Magnetic field measuring device

Abstract

The objective is to obtain a magnetic field measuring device that can accurately position a high-frequency magnetic field generator so that the aforementioned microwaves are applied uniformly to a magnetic resonance member in an appropriate direction. [Solution] A high-frequency magnetic field generator applies microwaves to a magnetic resonance member 1 capable of quantum manipulation of electron spins using microwaves. An irradiation device irradiates the magnetic resonance member 1 with incident light of a specific wavelength. A light guide member 31 transmits the fluorescence emitted by the magnetic resonance member 1 and guides it away from the magnetic resonance member 1. The light guide member 31 has a flat plate shape with two opposing main surfaces, and the high-frequency magnetic field generator is equipped with coil patterns 2a and 2b arranged on the two main surfaces, respectively. The light guide member 31 is also equipped with a hole 32, and the magnetic resonance member 1 is positioned on the inner surface 32a of the hole 32. The light guide member 31 emits fluorescence from at least the side surface of the light guide member.

Description

Technical Field

[0001] The present invention relates to a magnetic field measuring device.

Background Art

[0002] A certain magnetic field measuring device performs magnetic measurement by optically detected magnetic resonance (ODMR) that utilizes the electron spin resonance of a sensing member such as a diamond structure having nitrogen and lattice defects (NV center: Nitrogen Vacancy Center) (see, for example, Patent Document 1). In ODMR, a static magnetic field is applied to a magnetic resonance member such as a diamond having such an NV center separately from the measured magnetic field, and laser light (excitation light for resetting the spin state and measurement light for fluorescence observation) and microwaves are applied in a predetermined sequence such as a Ramsey pulse sequence or a Hahn echo sequence, and the amount of fluorescence emitted from the magnetic resonance member is detected, and the magnetic flux density of the measured magnetic field is derived based on the amount of light.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The magnetic field measuring device described above includes a high-frequency magnetic field generator that applies the aforementioned microwaves to the magnetic resonance member in an appropriate direction. Furthermore, the magnetic field measuring device described above includes an optical system that guides the aforementioned excitation light to the magnetic resonance member and an optical system that guides the aforementioned fluorescence from the magnetic resonance member. Therefore, in order to measure the magnetic field with high accuracy, it is necessary to precisely position the high-frequency magnetic field generator so as to apply the aforementioned microwaves uniformly to the magnetic resonance member in an appropriate direction without interfering with the aforementioned optical system.

[0005] The present invention has been made in view of the above problems, and aims to provide a magnetic field measuring device that can accurately position a high-frequency magnetic field generator so as to uniformly apply the above-mentioned microwaves to a magnetic resonance member in an appropriate direction. [Means for solving the problem]

[0006] The magnetic field measuring device according to the present invention comprises a magnetic resonance member capable of quantum manipulation of electron spin with microwaves, a high-frequency magnetic field generator that applies microwaves to the magnetic resonance member, an irradiation device that irradiates the magnetic resonance member with incident light of a specific wavelength, and a light guide member that transmits and guides the fluorescence emitted by the magnetic resonance member. The light guide member has a flat plate shape with two opposing main surfaces, and the high-frequency magnetic field generator has coil patterns arranged on each of its two main surfaces. The light guide member also has a hole, and the magnetic resonance member is positioned on the inner surface of the hole. The light guide member emits fluorescence from at least its side surface. [Effects of the Invention]

[0007] According to the present invention, a magnetic field measuring device is obtained that can accurately position a high-frequency magnetic field generator so as to uniformly apply microwaves to a magnetic resonance member in an appropriate direction. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a block diagram showing the configuration of a magnetic field measuring device according to an embodiment of the present invention. [Figure 2]Figure 2 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 1. [Figure 3] Figure 3 is an exploded perspective view showing an example configuration of the magnetic sensor unit 10 shown in Figure 1. [Figure 4] Figure 4 is a side view showing an example of the optical system configuration in the magnetic sensor unit 10 shown in Figure 1. [Figure 5] Figure 5 is a side view showing another example of the optical system configuration in the magnetic sensor unit 10 shown in Figure 1. [Figure 6] Figure 6 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 2. [Figure 7] Figure 7 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 3. [Figure 8] Figure 8 is an exploded perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 3. [Figure 9] Figure 9 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 4. [Figure 10] Figure 10 is a cross-sectional view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 4. [Figure 11] Figure 11 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 5. [Figure 12] Figure 12 is a cross-sectional view showing another example of the reflective film provided on the auxiliary light guide member 71 in Embodiment 5. [Figure 13] Figure 13 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 6. [Figure 14] Figure 14 is a cross-sectional view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 6. [Figure 15] Figure 15 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 7. [Figure 16] Figure 16 is a cross-sectional view showing another example of the reflective film provided on the auxiliary light guide member 71 in Embodiment 7. [Figure 17]FIG. 17 is a perspective view showing a configuration example of the magnetic sensor unit 10 in Embodiment 8. [Figure 18] FIG. 18 is a cross-sectional view showing a configuration example of the magnetic sensor unit 10 in Embodiment 8. [Figure 19] FIG. 19 is a cross-sectional view showing an example of a reflection film provided on the auxiliary light guide member 71 in Embodiment 9. [Figure 20] FIG. 20 is a cross-sectional view showing another example of the reflection film provided on the auxiliary light guide member 71 in Embodiment 9. [Figure 21] FIG. 21 is a cross-sectional view showing a configuration example of the magnetic sensor unit 10 in Embodiment 10. [Figure 22] FIG. 22 is a cross-sectional view showing an example of a reflection film provided on the auxiliary light guide member 71 in Embodiment 11. [Figure 23] FIG. 23 is a cross-sectional view showing another example of the reflection film provided on the auxiliary light guide member 71 in Embodiment 11. [Figure 24] FIG. 24 is a perspective view showing a configuration example of the magnetic sensor unit 10 in Embodiment 12. [Figure 25] FIG. 25 is a top view showing a configuration example of the magnetic sensor unit 10 in Embodiment 12. [Figure 26] FIG. 26 is a block diagram showing the configuration of the magnetic field measurement device according to Embodiment 13 of the present invention. [Figure 27] FIG. 27 is a cross-sectional view showing an example of the primary coil 4a in FIG. 26. [Figure 28] FIG. 28 is a diagram for explaining the arrangement of the primary coil 4a with respect to the measurement object 101. [Figure 29] FIG. 29 is a perspective view showing the configuration of the magnetic sensor unit 10 in Embodiment 13. [Figure 30] FIG. 30 is a perspective view showing the configuration of the magnetic sensor unit 10 in Embodiment 14.

Embodiments for Carrying Out the Invention

[0009] Embodiments of the present invention will be described below with reference to the figures.

[0010] Embodiment 1.

[0011] Figure 1 is a block diagram showing the configuration of a magnetic field measuring device according to an embodiment of the present invention. The magnetic field measuring device shown in Figure 1 comprises a magnetic sensor unit 10, a high-frequency power supply 11, an irradiation device 12, a light receiving device 13, and a calculation processing device 14.

[0012] The magnetic sensor unit 10 detects the magnetic field to be measured (e.g., magnetic field strength, direction, etc.) at a predetermined location (e.g., on or above the surface of the object to be inspected). The magnetic field to be measured may be an AC magnetic field of a single frequency, or an AC magnetic field with a predetermined period having multiple frequency components.

[0013] In Embodiment 1, the magnetic sensor unit 10 comprises a magnetic resonance member 1, a high-frequency magnetic field generator 2, and a magnet 3.

[0014] The magnetic resonance member 1 has a crystalline structure and is a member capable of electron spin quantum manipulation (based on Rabi oscillations) using microwaves of a frequency corresponding to the alignment direction of defects and impurities in the crystal lattice. In this embodiment, the magnetic resonance member 1 is a photodetector magnetic resonance member having a plurality (i.e., an ensemble) of specific color centers, which generates fluorescence in response to a magnetic field applied to the magnetic resonance member 1. These specific color centers have Zeeman splitting energy levels, and can take on multiple orientations in which the energy level shift width during Zeeman splitting is different from that of the others.

[0015] Here, the magnetic resonance member 1 is a material such as diamond containing multiple NV (Nitrogen Vacancy) centers as a single type of specific color center. In the case of NV centers, the ground state is a triplet state with ms=0,+1,-1, and the levels at ms=+1 and ms=-1 undergo Zeeman splitting. Note that the color centers included in the magnetic resonance member 1 may be color centers other than NV centers.

[0016] The high-frequency magnetic field generator 2 applies the aforementioned microwaves to the magnetic resonance member 1.

[0017] Furthermore, magnet 3 applies a static magnetic field (DC magnetic field) to the magnetic resonance member 1. Here, magnet 3 is a ring-shaped permanent magnet, such as a ferrite magnet, alnico magnet, or samarium-cobalt magnet.

[0018] The magnetic resonance member 1 is equipped with multiple color centers (in this case, NV centers) capable of electron spin quantum manipulation using the microwaves described above. The magnet 3 applies a substantially uniform static magnetic field to a predetermined region of the magnetic resonance member 1 (the irradiation region of the excitation light and measurement light), causing Zeeman splitting of the energy levels of multiple specific color centers (in this case, multiple NV centers) within the magnetic resonance member 1. For example, the static magnetic field is applied such that the difference or ratio between the maximum and minimum values ​​of the static magnetic field strength in that predetermined region is less than or equal to a predetermined value.

[0019] In the case of NV centers, color centers are formed in a diamond crystal by defects (vacancies) (V) and nitrogen (N) as impurities. There are four possible positions for adjacent nitrogen (N) atoms relative to a defect (vacancy) (V) in the diamond crystal (i.e., the alignment direction of pairs of vacancies and nitrogen atoms), and the sub-levels after Zeeman splitting (i.e., energy levels from the ground) corresponding to each of these alignment directions are all different. Therefore, in the characteristics of fluorescence intensity after Zeeman splitting due to a static magnetic field with respect to microwave frequency, four distinct dip frequency pairs (fi+, fi-) appear, corresponding to each direction i (i=1,2,3,4). Here, the microwave frequency (wavelength) is set corresponding to one of these four dip frequency pairs.

[0020] Furthermore, the high-frequency power supply 11 generates the microwave current described above and supplies it to the high-frequency magnetic field generator 2.

[0021] Furthermore, an irradiation device 12 and a light receiving device 13 are provided as detection devices for detecting fluorescence generated from the magnetic resonance member 1 in response to the magnetic field being measured.

[0022] The irradiation device 12 generates laser light as incident light to be irradiated onto the magnetic resonance member 1 (in this case, excitation light of a predetermined wavelength for ODMR and measurement light of a predetermined wavelength), and irradiates the magnetic resonance member 1, which serves as a photodetector magnetic resonance member, through the optical system described later.

[0023] Furthermore, the light receiving device 13 detects the fluorescence emitted from the magnetic resonance member 1 via the optical system described later when the measurement light is irradiated.

[0024] The arithmetic processing unit 14 includes, for example, a computer, and executes programs on the computer to operate as various processing units. In this embodiment, the arithmetic processing unit 14 stores the detected optical or electrical signal data in a storage device (such as memory) not shown, and performs control and calculation operations as a measurement control unit 14a and an arithmetic unit 14b.

[0025] The measurement control unit 14a controls the high-frequency power supply 11 and identifies the detected value of the physical event (in this case, fluorescence intensity) detected by the detection device (in this case, the irradiation device 12 and the light receiving device 13).

[0026] In this embodiment, the measurement control unit 14a controls the high-frequency power supply 11 and the irradiation device 12 according to a predetermined measurement sequence, for example based on ODMR, and determines the amount of detected light from the fluorescence detected by the light receiving device 13. For example, the irradiation device 12 is equipped with a laser diode or the like as a light source, and the light receiving device 13 is equipped with a photodiode or the like as a light receiving element, and the measurement control unit 14a determines the above-mentioned amount of detected light based on the output signal of the light receiving device 13 obtained by amplifying the output signal of the light receiving element.

[0027] The calculation unit 14b calculates the magnetic field to be measured (intensity, waveform, etc.) at the measurement position based on the detected values ​​obtained by the measurement control unit 14a and stored in the memory.

[0028] The measurement sequence described above is set according to the frequency of the magnetic field being measured. For example, if the magnetic field being measured is a DC magnetic field, the Ramsay pulse sequence is applied to this measurement sequence. Also, for example, if the magnetic field being measured is a relatively high-frequency AC magnetic field, the spin echo pulse sequence (such as the Hahn echo sequence) is applied to this measurement sequence. However, the measurement sequence is not limited to these. Furthermore, for example, if the magnetic field being measured is a relatively low-frequency AC magnetic field, the magnetic field may be measured multiple times using the Ramsay pulse sequence (i.e., the DC magnetic field measurement sequence) during one period of the magnetic field being measured, and the magnetic field being measured (intensity, waveform, etc.) may be identified based on the results of these magnetic field measurements.

[0029] The details of the magnetic sensor unit 10 will be described below.

[0030] Figure 2 is a perspective view showing an example configuration of the magnetic sensor unit 10 in Embodiment 1. Figure 3 is an exploded perspective view showing an example configuration of the magnetic sensor unit 10 shown in Figure 1. Figure 4 is a side view showing an example configuration of the optical system in the magnetic sensor unit 10 shown in Figure 1. Figure 5 is a side view showing another example configuration of the optical system in the magnetic sensor unit 10 shown in Figure 1.

[0031] For example, as shown in Figures 2 and 3, the magnetic sensor unit 10 includes a magnetic resonance member 1, a pair of coil patterns 2a and 2b as a high-frequency magnetic field generator 2, and a light guide member 31.

[0032] The light guide member 31 transmits the fluorescence emitted by the magnetic resonance member 1 and guides it away from the magnetic resonance member 1. The light guide member 31 is a material that is transparent to the fluorescence wavelength band (here, 500 to 900 nm) and does not emit fluorescence, and in this case, it is a glass material such as quartz glass, synthetic quartz glass, inorganic alkali glass, borosilicate glass, or sapphire glass. The light guide member 31 has a flat plate shape with two opposing main surfaces 31a and 31b and is provided with a hole 32. Here, the hole 32 is a through hole perpendicular to the main surfaces 31a and 31b. Note that the hole 32 does not have to penetrate the light guide member 31.

[0033] The magnetic resonance member 1 is positioned on the inner surface 32a of the hole 32. Specifically, the magnetic resonance member 1 has, for example, a roughly rectangular plate shape, and one surface of the magnetic resonance member 1 is in surface contact with or surface-bonded to the inner surface 32a. For example, the magnetic resonance member 1 is fixed to the inner surface 32a with an optical adhesive. Note that the part of the inner surface of the hole 32 other than the part to which the magnetic resonance member 1 is fixed may be a flat surface or a curved surface.

[0034] Here, since the refractive index of the light guide member 31 is closer to that of the magnetic resonance member 1 (such as diamond) than to that of air, most of the fluorescence generated within the magnetic resonance member 1 is emitted from the magnetic resonance member 1 to the light guide member 31 via the junction (contact) portion between the light guide member 31 and the magnetic resonance member 1. This fluorescence then travels through the light guide member 31. The light guide member 31 then emits the aforementioned fluorescence from at least its side surface 31c. For example, as shown in Figure 3, the side surface 31c is the side surface that, when viewed from the magnetic resonance member 1, is in the direction of the inner surface 32a to which the magnetic resonance member 1 is fixed. The aforementioned fluorescence enters the light guide member 31 from the magnetic resonance member 1 via the inner surface 32a, travels through the light guide member 31, and is emitted from the side surface 31c.

[0035] Furthermore, the high-frequency magnetic field generator 2 includes a pair of coil patterns 2a and 2b, as shown in Figures 2 and 3, for example. The coil patterns 2a and 2b are plate-shaped conductors, respectively, arranged on the two main surfaces 31a and 31b of the light guide member 31. As a result, the coil patterns 2a and 2b are arranged substantially parallel to each other. For example, the coil patterns 2a and 2b may also be wiring patterns formed on the light guide member 31, which is a glass wiring substrate.

[0036] Each coil pattern 2a and 2b is a plate-shaped coil, comprising a notched ring-shaped (approximately circular) coil portion 21 that emits microwaves into its hollow portion, and a pair of terminal portions 22 extending linearly from both ends of the coil portion 21. The terminal portions 22 of coil patterns 2a and 2b are electrically connected by through-holes 33. The high-frequency power supply 11 generates a high-frequency current of microwaves and conducts it to the high-frequency magnetic field generator 2 (coil patterns 2a and 2b). The coil portions 21 of coil patterns 2a and 2b conduct two parallel currents at a predetermined interval so as to sandwich the magnetic resonance member 1, thereby emitting the aforementioned microwaves. As a result, microwaves of approximately uniform intensity are applied to the magnetic resonance member 1.

[0037] Here, the hole 32 is formed such that, in a direction parallel to the main surfaces 31a and 31b of the light guide member 31, the magnetic resonance member 1 fixed to the inner surface 32a is positioned approximately at the center of the hollow portion of the coil patterns 2a and 2b. To achieve this, the coil patterns 2a and 2b may be positioned by through-holes 33 or the like in a direction parallel to the main surfaces 31a and 31b of the light guide member 31.

[0038] Furthermore, for example, the magnet 3 is a ring-shaped magnet, and a light guide member 31 on which the magnetic resonance member 1 and coil patterns 2a and 2b are mounted is arranged in the hollow part of the ring-shaped magnet. In addition, the magnet 3 is arranged such that the magnetic resonance member 1 is positioned at the center of the width of the ring-shaped magnet 3 (that is, the magnetic resonance member 1 is positioned at approximately equidistant distances from both end faces of the magnet 3). In this case, the direction of the magnetic field under measurement is the same as the direction in which the static magnetic field is applied by the magnet 3, and the application of this static magnetic field enhances the change in fluorescence intensity at the dip frequency, thereby increasing sensitivity.

[0039] Furthermore, in the magnetic resonance member 1, the crystal of the magnetic resonance member 1 is formed such that the alignment direction of the defects and impurities described above substantially coincides with the direction of the static magnetic field (and the direction of the magnetic field being measured), thereby setting the orientation of the magnetic resonance member 1. The angle (absolute value) between the alignment direction of the defects and impurities described above and the direction of the static magnetic field (and the direction of the magnetic field being measured) is preferably 8 degrees or less, and most preferably 0 degrees. Also, the angle (absolute value) between the direction of the static magnetic field and the direction of the magnetic field being measured is preferably 8 degrees or less, and most preferably 0 degrees.

[0040] For example, as shown in Figure 4, the fluorescence emitted from the magnetic resonance member 1 is focused from the magnetic resonance member 1 towards the light receiving device 13 via the light guide member 31 and the long-pass filter 40 which transmits the fluorescence and attenuates the incident light. The end face 31c of the light guide member 31 may be in surface contact with the end face of the long-pass filter 40 or surface-bonded (for example, with an optical adhesive). This long-pass filter 40 prevents the incident light (i.e., the residual component that has passed through the magnetic resonance member 1) from entering the light receiving device 13.

[0041] Alternatively, as shown in Figure 5, for example, the fluorescence emitted by the magnetic resonance member 1 may be focused from the magnetic resonance member 1 towards the light receiving device 13 via the light guide member 31 and a predetermined optical system 41. For example, the optical system 41 includes composite parabolic condensers (CPCs) 41a and 41b. Note that this optical system 41 may have other lens configurations. The end face 31c of the light guide member 31 is in surface contact with or surface-bonded (for example, with an optical adhesive) to the end face of the CPC 41a, and the fluorescence guided by the light guide member 31 enters the interior of the CPC 41a through this end face.

[0042] This optical system 41 is designed to prevent the incident light (i.e., the residual component that has passed through the magnetic resonance member 1) from entering the photodetector 13. Specifically, as shown in Figure 5, for example, the optical system 41 is provided with a dichroic mirror 41c that transmits the fluorescence and reflects the incident light, and / or a long-pass filter 41d that transmits the fluorescence and attenuates the incident light. The incident light reflected by the dichroic mirror 41c is detected by a reference photodetector 13a, and the calculation unit 14b corrects the measured value of the magnetic field under measurement based on the amount of incident light detected by the reference photodetector 13a (for example, the deviation from a predetermined reference light amount).

[0043] In Embodiment 1, the irradiation device 12 causes the incident light described above to enter the light guide member 31 via a side surface other than the side surface 31c, and irradiates the magnetic resonance member 1 through the light guide member 31. As a result, the incident light travels through the inside of the light guide member 31 toward the magnetic resonance member 1.

[0044] Furthermore, a magnetic shield is provided around the magnetic resonance member 1 in the magnetic sensor unit 10 to prevent external magnetic fields from being directly applied to the magnetic resonance member 1.

[0045] Next, the operation of the magnetic field measuring device according to Embodiment 1 will be described.

[0046] In Embodiment 1, the magnetic sensor unit 10 is placed within the magnetic field to be measured, and the magnetic field to be measured is applied to the magnetic resonance member 1. In addition, a substantially uniform static magnetic field is applied to the magnetic resonance member 1.

[0047] The measurement control unit 14a then controls the high-frequency power supply 11 and the irradiation device 12 to apply microwaves from the high-frequency magnetic field generator 2 to the magnetic resonance member 1, and to apply laser light (excitation light and measurement light) from the irradiation device 12 to the magnetic resonance member 1 via the light guide member 31, according to a predetermined measurement sequence.

[0048] As a result, the magnetic resonance member 1 emits fluorescence corresponding to the magnetic field being measured, according to a predetermined measurement sequence. This fluorescence enters the light guide member 31 from the magnetic resonance member 1, travels through the light guide member 31 and the optical system 41, and enters the light receiving device 13.

[0049] The light receiving device 13 receives this fluorescence and outputs an electrical signal corresponding to the amount of light (fluorescence intensity) of the fluorescence. The measurement control unit 14a acquires this electrical signal, and the calculation unit 14b performs calculations corresponding to the measurement sequence based on the detected fluorescence intensity to determine the magnetic field (intensity, direction, etc.) at the measurement location.

[0050] As a result, the magnetic field at the measurement location is measured by the magnetic sensor unit 10 (i.e., the magnetic resonance member 1). Alternatively, the magnetic sensor unit 10 may be scanned along a predetermined scanning path pattern, and the above-described magnetic field measurements may be performed at multiple measurement locations along the scanning path.

[0051] As described above, according to Embodiment 1, the high-frequency magnetic field generator 2 applies microwaves to a magnetic resonance member 1 capable of quantum manipulation of electron spins with microwaves. The irradiation device 12 irradiates the magnetic resonance member 1 with incident light of a specific wavelength. The light guide member 31 transmits the fluorescence emitted by the magnetic resonance member 1 and guides it away from the magnetic resonance member 1. The light guide member 31 has a flat plate shape with two opposing main surfaces, and the high-frequency magnetic field generator 2 is equipped with coil patterns 2a and 2b arranged on the two main surfaces, respectively. The light guide member 31 is also equipped with a hole 32, and the magnetic resonance member 1 is positioned on the inner surface 32a of the hole 32. The light guide member 31 emits fluorescence from at least the side surface of the light guide member.

[0052] As a result, the coil patterns 2a and 2b are mounted on the main surfaces 31a and 31b of the flat light guide member 31, making positioning easier and allowing the high-frequency magnetic field generator 2 (coil patterns 2a and 2b) to be precisely positioned to apply microwaves uniformly to the magnetic resonance member 1 in the appropriate direction.

[0053] Embodiment 2.

[0054] Figure 6 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 2.

[0055] In Embodiment 2, the terminal portion 22 of the coil pattern 2a is provided with a capacitive pattern 51 that forms a resonant circuit with the coil portions 21 of the coil patterns 2a and 2b. For example, as shown in Figure 6, the capacitive pattern 51 is formed by extending the substantially parallel terminal portions 22. The capacitance from the capacitive pattern 51 is added in parallel to the coil portion 21, forming an LC resonant circuit. The shape of the capacitive pattern 41 is designed such that the microwave frequency mentioned above is included in a predetermined band of the resonant frequency of the resonant circuit.

[0056] This increases the intensity of the microwaves applied to the magnetic resonance member 1.

[0057] The other configurations and operations of the magnetic field measuring device according to Embodiment 2 are the same as those of any of the other embodiments, so their description will be omitted.

[0058] Embodiment 3.

[0059] Figure 7 is a perspective view showing an example configuration of the magnetic sensor unit 10 in Embodiment 3. Figure 8 is an exploded perspective view showing an example configuration of the magnetic sensor unit 10 in Embodiment 3. For example, as shown in Figures 7 and 8, in Embodiment 3, the magnetic sensor unit 10 includes a base substrate 61. The base substrate 61 may be, for example, an opaque printed circuit board and includes a wiring pattern 62. The wiring pattern 62 is electrically connected to the high-frequency power supply 11. For example, as shown in Figures 7 and 8, the light guide member 31 is arranged on the base substrate 61 such that the wiring pattern 62 is electrically connected to the terminal portion 22 of the coil pattern 2b on the main surface 31b. As a result, the microwave current generated by the high-frequency power supply 11 conducts to the coil pattern 2b via the wiring pattern 62, and further conducts to the coil pattern 2a via the through-hole 33.

[0060] Furthermore, the base substrate 61 is provided with a positioning pattern 63 along with a wiring pattern 62, and the main surface 31b of the light guide member 31 is provided with a positioning pattern 64 corresponding to the positioning pattern 63. The light guide member 31 is positioned on the base substrate 61 such that the position of the positioning pattern 63 coincides with the position of the positioning pattern 64. This ensures that the terminal portion 22 of the coil pattern 2b is properly electrically connected to the wiring pattern 62.

[0061] The other configurations and operations of the magnetic field measuring device according to Embodiment 3 are the same as those of any of the other embodiments, so their description will be omitted.

[0062] Embodiment 4.

[0063] Figure 9 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 4. Figure 10 is a cross-sectional view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 4. Figure 10 shows the AA cross-section in Figure 9. For example, as shown in Figures 9 and 10, in Embodiment 4, the magnetic sensor unit 10 further includes an auxiliary light guide member 71 that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member 1. The auxiliary light guide member 71 is positioned opposite one of the two main surfaces of the light guide member 31.

[0064] In Embodiment 4, the height of the magnetic resonance member 1 in the thickness direction of the light guide member 31 is greater than the height of the hole 32 of the light guide member 31, and the auxiliary light guide member 71 is provided with a housing portion 72 that accommodates the portion of the magnetic resonance member 1 that protrudes from the hole 32.

[0065] Furthermore, in Embodiment 4, the housing portion 72 is a recess having an inner surface 72a that is coplanar with the inner surface 32a of the hole 32, and the magnetic resonance member 1 is arranged on the inner surface 32a of the hole 32 and the inner surface 72a of the recess.

[0066] For example, some of the fluorescence emitted by the magnetic resonance member 1 that travels toward the auxiliary light guide member 71 enters the auxiliary light guide member 71, travels through the auxiliary light guide member 71 and the optical system 41, and enters the light receiving device 13. In this case, the auxiliary light guide member 71, like the light guide member 31, is a material that is transparent to the wavelength band of the fluorescence and does not generate fluorescence, and in this case, it is a glass material as described above. As a result, the amount of fluorescence received by the light receiving device 13 increases.

[0067] Alternatively, some of the fluorescence emitted by the magnetic resonance member 1 that travels toward the auxiliary light guide member 71 is reflected by the auxiliary light guide member 71, enters the light guide member 31, travels through the light guide member 31 and the optical system 41, and enters the light receiving device 13. This increases the amount of fluorescence received by the light receiving device 13.

[0068] In this embodiment, for example, the end face 31c of the light guide member 31 and the end face 71a of the auxiliary light guide member 71 are in surface contact or surface bonding with the end faces of the long-pass filter 40 and CPC 41a. As a result, the fluorescence guided by the light guide member 31 and the fluorescence guided by the auxiliary light guide member 71 are incident on the long-pass filter 40 and CPC 41a through these end faces.

[0069] The other configurations and operations of the magnetic field measuring device according to Embodiment 4 are the same as those of any of the other embodiments, so their description will be omitted.

[0070] Embodiment 5.

[0071] Figure 11 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 5. Figure 12 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 5.

[0072] For example, as shown in Figure 11, in Embodiment 5, the auxiliary light guide member 71 (a) has a flat plate shape with two opposing main surfaces, (b) is provided with a reflective film 73 that follows the surface shape of the main surface 71b that does not face the light guide member 31, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member 1 while reflecting it with the reflective film 73. As a result, the fluorescence received by the photodetector 13 via the light guide member 31, the auxiliary light guide member 71, and the optical system 41 increases.

[0073] Alternatively, as shown in Figure 12, for example, in Embodiment 5, the auxiliary light guide member 71 (a) has a flat plate shape with two opposing main surfaces, (b) is provided with a reflective film 73 that conforms to the surface shape of the main surface 71c (including the housing portion 72) that faces the light guide member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 to the light guide member 31. As a result, the fluorescence received by the photodetector 13 via the light guide member 31 and the optical system 41 increases. In this case, the auxiliary light guide member 71 does not have to be transparent.

[0074] For example, the reflective film 73 is a dielectric multilayer film, and this dielectric multilayer film reflects light of the fluorescence wavelength described above.

[0075] The other configurations and operations of the magnetic field measuring device according to Embodiment 5 are the same as those of Embodiment 4, so their description will be omitted.

[0076] Embodiment 6.

[0077] Figure 13 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 6. Figure 14 is a cross-sectional view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 6. Figure 14 shows the AA section in Figure 13. In Embodiment 6, the housing portion 72 is a groove that extends to the side surface 71a of the auxiliary light guide member 71, for example, as shown in Figures 13 and 14.

[0078] For example, some of the fluorescence emitted by the magnetic resonance member 1 that travels toward the auxiliary light guide member 71 travels through the grooves of the auxiliary light guide member 71 and enters the optical system 41, travels within the optical system 41 and enters the light receiving device 13, or enters the auxiliary light guide member 71, travels within the auxiliary light guide member 71 and the optical system 41 and enters the light receiving device 13.

[0079] The other configurations and operations of the magnetic field measuring device according to Embodiment 6 are the same as those of Embodiment 4, so their description will be omitted.

[0080] Embodiment 7.

[0081] Figure 15 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 7. Figure 16 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 7.

[0082] For example, as shown in Figure 15, in Embodiment 7, the auxiliary light guide member 71 (a) has a flat plate shape with two opposing main surfaces, (b) is provided with a reflective film 73 that conforms to the surface shape of the main surface 71b of the two main surfaces that does not face the light guide member 31, and (c) reflects and transmits a portion of the fluorescence emitted by the magnetic resonance member 1 with the reflective film 73, or reflects it with the reflective film 73 to propagate through the grooves described above. As a result, similar to Embodiment 5, the amount of fluorescence received by the light receiving device 13 increases.

[0083] Alternatively, as shown in Figure 16, for example, in Embodiment 7, the auxiliary light guide member 71 (a) has a flat plate shape with two opposing main surfaces, (b) is provided with a reflective film 73 that conforms to the surface shape of the main surface 71c (including a accommodating portion 72 such as a groove) that faces the light guide member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 to the groove or the light guide member 31. As a result, similar to Embodiment 5, the fluorescence received by the light receiving device 13 increases. In this case, the auxiliary light guide member 71 does not have to be transparent.

[0084] For example, the reflective film 73 is a dielectric multilayer film, and this dielectric multilayer film reflects light of the fluorescence wavelength described above.

[0085] The other configurations and operations of the magnetic field measuring device according to Embodiment 7 are the same as those of Embodiment 6, so their description will be omitted.

[0086] Embodiment 8.

[0087] Figure 17 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 8. Figure 18 is a cross-sectional view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 8. Figure 18 shows the AA section in Figure 17. In Embodiment 8, the housing portion 72 is a groove extending from one of the two sides 71a and 71d of the auxiliary light guide member 71 to the other, as shown in Figures 17 and 18, for example.

[0088] For example, some of the fluorescence emitted by the magnetic resonance member 1 that travels toward the auxiliary light guide member 71 travels along the grooves of the auxiliary light guide member 71 and enters the optical system 41, travels within the optical system 41 and enters the light receiving device 13, or enters the auxiliary light guide member 71, travels within the auxiliary light guide member 71 and the optical system 41 and enters the light receiving device 13. In this case, for example, the optical system 41 and the light receiving device 13 are provided on both sides of the auxiliary light guide member 71, respectively, so that some of the fluorescence traveling toward one side along the grooves and some of the fluorescence traveling toward the other side along the grooves are detected by the light receiving device 13.

[0089] The other configurations and operations of the magnetic field measuring device according to Embodiment 8 are the same as those of Embodiment 4, so their description will be omitted.

[0090] Embodiment 9.

[0091] Figure 19 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 9. Figure 20 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 9.

[0092] For example, as shown in Figure 19, in Embodiment 9, the auxiliary light guide member 71 (a) has a flat plate shape with two opposing main surfaces, (b) is provided with a reflective film 73 that conforms to the surface shape of the main surface 71b of the two main surfaces that does not face the light guide member 31, and (c) reflects and transmits a portion of the fluorescence emitted by the magnetic resonance member 1 with the reflective film 73, or reflects it with the reflective film 73 to propagate through the grooves described above. As a result, similar to Embodiments 5 and 7, the amount of fluorescence received by the light receiving device 13 increases.

[0093] Alternatively, as shown in Figure 20, for example, in Embodiment 9, the auxiliary light guide member 71 (a) has a flat plate shape with two opposing main surfaces, (b) is provided with a reflective film 73 that conforms to the surface shape of the main surface 71c (including a housing portion 72 such as a groove) that faces the light guide member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 to the aforementioned groove or light guide member 31. As a result, similar to Embodiments 5 and 7, the fluorescence received by the light receiving device 13 increases. In this case, the auxiliary light guide member 71 does not have to be transparent.

[0094] For example, the reflective film 73 is a dielectric multilayer film, and this dielectric multilayer film reflects light of the fluorescence wavelength described above.

[0095] The other configurations and operations of the magnetic field measuring device according to Embodiment 9 are the same as those of Embodiment 8, so their description will be omitted.

[0096] Embodiment 10.

[0097] Figure 21 is a cross-sectional view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 10. In Embodiment 10, for example, as shown in Figure 21, the height of the magnetic resonance member 1 in the thickness direction of the light guide member 31 is less than or equal to the height of the hole 32 in the light guide member 31. For this reason, in Embodiment 10, the housing portion 72 described above is not provided in the auxiliary light guide member 71.

[0098] For example, some of the fluorescence emitted by the magnetic resonance member 1 that travels toward the auxiliary light guide member 71 enters the auxiliary light guide member 71, travels through the auxiliary light guide member 71 and the optical system 41, and enters the light receiving device 13. In this case, the auxiliary light guide member 71, like the light guide member 31, is a material that is transparent to the wavelength band of the fluorescence described above and does not generate fluorescence, and in this case, it is a glass material as described above.

[0099] Alternatively, some of the fluorescence emitted by the magnetic resonance member 1 that travels toward the auxiliary light guide member 71 is reflected by the auxiliary light guide member 71, enters the light guide member 31, travels through the light guide member 31 and the optical system 41, and enters the light receiving device 13.

[0100] The other configurations and operations of the magnetic field measuring device according to Embodiment 10 are the same as those of Embodiment 4, so their description will be omitted.

[0101] Embodiment 11.

[0102] Figure 22 is a cross-sectional view showing an example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 11. Figure 23 is a cross-sectional view showing another example of a reflective film provided on the auxiliary light guide member 71 in Embodiment 11.

[0103] For example, as shown in Figure 22, in Embodiment 11, the auxiliary light guide member 71 (a) has a flat plate shape with two opposing main surfaces, (b) is provided with a reflective film 73 that follows the surface shape of the main surface 71b that does not face the light guide member 31, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member 1 while reflecting it with the reflective film 73. As a result, similar to Embodiments 5, 7, and 9, the amount of fluorescence received by the light receiving device 13 increases.

[0104] Alternatively, as shown in Figure 23, for example, in Embodiment 11, the auxiliary light guide member 71 (a) has a flat plate shape with two opposing main surfaces, (b) is provided with a reflective film 73 that conforms to the surface shape of the main surface 71c facing the light guide member 31, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member 1 to the light guide member 31. As a result, similar to Embodiments 5, 7, and 9, the fluorescence received by the light receiving device 13 increases. In this case, the auxiliary light guide member 71 does not have to be transparent.

[0105] For example, the reflective film 73 is a dielectric multilayer film, and this dielectric multilayer film reflects light of the fluorescence wavelength described above.

[0106] The other configurations and operations of the magnetic field measuring device according to Embodiment 11 are the same as those of Embodiment 10, so their description will be omitted.

[0107] Embodiment 12.

[0108] Figure 24 is a perspective view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 12. Figure 25 is a top view showing an example of the configuration of the magnetic sensor unit 10 in Embodiment 12. For example, as shown in Figures 24 and 25, in Embodiment 12, the light guide member 31 has a slit 31a from the side of the light guide member 31 to the hole 32, along the optical path of the incident light (excitation light, measurement light, etc.) to the magnetic resonance member 1. In other words, in other embodiments, the incident light enters the magnetic resonance member 1 via the light guide member 31, but in Embodiment 12, the incident light enters the magnetic resonance member 1 without going through the light guide member 31.

[0109] The other configurations and operations of the magnetic field measuring device according to Embodiment 12 are the same as those of any of the other embodiments, so their description will be omitted.

[0110] Embodiment 13.

[0111] Figure 26 is a block diagram showing the configuration of a magnetic field measuring device according to Embodiment 13 of the present invention. In Embodiment 13, for example, as shown in Figure 26, the magnetic sensor unit 10 further comprises a flux transformer 4. The flux transformer 4 comprises a primary coil 4a and a secondary coil 4b. The primary coil 4a senses the magnetic field to be measured, and the secondary coil 4b applies an applied magnetic field corresponding to the sensed magnetic field to be measured to the magnetic resonance member 1. The secondary coil 4b is electrically connected to the primary coil 4a by a cable (coaxial cable, Litz wire, etc.).

[0112] Figure 27 is a cross-sectional view showing an example of the primary coil 4a in Figure 26. Figure 28 is a diagram illustrating the arrangement of the primary coil 4a with respect to the object to be measured 101. As shown in Figure 27, the primary coil 4a is composed of windings of 0.5 to several tens of turns. Also, as shown in Figure 28, the primary coil 4a senses the magnetic field to be measured at a predetermined measurement position above the object to be measured 101, for example, and the secondary coil 4b applies an applied magnetic field (magnetic field transmitted from the measurement position by the flux transformer 4) corresponding to the magnetic field to be measured sensed at that measurement position to the magnetic resonance member 1. In other words, the primary coil 4a induces an electrical signal corresponding to the sensed magnetic field to be measured, and the secondary coil 4b induces an applied magnetic field corresponding to that electrical signal.

[0113] Figure 29 is a perspective view showing the configuration of the magnetic sensor unit 10 in Embodiment 13. For example, as shown in Figure 29, the secondary coil 4b is wound along the outer circumference of the light guide member 31, the auxiliary light guide member 71, and the base substrate 61. Here, for example, as shown in Figure 29, the secondary coil 4b is wound on the sides of the light guide member 31, the auxiliary light guide member 71, and the base substrate 61, excluding the sides through which incident light and fluorescence pass.

[0114] If the aforementioned auxiliary light guide member 71 is not provided, the secondary coil 4b is wound along the outer circumference of the light guide member 31 and the base substrate 61.

[0115] In this embodiment, the secondary coil 4b is a bobbinless coil, and is positioned such that its central axis substantially coincides with the center of the magnetic resonance member 1, and is substantially perpendicular to the central axis of the coil portion 21 of the high-frequency magnetic field generator 2. As a result, the direction of the microwaves (magnetic field) from the high-frequency magnetic field generator 2 is substantially perpendicular to the direction of the magnetic field from the secondary coil 4b. Furthermore, in the direction of the central axis of the secondary coil 4b of the transformer 4, the magnetic resonance member 1 is positioned substantially at the center in the width direction of the secondary coil 4b.

[0116] The secondary coil 4b is wound in a ring shape with a predetermined turns ratio to the primary coil 4a. When the secondary coil 4b is made of thin wire and has many turns, in order to prevent the coil wire from unraveling, for example, self-fusing wire can be used for the coil wire, or the coil wire can be wound around a bobbin jig, coated with adhesive, and then the bobbin jig can be removed to form a bobbinless secondary coil 4b.

[0117] Furthermore, the secondary coil 4b may be wound on a bobbin. In this case, the bobbin has a through hole, and the light guide member 31, auxiliary light guide member 71, and base substrate 61, on which the magnetic resonance member 1 and coil patterns 2a and 2b are mounted, are placed in the through hole. If the auxiliary light guide member 71 is not present, the light guide member 31 and base substrate 61, on which the magnetic resonance member 1 and coil patterns 2a and 2b are mounted, are placed in the through hole.

[0118] Note that the secondary coil 4b may also be a multi-layer wound coil.

[0119] Next, the operation of the magnetic field measuring device according to Embodiment 13 will be described.

[0120] For example, as shown in Figure 28, the primary coil 4a of the flux transformer 4 in the magnetic sensor unit 10 is positioned at a desired measurement position and in a desired orientation relative to the object to be measured 101. As a result, the magnetic field to be measured is sensed by the primary coil 4a, the applied magnetic field is induced by the secondary coil 4b, and this applied magnetic field is then applied to the magnetic resonance member 1 as the magnetic field to be measured.

[0121] The calculation unit 14b determines the applied magnetic field by performing calculations corresponding to the measurement sequence based on the detected fluorescence intensity value described above, and converts the determined applied magnetic field into the magnetic field to be measured (intensity, direction, etc.) at the measurement location based on the winding ratio of the transformer 4, etc.

[0122] As a result, the magnetic sensor unit 10 (i.e., the magnetic resonance member 1) measures the magnetic field at the measurement location. Alternatively, the magnetic sensor unit 10 (primary coil 4a) may be scanned along a predetermined scanning path pattern, and the above-described magnetic field measurements may be performed at multiple measurement locations along the scanning path.

[0123] The other configurations and operations of the magnetic field measuring device according to Embodiment 13 are the same as those of any of the other embodiments, so their description will be omitted.

[0124] Embodiment 14.

[0125] Figure 30 is a perspective view showing the configuration of the magnetic sensor unit 10 in Embodiment 14. For example, as shown in Figure 30, in Embodiment 14, the base substrate 61 is provided with a positioning groove 61a for applying the magnetic field applied to the secondary coil 4b to the magnetic resonance member 1, and the secondary coil 4b is wound so as to pass through this positioning groove 61a. Specifically, the positioning groove 61a is formed on two opposing sides of the base substrate 61. This makes it easier to position the secondary coil 4b so that the magnetic resonance member 1 is located approximately at the center of the secondary coil 4b in the axial direction.

[0126] The other configurations and operations of the magnetic field measuring device according to Embodiment 14 are the same as those of Embodiment 13, so their description will be omitted.

[0127] Furthermore, various changes and modifications to the embodiments described above will be obvious to those skilled in the art. Such changes and modifications may be made without deviating from the spirit and scope of the subject matter and without diminishing the intended advantages. In other words, such changes and modifications are intended to be included in the claims.

[0128] For example, in any of the above embodiments, the magnet 3 may be an electromagnet.

[0129] Furthermore, in any of the above embodiments, a reflective film (such as a dielectric multilayer film) may be provided on the sides of the light guide member 31 other than the side 31c (i.e., the side that does not emit fluorescence) or on part or all of the main surface. Also, in any of the above embodiments, a reflective film (such as a dielectric multilayer film) may be provided on the sides of the auxiliary light guide member 71 other than the side that emits fluorescence. In addition, the light guide member 31 and the auxiliary light guide member 71 may be made of transparent resin. Furthermore, a reflective film (such as a dielectric multilayer film) may be provided on the sides of the CPC 41a and 41b. [Industrial applicability]

[0130] The present invention can be applied, for example, to a magnetic measuring device. [Explanation of symbols]

[0131] 1. Magnetic resonance member 2. High-frequency magnetic field generator 2a, 2b Coil Pattern 4 Flux Transformers 4a Primary coil 4b Secondary coil 21 Coil section 22 Terminal section 31 Light guide member 32 holes 61 Base board 61a Positioning groove 71 Auxiliary light guide member 72 Storage Unit 73 Reflective film

Claims

1. A magnetic resonance component capable of quantum manipulation of electron spins using microwaves, A high-frequency magnetic field generator that applies the microwave to the magnetic resonance member, An irradiation device that irradiates the magnetic resonance member with incident light of a specific wavelength, The system comprises a light guide member that transmits the fluorescence emitted by the magnetic resonance member and guides it away from the magnetic resonance member, The light guide member has a flat plate shape with two opposing main surfaces and is provided with a hole. The magnetic resonance member is positioned on the inner surface of the hole, The aforementioned high-frequency magnetic field generator includes coil patterns arranged on the two main surfaces, The light guide member emits the fluorescence from at least the side surface of the light guide member. A magnetic field measuring device characterized by the following.

2. The magnetic field measuring device according to claim 1, characterized in that the light guide member has a slit extending from the side surface of the light guide member to the hole, along the optical path of the incident light to the magnetic resonance member.

3. The coil pattern comprises a notched ring-shaped coil portion and a terminal portion extending from the coil portion. The terminal portion is provided with a capacitive pattern that forms a resonant circuit with the coil portion. A magnetic field measuring device according to claim 2, characterized by the following:

4. The coil pattern comprises a notched ring-shaped coil portion and a terminal portion extending from the coil portion. The terminal portion is provided with a capacitive pattern that forms a resonant circuit with the coil portion. A magnetic field measuring device according to claim 1, characterized by the following:

5. Further comprising a base board with wiring patterns, The coil pattern comprises a notched ring-shaped coil portion and a terminal portion extending from the coil portion. The light guide member is arranged on the base substrate such that the wiring pattern is electrically connected to the terminal portion of the coil pattern on one of the two main surfaces. A magnetic field measuring device according to claim 1, characterized by the following:

6. The flux transformer further comprises a primary coil that senses the magnetic field to be measured, and a secondary coil that applies a magnetic field corresponding to the sensed magnetic field to be measured to the magnetic resonance member, The secondary coil is wound along the outer circumference of the light guide member and the base substrate. A magnetic field measuring device according to claim 5, characterized by the following:

7. The system further comprises an auxiliary light guide member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, The auxiliary light guide member is positioned opposite one of the two main surfaces of the light guide member. The secondary coil is wound along the outer circumference of the light guide member, the auxiliary light guide member, and the base substrate. A magnetic field measuring device according to claim 5, characterized by the following:

8. The base substrate is provided with a positioning groove for applying the applied magnetic field to the magnetic resonance member in the secondary coil. The secondary coil is wound so as to pass through the positioning groove. A magnetic field measuring device according to claim 6 or claim 7, characterized by the above.

9. Further comprising a base board with wiring patterns, The coil pattern comprises a notched ring-shaped coil portion and a terminal portion extending from the coil portion. The light guide member is arranged on the base substrate such that the wiring pattern is electrically connected to the terminal portion of the coil pattern on one of the two main surfaces. A magnetic field measuring device according to claim 2, characterized by the following:

10. The flux transformer further comprises a primary coil that senses the magnetic field to be measured, and a secondary coil that applies a magnetic field corresponding to the sensed magnetic field to be measured to the magnetic resonance member, The secondary coil is wound along the outer circumference of the light guide member and the base substrate. A magnetic field measuring device according to claim 9, characterized by the following:

11. The system further comprises an auxiliary light guide member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, The auxiliary light guide member is positioned opposite one of the two main surfaces of the light guide member. The secondary coil is wound along the outer circumference of the light guide member, the auxiliary light guide member, and the base substrate. A magnetic field measuring device according to claim 9, characterized by the following:

12. The base substrate is provided with a positioning groove for applying the applied magnetic field to the magnetic resonance member in the secondary coil. The secondary coil is wound so as to pass through the positioning groove. A magnetic field measuring device according to claim 10 or claim 11, characterized by the above.

13. Further comprising a base board with wiring patterns, The coil pattern comprises a notched ring-shaped coil portion and a terminal portion extending from the coil portion. The light guide member is arranged on the base substrate such that the wiring pattern is electrically connected to the terminal portion of the coil pattern on one of the two main surfaces. A magnetic field measuring device according to claim 3, characterized by the following:

14. The flux transformer further comprises a primary coil that senses the magnetic field to be measured, and a secondary coil that applies a magnetic field corresponding to the sensed magnetic field to be measured to the magnetic resonance member, The secondary coil is wound along the outer circumference of the light guide member and the base substrate. A magnetic field measuring device according to claim 13, characterized by the following:

15. The system further comprises an auxiliary light guide member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, The auxiliary light guide member is positioned opposite one of the two main surfaces of the light guide member. The secondary coil is wound along the outer circumference of the light guide member, the auxiliary light guide member, and the base substrate. A magnetic field measuring device according to claim 13, characterized by the following:

16. The base substrate is provided with a positioning groove for applying the applied magnetic field to the magnetic resonance member in the secondary coil. The secondary coil is wound so as to pass through the positioning groove. A magnetic field measuring device according to claim 14 or claim 15, characterized by the above.

17. Further comprising a base board with wiring patterns, The coil pattern comprises a notched ring-shaped coil portion and a terminal portion extending from the coil portion. The light guide member is arranged on the base substrate such that the wiring pattern is electrically connected to the terminal portion of the coil pattern on one of the two main surfaces. A magnetic field measuring device according to claim 4, characterized by the following:

18. The flux transformer further comprises a primary coil that senses the magnetic field to be measured, and a secondary coil that applies a magnetic field corresponding to the sensed magnetic field to be measured to the magnetic resonance member, The secondary coil is wound along the outer circumference of the light guide member and the base substrate. A magnetic field measuring device according to claim 17, characterized by the following:

19. The system further comprises an auxiliary light guide member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, The auxiliary light guide member is positioned opposite one of the two main surfaces of the light guide member. The secondary coil is wound along the outer circumference of the light guide member, the auxiliary light guide member, and the base substrate. A magnetic field measuring device according to claim 17, characterized by the following:

20. The base substrate is provided with a positioning groove for applying the applied magnetic field to the magnetic resonance member in the secondary coil. The secondary coil is wound so as to pass through the positioning groove. A magnetic field measuring device according to claim 18 or claim 19, characterized by the above.

21. The system further comprises an auxiliary light guide member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, The auxiliary light guide member is positioned opposite one of the two main surfaces of the light guide member. A magnetic field measuring device according to claim 1, characterized by the following:

22. In the thickness direction of the light guide member, the height of the magnetic resonance member is greater than the height of the hole in the light guide member. The auxiliary light guide member includes a housing portion for housing the portion of the magnetic resonance member that protrudes from the hole. A magnetic field measuring device according to claim 21, characterized by the above.

23. The aforementioned housing portion is a recess having an inner surface that is on the same plane as the inner surface of the hole, The magnetic resonance member is positioned on the inner surface of the hole and the inner surface of the recess. A magnetic field measuring device according to claim 22, characterized by the following:

24. The magnetic field measuring device according to claim 22, characterized in that the housing portion is a groove extending to the side surface of the auxiliary light guide member.

25. The magnetic field measuring device according to claim 22, characterized in that the housing portion is a groove extending from one of the two sides of the auxiliary light guide member to the other.

26. The magnetic field measuring device according to claim 21, characterized in that the height of the magnetic resonance member in the thickness direction of the light guide member is less than or equal to the height of the hole in the light guide member.

27. The magnetic field measuring device according to any one of claims 21 to 26, wherein the auxiliary light guide member (a) has a flat plate shape having two main surfaces facing each other, (b) is provided with a reflective film that conforms to the surface shape of the main surface of the two main surfaces that does not face the light guide member, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member.

28. The magnetic field measuring device according to any one of claims 21 to 26, wherein the auxiliary light guide member (a) has a flat plate shape having two main surfaces facing each other, (b) is provided with a reflective film that conforms to the surface shape of the main surface of the two main surfaces that faces the light guide member, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member to the light guide member.

29. The system further comprises an auxiliary light guide member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, The auxiliary light guide member is positioned opposite one of the two main surfaces of the light guide member. A magnetic field measuring device according to claim 2, characterized by the following:

30. In the thickness direction of the light guide member, the height of the magnetic resonance member is greater than the height of the hole in the light guide member. The auxiliary light guide member includes a housing portion for housing the portion of the magnetic resonance member that protrudes from the hole. A magnetic field measuring device according to claim 29, characterized by the following:

31. The aforementioned housing portion is a recess having an inner surface that is on the same plane as the inner surface of the hole, The magnetic resonance member is positioned on the inner surface of the hole and the inner surface of the recess. A magnetic field measuring device according to claim 30, characterized by the following:

32. The magnetic field measuring device according to claim 30, characterized in that the housing portion is a groove extending to the side surface of the auxiliary light guide member.

33. The magnetic field measuring device according to claim 30, characterized in that the housing portion is a groove extending from one of the two sides of the auxiliary light guide member to the other.

34. The magnetic field measuring device according to claim 29, characterized in that the height of the magnetic resonance member in the thickness direction of the light guide member is less than or equal to the height of the hole in the light guide member.

35. The magnetic field measuring device according to any one of claims 29 to 34, wherein the auxiliary light guide member (a) has a flat plate shape having two main surfaces facing each other, (b) is provided with a reflective film that conforms to the surface shape of the main surface of the two main surfaces that does not face the light guide member, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member.

36. The magnetic field measuring device according to any one of claims 29 to 34, wherein the auxiliary light guide member (a) has a flat plate shape having two main surfaces facing each other, (b) is provided with a reflective film that conforms to the surface shape of the main surface of the two main surfaces that faces the light guide member, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member to the light guide member.

37. The system further comprises an auxiliary light guide member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, The auxiliary light guide member is positioned opposite one of the two main surfaces of the light guide member. A magnetic field measuring device according to claim 3, characterized by the following:

38. In the thickness direction of the light guide member, the height of the magnetic resonance member is greater than the height of the hole in the light guide member. The auxiliary light guide member includes a housing portion for housing the portion of the magnetic resonance member that protrudes from the hole. A magnetic field measuring device according to claim 37, characterized by the following:

39. The aforementioned housing portion is a recess having an inner surface that is on the same plane as the inner surface of the hole, The magnetic resonance member is positioned on the inner surface of the hole and the inner surface of the recess. A magnetic field measuring device according to claim 38, characterized by the following:

40. The magnetic field measuring device according to claim 38, characterized in that the housing portion is a groove extending to the side surface of the auxiliary light guide member.

41. The magnetic field measuring device according to claim 38, characterized in that the housing portion is a groove extending from one of the two sides of the auxiliary light guide member to the other.

42. The magnetic field measuring device according to claim 37, characterized in that the height of the magnetic resonance member in the thickness direction of the light guide member is less than or equal to the height of the hole in the light guide member.

43. The magnetic field measuring device according to any one of claims 37 to 42, wherein the auxiliary light guide member (a) has a flat plate shape having two main surfaces facing each other, (b) is provided with a reflective film that conforms to the surface shape of the main surface of the two main surfaces that does not face the light guide member, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member.

44. The magnetic field measuring device according to any one of claims 37 to 42, wherein the auxiliary light guide member (a) has a flat plate shape having two main surfaces facing each other, (b) is provided with a reflective film that conforms to the surface shape of the main surface of the two main surfaces that faces the light guide member, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member to the light guide member.

45. The system further comprises an auxiliary light guide member that transmits or reflects a portion of the fluorescence emitted by the magnetic resonance member, The auxiliary light guide member is positioned opposite one of the two main surfaces of the light guide member. A magnetic field measuring device according to claim 4, characterized by the following:

46. In the thickness direction of the light guide member, the height of the magnetic resonance member is greater than the height of the hole in the light guide member. The auxiliary light guide member includes a housing portion for housing the portion of the magnetic resonance member that protrudes from the hole. A magnetic field measuring device according to claim 45, characterized by the following:

47. The aforementioned housing portion is a recess having an inner surface that is on the same plane as the inner surface of the hole, The magnetic resonance member is positioned on the inner surface of the hole and the inner surface of the recess. A magnetic field measuring device according to claim 46, characterized by the following:

48. The magnetic field measuring device according to claim 46, characterized in that the housing portion is a groove extending to the side surface of the auxiliary light guide member.

49. The magnetic field measuring device according to claim 46, characterized in that the housing portion is a groove extending from one of the two sides of the auxiliary light guide member to the other.

50. The magnetic field measuring device according to claim 45, characterized in that the height of the magnetic resonance member in the thickness direction of the light guide member is less than or equal to the height of the hole in the light guide member.

51. The magnetic field measuring device according to any one of claims 45 to 50, wherein the auxiliary light guide member (a) has a flat plate shape having two main surfaces facing each other, (b) is provided with a reflective film that conforms to the surface shape of the main surface of the two main surfaces that does not face the light guide member, and (c) transmits a portion of the fluorescence emitted by the magnetic resonance member.

52. The magnetic field measuring device according to any one of claims 45 to 50, wherein the auxiliary light guide member (a) has a flat plate shape having two main surfaces facing each other, (b) is provided with a reflective film that conforms to the surface shape of the main surface of the two main surfaces that faces the light guide member, and (c) reflects a portion of the fluorescence emitted by the magnetic resonance member to the light guide member.

Images