Resin sealing equipment

Abstract

To provide a resin sealing device capable of resin sealing different shaped workpieces on the same line. [Solution] The resin sealing device 1 comprises a first press device 3 capable of resin sealing a first workpiece W1, a second press device 4 capable of resin sealing a second workpiece W2 smaller than the first workpiece W1, a resin supply device 2 capable of supplying resin material to the first workpiece W1 and the second workpiece W2, and a transport unit 19 capable of moving between the resin supply device 2 and the first press device 3 and the second press device 4, the transport unit 19 having a first support portion 91 that supports the first workpiece W1 and a second support portion 92 that supports the second workpiece W2, the first support portion 91 being positioned on the second support portion 92, and a passing area 93 through which the second workpiece W2 passes being formed in the first support portion 91.

Description

[Technical Field]

[0001] The present invention relates to a resin sealing device. [Background technology]

[0002] The resin sealing apparatus is equipped with a press device and can seal various workpieces with resin. A resin sealing apparatus for sealing large-sized workpieces with resin is equipped with a larger press device than a resin sealing apparatus for sealing small-sized workpieces with resin (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2023-176518

[0004] However, when different types of workpieces are to be resin-encapsulated, if a dedicated line is set up for each type of workpiece, the introduction cost increases and the area occupied by the resin-encapsulating device also increases. Summary of the Invention [Problem to be solved by the invention]

[0005] The present invention has been made in view of the above-mentioned problems, and has an object to provide a resin sealing apparatus that can resin-seal workpieces of different shapes on the same line. [Means for solving the problem]

[0006] A resin sealing apparatus according to one embodiment of the present invention includes a first press device capable of resin sealing a first workpiece, a second press device capable of resin sealing a second workpiece smaller than the first workpiece, a resin supply device capable of supplying resin material to the first workpiece and the second workpiece, and a transport unit capable of moving between the resin supply device and the first press device and the second press device, wherein the transport unit has a first support portion that supports the first workpiece and a second support portion that supports the second workpiece, the first support portion being positioned above the second support portion, and a passing area through which the second workpiece passes is formed in the first support portion. [Effects of the Invention]

[0007] According to the present invention, it is possible to provide a resin sealing apparatus that can seal workpieces of different shapes with resin on the same line. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view showing an example of a resin sealing apparatus according to an embodiment of the present invention. [Figure 2] FIG. 2 is a cross-sectional view showing an example of the transport unit shown in FIG. [Figure 3] FIG. 3 is a plan view illustrating an example of the transport unit illustrated in FIG. [Figure 4] FIG. 4 is a plan view showing an example of the press loader unit shown in FIG. [Figure 5] FIG. 5 is a front view showing an example of a state in which the first loader hand shown in FIG. 4 has entered the first press device. [Figure 6] FIG. 6 is a front view showing an example of a state in which the second loader hand shown in FIG. 4 has entered the first press device. [Figures 7A-7B] 7A and 7B are perspective views showing the first guided portion guided by the roller guide. [Figure 8A-8B] 8A and 8B are cross-sectional views of the recess taken parallel to the XZ plane. DETAILED DESCRIPTION OF THE INVENTION

[0009] A preferred embodiment of the present invention will be described with reference to the accompanying drawings. In each drawing, components with the same reference numerals have the same or similar configurations. For the sake of clarity and understanding of the positional relationships between components, each drawing is illustrated with a Cartesian coordinate system consisting of X, Y, and Z axes. The XY plane including the X and Y axes is defined as a horizontal plane, and the direction of the Z-axis arrow is defined as a vertically upward direction, while the direction opposite to the Z-axis arrow is defined as a vertically downward direction. Directions parallel to the X, Y, and Z axes are referred to as the X-axis, Y-axis, and Z-axis directions, respectively. When viewed from the front side of the resin sealing device 1, the X-axis direction is, for example, the left-right direction, and the Y-axis direction is, for example, the front-back direction. The present invention will now be described in detail with reference to the drawings.

[0010] 1 is a plan view showing an example of a resin sealing apparatus 1 according to one embodiment of the present invention. In the example shown, the resin sealing apparatus 1 configured as a compression molding machine includes a resin supply device 2, a first press device 3, a second press device 4, a conveying device 10, etc. The resin sealing apparatus 1 is not limited to a compression molding machine and may be a transfer molding machine. The number of press devices is not limited to two and may be three or more.

[0011] The transport device 10 includes a guide rail 11 extending in the X-axis direction, a transport unit (pallet) 19 that can move back and forth along the guide rail 11, and the like. The resin supply device 2, first press device 3, second press device 4, and the like are arranged in a line along the guide rail 11. The transport unit 19 can move between the resin supply device 2 and the first press device 3 and second press device 4. In the example shown, the transport unit 19 can move along the guide rail 11 so as to pass through positions 11A to 11D on the guide rail 11.

[0012] In the illustrated example, an operator waits with a workpiece at position 11B on guide rail 11. Resin sealing apparatus 1 is configured so that an operator manually supplies a workpiece that has not been sealed with resin to transport unit 19 stopped at position 11B, and manually collects the workpiece that has been sealed with resin from transport unit 19 that has stopped again at position 11B. The apparatus may further include a workpiece supply device that automatically supplies a workpiece that has not been sealed with resin, or a workpiece storage device that automatically collects a workpiece that has been sealed with resin.

[0013] The resin supplying device 2 is capable of supplying resin material to a plurality of types of workpieces, including a first workpiece W1 (shown in FIG. 2) and a second workpiece W2 (shown in FIG. 2). In the illustrated example, the resin supplying device 2 is configured as a dispenser that measures and dispenses predetermined amounts of resin material onto a workpiece placed on a stage 21, while moving a stage 21 that is movable in the X-axis direction and the Y-axis direction. The resin material may be in the form of granules, powder, or liquid.

[0014] The resin supplying device 2 is not limited to a dispenser, but may be a tablet loader that supplies a resin material (resin tablet) in which a pre-measured resin material is formed into a tablet shape, or may be a device that supplies a resin material (resin sheet) formed into a sheet shape.

[0015] The first press device 3 is configured to be able to resin-seal at least the first workpiece W1. In the illustrated example, the first press device 3 is configured to be able to resin-seal not only the first workpiece W1 but also a second workpiece W2 that is smaller than the first workpiece W1. The second press device 4 is configured to be able to resin-seal at least the second workpiece W2.

[0016] In addition to the above-mentioned guide rails 11, transport unit 19, etc., the transport device 10 further includes a pick-and-place mechanism 12 attached to the resin supply device 2, a press loader unit 13 attached to the first press device 3, and a third press loader 14 attached to the second press device 4. Instead of the third press loader 14, a press loader unit similar to the press loader unit 13 may be attached to the second press device 4.

[0017] The pick-and-place mechanism 12 is disposed on the guide rail 11 directly above position 11A facing the resin supply device 2, and can lift multiple types of workpieces including a first workpiece W1 and a second workpiece W2. The pick-and-place mechanism 12 can lift a workpiece to which no resin has been supplied from the transport unit 19 stopped at position 11A and move the workpiece from the transport unit 19 to the stage 21, and can lift a workpiece to which a resin material has been supplied by the stage 21 and move the workpiece from the stage 21 to the transport unit 19 stopped at position 11A.

[0018] In the illustrated example, a first press loader 13L and a second press loader 13R are arranged adjacent to each other in the X-axis direction (left-right direction) in the press loader unit 13. The press loader unit 13 is configured to be movable between a first position (shown by a solid line in FIG. 1) where the first press loader 13L is arranged directly above a position 11D facing the first press device 3 on the guide rail 11, and a second position (shown by a two-dot chain line in FIG. 1) where the second press loader 13R is arranged directly above position 11D.

[0019] The third press loader 14 is disposed on the guide rail 11 directly above a position 11C facing the second press device 4. The third press loader 14 is equipped with a third loader hand 71 that can advance and retreat into the second press device 4. The third loader hand 71 supplies the second workpiece W2 in a state in which it has not been sealed with resin and a resin material to a third mold 42 attached to the second press device 4, and retrieves the second workpiece W2 in a state in which it has been sealed with resin from the third mold 42.

[0020] Fig. 2 is a cross-sectional view showing an example of the transport unit 19 shown in Fig. 1. In the example shown, the transport unit 19 has a first support portion 91 on which the first workpiece W1 can be placed and supported, and a second support portion 92 on which the second workpiece W2 can be placed and supported. The first support portion 91 is arranged so as to overlap the second support portion 92.

[0021] According to the illustrated example, not only can the first workpiece W1 be placed and supported on the first support portion 91, but the second workpiece W2 can also be placed and supported on the second support portion 92 through the passing area 93, allowing the transport unit 19 to transport workpieces of different sizes. Because the first support portion 91 and the second support portion 92 are arranged one above the other, the area occupied by the transport unit 19 is small in plan view. This allows the resin sealing device 1 to be configured compactly.

[0022] A passing area 93 large enough to allow the second workpiece W2 to pass through is formed in the first support part 91. The passing area 93 may be a through-hole or a notch, as long as it passes vertically between the upper surface 91A and the lower surface 91B of the first support part 91. The second workpiece W2 can move between the upper surface 91A side and the lower surface 91B side of the first support part 91 through the passing area 93.

[0023] In the illustrated example, the transport unit 19 includes a lift mechanism 94, and the second support portion 92 is provided with a through-hole 97 through which the tip of the lift mechanism 94 passes. The lift mechanism 94 passes through the passing area 93 and can push up the second workpiece W2 from a position lower than the lower surface 91B of the first support portion 91 to a position higher than the upper surface 91A of the first support portion 91. Conversely, the lift mechanism 94 passes through the passing area 93 and can lower the second workpiece W2 from a position higher than the upper surface 91A of the first support portion 91 to a position lower than the lower surface 91B of the first support portion 91.

[0024] FIG. 3 is a plan view showing an example of the transport unit 19 shown in FIG. 2. In the illustrated example, the first workpiece W1 is a large panel measuring 620 mm × 620 mm, and the second workpiece W2 is a wafer with a diameter of 300 mm. When viewed vertically as shown in FIG. 3, in the illustrated example, the second support portion 92 is disposed across the inside and outside of the passage area 93. Therefore, as shown in FIG. 2, the second support portion 92 can support the second workpiece W2 in an area 92N disposed within the passage area 93. The second support portion 92 can be fixed to or supported by the first support portion 91 in an area 92T disposed outside the passage area 93. In the illustrated example, a contact portion 98 provided on the second support portion 92 contacts the lower surface 91B of the first support portion 91, thereby fixing or supporting the first support portion 91. The contact portion 98 may be integral with the first support portion 91, or may be fixed to the first support portion 91 by welding, bolts, nuts, or the like.

[0025] In the illustrated example, a first guide 95 that regulates the horizontal position of the first workpiece W1 is provided on the first support portion 91, and a second guide 96 that regulates the horizontal position of the second workpiece W2 is provided on the second support portion 92. When viewed in the vertical direction as shown in FIG. 3, in the illustrated example, the passing area 93 is surrounded by the first guide 95, and the second guide 96 is disposed in an area 92N within the passing area 93.

[0026] When the passing area 93 is surrounded by the first guide 95, the first guide 95 can be provided even when the passing area 93 is formed, and therefore the first workpiece W1 can be transported with its position regulated by the first guide 95. When the second guide 96 is disposed in the area 92N within the passing area 93, the second guide 96 can be provided even when the passing area 93 is formed, and therefore the second workpiece W2 can be transported with its position regulated by the second guide 96. Therefore, temporary suspension of the resin sealing apparatus 1 due to misalignment or the like is unlikely to occur.

[0027] Figure 4 is a plan view showing an example of the press loader unit 13 shown in Figure 1. In the illustrated example, a first press loader 13L and a second press loader 13R are mounted adjacent to each other in the direction of movement of the press loader unit 13. The first press loader 13L has a first loader hand 51 capable of gripping a first workpiece W1. The second press loader 13R has a second loader hand 61 capable of gripping a second workpiece W2. If the first press loader 13L and the second press loader 13R are adjacent to each other, the travel distance of the press loader 13 can be minimized when switching between the first loader hand 51 and the second loader hand 61.

[0028] Figure 5 is a front view showing an example of the state in which the first loader hand 51 shown in Figure 4 has entered the first press device 3. As shown in Figure 5, the first press device 3 is configured to be able to accommodate a first mold 31 corresponding to a first workpiece W1. The first loader hand 51 supplies the first workpiece W1 in an un-resin-sealed state and the resin material to the first mold 31 installed inside the first press device 3, and retrieves the resin-sealed first workpiece W1 from the first mold 31. The first loader hand 51 is provided with a pair of left and right first guided portions 52L and 52R.

[0029] The tie bar 33 of the first press device 3 is provided with a pair of left and right loader guides 34L and 34R that guide the first guided portions 52L and 52R. The loader guides 34L and 34R may also be referred to as guide portions. The distance D1 from the tip of one first guided portion 52L to the tip of the other first guided portion 52R is greater than the distance D3 from one loader guide 34L to the other loader guide 34R.

[0030] At least a portion of one of the first guided portions 52L is in contact with one of the loader guides 34L. At least a portion of the other first guided portion 52R is in contact with the other loader guide 34R. As a result, when the first loader hand 51 enters the first press device 3, its position in the X-axis direction (left-right direction) and the Z-axis direction (vertical direction) is restricted by the loader guides 34L and 34R.

[0031] 6 is a front view showing an example of a state in which the second loader hand 61 shown in FIG. 4 has entered the first press device 3. In the example shown, the first press device 3 is configured to be able to mount not only the first mold 31 but also a second mold 32 corresponding to the second workpiece W2. The second loader hand 61 supplies the second workpiece W2 in a state in which it has not been sealed with resin and a resin material to the second mold 32 mounted in the first press device 3, and retrieves the second workpiece W2 in a state in which it has been sealed with resin from the second mold 32.

[0032] The second loader hand 61 is provided with a pair of left and right second guided sections 62L and 62R. The distance D2 from the tip of one second guided section 62L to the tip of the other second guided section 62R is approximately the same as the distance D1 of the first guided sections 52L and 52R described above, and is greater than the distance D3 of the loader guides 34L and 34R described above.

[0033] At least a portion of one second guided portion 62L abuts against one loader guide 34L. At least a portion of the other second guided portion 62R abuts against the other loader guide 34R. As a result, when the second loader hand 61 enters the first press device 3, its position in the X-axis direction (left-right direction) and Z-axis direction (vertical direction) is restricted by the loader guides 34L, 34R shared with the first loader hand 51. By using common loader guides 34L, 34R for the first loader hand 51 and the second loader hand 61 in this way, the number of parts is reduced and workpieces of different shapes can be resin-encapsulated using the same press device.

[0034] Referring to Figures 7A to 8B, the first guided portions 52L and 52R of the first loader hand 51 and the second guided portions 62L and 62R of the second loader hand 61 will be described in more detail. Note that the second guided portions 62L and 62R of the second loader hand 61 have substantially the same shape and function as the first guided portions 52L and 52R of the first loader hand 51. Furthermore, one of the first guided portions 52L has substantially the same shape and function as the other first guided portion 52R. Therefore, the first guided portion 52R will be described in detail as a representative example, and redundant explanations of the first guided portion 52L and the second guided portions 62L and 62R will be omitted.

[0035] Figures 7A and 7B are perspective views showing the first guided portion 51R guided by the roller guide 34R. In the illustrated example, the loader guide 34R has a recess. By fitting the first guided portion 51R into this recess, the position of the first loader hand 51 in the X-axis direction (left-right direction) and the Z-axis direction (vertical direction) is restricted by the loader guides 34L and 34R.

[0036] Figures 8A and 8B are cross-sectional views of the recess cut parallel to the XZ plane. The cross-sectional shape of the recess may be roughly U-shaped as shown in Figure 8A, or roughly C-shaped as shown in Figure 8B. In the illustrated example, the first guided portion 52R is configured as a cam follower, which is a rolling bearing 54 with a mounting bolt 53. If the first guided portion 52R is a cam follower, the first guided portion 52R can be fitted into the recess while the outer ring of the rolling bearing 54 is rolling, making it easy to fit the first guided portion 52R. To prevent the cam follower from coming off, the lower surface of the recess may be curved downwards and the upper surface of the recess may be curved upwards, as shown in Figure 8B.

[0037] The embodiments described above are provided to facilitate understanding of the present invention and are not intended to limit its interpretation. The elements, arrangement, materials, conditions, shapes, and sizes of the embodiments are not limited to those exemplified and can be modified as appropriate. Furthermore, it is possible to partially substitute or combine the configurations shown in different embodiments.

[0038] For example, the resin sealing apparatus 1 may be configured to include a first press device 3 capable of resin sealing a first workpiece W1 and a second workpiece W2, a resin supply device 2 capable of supplying resin material to the first workpiece W1 and the second workpiece W2, and a two-tiered transport unit 19 that can move between the resin supply device 2 and the first press device 3, with the second press device 4 omitted.

[0039] [Appendix 1] The resin encapsulation apparatus 1 comprises a first press device 3 capable of resin encapsulating a first workpiece W1, a second press device 4 capable of resin encapsulating a second workpiece W2 smaller than the first workpiece W1, a resin supply device 2 capable of supplying resin material to the first workpiece W1 and the second workpiece W2, and a transport unit 19 that can move between the resin supply device 2 and the first press device 3 and the second press device 4. The transport unit 19 has a first support portion 91 that supports the first workpiece W1 and a second support portion 92 that supports the second workpiece W2. The first support portion 91 is positioned on top of the second support portion 92, and a passage region 93 is formed in the first support portion 91 through which the second workpiece W2 passes.

[0040] According to Appendix 1, the transport unit 19 can transport workpieces of different sizes, as it can not only place and support the first workpiece W1 on the first support section 91, but also place and support the second workpiece W2 on the second support section 92 through the passage area 93. The passage area 93 may be a through hole or a notch, as long as it penetrates vertically through the upper surface 91A and lower surface 91B of the first support section 91. Because the first support section 91 and the second support section 92 are arranged vertically, the area occupied by the transport unit 19 in plan view is small. The resin sealing device 1 can be configured compactly.

[0041] [Appendix 2] In Supplementary Note 1, the second support portion 92 may be provided with a second guide 96 that regulates the position of the second workpiece W2, and the second guide 96 may be disposed within the passage area in a plan view.

[0042] According to Appendix 2, the second guide 96 can be provided even if a passage area 93 is formed. Since the second workpiece W2 can be transported while its position is restricted by the second guide 96, temporary stopping of the resin sealing device 1 due to misalignment or the like is less likely to occur.

[0043] [Appendix 3] In Appendix 1 or 2, the first support portion 91 may be supported or fixed to the second support portion 92 by the contact portion 98 provided on the second support portion 92 contacting the lower surface 91B of the first support portion 91.

[0044] According to Supplementary Note 3, the first support portion 91 can be supported and fixed to the second support portion 92 more reliably.

[0045] [Appendix 4] In any one of the appendices 1 to 4, a lift mechanism 94 may be further provided that pushes the second workpiece W2 up to a position higher than the first support portion 91 by passing through the passage region 93.

[0046] According to Appendix 5, the pick-and-place mechanism 12 and the third loader hand 71 can transfer the second workpiece W2 at a position higher than the first support section 91. When transferring the second workpiece W2, it is not necessary to insert the tips of the pick-and-place mechanism 12 and the third loader hand 71 into the passage area 93, thus improving the flexibility of the device design. [Explanation of symbols]

[0047] 1... Resin sealing device, 2... Resin supply device, 3... First press device, 4... Second press device, 10... Conveying device, 11... Guide rail, 11A... Position opposite the resin sealing device, 11B... Position opposite the operator, 11C... Position opposite the second press device, 11D... Position opposite the first press device, 12... Pick and place mechanism, 13... Press loader unit, 13L... First press loader, 13R... Second press loader, 14... Third press loader, 19... Conveying unit (pallet), 21... Stage, 31... First mold, 32... Second mold, 33... Tie bar, 34L, 34R... Loader guide, 42... Third mold, 51 ...First loader hand, 52L, 52R...First guided part, 53...Stud bolt, 54...Rolling bearing, 61...Second loader hand, 62L, 62R...Second guided part, 71...Third loader hand, 91...First support part, 91A...Top surface, 91B...Bottom surface, 92...Second support part, 92N...Inside the passage area, 92T...Outside the passage area, 93...Passage area, 94...Lift mechanism, 95...First guide, 96...Second guide, 97...Through hole, 98...Contact part, D1...Distance from the first guided part, D2...Distance from the second guided part, D3...Distance from the loader guide, W1...First workpiece, W2...Second workpiece, X...Left-right direction, Y...Front-back direction, Z...Vertical direction (up and down direction).

Claims

1. a first press device capable of resin-sealing the first workpiece; a second press device capable of resin-sealing a second workpiece smaller than the first workpiece; a resin supplying device capable of supplying a resin material to the first workpiece and the second workpiece; a transport unit that is movable between the resin supply device and the first press device and the second press device, the transport unit has a first support part that supports the first workpiece and a second support part that supports the second workpiece, The first support portion is disposed on the second support portion, and a passage area through which the second work passes is formed in the first support portion. Resin sealing equipment.

2. A second guide that regulates the position of the second workpiece is provided on the second support portion, and the second guide is disposed within the passing area in a plan view. The resin sealing device according to claim 1 .

3. an abutting portion provided on the second support portion abuts against a lower surface of the first support portion, thereby supporting or fixing the first support portion to the second support portion; The resin sealing device according to claim 1 .

4. Further provided is a lift mechanism that passes through the passing area and pushes up the second workpiece to a position higher than the first support portion. The resin sealing device according to claim 1 .

Images