sensor
The sensor design with temperature-stabilized detection units addresses accuracy and stability issues by monitoring capacitance changes to achieve precise gas detection.
JP2026055183APending Publication Date: 2026-03-31KK TOSHIBA
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2024-09-18
- Publication Date
- 2026-03-31
AI Technical Summary
Technical Problem
Existing sensors face challenges in achieving highly accurate and stable detection, particularly in environments where temperature fluctuations affect sensor performance.
Method used
A sensor design incorporating a substrate with specific regions and detection units, including electrodes, temperature detection elements, and conductive members, where the overlap and capacitance changes are monitored to detect gas presence and concentration, with a control unit maintaining constant temperature to minimize temperature-induced distortions.
Benefits of technology
Enables high-precision detection of gas presence and concentration by stabilizing temperature fluctuations, enhancing detection sensitivity and accuracy.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure 2026055183000001_ABST
Abstract
We provide sensors capable of high-precision detection. [Solution] The sensor of the embodiment comprises a substrate including a first substrate region and a first detection unit, the first substrate region includes a first region and a second region, the first detection unit includes a first electrode fixed to the first region, a first temperature detection element fixed to the second region, a first fixed part fixed to the second region, a first support part connected to the first fixed part, and a first movable part supported by the first support part, the first support part includes a first layer and a first conductive member, the first movable part includes a second electrode, a first gap is provided between the first electrode and the first movable part, and in a first direction from the second region to the first support part, at least a part of the first temperature detection element overlaps with the first conductive member.
Need to check novelty before this filing date? Find Prior Art
Citation Information
Patent Citations
Hydrogen sensor, hydrogen detection method, and program
JP2020041893A