Vibration devices and containers

Abstract

To provide a vibration device and container with high positional accuracy for the vibration element mounted in the container. [Solution] The vibration device 100 comprises a vibration element 1 and a container 3 having a housing portion on which the vibration element 1 is mounted. The container 3 includes a base 11 having a first side 81 and a second side 82 that face each other in a plan view, a first mounted electrode 13 provided on the base 11 and having a first straight portion 21 extending in the direction along the first side 81 on its outer edge, which is electrically connected to the vibration element 1, and a first metal pattern 14 having an outer edge at a position where the first straight portion 21 is extended in the direction along the first side 81, which is spaced apart from the outer edge 60a of the housing portion.

Description

Technical Field

[0001] The present invention relates to a vibration device and a container.

Background Art

[0002] In the manufacturing site of a vibration device, in order to position and mount a piezoelectric vibrating piece in a cavity of a ceramic package, a method of recognizing an image of a sealing metallized layer or a sealing metal ring at the top of the package as a positioning reference is used.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the above method, due to the lamination deviation between ceramic sheets or the deviation of the metal ring during the manufacture of the package, the positional accuracy of the positioning reference cannot be improved. Therefore, positional deviations of the piezoelectric vibrating piece and the like occur, and problems such as poor vibration characteristics occur. Patent Document 1 discloses a vibration device in which a plurality of vibrating pieces having different sizes are individually housed in one type of package. In such a vibration device, when mounting a vibrating piece having a small size among the plurality of vibrating pieces, high positional accuracy is required, so the problem is particularly remarkable.

Means for Solving the Problems

[0005] A vibration device according to an application example of the present invention comprises a vibration element and a container having a housing portion on which the vibration element is mounted, wherein the container includes a base having a first side and a second side facing each other in a plan view, a first mounted electrode provided on the base and having a first straight portion extending in the direction along the first side as its outer edge, and electrically connected to the vibration element, and a first metal pattern having an outer edge at a position where the first straight portion is extended in the direction along the first side, and provided spaced apart from the outer edge of the housing portion.

[0006] An example of application of the present invention is a container for a vibration device having a housing for mounting a vibration element, and is characterized by including a base having a first side in plan view, a first mounting electrode provided on the base and having a first straight portion along the first side as its outer edge, and electrically connected to the vibration element, and a first metal pattern having an outer edge at a position where the first straight portion is extended in the direction along the first side, and provided spaced apart from the outer edge of the housing. [Brief explanation of the drawing]

[0007] [Figure 1] This is a schematic plan view showing the configuration of the vibration device according to the first embodiment. [Figure 2] This is a schematic cross-sectional view of line AA in Figure 1. [Figure 3] This is a schematic plan view showing the configuration of a vibration device according to a modified example of the first embodiment. [Figure 4] This is a magnified view of the area enclosed by the circle B in Figure 3. [Figure 5] This is a schematic plan view showing the configuration of the vibration device according to the second embodiment. [Figure 6] This is a schematic plan view showing the configuration of a vibration device according to a modified example of the second embodiment. [Modes for carrying out the invention]

[0008] A preferred embodiment of the present invention will be described below with reference to the attached drawings. Note that the dimensions and scale of each part in the drawings may differ from the actual dimensions as appropriate, and some parts are shown schematically for ease of understanding. For the sake of explanation, each figure shows three mutually orthogonal axes: the X-axis, Y-axis, and Z-axis. The direction along the X-axis is referred to as the "X-axis direction," the direction along the Y-axis as the "Y-axis direction," and the direction along the Z-axis as the "Z-axis direction." The side of each axis with the arrow is also referred to as the "positive side," and the side opposite the arrow as the "negative side." The plane parallel to the X-axis and Y-axis is also referred to as the "XY plane." The plan view from the +Z-axis direction is simply referred to as the "plan view."

[0009] 1. First Embodiment The first embodiment will be described in detail below with reference to the drawings.

[0010] Figure 1 is a schematic plan view showing the configuration of the vibration device 100 according to the first embodiment. Figure 2 is a schematic cross-sectional view taken along line AA in Figure 1. Note that in Figure 1, the vibration device 100 is shown with the cover 4 removed. The vibration device 100 is a surface-mount component in which the vibration element 1 is packaged. In this embodiment, an oscillator will be described as an example of the vibration device 100. The vibration device 100 has a vibration element 1 and a package 2. The package 2 has a container 3 and a cover 4, and the container 3 is a box-shaped member with a recess 5 formed therein. The internal space S of the package 2 is partitioned by joining the container 3 and the cover 4. The vibration element 1 is housed in the internal space S of the package 2.

[0011] The container 3 comprises a base 11 which is the bottom of the recess 5, a frame-shaped frame portion 12 positioned on the base 11, mounting electrodes 13 on which the vibrating element 1 is mounted, and a metal pattern 14. The mounting electrodes 13 include a first mounting electrode 13a and a second mounting electrode 13b. The metal pattern 14 includes a first metal pattern 14a and a second metal pattern 14b. In plan view, the base 11 is a substantially rectangular shape with a pair of sides aligned along the X-axis and a pair of sides aligned along the Y-axis. Of the pair of sides aligned along the X-axis, the side located on the +Y side is the first side 81, and the side located on the -Y side is the second side 82. The recess 5 of the container 3 opens on the +Z side.

[0012] The base 11 has a first surface 15 and a second surface 16 that are parallel to the XY plane and are in a front-back relationship with each other. The first surface 15 is the +Z side surface, and the second surface 16 is the -Z side surface. The frame portion 12 is arranged to surround the first surface 15. The recess 5 is composed of the first surface 15 and the inner surface of the frame portion 12. In plan view, the shape of the recess 5 is rectangular, having a pair of sides along the X axis and a pair of sides along the Y axis. In plan view, the recess 5 has four corners corresponding to the corners of a rectangle. Of the four corners, the corner located on the -X side and the +Y side is the first corner 17, and the corner located on the -X side and the -Y side is the second corner 18.

[0013] The materials for the base 11 and the frame 12 are not particularly limited, but various ceramics such as alumina can be used as insulating materials.

[0014] The first mounted electrode 13a and the second mounted electrode 13b are positioned side by side in the Y-axis direction at the -X-side end of the first surface 15. The first mounted electrode 13a and the second mounted electrode 13b are spaced apart from each other. The first mounted electrode 13a is positioned on the +Y side, and the second mounted electrode 13b is positioned on the -Y-axis side. The position where the first mounted electrode 13a is positioned is near the first corner 17, and the position where the second mounted electrode 13b is positioned is near the second corner 18.

[0015] The first mounting electrode 13a and the second mounting electrode 13b are each substantially rectangular in plan view, having a pair of sides along the X-axis direction and a pair of sides along the Y-axis direction.

[0016] The first mounting electrode 13a has a first curved portion 19 that is convex and curved at a corner on the side of the first corner portion 17. In the first mounting electrode 13a, of the pair of sides along the X-axis direction, the side in the +Y direction is a first straight portion 21 that is connected to the +X side end of the first curved portion 19. The first straight portion 21 is included in the outer edge of the first mounting electrode 13a. Also, the first straight portion 21 extends in a direction along the first side 81.

[0017] The second mounting electrode 13b has a second curved portion 20 that is convex and curved at a corner on the side of the second corner portion 18. In the second mounting electrode 13b, of the pair of sides along the X-axis direction, the side in the -Y direction is a second straight portion 22 that is connected to the +X side end of the second curved portion 20. The second straight portion 22 is included in the outer edge of the second mounting electrode 13b. Also, the second straight portion 22 extends in a direction along the second side 82.

[0018] The base 11 has a plurality of external terminals 40 on the second surface 16. The plurality of external terminals 40 includes the external terminals 41 and 42. The first mounting electrode 13a is electrically connected to the external terminal 41, and the second mounting electrode 13b is electrically connected to the external terminal 42 or other external terminals.

[0019] The first mounting electrode 13a and the second mounting electrode 13b include tungsten (W) as a base material layer and a nickel (Ni) plating layer as a surface layer. Note that the constituent materials of the first mounting electrode 13a and the second mounting electrode 13b are not particularly limited. For example, the base material layer may be molybdenum (Mo), or the surface layer may be gold (Au). As long as the base material layer and the surface layer are conductive, and as long as the surface layer is a material that enables image recognition.

[0020] The vibration element 1 includes a substrate 51 made of quartz, a pair of excitation electrodes 52 disposed on the substrate 51, and a pair of connection electrodes 55 electrically connected to the excitation electrodes 52. The substrate 51 has a first substrate surface 58 and a second substrate surface 59 that are parallel to the XY plane and have a front-back relationship with each other. The first substrate surface 58 and the second substrate surface 59 are AT-cut surfaces of quartz. The first substrate surface 58 is the +Z-side surface, and the second substrate surface 59 is the -Z-side surface. The pair of excitation electrodes 52 includes a first excitation electrode 53 and a second excitation electrode 54. The first excitation electrode 53 is disposed on the first substrate surface 58, and the second excitation electrode 54 is disposed on the second substrate surface 59.

[0021] The pair of connection electrodes 55 includes a first connection electrode 56 and a second connection electrode 57. The first connection electrode 56 and the second connection electrode 57 are arranged side by side in the Y-axis direction at the -X-side end of the second substrate surface 59. The first connection electrode 56 and the second connection electrode 57 are spaced apart from each other. The first connection electrode 56 is disposed on the +Y side, and the second connection electrode 57 is disposed on the -Y side.

[0022] The connection electrode 55 is connected to the mounting electrode 13 via a conductive bonding member 43. Specifically, the first connection electrode 56 is connected to the first mounting electrode 13a, and the second connection electrode 57 is connected to the second mounting electrode 13b. Thereby, the vibration element 1 is supported by the container 3 at the -X-side end. Such support is sometimes called cantilever support. Since the bonding member 43 disposed between the connection electrode 55 and the mounting electrode 13 has a thickness in the Z-axis direction, the second substrate surface 59 of the vibration element 1 is spaced apart from the first surface 15 of the base 11.

[0023] A voltage is supplied to the vibration element 1 from an external terminal 40. When a voltage is applied to the excitation electrode 52, thickness shear vibration is excited, causing the vibration element 1 to oscillate. The thickness shear vibration is the main vibration.

[0024] The vibrating element 1 also generates unwanted vibrations such as contour vibrations and bending vibrations. Contour vibrations and bending vibrations are secondary vibrations. In order to minimize the influence of these secondary vibrations on the principal vibration, various design items are considered in the design of the vibrating element 1. These items include the external dimensions of the vibrating element 1 in a plan view, that is, the length Xc in the X-axis direction and the length Yc in the Y-axis direction of the vibrating element 1.

[0025] The external shape of container 3 is standardized. Even with containers 3 of the same standard, the external shape of the vibrating element 1 housed within may vary for the reasons mentioned above. In other words, the external size of the vibrating element 1 may differ for the same container 3. In this embodiment, the length Xp in the X-axis direction of container 3 is approximately 1.9 to 2.1 mm, and the length Yp in the Y-axis direction is approximately 1.5 to 1.7 mm. The external shape of container 3 is the so-called 2016 size. The length Xs in the X-axis direction of recess 5 is approximately 1.75 mm, and the length Ys in the Y-axis direction is approximately 1.25 mm. Note that the external shape of container 3 and the dimensions of recess 5 are examples and are not limited to these.

[0026] The first metal pattern 14a is positioned on the first surface 15. The first metal pattern 14a is connected to the +X side end of the first straight section 21 and extends along the X axis. The outer edge of the first metal pattern 14a on the +Y side is a straight line that is continuous with the first straight section 21. The +X side end of the first metal pattern 14a is positioned at a location where the first straight section 21 is extended in the direction along the first side 81. The first metal pattern 14a is also spaced apart from the outer edge 60a of the recess 5. The +X side end of the first metal pattern 14a is a straight side along the Y axis. The -Y side side of the first metal pattern 14a is a straight line along the X axis.

[0027] The second metal pattern 14b is positioned on the first surface 15. The second metal pattern 14b is connected to the +X side end of the second straight section 22 and extends along the X axis. The -Y side outer edge of the second metal pattern 14b is a straight line that is continuous with the second straight section 22. The +X side end of the second metal pattern 14b is positioned at a location where the second straight section 22 is extended in the direction along the second side 82. The second metal pattern 14b is also spaced apart from the outer edge 60b of the recess 5. The +X side end of the second metal pattern 14b is a straight side along the Y axis. The +Y side side of the second metal pattern 14b is a straight line along the X axis.

[0028] The first metal pattern 14a and the second metal pattern 14b include a tungsten (W) base layer and a nickel (Ni) plating layer as a surface layer. The constituent materials of the first metal pattern 14a and the second metal pattern 14b are not particularly limited; for example, the base layer may be molybdenum (Mo), the surface layer may be gold (Au), or the surface layer may be any material capable of image recognition.

[0029] In this embodiment, the constituent materials and metal layer configurations of the first metal pattern 14a and the second metal pattern 14b are the same as those of the mounted electrode 13. This allows the first metal pattern 14a and the second metal pattern 14b to be formed using the same process as the mounted electrode 13. Therefore, a low-cost container 3 and vibration device 100 can be provided.

[0030] By using such a container 3, positioning can be performed by image recognition using the first mounted electrode 13a and the first metal pattern 14a, or the second mounted electrode 13b and the second metal pattern 14b. Therefore, the positional accuracy of the mounted vibrating element 1 relative to the mounted electrode 13 can be improved. As a result, even with a small vibrating element 1, for example, a vibrating element 1 in which the area for bonding between the mounted electrode 13 and the connecting electrode 55 cannot be sufficiently secured, the occurrence of bonding failures can be reduced. This makes it possible to suppress failures such as the vibration device 100 not oscillating or the oscillation frequency jumping at high temperatures. Therefore, a high-quality and highly reliable vibrating device 100 can be provided. The former failure may be called "non-oscillation" or "failure," and the latter failure may be called "F-jump" or "F-skipping." In addition, since vibrating elements 1 of different sizes can be mounted in one type of container 3, the container 3 can be standardized.

[0031] The lid 4 is substantially rectangular in plan view and is plate-shaped parallel to the XY plane. The lid 4 is joined to the opening of the container 3 via a joining member 44, sealing the recess 5. In this way, the recess 5 accommodates the vibrating element 1, and thus the recess 5 corresponds to the housing portion. The lid 4 is made of Kovar as the base material, and the Kovar is plated with nickel (Ni). However, the material of the lid 4 is not limited to this, and may be, for example, Kovar, 42 alloy, stainless steel, glass, ceramic, or silicon.

[0032] Furthermore, in image recognition, the first mounted electrode 13a and the first metal pattern 14a, and the second mounted electrode 13b and the second metal pattern 14b may also be used. This increases the number of mounted electrodes 13 and metal patterns 14 that can be used for image recognition, and thus increases the number and length of edges that can be detected. As a result, the positional accuracy of the mounted vibration element 1 relative to the mounted electrodes 13 can be further improved.

[0033] The distance between the first metal pattern 14a and the second metal pattern 14b in the Y-axis direction is greater than the Y-axis length Yc of the vibrating element 1. In other words, the vibrating element 1 is located between the first metal pattern 14a and the second metal pattern 14b in a plan view. In other words, in a plan view, the vibrating element 1 does not overlap with the first metal pattern 14a and the second metal pattern 14b.

[0034] In this way, even if the cantilevered vibrating element 1 tilts from the XY plane and comes into contact with the first surface 15, it is possible to prevent the vibrating element 1 from coming into contact with the first metal pattern 14a and the second metal pattern 14b. Therefore, it is possible to suppress the deterioration of characteristics such as an increase in the crystal impedance of the vibrating device 100 and a change in the temperature characteristics of the vibrating device 100 when the ambient temperature changes, which occur when the vibrating element 1 is electrically connected to the first metal pattern 14a or the second metal pattern 14b. Note that crystal impedance is the equivalent series resistance when there is no load capacitance.

[0035] Preferably, the length L1 in the direction along the first side 81, from the end of the first straight portion 21 opposite to the first metal pattern 14a to the end of the first metal pattern 14a opposite to the first straight portion 21, is 0.4 mm or more. By doing so, the edge detected by image recognition becomes longer, which improves the positional accuracy of the mounted vibration element 1 relative to the mounted electrode 13.

[0036] Furthermore, it is preferable that the length L2 in the direction along the second side 82, from the end of the second straight portion 22 opposite to the second metal pattern 14b to the end of the second metal pattern 14b opposite to the second straight portion 22, be 0.4 mm or more. By making both lengths L1 and L2 0.4 mm or more in this way, the positional accuracy can be further improved.

[0037] When CL is defined as the virtual center line of the recess 5 in the X-axis direction, it is preferable that the +X-side end of the first metal pattern 14a and the +X-side end of the second metal pattern 14b are located -X-side from the center line CL. In this way, even if the cantilevered vibrating element 1 contacts the first surface 15 at an angle from the XY plane in this embodiment, it is possible to prevent the vibrating element 1 from contacting the first metal pattern 14a and the second metal pattern 14b connected to the mounted electrode 13. Therefore, it is possible to suppress deterioration of characteristics such as an increase in the crystal impedance of the vibrating device 100 and a change in the temperature characteristics of the vibrating device 100 when the ambient temperature changes.

[0038] As described above, the first metal pattern 14a extends continuously from the first linear portion 21 of the first mounted electrode 13a. Similarly, the second metal pattern 14b extends continuously from the second linear portion 22 of the second mounted electrode 13b. This arrangement increases the length of the edge detected by image recognition in the direction along the first side 81. Therefore, the positional accuracy of the mounted vibration element 1 relative to the mounted electrode 13 can be further improved.

[0039] Furthermore, the +X-side ends of the first metal pattern 14a and the +X-side ends of the second metal pattern 14b are not particularly limited to being straight edges, but may be curved edges or composed of multiple straight lines.

[0040] Furthermore, the -Y side of the first metal pattern 14a and the +Y side of the second metal pattern 14b are not particularly limited to being straight lines, but may be curved or composed of multiple straight lines.

[0041] Furthermore, the first mounted electrode 13a is not particularly limited to having a first curved portion 19. For example, in the first mounted electrode 13a, the first straight portion 21 may be connected to the -X end of the first mounted electrode 13a. By doing so, the first straight portion 21 can be made longer, and the length of the edge detected by image recognition in the direction along the first side 81 can be further increased. Thus, the positional accuracy of the mounted vibration element 1 relative to the mounted electrode 13 can be further improved.

[0042] Furthermore, the second mounted electrode 13b is not particularly limited to having a second curved portion 20. For example, in the second mounted electrode 13b, the second straight portion 22 may be connected to the -X end of the second mounted electrode 13b. By doing so, the second straight portion 22 can be made longer, and the length of the edge detected by image recognition in the direction along the second side 82 can be further increased. Thus, the positional accuracy of the mounted vibration element 1 relative to the mounted electrode 13 can be further improved.

[0043] Furthermore, instead of quartz, the substrate 51 can be, for example, lithium niobate (LiNbO3), lithium tantalate (LiTaO3), lead zirconate titanate (PZT), lithium tetraborate (Li2B4O7), or langasite (La3Ga5SiO2). 14 ), potassium niobate (KNbO3), gallium phosphate (GaPO4), gallium arsenide (GaAs), aluminum nitride (AlN), zinc oxide (ZnO, Zn2O3), barium titanate (BaTiO3), lead titanate (PbPO3), sodium potassium niobate ((K,Na)NbO3), bismuth ferrite (BiFeO3), sodium niobate (NaNbO3), bismuth titanate (Bi4Ti3O 12 ), bismuth sodium titanate (Na 0.5 Bi 0.5 Various piezoelectric substrates such as TiO3 may be used, or substrates other than piezoelectric substrates, such as silicon substrates, may be used.

[0044] Furthermore, the first substrate surface 58 and the second substrate surface 59 are not particularly limited to being AT-cut surfaces. For example, they may be SC-cut, BT-cut, CT-cut, DT-cut, or NT-cut surfaces.

[0045] Furthermore, the container 3 is not particularly limited to having a frame portion 12, and may, for example, consist only of a base 11. In this case, the lid 4 is a box-shaped body with a recess formed therein, and is joined to the base 11 to form the package 2.

[0046] Furthermore, the thickness of the metal pattern 14 may be less than the thickness of the mounted electrode 13. This reduces the amount of metal material used to make up the metal pattern 14, making it possible to provide a low-cost container 3 and vibration device 100. In addition, the distance in the Z-axis direction from the metal pattern 14 to the vibration element 1 can be increased, further reducing contact between the metal pattern 14 and the vibration element 1.

[0047] Furthermore, the metal material of the surface layer of the metal pattern 14 may be different from the metal material of the surface layer of the mounted electrode 13. For example, the metal material of the surface layer of the mounted electrode 13 may be nickel (Ni), and the metal material of the surface layer of the metal pattern 14 may be gold (Au). In this way, materials may be selected to improve the edge detection accuracy in image recognition.

[0048] Alternatively, the metal pattern 14 may consist only of a base layer. This reduces the amount of metal material used to make up the metal pattern 14. Alternatively, the process of forming the metal pattern 14 can be partially omitted. Thus, a low-cost container 3 and vibration device 100 can be provided.

[0049] The size of the vibrating element 1 is not particularly limited, but a preferred example is a size with a length Xc of approximately 0.7 mm and a length Yc of approximately 0.5 mm. Another preferred example is a size with a length Xc of approximately 1.58 mm and a length Yc of approximately 1.18 mm.

[0050] Thus, the package 2 using the container 3 according to this embodiment can accommodate multiple types of vibration elements 1 of different sizes in a plan view. Therefore, the package 2 and the container 3 can be standardized.

[0051] In this embodiment, the vibration device 100 has been described as an oscillator, but it is not limited thereto. For example, it may be an oscillator further equipped with an oscillation circuit within the package 2.

[0052] 2. Modified form of the first embodiment A modified version of the first embodiment will be described using Figures 3 and 4. Figure 3 is a schematic plan view showing the configuration of the vibration device 101 according to the modified version of the first embodiment. Figure 4 is an enlarged view of the part enclosed by the circle B in Figure 3. In Figures 3 and 4, the same reference numerals are used for components that are the same as those in the previously described embodiment. The differences from the first embodiment will be explained in detail, and similar items will not be explained. The difference between this modified version and the first embodiment is that the metal pattern 23 has a constricted portion 61; otherwise, they are the same.

[0053] The vibration device 101 includes a vibration element 1, a container 31, and a lid 4 (see Figure 2). The container 31 includes a base 11, a frame portion 12, a mounted electrode 13, and a metal pattern 23. The metal pattern 23 includes a first metal pattern 23a and a second metal pattern 23b. In a plan view, the metal pattern 23 has a constricted portion 61 in a part of the direction along the first side 81, where the width 63 in the direction perpendicular to the first side 81 is smaller. In a plan view, the constricted portion 61 has a recess 62 that opens towards the vibration element 1 side, i.e., towards the second metal pattern 23b side in the case of the first metal pattern 23a, and towards the first metal pattern 23a side in the case of the second metal pattern 23b.

[0054] The bottom 64 of the recess 62 is linear along the X-axis. The two side portions 65 connected to both ends of the bottom 64 of the recess 62 are linear along the Y-axis.

[0055] The length of the bottom 64 of the recess 62 along the X-axis is not particularly limited and may be preferably set.

[0056] The position of the recess 62 within the metal pattern 23 is not particularly limited and may be set to suit your preference.

[0057] The size of the width 63a in the Y-axis direction from the bottom 64 of the recess 62 to the outer edge on the +Y side of the first metal pattern 23a is not particularly limited. It is sufficient that the outer edge on the +Y side of the first metal pattern 23a is continuously connected.

[0058] The recess 62 in the second metal pattern 23b is the same as in the first metal pattern 23a. The width in the Y-axis direction from the bottom 64 of the recess 62 to the outer edge on the -Y side of the second metal pattern 23b is not particularly limited. It is sufficient that the outer edge on the -Y side of the second metal pattern 23b is continuously connected.

[0059] The first metal pattern 23a and the second metal pattern 23b may each have a plurality of constricted portions 61.

[0060] In this way, during image recognition, a part of the recess 62, for example, the side portion 65, can be detected as an edge. That is, the number of detectable edges can be increased in a direction inclined from or perpendicular to the direction along the first side 81. This further improves the positional accuracy of the mounted vibrating element 1 relative to the mounted electrode 13. Also, since there is no need to increase the width 63 of the first metal pattern 23a and the second metal pattern 23b, even if the vibrating element 1 is inclined from the XY plane and comes into contact with the first surface 15, it is possible to prevent the vibrating element 1 from coming into contact with the first metal pattern 23a and the second metal pattern 23b.

[0061] Furthermore, the straight lines forming the bottom 64 and side 65 of the recess 62 are not particularly limited to being aligned with the X and Y axes, and may be inclined with respect to the X and Y axes.

[0062] Furthermore, the recess 62 is not particularly limited to being composed solely of straight lines. For example, the recess 62 may be composed of curves, or of a combination of curves and straight lines.

[0063] 3. Second Embodiment The second embodiment will be described with reference to Figure 5. Figure 5 is a schematic plan view showing the configuration of the vibration device 102 according to the second embodiment. In Figure 5, components similar to those in the previously described embodiment are denoted by the same reference numerals. The explanation will focus on the differences from the first embodiment, and similar matters will be omitted from the explanation. The difference between this embodiment and the first embodiment is that the metal pattern 24 is spaced apart from the mounted electrode 13; otherwise, they are the same.

[0064] The vibration device 102 includes a vibration element 1, a container 32, and a lid 4 (see Figure 2). The container 32 includes a base 11, a frame 12, a mounted electrode 13, and a metal pattern 24. The metal pattern 24 includes a first metal pattern 24a and a second metal pattern 24b. The first metal pattern 24a is positioned spaced apart from the first mounted electrode 13a in the +X direction and extends in the X-axis direction. The second metal pattern 24b is positioned spaced apart from the second mounted electrode 13b in the +X direction and extends in the X-axis direction.

[0065] A base 11 is interposed between the first metal pattern 24a and the first mounted electrode 13a. A base 11 is also interposed between the second metal pattern 24b and the second mounted electrode 13b. Therefore, the first metal pattern 24a and the second metal pattern 24b are electrically insulated from the mounted electrode 13.

[0066] In this way, even if the cantilevered vibrating element 1 tilts from the XY plane and comes into contact with the first metal pattern 24a or the second metal pattern 24b, deterioration of the characteristics of the vibrating device 102 can be suppressed. This is because the first metal pattern 24a and the second metal pattern 24b are insulated from the first mounted electrode 13a and the second mounted electrode 13b. As a result, deterioration of characteristics such as an increase in the crystal impedance of the vibrating device 102 and a change in the temperature characteristics of the vibrating device 102 when the ambient temperature changes can be suppressed.

[0067] 4. Modified form of the second embodiment A modified example of the second embodiment will be described with reference to Figure 6. Figure 6 is a schematic plan view showing the configuration of the vibration device 103 according to the modified example of the second embodiment. In Figure 6, components similar to those in the previously described embodiment are denoted by the same reference numerals. The explanation will focus on the differences from the second embodiment, and similar items will be omitted from the explanation. The difference between this modified example and the second embodiment is the position of the ends 72 and 73 on the +X side of the metal pattern 25; otherwise, they are the same.

[0068] The vibration device 103 includes a vibration element 1, a container 33, and a lid 4 (see Figure 2). The container 33 includes a base 11, a frame 12, a mounted electrode 13, and a metal pattern 25. The metal pattern 25 includes a first metal pattern 25a and a second metal pattern 25b. The container 33 is a box-shaped member with a recess 5 formed therein.

[0069] When CL is defined as the virtual center line of the recess 5 in the X-axis direction, the positions of the end 72 on the +X side of the first metal pattern 25a and the end 73 on the +X side of the second metal pattern 25b are located +X side of the center line CL and are spaced apart from the outer edge 71 of the recess 5.

[0070] In this way, even if the cantilevered vibrating element 1 tilts from the XY plane and comes into contact with the first metal pattern 25a or the second metal pattern 25b, the deterioration of the characteristics of the vibrating device 103 is suppressed, while further improving the positional accuracy of the mounted vibrating element 1 relative to the mounted electrode 13. The reason why the deterioration of the characteristics of the vibrating device 103 can be suppressed is that the first metal pattern 25a and the second metal pattern 25b are insulated from the first mounted electrode 13a and the second mounted electrode 13b. Furthermore, the reason why the positional accuracy can be further improved is that the length of the edge detected by image recognition in the direction along the first side 81 can be increased.

[0071] The embodiments of the vibration devices 100-103 and containers 3,31-33 have been described above with reference to the figures. However, these embodiments are not limited to these, and the configuration of each part can be replaced with any configuration having a similar function. In addition, other arbitrary components may be added to these embodiments. Furthermore, each embodiment may be combined as appropriate. [Explanation of Symbols]

[0072] 1…Vibration element, 2…Package, 3…Container, 4…Lid, 5…Recess, 11…Base, 12…Frame, 13…Mounted electrode, 13a…First mounted electrode, 13b…Second mounted electrode, 14…Metal pattern, 14a…First metal pattern, 14b…Second metal pattern, 15…First surface, 16…Second surface, 17…First corner, 18…Second corner, 19…First curved section, 20…Second curved section, 21…First straight section, 22…Second straight section, 23…Metal pattern, 23a…First metal pattern, 23b…Second metal pattern, 24…Metal pattern, 24a…First metal pattern, 24b…Second metal pattern, 25…Metal pattern, 25a…First metal pattern Turn, 25b...Second metal pattern, 31-33...Container, 40-42...External terminal, 43...Jointing member, 44...Jointing member, 51...Substrate, 52...Excitation electrode, 53...First excitation electrode, 54...Second excitation electrode, 55...Connecting electrode, 56...First connecting electrode, 57...Second connecting electrode, 58...First substrate surface, 59...Second substrate surface, 60a...Outer edge, 60b...Outer edge, 61...Neckline, 62...Recess, 63...Width, 63a...Width, 64...Bottom, 65...Side, 71...Outer edge, 72,73...End, 81...First side, 82...Second side, 100-103...Vibration device, CL...Centerline, L1...Length, L2...Length, Xc,Xp,Xs...Length, Yc,Yp,Ys...Length

Claims

1. A vibrating element and A container having a housing portion on which the vibration element is mounted, The aforementioned container is A base having a first side and a second side that are opposite each other in a plan view, A first mounted electrode is provided on the base, has a first straight portion extending in the direction along the first side at its outer edge, and is electrically connected to the vibrating element, A first metal pattern having an outer edge at a position where the first straight portion is extended in the direction along the first side, and provided spaced apart from the outer edge of the housing portion, A vibration device characterized by including

2. The aforementioned container is A second mounted electrode is provided on the base, has a second straight portion extending in the direction along the second side at its outer edge, and is electrically connected to the vibrating element, The vibration device according to claim 1, comprising: a second metal pattern having an outer edge at a position extended in the direction along the second side of the second linear portion, and provided spaced apart from the outer edge of the housing portion.

3. The vibration device according to claim 2, wherein the vibration element is located between the first metal pattern and the second metal pattern in a plan view.

4. The vibration device according to claim 2, wherein the first metal pattern extends continuously from the first linear portion of the first mounted electrode, and the second metal pattern extends continuously from the second linear portion of the second mounted electrode.

5. The vibration device according to claim 4, wherein the first metal pattern and the second metal pattern have a constricted portion with a narrow width in a direction perpendicular to the first edge in a plan view.

6. The vibration device according to claim 2, wherein the first metal pattern extends spaced apart from the first mounted electrode, and the second metal pattern extends spaced apart from the second mounted electrode.

7. The vibration device according to claim 1 or 2, wherein the length in the direction along the first side from the end of the first straight portion opposite to the first metal pattern to the end of the first metal pattern opposite to the first straight portion is 0.4 mm or more.

8. The length in the direction along the first side from the end of the first straight portion opposite to the first metal pattern to the end of the first metal pattern opposite to the first straight portion is 0.4 mm or more. The vibration device according to claim 2, wherein the length in the direction along the second side from the end of the second straight portion opposite to the second metal pattern to the end of the second metal pattern opposite to the second straight portion is 0.4 mm or more.

9. A container for a vibration device having a housing for mounting a vibration element, A base having the first side in plan view, A first mounted electrode is provided on the base, has a first straight portion along the first side on its outer edge, and is electrically connected to the vibrating element, A first metal pattern having an outer edge at a position where the first straight portion is extended in the direction along the first side, and provided spaced apart from the outer edge of the housing portion, A container characterized by containing [something].

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