the outer ring 10b. As shown in FIG. 48, when the inner ring 10a and the outer ring 10b are parallel, the central axis J of the inner ring 10a and the central axis K of the outer ring 10b coincide. On the other hand, as shown in FIG. 49, when a gap M is generated between the inner ring 10a and the outer ring 10b and the balls 10c, the inner ring 10a and the outer ring 10b intersect obliquely. In this state, a wobble L occurs in which the central axis J of the inner ring 10a is tilted relative to the central axis K of the outer ring 10b. Due to this backlash L, even if there is an axial misalignment between each tool 2a and each adjusting screw 1h as shown in Fig. 47, each joint 2d is deformed, causing each tool 2a to tilt toward each adjusting screw 1h. This allows each tool 2a to fit into each adjusting screw 1h, allowing each adjusting screw 1h to rotate.

[0173] Embodiment 16 Next, a laser processing apparatus 100M according to a sixteenth embodiment will be described with reference to Fig. 50. Fig. 50 is a horizontal cross-sectional view showing the processing head 1 of the laser processing apparatus 100M according to the sixteenth embodiment. In this embodiment, the rotation amount θ of each of the adjusting screws 1ha and 1hb in the calculation step is R ,θ L The method of calculating the difference between the first and fifteenth embodiments is different from that of the first to fifteenth embodiments. In the sixteenth embodiment, the same reference numerals are used to designate the same parts as those in the first to fifteenth embodiments, and the description thereof will be omitted.

[0174] The control device 4 calculates the rotation amount θ of each of the adjusting screws 1ha and 1hb using the following formulas (3) and (4). R ,θ L Here, the rotation amount of one of the adjusting screws 1ha shown in FIG. 50 is calculated as θ R , the amount of rotation of the other adjusting screw 1hb is θ LThe amount of misalignment along the direction intersecting the X-axis and the Y-axis is defined as X. The amount of misalignment in the direction intersecting the X-axis and the Y-axis, which is the amount of misalignment in the direction intersecting the amount of misalignment X, is defined as Y. The ratio of the amount of movement of the optical axis of the laser beam r to the amount of movement of the focusing lens 1d is defined as n, and the pitch of each of the adjustment screws 1ha, 1hb is defined as P. The ratio n of the amount of movement of the optical axis of the laser beam r to the amount of movement of the focusing lens 1d is derived from an optical relationship. The control device 4 calculates the rotation amount θ of one of the adjustment screws 1ha using formula (3). R The control device 4 also calculates the rotation amount θ of the other adjusting screw 1hb using the formula (4). L 50, the X and Y coordinates of the measurement coordinate system of the misalignment detection device 3 (the coordinate system for determining the amount of misalignment) are indicated by dashed arrows, and the movement amounts x and y of the lens unit 1b (the coordinate system of the lens unit 1b) are indicated by hollow arrows. The X and Y coordinates of the measurement coordinate system of the misalignment detection device 3 and the movement amounts x and y of the lens unit 1b are shifted by 45 degrees from the X and Y coordinates shown in FIG. 1. In equations (3) and (4), the measurement coordinate system (the coordinate system for determining the amount of misalignment) of the misalignment detection device 3 is aligned with the actual movement amounts x and y of the lens unit 1b (the coordinate system of the lens unit 1b).

[0175]

number

[0176]

number

[0177] Next, the effects of the sixteenth embodiment will be described.

[0178] In this embodiment, as in the first embodiment, the rotation amount θ of each of the adjusting screws 1ha and 1hb is R ,θ L In particular, in this embodiment, the measurement coordinate system of the misalignment amount detector 3 is adjusted to the actual movement amounts x and y of the lens unit 1b, so that the rotation amounts θ of the adjusting screws 1ha and 1hb are adjusted to the actual movement amounts x and y of the lens unit 1b.R ,θ L The formula for calculating can be simplified.

[0179] Embodiment 17 Next, a laser processing apparatus according to a seventeenth embodiment will be described. The configuration of the laser processing apparatus according to the seventeenth embodiment is the same as that of the first embodiment (see FIGS. 1 to 8). In this embodiment, the rotation amount θ of each of the adjusting screws 1ha and 1hb in the calculation step is R ,θ L The method of calculating the difference between the first and sixteenth embodiments is different from that of the first to sixteenth embodiments. In the seventeenth embodiment, the same reference numerals are used to designate the same parts as those in the first to sixteenth embodiments, and the description thereof will be omitted.

[0180] The control device 4 calculates the rotation amount θ of each of the adjusting screws 1ha and 1hb using the following formulas (5) to (7). R ,θ L Here, the rotation amount of one of the adjusting screws 1ha shown in FIG. R , the amount of rotation of the other adjusting screw 1hb is θ L The amount of movement of the laser beam r in the X-axis direction is Xd, and the amount of movement of the laser beam r in the Y-axis direction is Yd. When the relational expression in formula (5) is found from the results of the past N automatic centerings, formula (5) is solved to obtain formula (6). N times is two or more. The amount of misalignment X along the X-axis and the amount of misalignment Y along the Y-axis are obtained and substituted for Xd and Yd in formula (6). As a result, the amount of rotation θ of one of the adjustment screws 1ha is R and the rotation amount θ of the other adjusting screw 1hb L is calculated using formula (7).

[0181]

number

[0182]

number

[0183]

number

[0184] Next, the effects of the seventeenth embodiment will be described.

[0185] In this embodiment, as in the first embodiment, the rotation amount θ of each of the adjusting screws 1ha and 1hb is R ,θ L In particular, in this embodiment, since the formulas (5) to (7) are constantly updated based on the results of the past N automatic centering operations, it is possible to appropriately deal with disturbances that may cause deterioration in centering accuracy, such as machine differences, wear, environmental changes, and part replacement. Note that the rotation amount θ of each adjusting screw 1ha, 1hb can be calculated using a rule-based method such as multiple regression analysis. R ,θ L may be calculated.

[0186] Embodiment 18 Next, a laser processing apparatus according to an eighteenth embodiment will be described. The configuration of the laser processing apparatus according to the eighteenth embodiment is the same as that of the sixteenth embodiment (see FIG. 50). In this embodiment, the rotation amount θ of each of the adjusting screws 1ha and 1hb in the calculation step is R ,θ L The method of calculating the difference between this embodiment and the first to seventeenth embodiments is different. In the eighteenth embodiment, the same reference numerals are used to designate the same parts as those in the first to seventeenth embodiments, and the description thereof will be omitted.

[0187] The control device 4 calculates the rotation amount θ of each of the adjusting screws 1ha and 1hb using the following formulas (8) to (10). R ,θ L Here, the rotation amount of one of the adjusting screws 1ha shown in FIG. 50 is calculated as θ R , the amount of rotation of the other adjusting screw 1hb is θ LLet Xd be the amount of movement of laser beam r in the direction intersecting the X-axis and Y-axis, and Yd be the amount of movement of laser beam r in the direction intersecting the movement amount Xd of laser beam r in the direction intersecting the X-axis and Y-axis. When the relational expression of formula (8) is found from the results of the past N automatic centerings, formula (8) is solved to obtain formula (9). N times is two or more. The misalignment amount X along the direction intersecting the X-axis and Y-axis defined in embodiment 16 and the misalignment amount Y along the direction intersecting the misalignment amount X, which is the amount of misalignment along the direction intersecting the X-axis and Y-axis, are obtained and substituted for Xd and Yd in formula (9). As a result, the rotation amount θ of one of the adjustment screws 1ha is R and the rotation amount θ of the other adjusting screw 1hb L is calculated using formula (10).

[0188]

number

[0189]

number

[0190]

number

[0191] Next, the effects of the eighteenth embodiment will be described.

[0192] In this embodiment, as in the first embodiment, the rotation amount θ of each of the adjusting screws 1ha and 1hb is R ,θ L In particular, in this embodiment, since the formulas (8) to (10) are constantly updated based on the results of the past N automatic centering operations, it is possible to appropriately deal with disturbances that may cause deterioration in centering accuracy, such as machine differences, wear, environmental changes, and part replacement. Note that the rotation amount θ of each adjusting screw 1ha, 1hb can be calculated by a rule-based method such as multiple regression analysis. R ,θ L may be calculated.

[0193] Embodiment 19 Next, a laser processing apparatus 100N according to a nineteenth embodiment will be described with reference to Fig. 51 to Fig. 55. In this embodiment, the control device 4 has a machine learning device 150, and the machine learning device 150 is used to calculate the rotation amount θ of each of the adjusting screws 1ha and 1hb. R ,θ L The nineteenth embodiment differs from the first to eighteenth embodiments in that the calculation of the above is performed in the first to eighteenth embodiments. In the nineteenth embodiment, the same reference numerals are used to designate the same parts as those in the first to eighteenth embodiments, and the description thereof will be omitted.

[0194] 51 is a diagram showing the configuration of a learning device 120 of a laser processing apparatus 100N according to the nineteenth embodiment. The machine learning device 150 calculates information on the amount of misalignment and the rotation amount θ of each of the adjusting screws 1ha and 1hb corresponding to the amount of misalignment. R ,θ L Based on the input information, the rotation amount θ of each adjusting screw 1ha, 1hb is set to the target value for the misalignment amount. R ,θ L The machine learning device 150 includes a learning device 120. The target value of the misalignment amount is, for example, within 50 μm.

[0195] The learning device 120 includes a data acquisition unit 121, a model generation unit 122, and a trained model storage unit 123. Note that the trained model storage unit 123 may be located outside the learning device 120.

[0196] The data acquisition unit 121 acquires input information 131 and rotation amount information 132 as learning data. The input information 131 is information on the amount of misalignment between the optical axis of the laser beam r and the central axis of the nozzle 1c. The rotation amount information 132 is information on the amount of rotation θ of each of the adjustment screws 1ha and 1hb corresponding to the input information 131. R ,θ L Here, the learning data is data in which the input information 131 and the rotation amount information 132 are associated with each other.

[0197] The input information 131 is misalignment amount information acquired by the control device 4 from the misalignment amount detection device 3, and is input from the control device 4 to the data acquisition unit 121. The rotation amount information 132 is input by an operator to the data acquisition unit 121. The operator may calculate the rotation amount θ using, for example, the above-mentioned formulas (1) to (10). R ,θ L By calculating the rotation amount information 132, the data acquisition unit 121 generates learning data by associating the input information 131 with the rotation amount information 132.

[0198] The model generation unit 122 generates the rotation amount θ of each of the adjusting screws 1ha and 1hb, which will result in the misalignment amount being the target value, based on the learning data generated based on a combination of the input information 131 and the rotation amount information 132 sent from the data acquisition unit 121. R ,θ L The model generation unit 122 has a function of a learning unit that generates a trained model 133 for inferring the rotation amount information 132 from the input information 131 and the rotation amount information 132. The trained model storage unit 123 stores the trained model 133.

[0199] Next, a processing procedure of the learning process by the learning device 120 will be described with reference to Fig. 52. Fig. 52 is a flowchart showing the processing procedure of the learning process by the learning device 120 according to the nineteenth embodiment.

[0200] In step S310, the data acquiring unit 121 acquires learning data. Specifically, the data acquiring unit 121 acquires input information 131 and rotation amount information 132 as learning data. Note that the data acquiring unit 121 may acquire the input information 131 and the rotation amount information 132 at the same timing, or may acquire them at different timings. In other words, the data acquiring unit 121 may acquire the input information 131 and the rotation amount information 132 at any timing as long as the input information 131 and the rotation amount information 132 can be associated with each other.

[0201] In step S320, the model generation unit 122 executes a learning process in accordance with the learning data, which is a combination of the input information 131 and the rotation amount information 132 acquired by the data acquisition unit 121. The model generation unit 122 generates a learned model 133, for example, by so-called supervised learning in accordance with the learning data.

[0202] In step S330, the trained model storage unit 123 stores the trained model 133. That is, the model generation unit 122 stores the generated trained model 133 in the trained model storage unit 123.

[0203] A known learning algorithm such as supervised learning can be used to generate the trained model 133 by the model generation unit 122. Here, a case where the model generation unit 122 performs supervised learning using a neural network will be described.

[0204] The model generation unit 122 calculates the rotation amount θ of each of the adjusting screws 1ha and 1hb that will result in the misalignment amount becoming a target value, for example, by so-called supervised learning in accordance with a neural network model. R ,θ L Here, supervised learning refers to a technique in which a set of data consisting of input and result (label) is provided to the learning device 120, which learns the features of the learning data and infers the result from the input.

[0205] A neural network consists of an input layer consisting of multiple neurons, an intermediate layer (hidden layer) consisting of multiple neurons, and an output layer consisting of multiple neurons. The intermediate layer may be one layer, or two or more layers.

[0206] Fig. 53 is a diagram illustrating the configuration of a neural network used by the learning device 120 according to the nineteenth embodiment. For example, in a three-layer neural network as shown in Fig. 53, when multiple pieces of data are input to input layers X1 to X3, the values ​​are multiplied by weights w11 to w16 and input to intermediate layers Y1 to Y2. The results are further multiplied by weights w21 to w26 and output from output layers Z1 to Z3. This output result varies depending on the values ​​of weights w11 to w16 and w21 to w26.

[0207] The neural network of the nineteenth embodiment uses so-called supervised learning to calculate the rotation amount θ of each of the adjusting screws 1ha and 1hb that will result in a target misalignment amount, in accordance with learning data (data set) generated based on a combination of input information 131 acquired by the data acquisition unit 121 and rotation amount information 132. R ,θ L Learn.

[0208] That is, the neural network inputs input information 131 and rotation amount information 132 to input layers X1 to X3, and the results output from output layers Z1 to Z3 are the rotation amounts θ of the adjusting screws 1ha and 1hb, which are the target values ​​for the misalignment amounts. R ,θ L The weights w11 to w16, w21 to w26 are adjusted to approach the

[0209] By performing the above-described learning, the model generation unit 122 generates and outputs the trained model 133. The trained model storage unit 123 stores the trained model 133 output from the model generation unit 122.

[0210] 54 is a diagram showing the configuration of the inference device 140 of the laser processing apparatus 100N according to the nineteenth embodiment. The inference device 140 includes a data acquisition unit 141 and an inference unit 142. The inference unit 142 is connected to the learned model storage unit 123. The machine learning device 150 includes the inference device 140.

[0211] Input information 131 is input from the control device 4 to the data acquisition unit 141 .

[0212] The inference unit 142 reads out the trained model 133 from the trained model storage unit 123. The inference unit 142 inputs the input information 131 sent from the data acquisition unit 141 to the trained model 133. As a result, the inference unit 142 determines the rotation amount θ of each of the adjustment screws 1ha and 1hb that makes the amount of misalignment a target value. R ,θ L That is, the inference unit 142 infers the rotation amount θ of each of the adjusting screws 1ha and 1hb that makes the amount of misalignment a target value. R ,θ L The trained model 133 for inferring the above is provided with the rotation amount θ of each of the adjusting screws 1ha and 1hb, which is acquired by the data acquisition unit 141 and for which the amount of misalignment is the target value. R ,θ L The input information 131 for inferring the rotation amount is input. This makes it possible to output a rotation amount inference result 151 inferred from the input information 131. The rotation amount inference result 151 is the rotation amount θ of each of the adjusting screws 1ha and 1hb, which is the amount of misalignment that becomes the target value. R ,θ L This is information showing the inference result.

[0213] The machine learning device 150 may store the input information 131 and the rotation amount inference result 151 obtained by inference in the trained model storage unit 123. In this case, the inference unit 142 uses the input information 131 stored in the trained model storage unit 123 to calculate the rotation amount θ of each of the adjusting screws 1ha and 1hb at which the misalignment amount becomes the target value. R ,θ L and updates the trained model 133. The trained model storage unit 123 stores the updated trained model 133.

[0214] Next, a processing procedure of the inference process by the inference device 140 will be described with reference to Fig. 55. Fig. 55 is a flowchart showing the processing procedure of the inference process by the inference device 140 according to the nineteenth embodiment.

[0215] In step S340, the data acquisition unit 141 acquires the input information 131 from the control device 4. The inference unit 142 reads out the trained model 133 from the trained model storage unit 123. In step S350, the inference unit 142 inputs the input information 131 into the trained model 133. As a result, in step S360, the inference unit 142 uses the input information 131 to calculate the rotation amount θ of each of the adjusting screws 1ha and 1hb at which the amount of misalignment becomes the target value. R ,θ L That is, the inference unit 142 outputs the rotation amount inference result 151 to the control device 4.

[0216] The control device 4 can use the rotation amount inference result 151 sent from the inference unit 142 to control each of the rotation mechanisms 2b to rotate each of the adjusting screws 1ha and 1hb.

[0217] In the nineteenth embodiment, the inference unit 142 outputs the rotation amount inference result 151 using the trained model 133 trained by the machine learning device 150 of the control device 4, but this is not limiting. For example, the inference unit 142 may acquire the trained model 133 from an external device such as another control device, and output the rotation amount inference result 151 based on this trained model 133.

[0218] Furthermore, at least one of the learning device 120 and the inference device 140 may be connected to the control device 4 via a network, for example. At least one of the learning device 120 and the inference device 140 may be a device separate from the control device 4. Furthermore, at least one of the learning device 120 and the inference device 140 may reside on a cloud server.

[0219] In addition, in the nineteenth embodiment, a case where supervised learning is applied to the learning algorithm used by the model generation unit 122 has been described, but the learning algorithm is not limited to supervised learning. As for the learning algorithm, reinforcement learning, unsupervised learning, semi-supervised learning, or the like can also be applied in addition to supervised learning.

[0220] Furthermore, the machine learning device 150 calculates the rotation amount θ of each of the adjusting screws 1ha and 1hb that will result in the misalignment amount being the target value, in accordance with the learning data generated for the plurality of laser processing devices 100N. R ,θ L The following may be learned.

[0221] The machine learning device 150 may also acquire learning data from a plurality of laser processing apparatuses 100N used in the same area. The machine learning device 150 may also calculate the rotation amount θ of each of the adjusting screws 1ha and 1hb that will result in the misalignment amount being a target value, using learning data collected from a plurality of laser processing apparatuses 100N that operate independently in different areas. R ,θ L You may also learn:

[0222] Furthermore, for a certain laser processing device 100N, the rotation amount θ of each of the adjusting screws 1ha and 1hb when the amount of misalignment of the laser processing device 100N becomes the target value is R ,θ L The learning device 120 that has learned the above may be applied to another laser processing device 100N. In addition, the rotation amount θ of each of the adjusting screws 1ha and 1hb that makes the amount of misalignment of the laser processing device 100N that occurs with respect to the other laser processing device 100N the target value R ,θ L The learning device 120 may re-learn the above to update the trained model 133.

[0223] Deep learning, which learns to extract features themselves, can also be used as the learning algorithm used in the model generation unit 122. The model generation unit 122 may also perform machine learning according to other known methods, such as genetic programming, functional logic programming, or support vector machines.

[0224] Next, the effects of the nineteenth embodiment will be described.

[0225] In this embodiment, as in the first embodiment, the rotation amount θ of each of the adjusting screws 1ha and 1hb is R ,θL In particular, in this embodiment, the machine learning device 150 can appropriately derive the rotation amount θ of each of the adjusting screws 1ha and 1hb that makes the amount of misalignment a target value. R ,θ L Since a trained model 133 is used for the inference, it is possible to appropriately respond to disturbances that may cause deterioration in centering accuracy, such as machine differences, wear, environmental changes, and component replacement.

[0226] Embodiment 20. Next, a laser processing apparatus according to a twentieth embodiment will be described with reference to FIGS. 56 to 59. FIG. 56 is a flowchart showing the procedure of a fitting process in the laser processing apparatus according to the twentieth embodiment. FIG. 57 is a vertical cross-sectional view showing a state in which the phases of the adjusting screw 1h and the tool 2a are shifted in the fitting process in the twentieth embodiment. FIG. 58 is a vertical cross-sectional view showing a state in which the phases of the adjusting screw 1h and the tool 2a are being aligned in the fitting process in the twentieth embodiment. FIG. 59 is a vertical cross-sectional view showing a state in which the phases of the adjusting screw 1h and the tool 2a are aligned in the fitting process in the twentieth embodiment. In the twentieth embodiment, the processing procedure in the fitting process differs from that in the first to nineteenth embodiments. Note that in the twentieth embodiment, parts that overlap with those in the first to nineteenth embodiments are denoted by the same reference numerals, and description thereof will be omitted.

[0227] The control device 4 performs the processes of steps S3-1A to S3-4A shown in Fig. 56. The fitting process in the 20th embodiment differs from the fitting process in the 1st embodiment in that the order of steps S3-2 and S3-3 shown in Fig. 10 of the 1st embodiment is reversed.

[0228] First, the control device 4 sets the torque limit of each rotation mechanism 2b to a value less than the value that allows each adjustment screw 1h to rotate and greater than the value that allows each tool 2a to rotate freely (step S3-1A). Step S3-1A is the same as the process of step S3-1 in the first embodiment described above. Next, the control device 4 drives the linear motion mechanism 2c to bring each tool 2a and each adjustment screw 1h closer to each other (step S3-2A). The process of step S3-2A is the same as the process of step S3-3 in the first embodiment described above. Next, the control device 4 drives each rotation mechanism 2b to rotate each tool 2a (step S3-3A). The control device 4 continues to rotate each tool 2a until the process of step S3-4A is completed. The process of step S3-3A is the same as the process of step S3-2 in the first embodiment described above. Next, when the fitting detection sensor 2e detects that each tool 2a has been fitted to each adjusting screw 1h, the control device 4 stops driving each rotation mechanism 2b (step S3-4A). The process of step S3-4A is the same as the process of step S3-4 in the first embodiment described above.

[0229] Next, the effects of the twentieth embodiment will be described.

[0230] In this embodiment, by setting the torque limit of each rotation mechanism 2b as in step S3-1A, when the phases of each tool 2a and each adjusting screw 1h do not match as shown in Fig. 57 from step S3-3A to step S3-4A, each tool 2a can rotate freely relative to each adjusting screw 1h as shown in Fig. 58. This makes it easier for the phases of each tool 2a and each adjusting screw 1h to match as shown in Fig. 59.

[0231] Embodiment 21. Next, a laser processing apparatus according to a twenty-first embodiment will be described with reference to Figs. 60 and 61. Fig. 60 is a vertical cross-sectional view showing a state in which an adjusting screw 1h and a tool 2a in the twenty-first embodiment rotate clockwise. Fig. 61 is a vertical cross-sectional view showing a state in which an adjusting screw 1h and a tool 2a in the twenty-first embodiment rotate counterclockwise. This embodiment differs from the first to twenty-first embodiments in that the rotation direction and rotation speed are set in the rotation process. In the twenty-first embodiment, parts that overlap with the first to twenty-first embodiments are denoted by the same reference numerals and will not be described.

[0232] The control device 4 calculates the rotation amounts θ calculated from the misalignment amounts X and Y using the above-mentioned formulas (1) and (2) or formulas (3) and (4). R ,θ L The control device 4 sets the rotation direction and rotation speed of each of the adjusting screws 1ha, 1hb based on the set rotation direction and rotation speed. The control device 4 drives the rotation mechanism 2b based on the set rotation direction and rotation speed, thereby rotating each of the tools 2aa, 2ab and each of the adjusting screws 1ha, 1hb.

[0233] As an example, the rotation amount θ in formulas (1) and (3) R When is positive, the control device 4 sets the rotation direction of the adjusting screw 1ha to clockwise and sets the rotation speed of the adjusting screw 1ha to a constant value, as shown in Figure 60. Also, the rotation amount θ L When is positive, the control device 4 sets the rotation direction of the adjusting screw 1hb to clockwise as shown in FIG. 60, and sets the rotation speed of the adjusting screw 1hb to a constant value.

[0234] The rotation amount θ is calculated using formulas (1) and (3). R When is negative, the control device 4 sets the rotation direction of the adjusting screw 1ha to counterclockwise and sets the rotation speed of the adjusting screw 1ha to a constant value, as shown in Figure 61. Also, the rotation amount θ L When is negative, the control device 4 sets the rotation direction of the adjusting screw 1hb to counterclockwise as shown in FIG. 61, and sets the rotation speed of the adjusting screw 1hb to a constant value.

[0235] Next, the effects of the twenty-first embodiment will be described.

[0236] In this embodiment, the control device 4 calculates each rotation amount θ from the misalignment amounts X and Y using the formulas (1) and (2) or the formulas (3) and (4). R ,θ L Since the rotation direction and rotation speed of each of the adjusting screws 1ha and 1hb are set based on the above, it is possible to realize fine control over the rotation of each of the adjusting screws 1ha and 1hb.

[0237] Embodiment 22. Next, a laser processing apparatus according to a twenty-second embodiment will be described with reference to Fig. 62 to Fig. 64. Fig. 62 shows the rotation amount θ of the adjusting screw 1h in the twenty-second embodiment. R ,θ L 63 is a vertical cross-sectional view showing a state in which the adjusting screw 1h and the tool 2a rotate when the rotation amount θ of the adjusting screw 1h in the twenty-second embodiment is large. R ,θ L 64 is a vertical cross-sectional view showing a state in which the adjusting screw 1h and the tool 2a rotate when the rotation amount θ of the adjusting screw 1h in the twenty-second embodiment is small. R ,θ L 1 is zero, the adjustment screw 1h and the tool 2a are stopped. R ,θ L The difference between the embodiment 22 and the first to twenty-first embodiments is that the rotation speed of each of the adjusting screws 1ha, 1hb is set based on the magnitude of the rotation speed and the stop of each of the adjusting screws 1ha, 1hb is set based on the magnitude of the rotation speed and the stop of each of the adjusting screws 1ha, 1hb. Note that in the twenty-second embodiment, the same reference numerals are used for the parts that overlap with the first to twenty-first embodiments, and the description thereof will be omitted.

[0238] The control device 4 calculates the rotation amounts θ calculated from the misalignment amounts X and Y using the above-mentioned formulas (1) and (2) or formulas (3) and (4). R ,θ LThe control device 4 sets the rotation speed of each of the adjusting screws 1ha, 1hb based on the set rotation speed. The control device 4 drives the rotation mechanism 2b based on the set rotation speed, thereby rotating each of the tools 2aa, 2ab and each of the adjusting screws 1ha, 1hb.

[0239] As an example, the control device 4 may adjust the rotation amount θ R ,θ L When the rotation amount θ R ,θ L is equal to or greater than a preset threshold value), the control device 4 increases the rotation speed of each of the adjusting screws 1ha and 1hb. R ,θ L When is small (each rotation amount θ R ,θ L is less than a preset threshold value), the rotation speed of each of the adjusting screws 1ha, 1hb is reduced. The control device 4 rotates each of the tools 2aa, 2ab and each of the adjusting screws 1ha, 1hb by driving the rotation mechanism 2b based on the set rotation speed. Meanwhile, the control device 4 controls each rotation amount θ R ,θ L When it is 0 (zero), the rotation of each of the adjusting screws 1ha and 1hb is stopped.

[0240] Next, the effects of the twenty-second embodiment will be described.

[0241] In this embodiment, the rotation amounts θ calculated from the misalignment amounts X and Y using formulas (1) and (2) or formulas (3) and (4) are R ,θ L Since the rotation speed of each of the adjusting screws 1ha, 1hb is set based on the magnitude of the rotation, and the stop of each of the adjusting screws 1ha, 1hb is set, it is possible to realize fine control over the rotation of each of the adjusting screws 1ha, 1hb.

[0242] Embodiment 23. Next, a laser processing apparatus according to a twenty-third embodiment will be described with reference to Fig. 65. Fig. 65 is a flowchart showing the procedure of the rotation process in the laser processing apparatus according to the twenty-third embodiment. This embodiment differs from the first to twenty-second embodiments in that the rotation of each of the adjustment screws 1ha, 1hb is controlled based on the magnitude of the torque of each of the rotation mechanisms 2b in the rotation process. In the twenty-third embodiment, parts that overlap with the first to twenty-second embodiments will be given the same reference numerals and will not be described.

[0243] The control device 4 performs the processes of steps S4-1A to S4-2A shown in Fig. 65 in the rotation step. First, the control device 4 sets the torque limit of each rotation mechanism 2b to a value that is equal to or greater than the value at which each adjustment screw 1ha, 1hb can be rotated, and drives each rotation mechanism 2b to rotate each tool 2aa, 2ab (step S4-1A). Next, the control device 4 monitors the torque of each rotation mechanism 2b, and when the torque becomes equal to or greater than a preset threshold, the control device 4 calculates the rotation amount θ calculated in the calculation step. R ,θ L When each of the adjustment screws 1ha, 1hb has been rotated by the amount θ, each of the rotation mechanisms 2b is stopped (step S4-2A). In this embodiment, the torque detection function of the servo motor is used to monitor the torque of each of the rotation mechanisms 2b, but a torque sensor or the like may also be used. The threshold value is a numerical value that distinguishes between a state in which each of the tools 2aa, 2ab is rotating idly and a state in which each of the tools 2aa, 2ab is rotating without rotating idly and each of the adjustment screws 1ha, 1hb is rotating. When the torque of each of the rotation mechanisms 2b is less than the threshold value, the control device 4 determines that each of the tools 2aa, 2ab is rotating idly, and determines that each of the tools 2aa, 2ab is rotating idly, and determines that the amount of rotation θ R ,θ L On the other hand, when the torque of each rotation mechanism 2b is equal to or greater than the threshold value, the control device 4 determines that each of the adjustment screws 1ha and 1hb is rotating, and does not start counting the rotation amount θ R ,θ L Start counting.

[0244] Next, the effects of the twenty-third embodiment will be described.

[0245] In this embodiment, the control device 4 monitors the torque of each rotation mechanism 2b, and when the torque becomes equal to or greater than a preset threshold, the control device 4 controls each rotation amount θ R ,θ L This allows the timing at which the adjustment screws 1ha and 1hb start to rotate to be determined, and the calculated rotation amount θ R ,θ L The adjustment screws 1ha and 1hb can be rotated precisely by the same amount.

[0246] Embodiment 24. Next, a laser processing apparatus according to a twenty-fourth embodiment will be described with reference to Figs. 66 to 68. Fig. 66 is a flowchart showing the procedure of the drawing process in the laser processing apparatus according to the twenty-fourth embodiment. Fig. 67 is a vertical cross-sectional view showing a state in which the adjusting screw 1h cannot rotate freely relative to the tool 2a in the drawing process in the twenty-fourth embodiment. Fig. 68 is a vertical cross-sectional view showing a state in which the adjusting screw 1h can rotate freely relative to the tool 2a in the drawing process in the twenty-fourth embodiment. In this embodiment, the control in the drawing process differs from that in the first to twenty-third embodiments described above. In the twenty-fourth embodiment, parts that overlap with those in the first to twenty-third embodiments described above are given the same reference numerals and descriptions thereof will be omitted.

[0247] In the extraction step, the control device 4 performs the processes of steps S5-1A to S5-3A shown in Fig. 66. First, the control device 4 calculates the rotation amounts θ R ,θ L After rotating each of the adjusting screws 1ha, 1hb by a certain amount, each of the rotation mechanisms 2b is rotated a certain amount in the direction opposite to the previous rotation direction, or the torque limit of each of the rotation mechanisms 2b is set to a value less than the value at which each of the adjusting screws 1h can be rotated, and each of the rotation mechanisms 2b is rotated at a certain speed in the direction opposite to the previous rotation direction, and then each of the rotation mechanisms 2b is stopped (step S5-1A). In other words, the control device 4 sets the rotation direction output of each of the rotation mechanisms 2b to zero (0).

[0248] Next, the control device 4 drives the linear motion mechanism 2c to separate the tools 2aa, 2ab from the machining head 1 and pull out the tools 2aa, 2ab from the adjusting screws 1ha, 1hb (step S5-2A). Next, when the fitting detection sensor 2e detects that the tools 2aa, 2ab are not fitted to the adjusting screws 1ha, 1hb, the control device 4 stops driving the linear motion mechanism 2c (step S5-3A) and ends the process.

[0249] Next, the effects of the twenty-fourth embodiment will be described.

[0250] In the rotation process immediately preceding the extraction process, as shown in FIG. 67, the tools 2aa, 2ab are in contact with the adjusting screws 1ha, 1hb, preventing them from rotating freely. Therefore, if the tools 2aa, 2ab are withdrawn from the adjusting screws 1ha, 1hb in this state, the adjusting screws 1ha, 1hb may rotate. In this embodiment, before withdrawing the tools 2aa, 2ab from the adjusting screws 1ha, 1hb, the rotation mechanisms 2b are rotated a certain amount in the opposite direction to the previous rotation direction, or the torque limit of the rotation mechanisms 2b is set to a value less than the value that allows the adjustment screws 1h to rotate, and the rotation mechanisms 2b are rotated at a certain speed in the opposite direction to the previous rotation direction. This allows the tools 2aa, 2ab to rotate freely, as shown in FIG. 68. This makes it possible to prevent the adjusting screws 1ha and 1hb from rotating when the tools 2aa and 2ab are pulled out from the adjusting screws 1ha and 1hb.

[0251] Next, the hardware configuration of each of the control units 80 according to the first to twenty-fourth embodiments will be described with reference to Fig. 69 and Fig. 70. The control unit 80 corresponds to each of the control devices 4 according to the first to twenty-fourth embodiments. Each function of the control unit 80 according to the first to twenty-fourth embodiments is realized by a processing circuit. The processing circuit may be dedicated hardware, or may be a processing device that executes a program stored in a storage device.

[0252] When the processing circuit is dedicated hardware, the processing circuit may be a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an application specific integrated circuit, a field programmable gate array, or a combination thereof. Figure 69 is a diagram showing a configuration in which each function of the control unit 80 according to the first to twenty-fourth embodiments is realized by hardware. The processing circuit 81 incorporates a logic circuit 81a that realizes the function of the control unit 80.

[0253] When the processing circuit 81 is a processing device, the functions of the control unit 80 are realized by software, firmware, or a combination of software and firmware.

[0254] 70 is a diagram showing a configuration in which the functions of the control unit 80 according to the first to twenty-fourth embodiments are realized by software. The processing circuit 81 has a processor 811 that executes a program 81b, a random access memory 812 that the processor 811 uses as a work area, and a storage device 813 that stores the program 81b.

[0255] The processor 811 deploys the program 81b stored in the storage device 813 on the random access memory 812 and executes it, thereby realizing the functions of the control unit 80. The software or firmware is written in a programming language and stored in the storage device 813. The processor 811 can be exemplified by a central processing unit, but is not limited to this. The storage device 813 can be a semiconductor memory such as a RAM (Random Access Memory), a ROM (Read Only Memory), a flash memory, an EPROM (Erasable Programmable Read Only Memory), or an EEPROM (registered trademark) (Electrically Erasable Programmable Read Only Memory).

[0256] The semiconductor memory may be a non-volatile memory or a volatile memory. Besides the semiconductor memory, the storage device 813 may be a magnetic disk, a flexible disk, an optical disk, a compact disk, a mini disk, or a DVD (Digital Versatile Disc). The processor 811 may output data such as a calculation result to the storage device 813 for storage, or may store the data in an auxiliary storage device (not shown) via the random access memory 812. By integrating the processor 811, the random access memory 812, and the storage device 813 on a single chip, the functions of the control unit 80 can be realized by a microcomputer.

[0257] The processing circuit 81 realizes the functions of the control unit 80 by reading and executing the program 81b stored in the storage device 813. It can also be said that the program 81b causes the computer to execute the procedures and methods for realizing the functions of the control unit 80.

[0258] The processing circuit 81 may be configured so that some of the functions of the control unit 80 are realized by dedicated hardware, and some of the functions of the control unit 80 are realized by software or firmware.

[0259] In this way, the processing circuitry 81 can realize each of the above-described functions by hardware, software, firmware, or a combination of these.

[0260] Next, the hardware configurations of learning device 120 and inference device 140 will be described with reference to Fig. 71. Note that since the hardware configurations of learning device 120 and inference device 140 are similar, the hardware configuration of learning device 120 will be described here.

[0261] 71 is a diagram illustrating a hardware configuration of a learning device 120 according to the nineteenth embodiment. The learning device 120 can be realized by a processor 500, a memory 600, an input device 700, and an output device 800. Examples of the processor 500 include a CPU (Central Processing Unit, also referred to as a central processing unit, processing device, arithmetic unit, microprocessor, microcomputer, or DSP (Digital Signal Processor)) or a system LSI (Large Scale Integration). Examples of the memory 600 include a RAM and a ROM.

[0262] Learning device 120 is realized by processor 500 reading and executing a computer-executable learning program stored in memory 600 for performing the operations of learning device 120. The learning program, which is a program for performing the operations of learning device 120, can also be said to cause a computer to execute the procedures or methods of learning device 120. Note that inference device 140 is realized by processor 500 reading and executing a computer-executable inference program stored in memory 600 for performing the operations of inference device 140.

[0263] The learning program executed by the learning device 120 has a modular configuration including a data acquisition unit 121 and a model generation unit 122, which are loaded onto the main storage device and generated on the main storage device.

[0264] The input device 700 receives input information 131 and sends it to the processor 500. The memory 600 is used as a temporary memory when the processor 500 executes various processes. The memory 600 stores the trained model 133 and the like. The output device 800 outputs the rotation amount inference result 151 to an external device.

[0265] The learning program may be provided as a computer program product stored in a computer-readable storage medium as an installable or executable file. The learning program may also be provided to the learning device 120 via a network such as the Internet. Note that some of the functions of the learning device 120 may be realized by dedicated hardware such as a dedicated circuit, and some by software or firmware.

[0266] The configurations shown in the above embodiments are merely examples, and may be combined with other known technologies, or different embodiments may be combined with each other. It is also possible to omit or modify parts of the configurations as long as they do not deviate from the gist of the invention.

[0267] Various aspects of the present disclosure are summarized below as appendices.

[0268] (Appendix 1) An automatic centering device for automatically centering an optical axis of a laser beam and a central axis of a nozzle by moving a condenser lens provided inside a processing head, a tool fitted to each of a plurality of adjustment members capable of adjusting the optical axis of the laser beam and rotating integrally with each of the plurality of adjustment members; a rotation mechanism that applies a rotational force to the tool; and The automatic centering device is characterized in that it is provided separately from the processing head. (Appendix 2) An automatic centering device as described in Appendix 1, characterized in that it is equipped with a linear motion mechanism that moves the tool and the rotation mechanism in a direction perpendicular to a first axis parallel to the optical axis of the laser beam, thereby approaching and moving away from each of the adjustment members. (Appendix 3) An automatic centering device as described in Appendix 1 or 2, characterized in that it includes a joint that is configured to be deformable and connects the tool and the output shaft of the rotation mechanism. (Appendix 4) An automatic centering device according to any one of claims 1 to 3, characterized in that it comprises a tool support member that rotatably supports the tool. (Appendix 5) the number of each of the tools, the rotation mechanisms, and the linear motion mechanisms is two; The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis; the two rotation mechanisms are spaced apart from each other in the direction of the third axis, the two linear motion mechanisms are spaced apart from each other in the direction of the third axis, Each of the linear motion mechanisms is a guide rail extending in the direction of the second axis; a stage attached to the guide rail, movable along the guide rail in the direction of the second axis, and to which the rotation mechanisms are attached one by one; a drive source that applies a moving force to the stage; 3. The automatic centering device according to claim 2, further comprising: (Appendix 6) the number of each of the tools and the rotation mechanisms is two; The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis; the two rotation mechanisms are spaced apart from each other in the direction of the third axis, The linear motion mechanism includes: two guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; two stages arranged side by side in the direction of the second axis, attached to both of the two guide rails, movable in the direction of the second axis along both of the guide rails, and each having one of the rotation mechanisms attached thereto; two drive sources that apply a moving force to each of the two stages; 3. The automatic centering device according to claim 2, further comprising: (Appendix 7) the number of each of the tools and the rotation mechanisms is two; The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis; the two rotation mechanisms are spaced apart from each other in the direction of the third axis, The linear motion mechanism includes: two first guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; one large stage attached to both of the two first guide rails and movable in the second axis direction along both of the first guide rails; a single drive source that applies a moving force to the large stage; two second guide rails provided on the large stage, extending in the direction of the second axis, and spaced apart from each other in the direction of the third axis; two small stages attached to the two second guide rails, respectively, and movable in the second axis direction along the second guide rails, and each having one of the rotation mechanisms attached thereto; two apparatus-side biasing members attached to the two small stages, respectively, for biasing the small stages in a direction away from the processing head; 3. The automatic centering device according to claim 2, comprising: (Appendix 8) The number of tools is two, The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis; the number of the rotation mechanisms is one, The linear motion mechanism includes: two guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; one stage attached to both of the two guide rails and movable in the second axis direction along both of the guide rails; a single drive source that applies a moving force to the stage; and two transmission members capable of transmitting the rotational force of the rotation mechanism to the two tools, respectively; a position of one of the transmission members is changeable between a transmission position where the transmission member is in contact with the rotation mechanism and one of the tools and transmits the rotational force to the one of the tools, and a non-transmission position where the transmission member is separated from the rotation mechanism and one of the tools and does not transmit the rotational force to the one of the tools, The automatic centering device described in Appendix 2, characterized in that the position of the other transmission member can be changed between a transmission position in which it contacts the rotation mechanism and the other tool and transmits the rotational force to the other tool, and a non-transmission position in which it is separated from the rotation mechanism and the other tool and does not transmit the rotational force to the other tool. (Appendix 9) the number of the tools and the number of the rotation mechanisms are one; The linear motion mechanism includes: two first guide rails extending in a direction of a third axis that is an axis perpendicular to the first axis and a second axis that is an axis perpendicular to the first axis, and arranged at an interval from each other in the direction of the second axis; one large stage attached to both of the two first guide rails and movable in the direction of the third axis along both of the first guide rails; two second guide rails provided on the large stage, extending in the direction of the second axis, and spaced apart from each other in the direction of the third axis; a small stage attached to both of the two second guide rails and movable in the second axis direction along both of the second guide rails, and to which the rotation mechanism is attached; two drive sources that impart moving forces to the large stage and the small stage, respectively; 3. The automatic centering device according to claim 2, further comprising: (Appendix 10) the number of each of the tools and the rotation mechanisms is two; The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis; the two rotation mechanisms are spaced apart from each other in the direction of the third axis, The linear motion mechanism includes: two first guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; a large stage attached to both of the two first guide rails and movable in the second axis direction along both of the first guide rails, and to which one of the rotation mechanisms is attached; one drive source that applies a moving force to the large stage; and a second guide rail provided on the large stage and extending in the direction of the second axis; a small stage attached to the second guide rail, movable along the second guide rail in the direction of the second axis, and having one of the rotation mechanisms attached thereto; an apparatus-side biasing member attached to the small stage and biasing the small stage in a direction away from the processing head; 3. The automatic centering device according to claim 2, comprising: (Appendix 11) a lens unit having a condenser lens and a lens holder that holds the condenser lens; a plurality of adjustment members extending in a direction perpendicular to a first axis parallel to the optical axis of the laser beam, and capable of adjusting the position of the optical axis of the laser beam in a direction of a second axis perpendicular to the first axis and a direction of a third axis perpendicular to the first axis and the second axis; and A centering adjustment mechanism characterized in that the tip of each of the adjustment members is in contact with the outer peripheral surface of the lens holder. (Appendix 12) When a straight line passing through the optical axis of the laser beam along the direction of the second axis is defined as a first center line, and a straight line passing through the optical axis of the laser beam along the direction of the third axis is defined as a second center line, an outer peripheral surface of the lens holder has two lens-side inclined surfaces that are inclined so as to approach the second center line as the outer peripheral surface moves away from the first center line along the third axis; the two lens-side inclined surfaces are provided at positions symmetrical with respect to the first center line and are inclined in opposite directions to each other; The centering adjustment mechanism described in Appendix 11, characterized in that the tip of each adjustment member has an adjustment member-side inclined surface that inclines toward the second center line as it moves away from the first center line along the third axis and contacts the lens-side inclined surface. (Appendix 13) 13. The centering adjustment mechanism according to claim 11, further comprising a head-side biasing member that biases the lens unit toward each of the adjustment members. (Appendix 14) a processing head including a head-side housing, a condenser lens provided inside the head-side housing for condensing a laser beam, and a nozzle provided at a lower part of the head-side housing for emitting the laser beam that has passed through the condenser lens toward a workpiece; an automatic centering device for automatically centering the optical axis of the laser beam and the central axis of the nozzle by moving the condenser lens; Equipped with The processing head includes: a lens unit including the condenser lens and a lens holder that holds the condenser lens; a plurality of adjustment members extending in a direction perpendicular to a first axis parallel to the optical axis of the laser beam, and capable of adjusting the position of the optical axis of the laser beam in a direction of a second axis perpendicular to the first axis and a direction of a third axis perpendicular to the first axis and the second axis; and The automatic centering device is a tool that fits onto each of the adjustment members and rotates integrally with each of the adjustment members; a rotation mechanism that applies a rotational force to the tool; and The laser processing device is characterized in that the automatic centering device is provided separately from the processing head. (Appendix 15) The laser processing apparatus described in Appendix 14, characterized in that the automatic centering device is equipped with a linear motion mechanism that moves the tool and the rotation mechanism in a direction perpendicular to the first axis to approach and move away from each of the adjustment members. (Appendix 16) A recess is formed in either one of the adjustment member or the tool, 16. The laser processing device according to claim 14, wherein the other of the adjustment member and the tool has a convex portion formed thereon that fits into the concave portion. (Appendix 17) a tip of the protrusion has a tapered shape that tapers toward either one of the adjustment member or the tool; 17. The laser processing device according to claim 16, wherein the opening edge of the recess has a tapered shape that can come into contact with the tip of the protrusion. (Appendix 18) A laser processing apparatus described in any one of Appendices 14 to 17, characterized in that the processing head is configured to be movable in a direction perpendicular to the first axis to move closer to and away from the automatic centering device. (Appendix 19) the number of the tools and the number of the rotation mechanisms are one; The linear motion mechanism includes: two guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; one stage attached to both of the two guide rails and movable in the second axis direction along both of the guide rails; a single drive source that applies a moving force to the stage; The laser processing apparatus described in Appendix 15, characterized in that the processing head is configured to be movable in the direction of the third axis to move toward and away from the automatic centering device. (Appendix 20) the number of the tools and the number of the rotation mechanisms are one; The laser processing apparatus described in Appendix 14, characterized in that the processing head is configured to be movable in the direction of the second axis and the direction of the third axis to move toward and away from the automatic centering device. (Appendix 21) a misalignment amount detection device that detects a misalignment amount between the optical axis of the laser beam and the central axis of the nozzle; a control device that calculates a rotation amount of each of the adjustment screws, which are the adjustment members, based on the amount of misalignment, and drives the rotation mechanism based on the rotation amount to rotate the tool and each of the adjustment screws; 21. The laser processing device according to any one of appendices 14 to 20, comprising: (Appendix 22) The amount of rotation of one of the adjusting screws is θ R , the amount of rotation of the other adjusting screw is θ L , the amount of misalignment along the second axis is X, the amount of misalignment along the third axis is Y, the ratio of the amount of movement of the optical axis of the laser beam to the amount of movement of the condenser lens is n, and the pitch of each of the adjustment screws is P, R is calculated using the formula (1), and the rotation amount θ of the other adjusting screw L is calculated using formula (2).

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[0269] 1 processing head, 1a head side housing, 1b lens unit, 1c nozzle, 1d condenser lens, 1e lens holder, 1f insertion hole, 1g mounting hole, 1h, 1ha, 1hb adjustment screw, 1i, 1ia, 1ib push rod, 1j, 1ja, 1jb head side biasing member, 1k accommodation hole, 1m first inclined surface, 1n second inclined surface, 1o first surface, 1p second surface, 1q third inclined surface, 1r, 2z convex portion, 1s, 2n concave portion, 2 automatic centering device, 2a, 2aa, 2ab tool, 2a1 cylindrical portion, 2a2, 2w rod, 2b rotation mechanism, 2c linear motion mechanism, 2d joint, 2e fitting detection sensor, 2f output shaft, 2g guide rail, 2h stage, 2i, 2x drive source, 2j Bottom wall, 2k vertical wall, 2m shaft hole, 2o first guide rail, 2p large stage, 2q second guide rail, 2r small stage, 2s device side biasing member, 2t, 2ta, 2tb transmission member, 2u first meshing member, 2v second meshing member, 2y third meshing member, 3 misalignment amount detection device, 4 control device, 5 base, 6 bed, 7 column, 7a vertical section, 7b horizontal section, 8 laser oscillator, 9 workpiece, 10 tool support member, 10a inner ring, 10b outer ring, 10c ball, 80 control unit, 81 processing circuit, 81a logic circuit, 81b Program, 100, 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H, 100I, 100J, 100K, 100L, 100M, 100N laser processing device, 120 learning device, 121, 141 data acquisition unit, 122 model generation unit, 123 trained model memory unit, 131 input information, 132 rotation amount information, 133 trained model, 140 inference device, 142 inference unit, 150 machine learning device, 151 rotation amount inference result, 500, 811 processor, 600 memory, 700 input device, 800 output device, 812 random access memory, 813 storage device.

Claims

1. An automatic centering device for automatically centering an optical axis of a laser beam and a central axis of a nozzle by moving a condenser lens provided inside a processing head, a tool fitted to each of a plurality of adjustment members capable of adjusting the optical axis of the laser beam and rotating integrally with each of the plurality of adjustment members; a rotation mechanism that applies a rotational force to the tool; and The automatic centering device is characterized in that it is provided separately from the processing head.

2. 2. The automatic centering device of claim 1, further comprising a linear motion mechanism that moves the tool and the rotation mechanism in a direction perpendicular to a first axis parallel to the optical axis of the laser beam, to approach and move away from each of the adjustment members.

3. 2. The automatic centering device according to claim 1, further comprising a deformable joint that connects the tool and the output shaft of the rotation mechanism.

4. 2. The automatic centering device according to claim 1, further comprising a tool support member for rotatably supporting the tool.

5. the number of each of the tools, the rotation mechanisms, and the linear motion mechanisms is two; The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis, the two rotation mechanisms are spaced apart from each other in the direction of the third axis, the two linear motion mechanisms are arranged at an interval from each other in the direction of the third axis, Each of the linear motion mechanisms is a guide rail extending in the direction of the second axis; a stage attached to the guide rail, movable along the guide rail in the direction of the second axis, and to which the rotation mechanisms are attached one by one; a drive source that applies a moving force to the stage; 3. The automatic centering device according to claim 2, further comprising:

6. the number of each of the tools and the rotation mechanisms is two; The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis, the two rotation mechanisms are spaced apart from each other in the direction of the third axis, The linear motion mechanism includes: two guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; two stages arranged side by side in the direction of the second axis, attached to both of the two guide rails, movable in the direction of the second axis along both of the guide rails, and each having one of the rotation mechanisms attached thereto; two drive sources that apply a moving force to each of the two stages; 3. The automatic centering device according to claim 2, further comprising:

7. the number of each of the tools and the rotation mechanisms is two; The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis, the two rotation mechanisms are spaced apart from each other in the direction of the third axis, The linear motion mechanism includes: two first guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; one large stage attached to both of the two first guide rails and movable in the second axis direction along both of the first guide rails; a single drive source that applies a moving force to the large stage; two second guide rails provided on the large stage, extending in the direction of the second axis, and spaced apart from each other in the direction of the third axis; two small stages attached to the two second guide rails, respectively, and movable along the second guide rails in the direction of the second axis, and each having one of the rotation mechanisms attached thereto; two apparatus-side biasing members attached to the two small stages, respectively, for biasing the small stages in a direction away from the processing head; 3. The automatic centering device according to claim 2, further comprising:

8. The number of the tools is two, The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis; the number of the rotation mechanisms is one, The linear motion mechanism includes: two guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; one stage attached to both of the two guide rails and movable in the second axis direction along both of the guide rails; a single drive source that applies a moving force to the stage; and two transmission members capable of transmitting the rotational force of the rotation mechanism to the two tools, respectively; a position of one of the transmission members is changeable between a transmission position where the transmission member is in contact with the rotation mechanism and one of the tools and transmits the rotational force to the one of the tools, and a non-transmission position where the transmission member is separated from the rotation mechanism and one of the tools and does not transmit the rotational force to the one of the tools, An automatic centering device as described in claim 2, characterized in that the position of the other transmission member can be changed between a transmission position in which it contacts the rotation mechanism and the other tool and transmits the rotational force to the other tool, and a non-transmission position in which it is separated from the rotation mechanism and the other tool and does not transmit the rotational force to the other tool.

9. the number of the tool and the number of the rotation mechanism are each one; The linear motion mechanism includes: two first guide rails extending in a direction of a third axis that is an axis perpendicular to the first axis and a second axis that is an axis perpendicular to the first axis, and arranged at an interval from each other in the direction of the second axis; one large stage attached to both of the two first guide rails and movable in the direction of the third axis along both of the first guide rails; two second guide rails provided on the large stage, extending in the direction of the second axis, and spaced apart from each other in the direction of the third axis; a small stage attached to both of the two second guide rails and movable in the second axis direction along both of the second guide rails, and to which the rotation mechanism is attached; two drive sources that impart moving forces to the large stage and the small stage, respectively; 3. The automatic centering device according to claim 2, further comprising:

10. the number of each of the tools and the rotation mechanisms is two; The two tools extend in a direction of a second axis that is an axis perpendicular to the first axis, and are spaced apart from each other in a direction of a third axis that is an axis perpendicular to the first axis and the second axis, the two rotation mechanisms are spaced apart from each other in the direction of the third axis, The linear motion mechanism includes: two first guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; a large stage attached to both of the two first guide rails and movable in the second axis direction along both of the first guide rails, and to which one of the rotation mechanisms is attached; one drive source that applies a moving force to the large stage; and a second guide rail provided on the large stage and extending in the direction of the second axis; a small stage attached to the second guide rail, movable along the second guide rail in the direction of the second axis, and having one of the rotation mechanisms attached thereto; an apparatus-side biasing member attached to the small stage and biasing the small stage in a direction away from the processing head; 3. The automatic centering device according to claim 2, further comprising:

11. a lens unit having a condenser lens and a lens holder that holds the condenser lens; a plurality of adjustment members extending in a direction perpendicular to a first axis parallel to the optical axis of the laser beam, and capable of adjusting the position of the optical axis of the laser beam in a direction of a second axis perpendicular to the first axis and a direction of a third axis perpendicular to the first axis and the second axis; and A centering adjustment mechanism characterized in that the tip of each of the adjustment members is in contact with the outer peripheral surface of the lens holder.

12. When a straight line passing through the optical axis of the laser beam along the second axis is defined as a first center line, and a straight line passing through the optical axis of the laser beam along the third axis is defined as a second center line, an outer peripheral surface of the lens holder has two lens-side inclined surfaces that are inclined so as to approach the second center line as the outer peripheral surface of the lens holder moves away from the first center line along the third axis; the two lens-side inclined surfaces are provided at positions symmetrical with respect to the first center line and are inclined in opposite directions to each other, The centering adjustment mechanism described in claim 11, characterized in that the tip of each adjustment member has an adjustment member side inclined surface that inclines toward the second center line as it moves away from the first center line along the third axis and contacts the lens side inclined surface.

13. 12. The centering adjustment mechanism according to claim 11, further comprising a head-side biasing member for biasing the lens unit toward each of the adjustment members.

14. a processing head including a head-side housing, a condenser lens provided inside the head-side housing for condensing a laser beam, and a nozzle provided at a lower part of the head-side housing for emitting the laser beam that has passed through the condenser lens toward a workpiece; an automatic centering device for automatically centering the optical axis of the laser beam and the central axis of the nozzle by moving the condenser lens; Equipped with The processing head includes: a lens unit including the condenser lens and a lens holder that holds the condenser lens; a plurality of adjustment members extending in a direction perpendicular to a first axis parallel to the optical axis of the laser beam, and capable of adjusting the position of the optical axis of the laser beam in a direction of a second axis perpendicular to the first axis and a direction of a third axis perpendicular to the first axis and the second axis; and The automatic centering device is a tool that fits onto each of the adjustment members and rotates integrally with each of the adjustment members; a rotation mechanism that applies a rotational force to the tool; and The laser processing device is characterized in that the automatic centering device is provided separately from the processing head.

15. The laser processing apparatus according to claim 14, characterized in that the automatic centering device includes a linear motion mechanism that moves the tool and the rotation mechanism in a direction perpendicular to the first axis to approach and move away from each of the adjustment members.

16. A recess is formed in either one of the adjustment member or the tool, 15. The laser processing device according to claim 14, wherein the other of the adjustment member and the tool has a convex portion formed thereon to fit into the concave portion.

17. a tip of the protrusion has a tapered shape that tapers toward either one of the adjustment member or the tool; 17. The laser processing device according to claim 16, wherein an opening edge of the recess has a tapered shape that can come into contact with the tip of the protrusion.

18. The laser processing apparatus according to claim 14, wherein the processing head is configured to be movable in a direction perpendicular to the first axis to move toward and away from the automatic centering device.

19. the number of the tool and the number of the rotation mechanism are each one; The linear motion mechanism includes: two guide rails extending in the second axis direction and spaced apart from each other in the third axis direction; one stage attached to both of the two guide rails and movable in the second axis direction along both of the guide rails; a single drive source that applies a moving force to the stage; The laser processing device according to claim 15, wherein the processing head is configured to be movable in the direction of the third axis to move toward and away from the automatic centering device.

20. the number of the tool and the number of the rotation mechanism are each one; The laser processing device according to claim 14, wherein the processing head is configured to be movable in the direction of the second axis and the direction of the third axis to move toward and away from the automatic centering device.

21. a misalignment amount detection device that detects a misalignment amount between the optical axis of the laser beam and the central axis of the nozzle; a control device that calculates a rotation amount of each of the adjustment screws, which are the adjustment members, based on the amount of misalignment, and drives the rotation mechanism based on the rotation amount to rotate the tool and each of the adjustment screws; 15. The laser processing apparatus according to claim 14, further comprising:

22. The amount of rotation of one of the adjusting screws is θ R , the amount of rotation of the other adjusting screw is θ L , the amount of misalignment along the second axis is X, the amount of misalignment along the third axis is Y, the ratio of the amount of movement of the optical axis of the laser beam to the amount of movement of the condenser lens is n, and the pitch of each of the adjustment screws is P, R is calculated using the formula (1), and the rotation amount θ of the other adjusting screw L The laser processing apparatus according to claim 21, wherein is calculated using formula (2). [Equation 1] [Equation 2]

23. The amount of rotation of one of the adjusting screws is θ R , the amount of rotation of the other adjusting screw is θ L , the amount of misalignment along the direction intersecting the second axis and the third axis is X, the amount of misalignment in the direction intersecting the amount of misalignment X and along the direction intersecting the second axis and the third axis is Y, the ratio of the amount of movement of the optical axis of the laser beam to the amount of movement of the condenser lens is n, and the pitch of each of the adjustment screws is P, R is calculated using the formula (3), and the rotation amount θ of the other adjusting screw L The laser processing apparatus according to claim 21, wherein is calculated using formula (4). [Equation 3] [Equation 4]

24. The amount of rotation of one of the adjusting screws is θ R , the amount of rotation of the other adjusting screw is θ L When the movement amount of the laser beam in the direction of the second axis is Xd and the movement amount of the laser beam in the direction of the third axis is Yd, and the relational expression of Equation (5) is obtained from the results of the past N automatic centering operations, Equation (6) is obtained from Equation (5), and the misalignment amount X along the second axis and the misalignment amount Y along the third axis are obtained and substituted into Equation (6), the rotation amount θ of one of the adjustment screws is R and the rotation amount θ of the other adjusting screw L The laser processing apparatus according to claim 21, wherein the value is calculated by the following formula (7). [Equation 5] [Equation 6] [Equation 7]

25. The amount of rotation of one of the adjusting screws is θ R , the amount of rotation of the other adjusting screw is θ L When the relational expression of Equation (8) is obtained from the results of the past N automatic centering operations, Equation (9) is obtained from Equation (8), and the misalignment amount X along the direction intersecting the second axis and the third axis and the misalignment amount Y along the direction intersecting the second axis and the third axis are obtained and substituted into Equation (9), the rotation amount θ of one of the adjustment screws is R and the rotation amount θ of the other adjusting screw L The laser processing apparatus according to claim 21, wherein is calculated by the following formula (10). [Equation 8] [Equation 9] [Equation 10]

26. Equipped with learning devices, The learning device a data acquisition unit that acquires learning data including information on the misalignment amount and information on the rotation amount of each of the adjusting screws corresponding to the misalignment amount; a model generation unit that generates a trained model for inferring the rotation amount of each of the adjusting screws that will cause the misalignment amount to be a target value, from information on the misalignment amount and information on the rotation amount of each of the adjusting screws corresponding to the misalignment amount, using the training data; 22. The laser processing apparatus according to claim 21, further comprising:

27. Equipped with an inference device, The inference device a data acquisition unit that acquires information about the misalignment amount; an inference unit that infers a rotation amount of each of the adjusting screws from the information on the misalignment amount, using a trained model for inferring, from the information on the misalignment amount, a rotation amount of each of the adjusting screws that will result in the misalignment amount being a target value; and 22. The laser processing device according to claim 21, wherein the control device controls the rotation mechanism using the rotation amount of each of the adjusting screws inferred by the inference device.

28. a fitting detection sensor that detects whether the tool is fitted to each of the adjusting screws; the control device sets a torque limit of the rotation mechanism to a value less than the value at which each of the adjusting screws can be rotated and greater than or equal to a value at which the tool can be idled, and drives the rotation mechanism to rotate the tool, and then brings the tool and each of the adjusting screws closer to each other; 22. The laser processing device according to claim 21, wherein when the fitting detection sensor detects that the tool is fitted onto each of the adjustment screws, the control device stops driving the rotation mechanism.

29. 29. The laser processing apparatus according to claim 28, wherein, after the tool is fitted to each of the adjustment screws, the control device sets a torque limit of the rotation mechanism to a value less than a value at which each of the adjustment screws can be rotated and greater than a value at which the tool can be rotated freely, and drives the rotation mechanism to rotate the tool freely.

30. 22. The laser processing apparatus according to claim 21, wherein the control device stops the rotation mechanism after rotating the tool by the calculated rotation amount, and then withdraws the tool from each of the adjustment screws.

31. 30. The laser processing apparatus according to claim 29, wherein the control device, after causing the tool to rotate idly, sets a torque limit of the rotation mechanism to a value equal to or greater than the value at which each of the adjustment screws can be rotated, and drives the rotation mechanism based on the rotation amount to rotate the tool and each of the adjustment screws.

32. a fitting detection sensor that detects whether the tool is fitted to each of the adjusting screws; the control device sets a torque limit of the rotation mechanism to a value less than the value at which each of the adjusting screws can be rotated and greater than or equal to a value at which the tool can be idled, and after bringing the tool and each of the adjusting screws closer to each other, drives the rotation mechanism to rotate the tool; 22. The laser processing device according to claim 21, wherein when the fitting detection sensor detects that the tool is fitted onto each of the adjustment screws, the control device stops driving the rotation mechanism.

33. 22. The laser processing apparatus according to claim 21, wherein the control device monitors the torque of the rotation mechanism, and when the torque becomes equal to or greater than a preset threshold, rotates each of the adjustment screws by the respective rotation amounts.

34. 22. The laser processing apparatus according to claim 21, wherein the control device rotates each of the adjusting screws by the respective rotational amounts, and then rotates the rotation mechanism a fixed amount in a direction opposite to the immediately preceding rotational direction, or sets a torque limit of the rotation mechanism to a value less than the value at which each of the adjusting screws can be rotated, and rotates the rotation mechanism at a fixed speed in a direction opposite to the immediately preceding rotational direction, and then stops the rotation mechanism, separates the tool and each of the adjusting screws from each other, and withdraws the tool from each of the adjusting screws.

35. 22. A learning device that learns the rotation amount of each of the adjusting screws of the laser processing device according to claim 21, a data acquisition unit that acquires learning data including information on the misalignment amount and information on the rotation amount of each of the adjusting screws corresponding to the misalignment amount; a model generation unit that generates a trained model for inferring the rotation amount of each of the adjusting screws that will cause the misalignment amount to be a target value, from information on the misalignment amount and information on the rotation amount of each of the adjusting screws corresponding to the misalignment amount, using the training data; A learning device comprising:

36. 22. An inference device for inferring the rotation amount of each of the adjusting screws of the laser processing device according to claim 21, a data acquisition unit that acquires information about the misalignment amount; an inference unit that infers a rotation amount of each of the adjusting screws from the information on the misalignment amount, using a trained model for inferring, from the information on the misalignment amount, a rotation amount of each of the adjusting screws that will result in the misalignment amount being a target value; An inference device comprising:

37. A centering adjustment method for automatically centering the optical axis of a laser beam with a central axis of a nozzle by moving a condenser lens provided inside the processing head using an automatic centering device provided separately from the processing head, the method comprising: a tool that fits into each of a plurality of adjustment members that can adjust the optical axis of a laser beam and rotates integrally with each of the plurality of adjustment members; and a rotation mechanism that imparts a rotational force to the tool; a calculation step of calculating a rotation amount of each of the adjustment screws, which are the adjustment members, based on a misalignment amount between the optical axis of the laser beam and the central axis of the nozzle; a fitting step of fitting the tool onto each of the adjustment screws; a rotating step of rotating the tool and each of the adjusting screws by driving the rotation mechanism based on the rotation amount calculated in the calculating step; a withdrawal step of rotating each of the adjusting screws by the rotation amount calculated in the calculation step, and then stopping the rotation mechanism and withdrawing the tool from each of the adjusting screws; A centering adjustment method comprising:

38. a centering step of automatically performing centering between the optical axis of the laser beam and the central axis of the nozzle by the centering adjustment method according to claim 37; a processing step of processing the workpiece by irradiating the laser beam onto the workpiece through a condenser lens and the nozzle after the centering step; A method for manufacturing a workpiece, comprising:

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