Jacket heaters and insulated jackets

Abstract

To provide a jacket heater with high heat resistance of over 300℃ and extremely low dust generation. [Solution] A jacket heater 1 capable of covering the surface of an object to be heated and heating the object to a high temperature of 300°C or higher, comprising an outer fabric 10, an insulating material 20, a heater fabric 30, and an inner fabric 40 that are laminated in the order from the outside to the inside, with a heater wire 60 arranged between the insulating material 20 and the heater fabric 30 in a predetermined pattern, each of the outer fabric 10, insulating material 20, heater fabric 30, and inner fabric 40 having an outer shape suitable for covering the surface of an object to be heated, each of the outer fabric 10 and inner fabric 40 being a woven fabric composed of filament yarn made by twisting together a plurality of long fibers made from polyimide resin as the raw material, and the sewing parts of each of the outer fabric 10 and inner fabric 40 are also sewn together with the filament yarn.

Description

Technical Field

[0001] The present invention relates to industrial and industrial jacket heaters, for example, jacket heaters for heating pipes constituting semiconductor manufacturing equipment, chemical processing equipment, and other manufacturing equipment to a high temperature, and insulating jackets obtained by omitting the heater function from this jacket heater.

Background Art

[0002] In the fields of industry and manufacturing, in the manufacturing process of products, gases and liquids with various compositions according to the purpose are used. These gases and liquids are supplied to or discharged from the manufacturing equipment through pipes. Depending on the composition of the gas and liquid, they may solidify within the normal temperature range and accumulate in the pipe. For this reason, conventionally, the surface of the pipes constituting the manufacturing equipment has been heated to a high temperature using a pipe heater.

[0003] FIG. 4 of Japanese Patent Application Laid-Open No. 2017-076781 discloses a heating unit for heating a gas pipe of a semiconductor manufacturing apparatus. This heating unit constitutes an enclosure for covering the surface of the gas pipe. The enclosure includes an outer layer portion, a heat insulating portion, a heat insulating member, a thin metal plate, an inner layer portion, and an insulating member laminated in order from the outside to the inside (gas pipe side). A fibrous heating element like a thread is disposed between the heat insulating portion and the heat insulating member. The heating element is stitched to the heat insulating member. The outer layer portion and the inner layer portion are composed of a laminate film of polytetrafluoroethylene (PTFE), which is a fluororesin. The heat insulating portion is composed of an inorganic fiber mat formed by integrating glass fibers, ceramic fibers, silica fibers, etc. and subjecting them to needle processing. The heat insulating member is composed of a glass fiber fabric. The insulating member is composed of an alumina fiber fabric having a higher heat storage degree than the glass fiber fabric. The heating unit having such a configuration is wound around the surface of the gas pipe and fixed by a fastener. A temperature detection unit and a thermostat are interposed between the insulating member of the heating unit and the surface of the gas pipe, and the energization to the heating element is controlled.

[0004] Utility Model Registration No. 3179959 discloses a pipe heater for heating three-dimensionally curved pipes. This pipe heater consists of a protective cover, a heating element, and hook-and-loop fasteners. The protective cover is constructed by sewing together a rectangular outer fabric and an inner fabric. Both the outer and inner fabrics are made of glass fiber coated with Teflon®. A heating element is positioned in the center of the inner and outer fabrics, along the longitudinal direction of the protective cover. The heating element is a rod-shaped heater made by winding a nichrome wire around a flexible rod. The protective cover has a width that allows it to be wrapped around the pipe with some extra room. Hook-and-loop fasteners extending in the longitudinal direction of the protective cover are fixed to the inner surfaces of the excess edges on both sides of the protective cover.

[0005] Utility Model Registration No. 3159995 discloses a pipe insulation device for insulating or heating the flange portions of two pipes. This pipe insulation device consists of an insulating body, a protective member, a first fastener member, a second fastener member, and a heating heater. The insulating body has a structure in which a roughly C-shaped insulating material is covered with a cover. The insulating material consists of glass fibers, heat-resistant resin fibers, and fibers filled with aerogel. The cover consists of a sheet-like material of glass fibers. The protective member is a belt that covers the joint of the two ends of the roughly C-shaped insulating body from the outside. One end of the protective member is sewn to the cover of the insulating body. The other end of the protective member is a free end. The first fastener member is provided on the surface of the cover of the insulating body. The second fastener member is provided on the back surface of the free end of the protective member. By fastening the second fastener to the first fastener, the joint between the two ends of the roughly C-shaped insulation body is fixed in a joined state by the protective member and covered from the outside. The heating element is made of a coiled nichrome wire. The heating element is arranged along a plurality of grooves provided on the inner surface of the insulation material. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2017-076781 [Patent Document 2] Utility Model Registration No. 3179959 (Publication of Utility Model Registration No. 317995 [Patent Document 3] Utility Model Registration No. 3159995 [Overview of the project] [Problems that the invention aims to solve]

[0007] <Questions related to heating temperature> For example, in the substrate processing process of semiconductor manufacturing equipment, a film is formed on a wafer, which will serve as the substrate for the semiconductor, by alternately supplying a raw material gas and a reaction gas to the wafer. The gases used in the substrate processing process are discharged from the semiconductor manufacturing equipment through exhaust piping. The conventional piping heaters mentioned above prevented gas products from accumulating inside the exhaust piping by heating the exhaust piping to 180°C to 200°C.

[0008] However, the gases used for wafer film deposition are constantly being improved, and their compositions are becoming more specialized than conventional ones. As a result, at the time of filing this application, it became difficult to prevent the deposition of the product in the exhaust pipes unless the exhaust pipes were heated to a high temperature of 250°C or higher when using gases with special compositions for wafer film deposition.

[0009] <Problems related to heat resistance temperature> Conventional pipe heaters have an outer and inner casing made of a heat-resistant synthetic resin laminate film or coating. Specifically, the outer and inner layers of Japanese Patent Publication No. 2017-076751 are made of a polytetrafluoroethylene (PTFE) laminate film, which is a fluororesin. In addition, the outer and inner fabrics of Japanese Utility Model Registration No. 3179959 are made of glass fiber coated with Teflon®. All of the heat-resistant materials disclosed in these publications are fluororesins. Fluororesin laminate films and fluororesin coatings cannot withstand temperatures above 250°C.

[0010] <Problems related to dust generation> Fluoropolymers are thermoplastic resins. Therefore, when heated to temperatures above 250°C, fluoropolymer laminate films and coatings undergo a change of state from solid to liquid and are lost. The loss of these coatings exposes the glass fibers. Because glass fibers are inorganic, they are brittle, and the filaments or glass wool that make up the fibers break, generating fiber debris. Dust generation is unacceptable in cleanrooms where semiconductor manufacturing equipment is installed.

[0011] Furthermore, the cover described in Utility Model Registration No. 3159995 is made of a sheet-like material of glass fibers. Although the sheet-like material of glass fibers can withstand high temperatures of 250°C or higher, the brittle glass fibers generate fiber debris, making it unsuitable for use in cleanrooms where semiconductor manufacturing equipment is installed.

[0012] <Purpose of the Invention> This invention has been made in view of the above-mentioned problems, and aims to provide a jacket heater and an insulating jacket that have high heat resistance of 300°C or higher and extremely low dust generation. [Means for solving the problem]

[0013] (1) In order to achieve the above objective, the present invention provides a jacket heater capable of covering the surface of an object to be heated and heating the object to a high temperature of 300°C or higher, comprising an outer fabric, an insulating material, a heater fabric and an inner fabric that are laminated in the order from the outside to the inside, with heater wires arranged between the insulating material and the heater fabric in a predetermined pattern, each of the outer fabric, the insulating material, the heater fabric and the inner fabric having an outer shape suitable for covering the surface of the object to be heated, each of the outer fabric and the inner fabric being a woven fabric composed of filament yarn made by twisting together a plurality of long fibers made from polyimide resin, and the sewing locations of each of the outer fabric and the inner fabric are also sewn together with the filament yarn.

[0014] (2) Preferably, in the jacket heater of (1) above, the heater wire is sewn to the heater fabric in a predetermined pattern.

[0015] (3) Preferably, in the jacket heater according to (1) above, each of the outer fabric, the insulating material, the heater fabric, and the inner fabric has at least one opening for passing a portion that protrudes from the surface of the object to be heated, and at least one split line is formed from each of the ends of the outer fabric, the insulating material, the heater fabric, and the inner fabric to the opening, and the opening and the split line formed in each of the outer fabric, the insulating material, the heater fabric, and the inner fabric overlap in the thickness direction of the jacket heater and is provided with at least one first cover that covers the split line from the outside, the first cover is a woven fabric made of filament yarn, and the sewing of the first cover is also sewn with filament yarn.

[0016] (4) Preferably, the jacket heater according to (3) above is provided with at least one second cover that covers the joint between one end and the other end of the jacket heater from the outside, wherein the second cover is a woven fabric made of filament yarn, and the seams of the second cover are also sewn with filament yarn.

[0017] (5) Preferably, the jacket heater according to (4) above comprises the jacket heater covering the surface of the object to be heated, the first cover covering the cut line from the outside, and at least one fixing belt wrapped around the outside of the second cover covering the joint between one end and the other end of the jacket heater from the outside, wherein the fixing belt is a woven fabric made of filament yarn, and the sewing portion of the fixing belt is also sewn with filament yarn.

[0018] (6) Preferably, the jacket heater according to (1) above is provided with a temperature sensor disposed between the heat insulating material and the heater fabric.

[0019] (7) Preferably, in any of the jacket heaters of (1) to (6) above, the object to be heated is a cylindrical pipe, the outer shapes of the outer fabric, the heat insulating material, the heater fabric, and the inner fabric are substantially square, and the object to be heated is heated to 250 ° C or higher by covering the surface of the object to be heated.

[0020] (8) In order to achieve the above object, the heat-insulating jacket of the present invention is a heat-insulating jacket capable of covering and heat-insulating the surface of the heat-insulating object, and includes an outer fabric, a heat-insulating material, and an inner fabric laminated in order from the outside to the inside. Each of the outer fabric, the heat insulating material, and the inner fabric has an outer shape suitable for covering the surface of the heat insulating object. Each of the outer fabric and the inner fabric is a woven fabric composed of filament yarns obtained by twisting a plurality of long fibers made of polyimide resin. The sewing portions of each of the outer fabric and the inner fabric are also sewn with the filament yarns.

Effect of the Invention

[0021] The jacket heater of the present invention has each of the outer fabric and the inner fabric as a woven fabric composed of filament yarns obtained by twisting a plurality of long fibers made of polyimide resin. Polyimide resin is a thermosetting resin and has extremely high heat resistance exceeding 300 ° C. Furthermore, filament yarns obtained by twisting a plurality of long fibers made of polyimide resin do not generate fiber dust as long as they are not damaged, and have extremely low dust generation properties.

[0022] By omitting the heater fabric and the heater wire from the jacket heater of the present invention, it is possible to constitute a heat-insulating jacket for heat-insulating an object. The heat-insulating jacket of the present invention also has extremely high heat resistance exceeding 300 ° C, does not generate fiber dust as long as it is not damaged, and has extremely low dust generation properties.

Brief Description of the Drawings

[0023] [Figure 1] Figure 1(a) is a front view showing a jacket heater according to an embodiment of the present invention. Figure 1(b) is a bottom view showing the above jacket heater. [Figure 2] Figure 2 is a perspective view showing the main part of the above jacket heater. [Figure 3] Figure 3 is a cross-sectional view showing the main part of the above jacket heater. [Figure 4] Figure 4 is a wiring diagram showing the heater wire and temperature sensor constituting the above jacket heater. [Figure 5] Figure 5 is a developed view showing the outer fabric constituting the above jacket heater. [Figure 6] Figure 6 is a developed view showing the heat insulating material constituting the above jacket heater. [Figure 7] Figure 7 is a developed view showing the heater fabric and heater wire constituting the above jacket heater. [Figure 8] Figure 8 is a developed view showing the inner fabric constituting the above jacket heater.

Embodiments for Carrying Out the Invention

[0024] Hereinafter, the jacket heater according to the embodiment of the present invention will be described with reference to the drawings. Here, the jacket heater of the present invention is produced on an order basis according to the outer shape and dimensions of the object to be heated, and is designed to have an outer shape and dimensions that can cover the surface of the object to be heated without excess or deficiency. In the present embodiment, a jacket heater designed to have an outer shape and dimensions that can cover the surface of a cylindrical pipe is exemplified.

[0025] 1. Overall Configuration of Jacket Heater First, the overall configuration of the jacket heater of this embodiment will be described. Figures 1(a) and 1(b) show the overall appearance of the jacket heater 1 of this embodiment. Figure 2 shows the cylindrical enclosure 1A, which is the main part of the jacket heater 1. Figure 3 shows the layered structure of the components of the enclosure 1A. Figure 4 schematically shows the wiring of the heater wire 60 and temperature sensor 70 built into the enclosure 1A.

[0026] As shown in Figures 1(a) and (b), the jacket heater 1 consists of a cylindrical enclosure 1A, four first covers 51, one second cover 52, and four fixing belts 53. The braided tube 80 shown in Figure 1(a) bundles two power leads 61 and two signal leads 71 ​​that are drawn out from inside to outside the enclosure 1A. Inside the enclosure 1A are the heater wire 60 and temperature sensor 70 shown in Figure 3. As shown in Figure 4, one end of each of the two power leads 61 is electrically connected to the heater wire 60. One end of each of the two signal leads 71 ​​is electrically connected to the temperature sensor 70. On the other hand, a round power terminal 62 is connected to the other end of each of the two power leads 61. A Y-shaped signal terminal 72 is connected to the other end of each of the two signal leads 71. The heater wire 60 and temperature sensor 70 will be described in detail later.

[0027] As shown in Figures 2 and 3, the enclosure 1A is constructed by layering the outer fabric 10, insulation material 20, heater fabric 30, and inner fabric 40 in the order from the outside to the inside. The heater wire 60 and temperature sensor 70 mentioned above are placed between the insulation material 20 and the heater fabric 30.

[0028] As shown in Figure 2, the outer fabric 10, insulation material 20, heater fabric 30, and inner fabric 40 each have openings 12, 22, 32, and 42, and cleavage lines 11, 21a, 31a, and 41. The openings 12, 22, 32, and 42 are for passing support fittings that are attached to the surface of the pipe, which is the object to be heated. On the other hand, the cleavage lines 11, 21a, 31a, and 41 are continuous with the openings 12, 22, 32, and 42 from their respective ends. The cleavage lines 11, 21a, 31a, and 41 are for guiding the support fittings for the pipe mentioned above to the openings 12, 22, 32, and 42. The openings 12, 22, 32, and 42 overlap in the thickness direction of the enclosing body 1A. Similarly, the cleavage lines 11, 21a, 31a, and 41 also overlap in the thickness direction of the enclosing body 1A. These openings 12, 22, 32, 42 and cleavage lines 11, 21a, 31a, 41 are formed at four locations on each of the outer fabric 10, insulation material 20, heater fabric 30, and inner fabric 40, and in symmetrical positions.

[0029] As shown in Figures 1(a) and (b), the four first covers 51 are for covering the four cleats 11, 21a, 31a, and 41 formed on the enclosure 1A from the outside. The one second cover 52 is for covering the joint between one end and the other end of the enclosure 1A from the outside. The four fixing belts 53 are wrapped around the outside of the enclosure 1A, the first covers 51 and / or the second covers 52 when the enclosure 1A is covered on the surface of the piping described above, and are secured by snap buttons 53a.

[0030] Here, the outer fabric 10, inner fabric 40, first cover 51, second cover 52, and fixing belt 53 described above are all woven fabrics composed of filament yarn made by twisting together multiple long fibers made from polyimide resin. Furthermore, the sewing locations applied to the components of the jacket heater 1, including these, are also sewn together with the aforementioned filament yarn. This characteristic filament yarn will be explained in detail in the following section, "2. Outer Fabric".

[0031] 2. Outer fabric Figure 5 shows the outer fabric 10 in its unfolded state. The outer fabric 10 has a roughly rectangular shape. The outer shape and area of ​​the outer fabric 10 are slightly larger than the surface shape and surface area of ​​the cylindrical pipe that is to be heated. The aforementioned cleavage lines 11 and openings 12 are formed at four locations on the outer fabric 10. A wiring outlet 13 is formed approximately in the center of the outer fabric 10. The power lead 61, signal lead 71, and braided tube 80 shown in Figure 1(a) are led out from this wiring outlet 13 to the outside of the outer fabric 10. The four outer edges of the outer fabric 10, the cleavage lines 11, and the openings 12 are all finished by folding back and sewing the edges of the outer fabric 10.

[0032] As described above, the outer fabric 10 is a woven fabric composed of filament yarn made by twisting together multiple long fibers made from polyimide resin. Polyimide resin has extremely high heat resistance and excellent mechanical properties, electrical insulation, and chemical resistance. However, polyimide resin cannot be processed into either a laminate film or a coating, unlike the fluororesin used for the exterior and interior of conventional pipe heaters. In other words, polyimide resin films have low flexibility and tear strength and cannot withstand the pressure applied during lamination. Furthermore, because polyimide resin is a thermosetting resin, it cannot be heated and melted to coat glass fibers.

[0033] Therefore, the inventors have discovered that polyimide resin can be made into long fibers (filaments), that multiple long fibers made of polyimide resin can be twisted together to form a filament yarn, and that this filament yarn can be woven to form a fabric. Hereinafter, long fibers made from polyimide resin will be referred to as "polyimide filaments," and filament yarn formed by twisting together multiple polyimide filaments will be referred to as "polyimide filament yarn."

[0034] Polyimide filaments are formed by continuously extruding polyimide resin, the raw material, from an extrusion nozzle. The extrusion nozzle has multiple nozzle holes that penetrate a metal plate, similar to a showerhead. Multiple polyimide filaments are extruded simultaneously from multiple nozzle holes. By twisting multiple polyimide filaments together, a single polyimide filament yarn is produced. For example, a single polyimide filament yarn is composed of hundreds to thousands of polyimide filaments.

[0035] In the Japanese textile industry, long fibers are called filaments, and short fibers are called staples. As a general guideline, the Japanese textile industry classifies fibers of approximately 1000m or more as filaments and fibers of approximately 1m or less as staples, but there is no clear definition of the length of filaments. Since polyimide filaments, which make up polyimide filament yarn, are synthetic fibers, theoretically their length is infinite as long as the supply of raw materials continues and they are not cut along the way.

[0036] While spun yarn made by twisting together multiple short fibers generates fiber debris due to the shedding of short fibers, the polyimide filament yarn that constitutes the outer fabric 10 consists only of long fibers, so no fiber debris is generated unless it is damaged. Furthermore, polyimide filament yarn has extremely high strength and is resistant to damage. Therefore, theoretically, the outer fabric 10 does not generate fiber debris.

[0037] As described above, the four outer edges of the outer fabric 10, the split lines 11, and the opening 12 are all finished by folding back the edges of the outer fabric 10 and sewing them together. Polyimide filament thread is also used for sewing these edges.

[0038] 3. Insulation Figure 6 shows the insulation material 20 in its unfolded state. The outer shape of the insulation material 20 is a roughly rectangular shape with an area approximately the same as that of the outer fabric 10. The aforementioned cleavage lines 21a and openings 22 are formed at four locations on the insulation material 20. A wiring outlet 23 is formed approximately in the center of the insulation material 20. The power lead 61, signal lead 71, and braided tube 80 shown in Figure 1(a) are pulled out from this wiring outlet 23 to the outside of the insulation material 20. In Figure 6, straight fold lines 21b extending horizontally are formed at the 1 / 4, 2 / 4, and 3 / 4 positions of the insulation material 20 in the vertical direction. Each 1 / 4 portion of the insulation material 20 is bent inward in a 1 / 4 arc shape with each fold line 21b as the boundary. As a result, the entire insulation material 20 is shaped into the cylindrical shape shown in Figure 2.

[0039] As the insulation material 20, a commercially available glass fiber mat, for example, the product name "SGM Super Glass Mat" from Yamato Riken Kogyo Co., Ltd., will be used. The product name "SGM Super Glass Mat" is a needle-punched felt made from glass fiber and has a heat resistance of 650°C, which is a safe operating temperature.

[0040] 4. Heater fabric Figure 7 shows the heater fabric 30 in its unfolded state. The outer shape of the heater fabric 30 is a roughly rectangular shape with an area slightly smaller than that of the outer fabric 10 and the insulation material 20. The aforementioned cleavage lines 31a and openings 32 are formed at four locations on the heater fabric 30. In Figure 7, straight fold lines 31b extending horizontally are formed at the 1 / 4, 2 / 4, and 3 / 4 positions of the heater fabric 30 in the vertical direction. Each 1 / 4 portion of the heater fabric 30 is bent inward in a 1 / 4 arc shape, with each fold line 31b as the boundary. As a result, the entire heater fabric 30 is shaped into the cylindrical shape shown in Figure 2.

[0041] The heater fabric 30 uses commercially available glass cloth, for example, product number "A335K105H" manufactured by Unitika Glass Fiber Co., Ltd. As shown in Figure 3, the insulation material 20 and the heater fabric 30 differ significantly in thickness. The heater fabric 30 is in the form of a thin sheet in order to transfer the heat from the heater wire 5 (described later) to the pipe, which is the object to be heated.

[0042] 5. Heater wire As shown in Figure 7, heating wires 60 are arranged on the surface of the heating fabric 30 in a predetermined pattern. The pattern drawn by the heating wires 60 is determined based on thermal analysis to ensure uniform heating of the object to be heated. On the surface of the heating fabric 30, the heating wires 60 have areas of high density and areas of low density. For example, the density of the heating wires 60 is increased in areas of the object to be heated that easily dissipate heat. Conversely, the density of the heating wires 60 is decreased in areas of the object to be heated that easily heat up.

[0043] The surface of the heater fabric 30 is printed with the pattern shown in Figure 7. The heater wire 60 is arranged along the pattern printed on the surface of the heater fabric 30. For example, the heater wire 60 is arranged from the left half to the right half of the surface of the heater fabric 30 in Figure 7. Specifically, two heater insertion holes 33a and 33b are formed below the center on the left side of the heater fabric 30. Two heater insertion holes 33c and 33d are formed below the center on the right side of the heater fabric 30. First, one end of the heater wire 60 is inserted into the heater insertion hole 33a from the back side of the heater fabric 30. Next, the heater wire 60 is arranged along the pattern printed on the left half of the heater fabric 30. Next, one end of the heater wire 60 is inserted into the heater insertion hole 33b from the front side of the heater fabric 30. Next, one end of the heater wire 60 is inserted into the heater insertion hole 33c from the back side of the heater fabric 30. Next, the heater wire 60 is positioned along the pattern printed on the right half of the heater fabric 30. Finally, one end of the heater wire 60 is inserted into the heater insertion hole 33d from the surface side of the heater fabric 30.

[0044] The heater wires 60, arranged in a predetermined pattern on the surface of the heater fabric 30, are sewn to the heater fabric 30 using glass fiber sewing thread, rather than the polyimide filament thread described above. Furthermore, on the back side of the heater fabric 30, one end and the other end of the heater wires 60 are electrically connected to the power lead 61 shown in Figure 4.

[0045] For the heater wire 60, for example, NCHW-2 (nickel-chromium electric heating wire type 2) is used. NCHW-2 has a maximum operating temperature of 1000°C, excellent cold workability and corrosion resistance, and sufficient heat resistance and oxidation resistance.

[0046] 6. Temperature sensor As shown in Figure 3, the temperature sensor 70 is placed between the insulation material 20 and the heater fabric 30. The temperature sensor 70 detects the heating temperature of the heater wire 60 and outputs a signal. The user of the jacket heater 1 manages the heating temperature of the heater wire 60 based on the temperature detected by the temperature sensor 70. The temperature sensor 70 is sewn into the heater fabric 30 so as not to interfere with the pattern of the heater wire 60 shown in Figure 7. Glass fiber sewing thread is used to sew the temperature sensor 70 to the heater fabric 30, rather than the polyimide filament thread mentioned above.

[0047] A base metal thermocouple, such as a K-type thermocouple, is used as the temperature sensor 70. A base metal thermocouple is a thermocouple that does not use metals with high melting points such as platinum or rhodium. A K-type thermocouple has a positive leg made of an alloy mainly composed of nickel and chromium (chromel) and a negative leg made of an alloy mainly composed of nickel and aluminum (alumel). The operating temperature range of a K-type thermocouple is -200°C to +1000°C. A K-type thermocouple has a linear relationship between temperature and thermoelectric power, excellent heat resistance and corrosion resistance, and is cheaper than a precious metal thermocouple.

[0048] 7. Inner fabric Figure 8 shows the inner fabric 40 in its unfolded state. The outer shape of the inner fabric 40 is a roughly rectangular shape with approximately the same area as the heater fabric 30. The inner fabric 40, like the outer fabric 10, is a woven fabric composed of polyimide filament yarn. The aforementioned split lines 41 and openings 42 are formed at four locations on the inner fabric 40. The four sides of the outer edge of the inner fabric 40, the split lines 41 and the openings 42 are all finished by folding back and sewing the edges of the inner fabric 40. Polyimide filament yarn is also used for sewing these edges.

[0049] 8. First cover, second cover, and securing belts The first cover 51, the second cover 52, and the fixing belt 53 shown in Figures 1(a) and (b) are also woven fabrics made of polyimide filament yarn, similar to the outer fabric 10 and the inner fabric 40.

[0050] The four first covers 51 are all rectangular in shape, extending vertically in Figure 1(a). The width of the first covers 51 is approximately the same as the lengths of the cleats 11, 21a, 31a, and 41 shown in Figure 2. The four outer edges of the first covers 51 are finished by folding over and sewing the edges of the fabric. Polyimide filament thread is also used for sewing these edges.

[0051] One of the second covers 52 is rectangular in shape, extending laterally as shown in Figure 1(b). The total length of the second cover 52 is approximately the same as the length of the joint between one end and the other end of the enclosing body 1A shown in Figure 2. All four sides of the outer edge of the second cover 52 are finished by folding back the edges of the fabric and sewing them together. Polyimide filament thread is also used for sewing these edges.

[0052] The four fixing belts 53 are rectangles extending in the circumferential direction of the enclosing body 1A, as shown in Figures 1(a) and (b). The total length of the fixing belts 53 exceeds the circumference of the enclosing body 1A. All four sides of the outer edge of the fixing belts 53 are finished by folding back the edges of the fabric and sewing them together. Polyimide filament thread is also used for sewing these finished edges. A pair of male and female snap buttons 53a are provided at one end and the other end of the fixing belts 53.

[0053] 9. Effects of Jacket Heaters As described above, the outer fabric 10 and inner fabric 40 of the jacket heater 1 of this embodiment are woven fabrics composed of polyimide filament yarns. Since the hundreds to thousands of polyimide filaments that make up a single polyimide filament yarn are all long fibers, they do not generate fiber debris unless they are damaged, and have extremely low dust generation properties. Furthermore, the polyimide resin, which is the raw material for the polyimide filaments, has high heat resistance of 300°C or higher. Therefore, the jacket heater 1 of this embodiment can heat the object to be heated to a high temperature of 300°C or higher, and is suitable for heating the exhaust piping of semiconductor manufacturing equipment installed in a clean room.

[0054] 10. Embodiment of a thermal jacket By omitting the heater fabric 30 and heater wire 60 from the jacket heater 1 of this embodiment described above, it is possible to construct a heat-insulating jacket for keeping an object warm. Whether or not to omit the temperature sensor 70 from the heat-insulating jacket can be arbitrarily selected. Since this heat-insulating jacket of this embodiment is equipped with the same outer fabric 10, insulation material 20, and inner fabric 40 as the jacket heater 1, it has extremely high heat resistance exceeding 300°C, does not generate fiber debris unless damaged, and has extremely low dust generation. [Explanation of Symbols]

[0055] 1. Jacket heater 1A Encirclement 10 Outer fabric 11 secant line 12 aperture 13 Wiring outlet 20 Insulation 21a secant line 21b Fold line 22 Aperture 23 Wiring outlet 30 Heater fabric 31a secant line 31b Crease line 32 Aperture 33a, 33b, 33c, 33d Heater insertion holes 40 Inner fabric 41 secant line 42 Aperture 51 Cover 1 52. Second cover 53. Fixing belt 53a Snap button 60 Heater wires 61 Power Leads 62 Power terminal 70 Temperature Sensor 71 Signal Lead 72 signal terminals 80 Braided Tubes

Claims

1. A jacket heater capable of covering the surface of an object to be heated and heating the object to a high temperature of 300°C or higher, The device comprises an outer fabric, an insulating material, a heater fabric, and an inner fabric, which are layered from the outside to the inside, with heater wires arranged between the insulating material and the heater fabric in a predetermined pattern, and each of the outer fabric, the insulating material, the heater fabric, and the inner fabric having an outer shape suitable for covering the surface of the object to be heated. The jacket heater is characterized in that each of the outer fabric and the inner fabric is a woven fabric composed of filament yarn made by twisting together a plurality of long fibers made from polyimide resin, and the seams of each of the outer fabric and the inner fabric are also sewn together with the filament yarn.

2. The jacket heater according to claim 1, wherein the heating wire is sewn into the heating fabric in a predetermined pattern.

3. Each of the outer fabric, the insulating material, the heater fabric, and the inner fabric is provided with at least one opening for passing a portion that protrudes from the surface of the object to be heated, and at least one cleavage line extending from each end of the outer fabric, the insulating material, the heater fabric, and the inner fabric to the opening. The openings and cut lines formed in the outer fabric, the insulation material, the heater fabric, and the inner fabric, respectively, overlap in the thickness direction of the jacket heater. The jacket heater according to claim 1, comprising at least one first cover that covers the cut line from the outside, wherein the first cover is a woven fabric made of filament yarn, and the seams of the first cover are also sewn together with filament yarn.

4. The jacket heater according to claim 3, further comprising at least one second cover that covers the joint between one end and the other end of the jacket heater from the outside, wherein the second cover is a woven fabric made of filament yarn, and the seams of the second cover are also sewn together with filament yarn.

5. The jacket heater according to claim 4, comprising: the jacket heater covering the surface of the object to be heated; the first cover covering the cut line from the outside; and the second cover covering the joint between one end and the other end of the jacket heater from the outside, wherein the fixing belt is a woven fabric made of filament yarn, and the sewing portion of the fixing belt is also sewn with filament yarn.

6. The jacket heater according to claim 1, further comprising a temperature sensor disposed between the insulating material and the heater fabric.

7. The jacket heater according to any one of claims 1 to 6, wherein the object to be heated is a cylindrical pipe, the outer shape of the outer fabric, the insulating material, the heater fabric, and the inner fabric are all substantially rectangular, and the object to be heated is heated to 250°C or higher by covering the surface of the object to be heated.

8. An insulating jacket capable of insulating the surface of an object to be insulated, The structure comprises an outer fabric, an insulating material, and an inner fabric, which are layered from the outside to the inside, and each of the outer fabric, the insulating material, and the inner fabric has an outer shape suitable for covering the surface of the object to be insulated. The thermal jacket is characterized in that the outer fabric and the inner fabric are each woven from filament yarn made by twisting together multiple long fibers made from polyimide resin, and the seams of the outer fabric and the inner fabric are also sewn together with the filament yarn.

Images