Carboxylic acid generator, carboxylate salt, resist composition, and method for producing resist patterns

Abstract

Provided are carboxylates, carboxylic acid generators, resist compositions, etc. that can produce resist patterns having good CD uniformity. 【Solution means】 A carboxylate, a carboxylic acid generator, and a resist composition represented by formula (I). TIFF2026047319000213.tif49164 [In the formula, m10 is 1 to 3, m11 is 0 to 2, m1, mm2 are 1 to 5, mm1, mm21 are 2 to 5, m2 is 0 to 4, m3, m4 are 0 to 5, mm4 is 0 or 1, m24 is an integer of 0 to 3; Ar 1 , 3 , 24 , 10 , 2 , Ar 2 , Ar 21 [[]]END]] is each an aromatic hydrocarbon group or a heterocyclic hydrocarbon group; R 1 , R 4 , R 21 are each a hydroxy group, *-X 1 -R 10 etc., X 1 is -CO-O- etc., R 10 is an acid-labile group; R 2 , R 3 , R 24 each represent a halogen atom or a hydrocarbon group.]

Description

[Technical Field]

[0001] The present invention relates to carboxylate salts, carboxylic acid generators, resist compositions, and methods for producing resist patterns. [Background technology]

[0002] Patent Document 1 describes a carboxylate salt represented by the following formula and a resist composition containing the carboxylate salt as a carboxylic acid generator. Patent document 2 (TIFF2026047319000001.tif3587) describes a carboxylate salt containing a carboxylate anion represented by the following formula and a resist composition containing the carboxylate salt as a carboxylic acid generator. TIFF2026047319000002.tif2030 [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-164584 [Patent Document 2] Japanese Patent Publication No. 2020-152721 [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] The present invention provides a carboxylate salt that forms a resist pattern with better CD uniformity (CDU) than a resist pattern formed by a resist composition containing the above-mentioned carboxylate salt. [Means for solving the problem]

[0005] This invention includes the following inventions. [1] A carboxylic acid generator containing a carboxylic acid salt represented by formula (I). TIFF2026047319000003.tif49164 [In formula (I), m10 represents any integer from 1 to 3. When m10 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. m11 represents any integer from 0 to 2, satisfies 2 ≦ m10 + m11 ≦ 3. When m10 + m11 = 2, X represents an iodine atom. When m10 + m11 = 3, X represents a sulfur atom. When m11 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. A 1 and A 2 each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms. The hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 11 -, or -CO-. R 11 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ar 1 and Ar 2 each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic hydrocarbon group having 4 to 9 carbon atoms. The aromatic hydrocarbon group and the heterocyclic hydrocarbon group may have a substituent. R 1 and R 4 each independently represents a hydroxy group, *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 represents. * represents the bonding site with Ar 1 or Ar 2 and represents the bonding site with Ar. X 1 and X 2 each independently represents -CO-O-, -O-CO-, -O-CO-O- or -O-. L 11 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent. -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 11 -, or -CO-. R 10This represents an acid-unstable group. R 2 and R 3 Each of these independently represents a halogen atom or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be replaced, and two R 2 , two R 3 or R 2 and R 3 X + A ring containing -CH2- may be formed, and the -CH2- contained in the ring may be -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be replaced by the two R that form the ring 2 , two R 3 or R 2 and R 3 X + It may also be a single bond formed between two benzene rings that are bonded to each other. m1 represents an integer from 1 to 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different from each other. mm1 represents an integer between 2 and 5, and multiple R 1 They may be the same or different from one another. m2 represents an integer from 0 to 4, satisfying 1 ≤ m1 + m2 ≤ 5, and when m2 is 2 or greater, multiple R 2 They may be the same or different from one another. m3 represents an integer between 0 and 5, and when m3 is 2 or greater, multiple R 3 They may be the same or different from one another. m4 represents an integer between 0 and 5, satisfying 0 ≤ m3 + m4 ≤ 5, and when m4 is 2 or greater, the bases within the parentheses may be the same or different. mm4 represents either 0 or 1. W 21 represents a cyclic hydrocarbon group having 3 to 36 carbon atoms, which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR11 -It may be replaced with -SO2-. L 21 - represents a hydrocarbon group having 1 to 28 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the hydrocarbon group is -O-, -S-, -SO-, -SO2-, -NR 11 - or -CO- may be used instead. A 21 -CH2- represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be used instead. Ar 21 This represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic hydrocarbon group having 4 to 9 carbon atoms, and the aromatic hydrocarbon group and the heterocyclic hydrocarbon group may have substituents. R 21 This is a hydroxyl group, *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 It represents. R 24 -H represents a halogen atom or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be used instead. mm21 represents an integer between 2 and 5, and multiple R 21 They may be the same or different from one another. m24 represents an integer between 0 and 3, and when m24 is 2 or greater, multiple R 24 They may be the same or different from one another. mm2 represents an integer between 1 and 5, and when mm2 is 2 or greater, the bases within the parentheses may be the same or different. [2]A 1 However, ***-X 01 -L 01 - or ***-L01 -X 01 -and, X 01 -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- represents, L 01 This refers to a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 It may be replaced with - or -SO2-. *** is Ar 1 A carboxylic acid generator as described in [1], representing the binding site with [1]. [3]X 01 The carboxylic acid generator described in [2] is -O-, -CO-, or -S-. [4]L 01 The carboxylic acid generator according to [2] or [3], wherein the single bond or the alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-). [5]R 1 However, hydroxyl group, *-OR 10 or *-OL 11 -CO-OR 10 (* is Ar 1 This represents the binding site with [1] to [4]. [6]R 1 However, *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 And R 10 A carboxylic acid generator according to any one of [1] to [5], wherein the acid-unstable group is a group represented by formula (1a) or a group represented by formula (2a). TIFF2026047319000004.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3Each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. * represents a bonding site.] TIFF2026047319000005.tif2161[In formula (2a), R aa1’ and R aa2’ each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the -C-X a -, and the -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. [[ID=2​​​​​​​​​​​​​​​​​​​​​​ The resist composition according to

[11] , wherein the acid generator contains a salt represented by formula (B1) or a salt represented by formula (B2). TIFF2026047319000006.tif1395[In formula (B1), L b1 represents a single bond or an (nb1 + 1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO- or -CO-. nb1 represents an integer of any one of 1 to 6. When nb1 is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. Z1 + represents an organic cation.] TIFF2026047319000007.tif1292[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2’ represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. Y b1’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. nb5 represents an integer of 2 or ...... 3. When A 1 is a nitrogen atom, nb5 is 2, and when A1 If is a carbon atom, then nb5 is 3. The groups in parentheses may be the same or different from each other, and two groups in parentheses combine to form A 1 A ring containing the element may be formed. Z2 + This represents an organic cation.

[13] The resist composition according to

[11] or

[12] further comprising a compound having a structure represented by formula (L0). TIFF2026047319000008.tif2471[In formula (L0), Ar lk This represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms, which may have substituents. X lk This represents a single bond or a carbonyl group. R lk This represents a hydrogen atom or an acid-unstable group. lk represents an integer greater than or equal to 1, and when lk is 2 or greater, the bases within the parentheses may be the same or different. * indicates a connection site. lo represents an integer greater than or equal to 1.

[14] The resist composition according to

[13] , wherein the compound containing the structure represented by formula (L0) is the compound represented by formula (LX). TIFF2026047319000009.tif24131[In formula (LX), Ar k1 and Ar k2 Each of these independently represents an aromatic hydrocarbon ring with 6 to 18 carbon atoms. X lk1 and X lk2 Each of these independently represents either a single bond or a carbonyl group. R lk1 and R lk2 Each of these independently represents either a hydrogen atom or an acid-unstable group. Lx represents a hydrocarbon group having 1 to 80 carbon atoms, which may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may also be replaced with -SO2-. R lk11and R lk22 Each of these independently represents a hydrocarbon group having 1 to 20 carbon atoms, which may have a halogen atom or substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may also be replaced with -SO2-, R lk11 and R lk22 , R lk11 and Lx or R lk22 Lx may be bonded to each other to form a ring, and the ring may have substituents, and the -CH2- contained in the ring may be -O-, -S-, -CO-, -SO-, -NR 11 -It may also be replaced with -SO2-. lx2 represents an integer from 1 to 6, and when lx2 is 2 or greater, the bases in the parentheses may be the same or different from each other. lk1' represents an integer between 1 and 13, and when lk1' is 2 or greater, the bases within the parentheses may be the same or different. lk11' represents an integer between 0 and 12, and when lk11' is 2 or greater, the bases within the parentheses may be the same or different. lk2' represents an integer between 1 and 13, and when lk2' is 2 or greater, the bases within the parentheses may be the same or different. lk22' represents an integer between 0 and 12, and when lk22' is 2 or greater, the bases within the parentheses may be the same or different.

[15] The resist composition according to

[13] or

[14] , wherein the compound containing the structure represented by formula (L0) is a resin containing the structural unit represented by formula (a2-A). TIFF2026047319000010.tif31128[In formula (a2-A), R a2 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a27This represents a halogen atom, a hydroxyl group, a carboxyl group, a C1-C6 alkyl group which may have a halogen atom, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a28 - may be used instead. R a28 This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 This represents a single bond or a carbonyl group. nA2 represents an integer from 1 to 5, and when nA2 is 2 or greater, the bases within the parentheses may be the same or different from each other. na21 represents an integer from 0 to 4, and when na21 is 2 or greater, multiple R a27 They may be the same or different from one another. mc represents an integer between 0 and 2.

[16] (1) A step of applying a resist composition described in any of

[11] to

[15] onto a substrate, (2) A step of drying the coated resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the composition layer after exposure, (5) A method for manufacturing a resist pattern, comprising the step of developing the composition layer after heating.

[17] Carboxylate salt represented by formula (I) above.

[18] A 1 However, ***-X 01 -L 01 - or ***-L 01 -X 01 -and, X 01 -O-, -CO-, -S-, -SO-, -NR 11- or -SO2- represents, L 01 This refers to a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 It may be replaced with - or -SO2-. *** is Ar 1 The carboxylate salt described in

[17] represents the bonding site with

[17] .

[19] X 01 The carboxylate salt described in

[18] is -O-, -CO-, or -S-.

[20] L 01 The carboxylate salt according to

[18] or

[19] , wherein the carboxylate is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-).

[21] R 1 However, hydroxyl group, *-OR 10 or *-OL 11 -CO-OR 10 (* is Ar 1 This represents the binding site with

[17] to

[20] .

[22] R 1 However, *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 And R 10 The carboxylate salt according to any of

[17] to

[21] , wherein the acid-unstable group is the group represented by formula (1a) or formula (2a) described above.

[23] A carboxylate salt according to any of

[17] to

[22] , wherein X is a sulfur atom.

[24] Ar 1 The carboxylate salt described in any of

[17] to

[23] , wherein the group is derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

[25] W 21 The carboxylate salt according to any one of

[17] to

[24] , wherein the phenylene group may have substituents.

[26] Ar 21 However, the carboxylate salt is one of the following

[17] -

[25] , which is a group derived from a benzene ring. [Effects of the Invention]

[0006] By using a resist composition containing the carboxylate salt of the present invention, resist patterns can be manufactured with good CD uniformity (CDU). [Modes for carrying out the invention]

[0007] In this specification, "(meth)acrylic monomer" means "at least one of acrylic monomers and methacrylic monomers." The same applies to "(meth)acrylate" and "(meth)acrylic acid," etc. For groups described herein that can take both linear and branched structures, either is acceptable. Hydrocarbon groups, etc., containing -CH2- are -O-, -S-, -CO-, -SO-, -NR X When a group is replaced by -(X is any sign) or -SO2-, the same example shall apply to each group, and the number of carbon atoms before replacement shall be the same as the number of carbon atoms in the hydrocarbon group, etc. "Combined group" means a group formed by bonding two or more of the exemplified groups, and the valencies of these groups may be appropriately changed depending on the bonding configuration. "Derived from" or "induced" means that the polymerizable C=C bond contained in the molecule becomes a -CC- group (single bond) through polymerization. If stereoisomers exist, all stereoisomers are included. Depending on the number of substituents, etc., hydrogen atoms at any position and number contained in the group may be replaced at the bonding site. The number of carbon atoms in a substituent is not included in the number of carbon atoms of the substituent. "Acid-unstable group" means a group in which, upon contact with an acid (e.g., trifluoromethanesulfonic acid, etc.), the leaving group is removed to form a hydrophilic group (e.g., a hydroxyl group or a carboxyl group, etc.). A "base-unstable group" refers to a group that, upon contact with a base (e.g., trimethylamine, tetramethylammonium hydroxide, etc.), detaches a leaving group to form a hydrophilic group (e.g., a carboxyl group or a hydroxyl group, etc.). In this specification, "solid content of the resist composition" means the total amount of the resist composition excluding the solvent (E) described later.

[0008] [Carboxylate salt represented by formula (I)] The present invention relates to a carboxylate salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)" or "carboxylate salt (I)"). In carboxylate salts (I), the negatively charged side is sometimes called the "anion (I)," and the positively charged side is sometimes called the "cation (I)."

[0009] [Cation (I)] The cation (I) of the carboxylate salt represented by formula (I) is the cation represented by formula (IC). TIFF2026047319000011.tif26161[In formula (IC), all symbols have the same meaning as in formula (I).] In equation (I), R 1 and R 4 X included 1 It is preferably *-CO-O-, *-O-, or *-O-CO-O-, and more preferably *-O- or *-O-CO-O-. * is Ar 1 Or Ar 2 This represents the connection point. R 1 and R 4 X included 2 It is preferably *-CO-O-, *-O-CO-, or *-O-CO-O-, and more preferably *-CO-O- or *-O-CO-. * is L 11 This represents the connection point. R 1 and R 4 L contained in 11Examples of hydrocarbon groups in this context include linear or branched chain hydrocarbon groups such as alkanediyl groups, monocyclic or polycyclic (including spiro rings, fused rings, or cross-linking rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups. Groups formed by combining two or more of these groups (for example, hydrocarbon groups formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and an alkanediyl group) are also permitted. Chain hydrocarbon groups and alicyclic hydrocarbon groups are also called aliphatic hydrocarbon groups, and alicyclic hydrocarbon groups and aromatic hydrocarbon groups are also called cyclic hydrocarbon groups. The number of carbon atoms in the hydrocarbon group may be 1 to 24, preferably 1 to 22, more preferably 1 to 20, and even more preferably 1 to 18. Examples of alkanediyl groups include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17-diyl group, and Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The ends of the branched alkanediyl groups may be alkyl groups such as methyl groups. The number of carbon atoms in the chain-like hydrocarbon group may be 1 to 24, preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, even more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. Examples of monocyclic or polycyclic alicyclic hydrocarbon groups include the following groups. The bonding site can be at any position. Specifically, alicyclic hydrocarbon groups include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group, as well as monocyclic divalent alicyclic hydrocarbon groups and Examples of polycyclic divalent alicyclic hydrocarbon groups include cycloalkyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, spirocyclohexane-1,2'-cyclopentane group, and spiroadamantane-2,3'-cyclopentane group, as well as polycyclic cycloalkanediyl groups such as spiro rings having a cycloalkyl group spiro-bonded to a norbornyl group or an adamantyl group. The number of carbon atoms in the alicyclic hydrocarbon group may be 3 to 24, preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of aromatic hydrocarbon groups include phenylene groups, naphthylene groups, anthrylene groups, biphenylene groups, phenanthrylene groups, and other arylene groups. The number of carbon atoms in the aromatic hydrocarbon group may be 6 to 24, preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. Examples of groups combining two or more types include groups combining an alicyclic hydrocarbon group and an alkanediyl group, groups combining an aromatic hydrocarbon group and an alkanediyl group, groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and groups combining an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and an alkanediyl group. In the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Also, any of the groups may be X 1 or X 2 They may be bound together. Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-. L 11 The -CH2- groups contained in hydrocarbon groups with 1 to 28 carbon atoms are -O-, -S-, -SO2-, -SO-, and -NR. 11 - or -CO- may be used instead. R 11 Examples of alkyl groups include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, and hexyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3. R 11 It is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, even more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO2-, -SO-, -NR 11 Groups replaced by - or -CO- include hydroxyl groups (groups in which the -CH2- contained in the methyl group is replaced by -O-), carboxyl groups (groups in which the -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), thiol groups (groups in which the -CH2- contained in the methyl group is replaced by -S-), and amino groups (groups in which the -CH2- contained in the methyl group is replaced by -NR11 - group replaced by -, oxy group (a group in which -CH2- in the methylene group is replaced by -O-), carbonyl group (a group in which -CH2- in the methylene group is replaced by -CO-), thio group (a group in which -CH2- in the methylene group is replaced by -S-), sulfonyl group (a group in which -CH2- in the methylene group is replaced by -SO2-), peptide group (a group in which -CH2-CH2- in the ethylene group is replaced by -CO-NR 11 -A group replaced by -), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced by -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced by -NR 11 -A group replaced by -), alkyl peptide group (where -CH2-CH2- at any position within the alkyl group is -CO-NR 11عال (A group in which 2-CH2- is replaced by -O-CO-O-), alkoxyalkoxy group (A group in which two -CH2- at any position in an alkyl group are replaced by -O-), alkoxyalkyl group (A group in which one -CH2- at any position in an alkyl group is replaced by -O-), hydroxyalkyl group (A group in which one -CH2- in a methyl group at any position in an alkyl group is replaced by -O-), alkanediyloxy group (A group in which one -CH2- in an alkanediyl group is replaced by -O-) (A group in which the -CH2- at any position is replaced by -O-), Alkanediyloxycarbonyl group (A group in which the -CH2-CH2- at any position in the Alkanediyl group is replaced by -O-CO-), Alkanediylcarbonyl group (A group in which the -CH2- at any position in the Alkanediyl group is replaced by -CO-), Alkanediylcarbonyloxy group (A group in which the -CH2-CH2- at any position in the Alkanediyl group is replaced by -CO-O-), Alkanediyl Xycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-O-), alkanediylsulfonyl group (a group in which -CH2- at any position in an alkanediyl group is replaced with -SO2-), alkanediylthio group (a group in which -CH2- at any position in an alkanediyl group is replaced with -S-), alkanediylamino group (a group in which -CH2- at any position in an alkanediyl group is replaced with -NR 11 -A group replaced by -), an alkanediyl peptide group (where -CH2-CH2- at any position in the alkanediyl group is replaced by -CO-NR 11Examples include groups that have been replaced by (-), cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups that combine two or more of these groups. Examples of alkoxy groups include alkoxy groups having 1 to 27 carbon atoms, such as methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyloxy, nonyloxy, decyloxy, and undecyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkylthio groups include alkylthio groups having 1 to 27 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, and undecylthio group. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkylsulfonyl groups include alkylsulfonyl groups having 1 to 27 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, and undecylsulfonyl group. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkylamino groups include alkylamino groups having 1 to 27 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, pentylamino group, and hexylamino group. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkyl peptide groups include alkyl peptide groups having 1 to 27 carbon atoms, such as methyl peptide groups, ethyl peptide groups, and propyl peptide groups. The number of carbon atoms in the alkyl peptide group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of alkylcarbonyl groups include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of alkylcarbonyloxy groups include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy groups. Examples of alkoxyalkoxy groups include alkoxyalkoxy groups having 2 to 26 carbon atoms, such as methoxymethoxy, methoxyethoxy, ethoxymethoxy, and ethoxyethoxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 10, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of alkoxyalkyl groups include alkoxyalkyl groups having 2 to 27 carbon atoms, such as methoxymethyl group, methoxyethyl group, ethoxymethyl group, and ethoxyethyl group. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of hydroxyalkyl groups include hydroxyalkyl groups having 1 to 27 carbon atoms, such as hydroxymethyl group, dihydroxymethyl group, hydroxyethyl group, dihydroxyethyl group, and hydroxypropyl group. The number of carbon atoms in the hydroxyalkyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediyloxy groups include alkanediyloxy groups having 1 to 27 carbon atoms, such as methyleneoxy, ethyleneoxy, propanediyloxy, butanediyloxy, and pentanediyloxy groups. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediyloxycarbonyl groups include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as methyleneoxycarbonyl groups, ethyleneoxycarbonyl groups, propanediyloxycarbonyl groups, and butanediyloxycarbonyl groups. Examples of alkanediylcarbonyl groups include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as methylenecarbonyl groups, ethylenecarbonyl groups, propanediylcarbonyl groups, butanediylcarbonyl groups, and pentanediylcarbonyl groups. Examples of alkanediylcarbonyloxy groups include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as methylenecarbonyloxy groups, ethylenecarbonyloxy groups, propanediylcarbonyloxy groups, and butanediylcarbonyloxy groups. Examples of alkanediyloxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as the butoxycarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 10, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of alkanediylsulfonyl groups include alkanediylsulfonyl groups having 1 to 27 carbon atoms, such as methylenesulfonyl groups, ethylenesulfonyl groups, and propylenesulfonyl groups. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediylthio groups include alkanediylthio groups having 1 to 27 carbon atoms, such as methylenethio groups, ethylenethio groups, and propylenethio groups. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediylamino groups include alkanediylamino groups having 1 to 27 carbon atoms, such as methyleneamino groups, ethyleneamino groups, dimethylamino groups, propyleneamino groups, butyleneamino groups, pentyleneamino groups, and hexyleneamino groups. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediyl peptide groups include alkanediyl peptide groups having 1 to 27 carbon atoms, such as methylene peptide groups, ethylene peptide groups, and propylene peptide groups. The number of carbon atoms in the alkanediyl peptide group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 27 carbon atoms, such as the cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as the cyclohexylmethoxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as the benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as the benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as the phenyloxy group.

[0010] Furthermore, the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof may be -O-, -S-, -CO-, -NR 11The following groups are examples of groups that have been replaced by -, -SO-, or -SO2-. The -O- or -CO- in the groups shown below are replaced by -S- and -NR, respectively. 11 -, -SO-, or -SO2- may be substituted. The binding site can be at any position. TIFF2026047319000013.tif89165

[0011] L 11 Examples of substituents that may be present include halogen atoms, cyano groups, nitro groups, etc. 11 However, in the case of a group that combines an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can substantially be a substituent of the alicyclic hydrocarbon group or aromatic hydrocarbon group. 11 The -CH2- group contained in the alkyl group and other chain hydrocarbon groups contained therein is -O-, -CO-, -S-, -NR 11 By being replaced by -, -SO- or -SO2-, L 11 It can substantially have substituents such as hydroxyl groups, carboxyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, alkylamino groups, amino groups, thiol groups, alkylthio groups, alkylsulfonyl groups, and alkylpeptide groups. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. L 11 The substituents in are preferably C1-C4 alkyl groups, hydroxyl groups, or halogen atoms, more preferably C1-C4 alkyl groups or halogen atoms, and even more preferably methyl groups or fluorine atoms.

[0012] L 11 Examples include chain hydrocarbon groups having 1 to 12 carbon atoms (these chain hydrocarbon groups may have substituents. The -CH2- contained in the chain hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11-or may be replaced by -CO-. ), a cyclic hydrocarbon group having 3 to 18 carbon atoms (the cyclic hydrocarbon group may have substituents. -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be replaced.) or a group formed by combining a chain hydrocarbon group having 1 to 10 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (the chain hydrocarbon group and the cyclic hydrocarbon group may have substituents. The -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 Examples include an alkanediyl group having 1 to 10 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) or a group combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 12 carbon atoms (the -CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced with -O- or -CO-), more preferably an alkanediyl group having 1 to 6 carbon atoms, even more preferably an alkanediyl group having 1 to 3 carbon atoms, and still more preferably a methylene group.

[0013] R 1 and R 4 R included 10 The acid-unstable group is one that, when it comes into contact with an acid (such as trifluoromethanesulfonic acid), R 10 This refers to a group that, when a leaving group containing the group represented by is removed, forms a carboxyl group or a hydroxyl group. Preferred acid-unstable groups are those represented by formula (1a) (hereinafter sometimes referred to as "acid-unstable group (1a)") and those represented by formula (2a) (hereinafter sometimes referred to as "acid-unstable group (2a)"). TIFF2026047319000014.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 These atoms bond to each other to form a cyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the cyclic hydrocarbon group, and the aromatic hydrocarbon group may have halogen atoms. * indicates a connection site. TIFF2026047319000015.tif2161 [In formula (2a), R aa1’ and R aa2’ Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R aa3’ represents a hydrocarbon group with 1 to 20 carbon atoms, or R aa2’ and R aa3’ They combine with each other and they join together -CX a - forms a heterocyclic group having 3 to 20 carbon atoms, and the -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-, and the hydrocarbon group and the heterocyclic group may have halogen atoms. X a This represents an oxygen atom or a sulfur atom. * indicates a connection site.

[0014] R aa1 , R aa2 and R aa3 Examples of alkyl groups include methyl, ethyl, propyl, n-butyl, n-pentyl, n-hexyl, n-heptyl, and n-octyl groups. aa1 , R aa2 and R aa3 The number of carbon atoms in the alkyl group is preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. R aa1 , R aa2 and R aa3Examples of alkenyl groups include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R aa1 , R aa2 and R aa3 The alicyclic hydrocarbon group may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates a bonding site). aa1 , R aa2 and R aa3 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. TIFF2026047319000016.tif9159R aa1 , R aa2 and R aa3 Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups. aa1 , R aa2 and R aa3 The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, and more preferably 6 to 10.

[0015] Examples of combined groups include groups that combine alkyl groups and alicyclic hydrocarbon groups as described above (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group.

[0016] R aa1 and R aa2 -C(R aa1 )(R aa2 )(R aa3 Examples of such groups include the following: The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. * represents the bond site with -O-. TIFF2026047319000017.tif30140

[0017] The group represented by formula (1a) is a 1,1,1-trialkyl group (where R is in formula (1a)). aa1 , R aa2 and R aa3 A group in which R is an alkyl group, preferably a tert-butyl group, or a 2-alkyladamantan-2-yl group (in formula (1a), R aa1 , R aa2 And the carbon atoms to which these are bonded form an adamantyl group, R aa3 (a group in which R is an alkyl group) and 1-(adamantan-1-yl)-1,1-dialkyl group (in formula (1a), R aa1 and R aa2 is an alkyl group, R aa3Examples include groups that are adamantyl groups.

[0018] R aa1' , R aa2' and R aa3' Examples of hydrocarbon groups include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, cyclic hydrocarbon groups such as aromatic hydrocarbon groups, and groups formed by combining these. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these are R aa1 , R aa2 and R aa3 The same elements mentioned above can be cited. R aa2' and R aa3' They bond with each other, and the carbon atoms and X that they bond to are bonded together. a When forming a heterocyclic group with -C(R aa1' )(R aa2' )-X a -(R aa3' Examples of such groups include the following: * indicates a bonding site. The number of carbon atoms in the heterocyclic group is typically 3 to 20, preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. TIFF2026047319000018.tif21143R aa1' and R aa2' Preferably, at least one of them is a hydrogen atom. R aa1 , R aa2 , R aa3 , R aa1' , R aa2' and R aa3' The halogen atoms that may be present include fluorine atoms, chlorine atoms, bromine atoms, or iodine atoms.

[0019] Specific examples of acid-unstable groups (1a) include the following groups. * indicates a bonding site. TIFF2026047319000019.tif73153

[0020] Specific examples of acid-unstable groups (2a) include the following groups. * indicates a bonding site. TIFF2026047319000020.tif59148R 10 The acid-unstable group is preferably a group represented by formula (2a), and more preferably a group represented by the following. TIFF2026047319000021.tif47135[In this formula, all signs have the same meaning as in formula (2a).] R 1 Ar 1 The binding site to Ar 1 If the group is derived from a benzene ring, then A is independent of the others. 1 The bond position can be any of the or, m, or p positions. Among these, A 1 It is preferable that at least one atom is bonded to the p-position or m-position relative to the bonding site of . 1 If the group is derived from a naphthalene ring, for example, A 1 If the bond position is at position 1, then any position from 2 to 8 is acceptable, A 1 If the bond position is at position 2, it can be at position 1 or any of positions 3 through 8. In particular, A 1 If the bonding position is at position 1, it is preferable that at least one is bonded at positions 3 to 6, A 1 If the bond position is at position 2, it is preferable that at least one is bonded at positions 4 to 7. 4 Ar 2 The binding position to R is also 1 Ar 1 This is similar to the binding position to [the other element]. R 1 and R 4 These are, independently, a hydroxyl group and an -OR group. 10 , -O-CO-OR 10 or -OL 11 -CO-OR 10 Preferably, it is a hydroxyl group, -OR 10 or -OL 11 -CO-OR 10 It is more preferable that -OR 10 or -OL 11 -CO-OR 10 It is even more preferable that this be the case.

[0021] Ar 1 and Ar 2 Examples of aromatic hydrocarbon groups having 6 to 10 carbon atoms include groups derived from benzene rings or naphthalene rings, such as phenylene groups or naphthylene groups. 1 and Ar 2 Examples of heterocyclic aromatic hydrocarbon groups having 4 to 9 carbon atoms include groups derived from furan rings, thiophene rings, benzofuran rings, or benzothiophene rings. Ar 1 and Ar 2 Each of these groups is preferably independently derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring, and more preferably from a benzene ring.

[0022] Ar 1 and Ar 2 The substituents that the aromatic hydrocarbon group or heterocyclic hydrocarbon group may have include halogen atoms, cyano groups, nitro groups, hydrocarbon groups having 1 to 28 carbon atoms, or combinations thereof, and the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be used instead. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. Examples of hydrocarbon groups having 1 to 28 carbon atoms include chain-type hydrocarbon groups such as alkyl groups and alkanediyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Examples of alkyl groups include linear or branched alkyl groups, such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, and dodecyl group. Alkanediyl groups include linear or branched alkanediyl groups, such as methylene groups, ethylene groups, propane-1,3-diyl groups, butane-1,4-diyl groups, pentane-1,5-diyl groups, hexane-1,6-diyl groups, and linear alkanediyl groups; and Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 12, more preferably 1 to 10, even more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Alicyclic hydrocarbon groups may be monocyclic or polycyclic, and include the groups listed below. The bonding site can be at any position. Specifically, monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl. Polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having cycloalkyl groups spiro-bonded to norbornyl or adamantyl groups. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of aromatic hydrocarbon groups include phenyl groups, naphthyl groups, biphenyl groups, anthryl groups, phenanthryl groups, and binaphthyl groups. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10.

[0023] Groups formed by combining two or more groups from among chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups include groups formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*, where the -CH2- contained in the alkanediyl group and the alkyl group is -O-, -CO-, -S-, -SO-, -NR 11 -or -SO2- may be replaced.), a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group (for example, alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*, alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, the -CH2- contained in the alicyclic hydrocarbon group, the alkanediyl group and the alkyl group is -O-, -CO-, -S-, -SO-, -NR 11 -or may be replaced with -SO2-), a group combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*, the -CH2- contained in the alicyclic hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may be replaced with -SO2-.) is an example. * represents a binding site. Examples of aromatic hydrocarbon groups - alkanediyl groups -* include aralkyl groups such as benzyl and phenethyl groups. Examples of alkyl-aromatic hydrocarbon groups-* include tolyl groups, xylyl groups, and cumenyl groups. Examples of alicyclic hydrocarbon groups - alkanediyl groups -* include cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group, and other cycloalkylalkyl groups. Examples of alkyl-alicyclic hydrocarbon groups include methylcyclohexyl group, dimethylcyclohexyl group, and cycloalkyl groups having alkyl groups such as 2-alkyladamantan-2-yl group. Examples of aromatic hydrocarbon groups - alicyclic hydrocarbon groups -* include the phenylcyclohexyl group. Examples of alicyclic hydrocarbon groups - aromatic hydrocarbon groups -* include the cyclohexylphenyl group. Furthermore, in the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Also, any of the groups may be Ar 1 Or Ar 2 They may be bound together.

[0024] The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO2-, -SO-, -NR 11 As mentioned above, examples of groups replaced by - or -CO- include hydroxyl groups, thiol groups, carboxyl groups, amino groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, alkoxyalkyl groups, hydroxyalkyl groups, alkylthio groups, alkylsulfonyl groups, alkylamino groups, alkylpeptide groups, oxy groups, carbonyl groups, thio groups, sulfonyl groups, peptide groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, alkanediyloxycarbonyloxy groups, alkanediylthio groups, alkanediylsulfonyl groups, alkanediylamino groups, alkanediylpeptide groups, cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups. These substituted groups may be similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Furthermore, the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof may be -O-, -S-, -SO2-, -SO-, -NR 11 Groups replaced by - or -CO- include those similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Examples of substituents that combine the aforementioned groups include halogen atoms, cyano groups, or nitro groups combined with hydrocarbon groups. Groups that combine a halogen atom and a hydrocarbon group include hydrocarbon groups having a halogen atom, specifically, chain hydrocarbon groups having a halogen atom such as haloalkyl groups, alicyclic hydrocarbon groups having a halogen atom such as halocycloalkyl groups, and aromatic hydrocarbon groups having a halogen atom. Examples of haloalkyl groups include C1-C12 alkyl fluorides, C1-C12 alkyl chlorides, C1-C12 alkyl bromides, and C1-C12 alkyl iodides. Specifically, examples include C1-C12 perfluoroalkyl groups (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1-9, more preferably 1-6, even more preferably 1-4, and even more preferably 1-3. Groups in which the -CH2- contained in a haloalkyl group is replaced with -O- or -CO-, etc., include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, and haloalkylcarbonyloxy groups. Specifically, these include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, and haloalkylcarbonyloxy groups having 2 to 11 carbon atoms. For example, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced with halogen atoms are also included.

[0025] Ar 1 and Ar 2 Examples of substituents in each are, independently, a halogen atom, a C1-C8 haloalkyl group, or a C1-C12 alkyl group (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), preferably a halogen atom, a C1-C6 haloalkyl group, or a C1-C6 alkyl group (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, a C1-C6 haloalkyl group, or a C1-C6 alkyl group (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), and more preferably a fluorine atom, an iodine atom, or a carbon It is more preferably a haloalkyl group having 1 to 4 prime numbers or an alkyl group having 1 to 4 carbon atoms (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), even more preferably a fluorine atom, an iodine atom, a fluorinated alkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxyl group, a carboxyl group, or an alkoxy group having 1 to 3 carbon atoms, even more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxyl group, a carboxyl group, or an alkoxy group having 1 to 3 carbon atoms, and even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, an ethyl group, a hydroxyl group, a carboxyl group, a methoxy group, or an ethoxy group. Ar 1 The bonding position of the substituent in Ar 1 If the group is derived from a benzene ring, then A is independent of the others. 1 The bond position can be any of the ortho, meta, or para positions. In particular, if there is only one substituent, each substituent is independently A 1 It is preferable that the substituent is attached to the p-position or m-position relative to the bonding site. If there are two substituents, each substituent is independently A 1It is preferable that one substituent is bonded to the oro or m position and one substituent is bonded to the p or m position relative to the bonding site. If there are three substituents, each substituent is independently A 1 It is preferable that two atoms are bonded to the orthogonal or metagonal position, and one atom is bonded to the paragonal or metagonal position. Also, Ar 1 If the group is derived from a naphthalene ring, for example, A 1 If the bond position is at position 1, then any position from 2 to 8 is acceptable, A 1 If the bond position is at position 2, it can be at position 1 or any of positions 3 through 8. In particular, A 1 If the bonding position is at position 1, it is preferable that at least one is bonded at positions 3 to 6, A 1 , A 2 and A 3 If the bond position is at position 2, it is preferable that at least one is bonded at positions 4 to 7. 2 The bonding position of the substituent in Ar 1 This is similar to the bond position of the substituent in [the given image].

[0026] A 1 and A 2 Examples of hydrocarbon groups include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups. Two or more of these groups may be combined. The number of carbon atoms in the hydrocarbon group is preferably 1 to 19, more preferably 1 to 18, even more preferably 1 to 16, even more preferably 1 to 14, and even more preferably 1 to 12. Examples of linear hydrocarbon groups include linear alkane diyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl. Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, even more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and examples include the groups shown below. The bonding site can be at any position. Specifically, monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group are monocyclic alicyclic hydrocarbon groups. Examples include polycyclic alicyclic hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane group and spiroadamantane-2,3'-cyclopentane group; and spiro rings having a norbornyl group or an adamantyl group each linked to a cycloalkyl group by a spiro. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, even more preferably 3 to 12, and even more preferably 3 to 10. Examples of aromatic hydrocarbon groups include phenylene groups, naphthylene groups, anthrylene groups, biphenylene groups, phenanthrylene groups, and other arylene groups. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10.

[0027] Groups formed by combination include groups formed by combining an alicyclic hydrocarbon group and an alkanediyl group, groups formed by combining an aromatic hydrocarbon group and an alkanediyl group, and groups formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combinations, two or more types of chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups may be combined. Furthermore, any of the groups may be bonded to a benzene ring. Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-.

[0028] A 1 and A 2 So, the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 If replaced by - or -SO2-, the number may be one or more, but it is preferable that there be one or two. The -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 As mentioned above, examples of groups that have been replaced by - or -SO2- include hydroxyl groups, carboxyl groups, thiol groups, amino groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, alkoxyalkyl groups, hydroxyalkyl groups, alkylthio groups, alkylsulfonyl groups, alkylamino groups, alkylpeptide groups, oxy groups, carbonyl groups, thio groups, sulfonyl groups, peptide groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, alkanediyloxycarbonyloxy groups, alkanediylsulfonyl groups, alkanediylthio groups, alkanediylamino groups, alkanediylpeptide groups, cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups that combine two or more of these groups. These substituted groups may be similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Furthermore, the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof may be -O-, -CO-, -S-, -SO-, -NR 11 Groups replaced with - or -SO2- include those similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. A 1 and A 2 The substituents that the hydrocarbon group may have include Ar 1 Examples of substituents that may be present on aromatic hydrocarbon groups or heterocyclic aromatic hydrocarbon groups include groups similar to those listed above.

[0029] A 1 and A 2 Each of these is independently a single bond or a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- may be replaced by -, however, at least one of the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 It is preferable that it is replaced with - or -SO2-. Specifically, A 1 is, **-L 011 -X 01 -L 012 -is (X 01 -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- represents L 011 and L 012 Each of these independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may be replaced with -SO2-. However, L 011 and L 012 The total number of carbon atoms is 0 to 18. ** is Ar 1 It is more preferable that A represents the bonding site. 1 is, **-X 01 -L 01 - or **-L 01 -X 01 -is (X 01 -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- represents L 01-CH2- represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may be replaced with -SO2-. ** is Ar 1 It is even more preferable that it represents the bonding site with. 1 -O-, -CO-, -S-, -SO-, -NR 11 Besides substitution with - or -SO2-, it is also preferable to have no substituents. L 011 , L 012 and L 01 A hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR) 11 -Or it may be replaced with -SO2-.) As for the number of carbon atoms, A 1 Similar groups to those listed above can be cited. X 01 These are -O-, -CO-, -S-, and -NR, respectively, independently. 11 - or -SO2- is preferred, and -O-, -CO-, -S- or -NR 11 - is more preferable, -O-, -CO- or -S- is even more preferable, and -O- or -CO- is even more preferable. L 011 , L 012 and L 01 Each of these is independently a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 It is preferable that the group be a single bond or a hydrocarbon group having 1 to 12 carbon atoms (the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11It is more preferable that the group is a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 10 carbon atoms (the -CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 It is even more preferable that it is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), it is even more preferable that it is a single bond or an alkanediyl group having 1 to 4 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), and it is even more preferable that it is a single bond or an alkanediyl group having 1 to 3 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-). In particular, it is preferable that the group is a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, an oxy group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxymethylene group, an ethyleneoxymethylene group, a methylenecarbonyloxy group, a methylenecarbonyloxymethylene group, or an ethyleneoxycarbonyl group, and more preferably a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, an oxy group, or a carbonyl group. However, L 011 and L 012 The total number of carbon atoms is between 0 and 18. A 2 Regarding A 1 A similar base is preferred. Also, A 1 and A 2Each of these independently comprises a single bond, a chain hydrocarbon group having 1 to 20 carbon atoms, a cyclic hydrocarbon group having 3 to 20 carbon atoms, or a hydrocarbon group having 4 to 20 carbon atoms formed by a combination thereof (however, the chain hydrocarbon group and the cyclic hydrocarbon group may have substituents, and the -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR). 11 - or -CO- may be replaced.) It is also preferable that the group be a single bond, a chain hydrocarbon group having 1 to 18 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a combination thereof of a hydrocarbon group having 4 to 18 carbon atoms (however, the chain hydrocarbon group and the cyclic hydrocarbon group may have substituents, and the -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 It is more preferable that it be replaced with - or -CO-.

[0030] A 1 X + The bond positions to the benzene ring to which each bond is independently of X + The bond position can be any of the or, m, or p positions. Among these, X + It is preferable that the bond is at the p-position or m-position relative to the bond site. More specifically, if m1 is 1, A 1 Each of them independently, X + It is preferable that the bond is at the p-position or m-position relative to the bond site, and more preferably at the p-position. 1 Each of them independently, X + It is preferable that one atom is bonded to the orthogonal or m-position, one atom is bonded to the orthogonal or m-position, and it is more preferable that two atoms are bonded to the m-position. When m1 is 3, A 1 Each of them independently, X + It is preferable that two atoms are bonded to the oro or m position and one atom is bonded to the p or m position relative to the bonding site, and it is more preferable that two atoms are bonded to the m position and one atom is bonded to the p position. When m1 is 4, A 1 Each of them independently, X +It is preferable that two atoms are bonded to the ortho or metaposition relative to the bonding site, and two atoms are bonded to the p or metaposition, and it is more preferable that two atoms are bonded to the orthoposition and two atoms are bonded to the metaposition. 2 X + The bond position to the benzene ring to which it is bonded is also A 1 X + This is similar to the bond position to the benzene ring to which it is bonded. mm1 is preferably 2, 3, or 4, more preferably 2 or 3, and even more preferably 2. m1 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, and even more preferably 1 or 2. m2 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. m3 is preferably 0, 1, 2, 3, or 4, more preferably 0, 1, 2, or 3, even more preferably 0, 1, or 2, and even more preferably 0 or 1. m4 is preferably 0, 1, 2, 3, or 4, more preferably 0, 1, 2, or 3, even more preferably 0, 1, or 2, and even more preferably 0 or 1. It is preferable that mm4 is 0.

[0031] R 2 and R 3 As for halogen atoms, Ar 1 Examples of substituents that may be present on aromatic hydrocarbon groups or heterocyclic hydrocarbon groups include halogen atoms similar to those listed above. R 2 and R 3 The hydrocarbon group (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR) 11 -It may be replaced with -CO-.) 1A hydrocarbon group or heterocyclic hydrocarbon group may have substituents such as the hydrocarbon group (the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 -It may be replaced by -CO-. ) Or, a group similar to the combined group may be mentioned. R 2 and R 3 This may be a group having an acid-unstable group, for example, R 1 Examples of *-X 1 -R 10 , *-X 1 -L 11 -X 2 -R 10 (* is R 2 or R 3 This should be interpreted as the bonding site with the benzene ring to which it is bonded. ) It may also be a group similar to ). R 2 and R 3 Each of these independently comprises a halogen atom, a C1-C8 haloalkyl group, a C1-C12 alkyl group (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), and *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 Examples include halogen atoms, C1-C6 haloalkyl groups, C1-C6 alkyl groups (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), -OR 10 , -O-CO-OR 10 or -OL 11 -CO-OR 10 Preferably, the elements are a halogen atom, a C1-C4 haloalkyl group, a C1-C4 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), -OR 10 , -O-CO-OR 10 or -OL 11 -CO-OR 10It is more preferable that the alkyl group contains a fluorine atom, an iodine atom, a C1-C4 alkyl fluoride, a C1-C4 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), -OR 10 , -O-CO-OR 10 or -OL 11 -CO-OR 10 It is even more preferable that the following are present: a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxyl group, a carboxyl group, an alkoxy group having 1 to 3 carbon atoms, -OR 10 , -O-CO-OR 10 or -OL 11 -CO-OR 10 It is even more preferable that the following are present: fluorine atom, iodine atom, trifluoromethyl group, methyl group, ethyl group, t-butyl group, hydroxyl group, carboxyl group, methoxy group, ethoxy group, -OR 10 , -O-CO-OR 10 or -OL 11 -CO-OR 10 It is even more preferable that this be the case. R 2 The bond positions to the benzene ring are, independently of each other, X + The bond position can be any of the or, m, or p positions. In particular, when m2 is 1, R 2 Each of them independently, X + It is preferable that the bond is at the p-position or m-position relative to the bond site, and more preferably at the p-position. 2 Each of them independently, X + It is preferable that one atom is bonded to the orthogonal or m-position and one atom is bonded to the p-position or m-position, and more preferably that one atom is bonded to the m-position and one atom is bonded to the p-position or m-position. When m2 is 3, R 2 Each of them independently, X + It is preferable that two atoms are bonded to the oro or m position and one atom is bonded to the p or m position relative to the bonding site, and it is more preferable that two atoms are bonded to the m position and one atom is bonded to the p position. When m2 is 4, R 2Each of them independently, X + It is preferable that two atoms are bonded to the ortho or metaposition relative to the bonding site, and two atoms are bonded to the p or metaposition, and it is more preferable that two atoms are bonded to the metaposition, one atom is bonded to the orthoposition, and one atom is bonded to the pposition. 3 The bond position to the benzene ring is also R 2 This is similar to the bond position to the benzene ring.

[0032] Two R's 2 , two R 3 or R 2 and R 3 X + When forming a ring containing X, X is preferably a sulfur atom, and for example, it is preferably a cation represented by the following formula (I-C'). TIFF2026047319000024.tif51153[In formula (I-C'), R 1A , R 1B and R 1C Each of these independently, in equation (I), R 1 It expresses the same meaning. R 2A , R 2B and R 2C Each of these independently, in equation (I), R 2 It expresses the same meaning. A 1A , A 1B and A 1C Each of these independently, in equation (I), A 1 It expresses the same meaning. Ar 1A Ar 1B and Ar 1C Each of these is independently, in equation (I), Ar 1 It expresses the same meaning. mm1A, mm1B, and mm1C each independently represent an integer between 1 and 5, and any one of mm1A, mm1B, or mm1C represents an integer of 2 or greater. m1A represents an integer between 0 and 5, and when m1A is 2 or greater, the bases within the parentheses may be the same or different. m2A represents an integer between 0 and 5, satisfying 0 ≤ m1A + m2A ≤ 5, and when m2A is 2 or greater, the bases within the parentheses may be the same or different. m1B and m1C each independently represent an integer between 0 and 4, and when m1B and m1C are both 2 or greater, the bases within each set of parentheses may be the same or different. m2B and m2C each independently represent an integer between 0 and 4, satisfying 0 ≤ m1B + m2B ≤ 4 and 0 ≤ m1C + m2C ≤ 4, respectively, and when m2B and m2C are 2 or greater, the bases within each set of parentheses may be the same or different. One of m1A, m1B, or m1C represents an integer greater than or equal to 1. X 7 These are single bonds, -CH2-, -O-, -S-, -CO-, -SO-, -NR 11 [- or -SO2- represents.] X 7 The bond is preferably a single bond, -CH2-, or -O-.

[0033] The cation represented by formula (IC) is preferably the cation represented by formula (IC-1) below. TIFF2026047319000025.tif26151[In formula (IC-1), m10, m11, X, A 1 Ar 1 , m1, R 2 ,R 3 m2 and m3 have the same meaning as in equation (I). R 1A and R 1B These are, independently, a hydroxyl group and *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 This represents X 1 , X 2 , L 11 and R 10 These expressions represent the same meaning as equation (I). Furthermore, the cation represented by formula (IC) is preferably one of the cations represented by formulas (IC-2) to (IC-10) below. TIFF2026047319000026.tif169162 [Formula (IC-2) ~ Formula (IC-10), A 1 Ar 1 , R 2 and R 3 This has the same meaning as equation (I). R 1A , R 1B and R 1C These are, independently, a hydroxyl group and *-X 1 -R 10 or *-X 1 -L 11 -X 2 -R 10 This represents X 1 , X 2 , L 11 and R 10 These expressions have the same meaning as equation (I). X 7 This has the same meaning as equation (I-C'). In equations (IC-2) to (IC-10), the subscript numbers near the outside of each parentheses represent the valence. For example, in equation (IC-2), (R 2 ) 0-2 The "0-2" in this expression represents "any integer between 0 and 2," and in expressions (IC-2) to (IC-10), other subscript numbers near the outside of the parentheses have the same meaning.

[0034] Examples of cations of salt (I) include those represented by the following formulas (Ic-1) to (Ic-105). TIFF2026047319000027.tif244163

[0035] TIFF2026047319000028.tif243155

[0036] TIFF2026047319000029.tif248148

[0037] TIFF2026047319000030.tif239106

[0038] TIFF2026047319000031.tif248163

[0039] TIFF2026047319000032.tif223138

[0040] TIFF2026047319000033.tif241161

[0041] TIFF2026047319000034.tif191161

[0042] TIFF2026047319000035.tif196164

[0043] (Anion (I)) In equation (I), W 21 A cyclic hydrocarbon group having 3 to 36 carbon atoms (hereinafter referred to as "ring W") 21 It may be referred to as ). The cyclic hydrocarbon group may be saturated or unsaturated, monocyclic or polycyclic, and the polycyclic cyclic hydrocarbon group may be a bridged ring or form a spiro. Examples of cyclic hydrocarbon groups include alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof. The -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2- may be replaced. Furthermore, carbon atoms in the alicyclic hydrocarbon group may form a double bond between two adjacent carbon atoms. W 21 The cyclic hydrocarbon group is a (mm²+1) valent hydrocarbon group, and depending on mm², it can be a 2- to 6 valent cyclic hydrocarbon group. The number of carbon atoms in the cyclic hydrocarbon group is preferably 3 to 30, more preferably 3 to 24, and even more preferably 3 to 20. Examples of alicyclic hydrocarbon groups include the following. The bonding site can be at any position. Specifically, monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkanediyl groups such as cyclopropanediyl, cyclobutanediyl, cyclopentanediyl, cyclohexanediyl, cycloheptanediyl, cyclooctanediyl, and cyclodecanediyl. Polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkanediyl groups such as decahydronaphthanediyl, adamantanediyl, norbornanediyl, norbornenediyl, and bicyclo[3.3.0]octanediyl. Furthermore, groups obtained by replacing one or more hydrogen atoms of the aforementioned groups with bonding sites can also be cited. Furthermore, cyclic hydrocarbon groups that form a double bond between two adjacent carbon atoms within an alicyclic hydrocarbon group include the following: TIFF2026047319000037.tif1182 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 3 to 12. Examples of aromatic hydrocarbon groups include phenylene groups, naphthylene groups, anthrylene groups, biphenylene groups, phenanthrylene groups, and other arylene groups. Furthermore, groups obtained by replacing one or more hydrogen atoms of the aforementioned groups with bonding sites can also be cited. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 24, more preferably 6 to 18, even more preferably 6 to 14, and even more preferably 6 to 10.

[0044] -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof, is -O-, -S-, -CO-, -SO-, -NR 11 The following groups are examples of groups that have been replaced by - or -SO2-. Also, the following groups have -O- replaced by -S-, -CO- replaced by -SO-, and -NR 11 Examples include groups replaced by -SO2-, respectively. The bonding site can be at any position. TIFF2026047319000038.tif89165 A cyclic hydrocarbon group is a cyclic hydrocarbon group having 3 to 18 carbon atoms (the hydrogen atoms contained in the cyclic hydrocarbon group may be replaced by substituents, and the -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -CO-, -SO-, -NR 11 Preferably, the substituents are -CH2- or -SO2-, and the substituents are -O-, -S-, -CO-, -SO-, -NR 11 It is more preferable that it is a group represented by any of the formulas (w1-1) to (w1-33), and may be replaced by - or -SO2-. TIFF2026047319000039.tif66163 [Formula (w1-1) to formula (w1-33), The hydrogen atoms in the group may be replaced by substituents, and the -CH2- groups in the group may be -O-, -S-, -CO-, -SO-, -NR 11 It may be replaced with - or -SO2-. The binding site is at any position.

[0045] W 21 The substituents on the cyclic hydrocarbon group included are halogen atoms, cyano groups, nitro groups, C1-C6 haloalkyl groups, and C1-C12 alkyl groups (the -CH2- contained in the alkyl group is -O-, -S-, -CO-, -SO-, -NR 11 Examples include: - or -SO2- (which may be replaced by -SO2-). Examples of the halogen atoms mentioned above include fluorine, chlorine, bromine, and iodine atoms. The C1-C6 haloalkyl groups mentioned above include C1-C6 alkyl fluorides, C1-C6 alkyl chlorides, C1-C6 alkyl bromides, and C1-C6 alkyl iodides. Examples of haloalkyl groups include C1-C6 perfluoroalkyl groups (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, fluoromethyl group, and difluoromethyl group. The number of carbon atoms in the haloalkyl group is preferably 1-4, and more preferably 1-3. Examples of alkyl groups having 1 to 12 carbon atoms as described above include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, hexyl, octyl, and nonyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. The -CH2- groups in the alkyl groups mentioned above are -O-, -S-, -CO-, -SO-, and -NR. 11 As mentioned above, examples of groups that can be replaced with - or -SO2- include hydroxyl groups, carboxyl groups, oxy groups, carbonyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, alkoxyalkyl groups, hydroxyalkyl groups, thiol groups, amino groups, thio groups, sulfonyl groups, peptide groups, alkylthio groups, alkylsulfonyl groups, alkylamino groups, alkylpeptide groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyloxy groups, alkanediyloxycarbonyloxy groups, alkanediylsulfonyl groups, alkanediylthio groups, alkanediylamino groups, alkanediylpeptide groups, and groups that combine two or more of these groups. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. W 21 The substituents that may be present are preferably halogen atoms, C1-C3 haloalkyl groups or C1-C6 alkyl groups (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), more preferably fluorine atoms, iodine atoms, C1-C3 fluorinated alkyl groups, C1-C3 alkyl groups, hydroxyl groups, C1-C3 alkoxy groups or carboxyl groups, even more preferably fluorine atoms, iodine atoms, trifluoromethyl groups, methyl groups, ethyl groups, hydroxyl groups, methoxy groups, ethoxy groups or carboxyl groups, and even more preferably fluorine atoms or iodine atoms. W 21 The number of substituents that may be present is not particularly limited, but is preferably one, two, or four.

[0046] W 21 This refers to a cyclic hydrocarbon group having 3 to 18 carbon atoms (the hydrogen atoms contained in the cyclic hydrocarbon group may be replaced by substituents, and the -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -CO-, -SO-, -NR 11 It is preferable that it is a cyclic hydrocarbon group represented by formula (W-0) (hereinafter sometimes referred to as "ring W-0"), and even more preferable that it is a cyclic hydrocarbon group represented by formula (W-1) (hereinafter sometimes referred to as "ring W-1"). TIFF2026047319000040.tif2555[In formula (W-0), W0 represents a cyclic hydrocarbon group having 3 to 10 carbon atoms, and the carbon atoms in the cyclic hydrocarbon group may form a double bond between two adjacent carbon atoms, and the -CH2- groups in the cyclic hydrocarbon group are -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2- may be replaced, and the hydrogen atoms contained in the cyclic hydrocarbon group may be substituted with substituents. R 22represents a halogen atom, a C1-C6 haloalkyl group, or a C1-C12 alkyl group, and the -CH2- contained in the alkyl group is -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- may be replaced, and the alkyl group is W 21 It bonds with carbon atoms contained in to form an alkanediyl bridge, and the -CH2- contained in the alkanediyl bridge is -O-, -CO-, -S-, -SO-, -NR 11 The alkanediyl bridge may be replaced by - or -SO2-, the carbon atoms in the alkanediyl bridge may form a double bond with two adjacent carbon atoms, and the alkanediyl bridge may have substituents. m22 represents an integer between 0 and 5, and when m22 is 2 or greater, multiple R 22 They may be identical or different from one another. * is L 21 This represents the connection site with A, where ** is A 21 This represents the connection point with [the other element]. TIFF2026047319000041.tif2562[In formula (W-1), W1 represents a cyclic hydrocarbon group with (5 + m21) carbon atoms, and the carbon atoms in the cyclic hydrocarbon group may form a double bond between two adjacent carbon atoms, and the -CH2- groups in the cyclic hydrocarbon group are -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2- may be replaced, and the hydrogen atoms contained in the cyclic hydrocarbon group may be substituted with substituents. R 22 represents a halogen atom, a C1-C6 haloalkyl group, or a C1-C12 alkyl group, and the -CH2- contained in the alkyl group is -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- may be replaced, and the alkyl group is W 21 It bonds with carbon atoms contained in to form an alkanediyl bridge, and the -CH2- contained in the alkanediyl bridge is -O-, -CO-, -S-, -SO-, -NR 11The alkanediyl bridge may be replaced by - or -SO2-, the carbon atoms in the alkanediyl bridge may form a double bond with two adjacent carbon atoms, and the alkanediyl bridge may have substituents. m21 represents an integer between 0 and 3. m22 represents an integer between 0 and 5, and when m22 is 2 or greater, multiple R 22 They may be identical or different from one another. * is L 21 This represents the connection site with A, where ** is A 21 This represents the connection point with [the other element]. In ring W-0 or ring W-1, the carbon atoms contained in ring W-0 or ring W-1 may form double bonds with two adjacent carbon atoms. There may be one, two, or three or more double bonds, and these may constitute an aromatic ring. As long as the upper limit of the number of carbon atoms allows, the same groups as those described above can be used for the cyclic hydrocarbon group of W0 with 3 to 10 carbon atoms or the cyclic hydrocarbon group of W1 with (5 + m21) carbon atoms (a ring of (5 + m21) membered rings). R 22 The alkyl group is W 21 Groups that bond with carbon atoms contained in to form an alkanediyl bridge include linear or branched alkanediyl groups, such as methylene groups, ethylene groups, propanediyl groups, butanediyl groups, pentadiyl groups, hexanediyl groups, and 2-methylene-propanediyl groups. The alkanediyl group is W 21 It bonds to two carbon atoms contained in the ring, but in this case, it may bond to the carbon atoms constituting the cyclic hydrocarbon group W0 in ring W-0 or W1 in ring W-1 to form an alkanediyl bridge, or there may be two or more alkanediyl groups, and the carbon atom constituting one alkanediyl group may bond to the carbon atom constituting another alkanediyl group to form an alkanediyl bridge. The substituents mentioned above may also be bonded to the alkanediyl bridge. The -CH2- contained in the alkanediyl group may be -O-, -CO-, -S-, -SO-, -NR 11When replaced with - or -SO2-, it is preferable that it be -O- or -S-. m21 is preferably an integer between 0 and 2, more preferably 0 or 1, and even more preferably 1. m22 is preferably an integer from 0 to 4, more preferably an integer from 0 to 2 and 4, even more preferably 0, 1 or 4, and even more preferably 0 or 1. The following cyclic hydrocarbon groups are preferred as the cyclic hydrocarbon group represented by formula (W-0) or formula (W-1). The bonding site can be at any position. TIFF2026047319000042.tif22140 In particular, the cyclic hydrocarbon group represented below is preferred. TIFF2026047319000043.tif18104

[0047] L 21 Examples of hydrocarbon groups in this material include linear or branched chain hydrocarbon groups such as alkanediyl groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups. Groups formed by combining two or more of these groups (for example, hydrocarbon groups formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and an alkanediyl group) are also acceptable. The number of carbon atoms in the hydrocarbon group is preferably 1 to 24, more preferably 1 to 20, and even more preferably 1 to 18. Examples of alkanediyl groups include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17-diyl group, and Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The ends of the branched alkanediyl groups may be alkyl groups such as methyl groups. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, even more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. Examples of monocyclic or polycyclic alicyclic hydrocarbon groups include the following groups. The bonding site can be at any position. TIFF2026047319000044.tif42165 Specifically, as alicyclic hydrocarbon groups, monocyclic divalent alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups like cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group, and Examples of polycyclic divalent alicyclic hydrocarbon groups include cycloalkyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, spirocyclohexane-1,2'-cyclopentane group, and spiroadamantane-2,3'-cyclopentane group, as well as polycyclic cycloalkanediyl groups such as spiro rings having a cycloalkyl group spiro-bonded to a norbornyl group or an adamantyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of aromatic hydrocarbon groups include phenylene groups, naphthylene groups, anthrylene groups, biphenylene groups, phenanthrylene groups, and other arylene groups. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. Examples of groups combining two or more types include groups combining an alicyclic hydrocarbon group and an alkanediyl group, groups combining an aromatic hydrocarbon group and an alkanediyl group, groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and groups combining an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and an alkanediyl group. In the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Also, any of the groups may be carbonyl groups or W 21 They may be bound together. Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-. L 21 The -CH2- groups contained in hydrocarbon groups with 1 to 28 carbon atoms are -O-, -S-, -SO-, -SO2-, and -NR. 11 - or -CO- may be used instead. The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO-, -SO2-, -NR 11Examples of groups replaced by - or -CO- include hydroxyl groups, thiol groups, carboxyl groups, amino groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, alkoxyalkyl groups, hydroxyalkyl groups, alkylthio groups, alkylsulfonyl groups, alkylamino groups, alkylpeptide groups, oxy groups, carbonyl groups, thio groups, sulfonyl groups, peptide groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyloxy groups, alkanediyloxycarbonyloxy groups, alkanediylthio groups, alkanediylsulfonyl groups, cycloalkoxy groups, alkanediylamino groups, alkanediylpeptide groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, or groups that combine two or more of these groups. These substituted groups may be similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Furthermore, the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof may be -O-, -S-, -CO-, -NR 11 Groups replaced with -, -SO-, or -SO2- include those similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms.

[0048] L 21 Examples of substituents that may be present include halogen atoms, cyano groups, nitro groups, etc. 21 The -CH2- contained in the chain hydrocarbon group such as alkyl groups is -O-, -S-, -CO-, -NR 11 By being replaced by -, -SO- or -SO2-, effectively, L 21 It can have substituents such as a hydroxyl group, carboxyl group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkoxycarbonyloxy group, alkoxyalkoxy group, alkylamino group, amino group, thiol group, alkylthio group, alkylsulfonyl group, alkylpeptide group, etc. Also, L21 However, in the case of a group that combines an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can substantially be used as a substituent on the alicyclic hydrocarbon group or aromatic hydrocarbon group. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. The substituent is preferably a C1-C6 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-) or a halogen atom, more preferably a hydroxyl group, a C1-C4 alkoxy group or a halogen atom, and even more preferably a hydroxyl group, a C1-C3 alkoxy group, a fluorine atom or an iodine atom.

[0049] L 21 Examples include single bonds and chain hydrocarbon groups having 1 to 12 carbon atoms that may have substituents (the -CH2- contained in the chain hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 -or may be replaced by -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be replaced by - or -CO-.) or a group formed by combining a chain hydrocarbon group having 1 to 10 carbon atoms which may have substituents and a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents (the -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11Examples include a single bond, a carbon 1-10 alkanediyl group (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), a carbon 3-12 cyclic hydrocarbon group which may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O- or -CO-), or a group formed by combining a carbon 1-4 alkanediyl group and a carbon 3-12 cyclic hydrocarbon group which may have substituents (the -CH2- contained in the alkanediyl group and the cyclic hydrocarbon group may be replaced with -O- or -CO-), more preferably a single bond or a carbon 1-8 alkanediyl group.

[0050] R 21 X included 1 It is preferably *-CO-O-, *-O-, or *-O-CO-O-, and preferably *-O- or *-O-CO-O-. * is Ar 21 This represents the connection point. R 21 X included 2 It is preferably *-CO-O-, *-O-CO-, or *-O-CO-O-, and more preferably *-CO-O- or *-O-CO-. * is L 11 This represents the connection point. R 21 L contained in 11 A hydrocarbon group which may have substituents (the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 -It may be replaced with -CO-.) 1 L included in etc 11 A hydrocarbon group which may have substituents (the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 Examples of groups similar to those exemplified as follows: - or -CO- (which may be replaced by -CO-).

[0051] L 11 Examples include chain hydrocarbon groups having 1 to 12 carbon atoms (these chain hydrocarbon groups may have substituents. The -CH2- contained in the chain hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 -or may be replaced by -CO-. ), a cyclic hydrocarbon group having 3 to 18 carbon atoms (the cyclic hydrocarbon group may have substituents. -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be replaced.) or a group formed by combining a chain hydrocarbon group having 1 to 10 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (the chain hydrocarbon group and the cyclic hydrocarbon group may have substituents. The -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 Examples include an alkanediyl group having 1 to 10 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) or a group combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 12 carbon atoms (the -CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced with -O- or -CO-), more preferably an alkanediyl group having 1 to 6 carbon atoms, even more preferably an alkanediyl group having 1 to 3 carbon atoms, and still more preferably a methylene group.

[0052] R 21 R included 10 As for the acid-unstable group, R 1 R included in etc 10 Examples of acid-unstable groups include those similar to those exemplified above.

[0053] R 21 Ar 21 The binding site to Ar 21 If the group is derived from a benzene ring, then A is independent of the others. 21 The bond position can be any of the or, m, or p positions. Among these, A21 It is preferable that at least one atom is bonded to the p-position or m-position relative to the bonding site of . 21 If the group is derived from a naphthalene ring, for example, A 21 If the bond position is at position 1, then any position from 2 to 8 is acceptable, A 21 If the bond position is at position 2, it can be at position 1 or any of positions 3 through 8. In particular, A 21 If the bonding position is at position 1, it is preferable that at least one is bonded at positions 3 to 6, A 21 If the bonding position is at position 2, it is preferable that at least one is bonded at positions 4 to 7. However, when mm21 is 2, R 21 It is preferable that adjacent elements are not substituted. R 21 is a hydroxyl group, -OR 10 , -O-CO-OR 10 or -OL 11 -CO-OR 10 Preferably, it is a hydroxyl group, -OR 10 or -OL 11 -CO-OR 10 It is more preferable that -OR 10 or -OL 11 -CO-OR 10 It is even more preferable that this be the case.

[0054] R 24 The halogen atom or hydrocarbon group (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR) 11 -It may be replaced with -CO-.) 2 Halogen atoms or hydrocarbon groups such as (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR) 11 The same groups as those exemplified are shown. (They may be replaced with - or -CO-.)

[0055] Ar 21The aromatic hydrocarbon group or heterocyclic aromatic hydrocarbon group (the aromatic hydrocarbon group and the heterocyclic hydrocarbon group may have substituents) is Ar 1 Examples of aromatic hydrocarbon groups or heterocyclic aromatic hydrocarbon groups (the aromatic hydrocarbon group and the heterocyclic hydrocarbon group may have substituents) include groups similar to those exemplified above. Ar 21 The group is preferably derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring, more preferably from a benzene ring or a naphthalene ring, and even more preferably from a benzene ring.

[0056] A 21 The hydrocarbon group (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR) 11 -It may be replaced with -CO-.) 1 Hydrocarbon groups such as (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR) 11 Examples of groups similar to those exemplified as follows: - or -CO- (which may be replaced by -CO-).

[0057] A 21 This refers to a single bond or a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- may be replaced by -, however, at least one of the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 It is preferable that it is replaced with - or -SO2-. Specifically, A 21 is ***-L 041 -X 04 -L 042 -is (X 04 -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- represents L 041 and L042 Each of these independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may be replaced with -SO2-. However, L 041 and L 042 The total number of carbon atoms is 0 to 18. *** is Ar 21 It is more preferable that A represents the bonding site. 21 is, ***-X 04 -L 04 - or ***-L 04 -X 04 -is (X 04 -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- represents L 04 -CH2- represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- may be used instead. *** is Ar 21 It is even more preferable that it represents the bonding site with. 21 -O-, -CO-, -S-, -SO-, -NR 11 Besides substitution with - or -SO2-, it is also preferable to have no substituents. L 041 , L 042 and L 04 A hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR) 11 -Or it may be replaced with -SO2-.) As for the number of carbon atoms, A 21 Similar groups to those listed above can be cited. X 04 -O-, -CO-, -S-, -NR 11 - or -SO2- is preferred, and -O-, -CO-, -S- or -NR 11- is more preferable, -O-, -CO- or -S- is even more preferable, and -O- or -CO- is even more preferable. L 041 , L 042 and L 04 Each of these is independently a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 It is preferable that the group be a single bond or a hydrocarbon group having 1 to 12 carbon atoms (the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 It is more preferable that the group is a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 10 carbon atoms (the -CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11It is even more preferable that it is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), it is even more preferable that it is a single bond or an alkanediyl group having 1 to 4 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), and it is even more preferable that it is a single bond or an alkanediyl group having 1 to 3 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-). In particular, it is preferable that the group is a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, an oxy group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxymethylene group, an ethyleneoxymethylene group, a methylenecarbonyloxy group, a methylenecarbonyloxymethylene group, or an ethyleneoxycarbonyl group, and more preferably a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, an oxy group, or a carbonyl group. However, L 041 and L 042 The total number of carbon atoms is between 0 and 18. Also, A 21 This refers to single bonds, chain hydrocarbon groups having 1 to 20 carbon atoms, cyclic hydrocarbon groups having 3 to 20 carbon atoms, or hydrocarbon groups having 4 to 20 carbon atoms formed by combinations thereof (however, the chain hydrocarbon group and the cyclic hydrocarbon group may have substituents, and the -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR). 11 - or -CO- may be replaced.) It is also preferable that the group be a single bond, a chain hydrocarbon group having 1 to 18 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a combination thereof of a hydrocarbon group having 4 to 18 carbon atoms (however, the chain hydrocarbon group and the cyclic hydrocarbon group may have substituents, and the -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR 11 It is more preferable that it be replaced with - or -CO-. mm21 is preferably 2, 3, or 4, more preferably 2 or 3, and even more preferably 2. m24 is preferably 0, 1, or 2, and more preferably 0 or 1. R 24 Examples include halogen atoms, C1-C8 haloalkyl groups, or C1-C12 alkyl groups (the -CH2- contained in the haloalkyl groups and alkyl groups may be replaced with -O- or -CO-), preferably halogen atoms, C1-C6 haloalkyl groups, or C1-C6 alkyl groups (the -CH2- contained in the haloalkyl groups and alkyl groups may be replaced with -O- or -CO-), more preferably fluorine atoms, iodine atoms, C1-C6 haloalkyl groups, or C1-C6 alkyl groups (the -CH2- contained in the haloalkyl groups and alkyl groups may be replaced with -O- or -CO-), and fluorine atoms, iodine atoms, or C1-C4 haloalkyl groups. It is more preferably a hydroxyl group or an alkyl group having 1 to 4 carbon atoms (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), even more preferably a fluorine atom, an iodine atom, a fluorinated alkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxyl group, a carboxyl group, or an alkoxy group having 1 to 3 carbon atoms, even more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxyl group, a carboxyl group, or an alkoxy group having 1 to 3 carbon atoms, and even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, an ethyl group, a hydroxyl group, a carboxyl group, a methoxy group, or an ethoxy group. R 24 Ar 21 The binding site to Ar is not particularly limited, but 21 If the group is derived from a benzene ring, then A 21 The bond position can be any of the or, m, or p positions. In particular, when m24 is 1, R 24 Each of them is independently, A 21It is preferable that the bond is at the p-position or m-position relative to the bond site. 24 Each of them is independently, A 21 It is preferable that one atom is bonded to the orthogonal or metagonal position and the other atom is bonded to the p- or metagonal position relative to the bonding site. When m24 is 3, R 24 Each of them is independently, A 21 It is preferable that two atoms are bonded to the orthogonal or metagonal position, and one atom is bonded to the paragonal or metagonal position. Also, Ar 21 If the group is derived from a naphthalene ring, for example, A 21 If the bond position is at position 1, then any position from 2 to 8 is acceptable, A 21 If the bond position is at position 2, it can be at position 1 or any of positions 3 through 8. In particular, A 21 If the bonding position is at position 1, it is preferable that at least one is bonded at positions 3 to 6, A 21 If the bond position is at position 2, it is preferable that at least one bond is located at positions 4 through 7. mm2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, even more preferably 1 or 2, and even more preferably 1.

[0058] Examples of anions (I) include the following: TIFF2026047319000045.tif249147

[0059] TIFF2026047319000046.tif248153

[0060] TIFF2026047319000047.tif248147

[0061] TIFF2026047319000048.tif199162

[0062] Examples of carboxylate salts (I) include salts obtained by arbitrarily combining the cations and anions mentioned above. Specific examples of carboxylate salts (I) are shown in the table below. In the table below, each symbol represents the symbol attached to the structure representing the anion or cation described above, and "~" indicates that the carboxylate salt (I) and the anion (I) correspond to each other. For example, carboxylate salt (I-1) means a salt consisting of the anion shown in formula (Ia-1) and the cation shown in formula (Ic-1), and represents the carboxylate salts shown below. Also, carboxylate salt (I-2) refers to a salt consisting of the anion shown in formula (Ia-2) and the cation shown in formula (Ic-1), and carboxylate salt (I-61) refers to a salt consisting of the anion shown in formula (Ia-1) and the cation shown in formula (Ic-2). TIFF2026047319000049.tif43153 [Table 1] TIFF2026047319000051.tif244161 TIFF2026047319000052.tif187155

[0063] In particular, as the carboxylate salt (I), a salt combining an anion represented by any of formulas (Ia-1) to (Ia-65) and a cation represented by any of formulas (Ic-1) to (Ic-105) is preferred.

[0064] <Method for producing carboxylate salt (I)> Carboxylate salt (I) can be produced, for example, by reacting a salt represented by formula (Ia) with a compound represented by formula (Ib) in a solvent in the presence of silver oxide, and optionally by acid treatment. TIFF2026047319000053.tif78167[In the formula, symbols other than those listed below have the same meaning as described above. X x This represents a chlorine atom, a bromine atom, or an iodine atom. Examples of solvents used in this reaction include chloroform, acetonitrile, methanol, and deionized water. The reaction temperature is typically between 0°C and 80°C, and the reaction time is typically between 0.5 hours and 24 hours.

[0065] Compounds represented by formula (Ib) include, for example, the compounds shown below, which are readily available on the market and can also be easily manufactured by known methods. TIFF2026047319000054.tif177159

[0066] The salt represented by formula (Ia) can be produced by reacting the salt represented by formula (Ic) with the compound represented by formula (I-d1), the compound represented by formula (I-d2), and the compound represented by formula (I-d3) in a solvent in the presence of a catalyst, and, if necessary, by acid treatment. TIFF2026047319000055.tif64154[In the formula, symbols other than those listed below have the same meaning as above. R aa is a fluorine atom or -(CO) aa -OH represents OH, and aa represents 0 or 1. 1 ' is, A 1 from-(CO) aa It represents the group with -O- removed, A 2 ' is, A 2 from-(CO) aa [Represents the group with the -O- removed.] Examples of catalysts include potassium carbonate, sodium hydride, carbonyldiimidazole, and 1-[3-(dimethylamino)propyl]-3-ethylcarbodiimide hydrochloride. Examples of solvents include chloroform, monochlorobenzene, acetonitrile, and water. Examples of acids include hydrochloric acid, sulfuric acid, p-toluenesulfonic acid, and trifluoromethanesulfonic acid. The reaction temperature is typically between 15°C and 100°C, and the reaction time is typically between 0.5 and 24 hours.

[0067] Examples of salts represented by formula (Ic) include those represented by the following formula, and are readily available from the market. TIFF2026047319000056.tif114162

[0068] Examples of compounds represented by formula (I-d1) and formula (I-d2) include the following compounds, which are readily available from the market. TIFF2026047319000057.tif136154

[0069] [Carboxylic acid generator] The carboxylic acid generator of the present invention is an acid generator containing a carboxylate salt (I). The carboxylate salt (I) of the present invention can act as an acid generator or quencher in a resist composition. When the carboxylate salt (I) is used as an acid generator or quencher in a resist composition, the acid generator or quencher may contain only one type or two or more types of carboxylate salts (I). Furthermore, the carboxylic acid generator of the present invention may further contain an acid generator known in the resist field other than carboxylate salt (I) (hereinafter sometimes referred to as "acid generator (B)" or "compound (B)") and / or a carboxylic acid generator known in the resist field other than carboxylate salt (I), as described later. Acid generator (B) may be used alone or in combination of two or more types. When the carboxylic acid generator of the present invention contains an acid generator (B), etc., the ratio (mass ratio; carboxylic acid salt (I): acid generator (B), etc.) of the carboxylic acid salt (I): acid generator (B), etc. is usually 1:99 to 100:0, preferably 1:99 to 99:1, more preferably 2:98 to 98:2, and even more preferably 5:95 to 95:5.

[0070] [Resist composition] The resist composition of the present invention contains a carboxylic acid generator containing the carboxylic acid salt (I) of the present invention. In addition to the carboxylic acid generator, the resist composition of the present invention may also contain an acid generator other than the carboxylic acid generator (hereinafter sometimes referred to as "acid generator (B)" or "compound (B)") and / or a compound containing a structure represented by formula (L0) (hereinafter sometimes referred to as "compound (L0)"). The resist composition of the present invention preferably further contains a quencher (hereinafter sometimes referred to as "quencher (C)") and / or a solvent (hereinafter sometimes referred to as "solvent (E)"). In the resist composition of the present invention, the content of carboxylate salt (I) is preferably 0.1% by mass or more and 99.9% by mass or less, with respect to the solid content of the resist composition being 0.1% by mass or more and 95% by mass or less, more preferably 0.5% by mass or more and 90% by mass or less, even more preferably 1% by mass or more and 89% by mass or less, even more preferably 3% by mass or more and 88% by mass or less, even more preferably 5% by mass or more and 87% by mass or less, even more preferably 10% by mass or more and 85% by mass or less, and even more preferably 15% by mass or more and 80% by mass or less.

[0071] <Acid Generator (B)> The acid generator (B) may be either a nonionic or ionic compound. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxiimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate) and sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane). Typical ionic compounds include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of onium salt anions include sulfonic acid anions, sulfonylimide anions, sulfonylmethide anions, and carboxylic acid anions. The acid generator (B) may be a part of the structural units that constitute the resin contained in the resist composition of the present invention, as shown in the structural unit (a7) described later.

[0072] As the acid generator (B), compounds that generate acid by radiation as described in Japanese Patent Publication Nos. 63-26653, 55-164824, 62-69263, 63-146038, 63-163452, 62-153853, 63-146029, U.S. Patent Nos. 3,779,778 and 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc., can be used. Compounds manufactured by known methods may also be used. The acid generator (B) may be used alone or in combination of two or more types. The acid generator (B) may be an acid generator having an acid-unstable group. For example, the compound or resin that acts as the acid generator may contain a substructure that constitutes an acid-unstable group, and it is preferable that the acid-unstable group contains group (1) or group (2) described later. If the resist composition of the present invention contains a compound having an acid-unstable group, it does not need to contain a resin containing a structural unit having an acid-unstable group.

[0073] Preferred forms of the acid generator (B) include a salt represented by formula (B1) (hereinafter sometimes referred to as "salt (B1)" or "acid generator (B1)") and a salt represented by formula (B2) (hereinafter sometimes referred to as "salt (B2)" or "acid generator (B2)"). JPEG2026047319000058.jpg1392 [In formula (B1), all symbols have the same meaning as described above.]

[0074] L b1 As for (nb1+1) valent hydrocarbon groups, one nb hydrogen atom is removed from a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group formed by combining two or more of these groups, resulting in 1 or more L b2 A group that bonds with the hydrocarbon group is an example. The number of carbon atoms in the hydrocarbon group is 1 to 48, preferably 1 to 42, more preferably 1 to 36, even more preferably 1 to 30, even more preferably 1 to 24, and even more preferably 1 to 18. Examples of chain-like hydrocarbon groups include alkyl groups or alkenyl groups from which one nb hydrogen atom has been removed. Alkyl groups may be linear or branched, and specifically include methyl, ethyl, n-propyl, iso-propyl, n-butyl, sec-butyl, iso-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl, nonyl, decyl, undecyl, dodecyl, tridecyl, tetradecyl, pentadecyl, and heptadecyl groups. Examples of alkenyl groups include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 20, even more preferably 1 to 18, even more preferably 1 to 12, and even more preferably 1 to 10. Examples of alicyclic hydrocarbon groups include groups obtained by removing one nb hydrogen atom from a monocyclic or polycyclic cycloalkyl group. Examples of monocyclic cycloalkyl groups include cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups. Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a cross-linking structure, cycloalkyl groups formed by the condensation of two or more rings, or cycloalkyl groups formed by the spirolinking of two rings. Examples of cycloalkyl groups having a cross-linking structure include norbornyl groups and adamantyl groups. Examples of cycloalkyl groups formed by the condensation of two or more rings include bicyclo[4.4.0]decanyl groups and steroid groups (steroid skeletons). Examples of cycloalkyl groups formed by the spirolinking of two rings include spirocyclic cycloalkyl groups in which one cycloalkyl group selected from the group consisting of cyclopentyl, cyclohexyl, norbornyl, and adamantyl groups is spirolinked to a cycloalkyl group having 5 to 8 carbon atoms. Furthermore, a double bond may be formed between two carbon atoms in the alicyclic hydrocarbon group. More specifically, examples include alicyclic hydrocarbon groups represented by the following formula. TIFF2026047319000059.tif41165 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, even more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, even more preferably 6 to 12, and even more preferably 7 to 12. Aromatic hydrocarbon groups include those obtained by removing one hydrogen atom from the nb side of an aryl group. Examples of aryl groups include phenyl, naphthyl, anthryl, biphenyl, and fluorenyl groups. More specifically, examples include aromatic hydrocarbon groups represented by the following formula. TIFF2026047319000060.tif1185 The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, even more preferably 5 to 14, even more preferably 5 to 10, and even more preferably 6 to 10. L b1Among the hydrocarbon groups, groups in which the -CH2- contained in a chain hydrocarbon group is replaced with -O-, -CO-, -S-, -SO-, or -SO2- include: hydroxyl group (a group in which the -CH2- contained in a methyl group is replaced with -O-), carboxyl group (a group in which the -CH2-CH2- contained in an ethyl group is replaced with -O-CO-), carbonyl group (a group in which the -CH2- contained in a methylene group is replaced with -CO-), oxy group (a group in which the -CH2- contained in a methylene group is replaced with -O-), alkoxy group (a group in which the -CH2- contained in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which the -CH2-CH2- contained in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (al Examples include groups in which -CH2- at any position in the alkyl group is replaced with -CO-, alkylcarbonyloxy groups (groups in which -CH2-CH2- at any position in the alkyl group is replaced with -CO-O-), alkanediyloxy groups (groups in which -CH2- at any position in the alkanediyl group is replaced with -O-), alkanediyloxycarbonyl groups (groups in which -CH2-CH2- at any position in the alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl groups (groups in which -CH2- at any position in the alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy groups (groups in which -CH2-CH2- at any position in the alkanediyl group is replaced with -CO-), etc. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. L b1Among the hydrocarbon groups, groups in which the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof is replaced with -O-, -CO-, -S-, -SO-, or -SO2- include groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactone rings), cyclic thioethers, cyclic acetals, cyclic sulfonic acid esters (sultone rings), groups derived from furan rings, thiophene rings, etc. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Groups combining two or more chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups include groups combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, groups combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, groups combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and groups combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. Groups combining alicyclic hydrocarbon groups and aromatic hydrocarbon groups may be fused rings. L b2 Examples of divalent hydrocarbon groups include divalent chain hydrocarbon groups, divalent alicyclic hydrocarbon groups, divalent aromatic hydrocarbon groups, and groups formed by combining two or more of these groups. By removing one hydrogen atom from a monovalent hydrocarbon group, Y b1 Examples of groups that bond with it include: L b2 The divalent chain hydrocarbon group, the divalent alicyclic hydrocarbon group, the divalent aromatic hydrocarbon group, and the divalent group formed by combining two or more of these groups, each within the limits permitted by the upper limit of the number of carbon atoms, L b1 Examples include monovalent chain hydrocarbon groups, monovalent alicyclic hydrocarbon groups, monovalent aromatic hydrocarbon groups, and monovalent groups obtained by removing one hydrogen atom from a combination of two or more of these monovalent groups. L b1 and L b2 The hydrocarbon group may have substituents such as halogen atoms, cyano groups, and nitro groups. Examples of halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms. L b1 and L b2However, if the group is a combination of an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, the chain hydrocarbon group may be substantially considered as a substituent of the alicyclic hydrocarbon group or aromatic hydrocarbon group. b1 and L b2 The -CH2- in the chain hydrocarbon group contained in the hydrocarbon group is replaced by -O-, -CO-, -S-, -SO-, or -SO2-, L b1 and L b2 The hydrocarbon group may substantially have substituents such as a hydroxyl group, carboxyl group, carbonyl group, oxycarbonyl group, carbonyloxy group, alkoxy group, alkylcarbonyl group, alkoxycarbonyl group, alkylcarbonyloxy group, thiol group, alkylthio group, and alkylsulfonyl group. L b1 and L b2 The number of substituents that may be present is not particularly limited, and it may have multiple substituents. Y b1 Examples of cyclic hydrocarbon groups include alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups that combine alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1 The alicyclic hydrocarbon group and aromatic hydrocarbon group are, respectively, L b1 Examples include the same alicyclic hydrocarbon groups and aromatic hydrocarbon groups as exemplified above, and if they do not have substituents, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1 Examples of substituents that the methyl group and cyclic hydrocarbon group may have include halogen atoms, cyano groups, nitro groups, or C1-C18 hydrocarbon groups that may have halogen atoms, cyano groups, or nitro groups (the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-). b1 The number of carbon atoms in the methyl group and the cyclic hydrocarbon group that may have is Y b1 The number of carbon atoms in the methyl group and cyclic hydrocarbon group is not included. As for halogen atoms, L b1 and L b2Examples of substituents include halogen atoms similar to those exemplified above. Y b1 The methyl group and cyclic hydrocarbon group may have as substituents, and hydrocarbon groups having 1 to 18 carbon atoms include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups. Examples of chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining two or more of these groups include, within the limits permitted by the upper limit of carbon atoms, L b1 Examples include the chain-like hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining two or more of these groups, as exemplified above. Also, Y b1 Examples of groups in which the methyl group and cyclic hydrocarbon group may have as substituents, and in which the -CH2- in a hydrocarbon group having 1 to 18 carbon atoms is replaced with -O-, -S-, -CO-, -SO-, or -SO2-, are given within the limits permitted by the upper limit of carbon atoms. b1 Groups in which the -CH2- contained in the hydrocarbon group is replaced with -O-, -S-, -CO-, -SO-, or -SO2- are similar to the groups exemplified above. Also, Y b1 The methyl group and cyclic hydrocarbon group may have as substituents a hydrocarbon group having 1 to 18 carbon atoms, which may constitute a protecting group or a leaving group (acid-unstable group or base-unstable group) commonly used in the field.

[0075] The anion in the salt represented by formula (B1) is preferably the anion represented by the following formula (B1-A1) (hereinafter sometimes referred to as "anion (B1-A1)") or the anion represented by formula (B1-A2) (hereinafter sometimes referred to as "anion (B1-A2)"). TIFF2026047319000061.tif30126[In formula (B1-A1), L b2 and Y b1 This has the same meaning as formula (B1). Q b1 Q b2 Q b3 and Q b4Each of these independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer between 0 and 6. When z1 is 2 or greater, the bases within the parentheses may be the same or different. X 1 -O-CO-, -CO-O-, -O-CO-O-, or -O-. L b3 represents a (nb2+1) valent hydrocarbon group having 1 to 24 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-. nb2 represents an integer between 1 and 3. When nb2 is 2 or greater, the bases within the parentheses may be the same or different. Q b1 Q b2 Q b3 and Q b4 Examples of alkyl groups include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, and hexyl groups. Q b1 Q b2 Q b3 and Q b4 Examples of perfluoroalkyl groups include trifluoromethyl, perfluoroethyl, perfluoropropyl, perfluoroisopropyl, perfluorobutyl, perfluorosec-butyl, perfluorotert-butyl, perfluoropentyl, and perfluorohexyl groups. Q b1 and Q b2 Q b1 and Q b2 Preferably, at least one of them contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4Each of these is preferably independently a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, Q b3 Q is preferably a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms. b4 It is preferable that this is a hydrogen atom or a fluorine atom. z1 is preferably an integer between 0 and 3, and more preferably 0, 1, or 2. X 1 It is preferable that it be -O-CO- or -CO-O-.

[0076] L b3 As for the hydrocarbon group in this, within the limits permitted by the upper limit of the number of carbon atoms, L of formula (B1) b1 The same hydrocarbon groups as in the example above can be cited. L b3 It is preferably a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have substituents (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-), an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have substituents (the -CH2- contained in the aromatic hydrocarbon group may be replaced with -O- or -S-), or a group formed by combining two or more of these groups, and more preferably a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms, or a group represented by the following formula (Lb3-1). Furthermore, when -CH2- contained in a chain hydrocarbon group is replaced with -O- or -CO-, it is preferable that the number of -CH2- contained in the chain hydrocarbon group that is replaced with -O- or -CO- is 1 to 4, and it is preferable that one -CH2-CH2- contained in the chain hydrocarbon group is replaced with -O-CO- or -CO-O-, or that one -CH2-CH2-CH2- contained in the chain hydrocarbon group is replaced with -O-CO-O-. TIFF2026047319000062.tif1581[In formula (Lb3-1), nb2 has the same meaning as the expression (B1-A1). L b31 represents a single bond or a chain-like hydrocarbon group having 1 to 12 carbon atoms, and the -CH2- contained in the chain-like hydrocarbon group may be replaced with -O- or -CO-, and the chain-like hydrocarbon group may have substituents. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, wherein the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO- or -SO2-, and the -CH2- contained in the aromatic hydrocarbon group may be replaced with -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have substituents. * and ** represent bonding sites, where * is X 1 This represents the connection point with [the other element]. In formula (Lb3-1), L b31 The chain-like hydrocarbon group is L as long as the upper limit of the number of carbon atoms allows. b1 Examples of similar groups to the chain-like hydrocarbon groups exemplified above include those mentioned earlier. In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group are L as long as the upper limit of the number of carbon atoms allows. b1 Examples of similar groups to the alicyclic hydrocarbon groups and aromatic hydrocarbon groups exemplified above include the alicyclic hydrocarbon groups and aromatic hydrocarbon groups. In formula (Lb3-1), L b31 The chain-like hydrocarbon group may have substituents and W b3 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group may have are L b1 Examples of substituents that the hydrocarbon group may have include groups similar to those exemplified above. L b31 Preferably, the component is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-). Among them, W b3 Examples of alicyclic hydrocarbon groups and aromatic hydrocarbon groups include the following: In the alicyclic hydrocarbon groups and aromatic hydrocarbon groups shown below, * and ** represent bonding sites, and * is X 1 or Lb31 This represents the bonding site with , where ** represents a hydrogen atom, substituent, or L b2 This represents the bonding site with L, and at least one ** is L b2 This represents the bonding site with . Furthermore, in the alicyclic hydrocarbon group shown below, the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-. When the -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO-, -SO-, or -SO2-, it is preferable that an ether ring, ester ring (lactone), carbonate ester ring, sulfonic acid ester ring (sultone), or acetal ring is formed. In formula TIFF2026047319000063.tif37164 (B1-A1), L b2 The carbon atoms are preferably single bonds or chain hydrocarbon groups having 1 to 12 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), and are single bonds, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 Either one represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. 2 represents -O-, -CO-O-, -O-CO-, or -O-CO-O-. * and ** represent bonding sites, and ** is Y b1 This represents the bonding site with L. b21 , X 2 and L b22 It is more preferable that the total number of carbon atoms is 12 or less. In equation (B1-A1), Y b1It is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms that may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms that may have substituents, and even more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms that may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), or an aromatic hydrocarbon group having 6 to 10 carbon atoms that may have substituents. Specifically, it is preferably a group represented by the following formulas (Y1) to (Y36). In formulas (Y1) to (Y36), R Yb is a hydrogen atom or Y b1 Among the substituents that the cyclic hydrocarbon group may have, represent an alkyl group having 1 to 4 carbon atoms, R Yc is a hydrogen atom or Y b1 This represents substituents that the cyclic hydrocarbon group may have, and * represents L b2 This represents the bonding site. The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formula may have other substituents, although they are not specifically shown in the following formula. TIFF2026047319000064.tif83160

[0077] The anion represented by formula (B1-A1) is preferably the anion represented by formulas (B1-A1-1) to (B1-A1-85) [hereinafter, depending on the formula number, it may be referred to as "anion (B1-A1-1)", etc.], and more preferably the anion represented by any of formulas (B1-A1-1) to (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formula (B1-A1-24) to (B1-A1-33), formula (B1-A1-36) to (B1-A1-40), or formula (B1-A1-47) to (B1-A1-85). TIFF2026047319000065.tif216160

[0078] TIFF2026047319000066.tif249151

[0079] TIFF2026047319000067.tif250154

[0080] Here R i2 ~R i7 These are, independently of each other, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8 For example, this is an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by a combination thereof, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. A41 This is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 This expresses the same meaning as above. An example of anion represented by formula (B1-A1) is the anion described in Japanese Patent Publication No. 2010-204646.

[0081] Preferred anions represented by formula (B1-A1) include those represented by formulas (B1a-1) to (B1a-72), respectively. Among these, anions represented by any of the following are preferred: formulas (B1a-1) to (B1a-4), formulas (B1a-7) to (B1a-11), formulas (B1a-14) to (B1a-30), and formulas (B1a-35) to (B1a-70). TIFF2026047319000068.tif176159

[0082] TIFF2026047319000069.tif252161

[0083] TIFF2026047319000070.tif90165

[0084] The anion represented by equation (B1-A2) is expressed by the following equation: TIFF2026047319000071.tif23100[In formula (B1-A2), L b2 and Y b1 This has the same meaning as formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and the -CH2- contained in the alkyl group may be replaced with -O- or -CO-. nb4 represents an integer between 1 and 5. When nb4 is 2 or greater, the bases within the parentheses may be the same or different. nb3 represents an integer between 0 and 4. When nb3 is 2 or greater, multiple R b1 They may be the same or different from one another. However, the condition 1 ≤ nb4 + nb3 ≤ 5 must be satisfied.

[0085] In equation (B1-A2), L b2 The hydrocarbon group and Y b1 Examples of cyclic hydrocarbon groups include L in formula (B1), to the extent permitted by the upper limit of the number of carbon atoms. b2 The hydrocarbon group and Y b1 Examples of cyclic hydrocarbon groups are the same as those shown. b2 The hydrocarbon group, Y b1 The substituents that the methyl group and cyclic hydrocarbon group may have are also the L of formula (B1) b2 The hydrocarbon group, Y b1 Examples of substituents that the methyl group and cyclic hydrocarbon group may have are the same as those mentioned above. These hydrocarbon groups, methyl groups, and cyclic hydrocarbon groups may have one or more substituents. L b2 Preferably, is a chain-like hydrocarbon group having 1 to 12 carbon atoms (the -CH2- contained in the chain-like hydrocarbon group may be replaced with -O- or -CO-), and more preferably, *-CO-OL b41 -(L b41 * is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. -This represents the bonding site with the benzene ring to which it is bonded. b41 The preferred component is a single bond or a chain-like hydrocarbon group having 1 to 3 carbon atoms. Y b1 Preferably, it is a cyclic hydrocarbon group having 3 to 20 carbon atoms that may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms that may have substituents, and Y of formula (B1-A1) b1 or L b1 It is even more preferable that the group is an alicyclic hydrocarbon group or an aromatic hydrocarbon group as exemplified above. Specifically, it is preferably a group represented by formulas (Y1) to (Y36) described above, and more preferably a group represented by formulas (Y1) to (Y19) described above. Y b1 The substituents that the cyclic hydrocarbon group may have are preferably halogen atoms or C1-C6 alkyl groups (the -CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-), more preferably fluorine atoms, iodine atoms, or C1-C4 alkyl groups (the -CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-), even more preferably fluorine atoms, iodine atoms, hydroxyl groups, C1-C3 alkoxy groups, or C1-C4 alkyl groups, and even more preferably fluorine atoms, iodine atoms, hydroxyl groups, or C1-C4 alkyl groups. b1 The substituents may be protecting groups or leaving groups (acid-unstable or base-unstable groups) commonly used in the field.

[0086] In formula (B1-A2), nb4 is preferably an integer from 1 to 4, more preferably an integer from 1 to 3, even more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 The binding position is SO3 - The following structure is preferable, where the benzene ring is meta-substituted relative to the bonded position. TIFF2026047319000072.tif25105[In the above formula, L b2 , Y b1 , R b1 nb3 has the same meaning as formula (B1-A2). In formula (B1-A2), if nb4 is 2 or more, multiple L b2 and Y b1 It is preferable that these are the same group.

[0087] R b1 Examples of alkyl groups having 1 to 6 carbon atoms include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, and hexyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3. R b1 Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. Groups in which the -CH2- group in an alkyl group is replaced with -O- or -CO- include hydroxyl groups, carboxyl groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, oxy groups, and carbonyl groups. These replaced groups are similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. R b1Each of these is preferably independently a halogen atom or a C1-C4 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, or a C1-C3 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methoxy group, or a methyl group. nb3 is preferably an integer between 0 and 3, and more preferably an integer between 0 and 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 It is preferable that R is a halogen atom, b1 It is more preferable that nb3 is a fluorine atom or an iodine atom. When nb3 is 2, R b1 Preferably, one of them is a halogen atom, and the other is a halogen atom or an alkyl group having 1 to 4 carbon atoms, R b1 It is more preferable that one of the atoms is a fluorine atom or an iodine atom, and the other atom is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0088] Examples of anions represented by formula (B1-A2) include the following anions. Among these, anions represented by formulas (B2a-1) to (B2a-32) are preferred, and anions represented by formulas (B2a-1) to (B2a-11) and (B2a-16) to (B2a-20) are more preferred. The following anions are some R b1 The figure is omitted and may include substituents that are not shown. TIFF2026047319000073.tif173159

[0089] Examples of acid generators (B2) include salts represented by the following formula. TIFF2026047319000074.tif1292[In formula (B2), all signs have the same meaning as described above.]

[0090] In equation (B2), L b2’ and Y b1’ An example of this is L in formula (B1-A1). b2 and Y b1 Similar bases can be cited. L b2 ' is a single bond, *-L b23 -, *-L b23 -X 2 - or *-L b23 -X 2 -W 2 -X 3 -(L b23 X represents a chain-like hydrocarbon group having 1 to 6 carbon atoms, which may contain a fluorine atom. 2 and X 3 These independently represent -O-, -CO-O-, -O-CO-, -O-CO-O-, or -O-. 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-. * represents the bonding site with SO2. ) is preferable. Y b1 ' is preferably a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, -SO-, or -SO2-), and more preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have substituents. Specifically, it is preferably a trifluoromethyl group or a group represented by formulas (Y1) to (Y36) as exemplified in formula (B1-A1). In the salt anion represented by formula (B2), two -SO2-L b2 '-Y b1 ' together becomes A 1 When forming a ring containing this, for example, an anion represented by formula (B2') can be cited. TIFF2026047319000075.tif21112[In formula (B2'), A 1 , Y b1 ', L b2 ' and nb5 have the same meaning as formula (B2). W b4 This represents a disulfonylimide ring or disulfonylmethide ring having 2 to 12 carbon atoms, which may contain a fluorine atom. W b4 The disulfonylimide ring or disulfonylmethide ring may have 3 to 12 carbon atoms, preferably 3 to 6 carbon atoms, and it is preferable that the hydrogen atoms of the methylene group contained in the ring are replaced with fluorine atoms.

[0091] The following are examples of anions in the salt represented by formula (B2). Among these, the anions represented by formulas (B3a-1), (B3a-2), (B3a-12) to (B3a-14) are preferred. TIFF2026047319000076.tif174164

[0092] Furthermore, in another form of the acid generator (B), a salt obtained by replacing the anion in the salt represented by formula (B1) with a carboxylate anion is also suitably used as the acid generator (B). Examples of carboxylic acid anions include the following: TIFF2026047319000077.tif40154

[0093] Z1 + and Z2 +Examples of organic cations include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and aryl sulfonium cations or aryl iodonium cations are more preferred. Specifically, examples include cations represented by any of formulas (b2-1) to (b2-5) (hereinafter, depending on the formula number, they may be referred to as "cation (b2-1)," etc.). TIFF2026047319000078.tif84159 [Formula (b2-1) to (b2-5), R b4 ~R b6 Each of these independently represents a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms. The hydrogen atoms in the chain hydrocarbon group may be substituted with a hydroxyl group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group. The hydrogen atoms in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxyl group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkyl fluoride group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 These atoms may bond with each other and form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b7 and R b8 Each of these independently represents a halogen atom, a hydroxyl group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m7 and n8 each independently represent an integer between 0 and 5. When m7 is 2 or more, multiple Rb7 They may be the same or different, and when n8 is 2 or more, multiple R b8 They may be the same or different. R b9 and R b10 Each of these independently represents either a chain-like hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 These atoms may bond with each other and form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b11 This represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 This represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atoms contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 These may be bonded to each other and form a ring including the -CH-CO- groups to which they are bonded, and the -CH2- groups included in the ring may be replaced by -O-, -S-, or -CO-. R b13 ~R b18 and R b21 ~R b26 Each of these independently represents a halogen atom, a hydroxyl group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 These atoms may bond with each other and together with the benzene ring to which they are bonded, form a ring containing a sulfur atom, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group having an acid-labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of any one of 0 to 5. q2 and r2 each independently represent an integer of any one of 0 to 4. u2 represents 0 or 1. When o2 is 2 or more, the plurality of R b13 are the same or different, and when p2 is 2 or more, the plurality of R b14 are the same or different, and when q2 is 2 or more, the plurality of R b15 are the same or different, and when r2 is 2 or more, the plurality of R b16 are the same or different, and when s2 is 2 or more, the plurality of R b17 are the same or different, and when t2 is 2 or more, the plurality of R b18 are the same or different. u3 represents an integer of any one of 1 to 3 and satisfies 1 ≦ u3 + q23 ≦ 5. u4 and u5 each independently represent an integer of any one of 0 to 3 and satisfy 0 ≦ u4 + o21 ≦ 5 and 0 ≦ u5 + p22 ≦ 5. o21, p22, q23, r24, t25, and s26 each independently represent an integer of any one of 0 to 4. When u3, u4, and u5 are each 2 or more, the groups within the plurality of parentheses are each the same or different. When o21, p22, q23, r24, t25, and s26 are each 2 or more, the plurality of R b21 ~R b26 are each the same or different.

[0094] When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and R b13 ~R b16At least one of them is preferably a halogen atom. When u2 is 1, any one of o2, p2, s2, t2, q2 and r2 is 1 or more, and R b13 ~R b18 At least one of them is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. Also, when u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom. The aliphatic hydrocarbon group represents a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and 2-ethylhexyl group. In particular, the chain hydrocarbon group of R b9 ~R b12 is preferably C1-C12. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group and cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups. TIFF2026047319000079.tif11157 In particular, the alicyclic hydrocarbon group of R b9 ~R b12 is preferably C3-C18, more preferably C4-C12. Examples of alicyclic hydrocarbon groups in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include methylcyclohexyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, 2-ethyladamantan-2-yl group, 2-isopropyladamantan-2-yl group, methylnorbornyl group, and isobornyl group. In alicyclic hydrocarbon groups in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. A fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and containing a fluorine atom, such as a fluoromethyl group, difluoromethyl group, trifluoromethyl group, or perfluorobutyl group. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, biphenyl, naphthyl, and phenanthryl groups. Aromatic hydrocarbon groups may have a chain-like hydrocarbon group or an alicyclic hydrocarbon group, and examples include aromatic hydrocarbon groups having a chain-like hydrocarbon group (tolyl, xylyl, cumenyl, mesityl, p-ethylphenyl, p-tert-butylphenyl, 2,6-diethylphenyl, 2-methyl-6-ethylphenyl, etc.) and aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl, p-adamantylphenyl, etc.). Furthermore, if the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferred. Examples of aromatic hydrocarbon groups in which a hydrogen atom is substituted with an alkoxy group include the p-methoxyphenyl group. Examples of chain-like hydrocarbon groups in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl, phenethyl, phenylpropyl, trityl, naphthylmethyl, and naphthylethyl groups. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, heptyloxy, octyloxy, decyloxy, and dodecyloxy groups. Examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. Examples of alkylcarbonyloxy groups include methylcarbonyloxy group, ethylcarbonyloxy group, propylcarbonyloxy group, isopropylcarbonyloxy group, butylcarbonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyloxy group, and 2-ethylhexylcarbonyloxy group. R b4 and R b5 The ring formed by the bonding of these atoms to each other and the sulfur atoms to which they are bonded may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. Examples of such rings include those with 3 to 18 carbon atoms, preferably those with 4 to 18 carbon atoms. Furthermore, examples of sulfur atom-containing rings include those with 3 to 12 membered rings, preferably those with 3 to 7 membered rings, and the following rings are examples. * indicates a bonding site. TIFF2026047319000080.tif24142R b9 and R b10 The ring formed by the combination of these elements may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. Examples include a thiolan-1-ium ring (tetrahydrothiophenium ring), a thian-1-ium ring, and a 1,4-oxatian-4-ium ring. R b11 and R b12 The ring formed by the combination of these elements may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. Examples include oxocycloheptane rings, oxocyclohexane rings, oxonorbornane rings, and oxoadamantane rings. R b27 ~R b29Groups containing acid-unstable groups include -R c30 , -CO-OR c30 or -L c10 -CO-OR c30 The group indicated by (L c10 R represents an alkanediyl group with 1 to 6 carbon atoms. c30 This represents an acid-unstable group. Examples include: R b27 ~R b29 Examples of acid-unstable groups include those represented by formula (1) or formula (2).

[0095] Among cations (b2-1) to (b2-5), cation (b2-1), cation (b2-4), or cation (b2-5) are preferred. The following cations can be considered as cations (b2-1): TIFF2026047319000081.tif172164

[0096] TIFF2026047319000082.tif58162 The following cations can be listed as cations (b2-2). TIFF2026047319000083.tif18150 The following cations can be considered as cations (b2-3): TIFF2026047319000084.tif26140 The following cations can be considered as cations (b2-4). TIFF2026047319000085.tif122163 The following cations can be considered as cations (b2-5). TIFF2026047319000086.tif101165

[0097] The acid generator (B) is a combination of the anion and the organic cation described above, and these can be combined arbitrarily. Preferred examples of the acid generator (B) include a combination of an anion represented by any of the following formulas: (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), (B1a-35) to (B1a-70), (B2a-1) to (B2a-11), (B2a-16) to (B2a-20), (B3a-1) to (B3a-3), or (B3a-11) to (B3a-14), and a cation (b2-1), (b2-2), (b2-3), (b2-4), or (b2-5).

[0098] Preferably, the acid generator (B) is represented by formulas (B1-1) to (B1-106), (B2-1) to (B2-20), and (B3-1) to (B3-28), respectively. Among these, those containing arylsulfonium cations are preferred, and those represented by formulas (B1-1) to (B1-3), (B1-5) to (B1-7), (B1-11) to (B1-14), (B1-20) to (B1-26), (B1-29), (B1-31) to (B1-105), (B2-1) to (B2-20), and (B3-1) to (B3-28) are particularly preferred. JPEG2026047319000087.jpg176161

[0099] TIFF2026047319000088.tif254159

[0100] TIFF2026047319000089.tif250155

[0101] TIFF2026047319000090.tif253161

[0102] TIFF2026047319000091.tif253162

[0103] TIFF2026047319000092.tif250150

[0104] TIFF2026047319000093.tif187160

[0105] In the resist composition of the present invention, the total content of the acid generator is preferably 0.1% by mass or more and 99.9% by mass or less, more preferably 1% by mass or more and 45% by mass or less, even more preferably 1% by mass or more and 40% by mass or less, and even more preferably 3% by mass or more and 40% by mass or less, based on the solid content of the resist composition. When the resin described later is included, the total content of the acid generator is preferably 1 part by mass or more and 45 parts by mass or less, more preferably 1 part by mass or more and 40 parts by mass or less, based on 100 parts by mass of the resin described later.

[0106] <Compound (L0)> Compound (L0) is a compound that contains one or more substructures of the structure represented by formula (L0), and is a compound containing an aromatic hydrocarbon ring having a hydroxyl group or a carboxyl group (phenolic hydroxyl group or benzoic acidic carboxyl group), or a compound in which the hydroxyl group or carboxyl group of these compounds is protected by an acid-unstable group. JPEG2026047319000094.jpg2471 [In formula (L0), all signs have the same meaning as described above.] Ar lk Examples of aromatic hydrocarbon rings include benzene rings, naphthalene rings, anthracene rings, and phenanthrene rings. Ar lk The substituents that the aromatic hydrocarbon ring may have are R, which will be described later. lk11 and R lk22 Examples of groups similar to those exemplified by the above include the following. Ar lk It is preferably a benzene ring or naphthalene ring which may have substituents, and more preferably a benzene ring which may have substituents. R lkExamples of acid-unstable groups include the group represented by formula (1a) and the group represented by formula (2a) described above, or the group represented by formula (1) and the group represented by formula (2) described later. Among these, the group represented by formula (2a) is preferred.

[0107] lk may be any integer greater than or equal to 2. For example, lk may be any integer less than or equal to 13. In particular, lk is preferably an integer between 1 and 11, more preferably an integer between 1 and 9, even more preferably an integer between 1 and 7, even more preferably an integer between 1 and 6, even more preferably an integer between 1 and 5, and even more preferably an integer between 1 and 4. lo may be any integer greater than or equal to 2. For example, lo may be any integer less than or equal to 13. In particular, lo is preferably an integer between 1 and 11, more preferably an integer between 1 and 9, even more preferably an integer between 1 and 7, even more preferably an integer between 1 and 6, even more preferably an integer between 1 and 5, and even more preferably an integer between 1 and 4.

[0108] Examples of compound (L0) include the compound represented by formula (LX) (hereinafter sometimes referred to as "compound (LX)"). TIFF2026047319000095.tif23131[In formula (LX), all signs have the same meaning as described above.] Ar k1 and Ar k2 As for the aromatic hydrocarbon ring, Ar lk Examples of groups similar to those exemplified in the aromatic hydrocarbon ring include those shown. R lk1 and R lk2 As for the acid-unstable group, R lk Examples of acid-unstable groups include those similar to those exemplified above. Examples of the hydrocarbon group Lx include chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings, or cross-linking rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups. Groups consisting of two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) are also possible. The hydrocarbon group Lx is a (lx2+1) valent hydrocarbon group and can be a 2- to 7 valent hydrocarbon group depending on lx2. The number of carbon atoms in the hydrocarbon group is preferably 1 to 72, more preferably 1 to 60, even more preferably 1 to 48, even more preferably 1 to 36, and even more preferably 1 to 24. Examples of chain-like hydrocarbon groups include alkanediyl groups, and examples of alkanediyl groups include methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, and tetradecane-1,14-diyl. Examples include linear alkanediyl groups such as pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl; and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. Note that branched alkanediyl groups may have a methyl group at one end. Furthermore, chain-like hydrocarbon groups can also be defined as groups obtained by replacing one or more hydrogen atoms of the aforementioned groups with bonding sites. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, preferably 1 to 10, even more preferably 1 to 9, still more preferably 1 to 8, still more preferably 1 to 6, and still more preferably 1 to 4. Examples of alicyclic hydrocarbon groups include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; cycloalkyl groups such as spirocyclohexane-1,2′-cyclopentane and spiroadamantane-2,3′-cyclopentane; and spirocyclic alicyclic hydrocarbon groups such as spiro rings having a norbornyl or adamantyl group with a cycloalkyl group spiro-bonded to each. Furthermore, alicyclic hydrocarbon groups can also be defined as groups obtained by replacing one or more hydrogen atoms of the aforementioned groups with bonding sites. Examples of alicyclic hydrocarbon groups include the following groups. The bonding site can be at any position. TIFF2026047319000096.tif41165 The number of carbon atoms in the alicyclic hydrocarbon group can be 3 to 72, may be 3 to 60, preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 3 to 12. Examples of aromatic hydrocarbon groups include phenylene groups, naphthylene groups, anthrylene groups, biphenylene groups, phenanthrylene groups, and other arylene groups. Furthermore, aromatic hydrocarbon groups can also include groups obtained by replacing one or more hydrogen atoms of the aforementioned groups with bonding sites. The number of carbon atoms in the aromatic hydrocarbon group can range from 6 to 72, may be 6 to 60, preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, even more preferably 6 to 14, and even more preferably 6 to 10. Groups combining two or more types include groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group, groups combining an aromatic hydrocarbon group and a chain hydrocarbon group, and groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Also, any of the groups may be Ar k1 Or Ar k2 They may be bound together. Examples of groups combining alicyclic hydrocarbon groups and chain hydrocarbon groups include -alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, and -chain hydrocarbon group-alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and a chain hydrocarbon group include -aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-, and -chain hydrocarbon group-aromatic hydrocarbon group-. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-. Furthermore, other examples of combined groups include those in which one or more hydrogen atoms of the aforementioned groups are replaced at the bonding site. The -CH2- groups in the hydrocarbon group of Lx are -O-, -S-, -SO2-, -SO-, and -NR. 11 - or -CO- may be used instead. The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO2-, -SO-, -NR 11As mentioned above, examples of groups replaced by - or -CO- include hydroxyl groups, carboxyl groups, thiol groups, amino groups, oxy groups, carbonyl groups, thio groups, sulfonyl groups, peptide groups, alkoxy groups, alkylthio groups, alkylsulfonyl groups, alkylamino groups, alkylpeptide groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, alkoxyalkyl groups, hydroxyalkyl groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, alkanediyloxycarbonyloxy groups, alkanediylsulfonyl groups, alkanediylthio groups, alkanediylamino groups, alkanediylpeptide groups, cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups. These substituted groups may be similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Furthermore, the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or combinations thereof may be -O-, -S-, -CO-, -SO-, -NR 11 The groups replaced by - or -SO2- are similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO2-, -SO-, -NR 11 Groups that have been replaced by - or -CO- include groups in which one or more hydrogen atoms of the above-mentioned groups are replaced at the bonding site. Examples of substituents that Lx may have include halogen atoms and cyano groups. When Lx is a group that combines an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be a substituent of the alicyclic hydrocarbon group or aromatic hydrocarbon group. The -CH2- group contained in the alkyl group and other chain hydrocarbon groups in Lx is -O-, -CO-, -S-, -SO-, -NR 11 By being replaced with - or -SO2-, Lx can substantially have substituents such as hydroxyl groups, carboxyl groups, alkoxy groups, alkylcarbonyl groups, alkoxycarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, alkylamino groups, amino groups, thiol groups, alkylthio groups, alkylsulfonyl groups, and alkylpeptide groups. The substituents that Lx may have are R, which will be discussed later. lk11 and R lk22 Other groups similar to those exemplified by the above can also be cited.

[0109] R lk11 and R lk22 Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. R lk11 and R lk22 Examples of hydrocarbon groups include chain-type hydrocarbon groups such as alkyl and alkanediyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Examples of alkyl groups include linear or branched alkyl groups, such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, and dodecyl group. Alkanediyl groups include straight-chain or branched alkanediyl groups, such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, and penta Examples include linear alkanediyl groups such as decane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The ends of the branched alkanediyl groups may be methyl groups. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 12, more preferably 1 to 9, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and examples of such alicyclic hydrocarbon groups include the groups shown below. The bonding site can be at any position. TIFF2026047319000097.tif42165 Specifically, monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl. Polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl. Spirocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as spirocyclohexane-1,2′-cyclopentane and spiroadamantane-2,3'-cyclopentane, and spiro rings having cycloalkyl groups spiro-bonded to norbornyl or adamantyl groups. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of aromatic hydrocarbon groups include phenyl groups, naphthyl groups, biphenyl groups, anthryl groups, phenanthryl groups, and binaphthyl groups. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. Groups formed by combining two or more groups include groups formed by combining an aromatic hydrocarbon group and a chain-like hydrocarbon group (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*, where the -CH2- contained in the alkanediyl group and the alkyl group are -O-, -CO-, -S-, -SO-, -NR 11 -or -SO2- may be replaced.) Groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group (for example, alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*, alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, and the -CH2- contained in the alicyclic hydrocarbon group, the alkanediyl group and the alkyl group are -O-, -CO-, -S-, -SO-, -NR 11-or may be replaced with -SO2-), a group combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*, where the -CH2- contained in the alicyclic hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may be replaced with -SO2-.) is an example. * represents a binding site. Examples of aromatic hydrocarbon groups - alkanediyl groups -* include aralkyl groups such as benzyl and phenethyl groups. Examples of alkyl-aromatic hydrocarbon groups-* include tolyl groups, xylyl groups, and cumenyl groups. Examples of alicyclic hydrocarbon groups - alkanediyl groups -* include cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group, and other cycloalkylalkyl groups. Examples of alkyl-alicyclic hydrocarbon groups include methylcyclohexyl group, dimethylcyclohexyl group, and cycloalkyl groups having alkyl groups such as 2-alkyladamantan-2-yl group. Examples of aromatic hydrocarbon groups - alicyclic hydrocarbon groups -* include the phenylcyclohexyl group. Examples of alicyclic hydrocarbon groups - aromatic hydrocarbon groups -* include the cyclohexylphenyl group. Furthermore, in the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Also, any of the groups may be Ar k1 Or Ar k2 They may be bound together. R lk11 and R lk22 The -CH2- groups contained in the hydrocarbon group represented are -O-, -CO-, -S-, -SO-, -NR 11 If it is replaced by - or -SO2-, the number of carbon atoms before replacement shall be the total number of carbon atoms in the hydrocarbon group. This number may be one or two or more. The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO2-, -SO-, -NR 11 Groups that can be replaced by - or -CO- include groups similar to those exemplified in Lx, within the limits permitted by the upper limit of the number of carbon atoms. R lk11 and R lk22 Examples of substituents that the hydrocarbon group may have include halogen atoms and cyano groups. R lk11 and R lk22 However, if it is a hydrocarbon group having a halogen atom, R lk11 and R lk22 Examples of hydrocarbon groups having halogen atoms include chain hydrocarbon groups having halogen atoms such as haloalkyl groups, alicyclic hydrocarbon groups having halogen atoms, and aromatic hydrocarbon groups having halogen atoms. A haloalkyl group refers to an alkyl group having a halogen atom. Examples of haloalkyl groups include C1-C12 alkyl fluorides, C1-C12 alkyl chlorides, C1-C12 alkyl bromides, C1-C12 alkyl iodides, and other C1-C12 haloalkyl groups. Specific examples of haloalkyl groups include C1-C12 perfluoroalkyl groups (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms in the haloalkyl group is preferably 1-9, more preferably 1-6, even more preferably 1-4, and even more preferably 1-3. The -CH2- contained in the haloalkyl group may be replaced by -O- or -CO- etc., and examples of such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, haloalkylcarbonyloxy groups, etc. Specifically, haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, etc. may be mentioned. For example, groups in which one or more hydrogen atoms of the groups exemplified above are replaced by halogen atoms may be mentioned. The hydrocarbon group may have one substituent or a plurality of substituents. R lk11 and Lx or R lk22 and Lx may each be bonded to each other to form a ring. In this case, the ring, since R lk11 and R lk22 are each bonded to an aromatic hydrocarbon ring, includes a condensed ring condensed with the aromatic hydrocarbon ring or a spiro ring spiro-bonded to the aromatic hydrocarbon ring. The total number of carbon atoms of this condensed ring or spiro ring is, for example, 3 to 28, may be 3 to 24, and is preferably 3 to 20. The condensed ring or spiro ring may be a ring containing one or more of -O-, -CO-, -S-, -SO-, -NR 11 -. or -SO2-. The aromatic hydrocarbon ring (-R lk11 )-Lx- or the aromatic hydrocarbon ring (-R lk22 )-Lx-. In, R lk11 and Lx or R lk22 and Lx, examples of the ring formed by their respective bonding include the following groups etc. The following groups are omitted in the description, but at least one R lk1 -O-X lk1 -. or R lk2 -O-X lk2 -. has and may have other R lk11 or R lk22 -. * represents the bonding site with the aromatic hydrocarbon ring. TIFF2026047319000098.tif18111R lk11 and R lk22These elements may combine with each other to form a ring. Examples of such rings include those with the structure shown in formula (LX-13), which will be described later.

[0110] Examples of compound (LX) include the compound represented by formula (LX-0) (hereinafter sometimes referred to as "compound (LX-0)"). Preferably, compound (LX-0) is the compound represented by formula (LX-1) (hereinafter sometimes referred to as "compound (LX-1)"). TIFF2026047319000099.tif23125[In formula (LX-0), symbols other than those listed below have the same meaning as above. lk1 represents an integer between 1 and 5, and when lk1 is 2 or greater, the bases within the parentheses may be the same or different from each other. lk11 represents an integer from 0 to 4, satisfying 1 ≤ lk1 + lk11 ≤ 5, and when lk11 is 2 or greater, the bases in multiple parentheses may be the same or different. lk2 represents an integer between 1 and 5, and when lk2 is 2 or greater, the bases within the parentheses may be the same or different from one another. lk22 represents an integer between 0 and 4, satisfying 1 ≤ lk2 + lk22 ≤ 5, and when lk22 is 2 or greater, the bases within the parentheses may be the same or different. TIFF2026047319000100.tif42147[In formula (LX-1), symbols other than those listed below have the same meaning as above. X lk3 This represents a single bond or a carbonyl group. R lk3 This represents a hydrogen atom or an acid-unstable group. Lx1 and Lx2 each independently represent a hydrocarbon group having 1 to 20 carbon atoms, which may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may also be replaced with -SO2-. R lk33- represents a hydrocarbon group having 1 to 20 carbon atoms, which may have a halogen atom or substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may also be replaced with -SO2-. lx3 represents an integer from 0 to 6, and when lx3 is 2 or greater, the bases within the parentheses may be the same or different. lk3 represents an integer from 1 to 4, and when lk3 is 2 or greater, the bases within the parentheses may be the same or different from each other. lk33 represents an integer between 0 and 3, satisfying 1 ≤ lk3 + lk33 ≤ 4, and when lk33 is 2 or greater, the bases within the parentheses may be the same or different. A hydrocarbon group which may have substituents Lx1 and Lx2 (the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 -Or it may be replaced with -SO2-.) As such, a hydrocarbon group may have the substituents exemplified in Lx, to the extent permitted by the upper limit of the number of carbon atoms, etc. (the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 Examples of groups similar to those mentioned above include those that may be replaced by -SO2-. R lk33 A hydrocarbon group which may have a halogen atom or substituent (the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 -Or it may be replaced with -SO2-.) As for R, within the limits allowed by the upper limit of the number of carbon atoms, etc. lk11 and R lk22 A hydrocarbon group which may have a halogen atom or substituent as exemplified above (the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 Examples of groups similar to those mentioned above include those that may be replaced by -SO2-. R lk11 and Lx1, or R lk22 Lx2 and Lx2 may each join with each other to form a ring. In this case, the ring is R lk11 and R lk22However, since each is bonded to a benzene ring, examples include fused rings that condense with a benzene ring or spiro rings that spirobond with a benzene ring. The total number of carbon atoms in these fused rings or spiro rings is 3 to 28, may be 3 to 24, and preferably 3 to 20. The fused rings or spiro rings consist of one or more -O-, -CO-, -S-, -SO-, -NR atoms. 11 It may also be a ring containing - or -SO2-. Benzene ring (-R lk11 )-Lx1- or benzene ring (-R lk22 In )-Lx2-, R lk11 and Lx1 or R lk22 Examples of rings formed by the bonding of Lx2 and Lx2 include the following groups. The following groups are not listed, but each has at least one R lk1 -OX lk1 - or R lk2 -OX lk2 - has other R lk11 or R lk22 It may have a bond site with a benzene ring. * represents a bond site with a benzene ring. TIFF2026047319000101.tif19124R lk11 and R lk22 These elements may combine with each other to form a ring. Examples of such rings include those with the structure shown in formula (LX-13), which will be described later.

[0111] As compound (LX-1), compounds represented by formulas (LX-11), (LX-12), and (LX-13) are preferred (hereinafter, they may be referred to as "compound (LX-11)", "compound (LX-12)", and "compound (LX-13)", respectively). TIFF2026047319000102.tif42117

[0112] TIFF2026047319000103.tif42150

[0113] TIFF2026047319000104.tif51156[In formulas (LX-11), (LX-12), and (LX-13), All symbols other than those listed below have the same meaning as described above. Ly represents a hydrocarbon group having 1 to 20 carbon atoms, which may have substituents, and the -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 -It may also be replaced with -SO2-. A hydrocarbon group which may have a substituent of Ly (the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR) 11 -Or it may be replaced with -SO2-.) As such, a hydrocarbon group may have the substituents exemplified in Lx, to the extent permitted by the upper limit of the number of carbon atoms, etc. (the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR 11 Examples of groups similar to those mentioned above include those that may be replaced by -SO2-. lk1 and lk2 are each preferably an integer from 1 to 4, more preferably an integer from 1 to 3, and even more preferably 1 or 2. lk11 and lk22 are preferably integers from 0 to 3, and more preferably integers from 0 to 2, respectively. lk3 is preferably an integer between 1 and 3, and more preferably 1 or 2. lk33 is preferably an integer between 0 and 2. lx2 is preferably an integer from 1 to 5, more preferably an integer from 1 to 4, even more preferably an integer from 1 to 3, and even more preferably 1 or 2. lx3 is preferably an integer between 0 and 5, more preferably an integer between 0 and 4, even more preferably an integer between 0 and 3, and even more preferably an integer between 0 and 2. R lk11 , R lk22 and R lk33Each of these is preferably independently a halogen atom, a C1-C6 haloalkyl group, or a C1-C6 alkyl group (the -CH2- contained in the haloalkyl group or alkyl group may be replaced with -O- or -CO-), more preferably a halogen atom, a C1-C4 haloalkyl group, or a C1-C4 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), even more preferably an iodine atom, a fluorine atom, a C1-C3 fluorinated alkyl group, a hydroxyl group, a carboxyl group, a C1-C3 alkoxy group, a C1-C3 hydroxyalkyl group, or a C1-C3 alkyl group, and even more preferably an iodine atom, a fluorine atom, a trifluoromethyl group, a hydroxyl group, a carboxyl group, a methoxy group, or a methyl group. Lx1, Lx2, and Ly are each preferably independently a chain hydrocarbon group having 1 to 10 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) or a group combining a chain hydrocarbon group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced with -O- or -CO-), and preferably a chain hydrocarbon group having 1 to 8 carbon atoms (the chain hydrocarbon group may be replaced with -O- or -CO-). It is more preferable that the group is a combination of a chain hydrocarbon group having 1 to 4 carbon atoms and a cyclic hydrocarbon group having 3 to 16 carbon atoms (the -CH2- contained in the chain hydrocarbon group and the cyclic hydrocarbon group may be replaced with -O- or -CO-), and even more preferable that the group is a combination of a chain hydrocarbon group having 1 to 6 carbon atoms or a chain hydrocarbon group having 1 to 4 carbon atoms and a cyclic hydrocarbon group having 3 to 12 carbon atoms. Also, R lk11 and Lx1 or R lk22 It is also preferable that Lx2 and R combine to form a ring. lk11 and R lk22 It is also preferable that they bond to form a ring.

[0114] Compound (L0) may be a low molecular weight compound. A low molecular weight compound is a compound with a weight-average molecular weight of less than 10,000. When compound (L0) is a low molecular weight compound, the weight-average molecular weight is preferably 7,500 or less, more preferably 5,000 or less, even more preferably 4,000 or less, even more preferably 3,500 or less, even more preferably 3,000 or less, even more preferably 2,500 or less, even more preferably 2,000 or less, and even more preferably 1,500 or less. Also, values ​​of 100 or more are given, preferably 120 or more, more preferably 150 or more, even more preferably 200 or more, and even more preferably 300 or more.

[0115] Among the compounds (L0), compounds (X) include an aromatic hydrocarbon ring having a hydroxyl group or a carboxyl group. lk is a single bond or a carbonyl group, R lk Examples of compounds in which the atom is a hydrogen atom include those represented by the following formula. TIFF2026047319000105.tif237164 Compound (L0) containing an aromatic hydrocarbon ring having a hydroxyl group or a carboxyl group (X lk is a carbonyl group or a carbonyl group, R lk Compounds in which the hydrogen atom is found include compounds obtained by replacing the hydroxyl group of the above compound with a carboxyl group or a carboxyl group with a hydroxyl group. Compound (L0) may have both a hydroxyl group and a carboxyl group.

[0116] Among the compounds (L0), examples of compounds in which the hydroxyl group or carboxyl group of an aromatic hydrocarbon ring having a hydroxyl group or carboxyl group is protected by an acid-unstable group include the compounds represented by the following formula. Among the compounds (L0) described in TIFF2026047319000106.tif238165, compounds in which the hydroxyl group or carboxyl group of a compound containing an aromatic hydrocarbon ring having a hydroxyl group or a carboxyl group is protected by an acid-unstable group include compounds in which the ethoxyethoxy group of the above compound is replaced with an ethoxyethoxycarbonyl group or an ethoxyethoxycarbonyl group is replaced with an ethoxyethoxy group. Compound (L0) may have both an ethoxyethoxy group and an ethoxyethoxycarbonyl group.

[0117] In the resist composition of the present invention, if compound (L0) is included, the content of compound (L0) is 0.1% by mass or more, preferably 0.3% by mass or more, more preferably 0.5% by mass or more, and even more preferably 1% by mass or more, relative to the solid content of the resist composition. Also, it is 90% by mass or less, preferably 70% by mass or less, more preferably 60% by mass or less, and even more preferably 50% by mass or less. Specifically, it is 0.1% by mass or more and 90% by mass or less, preferably 0.3% by mass or more and 70% by mass or less, more preferably 0.5% by mass or more and 60% by mass or less, and even more preferably 1% by mass or more and 50% by mass or less.

[0118] Compound (L0) may be a resin. If compound (L0) is a resin, it is preferable that it is a resin containing the structural unit represented by formula (a2-A). TIFF2026047319000107.tif30128[In formula (a2-A), all signs have the same meaning as described above.]

[0119] R a2 and R a27 Examples of halogen atoms in this context include fluorine, iodine, chlorine, and bromine atoms. R a2 and R a27Examples of C1-C6 alkyl groups that may have halogen atoms include trifluoromethyl, difluoromethyl, methyl, perfluoroethyl, 2,2,2-trifluoroethyl, 1,1,2,2-tetrafluoroethyl, ethyl, perfluoropropyl, 2,2,3,3,3-pentafluoropropyl, propyl, perfluorobutyl, 1,1,2,2,3,3,4,4-octafluorobutyl, butyl, perfluoropentyl, 2,2,3,3,4,4,5,5,5-nonafluoropentyl, pentyl, hexyl, perfluorohexyl, chloromethyl, bromomethyl, and iodomethyl groups. The number of carbon atoms in the alkyl group is preferably 1-4, more preferably 1-3, and even more preferably 1 or 2. R a2 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom, a methyl group, or an ethyl group is more preferred, and a hydrogen atom or a methyl group is even more preferred. R a27The alkoxy group, alkoxyalkyl group, alkoxyalkoxy group, alkylcarbonyl group, and alkylcarbonyloxy group are similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. The number of carbon atoms in the alkoxy group is preferably 1 to 4, more preferably 1 to 3. The alkoxy group is an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, even more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 8, more preferably 2 to 4. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably an alkoxyalkyl group having 2 to 4 carbon atoms, even more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 8, more preferably 2 to 4. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, and even more preferably a methoxyethoxy group or an ethoxyethoxy group. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 4, and more preferably 2 to 3. The alkylcarbonyl group is preferably an alkylcarbonyl group with 2 to 3 carbon atoms, and more preferably an acetyl group. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 4, and more preferably 2 to 3. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group with 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a27 The group is preferably a halogen atom, a hydroxyl group, a carboxyl group, a C1-C4 alkyl group which may have a halogen atom, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0120] A a21Examples of alkanediyl groups include linear groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. Examples of branched alkanediyl groups include symmetric alkanediyl groups, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, and undecane-1,10-diyl group. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 4, even more preferably 1 to 3, and even more preferably 1 or 2. R a28 Examples of alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, and tert-butyl groups. A a21 The -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a28 Examples of groups that can be replaced by - include hydroxyl groups, carboxyl groups, carbonyl groups, oxy groups, amino groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylamino groups, peptide groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, and alkanediylamino groups. These replaced groups are similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Among them, A a21 The -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a28 The bases that have been replaced by - include *-O-, *-CO-O-, *-O-CO-, and *-CO-OA. a22-CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 - are some examples. In particular, *-CO-O- and *-CO-OA a22 -CO-O-, *-OA a22 -CO-O-, *-CO-NR a28 - is preferable. Here, A a22 * represents an alkanediyl group with 1 to 8 carbon atoms, and * represents R a2 This represents the bonding site with the carbon atom to which it is bonded. a22 The alkanediyl group is, within the limits allowed by the upper limit of the number of carbon atoms, A a21 Similar alkanediyl groups can be cited. A a21 These are single bonds, *-CO-O- or *-CO-OA a22 It is preferably -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-. nA2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH is A in the case of a benzene ring. a21 The bond may be at the ortho, meta, or para position relative to the bond site. In particular, it is preferable that at least one bond is at the meta or para position, and more preferably at the meta position. In the case of a naphthalene ring, A a21 If the bond position is at position 1, it can bond to any of positions 2 through 8, A a21 If the bond position is at position 2, it may bond to position 1 or any of positions 3 through 8. In particular, A a21If the bonding position is at position 1, it is preferable that at least one bond is at positions 3 to 6, and more preferably at position 3 or 4. a21 If the bonding position is at position 2, it is preferable that the bond is at positions 4 through 7, and more preferably at position 5 or 6.

[0121] Examples of structural units (a2-A) include monomer-derived structural units described in Japanese Patent Publication No. 2010-204634 and Japanese Patent Publication No. 2012-12577. As for the structural unit (a2-A), the structural unit is represented by formulas (a2-2-1) to (a2-2-32), formula (a2-3-1) to (a2-3-24), and in the structural unit represented by formulas (a2-2-1) to (a2-2-32), formula (a2-3-1) to (a2-3-24), the R in the structural unit (a2-A) a2 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group include these units. TIFF2026047319000108.tif107170

[0122] TIFF2026047319000109.tif82166 When structural units (a2-A) are included in the resin, the content of structural units (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more, relative to the total structural units. Furthermore, it is preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, even more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) is derived from a compound (for example, the -CH2-C(-R) of the structural unit (a2-A) a2)- is the CH2=C(-R) double bond before cleavage. a2 Compounds (a2-A', etc.) in the state of () can be incorporated into the resin by polymerization. Alternatively, for example, structural units (a1-4) can be polymerized and then treated with an acid such as p-toluenesulfonic acid to incorporate them into the resin. Furthermore, structural units (a2-A) can be incorporated into the resin by polymerizing acetoxystyrene, etc., and then treated with an alkali such as tetramethylammonium hydroxide.

[0123] If the resist composition of the present invention contains a resin, the resin may contain structural units other than the structural unit represented by formula (a2-A). Structural units other than the structural unit represented by formula (a2-A) include structural units having acid-unstable groups (hereinafter sometimes referred to as "structural unit (a1)"), structural units other than the structural unit represented by formula (a2-A) that do not have acid-unstable groups (hereinafter sometimes referred to as "structural unit (s)") (for example, structural units having halogen atoms as described later (hereinafter sometimes referred to as "structural unit (a4)"), structural units having non-leaved hydrocarbon groups as described later (hereinafter sometimes referred to as "structural unit (a5)"), structural units having a sultone structure as described later (hereinafter sometimes referred to as "structural unit (a6)"), structural units that decompose upon exposure to generate acid as described later (hereinafter sometimes referred to as "structural unit (a7)"), etc.), and structural units derived from other monomers known in the art.

[0124] <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid-unstable group (hereinafter sometimes referred to as "monomer (a1)"). The acid-unstable groups contained in the resin are preferably the group represented by formula (1) (hereinafter also referred to as group (1)) and / or the group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2026047319000110.tif2298[In formula (1), R a1 , R a2 and R a3Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. a1 and R a2 These atoms bond to each other to form a cyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the cyclic hydrocarbon group, and the aromatic hydrocarbon group may have halogen atoms. ma and na each independently represent either 0 or 1, and at least one of ma and na represents 1. * indicates a connection site. TIFF2026047319000111.tif2278[In formula (2), R a1’ and R a2’ Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a3’ R represents a hydrocarbon group with 1 to 20 carbon atoms. a2’ and R a3’ These atoms bond to each other to form a heterocyclic group having 3 to 20 carbon atoms, and the -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-, and the hydrocarbon group and the heterocyclic group may have halogen atoms. X represents either an oxygen atom or a sulfur atom. 'na' represents either 0 or 1. * indicates a connection site.

[0125] R a1 , R a2 and R a3 Examples of alkyl groups in this context include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, and octyl groups. R a1 , R a2 and R a3 Examples of alkenyl groups in this context include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. Ra1 , R a2 and R a3 The alicyclic hydrocarbon group in may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates a bonding site). a1 , R a2 and R a3 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16. TIFF2026047319000112.tif10159R a1 , R a2 and R a3 Examples of aromatic hydrocarbon groups in this context include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups. Examples of combined groups include groups that combine alkyl groups and alicyclic hydrocarbon groups as described above (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. Preferably, ma is 0 and na is 1. R a1 and R a2 -C(R a1 )(R a2 )(R a3Examples of such groups include the following: Alicyclic hydrocarbon groups preferably have 3 to 12 carbon atoms. * indicates a bond site with -O-. TIFF2026047319000113.tif27138

[0126] R a1’ , R a2’ and R a3’ Examples of hydrocarbon groups in this context include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these are R a1 , R a2 and R a3 The same types of elements mentioned above can be cited. R a2’ and R a3’ When they bond to each other and form a heterocyclic group with the carbon atoms to which they are bonded and X, -C(R a1’ )(R a2’ )-XR a3’ The following groups are examples. * indicates a binding site. TIFF2026047319000114.tif19124R a1’ and R a2’ Preferably, at least one of them is a hydrogen atom. na' is preferably 0. R a1 , R a2 , R a3 , R a1 , R a2’ and R a3’ The halogen atoms that may be present include fluorine atoms, chlorine atoms, bromine atoms, or iodine atoms.

[0127] The following are examples of base (1): In equation (1), R a1 , R a2 and R a3 A group in which the parentheses is an alkyl group, ma=0, and na=1. A tert-butoxycarbonyl group is preferred as the group. In equation (1), R a1 , R a2 However, these combine with the carbon atoms to which they bond to form an adamantyl group, R a3 A group that is an alkyl group, with ma=0 and na=1. In equation (1), R a1 and R a2 Each of them is an alkyl group independently, and R a3 This is an adamantyl group with ma=0 and na=1. The following are specific examples of group (1). * indicates a bonding site. TIFF2026047319000115.tif149164

[0128] The following are specific examples of group (2). * indicates a bonding site. TIFF2026047319000116.tif54153

[0129] The monomer (a1) is preferably a monomer having an acid-unstable group and an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer having an acid-unstable group. Among (meth)acrylic monomers having acid-unstable groups, those having alicyclic hydrocarbon groups with 5 to 20 carbon atoms are preferred. Using a resin having structural units derived from a monomer (a1) with a bulky structure such as an alicyclic hydrocarbon group in the resist composition can improve the resolution of the resist pattern.

[0130] Structural units derived from (meth)acrylic monomers having group (1) include structural units represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), structural units represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1)), or structural units represented by formula (a1-2) (hereinafter sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2), and more preferably, it is at least one or two structural units selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). These may be used individually or in combination of two or more. TIFF2026047319000117.tif44144[In formulas (a1-0), (a1-1), and (a1-2), L a01 , L a1 and L a2 These are, independently, -O- or *-O-(CH2) k1 -CO-O- represents a bond, where k1 is an integer from 1 to 7, and * represents the bond site with -CO-. R a01 , R a4 and R a5 Each of these independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a02 , R a03 and R a04 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have halogen atoms. R a6 and R a7Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination thereof, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have halogen atoms. m1' represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

[0131] R a01 , R a4 , R a5 Examples of halogen atoms in this context include fluorine, chlorine, bromine, or iodine atoms. R a01 , R a4 , R a5 Examples of alkyl groups that may have halogen atoms include trifluoromethyl, difluoromethyl, methyl, perfluoroethyl, 2,2,2-trifluoroethyl, 1,1,2,2-tetrafluoroethyl, ethyl, perfluoropropyl, 2,2,3,3,3-pentafluoropropyl, propyl, perfluorobutyl, 1,1,2,2,3,3,4,4-octafluorobutyl, butyl, perfluoropentyl, 2,2,3,3,4,4,5,5,5-nonafluoropentyl, pentyl, hexyl, perfluorohexyl, chloromethyl, bromomethyl, and iodomethyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl or ethyl group, and more preferably a methyl group. R a01 , R a4 and R a5 This is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 , L a1 and L a2 Preferably, an oxygen atom or *-O-(CH2) k01It is -CO-O- (where k01 is preferably an integer from 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 , R a03 , R a04 , R a6 and R a7 The alkyl groups, alkenyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and combinations thereof in formula (1) are R a1 , R a2 and R a3 Similar groups to those listed above can be cited. R a02 , R a03 , and R a04 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a6 and R a7 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 5 to 12, and more preferably 5 to 10. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 12, and more preferably 6 to 10. In groups formed by combining an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total number of carbon atoms in the combined alkyl group and alicyclic hydrocarbon group is 18 or less. In groups formed by combining an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms in the combined alkyl group and aromatic hydrocarbon group is 18 or less. R a02 and R a03 Preferably, this is a C1-C6 alkyl group that may have a halogen atom or a C6-C12 aromatic hydrocarbon group that may have a halogen atom, and more preferably, a methyl group, ethyl group, phenyl group or naphthyl group that may have a halogen atom. R a04 Preferably, this is a C1-C6 alkyl group which may have a halogen atom, or a C5-C12 alicyclic hydrocarbon group which may have a halogen atom, and more preferably a methyl group, ethyl group, cyclohexyl group, or adamantyl group which may have a halogen atom. R a6 and R a7 Preferably, the group is an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom; more preferably, it is a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group, or naphthyl group which may have a halogen atom; and even more preferably, it is an ethyl group, isopropyl group, t-butyl group, ethenyl group, or phenyl group which may have a halogen atom. m1' is preferably an integer between 0 and 3, and more preferably 0 or 1. n1 is preferably an integer between 0 and 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0132] Examples of structural units (a1-0) include structural units represented by any of the formulas (a1-0-1) to (a1-0-24) and R in structural units (a1-0). a01Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom), or another alkyl group are given, and structural units represented by any of the formulas (a1-0-1) to (a1-0-10), (a1-0-13), (a1-0-14), (a1-0-19) to (a1-0-24) are preferred. TIFF2026047319000118.tif119160

[0133] Examples of structural units (a1-1) include structural units derived from monomers described in Japanese Patent Publication No. 2010-204646. In particular, structural units represented by any of formulas (a1-1-1) to (a1-1-7) and R in structural unit (a1-1) a4 A structural unit in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group is preferred, and a structural unit represented by any of formulas (a1-1-1) to (a1-1-4) is more preferred. TIFF2026047319000119.tif35169

[0134] The structural unit (a1-2) is a structural unit represented by any of the formulas (a1-2-1) to (a1-2-20), and R in the structural unit (a1-2). a5 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group include structural units represented by any of the formulas (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20). TIFF2026047319000120.tif92164

[0135] When the resin contains structural unit (a1-0) and / or structural unit (a1-1) and / or structural unit (a1-2), the total content of these is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total structural units of the resin. Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When the resin contains structural units (a1-0), the content is preferably 5 mol% or more, more preferably 10 mol% or more, more preferably 15 mol% or more, even more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, and even more preferably 35 mol% or more, relative to the total structural units of the resin. Also, it is preferably 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, and even more preferably 60 mol% or less. Specifically, it is preferably 5 to 80 mol%, preferably 5 to 75 mol%, more preferably 10 to 70 mol%, even more preferably 10 to 65 mol%, and even more preferably 10 to 60 mol%. When the resin contains structural unit (a1-1) and / or structural unit (a1-2), the total content of these is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total structural units of the resin. Also, 95 mol% or less is cited, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 90 mol% is cited, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, even more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and even more preferably 20 to 70 mol%.

[0136] Examples of structural units having a base (2) in structural unit (a1) include the structural unit represented by formula (a1-4) (hereinafter sometimes referred to as "structural unit (a1-4)"). TIFF2026047319000121.tif31119 [In formula (a1-4), R a1 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a17 This represents a halogen atom, a hydroxyl group, a carboxyl group, a C1-C6 alkyl group which may have a halogen atom, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a18 - may be replaced with this. R a18 This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 This represents a single bond or a carbonyl group. na1 represents an integer between 1 and 5, and when na1 is 2 or greater, the bases within the parentheses may be the same or different from each other. na11 represents an integer from 0 to 4, and when na11 is 2 or greater, multiple R a17 They may be the same or different from one another. mc represents an integer between 0 and 2. R a34 and R a35 Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 This represents a hydrocarbon group with 1 to 20 carbon atoms, or R a34 R represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. a35 and R a36 These groups bond to each other, forming a divalent heterocyclic group with 3 to 20 carbon atoms together with the -CO- groups to which they are bonded. The -CH2- groups contained in the hydrocarbon group and the divalent heterocyclic group may be replaced with -O- or -S- groups.

[0137] R a1 , R a17 , A a11 and R a18 R is the R in equation (a²-A). a2 , R a27 , A a21 and R a28 And, similar to the examples given, can be cited for each. R a1 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom, a methyl group, or an ethyl group is more preferred, and a hydrogen atom or a methyl group is even more preferred. R a17The group is preferably a halogen atom, a hydroxyl group, a carboxyl group, a C1-C4 alkyl group which may have a halogen atom, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0138] A a11 The -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a18 The bases that have been replaced by - include *-O-, *-CO-O-, *-O-CO-, and *-CO-OA. a12 -CO-O-, *-O-CO-A a12 -O-, *-OA a12 -CO-O-, *-CO-OA a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 - are some examples. In particular, *-CO-O- and *-CO-OA a12 -CO-O-, *-OA a12 -CO-O-, *-CO-NR a18 - is preferable. Here, A a12 * represents an alkanediyl group with 1 to 8 carbon atoms, and * represents R a1 This represents the bonding site with the carbon atom to which it is bonded. a12 The alkanediyl group is, within the limits allowed by the upper limit of the number of carbon atoms, A a11 Similar alkanediyl groups can be cited. A a11 These are single bonds, *-CO-O- or *-CO-OA a12 It is preferably -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. mc is preferably 0 or 1.

[0139] R a34 , R a35 and R a36 Examples of hydrocarbon groups in this context include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups that combine these. Examples of alkyl groups include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, and octyl groups. Alicyclic hydrocarbon groups may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates a bonding site). Examples of aromatic hydrocarbon groups include phenyl groups, naphthyl groups, anthryl groups, biphenyl groups, phenanthryl groups, and other aryl groups. Examples of combined groups include groups that combine alkyl groups and alicyclic hydrocarbon groups as described above (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. In particular, R a36 Examples include alkyl groups having 1 to 18 carbon atoms, alicyclic hydrocarbon groups having 3 to 18 carbon atoms, aromatic hydrocarbon groups having 6 to 18 carbon atoms, or groups formed by combining these. R a35 and R a36 Examples of divalent hydrocarbon groups with 2 to 20 carbon atoms that are formed when these atoms bond with each other and together with the -CO- to which they bond include the following groups: * indicates a bonding site, and one of them is R a34 This is the junction site. TIFF2026047319000123.tif15105

[0140] R a34 Preferably, it is a hydrogen atom. R a35 Preferably, this is a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination thereof, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36 The alkyl group and alicyclic hydrocarbon group in R are preferably unsubstituted. a36 In this context, the aromatic hydrocarbon group is preferably an aromatic ring having an aryloxy group with 6 to 10 carbon atoms.

[0141] -OC(R) in structural units (a1-4) a34 )(R a35 )-OR a36 It is removed upon contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxyl group or a carboxyl group. -X a1 -OC(R a34 )(R a35 )-OR a36 In the case of a benzene ring, A a11 The bond may be at the orthogonal, metagonal, or paragonal position relative to the bond site. In particular, it is preferable that at least one bond is at the orthogonal or paragonal position, and more preferably at the paragonal position. In the case of a naphthalene ring, A a11If the bond position is at position 1, it can bond to any of positions 2 through 8, A a11 If the bond position is at position 2, it may bond to position 1 or any of positions 3 through 8. In particular, A a11 If the bonding position is at position 1, it is preferable that at least one bond is at positions 3 to 6, and more preferably at position 3 or 4. a11 If the bonding position is at position 2, it is preferable that the bond is at positions 4 through 7, and more preferably at position 5 or 6. Examples of structural units (a1-4) include monomer-derived structural units described in Japanese Patent Publication No. 2010-204646. Preferably, structural units represented by formulas (a1-4-1) to (a1-4-42) and R in structural unit (a1-4). a1 Examples of structural units in which the hydrogen atom corresponding to is replaced by a halogen atom, a haloalkyl group, or an alkyl group are given, and more preferably, structural units represented by formulas (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20), respectively. TIFF2026047319000124.tif221163

[0142] If the resin contains structural units (a1-4), the content of these units is preferably 10 mol% or more, more preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total amount of all structural units in the resin. Also, a content of 95 mol% or less is preferred, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, a content of 5 to 95 mol% is preferred, preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0143] Structural units derived from (meth)acrylic monomers having group (2) include the structural unit represented by formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF2026047319000125.tif4558[In formula (a1-5), R a8 This represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydrogen atom, or a halogen atom. Z a1 This is a single bond or *-(CH2) h3 -CO-L 54 - represents, h3 represents an integer from 1 to 4, and * represents L 51 This represents the connection point. L 51 , L 52 , L 53 and L 54 These represent either -O- or -S- independently. s1 represents an integer between 1 and 3. s1' represents an integer between 0 and 3.

[0144] R in equation (a1-5) a8 The halogen atom and the alkyl group which may have a halogen atom are R of formula (a1-0). a01 Examples of halogen atoms and alkyl groups that may have halogen atoms are similar to those exemplified. In equation (a1-5), R a8 The preferred element is a hydrogen atom, a methyl group, or a trifluoromethyl group. L 51 An oxygen atom is preferred. L 52 and L 53 Preferably, one of them is -O- and the other is -S-. s1 is preferably 1. s1' is preferably an integer between 0 and 2. Z a1 A single bond or *-CH2-CO-O- is preferred.

[0145] Examples of structural units (a1-5) include monomer-derived structural units described in Japanese Patent Publication No. 2010-61117. Among these, structural units represented by formulas (a1-5-1) to (a1-5-4) are preferred, and structural units represented by formula (a1-5-1) or (a1-5-2) are more preferred. TIFF2026047319000126.tif31130 When resin (A) contains structural units (a1-5), the content is preferably 1 mol% or more, more preferably 2 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more, relative to the total structural units of the resin. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, 1 to 50 mol% is preferred, 3 to 45 mol% is more preferred, 5 to 40 mol% is even more preferred, and 5 to 30 mol% is even more preferred.

[0146] Examples of structural units (a1) having a base (1) include the structural unit represented by formula (a1-6) (hereinafter sometimes referred to as "structural unit (a1-6)"). TIFF2026047319000127.tif3479[In formula (a1-6), R a61 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a62 , R a63 and R a64 Each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have substituents, or R a62 and R a63 They bond to each other, forming a ring with 3 to 20 carbon atoms, R a64 This represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents. X a61 These are single bonds, -CO-O-*, or -CO-NR a65 -* represents the bonding site with Ar, and R a65This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 This is a single bond, *-OL a61 -or*-CO-OL a62 - represents the bonding site with Ar, and * represents the bonding site with L. a61 and L a62 Each of these independently represents an alkanediyl group with 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms, which may have substituents. R in equation (a1-6) a61 The halogen atom and the alkyl group which may have a halogen atom are R of formula (a1-0). a01 Examples of halogen atoms and alkyl groups that may have halogen atoms are similar to those exemplified. R a61 The preferred element is a hydrogen atom, a methyl group, or a trifluoromethyl group. R a62 , R a63 and R a64 Examples of alkyl groups in this context include methyl, ethyl, propyl, butyl, pentyl, and hexyl groups. C1-C4 alkyl groups are preferred, C1-C3 alkyl groups are more preferred, and methyl or ethyl groups are even more preferred. R a62 , R a63 and R a64 Examples of cyclic hydrocarbon groups in this context include alicyclic hydrocarbon groups and aromatic hydrocarbon groups. The alicyclic hydrocarbon group may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12. Examples of aromatic hydrocarbon groups include phenylene groups and naphthylene groups. Substituents that the cyclic hydrocarbon group may have include halogen atoms, hydroxyl groups, C1-C6 alkyl groups, C1-C6 alkoxy groups, C2-C12 alkoxyalkyl groups, C2-C12 alkoxyalkoxy groups, C2-C4 alkylcarbonyl groups, C2-C4 alkylcarbonyloxy groups, acryloyloxy groups, or methacryloyloxy groups. R a62 and R a63 Examples of rings formed by the bonding of these elements include adamantane rings, cyclopentane rings, or cyclohexane rings. Specifically, R a62 and R a63 -C(R) when they bond to each other to form a ring a62 )(R a63 )(R a64 Examples of such groups include the following: * indicates a bonding site with an oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, and more preferably 3 to 12. TIFF2026047319000128.tif33109

[0147] L a61 and L a62 Examples of C1-C4 alkanediyl groups in this compound include methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, and 2-methylpropane-1,2-diyl group. L a61 and L a62 Preferably, each of these is independently a methylene group or an ethylene group. R a65 The alkyl group is R a61 Examples of alkyl groups similar to the above include: X a61 Preferably, it is a single bond or -CO-O-*, and more preferably a single bond. X a62 Preferably, a single bond or *-OL a61 - and more preferably, a single bond.

[0148] Examples of aromatic hydrocarbon groups with 6 to 20 carbon atoms in Ar include phenylene group, 1-naphthylene group, 2-naphthylene group, 1-antrylene group, 9-antrylene group, biphenylene group, 1-phenanthrylene group, and 2-phenanthrylene group. Substituents that the aromatic hydrocarbon group may have include halogen atoms, hydroxyl groups, C1-C6 alkyl groups, C1-C6 alkoxy groups, C2-C12 alkoxyalkyl groups, C2-C12 alkoxyalkoxy groups, C2-C4 alkylcarbonyl groups, C2-C4 alkylcarbonyloxy groups, acryloyloxy groups, or methacryloyloxy groups. These groups are R in formula (a1-4). a17 Examples similar to those exemplified earlier can be given. In particular, preferred substituents are halogen atoms, hydroxyl groups, C1-C4 alkyl groups, C1-C4 alkoxy groups, or C2-C8 alkoxyalkoxy groups; more preferred substituents are fluorine atoms, iodine atoms, hydroxyl groups, methyl groups, methoxy groups, ethoxy groups, ethoxyethoxy groups, or ethoxymethoxy groups; and even more preferred substituents are fluorine atoms, iodine atoms, hydroxyl groups, methyl groups, methoxy groups, or ethoxyethoxy groups. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxyl group.

[0149] Examples of structural units (a1-6) include those represented by formulas (a1-6-1) to (a1-6-44), with those represented by formulas (a1-6-1) to (a1-6-9) and (a1-6-37) to (a1-6-44) being preferred, those represented by formulas (a1-6-1), (a1-6-2), (a1-6-4), (a1-6-5), (a1-6-7), (a1-6-8), and (a1-6-37) to (a1-6-44) being more preferred, and those represented by formulas (a1-6-7), (a1-6-8), and (a1-6-37) to (a1-6-44) being even more preferred. In the following structural units, R a61A structural unit in which the hydrogen atom corresponding to is replaced by a methyl group, etc., and R a61 Structural units in which the corresponding methyl group is replaced by a hydrogen atom or the like can also be listed as structural units (a1-6). TIFF2026047319000129.tif226161

[0150] If the resin contains structural units (a1-6), the content is preferably 3 mol% or more, more preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more, relative to the total structural units of the resin. Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol%.

[0151] In addition, the following structural units (a1) can also be listed. TIFF2026047319000130.tif33167 When the resin contains structural units represented by formulas (a1-7-1) to (a1-7-7), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total structural units of resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 95 mol% is preferred, 15 to 90 mol% is more preferred, 20 to 85 mol% is even more preferred, 20 to 70 mol% is even more preferred, and 20 to 60 mol% is particularly preferred.

[0152] In addition, the following structural units (a1) can also be listed. TIFF2026047319000131.tif51121 When the resin contains structural units represented by formulas (a1-8-1) to (a1-8-3), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, relative to the total structural units of resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 60 mol% is preferred, 15 to 55 mol% is more preferred, 20 to 50 mol% is even more preferred, 20 to 45 mol% is even more preferred, and 20 to 40 mol% is particularly preferred.

[0153] <Structural unit (s)> Structural units (s) are derived from monomers that do not have acid-unstable groups (hereinafter sometimes referred to as "monomers (s)"). Monomers that do not have acid-unstable groups and are known in the field of photoresists can be used to derive structural units (s). The structural units (s) preferably have a hydroxyl group, a carboxyl group, or a lactone ring. If a resin containing a structural unit having a hydroxyl group or a carboxyl group and not having an acid-unstable group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and not having an acid-unstable group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved. As described above, structural units (s) include structural unit (a4), structural unit (a5), structural unit (a6), structural unit (a7), or other structural units well known in the art.

[0154] <Structural Unit (a2)> Structural unit (a2) is a structural unit represented by formula (a2), excluding structural unit (a2-A), and has an alcoholic hydroxyl group, a phenolic hydroxyl group, or a carboxyl group. TIFF2026047319000132.tif4095[In formula (a2), R a2 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a28 - may be used instead. R a28 This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21 -CH2- represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have substituents, and the -CH2- contained in the hydrocarbon group may be -O-, -CO-, -S-, -SO-, -NR a28 -It may be replaced with -SO2-. L a22 This represents a chain-like hydrocarbon group having 1 to 12 carbon atoms, which may have single bonds or fluorine atoms, and the -CH2- contained in the chain-like hydrocarbon group may be replaced with -O- or -CO-. na2 represents an integer between 1 and 5. When na2 is 2 or greater, multiple L a22 They may be the same or different from each other. R in equation (a2) a2 The halogen atoms and alkyl groups that may have halogen atoms in the formula are R of formulas (a1-0) to (a1-2). a01 , R a4 and R a5 Examples similar to those exemplified earlier can be given. R a2 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom, a methyl group, or an ethyl group is more preferred, and a hydrogen atom or a methyl group is even more preferred.

[0155] A a21 and R a28 As for A in equation (a1-4), a11 and R a18 Similar examples include the above. Among them, A a21 The -CH2- contained in the alkanediyl group is -O-, -CO-, or -NR a28 The bases that have been replaced by - include *-O-, *-CO-O-, *-O-CO-, and *-CO-OA. a22 -CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 - are some examples. In particular, *-CO-O- and *-CO-OA a22 -CO-O-, *-OA a22 -CO-O-, *-CO-NR a28 - is preferable. Here, A a22 * represents an alkanediyl group with 1 to 8 carbon atoms, and * represents R a2This represents the bonding site with the carbon atom to which it is bonded. a22 The alkanediyl group is, within the limits allowed by the upper limit of the number of carbon atoms, A a21 Similar alkanediyl groups can be cited. A a21 These are single bonds, *-CO-O- or *-CO-OA a22 It is preferably -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-.

[0156] L a21 The hydrocarbon group in this context is a (Na2+1) valent hydrocarbon group, and includes linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and other cyclic hydrocarbon groups. It may also be a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group). L a21 Examples of chain-like hydrocarbon groups include 2- to 6-valent chain-like hydrocarbon groups such as alkanediyl groups, alkanetriyl groups, alkanetetrayl groups, alkampentile groups, and alkanehexyl groups. Examples of alkanediyl groups include A in formula (a1-4). a11 and A a21 Similar alkanediyl groups can be cited. Examples of alkanetriyl groups include methanetriyl, ethanetriyl, propanetriyl, butanetriyl, pentanetriyl, hexanetriyl, heptanetriyl, octantriyl, nonanetriyl, decantriyl, undecanetriyl, dodecanetriyl, tridecanetriyl, tetradecanetriyl, pentadecanetriyl, hexadecantriyl, and heptadecantriyl. Examples of alkanetetrayl groups include methanetetrayl, ethanetetrayl, propanetetrayl, butanetetrayl, pentanetetrayl, hexanetetrayl, heptanetetrayl, octanetetrayl, nonanetetrayl, decanetetrayl, undecanetetrayl, dodecanetetrayl, tridecanetetrayl, tetradecanetetrayl, pentadecanetetrayl, hexadecanetetrayl, and heptadecanetetrayl. Examples of alkanpentile groups include methanepentile, ethanepentile, propanepentile, butanepentile, pentanepentile, and hexanepentile groups. Examples of alkane hexyl groups include methane hexyl group, ethane hexyl group, propane hexyl group, butane hexyl group, pentane hexyl group, and hexane hexyl group. Other examples include groups in which one or more hydrogen atoms of the aforementioned group are replaced by bonding sites. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, even more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of monocyclic and polycyclic alicyclic hydrocarbon groups in this context include the following alicyclic hydrocarbon groups. The bonding site can be at any position. Examples include cycloalkanediyl groups, cycloalkanetriyl groups, cycloalkanetetrayl groups, cycloalkampentile groups, cycloalkanehexyl groups, and other alicyclic hydrocarbon groups with 2 to 6 valent values. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, cyclodecanetetrayl group, and monocyclic alicyclic hydrocarbon groups. Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanedriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group. Other examples include groups in which one or more hydrogen atoms of the aforementioned group are replaced by bonding sites. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, even more preferably 3 to 16, even more preferably 3 to 12, even more preferably 6 to 12, and even more preferably 6 to 10. L a21 Examples of aromatic hydrocarbon groups in this context include divalent to hexavalent aromatic hydrocarbon groups such as arylene groups, arenetriyl groups, arenetetrayl groups, arenepentile groups, and arenehexile groups. Specifically, examples include phenylene group, naphthylene group, anthreylene group, biphenylene group, phenanthrylene group, benzenetriyl group, naphthalentriyl group, anthracenatelyyl group, biphenylentriyl group, phenanthrentriyl group, benzenetetrayl group, naphthalenetetrayl group, anthracenetetrayl group, biphenylenetetrayl group, phenanthrenetetrayl group, and the like. Other examples include groups in which one or more hydrogen atoms of the aforementioned group are replaced by bonding sites. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, even more preferably 6 to 14, even more preferably 6 to 12, and even more preferably 6 to 10. Examples of groups formed by combining two or more types include groups formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, groups formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, groups formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and groups formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group and an aromatic hydrocarbon group. In the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Also, any of the groups may be A a21 and L a22 They may be bound together. The -CH2- contained in the hydrocarbon group is -O-, -S-, -SO2-, -SO-, -NR a28Groups replaced by - or -CO- include, as mentioned above, hydroxyl groups, carboxyl groups, thiol groups, amino groups, alkoxy groups, alkylthio groups, alkoxycarbonyl groups, alkylsulfonyl groups, alkylamino groups, alkylpeptide groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxycarbonyloxy groups, alkoxyalkoxy groups, oxy groups, carbonyl groups, thio groups, sulfonyl groups, peptide groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, alkanediyloxycarbonyloxy groups, alkanediylsulfonyl groups, alkanediylthio groups, alkanediylamino groups, alkanediylpeptide groups, cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups. Groups in which one or more hydrogen atoms of these groups are replaced at the bonding site are also included. These substituted groups may be similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. Furthermore, the -CH2- contained in alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or groups combining them may be -O-, -S-, -CO-, -SO-, -NR a28 Groups replaced with - or -SO2- include those similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. L a21 The hydrocarbon group in may have one or more substituents. Examples of substituents include halogen atoms, C1-C12 haloalkyl groups, C1-C16 alkyl groups (where the -CH2- group is replaced by -O- or -CO-), acryloyloxy groups, or methacryloyloxy groups. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. L a21The hydrocarbon group in the compound can substantially have substituents such as haloalkyl groups by having a halogen atom as a substituent. Examples of haloalkyl groups include alkyl fluorides, alkyl chlorides, alkyl bromides, alkyl iodides, etc., and include chloromethyl, bromomethyl, iodomethyl, fluoromethyl, difluoromethyl, trifluoromethyl, perfluoroethyl, perfluoropropyl, and perfluorobutyl groups. The number of carbon atoms in the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. L a21 The hydrocarbon group contains a branched structure, L a21 The alkyl group may substantially have substituents such as alkyl groups. Examples of alkyl groups include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group, nonyl group, decyl group, undecyl group, and dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 10, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. L a21 The hydrocarbon group containing -CH2- is -O-, -S-, -CO-, -SO-, -NR a28 - or -SO2- replaced by a group, L a21The substituents can substantially include hydroxyl groups, carboxyl groups, alkoxy groups, thiol groups, alkylthio groups, alkylsulfonyl groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkoxyalkyl groups, alkoxyalkoxy groups, alkoxycarbonyloxy groups, amino groups, alkylamino groups, alkylpeptide groups, acryloyloxy groups, methacryloyloxy groups, etc. The number of carbon atoms in the alkoxy group, alkylthio group, alkylsulfonyl group, alkylamino group, and alkylpeptide group is preferably 1 to 12, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms in the alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 to 3. The number of carbon atoms in the alkoxyalkyl group, alkoxyalkoxy group, and alkoxycarbonyloxy group is preferably 2 to 12, more preferably 2 to 8, even more preferably 2 to 6, and even more preferably 2 to 4. L a21 The substituents that the hydrocarbon group in the hydrocarbon group may have are preferably a halogen atom, a C1-C8 haloalkyl group, or a C1-C12 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), more preferably a halogen atom, a C1-C6 haloalkyl group, or a C1-C10 alkyl group (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), even more preferably a halogen atom, a C1-C4 haloalkyl group, a C1-C4 alkyl group, a hydroxyl group, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group, even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxyl group, a methoxy group, or an ethoxyethoxy group. Also, L a21When the alkanediyl group is replaced by -O- or -CO-, for example, *-L a23 -X a21 -(L a23 This represents an alkanediyl group with 1 to 8 carbon atoms, X a21 represents -O-, -O-CO-, -CO-O-, or -O-CO-O-, and * represents A a21 It is also preferable that it represents the bonding site with ( ). L a21 This includes single bonds, C1-C12 chain hydrocarbon groups which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), and C3-C20 cyclic hydrocarbon groups which may have substituents (however, the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, -SO-, -NR a28 A group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms that may have substituents and a cyclic hydrocarbon group having 3 to 20 carbon atoms that may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR a28 Preferably, the -CH2- may be replaced by -O- or -CO-. A chain hydrocarbon group having 1 to 10 carbon atoms that may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a cyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (however, the -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, -NR a28 A group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms that may have substituents and a cyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be -O-, -S-, -SO2-, -SO-, -NR a28 It is more preferable that it be replaced with - or -CO-.

[0157] L a22 Examples of linear alkane diyl groups with 1 to 12 carbon atoms include methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. The -CH2- group in the chain hydrocarbon group can be -O-, -S-, -CO-, -SO-, or -NR. a28 Examples of groups that replace - or -SO2- include those similar to those exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms. L a22 The fluorine atoms present may be one or two or more. na2 is preferably an integer between 1 and 4, and more preferably an integer between 1 and 3. L a21 However, as structural units (a2) in the case of single bonds or chain hydrocarbon groups, for example, the following structural units can be cited. Of the following structural units, R a2 Structural units in which the corresponding methyl group is replaced by a hydrogen atom or the like are also suitable structural units for structural unit (a2), similar to the structural units described below. TIFF2026047319000134.tif67169

[0158] When manufacturing a resist pattern from the resist composition of the present invention, if a high-energy beam such as a KrF excimer laser (248 nm), electron beam, or EUV (ultra-ultraviolet light) is used as the exposure light source, a structural unit (a2) having a phenolic hydroxyl group is preferred, and it is more preferable to use the structural unit (a2-A) described later. Furthermore, if an ArF excimer laser (193 nm) or the like is used, a structural unit (a2) having an alcoholic hydroxyl group is preferred, and it is more preferable to use the structural unit (a2-C) described later. The structural unit (a2) may consist of one type alone, or it may consist of two or more types.

[0159] In the structural unit (a2), L a21 When is a cyclic hydrocarbon group, structural units having an alcoholic hydroxyl group or a carboxyl group include the structural unit represented by formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), the structural unit represented by formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), and the structural unit represented by formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2026047319000135.tif46100 [In formula (a2-B) and formula (a2-C), R a2 This has the same meaning as equation (a2). R a27 This has the same meaning as equation (a²-A). L a25 is -O- or *-O-(CH2) k2 -CO-O- represents, k2 represents an integer between 1 and 7. * represents the connection site with -CO-. X a2 This represents a single bond or -CO-. R a25 and R a26 Each of these independently represents a hydrogen atom, a methyl group, or a hydroxyl group. nB2 represents an integer between 1 and 5. When nB2 is 2 or greater, multiple X a2They may be the same or different from one another. nB22 represents an integer between 0 and 8. When nB22 is 2 or greater, multiple R a27 They may be the same or different from one another. nC22 represents an integer between 0 and 10. When nC22 is 2 or greater, multiple R a27 They may be the same or different from each other. L a25 Preferably, -O- or -O-(CH2) f1 The result is -CO-O- (where f1 represents any integer from 1 to 4), and more preferably -O-. R a2 The group is preferably a methyl group. X a2 The bond is preferably a single bond. R a25 Preferably, it is a hydrogen atom. R a26 This is preferably a hydrogen atom or a hydroxyl group. R a27 The group is preferably a halogen atom, a hydroxyl group, a carboxyl group, a C1-C4 alkyl group which may have a halogen atom, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably an integer from 0 to 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. nC22 is preferably an integer from 0 to 6, more preferably an integer from 0 to 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0160] Examples of structural units (a2-B) and structural units (a2-C) include structural units derived from monomers described in Japanese Patent Publication No. 2010-204646, the following structural units, and R in the following structural units. a2 Examples of structural units include those in which the corresponding methyl group or hydrogen atom is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Among these, structural units represented by any of the formulas (a2-B-1) to (a2-B-5) and (a2-C-1) to (a2-C-9) are preferred. TIFF2026047319000136.tif80164 When the resin contains structural unit (a2-B) or structural unit (a2-C), the content is preferably 1 mol% or more, and more preferably 2 mol% or more, relative to the total structural units of the resin. Also, it is preferably 45 mol% or less, more preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it is preferably 1 to 45 mol%, more preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0161] TIFF2026047319000137.tif51105[In formula (a2-D), R a2 and A a21 These expressions have the same meaning as equation (a2). R a27 This has the same meaning as equation (a²-A). R a21 and R a22 Each of these independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 This represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer between 1 and 5. When nD2 is 2 or greater, the bases within the parentheses may be the same or different. nD22 represents an integer between 0 and 4. When nD22 is 2 or greater, multiple R a27They may be the same or different from one another. However, 1 ≤ nD² + nD²² ≤ 5. R a21 and R a22 Examples of alkyl fluoride groups include, independently, trifluoromethyl group, 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, and 4,4,4-trifluorobutyl group. R a21 and R a22 A trifluoromethyl group is preferred as the component. L a24 Examples of alkanediyl groups include methylene group, ethane-1,1-diyl group, propane-1,1-diyl group, and propane-2,2-diyl group. L a24 A single bond or a methylene group is preferred. R a27 The group is preferably a halogen atom, a hydroxyl group, a carboxyl group, a C1-C4 alkyl group which may have a halogen atom, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group. nD2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, even more preferably 1 or 2, and even more preferably 1. Furthermore, it is preferable that nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably an integer between 0 and 3, more preferably an integer between 0 and 2, even more preferably 0 or 1, and even more preferably 0.

[0162] It is more preferable that the structural unit (a2-D) is a structural unit represented by the following formula (a2-D1) (hereinafter sometimes referred to as "structural unit (a2-D1)"). TIFF2026047319000138.tif51107[In formula (a2-D1), R a2 , A a21 , R a27 nD2 and nD22 have the same meaning as equation (a2-D). In equation (a2-D1), R a2 This is preferably a hydrogen atom or a methyl group. A a21 The bond is preferably a single bond.

[0163] The following are examples of structural units (a2-D). TIFF2026047319000139.tif62167

[0164] In the structural units represented by equations (a2-D-1) to (a2-D-8), R a2 In structural units in which the hydrogen atom corresponding to is replaced by a methyl group, etc., and in structural units represented by formulas (a2-D-9) to (a2-D-16), R a2 Structural units in which the corresponding methyl group is replaced by a hydrogen atom or the like can also be given as specific examples of structural unit (a2-D). Among these, structural units represented by formulas (a2-D-1) to (a2-D-8) are preferred, structural units represented by formulas (a2-D-1) to (a2-D-4) are more preferred, and structural unit represented by formula (a2-D-1) is even more preferred.

[0165] When the resin contains structural units (a2-D), the content is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, relative to the total structural units of the resin. Furthermore, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0166] <Structural unit (a3)> The lactone ring of the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or it may be a fused ring of a monocyclic lactone ring and another ring. Preferably, it may be a γ-butyrolactone ring, an adamantane lactone ring, or a bridging ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0167] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). One of these may be included alone, or two or more may be included. TIFF2026047319000140.tif51164[In formulas (a3-1), (a3-2), (a3-3), and (a3-4), L a4 , L a5 and L a6 These are, independently, -O- or *-O-(CH2) k3 This represents a base represented by -CO-O-(where k3 is an integer from 1 to 7). L a7 is -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O- L a8 and L a9 Each of these independently represents an alkanediyl group with 1 to 6 carbon atoms. * indicates a bond site with a carbonyl group. R a18 , R a19 , R a20 and R a24 Each of these independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21This represents an aliphatic hydrocarbon group with 1 to 4 carbon atoms. R a22 , R a23 and R a25 Each of these independently represents a carboxyl group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer between 0 and 5. q1 represents an integer between 0 and 3. r1 represents an integer between 0 and 3. w1 represents an integer between 0 and 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 They may be the same as each other, or they may be different.

[0168] R a21 , R a22 , R a23 and R a25 Examples of aliphatic hydrocarbon groups in this context include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, and tert-butyl groups. R a18 , R a19 , R a20 and R a24 The halogen atoms and alkyl groups that may have halogen atoms in the formula are R of formulas (a1-0) to (a1-2). a01 , R a4 and R a5 Examples similar to those exemplified earlier can be given. L a8 and L a9 Examples of alkanediyl groups in this compound include methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. La4 ~L a6 Each is independently, preferably -O- or *-O-(CH2) k3 In -CO-O-, k3 is an integer from 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and even more preferably an oxygen atom. L a7 Preferably -O- or *-OL a8 It is -CO-O-, and more preferably -O-, -O-CH2-CO-O-, or -O-C2H4-CO-O-. R a18 , R a19 , R a20 and R a24 Preferably, it is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a21 The group is preferably a methyl group. R a22 , R a23 and R a25 Each of these is independently preferably a carboxyl group, a cyano group, or a methyl group. p1, q1, and r1 are each independently, preferably integers from 0 to 2, and more preferably 0 or 1. w1 is preferably an integer between 0 and 2, and more preferably 0 or 1. In particular, formula (a3-4') is preferred over formula (a3-4). TIFF2026047319000141.tif2855(in the formula, R a24 , L a7 (This expresses the same meaning as above.)

[0169] Examples of structural units (a3) ​​include those derived from monomers described in Japanese Patent Publication No. 2010-204646, Japanese Patent Publication No. 2000-122294, and Japanese Patent Publication No. 2012-41274. Examples of structural units (a3) ​​include those represented by any of the formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the said structural units, R in formulas (a3-1) to (a3-4). a18 , R a19 , R a20 and R a24 A structural unit in which the corresponding methyl group is replaced by a hydrogen atom is preferred. TIFF2026047319000142.tif107164 When the resin contains structural units (a3), the total content is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, relative to the total structural units of the resin. Also, it is 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it is 1 to 70 mol%, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, even more preferably 5 to 65 mol%, even more preferably 5 to 60 mol%, and even more preferably 10 to 60 mol%. Furthermore, the content of structural unit (a3-1), structural unit (a3-2), structural unit (a3-3), or structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, and even more preferably 10 mol% or more, relative to the total structural units of the resin. Also, it is preferably 60 mol% or less, more preferably 55 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferred, 3 to 60 mol% is more preferred, 3 to 55 mol% is even more preferred, 5 to 55 mol% is even more preferred, 5 to 50 mol% is even more preferred, and 10 to 50 mol% is even more preferred.

[0170] <Structural Unit (a4)> The structural unit represented by formula (a4) is shown below. TIFF2026047319000143.tif3553[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 This represents an aliphatic hydrocarbon group having a halogen atom with 1 to 48 carbon atoms, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-.

[0171] R 42 Aliphatic hydrocarbon groups represented by include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. Examples of chain-type hydrocarbon groups include linear alkyl groups such as methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups, and branched alkyl groups such as isopropyl and isobutyl groups. Examples of monocyclic or polycyclic alicyclic hydrocarbon groups include monocyclic alicyclic hydrocarbon groups that are monocyclic cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups; and polycyclic alicyclic hydrocarbon groups that are polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates the bonding site). TIFF2026047319000144.tif10146 Examples of groups formed by combinations include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic hydrocarbon group-alkyl group. Examples of alkanediyl groups include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, and hexane-1,6-diyl group; and branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The end of the branched alkanediyl group may be a methyl group. R 42 Examples of halogen atoms contained in the aliphatic hydrocarbon group include fluorine, chlorine, bromine, or iodine atoms. R 42 Groups in which the -CH2- of the aliphatic hydrocarbon group contained in is replaced with -O- or -CO- include hydroxyl groups, carboxyl groups, carbonyl groups, oxy groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, alkanediyloxy groups, alkanediyloxycarbonyl groups, alkanediylcarbonyl groups, alkanediylcarbonyloxy groups, cycloalkoxy groups, cycloalkylalkoxy groups, and groups formed by combining two or more of these groups. These replaced groups are similar to the groups exemplified herein, within the limits permitted by the upper limit of the number of carbon atoms.

[0172] As a structural unit (a4), R 42 However, it is preferable that it be an aliphatic hydrocarbon group having a fluorine atom, R 42 However, examples of structural units (a4) that are aliphatic hydrocarbon groups containing a fluorine atom include the structural unit represented by formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), the structural unit represented by formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), the structural unit represented by formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and the structural unit represented by formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by formula (a4-1) is the structural unit shown below. TIFF2026047319000145.tif3092[In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 This represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f This represents an alkanediyl group with 1 to 8 carbon atoms containing a fluorine atom, or a cycloalkanediyl group with 3 to 12 carbon atoms containing a fluorine atom. R 42f This represents a hydrogen atom or a fluorine atom.

[0173] L 41 The alkanediyl group in this is R 42 Examples include those shown above. L 42f Examples of fluorine-containing alkanediyl groups include fluorine-containing methylene groups, fluorine-containing ethylene groups, fluorine-containing propane-1,3-diyl groups, fluorine-containing butane-1,4-diyl groups, fluorine-containing pentane-1,5-diyl groups, fluorine-containing hexane-1,6-diyl groups, fluorine-containing heptane-1,7-diyl groups, fluorine-containing octane-1,8-diyl groups, and other linear alkanediyl groups containing fluorine atoms; Examples of branched alkanediyl groups having a fluorine atom include ethane-1,1-diyl group having a fluorine atom, propane-1,1-diyl group having a fluorine atom, propane-1,2-diyl group having a fluorine atom, propane-2,2-diyl group having a fluorine atom, pentane-2,4-diyl group having a fluorine atom, 2-methylpropane-1,3-diyl group having a fluorine atom, 2-methylpropane-1,2-diyl group having a fluorine atom, pentane-1,4-diyl group having a fluorine atom, and 2-methylbutane-1,4-diyl group having a fluorine atom. The ends of the branched alkanediyl groups may be methyl groups that may also have a fluorine atom. L 42f Examples of cycloalkanediyl groups containing a fluorine atom include monocyclic cycloalkanediyl groups containing a fluorine atom, such as cyclobutane-1,3-diyl group containing a fluorine atom, cyclopentane-1,3-diyl group containing a fluorine atom, cyclohexane-1,4-diyl group containing a fluorine atom, cyclohexene-3,6-diyl group containing a fluorine atom, cycloheptane-1,4-diyl group containing a fluorine atom, and cyclooctane-1,5-diyl group containing a fluorine atom. Examples of polycyclic cycloalkanediyl groups containing a fluorine atom include norbornane-1,4-diyl group containing a fluorine atom, norbornane-2,5-diyl group containing a fluorine atom, 5-norbornene-2,3-diyl group containing a fluorine atom, adamantane-1,5-diyl group containing a fluorine atom, and adamantane-2,6-diyl group containing a fluorine atom. L 42f The number of fluorine atoms in the alkanediyl group and cycloalkanediyl group having fluorine atoms in the above is 1 or more, and preferably 2 or more. L 42f In the above, the alkanediyl group and cycloalkanediyl group having a fluorine atom are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0174] L 42fThe perfluoroalkanediyl groups in this product include difluoromethylene, perfluoroethylene, perfluoroethylfluoromethylene, perfluoropropane-1,3-diyl, perfluoropropane-1,2-diyl, perfluoropropane-2,2-diyl, perfluorobutane-1,4-diyl, perfluorobutane-2,2-diyl, perfluorobutane-1,2-diyl, perfluoropentane-1,5-diyl, perfluoropentane-2,2-diyl, and perfluoropentane-3 Examples include 3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group. L 42f Examples of perfluorocycloalkanediyl groups in this context include perfluorocyclohexanediyl group, perfluorocyclopentanediyl group, perfluorocycloheptanediyl group, and perfluoroadamantanediyl group.

[0175] L 41 Preferably, it is a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. L 42f The group is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0176] The structural units (a4-1) are the structural units shown below and the R in the structural units (a4-1) within the structural units below. 41One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. The structural unit represented by formula (a4-2) in TIFF2026047319000146.tif55167 is the structural unit shown below. TIFF2026047319000147.tif33101[In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. R 43f This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. However, L 43f and R 43f At least one of them has a fluorine atom, L 43f and R 43f The upper limit for the total number of carbon atoms is 21.

[0177] L 43f and R 43f Examples of aliphatic hydrocarbon groups in this context include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. 43f and R 43f Examples of aliphatic hydrocarbon groups in L 43f and R 43f As long as the upper limit of the total number of carbon atoms allows, R in equation (a4) 42 Examples of aliphatic hydrocarbon groups include those similar to the aliphatic hydrocarbon groups exemplified.

[0178] L 43f The aliphatic hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by formula (L43f-1). TIFF2026047319000148.tif13120[In formula (L43f-1), s represents either 0 or 1. L 45f and L 46f Each of these independently represents a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, which may contain a fluorine atom. L 47f This represents a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms, which may have a single bond or a fluorine atom. X 46f and X 47f These represent -O-, -CO-, -CO-O-, or -O-CO-, respectively, independently. However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, where ** is -O-CO-R 43f This is the junction site.

[0179] L in the group represented by formula (L43f-1) 45f , L 46f and L 47f Examples of divalent aliphatic hydrocarbon groups represented by include linear or branched alkanediyl groups and monocyclic or polycyclic divalent alicyclic hydrocarbon groups, as well as divalent aliphatic hydrocarbon groups formed by combining alkanediyl groups and divalent alicyclic hydrocarbon groups. Specifically, examples include methylene groups, ethylene groups, propane-1,3-diyl groups, propane-1,2-diyl groups, butane-1,4-diyl groups, 1-methylpropane-1,3-diyl groups, 2-methylpropane-1,3-diyl groups, and 2-methylpropane-1,2-diyl groups. s is preferably 0.

[0180] The following are examples of groups represented by formula (L43f-1). In the following examples, * and ** represent the bonding site, and ** is -O-CO-R 43f This is the junction site. TIFF2026047319000149.tif47140

[0181] R 43f Preferably, it is an aliphatic hydrocarbon group having a fluorine atom. In this case, the structural unit represented by formula (a4-2) is, for example, the structural unit represented by formula (a4-2A) or (formula a4-2B). TIFF2026047319000150.tif42157 [In formula (a4-2A) and formula (a4-2B), R 41 and L 43f This represents the same thing as in equation (a4-2). R 43fA This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom. A 43f represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. X 43 **-O-CO- or **-CO-O-, where ** is A 43f This represents the connection point. R 43fB This represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms, which may contain a fluorine atom. However, in equation (a4-2A), L 43f and R 43fA The total number of carbon atoms is 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB The total number of carbon atoms is 21 or less, A 43f and R 43fB At least one of them has at least one fluorine atom. R 43fA The aliphatic hydrocarbon group is R, as long as the upper limit of the number of carbon atoms allows. 42 Examples include aliphatic hydrocarbon groups similar to those exemplified above. R 43fA It is preferably an alkyl group having 1 to 13 fluorine atoms, a cycloalkyl group having 3 to 12 fluorine atoms, or a combination thereof, *-(CF2) n43f-R 42’ (* represents the bonding site with the carbonyl group. n43f represents an integer from 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom. ) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and R 43fB The aliphatic hydrocarbon group is R in formula (a4), as long as the upper limit of the number of carbon atoms allows. 42 Examples include aliphatic hydrocarbon groups similar to those exemplified above. A 43f It is preferably a divalent chain hydrocarbon group which may have a fluorine atom, a divalent alicyclic hydrocarbon group, or a group which is a combination thereof, more preferably a divalent chain hydrocarbon group which has a fluorine atom, and even more preferably an alkanediyl fluoride group which has 1 to 6 carbon atoms. R 43fB The aliphatic hydrocarbon group which may have a fluorine atom is preferably a chain hydrocarbon group which may have a fluorine atom, an alicyclic hydrocarbon group which may have a fluorine atom, or a group which is a combination thereof, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms which may have a fluorine atom, or a group which is a combination thereof, such as a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, or a 1,1,2,2,3,3,4,4-o Alkyl fluorides such as fluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group and perfluorooctyl group, cyclopropylmethyl group, cyclopropyl group, cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbornyl group, norbornylmethyl group, perfluoroadamantyl group, and perfluoroadamantylmethyl group are even more preferred.

[0182] In formula (a4-2B), *-A 43f -X 43 -R 43fB An example of a structure that the group represented by can take is shown below (* indicates the bonding site with the carbonyl group). TIFF2026047319000151.tif15170

[0183] The structural units represented by formula (a4-2A) are the structural units shown below and the R in the structural units represented by formula (a4-2A) in the structural units below. 41 One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF2026047319000152.tif99167

[0184] The structural units represented by formula (a4-2B) are the structural units shown below and the R in the structural units represented by formula (a4-2B) in the structural units below. 41 One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF2026047319000153.tif111164

[0185] Another example of a structural unit (a4) is the structural unit represented by formula (a4-3). TIFF2026047319000154.tif3589[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. R 44f This represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms, which may contain a fluorine atom, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. However, L 44f and R 44f At least one of them has a fluorine atom, L44f and R 44f The upper limit for the total number of carbon atoms is 21.

[0186] L 44f and R 44f Examples of aliphatic hydrocarbon groups in this context include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. 44f and R 44f Examples of aliphatic hydrocarbon groups in L 44f and R 44f As long as the upper limit of the total number of carbon atoms allows, R in equation (a4) 42 Examples of aliphatic hydrocarbon groups include those similar to the aliphatic hydrocarbon groups exemplified. L 44f It is preferably an alkanediyl group having 1 to 14 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), and -(CH2) j1 -,-(CH2) j2 -O-(CH2) j3 - or - (CH2) j4 -CO-O-(CH2) j5 It is more preferable that the group is represented by - (j1 to j5 each independently represent an integer from 1 to 6). It is also even more preferable that it is an alkanediyl group having 1 to 4 carbon atoms (one -CH2- in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f Preferably, the group is an aliphatic hydrocarbon group having 1 to 10 carbon atoms and containing a fluorine atom; more preferably, an alkyl group having 1 to 10 carbon atoms and containing a fluorine atom; more preferably, an alkyl group having 3 to 10 carbon atoms and containing a fluorine atom; even more preferably, an alkyl group having 1 to 10 carbon atoms and containing a fluorine atom; and even more preferably, an alkyl group having 1 to 6 carbon atoms and containing a fluorine atom.

[0187] As a structural unit represented by formula (a4-3), for example, the following structural unit and the structural unit represented by the following formula, R in structural unit (a4-3) 41 One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF2026047319000155.tif86170

[0188] Another example of a structural unit (a4) is the structural unit represented by formula (a4-A). TIFF2026047319000156.tif3573[In formula (a4-A), R 44 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. X 44 * represents a single bond or *-CO-O-. * represents R 44 This represents the bonding site with the carbon atom to which it is bonded. L 44 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms, which may have substituents, and the -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O-, -S-, -SO2-, -SO-, or -CO-. R 45 This represents an alkyl fluoride with 1 to 8 carbon atoms. R 46 L represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 44 It may combine with to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-. mi represents an integer between 1 and 4. When mi is 2 or greater, the bases within the parentheses may be the same or different.

[0189] R 44 The halogen atoms and alkyl groups that may have halogen atoms in the formula are R of formulas (a1-0) to (a1-2). a01 , R a4 and R a5 Examples similar to those exemplified earlier can be given. R 44 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom or an alkyl group having 1 to 3 carbon atoms is more preferred, a hydrogen atom, a methyl group or an ethyl group is even more preferred, and a hydrogen atom or a methyl group is even more...

Claims

1. A carboxylic acid generator containing a carboxylic acid salt represented by formula (I). [In formula (I), m10 represents an integer from 1 to 3, and when m10 is 2 or greater, the bases within the parentheses may be the same or different from each other. m11 represents an integer from 0 to 2, satisfying 2 ≤ m10 + m11 ≤ 3. When m10 + m11 = 2, X represents an iodine atom. When m10 + m11 = 3, X represents a sulfur atom. When m11 is 2 or greater, the groups in parentheses may be the same or different from each other. A １ and A ２ Each of these independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ It may be replaced with - or -CO-. R １１ This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ar １ and Ar ２ Each of these independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic hydrocarbon group having 4 to 9 carbon atoms, and the aromatic hydrocarbon group and the heterocyclic hydrocarbon group may have substituents. R １ and R ４ each independently represents a hydroxy group, *-X １ -R １０ or *-X １ -L １１ -X ２ -R １０ where * represents * is Ar １ or Ar ２ This represents the connection point. X １ and X ２ These independently represent -CO-O-, -O-CO-, -O-CO-O-, or -O-. L １１ represents a hydrocarbon group having 1 to 28 carbon atoms, which may have substituents, and the hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ It may be replaced with - or -CO-. R １０ This represents an acid-unstable group. R ２ and R ３ Each of these independently represents a halogen atom or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ - or -CO- may be replaced, and two R ２ , two R ３ or R ２ and R ３ X ＋ A ring containing -CH may be formed, and the ring contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ - or -CO- may be replaced, and the two R that form the ring ２ , two R ３ or R ２ and R ３ is, X ＋ It may also be a single bond formed between two benzene rings that are bonded to each other. m1 represents an integer from 1 to 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different from each other. mm1 represents an integer between 2 and 5, and multiple R １ They may be the same or different from one another. m2 represents an integer from 0 to 4, satisfying 1 ≤ m1 + m2 ≤ 5, and when m2 is 2 or greater, multiple R ２ They may be the same or different from one another. m3 represents an integer from 0 to 5, and when m3 is 2 or greater, multiple R ３ They may be the same or different from one another. m4 represents an integer from 0 to 5, satisfying 0 ≤ m3 + m4 ≤ 5, and when m4 is 2 or greater, the bases within the parentheses may be the same or different. mm4 represents either 0 or 1. W ２１ This represents a cyclic hydrocarbon group having 3 to 36 carbon atoms, which may have substituents, and the cyclic hydrocarbon group contains -CH ２ - is -O-, -S-, -CO-, -SO-, -NR １１ - or - SO ２ It may be replaced with -. L ２１ This represents a hydrocarbon group having 1 to 28 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH 2 - is -O-, -S-, -SO-, -SO ２ -, -NR １１ It may be replaced with - or -CO-. A ２１ represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ It may be replaced with - or -CO-. Ar ２１ This represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic hydrocarbon group having 4 to 9 carbon atoms, and the aromatic hydrocarbon group and the heterocyclic hydrocarbon group may have substituents. R ２１ This is a hydroxyl group, *-X １ -R １０ or *-X １ -L １１ -X ２ -R １０ It represents. R ２４ represents a halogen atom or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ It may be replaced with - or -CO-. mm21 represents an integer between 2 and 5, and multiple R ２１ They may be the same or different from one another. m24 represents an integer from 0 to 3, and when m24 is 2 or greater, multiple R ２４ They may be the same or different from one another. mm² represents an integer between 1 and 5, and when mm² is 2 or greater, the bases within the parentheses may be the same or different.

2. A １ However, ***-X ０１ -L ０１ - or *** - L ０１ -X ０１ - and X ０１ -O-, -CO-, -S-, -SO-, -NR １１ - or - SO ２ - represents, L ０１ This refers to a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - is -O-, -CO-, -S-, -SO-, -NR １１ - or - SO ２ It may be replaced by -.) *** is Ar １ A carboxylic acid generator according to claim 1, which represents a binding site with

3. X ０１ The carboxylic acid generator according to claim 2, wherein the carboxylic acid generator is -O-, -CO-, or -S-.

4. L ０１ However, a single bond or an alkanediyl group having 1 to 6 carbon atoms (the alkanediyl group contains -CH 2 The carboxylic acid generator according to claim 2, wherein - may be replaced by -O- or -CO-.

5. R １ is a hydroxy group, *-O-R １０ or *-O-L １１ -CO-O-R １０ (* represents the bonding site with Ar １ ). The carboxylic acid generator according to claim 1.

6. R １ is *-X １ -R １０ or *-X １ -L １１ -X ２ -R １０ and R １０ The carboxylic acid generator according to claim 1, wherein the acid-unstable group is a group represented by formula (1a) or a group represented by formula (2a). [In formula (1a), R aa1 , R aa2 and R aa3 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group consisting of a combination thereof, or R aa1 and R aa2 These atoms bond to each other to form a cyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the cyclic hydrocarbon group, and the aromatic hydrocarbon group may have halogen atoms. * indicates a connection site. [In formula (2a), R aa1’ and R aa2’ Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ They combine with each other and they combine -C-X ａ - Together with the hydrocarbon group, it forms a heterocyclic group having 3 to 20 carbon atoms, and the -CH contained in the hydrocarbon group and the heterocyclic group ２ The - may be replaced with -O- or -S-, and the hydrocarbon group and the heterocyclic group may have halogen atoms. X a This represents an oxygen atom or a sulfur atom. * indicates a connection site.

7. The carboxylic acid generator according to claim 1, wherein X is a sulfur atom.

8. Ar １ The carboxylic acid generator according to claim 1, wherein the group is derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

9. W ２１ The carboxylic acid generator according to claim 1, wherein the phenylene group may have substituents.

10. Ar ２１ The carboxylic acid generator according to claim 1, wherein the group is derived from a benzene ring.

11. A resist composition containing a carboxylic acid generator according to any one of claims 1 to 10.

12. It contains an acid generator other than the carboxylic acid generator, The resist composition according to claim 11, wherein the acid generator comprises a salt represented by formula (B1) or a salt represented by formula (B2). [In formula (B1), L b1 This represents a hydrocarbon group having a single bond or a substituent (nb1+1), and the hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, -SO-, or -SO 2 It may be replaced with -. L b2 This represents a divalent hydrocarbon group having 1 to 24 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, -SO-, or -SO 2 It may be replaced with -. Y b1 This represents a methyl group which may have substituents or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the cyclic hydrocarbon group contains -CH 2 - is -O-, -S-, -SO 2 It may be replaced by -, -SO-, or -CO-. nb1 represents an integer between 1 and 6. When nb1 is 2 or greater, the bases within the parentheses may be the same or different. Z1 ＋ This represents an organic cation. [In formula (B2), A １ represents a nitrogen atom or a carbon atom. L ｂ２’ This represents a divalent hydrocarbon group having 1 to 24 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, -SO-, or -SO 2 It may be replaced with -. Y ｂ１’ This represents a methyl group which may have substituents or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the cyclic hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, -SO-, or -SO 2 It may be replaced with -. nb5 represents an integer of 2 or 3. A １ If it is a nitrogen atom, then nb5 is 2, and A １ If is a carbon atom, then nb5 is 3. The multiple groups in parentheses may be the same or different from each other, and two groups in parentheses combine to form A １ A ring containing the element may be formed. Z2 ＋ This represents an organic cation.

13. Furthermore, the resist composition according to claim 11 contains a compound comprising a structure represented by formula (L0). [In formula (L0), Ar ｌｋ This represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms, which may have substituents. X ｌｋ This represents a single bond or a carbonyl group. R ｌｋ This represents a hydrogen atom or an acid-unstable group. lk represents an integer greater than or equal to 1, and when lk is 2 or greater, the bases within the parentheses may be the same or different. * indicates a connection site. `lo` represents an integer greater than or equal to 1.

14. The resist composition according to claim 13, wherein the compound containing the structure represented by formula (L0) is the compound represented by formula (LX). [In formula (LX), Ar ｋ１ and Ar ｋ２ Each of these independently represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms. X ｌｋ１ and X ｌｋ２ Each of these independently represents either a single bond or a carbonyl group. R ｌｋ１ and R ｌｋ２ Each of these independently represents either a hydrogen atom or an acid-unstable group. Lx represents a hydrocarbon group having 1 to 80 carbon atoms, which may have substituents, and the hydrocarbon group contains -CH 2 - is -O-, -CO-, -S-, -SO-, -NR １１ - or - SO ２ It may be replaced with -. R ｌｋ１１ and R ｌｋ２２ Each of these independently represents a hydrocarbon group having 1 to 20 carbon atoms, which may have a halogen atom or substituents, and the hydrocarbon group contains -CH 2 - is -O-, -CO-, -S-, -SO-, -NR １１ - or - SO ２ It may be replaced by -, R ｌｋ１１ and R ｌｋ２２ , R ｌｋ１１ and Lx or R ｌｋ２２ Lx may be bonded together to form a ring, and the ring may have substituents, and the ring may contain -CH 2 - is -O-, -S-, -CO-, -SO-, -NR １１ - or - SO ２ It may be replaced with -. lx² represents an integer between 1 and 6, and when lx² is 2 or greater, the bases within the parentheses may be the same or different. lk1' represents an integer between 1 and 13, and when lk1' is 2 or greater, the bases within the parentheses may be the same or different. lk11' represents an integer between 0 and 12, and when lk11' is 2 or greater, the bases within the parentheses may be the same or different. lk2' represents an integer between 1 and 13, and when lk2' is 2 or greater, the bases within the parentheses may be the same or different. lk22' represents an integer between 0 and 12, and when lk22' is 2 or greater, the bases within the parentheses may be the same or different.

15. The resist composition according to claim 13, wherein the compound containing the structure represented by formula (L0) is a resin containing the structural unit represented by formula (a2-A). [In formula (a2-A), R ａ２ This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R ａ２７ This represents a halogen atom, a hydroxyl group, a carboxyl group, a C1-C6 alkyl group which may have a halogen atom, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ This represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the alkanediyl group contains -CH ２ - stands for -O-, -CO-, or -NR ａ２８ It can be replaced with -. R ａ２８ This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ This represents a single bond or a carbonyl group. nA2 represents an integer from 1 to 5, and when nA2 is 2 or greater, the bases within the parentheses may be the same or different from each other. na21 represents an integer from 0 to 4, and when na21 is 2 or greater, multiple R ａ２７ They may be the same or different from one another. mc represents an integer between 0 and 2.

16. (1) A step of applying the resist composition according to claim 11 onto a substrate, (2) A step of drying the coated resist composition to form a composition layer, (3) Exposure step of the composition layer, (4) A step of heating the composition layer after exposure, (5) A step of developing the composition layer after heating, A method for manufacturing a resist pattern that includes [the specified element].

17. A carboxylate salt represented by formula (I). [In formula (I), m10 represents an integer from 1 to 3, and when m10 is 2 or greater, the bases within the parentheses may be the same or different from each other. m11 represents an integer from 0 to 2, satisfying 2 ≤ m10 + m11 ≤ 3. When m10 + m11 = 2, X represents an iodine atom. When m10 + m11 = 3, X represents a sulfur atom. When m11 is 2 or greater, the groups in parentheses may be the same or different from each other. A １ and A ２ Each of these independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ It may be replaced with - or -CO-. R １１ This represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ar １ and Ar ２ Each of these independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic hydrocarbon group having 4 to 9 carbon atoms, and the aromatic hydrocarbon group and the heterocyclic hydrocarbon group may have substituents. R １ and R ４ These are, independently, a hydroxyl group and *-X. １ -R １０ or *-X １ -L １１ -X ２ -R １０ It represents. * is Ar １ or Ar ２ This represents the connection point. X １ and X ２ These independently represent -CO-O-, -O-CO-, -O-CO-O-, or -O-. L １１ represents a hydrocarbon group having 1 to 28 carbon atoms, which may have substituents, and the hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ It may be replaced with - or -CO-. R １０ This represents an acid-unstable group. R ２ and R ３ Each of these independently represents a halogen atom or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ - or -CO- may be replaced, and two R ２ , two R ３ or R ２ and R ３ X ＋ A ring containing -CH may be formed, and the ring contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ - or -CO- may be replaced, and the two R that form the ring ２ , two R ３ or R ２ and R ３ is, X ＋ It may also be a single bond formed between two benzene rings that are bonded to each other. m1 represents an integer from 1 to 5, and when m1 is 2 or greater, the bases within the parentheses may be the same or different from each other. mm1 represents an integer between 2 and 5, and multiple R １ They may be the same or different from one another. m2 represents an integer from 0 to 4, satisfying 1 ≤ m1 + m2 ≤ 5, and when m2 is 2 or greater, multiple R ２ They may be the same or different from one another. m3 represents an integer from 0 to 5, and when m3 is 2 or greater, multiple R ３ They may be the same or different from one another. m4 represents an integer from 0 to 5, satisfying 0 ≤ m3 + m4 ≤ 5, and when m4 is 2 or greater, the bases within the parentheses may be the same or different. mm4 represents either 0 or 1. W ２１ This represents a cyclic hydrocarbon group having 3 to 36 carbon atoms, which may have substituents, and the cyclic hydrocarbon group contains -CH ２ - is -O-, -S-, -CO-, -SO-, -NR １１ - or - SO ２ It may be replaced with -. L ２１ This represents a hydrocarbon group having 1 to 28 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH 2 - is -O-, -S-, -SO-, -SO ２ -, -NR １１ It may be replaced with - or -CO-. A ２１ represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ It may be replaced with - or -CO-. Ar ２１ This represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic hydrocarbon group having 4 to 9 carbon atoms, and the aromatic hydrocarbon group and the heterocyclic hydrocarbon group may have substituents. R ２１ This is a hydroxyl group, *-X １ -R １０ or *-X １ -L １１ -X ２ -R １０ It represents. R ２４ represents a halogen atom or a hydrocarbon group having 1 to 28 carbon atoms, and the hydrocarbon group may have substituents, and the hydrocarbon group contains -CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ It may be replaced with - or -CO-. mm21 represents an integer between 2 and 5, and multiple R ２１ They may be the same or different from one another. m24 represents an integer from 0 to 3, and when m24 is 2 or greater, multiple R ２４ They may be the same or different from one another. mm² represents an integer between 1 and 5, and when mm² is 2 or greater, the bases within the parentheses may be the same or different.

18. A １ However, ***-X ０１ -L ０１ - or *** - L ０１ -X ０１ - and X ０１ -O-, -CO-, -S-, -SO-, -NR １１ - or - SO ２ - represents, L ０１ This refers to a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have substituents, and the hydrocarbon group may contain -CH 2 - is -O-, -CO-, -S-, -SO-, -NR １１ - or - SO ２ It may be replaced by -.) *** is Ar １ The carboxylate salt according to claim 17, representing the bonding site with

19. X ０１ The carboxylate salt according to claim 18, wherein the salt is -O-, -CO-, or -S-.

20. L ０１ However, a single bond or an alkanediyl group having 1 to 6 carbon atoms (the alkanediyl group contains -CH 2 The carboxylate salt according to claim 18 or 19, wherein - may be replaced by -O- or -CO-.

21. R １ However, the hydroxyl group, *-O-R １０ Or *-O-L １１ -CO-O-R １０ (* is Ar １ The carboxylate salt according to claim 17 or 18, which represents the bonding site with ().

22. R １ However, *-X １ -R １０ or *-X １ -L １１ -X ２ -R １０ And, R １０ The carboxylate salt according to claim 17 or 18, wherein the acid-unstable group is a group represented by formula (1a) or a group represented by formula (2a). [In formula (1a), R aa1 , R aa2 and R aa3 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group consisting of a combination thereof, or R aa1 and R aa2 These atoms bond to each other to form a cyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the cyclic hydrocarbon group, and the aromatic hydrocarbon group may have halogen atoms. * indicates a connection site. [In formula (2a), R aa1’ and R aa2’ Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ They combine with each other and they combine -C-X ａ - Together with the hydrocarbon group, it forms a heterocyclic group having 3 to 20 carbon atoms, and the -CH contained in the hydrocarbon group and the heterocyclic group ２ The - may be replaced with -O- or -S-, and the hydrocarbon group and the heterocyclic group may have halogen atoms. X a This represents an oxygen atom or a sulfur atom. * indicates a connection site.

23. The carboxylate salt according to claim 17 or 18, wherein X is a sulfur atom.

24. Ar １ The carboxylate salt according to claim 17 or 18, wherein the group is derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

25. W ２１ The carboxylate salt according to claim 17 or 18, wherein the phenylene group may have substituents.

26. Ar ２１ The carboxylate salt according to claim 17 or 18, wherein the group is derived from a benzene ring.

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