Laser irradiation point adjustment device, laser processing device, and laser irradiation point adjustment method

Abstract

The present invention provides a laser irradiation point adjustment device that can irradiate a workpiece positioned on one side of a partition wall with a laser beam spot that is narrowed to a small size from the other side. [Solution] An opening is provided in the partition wall. A first rod and a second rod are inserted from a first space on one side of the partition wall through the opening to a second space on the other side. The first rod and the second rod have mounting portions in the portion within the second space to which an optical head that emits laser light is attached. A support mechanism supports the first rod and the second rod in the partition wall. The support mechanism supports the first rod so that it can move in the axial direction, and the first rod, the second rod, and the optical head attached to the mounting portion are configured such that when the first rod is moved in the axial direction, the orientation of the optical head attached to the mounting portion changes.

Description

Technical Field

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[0001] The present invention relates to a laser irradiation point adjustment device, a laser processing device, and a laser irradiation point adjustment method.

Background Art

[0002] A technique of irradiating a workpiece with laser light in a vacuum or a predetermined gas atmosphere to perform laser processing such as annealing is known (Patent Document 1). In such a laser irradiation point adjustment device, an optical system for laser irradiation is arranged outside a vacuum chamber that houses the workpiece. [[ID=I4]]

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a conventional laser irradiation point adjustment device, it is necessary to condense laser light with a long-focus lens from an optical system arranged outside the vacuum chamber. However, it is difficult to narrow down the beam spot with a long-focus lens. Further, the same difficulty occurs not only in the case of a vacuum chamber but also when irradiating a workpiece arranged on one side of a partition wall with laser light from the other side of the partition wall.

[0005] An object of the present invention is to provide a laser irradiation point adjustment device, a laser processing device, and a laser irradiation point adjustment method capable of irradiating a workpiece arranged on one side of a partition wall with a laser beam spot narrowed down from the other side. <T000029>

Means for Solving the Problems

[0006] According to one aspect of the present invention, [[ID=4T]] [[ID=TI]]A partition wall provided with an opening, and A first rod and a second rod are inserted from a first space on one side of the partition wall through the opening to a second space on the other side, and the portion of the second space has a mounting portion to which an optical head that outputs laser light is attached. A support mechanism that supports the first rod and the second rod in the partition wall Equipped with, A laser irradiation point adjustment device is provided, wherein the support mechanism supports the first rod so as to be movable in the axial direction, and the first rod, the second rod, and the optical head attached to the mounting portion are configured such that when the first rod is moved in the axial direction, the orientation of the optical head attached to the mounting portion changes.

[0007] According to another aspect of the present invention, The laser irradiation point adjustment device, An optical head that is attached to the mounting portion of the first rod and the second rod and outputs laser light, The aforementioned partition wall is made into a single wall surface, the second space is defined inside, and a chamber for housing the workpiece is located in the second space. A laser processing apparatus equipped with [a specific feature] is provided.

[0008] According to yet another aspect of the present invention, A first rod and a second rod that enter from a first space on one side of the partition wall through an opening in the partition wall to a second space on the other side, An optical head that emits laser light is attached to the ends of the first rod and the second rod in the second space, A support mechanism that supports the first rod and the second rod in the partition wall A laser irradiation point adjustment method is provided, which involves moving the first rod of a laser irradiation point adjustment device equipped with the first rod in the axial direction to adjust the orientation of the optical head. [Effects of the Invention]

[0009] The optical head can be brought closer to the workpiece in the second space. This makes it possible to use a lens with a short focal length to focus the laser beam. As a result, the beam spot can be narrowed to a smaller size. [Brief explanation of the drawing]

[0010] [Figure 1] Figures 1A and 1B are schematic front views of a laser irradiation point adjustment device according to the first embodiment. [Figure 2] Figure 2 is a schematic front view of the support mechanism 11 of the laser irradiation point adjustment device according to the first embodiment. [Figure 3] Figure 3 is a schematic cross-sectional view of the optical head 20 of the laser irradiation point adjustment device according to the first embodiment. [Figure 4] Figure 4 is a flowchart showing the procedure for adjusting the laser irradiation point according to the first embodiment. [Figure 5] Figure 5 is a schematic front view of the support mechanism 11 of the laser irradiation point adjustment device according to a modified example of the first embodiment. [Figure 6] Figure 6 is a schematic front view of the laser irradiation point adjustment device according to the second embodiment. [Figure 7] Figure 7 is a schematic front view of the support mechanism 11 of the laser irradiation point adjustment device according to the second embodiment. [Figure 8] Figures 8A to 8D are schematic diagrams of a four-bar linkage mechanism consisting of a unit base 15, a first rod 10A, a second rod 10B, and an optical head 20. [Figure 9] Figure 9 is a schematic front view of the support mechanism 11 of the laser irradiation point adjustment device according to a modified example of the second embodiment. [Figure 10] Figure 10 is a schematic cross-sectional view of a laser processing apparatus according to the third embodiment. [Modes for carrying out the invention]

[0011] [First Embodiment] The laser irradiation point adjustment device and adjustment method according to the first embodiment will be described with reference to Figures 1 to 3.

[0012] Figures 1A and 1B are schematic front views of a laser irradiation point adjustment device according to the first embodiment. A laser light source 40 is disposed in a space on one side of a partition wall 50 (hereinafter referred to as the first space 61), and a workpiece 60 is disposed in a space on the other side (hereinafter referred to as the second space 62). An opening 50A is provided in the partition wall 50, and a first rod 10A and a second rod 10B are inserted from the first space 61 through the opening 50A to the second space 62. The first rod 10A and the second rod 10B are supported by the partition wall 50 by a support mechanism 11.

[0013] The first rod 10A and the second rod 10B have attachment portions in the portion in the second space 62 where an optical head 20 is attached. Each attachment portion of the first rod 10A and the second rod 10B includes, for example, joints 26A and 26B. Laser light is transmitted from the laser light source 40 to the optical head 20 via a laser transmission fiber 41. The optical head 20 outputs laser light 42. The optical head 20 includes a lens barrel 21 and a support plate 22. The configuration of the optical head 20 will be described in detail later with reference to FIG. 3.

[0014] Next, the configuration of the support mechanism 11 will be described with reference to FIG. 2. FIG. 2 is a schematic front view of the support mechanism 11 of the laser irradiation point adjustment device according to the first embodiment.

[0015] A support block 16 is fixed to the surface of the partition wall 50 on the first space 61 side via a unit base 15. The first rod 10A is supported by a linear guide 13A so as to be movable in the axial direction. A linear motion mechanism (actuator) 12A moves the first rod 10A in the axial direction under the control from a control device 45. The linear guide 13A is supported by the support block 16 via a rotating shaft 14A so as to be rotationally displaceable.

[0016] The first rod 10A is rotatably displaceable relative to the support block 16 with the rotation axis 14A as the center of rotation, and is also movable in the axial direction. The second rod 10B is fixed to the support block 16. The first rod 10A and the second rod 10B are arranged on a common virtual plane (the plane of paper in Figure 2), and the first rod 10A rotates along this virtual plane.

[0017] As shown in Figure 1A, a four-bar linkage mechanism is formed by the first rod 10A, the second rod 10B, the support block 16, and the optical head 20. The first rod 10A and the optical head 20 are connected by a joint 26A, so the angle between them is variable. Similarly, the second rod 10B and the optical head 20 are connected by a joint 26B, so the angle between them is also variable. When the support mechanism 11 moves the first rod 10A in the axial direction, the four-bar linkage mechanism deforms, and the posture of the optical head 20 changes.

[0018] Figure 1B shows the state in which the first rod 10A has been moved towards the second space 62 compared to the state shown in Figure 1A. As the first rod 10A moves, the orientation of the optical head 20 changes. This changes the direction of propagation of the laser light 42 and the position of the beam waist. When the first rod 10A is moved axially, the first rod 10A is rotated by a small angle.

[0019] Next, the configuration of the optical head 20 will be described with reference to Figure 3. Figure 3 is a schematic cross-sectional view of the optical head 20 of the laser irradiation point adjustment device according to the first embodiment.

[0020] The ends of the first rod 10A and the second rod 10B within the second space 62 (Figure 1A) are attached to the support plate 22 via joints 26A and 26B, respectively. The lens barrel 21 is fixed to the support plate 22. A collimating lens 23, a focusing lens 24, and a protective window 25 are fixed inside the lens barrel 21. The laser light output from the output end of the laser transmission fiber 41 is collimated by the collimating lens 23. The collimated laser light is focused by the focusing lens 24 and passes through the protective window 25 to be output to the outside as laser light 42. The protective window 25 protects the focusing lens 24 from flying debris generated during processing.

[0021] Next, the laser irradiation point adjustment method according to the first embodiment will be described with reference to Figure 4. Figure 4 is a flowchart showing the procedure for the laser irradiation point adjustment method according to the first embodiment.

[0022] First, the workpiece 60 (Figure 1A) is placed in a predetermined position within the second space 62 (Step S1). Next, the control device 45 moves the first rod 10A in the axial direction to change the orientation of the optical head 20, thereby adjusting the position of the irradiation point of the laser beam 42 (Figures 1A and 1B) (Step S2). For example, the position on the workpiece 60 where the laser beam should be irradiated is predetermined, and the orientation of the optical head 20 is adjusted so that the laser beam 42 is irradiated at that position.

[0023] After adjusting the orientation of the optical head 20, the control device 45 controls the laser light source 40 (Figures 1A and 1B) to output laser light (step S3).

[0024] The position to which the laser light should be irradiated is pre-set in the memory of the control device 45. The control device 45 drives the linear motion mechanism 12A based on the position set in the memory. The control device 45 realizes these functions by executing a program stored in the memory.

[0025] Next, we will describe the excellent effects of the first embodiment. The irradiation position of the laser beam 42 can be adjusted by moving the first rod 10A in the axial direction. Furthermore, since the focus lens 24 (Figure 3) is located in the same second space 62 as the workpiece 60, the focal length of the focus lens 24 is shorter compared to a configuration in which the focus lens 24 is placed in the first space 61. This makes it possible to narrow the beam spot to a smaller size.

[0026] Furthermore, since the first space 61, where the linear motion mechanism 12A, which is an actuator for changing the posture of the optical head 20, is located, and the second space 62, where the workpiece 60 is located, are separated by a partition wall 50, the effects of dust generation caused by the operation of the linear motion mechanism 12A are reduced.

[0027] Next, a modified version of the laser irradiation point adjustment device according to the first embodiment will be described with reference to Figure 5. Figure 5 is a schematic front view of the support mechanism 11 of the laser irradiation point adjustment device according to the modified version of the first embodiment. In the first embodiment, the control device 45 drives the linear motion mechanism 12A (Figure 1A) to move the first rod 10A in the axial direction. In the modified version shown in Figure 5, the user manually moves the first rod 10A in the axial direction.

[0028] The linear motion mechanism 12A of the laser irradiation point adjustment device in this modified version includes a nut holder 12AB, a knurled nut 12AA, and a screw 12AC. When the user rotates the knurled nut 12AA, the screw 12AC and the first rod 10A move axially according to the amount of rotation. After moving the first rod 10A, it is possible to temporarily fix its position with a stopper.

[0029] As in this modified example, the user may manually move the first rod 10A in the axial direction.

[0030] [Second Example] Next, a laser irradiation point adjustment device according to the second embodiment will be described with reference to Figures 6 to 8. The following description will omit details of components common to the laser irradiation point adjustment device according to the first embodiment, which was described with reference to Figures 1A to 4.

[0031] Figure 6 is a schematic front view of a laser irradiation point adjustment device according to the second embodiment. In the first embodiment, the second rod 10B (Figure 1A) is fixed to the support block 16. In contrast, in the second embodiment, the second rod 10B is supported in the same way as the first rod 10A, so as to be rotatably displaceable and axially movable relative to the support block 16.

[0032] Next, the configuration of the support mechanism 11 will be described with reference to Figure 7. Figure 7 is a schematic front view of the support mechanism 11 of the laser irradiation point adjustment device according to the second embodiment. The configuration of the first rod 10A, the linear guide 13A, the rotating shaft 14A, and the linear mechanism 12A is the same as those of the first embodiment (Figure 3).

[0033] In the second embodiment, the second rod 10B is also supported by the linear guide 13B so as to be movable in the axial direction, and the linear guide 13B is supported by the rotating shaft 14B so as to be rotatably displaceable on the support block 16. The linear mechanism 12B moves the second rod 10B in the axial direction under control from the control device 45.

[0034] Furthermore, the rotating mechanism 17, under control from the control device 45, displaces the linear guide 13B and the second rod 10B in the rotational direction with the rotation axis 14B as the center of rotation. For example, an electric motor is used as the rotating mechanism 17. When the second rod 10B is displaced by rotation, the first rod 10A is also displaced by rotation in accordance with the rotational displacement of the second rod 10B.

[0035] Next, with reference to Figures 8A to 8D, the displacement patterns of the first rod 10A, the second rod 10B, and the optical head 20 will be described. Figures 8A to 8D are schematic diagrams of a four-bar linkage mechanism consisting of a unit base 15, the first rod 10A, the second rod 10B, and the optical head 20. The direction of emission of laser light 42 from the optical head 20 is indicated by an arrow. The length L1 of the first rod 10A, the length L2 of the second rod 10B, and the angle α between the second rod 10B and the unit base 15 can be changed. The state shown in Figure 8A is considered the reference state, and the states when each displacement element is displaced will be described. In Figures 8B to 8D, the state in Figure 8A is shown by a dashed line.

[0036] Figure 8B is a schematic diagram showing the state in which the second rod 10B is displaced in the rotational direction so that the angle α becomes smaller. The first rod 10A is also displaced in the rotational direction in accordance with the rotational displacement of the second rod 10B. As a result, the position and orientation of the optical head 20 change, and the direction of emission of the laser beam 42 changes.

[0037] Figure 8C shows the state in which the second rod 10B has been moved towards the optical head 20 from the state in Figure 8A, and Figure 8D is a schematic diagram showing the state in which the first rod 10A has been moved towards the optical head 20 from the state in Figure 8A. As shown in Figures 8C and 8D, when the second rod 10B or the first rod 10A is moved axially, the orientation of the optical head 20 changes, and the direction of emission of the laser light 42 changes.

[0038] Next, we will describe the excellent effects of the second embodiment. In the second embodiment, as in the first embodiment, it becomes possible to narrow the beam spot to a smaller size. In addition, the effects of dust generation caused by the operation of the linear motion mechanisms 12A and 12B and the rotary mechanism 17 are reduced.

[0039] Furthermore, in the second embodiment, the range in which the movement and orientation of the optical head 20 can be adjusted is wider compared to the first embodiment. Therefore, it is possible to respond more flexibly to the processing conditions required for the workpiece 60.

[0040] Next, a modified laser irradiation point adjustment device according to the second embodiment will be described with reference to Figure 9. Figure 9 is a schematic front view of the support mechanism 11 of the laser irradiation point adjustment device according to the modified second embodiment. In the second embodiment (Figure 7), the control device 45 changes the position and orientation of the optical head 20 by controlling the linear motion mechanisms 12A, 12B and the rotation mechanism 17, but in the modified embodiment shown in Figure 9, the position and orientation of the optical head 20 are changed by manual operation by the user.

[0041] As shown in Figure 9, the linear motion mechanism 12A consists of a nut holder 12AB, a knurled nut 12AA, and a screw 12AC, similar to the modified example of the first embodiment shown in Figure 5. Similarly, the linear motion mechanism 12B for the second rod 10B also consists of a nut holder 12BB, a knurled nut 12BA, and a screw 12BC. The user can move the first rod 10A and the second rod 10B axially by rotating the knurled nuts 12AA and 12BA. After moving the first rod 10A and the second rod 10B, their positions can be temporarily fixed with stoppers.

[0042] The rotating mechanism 17 includes a manually operable handle, which the user rotates to displace the linear guide 13B and the second rod 10B in the rotational direction. After rotational displacement, the position can be temporarily fixed with a stopper.

[0043] Next, a laser irradiation point adjustment device according to another modification of the second embodiment will be described. In the second embodiment, a first rod 10A and a second rod 10B are provided, but a third rod may also be provided. The third rod, like the first rod 10A and the second rod 10B, is inserted from the first space 61 through the opening 50A to the second space 62, and its end in the second space 62 is attached to the optical head 20. The third rod is also supported by a support mechanism 11 so as to be movable in the axial direction and rotatably displaceable.

[0044] In the first and second embodiments, the first rod 10A and the second rod 10B are displaced in a rotational direction along a common virtual plane, but in this modified example, the first rod 10A, the second rod 10B, and the third rod can be displaced in any direction. These rods are connected to the optical head 20 via ball joints. This increases the degree of freedom for changing the position and orientation of the optical head 20.

[0045] [Third Embodiment] Next, a laser processing apparatus according to the third embodiment will be described with reference to Figure 10. The following description will omit details of components common to the laser irradiation point adjustment apparatus according to the second embodiment, which was described with reference to Figures 6 to 8D.

[0046] Figure 10 is a schematic cross-sectional view of a laser processing apparatus according to the third embodiment. In the second embodiment (Figure 6), the first space 61 where the actuator of the support mechanism 11 is located and the second space 62 where the workpiece 60 is located are separated by a partition wall 50. In contrast, in the third embodiment, the workpiece 60 is housed in a vacuum chamber 55. The top plate of the vacuum chamber 55 corresponds to the partition wall 50 in the second embodiment, the space inside the vacuum chamber 55 corresponds to the second space 62, and the space outside the vacuum chamber 55 corresponds to the first space 61.

[0047] The vacuum bellows 56 is positioned within the vacuum chamber 55 to surround the first rod 10A, the second rod 10B, and the laser transmission fiber 41. One end of the vacuum bellows 56 is connected to the support plate 22, and the other end is connected to the unit base 15. The vacuum bellows 56 maintains the vacuum within the vacuum chamber 55. To maintain the vacuum, the contact points of each component are sealed with O-rings.

[0048] Next, we will describe the excellent effects of the third embodiment. In the third embodiment, as in the second embodiment, it is possible to narrow the beam spot, and the effects of dust generation caused by the operation of the linear motion mechanisms 12A and 12B and the rotary mechanism 17 are reduced. Note that the space inside the vacuum chamber 55 does not necessarily need to be a vacuum; it may be filled with a predetermined gas.

[0049] The embodiments described above are illustrative, and it goes without saying that partial substitution or combination of the configurations shown in different embodiments is possible. Similar effects and benefits from similar configurations in multiple embodiments will not be mentioned sequentially for each embodiment. Furthermore, the present invention is not limited to the embodiments described above. For example, it will be obvious to those skilled in the art that various modifications, improvements, and combinations are possible. [Explanation of Symbols]

[0050] 10A First Rod 10B 2nd Rod 11 Support mechanism 12A, 12B Linear motion mechanism 12AA, 12BA knurled nuts 12AB, 12BB Nut Holder 12AC, 12BC screws 13A, 13B Linear Guide 14A, 14B Rotation axis 15 Unit Base 16 Support Blocks 17 Rotation mechanism 20 Optical Heads 21 Telescope Tubes 22 Support plate 23 Collimating lenses 24 Focus Lens 25 Protective Window 26A, 26B joint 40 Laser light sources 41 Laser transmission fiber 42 Laser light 45 Control device 50 Bulkhead 50A aperture 55 Vacuum Chamber 56 Vacuum ベローズ 60 Workpieces 61 First Space 62 Second Space

Claims

1. A partition wall with an opening, A first rod and a second rod are inserted from a first space on one side of the partition wall through the opening to a second space on the other side, and the portion of the second space has a mounting portion to which an optical head that outputs laser light is attached. A support mechanism that supports the first rod and the second rod in the partition wall Equipped with, The support mechanism supports the first rod so that it can move in the axial direction, and the first rod, the second rod, and the optical head attached to the mounting portion are configured such that when the first rod is moved in the axial direction, the orientation of the optical head attached to the mounting portion changes, in the laser irradiation point adjustment device.

2. The laser irradiation point adjustment device according to claim 1, wherein the support mechanism supports the first rod and the second rod so as to be rotatably displaceable.

3. The laser irradiation point adjustment device according to claim 1 or 2, wherein the support mechanism supports the second rod so as to be movable in the axial direction.

4. Furthermore, it comprises a third rod inserted from the first space through the opening to the second space, with its end in the second space attached to the optical head, The laser irradiation point adjustment device according to claim 1 or 2, wherein the third rod is supported by the support mechanism so as to be movable in the axial direction.

5. Furthermore, the laser irradiation point adjustment device according to claim 1 or 2, further comprising an actuator for moving the first rod in the axial direction.

6. A laser irradiation point adjustment device according to claim 1 or 2, An optical head that is attached to the mounting portion of the first rod and the second rod and outputs laser light, The aforementioned partition wall is made into a single wall surface, the second space is defined inside, and a chamber for housing the workpiece is located in the second space. A laser processing device equipped with laser processing equipment.

7. A first rod and a second rod that enter from a first space on one side of the partition wall through an opening in the partition wall to a second space on the other side, An optical head that emits laser light is attached to the ends of the first rod and the second rod in the second space, A support mechanism that supports the first rod and the second rod in the partition wall A laser irradiation point adjustment method for adjusting the orientation of the optical head by moving the first rod in the axial direction of a laser irradiation point adjustment device equipped with the above.

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